Semiconductor Device

Abstract

A first semiconductor element according to one embodiment of the present disclosure includes an element substrate having an element region in which a wiring layer and a first semiconductor layer including a compound semiconductor material are stacked, and a peripheral region outside the element region; a readout circuit substrate facing the first semiconductor layer across the wiring layer and electrically connected to the first semiconductor layer via the wiring layer; a first electrode provided on the wiring layer and electrically connected to the first semiconductor layer; a second electrode facing the first electrode across the first semiconductor layer; and an insulating layer provided on the second electrode and having non-reducing properties.

Description

[Technical field]

[0001] The present disclosure relates to a semiconductor element used in, for example, an infrared sensor. [Background technology]

[0002] In recent years, image sensors (infrared sensors) having sensitivity in the infrared region have been commercialized. For example, as described in Patent Document 1, the semiconductor element used in this infrared sensor uses a photoelectric conversion layer including a III-V group semiconductor such as InGaAs (indium gallium arsenide), and in this photoelectric conversion layer, infrared rays are absorbed to generate electric charges (photoelectric conversion is performed).

[0003] In Patent Document 1, InGaAs epitaxially grown on a growth substrate made of InP (indium phosphide) is used as a photoelectric conversion layer. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Special Publication No. 2014-521216 Summary of the Invention

[0005] However, in such semiconductor devices, there is a demand for improving the manufacturing yield.

[0006] It is desirable to provide semiconductor devices that allow for improved manufacturing yields.

[0007] A semiconductor device according to an embodiment of the present disclosure includes an element substrate having an element region in which a wiring layer and a first semiconductor layer including a compound semiconductor material are laminated, and a peripheral region outside the element region; a readout circuit substrate facing the first semiconductor layer with the wiring layer therebetween and electrically connected to the first semiconductor layer via the wiring layer; a first electrode provided on the wiring layer and electrically connected to the first semiconductor layer; and a second electrode facing the first electrode with the first semiconductor layer therebetween; Acid film formed without using reducing gas Monster (M x O y ), nitrides (M x N y ) and oxynitrides (M x O y N z ) with 2.0g / cm 3 More than 8.0g / cm 3 The film density of the element region is as follows: The first passivation film and the silicon nitride (SiN) and aluminum oxide (Al 2 O 3 ), silicon oxide (SiO 2 ) and tantalum oxide (Ta 2 O 3 ) The semiconductor device is provided over the element region and the peripheral region. The second passivation film and the second electrode On top and an insulating layer laminated in this order. (M is any one of silicon (Si), titanium (Ti), hafnium (Hf), zirconium (Zr), and yttrium (Y). x, y, and z are integers of 1 or more.)

[0008] In a semiconductor device according to an embodiment of the present disclosure, Acid film formed without using reducing gas Monster (M x O y ), nitrides (M x N y ) and oxynitrides (M x O y N z ) with 2.0g / cm 3 More than 8.0g / cm 3 The film density of the element region is as follows:The first passivation film and the silicon nitride (SiN) and aluminum oxide (Al 2 O 3 ), silicon oxide (SiO 2 ) and tantalum oxide (Ta 2 O 3 ) The semiconductor device is provided over the element region and the peripheral region. A second passivation film and on a second electrode having optical transparency. The insulating layers are laminated in this order, which improves adhesion between the second electrode and the insulating layer. [Brief description of the drawings]

[0013] [Figure 1] 1 is a schematic cross-sectional view illustrating an example of a configuration of a light receiving element according to a first embodiment of the present disclosure. [Diagram 2] 2 is a schematic plan view illustrating a schematic configuration of the entire light receiving element illustrated in FIG. [Diagram 3] 4 is a schematic cross-sectional view illustrating another example of the configuration of the light receiving element according to the first embodiment of the present disclosure. FIG. [Figure 4] 4 is a schematic cross-sectional view illustrating another example of the configuration of the light receiving element shown in FIG. 3. [Diagram 5] 4 is a schematic cross-sectional view illustrating another example of the configuration of the light receiving element according to the first embodiment of the present disclosure. FIG. [Figure 6] 4 is a schematic cross-sectional view illustrating another example of the configuration of the light receiving element according to the first embodiment of the present disclosure. FIG. [Figure 7A] 2 is a schematic cross-sectional view illustrating one step of a method for manufacturing the light-receiving element shown in FIG. [Figure 7B] FIG. 7B is a schematic cross-sectional view showing a step subsequent to FIG. 7A. [Figure 7C] FIG. 7C is a schematic cross-sectional view showing a step subsequent to FIG. 7B. [Figure 8] FIG. 7D is a schematic plan view illustrating an example of the step of FIG. 7C. [Figure 9] 9 is a schematic plan view illustrating another example (1) of the configuration of the semiconductor layer shown in FIG. 8. FIG. [Figure 10A] 9 is a schematic plan view illustrating another example (2) of the configuration of the semiconductor layer shown in FIG. 8. FIG. [Figure 10B]10B is a schematic diagram illustrating a cross-sectional configuration taken along line BB shown in FIG. 10A. [Figure 11A] FIG. 7D is a schematic cross-sectional view showing a step subsequent to FIG. 7C. [Figure 11B] FIG. 11B is a schematic cross-sectional view showing a step subsequent to FIG. 11A. [Figure 12A] 11B is a schematic diagram illustrating an example of a planar configuration of the step illustrated in FIG. 11A. [Figure 12B] 11C is a schematic diagram illustrating an example of a planar configuration of the step illustrated in FIG. 11B. [Figure 13A] FIG. 11B is a schematic diagram showing another example (1) of a planar configuration of the step shown in FIG. 11A. [Figure 13B] FIG. 11C is a schematic diagram illustrating another example (1) of a planar configuration of the step illustrated in FIG. 11B. [Figure 14A] FIG. 11B is a schematic diagram showing another example (2) of a planar configuration of the step shown in FIG. 11A. [Figure 14B] FIG. 11C is a schematic diagram illustrating another example (2) of a planar configuration of the step illustrated in FIG. 11B. [Figure 15] FIG. 11C is a schematic cross-sectional view illustrating another example (1) of the step shown in FIG. 11B. [Figure 16] FIG. 11C is a schematic cross-sectional view illustrating another example (2) of the step shown in FIG. 11B. [Figure 17A] FIG. 11C is a schematic cross-sectional view showing a step subsequent to FIG. 11B. [Figure 17B] FIG. 17B is a schematic cross-sectional view showing a step subsequent to FIG. 17A. [Figure 17C] FIG. 17C is a schematic cross-sectional view showing a step subsequent to FIG. 17B. [Figure 17D] FIG. 17D is a schematic cross-sectional view showing a step following FIG. 17C. [Figure 17E] FIG. 17B is a schematic cross-sectional view showing the step following FIG. 17D. [Figure 17F] FIG. 17B is a schematic cross-sectional view showing the step following FIG. 17E. [Figure 17G] FIG. 17B is a schematic cross-sectional view showing the step following FIG. 17F. [Figure 17H] FIG. 17B is a schematic cross-sectional view showing the step following FIG. 17G. [Figure 17I] FIG. 17C is a schematic cross-sectional view showing the step following FIG. 17H. [Figure 17J] FIG. 17I is a schematic cross-sectional view showing a step following FIG. 17I. [Figure 18] 11 is a schematic cross-sectional view illustrating a configuration of a light-receiving element according to a second embodiment of the present disclosure. FIG. [Figure 19] FIG. 2 is a characteristic diagram showing the relationship between wavelength and transmittance for each metal. [Figure 20] FIG. 1 is a characteristic diagram showing the relationship between wavelength and reflectance for various conductive films. [Figure 21] FIG. 1 is a characteristic diagram showing the relationship between the thickness of various conductive films and the amount of warping of a Si substrate. [Figure 22] 13 is a schematic cross-sectional view illustrating an example of a configuration of a light receiving element according to a third embodiment of the present disclosure. FIG. [Figure 23] 13 is a schematic cross-sectional view illustrating another example of the configuration of the light receiving element according to the third embodiment of the present disclosure. FIG. [Figure 24] 13 is a schematic cross-sectional view illustrating another example of the configuration of the light receiving element according to the third embodiment of the present disclosure. FIG. [Diagram 25] 13 is a schematic cross-sectional view illustrating another example of the configuration of the light receiving element according to the third embodiment of the present disclosure. FIG. [Figure 26] 11 is a schematic cross-sectional view illustrating another example of the configuration of the light receiving element according to the first modification of the present disclosure. FIG. [Figure 27A] 27 is a schematic cross-sectional view illustrating one step of a method for manufacturing the light-receiving element shown in FIG. 26. [Figure 27B] FIG. 27B is a schematic cross-sectional view showing a step subsequent to FIG. 27A. [Figure 28] FIG. 27C is a schematic cross-sectional view illustrating another example (1) of the step shown in FIG. 27B. [Figure 29] FIG. 27C is a schematic cross-sectional view illustrating another example (2) of the step shown in FIG. 27B. [Figure 30A] FIG. 27C is a schematic cross-sectional view showing a step following FIG. 27B. [Figure 30B] FIG. 30B is a schematic cross-sectional view showing a step subsequent to FIG. 30A. [Diagram 31] 11 is a cross-sectional view illustrating a schematic configuration of a light-receiving element according to a second modified example of the present disclosure. FIG. [Figure 32A]11 is a schematic cross-sectional view illustrating a step of a method for manufacturing a light-receiving element according to a third modified example of the present disclosure. FIG. [Figure 32B] FIG. 32B is a schematic cross-sectional view showing a step subsequent to FIG. 32A. [Figure 32C] FIG. 32C is a schematic cross-sectional view showing a step following FIG. 32B. [Fig. 32D] FIG. 32D is a schematic cross-sectional view showing a step following FIG. 32C. [Figure 32E] FIG. 32E is a schematic cross-sectional view showing a step following FIG. 32D. [Diagram 33] 32B is a schematic cross-sectional view illustrating the configuration of a main part of a light-receiving element completed through a process subsequent to that in FIG. 32E. [Figure 34A] FIG. 32F is an enlarged schematic cross-sectional view (1) of a portion shown in FIG. 32E. [Figure 34B] FIG. 34 is an enlarged schematic cross-sectional view (1) of a portion shown in FIG. 33. [Figure 34C] 34B is a schematic cross-sectional view illustrating another example of the shape of the opening shown in FIG. 34A. FIG. [Figure 35A] FIG. 32F is an enlarged schematic cross-sectional view (2) of a portion shown in FIG. 32E. [Figure 35B] FIG. 34 is a schematic cross-sectional view (2) showing an enlarged portion shown in FIG. 33. [Figure 35C] 35B is a schematic cross-sectional view illustrating another example of the shape of the opening shown in FIG. 35A. FIG. [Figure 36A] FIG. 32C is a schematic cross-sectional view (3) showing an enlarged portion shown in FIG. 32E. [Figure 36B] FIG. 34 is a schematic cross-sectional view (3) showing an enlarged portion shown in FIG. 33. [Figure 36C] 36B is a schematic cross-sectional view illustrating another example of the shape of the opening shown in FIG. 36A. FIG. [Figure 36D] FIG. 32C is a schematic cross-sectional view (4) showing an enlarged portion shown in FIG. 32E. [Figure 37] 11 is a schematic cross-sectional view illustrating an example of a configuration of a light receiving element according to a fourth modified example of the present disclosure. FIG. [Figure 38] 13 is a schematic cross-sectional view illustrating another example of the configuration of the light receiving element according to the fourth modification of the present disclosure. FIG. [Figure 39]13 is a schematic cross-sectional view illustrating an example of a configuration of a light-receiving element according to a fifth modified example of the present disclosure. FIG. [Diagram 40] FIG. 1 is a functional block diagram illustrating an example of an electronic device (camera) using an imaging element. [Diagram 41] 1 is a diagram illustrating an example of a schematic configuration of an endoscopic surgery system. [Diagram 42] 2 is a block diagram showing an example of a functional configuration of a camera head and a CCU. FIG. [Diagram 43] 1 is a block diagram showing an example of a schematic configuration of a vehicle control system; [Diagram 44] 4 is an explanatory diagram showing an example of the installation positions of an outside-vehicle information detection unit and an imaging unit; FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] Hereinafter, the embodiments of the present disclosure will be described in detail with reference to the drawings. The following description is a specific example of the present disclosure, and the present disclosure is not limited to the following embodiment. Furthermore, the present disclosure is not limited to the arrangement, dimensions, dimensional ratios, etc. of each component shown in each drawing. The order of description is as follows. 1. First embodiment (example of a light-receiving element having a non-reducing layer on a second electrode) 1-1. Structure of the light receiving element 1-2. Manufacturing method of light receiving element 1-3. Operation of the light receiving element 1-4. Actions and Effects 2. Second embodiment (example in which a conductive film is formed using a conductive material containing Al) 3. Third embodiment (example in which black resist is formed on conductive film) 4. Variation 1 5. Variation 2 6. Variation 3 7. Variation 4 8. Variation 5 9. Application example 1 (Example of imaging element) 10. Application example 2 (electronic devices) 11. Application example 1 (Application to endoscopic surgery system) 12. Application example 2 (Application to moving objects)

[0015] <1. First embodiment> FIG. 1 is a schematic diagram showing an example of a cross-sectional configuration of a semiconductor element (light receiving element 1) according to a first embodiment of the present disclosure. FIG. 2 is a schematic diagram showing an overall planar configuration of the light receiving element 1 shown in FIG. 1. FIG. 1 shows a cross-sectional configuration taken along line II shown in FIG. 2. The light receiving element 1 is applied to an infrared sensor or the like using a compound semiconductor material such as a III-V group semiconductor, and has a photoelectric conversion function for light having a wavelength in the visible region (e.g., 380 nm or more and less than 780 nm) to the short infrared region (e.g., 780 nm or more and less than 2400 nm). The light receiving element 1 is provided with a plurality of light receiving unit regions (pixels P) arranged, for example, two-dimensionally. FIG. 1 shows a cross-sectional configuration of a portion corresponding to three pixels P.

[0016] (1-1. Structure of the light receiving element) 2, the light receiving element 1 has a central element region R1 and a peripheral region R2 that is provided outside the element region R1 and surrounds the element region R1. The light receiving element 1 has a conductive film 15B that is provided from the element region R1 to the peripheral region R2. The conductive film 15B has an opening in a region that faces the center of the element region R1.

[0017] 1, the light receiving element 1 has a laminated structure of an element substrate 10 and a readout circuit substrate 20. One surface of the element substrate 10 is a light incident surface (light incident surface S1), and the surface opposite to the light incident surface S1 (the other surface) is a bonding surface (bonding surface S2) with the readout circuit substrate 20.

[0018] The element substrate 10 has, in this order from the position closest to the readout circuit substrate 20, a wiring layer 10W, a first electrode 11, a semiconductor layer 10S (first semiconductor layer), a second electrode 15, and passivation films 16A and 16B. The surface of the semiconductor layer 10S facing the wiring layer 10W and the end face (side face) are covered with an insulating film 17. The readout circuit substrate 20 is a so-called ROIC (Readout Integrated Circuit), and has a wiring layer 20W and a multi-layer wiring layer 22C in contact with the bonding surface S2 of the element substrate 10, and a semiconductor substrate 21 facing the element substrate 10 with the wiring layer 20W and the multi-layer wiring layer 22C in between.

[0019] The element substrate 10 has a semiconductor layer 10S in the element region R1. In other words, the region where the semiconductor layer 10S is provided is the element region R1 of the light receiving element 1. In the element region R1, a region exposed from the conductive film 15B (a region facing the opening of the conductive film 15B) is the light receiving region. In the element region R1, a region covered with the conductive film 15B near the peripheral region R2 is an OPB (Optical Black) region R1B. The OPB region R1B is provided so as to surround the light receiving region. The OPB region R1B is used to obtain a black level pixel signal. The element substrate 10 has an insulating film 17 and a buried layer 18 in the peripheral region R2. The peripheral region R2 is provided with through holes H1 and H2 that penetrate the element substrate 10 and reach the readout circuit board 20. In the light receiving element 1, light is incident on the semiconductor layer 10S from the light incident surface S1 of the element substrate 10 through the passivation films 16A and 16B, the second electrode 15, and the second contact layer 14. Signal charges photoelectrically converted in the semiconductor layer 10S move through the first electrode 11 and the wiring layer 10W, and are read out by the readout circuit board 20. The configuration of each part will be described below.

[0020] The wiring layer 10W is provided across the element region R1 and the peripheral region R2, and has a bonding surface S2 with the readout circuit board 20. In the light receiving element 1, the bonding surface S2 of the element substrate 10 is provided in the element region R1 and the peripheral region R2, and for example, the bonding surface S2 of the element region R1 and the bonding surface S2 of the peripheral region R2 form the same plane. As will be described later, in the light receiving element 1, the bonding surface S2 of the peripheral region R2 is formed by providing an embedding layer 18.

[0021] The wiring layer 10W has a contact electrode 19E and a dummy electrode 19ED in, for example, interlayer insulating films 19A and 19B. For example, the interlayer insulating film 19B is disposed on the readout circuit board 20 side, and the interlayer insulating film 19A is disposed on the first contact layer 12 side, and these interlayer insulating films 19A and 19B are laminated. The interlayer insulating films 19A and 19B are made of, for example, an inorganic insulating material. Examples of the inorganic insulating material include silicon nitride (SiN), aluminum oxide (Al 2 O 3 ), silicon oxide (SiO 2 ) and hafnium oxide (HfO 2 The interlayer insulating films 19A and 19B may be made of the same inorganic insulating material.

[0022] The contact electrode 19E is provided in, for example, the element region R1. The contact electrode 19E is for electrically connecting the first electrode 11 and the readout circuit board 20, and is provided for each pixel P in the element region R1. The adjacent contact electrodes 19E are electrically separated by the buried layer 18 and the interlayer insulating films 19A and 19B. The contact electrode 19E is formed of, for example, a copper (Cu) pad, and is exposed to the bonding surface S2. The dummy electrode 19ED is provided in, for example, the peripheral region R2. The dummy electrode 19ED is connected to a dummy electrode 22ED of the wiring layer 20W described later. By providing the dummy electrode 19ED and the dummy electrode 22ED, it is possible to improve the strength of the peripheral region R2. The dummy electrode 19ED is formed in, for example, the same process as the contact electrode 19E. The dummy electrode 19ED is formed of, for example, a copper (Cu) pad, and is exposed to the bonding surface S2.

[0023] The first electrode 11 provided between the contact electrode 19E and the semiconductor layer 10S is an electrode (anode) to which a voltage is supplied for reading out signal charges (holes or electrons, hereinafter, for convenience, the signal charges are described as holes) generated in the photoelectric conversion layer 13, and is provided for each pixel P in the element region R1. The first electrode 11 is provided so as to fill the opening of the insulating film 17, and is in contact with the semiconductor layer 10S (more specifically, the diffusion region 12A described later). For example, the first electrode 11 is larger than the opening of the insulating film 17, and a part of the first electrode 11 is provided in the buried layer 18. That is, the upper surface of the first electrode 11 (the surface on the semiconductor layer 10S side) is in contact with the diffusion region 12A, and the lower surface and part of the side surface of the first electrode 11 are in contact with the buried layer 18. Adjacent first electrodes 11 are electrically separated by the insulating film 17 and the buried layer 18.

[0024] The first electrode 11 is made of, for example, any one of titanium (Ti), tungsten (W), titanium nitride (TiN), platinum (Pt), gold (Au), germanium (Ge), palladium (Pd), zinc (Zn), nickel (Ni) and aluminum (Al), or an alloy containing at least one of them. The first electrode 11 may be a single film of such a constituent material, or may be a laminated film combining two or more kinds. For example, the first electrode 11 is made of a laminated film of titanium and tungsten. The thickness of the first electrode 11 is, for example, several tens of nm to several hundreds of nm.

[0025] The semiconductor layer 10S includes, for example, from a position close to the wiring layer 10W, a first contact layer 12, a photoelectric conversion layer 13, and a second contact layer 14. The first contact layer 12, the photoelectric conversion layer 13, and the second contact layer 14 have the same planar shape, and the end faces of each are disposed at the same position in a planar view.

[0026] The first contact layer 12 is provided, for example, in common to all pixels P, and is disposed between the insulating film 17 and the photoelectric conversion layer 13. The first contact layer 12 serves to electrically separate adjacent pixels P, and the first contact layer 12 is provided with, for example, a plurality of diffusion regions 12A. By using, for the first contact layer 12, a compound semiconductor material having a band gap larger than the band gap of the compound semiconductor material constituting the photoelectric conversion layer 13, it is also possible to suppress dark current. For example, n-type InP (indium phosphide) can be used for the first contact layer 12.

[0027] The diffusion regions 12A provided in the first contact layer 12 are arranged to be spaced apart from each other. The diffusion region 12A is arranged for each pixel P, and the first electrode 11 is connected to each diffusion region 12A. The diffusion region 12A is also provided in the OPB region R1B. The diffusion region 12A is for reading out the signal charge generated in the photoelectric conversion layer 13 for each pixel P, and contains, for example, a p-type impurity. An example of the p-type impurity is Zn (zinc). In this way, a pn junction interface is formed between the diffusion region 12A and the first contact layer 12 other than the diffusion region 12A, so that adjacent pixels P are electrically isolated. The diffusion region 12A is provided, for example, in the thickness direction of the first contact layer 12, and is also provided in a part of the thickness direction of the photoelectric conversion layer 13.

[0028] The photoelectric conversion layer 13 between the first electrode 11 and the second electrode 15, more specifically, between the first contact layer 12 and the second contact layer 14, is provided, for example, in common to all pixels P. This photoelectric conversion layer 13 absorbs light of a predetermined wavelength and generates a signal charge, and is made of a compound semiconductor material such as an i-type III-V group semiconductor. Examples of the compound semiconductor material constituting the photoelectric conversion layer 13 include InGaAs (indium gallium arsenide), InAsSb (indium arsenide antimony), InAs (indium arsenide), InSb (indium antimony), and HgCdTe (mercury cadmium telluride). The photoelectric conversion layer 13 may be made of Ge (germanium). In the photoelectric conversion layer 13, for example, photoelectric conversion of light having a wavelength in the visible range to the short infrared range is performed.

[0029] The second contact layer 14 is provided, for example, in common to all pixels P. This second contact layer 14 is provided between the photoelectric conversion layer 13 and the second electrode 15 and is in contact with them. The second contact layer 14 is a region where charges discharged from the second electrode 15 move, and is made of, for example, a compound semiconductor containing n-type impurities. The second contact layer 14 can be made of, for example, n-type InP (indium phosphide).

[0030] The second electrode 15 is provided on the second contact layer 14 (light incident side) as an electrode common to each pixel P, for example, so as to be in contact with the second contact layer 14. The second electrode 15 is for discharging charges (cathode) that are not used as signal charges among the charges generated in the photoelectric conversion layer 13. For example, when holes are read out from the first electrode 11 as signal charges, electrons, for example, can be discharged through this second electrode 15. The second electrode 15 is made of a conductive film that can transmit incident light such as infrared rays. The second electrode 15 is made of, for example, ITO (Indium Tin Oxide) or ITiO (In 2 O 3 -TiO 2 ) or the like can be used. The second electrode 15 may be provided in a lattice shape so as to separate adjacent pixels P, as in Modification 4 described later. In this case, the second electrode 15 can be made of a conductive material with low light transmittance.

[0031] The passivation films 16A and 16B cover the second electrode 15 from the light incident surface S1 side. The passivation films 16A and 16B are preferably formed using a material that does not absorb light having a wavelength in the visible region (e.g., 380 nm or more and less than 780 nm) to the short infrared region (e.g., 780 nm or more and less than 2400 nm). The passivation films 16A and 16B may be formed using the same material or different materials. Furthermore, the passivation films 16A and 16B may have an anti-reflection function. The passivation films 16A and 16B can be formed by, for example, an atomic layer deposition (ALD) method, a chemical vapor deposition (CVD) method, a physical vapor deposition (PVD) method, a coating method, or the like.

[0032] As described above, the passivation film 16A is provided on the second electrode 15 and extends, for example, to the chip end E of the peripheral region R2. The passivation film 16A has an opening 16H in the OPB region R1B. As shown in FIG. 2, the opening 16H is provided, for example, in a frame shape surrounding the light receiving region. The opening 16H may be, for example, a rectangular or circular hole in a plan view. A conductive film 15B, which will be described later, is electrically connected to the second electrode 15 through the opening 16H of the passivation film 16A.

[0033] The passivation film 16A is preferably formed using a material having a non-reducing property. Examples of the material having a non-reducing property include oxides (M x O y ), nitrides (M x N y ) and oxynitrides (M x O y N z ) can be used. Examples of M include silicon (Si), titanium (Ti), hafnium (Hf), zirconium (Zr) and yttrium (Y). x, y and z are integers of 1 or more. For silicon nitride (SiN), it is preferable to use a film formation method that does not use a reducing gas. Examples of such film formation methods include a sputtering method and a coating method. The passivation film 16A may be formed as a single layer film made of any of the above materials, for example. When the passivation film 16A is a single layer film, the single layer film has a density of 2.0 g / cm. 3 The upper limit of the film density is not particularly limited, but it is preferably 8.0 g / cm or more. 3 The film density is calculated by dividing the mass of the thin film by the volume (g / cm 3) and can be determined, for example, by XRR measurement. This provides the passivation film 16A with a sealing function. The passivation film 16A may be formed, for example, as a laminated film in which a film 16A1 and a film 16A2 are laminated in this order as shown in FIG. 3. When the passivation film 16A is a laminated film, it is preferable that the film 16A1 that is in direct contact with the second electrode 15 is formed using any of the above materials. The thickness of the film 16A1 is, for example, 0.5 nm or more. The film 16A2 may be made of, for example, silicon nitride (SiN) or aluminum oxide (Al 2 O 3 It is preferable to use a material having a high sealing property such as SiO 2 . Furthermore, the passivation film 16A may be a multi-layer film in which three or more layers of films 16A1, 16A2, 16A3, 16A4, . . . 16AX are laminated on the second electrode 15 as shown in FIG.

[0034] The passivation film 16B is provided so as to cover the passivation film 16A and the conductive film 15B, and, for example, extends to the chip end E of the peripheral region R2, similar to the passivation film 16A. The passivation film 16B is made of, for example, silicon nitride (SiN), aluminum oxide (Al 2 O 3 ), silicon oxide (SiO 2 ) and tantalum oxide (Ta 2 O 3 In addition, in the passivation film 16B, the method of forming silicon nitride (SiN) is not particularly limited, and a silicon nitride (SiN) film formed by a plasma CVD method using a reducing gas, other than a sputtering method or a coating method, may be used.

[0035] The insulating film 17 is provided between the first contact layer 12 and the buried layer 18, covers an end face of the first contact layer 12, an end face of the photoelectric conversion layer 13, an end face of the second contact layer 14, and an end face of the second electrode 15, and is in contact with the passivation film 16 in the peripheral region R2. The insulating film 17 is made of, for example, silicon oxide (SiO X ) or aluminum oxide (Al 2 O 3The insulating film 17 may be formed of a laminated structure made up of a plurality of films. The insulating film 17 may be formed of a silicon (Si)-based insulating material, such as silicon oxynitride (SiON), carbon-containing silicon oxide (SiOC), silicon nitride (SiN), and silicon carbide (SiC). The insulating film 17 has a thickness of, for example, several tens to several hundreds of nm.

[0036] The conductive film 15B is provided from the OPB region R1B to the through hole H1 in the peripheral region R2. The conductive film 15B contacts the second electrode 15 at the opening 16H of the passivation film 16A provided in the OPB region R1B, and contacts the wiring (later-described wiring 22CB) of the readout circuit board 20 through the through hole H1. This allows a voltage to be supplied from the readout circuit board 20 to the second electrode 15 through the conductive film 15B. The conductive film 15B functions as a voltage supply path to the second electrode 15 and also functions as a light-shielding film, forming the OPB region R1B. The conductive film 15B is made of a metal material including, for example, tungsten (W), aluminum (Al), titanium (Ti), molybdenum (Mo), tantalum (Ta), or copper (Cu). A passivation film 16B may be provided on the conductive film 15B.

[0037] An adhesive layer B may be provided between the end of the second contact layer 14 and the second electrode 15. As described later, this adhesive layer B is used when forming the light receiving element 1, and serves to bond the semiconductor layer 10S to a temporary substrate (temporary substrate 33 in FIG. 7C described later). The adhesive layer B is made of, for example, tetraethoxysilane (TEOS) or silicon oxide (SiO 2 ) The adhesive layer B is provided, for example, wider than the end face of the semiconductor layer 10S, and is covered by the buried layer 18 together with the semiconductor layer 10S. An insulating film 17 is provided between the adhesive layer B and the buried layer 18.

[0038] 5 and 6 show other examples of the configuration of the adhesive layer B. The adhesive layer B may be provided over a wide area of ​​the peripheral region R2, and may extend, for example, from the vicinity of the edge of the semiconductor layer 10S (element region R1) to between the through holes H1 and H2 (FIG. 5). Alternatively, the adhesive layer B may extend from the vicinity of the edge of the semiconductor layer 10S (element region R1) to the chip end (chip end E) (FIG. 6).

[0039] The embedded layer 18 is intended to fill in the step between a temporary substrate (temporary substrate 33 in FIG. 7C described later) and the semiconductor layer 10S in the manufacturing process of the light receiving element 1. As will be described in detail later, by forming this embedded layer 18, the occurrence of defects in the manufacturing process caused by the step between the semiconductor layer 10S and the temporary substrate 33 can be suppressed.

[0040] The embedded layer 18 in the peripheral region R2 is provided between the wiring layer 10W and the insulating film 17 and between the wiring layer 10W and the passivation film 16, and has a thickness equal to or greater than the thickness of the semiconductor layer 10S. Here, the embedded layer 18 is provided to surround the semiconductor layer 10S, so that a region (peripheral region R2) around the semiconductor layer 10S is formed. This allows the bonding surface S2 with the readout circuit board 20 to be provided in the peripheral region R2. If the bonding surface S2 is formed in the peripheral region R2, the thickness of the embedded layer 18 may be reduced, but it is preferable that the embedded layer 18 covers the semiconductor layer 10S in the thickness direction, and the entire end surface of the semiconductor layer 10S is covered by the embedded layer 18. By having the embedded layer 18 cover the entire end surface of the semiconductor layer 10S via the insulating film 17, it is possible to effectively suppress the intrusion of moisture into the semiconductor layer 10S. The buried layer 18 in the element region R1 is provided between the semiconductor layer 10S and the wiring layer 10W so as to cover the first electrode 11.

[0041] The surface of the buried layer 18 on the bonding surface S2 side is flattened, and in the peripheral region R2, the wiring layer 10W is provided on the flattened surface of the buried layer 18. The buried layer 18 is made of, for example, silicon oxide (SiO X), silicon nitride (SiN), silicon oxynitride (SiON), silicon oxide containing carbon (SiOC), silicon carbide (SiC), and other inorganic insulating materials can be used.

[0042] As described later, in the process of manufacturing the light receiving element 1, after forming the buried layer 18, the wiring layer 10W including the interlayer insulating films 19A and 19B and the contact electrode 19E is formed above the buried layer 18 (FIG. 17D described later). The readout circuit board 20 including the wiring layer 20W is bonded to the element board 10 including the wiring layer 10W (FIG. 17E described later) to form the light receiving element 1. At this time, the contact electrode 19E of the wiring layer 10W is connected to the contact electrode 22E of the wiring layer 20W. The contact electrodes 19E and 22E have, for example, Cu pads, and the contact electrodes 19E and 22E are connected by direct bonding of the Cu pads. When the contact electrode 19E is formed by using a chemical mechanical polishing (CMP) method, the buried layer 18 arranged below the copper film to be polished is required to have a hardness that can withstand the stress during polishing. In addition, in order to directly bond the Cu pads of the contact electrodes 19E and 22E to each other, it is necessary to form the element substrate 10 and the readout circuit substrate 20 extremely flat. For this reason, it is preferable that the buried layer 18 disposed below the copper film has a hardness that can withstand the stress during polishing. Specifically, it is preferable that the material constituting the buried layer 18 is a material having a higher hardness than the sealant or organic material disposed around the die in a general semiconductor package. Examples of materials having such high hardness include inorganic insulating materials. The buried layer 18 can be formed by forming a film of this inorganic insulating material by, for example, a CVD (Chemical Vapor Deposition) method, a sputtering method, or a coating method.

[0043] The buried layer 18 is provided with through holes H1 and H2 penetrating the buried layer 18. The through holes H1 and H2 penetrate the wiring layer 10W together with the buried layer 18 and reach the readout circuit board 20. The through holes H1 and H2 have, for example, a rectangular planar shape, and a plurality of through holes H1 and H2 are provided so as to surround the element region R1 (FIG. 1A). The through hole H1 is provided at a position closer to the element region R1 than the through hole H2, and the sidewall and bottom surface of the through hole H1 are covered with the conductive film 15B. The through hole H1 is for connecting the second electrode 15 (conductive film 15B) and the wiring (later-described wiring 22CB) of the readout circuit board 20, and is provided penetrating the passivation film 16, the buried layer 18, and the wiring layer 10W.

[0044] The through hole H2 is provided, for example, at a position closer to the chip end E than the through hole H1. The through hole H2 penetrates the passivation film 16, the embedded layer 18, and the wiring layer 10W, and reaches a pad electrode (a pad electrode 22P described later) of the readout circuit board 20. The light receiving element 1 is electrically connected to the outside through the through hole H2. The through holes H1 and H2 do not have to reach the readout circuit board 20. For example, the through holes H1 and H2 may reach a wiring of the wiring layer 10W, and the wiring may be connected to the wiring 22CB and the pad electrode 22P of the readout circuit board 20. The through holes H1 and H2 may penetrate the adhesive layer B (FIGS. 5 and 6).

[0045] The holes and electrons generated in the photoelectric conversion layer 13 are read out from the first electrode 11 and the second electrode 15. In order to perform this readout operation at high speed, it is preferable to set the distance between the first electrode 11 and the second electrode 15 to a distance sufficient for photoelectric conversion but not too far apart. That is, it is preferable to reduce the thickness of the element substrate 10. For example, the distance between the first electrode 11 and the second electrode 15 or the thickness of the element substrate 10 is 10 μm or less, further 7 μm or less, and further 5 μm or less.

[0046] The semiconductor substrate 21 of the readout circuit board 20 faces the element substrate 10 with the wiring layer 20W and the multi-layer wiring layer 22C therebetween. The semiconductor substrate 21 is made of, for example, silicon (Si). A plurality of transistors are provided near the surface (surface on the wiring layer 20W side) of the semiconductor substrate 21. For example, a readout circuit (Read Out Circuit) is configured for each pixel P using the plurality of transistors. For example, the wiring layer 20W has an interlayer insulating film 22A and an interlayer insulating film 22B in this order from the element substrate 10 side, and these interlayer insulating films 22A and 22B are provided in a laminated state. For example, a contact electrode 22E and a dummy electrode 22ED are provided in the interlayer insulating film 22A. The multi-layer wiring layer 22C is provided facing the element substrate 10 with the wiring layer 20W therebetween. For example, a pad electrode 22P and a plurality of wirings 22CB are provided in the multi-layer wiring layer 22C. The interlayer insulating films 22A and 22B are made of, for example, an inorganic insulating material. Examples of the inorganic insulating material include silicon nitride (SiN) and aluminum oxide (Al 2 O 3 ), silicon oxide (SiO 2 ) and hafnium oxide (HfO 2 ) etc.

[0047] The contact electrode 22E serves to electrically connect the first electrode 11 and the wiring 22CB, and is provided in the element region R1 for each pixel P. This contact electrode 22E contacts the contact electrode 19E at the bonding surface S2 of the element substrate 10. Adjacent contact electrodes 22E are electrically isolated by an interlayer insulating film 22A.

[0048] The dummy electrode 22ED provided in the peripheral region R2 contacts the dummy electrode 19ED on the bonding surface S2 of the element substrate 10. The dummy electrode 22ED is formed, for example, in the same process as the contact electrode 22E. The contact electrode 22E and the dummy electrode 22ED are formed, for example, of a copper (Cu) pad, and are exposed on the surface of the readout circuit substrate 20 facing the element substrate 10. That is, for example, CuCu bonding is performed between the contact electrode 19E and the contact electrode 22E, and between the dummy electrode 19ED and the dummy electrode 22ED. This allows the pixel P to be miniaturized, as will be described in detail later.

[0049] The wiring 22CB connected to the contact electrode 19E is connected to a transistor provided near the surface of the semiconductor substrate 21, and the first electrode 11 and the readout circuit are connected for each pixel P. The wiring 22CB connected to the conductive film 15B via the through hole H1 is connected to, for example, a predetermined potential. In this way, one of the charges (e.g., a hole) generated in the photoelectric conversion layer 13 is read out from the first electrode 11 to the readout circuit via the contact electrodes 19E and 22E, and the other of the charges (e.g., an electron) generated in the photoelectric conversion layer 13 is discharged from the second electrode 15 to a predetermined potential via the conductive film 15B.

[0050] The pad electrode 22P provided in the peripheral region R2 is for electrical connection to the outside. A through hole H2 is provided near the chip end E of the light receiving element 1, penetrating the element substrate 10 and reaching the pad electrode 22P, and electrical connection to the outside is made through this through hole H2. The connection is made by a method such as wire bonding or bumping. For example, a predetermined potential may be supplied from an external terminal arranged in the through hole H2 to the second electrode 15 through the wiring 22CB and the conductive film 15B of the through hole H2 readout circuit board 20. As a result of photoelectric conversion in the photoelectric conversion layer 13, a signal voltage read out from the first electrode 11 may be read out to a readout circuit of the semiconductor substrate 21 through the contact electrodes 19E, 22E, and output to an external terminal arranged in the through hole H2 via this readout circuit. The signal voltage may be output to an external terminal via the readout circuit, for example, via another circuit included in the readout circuit board 20 together with the readout circuit. The other circuits include, for example, a signal processing circuit and an output circuit.

[0051] The thickness of the readout circuit board 20 is preferably greater than that of the element substrate 10. For example, the thickness of the readout circuit board 20 is preferably at least twice, more preferably at least five times, or even more preferably at least ten times, greater than that of the element substrate 10. Alternatively, the thickness of the readout circuit board 20 is, for example, at least 100 μm, or at least 150 μm, or at least 200 μm. The readout circuit board 20 having such a large thickness ensures the mechanical strength of the light receiving element 1. Note that the readout circuit board 20 may include only one layer of the semiconductor substrate 21 that forms the circuit, or may further include a substrate such as a support substrate in addition to the semiconductor substrate 21 that forms the circuit.

[0052] (1-2. Method of manufacturing light receiving element) The light receiving element 1 can be manufactured, for example, as follows: Figures 7A to 17J show the manufacturing process of the light receiving element 1 in order of steps.

[0053] First, as shown in FIG. 7A, the semiconductor layer 10S is epitaxially grown on a growth substrate 31 made of, for example, InP. The thickness of the growth substrate 31 is, for example, several hundred μm, and the thickness of the semiconductor layer 10S is, for example, several μm. Thereafter, as shown in FIG. 7B, an adhesive layer B is formed on the semiconductor layer 10S. The diameter of the growth substrate 31 is, for example, 6 inches or less. The semiconductor layer 10S is formed, for example, by epitaxially growing n-type InP constituting the first contact layer 12, i-type InGaAs constituting the photoelectric conversion layer 13, and n-type InP constituting the second contact layer 14 in this order. The semiconductor layer 10S may be formed after, for example, a buffer layer and a stopper layer are formed on the growth substrate 31.

[0054] Next, as shown in FIG. 7C, the growth substrate 31 on which the semiconductor layer 10S is formed is bonded to the temporary substrate 33 with the adhesive layer B therebetween. The temporary substrate 33 has, for example, an insulating layer (insulating layer 33IA) and a substrate 33S. The insulating layer 33IA is disposed, for example, between the adhesive layer B and the substrate 33S. The temporary substrate 33 has a larger diameter than the growth substrate 31, and the substrate 33S is, for example, a silicon (Si) substrate. The diameter of the temporary substrate 33 is, for example, 8 inches to 12 inches. By bonding the small-diameter growth substrate 31 to the large-diameter temporary substrate 33, it becomes possible to use various devices for large-diameter substrates when forming the element substrate 10. Thereby, for example, the readout circuit substrate 20 and the element substrate 10 are bonded by CuCu bonding, and the pixels P can be miniaturized. The growth substrate 31 may be bonded to the temporary substrate 33 by plasma activation bonding, room temperature bonding, or bonding using an adhesive (adhesive bonding), or the like. In this manner, for example, the semiconductor layer 10S in a wafer form is bonded to the temporary substrate 33. The thickness of the temporary substrate 33 is, for example, several hundred μm.

[0055] 8 and 9 show an example of a planar configuration of the temporary substrate 33 and the semiconductor layer 10S (growth substrate 31). A semiconductor layer 10S in a wafer state smaller than the temporary substrate 33 may be bonded to the temporary substrate 33 in a wafer state (FIG. 8), or a plurality of semiconductor layers 10S in chip state may be bonded to the temporary substrate 33 in a wafer state while being spaced apart from each other (FIG. 9).

[0056] 10A and 10B, a semiconductor layer 10S in a wafer state having the same size as the temporary substrate 33 may be bonded to the temporary substrate 33 in a wafer state. Fig. 10A shows a planar configuration of the temporary substrate 33 and the semiconductor layer 10S (growth substrate 31), and Fig. 10B shows a cross-sectional configuration taken along line BB in Fig. 10A.

[0057] After the growth substrate 31 on which the semiconductor layer 10S is formed is bonded to the temporary substrate 33, the growth substrate 31 is removed as shown in Fig. 11A. The growth substrate 31 can be removed by mechanical grinding, CMP (Chemical Mechanical Polishing), wet etching, dry etching, or the like. At this time, the growth substrate 31 may be partially left. Also, the semiconductor layer 10S may be partially etched.

[0058] 11B, for example, the semiconductor layer 10S is etched to a predetermined size in accordance with the marks on the temporary substrate 33. This forms a plurality of semiconductor layers 10S in a chip state. Figures 11B and onward show two of the semiconductor layers 10S in a chip state.

[0059] Fig. 12A shows an example of the planar configuration of the semiconductor layer 10S before molding, and Fig. 12B shows an example of the planar configuration of the semiconductor layer 10S after molding subsequent to Fig. 12A. Fig. 13A shows another example of the planar configuration of the semiconductor layer 10S before molding, and Fig. 13B shows another example of the planar configuration of the semiconductor layer 10S after molding subsequent to Fig. 13A. In this manner, the semiconductor layer 10S in a wafer state smaller than the temporary substrate 33 (Fig. 12A) or the same size as the temporary substrate 33 (Fig. 13A) is molded into a plurality of semiconductor layers 10S in a chip state.

[0060] Alternatively, as shown in FIGS. 14A and 14B, a plurality of semiconductor layers 10S in a chip state may be formed into a plurality of semiconductor layers 10S in a smaller chip state.

[0061] When the semiconductor layer 10S is etched, the adhesive layer B is etched together with the semiconductor layer 10S. The adhesive layer B may remain wider than the semiconductor layer 10S and may extend around the semiconductor layer 10S (FIG. 11B).

[0062] 15, the adhesive layer B may be narrower than the semiconductor layer 10S, causing a gap between the semiconductor layer 10S and the temporary substrate 33. The adhesive layer B may be etched to the same size as the semiconductor layer 10S.

[0063] As shown in FIG. 16, when the semiconductor layer 10S is etched, the adhesive layer B does not need to be etched.

[0064] After forming the semiconductor layer 10S, as shown in FIG. 17A, the diffusion region 12A is formed for each pixel P in the semiconductor layer 10S. This separates the elements. For example, the insulating film 17 is used as a hard mask to form the diffusion region 12A. Specifically, the insulating film 17 is formed to cover the upper surface (the surface opposite to the surface bonded to the temporary substrate 33) and the side surface of the semiconductor layer 10S, and then an opening is formed by etching in the insulating film 17 covering the upper surface of the semiconductor layer 10S. Then, the p-type impurity is diffused in vapor phase using the insulating film 17 as a hard mask. This forms the diffusion region 12A in a selective region. The diffusion depth is, for example, several hundred nm, and the diffusion is approximately isotropic. The diffusion region 12A may be formed by ion implantation using a resist mask. Here, the diffusion region 12A is formed in the semiconductor layer 10S provided on the large-diameter temporary substrate 33, so that the pixel P can be miniaturized.

[0065] After providing the diffusion region 12A in the semiconductor layer 10S, the first electrode 11 is formed on the semiconductor layer 10S as shown in Fig. 17B. For example, the first electrode 11 is formed by forming a laminated film of titanium (Ti) / tungsten (W) in an opening provided in the insulating film 17 by a CVD method, a PVD method, an ALD method, a vapor deposition method, or the like, and then patterning the laminated film by photolithography and etching.

[0066] After forming the first electrode 11, as shown in FIG. 17C, the embedded layer 18 is formed on the entire surface of the temporary substrate 33. The embedded layer 18 is formed, for example, by forming a film of an insulating material on the entire surface of the temporary substrate 33 so as to embed the semiconductor layer 10S, and then planarizing the film by CMP (Chemical Mechanical Polishing). As a result, the embedded layer 18 is formed to cover the periphery (peripheral region R2) of the semiconductor layer 10S and the upper surface (the surface farthest from the temporary substrate 33) of the semiconductor layer 10S. Although details will be described later, in this embodiment, the embedded layer 18 is formed to fill the steps between the semiconductor layer 10S and the temporary substrate 33 in this way, so that the occurrence of defects in the manufacturing process due to these steps is suppressed.

[0067] After forming the buried layer 18, as shown in FIG. 17D, a wiring layer 10W is formed facing the semiconductor layer 10S with the buried layer 18 therebetween. For example, an interlayer insulating film 19A and an interlayer insulating film 19B are formed in this order on the buried layer 18, and then openings are formed in the regions of the interlayer insulating films 19A and 19B facing the first electrode 11. A copper (Cu) film is formed in the openings of the interlayer insulating films 19A and 19B by a vapor deposition method, a PVD method, a plating method, or the like, and then the surface of the copper film is polished by, for example, a CMP method to form a contact electrode 19E. For example, a dummy electrode 19ED is formed in the peripheral region R2 in the same process as the formation of the contact electrode 19E. Here, since the wiring layer 10W is formed on a large-diameter temporary substrate 33, it is possible to use various devices for large-diameter substrates.

[0068] After forming the wiring layer 10W, as shown in FIG. 17E, the readout circuit board 20 is bonded to the temporary substrate 33 with the wiring layer 10W therebetween. At this time, the wiring layer 20W is formed in advance on the readout circuit board 20. The wiring layer 20W of the readout circuit board 20 has a contact electrode 22E and a dummy electrode 22ED, and when the readout circuit board 20 is bonded to the temporary substrate 33, for example, the contact electrode 22E and the dummy electrode 22ED of the wiring layer 20W are CuCu bonded to the contact electrode 19E and the dummy electrode 19ED of the wiring layer 10W. More specifically, in the element region R1, a bonding surface S2 where the contact electrode 19E and the contact electrode 22E are bonded is formed, and in the peripheral region R2, a bonding surface S2 where the dummy electrode 19ED and the dummy electrode 22ED are bonded is formed. Here, the peripheral region R2 of the element substrate 10 is also bonded to the readout circuit board 20.

[0069] After the readout circuit board 20 is attached to the temporary substrate 33, the temporary substrate 33 is removed as shown in Fig. 17F. The temporary substrate 33 can be removed by using, for example, mechanical grinding, wet etching, dry etching, or the like.

[0070] After removing the temporary substrate 33, as shown in FIG. 17G, the adhesive layer B and the like are also removed to expose the surface of the semiconductor layer 10S. At this time, unnecessary layers of the semiconductor layer 10S may be removed. Also, the insulating layer 33IA or the insulating film 17 may be partially left other than the opening of the semiconductor layer 10S, or the buried layer 18 may be partially excavated.

[0071] 17H, the second electrode 15 and the passivation film 16A are formed in this order on the surface of the semiconductor layer 10S (the surface opposite to the surface on which the wiring layer 10W is provided) exposed by removing the temporary substrate 33. Then, as shown in FIG. 17I, the through hole H1, the conductive film 15B, and the passivation film 16B are formed in this order. This electrically connects the second electrode 15 and the readout circuit board 20.

[0072] 17J, a through hole H2 is formed which penetrates the element substrate 10 and reaches the pad electrode 22P of the readout circuit substrate 20. This completes the light-receiving element 1 shown in FIG.

[0073] (1-3. Operation of the light receiving element) In the light receiving element 1, when light (e.g., light having wavelengths in the visible and infrared regions) is incident on the photoelectric conversion layer 13 through the passivation films 16A and 16B, the second electrode 15, and the second contact layer 14, the light is absorbed in the photoelectric conversion layer 13. As a result, pairs of holes and electrons are generated (photoelectrically converted) in the photoelectric conversion layer 13. At this time, for example, when a predetermined voltage is applied to the first electrode 11, a potential gradient is generated in the photoelectric conversion layer 13, and one of the generated charges (e.g., a hole) moves to the diffusion region 12A as a signal charge and is collected from the diffusion region 12A to the first electrode 11. The signal charge moves to the semiconductor substrate 21 through the contact electrodes 19E and 22E and is read out for each pixel P.

[0074] (1-4. Function and effect of light receiving element) In the light receiving element 1 of this embodiment, the passivation film 16A provided on the second electrode 15 provided on the light incident surface (surface S1) side of the semiconductor layer 10S is formed using a non-reducing material. By forming the passivation film 16A using a non-reducing material, the adhesion between the second electrode 15 and the passivation film 16A is improved. This will be described below.

[0075] On the passivation film 16A, a wiring (conductive film 15B) is formed, which also serves as a light-shielding film for the OPB (Optical Black) region R1B, for supplying a voltage from the readout circuit board 20 to the second electrode 15. However, this conductive film 15B may peel off at the interface between the second electrode 15 and the passivation film 16A due to stress during film formation, which may cause a decrease in manufacturing yield. In a typical light-receiving element, the second electrode 15 is formed of an oxide transparent electrode material such as ITO, and the passivation film 16A is formed of silicon nitride (SiN). A possible cause of peeling at the interface between the second electrode 15 and the passivation film 16A is poor adhesion due to little reaction between the ITO film surface and SiN.

[0076] In contrast, in the light receiving element 1 of this embodiment, the passivation film 16A formed directly on the second electrode 15 is formed using a non-reducing material, specifically, an oxide, nitride, or oxynitride of Si, Ti, Hf, Zr, Y, or the like. This increases the reactivity between the second electrode 15 and the passivation film 16A, improving adhesion. This reduces the occurrence of peeling at the interface between the second electrode 15 and the passivation film 16A due to stress during the formation of the conductive film 15B. In other words, it is possible to improve the manufacturing yield.

[0077] In addition, the stress generated during the formation of the conductive film 15B may cause distortion in the semiconductor layer 10S (specifically, the photoelectric conversion layer 13) and may deteriorate the impedance characteristics. However, as described above, the passivation film 16A is formed using a material that has high adhesion to the second electrode 15, thereby making it possible to prevent deterioration of the impedance characteristics.

[0078] As described above, in the light receiving element 1 of the present embodiment, the passivation film 16A is formed directly on the second electrode 15 using a non-reducing material, so that the adhesion between the second electrode 15 and the passivation film 16A is improved. Therefore, the occurrence of peeling at the interface between the second electrode 15 and the passivation film 16A is reduced, and it is possible to improve the manufacturing yield. In addition, it is possible to prevent the deterioration of the illumination characteristics.

[0079] Below, we will explain the second and third embodiments and modified examples of the first to third embodiments. In the following explanation, the same components as in the first embodiment will be given the same symbols and their explanations will be omitted as appropriate.

[0080] <2. Second embodiment> 18 is a schematic diagram showing a cross-sectional configuration of a light receiving element (light receiving element 2) according to a second embodiment of the present disclosure. As in the first embodiment, the light receiving element 2 is applied to an infrared sensor using a compound semiconductor material such as a III-V group semiconductor, and has a photoelectric conversion function for light having a wavelength in the visible region (e.g., 380 nm or more and less than 780 nm) to the short infrared region (e.g., 780 nm or more and less than 2400 nm). In the light receiving element 2, a conductive film 35B that supplies a voltage from the readout circuit board 20 to the second electrode 15 is formed using aluminum (Al).

[0081] The conductive film 35B is provided across the through-hole H1 from the OPB region R1B to the peripheral region R2. This conductive film 35B contacts the second electrode 15 at the opening 16H of the passivation film 16 provided in the OPB region R1B, and contacts the wiring (later-described wiring 22CB) of the readout circuit board 20 through the through-hole H1. This allows a voltage to be supplied from the readout circuit board 20 to the second electrode 15 through the conductive film 35B. The conductive film 35B functions as a voltage supply path to the second electrode 15 and also functions as a light-shielding film, forming the OPB region R1B.

[0082] The conductive film 35B is made of a material that has low film stress and has a higher light shielding performance than, for example, tungsten (W) in the infrared region. Specifically, it is made of aluminum (Al). The conductive film 35B is preferably formed as a laminated film of, for example, a barrier metal and an Al film. This can prevent oxidation of Al in the opening 16H that contacts the second electrode 15. Examples of the barrier metal include a single layer film of titanium (Ti) or titanium nitride (TiN), and a laminated film of Ti / TiN. Other examples of the barrier metal material include tantalum (Ta), tungsten (W), molybdenum (Mo), or nitrides thereof.

[0083] The conductive film 35B preferably further has an anti-reflection structure on the surface. Specifically, it is preferable to laminate a W film having a thickness of, for example, 30 nm on the Al film constituting the conductive film 35B. By laminating the W film on the Al film, the occurrence of ghosts is suppressed. If it is difficult to process the laminated film of Al / W, a silicon oxide (SiOx) film or a silicon nitride (SiN) film may be formed between the Al film and the W film. Note that, as in the third embodiment described later, if it is possible to deal with the problem by a method other than a metal film, such as providing a light-shielding film 37 made of a black resist on the conductive film 15B, the anti-reflection structure may be omitted.

[0084] The passivation film 36 covers the second electrode 15 from the light incident surface S1 side, similarly to the passivation films 16A and 16B. The passivation film 36 may have an anti-reflection function. The passivation film 36 is made of, for example, silicon nitride (SiN), aluminum oxide (Al 2 O 3 ), silicon oxide (SiO 2 ) and tantalum oxide (Ta 2 O 3 ) etc. can be used.

[0085] In the light receiving element 2 of this embodiment, the conductive film 35B electrically connected to the second electrode through the opening 16H formed in the passivation film 16 is formed of Al in the vicinity of the peripheral region R2 of the element region R1. By forming the conductive film 35B of Al, it is possible to reduce the thickness of the conductive film 35B. This will be described below.

[0086] 19 shows the relationship between wavelength and transmittance in various metal films, which was obtained by measuring the transmission spectroscopy of the metal films. The light shielding performance required for conductive film 35B, which also serves as a light shielding film, is obtained as follows. (Math. 1) Required light shielding performance N[dB]=d[nm]×A[dB / nm] (1) (d: film thickness, A: light shielding performance, dB=20LogT (T: transmittance))

[0087] For example, the required light shielding performance in the near infrared region (design wavelength 1.5 μm) is -120 dB. When the required film thickness is calculated using the above formula (1) when various metal films are used as the conductive film 35B, for example, the light shielding performance of a W film at a wavelength of 1500 nm is -31 dB at a thickness of 60 nm, and a thickness of 240 nm is required for the W film to obtain a light shielding performance of -120 dB. In contrast, the light shielding performance of an Al film at a wavelength of 1500 nm is -81 dB for an Al film with a thickness of 60 nm, and a thickness of 90 nm is required for the Al film to obtain a light shielding performance of -120 dB. Thus, compared to a W film, an Al film can obtain the same level of light shielding performance at a thinner thickness.

[0088] As described above, in the light receiving element 2 of this embodiment, the conductive film 35B is formed using Al, so that the conductive film 35B can be made thinner than when the conductive film 15B is formed using W as in the first embodiment. That is, the generation of stress during the formation of the conductive film 35B is reduced. This makes it possible to improve the manufacturing yield. Also, it becomes possible to prevent the deterioration of the implicit characteristics.

[0089] In this embodiment, a barrier metal is formed between the second electrode 15 and the conductive film 35B in the opening 16H in contact with the second electrode 15 to prevent oxidation of Al constituting the conductive film 35B. This prevents oxidation of Al by, for example, an ITO film constituting the second electrode 15, and enables a stable electrical connection with low resistance between the second electrode 15 and the conductive film 35B.

[0090] Furthermore, in this embodiment, a W film is laminated as an anti-reflection structure on the Al film constituting the conductive film 35B. Fig. 20 shows the absolute reflectance of an Al single layer film, a W single layer film, and an Al / W laminate film. It can be seen that, compared to an Al single layer film, an Al / W laminate film in which a W film with a thickness of 30 nm is laminated on an Al film has a reflectance comparable to that of a W single layer film. This makes it possible to suppress the occurrence of ghosts due to stray light reflected by the conductive film 35B.

[0091] Table 1 summarizes the sputtering deposition conditions and film stresses of various metal films. Table 2 summarizes the parameters when various conductive films are used as conductive film 35B. Figure 21 shows the relationship between the film thickness of various conductive films and the amount of warping of the Si substrate based on Table 2.

[0092] [Table 1]

[0093] [Table 2]

[0094] Samples 1 and 2 are comparative examples using W, and samples 3 to 5 correspond to the conductive film 35B of the present embodiment. The conductive films (samples 2, 4, and 5) containing a barrier metal (Ti) have W and Al film thicknesses adjusted so that the total light shielding performance exceeds -120 dB. The stress indicates the value obtained when each conductive film is sputter-deposited using the conditions in Table 1, and is shown as the amount of warping of a Si substrate with a wafer size of φ200 mm, which is generated by combining the stress values ​​of each conductive film. For both stress and warping, negative values ​​indicate the direction of compression, and positive values ​​indicate the direction of expansion. It can be confirmed that the stress is significantly reduced in samples 3 to 5 using Al, compared to the conductive films using W in samples 1 and 2.

[0095] <3. Third embodiment> 22 is a schematic diagram showing a cross-sectional configuration of a light receiving element (light receiving element 3) according to a third embodiment of the present disclosure. As in the first embodiment, the light receiving element 3 is applied to an infrared sensor using a compound semiconductor material such as a III-V group semiconductor, and has a photoelectric conversion function for light having a wavelength in the visible region (e.g., 380 nm or more and less than 780 nm) to the short infrared region (e.g., 780 nm or more and less than 2400 nm). The light receiving element 3 has a light shielding film 37 made of, for example, a black resist provided on a conductive film 15B.

[0096] The light-shielding film 37 forms the OPB region R1B together with the conductive film 15B. The light-shielding film 37 is formed using, for example, a black resist. The end face (face 37S) of the light-shielding film 37 on the element region R1 side extends further toward the element region R1 side than, for example, the end face (face 15S) of the conductive film 15B on the element region R1 side. In other words, the end face (face 15S) of the conductive film 15B on the element region R1 side is covered by the light-shielding film 37. The end face structure on the element region side of the conductive film 15B and the light-shielding film 37 is not limited to this, and for example, as shown in FIG. 23, the end face (face 37S) of the light-shielding film 37 on the element region R1 side and the end face (face 15S) of the conductive film 15B on the element region R1 side may form the same plane. 24, an end face (face 15S) of the conductive film 15B on the element region R1 side may extend toward the element region R1 side beyond an end face (face 37S) of the light-shielding film 37 on the element region R1 side. In addition, the light-shielding film 37 does not necessarily have to be formed directly on the conductive film 15B. For example, a passivation film 36B may be formed between the conductive film 15B and the light-shielding film 37 as shown in FIG.

[0097] As described above, in the light receiving element 3 of the present embodiment, the light shielding film 37 made of, for example, black resist is provided above the conductive film 15B, so that the conductive film 15B can be made thinner. That is, the generation of stress during the formation of the conductive film 35B is reduced. This makes it possible to improve the manufacturing yield. In addition, it becomes possible to prevent deterioration of the illumination characteristics. Furthermore, it becomes possible to reduce the generation of flare.

[0098] In the second and third embodiments, the passivation film 36 is made of, for example, silicon nitride (SiN) or aluminum oxide (Al 2 O 3 ), silicon oxide (SiO 2 ) and tantalum oxide (Ta 2 O 3) or the like is shown, but the present invention is not limited thereto. The light receiving element 2 and the light receiving element 3 may be formed using oxides, nitrides, or oxynitrides of Si, Ti, Hf, Zr, Y, or the like, as in the passivation film 16A in the first embodiment. Also, for example, the light receiving element 3 may be configured by combining the passivation film 16 constituting the light receiving element 1 with the conductive film 35B constituting the light receiving element 2. By combining the configurations of the first to third embodiments, it is possible to further improve the manufacturing yield. Also, it is possible to further prevent the deterioration of the implicit characteristics.

[0099] <4. Variation 1> FIG. 26 shows a cross-sectional configuration of a main part of a light receiving element (light receiving element 4) according to Modification 1 of the first to third embodiments. In this light receiving element 4, an embedding layer 18 includes a first embedding layer 18A and a second embedding layer 18B which are stacked. Except for this point, the light receiving element 4 has the same configuration and effect as the light receiving element 1. Note that FIG. 26 shows a cross-sectional configuration based on the light receiving element 1 shown in FIG. 1 as an example. Also, in FIG. 26, for simplification, the passivation films 16A and 16B are collectively shown as the passivation film 16.

[0100] The first embedded layer 18A is disposed in the peripheral region R2, and is provided closer to the light incident surface S1 than the second embedded layer 18B. Specifically, the first embedded layer 18A is disposed between the second embedded layer 18B and the passivation film 16, and covers an end face of the semiconductor layer 10S.

[0101] The second embedded layer 18B is provided across the element region R1 and the peripheral region R2. The second embedded layer 18B in the element region R1 is disposed between the wiring layer 10W and the semiconductor layer 10S, and covers the lower surface (the surface facing the readout circuit board 20) of the semiconductor layer 10S as well as the lower surface and side surfaces of the first electrode 11. The second embedded layer 18B in the peripheral region R2 is disposed between the wiring layer 10W and the first embedded layer 18A. The constituent material of the first embedded layer 18A and the constituent material of the second embedded layer 18B may be the same or different. The thickness of the first embedded layer 18A and the thickness of the second embedded layer 18B may be the same or different.

[0102] The insulating film 17 is provided on approximately the same plane across the element region R1 and the peripheral region R2. The insulating film 17 is disposed between the semiconductor layer 10S and the second embedded layer 18B in the element region R1, and between the first embedded layer 18A and the second embedded layer 18B in the peripheral region R2.

[0103] Such a light receiving element 4 can be manufactured, for example, as follows: Figures 27A to 30B show the manufacturing process of the light receiving element 4 in order of steps.

[0104] First, in the same manner as described in the first embodiment, the semiconductor layer 10S on the temporary substrate 33 is formed into a plurality of chip shapes (FIG. 14B).

[0105] 27A, the first embedded layer 18A is formed on the entire surface of the temporary substrate 33. The first embedded layer 18A is formed, for example, by forming a film of an insulating material on the entire surface of the temporary substrate 33 so as to embed the semiconductor layer 10S, and then planarizing the film by CMP. This forms the first embedded layer 18A that covers the periphery of the semiconductor layer 10S. At this time, the upper surface of the semiconductor layer 10S may be exposed from the first embedded layer 18A.

[0106] 27B, after the first embedded layer 18A is formed, a diffusion region 12A is formed in the semiconductor layer 10S using a mask formed of, for example, an insulating film 17. The insulating film 17 is formed on the first embedded layer 18A.

[0107] The mask for forming the diffusion region 12A may be formed of the first embedded layer 18A as shown in FIG. 28, or may be formed of the first embedded layer 18A and the insulating film 17 as shown in FIG. 29.

[0108] After the diffusion region 12A is formed in the semiconductor layer 10S, the first electrode 11 is formed in the opening of the insulating film 17 as shown in FIG. 30A.

[0109] After the first electrode 11 is formed, as shown in Fig. 30B, the second embedded layer 18B is formed on the first embedded layer 18A so as to cover the first electrode 11. The second embedded layer 18B is formed by depositing an insulating material on the entire surface of the temporary substrate 33 and then planarizing the film by CMP. The subsequent steps are the same as those described in the first embodiment above (Figs. 28D to 28J), and the light receiving element 4 is completed.

[0110] As in this modification, the embedded layer 18 may be configured to have a laminated structure of a first embedded layer 18 A and a second embedded layer 18 B. In this case as well, the same effects as those of the first embodiment can be obtained.

[0111] <5. Variation 2> FIG. 31 shows a cross-sectional configuration of a main part of a light receiving element (light receiving element 5) according to Modification 2 of the first to third embodiments. The light receiving element 5 has a color filter layer 41 and an on-chip lens (light collecting lens) 42 on a light incident surface S1 (opposite the surface facing the readout circuit board 20) of an element substrate 10. Except for this, the light receiving element 5 has the same configuration and effect as the light receiving element 1. Note that FIG. 31 shows a cross-sectional configuration based on the light receiving element 1 shown in FIG. 1 as an example. Also, in FIG. 31, the passivation films 16A and 16B are collectively shown as a passivation film 16 for simplification.

[0112] For example, in the light receiving element 5, a color filter layer 41 and an on-chip lens 42 are provided in this order on the passivation film 16 of the element substrate 10 with a planarization film 16C in between. The color filter layer 41 may include an IR (Infrared) filter. By providing the color filter layer 41, light receiving data of a wavelength corresponding to each pixel P can be obtained.

[0113] The on-chip lens 42 is for collecting light incident on the light receiving element 1 onto the photoelectric conversion layer 13. The on-chip lens 42 is made of, for example, an organic material or silicon oxide (SiO 2 ) and the like. In the light receiving element 5, since the embedded layer 18 is provided in the peripheral region R2, the step between the element region R1 and the peripheral region R2 of the element substrate 10 is reduced or eliminated, and a flat light incident surface S1 is formed. This makes it possible to form the on-chip lens 42 with high accuracy, for example, by using a photolithography process. For example, the color filter layer 41 and the on-chip lens 42 terminate in the element region R1. The planarization film 16C disposed between the passivation film 16 and the color filter layer 41 is provided, for example, from the element region R1 to the peripheral region R2, and terminates in the peripheral region R2. The color filter layer 41, the on-chip lens 42, and the planarization film 16C may each terminate at any position in the element region R1 or in the peripheral region R2.

[0114] As in this modification, a color filter layer 41 and on-chip lenses 42 may be provided on the light incident surface S1 of the element substrate 10. In this case, the same effects as those of the first embodiment can be obtained. Moreover, the on-chip lenses 42 can be easily formed with high accuracy on the light incident surface S1 that is flattened by the embedding layer 18.

[0115] <6. Variation 3> 32A to 32E show the manufacturing process of a light receiving element (light receiving element 6 in FIG. 33) according to the third modified example of the first to third embodiments in the order of steps. The light receiving element 6 is manufactured by forming a cap layer (cap layer 35 in FIG. 32A) for protecting the semiconductor layer 10S, and then bonding the semiconductor layer 10S to a temporary substrate 33 with the cap layer therebetween. Except for this point, the light receiving element 6 has the same configuration as the light receiving element 1, and the actions and effects are also the same. Note that FIG. 33 shows a cross-sectional configuration based on the light receiving element 1 shown in FIG. 1 as an example. Also, in FIG. 33, the passivation films 16A and 16B are collectively shown as the passivation film 16 for simplification.

[0116] The light receiving element 6 can be manufactured using the cap layer 35, for example, as follows.

[0117] 32A, for example, a semiconductor layer 10S and a cap layer 35 made of i-type InGaAs are formed in this order by epitaxial growth on a growth substrate 31. As the semiconductor layer 10S, for example, a first contact layer 12 made of n-type InP, a photoelectric conversion layer 13 made of i-type or n-type InGaAs, and a second contact layer 14 made of n-type InP are formed in this order.

[0118] The cap layer 35 is for preventing the semiconductor layer 10S from directly contacting the adhesive layer B for bonding the semiconductor layer 10S to the temporary substrate 33. If the process is carried out while the adhesive layer B is in contact with the semiconductor layer 10S, the characteristics of the semiconductor layer 10S may be deteriorated. Alternatively, the semiconductor layer 10S may be peeled off from the temporary substrate 33. The semiconductor layer 10S may be peeled off from the adhesive layer B. By forming the cap layer 35 between the semiconductor layer 10S and the adhesive layer B, the occurrence of such deterioration in characteristics and film peeling can be suppressed. The cap layer 35 may be made of any semiconductor material that can be epitaxially grown on the semiconductor layer 10S (more specifically, the second contact layer 14), and may be, for example, InGaAs or InAsSb.

[0119] After the cap layer 35 is formed on the semiconductor layer 10S, a silicon oxide (SiO 2 ) is deposited.

[0120] 32B, the growth substrate 31 is bonded to a large-diameter temporary substrate 33 with the adhesive layer B therebetween. At this time, a cap layer 35 is interposed between the adhesive layer B and the second contact layer 14. The adhesive layer B may be formed of, for example, tetraethoxysilane (TEOS) and silicon oxide (SiO 2 ) etc. can be used.

[0121] Next, in the same manner as described in the first embodiment, the growth substrate 31 is removed, the semiconductor layer 10S is formed, the diffusion region 12A is formed by pure material diffusion, the first electrode 11 is formed, and the buried layer 18 is formed in this order (see Figs. 11A to 17C). After that, as shown in Fig. 32C, the wiring layer 10W is formed on the buried layer 18. In this embodiment, as in the light-receiving element 1, the buried layer 18 is formed to fill the step between the semiconductor layer 10S and the temporary substrate 33, so that the occurrence of defects in the manufacturing process due to these steps is suppressed. In addition, in the steps of removing the growth substrate 31, forming the diffusion region 12A, and forming the wiring layer 10W, the cap layer 35 is interposed between the adhesive layer B and the second contact layer 14, so that the occurrence of deterioration in the characteristics of the semiconductor layer 10S and film peeling can be suppressed.

[0122] After the wiring layer 10W is formed, the temporary substrate 33 is attached to the readout circuit substrate 20 with the wiring layer 10W therebetween in the same manner as described in the first embodiment (FIG. 32D).

[0123] Next, as shown in FIG. 32E, the temporary substrate 33, the adhesive layer B, and the cap layer 35 are removed in this order to expose the second contact layer 14. The temporary substrate 33 is removed in the same manner as described in the first embodiment. The adhesive layer B and the cap layer 35 can be removed by, for example, wet etching. For example, HF (Hydrogen Fluoride) or BHF (Buffered Hydrogen Fluoride) can be used for wet etching the adhesive layer B. For example, a mixture of an acid and an oxidizing agent can be used for wet etching the cap layer 35. For example, HF, hydrochloric acid (HCl), or phosphoric acid (H 3 PO 4 ) or the like can be used, and the oxidizing agent can be, for example, hydrogen peroxide water or ozone water. Although it is possible to remove the adhesive layer B and the cap layer 35 by dry etching, it is preferable to remove them by wet etching (described later).

[0124] Fig. 34A is an example showing an enlarged view of the portion R shown in Fig. 32E. The area from which the adhesive layer B and the cap layer 35 are removed is made smaller than the area of ​​the semiconductor layer 10S in a plan view, for example. This leaves the cap layer 35 and the adhesive layer B on the periphery of the light incident surface S1 side of the semiconductor layer 10S (the surface opposite to the surface facing the readout circuit substrate 20), more specifically, on the end of the second contact layer 14. The cap layer 35 may be recessed with respect to the adhesive layer B, or may protrude.

[0125] The process after removing the cap layer 35 is similar to that described in the first embodiment above (see FIGS. 17H to 17J), and the light-receiving element 6 is completed.

[0126] FIG. 33 shows an example of a cross-sectional configuration of a main part of the light-receiving element 6 thus manufactured.

[0127] Fig. 34B is an example showing an enlarged view of the portion R shown in Fig. 33. In this manner, the second electrode 15 and the passivation film 16 may be formed while the cap layer 35 and the adhesive layer B remain. At this time, the second electrode 15 is in contact with the second contact layer 14, and is in contact with the cap layer 35 and the adhesive layer B. The embedded layer 18 protrudes toward the light incident surface S1 (opposite the readout circuit board 20) side beyond the semiconductor layer 10S by the thickness of the cap layer 35 and the adhesive layer B.

[0128] The opening formed by removing the adhesive layer B and the cap layer 35, i.e., the opening exposing the second contact layer 14, preferably has a tapered shape as shown in FIG. 34C. By forming the second electrode 15 in such a tapered opening, the coverage of the second electrode 15 is improved. For example, the adhesive layer B and the cap layer 35 are removed by wet etching to form the tapered opening. For this reason, the adhesive layer B and the cap layer 35 are preferably removed by wet etching.

[0129] FIG. 35A is another example showing an enlarged view of the portion R shown in FIG. 32E, and FIG. 35B is another example showing an enlarged view of the portion R shown in FIG. 33. In this way, the area from which the adhesive layer B and the cap layer 35 are removed may be the same as the area of ​​the semiconductor layer 10S in a plan view. This removes the cap layer 35 on the end of the second contact layer 14. In the light receiving element 6 thus formed, the upper surface (surface on the light incident surface S1 side) of the second contact layer 14 and the lower surface (surface on the readout circuit board 20 side) of the adhesive layer B are misaligned, and a step is formed between them due to the cap layer 35. In addition, the second electrode 15 contacts the second contact layer 14 and the adhesive layer B.

[0130] The opening formed by removing the adhesive layer B and the cap layer 35, ie, the opening exposing the second contact layer 14, preferably has a tapered shape as shown in FIG. 35C.

[0131] FIG. 36A is an enlarged view of the portion R shown in FIG. 32E, and FIG. 36B is an enlarged view of the portion R shown in FIG. 33. In this way, the area from which the adhesive layer B and the cap layer 35 are removed may be larger than the area of ​​the semiconductor layer 10S in a plan view. This removes the cap layer 35 on the end of the second contact layer 14. In the light receiving element 6 thus formed, a recess 18R caused by etching is formed between the end face of the semiconductor layer 10S and the buried layer 18. In addition, the second electrode 15 contacts the second contact layer 14, fills the recess 18R, and contacts the adhesive layer B.

[0132] The opening formed by removing the adhesive layer B and the cap layer 35, ie, the opening exposing the second contact layer 14, preferably has a tapered shape as shown in FIG. 36C.

[0133] As shown in FIG. 36D, the area from which the adhesive layer B and the cap layer 35 are removed may be made larger so that the adhesive layer B is removed together with the cap layer 35.

[0134] Similarly to the light receiving element 1 described above, the light receiving element 6 formed by this method also has the embedded layer 18 formed therein, which makes it possible to suppress defects in the manufacturing process caused by the step between the semiconductor layer 10S and the temporary substrate 33. In addition, the cap layer 35 is formed, which makes it possible to prevent contact between the semiconductor layer 10S (second contact layer 14) and the adhesive layer B.

[0135] In the light-receiving element 6, the cap layer 35 may remain on the end of the second contact layer 14 (FIGS. 34A to 34C), or the cap layer 35 may be completely removed. In the light-receiving element 6 from which the cap layer 35 has been completely removed, for example, a step between the upper surface of the second contact layer 14 and the lower surface of the adhesive layer B (FIGS. 35A to 35C) or a recess 18R between the end surface of the semiconductor layer 10S and the embedded layer 18 (FIGS. 36A to 36D) is provided. In the light-receiving element 6, the embedded layer 18 protrudes toward the light incident surface S1 side from the semiconductor layer 10S by the thickness of the cap layer 35 and the adhesive layer B.

[0136] <7. Variation 4> 37 and 38 are schematic diagrams showing the cross-sectional configuration of a light receiving element (light receiving elements 7A and 7B) according to Modification 4 of the second and third embodiments. In the light receiving elements 7A and 7B, a first contact layer 52, a photoelectric conversion layer 53, and a second contact layer 54 form a semiconductor layer 50S common to a plurality of pixels P, and a second electrode 55 having light blocking properties is provided between adjacent pixels P on the light incident surface S1 side of the semiconductor layer 50S. Except for this, the light receiving elements 7A and 7B have the same configuration as the light receiving element 1, and also have the same action and effect.

[0137] The element substrate 50 has, in the same manner as in the first embodiment, interlayer insulating films 58B and 58A, a first contact layer 52, a photoelectric conversion layer 53, a second contact layer 54, and a second electrode 55 in this order from the position closest to the readout circuit substrate 60. Furthermore, a passivation film 59 is provided on the second contact layer 54, the second electrode 55, the embedded layer 57, and the through electrode 57V. The interlayer insulating film 58 has a wiring layer 50W including a first electrode 51. The wiring layer 50W has contact electrodes 58EA and 58EB and a dummy electrode 58ED in the interlayer insulating films 58A and 58B. The surface of the semiconductor layer 50S facing the wiring layer 50W and the end surface (side surface) are covered with an insulating film 56. The readout circuit substrate 60 has a wiring layer 60W in contact with the bonding surface S2 of the element substrate 50, and a semiconductor substrate 61 facing the element substrate 50 with the wiring layer 60W in between.

[0138] The second electrode 55 has a structure in which a cap layer 55A and a light-shielding film 55B are laminated in this order, and is provided, for example, in a lattice shape between adjacent pixels P on the second contact layer 54 (light incident surface side). By providing the second electrode 55 in a lattice shape, the resistance of electron extraction is reduced, the demand for low resistance of the second contact layer 54 is reduced, and the second contact layer 54 can be made thinner. The light-shielding film 55B can be formed, for example, using an aluminum (Al) film, like the conductive film 35B in the second embodiment. In addition, a tungsten (W) film, a copper (Cu) film, a silver (Ag) film, or the like may be used. The light-shielding film 55B is preferably laminated on the cap layer 55A via a barrier metal film, such as a titanium (Ti) film or a titanium nitride (TiN) film. As a result, an ohmic contact is formed between the cap layer 55A and the light-shielding film 55B.

[0139] As shown in FIG. 38, a light shielding film 37 made of, for example, a black resist may be laminated on the light shielding film 55B in the vicinity of the peripheral region R2 of the element region R1.

[0140] The second electrode 55 is formed, for example, by patterning the light-shielding film 55B by dry etching, and then patterning the cap layer 55A by wet etching using the light-shielding film 55B as a metal mask. When the cap layer 55A is patterned by wet etching in this way, the cross-sectional shape of the cap layer 55A (e.g., N+InGaAs layer) patterned into a lattice shape has different characteristics depending on the crystal plane orientation. In general, a 100-plane InGaAs / InP crystal is processed to have a reverse taper in the (011) plane cross-sectional direction and a forward taper in the direction rotated 90° from the (011) plane.

[0141] The readout circuit board 60 is a so-called ROIC (Readout Integrated Circuit) as in the first embodiment, and includes a wiring layer 60W in contact with the bonding surface S2 of the element substrate 50 and a semiconductor substrate 61 facing the element substrate 50 with the wiring layer 60W in between. The semiconductor substrate 61 is for supporting the wiring layer 60W and is made of, for example, silicon (Si). The wiring layer 60W has, for example, contact electrodes 62EA, 62EB, a dummy electrode 62ED, a pixel circuit 62CA, wiring 62CB, and a pad electrode 62P in an interlayer insulating film 62 (62A, 62B). The interlayer insulating films 62A, 62B are made of, for example, an inorganic insulating material. Examples of the inorganic insulating material include silicon nitride (SiN), aluminum oxide (Al 2 O 3 ), silicon oxide (SiO 2 ) and hafnium oxide (HfO 2 The interlayer insulating films 62A and 62B may be formed using different inorganic insulating materials, or may be formed using the same inorganic insulating material.

[0142] As described above, by forming the second electrode having light shielding properties between the adjacent pixels P, it is possible to reduce light leakage from the adjacent pixel region in addition to the effect of the second embodiment. Also, the second electrode 55 has a laminated structure of the cap layer 55A and the light shielding film 55B formed by using, for example, a metal film. In this manner, by configuring the cap layer 55A and the light shielding film 55B to be laminated in this order, it is not necessary to form a transparent electrode or to thicken the second contact layer 54. Also, damage to the photoelectric conversion unit (specifically, the second contact layer 54) during patterning of the light shielding film 55B is reduced. Therefore, it is possible to improve the sensitivity.

[0143] <8. Variation 5> FIG. 39 is a schematic diagram showing a cross-sectional structure of a light receiving element (light receiving element 8) according to the fifth modified example of the first to third embodiments. The light receiving element 8 has a laminated structure of an element substrate 10 containing a compound semiconductor material and a semiconductor layer (semiconductor layer 71S, second semiconductor layer) containing silicon (Si). Except for this point, the light receiving element 8 has the same structure as the light receiving element 1, and the operation and effect are also the same. Note that FIG. 39 shows a cross-sectional structure based on the light receiving element 1 shown in FIG. 1 as an example. Also, in FIG. 39, the passivation films 16A and 16B are collectively shown as the passivation film 16 for simplification.

[0144] The light receiving element 8 includes, on the light incident surface S1 of the element substrate 10, a wiring layer 71W electrically connected to the semiconductor layer 71S, the semiconductor layer 71S, a color filter layer 41, and an on-chip lens, in this order.

[0145] The semiconductor layer 71S is provided with a photodiode PD having a pn junction for each pixel P. The wiring layer 71W includes a plurality of wirings, and for example, a signal charge generated in the photodiode PD is moved to the readout circuit board 20 for each pixel P by this wiring layer 71W.

[0146] In the light receiving element 8, for example, photoelectric conversion is performed on light having wavelengths in the visible and infrared regions. For example, light having a wavelength in the visible region is incident on the semiconductor layer 71S via the on-chip lens 42 and the color filter layer 41, and is photoelectrically converted by the photodiode PD. On the other hand, light having a wavelength in the infrared region is transmitted through the semiconductor layer 71S and is photoelectrically converted by the photoelectric conversion layer 13 of the element substrate 10. The signal charges generated in the photodiode PD and the signal charges generated in the photoelectric conversion layer 13 are read out by the readout circuit board 20.

[0147] The light receiving element 8 of this embodiment also has an embedded layer 18 formed therein, as described for the light receiving elements 1 and 2, so that it is possible to suppress defects in the manufacturing process caused by a step between the semiconductor layer 10S and the temporary substrate 33. In addition, since the semiconductor layer 71S is laminated on the element substrate 10, light with wavelengths in the visible and infrared regions can be photoelectrically converted in one pixel P. This makes it possible to increase the amount of information that can be obtained from one pixel P.

[0148] <9. Application Example 1> The light receiving element 1 (or light receiving elements 1, 2, 3, 4, 5, 6, 7A, 7B, and 8, hereinafter collectively referred to as the light receiving element 1) described in the above embodiment is applied to, for example, an imaging element. This imaging element is, for example, an infrared image sensor.

[0149] <10. Application Example 2> The above-mentioned imaging element can be applied to various types of electronic devices, such as a camera capable of capturing images in the infrared region. Fig. 40 shows a schematic configuration of an electronic device 9 (camera) as an example. The electronic device 9 is, for example, a camera capable of capturing still images or moving images, and includes an imaging element 9A formed of a light receiving element 1, an optical system (optical lens) 310, a shutter device 311, a drive unit 313 that drives the imaging element 9A and the shutter device 311, and a signal processing unit 312.

[0150] The optical system 310 guides image light (incident light) from a subject to the imaging element 9A. This optical system 310 may be composed of a plurality of optical lenses. The shutter device 311 controls the light irradiation period and the light blocking period to the imaging element 9A. The drive unit 313 controls the transfer operation of the imaging element 9A and the shutter operation of the shutter device 311. The signal processing unit 312 performs various signal processing on the signal output from the imaging element 9A. The video signal Dout after the signal processing is stored in a storage medium such as a memory, or is output to a monitor or the like.

[0151] Furthermore, the light receiving element 1 described in the present embodiment and the like can also be applied to the following electronic devices (capsule endoscopes and mobile objects such as vehicles).

[0152] <11. Application Example 1 (Endoscopic Surgery System)> The technology according to the present disclosure may be applied to various products. For example, the technology according to the present disclosure may be applied to an endoscopic surgery system.

[0153] FIG. 41 is a diagram showing an example of a schematic configuration of an endoscopic surgery system to which the technology according to the present disclosure (the present technology) can be applied.

[0154] 41 shows a state in which an operator (doctor) 11131 is performing surgery on a patient 11132 on a patient bed 11133 using an endoscopic surgery system 11000. As shown in the figure, the endoscopic surgery system 11000 is composed of an endoscope 11100, other surgical tools 11110 such as an insufflation tube 11111 and an energy treatment tool 11112, a support arm device 11120 that supports the endoscope 11100, and a cart 11200 on which various devices for endoscopic surgery are mounted.

[0155] The endoscope 11100 is composed of a lens barrel 11101, a region of a predetermined length from the tip of which is inserted into a body cavity of a patient 11132, and a camera head 11102 connected to the base end of the lens barrel 11101. In the illustrated example, the endoscope 11100 is configured as a so-called rigid scope having a rigid lens barrel 11101, but the endoscope 11100 may be configured as a so-called flexible scope having a flexible lens barrel.

[0156] An opening into which an objective lens is fitted is provided at the tip of the lens barrel 11101. A light source device 11203 is connected to the endoscope 11100, and light generated by the light source device 11203 is guided to the tip of the lens barrel by a light guide extending inside the lens barrel 11101, and is irradiated via the objective lens toward an observation target in the body cavity of the patient 11132. The endoscope 11100 may be a direct-viewing endoscope, an oblique-viewing endoscope, or a side-viewing endoscope.

[0157] An optical system and an image sensor are provided inside the camera head 11102, and reflected light (observation light) from an observation target is collected on the image sensor by the optical system. The observation light is photoelectrically converted by the image sensor to generate an electrical signal corresponding to the observation light, i.e., an image signal corresponding to an observation image. The image signal is transmitted to a camera control unit (CCU) 11201 as RAW data.

[0158] The CCU 11201 is configured with a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), etc., and performs overall control of the operations of the endoscope 11100 and the display device 11202. Furthermore, the CCU 11201 receives an image signal from the camera head 11102, and performs various types of image processing on the image signal, such as development processing (demosaic processing), for displaying an image based on the image signal.

[0159] Under the control of the CCU 11201, the display device 11202 displays an image based on an image signal that has been subjected to image processing by the CCU 11201.

[0160] The light source device 11203 is composed of a light source such as an LED (light emitting diode), and supplies the endoscope 11100 with irradiation light when photographing an operation site or the like.

[0161] The input device 11204 is an input interface for the endoscopic surgery system 11000. A user can input various information and instructions to the endoscopic surgery system 11000 via the input device 11204. For example, the user inputs an instruction to change the imaging conditions (type of irradiated light, magnification, focal length, etc.) of the endoscope 11100.

[0162] The treatment tool control device 11205 controls the driving of the energy treatment tool 11112 for cauterizing tissue, incising, sealing blood vessels, etc. The insufflation device 11206 sends gas into the body cavity of the patient 11132 via the insufflation tube 11111 to inflate the body cavity for the purpose of securing the field of view of the endoscope 11100 and securing the working space of the surgeon. The recorder 11207 is a device capable of recording various information related to the surgery. The printer 11208 is a device capable of printing various information related to the surgery in various formats such as text, image, or graph.

[0163] The light source device 11203 that supplies irradiation light to the endoscope 11100 when photographing the surgical site can be composed of a white light source composed of, for example, an LED, a laser light source, or a combination of these. When the white light source is composed of a combination of RGB laser light sources, the output intensity and output timing of each color (each wavelength) can be controlled with high precision, so that the white balance of the captured image can be adjusted in the light source device 11203. In this case, it is also possible to capture images corresponding to each of the RGB colors in a time-division manner by irradiating the observation object with laser light from each of the RGB laser light sources in a time-division manner and controlling the driving of the image sensor of the camera head 11102 in synchronization with the irradiation timing. According to this method, a color image can be obtained without providing a color filter to the image sensor.

[0164] The light source device 11203 may be controlled to change the intensity of the light it outputs at predetermined time intervals. The driving of the image sensor of the camera head 11102 may be controlled in synchronization with the timing of the change in the light intensity to obtain images in a time-division manner, and the images may be synthesized to generate an image with a high dynamic range that is free of so-called blackout and whiteout.

[0165] The light source device 11203 may be configured to supply light of a predetermined wavelength band corresponding to the special light observation. In the special light observation, for example, by utilizing the wavelength dependency of light absorption in body tissue, a narrow band light is irradiated compared to the irradiated light (i.e., white light) during normal observation, and a predetermined tissue such as blood vessels on the mucous membrane surface is photographed with high contrast, so-called narrow band imaging is performed. Alternatively, in the special light observation, a fluorescent observation may be performed in which an image is obtained by fluorescence generated by irradiating an excitation light. In the fluorescent observation, it is possible to irradiate an excitation light to a body tissue and observe the fluorescence from the body tissue (autofluorescence observation), or to locally inject a reagent such as indocyanine green (ICG) into the body tissue and irradiate the body tissue with excitation light corresponding to the fluorescent wavelength of the reagent to obtain a fluorescent image. The light source device 11203 may be configured to supply narrow band light and / or excitation light corresponding to such special light observation.

[0166] FIG. 42 is a block diagram showing an example of the functional configuration of the camera head 11102 and the CCU 11201 shown in FIG.

[0167] The camera head 11102 has a lens unit 11401, an imaging unit 11402, a drive unit 11403, a communication unit 11404, and a camera head control unit 11405. The CCU 11201 has a communication unit 11411, an image processing unit 11412, and a control unit 11413. The camera head 11102 and the CCU 11201 are connected to each other by a transmission cable 11400 so as to be able to communicate with each other.

[0168] The lens unit 11401 is an optical system provided at the connection portion with the lens barrel 11101. Observation light taken in from the tip of the lens barrel 11101 is guided to the camera head 11102 and enters the lens unit 11401. The lens unit 11401 is configured by combining a plurality of lenses including a zoom lens and a focus lens.

[0169] The imaging unit 11402 may include one imaging element (so-called single-plate type) or multiple imaging elements (so-called multiple-plate type). When the imaging unit 11402 is configured as a multiple-plate type, for example, each imaging element may generate an image signal corresponding to each of RGB, and a color image may be obtained by combining the image signals. Alternatively, the imaging unit 11402 may be configured to have a pair of imaging elements for acquiring image signals for the right eye and the left eye corresponding to a 3D (dimensional) display. By performing a 3D display, the surgeon 11131 can more accurately grasp the depth of the biological tissue in the surgical site. Note that when the imaging unit 11402 is configured as a multiple-plate type, the lens unit 11401 may also be provided in multiple systems corresponding to each imaging element.

[0170] Furthermore, the imaging unit 11402 does not necessarily have to be provided in the camera head 11102. For example, the imaging unit 11402 may be provided inside the lens barrel 11101, immediately behind the objective lens.

[0171] The driving unit 11403 is configured by an actuator, and moves the zoom lens and focus lens of the lens unit 11401 by a predetermined distance along the optical axis under the control of the camera head control unit 11405. This allows the magnification and focus of the image captured by the imaging unit 11402 to be appropriately adjusted.

[0172] The communication unit 11404 is configured by a communication device for transmitting and receiving various information to and from the CCU 11201. The communication unit 11404 transmits the image signal obtained from the imaging unit 11402 to the CCU 11201 via the transmission cable 11400 as RAW data.

[0173] Furthermore, the communication unit 11404 receives a control signal for controlling the driving of the camera head 11102 from the CCU 11201, and supplies the control signal to the camera head control unit 11405. The control signal includes information on the imaging conditions, such as information specifying the frame rate of the captured image, information specifying the exposure value at the time of capturing the image, and / or information specifying the magnification and focus of the captured image.

[0174] The image capturing conditions such as the frame rate, exposure value, magnification, and focus may be appropriately specified by a user, or may be automatically set by the control unit 11413 of the CCU 11201 based on an acquired image signal. In the latter case, the endoscope 11100 is equipped with a so-called AE (Auto Exposure) function, AF (Auto Focus) function, and AWB (Auto White Balance) function.

[0175] The camera head control unit 11405 controls the driving of the camera head 11102 based on a control signal received from the CCU 11201 via the communication unit 11404.

[0176] The communication unit 11411 is configured with a communication device for transmitting and receiving various information to and from the camera head 11102. The communication unit 11411 receives an image signal transmitted from the camera head 11102 via the transmission cable 11400.

[0177] Furthermore, the communication unit 11411 transmits, to the camera head 11102, a control signal for controlling the driving of the camera head 11102. The image signal and the control signal can be transmitted by electrical communication, optical communication, or the like.

[0178] The image processing unit 11412 performs various types of image processing on the image signal, which is RAW data sent from the camera head 11102 .

[0179] The control unit 11413 performs various controls related to imaging of the surgical site etc. by the endoscope 11100 and display of the captured image obtained by imaging the surgical site etc. For example, the control unit 11413 generates a control signal for controlling the driving of the camera head 11102.

[0180] Further, the control unit 11413 causes the display device 11202 to display the captured image showing the surgical site, etc., based on the image signal that has been image-processed by the image processing unit 11412. At this time, the control unit 11413 may recognize various objects in the captured image using various image recognition techniques. For example, the control unit 11413 can recognize surgical tools such as forceps, specific living body parts, bleeding, mist when the energy treatment tool 11112 is used, etc., by detecting the shape and color of the edge of an object included in the captured image. When the control unit 11413 causes the display device 11202 to display the captured image, it may use the recognition result to superimpose various types of surgery support information on the image of the surgical site. By superimposing and presenting the surgery support information to the surgeon 11131, the burden on the surgeon 11131 can be reduced and the surgeon 11131 can proceed with the surgery reliably.

[0181] The transmission cable 11400 connecting the camera head 11102 and the CCU 11201 is an electrical signal cable for communication of electrical signals, an optical fiber for optical communication, or a composite cable of these.

[0182] Here, in the illustrated example, communication is performed wired using a transmission cable 11400, but communication between the camera head 11102 and the CCU 11201 may also be performed wirelessly.

[0183] An example of an endoscopic surgery system to which the technology according to the present disclosure can be applied has been described above. The technology according to the present disclosure can be applied to the imaging unit 11402 among the configurations described above. By applying the technology according to the present disclosure to the imaging unit 11402, a clearer image of the surgical site can be obtained, allowing the surgeon to reliably check the surgical site.

[0184] Although an endoscopic surgery system has been described as an example here, the technology disclosed herein may also be applied to other systems, such as a microsurgery system.

[0185] <12. Application Example 2 (Mobile)> The technology according to the present disclosure can be applied to various products. For example, the technology according to the present disclosure may be realized as a device mounted on any type of moving object, such as an automobile, an electric vehicle, a hybrid electric vehicle, a motorcycle, a bicycle, a personal mobility device, an airplane, a drone, a ship, or a robot.

[0186] FIG. 43 is a block diagram showing a schematic configuration example of a vehicle control system, which is an example of a moving object control system to which the technology according to the present disclosure can be applied.

[0187] The vehicle control system 12000 includes a plurality of electronic control units connected via a communication network 12001. In the example shown in Fig. 43, the vehicle control system 12000 includes a drive system control unit 12010, a body system control unit 12020, an outside-vehicle information detection unit 12030, an inside-vehicle information detection unit 12040, and an integrated control unit 12050. Also, as functional configurations of the integrated control unit 12050, a microcomputer 12051, an audio / video output unit 12052, and an in-vehicle network I / F (Interface) 12053 are illustrated.

[0188] The drivetrain control unit 12010 controls the operation of devices related to the drivetrain of the vehicle in accordance with various programs. For example, the drivetrain control unit 12010 functions as a control device for a drive force generating device for generating a drive force of the vehicle, such as an internal combustion engine or a drive motor, a drive force transmission mechanism for transmitting the drive force to the wheels, a steering mechanism for adjusting the steering angle of the vehicle, and a braking device for generating a braking force of the vehicle.

[0189] The body system control unit 12020 controls the operation of various devices mounted on the vehicle body according to various programs. For example, the body system control unit 12020 functions as a control device for a keyless entry system, a smart key system, a power window device, or various lamps such as head lamps, back lamps, brake lamps, turn signals, and fog lamps. In this case, radio waves or signals of various switches transmitted from a portable device that replaces a key may be input to the body system control unit 12020. The body system control unit 12020 receives the input of these radio waves or signals and controls the door lock device, power window device, lamps, and the like of the vehicle.

[0190] The outside-vehicle information detection unit 12030 detects information outside the vehicle equipped with the vehicle control system 12000. For example, an imaging unit 12031 is connected to the outside-vehicle information detection unit 12030. The outside-vehicle information detection unit 12030 causes the imaging unit 12031 to capture an image outside the vehicle and receives the captured image. The outside-vehicle information detection unit 12030 may perform object detection processing or distance detection processing for a person, a car, an obstacle, a sign, or characters on a road surface, based on the received image.

[0191] The imaging unit 12031 is an optical sensor that receives light and outputs an electrical signal according to the amount of light received. The imaging unit 12031 can output the electrical signal as an image, or as distance measurement information. The light received by the imaging unit 12031 may be visible light or invisible light such as infrared light.

[0192] The in-vehicle information detection unit 12040 detects information inside the vehicle. For example, a driver state detection unit 12041 that detects the state of the driver is connected to the in-vehicle information detection unit 12040. The driver state detection unit 12041 includes, for example, a camera that captures an image of the driver, and the in-vehicle information detection unit 12040 may calculate the degree of fatigue or concentration of the driver based on the detection information input from the driver state detection unit 12041, or may determine whether the driver is dozing.

[0193] The microcomputer 12051 can calculate control target values ​​for the driving force generating device, the steering mechanism, or the braking device based on the information inside and outside the vehicle acquired by the outside-of-vehicle information detection unit 12030 or the inside-vehicle information detection unit 12040, and output a control command to the drive system control unit 12010. For example, the microcomputer 12051 can perform cooperative control aimed at realizing the functions of an ADAS (Advanced Driver Assistance System), including avoiding or mitigating a vehicle collision, following a vehicle based on the distance between vehicles, maintaining vehicle speed, warning a vehicle collision, or warning a vehicle from leaving a lane.

[0194] In addition, the microcomputer 12051 can perform cooperative control for the purpose of autonomous driving, which allows the vehicle to travel autonomously without relying on the driver's operation, by controlling the driving force generating device, steering mechanism, braking device, etc. based on information about the surroundings of the vehicle acquired by the outside vehicle information detection unit 12030 or the inside vehicle information detection unit 12040.

[0195] Furthermore, the microcomputer 12051 can output a control command to the body system control unit 12020 based on the information outside the vehicle acquired by the outside-vehicle information detection unit 12030. For example, the microcomputer 12051 can control the headlamps according to the position of a preceding vehicle or an oncoming vehicle detected by the outside-vehicle information detection unit 12030, and perform cooperative control for the purpose of preventing glare, such as switching from high beams to low beams.

[0196] The audio / video output unit 12052 transmits at least one output signal of audio and video to an output device capable of visually or audibly notifying information to passengers in the vehicle or the outside of the vehicle. In the example of Fig. 43, an audio speaker 12061, a display unit 12062, and an instrument panel 12063 are exemplified as the output device. The display unit 12062 may include at least one of an on-board display and a head-up display, for example.

[0197] FIG. 44 is a diagram showing an example of the installation position of the imaging unit 12031.

[0198] In FIG. 44, the imaging unit 12031 includes imaging units 12101, 12102, 12103, 12104, and 12105.

[0199] The imaging units 12101, 12102, 12103, 12104, and 12105 are provided at positions such as the front nose, side mirrors, rear bumper, back door, and the upper part of the windshield in the vehicle interior of the vehicle 12100. The imaging unit 12101 provided at the front nose and the imaging unit 12105 provided at the upper part of the windshield in the vehicle interior mainly acquire images of the front of the vehicle 12100. The imaging units 12102 and 12103 provided at the side mirrors mainly acquire images of the sides of the vehicle 12100. The imaging unit 12104 provided at the rear bumper or back door mainly acquires images of the rear of the vehicle 12100. The imaging unit 12105 provided at the upper part of the windshield in the vehicle interior is mainly used to detect a preceding vehicle, a pedestrian, an obstacle, a traffic light, a traffic sign, a lane, or the like.

[0200] 44 shows an example of the imaging ranges of the imaging units 12101 to 12104. Imaging range 12111 indicates the imaging range of the imaging unit 12101 provided on the front nose, imaging ranges 12112 and 12113 indicate the imaging ranges of the imaging units 12102 and 12103 provided on the side mirrors, respectively, and imaging range 12114 indicates the imaging range of the imaging unit 12104 provided on the rear bumper or back door. For example, an overhead image of the vehicle 12100 viewed from above is obtained by superimposing the image data captured by the imaging units 12101 to 12104.

[0201] At least one of the imaging units 12101 to 12104 may have a function of acquiring distance information. For example, at least one of the imaging units 12101 to 12104 may be a stereo camera made up of a plurality of imaging elements, or may be an imaging element having pixels for detecting a phase difference.

[0202] For example, the microcomputer 12051 can extract, as a preceding vehicle, a three-dimensional object that is the closest three-dimensional object on the travel path of the vehicle 12100 and travels at a predetermined speed (for example, 0 km / h or more) in approximately the same direction as the vehicle 12100, by calculating the distance to each three-dimensional object in the imaging ranges 12111 to 12114 and the change over time of this distance (relative speed with respect to the vehicle 12100) based on the distance information obtained from the imaging units 12101 to 12104. Furthermore, the microcomputer 12051 can set a vehicle distance to be secured in advance in front of the preceding vehicle, and perform automatic brake control (including follow-up stop control) and automatic acceleration control (including follow-up start control). In this way, cooperative control can be performed for the purpose of automatic driving that travels autonomously without relying on the driver's operation.

[0203] For example, the microcomputer 12051 classifies and extracts three-dimensional object data on three-dimensional objects into two-wheeled vehicles, ordinary vehicles, large vehicles, pedestrians, utility poles, and other three-dimensional objects based on distance information obtained from the imaging units 12101 to 12104, and can use the data for automatic obstacle avoidance. For example, the microcomputer 12051 distinguishes obstacles around the vehicle 12100 into obstacles that are visible to the driver of the vehicle 12100 and obstacles that are difficult to see. Then, the microcomputer 12051 determines a collision risk indicating the risk of collision with each obstacle, and when the collision risk is equal to or greater than a set value and a collision is possible, the microcomputer 12051 can provide driving assistance for collision avoidance by outputting an alarm to the driver via the audio speaker 12061 or the display unit 12062, or by performing forced deceleration or avoidance steering via the drive system control unit 12010.

[0204] At least one of the imaging units 12101 to 12104 may be an infrared camera that detects infrared rays. For example, the microcomputer 12051 can recognize a pedestrian by determining whether or not a pedestrian is present in the captured images of the imaging units 12101 to 12104. The recognition of such a pedestrian is performed, for example, by a procedure of extracting feature points in the captured images of the imaging units 12101 to 12104 as infrared cameras, and a procedure of performing pattern matching processing on a series of feature points that indicate the contour of an object to determine whether or not the object is a pedestrian. When the microcomputer 12051 determines that a pedestrian is present in the captured images of the imaging units 12101 to 12104 and recognizes the pedestrian, the audio / image output unit 12052 controls the display unit 12062 to superimpose a rectangular contour line for emphasis on the recognized pedestrian. The audio / image output unit 12052 may also control the display unit 12062 to display an icon or the like indicating a pedestrian at a desired position.

[0205] An example of a vehicle control system to which the technology according to the present disclosure can be applied has been described above. The technology according to the present disclosure can be applied to the imaging unit 12031 among the above-described configurations. By applying the technology according to the present disclosure to the imaging unit 12031, it is possible to obtain a captured image that is easier to see, thereby reducing the fatigue of the driver.

[0206] Furthermore, the light receiving element 1 described in the present embodiment and the like can also be applied to electronic devices such as surveillance cameras, biometric authentication systems, and thermography. The surveillance camera is, for example, a night vision system. By applying the light receiving element 1 to a surveillance camera, it becomes possible to recognize pedestrians and animals at night from a distance. Furthermore, by applying the light receiving element 1 to an in-vehicle camera, it is difficult to be affected by headlights and weather. For example, a captured image can be obtained without being affected by smoke and fog. Furthermore, it becomes possible to recognize the shape of an object. Furthermore, non-contact temperature measurement is possible in thermography. Temperature distribution and heat can also be detected in thermography. In addition, the light receiving element 1 can also be applied to electronic devices that detect flames, moisture, gas, and the like.

[0207] Although the first to third embodiments, modifications 1 to 5, and application examples have been described above, the present disclosure is not limited to the above-mentioned embodiments, etc., and various modifications are possible. For example, the above modifications 1 to 3 and 5 have been described as modifications of the first embodiment, but they can also be applied as modifications of the second and third embodiments.

[0208] Moreover, the layer configuration of the light receiving element described in the above embodiment is an example, and other layers may be further provided. Moreover, the material and thickness of each layer are also an example, and are not limited to those described above. For example, in the above embodiment, the semiconductor layer 10S is described as being composed of the first contact layer 12, the photoelectric conversion layer 13, and the second contact layer 14, but the semiconductor layer 10S may include the photoelectric conversion layer 13. For example, the first contact layer 12 and the second contact layer 14 may not be provided, or other layers may be included.

[0209] Furthermore, in the above-mentioned embodiments, for convenience, the signal charges are holes, but the signal charges may be electrons. For example, the diffusion region may contain n-type impurities.

[0210] In addition, in the above embodiment and the like, a light receiving element has been described as a specific example of the semiconductor element of the present technology, but the semiconductor element of the present technology may be something other than a light receiving element. For example, the semiconductor element of the present technology may be a light emitting element.

[0211] Furthermore, the effects described in the above embodiment and the like are merely examples, and other effects may be achieved, or further other effects may be included.

[0212] The present disclosure may be configured as follows. According to the present disclosure having the following configuration, an oxide (M x O y ), nitrides (M x N y ) and oxynitrides (M x O y Nz ) and a first passivation film having a non-reducing property containing any one of silicon nitride (SiN), aluminum oxide (Al 2 O 3 ), silicon oxide (SiO 2 ) and tantalum oxide (Ta 2 O 3 ) and a second passivation film including any one of the above-mentioned materials are laminated in this order from the second electrode side to provide an insulating layer, which improves adhesion between the second electrode and the insulating layer, thereby enabling an improvement in manufacturing yield. (1) an element substrate having an element region in which a wiring layer and a first semiconductor layer containing a compound semiconductor material are laminated, and a peripheral region outside the element region; a readout circuit board facing the first semiconductor layer with the wiring layer therebetween and electrically connected to the first semiconductor layer via the wiring layer; a first electrode provided in the wiring layer and electrically connected to the first semiconductor layer; a second electrode facing the first electrode with the first semiconductor layer therebetween; Acid film formed without using reducing gas Monster (M x O y ), nitrides (M x N y ) and oxynitrides (M x O y N z ) with 2.0g / cm 3 More than 8.0g / cm 3 The film density of the element region is as follows: The first passivation film and the silicon nitride (SiN) and aluminum oxide (Al 2 O 3 ), silicon oxide (SiO 2 ) and tantalum oxide (Ta 2 O 3 ) and provided across the element region and the peripheral region. A second passivation film and the second electrode On top The insulating layers are laminated in this order. A semiconductor element comprising: (M is any one of silicon (Si), titanium (Ti), hafnium (Hf), zirconium (Zr), and yttrium (Y). x, y, and z are integers of 1 or more.) (2 ) before The semiconductor element according to (1) above, wherein the first passivation film has a multi-layer structure. (3) the insulating layer has an opening in the vicinity of the peripheral region of the element region; The semiconductor element according to (1) or (2), further comprising a conductive film disposed above the insulating layer in the vicinity of the peripheral region and electrically connected to the second electrode through the opening. (4) The conductive film is formed using aluminum (Al). (3) The semiconductor element according to claim 1. (5) a barrier metal is further provided between the second electrode and the conductive film in the opening; (4) The semiconductor element according to claim 1. (6) the conductive film is provided from a vicinity of the peripheral region of the element region to the peripheral region. Any one of (3) to (5) above The semiconductor element according to claim 1. (7) the element substrate further has a through hole in the peripheral region, the through hole penetrating to the readout circuit substrate; the conductive film is electrically connected to the readout circuit board via the through hole; Any one of (3) to (6) above The semiconductor element according to claim 1. (8) The conductive film has a light-shielding property. Any one of (3) to (7) above The semiconductor element according to claim 1. (9) A light-shielding film made of a black resist is further provided above the conductive film. Any one of (3) to (8) above The semiconductor element according to claim 1. (10) an end surface of the light-shielding film on the element region side extends toward the element region further than an end surface of the conductive film on the element region side; (9) The semiconductor element according to claim 1. (11) the peripheral region of the element substrate has a bonding surface with the readout circuit substrate; Any one of (1) to (10) above The semiconductor element according to claim 1. (12) the element region of the element substrate is bonded to the readout circuit substrate on the same plane as the bonding surface of the peripheral region; (11) The semiconductor element according to claim 1. (13) the element substrate further includes a buried layer surrounding the first semiconductor layer in the peripheral region; (11) or (12) above The semiconductor element according to claim 1. (14) The compound semiconductor material absorbs light having a wavelength in the infrared region. Any one of (1) to (13) above The semiconductor element according to claim 1. (15) The compound semiconductor material is any one of InGaAs, InAsSb, InAs, InSb, and HgCdTe; Any one of (1) to (14) above The semiconductor element according to claim 1. (16) further comprising an on-chip lens on a surface of the first semiconductor layer opposite to a surface facing the readout circuit substrate. Any one of (1) to (15) above The semiconductor element according to claim 1.

[0213] This application claims priority based on Japanese Patent Application No. 2018-245180, filed on December 27, 2018 in the Japan Patent Office, the entire contents of which are incorporated herein by reference.

[0214] Those skilled in the art will recognize that various modifications, combinations, subcombinations, and variations may occur to those skilled in the art depending on design requirements and other factors, and that such modifications are within the scope of the appended claims and their equivalents.

Claims

1. an element substrate having an element region in which a wiring layer and a first semiconductor layer containing a compound semiconductor material are laminated, and a peripheral region outside the element region; a readout circuit board facing the first semiconductor layer with the wiring layer therebetween and electrically connected to the first semiconductor layer via the wiring layer; a first electrode provided in the wiring layer and electrically connected to the first semiconductor layer; a second electrode facing the first electrode with the first semiconductor layer therebetween; Oxide film formed without using reducing gas (M ｘ O ｙ ), nitrides (M ｘ N ｙ ) and oxynitrides (M ｘ O ｙ N ｚ a first passivation film provided in the element region, the first passivation film having a non-reducing property and a film density of 2.0 g / cm 3 or more and 8.0 g / cm 3 or less, the first passivation film including any one of silicon nitride (SiN), aluminum oxide (Al ２ O ３ ), silicon oxide (SiO ２ ) and tantalum oxide (Ta ２ O ３ a second passivation film provided across the element region and the peripheral region; and an insulating layer laminated in this order on the second electrode. A semiconductor element comprising: (M is any one of silicon (Si), titanium (Ti), hafnium (Hf), zirconium (Zr) and yttrium (Y). x, y, and z are integers of 1 or more.)

2. The semiconductor device according to claim 1 , wherein the first passivation film has a multi-layer structure.

3. the insulating layer has an opening in the vicinity of the peripheral region of the element region; The semiconductor element according to claim 1 , further comprising a conductive film disposed above the insulating layer in the vicinity of the peripheral region and electrically connected to the second electrode through the opening.

4. The semiconductor device according to claim 3 , wherein the conductive film is made of aluminum (Al).

5. The semiconductor element according to claim 4 , further comprising a barrier metal in the opening between the second electrode and the conductive film.

6. The semiconductor element according to claim 3 , wherein the conductive film is provided from a vicinity of the peripheral region of the element region to the peripheral region.

7. the element substrate further has a through hole in the peripheral region, the through hole penetrating to the readout circuit substrate; The semiconductor element according to claim 3 , wherein the conductive film is electrically connected to the readout circuit board through the through hole.

8. The semiconductor device according to claim 3 , wherein the conductive film has a light-shielding property.

9. 4. The semiconductor device according to claim 3, further comprising a light-shielding film made of a black resist above said conductive film.

10. 10. The semiconductor device according to claim 9, wherein an end surface of said light-shielding film on said element region side extends toward said element region further than an end surface of said conductive film on said element region side.

11. The semiconductor device according to claim 1 , wherein the peripheral region of the device substrate has a bonding surface with the readout circuit substrate.

12. The semiconductor device according to claim 11 , wherein the device region of the device substrate is bonded to the readout circuit substrate on the same plane as the bonding surface of the peripheral region.

13. The semiconductor device according to claim 11 , wherein the device substrate further comprises a buried layer surrounding the first semiconductor layer in the peripheral region.

14. The semiconductor device according to claim 1 , wherein the compound semiconductor material absorbs light with wavelengths in the infrared region.

15. 2. The semiconductor device of claim 1, wherein the compound semiconductor material is any one of InGaAs, InAsSb, InAs, InSb, and HgCdTe.

16. The semiconductor device according to claim 1 , further comprising an on-chip lens on a surface of said first semiconductor layer opposite to a surface facing said readout circuit substrate.

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