Fully self-aligned subtractive etching

Abstract

An apparatus and method are described that provide fully self-aligned first metallization lines (M1), vias, and second metallization lines (M2), where the first metallization lines include a set of first conductive lines extending along a first direction on a first insulating layer on a substrate, the second metallization lines include a set of second conductive lines on an etch stop layer above the first metallization lines, the set of second conductive lines extending along a second direction that intersects the first direction at an angle, at least one via between the first and second metallization lines, the at least one via including a via metallization layer, the at least one via being self-aligned to one of the first metallization lines along the second direction, and the at least one via being self-aligned to one of the second metallization lines along the first direction, the second direction intersecting the first direction at an angle.

Description

[Technical field]

[0001]

[0001] Embodiments of the present disclosure relate to the field of electronic device manufacturing, and more particularly, to integrated circuit (IC) manufacturing. More specifically, embodiments of the present disclosure are directed to methods of fabricating self-aligned metallization layers and vias. [Background technology]

[0002]

[0002] In general, an integrated circuit (IC) refers to a set of electronic devices, such as transistors, formed on a small chip of semiconductor material, usually silicon. Typically, an IC includes one or more metallization layers with metal lines for connecting the electronic devices of the IC to each other and to external connections. Layers of interlayer dielectric material are usually disposed between the metallization layers of an IC for insulation.

[0003]

[0003] Ruthenium has replaced copper as the back-end-of-line (BEOL) interconnect material for sub-5 nm technology nodes. As current node sizes shrink, interconnect resistance / capacitance (RC) delay is more than a thousand times larger than the transistor delay, and interconnect delay has come to dominate the total delay time. Reducing RC delay has become one of the biggest scaling challenges. Therefore, methods and devices to reduce interconnect delay are needed. Summary of the Invention

[0004] Apparatus and methods for forming an electronic device are described. In one or more embodiments, a method for forming an electronic device includes forming a first metallization line having a first width, forming a via mask in a via metallization layer over the first metallization line, the via mask having a mask width and a mask length, forming a via having a via metal length equal to the mask width and a via metal width equal to the first width, and forming a second metallization line.

[0005]

[0005] One or more embodiments are directed to an electronic device comprising: a first metallization line including a set of first conductive lines extending along a first direction on a first insulating layer on a substrate; a second metallization line including a set of second conductive lines on an etch stop layer above the first metallization lines, the set of second conductive lines extending along a second direction intersecting the first direction at an angle; and at least one via between the first metallization line and the second metallization line, the at least one via including a via metallization layer, the at least one via being self-aligned to one of the first metallization lines along the second direction and the at least one via being self-aligned to one of the second metallization lines along the first direction, the second direction intersecting the first direction at an angle.

[0006] In one or more embodiments, a processor-implemented method for forming a fully self-aligned via is described. In one or more embodiments, the processor-implemented method includes receiving data for a first configuration that controls formation of a first metallization line having a first width, receiving data for a second configuration that controls formation of a via mask over the first metallization line, the via mask having a mask width and a mask length, receiving data for a third configuration that controls formation of a via having a via metal length equal to the mask width and a via metal width equal to the first width, and receiving data for a fourth configuration that controls formation of the second metallization line. [Brief description of the drawings]

[0007]

[0007] In order that the above-mentioned features of the present disclosure may be understood in detail, the present disclosure summarized above will now be more particularly described by reference to embodiments, some of which are illustrated in the accompanying drawings. It should be noted, however, that the accompanying drawings depict only typical embodiments of the present disclosure and therefore should not be considered as limiting the scope of the present disclosure, which may admit of other equally effective embodiments. The embodiments described herein are presented by way of example and not by way of limitation to the figures of the accompanying drawings in which like references indicate similar elements.

[0008] [Figure 1] FIG. 1 is a perspective view illustrating a structure of an electronic device according to one or more embodiments. [Diagram 2] FIG. 1 is a perspective view illustrating a structure of an electronic device according to one or more embodiments. [Diagram 3] FIG. 1 is a perspective view illustrating a structure of an electronic device according to one or more embodiments. [Figure 4] FIG. 1 is a perspective view illustrating a structure of an electronic device according to one or more embodiments. [Diagram 5] FIG. 1 is a perspective view illustrating a structure of an electronic device according to one or more embodiments. [Figure 6] FIG. 1 is a perspective view illustrating a structure of an electronic device according to one or more embodiments. [Figure 7] FIG. 1 is a perspective view illustrating a structure of an electronic device according to one or more embodiments. [Figure 8] FIG. 1 is a perspective view illustrating a structure of an electronic device according to one or more embodiments. [Figure 9] FIG. 1 is a perspective view illustrating a structure of an electronic device according to one or more embodiments. [Figure 9A] FIG. 1 is a perspective view illustrating a structure of an electronic device according to one or more embodiments. [Figure 10] FIG. 1 is a perspective view illustrating a structure of an electronic device according to one or more embodiments. [Figure 10A] FIG. 1 is a perspective view illustrating a structure of an electronic device according to one or more embodiments. [Figure 11]FIG. 1 is a perspective view illustrating a structure of an electronic device according to one or more embodiments. [Figure 11A] FIG. 1 is a perspective view illustrating a structure of an electronic device according to one or more embodiments. [Figure 11B] FIG. 1 is a perspective view illustrating a structure of an electronic device according to one or more embodiments. [Figure 12] FIG. 1 is a perspective view illustrating a structure of an electronic device according to one or more embodiments. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009]

[0024] Before describing several example embodiments of the present disclosure, it is to be understood that the present disclosure is not limited to the details of construction or process steps set forth in the following description as the present disclosure is capable of other embodiments and of being practiced or carried out in various ways.

[0010]

[0025] As used herein, "substrate" refers to any substrate or material surface formed on a substrate on which a film treatment is performed in a manufacturing process. For example, substrate surfaces on which treatment may be performed include materials such as silicon, silicon oxide, strained silicon, silicon-on-insulator (SOI), carbon-doped silicon oxide, amorphous silicon, doped silicon, germanium, gallium arsenide, glass, sapphire, and any other materials such as metals, metal nitrides, metal alloys, and other conductive materials, depending on the application. Substrates include, but are not limited to, semiconductor wafers. Substrates may be exposed to pretreatment processes that polish, etch, reduce, oxidize, hydroxylate, anneal, and / or bake the substrate surface. In addition to film treatment directly on the surface of the substrate itself, in the present disclosure, any of the disclosed film treatment steps may also be performed on underlying layers formed on the substrate, as disclosed in more detail below, and the term "substrate surface" is intended to include such underlying layers as the context indicates. Thus, for example, when a film / layer or partial film / layer is deposited on a substrate surface, the exposed surface of the newly deposited film / layer becomes the substrate surface.

[0011]

[0026] As used herein and in the appended claims, the terms "precursor," "reactant," "reactive gas," and the like are used interchangeably to refer to any gaseous species capable of reacting with the substrate surface.

[0012]

[0027] An apparatus and method are described that provide self-aligned metallization layers (i.e., M1 and M2) and self-aligned vias. In one or more embodiments, an oversized mask is used for larger overlay margins while an additional etch stop allows the critical dimension (CD) of the via to be adjusted to match the critical dimension of the metal line above it, creating a completely self-aligned metallization layer M1, via, and metallization layer M2. Furthermore, in one or more embodiments, the final via metal area is maximized such that the via resistance is reduced.

[0013]

[0028] In the following description, numerous specific details are set forth, such as specific materials, chemicals, dimensions of elements, etc., to provide a thorough understanding of one or more embodiments of the present disclosure. However, it will be apparent to one of ordinary skill in the art that one or more embodiments of the present disclosure may be practiced without these specific details. In other instances, semiconductor manufacturing processes, techniques, materials, equipment, etc. have not been described in detail in order to avoid unnecessarily obscuring this description. One of ordinary skill in the art will be able, with the included description, to implement the appropriate functionality without undue experimentation.

[0014]

[0029] While certain exemplary embodiments of the present disclosure have been described and illustrated in the accompanying drawings, it is to be understood that the above embodiments are merely illustrative and do not limit the present disclosure, and that the present disclosure is not limited to the specific constructions and arrangements described and illustrated, as such may be modified by those skilled in the art.

[0015]

[0030] References throughout this specification to "one embodiment," "particular embodiment," or "embodiment" mean that a particular feature, structure, or characteristic described in connection with an embodiment is included in at least one embodiment of the disclosure. Thus, the appearances of phrases such as "in one or more embodiments," or "in an embodiment," in various places throughout this specification do not necessarily all refer to the same embodiment of the disclosure. Furthermore, particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

[0016]

[0031] FIG. 1 is a perspective view illustrating the structure of an electronic device 100 according to one or more embodiments. An insulating layer 104 is provided on top of a substrate 102. In one or more embodiments, the insulating layer may include any suitable material known to those of skill in the art. In a particular embodiment, the insulating layer 104 is made of silicon oxide (SiO x ).

[0017]

[0032] In one or more embodiments, the substrate 102 comprises at least one semiconductor material, such as silicon (Si), carbon (C), germanium (Ge), silicon germanium (SiGe), gallium (GaAs), indium phosphide (InP), indium gallium arsenide (InGaAs), indium aluminum indium arsenide (InAlAs), other semiconductor materials, or any combination thereof. In an embodiment, the substrate 102 is a semiconductor-on-isolator (SOI) substrate that includes a bulk lower substrate, an intermediate insulating layer, and an upper single crystal layer. The upper single crystal layer can include any of the materials listed above, such as silicon. In various embodiments, the substrate 102 can be, for example, an organic substrate, a ceramic substrate, a glass substrate, or a semiconductor substrate. Although this document describes some examples of materials from which substrate 102 may be formed, any material that may serve as a foundation upon which passive and active electronic devices (e.g., transistors, memory, capacitors, inductors, resistors, switches, integrated circuits, amplifiers, optoelectronic devices, or any other electronic device) may be constructed is within the spirit and scope of the present disclosure.

[0018]

[0033] In one or more embodiments, the substrate 102 includes one or more metallization interconnect layers for an integrated circuit. In at least some embodiments, the substrate 102 includes interconnects, e.g., vias, configured to connect the metallization layers. In at least some embodiments, the substrate 102 includes electronic devices, e.g., transistors, memory, capacitors, resistors, optoelectronic devices, switches, and any other active and passive electronic devices, separated by electrically insulating layers, e.g., interlayer dielectrics, trench isolation layers, or any other insulating layers known to those skilled in the art of electronic device manufacturing. In one or more embodiments, the substrate 102 includes one or more layers on the substrate 102 to confine lattice dislocations and defects.

[0019]

[0034] In one or more embodiments, the insulating layer 104 can be any material suitable for isolating adjacent devices and preventing leakage. In one or more embodiments, the insulating layer 104 is a flowable dielectric material. In one or more embodiments, the electrical insulating layer 104 is an oxide layer, such as silicon dioxide, or any other electrical insulating layer as determined by the electronic device design. In one or more embodiments, the insulating layer 104 comprises an interlayer dielectric (ILD). In one or more embodiments, the insulating layer 104 is a low-k dielectric, including, but not limited to, materials such as silicon dioxide, silicon oxide, silicon oxycarbide, carbon-doped oxide ("CDO"), such as carbon-doped silicon dioxide, porous silicon dioxide (SiO2), silicon nitride (SiN), or any combination thereof.

[0020]

[0035] In one or more embodiments, the insulating layer 104 comprises a dielectric material having a dielectric constant value less than 5. In one or more embodiments, the insulating layer 104 comprises a dielectric material having a dielectric constant value less than 2. In at least some embodiments, the insulating layer 104 comprises an oxide, a carbon-doped oxide, a porous silicon dioxide, a carbide, an oxycarbide, a nitride, an oxynitride, an oxycarbonitride, a polymer, a phosphosilicate glass, a fluorine-doped silicon dioxide, an organosilicate glass (OSG), a fluorosilicate (SiOF) glass, an organosilicate glass (SiOCH), a spin-on organic polymer dielectric, a spin-on silicon-based polymer dielectric material, an air gap, or any combination thereof, other electrically insulating layers as determined by the electronic device design, or any combination thereof. In at least some embodiments, the insulating layer 104 may comprise a photosensitive material such as polyimide, an epoxy, benzocyclobutene (BCB), and a WPR series material, or a spin-on glass.

[0021]

[0036] In one or more embodiments, insulating layer 104 is a low-k interlevel dielectric to separate one metal line from another metal line on substrate 102. In one or more embodiments, the thickness of insulating layer 104 is approximately in the range of about 1 nanometer (nm) to about 2 microns (μm).

[0022]

[0037] In an embodiment, the insulating layer 104 is deposited utilizing one of a number of deposition techniques, such as, but not limited to, chemical vapor deposition ("CVD"), physical vapor deposition ("PVD"), molecular beam epitaxy ("MBE"), metalorganic chemical vapor deposition ("MOCVD"), atomic layer deposition ("ALD"), spin-on, or other insulating deposition techniques known to those skilled in the art of microelectronic device manufacturing.

[0023]

[0038] In one or more embodiments, a first metallization layer 106 is formed on top of the insulating layer 104. In one or more embodiments, the first metallization layer 106 comprises any suitable metal known to those skilled in the art, including, but not limited to, copper (Cu), ruthenium (Ru), nickel (Ni), cobalt (Co), chromium (Cr), iron (Fe), manganese (Mn), titanium (Ti), aluminum (Al), hafnium (Hf), tantalum (Ta), tungsten (W), vanadium (V), molybdenum (Mo), palladium (Pd), gold (Au), silver (Ag), platinum (Pt), indium (In), tin (Sn), lead (Pb), antimony (Sb), bismuth (Bi), zinc (Zn), or cadmium (Cd). In one or more particular embodiments, the first metallization layer 106 comprises ruthenium (Ru).

[0024]

[0039] In one or more embodiments, a via metallization layer 107 is formed on top of the etch stop layer 108. In one or more embodiments, the via metallization layer comprises any suitable metal known to those skilled in the art, including, but not limited to, copper (Cu), ruthenium (Ru), nickel (Ni), cobalt (Co), chromium (Cr), iron (Fe), manganese (Mn), titanium (Ti), aluminum (Al), hafnium (Hf), tantalum (Ta), tungsten (W), vanadium (V), molybdenum (Mo), palladium (Pd), gold (Au), silver (Ag), platinum (Pt), indium (In), tin (Sn), lead (Pb), antimony (Sb), bismuth (Bi), zinc (Zn), or cadmium (Cd). In one or more particular embodiments, the via metallization layer 107 comprises ruthenium (Ru).

[0025]

[0040] In one or more embodiments, the first metallization layer 106 and the via metallization layer 107 may be separated by an etch stop layer 108. The etch stop layer 108 may include any suitable material known to one of skill in the art. In one or more embodiments, the etch stop layer 108 includes one or more of titanium nitride (TiN), titanium (Ti), tantalum (Ta), or tantalum nitride (TaN), aluminum oxide (Al2O3), titanium oxide (TiO2), silicon nitride (SiN), silicon carbonitride (SiCN), tungsten carbide (WC), tungsten boron carbide (WBC), silicon boride (SiBx), boron carbide (BC), amorphous carbon, boron nitride (BN), boron carbon nitride (BCN), and the like. In one or more particular embodiments, the etch stop layer 108 includes titanium nitride (TiN).

[0026]

[0041] In one or more embodiments, a hard mask 110 is formed on the via metallization layer 107. The hard mask 110 may include an extreme ultraviolet (EUV) tri-layer 114 and a hard mask layer 112. The EUV tri-layer 114 may include one or more of photoresist, spin-on carbon, and spin-on glass. The hard mask layer 112 may include any suitable material known to those skilled in the art. In one or more embodiments, the hard mask layer 112 includes one or more of titanium nitride (TiN), titanium (Ti), tantalum (Ta), or tantalum nitride (TaN), aluminum oxide (Al2O3), titanium oxide (TiO2), silicon nitride (SiN), silicon carbonitride (SiCN), tungsten carbide (WC), tungsten boron carbide (WBC), silicon boride (SiBx), boron carbide (BC), amorphous carbon, boron nitride (BN), boron carbon nitride (BCN), and the like. In one or more particular embodiments, the hardmask layer 112 comprises titanium nitride (TiN).

[0027]

[0042] 2 is a perspective view illustrating a structure of the electronic device 100 according to one or more embodiments. In one or more embodiments, at least one metallization line 115 (M1) is patterned and is part of the back-end metallization of the electronic device 100. The first metallization line 115 extends along a first direction x. The conductive metal lines 115a / 115b may be separated by trenches 116. In one or more embodiments, the first metallization layer 106 and the via metallization layer 107 are patterned and etched using a hard mask 110 using one or more patterning and etching techniques well known to those skilled in the art of microelectronic device manufacturing to form at least one trench 116 and the first metallization line 115.

[0028]

[0043] In one or more embodiments, the depth of trench 116 ranges from about 1 nm to about 500 nm. In one or more embodiments, the depth of trench 116 ranges from about 10% to about 100% of the thickness of conductive metal lines 115a / 115b.

[0029]

[0044] 3 is a perspective view illustrating the structure of electronic device 100 according to one or more embodiments. In one or more embodiments, a gap fill layer 118 is formed over metal lines 115a / 115b and in trenches 116.

[0030]

[0045] In one or more embodiments, the gap fill layer 118 is deposited using one of a number of deposition techniques, such as, but not limited to, ALD, CVD, PVD, MBE, MOCVD, spin-on, or other liner deposition techniques known to those skilled in the art of microelectronic device manufacturing. In one or more embodiments, the gap fill layer 118 comprises a flowable low-k material. The flowable low-k material may comprise any suitable material known to those skilled in the art.

[0031]

[0046] In one or more embodiments, the gap fill layer 118 is a flowable silicon oxide (FSiOx) layer. In at least some embodiments, the gap fill layer 118 is an oxide layer, such as silicon dioxide (SiO2), or any other electrically insulating layer as determined by the design of the electronic device. In one or more embodiments, the gap fill layer 118 is an interlayer dielectric (ILD). In one or more embodiments, the gap fill layer 118 is a low-k dielectric, including, but not limited to, materials such as silicon dioxide, silicon oxide, carbon-based materials, such as porous carbon films, carbon-doped oxides ("CDO"), such as carbon-doped silicon dioxide, porous silicon dioxide, porous silicon oxide, porous hydrocarbon oxides (SiOCH), silicon nitride, or any combination thereof. In one or more embodiments, the gap fill layer 118 is a dielectric material having a dielectric constant value less than 3. In more particular embodiments, gap fill layer 118 is a dielectric material having a dielectric constant value approximately in the range of about 2.2 to about 2.7. In one or more embodiments, gap fill layer 118 comprises a dielectric material having a dielectric constant value of less than 2. In one or more embodiments, gap fill layer 118 represents one of the insulating layers described above with respect to insulating layer 104.

[0032]

[0047] In one or more embodiments, gap fill layer 118 is a low-k interlevel dielectric to separate one metal line from another. In one or more embodiments, gap fill layer 118 is deposited using one of the deposition techniques such as, but not limited to, CVD, spin-on, ALD, PVD, MBE, MOCVD, or other low-k insulating layer deposition techniques known to those skilled in the art of microelectronic device manufacturing.

[0033]

[0048] In some embodiments, the formation of the gap fill layer 118 is described as utilizing a bulk deposition of a gap fill material to form an overburden on top of the substrate, followed by planarization to remove the overburden. In some embodiments, the gap fill layer 118 is formed by a selective deposition process that does not form a substantial overburden (e.g., <5% area) on the conductive metal lines 115a / 115b.

[0034]

[0049] 4 illustrates a perspective view of a structure of electronic device 100 according to one or more embodiments. In one or more embodiments, a via hard mask 124 is formed on the top surface of gap fill layer 118 and on metal lines 115b. In some embodiments, via hard mask 124 includes an extreme ultraviolet (EUV) tri-layer 122 on hard mask layer 120. In one or more embodiments, EUV tri-layer 122 includes one or more of a photoresist, a spin-on carbon layer, and a spin-on glass layer. In one or more embodiments, hard mask layer 120 may include any suitable material known to one of skill in the art. In one or more embodiments, the hard mask layer 120 comprises one or more of titanium nitride (TiN), titanium (Ti), tantalum (Ta) or tantalum nitride (TaN), aluminum oxide (Al2O3), titanium oxide (TiO2), silicon nitride (SiN), silicon carbonitride (SiCN), tungsten carbide (WC), tungsten boron carbide (WBC), silicon boride (SiBx), boron carbide (BC), amorphous carbon, boron nitride (BN), boron carbon nitride (BCN), etc. In one or more particular embodiments, the hard mask layer 120 comprises titanium nitride (TiN).

[0035]

[0050] Without being bound by theory, it is believed that using an oversized via hard mask 124 may provide a larger overlay margin. In one or more embodiments, the via hard mask 124 has a size that is between the critical dimension (CD) and pitch size of the metal lines 115b. In one or more embodiments, the via hard mask 124 has a width W extending along a second direction y and a length L extending along a first direction x. In one or more embodiments, the width W and the length L are the same. In other embodiments, the width W and the length L are different. In one or more embodiments, the via hard mask 124 has a width W in the range of about 1 nm to about 100 nm, including in the range of about 5 nm to about 75 nm, in the range of about 5 nm to about 50 nm, in the range of about 5 nm to about 25 nm, and in the range of about 10 nm to about 25 nm. In one or more embodiments, the via hard mask 124 has a length in the range of about 1 nm to about 100 nm, including about 5 nm to about 75 nm, about 5 nm to about 50 nm, about 5 nm to about 25 nm, and about 10 nm to about 25 nm. In embodiments in which the width W and length L of the via hard mask 124 are the same, the via hard mask 124 has a square shape.

[0036]

[0051] In one or more embodiments, the metal pitch size is about 22 nm, the metal line CD is about 11 nm, and the oversized via hard mask ranges from about 11 nm to about 22 nm. In one or more embodiments, the via hard mask 124 has a width W of about 19 nm and a length L of about 19 nm, which minimizes misregistration margins and the risk of line shorts.

[0037]

[0052] In one or more embodiments, the via hard mask 124 is oversized. As used herein, the term "oversized" refers to the width W and length L of the via hard mask 124 relative to the underlying metal lines 115b. In one or more embodiments, the width W of the via hard mask 124 is greater than the width of the metal lines 115b.

[0038]

[0053] 5 is a perspective view illustrating a structure of electronic device 100 according to one or more embodiments. In one or more embodiments, via metallization layer 107 is etched to expose the top surface of etch stop layer 108 and hard mask layer 120.

[0039]

[0054] 6 illustrates a perspective view of the structure of electronic device 100 according to one or more embodiments. In one or more embodiments, etch stop layer 108 and hard mask layer 120 are removed to form opening 126. In one or more embodiments, hard mask layer 120 may be removed by any technique known to those skilled in the art, including but not limited to selective dry etching.

[0040]

[0055] 7 is a perspective view illustrating the structure of electronic device 100 according to one or more embodiments. In one or more embodiments, gap fill layer 118 is deposited to fill openings 126.

[0041]

[0056] In some embodiments, the formation of the gap fill layer 118 is described as utilizing a bulk deposition of a gap fill material to form an overburden on top of the substrate, followed by planarization to remove the overburden. In some embodiments, the gap fill layer 118 is formed by a selective deposition process that does not substantially form an overburden on the conductive metal lines 115a / 115b (e.g., <5% area).

[0042]

[0057] In one or more embodiments, after gap fill layer 118 is deposited and optionally planarized, via 119 in gap fill layer 118 is exposed. Via 119 includes via metallization layer 107.

[0043]

[0058] In one or more embodiments, the via 119 has a metal length extending along a first direction that is the same as the length of the oversized mask 124. In one or more embodiments, the via metal length is in the range of about 1 nm to about 100 nm, including in the range of about 5 nm to about 75 nm, about 5 nm to about 50 nm, about 5 nm to about 25 nm, and about 10 nm to about 25 nm. In a particular embodiment, the via metal length is about 19 nm. In one or more embodiments, the via metal width is the same as the metal line 115a (M1) width due to simultaneous double metal etching. In one or more embodiments, the shape of the via metal, e.g., rectangular, may allow some margin for misalignment / displacement error of the M2 mask.

[0044]

[0059] In one or more embodiments, after the second lithography, a rectangular via metal is created by subtractive etching. In one or more embodiments, the rectangular via rather than the square via provides a larger edge placement error (EPE) margin of error for the third lithography, M2 alignment. After the second metallization line is formed, a portion of the rectangular via metal immediately below the second metallization line is protected from etching rather than forming a square via metal. The excess via metal, which is the volume of the rectangular metal minus the square metal, is etched to form two trenches that are later filled with a low-k gap-fill material.

[0045]

[0060] 8 illustrates a perspective view of the structure of electronic device 100 according to one or more embodiments. In one or more embodiments, a second metallization layer 128 is formed on top of gap fill layer 118. In one or more embodiments, second metallization layer 128 is deposited using one of a number of deposition techniques, such as, but not limited to, CVD, spin-on, ALD, PVD, MBE, MOCVD, or other deposition techniques known to those skilled in the art of microelectronic device manufacturing.

[0046]

[0061] In one or more embodiments, the second metallization layer 128 may include any suitable metal known to one of ordinary skill in the art. In one or more embodiments, the second metallization layer 128 includes copper (Cu), ruthenium (Ru), nickel (Ni), cobalt (Co), chromium (Cr), iron (Fe), manganese (Mn), titanium (Ti), aluminum (Al), hafnium (Hf), tantalum (Ta), tungsten (W), vanadium (V), molybdenum (Mo), palladium (Pd), gold (Au), silver (Ag), platinum (Pt), indium (In), tin (Sn), lead (Pb), antimony (Sb), bismuth (Bi), zinc (Zn), or cadmium (Cd). In a particular embodiment, the second metallization layer 128 includes ruthenium (Ru).

[0047]

[0062] In one or more embodiments, a hardmask 130 is formed on the second metallization layer 128. In one or more embodiments, the hardmask 130 includes an extreme ultraviolet (EUV) tri-layer 132 on a hardmask layer 134. The hardmask layer 134 may include any suitable material known to those of skill in the art. In one or more embodiments, the hardmask layer 134 includes one or more of titanium nitride (TiN), titanium (Ti), tantalum (Ta), or tantalum nitride (TaN), aluminum oxide (Al2O3), titanium oxide (TiO2), silicon nitride (SiN), silicon carbonitride (SiCN), tungsten carbide (WC), tungsten boron carbide (WBC), silicon boride (SiBx), boron carbide (BC), amorphous carbon, boron nitride (BN), boron carbon nitride (BCN), and the like. In one or more particular embodiments, the hardmask layer 134 includes titanium nitride (TiN).

[0048]

[0063] FIG. 9 is a perspective view illustrating the structure of the electronic device 100 according to one or more embodiments. FIG. 9A is a cross-sectional view of the electronic device 100 taken along axis A of FIG. 9 according to one or more embodiments. In one or more embodiments, at least one second metallization line 136 (M2) is patterned and is part of the back-end metallization of the electronic device 100, the second metallization line 136 extending along a second direction y. The conductive metal lines 136a / 136b may be separated by trenches 138. In one or more embodiments, the second metallization layer 128 is patterned and etched using a hard mask 130 using one or more patterning and etching techniques well known to those skilled in the art of microelectronic device manufacturing to form the trenches 138 and the second metallization lines 136. In one or more embodiments, the device is etched to expose the top surface of the gap fill layer 118, the top surface of the etch stop layer 134, and to form the trenches 138. In other words, in one or more embodiments, second metallization layer 128 and hardmask layer 143 are etched to expose the top surface of gap fill layer 118 and rectangular via 119.

[0049]

[0064] 10 is a perspective view illustrating a structure of an electronic device 100 according to one or more embodiments. FIG 10A is a cross-sectional view of the electronic device 100 taken along axis B of FIG 10 according to one or more embodiments. In one or more embodiments, the excess second metallization layer 128 in the trench 138 is etched and the hard mask layer 134 is removed. In one or more embodiments, this process may be referred to as via trimming.

[0050]

[0065] In one or more embodiments, via trimming is performed by dry etching the excess via metal in the trench.

[0051]

[0066] Figure 11 illustrates a perspective view of the structure of an electronic device 100 in accordance with one or more embodiments. Figure 11A illustrates a cross-sectional view of the electronic device 100 taken along axis C in Figure 11 in accordance with one or more embodiments. Figure 11B illustrates a cross-sectional view of the electronic device 100 taken along axis D in Figure 11 in accordance with one or more embodiments. In one or more embodiments, a gap fill layer 118 is formed on top of the second metallization layer 128.

[0052]

[0067] In some embodiments, the formation of the gap fill layer 118 is described as utilizing a bulk deposition of a gap fill material to form an overburden on top of the substrate, followed by planarization to remove the overburden. In some embodiments, the gap fill layer 118 is formed by a selective deposition process that does not form a substantial overburden (e.g., <5% area) on the conductive metal lines 136a / 136b.

[0053]

[0068] FIG. 12 is a perspective view illustrating the structure of an electronic device 100 according to one or more embodiments. With reference to FIG. 12, the gap fill layer 118 has been removed to make the structure of the device more easily visible. The device includes an insulating layer 104 on a substrate 102 and a first metallization line 115a / 115b that is fully self-aligned with a second metallization line 136a / 136b. The first metallization line 115a / 115b extends along a first direction x, and the second metallization line 136a / 136b extends along a second direction y. In some embodiments, an etch stop layer 108 separates the first metallization line 115a / 115b and the second metallization line 136a / 136b.

[0054]

[0069] In one or more embodiments, the insulating layer 104 can be any material suitable for isolating adjacent devices and preventing leakage. In one or more embodiments, the insulating layer 104 is a flowable dielectric material. In one or more embodiments, the electrical insulating layer 104 is an oxide layer, such as silicon dioxide, or any other electrical insulating layer as determined by the electronic device design. In one or more embodiments, the insulating layer 104 comprises an interlayer dielectric (ILD). In one or more embodiments, the insulating layer 104 is a low-k dielectric, including, but not limited to, materials such as silicon dioxide, silicon oxide, silicon oxycarbide, carbon-doped oxide ("CDO"), such as carbon-doped silicon dioxide, porous silicon dioxide (SiO2), silicon nitride (SiN), or any combination thereof.

[0055]

[0070] In one or more embodiments, the insulating layer 104 comprises a dielectric material having a dielectric constant value less than 5. In one or more embodiments, the insulating layer 104 comprises a dielectric material having a dielectric constant value less than 2. In at least some embodiments, the insulating layer 104 comprises an oxide, a carbon-doped oxide, a porous silicon dioxide, a carbide, an oxycarbide, a nitride, an oxynitride, an oxycarbonitride, a polymer, a phosphosilicate glass, a fluorine-doped silicon dioxide, an organosilicate glass (OSG), a fluorosilicate (SiOF) glass, an organosilicate glass (SiOCH), a spin-on organic polymer dielectric, a spin-on silicon-based polymer dielectric material, an air gap, or any combination thereof, other electrically insulating layers as determined by the electronic device design, or any combination thereof. In at least some embodiments, the insulating layer 104 may comprise a photosensitive material such as polyimide, an epoxy, benzocyclobutene (BCB), and a WPR series material, or a spin-on glass.

[0056]

[0071] In one or more embodiments, insulating layer 104 is a low-k interlevel dielectric to separate one metal line from another metal line on substrate 102. In one or more embodiments, the thickness of insulating layer 104 is approximately in the range of about 1 nanometer (nm) to about 2 microns (μm).

[0057]

[0072] In an embodiment, the insulating layer 104 is deposited using one of a number of deposition techniques, such as, but not limited to, chemical vapor deposition ("CVD"), physical vapor deposition ("PVD"), molecular beam epitaxy ("MBE"), metalorganic chemical vapor deposition ("MOCVD"), atomic layer deposition ("ALD"), spin-on, or other insulating deposition techniques known to those skilled in the art of microelectronic device manufacturing.

[0058]

[0073] In one or more embodiments, the first metallization lines 115a and 115b comprise the first metallization layer 106. In one or more embodiments, the first metallization layer 106a comprises any suitable metal known to one of skill in the art, including, but not limited to, copper (Cu), ruthenium (Ru), nickel (Ni), cobalt (Co), chromium (Cr), iron (Fe), manganese (Mn), titanium (Ti), aluminum (Al), hafnium (Hf), tantalum (Ta), tungsten (W), vanadium (V), molybdenum (Mo), palladium (Pd), gold (Au), silver (Ag), platinum (Pt), indium (In), tin (Sn), lead (Pb), antimony (Sb), bismuth (Bi), zinc (Zn), or cadmium (Cd). In one or more particular embodiments, the first metallization layer 106 includes ruthenium (Ru).

[0059]

[0074] In one or more embodiments, the first metallization lines 115a / 115b include a metal selected from one or more of copper (Cu), ruthenium (Ru), nickel (Ni), cobalt (Co), chromium (Cr), iron (Fe), manganese (Mn), titanium (Ti), aluminum (Al), hafnium (Hf), tantalum (Ta), tungsten (W), vanadium (V), molybdenum (Mo), palladium (Pd), gold (Au), silver (Ag), platinum (Pt), indium (In), tin (Sn), lead (Pb), antimony (Sb), bismuth (Bi), zinc (Zn), or cadmium (Cd). In a particular embodiment, the first metallization lines 115a / 115b include ruthenium (Ru).

[0060]

[0075] In one or more embodiments, the second metallization lines 136a / 136b include a metal selected from one or more of copper (Cu), ruthenium (Ru), nickel (Ni), cobalt (Co), chromium (Cr), iron (Fe), manganese (Mn), titanium (Ti), aluminum (Al), hafnium (Hf), tantalum (Ta), tungsten (W), vanadium (V), molybdenum (Mo), palladium (Pd), gold (Au), silver (Ag), platinum (Pt), indium (In), tin (Sn), lead (Pb), antimony (Sb), bismuth (Bi), zinc (Zn), or cadmium (Cd). In a particular embodiment, the first metallization lines 136a / 136b include ruthenium (Ru).

[0061]

[0076] 12, one or more embodiments may include a first metallization layer 115 including a set of first conductive lines extending along a first direction x on a first insulating layer 104 on a substrate 102, and a second metallization layer 136 including a set of second conductive lines on an etch stop layer 108 above the first metallization lines 115, the set of second conductive lines extending along a second direction y that intersects the first direction at an angle. The electronic device includes at least one via between a first metallization line and a second metallization line, the at least one via including a via metallization layer, the at least one via being self-aligned to one of the first metallization lines along a second direction, the at least one via being self-aligned to one of the second metallization lines along the first direction, the at least one via being self-aligned to one of the second metallization lines along the first direction, the second direction intersecting the first direction at an angle.

[0062]

[0077] Spatially relative terms such as "beneath," "below," "lower," "above," "upper," and the like, may be used herein to facilitate the description of an element or feature depicted in the figures in relation to another element(s) or feature(s). It will be understood that the spatially relative terms are intended to encompass different orientations of the device during use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, an element described as "below" or "beneath" the other element or feature would then be oriented "above" the other element or feature. Thus, the exemplary term "below" may encompass both an orientation above and below. The device may be otherwise oriented (rotated 90 degrees or in other orientations) and the spatially relative descriptors used herein may be interpreted accordingly.

[0063]

[0078] The use of the terms "a" and "an" and "the" and similar referents in the context of describing the materials and methods described herein (particularly in the context of the claims below) should be construed to cover both the singular and the plural, unless otherwise stated herein or clearly contradicted by context. The recitation of ranges of values ​​herein is merely intended to serve as a shorthand method of individually referring to each individual value falling within the range, unless otherwise stated herein, and each individual value is incorporated herein as if the value were individually recited herein. All methods described herein may be performed in any suitable order, unless otherwise stated herein or clearly contradicted by context. The use of any and all examples, or exemplary language (e.g., "etc.") provided herein is intended merely to better illuminate the materials and methods, and does not impose limitations on the scope unless otherwise claimed. No language in the specification should be construed as indicating any element not in the claims as essential to the practice of the disclosed materials and methods.

[0064]

[0079] References throughout this specification to "one embodiment," "a particular embodiment," "one or more embodiments," or "an embodiment" mean that a particular feature, structure, material, or characteristic described in connection with an embodiment is included in at least one embodiment of the disclosure. Thus, the appearances of phrases such as "in one or more embodiments," "in a particular embodiment," "in one embodiment," or "in an embodiment" in various places throughout this specification do not necessarily refer to the same embodiment of the disclosure. In one or more embodiments, the particular features, structures, materials, or characteristics may be combined in any suitable manner.

[0065]

[0080] Although the disclosure herein has been described with reference to particular embodiments, it is to be understood that these embodiments are merely illustrative of the principles and applications of the disclosure. It will be apparent to those skilled in the art that various modifications and variations can be made to the disclosed method and apparatus without departing from the spirit and scope of the disclosure. Thus, the disclosure is intended to cover modifications and variations that come within the scope of the appended claims and their equivalents.

Claims

1. 1. A method of forming an electronic device, comprising: forming a first metallization line having a first width; depositing a gap fill layer over the first metallization lines; forming an oversized via mask on a via metallization layer on the first metallization line, the oversized via mask having a mask width and a mask length, the mask width being greater than the first width of the first metallization line, the oversized via mask being formed on an upper surface of the via metallization layer and on an upper surface of the gap fill layer; forming a via having a via metal length equal to the mask width and a via metal width equal to the first width; forming a second metallization line; The method includes:

2. 10. The method of claim 1, wherein the oversized via mask comprises an extreme ultraviolet (EUV) tri-layer on a hard mask layer.

3. 3. The method of claim 2, wherein forming the first metallization lines comprises patterning the via metallization layer with a hard mask on the top surface thereof on a first metallization layer on an insulating layer on a substrate.

4. 4. The method of claim 3, wherein the via metallization layer and the first metallization layer are separated by an etch stop layer, and the via metallization layer and the first metallization layer independently comprise one or more of copper (Cu), ruthenium (Ru), nickel (Ni), cobalt (Co), chromium (Cr), iron (Fe), manganese (Mn), titanium (Ti), aluminum (Al), hafnium (Hf), tantalum (Ta), tungsten (W), vanadium (V), molybdenum (Mo), palladium (Pd), gold (Au), silver (Ag), platinum (Pt), indium (In), tin (Sn), lead (Pb), antimony (Sb), bismuth (Bi), zinc (Zn), or cadmium (Cd).

5. forming the vias Etching the EUV trilayer to expose a top surface of the hard mask layer; etching the hard mask layer to expose the via metallization layer; etching the via metallization layer to expose the etch stop layer; removing the etch stop layer to expose an upper surface of the first metallization layer; The method of claim 4 , comprising:

6. The etch stop layer and the hard mask layer may be independently selected from titanium nitride (TiN), titanium (Ti), tantalum (Ta), or tantalum nitride (TaN), aluminum oxide (Al ２ O ３ ), titanium oxide (TiO ２ 6. The method of claim 5, wherein the insulating layer comprises one or more of silicon nitride (SiN), silicon carbonitride (SiCN), tungsten carbide (WC), tungsten boron carbide (WBC), silicon boride (SiBx), boron carbide (BC), amorphous carbon, boron nitride (BN), and boron carbon nitride (BCN).

7. 4. The method of claim 3, wherein the insulating layer comprises one or more of an oxide, a carbon-doped oxide, a porous silicon dioxide, a carbide, an oxycarbide, a nitride, an oxynitride, an oxycarbonitride, a polymer, a phosphosilicate glass, a fluorosilicate (SiOF) glass, an organosilicate glass (SiOCH), or any combination thereof.

8. 1. A processor-implemented method for forming fully self-aligned vias, comprising: receiving data for a first configuration controlling formation of a first metallization line having a first width; receiving data for a fifth configuration for controlling deposition of a gap fill layer over the first metallization lines; receiving data for a second configuration to control formation of an oversized via mask on a via metallization layer over the first metallization lines, the oversized via mask having a mask width and a mask length, the mask width being greater than the first width of the first metallization lines, the oversized via mask being formed over the first metallization lines and over the gap fill layer; receiving data for a third configuration for controlling formation of a via having a via metal length equal to the mask width and having a via metal width equal to the first width; receiving data for a fourth configuration controlling formation of the second metallization lines; The method includes:

9. 10. The processor-implemented method of claim 8, wherein the oversized via mask comprises an extreme ultraviolet (EUV) tri-layer on a hard mask layer.

10. 10. The processor-implemented method of claim 9, wherein forming the first metallization lines comprises patterning a via metallization layer having a hard mask on a top surface thereof on a first metallization layer on an insulating layer on a substrate, the insulating layer comprising one or more of an oxide, a carbon-doped oxide, a porous silicon dioxide, a carbide, an oxycarbide, a nitride, an oxynitride, an oxycarbonitride, a polymer, a phosphosilicate glass, a fluorosilicate (SiOF) glass, an organosilicate glass (SiOCH), or any combination thereof.

11. The via metallization layer and the first metallization layer are separated by an etch stop layer, and the etch stop layer and the hard mask layer are independently selected from titanium nitride (TiN), titanium (Ti), tantalum (Ta), or tantalum nitride (TaN), aluminum oxide (Al ２ O ３ ), titanium oxide (TiO ２ 11. The processor-implemented method of claim 10, wherein the via metallization layer and the first metallization layer independently comprise one or more of copper (Cu), ruthenium (Ru), nickel (Ni), cobalt (Co), chromium (Cr), iron (Fe), manganese (Mn), titanium (Ti), aluminum (Al), hafnium (Hf), tantalum (Ta), tungsten (W), vanadium (V), molybdenum (Mo), palladium (Pd), gold (Au), silver (Ag), platinum (Pt), indium (In), tin (Sn), lead (Pb), antimony (Sb), bismuth (Bi), zinc (Zn), or cadmium (Cd).

12. forming the vias Etching the EUV trilayer to expose a top surface of the hard mask layer; etching the hard mask layer to expose the via metallization layer; etching the via metallization layer to expose the etch stop layer; removing the etch stop layer to expose an upper surface of the first metallization layer; 12. The processor-implemented method of claim 11, comprising:

Images