Thermal Devices

Abstract

A thermal device according to the present disclosure comprises a ceramic container, a fluid, and a sealing part. The container comprises an internal space, an opening connected to the internal space, and a communication path connecting the internal space and the opening. The fluid is located in the internal space. The sealing part closes the opening. In addition, the sealing part comprises a core and a flange connected to the core. The flange is joined to the container at the periphery of the opening. The core is located inside the opening. A portion of the core is in contact with the wall surface of the opening.

Description

[Technical field]

[0001] The present disclosure relates to thermal devices. [Background technology]

[0002] Conventionally, thermal devices that utilize the latent heat of a phase-transforming material are known. For example, a vapor chamber, which is a type of thermal device, releases heat from a heat-generating component by transporting heat from a high-temperature part to a low-temperature part using the latent heat associated with the evaporation and condensation of a working fluid sealed inside (see Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Utility Model Application Publication No. 54-42973 Summary of the Invention

[0004] A thermal device according to one aspect of the present disclosure includes a ceramic container, a fluid, and a sealing portion. The container has an internal space, an opening connected to the internal space, and a communication passage connecting the internal space and the opening. The fluid is located in the internal space. The sealing portion closes the opening. The sealing portion also has a core and a flange connected to the core. The flange is joined to the container around the opening. The core is located within the opening. A portion of the core is in contact with a wall surface of the opening. [Brief description of the drawings]

[0005] [Figure 1] FIG. 1 is a perspective view of a heat dissipation device according to an embodiment. [Diagram 2] FIG. 2 is a view of the first member according to the embodiment as viewed in the positive direction of the Z axis from the negative direction of the Z axis. [Diagram 3] FIG. 3 is a view of the second member according to the embodiment as viewed in the negative direction of the Z axis from the positive direction of the Z axis. [Figure 4] FIG. 4 is a view of the intermediate member according to the embodiment, viewed from the Z-axis positive side toward the Z-axis negative side. [Diagram 5] 5 is a diagram in which the first groove formation region shown in FIG. 2 and the second groove formation region shown in FIG. 3 are superimposed on the intermediate member shown in FIG. [Figure 6] FIG. 6 is a diagram for explaining the flow of the working fluid in the heat dissipation device according to the embodiment. [Figure 7] FIG. 7 is a diagram for explaining the flow of the working fluid in the heat dissipation device according to the embodiment. [Figure 8] FIG. 8 is a schematic cross-sectional view showing an example of the configuration of the communication passage. [Figure 9] FIG. 9 is a schematic cross-sectional view showing the configuration of the sealing portion. [Figure 10] FIG. 10 is a schematic cross-sectional view taken along the line XX shown in FIG. [Figure 11] FIG. 11 is a schematic cross-sectional view showing an example of the configuration of the ring-shaped body. [Figure 12] FIG. 12 is a schematic cross-sectional view showing another example of the configuration of the ring-shaped body. [Figure 13] FIG. 13 is a schematic cross-sectional view showing another example of the configuration of the ring-shaped body. [Figure 14] FIG. 14 is a schematic cross-sectional view showing another example of the configuration of the ring-shaped body. [Figure 15] FIG. 15 is a schematic cross-sectional view showing another example of the configuration of the ring-shaped body. [Figure 16] FIG. 16 is a schematic cross-sectional view showing another example of the configuration of the lump. [Figure 17] FIG. 17 is a schematic cross-sectional view showing another example of the configuration of the lump. [Figure 18] FIG. 18 is a schematic cross-sectional view showing another example of the configuration of the communication passage. [Figure 19] FIG. 19 is a diagram for explaining an example of the sealing step. [Figure 20] FIG. 20 is a diagram for explaining an example of the sealing step. [Figure 21] FIG. 21 is a diagram for explaining an example of the sealing step. [Figure 22]FIG. 22 is a schematic cross-sectional view showing the configuration of a heat dissipation device according to a first modified example. [Figure 23] FIG. 23 is a schematic cross-sectional view showing the configuration of a heat dissipation device according to a second modified example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0006] Hereinafter, a form for carrying out a thermal device according to the present disclosure (hereinafter, referred to as an "embodiment") will be described in detail with reference to the drawings. Note that the present disclosure is not limited to this embodiment. In addition, each embodiment can be appropriately combined within a range that does not cause a contradiction in the processing contents. In addition, the same parts in each of the following embodiments are given the same reference numerals, and duplicated explanations will be omitted.

[0007] In addition, in the embodiments described below, expressions such as "constant", "orthogonal", "vertical" and "parallel" may be used, but these expressions do not necessarily mean "constant", "orthogonal", "vertical" and "parallel" strictly. In other words, each of the above expressions allows for deviations due to, for example, manufacturing accuracy and installation accuracy.

[0008] In addition, in order to make the explanation easier to understand, each of the drawings referred to below may show an orthogonal coordinate system that defines an X-axis direction, a Y-axis direction, and a Z-axis direction that are perpendicular to each other, and has the positive Z-axis direction as the vertically upward direction.

[0009] The above-mentioned conventional techniques leave room for further improvement in terms of improving the sealing performance.

[0010] A thermal device according to the present disclosure has a ceramic container, a fluid, and a sealing portion. The container has an internal space, an opening connected to the internal space, and a communication passage connecting the internal space and the opening. The fluid is located in the internal space. The sealing portion closes the opening. The sealing portion has a core and a flange connected to the core. The flange is joined to the container around the opening. The core is located within the opening. A portion of the core is in contact with the wall surface of the opening. A thermal device having such a configuration has high sealing performance.

[0011] The flange may be joined to the container via a joining layer made of metal. A thermal device having such a configuration has even higher airtightness.

[0012] The core may have a main body and a large diameter portion that is located around the entire circumference of the main body and is connected to the flange. In this case, the thickness of the large diameter portion may be thinner than the flange. In this configuration, the large diameter portion is less susceptible to elastic deformation than the flange, and stress concentration on the large diameter portion is reduced. This makes it possible to suppress the occurrence of cracks at the opening edge of the communication passage.

[0013] The tip of the large diameter portion may have a tapered shape, which can suppress the occurrence of cracks in the wall surface of the communication passage.

[0014] The sealing portion may be spaced apart from the edge of the opening, which can make it difficult for cracks to occur at the edge of the opening of the communication passage.

[0015] The sealing portion may have a concave or convex portion on the upper surface. For example, when the sealing portion has a convex portion, it becomes easy to abut the sealing portion against a heat source. This makes it easier to transfer heat to the inside of the thermal device through the sealing portion, thereby improving the heat exchange efficiency of the thermal device.

[0016] The container may have a main surface and a recessed surface recessed relative to the main surface. In this case, the opening may open to the recessed surface, and the flange may be located on the recessed surface. By adopting such a configuration, the thickness of the thermal device can be reduced.

[0017] In the embodiment described below, an example is described in which the sealing portion includes two components, a lump and an annular body, but the sealing portion does not necessarily have to include multiple components and may consist of a single component.

[0018] In addition, below, as an example of a thermal device according to the present disclosure, a heat dissipation device, specifically a vapor chamber, that efficiently transfers heat from a high temperature area to a low temperature area by utilizing the latent heat associated with the evaporation and condensation of a working fluid (an example of a fluid or phase-changing substance) will be described.

[0019] First, the overall configuration of a heat dissipation device according to an embodiment will be described with reference to Fig. 1. Fig. 1 is a perspective view of a heat dissipation device according to an embodiment.

[0020] 1, the heat dissipation device 1 has a ceramic container 2. The container 2 has a first member 10, a second member 20, and an intermediate member 30. The first member 10, the second member 20, and the intermediate member 30 are all plate-shaped, and are stacked so that the first member 10 and the second member 20 sandwich the intermediate member 30.

[0021] The container 2 has an operating region 100 and a frame region 200. The operating region 100 has an internal space, and a working liquid as a phase-changing substance is sealed in the internal space. As the working liquid, for example, water, a hydrocarbon compound, an organic liquid (e.g., ethanol, methanol, etc.), ammonia, or other liquids can be used.

[0022] The frame region 200 is a region surrounding the active region 100. In other words, the frame region 200 is a region of the heat dissipation device 1 that is outside the active region 100. The active region 100 is generally hollow, whereas the frame region 200 is generally solid.

[0023] The frame region 200 is a region that is intentionally formed wide to prevent, for example, working fluid or working fluid vapor from leaking from the interface between the first member 10 and the intermediate member 30 or the interface between the second member 20 and the intermediate member 30, or to prevent the outside atmosphere from entering the internal space of the operating region 100 from the above interfaces (i.e., to ensure airtightness).

[0024] The container 2 has a plurality of (here, two) communication passages 14, 15 that communicate the internal space of the operating region 100 with the outside. Of the communication passages 14, 15, for example, the communication passage 14 is used as a working fluid injection hole, and the communication passage 15 is used as a gas discharge hole. In this case, in the manufacturing process of the heat dissipation device 1, the working fluid is injected into the internal space of the operating region 100 from the communication passage 14, and accordingly, the gas present in the internal space of the operating region 100 is discharged to the outside through the communication passage 15. The communication passage 14 is located near one of the four corners of the first member 10, and the communication passage 15 is located near a corner diagonally opposite the communication passage 14.

[0025] It is not essential that the heat dissipation device 1 has a plurality of communication paths 14, 15. For example, the heat dissipation device 1 may have only one of the communication paths 14, 15.

[0026] The communication passages 14 and 15 are closed by the sealing portion 5. By closing the communication passages 14 and 15 by the sealing portion 5, the internal space of the heat dissipation device 1 is sealed and the working fluid is sealed in the working region 100. In this manner, the heat dissipation device 1 is a sealed container with a sealed interior.

[0027] The working fluid is filled at a ratio of, for example, 10% by volume or more and 95% by volume or less with respect to the total volume of the internal space of the operating region 100. Preferably, the ratio is 30% by volume or more and 75% by volume or less. More preferably, the ratio is 40% by volume or more and 65% by volume or less. The remaining part of the internal space of the operating region 100 other than the working fluid is in a vacuum state containing a part of the vaporized working fluid. This makes it possible to maintain gas-liquid equilibrium even in a high-temperature environment, making it difficult to dry out, and also allows efficient thermal diffusion even in a low-temperature environment, making it possible to increase thermal diffusivity in various temperature ranges.

[0028] The first member 10, the second member 20, and the intermediate member 30 are made of ceramics. Examples of ceramics that may be used to form the first member 10, the second member 20, and the intermediate member 30 include alumina (Al2O3), zirconia (ZrO2), silicon carbide (SiC), silicon nitride (Si3N4), aluminum nitride (AlN), cordierite (Mg2Al3(AlSi5O 18 )), silicon-impregnated silicon carbide (SiSiC), etc. Also, the ceramics constituting the first member 10, the second member 20, and the intermediate member 30 may be single crystal bodies.

[0029] Metallic heat dissipation devices are difficult to obtain rigidity due to the material and manufacturing method, and are difficult to thin. In addition, since the parts of metallic heat dissipation devices that come into contact with the working fluid are made of metal, there is room for improvement in terms of corrosion resistance. In contrast, the heat dissipation device 1 according to the embodiment is made of a first member 10, a second member 20, and an intermediate member 30 that are all made of ceramic, so that it is easier to thin the device compared to metallic heat dissipation devices and has excellent corrosion resistance.

[0030] 1, the heat dissipation device 1 is installed in a position in which the first member 10 faces upward, but the position of the heat dissipation device 1 is not limited to the example of FIG 1. For example, the heat dissipation device 1 may be installed in a position in which the first member 10 faces downward. Moreover, the heat dissipation device 1 may be installed vertically instead of horizontally as shown in FIG 1.

[0031] Since ceramics are a brittle material, an important issue for a heat dissipation device having a ceramic container is how to ensure durability against stresses generated by, for example, phase transformation of the working fluid.

[0032] Here, the vapor chamber described in Patent Document 1 has a communication passage in the operating area for injecting the working fluid. The thickness of the ceramic in the operating area is reduced by the amount of the internal space. For this reason, the vapor chamber described in Patent Document 1, in which the communication passage is provided in the operating area, is prone to lacking durability against stress, and there is a risk of cracks or the like occurring in the container. Furthermore, cracks occurring in the container may cause the working fluid sealed in the internal space to dry out, resulting in a deterioration in heat dissipation efficiency.

[0033] In contrast, in the heat dissipation device 1 according to the embodiment, the communication paths 14, 15 are located in the frame region 200. The frame region 200 is solid, unlike the operating region 100. By having the communication paths 14, 15 located in the frame region 200, durability can be improved compared to a case in which the communication paths 14, 15 are located in the operating region 100. In this way, the heat dissipation device 1 according to the embodiment can improve durability.

[0034] Furthermore, according to the heat dissipation device 1 of the embodiment, a larger effective space can be secured in the operating area 100 compared to when the communicating passages 14, 15 are located in the operating area 100, thereby improving the heat dissipation characteristics.

[0035] Moreover, since the frame region 200 in which the communication paths 14, 15 are located is made of the same ceramic material as the operating region 100, stress due to a difference in thermal expansion is unlikely to occur. Therefore, the heat dissipation device 1 according to the embodiment has high reliability.

[0036] Next, the configuration of the first member 10 will be described with reference to Fig. 2. Fig. 2 is a diagram of the first member 10 according to the embodiment, viewed in the positive direction of the Z axis from the negative direction of the Z axis.

[0037] Fig. 2 shows the lower surface of the first member 10, specifically, the surface (third surface) facing the upper surface (first surface) of the intermediate member 30. As shown in Fig. 2, the first member 10 has a lattice-shaped first groove portion 11 on the third surface.

[0038] The first groove portion 11 has a first recess 11a recessed into the third surface and a plurality of first protrusions 11b located within the first recess 11a. The first recess 11a is located in the center of the third surface, and has a rectangular outline in plan view. The first protrusions 11b are arranged in the vertical and horizontal directions at intervals within the first recess 11a. The first recess 11a and the first protrusions 11b form a lattice shape in the first groove portion 11.

[0039] Hereinafter, the area of ​​the third surface of the first member 10 where the first groove portion 11 is located will be referred to as the "first groove forming area 110." The first groove forming area 110 constitutes a part of the operating area 100. The first member 10 also has a rectangular frame-shaped first frame area 210 that surrounds the first groove forming area 110. The first frame area 210 constitutes a part of the frame area 200.

[0040] A plurality of (here, two) through holes 141a, 151a penetrating the first member 10 in the thickness direction (here, the Z-axis direction) are positioned in the first frame region 210. The through hole 141a constitutes a part of the first portion 141 of the communication passage 14, and the through hole 151a constitutes a part of the first portion 151 of the communication passage 15.

[0041] A heat source is disposed in the center of the upper surface (fifth surface) of the first member 10, which is located opposite the lower surface (third surface).

[0042] Next, the configuration of the second member 20 will be described with reference to Fig. 3. Fig. 3 is a diagram of the second member 20 according to the embodiment, viewed in the negative Z-axis direction from the positive Z-axis direction side.

[0043] Fig. 3 shows the upper surface of the second member 20, specifically, the surface (fourth surface) facing the lower surface (second surface) of the intermediate member 30. As shown in Fig. 3, the second member 20 has a lattice-shaped second groove portion 21 on the fourth surface.

[0044] The second groove portion 21 has a second recess 21a recessed relative to the fourth surface and a plurality of second protrusions 21b located within the second recess 21a. The second recess 21a is located in the center of the fourth surface, and has a rectangular outline in plan view. The plurality of second protrusions 21b are arranged in the vertical and horizontal directions at intervals within the second recess 21a. The second recess 21a and the plurality of second protrusions 21b form the second groove portion 21 in a lattice shape.

[0045] Hereinafter, the region of the fourth surface of the second member 20 where the second groove portion 21 is located will be referred to as the "second groove formation region 120." The second groove formation region 120 constitutes a part of the operating region 100. In addition, the second member 20 has a second frame region 220 in the shape of a rectangular frame that surrounds the second groove formation region 120. The second frame region 220 constitutes a part of the frame region 200.

[0046] The size of the second groove formation region 120 in the second member 20 is the same as the size of the first groove formation region 110 in the first member 10. In addition, the position of the second groove formation region 120 on the fourth surface of the second member 20 is the same as the position of the first groove formation region 110 on the third surface of the first member 10.

[0047] In this manner, by forming the first groove portion 11 and the second groove portion 21 in a lattice shape, it is possible to efficiently circulate the working fluid in the internal space of the heat dissipation device 1. Note that the first groove portion 11 and the second groove portion 21 do not necessarily need to be lattice-shaped.

[0048] In the second frame region 220, there are positioned a plurality of (here, two) recesses 141b, 151b recessed relative to the upper surface (fourth surface) of the second member 20. The recesses 141b form a part of the first portion 141 of the communication passage 14, and the recesses 151b form a part of the first portion 151 of the communication passage 15.

[0049] Further, grooves 142b and 152b are located in the second frame region 220. Groove 142b is a passage extending in a second direction (here, the Y-axis direction) intersecting with the extension direction (first direction, here the Z-axis direction) of first portion 141 of communication passage 14, with one end opening into recess 141b in first portion 141 and the other end opening into second groove-forming region 120. Groove 152b is a passage extending in a second direction (here, the Y-axis direction) intersecting with the extension direction (first direction, here the Z-axis direction) of first portion 151 of communication passage 15, with one end opening into recess 151b in first portion 151 and the other end opening into second groove-forming region 120.

[0050] Next, the configuration of the intermediate member 30 will be described with reference to Fig. 4. Fig. 4 is a diagram of the intermediate member 30 according to the embodiment, viewed in the Z-axis negative direction from the Z-axis positive direction side.

[0051] As shown in Fig. 4, the intermediate member 30 has a third frame region 230 having a rectangular frame shape. The third frame region 230 constitutes a part of the frame region 200. The intermediate member 30 also has a central portion 32 that is circular in plan view and located inside the third frame region 230, and a plurality of connecting portions 33 that are located between the central portion 32 and the third frame region 230 and connect the central portion 32 and the third frame region 230. In the example shown in Fig. 4, the central portion 32 is located at the center of the intermediate member 30. The multiple connecting portions 33 extend radially from the central portion 32 toward the third frame region 230 at intervals from one another while increasing in width.

[0052] The intermediate member 30 further has a plurality of steam holes 36 and a plurality of reflux holes 37. The plurality of steam holes 36 and the plurality of reflux holes 37 each penetrate the upper surface (first surface) and the lower surface (second surface) of the intermediate member 30.

[0053] The multiple steam holes 36 function as part of a flow path for vapor of the working fluid. The multiple steam holes 36 are located between two adjacent connection parts 33. That is, the multiple steam holes 36 and the multiple connection parts 33 are located alternately in the circumferential direction. Like the multiple connection parts 33, the multiple steam holes 36 are spaced apart from one another and extend radially from the central part 32 toward the third frame region 230 while increasing in width.

[0054] The multiple reflux holes 37 function as part of a flow path for the working fluid. The reflux holes 37 are fine holes having a smaller opening area than the above-mentioned steam holes 36. Specifically, the reflux holes 37 are small enough to generate capillary action in the working fluid passing through the reflux holes 37.

[0055] A plurality of (here, two) through holes 141c, 151c penetrating the intermediate member 30 in the thickness direction (here, the Z-axis direction) are positioned in the third frame region 230. The through hole 141c constitutes a part of the first portion 141 of the communication passage 14, and the through hole 151c constitutes a part of the first portion 151 of the communication passage 15.

[0056] Fig. 5 is a diagram in which the first groove forming region 110 shown in Fig. 2 and the second groove forming region 120 shown in Fig. 3 are superimposed on the intermediate member 30 shown in Fig. 4. Note that, in Fig. 5, the communication passages 14 and 15 are omitted for ease of understanding.

[0057] 5, the first groove formation region 110 and the second groove formation region 120 overlap with the third frame region 230 of the intermediate member 30. In other words, the first groove formation region 110 and the second groove formation region 120 extend outward from a region in the intermediate member 30 where the multiple steam holes 36 and the multiple reflux holes 37 are formed (hereinafter referred to as the "hole formation region").

[0058] In this way, by making the first groove formation region 110 of the first member 10 and the second groove formation region 120 of the second member 20 wider than the hole formation region of the intermediate member 30, the internal space of the heat dissipation device 1 can be expanded outward compared to when the first groove formation region 110 and the second groove formation region 120 are made approximately the same as the hole formation region.

[0059] The heat source is disposed in the center of the heat dissipation device 1. Therefore, the temperature of the heat dissipation device 1 decreases the farther it is from the heat source, i.e., the closer it is to the outer periphery of the heat dissipation device 1. Also, the vapor of the working fluid condenses into liquid as it moves to the low-temperature region. Therefore, by expanding the internal space of the heat dissipation device 1 outward, condensation of the working fluid occurs more easily. This makes it possible to make it difficult for dry-out to occur.

[0060] Note that, while an example has been shown here in which the first groove formation region 110 and the second groove formation region 120 extend outward from the hole formation region of the intermediate member 30, this is not limiting, and the hole formation region of the intermediate member 30 may extend outward from the first groove formation region 110 and the second groove formation region 120.

[0061] The operating region 100 of the heat dissipation device 1 has an internal space sandwiched between a first groove forming region 110 and a second groove forming region 120, and a working fluid is sealed in the internal space. In addition, an intermediate member 30 is interposed between the first groove forming region 110 and the second groove forming region 120 in the internal space, and thus the operating region 100 is partitioned into a first space sandwiched between the first groove forming region 110 and the intermediate member 30, and a second space sandwiched between the second groove forming region 120 and the intermediate member 30. The first space and the second space are connected by a steam hole 36 and a reflux hole 37 formed in the intermediate member 30.

[0062] Next, the flow of the working fluid in the heat dissipation device 1 according to the embodiment will be described with reference to Fig. 6 and Fig. 7. Fig. 6 and Fig. 7 are diagrams for explaining the flow of the working fluid in the heat dissipation device 1 according to the embodiment. Note that Fig. 6 is a diagram in which the third frame region 230 is omitted from the diagram shown in Fig. 5, and Fig. 7 is a cross-sectional view taken along line VII-VII in Fig. 6. In Fig. 6 and Fig. 7, the flow of steam is indicated by open arrows, and the flow of liquid is indicated by filled arrows.

[0063] The working fluid is heated by the heat source and vaporized into steam. As described above, the heat source is disposed in the center of the upper surface (fifth surface) of the first member 10 (see Figs. 1 and 2). Therefore, the vapor of the working fluid is generated in the center of the first space (the space sandwiched between the first member 10 and the intermediate member 30).

[0064] The vapor of the working fluid passes through the first groove portion 11 of the first groove formation region 110, diffuses in the in-plane direction (XY plane direction) of the heat dissipation device 1 (see the open arrows in Figure 6), and moves through the multiple steam holes 36 to the second space (the space sandwiched between the second member 20 and the intermediate member 30) (see the open arrows in Figure 7).

[0065] The vapor that has moved to the second space is condensed and liquefied due to a drop in temperature. The liquefied working fluid moves through the second groove formation region 120 toward the center of the heat dissipation device 1 due to the capillary force of the second groove portion 21 (see the black arrow in FIG. 6). During this process, the working fluid enters the return hole 37 and is returned to the first space by the capillary force of the return hole 37 (see the black arrow in FIG. 7). By repeating the above cycle, the heat dissipation device 1 can transfer heat from the heat source.

[0066] Next, the configuration of the communication passages 14 and 15 will be described with reference to Fig. 8. Fig. 8 is a schematic cross-sectional view showing an example of the configuration of the communication passage 14. Although Fig. 8 shows the communication passage 14 as an example, the communication passage 15 has a similar configuration to the communication passage 14.

[0067] 8, the communication passage 14 connects the internal space of the operating region 100 with the outside. The communication passage 14 has a first portion 141 that extends in the thickness direction of the container 2 (here, the Z-axis direction) and opens to the outside, and a second portion 142 that extends in the surface direction of the container 2 (here, the Y-axis direction) and opens to the internal space of the operating region 100.

[0068] The first portion 141 is formed by the through hole 141a of the first member 10, the recess 141b of the second member 20, and the through hole 141c of the intermediate member 30. The second portion 142 is formed by the groove portion 142b of the second member 20 and the lower surface 302 (second surface) of the intermediate member 30. Note that, although an example in which the recess 141b of the communication passage 14 is recessed further than the groove portion 142b of the second portion 142 is shown in FIG. 8, the recess 141b and the groove portion 142b may be flush with each other.

[0069] Thus, the communication path 14 has a first portion 141 extending in a first direction (here, the Z-axis direction) and a second portion 142 extending in a direction intersecting the first direction (here, the Y-axis direction). In other words, the communication path 14 is bent. Therefore, according to the heat dissipation device 1 according to the embodiment, even if high pressure occurs in the operating region 100, high pressure is unlikely to be applied to the sealing portion 5, and therefore reliability is high.

[0070] The first portion 141 is open on the upper surface of the first member 10 and extends across the first and second spaces of the operating region 100 in the frame region 200. The second portion 142 is located on the second space side of the operating region 100 in the frame region 200.

[0071] In the heat dissipation device 1, the first space side of the first and second spaces is under high pressure. In other words, the second space side of the first and second spaces is under relatively low pressure. Therefore, by positioning the second portion 142 on the second space side, it is possible to prevent high pressure from being applied to the communication passage 14.

[0072] 1, the communication passage 14 is positioned so as to sandwich the operating region 100 between itself and the communication passage 15. By arranging the two communication passages 14, 15 in this manner, it is possible to prevent a local decrease in durability compared to, for example, a case in which the two communication passages 14, 15 are arranged side by side.

[0073] In the first portion 141 of the communication passage 14, the through hole 141a has a first opening and corresponds to the first passage 141a that opens to the outside. The through hole 141c corresponds to the second passage 141c that is continuous with the through hole 141a and has a smaller diameter than the first passage.

[0074] Next, a description will be given of the configuration of the sealing portion 5. Fig. 9 is a schematic cross-sectional view showing the configuration of the sealing portion 5.

[0075] As shown in FIG. 9, the sealing portion 5 has a lump 51 and an annular body 52. ​​The lump 51 and the annular body 52 constitute the core and flange of the sealing portion 5. The lump 51 and the annular body 52 are made of, for example, a metal. An example of the metal constituting the lump 51 and the annular body 52 is Cu (copper). The lump 51 and the annular body 52 may be made of a metal other than Cu. Examples of the metal other than Cu include Al, Cr, Ni, Co, Sn, Au, Fe, and Co. The metal constituting the lump 51 and the annular body 52 may be an alloy containing at least two of Cu, Al, Cr, Ni, Co, Sn, Au, Fe, and Co, such as stainless steel. The metal constituting the lump 51 and the annular body 52 is preferably a metal mainly composed of Cu. The main component is, for example, a material that occupies 50% by mass or more or 80% by mass or more of the material.

[0076] The lump 51 is a lump-shaped member. For example, the lump 51 is generally spherical. In the embodiment, the lump 51 has flat surfaces 511, 512 at a first end (here, the upper end of the lump 51) and a second end (here, the lower end of the lump 51) in the thickness direction of the first member 10, respectively. The flat surfaces 511, 512 are parallel to each other. In a cross-sectional view of the lump 51 cut at a cross section perpendicular to the flat surfaces 511, 512 (i.e., the cross-sectional view shown in FIG. 9), the flat surfaces 511, 512 are connected by a convex curved surface. In this way, the lump 51 according to the embodiment is a sphere having the flat surfaces 511, 512 at the first end and the second end.

[0077] The annular body 52 has an opening 520 (an example of a second opening) whose diameter is smaller than the opening diameter (diameter at the top surface of the first member 10) of the external opening (an example of a first opening) in the through hole 141a, and is positioned on the first member 10 so that the opening 520 overlaps with the first opening of the through hole 141a.

[0078] The annular body 52 has a first portion 521 located on the upper surface of the first member 10 and a second portion 522 located on the wall surface of the through hole 141a. The first portion 521 is a thin plate-like portion and extends along the upper surface of the first member 10. The first portion 521 is joined to the upper surface of the first member 10 by a joining layer 55 made of a joining material such as a brazing material.

[0079] The first portion 521 is generally ring-shaped in plan view, and the opening 520 is located in the center. The second portion 522 is a portion extending from the edge of the opening 520 toward the deep portion of the through hole 141a. The deep portion of the through hole 141a may be a portion deeper in the through hole 141a than the edge of the opening 520, and is not limited to a specific (one) portion. The second portion 522 extends along the wall surface of the through hole 141a. The second portion 522 does not necessarily need to be along the wall surface of the through hole 141a. The second portion 522 does not necessarily need to be in contact with the wall surface of the through hole 141a, and there may be a gap between the second portion 522 and the wall surface of the through hole 141a.

[0080] FIG. 10 is a schematic cross-sectional view taken along the line XX in FIG. 9. As shown in FIG. 10, the second portion 522 of the ring-shaped body 52 is located between the first member 10 and the lump 51. The lump 51 is located radially inward of the through-hole 141a from the second portion 522, and is in contact with the second portion 522 over the entire circumference. The lump 51 is physically integrated with the ring-shaped body 52 at the contact portion with the second portion 522. Here, "physically integrated" means that the lump 51 and the ring-shaped body 52 are physically joined together without any gaps. Also, "physically integrated" means that the proportion of diffusion bonding is zero or small.

[0081] The lump 51 presses the second portion 522 toward the wall surface of the through hole 141a. In other words, the lump 51 presses the through hole 141a via the second portion 522. As described above, the second portion 522 does not necessarily have to contact the wall surface of the through hole 141a. Even in this case, the sealing property of the heat dissipation device 1 is not impaired because the first portion 521 and the upper surface of the first member 10 are joined by the joining material.

[0082] In this manner, the sealing portion 5 according to the embodiment seals the heat dissipation device 1 by blocking the through hole 141a with the lump 51 and the annular body 52. ​​With this configuration, the through hole 141a can be blocked while preventing cracks from occurring in the first member 10, as compared to, for example, blocking the through hole 141a using only the lump 51, i.e., sealing between a metal and a ceramic.

[0083] Moreover, in the sealing portion 5 according to the embodiment, the through hole 141a is blocked by the lump 51 and the second portion 522 of the annular body 52 located inside the through hole 141a. With this configuration, the lump 51 and the second portion 522 act to press against each other, thereby improving the airtightness of the heat dissipation device 1.

[0084] Furthermore, in the sealing portion 5 according to the embodiment, the lump 51 enters the through hole 141a. With this configuration, for example, it is possible to prevent the working fluid from adhering to the wall surface of the through hole 141a.

[0085] In the heat dissipation device 1 according to the embodiment, the through hole 141c serving as the second passage is located below the lump 51. In other words, when the heat dissipation device 1 is viewed from above, the through hole 141c is provided at a position overlapping with the lump 51. In the sealing portion 5 according to the embodiment, the lump 51 blocks the through hole 141c. Specifically, the lump 51 has a flat surface 511, and the flat surface 511 blocks the opening of the through hole 141c. With this configuration, it is possible to more reliably suppress the intrusion of the working fluid into the communication passage 14 (through hole 141a). In addition, the sealing performance of the heat dissipation device 1 can be further improved.

[0086] Although not shown here, the upper surface (first surface) of the intermediate member 30 may have a plurality of projections and recesses located at positions facing the flat surface 511 of the lump 51. In such a case, it is possible to suppress displacement of the lump 51 in the horizontal direction (the direction perpendicular to the thickness direction of the heat dissipation device 1).

[0087] In the heat dissipation device 1 according to the embodiment, the through hole 141c is provided in the intermediate member 30 made of ceramic. With this configuration, even if the lump 51 comes into contact with the intermediate member 30 when the lump 51 is pressed into the communicating passage 14, cracking of the intermediate member 30 can be suppressed compared to a case where the through hole 141c is not provided at the contact point.

[0088] The heat dissipation device 1 according to the embodiment is a sealed container made of ceramic, that is, the first member 10, the second member 20 and the intermediate member 30 are made of ceramic.

[0089] Ceramics generally have a larger Young's modulus than metals, in other words, a higher rigidity. The lump 51 (metal lump) of the sealing portion 5 made of metal is deformed by heat in a direction that expands the communicating passage 14 (through hole 141a). If the heat dissipation device is made of metal, when the lump 51 deforms in a direction that expands the communicating passage 14, the through hole 141a is also likely to deform in a diameter-expanding direction in association with this deformation. In contrast, in the heat dissipation device 1 made of ceramics, even if the lump 51 deforms in a direction that expands the through hole 141a, the through hole 141a is less likely to deform compared to a heat dissipation device made of metal. Therefore, the heat dissipation device 1 made of ceramics is easier to ensure hermeticity against temperature changes (particularly, temperature rise) compared to a heat dissipation device made of metal.

[0090] From another point of view, ceramics have a smaller thermal expansion coefficient than most metals, except for some metals such as W (tungsten), Mo (molybdenum), Ti (titanium), Nb (niobium), and Zr (zirconium). That is, the ceramic heat dissipation device 1 is less likely to be thermally deformed than a metal heat dissipation device. Therefore, the ceramic heat dissipation device 1 is more likely to maintain the state in which the mass 51 presses the through-hole 141a through the annular body 52, compared to a metal heat dissipation device. Therefore, the ceramic heat dissipation device 1 is easier to ensure hermeticity against thermal cycles, compared to a metal heat dissipation device. Also, the ceramic heat dissipation device 1 is less likely to be corroded when exposed to acid or high-temperature steam, and is less likely to be oxidized at high temperatures, compared to a metal heat dissipation device.

[0091] As described above, examples of the ceramics constituting the first member 10, the second member 20, and the intermediate member 30 include alumina, zirconia, silicon carbide, etc. Of these ceramics, it is preferable to use alumina as the ceramics constituting the first member 10, the second member 20, and the intermediate member 30, since it is inexpensive, less harmful to the environment, and has excellent processability.

[0092] The inside of the heat dissipation device 1 according to the embodiment is in a reduced pressure state (including a vacuum) when no heat source is disposed on the upper surface (fifth surface) of the first member 10. On the other hand, when a heat source is disposed on the upper surface of the first member 10, the working fluid vaporizes and expands in volume, causing the inside of the heat dissipation device 1 to be in a pressurized state. In this way, the pressure state inside the heat dissipation device 1 alternates between a reduced pressure state and a pressurized state depending on the presence or absence of a heat source.

[0093] In contrast, the sealing portion 5 of the embodiment presses the annular body 52 toward the wall surface of the communicating passage 14 using the mass 51, making it easy to ensure airtightness both in a reduced pressure state and in a pressurized state.

[0094] 8 and 9, the through hole 141a of the communication passage 14 has a tapered shape that expands in diameter from the upper surface toward the lower surface (third surface) of the first member 10. With this configuration, even if the inside of the heat dissipation device 1 is pressurized, the lump 51 is less likely to come out of the communication passage 14, so that the airtightness in the pressurized state can be more reliably ensured.

[0095] It should be noted that, without being limited to this example, the through hole 141a of the communication passage 14 may have a tapered shape that reduces in diameter from the upper surface toward the lower surface (third surface) of the first member 10. In this case, when the lump 51 is press-fitted into the through hole 141a, the stress acting on the through hole 141a can be dispersed also in the thickness direction of the first member 10, so that cracks are less likely to occur in the through hole 141a when the lump 51 is press-fitted.

[0096] In the sealing portion 5 according to the embodiment, the annular body 52 has a first portion 521, and the first portion 521 is joined to the upper surface of the first member 10 around the through hole 141a. With this configuration, it is possible to suppress the occurrence and propagation of cracks around the through hole 141a.

[0097] In the sealing portion 5 according to the embodiment, the diameter of the opening 520 of the annular body 52 is smaller than the diameter of the through hole 141a. In other words, the first portion 521 of the annular body 52 extends radially inward from the opening edge portion of the through hole 141a (i.e., the edge portion of the first opening). With this configuration, it is possible to suppress the occurrence and progression of cracks around the through hole 141a, particularly from the opening edge of the through hole 141a.

[0098] In the sealing portion 5 according to the embodiment, the annular body 52 is joined to the upper surface of the first member 10 via a joining layer 55. With this configuration, the sealing performance between the upper surface of the first member 10 and the sealing portion 5 can be improved.

[0099] In the sealing portion 5 according to the embodiment, when the lump 51 and the annular body 52 are compared, the lump 51 protrudes more (higher) from the top surface of the first member 10 than the annular body 52. ​​That is, the lump 51 protrudes more from the top surface of the first member 10 than the annular body 52. ​​With this configuration, when a heat source is placed on the top surface of the lump 51, it becomes easy to bring the lump 51 into contact with the heat source. By bringing the metal lump 51 into contact with the heat source, heat is easily transferred to the inside of the heat dissipation device 1 via the lump 51, and therefore the heat exchange efficiency of the heat dissipation device 1 can be improved.

[0100] In the heat dissipation device 1 according to the embodiment, it is preferable that the stress applied to the container 2 does not exceed the breaking strength of the container 2. In addition, it is preferable that, of the residual stress applied to the container 2 by the lump 51, the residual stress in the region not in contact with the annular body 52 is greater than the residual stress in the region in contact with the annular body 52.

[0101] FIG. 11 is a schematic cross-sectional view showing an example of the configuration of the ring-shaped body 52. ​​As shown in FIG. 11, the thickness T2 of the second portion 522 of the ring-shaped body 52 may be smaller than the thickness T1 of the first portion 521. The lump 51 applies stress in a direction pressing the ring-shaped body 52. ​​This stress may be concentrated on the opening edge portion 101 of the communication passage 14, causing cracks to occur in the opening edge portion 101 of the communication passage 14. In contrast, when the thickness T2 of the second portion 522 is made thinner than the thickness T1 of the first portion 521, the amount of elastic deformation of the second portion 522 is relatively small, and the stress concentration is alleviated, so that the occurrence of cracks in the opening edge portion 101 of the communication passage 14 can be suppressed.

[0102] Also, the opening edge 101 of the communicating passage 14 and the annular body 52 may be spaced apart. For example, as shown in FIG. 11, the opening edge 101 of the communicating passage 14 may be chamfered in an R-shape in cross-sectional view. In other words, the opening edge 101 may be curved in a convex shape in cross-sectional view. This makes it possible to form a gap between the opening edge 101 of the communicating passage 14 and the corner of the annular body 52. ​​In other words, the opening edge 101 of the communicating passage 14 and the annular body 52 can be spaced apart.

[0103] In this way, by separating the opening edge 101 of the communicating passage 14 from the annular body 52, stress due to the difference in thermal expansion between the first member 10 and the annular body 52 is less likely to be transmitted to the opening edge 101 of the communicating passage 14, making it less likely that cracks will occur in the opening edge 101 of the communicating passage 14.

[0104] 12 and 13 are schematic cross-sectional views showing another example of the configuration of the annular body 52. ​​As shown in FIG. 12, the annular body 52 may have a recess 527 at a corner between a first portion 521 and a second portion 522 that face the opening edge portion 101 of the communication passage 14. The recess 527 extends circumferentially and is recessed in a direction away from the opening edge portion 101 of the communication passage 14. Even in this case, the opening edge portion 101 of the communication passage 14 and the annular body 52 can be separated from each other. Also, as shown in FIG. 13, the annular body 52 may have a corner 523 between the first portion 521 and the second portion 522 that face the opening edge portion 101 of the communication passage 14 located radially inward of the opening edge portion 101 of the communication passage 14. Even in this case, the opening edge portion 101 of the communication passage 14 and the annular body 52 can be separated from each other.

[0105] 11, tip 525 of second portion 522 may have a tapered shape. In other words, tip 525 of second portion 522 may have a shape that becomes thinner toward the tip. By tapering tip 525 of second portion 522 in this manner, stress concentration that causes lump 51 to expand the diameter of the wall surface of through hole 141a is alleviated, and therefore, occurrence of cracks in the wall surface of through hole 141a can be suppressed.

[0106] 11, the tip of tip portion 525 of second portion 522 may be close to the wall surface of through hole 141a. When second portion 522 of annular body 52 is in contact with through hole 141a, if the tip of second portion 522 is close to the wall surface of through hole 141a, the contact area between second portion 522 and the wall surface of through hole 141a is large, and therefore the heat dissipation device 1 has high airtightness.

[0107] 14 and 15 are schematic cross-sectional views showing another example of the configuration of the annular body 52. ​​As shown in Figs. 14 and 15, the tip of the tip portion 525 of the second portion 522 may be closer to the lump 51. In this case, the contact area between the second portion 522 and the lump 51 is large, and therefore the heat dissipation device 1 is highly sealed. Note that the tip portion 525 of the second portion 522 may be curved convexly in cross-section as shown in Figs. 11 to 14, or may be curved concavely in cross-section as shown in Fig. 15.

[0108] 16 and 17 are schematic cross-sectional views showing another example of the configuration of the lump 51. As shown in FIG. 16, the lump 51 may have a second end (here, the lower end of the lump 51) that is inserted into the through-hole 141c. This configuration can more reliably prevent the working fluid from entering the through-hole 141a. In addition, the sealing performance of the heat dissipation device 1 can be further improved. As shown in FIG. 17, the lump 51 may be separated from the upper surface (first surface) of the intermediate member 30. In this case, the lump 51 may have a flat surface 512 only at the first end of the first end (here, the upper end of the lump 51) and the second end (here, the lower end of the lump 51).

[0110] Figure 1 8 1 is a schematic cross-sectional view showing another example of the configuration of the communication passage 14. 8 As shown in FIG. 1, the communication passage 14 may be located in the operating region 100. In this case, the communication passage 14 may be composed of only a portion corresponding to the above-mentioned through hole 141a (see FIG. 8, for example). 8 In the example, the lump 51 is in a state of floating above the upper surface of the second member 20, but the lump 51 may be in contact with the upper surface of the second member 20.

[0111] Next, an example of a manufacturing method of the heat dissipation device 1 according to the embodiment will be described. First, green sheets are formed by a doctor blade method, a roll compaction method, or the like using raw materials of the first member 10, the second member 20, and the intermediate member 30, and a laminate is obtained by stacking a plurality of green sheets.

[0112] Next, the obtained laminate is subjected to laser processing or die punching to obtain each of the molded bodies of the first member 10, the second member 20, and the intermediate member 30. For example, by performing laser processing on the laminate, a molded body of the intermediate member 30 in which the through holes 141c, 151c, the plurality of steam holes 36, and the plurality of reflux holes 37 are formed can be obtained. In addition, by performing laser processing on the obtained laminate, a molded body of the first member 10 in which the through holes 141a, 151a and the first groove formation region 110 are formed can be obtained. In addition, by performing laser processing on the obtained laminate, a molded body of the second member 20 in which the recesses 141b, 151b, the grooves 142b, 152b, and the second groove formation region 120 are formed can be obtained.

[0113] Next, the respective compacts of the first member 10, the second member 20 and the intermediate member 30 are stacked in the order of the second member 20, the intermediate member 30 and the first member 10 and fired to obtain a sintered body of the container 2 in which the first member 10, the second member 20 and the intermediate member 30 are integrated. In this manner, the first member 10, the second member 20 and the intermediate member 30 are integrally formed. Therefore, since no adhesive or the like is required, a highly reliable heat dissipation device 1 can be obtained.

[0114] The method for obtaining each of the molded bodies of the first member 10, the second member 20, and the intermediate member 30 is not limited to the above-mentioned method, and may be, for example, a method in which each of the molded bodies is obtained by processing green sheets and then laminating the green sheets. In the above-mentioned example, the molded body of the container 2 is obtained by producing each of the molded bodies of the first member 10, the second member 20, and the intermediate member 30 individually and then laminating them, but the molded body of the container 2 may be obtained by, for example, sequentially laminating processed green sheets.

[0115] Next, the working fluid is injected into the sintered body, for example, from one of the communication passages 14, 15. The gas present inside the sintered body is discharged to the outside from the other of the communication passages 14, 15 as the working fluid is injected.

[0116] Next, a pressure reducing device such as a vacuum pump is used to evacuate the inside of the sintered body through the communication passages 14, 15. Note that while it is desirable for the inside of the sintered body to be in a vacuum state, it is not necessary for the inside of the sintered body to be in a strict vacuum state, and for example, a reduced pressure state close to a vacuum state may be acceptable.

[0117] Next, the inside of the sintered body is evacuated to a vacuum, and the communication paths 14 and 15 are sealed. 19 ~Figure 21 The following description will be given with reference to FIG. 19 ~Figure 21 10 is a diagram for explaining an example of a sealing step. FIG.

[0118] First, Fig. 19 The pre-press-fit annular body 52X shown in FIG. 20 A pre-press-fit mass 51X shown in FIG. 1 is prepared. The pre-press-fit annular body 52X is, for example, a thin metal plate, and has an opening 520X at the center. A metal washer can be used as the pre-press-fit annular body 52X. The pre-press-fit mass 51X is, for example, a spherical metal body. The diameter of the pre-press-fit mass 51X is larger than the diameter of the opening 520X and smaller than the diameter of the communication passage 14.

[0119] figure 19 As shown in FIG. 1, the pre-press-fit annular body 52X is bonded to the upper surface of the first member 10 via a bonding layer 55. The pre-press-fit annular body 52X is placed on the upper surface of the first member 10 so that the center of the opening 520X coincides with the center of the through hole 141a in the communicating passage 14. The diameter of the opening 520X is smaller than the diameter of the through hole 141a, and a part of the pre-press-fit annular body 52X located on the opening 520X side extends radially inward of the communicating passage 14 beyond the opening edge of the communicating passage 14. The bonding layer 55 is not located in the part of the pre-press-fit annular body 52X that extends radially inward of the communicating passage 14 beyond the opening edge of the communicating passage 14.

[0120] Next, Fig. 20 As shown in FIG. 1, the pre-press-fit mass 51X is placed on the opening 520X of the pre-press-fit annular body 52X. 211, the pre-press-fit mass 51X is pressed from above using, for example, a press device 300. As a result, the pre-press-fit mass 51X is pressed into the through-hole 141a. As the pre-press-fit mass 51X is pressed into the through-hole 141a, the pre-press-fit annular body 52X is deformed such that the periphery of the opening 520X is bent toward the inside of the through-hole 141a. As a result, the pre-press-fit annular body 52X becomes an annular body 52 having a first portion 521 and a second portion 522. The pre-press-fit mass 51X becomes a mass 51 having a flat surface 512 by pressing the upper end portion against the press surface of the press device 300. When the pre-press-fit mass 51X is pressed into the through-hole 141a until it comes into contact with the upper surface of the intermediate member 30, the pre-press-fit mass 51X becomes a mass 51 having a flat surface 511.

[0121] When the pre-press-fit mass 51X is pressed into the through-hole 141a, it rubs against the pre-press-fit annular body 52X while applying stress to the pre-press-fit annular body 52X. As a result, the pre-press-fit mass 51X is joined to the pre-press-fit annular body 52X without any gaps. That is, the mass 51 and the annular body 52 are physically integrated. In this way, the communication passages 14, 15 are sealed by the sealing portion 5, and the heat dissipation device 1 is obtained.

[0122] (Example) A heat dissipation device was manufactured by the above-mentioned manufacturing method using alumina for the first, second and third members and Cu (copper) for the ring-shaped body and ring-shaped body. The dimensions of the manufactured heat dissipation device (hereinafter, referred to as "heat dissipation device according to the embodiment") are as follows. External dimensions (width x length x thickness): 50mm x 50mm x 0.5mm Width of the frame area located outside the groove formation area: 10 mm Through hole opening diameter: 1.7 mm Dimensions of the annular body before pressing (outer diameter x inner diameter x thickness): 8mm x 0.9mm x 0.2mm Outer diameter of the block before pressing: 1.2 mm

[0123] Then, a test was conducted on the airtightness of the heat dissipation device according to the embodiment. Specifically, the heat dissipation device according to the embodiment was left in a vacuum for a predetermined time (several days), and the presence or absence of a change in weight before and after the time was confirmed. As a result, no change in weight was observed in the heat dissipation device according to the embodiment before and after the device was left in a vacuum. This means that the working fluid located in the internal space of the heat dissipation device did not leak out to the outside of the heat dissipation device. From this result, it was confirmed that the airtightness of the heat dissipation device according to the embodiment was ensured.

[0124] (First Modification) figure 22 FIG. 1 is a schematic cross-sectional view showing a configuration of a heat dissipation device 1 according to a first modified example. 22 1, the container 2 of the heat dissipation device 1 may have a recessed surface 112 on the upper surface 111 (fifth surface) of the first member 10. In this case, the through hole 141a (an example of an opening) may open to the recessed surface 112. Also, the first portion 521 of the annular body 52, which is a part of the flange, may be located on the recessed surface 112. With this configuration, the heat dissipation device 1 can be made thinner. Also, in this case, the flat surface 512 of the sealing portion 5 (the surface of the sealing portion 5 that protrudes most from the recessed surface 112) may be lower than the upper surface 111 of the first member 10. With this configuration, the heat dissipation device 1 can be made even thinner.

[0125] (Second Modification) In the above embodiment, an example in which the sealing portion 5 includes two members, the lump body 51 and the annular body 52, has been described, but the sealing portion 5 may be a single member. 23 The following description will be given with reference to FIG. 23 10 is a schematic cross-sectional view showing a configuration of a heat dissipation device 1 according to a second modified example. FIG.

[0126] figure 23As shown in FIG. 1, the sealing portion 5 of the heat dissipation device 1 has a core portion 501 and a flange portion 502 connected to the core portion 501. The core portion 501 is a portion of the sealing portion 5 that is located inside the opening portion 115, and the flange portion 502 is a portion that is located outside the opening portion 115. The boundary portion between the core portion 501 and the flange portion 502 is the edge portion 116 of the opening portion 115. That is, as shown in FIG. 23 5, the portion located below edge 116 of opening 115 is core portion 501, and the portion located above edge 116 is flange portion 502.

[0127] The flange portion 502 is joined to the container 2 around the opening 115. Specifically, the flange portion 502 is joined to the upper surface 111 of the container 2 located around the opening 115 via a joining layer 55.

[0128] A part of core portion 501 is in contact with the wall surface of opening 115. Specifically, core portion 501 has main body portion 505 and large diameter portion 506 located around the entire circumference of main body portion 505 and connected to flange portion 502. Large diameter portion 506 is connected to flange portion 502 around the entire circumference.

[0129] In the above-described embodiment, the through holes 141a, 151a are described as having a tapered shape, but the shape of the through holes 141a, 151a is not limited to a tapered shape. For example, the shape of the through holes 141a, 151a may be a straight shape with a substantially constant diameter.

[0130] In the above embodiment, the lump 51 is generally spherical, but the lump 51 does not necessarily have to be spherical. For example, the lump 51 may be wedge-shaped, that is, the lump 51 may have a shape that gradually narrows from a first end portion (here, the upper end portion of the lump 51) exposed to the outside of the heat dissipation device 1 toward a second end portion (here, the lower end portion of the lump 51) located inside the communication path 14.

[0131] As described above, the thermal device according to the embodiment (for example, the heat dissipation device 1) is a thermal device that utilizes the latent heat of a phase change material (for example, a working fluid). The thermal device according to the embodiment has a ceramic container (for example, the container 2) and a sealing part (for example, the sealing part 5). The ceramic container has a phase change region (for example, the operating region 100) in which a phase change material is sealed, and a communication passage (for example, the communication passages 14, 15) that connects the phase change region to the outside. The sealing part closes the communication passage. In addition, the sealing part has a metal ring-shaped body (for example, the ring-shaped body 52) and a lump (for example, the lump 51). The ring-shaped body has an opening with a diameter smaller than the communication passage, and is located on the container so that the opening overlaps with the communication passage. The lump is located radially inward of the communication passage from the ring-shaped body, contacts the ring-shaped body over the entire circumference, and is integrated with the ring-shaped body at the contact site.

[0132] Therefore, according to the thermal device of the embodiment, the sealing performance can be improved.

[0133] The thermal device according to the present disclosure is not limited to a heat dissipation device. For example, the thermal device according to the present disclosure may be a heat storage device that stores latent heat accompanying a phase transformation of a heat storage material (an example of a phase change material) as thermal energy. In this case, the heat storage material used may be one that undergoes a solid-liquid phase transformation or a solid-solid phase transformation. In this way, the phase change material does not necessarily have to undergo a gas-liquid phase transformation. In other words, the phase change material does not necessarily have to be a liquid, and may be a solid.

[0134] The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. Indeed, the above-described embodiments may be embodied in various forms. Furthermore, the above-described embodiments may be omitted, substituted, or modified in various forms without departing from the scope and spirit of the appended claims. [Explanation of symbols]

[0135] 1. Heat dissipation devices 5 Sealing part 10 First member 11 First groove 11a First recess 11b First protrusion 14,15 Communication path 20 Second member 21 Second groove 21a Second recess 21b Second protrusion 30 Intermediate parts 36 Steam Vent 37 Reflux hole 51 Lump 52 Circular bodies 100 Operating Range 141 Part 1 141a Through hole, 1st passage 141b Recess 141c Through hole, 2nd passage 142 Part 2 142a Individual aisle 200 frame area 501 Core 502 Flange 520 aperture

Claims

1. a ceramic container having an internal space, an upper surface, a lower surface, a side surface connecting the upper surface and the lower surface, an opening portion connected to the internal space and located on at least one of the upper surface and the lower surface, and a communication passage connecting the internal space and the opening portion; A fluid located in the internal space; A sealing portion that closes the opening; having The sealing portion has a core portion and a flange portion connected to the core portion, the flange is joined to at least one of the upper surface and the lower surface of the container around the opening, The core is at least partially located within the opening, A thermal device, wherein a portion of the core is in contact with a wall surface of the opening.

2. The thermal device according to claim 1 , wherein the flange portion is joined to the container via a joining layer made of a metal.

3. The core portion is A main body portion, a large diameter portion located around the entire circumference of the main body and connected to the flange portion; having The thermal device according to claim 2 , wherein the thickness of the large diameter portion is smaller than the thickness of the flange portion.

4. The thermal device according to claim 3 , wherein a tip portion of the large diameter portion has a tapered shape.

5. The thermal device according to claim 1 , wherein the sealing portion is spaced apart from an edge of the opening.

6. 6. The thermal device according to claim 1, wherein the sealing portion has at least one of a recess and a protrusion on at least one of the upper surface and the lower surface.

7. The container has a main surface and a recessed surface recessed relative to the main surface, The opening opens into the recessed surface, The thermal device according to claim 1 , wherein the flange portion is located on the recessed surface.

8. The container comprises: a flat intermediate member having a first surface and a second surface opposite to the first surface, the flat intermediate member having a plurality of reflux holes penetrating the first surface and the second surface; a first member having a first groove portion on a third surface opposite to the first surface of the intermediate member; a second member having a second groove portion on a fourth surface opposite to the second surface of the intermediate member; The thermal device according to any one of claims 1 to 7, comprising:

9. The communication passage is A first passage communicating with the opening; a second passage connected to the first passage and located on the internal space side; having The diameter of the second passage is smaller than the diameter of the first passage, The thermal device according to claim 1 , wherein the second passage is blocked by the core portion.

10. The thermal device of claim 9 , wherein a portion of the core extends into the second passage.

11. The thermal device according to claim 1 , wherein the communication passage has a tapered portion when viewed in cross section.

Images