Semiconductor structure and manufacturing method thereof, memory chip, electronic device

Abstract

The embodiments of the present disclosure relate to the semiconductor field, and provide a semiconductor structure and its manufacturing method, a memory chip, and an electronic device, the semiconductor structure includes a substrate and a plurality of lead posts, a stack structure is provided on the substrate, the stack structure includes a plurality of memory cell groups arranged in a first direction, the memory cell groups include a plurality of layers of memory cells arranged in a second direction, the stack structure further includes a plurality of parallel signal lines arranged in the second direction, each of the parallel signal lines is connected to the memory cells in one layer, the plurality of lead posts are arranged in the first direction, the plurality of lead posts and the plurality of parallel signal lines are arranged along a third direction, and the lead posts are connected to the parallel signal lines. The embodiments of the present disclosure can at least improve the integration degree of the semiconductor structure.

Description

[Technical field]

[0001] (CROSS-REFERENCE TO RELATED APPLICATIONS) This application claims priority to a Chinese patent application filed with the China Patent Office on June 21, 2022, entitled "Semiconductor structure and manufacturing method thereof, memory chip, and electronic device" and bearing application number 202210709274.2, the entire contents of which are incorporated herein by reference.

[0002] TECHNICAL FIELD Embodiments of the present disclosure relate to the semiconductor field, and in particular to semiconductor structures and methods of manufacture, memory chips, and electronic devices. [Background technology]

[0003] A semiconductor structure includes a number of memory cells, which need to be connected to peripheral circuits to perform memory functions. The higher the integration density of a semiconductor structure, the more memory cells it can accommodate, and the better the performance of the semiconductor structure. However, in current semiconductor structures, a lot of space is wasted. In addition, due to limitations in physical properties, the volume of memory cells has reached a scaling limit, and due to limitations in process factors, it is also difficult to increase the number of stacked memory cells.

[0004] Therefore, there is an urgent need for a semiconductor structure having a new architecture that can increase the integration density of the semiconductor structure. Summary of the Invention

[0005] SUMMARY OF THE DISCLOSURE The embodiments of the present disclosure provide a semiconductor structure and a manufacturing method thereof, a memory chip, and an electronic device that can improve the integration density of the semiconductor structure.

[0006] According to some embodiments of the present disclosure, one aspect of the embodiments of the present disclosure provides a semiconductor structure, wherein the semiconductor structure includes a substrate and a plurality of lead posts, and a stacked structure is provided on the substrate, the stacked structure includes a plurality of memory cell groups arranged in a first direction, the memory cell groups include a plurality of layers of memory cells arranged in a second direction, the stacked structure further includes a plurality of parallel signal lines arranged in the second direction, each of the parallel signal lines being connected to the memory cells in one layer, the plurality of lead posts being arranged in the first direction, the plurality of lead posts and the plurality of parallel signal lines being arranged along a third direction, and the lead posts being connected to the parallel signal lines.

[0007] According to some embodiments of the present disclosure, another aspect of the embodiments of the present disclosure further provides a semiconductor structure, wherein the semiconductor structure includes a substrate and a plurality of lead posts, and a stacked structure is provided on the substrate, the stacked structure includes a plurality of memory cell groups arranged in a first direction, the memory cell groups include a plurality of layers of memory cells arranged in a second direction, the stacked structure further includes a plurality of parallel signal lines arranged in the second direction, each of the parallel signal lines is connected to the memory cells in one layer, the plurality of lead posts are arranged in the first direction and extend along the second direction, an orthogonal projection of the plurality of lead posts on a surface of the substrate at least partially overlaps with an orthogonal projection of the parallel signal lines on the surface of the substrate, and the lead posts are connected to the parallel signal lines.

[0008] According to some embodiments of the present disclosure, yet another aspect of the embodiments of the present disclosure further provides a method for manufacturing a semiconductor structure, where the method for manufacturing the semiconductor structure includes providing a substrate; forming a stacked structure on the substrate, the stacked structure including a plurality of memory cell groups arranged in a first direction, the memory cell groups including a plurality of layers of memory cells arranged in a second direction, the stacked structure further including a plurality of parallel signal lines arranged in the second direction, each of the parallel signal lines being connected to the memory cells in one layer; and forming a plurality of lead posts arranged in the first direction, the plurality of lead posts and the plurality of parallel signal lines being arranged along a third direction, and the lead posts being connected to the parallel signal lines.

[0009] According to some embodiments of the present disclosure, yet another aspect of the embodiments of the present disclosure further provides a method for manufacturing a semiconductor structure, where the method for manufacturing the semiconductor structure includes providing a substrate; forming a stacked structure on the substrate, the stacked structure including a plurality of memory cell groups arranged in a first direction, the memory cell groups including a plurality of layers of memory cells arranged in a second direction, the stacked structure further including a plurality of parallel signal lines arranged in the second direction, each of the parallel signal lines being connected to the memory cells in one layer; and forming a plurality of lead posts arranged in the first direction and extending along the second direction, where an orthogonal projection of the plurality of lead posts on a surface of the substrate at least partially overlaps with an orthogonal projection of the parallel signal lines on the surface of the substrate, and the lead posts are connected to the parallel signal lines.

[0010] According to some embodiments of the present disclosure, the embodiments of the present disclosure further provide a memory chip, the memory chip comprising the above semiconductor structure.

[0011] According to some embodiments of the present disclosure, the embodiments of the present disclosure further provide an electronic device, the electronic device including the above-mentioned memory chip.

[0012] The technical solutions provided in the embodiments of the present disclosure have at least the following advantages:

[0013] In some embodiments of the present disclosure, the stacked structure includes a plurality of parallel signal lines arranged in the second direction, each of the parallel signal lines is connected to a memory cell of one layer in the stacked structure, and a plurality of lead posts and a plurality of parallel signal lines are arranged along a third direction, and the lead posts are connected to the parallel signal lines, i.e., in the third direction, the lead posts are directly connected to the parallel signal lines, which reduces the number of steps or eliminates the need for a separate step region, and helps to improve the integration density of the semiconductor structure.

[0014] In some other embodiments of the present disclosure, the plurality of lead posts extend along the second direction, and the orthogonal projections of the plurality of lead posts on the surface of the substrate at least partially overlap with the orthogonal projections of the parallel signal lines on the surface of the substrate, i.e., the lead posts and the parallel signal lines are directly connected by being alternately arranged, which reduces the number of steps or eliminates the need for separately arranged step regions, and helps to improve the integration density of the semiconductor structure. [Brief description of the drawings]

[0015] [Figure 1] FIG. 1 is an overhead view of a semiconductor structure. [Diagram 2] FIG. 2 is an enlarged view of a portion of FIG. [Diagram 3] 3 is a cross-sectional view taken along the line A-A1 in FIG. 2. [Figure 4] FIG. 2 is a three-dimensional view of one of two semiconductor structures provided in an embodiment of the present disclosure. [Diagram 5] FIG. 2 is a three-dimensional view of one of two semiconductor structures provided in an embodiment of the present disclosure. [Figure 6] 2A-2C are different partial side views of a semiconductor structure provided in an embodiment of the present disclosure. [Figure 7] 2A-2C are different partial side views of a semiconductor structure provided in an embodiment of the present disclosure. [Figure 8] 2A-2C are different partial side views of a semiconductor structure provided in an embodiment of the present disclosure. [Figure 9] 2A-2C are different partial side views of a semiconductor structure provided in an embodiment of the present disclosure. [Figure 10] 2A-2C are different partial side views of a semiconductor structure provided in an embodiment of the present disclosure. [Figure 11] 2A to 2C are cross-sectional views of different portions of a semiconductor structure provided in an embodiment of the present disclosure. [Figure 12] 2A to 2C are cross-sectional views of different portions of a semiconductor structure provided in an embodiment of the present disclosure. [Figure 13] 2A to 2C are cross-sectional views of different portions of a semiconductor structure provided in an embodiment of the present disclosure. [Figure 14] 1A-1C are different perspective views of a semiconductor structure provided in accordance with an embodiment of the present disclosure. [Figure 15] 1A-1C are different perspective views of a semiconductor structure provided in accordance with an embodiment of the present disclosure. [Figure 16] 1A-1C are different perspective views of a semiconductor structure provided in accordance with an embodiment of the present disclosure. [Figure 17] 1A-1C are different perspective views of a semiconductor structure provided in accordance with an embodiment of the present disclosure. [Figure 18] 1A-1C are different perspective views of a semiconductor structure provided in accordance with an embodiment of the present disclosure. [Figure 19] 1A-1C are different perspective views of a semiconductor structure provided in accordance with an embodiment of the present disclosure. [Figure 20] 1A-1C are different perspective views of a semiconductor structure provided in accordance with an embodiment of the present disclosure. [Figure 21] 1A-1C are different perspective views of a semiconductor structure provided in accordance with an embodiment of the present disclosure. [Figure 22] 1A-1C are different perspective views of a semiconductor structure provided in accordance with an embodiment of the present disclosure. [Diagram 23] 1A-1C are different perspective views of a semiconductor structure provided in accordance with an embodiment of the present disclosure. [Figure 24] 2A to 2C are cross-sectional views of different portions of a semiconductor structure provided in an embodiment of the present disclosure. [Diagram 25] 1A-1C are different perspective views of a semiconductor structure provided in accordance with an embodiment of the present disclosure. [Figure 26] 1A-1C are different perspective views of a semiconductor structure provided in accordance with an embodiment of the present disclosure. [Figure 27] 1A-1C are different perspective views of a semiconductor structure provided in accordance with an embodiment of the present disclosure. [Figure 28] 1A-1C are different perspective views of a semiconductor structure provided in accordance with an embodiment of the present disclosure. [Figure 29] FIG. 2 is a three-dimensional view of one of two semiconductor structures provided in another embodiment of the present disclosure. [Diagram 30] FIG. 2 is a three-dimensional view of one of two semiconductor structures provided in another embodiment of the present disclosure. [Diagram 31] 2A-2C are different cross-sectional views of a semiconductor structure provided in another embodiment of the present disclosure. [Diagram 32] 2A-2C are different cross-sectional views of a semiconductor structure provided in another embodiment of the present disclosure. [Diagram 33] FIG. 33 is an enlarged view of a portion of FIG. 32. [Diagram 34] 2A-2C are different cross-sectional views of a semiconductor structure provided in another embodiment of the present disclosure. [Diagram 35] FIG. 35 is an enlarged view of a portion of FIG. 34. [Diagram 36] 2A-2C are different cross-sectional views of a semiconductor structure provided in another embodiment of the present disclosure. [Figure 37] FIG. 37 is an enlarged view of a portion of FIG. 36. [Figure 38] 2 is a different perspective view of a semiconductor structure provided in another embodiment of the present disclosure. [Figure 39] 2 is a different perspective view of a semiconductor structure provided in another embodiment of the present disclosure. [Diagram 40] 2 is a different perspective view of a semiconductor structure provided in another embodiment of the present disclosure. [Diagram 41] 2 is a different perspective view of a semiconductor structure provided in another embodiment of the present disclosure. [Diagram 42] 2 is a different perspective view of a semiconductor structure provided in another embodiment of the present disclosure. [Diagram 43] 2 is a different perspective view of a semiconductor structure provided in another embodiment of the present disclosure. [Diagram 44] 2 is a different perspective view of a semiconductor structure provided in another embodiment of the present disclosure. [Diagram 45] 3A-3C are schematic structural diagrams corresponding to respective steps in a method for manufacturing a semiconductor structure provided in another embodiment of the present disclosure. [Figure 46] 3A-3C are schematic structural diagrams corresponding to respective steps in a method for manufacturing a semiconductor structure provided in another embodiment of the present disclosure. [Figure 47] 3A-3C are schematic structural diagrams corresponding to respective steps in a method for manufacturing a semiconductor structure provided in another embodiment of the present disclosure. [Figure 48] 3A-3C are schematic structural diagrams corresponding to respective steps in a method for manufacturing a semiconductor structure provided in another embodiment of the present disclosure. [Figure 49] 3A-3C are schematic structural diagrams corresponding to respective steps in a method for manufacturing a semiconductor structure provided in another embodiment of the present disclosure. [Figure 50] 3A-3C are schematic structural diagrams corresponding to respective steps in a method for manufacturing a semiconductor structure provided in another embodiment of the present disclosure. [Figure 51] 3A-3C are schematic structural diagrams corresponding to respective steps in a method for manufacturing a semiconductor structure provided in another embodiment of the present disclosure. [Figure 52] 3A-3C are schematic structural diagrams corresponding to respective steps in a method for manufacturing a semiconductor structure provided in another embodiment of the present disclosure. [Diagram 53] 3A-3C are schematic structural diagrams corresponding to respective steps in a method for manufacturing a semiconductor structure provided in another embodiment of the present disclosure. [Figure 54] 3A-3C are schematic structural diagrams corresponding to respective steps in a method for manufacturing a semiconductor structure provided in another embodiment of the present disclosure. [Figure 55] 3A-3C are schematic structural diagrams corresponding to respective steps in a method for manufacturing a semiconductor structure provided in another embodiment of the present disclosure. [Figure 56] 3A-3C are schematic structural diagrams corresponding to respective steps in a method for manufacturing a semiconductor structure provided in another embodiment of the present disclosure. [Figure 57] 3A-3C are schematic structural diagrams corresponding to respective steps in a method for manufacturing a semiconductor structure provided in yet another embodiment of the present disclosure. [Figure 58]3A-3C are schematic structural diagrams corresponding to respective steps in a method for manufacturing a semiconductor structure provided in yet another embodiment of the present disclosure. [Figure 59] 3A-3C are schematic structural diagrams corresponding to respective steps in a method for manufacturing a semiconductor structure provided in yet another embodiment of the present disclosure. [Figure 60] 3A-3C are schematic structural diagrams corresponding to respective steps in a method for manufacturing a semiconductor structure provided in yet another embodiment of the present disclosure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0016] The above drawings are incorporated in and constitute a part of this specification, and the above drawings illustrate embodiments according to the present disclosure, and are used together with the specification to explain the principles of the present disclosure. It is obvious that the following drawings are merely some embodiments of the present disclosure, and those skilled in the art can obtain other drawings based on these drawings without creative efforts.

[0017] FIG. 1 is a bird's-eye view of the semiconductor structure, FIG. 2 is an enlarged view of the step in the dotted circle in FIG. 1, and FIG. 3 is a cross-sectional view in the A-A1 direction in FIG. 2. Referring to FIG. 1 to FIG. 3, the semiconductor structure includes a memory cell region 100 and a step region 200. A plurality of layers of memory cells are provided in the memory cell region 100. A plurality of steps are provided in the step region 200, and each step and each layer of memory cell are provided in one-to-one correspondence. A connection layer (not shown) may be provided in the step, and a lead post 300 may be provided on the step. The lead post 300 is electrically connected to the memory cell via the connection layer in the step, and thus the memory cell can be connected to a peripheral circuit by drawing out the memory cell. However, as the number of stacked memory cells increases, the area occupied by the step region 200 increases. For example, if there are a total of 64 layers of memory cells, 64 steps are required, and the area of ​​the step increases toward the lower step. If the area of ​​the step in the top step is 0.25 μm 2 If so, the area of ​​the bottom step is 64*0.25=16μm 23, the connection layer under each step is only used for support and electrical connection, resulting in a waste of space underneath. Therefore, there is a need to further improve the integration density of semiconductor structures.

[0018] An embodiment of the present disclosure provides a semiconductor structure, in which a plurality of lead posts and a plurality of parallel signal lines are arranged along a third direction, the lead posts are connected to the parallel signal lines, or the plurality of lead posts extend along a second direction, and the orthogonal projection of the plurality of lead posts on the surface of the substrate at least partially overlaps with the orthogonal projection of the parallel signal lines on the surface of the substrate, that is, the lead posts and the parallel signal lines are directly connected by being arranged in parallel or alternating, so that there is no need to connect the lead posts to the parallel signal lines via a connection layer in a step region, thereby improving the space utilization rate in the semiconductor structure and improving the integration degree of the semiconductor structure.

[0019] Hereinafter, each embodiment of the present disclosure will be described in detail with reference to the drawings. However, as can be understood by those skilled in the art, many technical details are disclosed in each embodiment of the present disclosure to allow the reader (skilled in the art) to better understand the embodiment of the present disclosure, but the technical solutions claimed in the embodiments of the present disclosure can be realized without these technical details or various changes and modifications based on the following embodiments.

[0020] As shown in FIGS. 4 to 28 , an embodiment of the present disclosure provides a semiconductor structure, the semiconductor structure includes a substrate (not shown) and a plurality of lead posts 5, a stacked structure is provided on the substrate, the stacked structure includes a plurality of memory cell groups TC0 arranged in a first direction X, the memory cell group TC0 includes a plurality of memory cells TC arranged in a second direction Z, the stacked structure further includes a plurality of parallel signal lines 3 arranged in the second direction Z, each parallel signal line 3 is connected to a layer of memory cells TC, the plurality of lead posts 5 are disposed in the first direction X, the plurality of lead posts 5 and the plurality of parallel signal lines are arranged along a third direction Y, and the lead posts 5 are connected to the parallel signal lines 3.

[0021] That is, the edge of the lead post 5 as orthogonally projected on the surface of the substrate is in contact with the edge of the parallel signal line 3 as orthogonally projected on the surface of the substrate. In other words, at least a part of the sidewall of the lead post 5 is directly connected to the sidewall of the parallel signal line 3, and there is no need to indirectly connect through a connection layer in the step region, which can reduce the number of connection layers and steps and is helpful in improving the integration degree of the semiconductor structure.

[0022] The semiconductor structure will now be described in detail with reference to the drawings.

[0023] First, it should be explained that Figures 6 to 10 are local side views, and for a more intuitive illustration, Figures 6 to 9 do not show the structure for isolating and supporting the lead posts 5 in the semiconductor structure. Figure 10 shows the structure for isolating and supporting the lead posts 5.

[0024] 6 to 10, in some embodiments, each of the parallel signal lines 3 is connected to at least one lead post 5. That is, each of the parallel signal lines 3 can be directly connected to the lead post 5, and thus is led out by the lead post 5. Therefore, there is no need to provide a separate step region, which can greatly improve the space utilization rate of the semiconductor structure and help simplify the manufacturing process.

[0025] 6 to 8, the parallel signal lines 3 are connected to the lead posts 5 in one-to-one correspondence. That is, each parallel signal line 3 is connected to one lead post 5, which reduces the number of connection positions between the parallel signal lines 3 and the lead posts 5 and helps simplify the manufacturing process. In some other embodiments, referring to FIG. 9, one parallel signal line 3 may be connected to multiple lead posts 5, which increases the contact area between the parallel signal lines 3 and the lead posts 5 and reduces the contact resistance.

[0026] In some embodiments, referring to Figures 4 to 13, the lead posts 5 extend in the second direction Z. That is, the lead posts 5 are parallel to each other, and the extending direction of the lead posts 5 and the stacking direction of the memory cells TC are the same. In this way, it is helpful to simplify the manufacturing process and improve the uniformity of the semiconductor structure. Exemplarily, the stacking direction of the memory cells TC is the second direction Z, and the second direction Z is perpendicular to the surface of the substrate.

[0027] 4 to 11, it should be explained that in the case of the lead post 5 connected to the parallel signal line 3 of the non-top layer, the lead post 5 is provided adjacent to the parallel signal line 3 of multiple layers, but according to the lead post 5's drawing function, each lead post 5 is not connected to two parallel signal lines 3 at the same time, but to only one parallel signal line 3, otherwise signal failure will occur. For ease of understanding, the parallel signal line 3 connected to the lead post 5 is called the parallel signal line 3 of the corresponding layer. The lead post 5 is provided insulated from the parallel signal lines 3 other than the parallel signal line 3 of the corresponding layer. Furthermore, the lead post 5 is divided into a stacked contact part 51 and an extension part 52, and the contact part 51 and the parallel signal line 3 of the corresponding layer are provided in the same layer and connected to each other. The extension part 52 is provided adjacent to the parallel signal line 3 on the corresponding layer, but is insulated from each other.

[0028] Correspondingly, referring to Figs. 5 to 13, the laminated structure may further include a dielectric layer 6. The dielectric layer 6 is located at least on the sidewall of the lead post 5 facing the parallel signal line 3 on the corresponding layer, and the lower surface of the dielectric layer 6 is higher than the parallel signal line 3 connected to the lead post 5. That is, the dielectric layer 6 is used to separate the lead post 5 from the parallel signal line 3 other than the corresponding layer to avoid erroneous electrical connection. Specifically, the dielectric layer 6 may surround the sidewall of the extension portion 52 of the lead post 5. The material of the dielectric layer 6 may be a low dielectric constant material such as silicon nitride or silicon oxide.

[0029] In some embodiments, referring to Figs. 4 to 10, the lengths in the second direction Z of the lead posts 5 connected to different parallel signal lines 3 are different, and the bottoms of the lead posts 5 are connected to the parallel signal lines 3. Exemplarily, the length in the second direction Z of the lead posts 5 connected to the parallel signal lines 3 of the top layer is the shortest, and the length in the second direction Z of the lead posts 5 connected to the parallel signal lines 3 of the bottom layer is the shortest, thus helping to save material, reducing manufacturing costs, and simplifying the manufacturing process. In some other embodiments, the lengths of the lead posts 5 may be the same, but the lead posts 5 are provided so that they are connected only to the parallel signal lines 3 of the corresponding layers and are insulated from the parallel signal lines 3 above and below the corresponding layers.

[0030] In order to increase the contact area between the lead post 5 and the parallel signal line 3 and reduce the contact resistance, the bottom surface of the lead post 5 may be flush with the bottom surface of the parallel signal line 3 of the corresponding layer, or the bottom surface of the lead post 5 may be slightly lower than the bottom surface of the parallel signal line 3 of the corresponding layer. In some other embodiments, the bottom surface of the lead post 5 may be higher than the bottom surface of the parallel signal line 3 of the corresponding layer, but should be lower than the top surface of the parallel signal line 3 of the corresponding layer.

[0031] 6-7, in some embodiments, adjacent lead posts 5 are equally spaced in the first direction X. That is, the distance between adjacent lead posts 5 is the same, thereby improving the uniformity of the semiconductor structure.

[0032] 6, the lead posts 5 are arranged according to their length in the second direction Z. In some other embodiments, referring to FIG. 7, the length of the lead posts 5 may be alternating without gradually increasing or decreasing, which can prevent large parasitic capacitance from occurring between the lead posts 5 with long lengths.

[0033] 8, in some other embodiments, the distance between adjacent lead posts 5 is directly proportional to the facing area. It should be noted that the facing area of ​​adjacent lead posts 5 and the magnitude of parasitic capacitance are directly proportional to each other. Therefore, the larger the facing area of ​​adjacent lead posts 5, the more the parasitic capacitance can be reduced by increasing the distance between them.

[0034] In some embodiments, referring to FIG. 10-FIG. 12, the stacked structure further includes a plurality of etching stop layers 13 arranged in the second direction Z, and each etching stop layer 13 is connected to the bottom surface of at least one lead post 5. Specifically, the method of forming the lead post 5 may include forming a through hole 8 (see FIG. 53) on one side of the parallel signal line 3 by an etching process, and depositing a conductive material in the through hole 8 to form the lead post 5. Therefore, the position of the lead post 5 is determined by the position of the through hole 8. The etching stop layer 13 can play a role of stopping the etching, thereby realizing a self-alignment function and avoiding the problem of over-etching or under-etching the through hole 8. That is, the etching stop layer 13 and the separation layer 14 are alternately arranged in the second direction Z, the etching stop layer 13 faces the gap between two adjacent layers of the parallel signal lines 3, the separation layer 14 and the parallel signal lines 3 are arranged in the same layer, and the etching selectivity of the separation layer 14 and the etching stop layer 13 is relatively large. Exemplarily, the material of the isolation layer 14 may be silicon oxide, and the material of the etch stop layer 13 may be silicon nitride. Furthermore, the etch stop layer 13 may also perform an isolation function.

[0035] 13, in some other embodiments, the etching stop layer 13 may not be provided, and only the isolation layer 14 may be provided on one side of the parallel signal lines 3. Correspondingly, in the process of forming the through holes 8, the depth of the through holes 8 is controlled by the etching time. In this way, only one etchant can be used, which helps to simplify the manufacturing process.

[0036] 4 to 5 and 11 to 28, the memory cell TC includes a channel region 22 and a source-drain doped region 21 arranged in a third direction Y, and the source-drain doped region 21 is located on both sides of the channel region 22. That is, the memory cell TC includes at least a transistor T. In some other embodiments, the memory cell TC may further include a capacitor C, and the transistor T and the capacitor C are arranged in the third direction Y. Exemplarily, in a dynamic random access memory (DRAM), the memory cell TC includes one transistor T and one capacitor C. In some other embodiments, the memory cell TC may include only a transistor T. For example, in a static random access memory (SRAM), the memory cell TC is composed of six transistors T. As another example, in a capacitorless double gate quantum well single transistor DRAM (1T DRAM), the memory cell TC is composed of one double gate transistor T.

[0037] 4 and 5, the stacked structure further includes vertical signal lines 4, which extend along the second direction Z and are connected to the memory cells TC of the same memory cell group TC0. One of the parallel signal lines 3 and the vertical signal lines 4 is a bit line BL, and the other is a word line WL. The bit line BL is connected to a source drain doped region 21, and the word line WL is connected to a channel region 22. The source drain doped region 21 connected to the bit line BL is also called a first source drain doped region 211, and the source drain doped region 21 spaced from the bit line BL is also called a second source drain doped region 212.

[0038] Hereinafter, the positional relationship between the parallel signal lines 3 and the lead posts 5 in two cases, that is, when the parallel signal lines are bit lines BL and when the parallel signal lines are word lines WL, will be described in detail.

[0039] When the parallel signal line 3 is a bit line BL, the parallel signal line 3 and the lead post 5 mainly have the following positional relationship.

[0040] 14 to 18, in a first example, the lead post 5 and the memory cell TC are located on opposite sides of the parallel signal line 3 arranged in the third direction Y, that is, the lead post 5 is located on the side of the parallel signal line 3 away from the memory cell TC. In this way, the arrangement position and size of the lead post 5 can be flexibly set.

[0041] Specifically, referring to FIG. 14, in some embodiments, the lead posts 5 and the memory cell groups TC0 face each other in the third direction Y. In this way, it is helpful to improve the uniformity of the positional arrangement. In some other embodiments, referring to FIG. 15, the lead posts 5 and the memory cell groups TC0 are alternately arranged in the first direction X, that is, the lead posts 5 may face the space between the adjacent memory cell groups TC0. In some other embodiments, referring to FIG. 16, the lead posts 5 may be provided to face the memory cell group TC0 and the space between the adjacent memory cell groups TC0 at the same time. In some other embodiments, referring to FIG. 17, some of the lead posts 5 face the space between the adjacent memory cell groups TC0, and some of the lead posts face the memory cell group TC0.

[0042] 14 to 17, in order to reduce the parasitic capacitance between the adjacent lead posts 5, a gap between the adjacent lead posts 5 may be provided facing at least one memory cell group TC0. Further, in order to improve the uniformity of the semiconductor structure, referring to FIGS. 14 to 16, the intervals between the adjacent lead posts 5 may be made the same. Further, referring to FIG. 17, the intervals between the adjacent lead posts 5 may be adjusted according to different facing areas, so that the parasitic capacitance between different lead posts 5 can be balanced.

[0043] 14-17, in some embodiments, the width of the lead post 5 in the first direction X is equal to the width of the memory cell group TC0, thus helping to standardize the feature sizes of different structures and simplify the manufacturing process. In some other embodiments, referring to FIG. 18, the width of the lead post 5 in the first direction X is greater than the width of the memory cell group TC0, thus helping to increase the contact area between the lead post 5 and the parallel signal line 3 of the corresponding layer, thereby reducing the contact resistance.

[0044] Furthermore, the width of the lead post 5 in the first direction X may be greater than or equal to the distance between adjacent memory cell groups TC0, which helps to increase the contact area between the lead post 5 and the parallel signal line 3 of the corresponding layer, thereby reducing the contact resistance.

[0045] 18, the width of the lead post 5 in the first direction X is greater than the width of the lead post 5 in the third direction Y. It should be noted that since the length of the parallel signal lines 3 in the first direction X is very long, the lead post 5 has sufficient storage space in the first direction X. In order to increase the cross-sectional area of ​​the lead post 5 and improve the space utilization rate of the semiconductor, the lead post 5 may be provided to have a certain width difference between the first direction X and the third direction Y.

[0046] 19-20, in a second example, the lead post 5 and the memory cell TC are located on the same side of the parallel signal line 3. That is, the lead post 5 may be located between adjacent memory cell groups TC0. In this way, it helps to fully utilize the spatial positions in the stacked structure, thereby improving the spatial utilization rate.

[0047] 19-20, in order to reduce the parasitic capacitance between adjacent lead posts 5, adjacent lead posts 5 may be spaced apart by at least two memory cell groups TC0. Further, referring to FIG. 19, in order to improve the uniformity of the semiconductor structure, the number of memory cell groups TC0 between adjacent lead posts 5 may be the same. Further, referring to FIG. 20, the number of memory cell groups TC0 between adjacent lead posts 5 may be adjusted according to different facing areas, so that the parasitic capacitance between different lead posts 5 can be balanced.

[0048] 19-20, in some embodiments, the width of the lead post 5 in the third direction Y is greater than the width of the lead post 5 in the first direction X. In this manner, by reducing the spacing between adjacent memory cell groups TC0, the area occupied by the stacked structure on the surface of the substrate can be reduced, and the cross-sectional area of ​​the lead post 5 can be increased to reduce the contact resistance of the lead post 5. In some other embodiments, the width of the lead post 5 in the third direction Y may be equal to the width of the lead post 5 in the first direction X.

[0049] It should be noted that the first and second examples may be combined, i.e., a portion of the lead post 5 is located on one side of the parallel signal line 3, and another portion of the lead post 5 is located on the other side of the parallel signal line 3.

[0050] In some embodiments, referring to Figures 14 to 20, the number of memory cells in each layer of the memory cell group TC0 is one. In another embodiment, referring to Figures 21 to 22, the number of memory cells TC in each layer of the memory cell group TC0 is two, and the two memory cells TC are located on two opposing sides of the parallel signal line 3 in the third direction Y. As the number of memory cells TC in the memory cell group TC0 increases, the memory capacity of the semiconductor structure also increases.

[0051] 21, in some embodiments, some lead posts 5 may be located between adjacent memory cell groups TC0 of a stacked structure, and some lead posts 5 may be located between adjacent memory cell groups TC0 of another stacked structure. That is, the multiple lead posts 5 are located on two different sides of the parallel signal line 3. For example, adjacent lead posts 5 are located on different sides of the parallel signal line 3. In other words, two adjacent lead posts 5 are arranged with a shift in the first direction X, which can reduce parasitic capacitance.

[0052] In some other embodiments, referring to FIG. 22, all the lead posts 5 are located on the same side of the parallel signal lines 3, thereby improving the uniformity of the arrangement of the lead posts 5 and simplifying the semiconductor manufacturing process.

[0053] It should be noted that in some embodiments, one lead post 5 is used only to draw out the parallel signal lines 3 of one laminate structure. In other embodiments, one lead post 5 may be shared by two laminate structures. Specifically, referring to Figs. 23 to 24, Fig. 23 is an overhead view, and Fig. 24 is a cross-sectional view in the third direction Y of Fig. 23, in which the parallel signal lines 3 of two adjacent laminate structures are provided facing each other, the lead post 5 is located between the parallel signal lines 3 of the adjacent laminate structures, and the parallel signal lines 3 of the same layer of the adjacent laminate structures are electrically connected via at least one lead post 5. Since the lead post 5 can be shared by two laminate structures, the number of lead posts 5 can be reduced, thereby reducing the volume of the semiconductor structure.

[0054] It should be noted that although the parallel signal lines 3 of the two stacked structures are electrically connected to each other, the memory cells TC corresponding to the parallel signal lines 3 are still controlled by different word lines WL, and therefore the memory cells TC of the two stacked structures can still be controlled individually.

[0055] When the parallel signal line 3 is a word line WL, the parallel signal line 3 and the lead post mainly have the following positional relationship.

[0056] First, it should be explained that the word line WL and the channel region 22 have various positional relationships. For example, the word line WL covers the entire channel region 22, or the word line WL is connected to the top and / or bottom surface of the channel region 22. When the word line WL covers the entire channel region 22, the sidewall area of ​​the word line WL is larger. Since the sidewall of the word line WL is connected to the sidewall of the lead post 5, the increase in the sidewall area of ​​the word line WL helps to increase the contact area between the word line WL and the lead post 5, thereby reducing the contact resistance. When the word line WL is located on the top and bottom surfaces of the channel region 22, the lead post 5 can be connected to both the word line WL located on the top surface of the channel region 22 and the word line WL located on the bottom surface of the channel region 22 to increase the contact area.

[0057] 25 to 27, in some embodiments, all the lead posts 5 are located on the same side of the parallel signal lines 3, thereby improving the uniformity of the arrangement of the lead posts 5 and simplifying the semiconductor manufacturing process. Exemplarily, with reference to FIG. 25, all the lead posts 5 are located on the side closer to the first source drain doped region 211 of the parallel signal lines 3, and with reference to FIGS. 26 to 27, all the lead posts 5 are located on the side closer to the second source drain doped region 212 of the parallel signal lines 3.

[0058] 25 to 27, adjacent lead posts 5 may be spaced apart by at least two memory cell groups TC0 to reduce parasitic capacitance. Further, referring to Fig. 25 and Fig. 26, the same number of memory cell groups TC0 may be provided between adjacent lead posts 5 to improve the uniformity of the semiconductor structure. Alternatively, referring to Fig. 27, the number of memory cell groups TC0 between adjacent lead posts 5 may be adjusted according to different facing areas, thereby balancing the parasitic capacitance between different lead posts 5.

[0059] 28, in some other embodiments, some of the lead posts 5 may be located on one side of the parallel signal lines 3, and some of the lead posts 5 may be located on the other side of the parallel signal lines 3. Illustratively, adjacent lead posts 5 are located on different sides of the parallel signal lines 3, that is, the lead posts 5 are arranged alternately in the first direction X, thereby reducing parasitic capacitance.

[0060] In short, in the embodiment of the present disclosure, the multiple lead posts 5 and the multiple parallel signal lines are arranged along the third direction Y, and the lead posts 5 are connected to the parallel signal lines 3. That is, the edges of the lead posts 5 as orthogonally projected on the surface of the substrate are in contact with the edges of the parallel signal lines 3 as orthogonally projected on the surface of the substrate. Since the lead posts 5 are directly connected to the parallel signal lines 3, the number of connection layers and steps can be reduced, thereby improving the integration degree of the semiconductor structure.

[0061] 29 to 44, another embodiment of the present disclosure provides a semiconductor structure, which is substantially the same as the semiconductor structure in the above embodiment, with the main difference being that the orthogonal projection of the multiple lead posts 5 of the semiconductor structure on the surface of the substrate at least partially overlaps with the orthogonal projection of the parallel signal lines 3 on the surface of the substrate. For parts of the semiconductor structure that are the same as or similar to those of the semiconductor structure provided in the above embodiment, reference may be made to the detailed description of the above embodiment, and will not be repeated here.

[0062] The semiconductor structure includes a substrate (not shown) and a plurality of lead posts 5, and a stacked structure is provided on the substrate, the stacked structure includes a plurality of memory cell groups TC0 arranged in a first direction X, the memory cell group TC0 includes a plurality of memory cells TC arranged in a second direction Z, the stacked structure further includes a plurality of parallel signal lines 3 arranged in the second direction Z, each parallel signal line 3 is connected to a layer of memory cells TC, the plurality of lead posts 5 are arranged in the first direction X and extend along the second direction Z, orthogonal projections of the plurality of lead posts 5 on the surface of the substrate at least partially overlap with orthogonal projections of the parallel signal lines 3 on the surface of the substrate, and the lead posts 5 are connected to the parallel signal lines 3.

[0063] In other words, the lead posts 5 are directly connected to the parallel signal lines 3 by being arranged alternately with the parallel signal lines 3 using at least a portion of the spatial position of the parallel signal lines 3, thereby reducing the number of steps or eliminating the need to arrange a separate step region, which is helpful in improving the integration density of the semiconductor structure.

[0064] The semiconductor structure will now be described in detail with reference to the drawings.

[0065] 29 to 37, the lead post 5 is located on the upper surface of the parallel signal line 3 of the corresponding layer, and the bottom surface of the lead post 5 is connected to the upper surface of the parallel signal line 3 of the corresponding layer. In some other embodiments, the bottom of the lead post 5 may be embedded inside the parallel signal line 3 of the corresponding layer, or the bottom of the lead post 5 may penetrate the parallel signal line 3 of the corresponding layer, that is, the sidewall of the lead post 5 may be connected to the parallel signal line 3 of the corresponding layer.

[0066] 29 to 30, 32, 34 and 36, at least one lead post 5 penetrates at least one parallel signal line 3, that is, at least one lead post 5 of the multiple lead posts 5 is connected to a parallel signal line 3 of a non-top layer. It should be explained that the lead post 5 connected to the parallel signal line 3 of the non-top layer needs to occupy a spatial position of the parallel signal line 3 above the corresponding layer in addition to the spatial position of the parallel signal line 3 of the corresponding layer. Therefore, the lead post 5 penetrates the parallel signal line 3 located above the corresponding layer. Referring to FIG. 31, in the case of the lead post 5 connected to the parallel signal line 3 of the top layer, the lead post 5 does not need to penetrate the parallel signal line 3 of a layer other than the corresponding layer.

[0067] It should be noted that the lead posts 5 penetrate the parallel signal lines 3 located above the corresponding layers 5, but do not completely cut through the parallel signal lines 3 above the corresponding layers.

[0068] 29 to 44, the parallel signal lines 3 include contact regions 31 and exposed regions 32 arranged in a third direction Y, the lead posts 5 are connected to the contact regions 31 and expose the exposed regions 32, and the third direction Y is perpendicular to the second direction Z and parallel to the surface of the substrate. That is, the lead posts 5 are connected to the contact regions 31 of the parallel signal lines 3 of the corresponding layer, penetrate the contact regions 31 of the parallel signal lines 3 located above the corresponding layer, and expose the exposed regions 32 of all the parallel signal lines 3. Although the parallel signal lines 3 above the corresponding layer are penetrated, the exposed regions 32 are still left, so that the parallel signal lines 3 are not completely cut off, and the parallel signal lines 3 can still be connected to the memory cells TC of the same layer.

[0069] 32-33, in some embodiments, FIG. 33 shows a local enlarged view of the parallel signal line 3 and the lead post 5 of the corresponding layer in FIG. 32, the exposed area 32 is located on both opposite sides of the contact area 31, and the orthogonal projection of the lead post 5 on the surface of the substrate overlaps with the orthogonal projection of the contact area 31 on the surface of the substrate. That is, the contact area 31 is located at the middle position of the parallel signal line 3, the lead post 5 is connected to the center of the parallel signal line 3 of the corresponding layer and penetrates the center of the parallel signal line 3 located above the corresponding layer, the exposed area 32 of the parallel signal line 3 is not cut, and the parallel signal line 3 can still be connected to the memory cell TC of the same layer.

[0070] In some other embodiments, referring to Figs. 34 to 38, Fig. 35 shows a local enlarged view of the parallel signal line 3 and the lead post 5 of the corresponding layer in Fig. 34, Fig. 37 shows a local enlarged view of the parallel signal line 3 and the lead post 5 of the corresponding layer in Fig. 36, and Fig. 38 is an overhead view of the semiconductor structure shown in Fig. 36. The parallel signal line 3 has opposing sides arranged in the third direction Y, the exposed area 32 is located on one side of the opposing sides, and the contact area 31 is located on the other side of the opposing sides. That is, the lead post 5 is connected to one side of the parallel signal line 3 of the corresponding layer and exposes the other side of the parallel signal line 3, the lead post 5 penetrates one side of the parallel signal line 3 above the corresponding layer, and the other side of the parallel signal line 3 above the corresponding layer is not penetrated.

[0071] In one example, referring to Figures 34-35, the orthogonal projection of the lead post 5 on the surface of the substrate overlaps with the orthogonal projection of the exposed area 32 on the surface of the substrate, that is, in the direction parallel to the substrate, the lead post 5 uses the spatial position of the parallel signal line 3 without exceeding the parallel signal line 3, which helps to improve the compactness of the lead post 5 and the parallel signal line 3, thereby improving space utilization.

[0072] In another example, referring to Figs. 36 to 38, the lead post 5 is provided so as to protrude from the contact region 31. That is, the lead post 5 is provided so as to protrude from one side of the parallel signal line 3. That is, only a part of the bottom surface of the lead post 5 is in contact with and connected to the contact region 31. By providing the lead post 5 so as to protrude, the area of ​​the parallel signal line 3 above the corresponding layer through which the lead post 5 penetrates can be reduced, and thus the resistance of the parallel signal line 3 above the corresponding layer can be reduced. Meanwhile, it can be ensured that the lead post 5 has a relatively large cross-sectional area, and thus the resistance of the lead post 5 can be reduced.

[0073] It should be explained that in some embodiments, the parallel signal line 3 may be strip-shaped, that is, the orthogonal projection of the parallel signal line 3 on the surface of the substrate is rectangular. In other embodiments, the parallel signal line 3 may include a main body and a protrusion connected to each other, the main body being strip-shaped, and the protrusion may be shaped like a square or sawtooth, that is, the length of the protrusion in the first direction X is smaller than the length of the main body in the first direction X. The main body and the protrusion may be arranged in a third direction Y. The main body is connected to the memory cell group TC0, and the protrusion is connected to the lead post 5. Exemplarily, the bottom surface of the lead post 5 may be connected to the top surface of the protrusion of the corresponding layer, in this way the lead post 5 does not need to penetrate the main body above the corresponding layer, which helps to reduce the resistance of the parallel signal line 3 above the corresponding layer.

[0074] 29 to 30, the memory cell TC includes a channel region 22 and a source drain doped region 21 arranged in a third direction Y, and the source drain doped region 21 is located on both sides of the channel region 22. That is, the memory cell TC includes at least a transistor T. In some other embodiments, the memory cell TC may further include a capacitor C, and the transistor T and the capacitor C are arranged in the third direction Y. The source drain doped region 21 may include a first source drain doped region 211 and a second source drain doped region 212, and the first source drain doped region 211 may be connected to a bit line BL, and the second source drain doped region 212 may be located on a side of the channel region 22 away from the first source drain doped region 211.

[0075] The stacked structure further includes vertical signal lines 4, which extend along the second direction Z and are connected to the memory cells TC of the same memory cell group TC0. One of the parallel signal lines 3 and the vertical signal lines 4 is a bit line BL, and the other is a word line WL, with the bit line BL connected to the source-drain doped region 21 and the word line WL connected to the channel region 22.

[0076] Hereinafter, the positional relationship between the parallel signal lines 3 and the lead posts 5 in two cases, that is, when the parallel signal lines 3 are bit lines BL and when the parallel signal lines are word lines WL, will be described in detail.

[0077] When the parallel signal line 3 is a bit line BL, the parallel signal line 3 and the lead post 5 mainly have the following positional relationship.

[0078] 38-39, in a first example, the lead post 5 and the memory cell group TC0 face each other in the third direction Y. In this way, it is helpful to improve the uniformity of the position arrangement.

[0079] 40, in the second example, the lead posts 5 and the memory cells TC are arranged alternately in the first direction X. That is, the lead posts 5 may face the spaces between adjacent memory cell groups TC0.

[0080] In a third example, referring to FIG. 41, the lead post 5 may be provided facing the memory cell group TC0 and the space between the adjacent memory cell groups TC0.

[0081] It should be noted that when the parallel signal line 3 is a bit line BL, in order to avoid the lead post 5 from cutting off the connection between the parallel signal line 3 above the corresponding layer and the memory cell TC, the exposed region 32 can be located on the side closer to the memory cell TC and the contact region 31 can be located on the side away from the memory cell TC, or the exposed region 32 can be located on opposite sides of the contact region 31.

[0082] 42, in some embodiments, the number of memory cells TC in each layer of the memory cell group TC0 is two, and the two memory cells TC are located on two opposing sides of the parallel signal line 3 in the third direction Y. In this case, one lead post 5 leads out more memory cells TC via the parallel signal line 3, thereby improving the integration density of the semiconductor structure.

[0083] When the parallel signal line 3 is a word line WL, the parallel signal line 3 and the lead post mainly have the following positional relationship.

[0084] In a first example, referring to FIG. 43, the lead post 5 is located between adjacent memory cell groups TC0, i.e., the lead post 5 and the channel region 22 are offset from each other, thereby preventing the lead post 5 from cutting the memory cells TC located above the corresponding layer, thereby reducing the number of invalid memory cells TC.

[0085] 44, in a second example, the orthogonal projection of the lead post 5 on the surface of the substrate overlaps with the orthogonal projection of the channel region 22 on the surface of the substrate. That is, the lead post 5 can use the position of the channel region 22 to draw out the parallel signal line 3, which helps to reduce the distance between adjacent memory cell groups TC0, thereby improving the compactness of the memory cell groups TC0 and improving the nonlinearity of the semiconductor structure.

[0086] In short, in another embodiment of the present disclosure, the edge of the lead post 5 in the orthogonal projection on the surface of the substrate overlaps with the edge of the parallel signal line 3 in the orthogonal projection on the surface of the substrate, that is, the lead post 5 can be directly connected to the parallel signal line 3 using the space of the body of the parallel signal line 3, thereby reducing the number of connection layers and steps, and thereby improving the integration degree of the semiconductor structure.

[0087] As shown in Figures 45 to 56, another embodiment of the present disclosure provides a method for manufacturing a semiconductor structure, and it should be noted that, in order to conveniently describe and clearly show the steps of the method for manufacturing a semiconductor structure, Figures 45 to 56 are schematic diagrams of local structures of the semiconductor structure. Hereinafter, the method for manufacturing a semiconductor structure provided in the embodiment of the present disclosure will be described in detail with reference to the drawings.

[0088] A substrate is provided, and a stacked structure is formed on the substrate, the stacked structure including a plurality of memory cell groups TC0 arranged in a first direction X, the memory cell group TC0 including a plurality of memory cells TC arranged in a second direction Z, the stacked structure further including a plurality of parallel signal lines 3 arranged in the second direction Z, each parallel signal line 3 being connected to one layer of memory cells TC.

[0089] Exemplarily, the memory cell TC may include a transistor T and a capacitor C. Specifically, the step of forming the transistor T may include forming a plurality of spaced apart active layers, each of which includes a plurality of active structures; performing a doping process on the active structures to form a source-drain doped region 21 and a channel region 22; and forming a gate dielectric layer 6 on the surface of the channel region 22. That is, the memory cell TC includes a channel region 22 and a source-drain doped region 21 arranged in a third direction Y, the source-drain doped region 21 being located on both sides of the channel region 22, and the third direction Y being parallel to the surface of the substrate. In addition, an insulating layer 12 needs to be formed between the transistors T of adjacent layers to separate the adjacent transistors T. The step of forming the capacitor C may include forming a capacitor support layer and a capacitor hole located in the capacitor support layer, forming a lower electrode on the inner wall of the capacitor hole, forming a capacitor dielectric layer 6 on the surface of the lower electrode, and forming an upper electrode on the surface of the capacitor dielectric layer 6. The lower electrode, the capacitor dielectric layer 6, and the upper electrode constitute the capacitor C.

[0090] A plurality of lead posts 5 are formed arranged in a first direction X, the plurality of lead posts 5 and the plurality of parallel signal lines are arranged along a third direction Y, and the lead posts 5 are connected to the parallel signal lines 3 .

[0091] A method for forming the lead post 5 will now be described in detail.

[0092] First, it should be explained that the multiple parallel signal lines 3 include a first parallel signal line to an Nth parallel signal line (N is a positive integer greater than 1) that are sequentially arranged in the second direction Z. The first parallel signal line is located in the top layer, and the Nth parallel signal line is located in the bottom layer.

[0093] 45 to 56, through holes 8 are formed, and the through holes 8 include a first through hole to an Nth through hole, where the first through hole exposes a side wall of the first parallel signal line, and the Nth through hole exposes a side wall of the first parallel signal line to the Nth parallel signal line.

[0094] Hereinafter, the steps of forming the through holes 8 will be described in detail, taking as an example that the parallel signal lines 3 are bit lines BL.

[0095] 45-46, an isolation structure is formed on the sidewalls of the parallel signal lines 3. In some embodiments, the isolation structure may include an etching stop layer 13 and an isolation layer 14 provided alternately. The isolation layer 14 is provided in the same layer as the parallel signal lines 3, and the etching stop layer 13 and the insulating layer 12 (see FIG. 10) between the adjacent parallel signal lines 3 are provided opposite to each other. In other embodiments, the isolation structure may include only the isolation layer 14, and the isolation layer 14 covers the sidewalls of the parallel signal lines 3 and the insulating layer 12.

[0096] 45-46, a mask layer 71 is formed, and N openings 72 are provided in the mask layer 71, where N is a positive integer greater than 1, and the openings 72 are located on one side of the parallel signal lines 3. Exemplarily, the mask layer 71 may be a photoresist layer, and the photoresist layer is photoetched to form the openings 72. Alternatively, the mask layer 71 may be a hard mask layer 71 and a photoresist layer which are stacked together, and the photoresist layer is photoetched and then the hard mask layer 71 is photoetched to form the openings 72.

[0097] Referring to Figures 47 to 48, the top isolation layer 14 is etched along the opening 72 until the top etching stop layer 13 is exposed to form a plurality of first sub-through holes 811, the first sub-through holes 811 exposing the sidewalls of the first parallel signal lines, and one of the first sub-through holes 811 is used as the first through hole 81.

[0098] 49 and 50, a sacrificial layer 73 is formed to fill the first sub-through-hole 811. Exemplarily, a low dielectric constant material such as silicon oxide is deposited in the first sub-through-hole 811 and used as the sacrificial layer 73.

[0099] 49 and 50, the mask layer 71 is patterned such that the mask layer 71 has N-1 openings 72. Specifically, a photoresist layer may be spin-coated again and the photoresist layer may be photo-etched to form the openings 72.

[0100] Referring to Figures 51 and 52, the sacrificial layer 73 and the second separation layer 14 are etched along the opening 72 to form an (N-1)th second sub-through hole 821, where one second sub-through hole 821 is used as a first through hole 82.

[0101] 53-54, the steps of forming a sacrificial layer 73, patterning the mask layer 71, and etching are repeated until the sidewalls of the Nth parallel signal line 3 are exposed (i.e., until the top surface of the Nth etch stop layer is exposed).

[0102] At this time, the through holes 8 may be formed based on FIGS. 49 to 54, and the through holes 8 include the first through hole 8 to the Nth through hole 8. Exemplarily, referring to FIGS. 53 to 54, the first through hole 81, the second through hole 82, the third through hole 83, the fourth through hole 84, and the fifth through hole 85 may be formed. It should be noted that the depths of the first through hole 81, the second through hole 82, the third through hole 83, the fourth through hole 84, and the fifth through hole 85 arranged sequentially in the first direction X gradually increase. In another embodiment, the depths of the first through hole 81, the second through hole 82, the third through hole 83, the fourth through hole 84, and the fifth through hole 85 arranged sequentially in the first direction X do not gradually increase or decrease, but alternately change, thereby preventing the parasitic capacitance between the deep lead posts 5 among the subsequently formed lead posts 5 from becoming too large.

[0103] It should be noted that, when the parallel signal lines 3 are word lines WL, the steps of forming the through holes 8 are similar to the above steps, with the main difference being that the insulating layer 12 located between the adjacent memory cell groups TC0 is etched to form the through holes 8. For other steps related to the formation of the mask layer 71 and the formation of the sacrificial layer 73, reference can be made to the detailed description above.

[0104] 55 and 56, the first contact portion to the Nth contact portion are formed at the bottom of the first through hole 81 to the Nth through hole, respectively, and the first contact portion to the Nth contact portion are provided in the same layer as the first parallel signal line to the Nth parallel signal line 3, respectively, and the contact portion 51 covers the side wall of the parallel signal line 3 in the corresponding layer.

[0105] 55 and 56, after the contact portion 51 is formed, a dielectric layer 6 is formed on the side wall of the through hole 8. Exemplarily, an initial dielectric layer is formed on the side wall of the through hole 8 and the surface of the contact portion 51 by a chemical vapor deposition process, the initial dielectric layer located on the surface of the contact portion 51 is removed, and the initial dielectric layer located on the side wall of the through hole 8 is used as the dielectric layer 6.

[0106] 55 and 56, an extension portion 52 is formed to fill the through hole 8, and the contact portion 51 and the extension portion 52 constitute the lead post 5. Illustratively, a metal such as copper, aluminum, titanium, or tungsten is deposited in the through hole 8 and used as the lead post 5.

[0107] It should be noted that the above method for forming the lead post 5 is merely an illustrative example, and the method for forming the lead post 5 is not limited thereto, and the method for forming the lead post 5 can be adjusted according to the specific structure of the lead post 5.

[0108] As shown in Figures 57 to 60, another embodiment of the present disclosure provides a method for manufacturing a semiconductor structure. In the method for manufacturing the semiconductor structure, the method is substantially the same as the method for manufacturing the semiconductor structure described above, and for the same or similar parts, reference may be made to the detailed description of the above embodiment. In order to conveniently describe and clearly show the steps of the method for manufacturing the semiconductor structure, Figures 57 to 60 are schematic diagrams of local structures of the semiconductor structure. Hereinafter, the method for manufacturing the semiconductor structure will be described in detail with reference to the drawings.

[0109] A substrate is provided, and a stacked structure is formed on the substrate, the stacked structure including a plurality of memory cell groups TC0 arranged in a first direction X, the memory cell group TC0 including a plurality of memory cells TC arranged in a second direction Z, the stacked structure further including a plurality of parallel signal lines 3 arranged in the second direction Z, each parallel signal line 3 being connected to one layer of memory cells TC.

[0110] For the method of forming the laminated structure, the detailed description of the above embodiment can be referred to.

[0111] 57 to 60, a plurality of lead posts 5 are formed arranged in a first direction X and extending along a second direction Z, and the orthogonal projections of the plurality of lead posts 5 on the surface of the substrate at least partially overlap with the orthogonal projections of the parallel signal lines 3 on the surface of the substrate, and the lead posts 5 are connected to the parallel signal lines 3.

[0112] A method for manufacturing the lead post 5 will now be described in detail.

[0113] First, it should be explained that the multiple parallel signal lines 3 include a first parallel signal line to an Nth parallel signal line (N is a positive integer greater than 1) that are sequentially arranged in the second direction Z. The first parallel signal line is located in the top layer, and the Nth parallel signal line is located in the bottom layer.

[0114] 57 to 58, through holes 8 are formed, and the through holes 8 include a first through hole 81 to an Nth through hole, where the first through hole 81 exposes the top surface of the first parallel signal line, and the Nth through hole penetrates the first parallel signal line to the N-1th parallel signal line and exposes the top surface of the Nth parallel signal line.

[0115] The steps of forming the through holes 8 are almost the same as those in the above embodiment, with the main difference being that the through holes 8 penetrate the parallel signal lines 3, and therefore the parallel signal lines 3 need to be etched. In addition, when the lead posts 5 utilize the positions of the memory cell groups TC0, the channel regions 22 and the insulating layers 12 located between the upper and lower memory cells TC need to be etched when the through holes 8 are formed, and when the lead posts 5 utilize the positions between the adjacent memory cell groups TC0, the insulating layers 12 between the adjacent memory cells TC need to be etched when the through holes 8 are formed. For other steps related to the formation of the mask layer 71 and the formation of the sacrificial layer 73, reference can be made to the detailed description of the above embodiment.

[0116] 59 to 60, a dielectric layer 6 is formed on the side wall of a through hole 8. Specifically, an initial dielectric layer is formed on the inner wall of the through hole 8, and the initial dielectric layer located on the bottom wall of the through hole 8 is removed to expose the parallel signal line 3 of the corresponding layer, and the initial dielectric layer located on the side wall of the through hole 8 is used as the dielectric layer 6. A lead post 5 is formed to fill the through hole 8, and the bottom surface of the lead post 5 is electrically connected to the parallel signal line 3.

[0117] In short, in the embodiment of the present disclosure, the parallel signal lines 3 are etched to form through holes 8, and then the dielectric layer 6 and the lead posts 5 are formed to fill the through holes 8. In this way, the spatial positions of the parallel signal lines 3 can be utilized to directly electrically connect the lead posts 5 to the parallel signal lines 3, which can reduce the number of steps or eliminate the need to form a separate step region, thus helping to improve the integration density of the semiconductor structure.

[0118] An embodiment of the present disclosure further provides a memory chip including the semiconductor structure provided in the above embodiment.

[0119] The memory chip is a storage unit for storing programs and various data information. Exemplarily, the memory chip may be a random access memory chip or a read-only memory chip, for example, the random access memory chip may include dynamic random access memory or static random access memory. The high integration of the above semiconductor structure helps to realize the ultra-miniaturization of the memory chip.

[0120] An embodiment of the present disclosure further provides an electronic device including the memory chip provided in the above embodiment.

[0121] Exemplarily, the electronic device may be a device such as a television, a computer, a mobile phone, or a tablet computer. The electronic device may include a circuit board and a package structure, and the memory chip is welded onto the circuit board and protected by the package structure. In addition, the electronic device may further include a power supply for supplying an operating voltage to the memory chip.

[0122] In the present description, the description of terms such as "some embodiments," "exemplary," and the like means that the specific features, structures, materials, or characteristics described with reference to the embodiments or examples are included in at least one embodiment or example of the present disclosure. In the present description, the exemplary expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, unless conflicting, a person skilled in the art may integrate or combine different embodiments or examples described herein and features of different embodiments or examples.

[0123] Although the embodiments of the present disclosure have been shown and described above, it is understood that the above embodiments are illustrative and should not be construed as limiting the present disclosure. Those skilled in the art can make changes, modifications, substitutions and transformations to the above embodiments within the scope of the present disclosure, and therefore, the changes and modifications made according to the claims and specifications of the present disclosure shall be included in the protection scope of the present disclosure.

Claims

1. 1. A semiconductor structure comprising: a substrate and a plurality of lead posts; a stacked structure is provided on the substrate, the stacked structure including a plurality of memory cell groups arranged in a first direction, the memory cell groups including a plurality of layers of memory cells arranged in a second direction, the memory cells including channel regions and source drain doped regions arranged in a third direction, the source drain doped regions being located on both sides of the channel region; the stacked structure further includes a plurality of parallel signal lines arranged in the second direction and extending along the first direction, each of the parallel signal lines being connected to the memory cells of one layer; the plurality of lead posts are arranged in the first direction and extend along the second direction, the plurality of lead posts and the plurality of memory cell groups are located on opposing sides of the parallel signal line in the third direction, the lead posts are located on a side of the parallel signal line away from the memory cells, and the lead posts are connected to the parallel signal line; the lead posts and the memory cell groups face each other in the third direction, or the lead posts and the memory cell groups are alternately arranged in the first direction; A semiconductor structure, wherein any two of the first direction, the second direction, and the third direction are perpendicular to each other, and the second direction is perpendicular to a surface of the substrate.

2. Each of the parallel signal lines is connected to at least one of the lead posts; the parallel signal lines are connected to the lead posts in one-to-one correspondence; The semiconductor structure of claim 1 .

3. Adjacent lead posts are arranged at equal intervals in the first direction, or a distance between adjacent lead posts is directly proportional to an overlapping area, the overlapping area being a projected overlapping area of ​​the adjacent lead posts in the first direction; The semiconductor structure of claim 1 .

4. The lead post includes a laminated contact portion and an extension portion, The contact portion and the parallel signal line of the corresponding layer are provided in the same layer and connected to each other, and the parallel signal line of the corresponding layer is a parallel signal line connected to the contact portion; the extensions are disposed adjacent to and insulated from the parallel signal lines on the corresponding layers; The stacked structure further includes a plurality of etch stop layers arranged in the second direction, each etch stop layer being connected to a bottom surface of at least one of the lead posts; the laminated structure further includes a dielectric layer, the dielectric layer being located at least on a sidewall of the extension of the lead post, and a lower surface of the dielectric layer being higher than the parallel signal line connected to the lead post; The semiconductor structure of claim 1 .

5. A width of the lead post in the first direction is greater than or equal to a width of the memory cell group, and / or and / or the width of the lead post in the first direction is greater than or equal to the distance between adjacent memory cell groups; a width of the lead post in the first direction is greater than a width of the lead post in the third direction; The semiconductor structure of claim 1 .

6. the parallel signal lines are bit lines, the bit lines being connected to the source-drain doped regions; The semiconductor structure of claim 1 .

7. 1. A semiconductor structure comprising: a substrate and a plurality of lead posts; a stacked structure is provided on the substrate, the stacked structure including a plurality of memory cell groups arranged in a first direction, the memory cell groups including a plurality of layers of memory cells arranged in a second direction, the memory cells including channel regions and source drain doped regions arranged in a third direction, the source drain doped regions being located on both sides of the channel region; the stacked structure further includes a plurality of parallel signal lines arranged in the second direction and extending along the first direction, each of the parallel signal lines being connected to the memory cells of one layer; the plurality of lead posts are arranged in the first direction and extend along a second direction, an orthogonal projection of the plurality of lead posts on a surface of the substrate at least partially overlaps an orthogonal projection of parallel signal lines on the surface of the substrate, and the lead posts are connected to the parallel signal lines; the lead posts and the memory cell groups face each other in the third direction, or the lead posts and the memory cell groups are alternately arranged in the first direction; A semiconductor structure, wherein any two of the first direction, the second direction, and the third direction are perpendicular to each other, and the second direction is perpendicular to a surface of the substrate.

8. At least one of the lead posts passes through at least one of the parallel signal lines.

8. The semiconductor structure of claim 7.

9. the parallel signal lines include contact regions and exposed regions arranged in the third direction, the lead posts are connected to the contact regions, and the third direction is perpendicular to the second direction and parallel to a surface of the substrate; the parallel signal lines have opposing sides arranged in the third direction, the exposed area is located on one side of the opposing sides, the contact area is located on the other side of the opposing sides, and the lead post is provided to protrude from the contact area.

8. The semiconductor structure of claim 7.

10. the parallel signal lines have opposing sides arranged in the third direction, the number of the memory cells in each layer of the memory cell group is two, and the two memory cells are located on opposing sides of the parallel signal lines arranged in the third direction, 8. The semiconductor structure of claim 7.

11. 1. A method for manufacturing a semiconductor structure, comprising the steps of: Providing a substrate; forming a stacked structure on the substrate, the stacked structure including a plurality of memory cell groups arranged in a first direction, the memory cell groups including a plurality of layers of memory cells arranged in a second direction, the memory cells including channel regions and source-drain doped regions arranged in a third direction, the source-drain doped regions being located on both sides of the channel regions, the stacked structure further including a plurality of parallel signal lines arranged in the second direction and extending along the first direction, each of the parallel signal lines being connected to one layer of the memory cells; forming a plurality of lead posts arranged in the first direction and extending along the second direction, the plurality of lead posts and the plurality of memory cell groups being located on opposing sides of the parallel signal lines in the third direction, the lead posts being located on a side of the parallel signal lines away from the memory cells, and the lead posts being connected to the parallel signal lines; the lead posts and the memory cell groups face each other in the third direction, or the lead posts and the memory cell groups are alternately arranged in the first direction; A method for manufacturing a semiconductor structure, wherein any two of the first direction, the second direction, and the third direction are perpendicular to each other, and the second direction is perpendicular to a surface of the substrate.

12. 1. A method for manufacturing a semiconductor structure, comprising the steps of: Providing a substrate; forming a stacked structure on the substrate, the stacked structure including a plurality of memory cell groups arranged in a first direction, the memory cell groups including a plurality of layers of memory cells arranged in a second direction, the memory cells including channel regions and source-drain doped regions arranged in a third direction, the source-drain doped regions being located on both sides of the channel regions, the stacked structure further including a plurality of parallel signal lines arranged in the second direction and extending along the first direction, each of the parallel signal lines being connected to one layer of the memory cells; forming a plurality of lead posts arranged in the first direction and extending along the second direction, wherein orthogonal projections of the plurality of lead posts on a surface of the substrate at least partially overlap orthogonal projections of parallel signal lines on the surface of the substrate, and the lead posts are connected to the parallel signal lines; the lead posts and the memory cell groups face each other in the third direction, or the lead posts and the memory cell groups are alternately arranged in the first direction; A method for manufacturing a semiconductor structure, wherein any two of the first direction, the second direction, and the third direction are perpendicular to each other, and the second direction is perpendicular to a surface of the substrate.

13. A memory chip comprising the semiconductor structure according to any one of claims 1 to 6 or the semiconductor structure according to any one of claims 7 to 10.

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