Solid-state imaging device, method for controlling solid-state imaging device, and mobile object
Patent Information
- Application Number
- JP2022528499
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- Priority Date
- 2020-06-05
- Filing Date
- 2021-05-10
- Publication Date
- 2025-02-28
- Estimated Expiration
- 2041-05-10
Smart Images

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Abstract
Description
[Technical field]
[0001] The present disclosure relates to a solid-state imaging device, a method for controlling the solid-state imaging device and a moving object. [Background technology]
[0002] In some cases, an IMU (Inertial Measurement Unit) is used to obtain acceleration information of drones, base terminals, automobiles, airplanes, etc. Solid-state imaging devices equipped with such IMUs have been developed. [Prior art documents] [Non-patent literature]
[0003] [Non-Patent Document 1] https: / / www.ncbi.nlm.nih.gov / pmc / articles / PMC5539653 / pdf / sensors-17-01646.pdf [Non-Patent Document 2] https: / / arxiv.org / pdf / 1509.06494.pdf Summary of the Invention [Problem to be solved by the invention]
[0004] However, in conventional elements, the measurable range of acceleration is preset, so when the solid-state imaging device operates at an acceleration outside the measurable range, the IMU cannot accurately measure the acceleration.
[0005] In order to solve the above problems, the present disclosure provides a solid-state imaging device capable of accurately measuring acceleration by dynamically changing the measurable range of acceleration, a control method thereof, and a moving object. [Means for solving the problem]
[0006] A solid-state imaging device according to one aspect of the present disclosure is a solid-state imaging device disposed on a moving body, and includes an imaging unit that images an object by photoelectrically converting incident light into an amount of charge corresponding to the amount of light, a motion detection unit that calculates the speed of the object based on multiple images captured by the imaging unit, and an inertial measurement unit that detects the acceleration or angular velocity of the moving body and changes the measurable range of the acceleration or angular velocity of the moving body according to the speed of the object.
[0007] When the velocity of the object exceeds a first threshold, the inertial measurement unit may expand the measurement range.
[0008] When the velocity of the object falls below a second threshold, the inertial measurement unit may narrow the measurement range.
[0009] The imaging unit may capture images of the object at a predetermined time interval, and the motion detection unit may calculate the speed of the object based on the distance traveled of a feature point of the object between a first image captured at a certain point in time and a second image captured at the next point in time.
[0010] When it is estimated from a change in the velocity of the object that the velocity of the object will reach a third threshold value in a third image captured at a next time point, the inertial measurement unit may change the measurable range.
[0011] An AD converter that converts pixel signals from an imaging unit into digital signals (Analog-to-Digital), and a signal processing unit that processes the digital signals to generate image data;
[0012] The apparatus may include a memory for storing image data and a controller for controlling the measurable range of the inertial measurement unit based on the velocity of the object, and the controller or the memory may be disposed between the inertial measurement unit and the signal processing unit.
[0013] The device includes an AD converter that converts pixel signals from the imaging unit into digital signals, a signal processing unit that processes the digital signals to generate image data, a memory that stores the image data, and a controller that controls the measurable range of the inertial measurement unit based on the velocity of the object, and the controller or memory may be disposed between the inertial measurement unit and the motion detection unit.
[0014] The sensor may be configured by stacking a first semiconductor chip including an imaging unit and a second semiconductor chip including a motion detection unit and an inertial measurement unit.
[0015] The sensor may be configured by stacking a first semiconductor chip including an imaging unit and a second semiconductor chip including a motion detection unit, an inertial measurement unit, an AD converter, a signal processing unit, a memory, and a controller.
[0016] The semiconductor device may be configured by stacking a first semiconductor chip including an imaging unit, a second semiconductor chip including an inertial measurement unit, and a third semiconductor chip including a motion detection unit.
[0017] The sensor may be configured by stacking a first semiconductor chip including an imaging unit, a second semiconductor chip including an inertial measurement unit and an AD converter, and a third semiconductor chip including a motion detection unit, a signal processing unit, a memory, and a controller.
[0018] A control method for a solid-state imaging device according to the present disclosure is a control method for a solid-state imaging device that is disposed on a moving body and includes an imaging unit that images an object by photoelectrically converting incident light into an amount of charge corresponding to the amount of light, a motion detection unit that calculates the speed of the object, and an inertial measurement unit that detects acceleration or angular velocity, and includes: imaging the object with the imaging unit; calculating the speed of the object based on multiple images captured by the imaging unit in the motion detection unit; and changing the measurable range of the acceleration or angular velocity of the moving body in the inertial measurement unit according to the speed of the object.
[0019] Changing the measurable range may include the inertial measurement unit expanding the measurable range when the speed of the object exceeds a first threshold, and narrowing the measurable range when the speed of the object falls below a second threshold.
[0020] The object may be imaged at a predetermined time interval, and the velocity of the object may be calculated based on the distance traveled by a feature point of the object between a first image taken at one time and a second image taken at a next time.
[0021] The measurable range may be changed if a change in the velocity of the object indicates that the velocity of the object will reach a third threshold in a third image captured at a next time point.
[0022] A moving body according to the present disclosure is a moving body equipped with a solid-state imaging device, which includes an imaging unit that images an object by photoelectrically converting incident light into an amount of charge corresponding to the amount of light, a motion detection unit that calculates the speed of the object based on multiple images captured by the imaging unit, and an inertial measurement unit that detects the acceleration or angular velocity of the moving body and changes the measurable range of the acceleration or angular velocity of the moving body according to the speed of the object. [Brief description of the drawings]
[0023] [Figure 1A] 1 is a block diagram showing an example of the arrangement of a solid-state imaging device according to a first embodiment. [Figure 1B] FIG. 4 is a circuit diagram showing an example of the configuration of a MEMS sensor as an inertial measurement unit. [Diagram 2] FIG. 4 is a flowchart showing an example of a control method for the solid-state imaging device according to the first embodiment. [Diagram 3] 1 is a flow diagram showing how to calculate the velocity of an object. [Figure 4] A graph showing the speed of an object. [Diagram 5] A graph showing the speed of an object. [Figure 6] FIG. 11 is a flowchart showing an example of a control method for the solid-state imaging device according to a modified example of the first embodiment. [Figure 7] A graph showing the speed of an object. [Figure 8] A graph showing the speed of an object. [Figure 9] 1 is a conceptual diagram showing an example of a solid-state imaging device in which a semiconductor chip of an imaging unit and a semiconductor chip of a processing circuit are stacked. [Figure 10] FIG. 1 is a schematic diagram showing an example of a layout arrangement of processing circuits in a semiconductor chip. [Figure 11] FIG. 1 is a schematic diagram showing an example of a layout arrangement of processing circuits in a semiconductor chip. [Figure 12] FIG. 1 is a schematic diagram showing an example of a layout arrangement of processing circuits in a semiconductor chip. [Figure 13] FIG. 1 is a schematic diagram showing an example of a layout arrangement of processing circuits in a semiconductor chip. [Figure 14] FIG. 1 is a schematic diagram showing an example of a layout arrangement of processing circuits in a semiconductor chip. [Figure 15] FIG. 1 is a schematic diagram showing an example of a layout arrangement of processing circuits in a semiconductor chip. [Figure 16] FIG. 1 is a conceptual diagram showing an example of a solid-state imaging device in which a semiconductor chip for a pixel unit, a semiconductor chip for an ADC and an inertial measurement unit, and semiconductor chips for other processing circuits are stacked. [Figure 17] 1 is a block diagram showing a schematic configuration example of a vehicle control system that is an example of a mobile object control system to which the technology according to the present disclosure can be applied. [Figure 18] FIG. 4 is a diagram showing an example of an installation position of an imaging unit. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0024] Hereinafter, specific embodiments to which the present technology is applied will be described in detail with reference to the drawings. The drawings are schematic or conceptual, and the ratios of each part are not necessarily the same as those in reality. In the specification and drawings, elements similar to those described above with respect to the previously mentioned drawings are given the same reference numerals, and detailed descriptions are omitted as appropriate.
[0025] (First embodiment) 1A is a block diagram showing an example of the configuration of a solid-state imaging device 1 according to a first embodiment. The solid-state imaging device 1 is disposed in a moving object such as a drone, a base terminal, an automobile, an airplane, an XR (VR (Virtual Reality), AR (Augmented Reality), MR (Mixed Reality)) controller, or an XR goggle. The solid-state imaging device 1 captures an image of the surroundings of such a moving object and detects the speed, acceleration, and rotation information of the moving object.
[0026] The solid-state imaging device 1 includes an imaging section 10, an ADC (Analogue-to-Digital Converter) 20, a signal processing section 30, a memory 40, an output control section 50, a motion detection section 60, a controller 70, and an inertial measurement section (IMU (Inertial Measurement Unit)) 80.
[0027] The imaging unit 10 includes a plurality of pixels including photoelectric conversion elements that photoelectrically convert incident light into an amount of charge corresponding to the amount of light. The imaging unit 10 is, for example, a CMOS (Complementary Metal Oxide Semiconductor) image sensor. The plurality of pixels are arranged two-dimensionally in a matrix. Although not shown, the pixel unit 101 has pixel drive lines wired for each pixel row and vertical signal lines wired for each pixel column for the matrix-like pixel array. The pixel drive lines are selected (scanned) in order for each pixel row when reading out pixel signals. Each time a pixel row is selected, the vertical signal line transfers pixel signals from the plurality of pixels included in the selected pixel row.
[0028] The pixel signals from the vertical signal lines are transferred to the ADC 20 and AD-converted from analog signals to digital signals. The AD conversion is performed by, for example, performing a correlated double sampling (CDS) process using a comparator, a counter, or the like. One or more ADCs 20 are provided corresponding to each vertical signal line, and perform AD conversion on each pixel signal. The AD-converted pixel signals are transferred to the signal processing unit 30.
[0029] The signal processing unit 30 processes the AD converted pixel signal to generate image data. For example, the signal processing unit 30 performs digital signal processing such as correction of vertical line defects and point defects, signal clamping, parallel-serial conversion, compression, encoding, addition, averaging, and intermittent operation. The signal processing unit 30 stores the generated image data in the memory 40 and transfers it to the output control unit 50. The imaging unit 10 captures an image of an object at a predetermined time interval, and the signal processing unit 30 generates image data for each image capture. The image data corresponding to each image capture is also referred to as a frame below. That is, one frame is generated each time an image is captured by the imaging unit 10. The multiple frames acquired at a predetermined time interval are stored in the memory 40 and transferred to the output control unit 50. The signal processing unit 30 may generate one frame for each multiple image capture. Alternatively, the signal processing unit 30 may generate a number of frames greater than the number of images captured by performing interpolation between multiple frames.
[0030] The memory 40 stores frames (image data) from the signal processing unit 30. Furthermore, the memory 40 may store pixel signals that have been AD converted by the ADC 20 as they are.
[0031] The output control section 50 outputs the frame from the signal processing section 30 or the memory 40 to the outside of the solid-state imaging device 1. At this time, the output control section 50 may convert the signal level before outputting it.
[0032] The motion detection unit 60 calculates the speed of the object using multiple frames obtained from multiple images captured by the imaging unit 10. For example, the motion detection unit 60 calculates the motion vector (optical flow) of the object using multiple frames, and calculates the speed of the object by dividing the motion vector by the time interval between frames (for example, the time interval between images). The specific calculation of the speed of the object will be described later.
[0033] The motion vector and the velocity of the object calculated by the motion detection unit 60 are stored in the memory 40 and transferred to the controller 70. In addition, the motion vector and the velocity of the object may be output to the outside via the output control unit 50.
[0034] The controller 70 controls the internal configuration of the solid-state imaging device 1, such as the imaging unit 10, the output control unit 50, and the inertial measurement unit 80. For example, the controller 70 controls the measurable range of the inertial measurement unit 80 based on the speed of the object. The controller 70 controls the imaging timing of the imaging unit 10, and controls the signal level and output timing of the data output from the output control unit 50.
[0035] The inertial measurement unit (IMU) 80 may be, for example, a MEMS (Micro Electro Mechanical Systems) sensor that detects the acceleration or angular velocity of the solid-state imaging device 1. For example, FIG. 1B is a circuit diagram showing an example of the configuration of a MEMS sensor as the inertial measurement unit 80. The MEMS sensor has fixed electrodes E1 and E3 fixed on a semiconductor substrate and capacitor elements C1 and C2 including a movable electrode E2 that is elastically movable with respect to the semiconductor substrate. The MEMS sensor detects the acceleration and angular velocity based on the change in capacitance of the capacitor elements C1 and C2 due to the acceleration and angular velocity. When the velocity or attitude of the solid-state imaging device 1 changes, the movable electrode E2 moves relative to the fixed electrodes E1 and E3, and the capacitance of the capacitor elements C1 and C2 changes. The inertial measurement unit 80 detects the change in capacitance of the capacitor elements C1 and C2, thereby measuring the acceleration and angular velocity of the solid-state imaging device 1.
[0036] Thereafter, the change in the capacitance of the capacitor elements C1 and C2 is AD-converted into a digital value in the ADC 84 via a low-pass filter 83. The controller 70 controls the gain in the AD conversion of the ADC 84. By changing the gain of the AD conversion, the measurable range of the acceleration of the inertial measurement unit 80 can be changed. This digital value is output to the outside of the inertial measurement unit 80 via an interface 85.
[0037] The inertial measurement unit 80 moves together with the moving body and can detect the acceleration of the moving body in 6 DoF (Degrees of Freedom). The 6 DoF acceleration includes the acceleration at the position of the moving body and the angular velocity or angular acceleration of the attitude (rotation direction) of the moving body. Hereinafter, the 6 DoF acceleration is also simply referred to as "acceleration".
[0038] The inertial measurement unit 80 has a measurable range for acceleration. For example, when the output gain of the inertial measurement unit 80 is relatively small, the measurable range is widened and large accelerations can be detected as absolute values, but the sensitivity of the inertial measurement unit 80 is reduced. On the other hand, when the output gain of the inertial measurement unit 80 is relatively large, the sensitivity of the inertial measurement unit 80 is improved, but the measurable range is narrowed and only small accelerations can be detected as absolute values.
[0039] Therefore, in the present disclosure, the inertial measurement unit 80 changes the measurable range of the acceleration of the moving body on which the solid-state imaging device 1 is disposed, according to the speed of the imaged object, under the control of the controller 70. The inertial measurement unit 80 outputs information on the measured acceleration of the moving body to the outside from the output control unit 50. In addition, gain change information indicating that the output gain of the inertial measurement unit 80 has been changed may be output from the controller 70 to the outside via the output control unit 50.
[0040] The inertial measurement unit 80 may be configured with multiple IMUs with different measurement ranges. In this case, each IMU may be a low-cost IMU with a narrow measurement range. By combining multiple IMUs with different measurement ranges, the inertial measurement unit 80 can be configured as an IMU with a wide measurement range by switching the IMU to be used.
[0041] Next, the operation (control method) of the solid-state imaging device 1 will be described.
[0042] Fig. 2 is a flow diagram showing an example of a control method for the solid-state imaging device 1 according to the first embodiment. Fig. 3 is a flow diagram showing a method for calculating the velocity of an object. Fig. 4 and Fig. 5 are graphs showing the velocity of an object. The vertical axis of the graphs in Fig. 4 and Fig. 5 shows the velocity of the object, and the horizontal axis shows time.
[0043] First, the imaging unit 10 starts capturing an image of an object (S10). The imaging unit 10 captures an image of the object at a predetermined time interval and generates a pixel signal.
[0044] Next, the ADC 20 and the signal processor 30 perform AD conversion and signal processing of the pixel signals of the captured object to generate image data (S20). The image data is stored in the memory 40 as frames generated for each capture at a predetermined time interval.
[0045] Next, the motion detection unit 60 calculates the speed (Optical Flow) of the object based on the multiple frames captured by the imaging unit 10 (S30). The motion detection unit 60 calculates the speed of the object based on the moving distance of the feature point of the object between a first frame captured at a certain time point and a second frame captured at the next time point. The feature point of the object is a pixel or image area that can be clearly distinguished from non-objects in terms of color and brightness in image processing and can be recognized as the same part of the object between multiple frames. For example, the feature point may be a part with high contrast such as the outer contour of the object.
[0046] 3, for example, the motion detection unit 60 acquires a first frame as first image data captured at a first time point from the memory 40 (S31). Next, the motion detection unit 60 acquires a second frame as second image data captured at a second time point from the memory 40 (S32). The first and second frames may be two frames captured consecutively in time. Alternatively, the first and second frames may be two frames captured with a certain distance between them in time.
[0047] Next, the motion detection unit 60 calculates the actual movement distance of the object based on the movement distance (number of pixels) of the feature point of the object between the first and second frames (S33). Furthermore, the motion detection unit 60 calculates the speed (Optical Flow) of the object by dividing the movement distance of the object by the interval between the imaging times of the first and second frames.
[0048] Referring again to Fig. 2, the controller 70 then compares the speed of the object with the thresholds THa and THb (S41, S42). For example, as shown at ta in Fig. 4, when the speed of the object increases and exceeds the threshold (first threshold) THa (time ta, YES in S41), the controller 70 transmits a gain control signal to the inertial measurement unit 80 to reduce the output gain of the inertial measurement unit 80. The inertial measurement unit 80 reduces the output gain in accordance with the gain control signal, and expands the measurable range of the acceleration of the moving object (S51).
[0049] When the speed of the object increases, the moving object is likely to move at a relatively large acceleration in order for the imaging unit 10 to capture and image the object. In this case, the inertial measurement unit 80 reduces the output gain and expands the measurable range to measure a wide range of the acceleration of the moving object.
[0050] In this case, if the measurable range is not expanded, the acceleration of the moving object may deviate from the measurable range of the inertial measurement unit 80, and the inertial measurement unit 80 may not be able to accurately measure the acceleration of the moving object.
[0051] In contrast, according to the present disclosure, even if the acceleration of the moving body increases in order to capture the target object, the inertial measurement unit 80 can follow the increase and expand the measurable range in real time. This prevents the acceleration of the moving body from deviating from the measurable range, and allows the inertial measurement unit 80 to accurately measure the acceleration of the moving body.
[0052] 5, when the velocity of the object decreases and falls below the threshold value (second threshold value) THb (time tb, YES in S42), the controller 70 transmits a gain control signal to the inertial measurement unit 80 to increase the output gain of the inertial measurement unit 80. The inertial measurement unit 80 increases the output gain in accordance with the gain control signal, thereby narrowing the measurable range of the acceleration of the moving object (S52).
[0053] When the speed of the object decreases, there is a high possibility that the acceleration or angular velocity of the moving object will become relatively small accordingly in order to image the object with the imaging unit 10. In this case, the inertial measurement unit 80 increases the output gain to narrow the measurable range, thereby measuring the acceleration of the moving object with high sensitivity.
[0054] In this case, if the output gain is not increased to narrow the measurable range, the output gain of the inertial measurement unit 80 may be too small, and the inertial measurement unit 80 may not be able to measure the acceleration of the moving body accurately with high sensitivity.
[0055] In contrast, according to the present disclosure, even if the acceleration of the moving object decreases, the inertial measurement unit 80 can increase the output gain in real time to follow the decrease, thereby enabling the inertial measurement unit 80 to accurately measure the acceleration of the moving object with high sensitivity.
[0056] If the velocity of the object is between the thresholds THa and THb (NO in S41 and S42), the inertial measurement unit 80 does not change the output gain and maintains the measurable range (S60).
[0057] Thereafter, steps S10 to S60 are repeatedly executed until imaging by the imaging section 10 is completed (NO in S70). When imaging by the imaging section 10 is completed (YES in S70), the operation of the solid-state imaging device 1 is completed.
[0058] As described above, the solid-state imaging device 1 according to the present disclosure incorporates, in an imaging section 10 such as a CMOS image sensor, a motion detection section 60 that detects the speed (Optical Flow) of an object, and an inertial measurement section (IMU) 80 that detects the acceleration and attitude of a moving object. This allows the solid-state imaging device 1 to dynamically change the output gain and measurable range of the inertial measurement section 80 in real time during imaging according to the speed (Optical Flow) of the object being imaged. As a result, the solid-state imaging device 1 can accurately measure the acceleration and angular velocity of the moving object with high sensitivity while imaging the object.
[0059] In the present disclosure, the solid-state imaging device 1 changes the setting of the output gain and measurable range of the inertial measurement unit 80 using both the thresholds THa and THb in FIG. 4 and FIG. 5. That is, the output gain and measurable range of the inertial measurement unit 80 can be set in three stages. However, the solid-state imaging device 1 may change the setting of the output gain and measurable range of the inertial measurement unit 80 using either one of the thresholds THa and THb. That is, the output gain and measurable range of the inertial measurement unit 80 may be set in two stages. Furthermore, three or more thresholds may be set so that the output gain and measurable range of the inertial measurement unit 80 can be set in more stages.
[0060] (Modification) Fig. 6 is a flow diagram showing an example of a control method for the solid-state imaging device 1 according to a modification of the first embodiment. Figs. 7 and 8 are graphs showing the speed of an object. The vertical axis of these graphs shows the speed of the object, and the horizontal axis shows time. The configuration of this modification may be the same as that of the first embodiment. Furthermore, the basic operation of this modification is similar to that of the first embodiment, but the method of determining whether to switch the output gain of the inertial measurement unit 80 is different.
[0061] In the operation of the solid-state imaging device 1 according to this modified example, after steps S10 to S30, the controller 70 estimates the velocity of the object in the next frame from the change in the velocity of the object, and determines whether the estimated velocity of the object reaches thresholds (third thresholds) THa, THb (S43, S44).
[0062] For example, when it is estimated that the velocity of the object at the next time point ta will exceed the threshold value THa based on the gradient of the velocity of the object at the current time point ta0 shown in Fig. 7 (YES in S43), the controller 70 transmits a gain control signal to the inertial measurement unit 80 to reduce the output gain of the inertial measurement unit 80. The inertial measurement unit 80 reduces the output gain in accordance with the gain control signal, and expands the measurable range of the acceleration of the moving object (S51).
[0063] This allows the inertial measurement unit 80 to anticipate a sudden increase in acceleration of the moving object in order to capture the target object and expand the measurable range in advance, thereby enabling the inertial measurement unit 80 to more reliably prevent the acceleration of the moving object from departing from the measurable range.
[0064] On the other hand, for example, when it is estimated that the velocity of the object at the next time point tb will be below the threshold value THb based on the gradient of the velocity of the object at the current time point tb0 shown in Fig. 8 (YES in S44), the controller 70 transmits a gain control signal to the inertial measurement unit 80 to increase the output gain of the inertial measurement unit 80. The inertial measurement unit 80 increases the output gain in accordance with the gain control signal, thereby narrowing the measurable range of the acceleration of the moving object (S52).
[0065] This allows the inertial measurement unit 80 to anticipate a sudden drop in the acceleration of the moving object and increase the output gain in advance, thereby enabling the inertial measurement unit 80 to accurately measure the acceleration of the moving object with high sensitivity in advance.
[0066] If the velocity of the object is estimated to be between the thresholds THa and THb in the next frame (NO in S43 and S44), the inertial measurement unit 80 does not change the output gain and maintains the measurable range (S60). The subsequent operations may be similar to those in the first embodiment.
[0067] When it is estimated from the gradient of the velocity of the object calculated in the current frame that the velocity of the object will reach a threshold value in the next frame, the inertial measurement unit 80 according to this modification changes the measurable range in response to a gain control signal from the controller 70. This enables the solid-state imaging device 1 to accurately measure the acceleration and angular velocity of the moving body with high sensitivity while capturing an image of the object. (Chip configuration)
[0068] The solid-state imaging device 1 may be configured as a single semiconductor chip as a whole, or may be configured as multiple semiconductor chips. When the solid-state imaging device 1 is configured as multiple semiconductor chips, the imaging unit 10 and other processing circuits may be formed as separate semiconductor chips 511 and 512, respectively, and the semiconductor chips 511 and 512 may be stacked.
[0069] 9 is a conceptual diagram showing an example of a solid-state imaging device 1 in which a semiconductor chip 511 of the imaging section 10 and a semiconductor chip 512 of a processing circuit are stacked. As shown in FIG. 9, the solid-state imaging device 1 is composed of two stacked semiconductor chips 511 and 512.
[0070] A semiconductor chip 511 serving as a first semiconductor chip includes an imaging unit 10 formed on a semiconductor substrate. A semiconductor chip 512 serving as a second semiconductor chip includes processing circuits (ADC 20, signal processing unit 30, memory 40, output control unit 50, motion detection unit 60, controller 70, and inertial measurement unit 80) formed on another semiconductor substrate.
[0071] Each pixel of the imaging unit 10 of the semiconductor chip 511 and elements of the processing circuit (20 to 80) of the semiconductor chip 512 may be electrically connected using a through electrode such as a TSV (Through Silicon Via) provided in via regions 513 and 514. In addition, both semiconductor chips may be bonded together (Cu-Cu bonding) so that the wiring of the semiconductor chip 511 contacts the wiring of the semiconductor chip 511. Furthermore, although not shown, the imaging unit 10 and part of the processing circuit (20 to 80) may be configured as one semiconductor chip 511, and the other components may be configured as another semiconductor chip 512.
[0072] 10 to 15 are schematic diagrams showing an example of the layout arrangement of processing circuits in a semiconductor chip 512. The semiconductor chip 512 includes an ADC 20, a signal processing unit 30, a memory 40, an output control unit 50, a motion detection unit 60, a controller 70, and an inertial measurement unit 80 as processing circuits.
[0073] Here, the motion detection unit 60 and the signal processing unit 30 consume more current than other configurations. When the inertial measurement unit 80 detects the acceleration of a moving object by capacitance, if the motion detection unit 60 and the signal processing unit 30 are close to the inertial measurement unit 80, the current flowing through the motion detection unit 60 and the signal processing unit 30 affects the capacitance of the inertial measurement unit 80. In this case, the current flowing through the motion detection unit 60 and the signal processing unit 30 becomes noise, and the inertial measurement unit 80 cannot accurately measure the acceleration.
[0074] To address this issue, in the present disclosure, a memory 40 or a controller 70 that consumes relatively little current is disposed between the inertial measurement unit 80 and the signal processing unit 30, and between the inertial measurement unit 80 and the motion detection unit 60. This separates the inertial measurement unit 80 from the signal processing unit 30 and the motion detection unit 60, reducing the parasitic capacitance between the inertial measurement unit 80 and the signal processing unit 30, and between the inertial measurement unit 80 and the motion detection unit 60. As a result, the inertial measurement unit 80 is less susceptible to noise due to the currents of the signal processing unit 30 and the motion detection unit 60, and can accurately measure acceleration.
[0075] 10, the inertial measurement unit 80, the memory 40, the motion detection unit 60, and the signal processing unit 30 are arranged in this order from the left of the semiconductor chip 512. The memory 40 is arranged between the inertial measurement unit 80 and the motion detection unit 60. Furthermore, the memory 40 and the motion detection unit 60 are arranged between the inertial measurement unit 80 and the signal processing unit 30.
[0076] 11, the motion detection unit 60, the memory 40, and the inertial measurement unit 80 are arranged in this order on the left side of the semiconductor chip 512. As a result, the memory 40 is arranged between the inertial measurement unit 80 and the motion detection unit 60. On the right side of the semiconductor chip 512, the signal processing unit 30, the memory 40, and the inertial measurement unit 80 are arranged in this order. As a result, the memory 40 is arranged between the inertial measurement unit 80 and the signal processing unit 30. It should be noted that the memory 40 and the inertial measurement unit 80 are provided separately on both sides of the semiconductor chip 512.
[0077] Furthermore, a portion of the memory 40 and the controller 70 are arranged between the motion detection unit 60 and the signal processing unit 30, between multiple memories 40 on both sides of the semiconductor chip 512, or between multiple inertial measurement units 80 on both sides of the semiconductor chip 512.
[0078] 12, from the left of the semiconductor chip 512, the inertial measurement unit 80, the memory 40, the motion detection unit 60, the signal processing unit 30, the memory 40, and the inertial measurement unit 80 are arranged in this order. The memory 40 and the inertial measurement unit 80 are provided separately on both sides of the semiconductor chip 512. Even in this arrangement, the memory 40 is arranged between the inertial measurement unit 80 and the motion detection unit 60, and between the inertial measurement unit 80 and the signal processing unit 30.
[0079] Fig. 13 shows a layout of a semiconductor chip 512 in which the arrangements of the memory 40 and the controller 70 in Fig. 10 are swapped. Fig. 14 shows a layout of a semiconductor chip 512 in which the arrangements of the memory 40 and the controller 70 in Fig. 11 are swapped. Fig. 15 shows a layout of a semiconductor chip 512 in which the arrangements of the memory 40 and the controller 70 in Fig. 12 are swapped. In this way, the same effect can be obtained even if the arrangements of the memory 40 and the controller 70 in Figs. 10 to 12 are swapped.
[0080] 10 to 12, the ADC 20 is disposed at the lower end of the semiconductor chip 512, but it may be disposed at any position.
[0081] 16 is a conceptual diagram showing an example of a solid-state imaging device 1 in which a semiconductor chip 521 of the imaging unit 10, a semiconductor chip 522 of the ADC 20 and the inertial measurement unit 80, and a semiconductor chip 523 of other processing circuits are stacked. The solid-state imaging device 1 may be composed of three stacked semiconductor chips 521 to 523.
[0082] A semiconductor chip 521 as a first semiconductor chip includes an imaging unit 10 formed on a semiconductor substrate. A semiconductor chip 522 as a second semiconductor chip includes a part of a processing circuit (ADC 20 and an inertial measurement unit 80) formed on another semiconductor substrate. A semiconductor chip 523 as a third semiconductor chip includes another part of a processing circuit (signal processing unit 30, memory 40, output control unit 50, motion detection unit 60, and controller 70) formed on another semiconductor substrate.
[0083] The semiconductor chips 521 to 523 may be electrically connected using through electrodes such as TSVs provided in via regions, as in the solid-state imaging device 1 described with reference to Fig. 9. The semiconductor chips 521 and 522 may be bonded together so that the wirings of the semiconductor chips 521 and 522 are in contact with each other (Cu-Cu bonding). The semiconductor chips 522 and 523 may be bonded together so that the wirings of the semiconductor chips 522 and 523 are in contact with each other (Cu-Cu bonding). The solid-state imaging device 1 may be configured by stacking four or more semiconductor chips.
[0084] In this way, by separating the imaging unit 10 from logic circuits that consume a large amount of current, such as the signal processing unit 30 and the motion detection unit 60, it is possible to prevent noise from being introduced into the pixel signals from the imaging unit 10.
[0085] Furthermore, by placing the inertial measurement unit 80 in close proximity to the imaging unit 10, the coordinate axes of the imaging unit 10 and the coordinate axes of the inertial measurement unit 80 can be approximately aligned, making it easier to correct the positions of the imaging unit 10 and the inertial measurement unit 80.
[0086] The technology according to the present disclosure (the present technology) can be applied to various products. For example, the technology according to the present disclosure may be realized as a device mounted on any type of moving body such as an automobile, an electric vehicle, a hybrid electric vehicle, a motorcycle, a bicycle, a personal mobility device, an airplane, a drone, a ship, a robot, etc.
[0087] FIG. 17 is a block diagram showing a schematic configuration example of a vehicle control system, which is an example of a moving object control system to which the technology according to the present disclosure can be applied.
[0088] The vehicle control system 12000 includes a plurality of electronic control units connected via a communication network 12001. In the example shown in Fig. 17, the vehicle control system 12000 includes a drive system control unit 12010, a body system control unit 12020, an outside-vehicle information detection unit 12030, an inside-vehicle information detection unit 12040, and an integrated control unit 12050. Also, as functional configurations of the integrated control unit 12050, a microcomputer 12051, an audio / video output unit 12052, and an in-vehicle network I / F (interface) 12053 are illustrated.
[0089] The drivetrain control unit 12010 controls the operation of devices related to the drivetrain of the vehicle in accordance with various programs. For example, the drivetrain control unit 12010 functions as a control device for a drive force generating device for generating a drive force of the vehicle, such as an internal combustion engine or a drive motor, a drive force transmission mechanism for transmitting the drive force to the wheels, a steering mechanism for adjusting the steering angle of the vehicle, and a braking device for generating a braking force of the vehicle.
[0090] The body system control unit 12020 controls the operation of various devices mounted on the vehicle body according to various programs. For example, the body system control unit 12020 functions as a control device for a keyless entry system, a smart key system, a power window device, or various lamps such as head lamps, back lamps, brake lamps, turn signals, and fog lamps. In this case, radio waves or signals of various switches transmitted from a portable device that replaces a key may be input to the body system control unit 12020. The body system control unit 12020 receives the input of these radio waves or signals and controls the door lock device, power window device, lamps, and the like of the vehicle.
[0091] The outside-vehicle information detection unit 12030 detects information outside the vehicle equipped with the vehicle control system 12000. For example, an imaging unit 12031 is connected to the outside-vehicle information detection unit 12030. The outside-vehicle information detection unit 12030 causes the imaging unit 12031 to capture an image outside the vehicle and receives the captured image. The outside-vehicle information detection unit 12030 may perform object detection processing or distance detection processing for a person, a car, an obstacle, a sign, or characters on a road surface based on the received image. The solid-state imaging device 1 according to the present disclosure may be provided in the imaging unit 12031.
[0092] The imaging unit 12031 is an optical sensor that receives light and outputs an electrical signal according to the amount of received light. The imaging unit 12031 can output the electrical signal as an image, or as distance measurement information. The light received by the imaging unit 12031 may be visible light, or may be invisible light such as infrared light. The solid-state imaging device 1 according to the present disclosure may be the imaging unit 12031, or may be provided separately from the imaging unit 12031.
[0093] The in-vehicle information detection unit 12040 detects information inside the vehicle. For example, a driver state detection unit 12041 that detects the state of the driver is connected to the in-vehicle information detection unit 12040. The driver state detection unit 12041 includes, for example, a camera that captures an image of the driver, and the in-vehicle information detection unit 12040 may calculate the degree of fatigue or concentration of the driver based on the detection information input from the driver state detection unit 12041, or may determine whether the driver is dozing.
[0094] The microcomputer 12051 can calculate control target values for the driving force generating device, the steering mechanism, or the braking device based on the information inside and outside the vehicle acquired by the outside-of-vehicle information detection unit 12030 or the inside-vehicle information detection unit 12040, and output a control command to the drive system control unit 12010. For example, the microcomputer 12051 can perform cooperative control aimed at realizing the functions of an ADAS (Advanced Driver Assistance System), including vehicle collision avoidance or impact mitigation, following driving based on the inter-vehicle distance, vehicle speed maintenance driving, vehicle collision warning, vehicle lane departure warning, etc.
[0095] In addition, the microcomputer 12051 can perform cooperative control for the purpose of autonomous driving, which allows the vehicle to travel autonomously without relying on the driver's operation, by controlling the driving force generating device, steering mechanism, braking device, etc. based on information about the surroundings of the vehicle acquired by the outside vehicle information detection unit 12030 or the inside vehicle information detection unit 12040.
[0096] Furthermore, the microcomputer 12051 can output a control command to the body system control unit 12020 based on the information outside the vehicle acquired by the outside-vehicle information detection unit 12030. For example, the microcomputer 12051 can control the headlamps according to the position of a preceding vehicle or an oncoming vehicle detected by the outside-vehicle information detection unit 12030, and perform cooperative control for the purpose of preventing glare, such as switching from high beams to low beams.
[0097] The audio / image output unit 12052 transmits at least one output signal of audio and image to an output device capable of visually or audibly notifying information to passengers in the vehicle or the outside of the vehicle. Examples of the output device include an audio speaker 12061, a display unit 12062, and an instrument panel 12063. The display unit 12062 may include at least one of an on-board display and a head-up display, for example.
[0098] FIG. 18 is a diagram showing an example of the installation position of the imaging unit 12031.
[0099] In FIG. 18, a vehicle 12100 has imaging units 12101, 12102, 12103, 12104, and 12105 as an imaging unit 12031.
[0100] The imaging units 12101, 12102, 12103, 12104, and 12105 are provided at positions such as the front nose, side mirrors, rear bumper, back door, and the upper part of the windshield inside the vehicle cabin of the vehicle 12100. The imaging unit 12101 provided at the front nose and the imaging unit 12105 provided at the upper part of the windshield inside the vehicle cabin mainly acquire images of the front of the vehicle 12100. The imaging units 12102 and 12103 provided at the side mirrors mainly acquire images of the sides of the vehicle 12100. The imaging unit 12104 provided at the rear bumper or back door mainly acquires images of the rear of the vehicle 12100. The images of the front acquired by the imaging units 12101 and 12105 are mainly used to detect a preceding vehicle, a pedestrian, an obstacle, a traffic light, a traffic sign, a lane, or the like.
[0101] 18 shows an example of the imaging ranges of the imaging units 12101 to 12104. An imaging range 12111 indicates the imaging range of the imaging unit 12101 provided on the front nose, imaging ranges 12112 and 12113 indicate the imaging ranges of the imaging units 12102 and 12103 provided on the side mirrors, respectively, and an imaging range 12114 indicates the imaging range of the imaging unit 12104 provided on the rear bumper or back door. For example, an overhead image of the vehicle 12100 viewed from above is obtained by superimposing the image data captured by the imaging units 12101 to 12104.
[0102] At least one of the imaging units 12101 to 12104 may have a function of acquiring distance information. For example, at least one of the imaging units 12101 to 12104 may be a stereo camera made up of a plurality of imaging elements, or may be an imaging element having pixels for detecting a phase difference.
[0103] For example, the microcomputer 12051 can extract, as a preceding vehicle, a three-dimensional object that is the closest three-dimensional object on the travel path of the vehicle 12100 and travels at a predetermined speed (for example, 0 km / h or more) in approximately the same direction as the vehicle 12100, by calculating the distance to each three-dimensional object in the imaging ranges 12111 to 12114 and the change over time of this distance (relative speed with respect to the vehicle 12100) based on the distance information obtained from the imaging units 12101 to 12104. Furthermore, the microcomputer 12051 can set a vehicle distance to be secured in advance in front of the preceding vehicle, and perform automatic brake control (including follow-up stop control) and automatic acceleration control (including follow-up start control). In this way, cooperative control can be performed for the purpose of automatic driving that travels autonomously without relying on the driver's operation.
[0104] For example, the microcomputer 12051 classifies and extracts three-dimensional object data on three-dimensional objects into two-wheeled vehicles, ordinary vehicles, large vehicles, pedestrians, utility poles, and other three-dimensional objects based on distance information obtained from the imaging units 12101 to 12104, and can use the data for automatic obstacle avoidance. For example, the microcomputer 12051 distinguishes obstacles around the vehicle 12100 into obstacles that are visible to the driver of the vehicle 12100 and obstacles that are difficult to see. Then, the microcomputer 12051 determines a collision risk indicating the risk of collision with each obstacle, and when the collision risk is equal to or greater than a set value and a collision is possible, the microcomputer 12051 can provide driving assistance for collision avoidance by outputting an alarm to the driver via the audio speaker 12061 or the display unit 12062, or by performing forced deceleration or avoidance steering via the drive system control unit 12010.
[0105] At least one of the imaging units 12101 to 12104 may be an infrared camera that detects infrared rays. For example, the microcomputer 12051 can recognize a pedestrian by determining whether or not a pedestrian is present in the captured images of the imaging units 12101 to 12104. The recognition of such a pedestrian is performed, for example, by a procedure of extracting feature points in the captured images of the imaging units 12101 to 12104 as infrared cameras, and a procedure of performing pattern matching processing on a series of feature points that indicate the contour of an object to determine whether or not the object is a pedestrian. When the microcomputer 12051 determines that a pedestrian is present in the captured images of the imaging units 12101 to 12104 and recognizes the pedestrian, the audio / image output unit 12052 controls the display unit 12062 to superimpose a rectangular contour line for emphasis on the recognized pedestrian. The audio / image output unit 12052 may also control the display unit 12062 to display an icon or the like indicating a pedestrian at a desired position.
[0106] The present technology can be configured as follows. (1) A solid-state imaging device disposed on a moving object, an imaging unit that performs photoelectric conversion on incident light to an amount of charge corresponding to the amount of light to image an object; a motion detection unit that calculates a speed of the object based on a plurality of images captured by the imaging unit; an inertial measurement unit that detects the acceleration or angular velocity of the moving body and changes a measurable range of the acceleration or angular velocity of the moving body depending on the velocity of the target object. (2) The solid-state imaging device according to (1), wherein the inertial measurement unit expands the measurable range when the velocity of the object exceeds a first threshold value. (3) The solid-state imaging device according to (1) or (2), wherein the inertial measurement unit narrows the measurable range when the velocity of the object falls below a second threshold. (4) The imaging unit images the object at a predetermined time interval, The solid-state imaging device according to any one of (1) to (3), wherein the motion detection unit calculates the velocity of the object based on the distance traveled of a feature point of the object between a first image captured at a certain point in time and a second image captured at a next point in time. (5) The solid-state imaging device described in (4), wherein the inertial measurement unit changes the measurable range when it is estimated from a change in the velocity of the object that the velocity of the object will reach a third threshold in a third image captured at the next time point. (6) an AD converter that converts pixel signals from the imaging unit into digital signals; a signal processing unit that processes the digital signal to generate image data; A memory for storing the image data; a controller that controls a measurable range of the inertial measurement unit based on a velocity of the object; The solid-state imaging device according to any one of (1) to (5), wherein the controller or the memory is disposed between the inertial measurement unit and the signal processing unit. (7) an AD converter that converts a pixel signal from the imaging unit into a digital signal; a signal processing unit that processes the digital signal to generate image data; A memory for storing the image data; a controller that controls a measurable range of the inertial measurement unit based on a velocity of the object; The solid-state imaging device according to any one of (1) to (5), wherein the controller or the memory is disposed between the inertial measurement unit and the motion detection unit. (8) A first semiconductor chip including the imaging unit; The solid-state imaging device according to any one of (1) to (7), further comprising a second semiconductor chip including the motion detection unit and the inertial measurement unit stacked on top of the first semiconductor chip. (9) A first semiconductor chip including the imaging unit; A solid-state imaging device as described in (6) or (7), which is configured by stacking a second semiconductor chip including the motion detection unit, the inertial measurement unit, the AD converter, the signal processing unit, the memory, and the controller. (10) A first semiconductor chip including the imaging unit; a second semiconductor chip including the inertial measurement unit; The solid-state imaging device according to any one of (1) to (7), further comprising a third semiconductor chip including the motion detection unit. (11) A first semiconductor chip including the imaging unit; a second semiconductor chip including the inertial measurement unit and the AD converter; The solid-state imaging device according to (6) or (7), further comprising a third semiconductor chip including the motion detector, the signal processor, the memory, and the controller, stacked together. (12) A method for controlling a solid-state imaging device that is disposed on a moving object and includes an imaging unit that performs photoelectric conversion of incident light into an amount of charge corresponding to the amount of light to image an object, a motion detection unit that calculates a speed of the object, and an inertial measurement unit that detects acceleration or angular velocity, the method comprising the steps of: The object is imaged by the imaging unit; The motion detection unit calculates a speed of the object based on a plurality of images captured by the imaging unit; A method for controlling a solid-state imaging device comprising: changing a measurable range of the acceleration or angular velocity of the moving body in accordance with a velocity of the object in the inertial measurement unit. (13) The change in the measurable range is When the speed of the object exceeds a first threshold, the measurable range is expanded; The method according to (12), wherein the inertial measurement unit narrows the measurable range when the velocity of the object falls below a second threshold. (14) The object is imaged at a predetermined time interval; The method according to (12) or (13), wherein the velocity of the object is calculated based on a distance traveled by a feature point of the object between a first image captured at a certain time point and a second image captured at a next time point. (15) The method according to (14), wherein the measurable range is changed if a change in the velocity of the object indicates that the velocity of the object will reach a third threshold in a third image captured at a next time point. (16) A moving object equipped with a solid-state imaging device, The solid-state imaging device an imaging unit that performs photoelectric conversion on incident light to an amount of charge corresponding to the amount of light to image an object; a motion detection unit that calculates a speed of the object based on a plurality of images captured by the imaging unit; a moving body including an inertial measurement unit that detects an acceleration or an angular velocity of the moving body and changes a measurable range of the acceleration or the angular velocity of the moving body in accordance with a velocity of the target object. The present disclosure is not limited to the above-described embodiment, and various modifications are possible without departing from the scope of the present disclosure. Furthermore, the effects described in this specification are merely examples and are not limiting, and other effects may be obtained. [Explanation of symbols]
[0107] 1 Solid-state imaging device, 10 Imaging section, 20 ADC, 30 Signal processing section, 40 Memory, 50 Output control section, 60 Motion detection section, 70 Controller, 80 Inertial measurement section
Claims
1. a solid-state imaging device disposed on a moving body, the moving body moving so that the solid-state imaging device captures an object; an imaging unit that performs photoelectric conversion on incident light to an amount of charge corresponding to the amount of light to image the object; a motion detection unit that calculates a speed of the object based on a plurality of images captured by the imaging unit; an inertial measurement unit that detects the acceleration or angular velocity of the moving body and changes a measurable range of the acceleration or angular velocity of the moving body depending on the velocity of the target object.
2. The solid-state imaging device according to claim 1 , wherein the inertial measurement unit expands the measurable range when the velocity of the object exceeds a first threshold value.
3. The solid-state imaging device according to claim 1 , wherein the inertial measurement unit narrows the measurable range when the velocity of the object falls below a second threshold value.
4. The imaging unit images the object at a predetermined time interval, 2. The solid-state imaging device according to claim 1, wherein the motion detection section calculates a velocity of the object based on a distance traveled by a feature point of the object between a first image captured at a certain point in time and a second image captured at a next point in time.
5. 5. The solid-state imaging device according to claim 4, wherein the inertial measurement unit changes the measurable range when it is estimated from a change in the velocity of the object that the velocity of the object will reach a third threshold in a third image captured at a next time point.
6. an AD converter that converts pixel signals from the imaging unit into digital signals (Analog-to-Digital); a signal processing unit that processes the digital signal to generate image data; A memory for storing the image data; a controller that controls a measurable range of the inertial measurement unit based on a velocity of the object; 2. The solid-state imaging device according to claim 1, wherein the controller or the memory is disposed between the inertial measurement unit and the signal processing unit such that the inertial measurement unit and the signal processing unit are not adjacent to each other.
7. an AD converter that converts a pixel signal from the imaging unit into a digital signal; a signal processing unit that processes the digital signal to generate image data; A memory for storing the image data; a controller that controls a measurable range of the inertial measurement unit based on a velocity of the object; 2. The solid-state imaging device according to claim 1, wherein the controller or the memory is disposed between the inertial measurement unit and the motion detection unit such that the inertial measurement unit and the signal processing unit are not adjacent to each other.
8. A first semiconductor chip including the imaging unit; 2. The solid-state imaging device according to claim 1, further comprising a first semiconductor chip including said motion detection unit and said inertial measurement unit, said first semiconductor chip being stacked on said second semiconductor chip.
9. A first semiconductor chip including the imaging unit; 7. The solid-state imaging device according to claim 6, further comprising a stack of a first semiconductor chip including said motion detection section, said inertial measurement section, said AD converter, said signal processing section, said memory, and said controller.
10. A first semiconductor chip including the imaging unit; a second semiconductor chip including the inertial measurement unit; 2. The solid-state imaging device according to claim 1, further comprising a third semiconductor chip including the motion detection section.
11. A first semiconductor chip including the imaging unit; a second semiconductor chip including the inertial measurement unit and the AD converter; 7. The solid-state imaging device according to claim 6, further comprising a third semiconductor chip including said motion detector, said signal processor, said memory, and said controller, which are stacked together.
12. A method for controlling a solid-state imaging device that is disposed on a moving body and includes an imaging unit that performs photoelectric conversion of incident light into an amount of charge corresponding to an amount of light to image an object, a motion detection unit that calculates a speed of the object, and an inertial measurement unit that detects acceleration or angular velocity, the moving body moving such that the solid-state imaging device captures the object, The object is imaged by the imaging unit; The motion detection unit calculates a speed of the object based on a plurality of images captured by the imaging unit; A control method for a solid-state imaging device comprising: changing a measurable range of the acceleration or angular velocity of the moving body in accordance with a velocity of the object in the inertial measurement unit.
13. The change in the measurable range is When the speed of the object exceeds a first threshold, the measurable range is expanded; The method of claim 12 , further comprising: when a velocity of the object falls below a second threshold, the inertial measurement unit narrows the measurement range.
14. The object is imaged at a predetermined time interval; The method of claim 12 , wherein the velocity of the object is calculated based on a distance traveled by a feature of the object between a first image captured at a certain time and a second image captured at a next time.
15. 15. The method of claim 14, wherein the measurable range is changed if a change in the object's velocity indicates that the object's velocity will reach a third threshold in a third image captured at a subsequent time point.
16. A moving body including a solid-state imaging device, the solid-state imaging device moving so as to capture an object, The solid-state imaging device includes an imaging section that performs photoelectric conversion on incident light to an amount of charge corresponding to the amount of light to image the object; a motion detection unit that calculates a speed of the object based on a plurality of images captured by the imaging unit; a measuring unit that detects an acceleration or an angular velocity of the moving body and changes a measurable range of the acceleration or the angular velocity of the moving body in accordance with a velocity of the target object.
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