Welding method, liquid ejection head manufacturing method, liquid ejection head, and liquid ejection head manufacturing apparatus

Abstract

To provide a method capable of removing fragments in a space in a short period of time in a welding method of a member using frictional heat.SOLUTION: A welding method for welding a first member 42 and a second member 41 includes a preparation step for preparing the first member 42 and the second member 41, a contact step for bringing the first member 42 into contact with the second member 41 so as to form a space between the first member 42 and the second member 41, a welding horn contact step for bringing a welding horn 50 into contact with the first member 42 or the second member 41, a vibration step for vibrating the welding horn 50 so as to weld the first member 42 and the second member 41 by frictional heat, and a fluid flowing step for causing a fluid to flow into the space. The fluid flowing step is performed in the middle of the vibration step.SELECTED DRAWING: Figure 9

Description

[Technical field]

[0001] The present invention relates to a welding method, a manufacturing method for a liquid ejection head, a liquid ejection head, and a manufacturing apparatus for a liquid ejection head. [Background technology]

[0002] Methods for joining components together to manufacture structures include laser welding, ultrasonic welding, etc. Laser welding takes a relatively long time to weld, so it may be difficult to adopt this method for mass-produced products.

[0003] Patent Document 1 discloses a joining method related to ultrasonic welding. Methods such as ultrasonic welding, which use frictional heat to weld components, are suitable as a means of joining components at low cost and in a short time. However, with ultrasonic welding, vibrations during welding cause the components to rub against each other, causing parts of the components to peel off, and if there is a space within the structure, the peeled off components may remain in the space as multiple tiny fragments (dust). If tiny fragments remain in the space, the performance of the structure may be reduced. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 7-52255 Summary of the Invention [Problem to be solved by the invention]

[0005] Therefore, in order to remove the minute fragments, a method of washing the space by flowing a fluid such as water through the space after welding is completed can be considered, but the fragments generated by friction are charged with static electricity and may adhere to the inner wall surface of the space. If the fragments adhere to the inner wall surface, they are difficult to remove by washing after welding is completed, and washing may take a long time.

[0006] In view of the above problems, an object of the present invention is to provide a method for welding members using frictional heat, which is capable of removing debris within a space in a short period of time. [Means for solving the problem]

[0007] In order to solve the above problems The first invention is, A method for welding a first member and a second member, comprising: A first through hole penetrating the first member is formed. The first member; A second through hole penetrating the second member is formed. a preparation step of preparing the second member and a step of forming a first member and a second member between the first member and the second member; , communicating with the first through hole and the second through hole So that space can be formed, The above The first member and The above the welding horn contacting step of contacting the first member or the second member with a welding horn, a vibration step of vibrating the welding horn in order to weld the first member and the second member by frictional heat, and a fluid flow step of flowing a fluid in the space, the welded horn contact step is a step of contacting the welded horn, which has a recess formed in a portion located at the first through hole, with the first member, and forming a gap between the contact area between the first member and the welded horn, which communicates with the recess and extends to an outer edge of the contact area between the first member and the welded horn; The fluid flow process is performed during the vibration process. A step of allowing a fluid to flow through the second through hole. It is characterized by: A second invention for solving the above problem is a manufacturing method of a liquid ejection head which ejects liquid from an ejection port, the method comprising the steps of: preparing a flow path forming member having a recess formed therein to serve as a flow path for supplying liquid to the ejection port, the flow path forming member having a first through hole penetrating the flow path forming member; and preparing a fitting member having a fitting portion which fits with the recess, the fitting member having a second through hole penetrating the fitting member; a contacting step of bringing the flow path forming member into contact with the fitting member so that the recess and the fitting portion are fitted together to form the flow path communicating with the first through hole and the second through hole; and a contacting step of contacting the flow path forming member with the fitting member so that the flow path forming member is formed with the first through hole and the second through hole. the welded horn contact step is a step of contacting the welded horn with the flow path forming member, a vibration step of vibrating the welded horn in order to weld the flow path forming member and the fitting member by frictional heat, and a fluid flow step of flowing a fluid through the flow path, wherein the welded horn contact step is a step of contacting the welded horn, which has a recess formed in a portion located at the first through hole, with the flow path forming member, and forming a gap between the contact area between the flow path forming member and the welded horn, which communicates with the recess and extends to the outer edge of the contact area between the flow path forming member and the welded horn, and the fluid flow step is a step of flowing a fluid through the second through hole during the vibration step. Furthermore, a third invention for solving the above problem provides a liquid ejection head having an element substrate having an ejection port for ejecting liquid and an energy generating element for generating energy for ejecting liquid from the ejection port, a flow path member having a flow path for supplying liquid to the element substrate, and a housing connected to a liquid container for containing liquid and for supplying liquid from the liquid container to the flow path member, wherein an opening of the flow path is formed on a surface of the flow path member facing the element substrate, and a groove portion is formed in the flow path member extending from the vicinity of the opening to an outer edge of the flow path member. Furthermore, a fourth invention for solving the above problem is a manufacturing apparatus for a liquid ejection head that ejects liquid from an ejection port, the manufacturing apparatus comprising: a flow path forming member having a recess formed as a flow path supplying liquid to the ejection port, the flow path forming member having a first through hole formed therein, and a fitting member having a fitting portion that fits with the recess, the fitting member having a second through hole formed therein, to form the flow path communicating with the first through hole and the second through hole by fitting the flow path forming member and the fitting member together; a welding horn used for contacting the flow path forming member and welding the flow path forming member and the fitting member by frictional heat, and a fluid flow generating mechanism for generating a fluid flow from the second through hole through the flow path to the first through hole while the flow path forming member and the fitting member are being welded by the welding horn, the welding horn having a recess at a portion located at the first through hole, and a groove portion extending from the recess to an outer edge of the welding horn. Effect of the Invention

[0008] According to the present invention, in a method for welding members using frictional heat, debris within a space can be removed in a short period of time. [Brief description of the drawings]

[0009] [Figure 1] FIG. 2 is a perspective view showing a liquid ejection head. [Diagram 2] 5A and 5B are schematic diagrams showing the welded surfaces of the housing and the flow path forming member. [Diagram 3] AA cross section shown in FIG. 2. [Figure 4] FIG. 4 is a top view showing the surface of the flow passage forming member opposite to the welding surface. [Diagram 5] FIG. [Figure 6] FIG. 4 is a schematic diagram showing a region where the welding horn and the flow passage forming member contact each other. [Figure 7] FIG. 4 is a perspective view showing the side of the housing to which a liquid container is connected. [Figure 8] FIG. 4 is a perspective view showing a state in which the housing and the flow path forming member are fitted together. [Figure 9] FIG. 1 is a schematic diagram showing air flow during ultrasonic welding. [Figure 10] 4 is a flowchart showing each step of a manufacturing method of a liquid ejection head. [Figure 11] FIG. 13 is a schematic diagram showing a modified example of the welded horn. [Figure 12] FIG. 1 is a perspective view showing a vibration process according to a conventional ultrasonic welding method. [Figure 13] FIG. 11 is a top view showing a flow passage forming member according to a second embodiment. [Figure 14] FIG. 11 is a top view showing a housing according to the second embodiment. [Figure 15] FIG. 11 is a schematic diagram showing an air flow during ultrasonic welding in the second embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, each embodiment of the present invention will be described in detail, taking a liquid ejection head that ejects liquid as an example of a structure having an internal space.

[0011] (First embodiment) (Liquid ejection head) FIG. 1(a) is a perspective view showing a liquid ejection head 100 of this embodiment, and FIG. 1(b) is an exploded perspective view showing each member of the liquid ejection head 100 shown in FIG. 1(a) in an exploded manner. As shown in FIG. 1(b), the liquid ejection head 100 of this embodiment is mainly composed of a recording element unit 15 and a housing unit 16. The recording element unit 15 is mainly composed of memory element substrates 11 and 12 having ejection ports for ejecting liquid, an electric wiring board 14 for supplying power to the recording element substrates 11 and 12, and a support plate for supporting the recording element substrates 11 and 12. The housing unit 16 is mainly composed of a housing 41 (second member) to which a liquid container (not shown) for containing liquid to be supplied to the ejection ports is connected, and a flow path forming member 42 (first member) in which a second recess 20 (FIG. 3) is formed to become a flow path 23 (FIG. 3) for supplying liquid from the liquid container to the ejection ports.

[0012] FIG. 2 is a schematic diagram showing the respective welded surfaces of the housing 41 and the flow path forming member 42. FIG. 2(a) is a top view showing the welded surface of the flow path forming member 42 to the housing 41 (the surface facing the housing 41), and FIG. 2(b) is a top view showing the welded surface of the housing 41 to the flow path forming member 42 (the surface facing the flow path forming member 41). FIG. 3 is a cross-sectional view taken along line AA shown in FIG. 2, where FIG. 3(a) is a cross-sectional view showing the state before the housing 41 and the flow path forming member 42 are welded, and FIG. 3(b) is a cross-sectional view showing the state after the housing 41 and the flow path forming member 42 are welded. As shown in FIG. 3(b), the second recess 20 of the flow path forming member 42 and the housing ( Fitting Parts) 41 Fitting Part 18 and Fitting As a result, a flow path 23 is formed.

[0013] The housing 41 is provided with a first recess 22 and a second through hole 24 that communicates from the welded surface to the surface opposite the welded surface. The second through hole 24 is a hole through which the liquid from the liquid container flows into the flow path 20 of the flow path forming member 42. Meanwhile, the flow path forming member 42 is provided with a second recess 20 that becomes the flow path 23, a protrusion (welded rib) 21, and a first through hole 25 that communicates from the welded surface to the surface opposite the welded surface. The first through hole 25 is a hole that is connected to the recording element unit 15, and the liquid that has flowed from the second through hole 24 through the flow path 23 is supplied to the recording element unit 15 through the first through hole 25.

[0014] With the protrusion 21 and the first recess 22 in contact with each other, ultrasonic welding, which will be described in detail later, is performed, whereby a part of the protrusion 21 melts and is joined to the flow path forming member 42, and the housing 41 and the flow path forming member 42 are joined. This also seals the periphery of the second recess 20, and forms a flow path 23 through which the liquid flows. The number of flow paths 23 corresponds to the number of ink colors of the liquid ejection head 100. Furthermore, by forming the flow paths 23, the second through hole 24 of the housing 41 and the first through hole 25 of the flow path forming member 42 communicate with each other, and the liquid supplied from the liquid container can flow to the recording element unit 15.

[0015] 4 is a top view showing the surface (surface on the recording element unit 15 side) of the flow path forming member 42 opposite to the welded surface shown in FIG. 2(a). As shown in FIG. 4, the flow path forming member 42 in this embodiment has a groove portion 26 formed therein, which extends from the vicinity of the first through hole 25 to the outer edge 17 of the flow path forming member 42. The groove portion 26 functions as an air passage in the air flow performed during ultrasonic welding, which will be described later. Here, the vicinity of the first through hole 25 refers to a range within a position overlapping with a third recess 51 (FIG. 5) of a welding horn 50, which will be described later, when the welding horn 50 is brought into contact with the flow path forming member 42, and refers to a range within 30 mm from the first through hole 25.

[0016] FIG. 5 is a perspective view showing a welding horn 50 used when ultrasonically welding the housing 41 and the flow path forming member 42. FIG. 6 is a schematic diagram showing the area where the welding horn 50 and the flow path forming member 42 come into contact when the welding horn 50 is brought into contact with the flow path forming member 42. In FIG. 6, the area where the welding horn 50 and the flow path forming member 42 come into contact is shown by the area with dots. A third recess 51 is formed in the part of the welding horn 50 that comes into contact with the flow path forming member 42. The first through hole 25 of the flow path forming member 42 is convex from the surrounding surface. Therefore, in order to prevent the first through hole 25 and the welding horn from coming into direct contact, the third recess 51 is formed in the welding horn. As a result, as shown in FIG. 6, the welding horn 50 comes into contact with the flow path forming member 42 in a portion other than the vicinity of the first through hole 25 and the vicinity of the outer edge of the flow path forming member 42. The reason for avoiding contact between the first through hole 25 and the welding horn is to ensure a passage for air flow, which will be described later. As shown in Fig. 6, when viewed from above, there is a portion where the third recess 51 of the welding horn and the groove 26 of the flow path forming member 42 overlap, so that a passage for air is ensured during ultrasonic welding. That is, the air that has passed through the first through hole 25 is discharged to the outside via the third recess 51 and the groove 26.

[0017] The groove 26 of the flow path forming member 42 may be provided at any location as long as the inside of the flow path 23 is connected to the outer edge 17 (end) of the flow path forming member 42 through the first through hole 25 when the welded horn 50 is brought into contact with the flow path forming member 42. This allows the air flowing through the flow path 23 to be discharged to the outside in the air flow process described later. However, it is preferable not to form the groove 26 at a location directly above the welded rib 21. This is because it is preferable to contact the welded horn 50 at a position directly above the welded rib 21 in order to transmit the vibration energy of the welded horn 50 to the convex portion (welded rib) 21 with as little loss as possible. It is preferable that the dimensions of the groove 26 are sufficiently larger than the width and depth of the flow path 23 so as not to hinder the flow rate setting of the air flow in terms of pressure loss.

[0018] (Method of manufacturing liquid ejection head) Next, a manufacturing method of the liquid ejection head 100 of this embodiment will be described with reference to Figures 7 to 11. The manufacturing method of the liquid ejection head 100 of this embodiment is characterized by supplying an air flow into the flow path 23 during ultrasonic welding between the housing 41 and the flow path forming member 42. In the following description of the manufacturing method, only the characteristic parts of this embodiment will be described in detail, and descriptions of other steps will be omitted.

[0019] FIG. 7 is a perspective view showing the side of the housing 41 to which the liquid container is connected. FIG. 8(a) shows the housing 41 and the flow path forming member 42 at an appropriate position. Fitting 5. Fig. 8(b) is a perspective view showing a state in which the welding horn 50 has been brought into contact with the flow path forming member 42 from the state shown in Fig. 8(a). Fig. 9 is a schematic diagram showing the air flow during ultrasonic welding, and is a schematic diagram of the BB cross section shown in Fig. 4. Fig. 10 is a flowchart showing each step of a manufacturing method for the liquid ejection head 100 of this embodiment. Fig. 11 is a modified example of the welding horn 50 shown in Fig. 5.

[0020] First, the housing 41 and the flow path forming member 42 are prepared (preparation step, S1 in FIG. 10). Next, as shown in FIG. 8(a), the first recess 22 of the housing 41 and the protrusion (welding rib) 21 of the flow path forming member 42 are welded together. FittingThe housing 41 and the flow path forming member 42 are brought into contact at an appropriate position so that the flow path 20 is formed by the welding (contact step, S2 in FIG. 10). Next, the welding horn 50 is brought into contact with the flow path forming member 42 (welding horn contact step, S3 in FIG. 10). At this time, the welding horn 50 is brought into contact with the flow path forming member 42 so that the third recess 51 of the welding horn 50 corresponds to the first through hole 25 of the flow path forming member 42. Next, as shown in FIG. 8(b), while feeding air into the flow path 23 (air flow step, S4 in FIG. 10), the welding horn 50 is ultrasonically vibrated (vibration step, S5 in FIG. 10) to weld the housing 41 and the flow path forming member 42 by frictional heat. That is, during the vibration step (during welding), air is fed into the flow path 23 from the second through hole 24 that opens on the side of the housing 41 to which the liquid container is connected, as shown in FIG. 7. The vibration of the welding horn 50 melts the protrusions (welding ribs) 21 of the flow path forming member 42, and the housing 41 and the flow path forming member 42 are joined together as shown in Fig. 3. The airflow process may also be referred to as a fluid flow process.

[0021] The air supplied into the flow path 23 from the second through hole 24 passes through the first through hole 25 of the flow path forming member 42, and then, as shown in Fig. 9, is discharged to the outside through the gap between the flow path forming member 42 and the welded horn 50. The gap between the flow path forming member 42 and the welded horn 50 is formed by the groove portion 26 of the flow path forming member 42 described above.

[0022] When the vibration process is performed to melt the protrusions (welding ribs) 21, a part of the protrusions (welding ribs) 21 may peel off and become fine fragments, which may remain in the space within the flow path 23. Therefore, an airflow process is performed during the vibration process to remove the fine fragments from within the flow path 23 before they adhere to the inner wall surface of the flow path 23. The fine fragments generated within the flow path 23 are carried by the airflow and pass through the first through hole 25, the third recess 51 of the welding horn 50, and the groove portion 26 of the flow path forming member 42 in this order, and are discharged to the outside. During ultrasonic welding, the fragments are scattered within the flow path 23, and the fragments can be discharged by the airflow more efficiently than in the state where the fragments are attached to the inner wall surface after welding is completed. In addition, since welding burrs may occur at the joint after welding is completed and the flow of air may be obstructed, the fragments can be discharged more efficiently than by cleaning for fragment removal after welding is completed. Therefore, according to this embodiment, the fragments generated within the flow path can be removed in a short time.

[0023] The inventors have also observed that ultrasonic vibration generates fragments of the components, particularly in the early stages of welding before the convex portion (welding rib) 21 starts to melt. Therefore, it is preferable to start the air flow before the start of ultrasonic welding. Also, from the viewpoint of stabilizing the air flow rate, it is preferable to start the supply of air flow before the start of ultrasonic welding.

[0024] The power to remove debris depends on the flow rate of the airflow. According to experiments by the present inventors, it was found that a sufficient effect can be obtained by flowing 5 L / min or more through one flow path 23. When there are multiple flow paths 23 according to the number of ink colors, air is flowed through each flow path 23 at the same flow rate. For this reason, it is preferable to prepare a path that allows independent control of air pressure for each flow path 23. This is to enable an appropriate flow rate to be set for each flow path even if the degree of pressure loss differs depending on the flow path, such as when the length of the flow path 23 differs for each ink color.

[0025] In the above explanation, the groove 26 that serves as a passage for air is formed in the flow path forming member 42, but this is not limited to this embodiment. That is, as shown in Fig. 11, the groove 26 may be provided in the welded horn 50. This is preferably used when it is difficult to provide a groove 26 of sufficient dimensions on the flow path forming member 42. Alternatively, the groove 26 may be formed in both the flow path forming member 42 and the welded horn 50. Similar effects can be obtained.

[0026] In addition, if the airflow during welding is ionized air, static electricity of the fragments can be removed, and the fragments can be discharged to the outside more efficiently. In the present embodiment, compressed air is fed in as the airflow process, but if a desired flow rate can be ensured, the airflow process may be performed by suctioning air through reduced pressure. If the airflow is warm air and the protruding portion (welding rib) 21 is preheated, the time until the welding rib 21 melts by ultrasonic welding can be shortened, and the amount of generated fragments can be reduced. In addition, the embodiment has been described as an example in which air is fed into the flow path as the airflow process, but this embodiment is not limited to this. That is, any form may be used as long as liquid such as water is fed into the flow path. Therefore, the airflow process may be performed as long as a fluid can be fed into the flow path. However, if water at room temperature or the like is used in the airflow process, the housing 41 and the flow path forming member 42 will be cooled, which may make it difficult to perform ultrasonic welding appropriately, so it is preferable to use a gas such as air for the airflow process. In the above description, the welding horn 50 is brought into contact with the flow path forming member 42, but this embodiment is not limited to this. That is, if the housing 41 is appropriately configured, the welding horn 50 may be brought into contact with the housing 41 to perform ultrasonic welding.

[0027] In addition, in this embodiment, ultrasonic welding is used to join the housing 41 and the flow path forming member 42, but other welding methods using frictional heat also produce fragments of the members. Therefore, the present invention can be suitably used in welding using, for example, vibration welding.

[0028] Fig. 12 is a perspective view showing the vibration process by conventional ultrasonic welding. As shown in Fig. 12(a), the conventional flow path forming member 43 does not have a groove 26, and as shown in Fig. 12(b), the welding horn 50 blocks the air outlet, so that the air flow cannot remove debris during welding.

[0029] Second Embodiment The second embodiment will be described with reference to Figs. 13 to 15. The same reference numerals are used for the same parts as in the first embodiment, and the description will be omitted. The feature of this embodiment is that it is configured to easily collect the fragments removed by the air flow. Fig. 13 is a top view showing a flow path forming member 42 of this embodiment. Fig. 14 is a top view showing a housing 41 of this embodiment. Fig. 15 is a schematic diagram showing the air flow during ultrasonic welding in this embodiment, and is a cross-sectional view of the CC cross section shown in Fig. 13 during the vibration process.

[0030] As shown in FIG. 13, in this embodiment, the groove 26 formed in the flow path forming member 42 is not formed to the outer edge 17 of the flow path forming member 42, and instead, a third through hole 28 is formed in the groove 26. This third through hole 28 is a hole penetrating the flow path forming member 42 as shown in FIG. 15. Meanwhile, a fourth through hole 29 is formed in the housing 41 as shown in FIG. 14. This fourth through hole 29 is also a hole penetrating the housing 41, similar to the third through hole 28. Also, as shown in FIG. 15, the third through hole 28 of the flow path forming member 42 and the fourth through hole 29 of the housing 45 are formed so as to be in a position where they overlap each other when the housing 41 and the flow path forming member 42 are welded. That is, the third through hole and the fourth through hole are communicated with each other.

[0031] In this embodiment, the air from the air flow process can be returned to the housing 41 side through the third through hole 28 and the fourth through hole 29 after passing through the flow path 23, the first through hole 25, and the groove portion 26. This makes it possible to collect fragments generated by ultrasonic welding on the housing 41 side without discharging them to the outside, and makes it possible to prevent the fragments from scattering inside the welding device. [Explanation of symbols]

[0032] 23 Space 41 Second Component 42 First Component 50 Welded Horn

Claims

1. A method for welding a first member and a second member, comprising: a preparation step of preparing a first member having a first through hole penetrating the first member and a second member having a second through hole penetrating the second member; a contacting step of contacting the first member with the second member such that a space communicating with the first through hole and the second through hole is formed between the first member and the second member; a welding horn contacting step of contacting the first member or the second member with a welding horn; a vibration step of vibrating the welding horn to weld the first member and the second member by frictional heat; a fluid flow step of flowing a fluid in the space; having the welded horn contact step is a step of bringing the welded horn, which has a recess formed in a portion located at the first through hole, into contact with the first member, and forming a gap between the contact area between the first member and the welded horn, which communicates with the recess, and which extends to an outer edge of the contact area between the first member and the welded horn; The welding method, characterized in that the fluid flowing step is a step of causing a fluid to flow in through the second through hole during the vibration step.

2. The method of claim 1 , wherein the fluid flow step is initiated before the vibration step is initiated.

3. 2. The method according to claim 1, wherein the fluid in the fluid flow process is air, and the air flowing in from the second through hole passes through the space to reach the first through hole, and is discharged to the outside through the gap formed between the first member and the welding horn. Welding method.

4. The welding method described in claim 1, wherein the gap formed between the contact area between the first member and the welded horn is formed on the side of the first member where the welded horn comes into contact, extends from the vicinity of the first through hole to the outer edge of the first member, and is constituted by a groove portion that communicates with the recess of the welded horn when the first member and the welded horn are in contact.

5. A welding method as described in claim 1, wherein the gap formed between the contact area between the first member and the welded horn is formed on the side of the welded horn that contacts the first member, and is constituted by a groove portion extending from the recess of the welded horn to the outer edge of the welded horn.

6. A method for manufacturing a liquid ejection head that ejects liquid from an ejection port, comprising the steps of: a preparation step of preparing a flow path forming member having a recess formed therein to serve as a flow path for supplying liquid to the ejection port, the flow path forming member having a first through hole formed therein, and a fitting member having a fitting portion that fits into the recess, the fitting member having a second through hole formed therein; a contacting step of contacting the flow passage forming member with the fitting member so that the flow passage communicating with the first through hole and the second through hole is formed by fitting the recess with the fitting portion; a welding horn contacting step of contacting the flow passage forming member or the fitting member with a welding horn; a vibration step of vibrating the welding horn to weld the flow passage forming member and the fitting member by frictional heat; a fluid flowing step of flowing a fluid through the flow path; having the welded horn contact step is a step of bringing the welded horn, which has a recess formed in a portion located at the first through hole, into contact with the flow path forming member, and forming a gap between a contact area between the flow path forming member and the welded horn, which communicates with the recess, and which extends to an outer edge of the contact area between the flow path forming member and the welded horn; The method for manufacturing a liquid ejection head, wherein the fluid flowing step is a step of causing a fluid to flow in through the second through hole during the vibration step.

7. The method for manufacturing a liquid ejection head according to claim 6 , wherein the fluid flow step is started before the vibration step is started.

8. A method for manufacturing a liquid ejection head as described in Claim 6, characterized in that the fluid in the fluid flow process is air, and the air flowing in from the second through hole reaches the first through hole via the flow path, and is discharged to the outside through the gap formed between the flow path forming member and the welded horn.

9. A method for manufacturing a liquid ejection head as described in claim 6, wherein the gap formed between the contact area between the flow path forming member and the welded horn is formed on the side of the flow path forming member that comes into contact with the welded horn, extends from the vicinity of the first through hole to the outer edge of the flow path forming member, and is constituted by a groove portion that communicates with the recess of the welded horn when the flow path forming member and the welded horn are in contact.

10. a third through hole penetrating the flow path forming member is formed in the groove portion of the flow path forming member, A fourth through hole penetrating the fitting member is formed in the fitting member, The method for manufacturing a liquid ejection head according to claim 9 , wherein the third through hole and the fourth through hole communicate with each other.

11. The method for manufacturing a liquid ejection head according to claim 9 , wherein the grooves of the flow passage forming member are not formed directly above a welding rib formed on the flow passage forming member.

12. A method for manufacturing a liquid ejection head as described in claim 9, wherein the gap formed between the contact area between the flow path forming member and the welded horn is formed on the side of the welded horn that contacts the flow path forming member, and is constituted by a groove portion extending from the recess of the welded horn to the outer edge of the welded horn.

13. The method for manufacturing a liquid ejection head according to claim 6, wherein the fluid in the fluid flowing step is air.

14. The method for manufacturing a liquid ejection head according to claim 13, wherein the air in the fluid flowing step is ionized.

15. The method for manufacturing a liquid ejection head according to claim 6 , wherein the fluid flow step is performed by suctioning the inside of the flow path.

16. The method for manufacturing a liquid ejection head according to claim 6 , wherein the vibration step uses ultrasonic vibration.

17. The liquid ejection head according to claim 6 , wherein the fitting member is a housing to which a liquid container that contains liquid is connected.

18. an element substrate having an ejection port for ejecting liquid and an energy generating element for generating energy for ejecting the liquid from the ejection port; a flow path member in which a flow path for supplying a liquid to the element substrate is formed; a housing connected to a liquid container that contains a liquid and that supplies liquid from the liquid container to the flow path member; In a liquid ejection head having an opening of the flow channel is formed on a surface of the flow channel member facing the element substrate, The liquid ejection head according to claim 1, wherein the flow path member is formed with a groove portion extending from the vicinity of the opening to an outer edge of the flow path member.

19. A manufacturing apparatus for a liquid ejection head that ejects liquid from an ejection port, comprising: a welding horn that is used for welding the flow path forming member and the fitting member by frictional heat by contacting the flow path forming member, the flow path forming member having a recess formed therein to become a flow path for supplying liquid to the discharge port, the flow path forming member having a first through hole formed therein, and a fitting member having a fitting portion that fits with the recess, the fitting member having a second through hole formed therein, to form the flow path communicating with the first through hole and the second through hole; a fluid flow generating mechanism that generates a flow of fluid from the second through hole through the flow passage to the first through hole while the flow passage forming member and the fitting member are being welded by the welding horn; Equipped with A liquid ejection head manufacturing apparatus, characterized in that the welded horn has a recess in a portion located at the first through hole, and has a groove portion extending from the recess to the outer edge of the welded horn.

20. A manufacturing apparatus for a liquid ejection head as described in Claim 19, characterized in that the fluid that reaches the first through hole is discharged to the outside through the gap between the flow path forming member and the groove portion provided in the welding horn.

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