Asymmetric Dual End Effector Robot Arm

Abstract

An apparatus including: a drive section having a motor and multiple coaxial drive shafts; an arm assembly having a first arm and a second arm; and a controller. The first arm includes a first upper arm, a first forearm, a first end effector, and a first transmission, the first transmission including a non-circular pulley, and the first upper arm and the first forearm have unequal effective lengths. The second arm includes a second upper arm, a second forearm, a second end effector, and a second transmission, the second upper arm and the second forearm have substantially equal effective lengths. The controller is configured to cause the drive section to extend and retract the arms to move an upper substrate and a lower substrate over a substrate holding area such that the arm assembly and the upper substrate do not move above the lower substrate.

Description

[Technical field]

[0001] The exemplary and non-limiting embodiments relate generally to robots, and more particularly to robot arms having asymmetric end effectors with substrate holding areas that are angled relative to one another.

[0002] Processes for the manufacture of semiconductor, LED, solar, MEMS, or other devices utilize robotics and other forms of automation to transport substrates and carriers associated with substrates to and from storage, processing, or other locations. Such substrate transport may include moving individual substrates or groups of substrates with a single arm carrying one or more substrates, or with multiple arms, each carrying one or more substrates. For example, much of the manufacturing associated with semiconductor manufacturing is performed in a vacuum environment where footprint and volume are limited. Furthermore, much of the automated transport is performed to achieve maximum efficiency of substrate movement within a workspace volume. Thus, there is a desire to provide substrate transport automation that utilizes a minimum footprint and workspace volume for a given range of transport applications with maximized movement efficiency. Abstract

[0003] The following summary is intended to be merely illustrative and is not intended to limit the scope of the claims.

[0004] According to one aspect, an exemplary embodiment provides an apparatus including a drive having a motor and a plurality of coaxial drive shafts, an arm assembly connected to the coaxial drive shafts, the arm assembly having a first arm and a second arm, and a controller configured to control the motor. The first arm includes a first upper arm connected to a first one of the coaxial drive shafts, a first forearm connected to the first upper arm, a first end effector connected to the first forearm, and a first transmission for rotating the first end effector on the first forearm. The first transmission includes at least one non-circular pulley. The first end effector includes a first substrate holding area. The first upper arm and the first forearm have unequal effective lengths. The second arm comprises a second upper arm connected to a second one of the coaxial drive shafts, a second forearm connected to the second upper arm, a second end effector connected to the second forearm, and a second transmission for rotating the second end effector on the second forearm. The second end effector comprises a second substrate holding area. The second upper arm and the second forearm have substantially equal effective lengths. The controller is configured to cause the drive to extend and retract the arm to move the upper substrate and the lower substrate over the substrate holding area such that the arm assembly and the upper substrate do not move above the lower substrate.

[0005] According to another aspect, an exemplary method is provided, the method including extending and retracting a first arm of an arm assembly between a retracted position and an extended position, extending and retracting a second arm of the arm assembly between a retracted position and an extended position, and controlling the extension and retraction of the first and second arms such that the arm assembly and an upper substrate do not move above a lower substrate during the extension and retraction of the first and second arms between the respective retracted and extended positions. The first arm is connected to a first coaxial drive shaft of a robot drive. The first arm includes a first end effector having a first substrate holding area having the lower substrate thereon. The second arm is connected to a second coaxial drive shaft of the robot drive. The second arm includes a second end effector having a second substrate holding area having the upper substrate thereon.

[0006] According to another aspect, an exemplary embodiment provides a machine-readable non-transitory program storage device that tangibly embodies a program of instructions executable by the machine to perform operations including moving a first arm of an arm assembly to a robot drive by extending and retracting the first arm between a retracted position and an extended position, moving a second arm of the arm assembly to the robot drive by extending and retracting the second arm between a retracted position and an extended position, and controlling the extension and retraction of the first and second arms such that the arm assembly and an upper substrate do not move above a lower substrate. The first arm is connected to a first coaxial drive shaft of the robot drive. The first arm comprises a first end effector having a first substrate holding area having the lower substrate thereon. The second arm is connected to a second coaxial drive shaft of the robot drive. The second arm includes a second end effector having a second substrate holding area having the upper substrate thereon. [Brief description of the drawings]

[0007] The foregoing aspects and other features are explained in the following description taken in conjunction with the accompanying drawings.

[0008] [Figure 1A] FIG. 1 is a perspective view of a device incorporating features as described herein.

[0009] [Figure 1B] FIG. 1B is a side view of the device shown in FIG. 1A.

[0010] [Figure 2A] FIG. 2 is a perspective view showing the movement of one of the arms of the device shown in FIGS. 1A and 1B. [Figure 2B] FIG. 2 is a perspective view showing the movement of one of the arms of the device shown in FIGS. 1A and 1B. [Figure 2C] FIG. 2 is a perspective view showing the movement of one of the arms of the device shown in FIGS. 1A and 1B.

[0011] [Diagram 3] FIG. 13 is a perspective view of an alternative embodiment of an arm assembly.

[0012] [Figure 4] FIG. 4 is a top view of the arm assembly shown in FIG. 3.

[0013] [Figure 5A] FIG. 5 is a perspective view showing the movement of a first arm of the device shown in FIGS. 3 and 4. [Figure 5B] FIG. 5 is a perspective view showing the movement of a first arm of the device shown in FIGS. 3 and 4. [Figure 5C] FIG. 5 is a perspective view showing the movement of a first arm of the device shown in FIGS. 3 and 4.

[0014] [Figure 6A] FIG. 5 is a perspective view showing the movement of a second of the arms of the device shown in FIGS. 3 and 4. [Figure 6B] It is a perspective view showing the movement of the second arm among a plurality of arms of the device shown in FIGS. 3 and 4. [Figure 6C] It is a perspective view showing the movement of the second arm among a plurality of arms of the device shown in FIGS. 3 and 4.

[0015] [Figure 7A] It is a schematic view showing the link of the arm and the location of the substrate for the device shown in FIGS. 3 and 4.

[0016] [Figure 8A] It is a schematic view showing the extension of the second arm shown in FIGS. 3, 4 and 6A - 6C between the contracted position and the extended position. [Figure 8B] It is a schematic view showing the extension of the second arm shown in FIGS. 3, 4 and 6A - 6C between the contracted position and the extended position. [Figure 8C] It is a schematic view showing the extension of the second arm shown in FIGS. 3, 4 and 6A - 6C between the contracted position and the extended position.

[0017] [Figure 9A] It is a schematic view showing the extension of the second arm shown in FIGS. 3, 4 and 5A - 5C between the contracted position and the extended position. [Figure 9B] It is a schematic view showing the extension of the second arm shown in FIGS. 3, 4 and 5A - 5C between the contracted position and the extended position. [Figure 9C] It is a schematic view showing the extension of the second arm shown in FIGS. 3, 4 and 5A - 5C between the contracted position and the extended position.

[0018] [Figure 10A] It is a top view of an alternative example of the arm assembly.

[0019] [Figure 10B] It is a schematic side view of a robot having the arm assembly shown in FIG. 10A. [Figure 10C]It is a schematic cross-sectional view of a robot having the arm assembly shown in FIG. 10A.

[0020] [Figure 10D] It is a schematic side view of an alternative example of a robot similar to that shown in FIGS. 10B to 10C. [Figure 10E] It is a schematic cross-sectional view of an alternative example of a robot similar to that shown in FIGS. 10B to 10C.

[0021] [Figure 11A-D] FIG. 11A is a schematic top view of the example shown in FIG. 10A having a linear end effector, showing the extension of the arm between the retracted position and the extended position. FIG. 11B is a schematic top view of the example shown in FIG. 10A having a linear end effector, showing the extension of the arm between the retracted position and the extended position. FIG. 11C is a schematic top view of the example shown in FIG. 10A having a linear end effector, showing the extension of the arm between the retracted position and the extended position. FIG. 11D is a schematic top view of the example shown in FIG. 10A having a linear end effector, showing the extension of the arm between the retracted position and the extended position.

[0022] [Figure 12A-D] FIG. 12A is a schematic top view of an example similar to that shown in FIGS. 10A and 11A to 11D having an L-shaped end effector, showing the extension of the arm between the retracted position and the extended position. FIG. 12B is a schematic top view of an example similar to that shown in FIGS. 10A and 11A to 11D having an L-shaped end effector, showing the extension of the arm between the retracted position and the extended position. FIG. 12C is a schematic top view of an example similar to that shown in FIGS. 10A and 11A to 11D having an L-shaped end effector, showing the extension of the arm between the retracted position and the extended position. FIG. 12D is a schematic top view of an example similar to that shown in FIGS. 10A and 11A to 11D having an L-shaped end effector, showing the extension of the arm between the retracted position and the extended position.

[0023] [Figure 13A-D]FIG 13A is a schematic top view of an example similar to that shown in FIG 10A and FIG 11A-D with one L-shaped end effector and one straight end effector showing extension of the arm between retracted and extended positions. FIG 13B is a schematic top view of an example similar to that shown in FIG 10A and FIG 11A-D with one L-shaped end effector and one straight end effector showing extension of the arm between retracted and extended positions. FIG 13C is a schematic top view of an example similar to that shown in FIG 10A and FIG 11A-D with one L-shaped end effector and one straight end effector showing extension of the arm between retracted and extended positions. FIG. 13D is a schematic top view of an example similar to that shown in FIGS. 10A and 11A-11D with one L-shaped end effector and one straight end effector showing extension of the arms between retracted and extended positions.

[0024] [Figure 14A-D] FIG 14A is a schematic top view of an example similar to that shown in FIG 10A and FIG 11A-D with one L-shaped end effector and one straight end effector showing extension of the arm between retracted and extended positions. FIG 14B is a schematic top view of an example similar to that shown in FIG 10A and FIG 11A-D with one L-shaped end effector and one straight end effector showing extension of the arm between retracted and extended positions. FIG 14C is a schematic top view of an example similar to that shown in FIG 10A and FIG 11A-D with one L-shaped end effector and one straight end effector showing extension of the arm between retracted and extended positions. FIG. 14D is a schematic top view of an example similar to that shown in FIGS. 10A and 11A-11D with one L-shaped end effector and one straight end effector showing extension of the arms between retracted and extended positions.

[0025] [Figure 15] FIG. 13 is a top view of an alternative example of an arm assembly having one straight end effector and one bent end effector.

[0026] [Figure 16A-D] Figure 16A is a schematic top view of the example shown in Figure 15 showing extension of the arm between a retracted position and an extended position, Figure 16B is a schematic top view of the example shown in Figure 15 showing extension of the arm between a retracted position and an extended position, Figure 16C is a schematic top view of the example shown in Figure 15 showing extension of the arm between a retracted position and an extended position, and Figure 16D is a schematic top view of the example shown in Figure 15 showing extension of the arm between a retracted position and an extended position.

[0027] [Figure 17] FIG. 13 is a top view of an alternative example of an arm assembly having an L-shaped end effector.

[0028] [Figure 18] FIG. 18 is a schematic cross-sectional view of a robot having the arm assembly shown in FIG. 17.

[0029] [Figure 19] 19 is a schematic cross-sectional view similar to FIG. 18 of an alternative embodiment.

[0030] [Fig. 20A-D] Figure 20A is a schematic top view of an example with a straight end effector showing extension of the arm between a retracted position and an extended position, Figure 20B is a schematic top view of an example with a straight end effector showing extension of the arm between a retracted position and an extended position, Figure 20C is a schematic top view of an example with a straight end effector showing extension of the arm between a retracted position and an extended position, and Figure 20D is a schematic top view of an example with a straight end effector showing extension of the arm between a retracted position and an extended position.

[0031] [Figure 21A-D]Figure 21A is a schematic top view of an example having an L-shaped end effector showing extension of the arm between a retracted position and an extended position. Figure 21B is a schematic top view of an example having an L-shaped end effector showing extension of the arm between a retracted position and an extended position. Figure 21C is a schematic top view of an example having an L-shaped end effector showing extension of the arm between a retracted position and an extended position. Figure 21D is a schematic top view of an example having an L-shaped end effector showing extension of the arm between a retracted position and an extended position.

[0032] [Fig. 22A-D] FIG. 22A is a schematic top view of an example having one L-shaped end effector and one straight end effector showing the extension of the arm between a retracted position and an extended position. FIG. 22B is a schematic top view of an example having one L-shaped end effector and one straight end effector showing the extension of the arm between a retracted position and an extended position. FIG. 22C is a schematic top view of an example having one L-shaped end effector and one straight end effector showing the extension of the arm between a retracted position and an extended position. FIG. 22D is a schematic top view of an example having one L-shaped end effector and one straight end effector showing the extension of the arm between a retracted position and an extended position.

[0033] [Figure 23A-D] FIG. 23A is a schematic top view of another example having one L-shaped end effector and one straight end effector showing the extension of the arm between a retracted position and an extended position. FIG. 23B is a schematic top view of another example having one L-shaped end effector and one straight end effector showing the extension of the arm between a retracted position and an extended position. FIG. 23C is a schematic top view of another example having one L-shaped end effector and one straight end effector showing the extension of the arm between a retracted position and an extended position. FIG. 23D is a schematic top view of another example having one L-shaped end effector and one straight end effector showing the extension of the arm between a retracted position and an extended position.

[0034] [Figure 24] FIG. 13 is a top view of an alternative example of an arm assembly having a straight end effector and a single upper arm.

[0035] [Figure 25A] FIG. 25 is a schematic side view of a robot having an arm assembly similar to that shown in FIG. [Figure 25B] FIG. 25 is a schematic cross-sectional view of a robot having an arm assembly similar to that shown in FIG.

[0036] [Figure 26A] FIG. 25 is a schematic side view of a robot having the arm assembly shown in FIG. [Figure 26B] FIG. 25 is a schematic cross-sectional view of a robot having the arm assembly shown in FIG. 24.

[0037] [Fig. 27A-D] Figure 27A is a schematic top view of the arm assembly shown in Figure 24 with a straight end effector showing extension of the arm between a retracted position and an extended position. Figure 27B is a schematic top view of the arm assembly shown in Figure 24 with a straight end effector showing extension of the arm between a retracted position and an extended position. Figure 27C is a schematic top view of the arm assembly shown in Figure 24 with a straight end effector showing extension of the arm between a retracted position and an extended position. Figure 27D is a schematic top view of the arm assembly shown in Figure 24 with a straight end effector showing extension of the arm between a retracted position and an extended position.

[0038] [Fig. 28A-D]Figure 28A is a schematic top view of an arm assembly similar to that shown in Figure 24 with an L-shaped end effector showing extension of the arm between a retracted position and an extended position. Figure 28B is a schematic top view of an arm assembly similar to that shown in Figure 24 with an L-shaped end effector showing extension of the arm between a retracted position and an extended position. Figure 28C is a schematic top view of an arm assembly similar to that shown in Figure 24 with an L-shaped end effector showing extension of the arm between a retracted position and an extended position. Figure 28D is a schematic top view of an arm assembly similar to that shown in Figure 24 with an L-shaped end effector showing extension of the arm between a retracted position and an extended position.

[0039] [Fig. 29A-D] FIG 29A is a schematic top view of an arm assembly similar to that shown in FIG 24 with one L-shaped end effector and one straight end effector showing extension of the arm between a retracted position and an extended position. FIG 29B is a schematic top view of an arm assembly similar to that shown in FIG 24 with one L-shaped end effector and one straight end effector showing extension of the arm between a retracted position and an extended position. FIG 29C is a schematic top view of an arm assembly similar to that shown in FIG 24 with one L-shaped end effector and one straight end effector showing extension of the arm between a retracted position and an extended position. FIG 29D is a schematic top view of an arm assembly similar to that shown in FIG 24 with one L-shaped end effector and one straight end effector showing extension of the arm between a retracted position and an extended position.

[0040] [Fig. 30A-D]FIG. 30A is a schematic top view of another example of an arm assembly similar to that shown in FIGS. 29A-D with one L-shaped end effector and one straight end effector, showing the extension of the arm between a retracted position and an extended position. FIG. 30B is a schematic top view of another example of an arm assembly similar to that shown in FIGS. 29A-D with one L-shaped end effector and one straight end effector, showing the extension of the arm between a retracted position and an extended position. FIG. 30C is a schematic top view of another example of an arm assembly similar to that shown in FIGS. 29A-D with one L-shaped end effector and one straight end effector, showing the extension of the arm between a retracted position and an extended position. FIG. 30D is a schematic top view of another example of an arm assembly similar to that shown in FIGS. 29A-D with one L-shaped end effector and one straight end effector, showing the extension of the arm between a retracted position and an extended position.

[0041] [Diagram 31] FIG. 13 is a top view of an alternative example of an arm assembly having a single upper arm, one straight end effector, and one L-shaped end effector, where the forearm is connected to the single upper arm with different effective lengths on the upper arm.

[0042] [Figure 32A] FIG. 32 is a schematic side view of a robot having the arm assembly shown in FIG. [Figure 32B] FIG. 32 is a schematic cross-sectional view of a robot having the arm assembly shown in FIG. 31.

[0043] [Fig. 33A-D]Figure 33A is a schematic top view of an embodiment of an arm assembly similar to that shown in Figure 31 having a single upper arm and a straight end effector showing extension of the arm between a retracted position and an extended position. Figure 33B is a schematic top view of an embodiment of an arm assembly similar to that shown in Figure 31 having a single upper arm and a straight end effector showing extension of the arm between a retracted position and an extended position. Figure 33C is a schematic top view of an embodiment of an arm assembly similar to that shown in Figure 31 having a single upper arm and a straight end effector showing extension of the arm between a retracted position and an extended position. Figure 33D is a schematic top view of an embodiment of an arm assembly similar to that shown in Figure 31 having a single upper arm and a straight end effector showing extension of the arm between a retracted position and an extended position.

[0044] [Fig. 34A-D] Figure 34A is a schematic top view of an embodiment of an arm assembly similar to that shown in Figure 31 having a single upper arm and an L-shaped end effector showing extension of the arm between a retracted position and an extended position. Figure 34B is a schematic top view of an embodiment of an arm assembly similar to that shown in Figure 31 having a single upper arm and an L-shaped end effector showing extension of the arm between a retracted position and an extended position. Figure 34C is a schematic top view of an embodiment of an arm assembly similar to that shown in Figure 31 having a single upper arm and an L-shaped end effector showing extension of the arm between a retracted position and an extended position. Figure 34D is a schematic top view of an embodiment of an arm assembly similar to that shown in Figure 31 having a single upper arm and an L-shaped end effector showing extension of the arm between a retracted position and an extended position.

[0045] [Fig. 35A-D]FIG. 35A is a schematic top view of an embodiment of an arm assembly similar to that shown in FIG. 31 having a single upper arm, one L-shaped end effector and one straight end effector, showing the extension of the arm between a retracted position and an extended position. FIG. 35B is a schematic top view of an embodiment of an arm assembly similar to that shown in FIG. 31 having a single upper arm, one L-shaped end effector and one straight end effector, showing the extension of the arm between a retracted position and an extended position. FIG. 35C is a schematic top view of an embodiment of an arm assembly similar to that shown in FIG. 31 having a single upper arm, one L-shaped end effector and one straight end effector, showing the extension of the arm between a retracted position and an extended position. FIG. 35D is a schematic top view of an embodiment of an arm assembly similar to that shown in FIG. 31 having a single upper arm, one L-shaped end effector and one straight end effector, showing the extension of the arm between a retracted position and an extended position.

[0046] [Fig. 36A-D] Figure 36A is a schematic top view of the arm assembly shown in Figure 31 showing extension of the arm between a retracted position and an extended position. Figure 36B is a schematic top view of the arm assembly shown in Figure 31 showing extension of the arm between a retracted position and an extended position. Figure 36C is a schematic top view of the arm assembly shown in Figure 31 showing extension of the arm between a retracted position and an extended position. Figure 36D is a schematic top view of the arm assembly shown in Figure 31 showing extension of the arm between a retracted position and an extended position.

[0047] [Figure 37A] FIG. 2 is a schematic top view of the robot. [Figure 37B] FIG. 2 is a schematic side view of the robot.

[0048] [Figure 37C] FIG. 37C is a schematic cross-sectional view of the robot shown in FIGS. 37A and 37B.

[0049] [Fig. 38A-C]Figures 38A, 38B, and 38C are top views illustrating various positions of the arm of the embodiment shown in Figures 37A-C. [Fig. 38D-F] Figures 38D, 38E, and 38F are top views showing various positions of the arm of the embodiment shown in Figures 37A-C. [Fig. 38G-I] Figures 38G, 38H, and 38I are top views showing various positions of the arm of the embodiment shown in Figures 37A-C.

[0050] [Figure 39] FIG. 37D is a schematic cross-sectional view of the robot similar to FIG. 37C. DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS

[0051] 1A and 1B, an apparatus for moving substrates is generally indicated at 10 and hereinafter referred to as "apparatus 10". Apparatus 10 includes a robot having a substrate transport apparatus or arm assembly 12 (hereinafter "transport apparatus 12") configured to transport substrates 14a, 14b between, for example, a substrate processing chamber and a load lock. Apparatus 10 also includes a drive unit 16 configured to drive the arm and multiple effectors of transport apparatus 12 and thereby transport the substrates. By way of example, a robot having multiple end effectors is described in U.S. Patent Application No. 15 / 897,374, filed February 15, 2018, now U.S. Patent No. 10,580,682, entitled "Material-Handling Robot With Multiple End-Effectors," which is incorporated herein by reference in its entirety. Apparatus 10 may include or be connected to a controller 11. The controller 11 may include one or more processors 13 and one or more memories 15. The memory 15 may include software or computer code 17 configured to control the movement of the motors in the drive units 16 and to receive sensor signals from sensors in the drive units 16 or the transport device 12. It should be understood that all of the embodiments described herein are connected to some type of controller, such as, for example, the controller 11, to control the movement of the arms, such as the rotation of the drive units 16 about their central axis, and the extension and retraction of the individual arms relative to the central axis of the drive units. In alternative embodiments, other types of drive units may be used.

[0052] The transport device 12 includes a plurality of arms, each of which is extendable and rotatable via a drive unit 16. The plurality of arms includes at least one unequal linkage or first arm 20 that is drivable with a non-circular pulley. The unequal linkage 20 in this example includes an upper arm having a first effective length and a forearm rotatably connected to the upper arm with a second, different effective length. The second effective length is shorter than the first effective length in this example. The effective length of the upper arm is measured between an axis of rotation of the upper arm on the drive unit 16 and an axis of rotation of the forearm on the upper arm. The effective length of the forearm is measured between an axis of rotation of the forearm on the upper arm and an axis of rotation of the end effector 22 on the forearm. Examples of non-circular pulleys and unequal link lengths are shown in U.S. Pat. No. 9,840,004, which is incorporated herein by reference in its entirety. The unequal link linkage 20 includes a first end effector 22 for supporting the lower substrate 14a.

[0053] The multiple arms also include at least one equal-link linkage or second arm 24. The equal-link linkage 24 includes a second end effector 26 for supporting the upper substrate 14b. The equal-link linkage 24 may include one or more circular pulleys rather than non-circular pulleys. The equal-link linkage 24 in this example has an upper arm having a third effective length and a forearm rotatably connected to the upper arm at a fourth effective length. The third effective length is substantially the same as the fourth effective length in this example. Thus, the term "equal-link" linkage is used to indicate the same or substantially the same effective lengths for the upper arm and forearm in the same linkage.

[0054] The first end effector 22 and the second end effector 26 are asymmetric in this example. Thus, the apparatus 10 may be considered to have an asymmetric dual arm with stacked end effectors. As shown in FIG. 1B, the unequal link linkage 20 is positioned at a distance D or greater from a floor or reference plane 28. The configuration of the transport apparatus 12 provides a maximum radial reach from a given stored diameter. As an example, a robot having arms with unequal link lengths is described in U.S. Pat. No. 9,149,936, issued Oct. 6, 2015, entitled "Robot Having Arm With Unequal Link Lengths," which is incorporated herein by reference in its entirety.

[0055] 2A-2C, the initial position of the transport device 12 is a retracted configuration in which a portion of the second end effector 26 is positioned over a portion of the first end effector 22 (FIG. 2A) such that the upper substrate 14b is positioned over the lower substrate 14a. FIG. 2B shows the first arm 20 being moved from its retracted position of FIG. 2A toward its extended position shown in FIG. 2C. When the first end effector 22 supporting the lower substrate 14a is extended, the wrist 30 on the unequal linkage 20 (first lower arm) passes along the side of the shoulder 40 on the equal linkage 24 (second upper arm). A similar movement occurs during retraction of the same end effector. When the first end effector 22 supporting the lower substrate 14a is fully extended (FIG. 2C) without movement of the equal linkage 24, the length of the equal linkage 24 movement allows for retraction and maximum movement of the wrist.

[0056] Referring also to Figure 3, a substrate transport apparatus for substrate processing having an angled end effector is generally shown at 112 and is hereafter referred to as "transport apparatus 112". This example may also include a controller 11 as shown in Figure 1, but with suitable software programming for running the motors such that there is no movement above the substrate as described further below. This example shows an asymmetric dual arm example with an angled end effector. This example may be used to provide a system in which components or materials of the transport apparatus 112 or upper substrate 114b do not move above the lower end effector or lower substrate 114a.

[0057] The transport apparatus 112 comprises a first lower arm with an unequal linkage 120 having a first end effector 122, and a second upper arm with an equal linkage 124 and a second end effector 126. The first end effector 122 is asymmetrical with respect to the second end effector 126. The first end effector 122 has a substrate holding area that is also oblique with respect to the substrate holding area of ​​the second end effector 126. Thus, while in an initial rest or retracted position and during movement of either or both of the lower and upper arms, the upper substrate 114b may be prevented from resting above the lower substrate 114a.

[0058] FIG. 4 shows a top view of the transport apparatus 112 shown in FIG. 3. In the example shown in FIG. 3, the linkage design (relative to the linkage design shown in the stacked end effectors of FIG. 1A, FIG. 1B, FIG. 2A-FIG. 2C) may rotate to move the upper wafer (substrate 114b) on the second end effector 126 away from the lower wafer (substrate 114a) on the first end effector 122. Similarly, in the example shown in FIG. 3, FIG. 4, the linkage design (relative to the linkage design in the equal-link linkage shown in the stacked end effectors of FIG. 1A, FIG. 1B, FIG. 2A-FIG. 2C) may extend to place the elbow of the equal-link linkage 124 away from the wrist of the unequal-link linkage 120. The unequal-link linkage 120 may include non-circular pulleys and belts or bands. In certain examples, the software in the controller used for the examples of Figures 3 and 4 to control the motors in the drive units may be the same as the software in the controller used for the examples of Figures 1A, 1B, and 2A-2C.

[0059] Referring also to Figure 5A, in a rest or retracted position, the asymmetric and angled configuration of the end effectors 122, 126 allows the wafer (substrate 114b) on the second end effector 126 not to overlie the wafer (substrate 114a) on the first end effector 122. Referring also to Figure 5B, as the unequal linkage 120 is extended, the first end effector 122 moves away from the second end effector 126. Referring also to Figure 5C, as the unequal linkage 120 is further extended, the first end effector 122 moves further away from the second end effector 126. With these upper and lower arm structures, end effector shapes, and motor control by controller 11, this example can be used to show that at no time during extension and contraction of unequal link linkage 120 having first end effector 122 is any part of conveying apparatus 112 or upper substrate 114b positioned above lower substrate 114a.

[0060] Referring also to Figure 6A, in the rest or retracted position, the asymmetrical and angled end effector configuration prevents the upper wafer (substrate 114b) on the second end effector 126 from moving above the lower wafer (substrate 114a) on the first end effector 122 (see also Figure 5A). Referring also to Figure 6B, as the equal-link linkage 124 is extended, the second end effector 126 moves away from the first end effector 122. Referring also to Figure 6C, as the equal-link linkage 124 is extended further toward its fully extended position, the second end effector 126 moves further away from the first end effector 122. With these upper and lower arm structures, end effector shapes, and motor control by controller 11, this example can be used to show that at no time during extension and contraction of the equal-link linkage 124 with the second end effector 126 is any part of the transport apparatus 112 or the upper substrate 114b positioned above the lower substrate 114a or substrate holding area of ​​the lower end effector 122.

[0061] 7, a schematic top view of the transport device 112 is shown with both arms in a retracted position. The unequal linkage 120 can include and be moved by a non-circular pulley. The other linkage 124 can include either an equal linkage or an unequal linkage with a non-circular pulley. Compared to the example shown in FIGS. 1A and 1B, the design of the end effectors 122, 126 can be rotated from a radial orientation to provide additional spacing between them and between the respective elbows and wrists.

[0062] 8A-8C, in the first stage (FIG. 8A, retracted position) of the extension of the equal-link linkage 124, the upper substrate 114b is not positioned above the lower substrate 114a. As shown in FIG. 8B, in the link-on-link position when the upper substrate 114b is extended, the orientation of the end effectors 122, 126 changes as the center of the upper substrate 114b moves along a straight line. As shown in FIG. 8C, in the last stage when the substrate 114b is in the extended position, the orientation of the end effectors 122, 126 relative to each other remains constant as the center of the upper substrate 114b continues to move along a straight line as the end effector 126 is further extended. In this example, in the first stage of extension, the orientation of the end effector 126 changes as the center of the end effector moves along a straight line, and in the last stage of extension, the orientation of the end effector 126 remains constant with its center continuing to move along a straight line.

[0063] 9A-9C, in the initial stage of extension of the unequal-link linkage 120 (FIG. 9A, retracted position), the upper substrate 114b is again not positioned above the lower substrate 114a. As shown in FIG. 9B, in the link-on-link position when the end effector 122 is extended, the orientation of the end effectors 122, 126 changes relative to each other as the center of the lower substrate 114a moves along a straight line. As shown in FIG. 9C, in the final stage of the movement of the lower substrate 114a towards its extended position, the orientation of the end effectors 122, 126 relative to each other remains constant, and the center of the lower substrate 114a continues to move along its straight line.

[0064] The features as described herein may be provided with a diagonal dual extension arm configuration. Referring also to FIG. 10A, an exemplary embodiment of a diagonal dual extension arm configuration is shown. In this example, an arm assembly 1012 comprises a first arm 1014 and a second arm 1016. The two arms 1014, 1016 are connected to a drive such as the drive 16 shown in FIG. 10B and FIG. 10C. The drive 16 may comprise coaxial drive shafts 1018, 1020, 1022, motors 1024, 1026, 1028 for rotating the drive shafts, and a vertical drive 1030. The first arm 1014 has an upper arm 1030, a forearm 1032, and an end effector 1034 configured to support a substrate A thereon. The second arm 1016 has an upper arm 1036, a forearm 1038, and an end effector 1040 configured to support a substrate B thereon. The arms 1014, 1016 are equipped with pulleys and bands as part of the transmission from the drive. FIGS. 10B and 10C show an example of a transmission with bands and pulleys. FIGS. 10B and 10C also show an example mechanism of the links (upper arm, forearm, end effector) of the arms 1014', 1016'. FIGS. 10D and 10E show another alternative embodiment of the example mechanism of the links (upper arm, forearm, end effector) of the arms 1014'', 1016''.

[0065] 11A-11D, an exemplary embodiment of an arm assembly with constant wrist orientation is shown, including independent extension arm movement with a 3-axis spindle, both linkages 1114, 1116 with equal link geometry, and an end effector with constant orientation between extension and retraction.

[0066] 12A-12D, an exemplary embodiment of an arm assembly with constant wrist orientation is shown. This example includes independent extension arm movement, a three-axis spindle, both unequal linkages 1214, 1216, and an end effector with a constant orientation between extension and retraction. This example includes a generally 90 degree L-shaped end effector. One or more of these end effectors may be bent or curved more or less than 90 degrees, such as the bent end effector shown in FIGS. 16A-16D.

[0067] 13A-13D, the movement of an exemplary embodiment of an arm assembly with constant wrist orientation is shown, including independent extension arm movement, a three-axis spindle, one linkage 1314 with equal links and the other linkage 1316 with unequal link geometry, and an end effector with constant orientation between extension and retraction.

[0068] 14A-14D, the movement of an exemplary embodiment of an arm assembly with constant wrist orientation is shown, including an independent extension arm, a three-axis spindle, one linkage 1414 with unequal links and the other linkage 1416 with equal link geometry, and an end effector with a constant orientation between extension and retraction.

[0069] Features as described herein may include variable wrist orientation, as illustrated by the example shown in Figure 15. For example, the following features may be provided: Independent extension arm movement, 4-axis spindle, both linkages with equal link geometry, variable orientation of end effector between extension and retraction Independent extension arm movement, 4-axis spindle, both linkages with unequal link geometry, variable orientation end effector between extension and retraction Independent extension arm movement, 4-axis spindle, one linkage with equal linkage and the other with unequal linkage geometry (upper linkage with equal linkage, lower linkage with unequal linkage), end effector with variable orientation between extension and retraction

[0070] 16A-16D, the movement of an exemplary embodiment of an arm assembly with variable wrist orientation is shown. This example includes independent extension arm movement, a 4-axis spindle / drive, one linkage 1614 with unequal links and the other linkage 1616 with equal link geometry (unequal links upper linkage, equal links lower linkage), and an end effector with variable orientation between extension and retraction. In this example, the end effector does not point radially in the retracted position.

[0071] Features as described herein may comprise a connected dual arm mechanism. This is illustrated by the example shown in FIG. 17 with arms 1714 and 1716. FIG. 18 shows an example of the connection of the drive 16 to the exemplary embodiment of the connected dual arm mechanism with pulleys and bands as part of the transmission in the arm assemblies. FIG. 19 shows another example of the connection of the drive 16 to the exemplary embodiment of the connected dual arm mechanism with pulleys and bands as part of the transmission in the arm assemblies 1714' and 1716'.

[0072] The connected dual arm mechanism may include a constant wrist orientation. FIGS. 20A-20D show an example including a connected dual arm (fixedly connected upper arm, left and right elbows, left and right forearms), a three-axis spindle / drive, both linkages 2014, 2016 with equal linkages, and an end effector with a constant orientation between extension and retraction. FIGS. 21A-21D show an example including a connected dual arm (fixedly connected upper arm), a three-axis spindle, both linkages 2114, 2116 with unequal linkages, and an end effector with a constant orientation between extension and retraction. FIGS. 22A-22D show an example including a connected dual arm (fixedly connected upper arm), a three-axis spindle, one linkage 2214 with equal linkages and the other linkage 2216 with unequal linkages, and an end effector with a constant orientation between extension and retraction. 23A-23D show an example including a connected dual arm (fixedly connected upper arm), a three-axis spindle, one link mechanism 2314 with unequal links and the other link mechanism 2316 with equal link geometry, and an end effector with a constant orientation during extension and retraction.

[0073] The connected dual arm mechanism can include variable wrist orientation. Examples include: Dual connected arms (rigidly connected upper arm, left and right elbow, left and right forearm), 3-axis spindle, both linkages with iso-link geometry, variable orientation end effector Dual connected arms (rigidly connected upper arms), 3-axis spindle, both linkages with unequal link geometries, variable orientation end effectors Dual connected arms (rigidly connected upper arms), 3-axis spindle, equal linkage on one side and unequal linkage on the other side, variable orientation end effector Dual connected arms (rigidly connected upper arms), 3-axis spindle, one link mechanism with unequal links and the other link mechanism with equal links, variable orientation end effector

[0074] Features as described herein may include a single upper arm and a single elbow. An example with arms 2414 and 2416 is shown in Figure 24. Figures 25A, 25B, 26A, and 26B show examples of connection of drive 16 to an exemplary embodiment of a connected dual arm mechanism with pulleys and bands as part of a transmission in an arm assembly similar to Figure 24.

[0075] The single upper arm single elbow mechanism may include a constant wrist orientation. Figures 27A-27D show an example including an arm with a common elbow (single upper arm, single elbow, stacked forearms), a three-axis spindle, both linkages 2714, 2716 with equal linkage geometry, and a constant orientation end effector during extension and retraction. Figures 28A-28D show an example including an arm with a common elbow (single upper arm, single elbow, stacked forearms), a three-axis spindle, both linkages 2814, 2816 with unequal linkage geometry, and a constant orientation end effector during extension and retraction. Figures 29A-29D show an example including an arm with a common elbow (single upper arm, single elbow, stacked forearms), a three-axis spindle, one linkage 2914 with equal linkage geometry and another linkage 2916 with unequal linkage geometry, and a constant orientation end effector during extension and retraction. 30A-30D show an example including an arm with a common elbow (single upper arm, single elbow, stacked forearm), a three-axis spindle, one linkage 3014 with unequal links and the other linkage 3016 with equal link geometry, and an end effector with a constant orientation during extension and retraction.

[0076] The single upper arm single elbow mechanism can include variable wrist orientation. Examples include: Arms with common elbow (single upper arm, single elbow, stacked forearm), 3-axis spindle, both linkages with iso-link geometry, variable orientation end effectors Arms with common elbow (single upper arm, single elbow, stacked forearm), 3-axis spindle, both linkages with unequal link geometries, variable orientation end effectors Arms with common elbow (single upper arm, single elbow, stacked forearms), 3-axis spindle, one linkage with equal links and the other with unequal link geometry, variable orientation end effector Arms with common elbow (single upper arm, single elbow, stacked forearm), 3-axis spindle, one linkage with unequal links and the other with equal link geometry, variable orientation end effector

[0077] Features as described herein may include a single upper arm with an offset elbow. An example with linkages 3114 and 3116 is shown in Figure 31. Figures 32A-B show an example of the connection of the drive 16 to an exemplary embodiment of a single upper arm with an offset elbow mechanism by a pulley and band as part of a transmission in the arm assembly.

[0078] A single upper arm with an offset elbow mechanism can include a constant wrist orientation. FIGS. 33A-33D show an example including an arm with an offset elbow (single upper arm, two elbow joints), a three-axis spindle, both linkages 3314, 3316 with equal linkages, and an end effector with a constant orientation between extension and retraction. FIGS. 34A-34D show an example including an arm with an offset elbow (single upper arm, two elbow joints), a three-axis spindle, both linkages 3414, 3416 with unequal linkages, and an end effector with a constant orientation between extension and retraction. FIGS. 35A-35D show an example including an arm with an offset elbow (single upper arm, two elbow joints), a three-axis spindle, one linkage 3514 with equal linkages and the other linkage 3516 with unequal linkages, and an end effector with a constant orientation between extension and retraction. 36A-36D show an example including an arm with an offset elbow (single upper arm, two elbow joints), a three-axis spindle, one link mechanism 3614 with unequal links and the other link mechanism 3616 with equal link geometry, and an end effector with a constant orientation during extension and retraction.

[0079] A single upper arm with an offset elbow mechanism can include variable wrist orientation. Examples include: Arm with offset elbow (single upper arm, two elbow joints), 3-axis spindle, both linkages with iso-link geometry, variable orientation end effector Arm with offset elbow (single upper arm, two elbow joints), 3-axis spindle, both linkages with unequal link geometries, variable orientation end effector Arm with offset elbow (single upper arm, two elbow joints), 3-axis spindle, one linkage with equal links and the other with unequal link geometry, variable orientation end effector Arm with offset elbow (single upper arm, two elbow joints), 3-axis spindle, one link mechanism with unequal links and the other with equal link geometry, variable orientation end effector

[0080] According to one example, an apparatus may be provided, comprising: a drive having a motor and a plurality of coaxial drive shafts; an arm assembly connected to the coaxial drive shafts, the arm assembly having a first arm and a second arm; and a controller configured to control the motor. The first arm comprises a first upper arm connected to a first one of the coaxial drive shafts, a first forearm connected to the first upper arm, a first end effector connected to the first forearm, and a first transmission for rotating the first end effector on the first forearm. The first transmission comprises at least one non-circular pulley. The first end effector comprises a first substrate holding area. The first upper arm and the first forearm have unequal effective lengths. The second arm comprises a second upper arm connected to a second one of the coaxial drive shafts, a second forearm connected to the second upper arm, a second end effector connected to the second forearm, and a second transmission for rotating the second end effector on the second forearm. The second end effector comprises a second substrate holding area. The second upper arm and the second forearm have substantially equal effective lengths. The controller is configured to cause the drive to extend and retract the arm to move the upper substrate and the lower substrate on the substrate holding area such that the arm assembly and the upper substrate do not move above the lower substrate. The effective length is the length between the pivot positions at both ends of each link.

[0081] The controller may be configured to maintain the arm having the upper substrate in a stationary position relative to the drive while the controller extends and retracts the other arm. The controller may be configured to maintain the arm having the lower substrate in a stationary position relative to the drive while the controller extends and retracts the other arm. The second transmission may include a pulley that is not a non-circular pulley. The first end effector may have a substantially curved shape and the second end effector may have a substantially straight shape. The effective length of the first upper arm may be longer than the effective length of the first forearm. In a retracted position of the first and second arms, the second end effector may be partially disposed over the first end effector, the second forearm may be partially disposed over the first forearm and the first end effector, and the first end effector may be partially disposed over the second upper arm. The controller, the first and second arm structures, and the transmission may be configured to limit movement of the first and second arms relative to each other to prevent movement of the arm assembly and upper substrate above the lower substrate for all locations of the end effector.

[0082] An exemplary method may be provided, comprising: extending and retracting a first arm of an arm assembly between a retracted position and an extended position; extending and retracting a second arm of the arm assembly between a retracted position and an extended position; and controlling the extension and retraction of the first and second arms such that the arm assembly and an upper substrate do not move above a lower substrate during the extension and retraction of the first and second arms between the respective retracted and extended positions. The first arm is connected to a first coaxial drive shaft of a robot drive. The first arm comprises a first end effector having a first substrate holding area having the lower substrate thereon. The second arm is connected to a second coaxial drive shaft of the robot drive. The second arm comprises a second end effector having a second substrate holding area having the upper substrate thereon.

[0083] The first arm may include a first upper arm connected to the first coaxial drive shaft, a first forearm connected to the first upper arm, the first end effector connected to the first forearm, and a first transmission for rotating the first end effector on the first forearm. The first transmission comprises at least one non-circular pulley. The first upper arm and the first forearm have unequal effective lengths. The method includes the first transmission rotating the first end effector on the first forearm when the first upper arm is rotated by the first coaxial drive shaft. The second arm may include a second upper arm connected to the second coaxial drive shaft, a second forearm connected to the second upper arm, the second end effector connected to the second forearm, and a second transmission for rotating the second end effector on the second forearm. The second upper arm and the second forearm have substantially equal effective lengths. The method includes the second transmission rotating the second end effector on the second forearm when the second upper arm is rotated by the second coaxial drive shaft. The second transmission comprises a pulley that is not a non-circular pulley. The control of the extension and retraction of the first and second arms may include the controller maintaining the second arm in a stationary position relative to the robot drive while the controller extends and retracts the first arm. The control of the extension and retraction of the first and second arms may include the controller maintaining the first arm in a stationary position relative to the robot drive while the controller extends and retracts the second arm. The first end effector may have a substantially bent shape and the second end effector may have a substantially straight shape. The first arm may comprise a first upper arm and a first forearm. An effective length of the first upper arm is greater than an effective length of the first forearm. The second arm includes a second upper arm and a second forearm, the effective length of the second upper arm being greater than the effective length of the second forearm.In the retracted position of the first and second arms, the second end effector may be partially disposed over the first end effector, the second forearm may be partially disposed over the first forearm and the first end effector, and the first end effector may be partially disposed over a second upper arm. The control of the extension and retraction of the first and second arms may include a controller, structure of the first and second arms, and transmissions within the arms limiting movement of the first and second arms relative to one another to prevent the movement of the arm assembly and upper substrate above the lower substrate for all locations of the end effector.

[0084] In one example, a machine-readable non-transitory program storage device may be provided that tangibly embodies a program of instructions executable by the machine to perform operations including moving a first arm of an arm assembly to a robot drive by extending and retracting the first arm between a retracted position and an extended position, moving a second arm of the arm assembly to the robot drive by extending and retracting the second arm between a retracted position and an extended position, and controlling the extension and retraction of the first and second arms such that the arm assembly and an upper substrate do not move above a lower substrate. The first arm is connected to a first coaxial drive shaft of the robot drive. The first arm comprises a first end effector having a first substrate holding area having the lower substrate thereon. The second arm is connected to a second coaxial drive shaft of the robot drive. The second arm comprises a second end effector having a second substrate holding area having the upper substrate thereon.

[0085] The first arm may include a first upper arm connected to the first coaxial drive shaft, a first forearm connected to the first upper arm, the first end effector connected to the first forearm, and a first transmission for rotating the first end effector on the first forearm. The first transmission comprises at least one non-circular pulley. The first upper arm and the first forearm have unequal effective lengths. The operation includes causing the first transmission to rotate the first end effector on the first forearm when the first upper arm is rotated by the first coaxial drive shaft. The second arm may include a second upper arm connected to the second coaxial drive shaft, a second forearm connected to the second upper arm, the second end effector connected to the second forearm, and a second transmission for rotating the second end effector on the second forearm. The second upper arm and the second forearm have substantially equal effective lengths. The operations include causing the second transmission to rotate the second end effector on the second forearm when the second upper arm is rotated by the second coaxial drive shaft, the second transmission comprising a pulley that is not a non-circular pulley.

[0086] An exemplary embodiment may be provided, comprising: means for extending and retracting a first arm of an arm assembly between a retracted position and an extended position; means for extending and retracting a second arm of the arm assembly between a retracted position and an extended position; and means for controlling the extension and retraction of the first and second arms such that the arm assembly and an upper substrate do not move above a lower substrate during the extension and retraction of the first and second arms between their respective retracted and extended positions. The first arm is connected to a first coaxial drive shaft of a robot drive. The first arm comprises a first end effector having a first substrate holding area having the lower substrate thereon. The second arm is connected to a second coaxial drive shaft of the robot drive. The second arm comprises a second end effector having a second substrate holding area having the upper substrate thereon.

[0087] An exemplary embodiment may be provided that includes a circuit configured to move a first arm of an arm assembly to a robot drive by extending and retracting the first arm between a retracted position and an extended position, a circuit configured to move a second arm of the arm assembly to the robot drive by extending and retracting the second arm between a retracted position and an extended position, and a circuit configured to control the extension and retraction of the first and second arms such that the arm assembly and an upper substrate do not move above a lower substrate. The first arm is connected to a first coaxial drive shaft of the robot drive. The first arm includes a first end effector having a first substrate holding area having the lower substrate thereon. The second arm is connected to a second coaxial drive shaft of the robot drive. The second arm includes a second end effector having a second substrate holding area having the upper substrate thereon.

[0088] An exemplary embodiment may provide an apparatus comprising at least one processor and at least one non-transitory memory including computer program code, the at least one memory and the computer program code configured to cause the apparatus, by the at least one processor, to move a first arm of an arm assembly to a robot drive by extending and retracting the first arm between a retracted position and an extended position, move a second arm of the arm assembly to the robot drive by extending and retracting the second arm between a retracted position and an extended position, and control the extension and retraction of the first and second arms such that the arm assembly and an upper substrate do not move above a lower substrate. The first arm is connected to a first coaxial drive shaft of the robot drive. The first arm comprises a first end effector having a first substrate holding area having the lower substrate thereon. The second arm is connected to a second coaxial drive shaft of the robot drive. The second arm includes a second end effector having a second substrate holding area having the upper substrate thereon.

[0089] Additional exemplary embodiments may provide a robot with two linkages that can extend independently as described above, and may also rotate independently. The additional ability of the two linkages to rotate independently may allow the arm to transition between a configuration with stacked end effectors, which may be advantageous when fast material exchange is required, and a configuration with angled end effectors, which may be advantageous from a material contamination standpoint. Furthermore, the additional ability of the two linkages to rotate independently may increase productivity (system throughput) since one of the linkages may rotate to a next workstation (or other destination) before the other linkage completes an operation at the current workstation (current location).

[0090] The robot drive unit may include a four-axis spindle, such as one additional axis of motion compared to the embodiment described above, providing four coaxial drive shafts configured to drive a robot arm, which may essentially be the same as described above, but featuring two linkages in a structure that can rotate independently of each other.

[0091] 37A-37C, an exemplary embodiment is shown having a robot comprising a robot drive unit and a robot arm. The robot drive unit may be comprised of a spindle having a motor configured to drive four coaxial shafts (from outermost shaft to innermost shaft) T1, T2, T3, and T4. If desired, the drive unit may further include a vertical lift mechanism (not shown in FIGS. 37A-37C) configured to raise and lower the spindle vertically, such as one or more linear rail bearing mechanisms and motor-driven ball screws.

[0092] The robot arm may be comprised of a right linkage 3714 and a left linkage 3716. The right linkage 3714 may be comprised of a right upper arm 3730, a right forearm 3732, and a wrist assembly having an end effector 3740. The right upper arm 3730 may be connected to a shaft T3. The right forearm may be connected to the upper arm via a revolute joint (elbow joint) and driven by a shaft T4 using a transmission mechanism. The transmission mechanism may include a shoulder pulley that may be attached to the shaft T4, a first elbow pulley that may be attached to the right forearm 3732, and a band, belt, or cable that may transmit motion between the two pulleys. The wrist assembly having the end effector 3740 may be connected to the right forearm via another revolute joint (wrist joint) and restricted in rotation by another transmission mechanism. The transmission mechanism may include a second elbow pulley that may be attached to the right upper arm, a wrist pulley that may be attached to a wrist assembly having an end effector, and a band, belt, or cable that may connect the two pulleys.

[0093] The inter-joint length of the right forearm may be equal to the inter-joint length of the right upper arm. The transmission mechanism between shaft T4 and the right forearm may be configured such that when shaft T4 remains stationary and shaft T3 rotates, the wrist joint moves along a substantially straight radial line (passing through the axis of rotation of the coaxial drive shaft). To achieve this, the shoulder pulley and the first elbow pulley may be circular and the effective diameter of the shoulder pulley may be selected to be twice the effective diameter of the first elbow pulley. The transmission ratio of the transmission mechanism between the right upper arm 3730 and the wrist assembly with end effector may be configured such that the orientation of the wrist assembly with end effector remains substantially constant during this movement. To achieve this, the second shoulder pulley and the wrist pulley may be circular and the effective diameter of the wrist pulley may be selected to be twice the effective diameter of the second elbow pulley.

[0094] Alternatively, the length between the joints of the right forearm may not be equal to the length between the joints of the right upper arm. For example, the length between the joints of the right forearm may be shorter or longer than the length between the joints of the right upper arm. The transmission mechanism between the shaft T4 and the right forearm may be configured such that when the shaft T4 remains stationary and the shaft T3 rotates, the wrist joint moves along a substantially straight line (parallel to a line passing through the axis of rotation of the coaxial drive shaft). To achieve this, at least one of the pulleys of the transmission mechanism may feature a non-circular profile. In addition, the transmission ratio of the transmission mechanism between the right upper arm and the wrist assembly with the end effector may be configured such that the orientation of the wrist assembly with the end effector remains substantially constant during this movement. To achieve this, at least one of the pulleys of the transmission mechanism may feature a non-circular profile.

[0095] The left linkage 3716 may be comprised of a left upper arm 3736, a left forearm 3738, and a wrist assembly having an end effector 3741. The left upper arm 3736 may be attached to shaft T1. The left forearm 3738 may be connected to the upper arm via a revolute joint (elbow joint). The wrist assembly having an end effector 3741 may be connected to the forearm 3738 via another revolute joint (wrist joint).

[0096] The length between the joints of the left forearm may be shorter than the length between the joints of the left upper arm. In particular, the length of the left forearm may be advantageously selected such that the wrist joint may pass through the shoulder joint of the right linkage 3714, thus enabling a vertically compact arm package. The left forearm may be driven by shaft T2 using a transmission mechanism. This transmission mechanism may comprise a shoulder pulley that may be attached to shaft T2, a first elbow pulley that may be attached to the left forearm, and a band, belt, or cable that may transmit motion between the two pulleys. At least one of the two pulleys may feature a non-circular profile to provide a variable (position-dependent) transmission ratio. The wrist assembly with the end effector 3741 may be restricted in rotation by another transmission mechanism. This transmission mechanism may comprise a second elbow pulley that may be attached to the upper arm 3736, a wrist pulley that may be attached to the wrist assembly with the end effector 3741, and a band, belt, or cable that may connect the two pulleys. Again, at least one of the two pulleys may feature a non-circular profile to provide a variable (position-dependent) transmission ratio.

[0097] The transmission mechanism between shaft T2 and the left forearm 3738 may be configured such that when shaft T2 remains stationary and shaft T1 rotates, the wrist joint moves along a substantially straight line (parallel to a line passing through the axis of rotation of the coaxial drive shafts). This may be achieved via a non-circular contour of at least one of the two pulleys in the transmission mechanism. The transmission ratio of the transmission mechanism between the left upper arm 3736 and the wrist and end effector assembly 3741 may be configured such that the orientation of the wrist assembly with the end effector 3741 remains substantially constant during this movement. Again, this may be achieved via a non-circular contour of at least one of the two pulleys in the transmission mechanism.

[0098] The T1, T2, T3, and T4 shafts of the robotic drive unit can rotate to allow end effector 3740 and end effector 3741 to access various workstations.

[0099] For the entire robot arm to rotate, all drive shafts, i.e., T1, T2, T3, and T4, must move the same amount in the desired direction of arm rotation. For the right linkage to rotate independently, drive shafts T3 and T4 must move the same amount in the desired direction of arm rotation. Similarly, for the left linkage to rotate independently, drive shafts T1 and T2 must move the same amount in the desired direction of arm rotation.

[0100] The ability of the two linkages to rotate independently may enable the arm to transition between a configuration with stacked end effectors (see FIG. 38A), which may be advantageous when fast material exchange is required, and a configuration with angled end effectors (see FIG. 38B), which may be advantageous from a material contamination standpoint.

[0101] See also Figures 38D-I, in which the arms of Figures 38A-C are shown in different positions, orientations, and relative movements. For the end effector 3740 to extend from a retracted position to a workstation along a substantially linear path, shaft T4 may remain stationary and shaft T3 may rotate in a counterclockwise direction. For the end effector 3741 to extend from a retracted position to a workstation along a substantially linear path, shaft T2 may remain stationary and shaft T1 may rotate in a clockwise direction.

[0102] The above actions can be utilized to pick / place material from / to a workstation. A sequence of pick actions by one end effector followed by a place action by the other end effector can be used to quickly exchange material at a workstation (a quick exchange action). As an example, end effector 3740 can extend to a workstation, pick up material, and retract. End effector 3741, which may be carrying another material, can then extend to the same station, place material, and retract.

[0103] The ability of the two linkages to rotate independently (see FIG. 38C versus FIG. 38A, 38B) may further increase productivity (system throughput) since one of the linkages may rotate to the next workstation (or other destination) before the other linkage completes its operation at the current workstation (current location). For example, considering the above example of a quick swap operation, the right linkage 3714 may begin rotating to the next workstation (or other destination) before the left linkage 3716 completes its placement operation.

[0104] 39, in another exemplary embodiment, the transmission mechanism between the drive shaft T4 and the right forearm may again comprise a shoulder pulley that may be attached to the shaft T4, a first elbow pulley that may be attached to the right forearm, and a band, belt, or cable that may transmit motion between the two pulleys. However, unlike the embodiment of FIG. 37, FIG. 38, the two pulleys may feature a conventional circular profile with a transmission ratio that is not dependent on any fixed position. For example, the two pulleys may be of the same effective diameter, resulting in a 1:1 transmission ratio. The wrist assembly with the end effector 3740 may be restricted in rotation by another transmission mechanism, which may be the same as that of the previous embodiment.

[0105] Similarly, the transmission mechanism between the drive shaft T2 and the left forearm may again comprise a shoulder pulley that may be attached to the shaft T2, a first elbow pulley that may be attached to the left forearm, and a band, belt, or cable that may transmit motion between the two pulleys. However, as opposed to the embodiment of Figs. 37, 38, the two pulleys may feature a conventional circular profile, resulting in a non-stationary transmission ratio. For example, the two pulleys may be of the same effective diameter, resulting in a 1:1 transmission ratio. Alternatively, any suitable transmission ratio may be used. The wrist assembly with the end effector 3741 may be restricted in rotation by another transmission mechanism, which may be the same as that of the previous embodiment.

[0106] Because the transmission mechanism between the drive shaft T4 and the right forearm may have a non-fixed transmission ratio, for example a 1:1 transmission ratio, the shoulder pulley, and therefore the shoulder joint, may have a smaller diameter. A smaller shoulder joint provides more space for the left forearm, allowing for a larger length between the joints of the left forearm, which in turn may provide a longer extension of the end effector 3741.

[0107] For the entire robot arm to rotate, all drive shafts, i.e., T1, T2, T3, and T4, must move the same amount in the desired direction of arm rotation. For the right linkage to rotate independently, drive shafts T3 and T4 must move the same amount in the desired direction of arm rotation. Similarly, for the left linkage to rotate independently, drive shafts T1 and T2 must move the same amount in the desired direction of arm rotation. This is the same as in the embodiment of Figures 37 and 38.

[0108] The drive shafts T3 and T4 may rotate cooperatively in counterclockwise and clockwise directions, respectively, for the end effector 3740 to extend from a retracted position along a predetermined path, such as a straight radial path, to the workstation. An inverse equation of motion for the right linkage 3714 may be utilized to determine the orientation of the drive shafts T3 and T4 depending on the position of the right end effector 3740. The right end effector 3740 may be retracted by rotating the drive shafts T3 and T4 rearward in a similar manner.

[0109] In the special case where the left upper arm and left forearm have the same inter-joint length and the shoulder pulley and first elbow pulley have the same effective diameter, the end effector can be extended and retracted along a straight radial path by rotating drive shafts T3 and T4 the same amount in synchronous opposite directions.

[0110] The drive shafts T1 and T2 may rotate cooperatively in clockwise and counterclockwise directions, respectively, for the end effector 3741 to extend from a retracted position along a predetermined path, such as a straight radial path, to the workstation. The inverse equations of motion for the left linkage may be utilized to determine the orientation of the drive shafts T1 and T2 depending on the position of the left end effector 3741. The left end effector 3741 may be retracted by rotating the drive shafts T1 and T2 rearward in a similar manner.

[0111] The main functional differences between the embodiments of Fig. 37C and Fig. 39 can be summarized as follows: In the embodiment of Fig. 37C, each linkage of the arm can be contracted and extended by rotating a single drive shaft. This is possible because the transmission mechanism between the forearm and the corresponding drive shaft is configured to automatically control the angular position of the forearm depending on the angular position of the corresponding upper arm. This is not the case in the embodiment of Fig. 39, where coordinated rotation of the drive shafts driving the upper arm and the forearm is required. However, in the embodiment of Fig. 39, the shoulder pulley, and therefore the shoulder joint, can have a smaller diameter. A smaller shoulder joint provides more space for the left forearm and allows for a larger length between the joints of the left forearm, which in turn can provide a longer extension of the end effector 3741.

[0112] Although the above description of the embodiment shows the right upper arm attached to shaft T3 and the right forearm connected to shaft T4 (the innermost shaft), the right upper arm may be attached to shaft T4 (the innermost shaft) and the right forearm may be connected to shaft T3. Similarly, although the left upper arm is shown attached to shaft T1 (the outermost shaft) and the left forearm is shown connected to shaft T2, the left upper arm may be attached to shaft T2 and the left forearm may be connected to shaft T1 (the outermost shaft). Alternatively, the links of the arm linkage may be connected to the shafts of the drive unit in any suitable manner.

[0113] It should be noted that the features of the above exemplary embodiments may be combined, for example, the right linkage may be configured according to the embodiment of Fig. 37C and the left linkage may be configured according to the embodiment of Fig. 39, or the right linkage may be configured according to the embodiment of Fig. 39 and the left linkage may be configured according to the embodiment of Fig. 37C.

[0114] The arm may also be designed as a mirror image of the exemplary embodiment described above, i.e., the mechanisms described above as part of the right linkage 3714 may be utilized in the left linkage of the arm, and vice versa.

[0115] Alternatively, the features of the exemplary embodiments described above may be utilized in any suitable mechanism and combination.

[0116] It should be understood that the foregoing description is merely illustrative. Various alternatives and modifications may be devised by those skilled in the art. For example, the features recited in the various dependent claims may be combined with each other in any suitable combination(s). In addition, features from different embodiments described above may be selectively combined into new embodiments. Therefore, the foregoing description is intended to embrace all such alternatives, modifications, and variations that fall within the scope of the appended claims.

Claims

1. a drive section having a motor and a plurality of coaxial drive shafts; an arm assembly connected to the coaxial drive shaft, the arm assembly having a first arm and a second arm; a controller configured to control the motor; An apparatus comprising: the first arm includes a first upper arm connected to a first one of the coaxial drive shafts, a first forearm connected to the first upper arm, a first end effector connected to the first forearm, and a first transmission for rotating the first end effector on the first forearm; the first transmission comprises at least one non-circular pulley; the first end effector comprises a first substrate holding area; the first upper arm and the first forearm have unequal effective lengths; the second arm includes a second upper arm connected to a second one of the coaxial drive shafts, a second forearm connected to the second upper arm, a second end effector connected to the second forearm, and a second transmission for rotating the second end effector on the second forearm; the second end effector comprises a second substrate holding area; the second upper arm and the second forearm have substantially equal effective lengths; the first end effector has a substantially bent shape and the second end effector has a substantially straight shape; the controller is configured to cause the actuator to extend and retract the arm to move the upper substrate and the lower substrate over the substrate holding area such that the arm assembly and the upper substrate do not move above the lower substrate. Device.

2. The apparatus of claim 1 , wherein the controller is configured to maintain the arm having the upper substrate in a stationary position relative to the drive while the controller extends and retracts the other arm.

3. The apparatus of claim 2 , wherein the controller is configured to maintain the arm having the lower substrate in a stationary position relative to the drive while the controller extends and retracts the other arm.

4. The apparatus of claim 1 , wherein the second transmission comprises a pulley that is not a non-circular pulley.

5. The apparatus of claim 1 , wherein the effective length of the first upper arm is greater than the effective length of the first forearm.

6. 2. The apparatus of claim 1, wherein in a retracted position of the first and second arms, the second end effector is disposed partially over the first end effector, the second forearm is disposed partially over the first forearm and the first end effector, and the first end effector is disposed partially over a second upper arm.

7. 2. The apparatus of claim 1, wherein the controller, the first and second arm structures, and the transmission are configured to limit movement of the first and second arms relative to each other to prevent movement of the arm assembly and upper substrate above the lower substrate for all locations of the end effector.

8. extending and retracting a first arm of the arm assembly between a retracted position and an extended position; extending and retracting a second arm of the arm assembly between a retracted position and an extended position; controlling the extension and retraction of the first and second arms such that the arm assemblies and upper base plate do not move above the lower base plate during the extension and retraction of the first and second arms between their respective retracted and extended positions; A method comprising: the first arm is connected to a first coaxial drive shaft of a robot drive; the first arm includes a first end effector having a first substrate holding area having the lower substrate thereon; the second arm is connected to a second coaxial drive shaft of the robot drive; the second arm includes a second end effector having a second substrate holding area having the upper substrate thereon; the first end effector has a substantially bent shape and the second end effector has a substantially straight shape. method.

9. the first arm comprises a first upper arm connected to the first coaxial drive shaft, a first forearm connected to the first upper arm, the first end effector connected to the first forearm, and a first transmission for rotating the first end effector on the first forearm; the first transmission comprises at least one non-circular pulley; the first upper arm and the first forearm have unequal effective lengths; 9. The method of claim 8, wherein the first transmission rotates the first end effector on the first forearm when the first upper arm is rotated by the first coaxial drive shaft.

10. the second arm comprises a second upper arm connected to the second coaxial drive shaft, a second forearm connected to the second upper arm, the second end effector connected to the second forearm, and a second transmission for rotating the second end effector on the second forearm; the second upper arm and the second forearm have substantially equal effective lengths; the method includes the second transmission rotating the second end effector on the second forearm when the second upper arm is rotated by the second coaxial drive shaft; The method of claim 9 , wherein the second transmission comprises a pulley that is not a non-circular pulley.

11. 9. The method of claim 8, wherein the controlling the extension and retraction of the first and second arms includes the controller maintaining the second arm in a stationary position relative to the robot drive while the controller extends and retracts the first arm.

12. 12. The method of claim 11, wherein the controlling the extension and retraction of the first and second arms includes the controller maintaining the first arm in a stationary position relative to the robotic drive while the controller extends and retracts the second arm.

13. the first arm comprises a first upper arm and a first forearm; an effective length of the first upper arm is greater than an effective length of the first forearm; the second arm includes a second upper arm and a second forearm; The method of claim 8 , wherein an effective length of the second upper arm is greater than an effective length of the second forearm.

14. 14. The method of claim 13, wherein in the retracted position of the first and second arms, the second end effector is disposed partially over the first end effector, the second forearm is disposed partially over the first forearm and the first end effector, and the first end effector is disposed partially over a second upper arm.

15. 9. The method of claim 8, wherein the control of the extension and contraction of the first and second arms includes limiting movement of the first and second arms relative to one another such that a controller, structure of the first and second arms, and transmissions within the arms prevent the movement of the arm assembly and upper substrate above the lower substrate for all locations of the end effector.

16. A non-transitory program storage device readable by a machine, tangibly embodying a program of instructions executable by said machine to perform operations, said operations including: moving a first arm of an arm assembly with a robotic drive to extend and retract the first arm between a retracted position and an extended position; moving a second arm of the arm assembly with the robotic drive to extend and retract the second arm between a retracted position and an extended position; controlling the extension and contraction of the first and second arms such that the arm assembly and upper base plate do not move above the lower base plate; Including, the first arm is connected to a first coaxial drive shaft of the robot drive; the first arm includes a first end effector having a first substrate holding area having the lower substrate thereon; the second arm is connected to a second coaxial drive shaft of the robot drive; the second arm includes a second end effector having a second substrate holding area having the upper substrate thereon; the first end effector has a substantially bent shape and the second end effector has a substantially straight shape. A non-transitory program storage device.

17. the first arm comprises a first upper arm connected to the first coaxial drive shaft, a first forearm connected to the first upper arm, the first end effector connected to the first forearm, and a first transmission for rotating the first end effector on the first forearm; the first transmission comprises at least one non-circular pulley; the first upper arm and the first forearm have unequal effective lengths; 17. The non-transitory program storage device of claim 16, wherein the operations include causing the first transmission to rotate the first end effector on the first forearm when the first upper arm is rotated by the first coaxial drive shaft.

18. the second arm comprises a second upper arm connected to the second coaxial drive shaft, a second forearm connected to the second upper arm, the second end effector connected to the second forearm, and a second transmission for rotating the second end effector on the second forearm; the second upper arm and the second forearm have substantially equal effective lengths; the actuation includes causing the second transmission to rotate the second end effector on the second forearm when the second upper arm is rotated by the second coaxial drive shaft; 20. The non-transitory program storage device of claim 17, wherein the second transmission comprises a pulley that is not a non-circular pulley.

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