Photoelectric conversion device, photoelectric conversion system, and mobile body

Abstract

To enable dynamic range expansion without causing a delay in a reset operation.SOLUTION: One aspect of a photoelectric conversion device of the present invention includes: a photoelectric conversion unit; an amplification transistor having an input node; a first transfer transistor; a second transfer transistor arranged between the first transfer transistor and the input node; and a reset transistor connected to the input node. When transferring a charge from the photoelectric conversion unit to the input node, a capacitance value of the input node is switched by controlling on or off of the second transfer transistor.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a photoelectric conversion device, a photoelectric conversion system, and a moving object. [Background technology]

[0002] Patent Document 1 discloses a configuration in which a photoelectric conversion device has a capacitance-adding transistor, one end of which is connected to an input node of an amplifying transistor and the other end of which is connected to a reset transistor in order to expand the dynamic range. One end of the reset transistor is connected to the capacitance-adding transistor, and the other end is supplied with a power supply voltage (VDD). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] US Patent Publication No. 2008 / 173909 Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the configuration described in Patent Document 1, when resetting the potential of the input node, it is necessary to turn on the gate of the transistor for adding capacitance and the gate of the reset transistor. In the configuration described in Patent Document 1, multiple gates are arranged between the other end of the reset transistor and the input node, and the gate length is likely to be longer than when one gate is arranged. Therefore, resistance is generated by the gate, and there is a possibility that reset performance will be deteriorated, such as the input node not being reset to a predetermined potential. [Means for solving the problem]

[0005] One aspect of a photoelectric conversion device according to the present invention includes a first photoelectric conversion unit, an amplifying transistor having an input node to which a charge generated in the first photoelectric conversion unit is input, a first transfer transistor that controls transfer of the charge from the first photoelectric conversion unit, a second transfer transistor disposed between the first transfer transistor and the input node, and a reset transistor connected to the input node. Each of the plurality of unit cells includes a plurality of unit cells arranged in a plurality of rows and a plurality of columns. a first readout operation in which the amplifying transistor outputs a signal based on the potential of the input node with the second transfer transistor in an off state after the charge generated in the first photoelectric conversion unit is input to the input node, and a second readout operation in which the amplifying transistor outputs a signal based on the potential of the input node with the second transfer transistor in an on state after the charge generated in the first photoelectric conversion unit is input to the input node, the first readout operation is performed in a first mode for capturing an image of a subject with a first luminance, and the second readout operation is performed in a second mode for capturing an image of a subject with a second luminance higher than the first luminance. the first read operation in reading out the unit cells of a predetermined row among the plurality of rows includes a first period during which the first transfer transistor and the second transfer transistor are both off, a second period that is a period after the first period during which the first transfer transistor is on while the second transfer transistor is off, a third period that is a period after the second period during which the second transfer transistor is on while the first transfer transistor is on, a fourth period that is a period after the third period during which the first transfer transistor is off while the second transfer transistor is on, and a fifth period that is a period after the fourth period during which the second transfer transistor is off while the first transfer transistor is off. .

[0006] One aspect of a photoelectric conversion device according to the present invention includes a first photoelectric conversion unit, an amplifying transistor having an input node to which a charge generated in the first photoelectric conversion unit is input, a reset transistor connected to the input node, and a reset transistor connected to the first photoelectric conversion unit. Controlling the transfer of charge from No. 1 transfer A transistor, a second photoelectric conversion unit, and the second photoelectric conversion unit Controlling the transfer of charge from Second transfer a transistor and the first transfer Between the transistor and the input node, the second transfer a third transistor disposed between the input node and the transfer A transistor, Each of the plurality of unit cells includes a plurality of unit cells arranged in a plurality of rows and a plurality of columns. and after a charge generated in at least one of the first photoelectric conversion unit and the second photoelectric conversion unit is input to the input node, transfera first read operation in which the amplifying transistor outputs a signal based on the potential of the input node while the transistor is in an off state; and transfer and a second read operation in which the amplifying transistor outputs a signal based on the potential of the input node when the transistor is in an on state, the first read operation being performed in a first mode for imaging an object having a first luminance, and the second read operation being performed in a second mode for imaging an object having a second luminance higher than the first luminance. the first read operation in reading out the unit cells of a predetermined row among the plurality of rows includes a first period during which the first transfer transistor and the third transfer transistor are both off, a second period that is a period after the first period during which the first transfer transistor is on while the third transfer transistor is off, a third period that is a period after the second period during which the third transfer transistor is on while the first transfer transistor is on, a fourth period that is a period after the third period during which the first transfer transistor is off while the third transfer transistor is on, and a fifth period that is a period after the fourth period during which the third transfer transistor is off while the first transfer transistor is off. . Effect of the Invention

[0007] According to the configuration of the present invention, it is possible to suppress degradation of the reset performance of the input node while expanding the dynamic range of the photoelectric conversion device. [Brief description of the drawings]

[0008] [Figure 1] 1 is a block diagram of a photoelectric conversion device according to a first embodiment. [Diagram 2] FIG. 2 is a diagram showing a circuit configuration of a pixel according to the first embodiment. [Diagram 3] 2A and 2B are schematic diagrams showing a cross-sectional view and potentials of a pixel according to the first embodiment. [Figure 4] FIG. 2 is a plan view of a pixel according to the first embodiment. [Diagram 5] FIG. 4 is a timing chart for explaining a read operation according to the first embodiment. [Figure 6] 5 is a conceptual diagram of potentials in a read operation according to the first embodiment. FIG. [Figure 7] FIG. 11 is a timing diagram illustrating a read operation according to the second embodiment. [Figure 8] FIG. 13 is a plan view of a pixel according to a third embodiment. [Figure 9] FIG. 11 is a diagram showing a circuit configuration of a pixel according to a third embodiment. [Figure 10]FIG. 13 is an exploded perspective view of a photoelectric conversion device according to a fourth embodiment. [Figure 11] FIG. 13 is a plan view of a pixel of a photoelectric conversion device according to a fourth embodiment. [Figure 12] FIG. 13 is a block diagram of a photoelectric conversion system according to a fifth embodiment. [Figure 13] FIG. 13 is a schematic diagram of a photoelectric conversion system and a moving object according to a sixth embodiment. [Figure 14] FIG. 13 is a flowchart showing the operation of a photoelectric conversion system according to a sixth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] The embodiments shown below are intended to embody the technical ideas of the present invention, and are not intended to limit the present invention. The sizes and positional relationships of the components shown in each drawing may be exaggerated to clarify the explanation. In the following explanation, the same components may be designated by the same reference numerals, and the explanation may be omitted.

[0010] In the following description, the signal carriers (signal charges) are electrons. A first conductivity type semiconductor region in which carriers of a first polarity are the majority carriers is an N-type semiconductor region, and a second conductivity type semiconductor region in which carriers of a second polarity are the majority carriers is a P-type semiconductor region. The present invention also works if the signal carriers are holes. In this case, the first conductivity type semiconductor region is a P-type semiconductor region, and the second conductivity type semiconductor region is an N-type semiconductor region.

[0011] In the following description, elements and circuits having similar functions are given the same reference numerals, and may be distinguished by adding different alphabetical suffixes to the end. When it is not necessary to distinguish between the two, the suffixes a, b, etc. will be omitted and the common parts will be described.

[0012] In the following explanation, unless otherwise specified, the transistors constituting a pixel are assumed to be N-type MOS transistors. The on state of a transistor indicates that a high-level (H-level) control signal is input to the N-type MOS transistor, causing the N-type MOS transistor to be conductive. The off state of a transistor indicates that a low-level (L-level) control signal is input to the N-type MOS transistor, causing the N-type MOS transistor to be non-conductive.

[0013] It should be noted that P-type MOS transistors may be used instead of N-type MOS transistors. In that case, it is possible to apply appropriate modifications such as reversing the potential supplied to the P-type MOS transistors, such as control signals, from that of the N-type. Also, although the connection relationship between the circuit elements is described in the explanation of each embodiment, it is possible to make appropriate modifications such as inserting another element (switch, buffer, etc.) between them.

[0014] (First embodiment) FIG. 1 is a block diagram showing a schematic configuration of a photoelectric conversion device according to a first embodiment. The photoelectric conversion device has a unit cell that detects light and outputs a signal. The photoelectric conversion device according to this embodiment is a photoelectric conversion device capable of imaging, and the unit cell is a pixel. The photoelectric conversion device according to this embodiment can obtain an effect even if it is a device that does not perform imaging. Examples of devices that do not perform imaging include a distance measurement sensor and a photometry sensor. A distance measurement sensor is a sensor that is typically used to generate distance information to a subject, such as a TOF (Time Of Flight) sensor. A photometry sensor is a sensor that is typically used to detect the brightness of a subject.

[0015] The photoelectric conversion device in FIG. 1 includes a pixel array unit 101, a vertical scanning circuit 102, a readout circuit 103, a horizontal scanning circuit 104, an output circuit 105, and a control circuit 106.

[0016] The pixel array section 101 includes a plurality of pixels 107 arranged in row and column directions. In addition to pixels that detect imaging signals, the pixel array section 101 may also include light-shielded optical black pixels and dummy pixels that do not output signals.

[0017] The vertical scanning circuit 102 supplies control signals for switching the transistors in the pixels 107 on (conducting state) or off (non-conducting state). Control signal lines 108 for supplying the control signals are arranged corresponding to each pixel row. A plurality of pixels 107 arranged in one pixel row are connected to one control signal line 108.

[0018] The vertical scanning circuit 102 receives a signal from a control circuit 106 and shares the control signal with a plurality of pixels 107 arranged in each pixel row.

[0019] The readout circuit 103 performs signal processing such as amplification and AD conversion on the pixel signals output to the vertical output line 208. The readout circuit 103 performs correlated double sampling and other processing based on the signals at the time of resetting the pixels 107 and the signals at the time of photoelectric conversion.

[0020] The horizontal scanning circuit 104 supplies a control signal to the readout circuit 103. The horizontal scanning circuit 104 supplies the control signal to the readout circuit 103. The pixel signal processed by the readout circuit 103 is transferred to the output circuit 105 by the control signal from the horizontal scanning circuit 104. The output circuit 105 outputs the signal to a signal processing unit outside the photoelectric conversion device. The control circuit 106 is a circuit for controlling each circuit, such as a timing generator. The control circuit 106 supplies control signals for controlling the operations and timings of the vertical scanning circuit 102, the readout circuit 103, the horizontal scanning circuit 104, and the output circuit 105. At least some of the control signals to the vertical scanning circuit 102, the readout circuit 103, the horizontal scanning circuit 104, and the output circuit 105 may be supplied from outside the photoelectric conversion device, rather than from the control circuit 106.

[0021] Fig. 2 is a schematic circuit diagram of a pixel 107 of the photoelectric conversion device in this embodiment. Fig. 2 shows the configuration of one pixel 107, and the other pixels are omitted.

[0022] 2, the pixel 107 includes a photoelectric conversion unit 201, a first transfer transistor 202, a second transfer transistor 203, an amplification transistor 206, a floating diffusion (FD) unit 204, a reset transistor 205, and a selection transistor 207. The FD unit 204 is an input node of the amplification transistor 206. Each transistor is configured of, for example, a MOSFET, and has a gate as a control electrode between the drain and source in a planar view.

[0023] The photoelectric conversion unit 201 is, for example, a photodiode, but any configuration such as a photoelectric conversion film made of an organic material or a photogate can be applied. The amplification transistor 206 outputs a signal based on the potential of the input node to the selection transistor 207. One end of the amplification transistor 206 is connected to, for example, a power supply voltage VDD. The amplification transistor 206 is a part of a source follower circuit, and the gate of the amplification transistor 206 is the input node. The photoelectric conversion unit 201 and the input node are connected via a first transfer transistor 202 and a second transfer transistor 203. The first transfer transistor 202 controls the transfer of charges from the photoelectric conversion unit 201. One end of the second transfer transistor 203 is connected to the first transfer transistor 202, and the other end is connected to the input node. The second transfer transistor 203 controls the transfer of charges from the photoelectric conversion unit 201 and also controls the capacitance value of the input node. The selection transistor 207 selectively connects between the amplification transistor 206 and a vertical output line 208. Then, the selection transistor 207 outputs the signal from the amplification transistor 206 to a vertical output line 208 in synchronization with the timing of a control signal from the vertical scanning circuit. The reset transistor 205 is connected to the input node, and can set (reset) the input node to a reset potential.

[0024] When the first transfer transistor 202 and the second transfer transistor 203 are turned on and charge is transferred from the photoelectric conversion unit 201 to the FD unit 204 , a pixel signal voltage corresponding to the amount of charge in the FD unit 204 is output to the source of the amplification transistor 206 .

[0025] Here, the control of the capacitance value of the FD section 204 by the second transfer transistor 203 will be described with reference to Fig. 3. Fig. 3(a) is a schematic cross-sectional view passing through the photoelectric conversion section 201, the first transfer transistor 202, and the second transfer transistor 203. Fig. 3(b) is a conceptual diagram of the potential when the first transfer transistor 202 and the second transfer transistor 203 are off. Fig. 3(c) is a conceptual diagram of the potential when the first transfer transistor 202 is off and the second transfer transistor 203 is on.

[0026] 3(a), an N-type semiconductor region (first semiconductor region) constituting the photoelectric conversion unit 201, an N-type semiconductor region (second semiconductor region) 210 constituting a part of the FD unit, and an N-type semiconductor region 211 are arranged on the semiconductor substrate. The N-type semiconductor region 210 is formed between the gate of the second transfer transistor 203 and the gate of the reset transistor in a planar view, and constitutes a part of the FD unit. The N-type semiconductor region 211 is formed between the gate of the first transfer transistor 202 and the gate of the second transfer transistor 203 in a planar view. As can be seen from FIG. 3(b) and FIG. 3(c), the capacitance value of the FD section 204 when the second transfer transistor 203 is turned on is larger than the capacitance value of the FD section 204 when the second transfer transistor 203 is turned off. By turning on the second transfer transistor 203, a channel is formed under the gate of the second transfer transistor 203, the N-type semiconductor region 211 and the N-type semiconductor region 210 are electrically connected, and the capacitance value of the FD section 204 increases. Therefore, if the second transfer transistor 203 is kept on when charges are transferred from the photoelectric conversion section 201 to the FD section 204, the amount of charges that can be held in the FD section 204 increases. That is, the capacitance value of the FD section 204 increases. Therefore, the pixel signal voltage output from the amplification transistor 206 decreases, and the dynamic range can be expanded. On the other hand, if the second transfer transistor 203 is kept off when charges are transferred from the photoelectric conversion section 201 to the FD section 204, no capacitance is added to the FD section 204. That is, the capacitance of the FD section 204 does not change from the capacitance value that the FD section 204 itself has. Therefore, the amount of charge that can be held in the FD section 204 is small. That is, the capacitance value of the FD section 204 becomes small. Therefore, the pixel signal voltage output from the amplification transistor 206 becomes large. In this case, the amount of voltage change per charge in the FD section 204 (charge-voltage conversion efficiency) can be increased. High charge-voltage conversion efficiency can also be said to be high sensitivity. Therefore, by controlling the on / off of the second transfer transistor 203, the capacitance value of the FD section 204 can be changed, and the sensitivity can be switched.

[0027] 3(b) and 3(c), the capacitance of the FD section 204 is smaller than the capacitance of the photoelectric conversion section 201. According to this embodiment, the second transfer transistor can add capacitance to the FD section. This makes it possible to increase the capacitance of the FD section 204 itself and expand the dynamic range.

[0028] FIG. 4 is a schematic plan view of a pixel 107 according to this embodiment. The same reference numerals are attached to parts corresponding to the circuit in FIG. 2, and the description of the configuration and function already described may be omitted. The cross-sectional view in FIG. 3(a) corresponds to the A-A' cross-sectional view in FIG. 4. FIG. 4 shows the photoelectric conversion unit 201, the gates of each transistor included in the pixel 107, and contacts for conducting wiring. The photoelectric conversion unit 201 and the source and drain of each transistor are formed inside a semiconductor substrate such as silicon (Si). In addition, the gate of each transistor is formed on the first surface side of the semiconductor substrate.

[0029] 4, the photoelectric conversion unit 201, the first transfer transistor 202, the second transfer transistor 203, the FD unit 204, and the reset transistor 205 are connected in series. This makes it possible to expand the dynamic range of the photoelectric conversion device while suppressing degradation of the reset performance of the input node.

[0030] As a comparative example, a case where an FD section, a control transistor for controlling the capacitance addition to the FD section, and a reset transistor are arranged in series will be described. One end of the reset transistor is connected to the control transistor, and the other end of the reset transistor is connected to a power supply voltage VDD. In the comparative example, when resetting the FD section, the potential of the power supply voltage VDD is supplied to the FD section 204 via the gate of the reset transistor and the gate of the control transistor. In this case, the length in the direction connecting the source and drain of the transistor (gate length) is likely to be longer than the case of only the gate of the reset transistor. If the gate length is longer, the channel resistance increases, and therefore there is a possibility that the reset performance may be degraded. The degradation of the reset performance means, for example, that the stabilization time of the reset level is extended, and that the reset potential of each pixel is likely to vary. Although there is a possibility that the degradation of the reset performance can be prevented by shortening the gate length of the reset transistor and the gate length of the control transistor, there is a possibility that the capacitance addition to the FD section cannot be controlled. Therefore, in the comparative example, it is generally difficult to shorten the gate length, and there is a possibility that the reset performance may be degraded due to the channel resistance.

[0031] In contrast, in this embodiment, as described above, the FD unit 204 and the reset transistor 205 are connected in series without going through the second transfer transistor 203 that controls the capacitance value of the FD unit 204. For example, one of the source and drain of the reset transistor constitutes a part of the FD unit 204. Therefore, compared to the comparative example, it is possible to reduce the channel resistance when the reset potential is supplied, and it is possible to suppress a decrease in the reset performance of the input node.

[0032] 5(a) and 5(b) are timing diagrams showing control signals for each transistor in the pixel 107 of FIG. 2. The horizontal axis of the timing diagram is time. In FIG. 5(a) and FIG. 5(b), the potential states of each control signal pSEL, pRES, pTX1, and pTX2 shown in FIG. 2 are shown. pSEL is a signal for controlling a selection transistor, pRES is a signal for controlling a reset transistor, pTX1 is a signal for controlling a first transfer transistor, and pTX2 is a signal for controlling a second transfer transistor. FIG. 5(a) shows the timing when reading out with a low FD capacitance, and FIG. 5(b) shows the timing when reading out with a high FD capacitance. In addition, FIG. 6(a) to (e) are potential diagrams at each timing of FIG. 5(a), and FIG. 6(f) to (h) are potential diagrams at each timing of FIG. 5(b).

[0033] First, the driving when reading out with a low FD capacity will be described with reference to FIG. 5(a) and FIGS. 6(a) to (e).

[0034] First, at time t1, pSEL is set to Hi level (hereinafter Hi) to turn on the selection transistor of the pixel in the readout row. At time t2, pRES is set from Hi to Low level (hereinafter Lo) to switch the reset transistor from on to off. At this time, the second transfer transistor is off. With the first transfer transistor and the second transfer transistor in the off state, the photoelectric conversion unit accumulates signal charge. The potential diagram in this state is shown in FIG. 6(a). In this state, the FD unit is at the reset level at the time of low FD capacitance, and the amplification transistor 206 reads out the potential and outputs it to the vertical signal line as a reset signal (N signal). The period up to time t3 can be said to be the accumulation period of charge in the photoelectric conversion unit.

[0035] At time t3, pTX1 is set to Hi to turn on the first transfer transistor. At time t3, the readout operation from the photoelectric conversion unit to the FD unit begins. The potential diagram in this state is shown in Figure 6(b). As shown in Figure 6(b), the charge accumulated in the photoelectric conversion unit moves to under the gate of the first transfer transistor.

[0036] With the first transfer transistor still on, at time t4, pTX2 is set to Hi to turn on the second transfer transistor. The potential diagram in this state is shown in Figure 6(c). As shown in Figure 6(c), the charge accumulated in the photoelectric conversion section is transferred to the FD section to which capacitance is added by turning on the first transfer transistor and the second transfer transistor.

[0037] At time t5, pTX1 is changed from Hi to Lo to turn off the first transfer transistor. The potential diagram in this state is shown in FIG. 6(d). As shown in FIG. 6(d), a potential barrier is formed between the photoelectric conversion section and the FD section. As a result, the signal charge is transferred to the FD section to which capacitance has been added by turning on the second transfer transistor.

[0038] At time t6, pTX2 is changed from Hi to Lo to turn off the second transfer transistor. The potential barrier diagram in this state is shown in Fig. 6(e). As shown in Fig. 6(e), the potential under the gate of the second transfer transistor is higher than in Fig. 6(d), and the signal charge is held only in the FD section to which no capacitance is added by the second transfer transistor.

[0039] After that, the amplifying transistor outputs a signal (S signal) according to the potential of the FD section.

[0040] In FIG. 5(a), the timings of turning on and off the first and second transfer transistors are shifted. Specifically, the second transfer transistor is turned on after the first transfer transistor is turned on, and the second transfer transistor is turned off after the first transfer transistor is turned off. This makes it easier to suppress the signal charge accumulated in the photoelectric conversion unit from remaining in the photoelectric conversion unit even if there is a shift in the timing of the on / off control of the first transfer transistor and the second transfer transistor. The on / off timings of the first transfer transistor and the second transfer transistor are not limited to the timings shown in FIG. 5(a). For example, the on / off timings of the first transfer transistor and the second transfer transistor may be the same. In addition, the first transfer transistor may be turned on after the second transfer transistor is turned on, and the second transfer transistor may be turned off after the first transfer transistor is turned off.

[0041] Next, the driving when reading out with a high FD capacity will be described with reference to FIG. 5(b) and FIGS. 6(f) to (h).

[0042] At time t1, pSEL is set to Hi to turn on the selection transistor of the pixel in the readout row. At time t2, pRES is set from Hi to Lo to switch the reset transistor from on to off. At this time, the second transfer transistor is on. The potential diagram in this state is shown in FIG. 6(f). As shown in FIG. 6(f), by turning on the second transfer transistor, a capacitance is added to the FD section, and the FD capacitance is larger than that in the case of FIG. 6(a). A reset operation is performed in this state with capacitance added to the FD section. In this state, the FD is at a reset level at the time of high FD capacitance, and the signal is read out and used as the N signal. When reading out with a high FD capacitance, for example, it is assumed that the amount of incident light on the photoelectric conversion section is greater than that when reading out with a low FD capacitance. Therefore, the signal charge accumulated in the photoelectric conversion section is greater than that when reading out with a low FD capacitance. For example, the amount of signal charge accumulated in the photoelectric conversion section is greater than that of an FD capacitance to which no capacitance is added.

[0043] At time t3, pTX1 is set to Hi to turn on the first transfer transistor. At this time, pTX2 of the second transfer transistor is Hi and on. The potential diagram in this state is shown in Figure 6(g). As shown in Figure 6(g), the signal charge accumulated in the photoelectric conversion section is transferred to the FD section to which a capacitance is added.

[0044] At time t4, pTX1 is changed from Hi to Lo to turn off the first transfer transistor. At this time, the second transfer transistor remains on as pTX2 maintains the Hi state. The potential diagram in this state is shown in Figure 6(h). As shown in Figure 6(h), a potential barrier is formed between the photoelectric conversion unit and the FD unit while capacitance is added to the FD unit.

[0045] Thereafter, while the second transfer transistor is kept on, the amplifying transistor outputs a signal (S signal) according to the potential of the FD section.

[0046] In FIG. 5(b), the second transfer transistor is maintained in an on state throughout the accumulation operation period and the signal readout operation period of the photoelectric conversion unit, but this is not limited thereto. The second transfer transistor only needs to be on during at least the period during which the N signal is read out and the period during which the S signal is read out. For example, after the N signal is read out, the second transfer transistor may be turned off at time t2, and turned on at the same timing as the first transfer transistor is turned on at time t3.

[0047] According to the driving as shown in FIG. 5(a) and FIG. 5(b), the FD capacitance can be changed according to the amount of light incident on the photoelectric conversion unit. For example, when the amount of light incident on the photoelectric conversion unit is a first amount of light (when imaging an object with low brightness), a low FD capacitance read drive is adopted in which the second transfer transistor is turned off and the amplifying transistor outputs a signal. On the other hand, when the amount of light incident on the photoelectric conversion unit is a second amount of light that is greater than the first amount of light (when imaging an object with high brightness), a high FD capacitance read drive is adopted in which the second transfer transistor is turned on and the amplifying transistor outputs a signal. When the amount of signal charge is small, a low noise and high sensitivity signal can be read out compared to the case of a high FD capacity by adopting a low FD capacity read drive. On the other hand, when the amount of signal charge is large, a high FD capacity read drive can be adopted in which a highly saturated signal can be read out compared to the case of a low FD capacity. Therefore, the dynamic range of the photoelectric conversion device can be expanded.

[0048] 2, the pixel 107 includes a selection transistor 207, but the selection transistor 207 is not an essential component. In the case where the pixel 107 does not include the selection transistor 207, the amplification transistor 206 outputs a signal based on the potential of the FD section 204 to the vertical output line 208 without passing through the selection transistor 207.

[0049] Second embodiment Next, a photoelectric conversion device according to a second embodiment will be described with reference to Fig. 7. In the following description, differences from the first embodiment will be mainly described.

[0050] In this embodiment, the drive timing in the readout drive of the high FD capacitance is different. Specifically, in the pixel row (first pixel row) where the selection transistor is on, the second transfer transistor is turned on, and in the pixel row (second pixel row) where the selection transistor is off, the second transfer transistor is turned off. The timing of turning on and off the second transfer transistor coincides with the timing of turning on and off the selection transistor. Specifically, the selection transistor and the second transfer transistor are turned on at time t1, and the selection transistor and the second transfer transistor are turned off at time t5.

[0051] According to this embodiment, it is possible to expand the dynamic range of the photoelectric conversion device while suppressing punch-through from the photoelectric conversion section to the FD section in pixels arranged in a pixel row in which the selection transistor is turned off.

[0052] (Third embodiment) Next, a photoelectric conversion device according to a third embodiment will be described with reference to Fig. 8 and Fig. 9. Fig. 8 is a plan view of a pixel in this embodiment, and Fig. 9 is a circuit diagram of the pixel in this embodiment. In the following description, differences from the first embodiment will be mainly described.

[0053] In this embodiment, the first photoelectric conversion unit 201a and the second photoelectric conversion unit 201b share the second transfer transistor 203, the FD unit 204, the reset transistor 205, the amplification transistor 206, and the selection transistor 207. The first photoelectric conversion unit 201a and the second transfer transistor 203 are connected via a first transfer transistor 202a (first first transfer transistor). The second photoelectric conversion unit 201b and the second transfer transistor 203 are connected via a first transfer transistor 202b (second first transfer transistor).

[0054] According to this embodiment, the gate of one second transfer transistor 203 is in contact with the FD section 204. Therefore, compared to the case where multiple first transfer transistors are in contact with the FD section, it is possible to reduce the gate capacitance in contact with the FD, and therefore the FD capacitance.

[0055] (Fourth embodiment) Next, a photoelectric conversion device according to a fourth embodiment will be described with reference to Figs. 10 and 11. Fig. 10 is an exploded perspective view of a photoelectric conversion device 1100. Fig. 10 is a plan view of a pixel in this embodiment. Fig. 11(a) is a plan view seen from a surface (first surface) 1110A of a semiconductor substrate on which transistors are formed. Fig. 11(b) is a plan view seen from a surface (second surface) 1110B opposite to the first surface of the semiconductor substrate. Below, differences from the third embodiment will be described.

[0056] The photoelectric conversion device according to this embodiment is a so-called back-illuminated type photoelectric conversion device in which light is incident from the second surface 1110B side. As shown in FIG. 10, a pixel array section 101 is provided on one semiconductor substrate 1110. A control section 1121 and a signal processing section 1122 are provided on another semiconductor substrate 1120. At least a part of the orthogonal projections of the control section 1121 and the signal processing section 1122 onto the semiconductor substrate 1110 overlaps with the pixel array section 101. The photoelectric conversion device 1100 according to this embodiment may further include a semiconductor substrate including another processing circuit, or three or more semiconductor substrates may be stacked.

[0057] The control unit 1121 may include a vertical scanning circuit that supplies control signals to transistors included in the pixels, and a power supply circuit. The control unit 1121 may also include a timing generation circuit for driving the photoelectric conversion device, a reference signal supply circuit that supplies a reference signal to the conversion circuit, and an amplification circuit or a horizontal scanning circuit for sequentially reading out signals from the conversion circuit. For example, the control unit 1121 includes the vertical scanning circuit 102, horizontal scanning circuit 104, and control circuit 106 of the photoelectric conversion device in FIG. 1.

[0058] The signal processing unit 1122 processes an electric signal based on a signal charge generated in the pixel region. The signal processing unit 1122 may include a noise elimination circuit, an amplification circuit, a conversion circuit, and an image signal processing circuit. The noise elimination circuit is, for example, a correlated double sampling (CDS) circuit. The amplification circuit is, for example, a column amplifier circuit. The conversion circuit is, for example, an analog-to-digital conversion (ADC) circuit composed of a comparator and a counter. The image signal processing circuit includes, for example, a memory and a processor, and generates image data from a digital signal that has been converted from analog to digital, and performs image processing on the image data. For example, the signal processing unit 1122 includes the readout circuit 103 in FIG. 1.

[0059] 11(a) and 11(b) show the optical center 1001 of the microlens in plan view. The unit cell includes two photoelectric conversion units. The unit cell described here is defined as a unit consisting of a photoelectric conversion unit corresponding to one optical center and a readout circuit from the photoelectric conversion unit. For example, in FIG. 11, the unit cell is composed of two photoelectric conversion units overlapping the microlens in plan view, a first transfer transistor that controls the transfer of charges from each photoelectric conversion unit, a second transfer transistor, an amplification transistor, and a reset transistor.

[0060] As shown in FIG. 11(a), the FD section 204 connected to the second transfer transistor 203 is disposed in a position farthest from the optical center 1001 in the unit cell. For example, the FD section 204 is formed at a corner in the unit cell. As described above, in the case of a back-illuminated photoelectric conversion device, light is incident from the back surface. Therefore, when the FD section 204 is close to the optical center 1001, the probability that the signal charge photoelectrically converted in the photoelectric conversion section flows into the FD section increases, which may cause a decrease in sensitivity or asymmetry in the incident angle characteristic of the sensitivity.

[0061] In the comparative example not having the second transfer transistor, when a plurality of photoelectric conversion units share the FD unit, the FD unit constitutes a part of the first transfer transistor, which causes significant restrictions on the planar arrangement of the FD unit. In contrast, according to the present embodiment, by adding the second transfer transistor, it becomes possible to arrange the FD unit with a higher degree of freedom even when a plurality of photoelectric conversion units share the FD unit.

[0062] Fifth embodiment Fig. 12 is a block diagram showing a configuration of a photoelectric conversion system 1200 according to this embodiment. The photoelectric conversion system 1200 of this embodiment includes a photoelectric conversion device 1204. Here, any of the photoelectric conversion devices described in the above embodiments can be applied to the photoelectric conversion device 1204. The photoelectric conversion system 1200 can be used as, for example, an imaging system. Specific examples of the photoelectric conversion system 1200 include a digital still camera, a digital camcorder, and a surveillance camera. Fig. 12 shows an example of a digital still camera as the photoelectric conversion system 1200.

[0063] 12 includes a photoelectric conversion device 1204, a lens 1202 that forms an optical image of a subject on the photoelectric conversion device 1204, an aperture 1203 that varies the amount of light passing through the lens 1202, and a barrier 1201 that protects the lens 1202. The lens 1202 and the aperture 1203 form an optical system that focuses light on the photoelectric conversion device 1204.

[0064] The photoelectric conversion system 1200 includes a signal processing unit 1205 that processes an output signal output from the photoelectric conversion device 1204. The signal processing unit 1205 performs signal processing operations such as performing various corrections and compression on an input signal as necessary and outputting the signal. The photoelectric conversion system 1200 further includes a buffer memory unit 1206 for temporarily storing image data, and an external interface unit (external I / F unit) 1209 for communicating with an external computer or the like. The photoelectric conversion system 1200 further includes a recording medium 1211 such as a semiconductor memory for recording or reading out imaging data, and a recording medium control interface unit (recording medium control I / F unit) 1210 for recording or reading out the imaging data on the recording medium 1211. The recording medium 1211 may be built in the photoelectric conversion system 1200 or may be removable. In addition, communication between the recording medium control I / F unit 1210 and the recording medium 1211 and communication from the external I / F unit 1209 may be performed wirelessly.

[0065] Furthermore, the photoelectric conversion system 1200 has an overall control / calculation unit 1208 that performs various calculations and controls the entire digital still camera, and a timing generation unit 1207 that outputs various timing signals to the photoelectric conversion device 1204 and the signal processing unit 1205. Here, the timing signals and the like may be input from the outside, and the photoelectric conversion system 1200 may have at least the photoelectric conversion device 1204 and the signal processing unit 1205 that processes the output signal output from the photoelectric conversion device 1204. As described in the fourth embodiment, the timing generation unit 1207 may be mounted on the photoelectric conversion device. The overall control / calculation unit 1208 and the timing generation unit 1207 may be configured to implement a part or all of the control functions of the photoelectric conversion device 1204.

[0066] The photoelectric conversion device 1204 outputs an image signal to the signal processing unit 1205. The signal processing unit 1205 performs a predetermined signal processing on the image signal output from the photoelectric conversion device 1204, and outputs image data. The signal processing unit 1205 generates an image using the image signal. The signal processing unit 1205 and the timing generating unit 1207 may be mounted on the photoelectric conversion device. That is, the signal processing unit 1205 and the timing generating unit 1207 may be provided on a substrate on which pixels are arranged, or may be provided on a separate substrate as described in the third embodiment. By configuring an imaging system using the photoelectric conversion device of each of the above-mentioned embodiments, an imaging system capable of acquiring a better quality image can be realized.

[0067] Sixth embodiment The photoelectric conversion system and the moving body of this embodiment will be described with reference to Fig. 13 and Fig. 14. Fig. 13 is a schematic diagram showing a configuration example of the photoelectric conversion system and the moving body according to this embodiment. Fig. 14 is a flow diagram showing the operation of the photoelectric conversion system according to this embodiment. In this embodiment, an example of an in-vehicle camera is shown as the photoelectric conversion system.

[0068] FIG. 13 shows an example of a vehicle system and a photoelectric conversion system mounted thereon for capturing images. The photoelectric conversion system 1301 includes a photoelectric conversion device 1302, an image preprocessing unit 1315, an integrated circuit 1303, and an optical system 1314. The optical system 1314 forms an optical image of a subject on the photoelectric conversion device 1302. The photoelectric conversion device 1302 converts the optical image of the subject formed by the optical system 1314 into an electric signal. The photoelectric conversion device 1302 is any of the photoelectric conversion devices according to the above-mentioned embodiments. The image preprocessing unit 1315 performs predetermined signal processing on the signal output from the photoelectric conversion device 1302. The function of the image preprocessing unit 1315 may be incorporated in the photoelectric conversion device 1302. The photoelectric conversion system 1301 is provided with at least two sets of an optical system 1314, a photoelectric conversion device 1302, and an image pre-processing unit 1315, and the output from each set of the image pre-processing unit 1315 is input to the integrated circuit 1303.

[0069] The integrated circuit 1303 is an integrated circuit for use in an imaging system, and includes an image processing unit 1304 including a memory 1305, an optical distance measuring unit 1306, a parallax calculation unit 1307, an object recognition unit 1308, and an abnormality detection unit 1309. The image processing unit 1304 performs image processing such as development processing and defect correction on the output signal of the image pre-processing unit 1315. The memory 1305 temporarily stores the captured image and stores the defective positions of the captured pixels. The optical distance measuring unit 1306 performs focusing and distance measurement of the subject. The parallax calculation unit 1307 calculates parallax information (phase difference of parallax images) from multiple image data acquired by multiple photoelectric conversion devices 1302. The object recognition unit 1308 recognizes subjects such as cars, roads, signs, and people. When the abnormality detection unit 1309 detects an abnormality in the photoelectric conversion device 1302, it notifies the main control unit 1313 of the abnormality.

[0070] The integrated circuit 1303 may be realized by dedicated hardware, a software module, or a combination of these. It may also be realized by a field programmable gate array (FPGA), an application specific integrated circuit (ASIC), or the like, or a combination of these.

[0071] The main control unit 1313 supervises and controls the operations of the photoelectric conversion system 1301, the vehicle sensor 1310, the control unit 1320, etc. It is also possible to adopt a method in which the main control unit 1313 is not provided, and the photoelectric conversion system 1301, the vehicle sensor 1310, and the control unit 1320 each have their own communication interface and transmit and receive control signals via a communication network (for example, CAN standard).

[0072] The integrated circuit 1303 has a function of receiving a control signal from the main control unit 1313 or transmitting a control signal or a set value to the photoelectric conversion device 1302 by its own control unit.

[0073] The photoelectric conversion system 1301 is connected to a vehicle sensor 1310, and can detect the vehicle's driving state, such as vehicle speed, yaw rate, and steering angle, as well as the state of the environment outside the vehicle, other vehicles, and obstacles. The vehicle sensor 1310 is also a distance information acquisition means for acquiring distance information to an object from a parallax image. The photoelectric conversion system 1301 is also connected to a driving assistance control unit 1311 that performs various driving assistance functions, such as automatic steering, automatic cruising, and collision prevention functions. In particular, the collision determination function determines whether or not a collision with another vehicle or obstacle has occurred based on the detection results of the photoelectric conversion system 1301 and the vehicle sensor 1310. This allows for avoidance control when a collision is estimated, and activation of a safety device when a collision occurs.

[0074] The photoelectric conversion system 1301 is also connected to an alarm device 1312 that issues an alarm to the driver based on the result of the determination by the collision determination unit. For example, if the collision determination unit determines that there is a high possibility of a collision, the main control unit 1313 performs vehicle control to avoid a collision and reduce damage by applying the brakes, releasing the accelerator, suppressing engine output, etc. The alarm device 1312 warns the user by sounding an alarm, displaying alarm information on a display screen such as a car navigation system or a meter panel, vibrating a seat belt or steering wheel, etc.

[0075] In this embodiment, the surroundings of the vehicle, for example, the front or rear, are photographed by a photoelectric conversion system 1301. Fig. 13B shows an example of the arrangement of the photoelectric conversion system 1301 when the photoelectric conversion system 1301 photographs the area in front of the vehicle.

[0076] The two photoelectric conversion devices 1302 are disposed in front of the vehicle 1300. Specifically, if the center line of the vehicle 1300 with respect to its forward / backward direction or outer shape (e.g., vehicle width) is regarded as an axis of symmetry, and the two photoelectric conversion devices 1302 are disposed in line symmetry with respect to the axis of symmetry, this is preferable for obtaining distance information between the vehicle 1300 and an object to be photographed and for determining the possibility of a collision. In addition, the photoelectric conversion devices 1302 are preferably disposed so as not to obstruct the driver's field of vision when the driver visually checks the situation outside the vehicle 1300 from the driver's seat. The alarm device 1312 is preferably disposed so as to be easily within the driver's field of vision.

[0077] Next, a fault detection operation of the photoelectric conversion device 1302 in the photoelectric conversion system 1301 will be described with reference to Fig. 14. The fault detection operation of the photoelectric conversion device 1302 is performed in accordance with steps S1410 to S1480 shown in Fig. 14.

[0078] Step S1410 is a step for performing startup settings of the photoelectric conversion device 1302. That is, settings for the operation of the photoelectric conversion device 1302 are transmitted from outside the photoelectric conversion system 1301 (e.g., the main control unit 1313) or from inside the photoelectric conversion system 1301, and the image capturing operation and fault detection operation of the photoelectric conversion device 1302 are started.

[0079] Next, in step S1420, pixel signals are obtained from the effective pixels. In addition, in step S1430, output values ​​are obtained from failure detection pixels provided for failure detection. These failure detection pixels have a photoelectric conversion unit, just like the effective pixels. A predetermined voltage is written to this photoelectric conversion unit. The failure detection pixels output a signal corresponding to the voltage written to this photoelectric conversion unit. Note that steps S1420 and S1430 may be reversed.

[0080] Next, in step S1440, a judgment is made as to whether the output expected value of the fault detection pixel corresponds to the actual output value from the fault detection pixel. If the result of the judgment in step S1440 indicates that the output expected value and the actual output value correspond, the process proceeds to step S1450, it is judged that the imaging operation is performed normally, and the process proceeds to step S1460. In step S1460, the pixel signal of the scanning row is sent to the memory 1305 and temporarily stored. Thereafter, the process returns to step S1420, and the fault detection operation is continued. On the other hand, if the result of the judgment in step S1440 indicates that the output expected value and the actual output value do not correspond, the process proceeds to step S1470. In step S1470, it is judged that there is an abnormality in the imaging operation, and an alarm is issued to the main control unit 1313 or the alarm device 1312. The alarm device 1312 displays the detection of the abnormality on the display unit. Thereafter, in step S1480, the photoelectric conversion device 1302 is stopped, and the operation of the photoelectric conversion system 1301 is terminated.

[0081] In this embodiment, the flowchart is looped for each line, but the flowchart may be looped for each set of lines, or the fault detection operation may be performed for each frame. The issuance of the alarm in step S1470 may be notified to the outside of the vehicle via a wireless network.

[0082] In addition, in this embodiment, the control to prevent collision with other vehicles has been described, but the control can also be applied to automatic driving control to follow other vehicles, automatic driving control not to go out of the lane, etc. Furthermore, the photoelectric conversion system 1301 is not limited to vehicles such as the vehicle itself, but can be applied to moving bodies (moving devices) such as ships, aircraft, and industrial robots. In addition, the photoelectric conversion system 1301 is not limited to moving bodies, but can be applied to a wide range of devices that use object recognition, such as intelligent transport systems (ITS).

[0083] The photoelectric conversion device of the present invention may further include a color filter and a microlens, and may be configured to acquire various information such as distance information. The amplifying transistor is a part of the source follower circuit, but may also configure a part of the AD converter. Specifically, the amplifying transistor may configure a part of a comparator included in the AD converter. Also, a part of the comparator may be provided on a separate semiconductor substrate.

[0084] The present invention is not limited to the above-mentioned embodiment, and various modifications are possible. For example, an example in which a part of the configuration of any of the embodiments is added to another embodiment, or an example in which a part of the configuration of another embodiment is replaced with another embodiment is also an embodiment of the present invention. Furthermore, all of the above-mentioned embodiments merely show concrete examples for carrying out the present invention, and the technical scope of the present invention should not be interpreted as being limited by these examples. In other words, the present invention can be carried out in various forms without departing from its technical idea or main features. [Explanation of symbols]

[0085] 201 Photoelectric conversion unit 202 first transfer transistor 203 Second transfer transistor 205 Reset Transistor 206 Amplifying transistor

Claims

1. A first photoelectric conversion unit; an amplifying transistor having an input node to which the charge generated in the first photoelectric conversion unit is input; a first transfer transistor that controls transfer of charges from the first photoelectric conversion unit; a second transfer transistor disposed between the first transfer transistor and the input node; a reset transistor connected to the input node, the unit cells being arranged across a plurality of rows and a plurality of columns; a first readout operation in which, after the charge generated in the first photoelectric conversion unit is input to the input node, the amplification transistor outputs a signal based on the potential of the input node while the second transfer transistor is in an off state; a second readout operation in which, after the charge generated in the first photoelectric conversion unit is input to the input node, the amplifying transistor outputs a signal based on the potential of the input node while the second transfer transistor is in an on state; performing the first readout operation in a first mode for capturing an image of a subject having a first luminance; performing the second readout operation in a second mode for capturing an image of a subject having a second luminance higher than the first luminance; In the first read operation in reading the unit cells of a predetermined row of the plurality of rows, a first period in which the first transfer transistor and the second transfer transistor are both off; a second period following the first period, in which the first transfer transistor is turned on while the second transfer transistor is turned off; a third period following the second period, in which the second transfer transistor is turned on while the first transfer transistor is turned on; a fourth period following the third period, in which the first transfer transistor is turned off while the second transfer transistor is turned on; a fifth period which is a period following the fourth period and in which the second transfer transistor is turned off while the first transfer transistor is turned off; A photoelectric conversion device comprising:

2. 2 . The photoelectric conversion device according to claim 1 , wherein, in the second mode, the second transfer transistor maintains an on state from before the first transfer transistor is turned on until after the first transfer transistor is turned off.

3. A selection transistor is provided, 3. The photoelectric conversion device according to claim 2, wherein in the first mode, the selection transistor is turned on, the second transfer transistor is turned off, and the amplification transistor outputs a signal based on the potential of the input node.

4. A plurality of the first photoelectric conversion units are arranged in a first row and a second row different from the first row, A photoelectric conversion device as described in any one of claims 1 to 3, characterized in that in the second mode, the second transfer transistor connected to the first photoelectric conversion unit arranged in the first row is turned on, and the second transfer transistor connected to the first photoelectric conversion unit arranged in the second row is turned off.

5. charges are transferred from the first photoelectric conversion unit and the second photoelectric conversion unit to the input node of one of the amplification transistors; a first first transfer transistor that controls transfer of charges from the first first photoelectric conversion unit; a second first transfer transistor that controls transfer of charges from the second first photoelectric conversion unit, 5. The photoelectric conversion device according to claim 1, wherein the first first transfer transistor and the second first transfer transistor share one of the second transfer transistors.

6. 6. The photoelectric conversion device according to claim 1, wherein the gate of the reset transistor is disposed between the gate of the second transfer transistor and the gate of the amplification transistor in a plan view.

7. 7. The photoelectric conversion device according to claim 1, wherein, in a planar view, a floating diffusion constituting the input node is arranged at a position farthest from the optical center of a microlens within the unit cell constituted by the first photoelectric conversion unit, the first transfer transistor, the second transfer transistor, the amplifying transistor, and the reset transistor.

8. 8. The photoelectric conversion device according to claim 1, wherein, in a plan view, a floating diffusion constituting the input node is disposed in an area not overlapping with a microlens.

9. 9. The photoelectric conversion device according to claim 1, wherein a capacitance of the input node when the second transfer transistor is turned off is smaller than a capacitance of the first photoelectric conversion unit.

10. 10. The photoelectric conversion device according to claim 1 , wherein the capacitance of the input node when the second transfer transistor is turned off is smaller than the capacitance of the input node when the second transfer transistor is turned on.

11. A first photoelectric conversion unit; an amplifying transistor having an input node to which the charge generated in the first photoelectric conversion unit is input; a reset transistor connected to the input node; a first transfer transistor that controls transfer of charges from the first photoelectric conversion unit; A second photoelectric conversion unit; a second transfer transistor that controls transfer of charges from the second photoelectric conversion unit; a third transfer transistor disposed between the first transfer transistor and the input node and between the second transfer transistor and the input node, the third transfer transistor being disposed between the first transfer transistor and the input node, the third transfer transistor being disposed between the second transfer transistor and the input node, a first read operation in which, after charges generated in at least one of the first photoelectric conversion unit and the second photoelectric conversion unit are input to the input node, the amplification transistor outputs a signal based on a potential of the input node while the third transfer transistor is in an off state; a second read operation in which, after charges generated in at least one of the first photoelectric conversion unit and the second photoelectric conversion unit are input to the input node, the third transfer transistor is in an on state and the amplification transistor outputs a signal based on a potential of the input node; performing the first readout operation in a first mode for capturing an image of a subject having a first luminance; performing the second readout operation in a second mode for capturing an image of a subject having a second luminance higher than the first luminance; In the first read operation in reading the unit cells of a predetermined row of the plurality of rows, a first period in which the first transfer transistor and the third transfer transistor are both off; a second period following the first period, in which the first transfer transistor is turned on while the third transfer transistor is turned off; a third period following the second period, in which the third transfer transistor is turned on while the first transfer transistor is turned on; a fourth period following the third period, in which the first transfer transistor is turned off while the third transfer transistor is turned on; a fifth period which is a period following the fourth period and in which the third transfer transistor is turned off while the first transfer transistor is turned off; A photoelectric conversion device comprising:

12. In a plan view, the first photoelectric conversion unit and the second photoelectric conversion unit are arranged along a first direction, The photoelectric conversion device according to claim 11 , wherein the input node is located between the first photoelectric conversion unit and the second photoelectric conversion unit.

13. The photoelectric conversion device according to claim 11 , wherein the input node is located at a corner of the unit cell in a plan view.

14. 14. The photoelectric conversion device according to claim 11, further comprising one microlens that overlaps the first photoelectric conversion portion and the second photoelectric conversion portion in a plan view.

15. 15. The photoelectric conversion device according to claim 11, wherein a capacitance of the input node when the third transfer transistor is turned off is smaller than a capacitance of the first photoelectric conversion unit.

16. 16. The photoelectric conversion device according to claim 11, wherein the gate of the third transfer transistor is larger than the gate of the first transfer transistor in a plan view.

17. a semiconductor region of a first conductivity type constituting the input node; 17. The photoelectric conversion device according to claim 11, wherein a gate of the third transfer transistor overlaps with the semiconductor region of the first conductivity type.

18. 18. The photoelectric conversion device according to claim 11, wherein the capacitance of the input node when the third transfer transistor is turned off is smaller than the capacitance of the input node when the third transfer transistor is turned on.

19. The photoelectric conversion device according to any one of claims 1 to 18, and a signal processing unit that processes a signal output from the photoelectric conversion device.

20. The photoelectric conversion device according to any one of claims 1 to 18, a distance information acquisition means for acquiring distance information to an object from parallax information based on a signal from the photoelectric conversion device, A moving body further comprising a control means for controlling the moving body based on the distance information.

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