Semiconductor device and its manufacturing method

Abstract

To provide a semiconductor device capable of visualizing cracks generated in a sealing resin and enabling objective evaluation, and a manufacturing method thereof.SOLUTION: A semiconductor device includes a substrate, a semiconductor chip provided on the substrate, a sealing resin covering the substrate and the semiconductor chip, at least one of the substrate and the semiconductor chip, and a mottled pattern provided at the interface with the sealing resin.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] 1. Field of the Invention The present invention relates to a semiconductor device and a manufacturing method thereof. [Background technology]

[0002] For example, in order to ensure insulation, the inside of a power semiconductor module is sealed with insulating resin. If a crack occurs in the sealing resin, the insulation cannot be guaranteed and this can lead to defects. During testing and inspection, the presence or absence of cracks in the sealing resin is judged visually, and the criteria for judgment tend to vary depending on the worker. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2007-242973 A Summary of the Invention [Problem to be solved by the invention]

[0004] An embodiment of the present invention provides a semiconductor device and a manufacturing method thereof that enable visualization of cracks occurring in a sealing resin and objective evaluation. [Means for solving the problem]

[0005] According to an embodiment of the present invention, a semiconductor device includes a substrate, a semiconductor chip provided on the substrate, a sealing resin covering the substrate and the semiconductor chip, and a mottled pattern provided at the interface between at least one of the substrate and the semiconductor chip and the sealing resin. [Brief description of the drawings]

[0006] [Figure 1] 1 is a schematic cross-sectional view of a semiconductor device according to an embodiment; [Diagram 2]1A is a schematic cross-sectional view of a sample used in an experimental example verifying the effect of the embodiment, and FIG. 1B is an image showing an example of a mottled pattern. [Diagram 3] 6(a) to 6(c) are images visualizing scratches in the above sample. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0007] Hereinafter, an embodiment will be described with reference to the drawings. In the drawings, the same components are denoted by the same reference numerals.

[0008] FIG. 1 is a schematic cross-sectional view of a semiconductor device 1 according to an embodiment.

[0009] The semiconductor device 1 includes a case 10, a substrate 20, a semiconductor chip 30, conductive members 21, 22, and 71, and a sealing resin 50.

[0010] The case 10 has a base 11 and a sidewall 12. The base 11 and the sidewall 12 are made of, for example, an insulating resin material. The substrate 20, the semiconductor chip 30, the conductive members 21, 22, 71, and the sealing resin 50 are disposed in a space within the case 10 surrounded by the base 11 and the sidewall 12.

[0011] The substrate 20 is disposed on the base 11. The back surface of the substrate 20 is joined to the upper surface of the base 11 by a joining member 42. The substrate 20 is, for example, an insulating resin substrate or a ceramic substrate. A conductive member 21 is provided on the front surface of the substrate 20, and a conductive member 22 is provided on the back surface of the substrate 20. The conductive member 21 on the front surface of the substrate 20 functions as wiring electrically connected to the semiconductor chip 30. The conductive member 22 on the back surface of the substrate 20 functions as a joint for the base 11.

[0012] The semiconductor chip 30 is mounted on the substrate 20. For example, a plurality of semiconductor chips 30 are mounted on the substrate 20. The back surface of the semiconductor chip 30 is joined to the substrate 20 by a joining member 41. Electrode pads are provided on the front surface of the semiconductor chip 30, and the electrode pads are electrically connected to the conductive member 21 on the front surface of the substrate 20 by wires W.

[0013] A conductive member 71 is provided inside the case 10 and is electrically connected to the conductive member 21 on the surface of the substrate 20. A portion 71a of the conductive member 71 is located outside the case 10 and functions as an external connection terminal.

[0014] The sealing resin 50 is provided inside the case 10, and covers the inner surface of the case 10 (the surface of the base 11 and the side wall surface of the side wall portion 12), the substrate 20, the semiconductor chip 30, the wires W, the conductive members 21, 22, and the bonding members 41, 42. The sealing resin 50 also covers a portion of the conductive member 71 located inside the case 10. The sealing resin 50 is translucent to, for example, visible light. For example, a silicone resin can be used as the sealing resin 50.

[0015] The semiconductor device 1 further includes a mottled pattern 60. The mottled pattern 60 is provided at the interface between the inner surface of the case 10 and the sealing resin 50, the interface between the substrate 20 and the sealing resin 50, the interface between the semiconductor chip 30 and the sealing resin 50, and the interfaces between the conductive members 21, 22, and 71 and the sealing resin 50. The mottled pattern 60 may be provided at the interface between the sealing resin 50 and at least one of the inner surface of the case 10, the substrate 20, the semiconductor chip 30, and the conductive members 21, 22, and 71. The mottled pattern 60 is a pattern in which different colors or shades of the same color are mixed, and includes unevenness in color and brightness. The mottled pattern 60 is made of an electrically insulating material.

[0016] According to the semiconductor device 1 of the embodiment, the presence or absence of cracks occurring in the sealing resin 50 can be easily determined by observing the mottled pattern 60 through the sealing resin 50 by image inspection, as described later.

[0017] Next, a method for manufacturing the semiconductor device 1 according to the embodiment will be described.

[0018] The substrate 20 is mounted on the base 11 via a bonding member 42. The semiconductor chip 30 is mounted on the substrate 20 via a bonding member 41. The electrode pads on the surface of the semiconductor chip 30 and the conductive member 21 on the surface of the substrate 20 are connected by wires W. A conductive member 71, for example a copper plate, which is connected to the conductive member 21 on the surface of the substrate 20, is disposed inside the case 10.

[0019] A mottled pattern 60 is formed on at least one of the inner surface of the case 10, the substrate 20, the semiconductor chip 30, and the conductive members 21, 22, and 71. For example, the material for the mottled pattern 60 is dispersed and applied inside the case 10 together with compressed air or nitrogen. Alternatively, the material for the mottled pattern 60 is dispersed and applied inside the case 10 by electrostatic force. For example, the mottled pattern 60 covers the inner surface of the case 10, the substrate 20, the semiconductor chip 30, and the conductive members 21, 22, and 71.

[0020] A sealing resin 50 is formed inside the case 10 to cover the inner surface of the case 10 and the components inside the case 10 (the substrate 20, the semiconductor chip 30, the conductive components 21, 22, 71, the wires W, the bonding components 41, 42, and the mottled pattern 60). The sealing resin 50 is supplied into the case 10 in a gel or liquid state, for example, and then hardened by heat or the like.

[0021] After the mottled pattern 60 is formed, the sealing resin 50 is formed. Therefore, the mottled pattern 60 is not located on the surface or inside of the sealing resin 50, but is located at the interface between the inner surface of the case 10 and the sealing resin 50, and at the interface between the members inside the case 10 (the substrate 20, the semiconductor chip 30, the conductive members 21, 22, 71, the wire W, and the bonding members 41, 42) and the sealing resin 50.

[0022] The mottled pattern 60 is photographed through the sealing resin 50 from outside the case 10, for example, with a camera, and a plurality of images of the mottled pattern 60 are obtained through the sealing resin 50. For example, images of the mottled pattern 60 are obtained through the sealing resin 50 at each of the timings such as at the time of shipment, before a test, at the time of inspection, and after a test.

[0023] Then, a correlation value between the acquired images of the mottled pattern 60 is calculated. The correlation value is, for example, a correlation value of the luminance distribution of the mottled pattern 60. When a crack occurs in the sealing resin 50, the reflected light from the mottled pattern 60 located under the crack is scattered by the crack, and the image information (for example, luminance) of the mottled pattern 60 changes compared to when there is no crack. An image of the mottled pattern 60 through the sealing resin 50 acquired before the crack occurs in the sealing resin 50 and an image of the mottled pattern 60 through the sealing resin 50 acquired after the crack occurs in the sealing resin 50 are compared, and a correlation value of, for example, the luminance distribution between the two images is calculated, and the result is displayed superimposed on the acquired image by image processing. For example, a pixel with a change in luminance between the images to be compared is displayed in a different color from a pixel with no change in luminance. This makes the crack that occurs in the sealing resin 50 visible, and enables an objective evaluation of the presence or absence of a crack independent of an operator.

[0024] Next, an experimental example verifying the effect of this embodiment will be described.

[0025] As shown in Fig. 2(a), a white paint was sprayed onto the rear surface 81 of a glass petri dish 80, and then a black paint was sprayed onto the rear surface 81 of the glass petri dish 80. As a result, a mottled pattern 60 shown in Fig. 2(b) was formed on the rear surface 81 of the glass petri dish 80.

[0026] After the mottled pattern 60 was formed, a gel-like silicone resin having translucency to visible light was supplied into the petri dish 80 as the sealing resin 50. The mass of the gel-like silicone resin supplied into the petri dish 80 was 7.7 g. Thereafter, the sealing resin (silicone resin) 50 was cured by heating using a hot plate. The heating temperature was 80° C., and the heating time was 1.5 hours.

[0027] The surface of the hardened sealing resin 50 was lightly traced with a scriber to make three linear scratches on the surface of the sealing resin 50. An image (reference image) of the mottled pattern 60 through the sealing resin 50 before the scratches were made, an image of the mottled pattern 60 through the sealing resin 50 after the first scratch was made, an image of the mottled pattern 60 through the sealing resin 50 after the second scratch was made, and an image of the mottled pattern 60 through the sealing resin 50 after the third scratch was made were captured by a camera. Furthermore, the correlation value of the luminance distribution of the reference image before the scratches and each image after the scratches was made was calculated, and the change in luminance distribution from the reference image was visualized in each image after the scratches by image processing.

[0028] FIG. 3(a) is an image that visualizes the change in luminance distribution from the reference image in an image of a mottled pattern 60 through the sealing resin 50 after the first scratch is made. FIG. 3(b) is an image that visualizes the change in luminance distribution from the reference image in an image of the mottled pattern 60 through the sealing resin 50 after the second scratch is made. FIG. 3(c) is an image that visualizes the change in luminance distribution from the reference image in the image of the mottled pattern 60 through the sealing resin 50 after the third scratch is made.

[0029] 3(a) to (c), it was confirmed that the brightness of the mottled pattern in the unscratched area does not change from the reference image, whereas the brightness of the mottled pattern in the scratched area of ​​the sealing resin changes compared to the brightness when there is no scratch. For example, by displaying the area with a change in brightness in an image in a different color from the area with no change in brightness, it becomes easier to determine whether or not there is a crack in the sealing resin 50.

[0030] Compared with a pattern with uniform brightness or chromaticity, a mottled pattern observed through the sealing resin has a large change in image information (e.g., brightness) depending on the presence or absence of cracks occurring in the sealing resin, and the cracks can be easily visualized based on the amount of change. For example, the mottled pattern can be made of a material having a color different from at least one of the case 10, the substrate 20, the semiconductor chip 30, and the conductive members 21, 22, and 71.

[0031] Alternatively, the mottled pattern may be made of two different materials of different colors. For example, one of the two materials is black and the other is white. For example, carbon black may be used as the black material, and titanium oxide may be used as the white material. Carbon black and titanium oxide may be dissolved in water or the like and applied to the inside of the case 10 as a solution. If the black material and the white material are mixed and then applied to the inside of the case 10, a uniform gray mottled pattern of black and white is likely to result. Therefore, for example, the black material is applied to the inside of the case 10, and then the white material is applied to the inside of the case 10 to form a mottled pattern. Alternatively, the white material is applied to the inside of the case 10, and then the black material is applied to the inside of the case 10 to form a mottled pattern.

[0032] The size (or diameter) of the unit area (area that can be distinguished from adjacent areas in color or brightness) constituting the mottled pattern is preferably larger than the pixel resolution of the camera and smaller than the width (width in a direction perpendicular to the extension direction of the crack) of the crack that occurs in the sealing resin. For example, the size (or diameter) of the unit area constituting the mottled pattern is preferably 1 / 2000 or more and 20 / 2000 or less of the size of the sealed area by the sealing resin 50 in the case 10. For example, if the size of the sealed area by the sealing resin 50 in the case 10 is 100 mm square, the size (or diameter) of the unit area constituting the mottled pattern is preferably 0.05 mm or more and 1.00 mm or less.

[0033] The wavelength for observing the mottled pattern through the sealing resin is not limited to visible light. For example, an image of the mottled pattern through the sealing resin may be obtained using X-rays.

[0034] The mottled pattern 60 described above can also be applied when the case 10 is not provided.

[0035] Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included in the scope and spirit of the invention, and are included in the scope of the invention and its equivalents described in the claims. [Explanation of symbols]

[0036] 1... semiconductor device, 10... case, 20... substrate, 30... semiconductor chip, 21, 22, 71... conductive member, 50... sealing resin, 60... mottled pattern

Claims

1. A substrate; A semiconductor chip provided on the substrate; a sealing resin that covers the substrate and the semiconductor chip; a mottled pattern provided at an interface between at least one of the substrate and the semiconductor chip and the sealing resin; Equipped with The mottled pattern is made of a material having a color different from that of at least one of the substrate and the semiconductor chip.

2. A substrate, A semiconductor chip provided on the substrate; a sealing resin that covers the substrate and the semiconductor chip; a mottled pattern provided at an interface between at least one of the substrate and the semiconductor chip and the sealing resin; Equipped with The mottled pattern is made of two materials having different colors, one of which is black and the other is white.

3. 3. The semiconductor device according to claim 1, wherein the sealing resin is transparent to visible light.

4. a case in which the substrate is placed; and a conductive member provided on the substrate and electrically connected to the semiconductor chip; Further equipped with the sealing resin is provided within the case and covers an inner surface of the case, the substrate, the semiconductor chip, and the conductive member; 4. The semiconductor device according to claim 1, wherein the mottled pattern is also provided at an interface between the inner surface of the case and the sealing resin, and at an interface between the conductive member and the sealing resin.

5. placing a substrate and a semiconductor chip provided on the substrate in a case; forming a speckled pattern on at least one of the inner surface of the case, the substrate, and the semiconductor chip; forming a sealing resin in the case, the sealing resin covering the inner surface of the case, the substrate, the semiconductor chip, and the mottled pattern; acquiring a plurality of images of the mottled pattern through the sealing resin at different times; calculating a correlation value between the plurality of images of the mottled pattern; A method for manufacturing a semiconductor device comprising the steps of:

6. 6. The method of claim 5, wherein the correlation value is a correlation value of the mottled luminance distribution.

Images