Accurate wavelength calibration in cathodoluminescence SEM

Abstract

To provide a method for calibrating a cathodoluminescence microscope.SOLUTION: A scanning electron microscope is provided that has a spectrometer 43 with a sensor 45 having a plurality of pixels, wherein the spectrometer directs different wavelengths of collected light onto different pixels. An optical model is formed and an error function is minimized to find values for the model, such that wavelength detection may be corrected using the mode. An optical model can correct an error generated by effect of movement of electron beams over a specimen 7, aberration introduced by an optical element, imperfection of the optical element, etc. A correction function may be employed to account for effects not captured by the optical model.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] (Related Applications) This application claims the benefit of priority to U.S. Provisional Application No. 62 / 889,434, filed August 20, 2019, the disclosure of which is incorporated herein by reference in its entirety.

[0002] (Technical field) The present invention relates to cathodoluminescence scanning electron microscopes and in particular, although not exclusively, to accurate wavelength calibration in cathodoluminescence scanning electron microscopes. [Background technology]

[0003] The light emitted by a sample upon electron bombardment is called cathodoluminescence. Cathodoluminescence measurements can be performed with a scanning electron microscope (SEM) by scanning the microscope's highly focused electron beam probe over the surface of the sample and recording the cathodoluminescence signal intensity as a function of the electron beam position on the sample. The cathodoluminescence maps produced can provide higher resolution spectral information than equivalent images obtained using conventional or laser-based optical microscopes.

[0004] In addition to the high spatial resolution of cathodoluminescence SEM, the collected light can also be examined for its spectral properties (cathodoluminescence spectroscopy). The collected spectrum can measure its intensity at each point of the scanned sample. Study of the collected spectrum can provide information about the material of the sample, its purity, the presence of defects, etc. Thus, accurately determining the light intensity per wavelength or the wavelengths collected at each pixel improves the accuracy of the information that can be inferred about the scanned sample.

[0005] However, there are several unaccounted factors that contribute to and complicate the process of determining pixel-to-wavelength correspondence. For example, during electron beam scanning, as the electron beam moves across the sample, the emission point on the sample also moves. As a result, the light spectrum of the camera sensor is displaced, making it unclear which wavelength corresponds to which pixel. Also, the lenses of the optical collection system inherently introduce aberrations, such as chromatic aberration. The system also includes a concave mirror and the camera sensor itself, which exhibit aberrations. These aberrations can cause irregular changes in the spectrum when the collected light beam deviates from the ideal optical axis. Therefore, to properly resolve the wavelength of each pixel of the camera sensor, these aberrations must be corrected.

[0006] For further disclosure of systems incorporating focusing in a particle beam column, the reader is referred to US Pat. No. 3,845,305, US Patent Publication Nos. 2013 / 335817 and 2019 / 103248, and FR Patent No. 2,173,436. One problem that these disclosures seek to address is how to incorporate all of the various particle and light optics within a small area to allow short working distances for high resolution. Conversely, the subject disclosure addresses the problem of identifying which pixels correlate with which wavelengths of collected light. The solution provided by the present disclosure can be implemented in any cathodoluminescence SEM, including those cited above. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] U.S. Pat. No. 3,845,305 [Patent Document 2] US Patent Application Publication No. 2013 / 335817 [Patent Document 3] US Patent Application Publication No. 2019 / 103248 [Patent Document 4] French Patent No. 2173436 Summary of the Invention

[0008] The following summary of the disclosure is intended to provide a basic understanding of some aspects and features of the invention. This summary is not an extensive overview of the invention and thus is not intended to particularly identify key or critical elements of the invention or to delineate the scope of the invention. Its sole purpose is to present some concepts of the invention in a simplified form as a prelude to the more detailed description that is presented below.

[0009] It is also an object of the present invention to overcome the problems associated with cathodoluminescence SEM identified above, and in particular to improve the accuracy of analytical results obtained using cathodoluminescence SEM by appropriately identifying wavelength peaks in the collected cathodoluminescence emission.

[0010] According to one disclosed embodiment, a physical model of the optical system is established. Unknown variables of the model are experimentally determined. Also, polynomials with unknown coefficients are added to account for imperfections that are not explicitly modeled. This optical system is then used to measure multiple spectra from one or more calibration samples (e.g., scintillators, semiconductors, and semiconductor quantum dots) with known properties (i.e., emission peak wavelengths). All peaks are identified in each of the spectra with sub-pixel accuracy. The detected peaks are compared to known reference peaks. An error function is then developed and solved to find the value that minimizes the error function. These values ​​can be used to calibrate the optical system for testing the unknown material.

[0011] In a disclosed embodiment, a cathodoluminescence SEM includes an electron column, a collection optical system in the column that generates a light beam, a spectrometer with a photosensor having a plurality of pixels, and a processor and a computer having a memory coupled to the processor for storing instructions that, when executed by the processor, cause the processor to perform operations including generating an electron beam, directing the electron beam at a reference sample having a known spectrum, directing emitted cathodoluminescence light to the spectrometer, operating the spectrometer to acquire a plurality of cathodoluminescence spectra across the plurality of pixels, aligning each of the cathodoluminescence spectra to the known spectrum, determining an error value for each respective peak of the cathodoluminescence spectrum relative to a corresponding peak of the known spectrum, and using the error value to generate a calibration function.

[0012] The disclosed embodiments further include a non-transitory computer readable medium having stored thereon instructions that, when executed by a processor, cause the processor to perform operations including acquiring a plurality of cathodoluminescence spectra of a known sample from a plurality of pixels of a sensor, aligning each of the cathodoluminescence spectra to a reference spectrum of the known sample, determining an error value for each respective peak in the cathodoluminescence spectra relative to a corresponding peak in the reference spectrum, and using the error value to generate a calibration function. [Brief description of the drawings]

[0013] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and, together with the description, serve to explain and illustrate the principles of the invention. The drawings are intended to show major features of example embodiments in a schematic manner. The drawings are not intended to depict every feature of an actual embodiment, nor the relative dimensions of the depicted elements, and are not drawn to scale.

[0014] Other characteristics and advantages of the invention will become apparent from the following description of non-limiting exemplary embodiments, with reference to the accompanying drawings, in which: [Figure 1] FIG. 2 is a schematic cross-sectional view of a lower portion of an electron microscope according to one embodiment. [Diagram 2] FIG. 1 is a schematic cross-sectional view of the bottom portion of an electron microscope highlighting elements for understanding the disclosed embodiments. [Diagram 3] 1 is a plot of sub-pixel resolution generation according to one embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0015] Some embodiments of the present invention will now be described in more detail with reference to the accompanying drawings, in which elements of identical function and structure appearing in different drawings are assigned the same reference numerals.

[0016] The embodiments of the cathodoluminescence SEM calibration method of the present invention will be described with reference to the drawings. Different embodiments or combinations thereof may be used for different applications or to achieve different benefits. Depending on the results to be achieved, the various features disclosed herein may be utilized partially or to the fullest extent, alone or in combination with other features, to balance the advantages with requirements and constraints. Thus, certain advantages are highlighted with reference to different embodiments, but are not limited to the disclosed embodiments. That is, the features disclosed herein are not limited to the embodiments to which they are described, but may be "mixed and matched" with other features and incorporated into other embodiments, even if not explicitly described herein.

[0017] FIG. 1 shows a cross-sectional view of the bottom of a cathodoluminescence scanning electron microscope with a sample or specimen 7. The microscope typically includes an electron column 41 housed within a vacuum vessel 10, and an optical imaging element 42 in an atmospheric environment. The integrated microscope shown in FIG. 1 can generate electron beam images, optical beam images, cathodoluminescence (CL) images, and CL spectroscopy images, although the description provided here focuses on CL spectroscopy images. The imaged CL emission can be related to the structure and quality of the sample's material at the nanoscale. CL data can reveal material stress, impurities, crystallographic, and subsurface defects that are invisible in other imaging modes. Importantly, CL imaging is a non-destructive method of examining a sample.

[0018] The electron column includes an electron source 1, for example a thermal or field emission source, which emits electrons. The emitted electrons are formed into an electron beam 9 by various particle-optical elements such as an electromagnetic lens 5', an electromagnetic objective lens 5, and an aperture disk (sometimes called an aperture) 6, which may also function as an electrostatic lens by applying an electric potential to it. In FIG. 1, the pulse 2 indicates that in this particular example, the electron emission from the electron source 1 may be pulsed, but this does not necessarily have to be the case. For example, the emission may be performed using a continuous electron beam, or a shutter may be used to generate intermittent emission from a continuous electron beam.

[0019] In a known manner, the coils 11 of the electromagnetic objective lens 5 are provided, which in this figure generate a substantially horizontal magnetic field at the height of the optical axis of the electromagnetic objective lens 5. The bulk of the magnetic field is located at the height of the output or exit aperture 13, or alternatively, it may be outside that area, between the lens and the sample 7. The purpose of the magnetic field is to generate a convergent electron beam 9 that can be focused on the surface of the sample 7. In this example, the electron beam 9 generated by the electron emitter 1 propagates from the top to the bottom of the figure. The spread of the electron beam can be modified by a condenser arrangement, such as a lens 5', so that it can be divergent, parallel or focused. The condenser means can be arranged below the electron emitter.

[0020] The lens 5 has a hollow interior along its optical axis, through which the electron beam 9 can pass. The hollow portion (passageway or gap) is wide enough to allow the light emitted or reflected by the sample 7 to pass through unhindered, as will be explained later. To maintain good electron-optical performance, it is preferable to keep the output aperture 13 of the electromagnetic objective lens 5 as small as possible, and therefore it is preferable to build the system so that the working distance remains small.

[0021] As can be seen, a reflective objective is provided within the electromagnetic objective 5 in order to image the surface of the sample 7. In this example, a Schwarzschild reflective objective is used. The Schwarzschild objective is a two-mirror reflective objective that is rotationally symmetric about its optical axis (essentially coinciding with the path of the electron beam) and is aberration-free and infinity corrected. In the context of geometrical optics, an objective is infinity corrected if all light rays entering the objective parallel to its optical axis converge to the same focal point, forming a diffraction-limited point, or conversely, if all light rays emanating from the focal point and passing through the objective form a bundle of rays parallel to its optical axis, or equivalently a collimated output beam. The electromagnetic objective 5 and the reflective objective can have the same focal plane.

[0022] An objective is aplanatic if it satisfies both Abbe's sine law and Lagrange's condition (also called Fermat's principle). For an infinity corrected objective, Abbe's sine law states that a ray that passes through the focal point and forms an angle α with the optical axis leaves the objective parallel to the optical axis at a distance y' from the optical axis, so that y'=m×sin(α), where m is a real constant. This law should be satisfied at least near the focal point. For an infinity corrected objective, Lagrange's condition states that the path followed by a ray between the focal point and a plane located orthogonal to the optical axis in a parallel light beam is constant regardless of the value of the angle α.

[0023] The benefits of an aberration-free objective lens can be evaluated using the theory of optical aberrations. Aberrations represent deviations of an imaging optical system from ideality. Ideal imaging optical systems are (1) astigmatic, and (2) achromatic. That is, (1) the image of a point at a finite or infinite distance from the optical system and imaged by the optical system is a point (or, more precisely, a spot whose size is limited by the diffraction of light), and (2) the location of the image point does not depend on the wavelength of light. The effect of aberrations on the imaging properties of an optical system is to deform the diffraction-limited image of a point object. A method of describing monochromatic aberrations (among others) was developed by Seidel. Here, aberrations are classified according to their relative importance (as odd-power terms) and their effect on the image of a point source through an imaging optical system. The third-order terms of the power series represent the most fundamental aberrations (called third-order aberrations), such as spherical and coma aberrations, astigmatism, field curvature, and distortion.

[0024] Aplanatic objectives correct for spherical and coma aberrations. Spherical aberration affects the image of a point object regardless of its on-axis or off-axis position. On-axis and off-axis should be understood here as light rays emitted from an object on the optical axis and from an object at a distance away from the optical axis, respectively. An objective lens affected by spherical aberration focuses the incident light rays at different positions along an axis parallel to the optical axis depending on the angle the incident light rays make with the optical axis. This results in a deviation from the spot size of the diffraction-limited image in the absence of spherical aberration. Coma aberration affects the image of a point object when it is off-axis. An objective lens affected by coma aberration focuses the incident light rays at different positions in a plane perpendicular to the optical axis depending on the angle the incident light rays make with the optical axis and the position of the point object relative to the optical axis. Coma aberration transforms the circularly symmetric spot of the diffraction-limited image in the absence of coma aberration into a coma-shaped spot.

[0025] The advantages of working with infinity-corrected objectives are multiple. First, the light rays leaving the objective are parallel to the optical axis, so that an image of the object can be formed at any axial distance along the optical axis, for example if another lens is added. Second, optical elements such as photosensitive plates, polarizers, spatial and spectral filters can be added without changing the image position. The Schwarzschild reflecting objective is calculated to have the desired optical properties at the focal point. It is also aberration-free, i.e., these properties do not change dramatically when moving away from the focal point. It maintains relatively good optical performance over a wide field of view (up to a few degrees). That is, light emitted off-axis from a point in the focal plane produces an almost parallel output beam. Conversely, a parallel beam entering the objective at a relatively large angle (up to a few degrees) forms a spot in the focal plane, the spot size of which is relatively small (close to the diffraction limit).

[0026] The reflective objective lens in the electromagnetic objective lens 5 includes a first mirror M1, also called the primary mirror, which in this example is spherically concave, and a second mirror M2, also called the secondary mirror, which in this example is spherically convex. The diameter of the first mirror M1 is larger than the diameter of the second mirror M2. The first mirror M1 is arranged above the second mirror M2 and reflects the light coming from the sample 7 as a result of the electron beam 9 hitting the surface of the sample 7 and directs the light to the second mirror M2, which is placed between the sample and the first mirror M1. The second mirror M2 is arranged to redirect the light along the optical axis of the electromagnetic objective lens, and a third mirror M3, which is planar in this example, is arranged to redirect the light beam 4 towards the output. In this example, the third mirror M3 has an angle of 45° to the axis of the electron beam 9 and is used to redirect the light outside the vacuum vessel 10. All three mirrors M1, M2 and M3 have openings or apertures along the electron beam path to ensure that the electron beam is not blocked.

[0027] In operation, to obtain the spectrum of light emitted from the sample, the electron emitter 1 or probe generates an electron beam 9, which is converted into a collimated, converging or diverging electron beam using an adjusting lens 5' located in the trajectory of the electron beam 9. The electromagnetic objective lens 5 generates a magnetic field at its output aperture 13 to focus the electron beam on the sample 7, while the deflectors 15, 17 shift the position of the electron beam 9, in this way a scan over the sample 7 can be performed. A reflective objective lens is mounted axially along the electron beam 9 and within the electromagnetic objective lens 5 to collect the light from the sample 7. The light collected from the sample is redirected towards a third mirror M3, which further redirects it outside the vacuum vessel 10. The collected light passes through a monochromator and is spatially separated into its wavelength components, and the intensity of the light at the selected wavelength is detected.

[0028] In the embodiment of FIG. 1, two imagers may be provided: a two-dimensional detector CCD camera 45, and a point detector 46, such as an InGaAs or PMT detector. If mirror 24 is a half mirror, both imagers may be operated simultaneously. Conversely, mirror 24 may be a flip mirror, allowing one imager to be operated at a time. In this configuration, detector 46 may be used to detect the light intensity at a specific wavelength, and a CCD camera may be used to detect the light intensity at several wavelengths simultaneously. This disclosure is particularly concerned with configurations that detect the light intensity at several wavelengths simultaneously, such as by using a CCD. The term "imager" is used here rather loosely, since the system does not itself generate an image, but detects the light intensity at specific wavelengths.

[0029] FIG. 2 is a general schematic diagram showing certain elements of the system shown in FIG. 1, in order to clearly explain the problems associated with cathodoluminescence monochromators. The light emitted from the sample 7 is collected by the objective lens (formed by mirrors M1 and M2) and redirected out of the electron column by mirror M3. It then passes through lens 22 and is reflected by concave mirror 41 towards diffraction grating 47, which separates the beam into its wavelength components and directs it towards a second concave mirror 48. From mirror 48, the light is directed towards a sensor 45, for example a CCD. As the light beam has been separated into its wavelength components, different wavelengths are detected by different pixels of sensor 45. That is, the coordinates (x,y) indicate the spatial location of the emission of the sample 7, and the coordinates, or pixel positions corresponding to the coordinates (x',y'), indicate the intensity (peak) of a particular wavelength emitted from said sample position (x,y). Note that although the sample 7 and sensor 45 are shown in two dimensions, they are three-dimensional objects with y coordinates pointing into the page.

[0030] Since the imaging monochromator 43 converts position coordinates on the sample to wavelength representations on the sensor, it is important to know which pixel on the sensor represents which wavelength. Unfortunately, this correspondence is not consistent between measurements. Figure 2 shows two beams emanating from the sample. Beam LB1 is shown without hatching and emanates from a central position (on-axis) of the optical objective. Beam LB2 is shown with hatching and emanates from an offset position (i.e., off-axis) of the objective. As shown in Figure 2, even though both beams are of the same wavelength, a change in the emission position on the sample relative to the optical axis will cause a change in position on the sensor. This means that the wavelength and pixel correspondence will change and it is therefore not clear which pixel represents which wavelength. That is, both a change in wavelength and a change in the position of the light source will cause a change on the sensor. Thus, the identification of a particular wavelength sensed by a particular pixel will be unclear.

[0031] Therefore, it is necessary to characterize the system and understand how a particular spatial change in emission affects the position of a particular wavelength peak on the sensor. However, to improve the accuracy of the correlation between pixels and wavelengths, other effects must also be corrected. For example, optical elements such as objectives, lenses, mirrors, and diffraction gratings all introduce aberrations, as detailed above with respect to FIG. 1 and its optical elements. These aberrations result in nonlinear behavior in the change of wavelength position on the sensor.

[0032] In the disclosed embodiments, a solution is developed to improve the accuracy of the correspondence between pixel location on the sensor and wavelength. In one embodiment, the solution is provided by generating a mathematical function that transforms the location on the sample and a selected pixel on the sensor and predicts which wavelength peak will be sensed by that pixel on the sensor. In general, the model can be expressed as a function of the form: F(x,y,l,X) -> λ In this particular example, the function determines which wavelength is observed by pixel l on the sensor for an x ​​and y position of the electron beam (which is the same as the emission position on the sample), where X is a vector of unknown model parameters. Alternatively, the model may be set to indicate which pixel on the sensor receives the peak for an x ​​and y position of the electron beam and a particular wavelength λ, i.e., F(x,y,λ,X)->l. Of course, the solution of one approach can be used to approximate the solution of the other approach. Therefore, the following discussion will proceed using the first approach, but can easily be used for the second approach as well.

[0033] To determine the values ​​of the unknown model parameters, multiple spectra are measured from one or more calibration materials with known emission properties. Three types of samples can generally be used for calibration: scintillators, semiconductors, and semiconductor quantum dots. Scintillators contain atoms (usually rare earths such as Nd, Er, Yb, and Y) with discrete transition levels in a wide band gap matrix that do not affect the emission. Examples include Nd:YAG, Yb:YAG, Yb:YVO, Er:YAG, Ruby (Cr:Al2O3), Ce:YAG, and LuAg:Pr. Semiconductor materials or alloys with precisely known composition may be used for near band edge (NBE) emission. Examples include GaAs and its alloys (Ga,Al)As, (Ga,In)As, GaN and its alloys (also containing In and Al), CdTe, CdSe, pure diamond, pure silicon, InP, GaP, etc. Semiconductor quantum dots include (CdS, InS, CdSe, CdTe, PbS, InAs) or multiple quantum wells (GaN / InGaN, GaN / AlGaN, GaAs / InGaAs, GaAs / AlGaAs, InP / AlGaP).

[0034] (e.g., Ruby, Nd-YAG, etc.). Multiple spectra should be acquired in multiple configurations that mimic normal use of the system. In one example, all spectral peaks are found with sub-pixel accuracy. In that regard, any common method for producing sub-pixel resolution can be used. For example, this can be done by fitting a quadratic curve through the measurement points of the peaks, as illustrated in FIG. 3. Also, for example, Weigue Lu, EEFitchard, GHOlivera, J.You, KJRuchala, JSAldridge, TR Mackie, "Image / patient registration from (partial) projection data by the Fourier phase matching method", Phys. Med. Biol. vol.44, 2029-2048, 1999, Tung-Hsien Tsai, Kuang-Chao Fan, Jong-I. See Mou, "A variable resolution optical profile measurement system," Meas. Sci. Technol. vol. 13, 190-197, 2002; Li. Pingxiang, Sh. Huanfeng, Zh. Liangpei, "A method of image resolution enhancement based on the Matching technique," State Key Laboratory of Information Engineering in Surveying, Mapping and Remote Sensing, Wuhan University, China, 2004.

[0035] The experimentally obtained peak is then identified among a set of reference known peaks using, for example, the Random Sample Consensus (RANSAC) method, the highest peak method, or other standard methods. The output of this stage is a set of detected peaks, indicated by the beam positions (x,y), where a known peak of wavelength λ appears at position l on the sensor. Once aligned for the acquired samples, an error function is constructed for all unknowns and coefficients of the model. For every peak recognized by the alignment, the error function may correspond to the difference between the predicted wavelength at the position of the recognized peak and the corresponding reference wavelength. This error function can be expressed as the sum of the squares of the differences between the predicted and measured wavelengths. E(X)=Σ i (F(x i ,y i ,l i ,X)-w i )^2, Here w i is the reference wavelength of the detected peak i, (x i ,y i ) is the beam position on the sample, l i is the sub-pixel position on the sensor.

[0036] Some peaks may fail to align with the reference and therefore be noted as unrecognized. Unrecognized peaks can be included in the model by creating an error function for the unrecognized peak as the difference between the predicted wavelength at the location of the unrecognized peak and the closest peak among all the reference peaks. This error function can be expressed as: E(X)=Σ i [min j (F(x i ,y i ,l i ,X)-w j )^2], Here, the set {w j} contains all the reference peak candidates for the detected peak i.

[0037] The optimal parameters of the model are obtained by finding the values ​​of X that minimize the error function. Any method for minimizing the error function can be used. In one embodiment, the least squares method is used, which minimizes the sum of squares of the residuals, i.e. the difference between the observed values ​​and the fitted values ​​provided by the criterion. In one example, the model of the optical element is driven by a nonlinear least squares problem, so the Levenberg-Marquardt algorithm (LMA), also called the damped least squares method (DLS), is used.

[0038] Also, it may not be possible to find an X where the minimization would bring the error function close enough to zero. This is because the function F(X) may not model the system adequately. For example, it is quite complicated to model imperfections in a mirror that result in small effects that are difficult to predict. Therefore, in another embodiment, a correction function is added to the model. In one example, the correction function is a polynomial. The new equation models the correlation between the position of the electron beam and the error, i.e., F'(x, y, l, X, X'), where X' are the coefficients of the correction function. When a polynomial is used as the correction function, the model can be expressed as follows: F(x,y,l)+a*x+b*x2+c*y+d*y2+e*x*y, Here, X' = [a, b, c, d, e].

[0039] This correction function introduces corrections that may not be accounted for by modeling the system as the beam moves away from the optical axis center (X=0,Y=0). The correction function produces a zero when the cathodoluminescence spectrum is taken from a point on the sample that is aligned with, or intersects, the optical axis of the microscope. Thus, in this embodiment, an extended model F' is used in the error function to improve the results when applying the minimizer.

[0040] Returning to Figures 1 and 2 and with reference to the above description, the method according to the present embodiment can be proceeded as follows: The sample 7 is placed in the focal plane of the electron microscope. The electron beam 9 is focused so that a narrow beam with a probe size of less than 1 μm is generated, so that a cathodoluminescence response can be generated in a small area of ​​the sample. Given the very small emission volume of cathodoluminescence, it is appropriate to simplify the description and approximate the resulting emission as diffraction limited, and therefore the resulting emission volume can be considered as a single point on the surface of the sample, the coordinates (x,y) of which are provided by the controller of the electron beam scanner.

[0041] The cathodoluminescence is collected by an imaging reflective objective (Schwarzschild in this embodiment) and focused at the entrance of the spectrograph 43, in this example a Czerny-Turner spectrograph with a refractive lens or a refractive objective. The Czerny-Turner spectrograph diffracts the light onto the camera sensor 45. The camera 45 consists of a matrix of pixels represented by a Cartesian coordinate system x', y'. The light is oriented to scatter along x' (the y' axis is into the page, there is no scatter in that direction). Since the scatter occurs along one dimension, it is also possible to use a linear one-dimensional pixel array.

[0042] The spectrometer's diffraction grating 47 disperses the light in various diffraction orders. For the zeroth diffraction order it acts like a mirror. A Cartesian coordinate system (x,y) can be arbitrarily chosen to represent the position of the electron beam on the sample, so that the x and y axes on the sample are chosen such that the zeroth diffraction order is imaged on the x' and y' axes, respectively. Now, at (x=0,y=0), it can be considered to coincide with the optical axis of the electron column.

[0043] Ideally, the perfect optical system (Schwarzschild + refractive objective + spectrometer) would have perfect imaging properties, and a position on the camera would then be expressed as (x',y')=Γ(x,y), where Γ is the optical magnification of the optical system. In reality, the model is more complex and additional terms (quadratic, cubic, etc.) must be added to account for it. Also, since the system is not achromatic, the coefficients of the model may vary as a function of wavelength λ. These effects are nonlinear with respect to displacement away from the optical axis of the optical spectrometer system.

[0044] The dispersion of the spectrograph along the x' axis can be calculated using the spectrograph equation. As a result, the wavelength of each pixel of the camera is determined from the spectrograph geometry and the properties of the dispersive grating. The spectrograph equation takes into account geometric parameters such as the focal length of the spectrograph, the orientation of the camera relative to the optical axis, the orientation of the grating relative to the optical axis after incidence and refraction, the pixel size, and the density of the grooves in the grating.

[0045] As exemplified above, the wavelength at each pixel can be modeled from the parameters mentioned above, including the geometry of the optical system and the position of the electron beam on the sample (x, y), as well as the optical magnification and any other parameters taken into account (i.e., optical aberrations and polynomial components of x, y or λ, etc.).

[0046] Considering that spectral dispersion only occurs in one direction, to increase the signal to noise ratio, all of the pixels on the camera along the y' direction can be summed to measure a one-dimensional array of data representing the spectrum. This is illustrated by the optional summer 53 shown in FIG. 2. The summer 53 converts the two-dimensional matrix pixel data into a linear vector with entries of light intensity summed along one dimension (row or column). Each entry of the vector corresponds to a particular wavelength of cathodoluminescence emitted from the sample. Alternatively, a linear one-dimensional pixel array can be used.

[0047] The parameters can be obtained by the following means: a known sample with known sharp spectral lines may be selected, for example from the scintillators mentioned above, semiconductors, or semiconductor quantum dots. Spectra are measured for different beam positions (x, y) across different spectral ranges and for a preselected calibration crystal. A model is then fitted across all the data to generate an optimal set of parameters that most accurately represents the data. To improve the fitting accuracy, it is preferable to generate a large data set. For example, a hyperspectral map can be obtained for a crystal over a wide field of view with a resolution of 32x32 pixels or more.

[0048] After calibration, the wavelength detected at each pixel is always known and for an unknown sample can be determined from the beam position (x,y) and the orientation of the diffraction grating.

[0049] Although the invention has been described in detail in the drawings and the foregoing description, said drawings and description are to be considered as non-limiting illustrations or examples, and the invention is not limited to the disclosed embodiments. Other embodiments and variations can be understood and effected by those skilled in the art when practicing the claimed invention, based on a study of the drawings, the disclosure, and the appended claims.

[0050] In the claims, the word "comprising" does not exclude other elements or steps, and the indefinite articles "a" or "an" do not exclude a plurality. The mere fact that different features are recited in mutually different dependent claims does not indicate that a combination of these features cannot be used to advantage. Any reference signs in the claims should not be interpreted as limiting the scope of the invention.

Claims

1. 1. A method for calibrating a cathodoluminescence microscope, comprising the steps of: placing a reference sample having a known spectrum at the focus of the microscope and acquiring a plurality of cathodoluminescence spectra across a plurality of pixels of the sensor; aligning each of said cathodoluminescence spectra to said known spectrum; determining an error value for each peak in the cathodoluminescence spectrum relative to a corresponding peak in the known spectrum; using the error values ​​to generate a calibration function; Including the action, A method for calibrating a cathode luminescence microscope, wherein the act of determining an error value includes an act of constructing an error function of a mathematical model of the cathode luminescence microscope, the mathematical model being expressed as a function of spatial coordinates of the sample and a particular pixel of the plurality of pixels of the sensor to generate an expected wavelength of the cathode luminescence spectrum.

2. The method of claim 1 , wherein the act of acquiring a plurality of cathodoluminescence spectra comprises detecting all of the peaks in the cathodoluminescence spectra with sub-pixel accuracy.

3. 3. The method of claim 2, wherein the act of detecting all of the peaks in the cathodoluminescence spectrum with sub-pixel accuracy is done by fitting a quadratic curve through the measurement points of the peaks.

4. The method of claim 1 , wherein the operation of using the error value comprises an operation of minimizing the error function to obtain a value of the mathematical model.

5. The method of claim 4 , further comprising the error function comprising a correction function.

6. The method of claim 5 , wherein the correction function is a polynomial.

7. The method of claim 5 , wherein the correction function produces a zero when the cathodoluminescence spectrum is acquired from a point on the sample that is coincident with an optical axis of the microscope.

8. 8. The method of claim 7, wherein the correction function produces higher values ​​as the cathodoluminescence spectra are acquired from points farther away from the point on the sample coincident with the optical axis of the microscope.

9. The method of claim 1 , wherein the mathematical model further comprises a correction function having a plurality of coefficients.

10. The method of claim 9 , further comprising the act of using the error value to determine values ​​of the plurality of coefficients.

11. The method of claim 1 , further comprising the act of summing values ​​of the pixels of the sensor in one direction to generate a linear vector of pixel values.

12. 1. A cathodoluminescence scanning electron microscope, comprising: An electron column; a focusing optical system within the column that generates a light beam; a spectrometer having a light sensor having a plurality of pixels; a computer having a processor and a memory coupled to the processor for storing instructions; Including, The instructions, when executed by the processor, cause the processor to perform operations including generating an electron beam, directing the electron beam at a reference sample having a known spectrum, directing emitted cathodoluminescence light to the spectrometer, operating the spectrometer to acquire a plurality of cathodoluminescence spectra across the plurality of pixels, aligning each of the cathodoluminescence spectra to the known spectrum, determining an error value for each respective peak of the cathodoluminescence spectrum relative to a corresponding peak of the known spectrum, and using the error values ​​to generate a calibration function; The memory further stores a mathematical model of the collection optical system and spectrometer, the mathematical model being expressed as a function of spatial coordinates of the sample and a particular pixel of the plurality of pixels of the photosensor to generate an expected wavelength of the cathodoluminescence spectrum.

13. The cathodoluminescence scanning electron microscope of claim 12 , wherein the computer further comprises an error function minimizer.

14. The cathodoluminescence scanning electron microscope of claim 12 , wherein the memory further stores a correction function.

15. 13. The cathodoluminescence scanning electron microscope of claim 12, further comprising a summer receiving the plurality of pixels and generating a linear vector of pixel values.

16. A non-transitory computer-readable medium having stored thereon instructions that, when executed by a processor, cause the processor to perform operations, the operations including: acquiring a plurality of cathodoluminescence spectra of a known sample from a plurality of pixels of a sensor of a cathodoluminescence optical system; aligning each of said cathodoluminescence spectra to a reference spectrum of said known sample; determining an error value for each respective peak in the cathodoluminescence spectrum relative to a corresponding peak in the reference spectrum; obtaining a mathematical model of the cathodoluminescence optical system expressed as a function of spatial coordinates of the sample and a particular pixel of the plurality of pixels of the sensor, the mathematical model generating an expected wavelength of the cathodoluminescence spectrum; using the error values ​​to generate calibration functions for all unknown values ​​and coefficients of the mathematical model; A non-transitory computer-readable medium that includes operations.

17. 20. The non-transitory computer-readable medium of claim 16, wherein the operations further comprise minimizing an error function to obtain the unknown values ​​of the mathematical model.

18. 20. The non-transitory computer-readable medium of claim 17, wherein the error function is expressed as a sum of squares of differences between predicted wavelengths and measured wavelengths.

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