Scanning probe microscope, information processing method, and program

Abstract

A scanning probe microscope (100) includes an observation device (80) for observing a sample (S) containing particles, and an information processing device (20). The information processing device (20): generates one or more observation images on the basis of observation data obtained by observing the sample using the observation device (80); calculates a particle parameter representing either a diameter of a particle image contained in the observation image or the number of said particle images; and executes prescribed processing if the one or more observation images include an observation image containing an image of a particle having a particle parameter outside a predetermined range.

Description

[Technical field]

[0001] The present invention relates to a scanning probe microscope, an information processing method, and a program. [Background technology]

[0002] Japanese Patent Laid-Open Publication No. 2000-275159 (Patent Document 1) discloses a scanning probe microscope that has a probe at the tip of a cantilever and that acquires information about the surface of the sample by bringing the probe close to the sample. This scanning probe microscope generates image data based on the acquired information and displays an observation image of the sample surface based on the image data. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2000-275159 A Summary of the Invention [Problem to be solved by the invention]

[0004] The above-mentioned scanning probe microscope may generate image data by observing a sample containing particles, display an observation image containing particle images based on the image data, and use the image data to calculate the number of particle images contained in the image data (hereinafter, particle number). Furthermore, the scanning probe microscope may perform analysis such as statistical analysis using information on the particle number. When the scanning probe microscope performs these processes, if the particle number is not calculated correctly for some reason or if the observation area on the sample has an abnormality and includes an area that should be excluded from the analysis, a problem may occur in which the sample cannot be properly analyzed.

[0005] The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a technique that enables appropriate analysis of a sample. [Means for solving the problem]

[0006] A scanning probe microscope according to an aspect of the present disclosure includes an observation device and an information processing device. The observation device observes a sample including particles. The information processing device generates one or more observation images based on observation data obtained by observing the sample with the observation device. The information processing device calculates a particle parameter indicating a diameter of a particle image or the number of particle images included in the observation image. The information processing device executes a predetermined process when an observation image including an image of a particle whose particle parameter is outside a predetermined range is included in the one or more observation images. Effect of the Invention

[0007] According to the technology of the present disclosure, it is possible to set a range of a particle parameter indicating the diameter of a particle image or the number of particle images, and to detect whether one or more generated observation images contain an inappropriate observation image including a particle image with the particle parameter outside the range. When it is detected that one or more observation images contain an inappropriate observation image, the scanning probe microscope executes a predetermined process to make the user aware that the sample needs to be observed again, or to exclude the inappropriate observation image from the analysis target. Therefore, the scanning probe microscope can perform an appropriate analysis of the sample. [Brief description of the drawings]

[0008] [Figure 1] 1 is a diagram illustrating a schematic configuration of a scanning probe microscope according to an embodiment. [Diagram 2] FIG. 2 illustrates an example of a hardware configuration of an information processing device. [Diagram 3] FIG. 2 is an example of a functional block diagram of an information processing device. [Figure 4] 13 is an example of a threshold setting screen. [Diagram 5] 1 is an example of a flowchart of an information processing device. [Figure 6] 13 is an example of a list screen. [Figure 7] 13 is an example of a list screen according to another embodiment. [Figure 8] 13 is an example of a screen for notifying an abnormality. [Figure 9] 13 is an example of a flowchart of an information processing device according to another embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the following, the same or corresponding parts in the drawings are designated by the same reference characters, and their description will not be repeated in principle.

[0010] [Configuration of a scanning probe microscope] 1 is a diagram showing a schematic configuration of a scanning probe microscope according to an embodiment. The scanning probe microscope 100 according to the embodiment is an atomic force microscope (AFM) that observes a sample S by utilizing an atomic force (attractive or repulsive force) acting between a probe (needle) and the surface of the sample S.

[0011] 1, a scanning probe microscope 100 according to an embodiment of the present invention includes, as main components, an observation device 80, an information processing device 20, a display device 26, and an input device 28. The observation device 80 includes, as main components, an optical system 1, a cantilever 2, a scanner 10, a sample holder 12, and a drive unit 16.

[0012] The scanner 10 has a cylindrical shape and is a moving device for changing the relative positional relationship between the sample S and the probe 3. The sample S is held on a sample holder 12 placed on the scanner 10. The scanner 10 has an XY scanner that scans the sample S in two mutually orthogonal axial directions of X and Y, and a Z scanner that finely moves the sample S in a Z-axis direction orthogonal to the X-axis and Y-axis. The XY scanner and the Z scanner are composed of a piezoelectric element that is deformed by a voltage applied from a driving unit 16, and the scanner 10 scans in three dimensional directions (X-axis direction, Y-axis direction, and Z-axis direction) according to the voltage applied to the piezoelectric element. This makes it possible to change the relative positional relationship between the sample S placed on the scanner 10 and the probe 3.

[0013] The cantilever 2 has a surface facing the sample S and a back surface opposite the surface, and is supported by a holder 4. The cantilever 2 has a probe 3 on the surface of its tip, which is its free end. The probe 3 is disposed facing the sample S. The atomic force acting between the probe 3 and the sample S displaces the cantilever 2 in the Z-axis direction.

[0014] An optical system 1 for detecting the displacement of the cantilever 2 in the Z-axis direction is provided above the cantilever 2. When observing a sample S, the optical system 1 irradiates a laser light onto the back surface of the cantilever 2 and detects the laser light reflected by the back surface of the cantilever 2. The optical system 1 has a laser light source 6, a beam splitter 5, a reflecting mirror 7, and a photodetector 8.

[0015] The laser light source 6 has a laser oscillator that emits a laser beam. The photodetector 8 has a photodiode that detects the incident laser beam. The laser beam LA emitted from the laser light source 6 is reflected by the beam splitter 5 and irradiated onto the back surface of the cantilever 2.

[0016] The back surface of the cantilever 2 is a mirror surface, which can reflect the laser light irradiated from the optical system 1. The laser light reflected by the back surface of the cantilever 2 is further reflected by a reflecting mirror 7 and enters a photodetector 8. By detecting the laser light with the photodetector 8, the displacement of the cantilever 2 can be detected.

[0017] Specifically, the photodetector 8 has a light receiving surface divided into multiple (usually two) parts in the displacement direction (Z-axis direction) of the cantilever 2. Alternatively, the photodetector 8 has a light receiving surface divided into four parts in the Z-axis direction and the Y-axis direction. When the cantilever 2 is displaced in the Z-axis direction, the ratio of the amount of light irradiated to these multiple light receiving surfaces changes. The photodetector 8 outputs a detection signal according to the multiple amounts of received light to the information processing device 20. The detection signal corresponds to "observation data obtained by observing the sample S with the observation device 80" in this disclosure.

[0018] The information processing device 20 is communicatively connected to the optical system 1, the driving unit 16, the display device 26, and the input device 28. The information processing device 20 generates image data based on detection signals output from the photodetector 8 over a predetermined observation area. When observing a sample S containing particles with the scanning probe microscope 100, assuming that the particles are spherical, the amount of displacement (deflection) of the cantilever 2 in the Z-axis direction indicates the diameter of the particles.

[0019] Based on the generated image data, the information processing device 20 displays an observation image on the display device 26. The observation image is an image showing the surface of the sample S. In addition, the information processing device 20 controls the driving unit 16 to drive the scanner 10 in three-dimensional directions.

[0020] The scanning ranges in the X-axis direction and the Y-axis direction of the XY scanner are limited by the operable range of the piezoelectric element. Therefore, when the observation range of the sample S exceeds this scanning range, the scanning probe microscope 100 divides the observation range into N (N is an integer of 2 or more) regions to observe the sample S. When the scanning probe microscope 100 divides the sample S into N regions, the observation device 80 outputs detection signals corresponding to the N regions obtained by observing each of the regions to the information processing device 20. The information processing device 20 generates N pieces of image data based on the detection signals for each of the N regions. The information processing device 20 displays a list of observation images corresponding to the N pieces of image data on the display device 26 composed of a liquid crystal panel or the like. Hereinafter, the images of the particles included in the observation images are referred to as "particle images (see particle images 271 in Figs. 6 and 7 described later)".

[0021] The input device 28 accepts an input operation from the user. The input device 28 outputs a signal corresponding to the content of the user's operation to the information processing device 20. The input device 28 may be a touch panel provided on the display device 26, or may be a dedicated operation button, or physical operation keys such as a mouse or a keyboard.

[0022] [Hardware configuration of information processing device] 2 is a diagram showing an example of a hardware configuration of the information processing device 20. The information processing device 20 has, as main components, a CPU (Central Processing Unit) 160, a ROM (Read Only Memory) 162, a RAM (Random Access Memory) 164, a HDD (Hard Disk Drive) 166, a communication I / F (Interface) 168, a display I / F 170, and an input I / F 172. The components are connected to each other by a data bus. At least a part of the hardware configuration of the information processing device 20 may be located inside the observation device 80. Alternatively, the information processing device 20 may be configured as a separate entity from the scanning probe microscope 100, and configured to communicate bidirectionally with the scanning probe microscope 100.

[0023] The communication I / F 168 is an interface for communicating with the observation device 80. The display I / F 170 is an interface for communicating with the display device . The input I / F 170 is an interface for communicating with the input device .

[0024] ROM 162 stores programs executed by CPU 160. RAM 164 can temporarily store data generated by execution of the programs in CPU 160 and data input via communication I / F 168. RAM 164 can function as a temporary data memory used as a working area. HDD 166 is a non-volatile storage device. Also, instead of HDD 166, a semiconductor storage device such as a flash memory may be adopted.

[0025] Furthermore, the program stored in ROM 162 may be stored in a storage medium and distributed as a program product. Alternatively, the program may be provided by an information provider as a so-called downloadable program product via the Internet or the like. The information processing device 20 reads the program provided via a storage medium or the Internet or the like. The information processing device 20 stores the read program in a predetermined storage area (for example, ROM 162). The CPU 160 executes the stored program to perform the above-mentioned display process.

[0026] The storage medium is not limited to DVD-ROM (Digital Versatile Disk Read Only Memory), CD-ROM (compact disc read-only memory), FD (Flexible Disk), and hard disk, but may be a medium that carries a program in a fixed manner, such as a magnetic tape, a cassette tape, an optical disk (MO (Magnetic Optical Disc) / MD (Mini Disc) / DVD (Digital Versatile Disc)), an optical card, a mask ROM, an EPROM (Electronically Programmable Read-Only Memory), an EEPROM (Electronically Erasable Programmable Read-Only Memory), a flash ROM, or other semiconductor memory. The recording medium is a non-transitory medium that allows a computer to read a program, etc.

[0027] [Processing of information processing device] 3 is an example of a functional block diagram of the information processing device 20. The information processing device 20 includes a first input unit 302, a generation unit 304, a processing unit 306, a second input unit 310, and a storage unit 312.

[0028] The first input unit 302 receives an input of a detection signal from the photodetector 8 and outputs the detection signal to the generation unit 304. The generation unit 304 generates image data based on the detection signal and outputs the image data to the processing unit 306. The processing unit 306 displays an observation image on the display device 26 based on the image data. When the scanning probe microscope 100 observes the sample S in N separate sessions, the processing unit 306 displays a list of N observation images corresponding to each of the N divided observation regions on the display device 26. The number of divisions N of the observation range may be set by the user or may be automatically set by the information processing device 20.

[0029] The processing unit 306 executes a predetermined analysis process on the image data of the sample S. The predetermined analysis process includes particle analysis. The particle analysis includes, for example, a process of counting particle images included in an observation image (hereinafter also referred to as a "counting process"). The particle analysis also includes, for example, a process of generating histogram data showing the relationship between the particle diameters of particles included in all observation images of the sample S and the number of particle images of particles having the particle diameters. The particle analysis may include processes other than those described above. The user can select the particle analysis to be executed by the information processing device 20.

[0030] The user can select an observational image to be subjected to analysis processing from among the N observational images displayed on the display device 26. The user selects an observational image to be subjected to analysis processing using the input device 28 while viewing a list of observational images displayed on the display device 26. The second input unit 310 receives input information input by the user from the input device 28. This input information is information indicating the observational image selected by the user. The input information is temporarily stored in the storage unit 312. The processing unit 306 executes analysis processing on the image data of the observational image indicated by the input information (i.e., the observational image selected by the user). With this configuration, the user can cause the information processing device 20 to execute analysis processing on the observational image selected by the user.

[0031] Incidentally, a user may be able to estimate the approximate range of the number of particle images contained in one observation image of a sample S (hereinafter also referred to as the "estimated range") from the product number of the sample S to be observed. Such a sample S is, for example, an abrasive. The following describes a case where the scanning probe microscope 100 observes an abrasive.

[0032] Furthermore, there are cases where an observation image in which the number of particle images is greater or smaller than the estimated range (hereinafter also referred to as an "inappropriate observation image") is included in the N observation images displayed on the display device 26. First, a case where an observation image in which the number of particle images is greater than the estimated range is included will be described.

[0033] For example, the tip of the probe 3 may be broken and forked. In this case, atomic force acts between one particle and the probe 3 twice in succession during scanning by the scanner 10, and as a result, the processing unit 306 counts one particle as two particles. In this way, when the tip of the probe 3 is forked, the processing unit 306 counts about twice the number of actual particles. As a result of this counting, the number of particle images is more than the estimated range. In addition, when a large number of impurities are mixed in the sample S, the number of particle images is also more than the estimated range. In addition, when the density of particles in the abrasive is abnormally low due to the abrasive not being properly stirred, the number of particle images is less than the estimated range.

[0034] In this way, there may be cases where the number of particle images is not calculated correctly due to some reason (for example, if the tip of probe 3 is forked), or there is an abnormality in the observation area on sample S (for example, if a large number of impurities are mixed in sample S), resulting in the inclusion of an area that should be excluded from the analysis.

[0035] A configuration is also conceivable in which the user checks the number of particle images in each observation image and selects the observation image to be excluded from the analysis target. However, in the scanning probe microscope 100 with this configuration, it is necessary to check the number of particle images included in the observation image, which places a burden on the user. Also, in this configuration, if the user mistakenly selects an inappropriate observation image, an appropriate analysis is not performed, and an analysis process (for example, a process of generating histogram data showing the relationship between particle diameter and the number of particle images of particles having the particle diameter) is performed on the observation image data corresponding to the inappropriate observation image. As a result, a problem may occur in which an erroneous analysis result (an erroneous histogram) is obtained.

[0036] Therefore, the scanning probe microscope 100 of this embodiment is configured so that the user can set a normal range for the number of particle images. The normal range corresponds to the above-mentioned estimated range. Then, the scanning probe microscope 100 displays on the display device 26 observation images including particle images outside the normal range (i.e., inappropriate observation images) so that the user cannot select them. This prevents the user from selecting inappropriate observation images. Therefore, the scanning probe microscope 100 is restricted from performing analysis processing on observation image data corresponding to inappropriate observation images. Therefore, the scanning probe microscope 100 can perform appropriate particle analysis (can perform appropriate analysis on a sample).

[0037] Fig. 4 is an example of a setting screen for the user to set the normal range. The setting screen in Fig. 4 is displayed in the display area 26A of the display device 26 when the user performs a predetermined operation on the input device 28 to display the setting screen.

[0038] With reference to FIG. 4, the setting screen includes an input area 234 for inputting an upper limit value of a particle image on one observation screen, and a decision button 236.

[0039] The user uses the input device 28 to input an upper limit value for the number of particle images in one observation screen into the input area 234. After the upper and lower limit values ​​are input, when the user operates the decision button 236, the second input unit 310 receives the input of the upper and lower limit values ​​and stores the upper and lower limit values ​​in the storage unit 312. In this way, the user sets a normal range determined by the upper and lower limit values. As described above, since the user can set a desired normal range, the user can cause the information processing device 20 to execute an analysis process using the observation images within the normal range.

[0040] 4, an example is shown in which the lower limit is set to 500 and the upper limit is set to 1000. In other words, the normal range is set to 500≦M≦1000 (M is the number of particle images included in one observed image).

[0041] [Flowchart of information processing device] FIG. 5 is an example of a flowchart of the information processing device 20. The process of FIG. 5 is started, for example, when a predetermined start operation is performed by a user on the scanning probe microscope 100. With reference to FIG. 5, in step S2, the generation unit 304 generates observation image data based on the detection signal. In step S4, the processing unit 306 counts the particle images included in the observation image corresponding to one observation image data. Next, in step S8, the processing unit 306 determines whether or not the count value of the particle images included in one observation image is within a normal range. If the count value of the particle images is within the normal range (NO in step S8), the process proceeds to step S10.

[0042] In step S10, the processing unit 306 assigns a non-selection flag to the observation image data corresponding to the observation image in which the particle image count value is outside the normal range. When the process of step S10 is completed or when the result of step S8 is YES, the process proceeds to step S12.

[0043] In step S12, the processing unit 306 judges whether or not all the observed image data has been generated. If all the observed image data has not been generated (NO in step S12), the process returns to step S2. On the other hand, if all the observed image data has been generated (YES in step S12), the process proceeds to step S14.

[0044] In step S14, the processing unit 306 prevents the user from selecting observation images corresponding to the observation image data to which a non-selection flag was assigned in step S10, and displays a list of observation images so that the user can select observation images corresponding to observation image data to which a non-selection flag is not assigned.

[0045] Fig. 6 is an example of the list screen displayed in step S14. In the example of Fig. 6, ten observation images 270 are displayed. Each of the observation images 270 includes one or more particle images 271. A check box 272 and a display area 274 are displayed in association with each of the ten observation images 270. In addition, a selection button 262, a release button 264, a particle size calculation button 266, and an end button 276 are displayed.

[0046] In the display area 274, the number of particle images included in the observation image corresponding to the display area 274 is displayed. In the example of FIG. 6, the number of particle images 271 in the observation image 270A and the observation image 270B is 2000, as shown in the particle number displayed in the display area 274 of the observation image 270A and the observation image 270B. Therefore, the observation image 270A and the observation image 270B are inappropriate images in which the particle number does not belong to the normal range (0≦M≦500). That is, the observation image data of the observation image 270A and the observation image 270B are image data to which a non-selection flag is added in step S10. Therefore, in the example of FIG. 6, the observation image 270A and the observation image 270B are displayed in an unselectable state. In the example of FIG. 6, the unselectable state is a state in which the check box 272 does not display a check 280.

[0047] On the other hand, among the ten observational images 270, the observational images other than the observational image 270A and the observational image 270B are appropriate observational images. Therefore, among the ten observational images 270, the observational images other than the observational image 270A and the observational image 270B are displayed in a selectable state.

[0048] In this way, "the process of displaying on the display device 26 observation images including particle images whose particle counts are within the normal range so as to enable the user to select them, while displaying on the display device 26 observation images including particle images whose particle counts are outside the normal range so as to disable the user from selecting them" corresponds to the specified process of the present disclosure.

[0049] By clicking a check box 272, the user can switch between displaying and hiding a check 280 in the check box 272. Furthermore, even if the check box 272 of the observational image 270A and the observational image 270B is clicked, the check 280 is not displayed. This allows the user to recognize that the observational image 270A and the observational image 270B are inappropriate images.

[0050] When the particle size calculation button 266 is operated, the processing unit 306 executes an analysis process (calculation of particle size in the example of FIG. 6) for the observation image data corresponding to the observation image with the check 280 displayed. On the other hand, the processing unit 306 does not execute an analysis process for the observation image data corresponding to the observation image without the check 280 displayed. Since the user cannot select the observation image 270A and the observation image 270B, it is possible to prevent the analysis process from being executed for each of the observation image data of the observation image 270A and the observation image 270B.

[0051] Furthermore, the number of particles (the number of particle images) contained in the observed image is displayed in a display area 274. In the example of Fig. 6, for observed image 270A and observed image 270B, "2000" is displayed in the display area 274, and for the other observed images, "800" is displayed in the display area 274. This allows the user to recognize the number of particles contained in the observed image.

[0052] Furthermore, when the select button 262 is operated, checks 280 are displayed in all the check boxes 272 for the appropriate observational images at once. Furthermore, when the release button 264 is operated, the checks 280 displayed in all the check boxes 272 for the appropriate observational images are hidden at once. In this way, the checks 280 can be displayed or hidden at once, thereby improving user convenience. Furthermore, when the end button 276 is operated, the list screen transitions to another screen (for example, the home screen).

[0053] 6, the scanning probe microscope 100 can prevent the user from selecting an inappropriate observation image. Also, the scanning probe microscope 100 can allow the user to select an observation image to be subjected to analysis processing.

[0054] [Other embodiments] (1) In the list screen of Fig. 6, the configuration has been described in which inappropriate observational images are displayed on the display device 26 in a state where they cannot be selected. However, a configuration may be adopted in which inappropriate observational images are not displayed on the display device 26.

[0055] FIG. 7 is an example of the list screen in this embodiment. In FIG. 7, inappropriate observation images (observation image 270A and observation image 270B in FIG. 6) are not displayed on the display device 26. With the configuration as shown in FIG. 8, it is possible to prevent an analysis process from being performed on observation image data corresponding to an inappropriate observation image. In addition, since inappropriate observation images are not displayed, the number of displayed observation images can be reduced, making it easier for the user to view the list screen. Also, in the list screen of FIG. 7, when the particle size calculation button 266 is operated, the processing unit 306 executes an analysis process (calculation of particle size in the example of FIG. 7) on the observation image data corresponding to the observation image with the check 280 displayed.

[0056] (2) In addition, when the generating unit 304 generates observation image data corresponding to an inappropriate observation image, the processing unit 306 may execute a predetermined abnormality notification. The abnormality notification may be, for example, a display of an image for abnormality notification on the display device 26, or an abnormal sound may be output from a speaker (not shown). FIG. 8 is an example of an image for abnormality notification. In the example of FIG. 8, an image with a statement such as "Observation images in which the particle count is outside the normal range are included" is displayed. By such an abnormality notification, the scanning probe microscope 100 can make the user recognize that an inappropriate observation image has been obtained. In addition, when an inappropriate observation image is included, the scanning probe microscope 100 can perform an appropriate particle analysis by the user replacing the damaged probe 3 or the sample S.

[0057] (3) In the above embodiment, a configuration has been described in which an observation image is displayed on the display device 26. However, the scanning probe microscope 100 may not display the observation image on the display device 26. In this case, the processing unit 306 may execute analysis processing on observation image data corresponding to an appropriate observation image, while not executing analysis processing on observation image data corresponding to an inappropriate observation image (regulating the execution of analysis processing). Even with such a configuration, the scanning probe microscope 100 can perform appropriate particle analysis.

[0058] (4) In the above embodiment, the particle parameter for determining whether or not the particle parameter is within the normal range is the number of particle images. However, a configuration in which the particle parameter is the particle diameter may be adopted. In this configuration, the processing unit 306 calculates the particle diameter of the particles included in the observation image corresponding to the observation image data generated by the generation unit 304. Furthermore, the processing unit 306 displays a list of the observation images, and performs an analysis process on the observation image data of the observation image selected by the user. This analysis process is, for example, a process of generating histogram data indicating the particle diameter of the particles included in the sample S and the number of particle images of the particles having the particle diameter.

[0059] As described in the above embodiment, the processing unit 306 calculates the particle diameter by assuming that the displacement of the cantilever 2 in the Z-axis direction is the particle diameter. For example, when the density of particles in the sample S is abnormally high, the displacement of the cantilever 2 in the Z-axis direction becomes larger than the actual particle diameter due to stacking of multiple particles. Also, when the sample S is defective, the particle diameter of the sample S may be abnormally small. In this way, when the generating unit 304 generates observation image data in which the particle diameter is abnormally large or abnormally small, an inappropriate analysis process (an inappropriate histogram generating process) is executed.

[0060] Therefore, the scanning probe microscope 100 may execute the process of the above embodiment with the particle diameter as the particle parameter. In this configuration, the user sets the normal range for the particle diameter. FIG. 9 is a flowchart of the information processing device of this embodiment. In step S41 after step S2 in FIG. 9, the processing unit 306 calculates the particle diameter of the particle image included in the observation image corresponding to one observation image data. This calculation of the particle diameter is realized by a predetermined method. Next, in step S81, the processing unit 306 judges whether the calculated particle diameter belongs to the normal range. If NO is determined in step S81, the process proceeds to step S10, and if YES is determined in step S81, the process proceeds to step S12. Also, the particle parameter may include both the particle diameter and the number of particles.

[0061] (5) In the above embodiment, an example has been described in which the normal range is defined by an upper limit value and a lower limit value (see FIG. 4, etc.). However, the normal range may be defined by either an upper limit value or a lower limit value. When the normal range is defined by an upper limit value, the normal range is 0≦M≦upper limit value. When the normal range is defined by a lower limit value, the normal range is lower limit value≦M≦∞. In this way, the normal value is determined by at least one of the upper limit value and the lower limit value. Therefore, the information processing device 20 can set the normal range based on at least one of the upper limit value and the lower limit value.

[0062] (6) In the above embodiment, the configuration has been described in which the user sets the normal range (see FIG. 4, etc.). However, the processing unit 306 of the information processing device 20 may set the normal range. For example, a normal range is associated with each sample ID (identification) of a plurality of samples S. The user inputs the sample ID using the input device 28, and the information processing device 20 sets the normal range corresponding to the input sample ID. With such a configuration, it is possible to reduce the burden on the user in setting the normal range.

[0063] (7) In the above embodiment, a configuration in which the concept of the present embodiment is adopted in a scanning probe microscope has been described. However, the concept of the present embodiment may be adopted in a microscope other than a scanning probe microscope (for example, a confocal laser scanning microscope).

[0064] [Aspects] It will be appreciated by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0065] (Item 1) A scanning probe microscope according to one embodiment comprises an observation device for observing a sample containing particles, and an information processing device, and the information processing device generates one or more observation images based on observation data obtained by observing the sample with the observation device, calculates particle parameters indicating the diameter of a particle image or the number of particle images contained in the observation images, and executes a specified process when an observation image containing an image of a particle whose particle parameter is outside a predetermined range is included in the one or more observation images.

[0066] According to the electric microscope described in paragraph 1, a range of a particle parameter indicating the diameter of a particle image or the number of particle images can be set, and it can be detected that one or more generated observation images contain an inappropriate observation image including a particle image with the particle parameter outside the range. When it is detected that one or more observation images contain an inappropriate observation image, the scanning probe microscope executes a predetermined process to make the user aware that the sample needs to be observed again, or to exclude the inappropriate observation image from the analysis target. Therefore, the scanning probe microscope can perform an appropriate analysis of the sample.

[0067] (Item 2) The scanning probe microscope described in item 1 is equipped with a display unit controlled by an information processing device, and the specified processing includes processing for displaying on the display unit observation images whose particle parameters are within a range so that the user can select them, while displaying on the display unit observation images including images of particles whose particle parameters are outside the range so that the user cannot select them, and the information processing device executes analysis processing on the observation image data corresponding to the observation image selected by the user.

[0068] According to the scanning probe microscope described in paragraph 2, it is possible to prevent the user from selecting an inappropriate observation image, and therefore it is possible to allow the user to select the observation image to be subjected to the analysis process.

[0069] (Item 3) The scanning probe microscope described in item 1 is equipped with a display unit controlled by an information processing device, and the specified processing includes processing for displaying, on the display unit, observation images whose particle parameters are within a range, while not displaying observation images whose particle parameters are outside the range.

[0070] According to the scanning probe microscope described in item 3, inappropriate observation images are not displayed, so that the number of displayed observation images can be reduced, making it easier for the user to view the list of observation images.

[0071] (Item 4) In the scanning probe microscope described in item 3, when an observation image displayed on the display unit is selected by a user, the information processing device performs analysis processing on the observation image data corresponding to the selected observation image.

[0072] According to the scanning probe microscope described in item 4, it is possible to allow the user to select the observed image to be subjected to the analysis process.

[0073] (Item 5) In the scanning probe microscope described in item 1, the specified processing includes processing for executing an analysis process on observation image data corresponding to an observation image whose particle parameters are within the range, and processing for restricting the execution of the analysis process on observation image data corresponding to an observation image whose particle parameters are outside the range.

[0074] According to the scanning probe microscope described in the fifth aspect, it is possible to prevent analysis from being performed on observed image data corresponding to an inappropriate observed image.

[0075] (Item 6) In the scanning probe microscope described in any one of items 1 to 5, the specified processing includes processing for notifying that one or more observation images contain an image of a particle whose particle parameters are outside the range.

[0076] According to the scanning probe microscope described in item 6, it is possible to make the user aware that an inappropriate observation image has been generated.

[0077] (Item 7) In the scanning probe microscope according to any one of items 1 to 6, the range is determined by at least one of an upper limit value of a particle parameter and a lower limit value of the particle parameter.

[0078] According to the scanning probe microscope described in item 7, the information processing device can set at least one of an upper limit value and a lower limit value of a particle parameter.

[0079] (Item 8) In the scanning probe microscope according to any one of items 1 to 7, the threshold value can be set by the user.

[0080] According to the scanning probe microscope described in item 8, it is possible to cause the information processing device to execute an analysis process using an observation image of a normal range desired by the user.

[0081] (Item 9) An information processing method according to one embodiment is an information processing method by an information processing device capable of communicating with an observation device that observes a sample containing particles, and includes the steps of generating one or more observation images based on observation data obtained by observing the sample with the observation device, calculating a particle parameter indicating the diameter of a particle image or the number of particle images contained in the observation image, and performing a specified process when an observation image including an image of a particle whose particle parameter is outside a predetermined range is included in the one or more observation images.

[0082] According to the information processing method described in paragraph 9, it is possible to detect whether one or more generated observation images contain an inappropriate observation image including a particle image in which a particle parameter indicating the diameter of the particle image or the number of particle images is outside a predetermined range. When it is detected that one or more observation images contain an inappropriate observation image, a predetermined process is executed to make the user aware that the sample needs to be observed again or to exclude the inappropriate observation image from the analysis target. Therefore, according to this information processing method, it is possible to perform an appropriate analysis of the sample.

[0083] (Item 10) A program according to one embodiment causes a computer capable of communicating with an observation device for observing a sample containing particles to execute the steps of: generating one or more observation images based on observation data obtained by observing the sample with the observation device; calculating a particle parameter indicating the diameter of a particle image or the number of particle images contained in the observation image; and performing a specified process when the one or more observation images include an observation image containing an image of a particle whose particle parameter is outside a predetermined range.

[0084] According to the program described in paragraph 10, it is possible to detect whether one or more generated observation images contain an inappropriate observation image including a particle image in which a particle parameter indicating the diameter of the particle image or the number of particle images is outside a predetermined range. When it is detected that one or more observation images contain an inappropriate observation image, a predetermined process is executed to make the user aware that the sample needs to be observed again or to exclude the inappropriate observation image from the analysis target. Therefore, according to this information processing method, it is possible to perform an appropriate analysis of the sample.

[0085] The embodiments disclosed herein are also intended to be combined as appropriate within the scope of technical inconsistency. The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present embodiment is indicated by the claims, not the description of the above embodiments, and is intended to include all modifications within the scope and meaning equivalent to the claims. [Explanation of symbols]

[0086] 1 optical system, 2 cantilever, 3 probe, 4 holder, 5 beam splitter, 6 laser light source, 7 reflecting mirror, 8 photodetector, 10 scanner, 12 sample holder, 16 drive unit, 20 information processing unit, 26 display unit, 26A display area, 28 input unit, 80 observation unit, 100 scanning probe microscope, 162 ROM, 164 RAM, 200 analysis unit, 304 generation unit, 236 decision button, 262 selection button, 264 release button, 266 particle size calculation button, 270 observed image, 271 particle image, 272 check box, 274 display area, 276 end button, 280 check, 302 first input unit, 306 processing unit, 310 second input unit, 312 storage unit.

Claims

1. An observation device for observing a sample including particles; An information processing device; a display unit controlled by the information processing device, the information processing device generates a plurality of observation images based on observation data obtained by observing the sample with the observation device, calculates a particle parameter indicating a diameter of a particle image or a number of the particle images included in the observation images, and executes a predetermined process when an observation image including an image of the particle whose particle parameter is outside a predetermined range is included in the plurality of observation images; the predetermined processing includes processing for displaying on the display unit an observation image having the particle parameter within the range among the plurality of observation images so as to be selectable by a user, while displaying on the display unit an observation image including an image of the particle having the particle parameter outside the range among the plurality of observation images so as to be unselectable by a user, The information processing device executes an analysis process on observed image data corresponding to an observed image selected by a user.

2. An observation device for observing a sample including particles; An information processing device; a display unit controlled by the information processing device, the information processing device generates one or more observation images based on observation data obtained by observing the sample with the observation device, calculates a particle parameter indicating a diameter of a particle image or a number of the particle images included in the observation images, and executes a predetermined process when an observation image including an image of the particle whose particle parameter is outside a predetermined range is included in the one or more observation images; The predetermined processing includes processing for displaying, on the display unit, an observation image in which the particle parameter is within the range, while not displaying an observation image in which the particle parameter is outside the range.

3. the predetermined process includes, when there are a plurality of observation images whose particle parameters are within the range, a process of displaying the plurality of observation images on the display unit so as to enable a user to select the plurality of observation images; 3. The scanning probe microscope according to claim 2, wherein the information processing device, when an observation image displayed on the display unit is selected by a user, executes an analysis process on observation image data corresponding to the selected observation image.

4. 2. The scanning probe microscope according to claim 1, wherein the predetermined processing includes processing for executing an analysis process on observation image data corresponding to an observation image whose particle parameter is within the range, and processing for restricting execution of the analysis process on observation image data corresponding to an observation image whose particle parameter is outside the range.

5. 2. The scanning probe microscope according to claim 1, wherein the predetermined processing includes a processing for notifying that an observation image including an image of the particle whose particle parameter is outside the range is included in the plurality of observation images.

6. 2. The scanning probe microscope according to claim 1, wherein the range is determined by at least one of an upper limit value of the particle parameter and a lower limit value of the particle parameter.

7. The scanning probe microscope according to claim 1 , wherein the range is user-configurable.

8. 1. An information processing method by an information processing device capable of communicating with an observation device that observes a sample including particles, comprising: generating a plurality of observation images based on observation data obtained by observing the sample with the observation device; calculating a particle parameter indicating a diameter of a particle image or a number of the particle images included in the observed image; and executing a predetermined process when an observation image including an image of the particle whose particle parameter is outside a predetermined range is included in the plurality of observation images, the predetermined processing includes processing for displaying on a display unit an observation image of which the particle parameter is within the range among the plurality of observation images so as to be selectable by a user, while displaying on the display unit an observation image of which the particle parameter is outside the range among the plurality of observation images so as to be unselectable by the user, The information processing method further comprises a step of executing an analysis process on observed image data corresponding to an observed image selected by a user.

9. 1. An information processing method by an information processing device capable of communicating with an observation device that observes a sample including particles, comprising: generating one or more observation images based on observation data obtained by observing the sample with the observation device; calculating a particle parameter indicating a diameter of a particle image or a number of the particle images included in the observed image; and executing a predetermined process when an observation image including an image of the particle whose particle parameter is outside a predetermined range is included in the one or more observation images, The information processing method, wherein the predetermined processing includes processing for displaying, on a display unit, an observation image in which the particle parameter is within the range, while not displaying an observation image in which the particle parameter is outside the range.

10. A program for causing a computer capable of communicating with an observation device for observing a sample including particles to execute an information processing method, The information processing method includes: generating a plurality of observation images based on observation data obtained by observing the sample with the observation device; calculating a particle parameter indicating a diameter of a particle image or a number of the particle images included in the observed image; and executing a predetermined process when an observation image including an image of the particle whose particle parameter is outside a predetermined range is included in the plurality of observation images, the predetermined processing includes processing for displaying on a display unit an observation image of which the particle parameter is within the range among the plurality of observation images so as to be selectable by a user, while displaying on the display unit an observation image of which the particle parameter is outside the range among the plurality of observation images so as to be unselectable by the user, The information processing method further comprises a step of executing an analysis process on observation image data corresponding to an observation image selected by a user.

11. A program for causing a computer capable of communicating with an observation device for observing a sample including particles to execute an information processing method, The information processing method includes: generating one or more observation images based on observation data obtained by observing the sample with the observation device; calculating a particle parameter indicating a diameter of a particle image or a number of the particle images included in the observed image; and executing a predetermined process when an observation image including an image of the particle whose particle parameter is outside a predetermined range is included in the one or more observation images, The predetermined processing includes processing for displaying, on a display unit, an observation image in which the particle parameter is within the range, while not displaying an observation image in which the particle parameter is outside the range.

Images