Scanning probe microscope

Abstract

To reduce the work load on a user generated when a probe is brought in contact with the surface of a sample and the measurement environment of a scan type probe microscope for measuring the shape of the surface of the sample is changed.SOLUTION: A scan type probe microscope 100 is a scan type probe microscope for measuring the surface of a sample S by using a probe 109. The scan type probe microscope 100 includes: a microscope body part 10 having a probe 109; a controller 11 for controlling a microscope body part 10; an anti-vibration table 12 for supporting the microscope body part 10 arranged in a region R1; a housing 13 for containing the microscope body part 10, the controller 11, and the anti-vibration table 12; and a movement mechanism 14 used to move the housing 13.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present disclosure relates to a scanning probe microscope.

Background Art

[0002] Conventionally, a scanning probe microscope that measures the shape of a sample surface by bringing a probe into contact with the sample surface is known. Although the scanning probe microscope has excellent resolution, it is easily affected by floor vibrations. Therefore, Patent Document 1 (Japanese Patent Application Laid-Open No. 11-271335) describes a probe microscope provided with a vibration isolation mechanism for removing the transmission of external vibrations.

[0003] The vibration isolation mechanism is composed of a surface plate for setting the entire probe microscope unit and a vibration isolation table for removing the transmission of external vibrations to the probe microscope unit set on the surface plate. The surface plate is arranged on the floor surface.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] Measurement by a scanning probe microscope is preferably performed in a measurement environment in which the sample does not deteriorate. Therefore, there is a desire to easily change the measurement environment of the scanning probe microscope to a desired measurement environment adapted to the sample.

[0006] In the probe microscope described in Patent Document 1 (JP-A-11-271335), when changing to a desired measurement environment, it is necessary to transport the vibration isolation table along with the probe microscope unit to the desired measurement environment. Since a vibration isolation table is necessary for observation with high resolution, the user must transport both the probe microscope unit and the vibration isolation table. Transporting the probe microscope unit, which is a precision machine, and the vibration isolation table, which is heavy, can increase the workload of the user.

[0007] This disclosure has been made to solve the above-mentioned problems, and its purpose is to reduce the workload on the user when changing the measurement environment of a scanning probe microscope, which measures the shape of a sample surface by bringing a probe into contact with the surface of the sample. [Means for solving the problem]

[0008] A scanning probe microscope according to a certain aspect of this disclosure is a scanning probe microscope that measures the surface of a sample using a probe. The scanning probe microscope comprises a microscope body having a probe, a control device for controlling the microscope body, a vibration isolation table that supports the microscope body and is located in a first region, a housing that houses the microscope body, the control device, and the vibration isolation table, and a moving mechanism used to move the housing. [Effects of the Invention]

[0009] According to this disclosure, it is possible to reduce the workload on the user when changing the measurement environment of a scanning probe microscope, which measures the shape of a sample surface by bringing a probe into contact with the surface of the sample. [Brief explanation of the drawing]

[0010] [Figure 1] This figure schematically shows the configuration of a scanning probe microscope according to Embodiment 1. [Figure 2] This diagram illustrates an example of the arrangement of each component of the scanning probe microscope in Embodiment 1. [Figure 3]This diagram illustrates an example of the arrangement of each component when the scanning probe microscope is moved in Embodiment 1. [Figure 4] This figure illustrates an example of the arrangement of each component of the scanning probe microscope in Embodiment 2. [Figure 5] This figure illustrates an example of the arrangement of each component when the scanning probe microscope is moved in Embodiment 2. [Figure 6] This figure illustrates an example of the arrangement of each component of the scanning probe microscope in Embodiment 3. [Figure 7] This figure illustrates an example of the arrangement of each component when the scanning probe microscope is moved in Embodiment 3. [Modes for carrying out the invention]

[0011] [Embodiment 1] This embodiment will be described in detail with reference to the drawings. Note that identical or corresponding parts in the drawings are denoted by the same reference numerals, and their descriptions will not be repeated in principle.

[0012] [Configuration of a scanning probe microscope] Figure 1 is a schematic diagram showing the configuration of a scanning probe microscope (SPM) according to Embodiment 1. The scanning probe microscope 100 according to Embodiment 1 is typically an automatic force microscope (AFM) that observes the shape of the surface of a sample S by utilizing the interatomic force (attractive or repulsive force) acting between the probe (probe) 109 and the surface of the sample S. This disclosure can be similarly applied to other scanning probe microscopes, such as scanning tunneling microscopes (STM).

[0013] In the following explanation, the mounting surface of the scanning probe microscope 100 is defined as the XY plane, and the axis perpendicular to the XY plane is defined as the Z axis. Hereafter, the positive direction of the Z axis will be referred to as "upward," and the negative direction of the Z axis will be referred to as "downward."

[0014] As shown in FIG. 1, the scanning probe microscope 100 includes a microscope main body 10, a control device 11, a vibration isolation table 12, a housing 13, a moving mechanism 14, and a support portion 15. The microscope main body 10 includes a cantilever 101, a fixing device 102, a sample stage 103, a laser light source 104, a light receiver 105, a Z-direction actuator 106, and an X-Y direction actuator 107.

[0015] The sample S is placed on the sample stage 103. The Z-direction actuator 106 that moves the sample stage 103 in the vertical direction (Z direction) is provided below the sample stage 103. The X-Y direction actuator 107 that moves the sample stage 103 and the Z-direction actuator 106 in the X-Y direction is provided below the Z-direction actuator 106.

[0016] The Z-direction actuator 106 and the X-Y direction actuator 107 have piezo elements. The Z-direction actuator 106 and the X-Y direction actuator 107 adjust the position of the sample stage 103 by the voltage applied to the piezo elements. Thereby, the Z-direction actuator 106 and the X-Y direction actuator 107 change the distance between the sample S and the tip portion 108 of the cantilever 101. The Z-direction actuator 106 and the X-Y direction actuator 107 are also referred to as position adjusting devices.

[0017] The cantilever 101 is provided above the sample S. The probe 109 is provided at the tip portion 108 which is one end side of the cantilever 101. The probe 109 is provided on the surface of the cantilever 101 so as to face the sample S. That is, the surface of the cantilever 101 is the surface facing the sample S.

[0018] The rear end portion 110 which is the other end side of the tip portion 108 of the cantilever 101 is connected to and fixed by the fixing device 102. The cantilever 101 has flexibility. That is, the cantilever 101 can be bent when pressed against the sample S.

[0019] The laser light source 104 and the light receiver 105 are provided above the cantilever 101. When measuring the sample S, the laser light source 104 irradiates the back surface of the tip 108 of the cantilever 101 with the laser light LA. The back surface of the cantilever 101 is the surface opposite to the surface facing the sample S.

[0020] The light receiver 105 is a sensor that detects the laser light LA. The light receiver 105 is provided at a position where it can receive the laser light LA reflected by the back surface of the cantilever 101. The light receiver 105 receives the laser light LA reflected from the back surface of the tip 108 of the cantilever 101.

[0021] Note that the position adjustment device for changing the distance between the sample S and the tip 108 of the cantilever 101 is not limited to the Z-direction actuator 106 and the X-Y direction actuator 107. For example, it may be a movable fixing device 102.

[0022] The movable fixing device 102 has, for example, a rack and pinion mechanism and a motor inside the fixing device 102, and changes the position of the cantilever 101 by driving the motor. That is, in the movable fixing device 102, the sample S is fixed and the position of the rear end 110 of the cantilever 101 is adjusted. Also, in the first embodiment, the position adjustment device for changing the distance between the sample S and the tip 108 of the cantilever 101 may be composed of both the Z-direction actuator 106 and the X-Y direction actuator 107 and the movable fixing device 102.

[0023] The control device 11 is embodied by hardware such as a CPU (central processing unit) and a memory, and software that performs the arithmetic processing described below.

[0024] The control device 11 controls the operation of the microscope body 10. In Embodiment 1, the control device 11 is configured according to hardware dedicated to the scanning probe microscope 100. However, the control device 11 may be configured using a general-purpose computer architecture. The control device 11 includes a processor 111 and memory 112. A display device and an input device, not shown in Figure 1, are connected to the control device 11.

[0025] The processor 111 is typically an arithmetic processing unit such as a CPU (Central Processing Unit) or an MPU (Multi-Processing Unit). The processor 111 reads and executes programs stored in memory 112 to perform the processing of the control device 11. Although the example in Figure 1 illustrates a configuration with a single processor, the control device 11 may have multiple processors.

[0026] Memory 112 is implemented using non-volatile memory such as RAM (Random Access Memory), ROM (Read Only Memory), and flash memory. Memory 112 stores programs executed by processor 111, or data used by processor 111. For example, memory 112 stores various programs.

[0027] The memory 112 may be any of the following, as long as it is in a format that can be read by the control device 11, which is a type of computer, and can record programs non-temporarily: CD-ROM (Compact Disc - Read Only Memory), DVD-ROM (Digital Versatile Disk - Read Only Memory), USB (Universal Serial Bus) memory, memory card, FD (Flexible Disk), hard disk, SSD (Solid State Drive), magnetic tape, cassette tape, MO (Magnetic Optical Disc), MD (Mini Disc), IC (Integrated Circuit) card (excluding memory cards), optical card, mask ROM, or EPROM.

[0028] The control device 11 sends a control signal to an optical system drive device (not shown). The optical system drive device drives the laser light source 104 and the photodetector 105 according to the control signal. As a result, the control device 11 performs emission control and position control of the laser light source 104 and controls the position of the photodetector 105. The photodetector 105 outputs detection information of the laser light LA ​​to the control device 11.

[0029] The control device 11 sends a control signal to an actuator drive device (not shown), and the actuator drive device applies voltage to the piezoelectric elements of the Z-direction actuator 106 and the XY-direction actuator 107 in accordance with the control signal. In this way, the control device 11 controls the relative positional relationship between the cantilever 101 and the sample S.

[0030] Based on the detection information input from the photodetector 105, the control device 11 identifies the incident position of the laser beam LA detected by the photodetector 105, and calculates the position of the tip portion 108 of the cantilever 101 in the Z direction, i.e., the amount of deflection of the cantilever 101 in the Z direction, based on that input position.

[0031] The vibration isolation table 12 supports the microscope body 10 and eliminates vibrations generated in the microscope body 10. That is, the microscope body 10 can be placed on the vibration isolation table 12. The vibration isolation table 12 may be either a passive type vibration isolation table that includes specific components such as vibration-absorbing rubber and air springs, or an active type vibration isolation table that eliminates vibrations by applying a force in the opposite direction to the vibration detected by electrical control.

[0032] The support portion 15 supports the microscope body 10. In Embodiment 1, the support portion 15 is a support stand. That is, the microscope body 10 can be placed on either the support stand or the vibration isolation stand 12.

[0033] The housing 13 houses the microscope body 10, at least the control device 11, and the vibration isolation table 12. As will be explained in Figures 2 to 7 below, the housing 13 may include a lid and a box. As will be explained later in Figure 2, the housing 13 has a gripping part 131 that is grasped by the user. The moving mechanism 14 is used to move the housing 13. The moving mechanism 14 is typically a wheel.

[0034] [Examples of Scanning Probe Microscope Use] Figure 2 is a diagram illustrating an example of the arrangement of the components of the scanning probe microscope 100 in Embodiment 1. As shown in Figure 2, the housing 13 contains the microscope body 10, control device 11, vibration isolation table 12, support unit 15, monitor 16, terminal 17, and accessories 18.

[0035] In Embodiment 1, the housing 13 includes a lid 13A and a box 13B. The box 13B houses the control device 11, terminal 17, and accessories 18. The box 13B is provided with an opening (not shown) through which the user can remove and store the control device 11, terminal 17, and accessories 18.

[0036] Terminal 17 is a general-purpose PC capable of receiving commands from the user. Equipment 18 is experimental equipment such as tweezers for grasping the sample S. The control device 11 is connected to the microscope body 10 via a wire. Through holes are formed in the vibration isolation table 12 and the box section 13B for passing the wire connecting the control device 11 and the microscope body 10.

[0037] Furthermore, the control device 11 is connected to the terminal 17. In addition, the terminal 17 is connected to the monitor 16 via a wire. Through holes are formed in the support portion 15 and the box portion 13B for passing the wire connecting the terminal 17 and the monitor 16.

[0038] A vibration isolation platform 12 and a support portion 15 are placed on the upper surface of the box portion 13B. The lid portion 13A in Embodiment 1 has a shape that allows it to be fitted into the end of the upper surface of the box portion 13B. When the lid portion 13A and the box portion 13B are fitted together, a space is formed between the lid portion 13A and the box portion 13B. As shown in Figure 2, the vibration isolation platform 12, the microscope body portion 10 which is placed on the vibration isolation platform 12, the support portion 15, and the monitor 16 which is placed on the support portion 15 are housed in the space between the lid portion 13A and the box portion 13B.

[0039] In the scanning probe microscope 100 of Embodiment 1, when measuring the surface of a sample S, the lid 13A is removed by the user. This exposes the microscope body 10 and the monitor 16. The monitor 16 may display the measurement results of the microscope body 10. The user also inputs commands to the microscope body 10 using an input device (not shown), such as a keyboard.

[0040] The microscope body 10 weighs approximately 15 kg, and the control device 11 weighs approximately 5 kg. In Embodiment 1, the scanning probe microscope 100, including the housing 13 and all other components, weighs approximately 100 kg.

[0041] Measurements using the scanning probe microscope 100 should be performed under a desired measurement environment that corresponds to the type and material of the sample S. This is because, depending on the type and material of the sample S, changes or deterioration in the properties or state of the sample S may occur in an environment other than the desired measurement environment. The desired measurement environment includes, for example, an environment with a specific temperature, humidity, and a sterilized cleanroom. Thus, the desired measurement environment changes depending on the type and material of the sample S, but the task of moving each component included in the scanning probe microscope each time the type and material of the sample S changes can increase the workload for the user.

[0042] Therefore, in the scanning probe microscope 100 of Embodiment 1, the presence of a moving mechanism 14 allows for easy transport of the scanning probe microscope 100, which weighs approximately 100 kg.

[0043] Specifically, on the negative Z-axis side of the box section 13B, tires 141 and 142 are provided as an example of the moving mechanism 14. Additionally, a gripping section 131 is provided on the negative X-axis side of the box section 13B. The gripping section 131 may also be provided on the lid section 13A. The user grasps the gripping section 131 and pushes the housing 13. This causes the tires 141 and 142 to rotate, moving the housing 13 toward the positive X-axis. Although only two tires are shown in Figure 2 for simplicity, the moving mechanism 14 includes four tires. The number of tires included in the moving mechanism 14 is not limited to two or four.

[0044] Thus, in Embodiment 1, the presence of tires 141 and 142 on the negative Z-axis side of the box portion 13B allows for easy transport of the scanning probe microscope 100, thereby reducing the user's workload.

[0045] In the scanning probe microscope 100 shown in Figure 2, the housing 13 is equipped with wheels 141 and 142, allowing the user to easily transport all components included in the scanning probe microscope 100 together. This reduces the user's workload when changing the measurement environment. In other words, the scanning probe microscope 100 allows for easy measurement under measurement environments appropriate to the type and material of the sample S.

[0046] Furthermore, for example, in school education or employee training, the scanning probe microscope 100 may be transported to a room capable of accommodating a large number of people in order to explain the scanning probe microscope 100. Even in such cases, the user can easily transport the scanning probe microscope 100 from the laboratory where it is normally located to a school classroom or the office where the training takes place.

[0047] As shown in Figure 2, the microscope body 10 is positioned on the vibration isolation table 12. Hereinafter, the area on the vibration isolation table 12 will be referred to as "area R1". Area R1 is an example of the "first area" in this disclosure. Area R1 is the area occupied by the microscope body 10 when it is positioned on the vibration isolation table 12.

[0048] As described above, the vibration isolation table 12 includes components for eliminating vibrations generated in the microscope body 10. Passive vibration isolation tables 12 include specific components such as vibration-absorbing rubber and air springs, while active vibration isolation tables 12 include a control mechanism for electrical control. If the housing 13 is moved while the microscope body 10 is placed on the vibration isolation table 12, it may induce deterioration of the specific components such as vibration-absorbing rubber and air springs in passive vibration isolation tables, or failure of the control mechanism in active vibration isolation tables.

[0049] Therefore, in the scanning probe microscope 100 of Embodiment 1, when the scanning probe microscope 100 is moved using the movement mechanism 14, the microscope body 10 is moved out of region R1. More specifically, the microscope body 10 is moved from region R1 to region R2 on the support 15. Region R2 is an example of the "second region" in this disclosure. Region R2 is the region occupied by the microscope body 10 when it is positioned on the support 15.

[0050] Figure 3 is a diagram illustrating an example of the arrangement of each component when the scanning probe microscope 100 is moved in Embodiment 1. As shown in Figure 3, when moved, the monitor 16 is housed inside the box portion 13B. Also, the microscope body portion 10 is moved from region R1 to region R2. In this way, in the scanning probe microscope 100 of Embodiment 1, no components are placed on the vibration isolation table 12 when the scanning probe microscope 100 is transported. As a result, the scanning probe microscope 100 of Embodiment 1 can suppress deterioration or failure of the vibration isolation table 12 when moved.

[0051] Furthermore, as shown in Figure 3, the microscope body 10 in Embodiment 1 can maintain its connection with the control device 11 even after being moved to region R2. This eliminates the need to disconnect the microscope body 10 from the control device 11 when moving the scanning probe microscope 100, thereby reducing the user's workload.

[0052] Furthermore, as shown in Figure 3, region R2 is positioned to overlap with region R1 when viewed from the X-axis direction. In other words, region R2 is positioned to overlap with region R1 when the vibration isolation table 12 is viewed from any direction perpendicular to the normal direction of the mounting surface of the microscope body 10 on the vibration isolation table 12. To put it another way, the height of region R2 is at the same height as the height of region R1. That is, the support section 15 and the vibration isolation table 12 are at the same height.

[0053] As a result, in the scanning probe microscope 100 of Embodiment 1, when the microscope body 10 is moved by the user from region R1 to region R2, it is not necessary to move the microscope body 10 in the Z-axis direction, thereby reducing the workload on the user. In other words, the scanning probe microscope 100 reduces the amount of work the user has to do to lift and lower the microscope body 10. Furthermore, by arranging the vibration isolation table 12 and the support unit 15 side by side on the XY plane, the scanning probe microscope 100 of Embodiment 1 can be made more space-efficient in the Z-axis direction.

[0054] [Embodiment 2] In the scanning probe microscope 100 of Embodiment 1, a configuration was described in which the microscope body 10 is moved from the support 15 to the vibration isolation table 12 during movement. In the scanning probe microscope 100A of Embodiment 2, a configuration will be described in which the microscope body 10 is suspended by the support 15A instead of being moved onto the support 15. Note that in the scanning probe microscope 100A of Embodiment 2, the description of configurations that overlap with the scanning probe microscope 100 of Embodiment 1 will not be repeated.

[0055] Figure 4 is a diagram illustrating an example of the arrangement of each component of the scanning probe microscope 100A in Embodiment 2. In the scanning probe microscope 100A in Embodiment 2, the housing 13 is equipped with wheels 141 and 142, allowing the user to easily transport all components included in the scanning probe microscope 100A together. This makes it easy to perform measurements in a measurement environment appropriate to the type and material of the sample S, even with the scanning probe microscope 100A. In other words, the scanning probe microscope 100A in Embodiment 2 also reduces the workload on the user when changing the measurement environment.

[0056] Furthermore, as shown in Figure 4, in Embodiment 2, instead of the support portion 15 in Embodiment 1, a support portion 15A is provided on the top surface Sf1 of the lid portion 13A.

[0057] The support portion 15A is a hook-shaped fastener or the like, and is made of a material having the necessary strength to fix the scanning probe microscope 100A to the top surface Sf1 of the lid portion 13A. In Figure 4, two fasteners are shown as the support portion 15A, but the number of fasteners included in the support portion 15A is not limited to two; it may be one or three or more.

[0058] Figure 5 is a diagram illustrating an example of the arrangement of each component when the scanning probe microscope 100A is moved in Embodiment 2. As shown in Figures 4 and 5, region R2 in Embodiment 2 is the region occupied by the microscope body 10 when the microscope body 10 is suspended by the support 15A.

[0059] In Embodiment 2, as shown in Figure 5, the microscope body 10 is moved from region R1 to region R2 during transport. Thus, in the scanning probe microscope 100A of Embodiment 2, no components are placed on the vibration isolation table 12 when the scanning probe microscope 100A is transported. As a result, deterioration or failure of the vibration isolation table 12 can be suppressed in the scanning probe microscope 100A of Embodiment 2 as well.

[0060] Furthermore, in the second embodiment as well, the microscope body 10 can maintain its connection with the control device 11 when moved from region R1 to region R2. This eliminates the need to disconnect the microscope body 10 from the control device 11 when moving the scanning probe microscope 100A, thereby reducing the user's workload.

[0061] Furthermore, in Embodiment 2, region R2 is positioned to overlap with region R1 when viewed from the Z-axis direction. That is, region R2 is positioned to overlap with region R1 when the vibration isolation table 12 is viewed from above. In other words, region R2 is positioned above region R1. As a result, the scanning probe microscope 100A in Embodiment 2 can achieve space savings in the X-axis or Y-axis direction.

[0062] [Embodiment 3] In the scanning probe microscope 100A of Embodiment 2, the microscope body 10 is suspended by a support part 15A provided on the top surface Sf1 of the lid 13A during movement. In the scanning probe microscope 100B of Embodiment 3, the microscope body 10 is supported by a support part 15B provided on the inner surface Sf2 of the lid 13A. In the scanning probe microscope 100B of Embodiment 3, the description of configurations that overlap with the scanning probe microscope 100A of Embodiment 2 will not be repeated.

[0063] Figure 6 is a diagram illustrating an example of the arrangement of the components of the scanning probe microscope 100B in Embodiment 3. As shown in Figure 6, a support portion 15B is provided on the inner surface Sf2 of the lid portion 13A. In Embodiment 3, the support portion 15B includes two protrusions. The support portion 15B is positioned above the vibration isolation table 12. The microscope body portion 10 is positioned between the two protrusions included in the support portion 15B in the X-axis direction.

[0064] Figure 7 is a diagram illustrating an example of the arrangement of each component when the scanning probe microscope 100B is moved in Embodiment 3. The pull-out section 15B1 is housed inside the support section 15B, and as shown in Figure 7, the pull-out section 15B1 is pulled out from the support section 15B.

[0065] As shown in Figures 6 and 7, region R2 in Embodiment 3 is the region occupied by the microscope body 10 when the microscope body 10 is supported by the extension portion 15B1 of the support portion 15B. As shown in Figure 7, in Embodiment 3 as well, when moving, the microscope body 10 is moved from region R1 to region R2.

[0066] Thus, in the scanning probe microscope 100B of Embodiment 3, no components are placed on the vibration isolation table 12 when the scanning probe microscope 100B is transported. As a result, deterioration or failure of the vibration isolation table 12 can be suppressed in the scanning probe microscope 100B of Embodiment 3 as well.

[0067] Furthermore, as shown in Figure 7, the microscope body 10 can maintain its connection with the control device 11 even after being moved to region R2. This eliminates the need to disconnect the microscope body 10 from the control device 11 when moving the scanning probe microscope 100B, thereby reducing the user's workload.

[0068] Furthermore, in Embodiment 3, region R2 is positioned to overlap with region R1 when viewed from the Z-axis direction. In addition, region R2 is positioned to overlap with region R1 when viewed from the X-axis direction. As a result, the scanning probe microscope 100B in Embodiment 3 can be made space-saving in each axial direction.

[0069] [Pattern] Those skilled in the art will understand that the above-described exemplary embodiments are specific examples of the following embodiments.

[0070] (Section 1) A scanning probe microscope according to one embodiment is a scanning probe microscope that measures the surface of a sample using a probe. The scanning probe microscope comprises a microscope body having a probe, a control device for controlling the microscope body, a vibration isolation table that supports the microscope body and is located in a first region, a housing that houses the microscope body, the control device, and the vibration isolation table, and a moving mechanism used to move the housing.

[0071] According to the scanning probe microscope 100 described in paragraph 1, the housing can be moved using a moving mechanism, thereby reducing the workload on the user when changing the measurement environment. In other words, the scanning probe microscope 100 makes it easy to perform measurements under measurement environments that correspond to the type and material of the sample S.

[0072] (Clause 2) The scanning probe microscope according to Clause 1 further comprises a support for a microscope body positioned in a second region different from the first region.

[0073] According to the scanning probe microscope 100 described in paragraph 2, the vibration isolation table 12 is not moved while a load is applied to it, thus suppressing deterioration or failure of the vibration isolation table 12 during movement.

[0074] (Article 3) In the scanning probe microscope relating to Article 2, the second region is located in a position that overlaps with the first region when the vibration isolation table is viewed from any direction perpendicular to the normal direction of the mounting surface of the microscope body on the vibration isolation table.

[0075] According to the scanning probe microscope 100 described in paragraph 3, movement in the height direction is suppressed when moving the microscope body 10, thereby reducing the workload on the user and saving space in the Z-axis direction.

[0076] (Clause 4) In the scanning probe microscope relating to Clause 2 or Clause 3, the second region is located in a position that overlaps with the first region when the vibration isolation table is viewed from above.

[0077] According to the scanning probe microscope 100 described in Section 4, space can be saved in the X-axis or Y-axis direction.

[0078] (Clause 5) In a scanning probe microscope relating to any one of Clauses 2 to 4, the microscope body is movable between the first region and the second region while maintaining its connection with the control device 11.

[0079] According to the scanning probe microscope 100 described in paragraph 5, the work of disconnecting the connection between the microscope body 10 and the control device 11 when moving the microscope body 10 can be eliminated, thereby reducing the workload on the user.

[0080] (Article 6) In a scanning probe microscope relating to any one of Articles 1 to 5, the housing is provided with a gripping portion that is grasped by the user.

[0081] According to the scanning probe microscope 100 described in Section 6, it becomes easier for the user to apply force to the housing 13 and to move the housing 13.

[0082] The embodiments disclosed herein should be considered in all respects to be illustrative and not restrictive. The scope of the present invention is indicated by the claims rather than by the description of the embodiments above, and all modifications within the meaning and scope equivalent to the claims are intended to be included. [Explanation of Symbols]

[0083] 10 Microscope body, 11 Control device, 12 Vibration isolation table, 13B Box, 13 Housing, 13A Lid, 14 Moving mechanism, 15, 15A, 15B Support section, 15B1 Pull-out section, 16 Monitor, 17 Terminal, 18 Accessories, 100, 100A, 100B Scanning probe microscope, 101 Cantilever, 102 Fixing device, 103 Sample stage, 104 Laser light source, 105 Photodetector, 106 Z-direction actuator, 107 XY-direction actuator, 108 Tip section, 109 Probe, 110 Rear end section, 111 Processor, 112 Memory, 131 Gripping section, 141, 142 Tires, LA Laser light, R1, R2 Region, S Sample, Sf1 Top surface.

Claims

1. A scanning probe microscope that measures the surface of a sample using a probe, The microscope body having the probe, A control device for controlling the main body of the microscope, A vibration isolation platform supporting the microscope body, which is located in the first region, The microscope body, the control device, and the housing that houses the vibration isolation platform, A moving mechanism used to move the aforementioned housing, A scanning probe microscope comprising a support portion for the microscope body portion, which is positioned in a second region different from the first region.

2. The scanning probe microscope according to claim 1, wherein the second region is located in a position that overlaps with the first region when the vibration isolation table is viewed from any direction perpendicular to the normal direction of the mounting surface of the microscope body on the vibration isolation table.

3. The scanning probe microscope according to claim 1 or claim 2, wherein the second region is located in a position that overlaps with the first region when the vibration isolation table is viewed from above.

4. The scanning probe microscope according to any one of claims 1 to 3, wherein the microscope body is movable between the first region and the second region while maintaining a connection with the control device.

5. The scanning probe microscope according to any one of claims 1 to 4, wherein the housing comprises a gripping portion that is grasped by a user.

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