SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Abstract

To explain a substrate processing device and a substrate processing method capable of preventing exhaust gas exhausted from a liquid processing part from flowing into an individual exhaust pipe different form an individual exhaust pipe corresponding to the exhaust gas in performing substrate processing in a liquid processing part using a plurality of kinds of processing liquid.SOLUTION: A substrate processing device includes a liquid processing part configured so as to respectively supply a plurality of different kinds of processing liquid to the surface of a substrate, and an exhaust part configured so as to exhaust exhaust gas exhausted from the liquid processing part to the outside. The exhaust part includes a main exhaust pipe including a first part and a second part, a first individual exhaust pipe, a second individual exhaust pipe, a switching part, and an outside air introduction part. The switching part includes a first switching mechanism, a second switching mechanism, a third switching mechanism arranged between the first part and the second part in the main exhaust pipe, an outside air introduction pipe connected to the second part so as to introduce outside air to the second part, and a fourth switching mechanism arranged in the outside air introduction pipe.SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] The present disclosure relates to a substrate processing apparatus and a substrate processing method. [Background technology]

[0002] Patent Document 1 discloses a substrate processing apparatus including a liquid processing section configured to process a substrate by individually supplying a plurality of types of processing liquid to the substrate, and an exhaust section configured to exhaust the atmosphere in the liquid processing section to the outside. The exhaust section includes a plurality of individual exhaust pipes corresponding to the types of processing liquid, and a switching section configured to guide gas exhausted from the liquid processing section to one of the individual exhaust pipes. For example, when gas, mist, or the like is generated as a result of a predetermined processing liquid being supplied to a substrate in the liquid processing section, the switching section switches the flow path to connect the liquid processing section to the individual exhaust pipe corresponding to the predetermined type of processing liquid. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2016-092144 A Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure describes a substrate processing apparatus and a substrate processing method that, when processing a substrate in a liquid processing apparatus using multiple types of processing liquids, can prevent exhaust gas discharged from the liquid processing apparatus from flowing into an individual exhaust pipe other than the individual exhaust pipe corresponding to the exhaust gas. [Means for solving the problem]

[0005] An example of a substrate processing apparatus includes a liquid processing section configured to supply a plurality of processing liquids, including a first processing liquid and a second processing liquid different from the first processing liquid, to a surface of a substrate, respectively, and an exhaust section configured to exhaust exhaust gas discharged from the liquid processing section to the outside, the exhaust gas including a first exhaust gas discharged from the liquid processing section in association with the processing of the substrate with the first processing liquid and a second exhaust gas discharged from the liquid processing section in association with the processing of the substrate with the second processing liquid. The exhaust section is configured to allow the exhaust gas to flow through, and includes a main exhaust pipe including a first portion located on the upstream side and a second portion located downstream of the first portion, a first individual exhaust pipe configured to allow the first exhaust gas to flow through, a second individual exhaust pipe configured to allow the second exhaust gas to flow through, and a switching section configured to selectively connect the main exhaust pipe to one of the first individual exhaust pipe and the second individual exhaust pipe.The switching unit includes a first switching mechanism disposed between the first portion and the first individual exhaust pipe, and configured to switch between a communication state in which the first portion and the first individual exhaust pipe are connected when a first exhaust gas is discharged from the liquid treatment unit, and a non-communication state in which the first portion and the first individual exhaust pipe are not connected when an exhaust gas other than the first exhaust gas is discharged from the liquid treatment unit; a second switching mechanism disposed between the second portion and the second individual exhaust pipe, and configured to switch between a communication state in which the second portion and the second individual exhaust pipe are connected when a second exhaust gas is discharged from the liquid treatment unit, and a non-communication state in which the second portion and the second individual exhaust pipe are not connected when an exhaust gas other than the second exhaust gas is discharged from the liquid treatment unit; the liquid treatment unit is disposed between the first part and the second part and configured to switch between a closed state in which the first exhaust gas is prevented from flowing into the second part when the first exhaust gas is discharged from the liquid treatment unit and an open state in which exhaust gases other than the first exhaust gas are allowed to flow into the second part when exhaust gases other than the first exhaust gas are discharged from the liquid treatment unit; an outside air inlet pipe connected to the second part so as to introduce outside air into the second part; and a fourth switching mechanism disposed in the outside air inlet pipe and configured to switch between an open state in which the first exhaust gas is prevented from flowing into the second part when exhaust gases other than the first exhaust gas are discharged from the liquid treatment unit and a closed state in which the introduction of outside air into the second part is prevented when exhaust gases other than the first exhaust gas are discharged from the liquid treatment unit. Effect of the Invention

[0006] According to the substrate processing apparatus and substrate processing method disclosed herein, when processing a substrate in a liquid processing section using multiple types of processing liquids, it is possible to prevent exhaust gas discharged from the liquid processing section from flowing into an individual exhaust pipe other than the individual exhaust pipe corresponding to the exhaust gas. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is a plan view illustrating an example of a substrate processing system. [Diagram 2] FIG. 2 is a side view that diagrammatically illustrates the substrate processing system of FIG. [Diagram 3] FIG. 3 is a side view illustrating a schematic example of the liquid processing unit. [Figure 4] FIG. 4 is a diagram illustrating an example of the liquid processing unit and the exhaust unit. [Diagram 5] FIG. 5 is a partially enlarged view that shows a schematic diagram of the exhaust unit of FIG. 4, illustrating a state in which the main exhaust pipe and individual exhaust pipes for organic exhaust gas are in communication with each other. [Figure 6] FIG. 6 is a block diagram showing an example of a main part of a substrate processing system. [Figure 7] FIG. 7 is a schematic diagram illustrating an example of a hardware configuration of the controller. [Figure 8] FIG. 8 is a partially enlarged view that shows a schematic diagram of the exhaust unit in FIG. 4, illustrating a state in which the main exhaust pipe and individual exhaust pipes for alkaline exhaust gas are connected to each other. [Figure 9] FIG. 9 is a partially enlarged view that shows a schematic diagram of the exhaust unit of FIG. 4, illustrating a state in which the main exhaust pipe and individual exhaust pipes for acid-based exhaust gas are connected to each other. [Figure 10] FIG. 10 is a diagram illustrating a schematic diagram of another example of the exhaust unit. [Figure 11] FIG. 11 is a diagram illustrating a schematic diagram of another example of the exhaust unit. [Figure 12] FIG. 12 is a diagram illustrating a schematic diagram of another example of the exhaust unit. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] In the following description, the same elements or elements having the same functions are designated by the same reference numerals, and duplicated descriptions will be omitted. Note that in this specification, when referring to the top, bottom, right, and left of the figure, the directions of the reference numerals in the figure are used as the reference.

[0009] [Substrate processing system] 1 and 2, a substrate processing system 1 (substrate processing apparatus) configured to process a substrate W will be described. The substrate processing system 1 includes a loading / unloading station 2, a processing station 3, and a controller Ctr (controller). The loading / unloading station 2 and the processing station 3 may be aligned in a horizontal line, for example.

[0010] The substrate W may be disk-shaped or may be a plate-shaped other than a circle, such as a polygon. The substrate W may have a cutout portion cut out of a portion. The cutout portion may be, for example, a notch (a U-shaped, V-shaped, or other groove) or a linear portion extending linearly (so-called orientation flat). The substrate W may be, for example, a semiconductor substrate (silicon wafer), a glass substrate, a mask substrate, an FPD (Flat Panel Display) substrate, or any other type of substrate. The diameter of the substrate W may be, for example, about 200 mm to 450 mm.

[0011] The loading / unloading station 2 includes a mounting section 4, a loading / unloading section 5, and a shelf unit 6. The mounting section 4 includes a plurality of mounting tables (not shown) arranged in the width direction (the vertical direction in FIG. 1). Each mounting table is configured to be able to mount a carrier 7 (storage container). The carrier 7 is configured to store at least one substrate W in a sealed state. The carrier 7 includes an opening / closing door (not shown) for inserting and removing the substrate W.

[0012] The loading / unloading section 5 is disposed adjacent to the mounting section 4 in the direction in which the loading / unloading stations 2 and the processing stations 3 are lined up (the left-right direction in FIG. 1). The loading / unloading section 5 includes an opening / closing door (not shown) provided for the mounting section 4. With the carrier 7 placed on the mounting section 4, the opening / closing door of the carrier 7 and the opening / closing door of the loading / unloading section 5 are both opened, thereby connecting the inside of the loading / unloading section 5 and the inside of the carrier 7.

[0013] The loading / unloading section 5 incorporates a transport arm A1 and a shelf unit 6. The transport arm A1 is configured to be capable of horizontal movement in the width direction of the loading / unloading section 5 (the vertical direction in FIG. 1), vertical movement in the vertical direction (the vertical direction in FIG. 2), and rotation around a vertical axis. The transport arm A1 is configured to take out a substrate W from a carrier 7 and pass it to the shelf unit 6, and also to receive a substrate W from the shelf unit 6 and return it to the carrier 7. The shelf unit 6 is located in the vicinity of the processing station 3, and is configured to mediate the transfer of the substrate W between the loading / unloading section 5 and the processing station 3.

[0014] The processing station 3 includes a transfer section 8, a plurality of liquid processing units 100 (liquid processing sections), and an exhaust unit 200 (exhaust section). The transfer section 8 extends horizontally, for example, in the direction in which the loading / unloading station 2 and the processing stations 3 are lined up (the left-right direction in FIG. 1). The transfer section 8 incorporates a transfer arm A2. The transfer arm A2 is configured to be capable of horizontal movement in the longitudinal direction of the transfer section 8 (the left-right direction in FIG. 1), up-down movement in the vertical direction, and rotational movement around a vertical axis. The transfer arm A2 is configured to take out a substrate W from the shelf unit 6 and deliver it to the liquid processing unit 100, and also to receive a substrate W from the liquid processing unit 100 and return it to the shelf unit 6.

[0015] [Liquid processing unit] 3 and 4, the liquid processing unit 100 will be described in detail. The liquid processing unit 100 is configured to perform a predetermined liquid processing (e.g., a process for removing dirt or foreign matter, an etching process, etc.) on the substrate W. The liquid processing unit 100 may be, for example, a single-wafer cleaning device that cleans the substrates W one by one by spin cleaning.

[0016] The liquid processing unit 100 includes a chamber 110 , a blower 120 , a rotating holder 130 , a supply unit 140 , and a cup body 150 .

[0017] The chamber 110 is a housing configured to allow the substrate W to be loaded and unloaded therein. An unillustrated loading / unloading port is formed in a side wall of the chamber 110. The substrate W is transported by the transport arm A2 into the chamber 110 through the loading / unloading port, and is also transported from the chamber 110 to the outside.

[0018] The blower 120 is attached to the top wall of the chamber 110. The blower 120 is configured to form a downward flow in the chamber 110 based on a signal from the controller Ctr.

[0019] The rotating and holding unit 130 includes a driving unit 131, a shaft 132, and a holding unit 133. The driving unit 131 is configured to operate based on an operation signal from the controller Ctr and rotate the shaft 132. The driving unit 131 may be a power source such as an electric motor.

[0020] The holder 133 is provided at the tip of the shaft 132. The holder 133 is configured to suction and hold the back surface of the substrate W, for example, by suction. That is, the rotating holder 130 may be configured to rotate the substrate W around a central axis (rotation axis) perpendicular to the front surface of the substrate W while the substrate W is in a substantially horizontal position.

[0021] The supply unit 140 is configured to supply a plurality of different types of processing liquids from nozzles N onto the surface of the substrate W. As shown in FIG 4, the supply unit 140 includes liquid sources 141-144, valves 145-148, and pipes D1-D5.

[0022] The liquid source 141 may be configured as a supply source of a processing liquid L1 (a second processing liquid or a third processing liquid). The processing liquid L1 may be, for example, an acid-based processing liquid. The acid-based processing liquid may include, for example, an SC-2 liquid (a mixture of hydrochloric acid, hydrogen peroxide, and pure water), an SPM (a mixture of sulfuric acid and hydrogen peroxide), an HF liquid (hydrofluoric acid), a DHF liquid (dilute hydrofluoric acid), or an HNO3+HF liquid (a mixture of nitric acid and hydrofluoric acid). The liquid source 141 is connected to the nozzle N via pipes D1 and D5.

[0023] The liquid source 142 may be configured as a supply source of a processing liquid L2 (a second processing liquid or a third processing liquid). The processing liquid L2 may be, for example, an alkaline processing liquid. The alkaline processing liquid may contain, for example, an SC-1 liquid (a mixture of ammonia, hydrogen peroxide, and pure water), hydrogen peroxide solution, etc. The liquid source 142 is connected to the nozzle N via pipes D2 and D5.

[0024] The liquid source 143 may be configured as a supply source of a processing liquid L3 (first processing liquid). The processing liquid L3 may be, for example, an organic processing liquid. The organic processing liquid may contain, for example, IPA (isopropyl alcohol). The liquid source 143 is connected to the nozzle N via pipes D3 and D5.

[0025] The liquid source 144 may be configured as a supply source of a processing liquid L4. The processing liquid L4 may be, for example, a rinsing liquid. The rinsing liquid may include, for example, deionized water (DIW), ozone water, carbonated water (CO2 water), ammonia water, etc. The liquid source 144 is connected to the nozzle N via pipes D4 and D5.

[0026] The valves 145 to 148 are provided in the pipes D1 to D4, respectively. The valves 145 to 148 are configured to open and close based on an operation signal from the controller Ctr.

[0027] The nozzle N may be disposed above the substrate W so that the discharge outlet faces the surface of the substrate W. The nozzle N may be configured to move horizontally or vertically above the substrate W by a driving source (not shown).

[0028] Returning to FIG. 3, the cup body 150 is provided so as to surround the periphery of the holding part 133. The cup body 150 is configured to collect the processing liquid that splashes around from the outer periphery of the substrate W as the substrate W is held and rotated by the rotary holding part 130. A liquid drainage port 151 and an exhaust port 152 are provided at the bottom of the cup body 150. The liquid drainage port 151 is configured to discharge the processing liquids L1 to L4 collected by the cup body 150 to the outside of the liquid processing unit 100.

[0029] The exhaust port 152 is configured to exhaust a downward flow formed around the substrate W by the blower 120 to the outside of the liquid processing unit 100. From the exhaust port 152, gas generated around the substrate W as the processing liquids L1 to L4 are supplied to the substrate W in the liquid processing unit 100 and the substrate W is processed with the processing liquids L1 to L4 is exhausted as exhaust gas. That is, the exhaust gas includes an acid-based exhaust gas G1 (second exhaust gas or third exhaust gas) exhausted from the exhaust port 152 of the liquid processing unit 100 as the substrate W is processed with the processing liquid L1, an alkali-based exhaust gas G2 (second exhaust gas or third exhaust gas) exhausted from the exhaust port 152 of the liquid processing unit 100 as the substrate W is processed with the processing liquid L2, and an organic-based exhaust gas G3 (first exhaust gas) exhausted from the exhaust port 152 of the liquid processing unit 100 as the substrate W is processed with the processing liquid L3. The exhaust gases G1 to G3 exhausted from exhaust port 152 of liquid processing unit 100 may be accompanied by mist of the processing liquids L1 to L3.

[0030] [Exhaust unit] Next, the exhaust unit 200 will be described in detail with reference to Figures 2, 4, and 5. As shown in Figure 2, a main part of the exhaust unit 200 is disposed above the loading / unloading station 2 and the processing station 3. As shown in Figures 2, 4, and 5, the exhaust unit 200 includes individual exhaust pipes 210, 220, and 230, a plurality of main exhaust pipes 240, and a plurality of switching units 300 (switching sections).

[0031] The individual exhaust pipes 210, 220, and 230 are disposed above the loading / unloading station 2 and the processing station 3, as shown in FIG. 2 and FIG. 4. The individual exhaust pipe 210 is configured as an exhaust path that leads the exhaust gas G3 to the outside of the substrate processing system 1. The individual exhaust pipe 220 is configured as an exhaust path that leads the exhaust gas G2 to the outside of the substrate processing system 1. The individual exhaust pipe 230 is configured as an exhaust path that leads the exhaust gas G1 to the outside of the substrate processing system 1. As shown in FIG. 4, the individual exhaust pipes 210, 220, and 230 are provided with pumps P1 to P3, respectively. That is, the exhaust gases G1 to G3 are sent through different individual exhaust pipes 210, 220, and 230, respectively, and are exhausted to the outside of the substrate processing system 1.

[0032] The main exhaust pipes 240 correspond to the liquid processing units 100 provided in the processing station 3, respectively. The switching units 300 correspond to the liquid processing units 100 provided in the processing station 3, respectively. That is, one of the main exhaust pipes 240 is configured to flow exhaust gas discharged from one of the liquid processing units 100 to one of the switching units 300. The configurations of the main exhaust pipes 240 are all equivalent, and the configurations of the switching units 300 are all equivalent. Therefore, in the following, one main exhaust pipe 240 and one switching unit 300 corresponding to one liquid processing unit 100 will be described, and descriptions of the other main exhaust pipes 240 and other switching units 300 will be omitted.

[0033] 2 and 4, main exhaust pipe 240 extends in the up-down direction between liquid processing unit 100 and switching unit 300. That is, the upstream end (lower end) of main exhaust pipe 240 is connected to exhaust port 152. The downstream end (upper end) of main exhaust pipe 240 reaches switching unit 300.

[0034] An upstream end (lower end) of the main exhaust pipe 240 is connected to a liquid discharge section (not shown). When mist is accompanied with the exhaust gases G1 to G3, the mist is heavier than air, and therefore the exhaust gases G1 to G3 rise up the main exhaust pipe 240, while the mist has difficulty rising up the main exhaust pipe 240. The mist is cooled and turns into droplets in the process of the exhaust gases G1 to G3 rising up the main exhaust pipe 240, and falls down the main exhaust pipe 240. As a result, the droplets originating from the mist are discharged from the liquid discharge section to the outside of the substrate processing system 1. That is, gas-liquid separation is performed in the main exhaust pipe 240.

[0035] 5, the downstream end of the main exhaust pipe 240 includes a first portion 241, a second portion 242, and a third portion 243. The first portion 241, the second portion 242, and the third portion 243 are arranged in series in this order from the upstream side to the downstream side.

[0036] 2 and 4, switching unit 300 is disposed above loading / unloading station 2 and processing station 3. That is, switching unit 300 is disposed above liquid processing unit 100. Switching unit 300 is configured to selectively connect main exhaust pipe 240 to any one of individual exhaust pipes 210, 220, 230. As shown in FIG. 5, switching unit 300 includes valves V1-V5, inlet pipes 311-313, outlet pipes 321-323, outside air introduction pipes 330-333, outside air introduction pipe 340, adjustment unit 350, and sensors SE1 and SE2.

[0037] The valve V1 (first switching mechanism) includes inlets V1a, V1b and an outlet V1c. The valve V1 is configured to operate based on an operation signal from the controller Ctr. The valve V1 is disposed between the first portion 241 of the main exhaust pipe 240 and the individual exhaust pipe 210. The valve V1 is switchable between a state in which the inlet V1a and the outlet V1c communicate with each other but the inlet V1b and the outlet V1c do not communicate with each other (see FIG. 5) and a state in which the inlet V1b and the outlet V1c communicate with each other but the inlet V1a and the outlet V1c do not communicate with each other (see FIG. 8 and FIG. 9).

[0038] The valve V2 (second switching mechanism) includes inlets V2a, V2b and an outlet V2c. The valve V2 is configured to operate based on an operation signal from the controller Ctr. The valve V2 is disposed between the second portion 242 of the main exhaust pipe 240 and the individual exhaust pipe 220. The valve V2 is switchable between a state in which the inlet V2a and the outlet V2c communicate with each other but the inlet V2b and the outlet V2c do not communicate with each other (see FIG. 8) and a state in which the inlet V2b and the outlet V2c communicate with each other but the inlet V2a and the outlet V2c do not communicate with each other (see FIGS. 5 and 9).

[0039] The valve V3 (fifth switching mechanism) includes inlets V3a, V3b and an outlet V3c. The valve V3 is configured to operate based on an operation signal from the controller Ctr. The valve V3 is disposed between the third portion 243 of the main exhaust pipe 240 and the individual exhaust pipe 230. The valve V3 is switchable between a state in which the inlet V3a and the outlet V3c communicate with each other but the inlet V3b and the outlet V3c do not communicate with each other (see FIG. 9) and a state in which the inlet V3b and the outlet V3c communicate with each other but the inlet V3a and the outlet V3c do not communicate with each other (see FIGS. 5 and 8).

[0040] The valve V4 (third switching mechanism) is configured to open and close based on an operation signal from the controller Ctr. The valve V4 is switchable between an open state in which exhaust gas can flow and a closed state in which exhaust gas flow is restricted. The valve V4 is disposed between the first portion 241 and the second portion 242 of the main exhaust pipe 240. In other words, the second portion 242 and the third portion 243 of the main exhaust pipe 240 are located downstream of the valve V4.

[0041] The valve V5 (fourth switching mechanism) is configured to open and close based on an operation signal from the controller Ctr. The valve V5 is switchable between an open state in which the outside air can flow and a closed state in which the flow of the outside air is restricted. The valve V5 is disposed in the outside air introduction pipe 340.

[0042] The inlet pipe 311 extends to connect the first portion 241 of the main exhaust pipe 240 and the inlet V1a of the valve V1. The inlet pipe 312 extends to connect the second portion 242 of the main exhaust pipe 240 and the inlet V2a of the valve V2. The inlet pipe 313 extends to connect the third portion 243 of the main exhaust pipe 240 and the inlet V3a of the valve V3.

[0043] The outflow pipe 321 extends to connect the individual exhaust pipe 210 and the outlet V1c of the valve V1. The outflow pipe 322 extends to connect the individual exhaust pipe 220 and the outlet V2c of the valve V2. The outflow pipe 323 extends to connect the individual exhaust pipe 230 and the outlet V3c of the valve V3.

[0044] The outside air introduction pipes 330-333 are configured to supply outside air to the individual exhaust pipes 210, 220, 230. The outside air introduction pipe 330 includes an upper end portion fluidly connected to the outside air. The outside air introduction pipe 331 extends to connect the outside air introduction pipe 330 and the inlet V1b of the valve V1. The outside air introduction pipe 332 extends to connect the outside air introduction pipe 330 and the inlet V2b of the valve V2. The outside air introduction pipe 333 extends to connect the outside air introduction pipe 330 and the inlet V3b of the valve V3.

[0045] The outside air introduction pipe 340 is configured to supply outside air to the second portion 242 of the main exhaust pipe 240. The outside air introduction pipe 340 extends to connect an upper end fluidly connected to the outside air and the second portion 242 of the main exhaust pipe 240.

[0046] The adjustment unit 350 is disposed upstream of the valve V5 in the outside air introduction pipe 340. The adjustment unit 350 is configured to operate based on an operation signal from the controller Ctr. The adjustment unit 350 is configured to adjust the flow rate of outside air flowing through the outside air introduction pipe 340 by, for example, changing the opening area of ​​the outside air introduction pipe 340, and to adjust the pressure of the second portion 242 of the main exhaust pipe 240 communicating with the outside air introduction pipe 340.

[0047] The sensor SE1 (first sensor) is configured to measure the pressure in the first portion 241 of the main exhaust pipe 240. The sensor SE1 is configured to transmit data of the measured pressure to the controller Ctr. The sensor SE2 (second sensor) is configured to measure the pressure in the second portion 242 of the main exhaust pipe 240. The sensor SE2 is configured to transmit data of the measured pressure to the controller Ctr.

[0048] [Controller Details] The controller Ctr is configured to control the substrate processing system 1 partially or entirely. As illustrated in FIG. 6, the controller Ctr has a reading unit M1, a storage unit M2, a processing unit M3, and an instruction unit M4 as functional modules. These functional modules are merely a division of the functions of the controller Ctr into a plurality of modules for convenience, and do not necessarily mean that the hardware constituting the controller Ctr is divided into such modules. Each functional module is not limited to being realized by the execution of a program, and may be realized by a dedicated electric circuit (e.g., a logic circuit) or an integrated circuit (ASIC: Application Specific Integrated Circuit) integrating the same.

[0049] The reading unit M1 is configured to read a program from a computer-readable recording medium RM. The recording medium RM records a program for operating each unit of the substrate processing system 1. The recording medium RM may be, for example, a semiconductor memory, an optical recording disk, a magnetic recording disk, or a magneto-optical recording disk. In the following, each unit of the substrate processing system 1 may include the blower 120, the spin holder 130, the supply unit 140, the valves V1 to V5, the pumps P1 to P3, and the adjuster 350.

[0050] The memory unit M2 is configured to store various data. For example, the memory unit M2 may store a program read from a recording medium RM by the reader M1, setting data input by an operator via an external input device (not shown), etc. For example, the memory unit M2 may store data on processing conditions (processing recipes) for processing the substrate W. For example, the memory unit M2 may store pressure data acquired by the sensors SE1 and SE2.

[0051] The processing unit M3 is configured to process various data. For example, the processing unit M3 may generate a signal for operating each unit of the substrate processing system 1 based on various data stored in the memory unit M2. For example, the processing unit M3 may calculate an opening area of ​​the outside air introduction pipe 340 such that the pressure in the second portion 242 is higher than that in the first portion 241 based on pressure data acquired by the sensors SE1 and SE2. The processing unit M3 may generate a signal for operating the adjustment unit 350 based on the calculated opening area.

[0052] The instruction unit M4 is configured to transmit the operation signal generated in the processing unit M3 to each unit of the substrate processing system 1.

[0053] The hardware of the controller Ctr may be configured, for example, by one or more control computers. The controller Ctr may include a circuit C1 as a hardware configuration, as exemplified in Fig. 7. The circuit C1 may be configured by electric circuit elements. The circuit C1 may include, for example, a processor C2, a memory C3, a storage C4, a driver C5, and an input / output port C6.

[0054] The processor C2 may be configured to execute a program in cooperation with at least one of the memory C3 and the storage C4 and to input and output signals via the input / output port C6, thereby realizing each of the functional modules described above. The memory C3 and the storage C4 may function as the storage unit M2. The driver C5 may be a circuit configured to drive each of the components of the substrate processing system 1. The input / output port C6 may be configured to mediate the input and output of signals between the driver C5 and each of the components of the substrate processing system 1.

[0055] The substrate processing system 1 may include one controller Ctr, or may include a controller group (controller) composed of a plurality of controllers Ctr. When the substrate processing system 1 includes a controller group, each of the above-mentioned functional modules may be realized by one controller Ctr, or may be realized by a combination of two or more controllers Ctr. When the controller Ctr is composed of a plurality of computers (circuits C1), each of the above-mentioned functional modules may be realized by one computer (circuit C1), or may be realized by a combination of two or more computers (circuits C1). The controller Ctr may have a plurality of processors C2. In this case, each of the above-mentioned functional modules may be realized by one processor C2, or may be realized by a combination of two or more processors C2.

[0056] [Substrate processing method] Next, a method for processing the substrate W will be described with reference to Figures 1 to 5, 8 and 9. Here, as an initial state of the switching unit 300, the valves V1 to V5 are set to the following states as shown in Figure 8. Valve V1: A state in which the inlet V1b and the outlet V1c are in communication with each other (a state in which the first portion 241 and the individual exhaust pipe 210 are not in communication with each other) Valve V2: A state in which the inlet V2a and the outlet V2c are in communication with each other (a state in which the second portion 242 and the individual exhaust pipe 220 are in communication with each other) Valve V3: A state in which the inlet V3b and the outlet V3c are in communication with each other (a state in which the third portion 243 and the individual exhaust pipe 230 are not in communication with each other) Valve V4: open Valve V5: Closed

[0057] First, the controller Ctr controls the transport arms A1, A2 to transport the substrate W from the carrier 7 to the liquid processing unit 100 (see FIGS. 1 and 2). Next, the substrate W is held by the spin holder 130 of the liquid processing unit 100 (see FIG. 3). Next, the controller Ctr controls the spin holder 130 to rotate the substrate W at a predetermined rotation speed by the spin holder 130. In this state, the controller Ctr controls the supply unit 140 to supply, for example, an alkaline processing liquid L2 from the nozzle N to the center of the surface of the substrate W (see FIG. 4).

[0058] The processing liquid L2 supplied to the surface of the substrate W flows over the entire surface from the center to the outer periphery of the substrate W due to the rotation of the substrate W, and is then spun outward from the outer periphery. Therefore, while the processing liquid L2 continues to be supplied from the nozzle N, a liquid film of the processing liquid L2 is formed on the surface of the substrate W. As a result, the surface of the substrate W is processed by the processing liquid L2.

[0059] The processing liquid L2 that has been thrown outward from the outer periphery of the substrate W is collected in the cup body 150. Gas generated during the processing of the substrate W with the processing liquid L2 is exhausted from the exhaust port 152 of the liquid processing unit 100. Alkaline exhaust gas G2 exhausted from the liquid processing unit 100 is introduced into the switching unit 300 through the main exhaust pipe 240 (see FIG. 4).

[0060] The exhaust gas G2 introduced into the switching unit 300 flows through the first portion 241 and the second portion 242 of the main exhaust pipe 240, the inlet pipe 312, the valve V2, and the outlet pipe 322, and is discharged from the individual exhaust pipe 220 to the outside of the substrate processing system 1 (see FIG. 8). The outside air introduced from the outside air introduction pipe 330 flows through the outside air introduction pipe 331, the valve V1, and the outlet pipe 321, and is discharged from the individual exhaust pipe 210 to the outside of the substrate processing system 1 (see FIG. 8). The outside air introduced from the outside air introduction pipe 330 flows through the outside air introduction pipe 333, the valve V3, and the outlet pipe 323, and is discharged from the individual exhaust pipe 230 to the outside of the substrate processing system 1 (see FIG. 8). Since the valve V5 is in a closed state, the outside air is not introduced from the outside air introduction pipe 340 to the second portion 242 of the main exhaust pipe 240.

[0061] Next, the controller Ctr controls the supply unit 140 to supply the processing liquid L4 (rinsing liquid) from the nozzle N to the center of the surface of the substrate W (see FIG. 4). As a result, the processing liquid L2 remaining on the surface of the substrate W is washed away by the processing liquid L4.

[0062] Next, the controller Ctr controls the switching unit 300 to change the valves V1 to V5 to the following states (see FIG. 9). Valve V1: A state in which the inlet V1b and the outlet V1c are in communication with each other (a state in which the first portion 241 and the individual exhaust pipe 210 are not in communication with each other) Valve V2: A state in which the inlet V2b and the outlet V2c are in communication with each other (a state in which the second portion 242 and the individual exhaust pipe 220 are not in communication with each other) Valve V3: A state in which the inlet V3a and the outlet V3c are in communication with each other (a state in which the third portion 243 and the individual exhaust pipe 230 are in communication with each other) Valve V4: open Valve V5: Closed Next, while the substrate W is being rotated by the spin holder 130, the controller Ctr controls the supply unit 140 to supply, for example, an acid-based processing liquid L1 from the nozzle N to the center of the surface of the substrate W (see FIG. 4).

[0063] The processing liquid L1 supplied to the surface of the substrate W flows over the entire surface from the center to the outer periphery of the substrate W due to the rotation of the substrate W, and is then spun outward from the outer periphery. Therefore, while the processing liquid L1 continues to be supplied from the nozzle N, a liquid film of the processing liquid L1 is formed on the surface of the substrate W. As a result, the surface of the substrate W is processed by the processing liquid L1.

[0064] The processing liquid L1 that has been thrown outward from the outer periphery of the substrate W is collected in the cup body 150. Gas generated during the processing of the substrate W with the processing liquid L1 is exhausted from the exhaust port 152 of the liquid processing unit 100. The acid-based exhaust gas G1 exhausted from the liquid processing unit 100 is introduced into the switching unit 300 through the main exhaust pipe 240 (see FIG. 4).

[0065] The exhaust gas G1 introduced into the switching unit 300 flows through the first portion 241, the second portion 242, and the third portion 243 of the main exhaust pipe 240, the inlet pipe 313, the valve V3, and the outlet pipe 323, and is discharged from the individual exhaust pipe 230 to the outside of the substrate processing system 1 (see FIG. 9). The outside air introduced from the outside air introduction pipe 330 flows through the outside air introduction pipe 331, the valve V1, and the outlet pipe 321, and is discharged from the individual exhaust pipe 210 to the outside of the substrate processing system 1 (see FIG. 9). The outside air introduced from the outside air introduction pipe 330 flows through the outside air introduction pipe 332, the valve V2, and the outlet pipe 322, and is discharged from the individual exhaust pipe 220 to the outside of the substrate processing system 1 (see FIG. 9). Since the valve V5 is in a closed state, the outside air is not introduced from the outside air introduction pipe 340 to the second portion 242 of the main exhaust pipe 240.

[0066] Next, the controller Ctr controls the supply unit 140 to supply the processing liquid L4 (rinsing liquid) from the nozzle N to the center of the surface of the substrate W (see FIG. 4). As a result, the processing liquid L1 remaining on the surface of the substrate W is washed away by the processing liquid L4.

[0067] Next, the controller Ctr controls the switching unit 300 to change the valves V1 to V5 to the following states (see FIG. 5). Valve V1: A state in which the inlet V1a and the outlet V1c are in communication with each other (a state in which the first portion 241 and the individual exhaust pipe 210 are in communication with each other) Valve V2: A state in which the inlet V2b and the outlet V2c are in communication with each other (a state in which the second portion 242 and the individual exhaust pipe 220 are not in communication with each other) Valve V3: A state in which the inlet V3b and the outlet V3c are in communication with each other (a state in which the third portion 243 and the individual exhaust pipe 230 are not in communication with each other) Valve V4: Closed Valve V5: open Next, while the substrate W is being rotated by the spin holder 130, the controller Ctr controls the supply unit 140 to supply, for example, an organic processing liquid L3 from the nozzle N to the center of the surface of the substrate W (see FIG. 4).

[0068] The processing liquid L3 supplied to the surface of the substrate W flows over the entire surface from the center to the outer periphery of the substrate W due to the rotation of the substrate W, and is then spun outward from the outer periphery. Therefore, while the processing liquid L3 continues to be supplied from the nozzle N, a liquid film of the processing liquid L3 is formed on the surface of the substrate W. As a result, the surface of the substrate W is processed by the processing liquid L3.

[0069] The processing liquid L3 that has been thrown outward from the outer periphery of the substrate W is collected in the cup body 150. Gas generated during the processing of the substrate W with the processing liquid L3 is exhausted from the exhaust port 152 of the liquid processing unit 100. Organic exhaust gas G3 exhausted from the liquid processing unit 100 is introduced into the switching unit 300 through the main exhaust pipe 240 (see FIG. 4).

[0070] The exhaust gas G3 introduced into the switching unit 300 flows through the first portion 241 of the main exhaust pipe 240, the inlet pipe 311, the valve V1, and the outlet pipe 321, and is discharged from the individual exhaust pipe 210 to the outside of the substrate processing system 1 (see FIG. 5). The outside air introduced from the outside air introduction pipe 330 flows through the outside air introduction pipe 332, the valve V2, and the outlet pipe 322, and is discharged from the individual exhaust pipe 220 to the outside of the substrate processing system 1 (see FIG. 5). The outside air introduced from the outside air introduction pipe 330 flows through the outside air introduction pipe 333, the valve V3, and the outlet pipe 323, and is discharged from the individual exhaust pipe 230 to the outside of the substrate processing system 1 (see FIG. 5).

[0071] Here, valve V4 is in a closed state and valve V5 is in an open state, and outside air is introduced from outside air introduction pipe 340 to second portion 242 of main exhaust pipe 240. As a result, the pressure in second portion 242 may be higher than the pressure in first portion 241. Alternatively, based on the results of pressure measurements by sensors SE1 and SE2, controller Ctr may control adjustment unit 350 to change the opening area of ​​outside air introduction pipe 340 so that the pressure in second portion 242 becomes higher than the pressure in first portion 241.

[0072] Thereafter, the controller Ctr controls the spin holder 130 to rotate the substrate W at a predetermined rotation speed. This dries the surface of the substrate W. Furthermore, the controller Ctr controls the transport arms A1, A2 to transport the dried substrate W from the liquid processing unit 100 to the carrier 7 (see FIGS. 1 and 2). This completes the processing of the substrate W.

[0073] [Effect] According to the above example, valve V4 is disposed between first portion 241 and second portion 242 of main exhaust pipe 240. When exhaust gas G3 is discharged from liquid processing unit 100, valve V4 is closed, so that exhaust gas G3 is less likely to flow to second portion 242 downstream of valve V4. According to the above example, when exhaust gas G3 is discharged from liquid processing unit 100, outside air is introduced from outside air introduction pipe 340 to second portion 242 via valve V5. Therefore, even if a slight gap exists in valve V4 due to the structure of valve V4 (e.g., dimensional accuracy, etc.), the outside air introduced from outside air introduction pipe 340 prevents exhaust gas G3 from flowing through the gap to second portion 242. Therefore, exhaust gas G3 is less likely to reach individual exhaust pipes 220, 230. As a result, when processing a substrate in the liquid processing unit 100 using multiple types of processing liquid, it is possible to prevent the exhaust gas G3 discharged from the liquid processing unit 100 from flowing into individual exhaust pipes 220, 230 other than the corresponding individual exhaust pipe 210.

[0074] According to the above example, the organic exhaust gas G3 is less likely to flow into the individual exhaust pipes 220, 230. This prevents volatile organic compounds from being mixed into the acid exhaust gas or alkaline exhaust gas. This makes it possible to prevent air pollution caused by the gas exhausted through the individual exhaust pipes 220, 230.

[0075] According to the above example, the pressure in the second portion 242 can be set higher than the pressure in the first portion 241. In this case, even if a small gap exists in the valve V4, the exhaust gas G3 hardly flows through the gap into the second portion 242. Therefore, it becomes extremely difficult for the exhaust gas G3 to reach the individual exhaust pipes 220, 230.

[0076] According to the above example, adjustment unit 350 can adjust the amount of outside air introduced into second portion 242 based on the pressure measurement results by sensors SE1 and SE2 so that the pressure in second portion 242 is higher than the pressure in first portion 241. In this case, even if the pressure in first portion 241 changes due to, for example, a change in processing conditions in liquid processing unit 100, adjustment unit 350 adjusts the pressures in second portion 242 and third portion 243 so that the pressure in second portion 242 is higher than the pressure in first portion 241. Therefore, it is possible to suppress the inflow of exhaust gas G3 into second portion 242 without being affected by the pressure fluctuation in first portion 241.

[0077] According to the above example, the switching unit 300 is disposed above the liquid treatment unit 100. Therefore, when mist is present in the exhaust gas from the liquid treatment unit 100, the exhaust gas from which the mist has been separated reaches the switching unit 300. Therefore, it is possible to prevent dirt, impurities, etc. caused by the mist from adhering to the switching unit 300.

[0078] [Variations] The disclosure in this specification should be considered to be illustrative and not restrictive in all respects. Various omissions, substitutions, modifications, etc. may be made to the above examples without departing from the scope of the claims and the gist thereof.

[0079] (1) When there are two types of processing liquids for processing the substrate W (for example, any two of an acid-based processing liquid L1, an alkaline-based processing liquid L2, and an organic-based processing liquid L3), the exhaust unit 200 may not include an individual exhaust pipe 230 as shown in Fig. 10. Accordingly, the switching unit 300 may not include the third portion 243, the inlet pipe 313, the outside air introduction pipe 333, the outlet pipe 323, and the valve V3. When there are four or more types of processing liquids for processing the substrate W, although not shown in the figure, the exhaust unit 200 may include individual exhaust pipes and associated members according to the number of types of processing liquids.

[0080] (2) As shown in FIG. 11, the switching unit 300 may further include a valve V6 (sixth switching mechanism) disposed in the inflow pipe 313. The valve V6 is configured to open and close based on an operation signal from the controller Ctr. The valve V6 is switchable between an open state in which the exhaust gas can flow and a closed state in which the flow of the exhaust gas is prevented. In this case, the valve V6 is disposed between the first portion 241 and the valve V1. Therefore, when the exhaust gases G1 and G2 are discharged from the liquid processing unit 100, the valve V6 is closed, so that the exhaust gas G3 is less likely to flow back from the individual exhaust pipe 210 through the valve V1. Therefore, the exhaust gas G3 is more unlikely to reach the individual exhaust pipes 220 and 230.

[0081] (3) As shown in Fig. 12, the switching unit 300 may further include a valve V7 disposed in the third portion 243. The valve V7 is configured to open and close based on an operation signal from the controller Ctr. The valve V7 is switchable between an open state in which the exhaust gas can flow and a closed state in which the flow of the exhaust gas is restricted. In this case, the valve V7 is closed when the exhaust gas G3 is discharged from the liquid processing unit 100, so that the exhaust gas G3 is more unlikely to reach the individual exhaust pipe 230.

[0082] 12, switching unit 300 may further include an outside air introduction pipe 360 ​​connected to third portion 243, and a valve V8 disposed in outside air introduction pipe 360. Outside air introduction pipe 360 ​​is configured to supply outside air to third portion 243. Valve V8 is configured to open and close based on an operation signal from controller Ctr. Valve V8 is switchable between an open state in which outside air can flow and a closed state in which the flow of outside air is restricted. In this case, valve V8 is opened when exhaust gas G3 is discharged from liquid processing unit 100, so that the outside air introduced from outside air introduction pipe 360 ​​prevents exhaust gas G3 from flowing through third portion 243.

[0083] 12, the switching unit 300 may further include an adjustment unit 370 arranged on the upstream side of the valve V8 in the outside air introduction pipe 360. The adjustment unit 370 is configured to operate based on an operation signal from the controller Ctr, similar to the adjustment unit 350. The adjustment unit 370 is configured to adjust the flow rate of outside air flowing through the outside air introduction pipe 360 ​​by changing the opening area of ​​the outside air introduction pipe 360, for example, and adjust the pressure of the third portion 243 of the main exhaust pipe 240 communicating with the outside air introduction pipe 360. In this case, the opening area of ​​the outside air introduction pipe 360 ​​can be adjusted by the adjustment unit 370 so that the pressure of the third portion 243 is higher than the pressure of the first portion 241. Although not shown, the switching unit 300 may further include a sensor configured to measure the pressure of the third portion 243 of the main exhaust pipe 240. Based on the pressure measurement results by the sensor and sensor SE1, the controller Ctr may control the adjustment unit 370 to change the opening area of ​​the outside air introduction pipe 360 ​​so that the pressure in the third portion 243 is higher than the pressure in the first portion 241.

[0084] (4) After the adjustment unit 350 is controlled by the controller Ctr so that the opening area of ​​the outside air introduction pipe 340 becomes a predetermined size, the adjustment of the opening area by the adjustment unit 350 may not be performed. Alternatively, the adjustment of the opening area of ​​the outside air introduction pipe 340 by the adjustment unit 350 may be performed constantly or at predetermined time intervals based on the pressure measurement results by the sensors SE1 and SE2.

[0085] [Other examples] Example 1. An example of a substrate processing apparatus includes a liquid processing section configured to supply a plurality of processing liquids, including a first processing liquid and a second processing liquid of a different type from the first processing liquid, to a surface of a substrate, and an exhaust section configured to exhaust exhaust gas discharged from the liquid processing section to the outside, the exhaust gas including a first exhaust gas discharged from the liquid processing section in association with the processing of the substrate with the first processing liquid and a second exhaust gas discharged from the liquid processing section in association with the processing of the substrate with the second processing liquid. The exhaust section is configured to allow the exhaust gas to flow through, and includes a main exhaust pipe including a first portion located on the upstream side and a second portion located downstream of the first portion, a first individual exhaust pipe configured to allow the first exhaust gas to flow through, a second individual exhaust pipe configured to allow the second exhaust gas to flow through, and a switching section configured to selectively connect the main exhaust pipe to one of the first individual exhaust pipe and the second individual exhaust pipe.The switching unit includes a first switching mechanism disposed between the first portion and the first individual exhaust pipe, and configured to switch between a communication state in which the first portion and the first individual exhaust pipe are connected when a first exhaust gas is discharged from the liquid treatment unit, and a non-communication state in which the first portion and the first individual exhaust pipe are not connected when an exhaust gas other than the first exhaust gas is discharged from the liquid treatment unit; a second switching mechanism disposed between the second portion and the second individual exhaust pipe, and configured to switch between a communication state in which the second portion and the second individual exhaust pipe are connected when a second exhaust gas is discharged from the liquid treatment unit, and a non-communication state in which the second portion and the second individual exhaust pipe are not connected when an exhaust gas other than the second exhaust gas is discharged from the liquid treatment unit; the third switching mechanism is arranged between the first part and the second part and configured to switch between a closed state in which the first exhaust gas is discharged from the liquid treatment unit and an open state in which exhaust gases other than the first exhaust gas are allowed to flow into the second part when exhaust gases other than the first exhaust gas are discharged from the liquid treatment unit; an outside air inlet pipe connected to the second part to introduce outside air into the second part; and a fourth switching mechanism is arranged in the inlet pipe and configured to switch between an open state in which the first exhaust gas is discharged from the liquid treatment unit and a closed state in which the introduction of outside air into the second part is prevented when exhaust gases other than the first exhaust gas are discharged from the liquid treatment unit.

[0086] In the case of Example 1, since the third switching mechanism is disposed between the first portion and the second portion of the main exhaust pipe, when the first exhaust gas is discharged from the liquid treatment section, the third switching mechanism is closed, so that the first exhaust gas is less likely to flow into the second portion downstream of the third switching mechanism. Also, in the case of Example 1, when the first exhaust gas is discharged from the liquid treatment section, outside air is introduced from the outside air introduction pipe to the second portion via the fourth switching mechanism. Therefore, even if a small gap exists in the third switching mechanism due to the structure of the third switching mechanism (e.g., dimensional accuracy, etc.), the first exhaust gas is prevented from flowing into the second portion through the gap by the outside air introduced into the second portion. Therefore, the first exhaust gas is less likely to reach the second individual exhaust pipe. As a result, when a substrate is processed in a liquid treatment section using a plurality of types of processing liquid, it is possible to prevent the exhaust gas discharged from the liquid treatment section from flowing into an individual exhaust pipe different from the individual exhaust pipe corresponding to the exhaust gas.

[0087] Example 2 In the apparatus of Example 1, the multiple processing liquids may further include a third processing liquid different in type from the first processing liquid and the second processing liquid, the exhaust gas may further include a third exhaust gas discharged from the liquid processing unit in association with the processing of the substrate with the third processing liquid, the exhaust unit may further include a third individual exhaust pipe configured to allow the third exhaust gas to flow, the main exhaust pipe may further include a third portion located downstream of the third switching mechanism, and the switching unit may further include a fifth switching mechanism disposed between the third portion and the third individual exhaust pipe and configured to switch between a connected state in which the third portion and the third individual exhaust pipe are connected when the third exhaust gas is discharged from the liquid processing unit and a non-connected state in which the third portion and the third individual exhaust pipe are not connected when exhaust gas other than the third exhaust gas is discharged from the liquid processing unit, and may be configured to selectively connect the main exhaust pipe to any one of the first individual exhaust pipe, the second individual exhaust pipe and the third individual exhaust pipe. In this case, similarly to the device of Example 1, it becomes difficult for the first exhaust gas to reach the second individual exhaust pipe and the third individual exhaust pipe.

[0088] Example 3 In the apparatus of Example 1 or Example 2, the first processing liquid may be an organic processing liquid, and the second processing liquid may be an acid processing liquid or an alkaline processing liquid. In this case, the inclusion of volatile organic compounds in the acid exhaust gas or the alkaline exhaust gas is suppressed. Therefore, it is possible to suppress air pollution caused by the gas exhausted through the second individual exhaust pipe.

[0089] Example 4 In any of the devices of Examples 1 to 3, when the first exhaust gas is discharged from the liquid treatment section, the third switching mechanism may be closed and the fourth switching mechanism may be open, so that the pressure in the second section is higher than the pressure in the first section. In this case, even if a small gap is present in the third switching mechanism, the first exhaust gas hardly flows through the gap to the second section. Therefore, it becomes extremely difficult for the first exhaust gas to reach the second individual exhaust pipe.

[0090] Example 5 In the device of any one of Examples 1 to 4, the switching unit may further include a first sensor configured to measure the pressure of the first portion, a second sensor configured to measure the pressure of the second portion, and an adjustment unit provided upstream of the fourth switching mechanism in the outside air introduction pipe, and the adjustment unit may be configured to adjust the amount of outside air introduced into the second portion so that the magnitude of the pressure measured by the second sensor is greater than the magnitude of the pressure measured by the first sensor. In this case, the same effect as the device of Example 4 can be obtained. In addition, in this case, even if the pressure of the first portion changes due to, for example, a change in processing conditions in the liquid processing unit, the pressure of the second portion is adjusted by the adjustment unit so that the pressure of the second portion is greater than the pressure of the first portion. Therefore, it is possible to suppress the inflow of the first exhaust gas into the second portion without being affected by the pressure fluctuation of the first portion.

[0091] Example 6 In any of the devices of Examples 1 to 5, the switching section may be disposed above the liquid treatment section. Incidentally, a mist of the treatment liquid may accompany the exhaust gas. However, since the mist is heavier than gas, the mist is unlikely to rise even if the exhaust gas rises. That is, in the case of Example 6, even if the mist of the treatment liquid accompanies the exhaust gas immediately after it is discharged from the liquid treatment section, the mist liquefies and falls in the process of the exhaust gas flowing toward the switching section. Therefore, the exhaust gas after the mist is separated reaches the switching section. Therefore, it is possible to suppress the adhesion of dirt, impurities, etc. caused by the mist to the switching section.

[0092] Example 7 In any of the devices of Examples 1 to 6, the switching unit may further include a sixth switching mechanism that is arranged between the first portion and the first switching mechanism and is configured to switch between a communication state in which the first portion and the first switching mechanism are in communication when the first exhaust gas is discharged from the liquid treatment unit and a non-communication state in which the first portion and the first switching mechanism are not in communication when an exhaust gas other than the first exhaust gas is discharged from the liquid treatment unit. In this case, since the sixth switching mechanism is arranged between the first portion and the first switching mechanism, the sixth switching mechanism is closed when the second exhaust gas is discharged from the liquid treatment unit, making it difficult for the first exhaust gas to flow back from the first individual exhaust pipe through the first switching mechanism. Therefore, it becomes even more difficult for the first exhaust gas to reach the second individual exhaust pipe.

[0093] Example 8: An example of a substrate processing method is a method of processing a substrate using the apparatus of any one of Examples 1 to 7, and includes a first step of setting the first switching mechanism in a communicating state, the second switching mechanism in a non-communicating state, the third switching mechanism in a closed state, and the fourth switching mechanism in an open state, a second step of processing the substrate with a first processing liquid in a liquid processing section after the first step, a third step of setting the first switching mechanism in a non-communicating state, the second switching mechanism in a communicating state, the third switching mechanism in an open state, and the fourth switching mechanism in a closed state, and a fourth step of processing the substrate with a second processing liquid in a liquid processing section after the third step. In this case, the same action and effect as the apparatus of Example 1 can be obtained. [Explanation of symbols]

[0094] 1...substrate processing system (substrate processing apparatus), 100...liquid processing unit (liquid processing section), 200...exhaust unit (exhaust section), 210, 220, 230...individual exhaust pipes, 240...main exhaust pipe, 241...first section, 242...second section, 243...third section, 300...switching unit (switching section), 340...outside air introduction pipe, 350...adjustment section, Ctr...controller (control section), G1...exhaust gas (second exhaust gas or third exhaust gas), G2...exhaust gas (second exhaust gas or third exhaust gas) , G3...exhaust gas (first exhaust gas), L1...processing liquid (second processing liquid or third processing liquid), L2...processing liquid (second processing liquid or third processing liquid), L3...processing liquid (first processing liquid), SE1...sensor (first sensor), SE2...sensor (second sensor), V1...valve (first switching mechanism), V2...valve (second switching mechanism), V3...valve (fifth switching mechanism), V4...valve (third switching mechanism), V5...valve (fourth switching mechanism), V6...valve (sixth switching mechanism), W...substrate.

Claims

1. a liquid processing section configured to supply a plurality of processing liquids, including a first processing liquid and a second processing liquid different in type from the first processing liquid, to a surface of the substrate; an exhaust unit configured to exhaust exhaust gas discharged from the liquid processing unit to the outside, the exhaust gas including a first exhaust gas discharged from the liquid processing unit in association with the processing of the substrate with the first processing liquid and a second exhaust gas discharged from the liquid processing unit in association with the processing of the substrate with the second processing liquid; The exhaust section is a main exhaust pipe configured to allow the exhaust gas to flow therethrough, the main exhaust pipe including a first portion located on an upstream side and a second portion located downstream of the first portion; a first individual exhaust pipe configured to allow the first exhaust gas to flow; a second individual exhaust pipe configured to allow the second exhaust gas to flow through; a switching unit configured to selectively connect the main exhaust pipe to one of the first individual exhaust pipe and the second individual exhaust pipe, The switching unit is a first switching mechanism that is disposed between the first portion and the first individual exhaust pipe, and that is configured to switch between a communication state in which the first portion and the first individual exhaust pipe are in communication when the first exhaust gas is discharged from the liquid treatment unit, and a non-communication state in which the first portion and the first individual exhaust pipe are not in communication when the exhaust gas other than the first exhaust gas is discharged from the liquid treatment unit; a second switching mechanism that is disposed between the second portion and the second individual exhaust pipe, and is configured to switch between a communication state in which the second portion and the second individual exhaust pipe are in communication with each other when the second exhaust gas is discharged from the liquid treatment unit, and a non-communication state in which the second portion and the second individual exhaust pipe are not in communication with each other when the exhaust gas other than the second exhaust gas is discharged from the liquid treatment unit; a third switching mechanism that is disposed between the first portion and the second portion of the main exhaust pipe and is configured to switch between a closed state in which the first exhaust gas is prevented from flowing to the second portion when the first exhaust gas is discharged from the liquid treatment portion, and an open state in which the exhaust gas other than the first exhaust gas is allowed to flow to the second portion when the exhaust gas other than the first exhaust gas is discharged from the liquid treatment portion; and an outside air introduction pipe connected to the second portion so as to introduce outside air into the second portion; the substrate processing apparatus including: a fourth switching mechanism disposed in the outside air inlet pipe and configured to switch between an open state that allows the introduction of outside air into the second section when the first exhaust gas is discharged from the liquid processing apparatus, and a closed state that prevents the introduction of outside air into the second section when the exhaust gas other than the first exhaust gas is discharged from the liquid processing apparatus.

2. the plurality of processing liquids further includes a third processing liquid different in type from the first processing liquid and the second processing liquid, the exhaust gas further includes a third exhaust gas exhausted from the liquid processing unit in association with the processing of the substrate with the third processing liquid; the exhaust section further includes a third individual exhaust pipe configured to allow the third exhaust gas to flow therethrough, the main exhaust pipe further includes a third portion located downstream of the third switching mechanism, The device described in claim 1, wherein the switching unit further includes a fifth switching mechanism that is disposed between the third portion and the third individual exhaust pipe, and is configured to switch between a connected state in which the third portion and the third individual exhaust pipe are connected when the third exhaust gas is discharged from the liquid treatment unit, and a non-connected state in which the third portion and the third individual exhaust pipe are not connected when the exhaust gas other than the third exhaust gas is discharged from the liquid treatment unit, and is configured to selectively connect the main exhaust pipe to any one of the first individual exhaust pipe, the second individual exhaust pipe, and the third individual exhaust pipe.

3. the first processing liquid is an organic processing liquid, 3. The apparatus according to claim 1, wherein the second processing liquid is an acid-based processing liquid or an alkaline-based processing liquid.

4. The device according to any one of claims 1 to 3, wherein when the first exhaust gas is discharged from the liquid treatment section, the third switching mechanism is set to the closed state and the fourth switching mechanism is set to the open state, so that the pressure in the second section is set to be higher than the pressure in the first section.

5. The switching unit is a first sensor configured to measure a pressure in the first portion; a second sensor configured to measure a pressure in the second portion; and and an adjusting unit provided in the outside air introduction pipe upstream of the fourth switching mechanism, The device according to any one of claims 1 to 4, wherein the adjustment unit is configured to adjust the amount of outside air introduced into the second portion so that the magnitude of the pressure measured by the second sensor is greater than the magnitude of the pressure measured by the first sensor.

6. The device according to any one of claims 1 to 5, wherein the switching section is disposed above the liquid processing section.

7. The device described in any one of claims 1 to 6, further comprising a sixth switching mechanism arranged between the first part and the first switching mechanism and configured to switch between a connected state in which the first part and the first switching mechanism are connected when the first exhaust gas is discharged from the liquid treatment unit, and a non-connected state in which the first part and the first switching mechanism are not connected when the exhaust gas other than the first exhaust gas is discharged from the liquid treatment unit.

8. A method for processing a substrate using the apparatus according to any one of claims 1 to 7, comprising the steps of: a first step of setting the first switching mechanism to the communicating state, the second switching mechanism to the non-communicating state, the third switching mechanism to the closed state, and the fourth switching mechanism to the open state; a second step of treating the substrate with the first treatment liquid in the liquid treatment section after the first step; a third step of setting the first switching mechanism in the non-communicating state, the second switching mechanism in the communicating state, the third switching mechanism in the open state, and the fourth switching mechanism in the closed state; a fourth step of treating the substrate with the second processing liquid in the liquid processing section after the third step.

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