Processing equipment

Abstract

To provide a processing device which can improve the operability of selecting and registering a portion of a displayed image.SOLUTION: A processing device 1 comprises: a holding table 10 which has a holding surface that holds a processing object 200 formed with a plurality of devices sectioned by a plurality of division schedule lines on the surface; a processing unit 20 which processes the processing object 200 held by the holding table 10; an imaging unit 30 which images the processing object 200 held by the holding table 10; a movement unit 50 which relatively moves the holding table 10 in the horizontal direction to the holding surface with respect to the processing unit 20 and the imaging unit 30; a touch panel 40 which displays a photographed image; and a control unit 60. The control unit 60 detects a line of an image located in a permissible region from a contact line drawn on the image displayed on the touch panel 40 and registers the detected line.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a processing device. [Background technology]

[0002] Processing equipment, particularly precision processing equipment such as semiconductor manufacturing equipment that requires precision processing, requires control in the order of μm. For this reason, an operator must carefully operate an operation panel mounted on or connected to the processing equipment to input various numerical values, thereby controlling the operation of the processing equipment. For example, Patent Document 1 discloses a processing equipment having an operation panel on which numeric input keys including numeric keys from 0 to 9 are arranged, and on which digit setting keys are arranged to set the digits of the numerical values ​​input by operating the numeric input keys. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2001-84015 A Summary of the Invention [Problem to be solved by the invention]

[0004] In conventional machining devices, for example, when a captured image is displayed, there is a demand for improved operability that allows an operator to register the intended division lines, machining grooves, patterns, and the like in the image.

[0005] The present invention has been made in consideration of the above, and its object is to provide a processing device that can improve the operability of selecting and registering a portion of a displayed image. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems and achieve the object, a processing apparatus of the present invention is a processing apparatus including a holding table having a holding surface for holding a workpiece having a plurality of devices formed on its surface, the plurality of devices being partitioned by a plurality of planned division lines, a processing unit for processing the workpiece held on the holding table, an imaging unit for imaging the workpiece held on the holding table, a moving unit for moving the holding table relatively to the processing unit and the imaging unit in a horizontal direction to the holding surface, a touch panel for displaying the captured image, and a control unit, wherein the control unit is configured to determine a contact line traced on an image displayed on the touch panel and a moving unit for moving the holding table relatively to the processing unit and the imaging unit in a horizontal direction to the holding surface, The contour lines located within a certain distance from the image are Detect and Contour The feature of this method is to register lines.

[0007] In the processing device, Contour The line is the outline of a pattern constituting the device in the image displayed on the touch panel, and the control unit detects the outline of the pattern. Contour The pattern corresponding to the line may be registered as a key pattern serving as a mark for detecting the planned division line.

[0008] In the processing device, Contour The line is the planned division line or the processing groove formed by the processing unit in the image displayed on the touch panel, and the control unit moves the imaging unit, which images the workpiece, relative to the holding table as an imaging route, Contour Lines may be registered. Effect of the Invention

[0009] The processing device of the present invention has an effect of improving the operability of selecting and registering a part of a displayed image. [Brief description of the drawings]

[0010] [Figure 1] FIG. 1 is a perspective view showing a configuration example of a processing device according to an embodiment. [Diagram 2]FIG. 2 is a diagram for explaining an example in which the processing device according to the embodiment registers a line of an image. [Diagram 3] FIG. 3 is a diagram for explaining an example of detecting lines in the image shown in FIG. [Figure 4] FIG. 4 is a flowchart illustrating an example of a processing procedure related to registration of the processing device according to the embodiment. [Diagram 5] FIG. 5 is a diagram for explaining another example in which the processing device according to the embodiment registers a line of an image. [Figure 6] FIG. 6 is a diagram for explaining an example of detecting lines in the image shown in FIG. [Figure 7] FIG. 7 is a flowchart illustrating another example of the processing procedure related to registration of the processing device according to the embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] The form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiment. Furthermore, the components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. Furthermore, the configurations described below can be appropriately combined. Furthermore, various omissions, substitutions, or modifications of the configurations can be made without departing from the gist of the present invention.

[0012] [Embodiment] A processing device 1 according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing an example of the configuration of the processing device 1 according to the embodiment. The processing device 1 according to the embodiment is a device that cuts a workpiece 200 and forms a cutting groove, which is a processing mark, on the workpiece 200. The processing device 1 is also a device that images, displays, and stores cutting grooves, patterns, etc. on a preset inspection route among cutting grooves formed by cutting at any timing during or after processing of the workpiece 200. In this embodiment, the cutting groove is an example of a processed groove. Note that the processing device 1 is not limited to this in the present invention, and may be a laser processing device that irradiates a laser beam onto the workpiece 200 to laser process the workpiece 200, and images, displays, and stores the laser processed grooves formed by laser processing and which are processing marks on the inspection route.

[0013] In the embodiment, the workpiece 200 to be cut by the processing device 1 is, as shown in Fig. 1, a disk-shaped semiconductor wafer or an optical device wafer, whose base material is silicon, sapphire, silicon carbide (SiC), gallium arsenide, or the like. The workpiece 200 has a flat surface 201 on which devices 203 are formed in areas partitioned by a plurality of planned division lines 202 formed in a lattice pattern. The workpiece 200 has an adhesive tape 205 attached to a back surface 204 on the back side of the front surface 201, and an annular frame 206 attached to the outer edge of the adhesive tape 205. Note that the workpiece 200 is not limited to this in the present invention, and may be a rectangular package substrate having a plurality of devices sealed with resin, a ceramic plate, a glass plate, or the like.

[0014] 1, the processing apparatus 1 includes a holding table 10, a processing unit 20 that performs cutting processing, an imaging unit 30, a touch panel 40, a moving unit 50, and a control unit 60. In the example shown in Fig. 1, the processing apparatus 1 includes two processing units 20, that is, a two-spindle dicer, a so-called facing dual type cutting apparatus.

[0015] The holding table 10 holds the workpiece 200 having a plurality of planned dividing lines 202 on the holding surface 11. The holding table 10 includes, for example, a chuck table. The holding table 10 is disk-shaped, with a flat holding surface 11 formed on the upper surface thereof for holding the workpiece 200, a disk-shaped suction section made of porous ceramics or the like having a large number of porous holes, and a frame body for fixing the suction section by fitting it into a recess in the center of the upper surface. The holding table 10 is movable by the X-axis moving unit 51 of the moving unit 50, and is provided so as to be rotatable by a rotation drive source (not shown). The suction section of the holding table 10 is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown), and the entire holding surface 11 suctions and holds the workpiece 200. In addition, as shown in FIG. 1, a plurality of clamping sections 12 for clamping an annular frame 206 are provided around the holding table 10.

[0016] The processing unit 20 processes the workpiece 200 held on the holding table 10 along the planned division line 202 to form a cut groove. The processing unit 20 includes a cutting blade 21, a spindle, and a spindle housing 22. The cutting blade 21 is rotated around the Y axis to cut the workpiece 200 held on the holding table 10. The spindle is provided along the Y axis direction, and supports the cutting blade 21 at its tip so as to be rotatable around the Y axis. The spindle housing 22 accommodates the spindle so as to be rotatable around the Y axis. In the processing unit 20, the spindle housing 22 is provided so as to be movable in the Y axis direction by the Y axis moving unit 52 of the moving unit 50 relative to the workpiece 200 held on the holding table 10, and is also provided so as to be movable in the Z axis direction by the Z axis moving unit 53 of the moving unit 50.

[0017] The imaging unit 30 captures an image of the workpiece 200 held on the holding table 10. In the embodiment, the imaging unit 30 is fixed to the processing unit 20 so as to move integrally with the processing unit 20. The imaging unit 30 includes an imaging element that captures an image of a planned division line 202 of the workpiece 200 held on the holding table 10 before cutting processing, and a cutting groove, which is a processing mark of the workpiece 200 after cutting processing. The imaging element is, for example, a CCD (Charge-Coupled Device) imaging element or a CMOS (Complementary MOS) imaging element.

[0018] The imaging unit 30 images the workpiece 200 held on the holding table 10 before cutting processing, obtains images for performing alignment between the workpiece 200 and the cutting blade 21, and outputs the obtained images to the control unit 60. The imaging unit 30 also images the workpiece 200 held on the holding table 10 after cutting processing, and outputs the obtained images to the control unit 60.

[0019] The touch panel 40 is set on the main body of the processing device 1 with the display surface facing outward. In the example shown in FIG. 1, the upper part of the main body of the processing device 1 is omitted. The touch panel 40 is disposed in a position on the main body of the processing device 1 where it is easy to see and operate. The touch panel 40 has, for example, a display device such as a liquid crystal display or an organic EL display, and a touch screen that specifies the contact position and coordinates of an object on the display surface of the display device. The touch panel 40 is electrically connected to the control unit 60. Under the control of the control unit 60, the touch panel 40 displays an image of the surface of the workpiece 200 captured by the imaging unit 30 and various information required for processing, and receives input operations and the like required for processing from an operator.

[0020] The touch panel 40 can provide notifications in cooperation with a notification unit 41 that is electrically connected to the control unit 60. The notification unit 41 is composed of a light emitting diode (LED) or the like that provides notifications based on the status of each operation related to the observation support processing including cutting and kerf checking.

[0021] The moving unit 50 includes an X-axis moving unit 51, a Y-axis moving unit 52, and a Z-axis moving unit 53. The X-axis moving unit 51 feeds the holding table 10 for processing along the X-axis direction, which is one horizontal direction, relative to the processing unit 20. The Y-axis moving unit 52 indexes and feeds the processing unit 20 for indexing along the Y-axis direction, which is another horizontal direction and perpendicular to the X-axis direction, relative to the holding table 10. The Z-axis moving unit 53 feeds the processing unit 20 for cutting along the Z-axis direction, which is perpendicular to both the X-axis direction and the Y-axis direction and parallel to the vertical direction, relative to the holding table 10.

[0022] The control unit 60 controls each component of the processing device 1 to cause the processing device 1 to perform each operation related to the cutting process for the workpiece 200 and the observation support process including the kerf check.

[0023] The control unit 60 includes an arithmetic processing device such as a CPU (Central Processing Unit), a storage device such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input / output interface device. The control unit 60 is a computer that can execute a control program for controlling each of the above-mentioned components according to a series of processing steps performed by the processing device 1 using such devices.

[0024] The control unit 60 controls the overall operation of the processing device 1 according to the processing conditions set by the operator via the touch panel 40. The control unit 60 can provide a function of displaying, on the touch panel 40, an image of the workpiece 200 captured by the imaging unit 30, and receiving a registration operation by the operator for the image. The control unit 60 can provide a function of controlling various units in the processing device 1 based on the registered information.

[0025] The control unit 60 includes a detection unit 61, a registration unit 62, and a storage unit 63. The control unit 60 realizes functional units such as the detection unit 61 and the registration unit 62 by executing a program. The storage unit 63 is a storage medium built into the control unit 60, but may be realized by an external storage device.

[0026] The detection unit 61 detects lines of the image located within the allowable area from the contact line traced on the image displayed on the touch panel 40. The contact line is the trajectory, movement path, etc. of a contacting object traced on the display surface of the touch panel 40. In the image of the workpiece 200, for example, the division line 202, the device 203, and the key pattern have different contrasts, colors, etc. The contacting object includes, for example, the operator's finger, a touch pen, etc. The detection unit 61 detects, for example, a boundary line between areas with different contrasts, colors, etc. in the image. The lines detected by the detection unit 61 include, for example, straight lines, curved lines, broken lines, patterns, etc. in the image. The detection unit 61 detects lines of the image located within the allowable area from the image for each of a plurality of different pixels on the contact line.

[0027] The registration unit 62 registers the detected lines. Registering a line means, for example, registering information indicating the shape, position, pattern, etc. of the line. The registration unit 62 registers registration information for indicating the line detected by the detection unit 61 on the image. The registration information includes, for example, information indicating the position of the line in the image, information relating the image and the line, information for superimposing the line on the image, etc. The registration unit 62 registers the registration information in the storage unit 63, an external storage device, etc.

[0028] For example, the line detected by the detection unit 61 is assumed to be the contour of a pattern constituting the device 203. In this case, the registration unit 62 registers the pattern corresponding to the detected line as a key pattern serving as a landmark for detecting the planned division line 202. The pattern corresponding to the detected line is a pattern having a contour adjacent to the detected line.

[0029] For example, the line detected by the detection unit 61 is assumed to be the planned division line 202 or a machining groove formed by the machining unit 20 in the image displayed on the touch panel 40. In this case, the registration unit 62 registers the line as an imaging route for moving the imaging unit 30, which images the workpiece 200, relatively to the holding table.

[0030] The control unit 60 can provide a function of controlling the operation of the processing device 1 based on the information of the line registered by the registration unit 62. For example, the control unit 60 controls each unit of the processing device 1 according to the registered line. For example, if the registered line is a key pattern, the control unit 60 executes a process of detecting the planned division line 202 using the key pattern as a landmark. That is, the control unit 60 automatically detects the position of the planned division line 202 based on the distance from the registered key pattern to the planned division line 202. For example, if the registered line is the contour of the planned division line 202, the control unit 60 executes a process of processing the workpiece 200 along the planned division line 202. For example, if the registered line is the contour of the processing groove, the control unit 60 executes a process of imaging the imaging route indicated by the line with the imaging unit 30.

[0031] The storage unit 63 can record various information such as images captured by the imaging unit 30 and registered information. The storage unit 63 stores images and registered information in association with each other. The storage unit 63 can record images of the workpiece 200 captured by the imaging unit 30 at each position on the path of the inspection route.

[0032] As shown in FIG. 1, the processing apparatus 1 further includes a cassette 70 for storing the workpiece 200 before and after cutting, a temporary placement unit 71 for temporarily placing the workpiece 200 before and after storage in the cassette 70, a cleaning unit 90 for cleaning the workpiece 200 after cutting, and a transport unit 80 for transporting the workpiece 200 between the holding table 10, the cassette 70, the temporary placement unit 71, and the cleaning unit 90.

[0033] After the processing conditions including information such as the number of the planned dividing lines 202 of the workpiece 200 and the intervals between the planned dividing lines 202 are registered in the control unit 60, the conveying unit 80 takes out one of the workpieces 200 from the cassette 70, positions it at a predetermined position with the temporary placement unit 71, and then places it on the holding surface 11 of the holding table 10. The processing device 1 suction-holds the workpiece 200 on the holding surface 11 of the holding table 10, performs alignment, and then moves the holding table 10 and the processing unit 20 relatively along the planned dividing lines 202 by the rotary drive source and the moving unit 50 while supplying cutting water from the processing unit 20 to the workpiece 200, and cuts the planned dividing lines 202 of the workpiece 200 with the cutting blade 21 of the processing unit 20 to form a cutting groove. When the processing device 1 has cut all of the planned dividing lines 202 of the workpiece 200, the workpiece 200 is washed in the washing unit 90 and then stored in the cassette 70.

[0034] The configuration example of the processing device 1 according to the present embodiment has been described above. Note that the above configuration described with reference to Fig. 1 is merely an example, and the configuration of the processing device 1 according to the present embodiment is not limited to this example. The functional configuration of the processing device 1 according to the present embodiment can be flexibly modified according to the specifications and operation.

[0035] (Example of registration of processing equipment) Next, an example of registering a line in an image executed by the processing device 1 according to the embodiment will be described. Fig. 2 is a diagram for explaining an example of registering a line in an image by the processing device 1 according to the embodiment. Fig. 3 is a diagram for explaining an example of detecting a line in the image 400 shown in Fig. 2.

[0036] In a scene 1001 shown in FIG. 2, the processing device 1 displays an image 400 of the workpiece 200 on the touch panel 40. The image 400 includes a first image 410 of the device 203 of the workpiece 200 and a second image 420 of a plurality of key patterns of the device 203. The first image 410 has a darker contrast than the four second images 420. The processing device 1 obtains the contrast for each pixel of the image 400, groups blocks of the same contrast, and recognizes the grouped blocks as the second image 420, which is a figure. The processing device 1 detects the edges of the figure shown in the image 400 as contours using a known edge detection technique or the like, and stores the detection result in the storage unit 63 in association with the image 400. That is, the processing device 1 detects the contours of the four figures in the image 400.

[0037] In scene 1002, the operator traces freehand along the contour of one second image 420 displayed on the touch panel 40. For this reason, the operator does not accurately trace the contour of the second image 420, as indicated by a contact line 500. The processing device 1 detects a contact line 500 indicating the trajectory of the movement of the contacting object via the touch panel 40. The processing device 1 detects the trajectory from the start of the movement of the contacting object on the touch panel 40 to the end of the movement as the contact line 500. The contact line 500 has information such as the positions and directions at multiple contact points. The processing device 1 controls the touch panel 40 so as to superimpose the contact line 500 on the image 400.

[0038] As shown in FIG. 3, the processing device 1 detects a line of the image 400 located inside the allowable area 600 from the contact line 500. The allowable area 600 is, for example, an area centered on any one position on the contact line 500, and is set at a plurality of different positions on the contact line 500. For example, the processing device 1 detects the contour of the second image 420 that fits inside the allowable area 600 for each of a plurality of positions (pixels) on the contact line 500 from the start position 510 to the end position 520. The allowable area 600 can be arbitrarily set according to, for example, the scale, size, etc. of the image 400. The allowable area 600 may be set by the number of pixels, for example, within 30 pixels. The allowable area 600 may be, for example, predefined by a program or stored in the storage unit 63. In this embodiment, the allowable area 600 is described as being circular, but may be other shapes such as a square, a cross, etc.

[0039] In an example shown in FIG. 3, in the case of position 531 of the contact line 500, the processing device 1 determines that the contour of the second image 420 is inside the allowable region 600. For example, in the case of position 532 of the contact line 500, the processing device 1 determines that the contour of the second image 420 is not inside the allowable region 600. When the processing device 1 finishes the determination for a plurality of positions on the contact line 500 from the start position 510 to the end position 520, it calculates the ratio of the contour of the second image 420 that is determined to be inside the allowable region 600. The ratio is a result of dividing the number of times that the contour of the second image 420 is determined to be inside the allowable region 600 by the total number of determinations. If the calculated ratio is greater than a threshold, the processing device 1 detects the contour 421 of the second image 420 as a line and registers the detected line. Also, if the calculated ratio is not greater than the threshold, the processing device 1 does not detect the contour 421 of the second image 420 as a line.

[0040] 2, in scene 1003, when the processing device 1 detects the contour 421 of the second image 420 as the line 430 of the image 400, it controls the touch panel 40 to superimpose and display the line 430 on the contour 421 of the second image 420. By referring to the line 430 displayed on the touch panel 40, the operator can confirm that the contour 421 of the pattern indicated by the second image 420 has been selected.

[0041] In scene 1004, when the detected line 430 is the contour 421 of the pattern, the processing device 1 registers the second image 420 surrounded by the line 430 as a key pattern. However, for example, when registering a key pattern for detecting the position of the planned division line 202 with the processing device 1, there is a need to register not only the pattern but also the surroundings with different contrast. For this reason, in this embodiment, the processing device 1 registers registration information on the first image 410 of the area 440 expanded by a predetermined length from the second image 420 in the vertical and horizontal directions, as a key pattern to serve as a landmark, including the second image 420 showing the pattern surrounded by the detected line 430. In this embodiment, the first image 410 is a rectangle, but may be a similar shape expanded from the periphery of the second image 420 in the vertical and horizontal directions, for example. By being a similar shape, it is less likely to include other patterns unnecessary for identifying the key pattern, and detection accuracy is improved.

[0042] (An example of registration control of processing equipment) Next, an example of a processing procedure executed by the processing device 1 according to the embodiment will be described. Fig. 4 is a flowchart showing an example of a processing procedure related to registration of the processing device 1 according to the embodiment. The processing procedure shown in Fig. 4 is realized by the control unit 60 of the processing device 1 executing a program. The processing procedure shown in Fig. 4 is appropriately executed by the control unit 60 of the processing device 1.

[0043] 4, the control unit 60 of the processing device 1 causes the touch panel 40 to display the image 400 (step 2101). For example, the control unit 60 controls the touch panel 40 to display the image 400 captured by the imaging unit 30 of the workpiece 200 held on the holding table 10. As a result, the processing device 1 is in a state where the image 400 of the workpiece 200 is displayed on the touch panel 40. When the process of step 2101 ends, the control unit 60 advances the process to step 2102.

[0044] The control unit 60 determines whether or not the contact line 500 has been detected (step 2102). For example, the control unit 60 determines that the contact line 500 has been detected when the contact line 500 can be detected based on the trajectory, movement path, etc. of the contacting object via the touch panel 40. When the control unit 60 determines that the contact line 500 has not been detected (No in step 2102), the process proceeds to step 2107, which will be described later. When the control unit 60 determines that the contact line 500 has been detected (Yes in step 2102), the process proceeds to step 2103.

[0045] The control unit 60 detects the contour of the figure in the image 400 (step 2103). For example, the control unit 60 detects the boundary of contrast, color, etc. in the image 400 as the contour. For example, the control unit 60 may detect the entire image 400 as the contour detection target, or may detect only the vicinity of the contact line 500 as the contour detection target. When the process of step 2103 ends, the control unit 60 advances the process to step 2104.

[0046] The control unit 60 detects the line 430 located inside the allowable region 600 from the contact line 500 (step 2104). For example, the control unit 60 detects the line 430 of the image 400 that falls inside the allowable region 600 for each of a plurality of different positions (pixels) on the contact line 500 from the start position 510 to the end position 520. The control unit 60 stores in the storage unit 63 the detection result indicating whether or not the boundary line in the image 400 adjacent to the contact line 500 has been detected as the line 430. When the process of step 2104 ends, the control unit 60 advances the process to step 2105.

[0047] The control unit 60 determines whether or not the line 430 has been detected (step 2105). For example, if the detection result in step 2104 indicates that the line 430 has been detected, the control unit 60 determines that the line 430 has been detected. If the control unit 60 determines that the line 430 has not been detected (No in step 2105), the process proceeds to step 2107, which will be described later. On the other hand, if the control unit 60 determines that the line 430 has been detected (Yes in step 2105), the process proceeds to step 2106.

[0048] The control unit 60 executes a process of registering the detected line 430 (step 2106). For example, the control unit 60 executes a process of registering registration information indicating a pattern indicated by the detected line 430 as a key pattern serving as a landmark for detecting the planned division line 202. For example, when the detected line 430 is a straight line, the control unit 60 executes a process of registering the registration information indicating the line 430 as the line 430 along the planned division line 202 or the machining groove formed by the machining unit 20. When the process of step 2106 ends, the control unit 60 advances the process to step 2107.

[0049] The control unit 60 determines whether to terminate (step 2107). For example, the control unit 60 determines to terminate when the termination conditions for registration are met. The termination conditions include, for example, a condition such as receiving a termination instruction from an operator. If the control unit 60 determines not to terminate (No in step 2107), the process returns to step 2102 already described and continues. On the other hand, if the control unit 60 determines to terminate (Yes in step 2107), the process proceeds to step 2108.

[0050] The control unit 60 ends the display of the image 400 (step 2108). For example, the control unit 60 ends the display of the image 400 by controlling the touch panel 40 to end the display of the image 400 being displayed by the touch panel 40. When the process of step 2108 ends, the control unit 60 ends the process procedure shown in FIG.

[0051] 4, the control unit 60 detects the contour of the figure in the image 400 in step 2103, but the present invention is not limited to this. For example, the control unit 60 may detect the contour of the figure in the image 400 as a process before or after displaying the image 400 on the touch panel 40 in step 2101. For example, the processing device 1 may detect the contour of the figure in the image 400 when capturing the image 400.

[0052] As described above, the processing device 1 can detect and register the line 430 of the image 400 located inside the allowable area 600 from the contact line 500 traced on the image 400 displayed on the touch panel 40. This allows the processing device 1 to register any line 430 of the image 400 by simply having the operator operate the touch panel 40 so as to trace near a boundary line, outline, pattern, etc. that the operator wishes to select on the image 400 displayed on the touch panel 40. As a result, the processing device 1 can improve the operability of selecting and registering a part of the displayed image 400.

[0053] Furthermore, when the line 430 is the contour of a pattern constituting the device 203 in the image 400 displayed on the touch panel 40, the processing device 1 can register the detected pattern as a key pattern serving as a landmark for detecting the planned division line 202. This allows the processing device 1 to register any line 430 in the image 400 as a key pattern simply by having the operator operate the touch panel 40 so as to trace close to the contour of the device 203 shown in the image 400. As a result, even if the tracing position is misaligned due to the complex shape of the displayed image 400, the processing device 1 corrects and selects the line 430 as the contour of the pattern constituting the device 203, thereby improving the operability of registering the key pattern.

[0054] Conventionally, the size of a rectangular frame is enlarged, reduced, and moved so as to include a landmark pattern, and the image within the rectangular frame is set as a key pattern. In contrast, the processing device 1 according to the embodiment can set a key pattern simply by tracing freehand near the outline of the pattern constituting the device 203, thereby reducing the number of operations and improving efficiency.

[0055] (Other examples of registration of processing equipment) Next, another example of registering the line 430 in the image executed by the processing device 1 according to the embodiment will be described. Fig. 5 is a diagram for explaining another example of registering the line 430 in the image by the processing device 1 according to the embodiment. Fig. 6 is a diagram for explaining an example of detecting the line 430 in the image 400 shown in Fig. 5.

[0056] An operator may check the state of a cut groove by imaging one line after processing one of the multiple planned dividing lines 202 of the workpiece 200. In such a case, the processing device 1 can provide a function for freehand registration of the planned dividing line 202 and imaging route of the processing target.

[0057] 5, the processing device 1 displays an image 400-1 of the workpiece 200 on the touch panel 40. The image 400-1 is an image of a partial area of ​​the workpiece 200, including an area where the processing device 1 performs one-line processing on the workpiece 200. The image 400-1 includes, for example, an image showing the planned division line 202, the device 203, and the like.

[0058] After the processing device 1 has completed processing, the operator checks the state of the cut groove by tracing freehand on the display surface of the touch panel 40 of the processing device 1 along the intended division line 202 that the operator wishes to register as the processing object and the imaging route.

[0059] In scene 1102, the processing device 1 detects a contact line 500 from a start position 510 to an end position 520 via the touch panel 40. As shown in FIG. 6, the processing device 1 detects a boundary line of a contour located inside the allowable area 600 from the contact line 500 based on the contour of the figure in the image 400-1. For example, the processing device 1 detects a contour line between the planned division line 202 and the device 203, and detects the contour line of the planned division line 202 as a line 430 because the contour line of the planned division line 202 has a higher proportion of being contained inside the allowable area 600. The processing device 1 registers the line 430 by storing registration information indicating the line 430, which is the contour of the planned division line 202, in the storage unit 63. In this embodiment, the processing device 1 registers the detected line 430 as the planned division line 202 to be processed and the imaging route.

[0060] 5, in an example shown in a scene 1102, the processing device 1 controls the touch panel 40 to display the detected line 430, thereby displaying the straight line 430 along the contour of the selected planned division line 202. In this way, the processing device 1 can allow the operator to confirm that the displayed line 430 has been registered.

[0061] After registering the line 430, the processing device 1 may identify the planned division line 202 based on the line 430 in response to an instruction from an operator, and perform a process of forming a cutting groove of one line by processing the workpiece 200 held on the holding table 10 along the planned division line 202. Alternatively, after registering the line 430, the processing device 1 may capture the state of the cutting groove while moving the imaging unit 30 along the line 430. In this way, when it is desired to capture multiple areas, the processing device 1 can provide the operator with an image of the cutting groove captured on one line, without the operator having to perform an operation of moving the imaging area multiple times. For example, the processing device 1 can display an image of the cutting groove captured on one line on the touch panel 40.

[0062] (Another example of registration control of processing equipment) Next, another example of the processing procedure executed by the processing device 1 according to the embodiment will be described. Fig. 7 is a flowchart showing another example of the processing procedure related to registration of the processing device 1 according to the embodiment. The processing procedure shown in Fig. 7 is realized by the control unit 60 of the processing device 1 executing a program. The processing procedure shown in Fig. 7 is appropriately executed by the control unit 60 of the processing device 1.

[0063] In the processing procedure shown in FIG. 7, the processing from step 2101 to step 2108 is the same as the processing from step 2101 to step 2108 shown in FIG. 4, so a detailed description thereof will be omitted.

[0064] 7, when the process of step 2106 is completed, the control unit 60 of the processing device 1 executes a processing process based on the registered line 430 (step 2111). For example, the control unit 60 executes the processing process to specify the planned dividing line 202 based on the line 430, and controls the processing unit 20 to process the workpiece 200 held on the holding table 10 along the planned dividing line 202. When the process of step 2111 is completed, the control unit 60 advances the process to step 2112.

[0065] The control unit 60 executes an imaging process based on the registered line 430 (step 2112). For example, the control unit 60 controls the imaging unit 30 and the moving unit 50 to image the processing state while moving the imaging unit 30 along the line 430 by executing the imaging process. When the process of step 2112 is completed, the control unit 60 advances the process to step 2113.

[0066] The control unit 60 causes the captured image to be displayed on the touch panel 40 (step 2113). For example, the control unit 60 controls the touch panel 40 to display the image captured by the imaging unit 30. As a result, the processing device 1 is in a state where an image of the processed groove is displayed on the touch panel 40. When the process of step 2113 ends, the control unit 60 advances the process to step 2107 already described.

[0067] The control unit 60 judges whether or not to end the process (step 2107). If the control unit 60 judges not to end the process (No in step 2107), the process returns to step 2102 already described, and the process continues. If the control unit 60 judges to end the process (Yes in step 2107), the process proceeds to step 2108.

[0068] The control unit 60 ends the display of the image 400 (step 2108). For example, the control unit 60 ends the display of the image by controlling the touch panel 40 to end the display of the image being displayed by the touch panel 40. When the process of step 2106 ends, the control unit 60 ends the process procedure shown in FIG.

[0069] As described above, when the line 430 is the division line 202 or the processing groove formed by the processing unit 20 in the image 400 displayed on the touch panel 40, the processing device 1 can register the line 430 as an imaging route for moving the imaging unit 30 that images the workpiece 200 relative to the holding table 10. As a result, the processing device 1 can easily register any line 430 in the image 400 as an imaging route by simply having the operator operate the touch panel 40 so as to trace the vicinity of the contour of the division line 202 or the processing groove shown in the image 400, even if the line traced by the operator is blurred, because the line is corrected to the line 430 along the division line 202 or the processing groove. As a result, when the processing device 1 wants to image multiple areas, the operator does not need to select and register the division line 202 or the processing groove of the displayed image 400 multiple times to change the imaging area, and operability can be improved.

[0070] In the above embodiment, the processing device 1 detects and registers one line 430 located from the contact line 500 to the inside of the allowable area 600, but the present invention is not limited to this. For example, the processing device 1 may be configured to register multiple lines 430 when multiple boundary lines or the like exist from the contact line 500 to the inside of the allowable area 600.

[0071] [Other embodiments] The processing device 1 according to the present invention is not limited to the above embodiment, and can be modified in various ways without departing from the gist of the present invention. For example, the processing device 1 may be a grinding device other than a cutting device, or a laser processing device.

[0072] Moreover, each component of the processing device 1 described in the above embodiment is functionally conceptual, and does not necessarily have to be physically configured as illustrated. In other words, the specific form of distribution and integration of the processing device 1 is not limited to that illustrated, and all or a part of it can be functionally or physically distributed and integrated in any unit according to various loads, usage conditions, etc. For example, in the processing device 1, the detection unit 61 and the registration unit 62 may be functionally integrated or combined. [Explanation of symbols]

[0073] 1 Processing equipment 10 Holding table 11 Holding surface 20 Processing Unit 30 Imaging unit 40 Touch Panel 50 Mobile Units 60 Control Unit 61 Detection unit 62 Registration Department 63 Storage section 400 images 430 line 500 Contact Line 600 Tolerance Area

Claims

1. a holding table having a holding surface for holding a workpiece on whose surface a plurality of devices are formed, the devices being partitioned by a plurality of planned division lines; a processing unit for processing a workpiece held on a holding table; an imaging unit for imaging the workpiece held on the holding table; a moving unit that moves the holding table relatively to the processing unit and the imaging unit in a direction horizontal to the holding surface; A touch panel for displaying the captured image; A control unit; A processing apparatus comprising: The control unit Detecting a contour line located within a certain distance from the contact line traced on the image displayed on the touch panel from the image; The detected contour line is registered. Processing equipment.

2. the contour line is a contour of a pattern constituting the device in an image displayed on the touch panel; The control unit 2. The processing apparatus according to claim 1, wherein the pattern corresponding to the detected contour line is registered as a key pattern serving as a mark for detecting the planned division line.

3. the contour line is the division line or the machining groove formed by the machining unit in the image displayed on the touch panel; The control unit 2. The processing apparatus according to claim 1, wherein the contour line is registered as an image capturing route along which the image capturing unit, which captures an image of the workpiece, is moved relatively to the holding table.

Images