Compound and method for producing same, acid generator, composition, resist film, underlayer film, pattern forming method, and optical article

Abstract

Provided is a compound that exhibits high sensitivity, high resolution, and a high degree of flatness. This compound is represented by formula (P-0). (In formula (P-0), Ar represents a moiety having a C6-60 aryl group, each ORTS independently represents a hydroxy group or a group having a specific charge site, and n1 is an integer of 1-20. At least one ORTS is a group having a specific charge site.)

Description

[Technical field]

[0001] The present invention relates to a compound and a method for producing the same, an acid generator, a composition, a resist film, an underlayer film, a pattern forming method, and an optical article. [Background technology]

[0002] In the manufacture of semiconductor devices, microfabrication is carried out by lithography using photoresist materials. In recent years, however, with the increasing integration and speed of LSIs (large-scale integrated circuits), there is a demand for further miniaturization using pattern rules.

[0003] Conventional resist materials are polymeric resist materials capable of forming amorphous thin films. Examples of polymeric resist materials include polymethyl methacrylate, polyhydroxystyrene having a dissociative reactive group, and polyalkyl methacrylate. A thin resist film is prepared by applying a solution of such a polymeric resist material onto a substrate, and then irradiated with ultraviolet light, far ultraviolet light, electron beams, extreme ultraviolet light (hereinafter referred to as "EUV"), X-rays, or the like to form a line pattern of about 45 to 100 nm (see, for example, Non-Patent Document 1).

[0004] However, polymer resist materials have a large molecular weight of about 10,000 to 100,000, and a wide molecular weight distribution. Therefore, in lithography using polymer resist materials, roughness occurs on the surface of fine patterns, making it difficult to control the pattern dimensions and reducing yields. Therefore, there is a limit to the miniaturization of patterns in lithography using conventional polymer resist materials. In order to produce finer patterns, various low molecular weight resist materials have been proposed.

[0005] For example, an alkali-developable negative-tone radiation-sensitive composition using a low-molecular-weight polynuclear polyphenol compound as a main component has been proposed (see, for example, Patent Documents 1 and 2). In addition, an alkali-developable negative-tone radiation-sensitive composition using a low-molecular-weight cyclic polyphenol compound as a main component has also been proposed as a candidate for a low-molecular-weight resist material having high heat resistance (see, for example, Patent Document 3 and Non-Patent Document 2). Furthermore, it is known that, as a base compound for a resist material, a polyphenol compound can impart high heat resistance despite its low molecular weight, and is useful for improving the resolution and roughness of a resist pattern (see, for example, Non-Patent Document 3).

[0006] In addition, the reaction mechanism of electron beam or extreme ultraviolet (EUV) lithography is different from that of normal photolithography. Furthermore, in electron beam or EUV lithography, the goal is to form fine patterns of several tens of nm. As the resist pattern dimensions become smaller, a resist material with high sensitivity to the exposure light source is required. In particular, in EUV lithography, it is necessary to increase the sensitivity of the resist composition in terms of throughput.

[0007] As resist materials that improve these problems, inorganic resist materials containing, for example, titanium, hafnium, or zirconium have been proposed (see, for example, Patent Documents 4 and 5). [Prior art documents] [Patent documents]

[0008] [Patent Document 1] JP 2005-326838 A [Patent Document 2] JP 2008-145539 A [Patent Document 3] JP 2009-173623 A [Patent Document 4] JP 2015-75500 A [Patent Document 5] JP 2015-108781 A [Non-patent literature]

[0009] [Non-Patent Document 1] Shinji Okazaki and 8 others, "Lithography Technology: 40 Years," S&T Publishing [Non-Patent Document 2] T.Nakayama,M.Nomura,K.Haga,M.Ueda:Bull.Chem.Soc.Jpn.,71,2979(1998) [Non-Patent Document 3] Shinji Okazaki and 22 others, "New Developments in Photoresist Material Development," CMC Publishing Co., Ltd., September 2009, pp. 211-259 Summary of the Invention [Problem to be solved by the invention]

[0010] However, inorganic resist materials have low sensitivity and short working life, and there is a demand for higher resolution.

[0011] The present invention aims to provide a compound having high sensitivity, high resolution, and high flatness, a method for producing the same, an acid generator, a composition containing the compound or the acid generator, a resist film, an underlayer film, an optical article, and a pattern forming method using the compound or the acid generator. [Means for solving the problem]

[0012] As a result of intensive investigations aimed at solving the above problems, the present inventors have found that a specific compound or acid generator can solve the above problems, and have completed the present invention.

[0013] [1] A compound represented by the following formula (P-0).

[0014] [ka]

[0015] In formula (P-0), Ar is a group having an aryl group having 6 to 60 carbon atoms, and OR TS are each independently a hydroxyl group, a group represented by the following formula (TS-0), or a group represented by the following formula (TS-1). 1 is an integer between 1 and 20. However, OR TS At least one of the above is a group represented by the following formula (TS-0) or a group represented by the following formula (TS-1).

[0016] [ka]

[0017] (In formula (TS-0), R 1 is a single bond or a divalent group having 1 to 30 carbon atoms which may have a substituent, R 2 is an optionally substituted alkyl group having 1 to 10 carbon atoms or an optionally substituted aryl group having 6 to 10 carbon atoms, R 3 represents an optionally substituted alkyl group having 1 to 10 carbon atoms or an optionally substituted aryl group having 6 to 10 carbon atoms, An - is an anion containing fluorine or iodine.

[0018] [ka]

[0019] (In formula (TS-1), R 1 , R 3 and An - is synonymous with formula (TS-0).

[0020] [2] In the formula (TS-0) and the formula (TS-1), R 3 is an alkyl group having 1 to 10 carbon atoms which may have a substituent, An - is R 4 SO 3 - (R 4is a monovalent group containing fluorine or iodine and having 1 to 9 carbon atoms which may have a substituent.

[0021] [3] In the formula (TS-0) and the formula (TS-1), R 1 is a divalent group having 2 to 6 carbon atoms which may have a substituent.

[0022] [4] In the formula (TS-0), R 2 is a methyl group or an ethyl group.

[0023] [5] In the formula (TS-0), R 2 is a methyl group.

[0024] [6] In the formula (TS-0) and the formula (TS-1), R 3 is a methyl group, and An - CF 3 SO 3 - The compound according to any one of [1] to [5],

[0025] [7] The compound according to any one of [1] to [6], which is a compound represented by the following formula (P-0A):

[0026] [ka]

[0027] In formula (P-0A), each X is independently an oxygen atom, a sulfur atom, or a non-bridged group; 4 is a single bond or a 2n-valent group having 1 to 30 carbon atoms which may have a substituent, R 5 and R 6are each independently a halogen atom, a linear alkyl group having 1 to 30 carbon atoms which may have a substituent, a branched alkyl group having 3 to 30 carbon atoms which may have a substituent, a cyclic alkyl group having 3 to 30 carbon atoms which may have a substituent, an aryl group having 6 to 30 carbon atoms which may have a substituent, an alkenyl group having 2 to 30 carbon atoms which may have a substituent, an alkynyl group having 2 to 30 carbon atoms which may have a substituent, an alkoxy group having 1 to 30 carbon atoms which may have a substituent, a cyano group, a nitro group, an amino group, a carboxylic acid group, a thiol group, a hydroxyl group, a group represented by the formula (TS-0) or a group represented by the formula (TS-1), and the alkyl group, the aryl group, the alkenyl group, the alkynyl group and the alkoxy group may contain an ether bond, a ketone bond or an ester bond. 1 and m 2 are each independently an integer of 0 to 7, 1 and p 2 Each n is independently 0 or 1; 2 is an integer from 1 to 4. 1 and m 2 At least one of is an integer of 1 to 7, and formula (P-0A) is R 5 or R 6 As the formula (TS-0) or the formula (TS-1),

[0028] [8] The compound according to any one of [1] to [6], which is a compound represented by the following formula (P-0B):

[0029] [ka]

[0030] (In formula (P-0B), R 7 is a 2n-valent group having 1 to 30 carbon atoms, R 8 ~R 11are each independently a halogen atom, a linear alkyl group having 1 to 10 carbon atoms which may have a substituent, a branched alkyl group having 3 to 30 carbon atoms which may have a substituent, a cyclic alkyl group having 3 to 30 carbon atoms which may have a substituent, an aryl group having 6 to 30 carbon atoms which may have a substituent, an alkenyl group having 2 to 30 carbon atoms which may have a substituent, an alkynyl group having 2 to 30 carbon atoms which may have a substituent, an alkoxy group having 1 to 30 carbon atoms which may have a substituent, a thiol group, a cyano group, a nitro group, an amino group, a carboxylic acid group, a hydroxyl group, a group represented by the formula (TS-0) or a group represented by the formula (TS-1), and the alkyl group, the aryl group, the alkenyl group, the alkynyl group and the alkoxy group may contain an ether bond, a ketone bond or an ester bond. 3 and m 4 are each independently an integer of 0 to 8, 5 and m 6 are each independently an integer of 0 to 9, 3 ~p 6 are each independently an integer of 0 to 2, 3 is an integer from 1 to 4. 3 , m 4 , m 5 and m 6 At least one of is an integer of 1 or more, and the formula (P-0B) is R 8 , R 9 , R 10 or R 11 As the formula (TS-0) or the formula (TS-1),

[0031] [9] The compound according to any one of [1] to [6], which is a compound represented by the following formula (P-0C):

[0032] [ka]

[0033] (In formula (P-0C), L 1 ~L 4each independently represents a single bond, a linear alkylene group having 1 to 20 carbon atoms which may have a substituent, a branched alkylene group having 3 to 20 carbon atoms which may have a substituent, a cycloalkylene group having 3 to 20 carbon atoms which may have a substituent, an arylene group having 6 to 24 carbon atoms which may have a substituent, -O-, -OC(=O)-, -OC(=O)O-, -N(R 20 )-C(=O)-, -N(R 20 )-C(=O)O-, -S-, -SO-, or -SO 2 - and R 20 R is a hydrogen atom or an alkyl group having 1 to 10 carbon atoms which may have a substituent. 16 ~R 19 are each independently an alkyl group having 1 to 20 carbon atoms which may have a substituent, a cycloalkyl group having 3 to 20 carbon atoms which may have a substituent, an aryl group having 6 to 20 carbon atoms which may have a substituent, an alkoxy group having 1 to 20 carbon atoms which may have a substituent, a group represented by the formula (TS-0) above, a group represented by the formula (TS-1) above, a cyano group, a nitro group, a hydroxyl group, a heterocyclic group, a halogen atom, a carboxyl group, an alkylsilyl group having 1 to 20 carbon atoms; a substituted methyl group having 2 to 20 carbon atoms, a 1-substituted ethyl group having 3 to 20 carbon atoms, a 1-substituted n-propyl group having 4 to 20 carbon atoms, a 1-branched alkyl group having 3 to 20 carbon atoms, a silyl group having 1 to 20 carbon atoms, an acyl group having 2 to 20 carbon atoms, a 1-substituted alkoxyalkyl group having 2 to 20 carbon atoms, a cyclic ether group having 2 to 20 carbon atoms, an alkoxycarbonyl group or an alkoxycarbonylalkyl group having 2 to 20 carbon atoms, each of which has the property of being dissociated by an acid; or a hydrogen atom. 12 ~R 15 each independently represents an alkyl group having 2 to 20 carbon atoms, a group represented by the formula (TS-0), a group represented by the formula (TS-1), or a group represented by the following formula (P-0C-1):

[0034] [ka]

[0035] R is a group represented by the formula: 21are each independently an alkyl group having 1 to 20 carbon atoms which may have a substituent, a cycloalkyl group having 3 to 20 carbon atoms which may have a substituent, an aryl group having 6 to 20 carbon atoms which may have a substituent, an alkoxy group having 1 to 20 carbon atoms which may have a substituent, a cyano group, a nitro group, a heterocyclic group, a halogen atom, a carboxyl group, an alkylsilyl group having 1 to 20 carbon atoms; a substituted methyl group having 2 to 20 carbon atoms, a 1-substituted ethyl group having 3 to 20 carbon atoms, a 1-substituted n-propyl group having 4 to 20 carbon atoms, a 1-branched alkyl group having 3 to 20 carbon atoms, a silyl group having 1 to 20 carbon atoms, an acyl group having 2 to 20 carbon atoms, a 1-substituted alkoxyalkyl group having 2 to 20 carbon atoms, a cyclic ether group having 2 to 20 carbon atoms, an alkoxycarbonyl group having 2 to 20 carbon atoms, or an alkoxycarbonylalkyl group having 2 to 20 carbon atoms, all of which are capable of being dissociated by an acid. 12 ~R 19 At least one of the groups represented by formula (TS-0) or formula (TS-1) is a group represented by formula (TS-1). 7 ~m 10 are each independently an integer of 1 to 4, 7 is an integer between 0 and 5.)

[0036]

[10] The compound according to any one of [1] to [6], which is a compound represented by the following formula (P-1):

[0037] [ka]

[0038] (In formula (P-1), OR TS has the same meaning as formula (P-0) above.

[0039]

[11] A composition comprising a compound according to any one of [1] to

[10] .

[0040]

[12] The composition according to

[11] , further comprising a solvent.

[0041]

[13] The composition according to

[11] or

[12] , further comprising an acid generator.

[0042]

[14] The composition according to any one of

[11] to

[13] , further comprising an acid crosslinking agent.

[0043]

[15] A resist film formed from the composition according to any one of

[11] to

[14] .

[0044]

[16] A film formation step of forming a film on a substrate using the composition according to any one of

[11] to

[14] ; an exposure step of exposing the film to light; a developing step for developing the film exposed in the exposure step to form a pattern; A pattern forming method comprising the steps of:

[0045]

[17] A method for producing the compound according to any one of [1] to

[10] , comprising the steps of: A step of condensing a compound represented by the following formula (P-0') with a compound represented by the following formula (TS-0') or a compound represented by the following formula (TS-1') to obtain a condensate; reacting the condensate with a salt having an anion containing fluorine or iodine, and with an alkylating agent; The method includes:

[0046] [ka]

[0047] (In the formula (P-0′), Ar and n 1 has the same meaning as formula (P-0) above.

[0048] [ka]

[0049] In formula (TS-0′), X is a halogen atom, and R 1 and R 2 is defined as the above formula (TS-0).

[0050] [ka]

[0051] In formula (TS-1′), X is a halogen atom, and R 1 has the same meaning as in formula (TS-1) above.

[0052]

[18] An acid generator comprising the compound according to any one of [1] to

[10] .

[0053]

[19] A composition comprising the acid generator according to

[18] .

[0054]

[20] The composition according to

[19] , further comprising a solvent.

[0055]

[21] The composition according to

[19] or

[20] , further comprising an acid crosslinking agent.

[0056]

[22] The composition according to any one of

[19] to

[21] , which is a composition for forming an underlayer film for lithography.

[0057]

[23] The composition according to

[22] , further comprising a silicon-containing compound.

[0058]

[24] An underlayer film formed from the composition according to

[22] or

[23] .

[0059]

[25] A step of forming a resist underlayer film using the composition according to

[22] or

[23] ; forming at least one photoresist layer on the resist underlayer film; irradiating predetermined areas of the photoresist layer with radiation and developing; A pattern forming method comprising the steps of:

[0060]

[26] The composition according to any one of

[19] to

[21] , which is a composition for forming an optical article.

[0061]

[27] An optical article formed from the composition according to

[26] . Effect of the Invention

[0062] According to the present invention, it is possible to provide a compound having high sensitivity, high resolution, and high flatness, a method for producing the same, an acid generator, a composition containing the compound or the acid generator, a resist film, an underlayer film, an optical article, and a pattern formation method using the compound or the acid generator. [Brief description of the drawings]

[0063] [Figure 1] 1 is a 1H-NMR spectrum of BEPMS in Example 1. [Diagram 2] 1 is a 1H-NMR spectrum of MTP-BEPMS in Example 1. [Diagram 3] 1 is a 1H-NMR spectrum of the MTP-BEPMS ionic compound in Example 1. [Figure 4] 1H-NMR spectrum of BHPMS in Example 8. [Diagram 5] 1H-NMR spectrum of MTP-BHPMS in Example 8. [Figure 6] 1H-NMR spectrum of the MTP-BHPMS ionic compound in Example 8. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0064] Hereinafter, an embodiment of the present invention will be described (hereinafter, may be referred to as "the present embodiment"). Note that the present embodiment is an example for explaining the present invention, and the present invention is not limited to the present embodiment.

[0065] [Compound] The compound according to this embodiment is represented by the following formula (P-0).

[0066] [ka]

[0067] In formula (P-0), Ar is a group having an aryl group having 6 to 60 carbon atoms, and OR TS are each independently a hydroxyl group, a group represented by the following formula (TS-0), or a group represented by the following formula (TS-1). 1 is an integer between 1 and 20. However, OR TS At least one of the above is a group represented by the following formula (TS-0) or a group represented by the following formula (TS-1).

[0068] [ka]

[0069] (In formula (TS-0), R 1 is a single bond or a divalent group having 1 to 30 carbon atoms which may have a substituent, R 2 is an optionally substituted alkyl group having 1 to 10 carbon atoms or an optionally substituted aryl group having 6 to 10 carbon atoms, R 3 represents an optionally substituted alkyl group having 1 to 10 carbon atoms or an optionally substituted aryl group having 6 to 10 carbon atoms, An - is an anion containing fluorine or iodine.

[0070] [ka]

[0071] (In formula (TS-1), R 1 , R 3 and An - is synonymous with formula (TS-0).

[0072] The chemical structure of the compound according to this embodiment is 1This can be confirmed by H-NMR measurement and IR measurement. Since the compound has an ionic moiety having a specific structure at the end, when used as a resist material, etc., it shows high sensitivity, high resolution, and high flatness. Since the molecules of the compound according to this embodiment have a moderate diffusion speed, it shows high resolution while maintaining high sensitivity. In addition, since it has a moderate molecular weight, it is difficult to volatilize, and since the film loss during curing is relatively small, it shows high flatness.

[0073] In this specification, unless otherwise defined, "substitution" means that one or more hydrogen atoms in a functional group are substituted with a substituent. The "substituent" is not particularly limited, but examples thereof include a halogen atom, a hydroxyl group, a cyano group, a nitro group, an amino group, a thiol group, a heterocyclic group, a linear aliphatic hydrocarbon group having 1 to 20 carbon atoms, a branched aliphatic hydrocarbon group having 3 to 20 carbon atoms, a cyclic aliphatic hydrocarbon group having 3 to 20 carbon atoms, an aryl group having 6 to 20 carbon atoms, an alkoxyl group having 1 to 20 carbon atoms, an amino group having 0 to 20 carbon atoms, an alkenyl group having 2 to 20 carbon atoms, an alkynyl group having 2 to 20 carbon atoms, an acyl group having 1 to 20 carbon atoms, an alkoxycarbonyl group having 2 to 20 carbon atoms, an alkyloxy group having 1 to 20 carbon atoms, an aryloxy group having 7 to 30 carbon atoms, or an alkylsilyl group having 1 to 20 carbon atoms.

[0074] In the formula (P-0), Ar is a group having an aryl group having 6 to 60 carbon atoms. The carbon number of Ar is preferably 5 to 40. Examples of Ar include phenyl, naphthyl, anthracyl, biphenyl, fluorene, and groups containing these. In the formula (P-0), OR TS are each independently a hydroxyl group, a group represented by the formula (TS-0) or a group represented by the formula (TS-1). 1 is an integer between 1 and 20, OR TS At least one of the formulas (TS-0) and (TS-1) is a group represented by the formula (TS-0). That is, the formula (P-0) contains at least one of the group represented by the formula (TS-0) and (TS-1). 1 is preferably 1 to 4.

[0075] In the formula (TS-0), R 1 is a single bond or a divalent group having 1 to 30 carbon atoms which may have a substituent, and is preferably a divalent group having 2 to 6 carbon atoms which may have a substituent. Examples of the divalent group having 2 to 6 carbon atoms include an alkyleneoxy group having 2 to 6 carbon atoms, such as an ethyleneoxy group or a propyleneoxy group, and a phenylene group. In the formula (TS-0), R 2 is an alkyl group having 1 to 10 carbon atoms which may have a substituent, or an aryl group having 6 to 10 carbon atoms which may have a substituent. Examples of the alkyl group having 1 to 10 carbon atoms include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a t-butyl group, a decyl group, and a cyclohexyl group. Examples of the aryl group having 6 to 10 carbon atoms include a phenyl group and a naphthyl group. Among these, R 2 As the alkyl group, a methyl group, an ethyl group, or a phenyl group is preferable, and a methyl group is more preferable.

[0076] In the formula (TS-0), R 3 is an alkyl group having 1 to 10 carbon atoms which may have a substituent or an aryl group having 6 to 10 carbon atoms which may have a substituent, and an alkyl group having 1 to 10 carbon atoms which may have a substituent is preferred. Examples of the alkyl group having 1 to 10 carbon atoms include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a t-butyl group, a decyl group, and a cyclohexyl group, and a methyl group is preferred. In the formula (TS-0), An - is an anion containing fluorine or iodine, and R 4 SO 3 - (R 4 is a monovalent group having 1 to 9 carbon atoms and containing fluorine or iodine; PF 6 - , SbF 6 - is preferred. 4 Examples of the aryl group include a trifluoromethyl group and a nonafluorobutyl group. - As for CF 3 SO 3 - is preferred.

[0077] In the formula (TS-1), R 1 , R 3 and An - has the same meaning as formula (TS-0), and is preferably the same as formula (TS-0).

[0078] As the compound represented by the formula (P-0), for example, a compound represented by the following formula (P-0A) is preferable.

[0079] [ka]

[0080] In formula (P-0A), each X is independently an oxygen atom, a sulfur atom, or a non-bridged group; 4 is a single bond or a 2n-valent group having 1 to 30 carbon atoms which may have a substituent, R 5 and R 6 are each independently a halogen atom, a linear alkyl group having 1 to 30 carbon atoms which may have a substituent, a branched alkyl group having 3 to 30 carbon atoms which may have a substituent, a cyclic alkyl group having 3 to 30 carbon atoms which may have a substituent, an aryl group having 6 to 30 carbon atoms which may have a substituent, an alkenyl group having 2 to 30 carbon atoms which may have a substituent, an alkynyl group having 2 to 30 carbon atoms which may have a substituent, an alkoxy group having 1 to 30 carbon atoms which may have a substituent, a cyano group, a nitro group, an amino group, a carboxylic acid group, a thiol group, a hydroxyl group, a group represented by the formula (TS-0) or a group represented by the formula (TS-1), and the alkyl group, the aryl group, the alkenyl group, the alkynyl group and the alkoxy group may contain an ether bond, a ketone bond or an ester bond. 1 and m 2 are each independently an integer of 0 to 7, 1 and p 2 are each independently 0 or 1, 2 is an integer from 1 to 4. 1 and m 2 At least one of is an integer of 1 to 7, and formula (P-0A) is R5 or R 6 As the formula (TS-0) or the formula (TS-1),

[0081] In the formula (P-0A), R 4 is a single bond or a 2n-valent group having 1 to 30 carbon atoms which may have a substituent. As the 2n-valent group having 1 to 30 carbon atoms, a 2n-valent group having 1 to 16 carbon atoms is preferable, and examples thereof include a methylene group, a phenylmethylene group, a naphthylmethylene group, a biphenylmethylene group, a cyclohexylphenylmethylene group, an anthrathylmethylene group, and a biphenylethylene group. 4 is R A -R B In this case, R A is a methine group, and the R B represents an aryl group having 5 to 29 carbon atoms which may have a substituent, in which case, 2 is 1.

[0082] In the formula (P-0A), R 5 and R 6are each independently a halogen atom, a linear alkyl group having 1 to 30 carbon atoms which may have a substituent, a branched alkyl group having 3 to 30 carbon atoms which may have a substituent, a cyclic alkyl group having 3 to 30 carbon atoms which may have a substituent, an aryl group having 6 to 30 carbon atoms which may have a substituent, an alkenyl group having 2 to 30 carbon atoms which may have a substituent, an alkynyl group having 2 to 30 carbon atoms which may have a substituent, an alkoxy group having 1 to 30 carbon atoms which may have a substituent, a cyano group, a nitro group, an amino group, a carboxylic acid group, a thiol group, a hydroxyl group, a group represented by the formula (TS-0), or a group represented by the formula (TS-1). The alkyl group, the aryl group, the alkenyl group, the alkynyl group, and the alkoxy group may contain an ether bond, a ketone bond, or an ester bond. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the linear alkyl group having 1 to 30 carbon atoms include a methyl group, an ethyl group, a propyl group, a butyl group, and a decyl group. Examples of branched alkyl groups having 3 to 30 carbon atoms include isopropyl, isobutyl, and t-butyl. Examples of cyclic alkyl groups having 3 to 30 carbon atoms include cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cyclodexyl, and nonahydronaphthyl. Examples of aryl groups having 6 to 30 carbon atoms include phenyl and naphthyl. Examples of alkenyl groups having 2 to 30 carbon atoms include vinyl and allyl. Examples of alkoxy groups having 1 to 30 carbon atoms include methoxy, ethoxy, propoxy, butoxy, and triacontyloxy.

[0083] In the formula (P-0A), m 1 and m 2 are each independently an integer of 0 to 7, and preferably an integer of 1 to 7. 1 and m 2 At least one of is an integer of 1 to 7, and formula (P-0A) is R 5 or R 6 p contains at least one group represented by formula (TS-0) or one group represented by formula (TS-1). 1 and p2 is each independently 0 or 1. n 2 is an integer from 1 to 4, preferably an integer from 1 to 2.

[0084] Examples of the compound represented by the formula (P-0A) include compounds in which the hydroxyl group (-OH) of the compounds disclosed in International Publication No. 2013 / 024778 is replaced with a group represented by -OR TS Specific examples of the compound include the following compounds. Note that the compound represented by the formula (P-0A) is not limited to these specific compounds.

[0085]

Chemical formula

[0086]

Chemical formula

[0087]

Chemical formula

[0088]

Chemical formula

[0089]

Chemical formula

[0090] In the formula, R Ais a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, a hydroxyl group, a cyano group, a nitro group, an amino group, a thiol group, a heterocyclic group, a linear aliphatic hydrocarbon group having 1 to 20 carbon atoms, a branched aliphatic hydrocarbon group having 3 to 20 carbon atoms, a cyclic aliphatic hydrocarbon group having 3 to 20 carbon atoms, an aryl group having 6 to 20 carbon atoms, an alkoxyl group having 1 to 20 carbon atoms, an amino group having 0 to 20 carbon atoms, an alkenyl group having 2 to 20 carbon atoms, an alkynyl group having 2 to 20 carbon atoms, an acyl group having 1 to 20 carbon atoms, an alkoxycarbonyl group having 2 to 20 carbon atoms, an alkyloxy group having 1 to 20 carbon atoms, an aryloyloxy group having 7 to 30 carbon atoms, or an alkylsilyl group having 1 to 20 carbon atoms; OR TS has the same meaning as the above formula (P-0). Examples of the linear aliphatic hydrocarbon group having 1 to 20 carbon atoms include a methyl group, an ethyl group, a propyl group, a butyl group, an octyl group, a nonyl group, a decyl group, and a dodecyl group.

[0091] As the compound represented by the formula (P-0), for example, a compound represented by the following formula (P-0B) is preferable.

[0092] [ka]

[0093] (In formula (P-0B), R 7 is a 2n-valent group having 1 to 30 carbon atoms, R 8 ~R 11are each independently a halogen atom, a linear alkyl group having 1 to 10 carbon atoms which may have a substituent, a branched alkyl group having 3 to 30 carbon atoms which may have a substituent, a cyclic alkyl group having 3 to 30 carbon atoms which may have a substituent, an aryl group having 6 to 30 carbon atoms which may have a substituent, an alkenyl group having 2 to 30 carbon atoms which may have a substituent, an alkynyl group having 2 to 30 carbon atoms which may have a substituent, an alkoxy group having 1 to 30 carbon atoms which may have a substituent, a thiol group, a cyano group, a nitro group, an amino group, a carboxylic acid group, a hydroxyl group, a group represented by the formula (TS-0) or a group represented by the formula (TS-1), and the alkyl group, the aryl group, the alkenyl group, the alkynyl group and the alkoxy group may contain an ether bond, a ketone bond or an ester bond. 3 and m 4 are each independently an integer of 0 to 8, 5 and m 6 are each independently an integer of 0 to 9, 3 ~p 6 are each independently an integer of 0 to 2, 3 is an integer from 1 to 4. 3 , m 4 , m 5 and m 6 At least one of is an integer of 1 or more, and the formula (P-0B) is R 8 , R 9 , R 10 or R 11 As the formula (TS-0) or the formula (TS-1),

[0094] In the formula (P-0B), R 7 is a 2n-valent group having 1 to 30 carbon atoms, preferably a 2n-valent group having 1 to 16 carbon atoms, such as a methylene group, a phenylmethylene group, a naphthylmethylene group, a biphenylmethylene group, a cyclohexylphenylmethylene group, an anthrathylmethylene group, a biphenylethylene group, etc. 7 is R A -R B In this case, R A is a methine group, and the RB represents an aryl group having 5 to 29 carbon atoms which may have a substituent, in which case, 2 is 1.

[0095] In the formula (P-0B), R 8 ~R 11 are each independently a halogen atom, a linear alkyl group having 1 to 10 carbon atoms which may have a substituent, a branched alkyl group having 3 to 30 carbon atoms which may have a substituent, a cyclic alkyl group having 3 to 30 carbon atoms which may have a substituent, an aryl group having 6 to 30 carbon atoms which may have a substituent, an alkenyl group having 2 to 30 carbon atoms which may have a substituent, an alkynyl group having 2 to 30 carbon atoms which may have a substituent, an alkoxy group having 1 to 30 carbon atoms which may have a substituent, a thiol group, a cyano group, a nitro group, an amino group, a carboxylic acid group, a hydroxyl group, a group represented by the formula (TS-0), or a group represented by the formula (TS-1). The alkyl group, the aryl group, the alkenyl group, the alkynyl group, and the alkoxy group may contain an ether bond, a ketone bond, or an ester bond. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the linear alkyl group having 1 to 10 carbon atoms include a methyl group, an ethyl group, a propyl group, a butyl group, and a decyl group. Examples of branched alkyl groups having 3 to 30 carbon atoms include isopropyl, isobutyl, and t-butyl. Examples of cyclic alkyl groups having 3 to 30 carbon atoms include cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cyclodexyl, and nonahydronaphthyl. Examples of aryl groups having 6 to 30 carbon atoms include phenyl and naphthyl. Examples of alkenyl groups having 2 to 30 carbon atoms include vinyl and allyl. Examples of alkoxy groups having 1 to 30 carbon atoms include methoxy, ethoxy, propoxy, butoxy, and triacontyloxy.

[0096] In the formula (P-0B), m 3 and m 4 are each independently an integer of 0 to 8, and preferably an integer of 0 to 2.5 and m 6 are each independently an integer of 0 to 9, and preferably an integer of 0 to 2. 3 , m 4 , m 5 and m 6 At least one of is an integer of 1 or more, and the formula (P-0B) is R 8 , R 9 , R 10 or R 11 p contains at least one group represented by formula (TS-0) or one group represented by formula (TS-1). 3 ~p 6 are each independently an integer of 0 to 2, and preferably an integer of 0 to 1. 3 is an integer of 1 to 4, and preferably an integer of 1 or 2.

[0097] The compound represented by the formula (P-0B) is, for example, a compound disclosed in WO 2015 / 137486, in which the hydroxyl group (-OH) is -OR TS Specific examples of the compounds represented by the formula (P-0B) include the following compounds: Note that the compounds represented by the formula (P-0B) are not limited to these specific compounds.

[0098] [ka]

[0099] [ka]

[0100] [ka]

[0101] [ka]

[0102] [ka]

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[0111] Where, R Ais a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, a hydroxyl group, a cyano group, a nitro group, an amino group, a thiol group, a heterocyclic group, a linear aliphatic hydrocarbon group having 1 to 20 carbon atoms, a branched aliphatic hydrocarbon group having 3 to 20 carbon atoms, a cyclic aliphatic hydrocarbon group having 3 to 20 carbon atoms, an aryl group having 6 to 20 carbon atoms, an alkoxyl group having 1 to 20 carbon atoms, an amino group having 0 to 20 carbon atoms, an alkenyl group having 2 to 20 carbon atoms, an alkynyl group having 2 to 20 carbon atoms, an acyl group having 1 to 20 carbon atoms, an alkoxycarbonyl group having 2 to 20 carbon atoms, an alkyloxy group having 1 to 20 carbon atoms, an aryloyloxy group having 7 to 30 carbon atoms, or an alkylsilyl group having 1 to 20 carbon atoms; OR TS has the same meaning as the above formula (P-0). Examples of the linear aliphatic hydrocarbon group having 1 to 20 carbon atoms include a methyl group, an ethyl group, a propyl group, a butyl group, an octyl group, a nonyl group, a decyl group, and a dodecyl group.

[0112] As the compound represented by the formula (P-0), for example, a compound represented by the following formula (P-0C) is preferable.

[0113] [ka]

[0114] (In formula (P-0C), L 1 ~L 4 each independently represents a single bond, a linear alkylene group having 1 to 20 carbon atoms which may have a substituent, a branched alkylene group having 3 to 20 carbon atoms which may have a substituent, a cycloalkylene group having 3 to 20 carbon atoms which may have a substituent, an arylene group having 6 to 24 carbon atoms which may have a substituent, -O-, -OC(=O)-, -OC(=O)O-, -N(R 20 )-C(=O)-, -N(R 20 )-C(=O)O-, -S-, -SO-, or -SO 2 - and R 20 R is a hydrogen atom or an alkyl group having 1 to 10 carbon atoms which may have a substituent. 16 ~R 19are each independently an alkyl group having 1 to 20 carbon atoms which may have a substituent, a cycloalkyl group having 3 to 20 carbon atoms which may have a substituent, an aryl group having 6 to 20 carbon atoms which may have a substituent, an alkoxy group having 1 to 20 carbon atoms which may have a substituent, a group represented by the formula (TS-0) above, a group represented by the formula (TS-1) above, a cyano group, a nitro group, a hydroxyl group, a heterocyclic group, a halogen atom, a carboxyl group, an alkylsilyl group having 1 to 20 carbon atoms; a substituted methyl group having 2 to 20 carbon atoms, a 1-substituted ethyl group having 3 to 20 carbon atoms, a 1-substituted n-propyl group having 4 to 20 carbon atoms, a 1-branched alkyl group having 3 to 20 carbon atoms, a silyl group having 1 to 20 carbon atoms, an acyl group having 2 to 20 carbon atoms, a 1-substituted alkoxyalkyl group having 2 to 20 carbon atoms, a cyclic ether group having 2 to 20 carbon atoms, an alkoxycarbonyl group or an alkoxycarbonylalkyl group having 2 to 20 carbon atoms, each of which has the property of being dissociated by an acid; or a hydrogen atom. 12 ~R 15 each independently represents an alkyl group having 2 to 20 carbon atoms, a group represented by the formula (TS-0), a group represented by the formula (TS-1), or a group represented by the following formula (P-0C-1):

[0115] [ka]

[0116] R is a group represented by the formula: 21are each independently an alkyl group having 1 to 20 carbon atoms which may have a substituent, a cycloalkyl group having 3 to 20 carbon atoms which may have a substituent, an aryl group having 6 to 20 carbon atoms which may have a substituent, an alkoxy group having 1 to 20 carbon atoms which may have a substituent, a cyano group, a nitro group, a heterocyclic group, a halogen atom, a carboxyl group, an alkylsilyl group having 1 to 20 carbon atoms; a substituted methyl group having 2 to 20 carbon atoms, a 1-substituted ethyl group having 3 to 20 carbon atoms, a 1-substituted n-propyl group having 4 to 20 carbon atoms, a 1-branched alkyl group having 3 to 20 carbon atoms, a silyl group having 1 to 20 carbon atoms, an acyl group having 2 to 20 carbon atoms, a 1-substituted alkoxyalkyl group having 2 to 20 carbon atoms, a cyclic ether group having 2 to 20 carbon atoms, an alkoxycarbonyl group or an alkoxycarbonylalkyl group having 2 to 20 carbon atoms, all of which are capable of being dissociated by an acid. 12 ~R 19 At least one of the groups represented by formula (TS-0) or formula (TS-1) is a group represented by formula (TS-1). 7 ~m 10 are each independently an integer of 1 to 4, 7 is an integer between 0 and 5.)

[0117] In the formula (P-0C), L 1 ~L 4 each independently represents a single bond, a linear alkylene group having 1 to 20 carbon atoms which may have a substituent, a branched alkylene group having 3 to 20 carbon atoms which may have a substituent, a cycloalkylene group having 3 to 20 carbon atoms which may have a substituent, an arylene group having 6 to 24 carbon atoms which may have a substituent, -O-, -OC(=O)-, -OC(=O)O-, -N(R 20 )-C(=O)-, -N(R 20 )-C(=O)O-, -S-, -SO-, or -SO 2-. As the linear alkylene group having 1 to 20 carbon atoms, a linear alkylene group having 1 to 10 carbon atoms is preferred, and examples thereof include a methylene group, an ethylene group, a propylene group, and a decylene group. As the branched alkylene group having 3 to 20 carbon atoms, a branched alkylene group having 1 to 16 carbon atoms is preferred, and examples thereof include an isopropylene group, an isobutylene group, a phenylmethylene group, a naphthylmethylene group, a biphenylmethylene group, a cyclohexylphenylmethylene group, an anthrathylmethylene group, and a biphenylethylene group. As the cycloalkylene group having 3 to 20 carbon atoms, a cycloalkylene group having 3 to 10 carbon atoms is preferred, and examples thereof include a cyclopropylene group, a cyclobutylene group, a cyclopentylene group, a cyclohexylene group, a cyclodexylene group, and a nonahydronaphthylene group. As the arylene group having 6 to 24 carbon atoms, for example, an arylene group having 6 to 12 carbon atoms is preferable, and examples thereof include a phenylene group, a naphthylene group, and a biphenylene group. 20 is a hydrogen atom or an optionally substituted alkyl group having 1 to 10 carbon atoms. Examples of the alkyl group having 1 to 10 carbon atoms include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, and a t-butyl group.

[0118] In the formula (P-0C), R 16 ~R 19are each independently an alkyl group having 1 to 20 carbon atoms which may have a substituent, a cycloalkyl group having 3 to 20 carbon atoms which may have a substituent, an aryl group having 6 to 20 carbon atoms which may have a substituent, an alkoxy group having 1 to 20 carbon atoms which may have a substituent, the group represented by the formula (TS-0) above, the group represented by the formula (TS-1) above, a cyano group, a nitro group, a hydroxyl group, a heterocyclic group, a halogen atom, a carboxyl group, an alkylsilyl group having 1 to 20 carbon atoms; a substituted methyl group having 2 to 20 carbon atoms, a 1-substituted ethyl group having 3 to 20 carbon atoms, a 1-substituted-n-propyl group having 4 to 20 carbon atoms, a 1-branched alkyl group having 3 to 20 carbon atoms, a silyl group having 1 to 20 carbon atoms, an acyl group having 2 to 20 carbon atoms, a 1-substituted alkoxyalkyl group having 2 to 20 carbon atoms, a cyclic ether group having 2 to 20 carbon atoms, an alkoxycarbonyl group or an alkoxycarbonylalkyl group having 2 to 20 carbon atoms which have the property of being dissociated by an acid; or a hydrogen atom. The alkyl group having 1 to 20 carbon atoms is preferably an alkyl group having 1 to 10 carbon atoms, and examples thereof include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, and a t-butyl group. The cycloalkyl group having 3 to 20 carbon atoms is preferably an cycloalkyl group having 1 to 10 carbon atoms, and examples thereof include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cyclodexylene group, and a nonahydronaphthylene group. The aryl group having 6 to 20 carbon atoms is preferably an aryl group having 6 to 10 carbon atoms, and examples thereof include a phenyl group, a naphthyl group, and a biphenyl group. The alkoxy group having 1 to 20 carbon atoms is preferably an alkoxy group having 1 to 10 carbon atoms, and examples thereof include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, and a decyl group. The heterocyclic group is preferably a pyrrole group, an imidazole group, and a carbazole group. The halogen atom is preferably a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. The alkylsilyl group having 1 to 20 carbon atoms is preferably an alkylsilyl group having 1 to 9 carbon atoms, and examples thereof include a trimethylsilyl group, a triethylsilyl group, a triisopropylsilyl group, and a tert-butyldimethylsilyl group.

[0119] The substituted methyl group having 2 to 20 carbon atoms and capable of dissociating with an acid is preferably a substituted methyl group having 4 to 18 carbon atoms, more preferably a substituted methyl group having 6 to 16 carbon atoms. Specific examples of the substituted methyl group include, but are not limited to, a methoxymethyl group, a methylthiomethyl group, an ethoxymethyl group, an n-propoxymethyl group, an isopropoxymethyl group, an n-butoxymethyl group, a t-butoxymethyl group, a 2-methylpropoxymethyl group, an ethylthiomethyl group, a methoxyethoxymethyl group, a phenyloxymethyl group, a 1-cyclopentyloxymethyl group, a 1-cyclohexyloxymethyl group, a benzylthiomethyl group, a phenacyl group, a 4-bromophenacyl group, a 4-methoxyphenacyl group, a piperonyl group, and a group of substituents represented by the following formula (1). In addition, R 2A Specific examples of R include, but are not limited to, a methyl group, an ethyl group, an isopropyl group, an n-propyl group, a t-butyl group, and an n-butyl group. 2A is an alkyl group having 1 to 4 carbon atoms.

[0120] [ka]

[0121] As the 1-substituted ethyl group having 3 to 20 carbon atoms and capable of dissociating with an acid, a 1-substituted ethyl group having 5 to 18 carbon atoms is preferred, and a substituted ethyl group having 7 to 16 carbon atoms is more preferred. Specific examples of the 1-substituted ethyl group include, but are not limited to, a 1-methoxyethyl group, a 1-methylthioethyl group, a 1,1-dimethoxyethyl group, a 1-ethoxyethyl group, a 1-ethylthioethyl group, a 1,1-diethoxyethyl group, a n-propoxyethyl group, a isopropoxyethyl group, a n-butoxyethyl group, a t-butoxyethyl group, a 2-methylpropoxyethyl group, a 1-phenoxyethyl group, a 1-phenylthioethyl group, a 1,1-diphenoxyethyl group, a 1-cyclopentyloxyethyl group, a 1-cyclohexyloxyethyl group, a 1-phenylethyl group, a 1,1-diphenylethyl group, and a group of substituents represented by the following formula (2). In the following formula (2), R 2Ahas the same meaning as formula (1) above.

[0122] [ka]

[0123] The 1-substituted n-propyl group having 4 to 20 carbon atoms and capable of being dissociated by an acid is preferably a 1-substituted n-propyl group having 6 to 18 carbon atoms, and more preferably a 1-substituted n-propyl group having 8 to 16 carbon atoms. Specific examples of the 1-substituted n-propyl group include, but are not limited to, a 1-methoxy-n-propyl group and a 1-ethoxy-n-propyl group.

[0124] The 1-branched alkyl group having 3 to 20 carbon atoms and capable of being dissociated by an acid is preferably a 1-branched alkyl group having 5 to 18 carbon atoms, more preferably a branched alkyl group having 7 to 16 carbon atoms. Specific examples of the 1-branched alkyl group include, but are not limited to, an isopropyl group, a sec-butyl group, a tert-butyl group, a 1,1-dimethylpropyl group, a 1-methylbutyl group, a 1,1-dimethylbutyl group, a 2-methyladamantyl group, and a 2-ethyladamantyl group.

[0125] The silyl group having 1 to 20 carbon atoms and capable of being dissociated by an acid is preferably a silyl group having 3 to 18 carbon atoms, and more preferably a silyl group having 5 to 16 carbon atoms. Specific examples of the silyl group include, but are not limited to, a trimethylsilyl group, an ethyldimethylsilyl group, a methyldiethylsilyl group, a triethylsilyl group, a tert-butyldimethylsilyl group, a tert-butyldiethylsilyl group, a tert-butyldiphenylsilyl group, a tri-tert-butylsilyl group, and a triphenylsilyl group.

[0126] The acyl group having 2 to 20 carbon atoms and capable of being dissociated by an acid is preferably an acyl group having 4 to 18 carbon atoms, and more preferably an acyl group having 6 to 16 carbon atoms. Specific examples of the acyl group include, but are not limited to, an acetyl group, a phenoxyacetyl group, a propionyl group, a butyryl group, a heptanoyl group, a hexanoyl group, a valeryl group, a pivaloyl group, an isovaleryl group, a lauryl group, an adamantylcarbonyl group, a benzoyl group, and a naphthoyl group.

[0127] The 1-substituted alkoxyalkyl group having 2 to 20 carbon atoms and capable of being dissociated by an acid is preferably a 1-substituted alkoxymethyl group having 2 to 20 carbon atoms, more preferably a 1-substituted alkoxymethyl group having 4 to 18 carbon atoms, and even more preferably a 1-substituted alkoxymethyl group having 6 to 16 carbon atoms. Specific examples of the 1-substituted alkoxymethyl group include, but are not limited to, a 1-cyclopentylmethoxymethyl group, a 1-cyclopentylethoxymethyl group, a 1-cyclohexylmethoxymethyl group, a 1-cyclohexylethoxymethyl group, a 1-cyclooctylmethoxymethyl group, and a 1-adamantylmethoxymethyl group.

[0128] The cyclic ether group having 2 to 20 carbon atoms and capable of being dissociated by an acid is preferably a cyclic ether group having 4 to 18 carbon atoms, and more preferably a cyclic ether group having 6 to 16 carbon atoms. Specific examples of the cyclic ether group include, but are not limited to, a tetrahydropyranyl group, a tetrahydrofuranyl group, a tetrahydrothiopyranyl group, a tetrahydrothiofuranyl group, a 4-methoxytetrahydropyranyl group, and a 4-methoxytetrahydrothiopyranyl group.

[0129] The alkoxycarbonyl group having 2 to 20 carbon atoms and capable of being dissociated by an acid is preferably an alkoxycarbonyl group having 4 to 18 carbon atoms, and more preferably an alkoxycarbonyl group having 6 to 16 carbon atoms. Specific examples of the alkoxycarbonyl group include, but are not limited to, a methoxycarbonyl group, an ethoxycarbonyl group, an n-propoxycarbonyl group, an isopropoxycarbonyl group, an n-butoxycarbonyl group, a tert-butoxycarbonyl group, and a group represented by the following formula (3) where n=0.

[0130] The alkoxycarbonylalkyl group having the property of being dissociated by an acid is preferably an alkoxycarbonylalkyl group having 3 to 20 carbon atoms, more preferably an alkoxycarbonylalkyl group having 4 to 18 carbon atoms, and even more preferably an alkoxycarbonylalkyl group having 6 to 16 carbon atoms. Specific examples of the alkoxycarbonylalkyl group include, but are not limited to, a methoxycarbonylmethyl group, an ethoxycarbonylmethyl group, an n-propoxycarbonylmethyl group, an isopropoxycarbonylmethyl group, an n-butoxycarbonylmethyl group, and a group represented by the following formula (3) where n=1 to 4.

[0131] [ka]

[0132] In the formula (3), R 3A represents a hydrogen atom or a linear or branched alkyl group having 1 to 4 carbon atoms, and n is an integer of 0 to 4.

[0133] In the formula (P-0C), R 12 ~R 15 are each independently an alkyl group having 2 to 20 carbon atoms, a group represented by the formula (TS-0), a group represented by the formula (TS-1), or a group represented by the formula (P-0C-1). The alkyl group having 2 to 20 carbon atoms is preferably an alkyl group having 2 to 10 carbon atoms, and examples thereof include an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a t-butyl group, and a decyl group.

[0134] In the above formula (P-0C-1), R 21 are each independently an alkyl group having 1 to 20 carbon atoms which may have a substituent, a cycloalkyl group having 3 to 20 carbon atoms which may have a substituent, an aryl group having 6 to 20 carbon atoms which may have a substituent, an alkoxy group having 1 to 20 carbon atoms which may have a substituent, a cyano group, a nitro group, a heterocyclic group, a halogen atom, a carboxyl group, an alkylsilyl group having 1 to 20 carbon atoms; a substituted methyl group having 2 to 20 carbon atoms, a 1-substituted ethyl group having 3 to 20 carbon atoms, a 1-substituted n-propyl group having 4 to 20 carbon atoms, a 1-branched alkyl group having 3 to 20 carbon atoms, a silyl group having 1 to 20 carbon atoms, an acyl group having 2 to 20 carbon atoms, a 1-substituted alkoxyalkyl group having 2 to 20 carbon atoms, a cyclic ether group having 2 to 20 carbon atoms, an alkoxycarbonyl group having 2 to 20 carbon atoms, or an alkoxycarbonylalkyl group having 2 to 20 carbon atoms, each of which has the property of being dissociated by an acid. 16 ~R 19 can be similar to:

[0135] In the formula (P-0C), R 12 ~R 19 At least one of the groups represented by the formula (TS-0) or the formula (TS-1) is a group represented by the formula (P-0C). 7 ~m 10 Each independently represents an integer of 1 to 4, and preferably an integer of 1 to 3. In the formula (P-0C-1), p 7 is an integer of 0 to 5, and preferably an integer of 0 to 3.

[0136] The compound represented by the formula (P-0C) is, for example, a compound disclosed in JP-A-2009-173623 and JP-A-2009-173625, in which the hydroxyl group (-OH) is -OR TS Specific examples of the compounds represented by the formula (P-0C) include the following compounds: Note that the compounds represented by the formula (P-0C) are not limited to these specific compounds.

[0137] [ka]

[0138] [ka]

[0139] In the formula, R A is a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, a hydroxyl group, a cyano group, a nitro group, an amino group, a thiol group, a heterocyclic group, a linear aliphatic hydrocarbon group having 1 to 20 carbon atoms, a branched aliphatic hydrocarbon group having 3 to 20 carbon atoms, a cyclic aliphatic hydrocarbon group having 3 to 20 carbon atoms, an aryl group having 6 to 20 carbon atoms, an alkoxyl group having 1 to 20 carbon atoms, an amino group having 0 to 20 carbon atoms, an alkenyl group having 2 to 20 carbon atoms, an alkynyl group having 2 to 20 carbon atoms, an acyl group having 1 to 20 carbon atoms, an alkoxycarbonyl group having 2 to 20 carbon atoms, an alkyloxy group having 1 to 20 carbon atoms, an aryloyloxy group having 7 to 30 carbon atoms, or an alkylsilyl group having 1 to 20 carbon atoms; OR TS has the same meaning as the above formula (P-0). Examples of the linear aliphatic hydrocarbon group having 1 to 20 carbon atoms include a methyl group, an ethyl group, a propyl group, a butyl group, an octyl group, a nonyl group, a decyl group, and a dodecyl group.

[0140] As the compound represented by the formula (P-0), for example, a compound represented by the following formula (P-1) is preferable.

[0141] [ka]

[0142] (In formula (P-1), OR TS has the same meaning as formula (P-0) above.

[0143] Examples of the compound represented by the formula (P-1) include the following compounds: However, the compound represented by the formula (P-1) is not limited to these specific compounds.

[0144] [ka]

[0145] [ka]

[0146] [Method of manufacturing the compound] The method for producing the compound according to this embodiment includes a step of condensing a compound represented by the following formula (P-0') with a compound represented by the following formula (TS-0') or a compound represented by the following formula (TS-1') to obtain a condensate (hereinafter also referred to as a condensation step), and a step of reacting the condensate with a salt having an anion containing fluorine or iodine, and an alkylating agent (hereinafter also referred to as an alkylation step).

[0147] In this specification, unless otherwise defined, "alkylation" refers to alkylation or arylation, "alkylating agent" refers to an alkylating agent or an arylating agent, and "alkylation process" refers to an alkylation process or an arylation process.

[0148] [ka]

[0149] (In the formula (P-0'), Ar and n 1 has the same meaning as formula (P-0) above.

[0150] [ka]

[0151] In formula (TS-0′), X is a halogen atom, and R 1 and R 2 is defined as the above formula (TS-0).

[0152] [ka]

[0153] In formula (TS-1′), X is a halogen atom, and R 1 has the same meaning as in formula (TS-1) above.

[0154] According to the above-mentioned method, the compound according to the present embodiment can be efficiently produced. Examples of the halogen atom in the above-mentioned formula (TS-0') and formula (TS-1') include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.

[0155] (condensation process) In this step, the compound represented by the formula (P-0') is condensed with the compound represented by the formula (TS-0') or the compound represented by the formula (TS-1') to obtain a condensate. The compound represented by the formula (TS-0') or the compound represented by the formula (TS-1') can be, for example, the XR 1 Compounds in which the XR group is a hydroxyl group and 1 -X. The condensation reaction between the compound represented by formula (P-0') and the compound represented by formula (TS-0') or the compound represented by formula (TS-1') can be carried out, for example, by a method of condensation reaction in the presence of a strong acid.

[0156] (Alkylation step) In this step, the condensate obtained in the condensation step is reacted with a salt having an anion containing fluorine or iodine, and an alkylating agent. + X ? The reaction can be carried out by, for example, reacting the compound with an acid represented by the following formula:

[0157] [First composition] The first composition according to the present embodiment includes the compound according to the present embodiment. The first composition according to the present embodiment may be, for example, a material for lithography or a material composition for lithography.

[0158] (Lithography materials) The lithography material according to the present embodiment contains the compound according to the present embodiment. The lithography material according to the present embodiment is a material that can be used in lithography technology, and is not particularly limited as long as it contains the compound according to the present embodiment, but can be used, for example, as a lithography material composition together with a solvent or the like, and can further be used for resist applications (i.e., resist compositions) and the like.

[0159] The lithography material according to this embodiment contains the compound according to this embodiment, and therefore has high sensitivity, high resolution, and high flatness. The lithography material according to this embodiment may be free of a solvent.

[0160] (Lithography material composition) The lithography material composition according to the present embodiment includes the lithography material according to the present embodiment and a solvent. The lithography material composition has high sensitivity, high resolution, and high flatness, and therefore can provide a good resist pattern shape. For example, a resist film can be formed from the lithography material composition.

[0161] <Physical properties of lithography material composition> The lithography material of this embodiment can be used for resist applications as described above, and an amorphous film can be formed by a known method such as spin coating. In addition, depending on the type of developer used, either a positive resist pattern or a negative resist pattern can be produced. Hereinafter, a case where a lithography material composition containing the lithography material of this embodiment is used for resist applications (as a resist composition) will be described.

[0162] In the case where the lithography material composition of this embodiment is a positive resist pattern, the dissolution rate of the amorphous film formed by spin-coating the lithography material composition of this embodiment in a developer at 23°C is preferably 5 Å / sec or less, more preferably 0.05 to 5 Å / sec, and even more preferably 0.0005 to 5 Å / sec. If the dissolution rate is 5 Å / sec or less, the resist can be insoluble in the developer. If the dissolution rate is 0.0005 Å / sec or more, the resolution may be improved. This is presumably because the contrast at the interface between the exposed portion that dissolves in the developer and the unexposed portion that does not dissolve in the developer increases due to the change in solubility before and after exposure of the compound according to this embodiment. In addition, there is an effect of reducing line edge roughness and reducing defects.

[0163] In the case where the lithography material composition of this embodiment is a negative resist pattern, the dissolution rate of the amorphous film formed by spin-coating the lithography material composition of this embodiment in a developer at 23°C is preferably 10 Å / sec or more. When the dissolution rate is 10 Å / sec or more, the film is easily soluble in the developer and is more suitable for resist. In addition, when the dissolution rate is 10 Å / sec or more, the resolution may be improved. This is presumably because the micro surface portion of the compound according to this embodiment dissolves, reducing line edge roughness. In addition, there is an effect of reducing defects. The dissolution rate can be determined by immersing the amorphous film in the developer for a predetermined time at 23°C, and measuring the film thickness before and after the immersion by a known method such as visual observation, ellipsometer, or QCM method.

[0164] When the lithography material composition of the present embodiment is a positive resist pattern, the dissolution rate of the exposed portion of the amorphous film formed by spin-coating the lithography material composition of the present embodiment with radiation such as KrF excimer laser, extreme ultraviolet ray, electron beam or X-ray at 23 °C in the developer is preferably 10 Å / sec or more. When the dissolution rate is 10 Å / sec or more, it is easily soluble in the developer and more suitable for the resist. Also, when it has a dissolution rate of 10 Å / sec or more, the resolution may be improved. This is presumably because the microscopic surface sites of the compound according to the present embodiment are dissolved, reducing the line edge roughness. There is also an effect of reducing defects.

[0165] When the lithography material composition of the present embodiment is a negative resist pattern, the dissolution rate of the exposed portion of the amorphous film formed by spin-coating the lithography material composition of the present embodiment with radiation such as KrF excimer laser, extreme ultraviolet ray, electron beam or X-ray at 23 °C in the developer is preferably 5 Å / sec or less, more preferably 0.05 - 5 Å / sec, and even more preferably 0.0005 - 5 Å / sec. When the dissolution rate is 5 Å / sec or less, a resist insoluble in the developer can be obtained. Also, when it has a dissolution rate of 0.0005 Å / sec or more, the resolution may be improved. This is presumably because the contrast at the interface between the unexposed portion dissolved in the developer and the exposed portion insoluble in the developer increases due to the change in solubility of the compound according to the present embodiment before and after exposure. There are also effects of reducing line edge roughness and defects.

[0166] <Other components of the lithography material composition> The lithography material composition of the present embodiment contains the compound according to the present embodiment as a solid component. The lithography material composition of the present embodiment further contains a solvent in addition to the compound according to the present embodiment.

[0167] The solvent used in the lithography material composition of the present embodiment is not particularly limited, and examples thereof include ethylene glycol monoalkyl ether acetates such as ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, ethylene glycol mono-n-propyl ether acetate, and ethylene glycol mono-n-butyl ether acetate; ethylene glycol monoalkyl ethers such as ethylene glycol monomethyl ether and ethylene glycol monoethyl ether; propylene glycol monoalkyl ether acetates such as propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate (PGMEA), propylene glycol mono-n-propyl ether acetate, and propylene glycol mono-n-butyl ether acetate; propylene glycol monoalkyl ethers such as propylene glycol monomethyl ether (PGME) and propylene glycol monoethyl ether; methyl lactate, ethyl lactate, n-propyl lactate, n-propyl lactate, and n-propyl lactate. Lactic acid esters such as butyl and n-amyl lactate; aliphatic carboxylic acid esters such as methyl acetate, ethyl acetate, n-propyl acetate, n-butyl acetate, n-amyl acetate, n-hexyl acetate, methyl propionate, and ethyl propionate; methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, methyl 3-methoxy-2-methylpropionate, 3-methoxybutyl acetate, 3-methyl-3-methoxybutyl acetate, 3-methoxy-3-methyl Examples of the solvent include other esters such as butyl propionate, butyl 3-methoxy-3-methylbutyrate, methyl acetoacetate, methyl pyruvate, and ethyl pyruvate; aromatic hydrocarbons such as toluene and xylene; ketones such as methyl ethyl ketone, 2-heptanone, 3-heptanone, 4-heptanone, cyclopentanone (CPN), and cyclohexanone (CHN); amides such as N,N-dimethylformamide, N-methylacetamide, N,N-dimethylacetamide, and N-methylpyrrolidone; and lactones such as γ-lactone. These solvents can be used alone or in combination.

[0168] The solvent used in the lithography material composition of the present embodiment is preferably a safe solvent, more preferably at least one selected from PGMEA, PGME, CHN, CPN, 2-heptanone, anisole, butyl acetate, ethyl propionate, and ethyl lactate, and even more preferably at least one selected from PGMEA, PGME, and CHN.

[0169] In the lithography material composition of the present embodiment, the relationship between the amount of solid components and the amount of solvent is not particularly limited, but is preferably 1 to 80 mass % solid components and 20 to 99 mass % solvent, more preferably 1 to 50 mass % solid components and 50 to 99 mass % solvent, even more preferably 2 to 40 mass % solid components and 60 to 98 mass % solvent, and particularly preferably 2 to 10 mass % solid components and 90 to 98 mass % solvent, relative to 100 mass % combined mass of solid components and solvent.

[0170] The lithography material composition of the present embodiment may contain, as other solid components, at least one selected from the group consisting of an acid generator (C), an acid crosslinker (G), an acid diffusion controller (E) and other components (F).

[0171] In the lithography material composition of this embodiment, the content of the compound according to this embodiment is not particularly limited, but is preferably 50 to 99.4 mass % of the total mass of solid components (the sum of optionally used solid components such as the compound according to this embodiment, the acid generator (C), the acid crosslinker (G), the acid diffusion controller (E), and other components (F), the same applies below), more preferably 55 to 90 mass %, even more preferably 60 to 80 mass %, and particularly preferably 60 to 70 mass %. With this content, the resolution is further improved and the line edge roughness (LER) is further reduced.

[0172] <Acid Generator (C)> The lithography material composition of the present embodiment preferably contains one or more acid generators (C) that generate an acid directly or indirectly when irradiated with any radiation selected from visible light, ultraviolet light, an excimer laser, an electron beam, extreme ultraviolet light (EUV), X-rays, and an ion beam.

[0173] In this case, in the lithography material composition of the present embodiment, the content of the acid generator (C) is preferably 0.001 to 49 mass% of the total mass of the solid components, more preferably 1 to 40 mass%, further preferably 3 to 30 mass%, and particularly preferably 10 to 25 mass%. By using the acid generator (C) within the above content range, a pattern profile with higher sensitivity and lower edge roughness can be obtained.

[0174] In the lithography material composition of the present embodiment, the method of generating the acid is not limited as long as the acid is generated in the system. If an excimer laser is used instead of ultraviolet rays such as g-rays and i-rays, finer processing is possible, and if an electron beam, extreme ultraviolet rays, X-rays, or ion beam is used as a high-energy beam, even finer processing is possible.

[0175] The acid generator (C) is not particularly limited, and examples thereof include compounds disclosed in International Publication No. 2017 / 033943. As the acid generator (C), an acid generator having an aromatic ring is preferable, an acid generator having a sulfonate ion having an aryl group is more preferable, and diphenyltrimethylphenylsulfonium p-toluenesulfonate, triphenylsulfonium p-toluenesulfonate, triphenylsulfonium trifluoromethanesulfonate, and triphenylsulfonium nonafluoromethanesulfonate are particularly preferable. By using the acid generator, line edge roughness can be reduced.

[0176] In addition, the lithography material composition of the present embodiment preferably further contains a diazonaphthoquinone photoactive compound as an acid generator. The diazonaphthoquinone photoactive compound is a diazonaphthoquinone substance including polymeric and non-polymeric diazonaphthoquinone photoactive compounds, and is not particularly limited as long as it is generally used as a photosensitive component in a positive resist composition, and one or more types can be arbitrarily selected and used. Among these, from the viewpoint of low roughness and solubility, a non-polymeric diazonaphthoquinone photoactive compound is preferable, and it is more preferable that it is a low molecular weight compound having a molecular weight of 1500 or less, further preferably a molecular weight of 1200 or less, and particularly preferably a molecular weight of 1000 or less. A preferred specific example of such a non-polymeric diazonaphthoquinone photoactive compound includes a non-polymeric diazonaphthoquinone photoactive compound disclosed in International Publication No. 2016 / 158881. The acid generator (C) can be used alone or in two or more types.

[0177] <Acid crosslinking agent (G)> The lithography material composition of the present embodiment preferably contains one or more acid crosslinkers (G) when used as a negative resist material or as an additive for increasing the strength of a pattern in a positive resist material. The acid crosslinker (G) is a compound that can intramolecularly or intermolecularly crosslink the compound according to the present embodiment in the presence of an acid generated from the acid generator (C). Such an acid crosslinker (G) is not particularly limited, but may be, for example, a compound having one or more crosslinkable groups that can crosslink the compound according to the present embodiment.

[0178] Although specific examples of such crosslinkable groups are not particularly limited, for example, (i) hydroxyalkyl groups such as hydroxy (alkyl group having 1 to 6 carbon atoms), alkoxy (alkyl group having 1 to 6 carbon atoms) having 1 to 6 carbon atoms, acetoxy (alkyl group having 1 to 6 carbon atoms), or groups derived therefrom; (ii) carbonyl groups such as formyl group, carboxy (alkyl group having 1 to 6 carbon atoms), or groups derived therefrom; (iii) nitrogen-containing group-containing groups such as dimethylaminomethyl group, diethylaminomethyl group, dimethylolaminomethyl group, diethylolaminomethyl group, morpholinomethyl group; (iv) glycidyl group-containing groups such as glycidyl ether group, glycidyl ester group, glycidyl amino group; (v) groups derived from aromatic groups such as allyloxy (alkyl group having 1 to 6 carbon atoms) having 1 to 6 carbon atoms, aralkyloxy (alkyl group having 1 to 6 carbon atoms) having 1 to 6 carbon atoms, such as benzyloxymethyl group, benzoyloxymethyl group; (vi) polymerizable multiple bond-containing groups such as vinyl group, isopropenyl group, etc. can be mentioned. As the crosslinkable group of the acid crosslinking agent (G), hydroxyalkyl groups, alkoxyalkyl groups, etc. are preferable, and alkoxymethyl groups are particularly preferable.

[0179] The acid crosslinking agent (G) having a crosslinkable group is not particularly limited, and examples thereof include (i) methylol group-containing compounds such as methylol group-containing melamine compounds, methylol group-containing benzoguanamine compounds, methylol group-containing urea compounds, methylol group-containing glycoluril compounds, and methylol group-containing phenol compounds; (ii) alkoxyalkyl group-containing compounds such as alkoxyalkyl group-containing melamine compounds, alkoxyalkyl group-containing benzoguanamine compounds, alkoxyalkyl group-containing urea compounds, alkoxyalkyl group-containing glycoluril compounds, and alkoxyalkyl group-containing phenol compounds; (iii) carboxymethyl group-containing compounds such as carboxymethyl group-containing melamine compounds, carboxymethyl group-containing benzoguanamine compounds, carboxymethyl group-containing urea compounds, carboxymethyl group-containing glycoluril compounds, and carboxymethyl group-containing phenol compounds; and (iv) epoxy compounds such as bisphenol A-based epoxy compounds, bisphenol F-based epoxy compounds, bisphenol S-based epoxy compounds, novolac resin-based epoxy compounds, resol resin-based epoxy compounds, and poly(hydroxystyrene)-based epoxy compounds.

[0180] As the acid crosslinking agent (G), a compound having a phenolic hydroxyl group, and a compound and resin in which the crosslinkable group is introduced into the acidic functional group in an alkali-soluble resin to impart crosslinking properties can be used. In this case, the introduction rate of the crosslinkable group is not particularly limited, and is adjusted to, for example, 5 to 100 mol%, preferably 10 to 60 mol%, and more preferably 15 to 40 mol% based on the total acidic functional groups in the compound having a phenolic hydroxyl group and the alkali-soluble resin. If it is within the above range, the crosslinking reaction occurs sufficiently, and a decrease in the residual film rate, and a swelling phenomenon or meandering of the pattern can be avoided, which is preferable.

[0181] In the lithography material composition of this embodiment, the acid crosslinker (G) is preferably an alkoxyalkylated urea compound or a resin thereof, or an alkoxyalkylated glycoluril compound or a resin thereof (acid crosslinker (G1)), a phenol derivative having 1 to 6 benzene rings in the molecule and having two or more hydroxyalkyl groups or alkoxyalkyl groups in the entire molecule, and the hydroxyalkyl groups or alkoxyalkyl groups are bonded to any of the benzene rings (acid crosslinker (G2)), or a compound having at least one α-hydroxyisopropyl group (acid crosslinker (G3)). For example, the compounds disclosed in International Publication No. 2017 / 033943 can be mentioned.

[0182] In the lithography material composition of this embodiment, the content of the acid crosslinker (G) is preferably 0.5 to 49 mass % of the total mass of the solid components, more preferably 0.5 to 40 mass %, further preferably 1 to 30 mass %, and particularly preferably 2 to 20 mass %. The content of the acid crosslinker (G) of 0.5 mass % or more is preferable because it improves the effect of suppressing the solubility of the resist film in an alkaline developer and can suppress a decrease in the residual film rate and the occurrence of swelling or meandering of the pattern, while the content of 49 mass % or less is preferable because it can suppress a decrease in the heat resistance of the resist.

[0183] The content of at least one compound selected from the acid crosslinkers (G1), (G2), and (G3) in the acid crosslinker (G) is not particularly limited, and can be in various ranges depending on factors such as the type of substrate used when forming a resist pattern.

[0184] <Acid diffusion control agent (E)> The lithography material composition of this embodiment may contain an acid diffusion controller (E) that has the effect of controlling the diffusion of the acid generated from the acid generator by radiation exposure in the resist film, thereby preventing undesirable chemical reactions in unexposed areas. By using such an acid diffusion controller (E), the storage stability of the lithography material composition is improved. In addition, the resolution is further improved, and the line width change of the resist pattern due to the variation of the exposure time before and after radiation exposure can be suppressed, resulting in extremely excellent process stability.

[0185] Such an acid diffusion controller (E) is not particularly limited, and examples thereof include radiolytic basic compounds such as nitrogen atom-containing basic compounds, basic sulfonium compounds, and basic iodonium compounds. Examples of the acid diffusion controller (E) include compounds disclosed in International Publication No. 2017 / 033943. The acid diffusion controller (E) can be used alone or in combination of two or more.

[0186] The content of the acid diffusion controller (E) is preferably 0.001 to 49% by mass, more preferably 0.01 to 10% by mass, further preferably 0.01 to 5% by mass, and particularly preferably 0.01 to 3% by mass, based on the total mass of the solid components. When the content of the acid diffusion controller (E) is within the above range, the deterioration of resolution, pattern shape, dimensional fidelity, etc. can be further suppressed. Furthermore, even if the waiting time from electron beam irradiation to heating after radiation irradiation is long, the shape of the upper layer part of the pattern does not deteriorate. Furthermore, when the content of the acid diffusion controller (E) is 10% by mass or less, the deterioration of sensitivity, developability of unexposed parts, etc. can be prevented. Furthermore, by using such an acid diffusion controller, the storage stability of the lithography material composition is improved, and the resolution is improved, and the line width change of the resist pattern due to the variation of the waiting time before radiation irradiation and the waiting time after radiation irradiation can be suppressed, resulting in extremely excellent process stability.

[0187] (Other ingredients (F)) To the lithography material composition of this embodiment, one or more of various additives such as a dissolution promoter, a dissolution controller, a sensitizer, a surfactant, and an organic carboxylic acid or a phosphorus oxo acid or a derivative thereof can be added as other components (F) as necessary within a range that does not impair the object of this embodiment. Examples of other components (F) include the compounds disclosed in WO 2017 / 033943.

[0188] The total content of the other components (F) is preferably from 0 to 49 mass % of the total mass of the solid components, more preferably from 0 to 5 mass %, even more preferably from 0 to 1 mass %, and particularly preferably 0 mass %.

[0189] In the lithography material composition of the present embodiment, the content of the compound of the present embodiment, the acid generator (C), the acid diffusion controller (E), and the other components (F) (compound of the present embodiment / acid generator (C) / acid diffusion controller (E) / other components (F)) is, in mass % on a solid basis, preferably 50 to 99.4 / 0.001 to 49 / 0.001 to 49 / 0 to 49, more preferably 55 to 90 / 1 to 40 / 0.01 to 10 / 0 to 5, still more preferably 60 to 80 / 3 to 30 / 0.01 to 5 / 0 to 1, and particularly preferably 60 to 70 / 10 to 25 / 0.01 to 3 / 0.

[0190] The content of each component is selected from the respective ranges so that the sum of the components is 100% by mass. When the content is within the above range, the performance such as sensitivity, resolution, and developability is further improved.

[0191] The method for preparing the lithography material composition of the present embodiment is not particularly limited, and examples thereof include a method in which each component is dissolved in a solvent at the time of use to prepare a homogeneous solution, and then, if necessary, filtered through a filter having a pore size of, for example, about 0.2 μm.

[0192] The lithography material composition of the present embodiment may contain a resin to the extent that the object of the present invention is not impaired. The resin is not particularly limited, and examples thereof include novolac resins, polyvinylphenols, polyacrylic acid, polyvinyl alcohol, styrene-maleic anhydride resins, and polymers containing acrylic acid, vinyl alcohol, or vinylphenol as monomer units, or derivatives thereof. The content of the resin is not particularly limited and is appropriately adjusted depending on the type of the compound according to the present embodiment to be used, but is preferably 30 parts by mass or less, more preferably 10 parts by mass or less, even more preferably 5 parts by mass or less, and particularly preferably 0 parts by mass, per 100 parts by mass of the compound.

[0193] [Pattern formation method] When forming a pattern on a substrate using a lithography material, for example, a pattern formation method can be used that includes a film formation step of forming a film on a substrate using the lithography material according to this embodiment or a composition containing the same (hereinafter, these may be collectively referred to as "lithography material, etc."), an exposure step of exposing the film to light, and a development step of developing the film exposed in the exposure step to form a pattern.

[0194] For example, when a resist pattern is formed using the lithography material of the present embodiment, the method of forming the pattern (resist pattern) is not particularly limited, and a suitable method includes a film forming step of applying a resist composition containing the above-mentioned lithography material on a substrate to form a film (resist film), an exposure step of exposing the formed film (resist film), and a development step of developing the film (resist film) exposed in the exposure step to form a pattern (resist pattern). The resist pattern of the present embodiment can also be formed as an upper layer resist in a multilayer process.

[0195] A specific method for forming a resist pattern is not particularly limited, but may be, for example, the following method. First, the resist composition is applied onto a conventionally known substrate by a coating means such as spin coating, casting coating, or roll coating to form a resist film. The conventionally known substrate is not particularly limited, and may be, for example, a substrate for electronic components, or a substrate on which a predetermined wiring pattern is formed. More specifically, it is not particularly limited, but may be, for example, a silicon wafer, a metal substrate such as copper, chromium, iron, or aluminum, or a glass substrate. The material of the wiring pattern is not particularly limited, but may be, for example, copper, aluminum, nickel, or gold. If necessary, an inorganic film or an organic film may be provided on the substrate. The inorganic film is not particularly limited, but may be, for example, an inorganic anti-reflective film (inorganic BARC). The organic film is not particularly limited, but may be, for example, an organic anti-reflective film (organic BARC). Surface treatment may be performed using hexamethylenedisilazane or the like.

[0196] Next, the coated substrate is heated as necessary. The heating conditions vary depending on the composition of the resist composition, etc., but are preferably 20 to 250°C, more preferably 20 to 150°C. Heating is preferable because it may improve the adhesion of the resist to the substrate. Next, the resist film is exposed to a desired pattern by any radiation selected from the group consisting of visible light, ultraviolet light, excimer laser, electron beam, extreme ultraviolet light (EUV), X-rays, and ion beams. The exposure conditions, etc. are appropriately selected depending on the composition of the resist composition, etc.

[0197] In the method for forming a resist pattern of this embodiment, in order to stably form a highly accurate fine pattern by exposure, it is preferable to heat the resist composition after irradiation with radiation. The heating conditions vary depending on the composition of the resist composition, but are preferably 20 to 250°C, more preferably 20 to 150°C.

[0198] Next, the exposed resist film is developed with a developer to form a predetermined resist pattern. As the developer, it is preferable to select a solvent having a solubility parameter (SP value) close to that of the compound according to the present embodiment to be used, and a polar solvent such as a ketone solvent, an ester solvent, an alcohol solvent, an amide solvent, or an ether solvent, a hydrocarbon solvent, or an alkaline aqueous solution can be used. Depending on the type of developer, a positive resist pattern or a negative resist pattern can be produced. In general, a negative resist pattern can be obtained in the case of a polar solvent such as a ketone solvent, an ester solvent, an alcohol solvent, an amide solvent, or an ether solvent, or a hydrocarbon solvent, and a positive resist pattern can be obtained in the case of an alkaline aqueous solution. Examples of ketone solvents, ester solvents, alcohol solvents, amide solvents, ether solvents, hydrocarbon solvents, and alkaline aqueous solutions include those disclosed in International Publication No. WO 2017 / 033943.

[0199] The solvent may be mixed in a plurality of types, or may be mixed with other solvents or water within the range of performance. However, in order to fully achieve the effects of the present invention, the water content of the developer as a whole is preferably less than 70% by mass, more preferably less than 50% by mass, more preferably less than 30% by mass, even more preferably less than 10% by mass, and particularly preferably substantially free of water. That is, the content of the organic solvent in the developer is not particularly limited, and is preferably 30% by mass or more and 100% by mass or less, more preferably 50% by mass or more and 100% by mass or less, more preferably 70% by mass or more and 100% by mass or less, even more preferably 90% by mass or more and 100% by mass or less, and particularly preferably 95% by mass or more and 100% by mass or less, based on the total amount of the developer.

[0200] In particular, a developer containing at least one solvent selected from a ketone-based solvent, an ester-based solvent, an alcohol-based solvent, an amide-based solvent, and an ether-based solvent is preferred because it improves resist performance such as the resolution and roughness of the resist pattern.

[0201] The vapor pressure of the developing solution is not particularly limited. For example, at 20°C, it is preferably 5 kPa or less, more preferably 3 kPa or less, and particularly preferably 2 kPa or less. By setting the vapor pressure of the developing solution to 5 kPa or less, evaporation of the developing solution on the substrate or in the developing cup is suppressed, the temperature uniformity within the wafer surface is improved, and as a result, the dimensional uniformity within the wafer surface is improved. Examples of the developing solution having such a vapor pressure include the developing solution disclosed in International Publication No. 2017 / 033943.

[0202] An appropriate amount of a surfactant can be added to the developing solution as needed. The surfactant is not particularly limited. For example, ionic or non-ionic fluorine-based or silicon-based surfactants can be used. Examples of these fluorine or silicon-based surfactants include the surfactants described in JP-A-62-36663, JP-A-61-226746, JP-A-61-226745, JP-A-62-170950, JP-A-63-34540, JP-A-7-230165, JP-A-8-62834, JP-A-9-54432, JP-A-9-5988, U.S. Patent No. 5,405,720, 5,360,692, 5,529,881, 5,296,330, 5,436,098, 5,576,143, 5,294,511, and 5,824,451. Preferably, it is a non-ionic surfactant. The non-ionic surfactant is not particularly limited, but it is more preferable to use a fluorine-based surfactant or a silicon-based surfactant.

[0203] The amount of the surfactant used is usually 0.001 to 5% by mass, preferably 0.005 to 2% by mass, and more preferably 0.01 to 0.5% by mass based on the total amount of the developing solution.

[0204] Examples of the developing method include a method of immersing a substrate in a tank filled with a developer for a certain period of time (dip method), a method of piling up the developer on the substrate surface by surface tension and leaving it still for a certain period of time (puddle method), a method of spraying the developer on the substrate surface (spray method), and a method of continuously dispensing the developer while scanning a developer dispensing nozzle at a constant speed on a substrate rotating at a constant speed (dynamic dispense method). There is no particular limit to the time for developing the pattern, but it is preferably 10 seconds to 90 seconds.

[0205] After the development step, a step of stopping the development while replacing the solvent with another solvent may be carried out.

[0206] After the development, it is preferable to include a step of washing with a rinsing liquid containing an organic solvent.

[0207] The rinse liquid used in the rinse step after development is not particularly limited as long as it does not dissolve the resist pattern hardened by crosslinking, and a solution containing a general organic solvent or water can be used. As the rinse liquid, it is preferable to use a rinse liquid containing at least one organic solvent selected from a hydrocarbon solvent, a ketone solvent, an ester solvent, an alcohol solvent, an amide solvent, and an ether solvent. More preferably, after development, a step of cleaning is performed using a rinse liquid containing at least one organic solvent selected from the group consisting of a ketone solvent, an ester solvent, an alcohol solvent, and an amide solvent. Even more preferably, after development, a step of cleaning is performed using a rinse liquid containing an alcohol solvent or an ester solvent. Even more preferably, after development, a step of cleaning is performed using a rinse liquid containing a monohydric alcohol. Particularly preferably, after development, a step of cleaning is performed using a rinse liquid containing a monohydric alcohol having 5 or more carbon atoms. There is no particular limit to the time for rinsing the pattern, but it is preferably 10 seconds to 90 seconds.

[0208] Here, the monohydric alcohol used in the rinsing step after development is not particularly limited, and examples thereof include linear, branched, and cyclic monohydric alcohols. Specifically, 1-butanol, 2-butanol, 3-methyl-1-butanol, tert-butyl alcohol, 1-pentanol, 2-pentanol, 1-hexanol, 4-methyl-2-pentanol, 1-heptanol, 1-octanol, 2-hexanol, cyclopentanol, 2-heptanol, 2-octanol, 3-hexanol, 3-heptanol, 3-octanol, and 4-octanol can be used. Particularly preferred examples of monohydric alcohols having 5 or more carbon atoms include 1-hexanol, 2-hexanol, 4-methyl-2-pentanol, 1-pentanol, and 3-methyl-1-butanol.

[0209] The above-mentioned components may be used in combination, or may be used in combination with an organic solvent other than those mentioned above.

[0210] The water content in the rinse liquid is not particularly limited, but is preferably 10% by mass or less, more preferably 5% by mass or less, and particularly preferably 3% by mass or less. By keeping the water content at 10% by mass or less, better development characteristics can be obtained.

[0211] The vapor pressure of the rinse liquid used after development is preferably 0.05 kPa to 5 kPa, more preferably 0.1 kPa to 5 kPa, and even more preferably 0.12 kPa to 3 kPa at 20° C. By setting the vapor pressure of the rinse liquid to 0.05 kPa to 5 kPa, the temperature uniformity within the wafer surface is further improved, and further swelling caused by the penetration of the rinse liquid is further suppressed, thereby improving the dimensional uniformity within the wafer surface.

[0212] The rinse solution may contain a suitable amount of a surfactant.

[0213] In the rinsing step, the developed wafer is washed with a rinse solution containing the organic solvent. The method of the washing is not particularly limited, but may be, for example, a method of continuously applying the rinse solution onto a substrate rotating at a constant speed (spin coating method), a method of immersing the substrate in a tank filled with the rinse solution for a certain period of time (dip method), or a method of spraying the rinse solution onto the substrate surface (spray method). Among these, it is preferable to wash the substrate by the spin coating method, rotate the substrate at a rotation speed of 2000 rpm to 4000 rpm after washing, and remove the rinse solution from the substrate.

[0214] After forming the resist pattern, the resist is etched to obtain a patterned wiring board. The etching method can be a known method such as dry etching using plasma gas or wet etching using an alkaline solution, a cupric chloride solution, a ferric chloride solution, or the like.

[0215] After the resist pattern is formed, plating may be performed. The plating method is not particularly limited, but examples thereof include copper plating, solder plating, nickel plating, and gold plating.

[0216] The remaining resist pattern after etching can be peeled off with an organic solvent. The organic solvent is not particularly limited, but examples thereof include PGMEA (propylene glycol monomethyl ether acetate), PGME (propylene glycol monomethyl ether), and EL (ethyl lactate). The peeling method is not particularly limited, but examples thereof include a dipping method and a spray method. The wiring board on which the resist pattern is formed may be a multilayer wiring board and may have a small diameter through hole.

[0217] In this embodiment, the wiring board can also be formed by a method in which a resist pattern is formed, a metal is evaporated in a vacuum, and then the resist pattern is dissolved in a solution, that is, by a lift-off method.

[0218] [Acid generator] The acid generator according to the present embodiment includes the compound according to the present embodiment. The compound has an ionic moiety having a specific structure at the end, and therefore exhibits high sensitivity, high resolution, and high flatness when used as an acid generator in a resist material or the like. The molecules of the compound according to the present embodiment have a moderate diffusion speed, and therefore exhibit high resolution while maintaining high sensitivity. In addition, since the compound has a moderate molecular weight, it is difficult to volatilize, and since the film loss during curing is relatively small, it exhibits high flatness. The acid generator according to the present embodiment generates acid by the action of heat or radiation. Examples of radiation include g-rays, i-rays, KrF excimer laser, ArF excimer laser, extreme ultraviolet light (EUV), and electron beams. The acid generator according to the present embodiment may contain an acid generator other than the compound according to the present embodiment.

[0219] [Second Composition] The second composition according to the present embodiment includes the acid generator according to the present embodiment. The second composition according to the present embodiment may be, for example, a composition for forming an underlayer film for lithography, a composition for forming an optical article, etc., but is not limited thereto.

[0220] (Composition for forming underlayer film for lithography, underlayer film for lithography, and pattern formation method) [First embodiment] <Composition for forming lower layer film for lithography> The composition for forming an underlayer film for lithography according to the first embodiment of the present invention is a composition for forming an underlayer film for lithography that contains the acid generator according to this embodiment and a silicon-containing compound (for example, a hydrolyzable organosilane, its hydrolyzate, or its hydrolysis condensate). The composition for forming an underlayer film for lithography according to this embodiment can form an underlayer film for lithography such as a resist underlayer film, and has high heat resistance and high solvent solubility. Therefore, the rectangularity of the pattern is excellent. In addition, it is possible to reduce defects in the film (form a thin film), has high adhesion, good storage stability, high sensitivity, long-term light resistance, and can impart a good resist pattern shape. In addition, the composition for forming an underlayer film for lithography according to this embodiment can form an underlayer film for lithography with high flatness.

[0221] The composition for forming an underlayer film for lithography of the present embodiment can be suitably used in a multilayer resist method in which a resist underlayer film is further provided between an upper layer resist (photoresist, etc.) and a hard mask or an organic underlayer film. In such a multilayer resist method, for example, a resist underlayer film is formed on an organic underlayer film or a hard mask on a substrate by a coating method or the like, and an upper layer resist (for example, a photoresist, an electron beam resist, an EUV resist) is formed on the resist underlayer film. Then, a resist pattern is formed by exposure and development, and the resist underlayer film is dry-etched using the resist pattern to transfer the pattern, and the organic underlayer film is etched to transfer the pattern, and the substrate is processed using the organic underlayer film.

[0222] That is, the lithography underlayer film (resist underlayer film) formed using the lithography underlayer film forming composition of this embodiment is unlikely to cause intermixing with the upper layer resist, and has heat resistance. For example, the etching rate for halogen-based (fluorine-based) etching gas is higher than that of the patterned upper layer resist used as a mask, so that a good rectangular pattern can be obtained. Furthermore, the lithography underlayer film (resist underlayer film) formed using the lithography underlayer film forming composition of this embodiment has high resistance to oxygen-based etching gas, so it can function as a good mask when patterning a layer provided on a substrate such as a hard mask. The lithography underlayer film forming composition of this embodiment can also be used in an embodiment in which multiple resist underlayer films are laminated. In this case, the position (which layer is laminated) of the resist underlayer film formed using the lithography underlayer film forming composition of this embodiment is not particularly limited, and may be directly under the upper layer resist, may be the layer located closest to the substrate, or may be sandwiched between the resist underlayer films.

[0223] In forming a fine pattern, the resist film tends to be thin in order to prevent the pattern from collapsing. In dry etching for transferring a pattern to a film existing in an underlying layer by thinning the resist, the etching rate must be higher than that of the film in the upper layer in order to transfer the pattern. In this embodiment, an organic underlayer film is placed on a substrate, and the resist underlayer film (containing a silicon-based compound) of this embodiment is coated on the organic underlayer film, which is then coated with a resist film (organic resist film). The dry etching rates of organic and inorganic component films are significantly different depending on the etching gas selected, and the dry etching rate of organic component films is increased by oxygen-based gases, while the dry etching rate of inorganic component films is increased by halogen-containing gases.

[0224] For example, the resist underlayer film to which the pattern has been transferred is used, and the organic underlayer film underneath is dry etched with an oxygen-based gas to transfer the pattern to the organic underlayer film, and the organic underlayer film to which the pattern has been transferred is used to process the substrate with a halogen-containing gas. The underlayer film for lithography (resist underlayer film) formed using the composition for forming an underlayer film for lithography of the present embodiment has good adhesion, and therefore can suppress the collapse of the transferred pattern.

[0225] In addition, the resist underlayer film formed by the composition for forming an underlayer film for lithography of the present embodiment contains the acid generator according to the present embodiment, which has excellent absorption ability for actinic rays, and a silicon-containing compound (for example, hydrolyzable organosilane, its hydrolysate, or its hydrolysis condensate), thereby improving the sensitivity of the upper layer resist, preventing intermixing with the upper layer resist, and forming a rectangular pattern of the resist underlayer film after exposure and development. This makes it possible to process substrates with fine patterns.

[0226] In addition, the resist underlayer film made of the composition for forming an underlayer film for lithography of the present embodiment has high heat resistance, so it can be used under high temperature baking conditions.Furthermore, since it has a relatively low molecular weight and low viscosity, it is easy to fill evenly into every corner of a substrate having a step (especially a fine space or hole pattern, etc.), and as a result, the planarization property and filling property tend to be relatively advantageously improved.

[0227] The composition for forming an underlayer film for lithography may further contain, in addition to the acid generator according to the present embodiment and the silicon-containing compound, a solvent, an acid, an acid crosslinking agent, etc. Furthermore, as optional components, the composition may contain an organic polymer compound, a surfactant, and other components such as water, an alcohol, and a curing catalyst.

[0228] -solvent- As the solvent used in this embodiment, any known solvent can be used as appropriate as long as it can dissolve at least the acid generator according to this embodiment. For example, the solvents that can be contained in the composition for forming an underlayer film for lithography disclosed in International Publication No. 2017 / 188450 can be used.

[0229] The content of the solvent is not particularly limited, but from the viewpoint of solubility and film formation, it is preferably 100 to 10,000 parts by mass, more preferably 200 to 8,000 parts by mass, and even more preferably 200 to 5,000 parts by mass, relative to 100 parts by mass of the total solid content of the composition for forming an underlayer film for lithography.

[0230] -acid- The composition for forming an underlayer film for lithography may contain an acid from the viewpoint of promoting curing. Examples of the acid include hydrofluoric acid, hydrochloric acid, hydrobromic acid, sulfuric acid, nitric acid, perchloric acid, phosphoric acid, methanesulfonic acid, benzenesulfonic acid, and toluenesulfone.

[0231] The content of the acid is not particularly limited, but from the viewpoint of solubility and shape stability of the coating film, it is preferably 0.001 to 20 parts by mass, more preferably 0.005 to 10 parts by mass, and even more preferably 0.01 to 5 parts by mass, relative to 100 parts by mass of the total solid content of the composition for forming an underlayer film for lithography.

[0232] -Acid crosslinking agent- The composition for forming an underlayer film for lithography may contain one or more acid crosslinkers when used as a negative resist material or as an additive for increasing the strength of a pattern in a positive resist material. Examples of the acid crosslinker include compounds having one or more groups (hereinafter referred to as "crosslinkable groups") that can form crosslinks in the presence of an acid. For example, the acid crosslinkers that can be contained in the composition for forming an underlayer film for lithography disclosed in International Publication No. 2017 / 188450 can be mentioned. In addition, for example, those described in International Publication No. WO2013 / 024779 can also be mentioned as specific examples of the acid crosslinker.

[0233] The content of the acid crosslinker is not particularly limited, but from the viewpoint of solubility and shape stability of the coating film, it is preferably 0.01 to 30 parts by mass, more preferably 0.05 to 20 parts by mass, and even more preferably 0.1 to 10 parts by mass, relative to 100 parts by mass of the total solid content of the composition for forming an underlayer film for lithography.

[0234] -Silicon-containing compounds- The composition for forming an underlayer film for lithography contains a silicon-containing compound together with the acid generator according to the present embodiment. The silicon-containing compound may be either an organic silicon-containing compound or an inorganic silicon-containing compound, but is preferably an organic silicon-containing compound. Examples of the inorganic silicon-containing compound include polysilazane compounds made of silicon oxide, silicon nitride, and silicon oxynitride, which can be formed into a film by a coating method at low temperature. Examples of the organic silicon-containing compound include polysilsesquioxane-based compounds, hydrolyzable organosilanes, their hydrolyzates, and their hydrolyzed condensates. Specific materials for the polysilsesquioxane-based compounds are not limited to the following, but may be, for example, those described in JP-A-2007-226170 and JP-A-2007-226204. The hydrolyzable organosilane, its hydrolysate, or its hydrolyzed condensate may include at least one hydrolyzable organosilane selected from the group consisting of the hydrolyzable organosilane of the following formula (D1) and the following formula (D2), their hydrolysate, or their hydrolyzed condensate (hereinafter, these may be simply referred to as "at least one organosilicon compound selected from the group consisting of formula (D1) and formula (D2)"). When the composition for forming an underlayer film for lithography includes at least one organosilicon compound selected from the group consisting of formula (D1) and formula (D2), it is easy to control the Si-O bond by adjusting the curing conditions, it is advantageous in terms of cost, and it is suitable for introducing an organic component. For this reason, a layer formed using a composition for forming an underlayer film for lithography, in which the composition for forming an underlayer film for lithography contains at least one organosilicon compound selected from the group consisting of formula (D1) and formula (D2), is useful as an intermediate layer of a resist layer (a layer between an upper resist layer and an organic underlayer film provided on a substrate).

[0235] Formula (D1): (R 3 ) a Si(R 4 ) 4-a (In formula (D1), R 3represents an "organic group" having an alkyl group, an aryl group, an aralkyl group, a halogenated alkyl group, a halogenated aryl group, a halogenated aralkyl group, an alkenyl group, an epoxy group, an acryloyl group, a methacryloyl group, a mercapto group, an alkoxyaryl group, an acyloxyaryl group, an isocyanurate group, a hydroxy group, a cyclic amino group, or a cyano group; or a combination thereof, and is bonded to the silicon atom by a Si-C bond; R 4 represents an alkoxy group, an acyloxy group or a halogen group, and a represents an integer of 0 to 3.

[0236] Formula (D2): [(R 5 ) c Si(R 6 ) 4-c ] 2 Y b (In formula (D2), R 5 represents an alkyl group, R 6 represents an alkoxy group, an acyloxy group, or a halogen group, Y represents an alkylene group or an arylene group, b represents an integer of 0 or 1, and c represents an integer of 0 or 1.

[0237] In the composition for forming an underlayer film for lithography, the acid generator according to this embodiment and the silicon-containing compound (for example, at least one organosilicon compound selected from the group consisting of formula (D1) and formula (D2)) can be used in a molar ratio ranging from 0.1:99.9 to 50:50. In order to obtain a good resist shape, for example, the molar ratio can be used in a range from 1:99 to 30:70. The at least one organosilicon compound selected from the group consisting of formula (D1) and formula (D2) is preferably used as a hydrolysis condensation product (polyorganosiloxane polymer).

[0238] R in the hydrolyzable organosilane represented by formula (D1) 3is an "organic group" having an alkyl group, an aryl group, an aralkyl group, a halogenated alkyl group, a halogenated aryl group, a halogenated aralkyl group, an alkenyl group, an epoxy group, an acryloyl group, a methacryloyl group, a mercapto group, an alkoxyaryl group, an acyloxyaryl group, an isocyanurate group, a hydroxy group, a cyclic amino group, or a cyano group, or a combination thereof, and is bonded to a silicon atom by a Si-C bond; R 4 represents an alkoxy group, an acyloxy group, or a halogen group, and a represents an integer of 0 to 3.

[0239] R of the hydrolyzable organosilane of formula (D2) 5 represents an alkyl group, R 6 represents an alkoxy group, an acyloxy group, or a halogen group; Y represents an alkylene group or an arylene group; b represents an integer of 0 or 1; and c represents an integer of 0 or 1.

[0240] Examples of the hydrolyzable organosilanes represented by formula (D1) and formula (D2) include the hydrolyzable organosilanes that can be contained in the composition for forming an underlayer film for lithography disclosed in International Publication No. 2017 / 188450.

[0241] In this embodiment, the acid generator according to this embodiment and the hydrolyzable organosilane, etc. may be used to form a film as a mixture without reacting them, but the acid generator according to this embodiment and the above-mentioned hydrolyzable organosilane, etc. in the composition for forming an underlayer film for lithography may be subjected to hydrolysis and condensation using one or more compounds selected from inorganic acids, aliphatic sulfonic acids, and aromatic sulfonic acids as an acid catalyst.

[0242] Examples of the acid catalyst used at this time include hydrofluoric acid, hydrochloric acid, hydrobromic acid, sulfuric acid, nitric acid, perchloric acid, phosphoric acid, methanesulfonic acid, benzenesulfonic acid, toluenesulfonic acid, etc. The amount of the catalyst used is 10 moles per mole of monomer (the total amount of the acid generator according to this embodiment and the hydrolyzable organosilane, etc.). -6 Preferably, the amount is 10 moles or less, and more preferably, 10 moles or less. -5~5 moles, more preferably 10 -4 ~1 mol.

[0243] The amount of water added when hydrolyzing and condensing these monomers is preferably 0.01 to 100 mol, more preferably 0.05 to 50 mol, and even more preferably 0.1 to 30 mol per mol of hydrolyzable substituent bonded to the monomer (acid generator according to this embodiment, hydrolyzable organosilane, etc.). Addition of 100 mol or less is economical because the apparatus used for the reaction does not become excessively large.

[0244] As an operation method, for example, a monomer is added to an aqueous catalyst solution to initiate a hydrolysis condensation reaction. At this time, an organic solvent may be added to the aqueous catalyst solution, or the monomer may be diluted with an organic solvent, or both may be performed. The reaction temperature is preferably 0 to 100°C, more preferably 40 to 100°C. A method in which the temperature is kept at 5 to 80°C during the dropwise addition of the monomer, and then the mixture is aged at 40 to 100°C is preferred.

[0245] Examples of organic solvents that can be added to the aqueous catalyst solution or that can dilute the monomer include the organic solvents disclosed in WO 2017 / 188450.

[0246] The amount of organic solvent used is preferably 0 to 1,000 ml, particularly preferably 0 to 500 ml, per mole of monomer (total amount of acid generator according to this embodiment and hydrolyzable organosilane, etc.). If the amount of organic solvent used is 1,000 ml or less, the reaction vessel will not become excessively large, which is economical.

[0247] Thereafter, if necessary, a neutralization reaction of the catalyst is carried out, and the alcohol produced in the hydrolysis condensation reaction is removed under reduced pressure to obtain an aqueous solution of the reaction mixture. At this time, the amount of the alkaline substance that can be used for neutralization is preferably 0.1 to 2 equivalents relative to the acid used in the catalyst. This alkaline substance may be any substance that exhibits alkalinity in water.

[0248] Subsequently, it is preferable to remove by-products such as alcohol generated by the hydrolysis condensation reaction from the reaction mixture. The temperature at which the reaction mixture is heated depends on the type of organic solvent added and the alcohol generated by the reaction, but is preferably 0 to 100°C, more preferably 10 to 90°C, and even more preferably 15 to 80°C. The degree of reduced pressure at this time varies depending on the type of organic solvent and alcohol to be removed, the exhaust device, the condenser, and the heating temperature, but is preferably atmospheric pressure or less, more preferably 80 kPa or less in absolute pressure, and even more preferably 50 kPa or less in absolute pressure. Although it is difficult to know the exact amount of alcohol removed at this time, it is desirable to remove about 80 mass% or more of the generated alcohol.

[0249] Next, the acid catalyst used in the hydrolysis and condensation may be removed from the reaction mixture. An example of a method for removing the acid catalyst is a method in which water is mixed with the reaction mixture and the product is extracted with an organic solvent. The organic solvent used in this case is preferably one that can dissolve the product and separates into two layers when mixed with water. For example, the organic solvents disclosed in International Publication No. 2017 / 188450 can be mentioned.

[0250] Furthermore, when removing the acid catalyst used in the hydrolysis and condensation from the reaction mixture, a mixture of a water-soluble organic solvent and a poorly water-soluble organic solvent can be used. For example, the mixture disclosed in WO 2017 / 188450 can be used.

[0251] The mixing ratio of the water-soluble organic solvent and the poorly water-soluble organic solvent is appropriately selected, but is preferably 0.1 to 1,000 parts by mass of the water-soluble organic solvent per 100 parts by mass of the poorly water-soluble organic solvent, more preferably 1 to 500 parts by mass, and even more preferably 2 to 100 parts by mass.

[0252] In both cases, the product containing the remaining acid catalyst and the product from which the acid catalyst has been removed, a final solvent is added and the solvent is exchanged under reduced pressure to obtain a solution of the product. The temperature for the solvent exchange at this time depends on the type of reaction solvent and extraction solvent to be removed, but is preferably 0 to 100°C, more preferably 10 to 90°C, and even more preferably 15 to 80°C. The degree of reduced pressure at this time varies depending on the type of extraction solvent to be removed, the exhaust device, the condenser, and the heating temperature, but is preferably atmospheric pressure or lower, more preferably 80 kPa or lower in absolute pressure, and even more preferably 50 kPa or lower in absolute pressure.

[0253] -Other optional ingredients- The composition for forming an underlayer film for lithography may contain, in addition to the above-mentioned components, an organic polymer compound, a crosslinking agent, a surfactant, and the like, if necessary.

[0254] By using the organic polymer compound, the dry etching rate (amount of film thickness reduction per unit time), attenuation coefficient, refractive index, etc. of the resist underlayer film formed from the composition for forming an underlayer film for lithography can be adjusted. There is no particular limitation on the organic polymer compound, and various organic polymers can be used. Condensation polymerization polymers and addition polymerization polymers can be used. For example, the organic polymer compounds disclosed in International Publication No. 2017 / 188450 can be used.

[0255] By using a crosslinking agent, the dry etching rate (amount of film thickness reduction per unit time) of the resist underlayer film formed from the composition for forming an underlayer film for lithography can be adjusted. There is no particular limitation on the crosslinking agent, and various crosslinking agents can be used. Specific examples of crosslinking agents that can be used in this embodiment include, for example, melamine compounds, guanamine compounds, glycoluril compounds, urea compounds, epoxy compounds, thioepoxy compounds, isocyanate compounds, azide compounds, and compounds containing double bonds such as alkenyl ether groups, and having at least one group selected from a methylol group, an alkoxymethyl group, and an acyloxymethyl group as a substituent (crosslinkable group), but are not particularly limited thereto. For example, crosslinking agents disclosed in International Publication No. 2017 / 188450 can be mentioned.

[0256] In the composition for forming an underlayer film for lithography, the content of the crosslinking agent is not particularly limited, but is preferably 1 to 10 parts by mass, more preferably 1 to 5 parts by mass, relative to 100 parts by mass of the acid generator according to the present embodiment. By setting the content within the above-mentioned preferred range, the occurrence of a mixing phenomenon with the resist layer tends to be suppressed, the antireflection effect tends to be enhanced, and the film formability after crosslinking tends to be improved.

[0257] The surfactant is effective in suppressing the occurrence of surface defects and the like when the composition for forming an underlayer film for lithography is applied to a substrate. Examples of the surfactant contained in the composition for forming an underlayer film for lithography include surfactants disclosed in International Publication No. 2017 / 188450. When a surfactant is used, the proportion thereof can be, for example, 0 parts by mass to 5 parts by mass relative to 100 parts by mass of the acid generator according to this embodiment.

[0258] <Underlayer film for lithography and pattern formation method> The underlayer film for lithography according to the first embodiment of the present invention can be formed using the composition for forming an underlayer film for lithography according to the first embodiment of the present invention. The underlayer film for lithography in this embodiment can be suitably used as the underlayer (resist underlayer film) of a photoresist (upper layer) used in a multilayer resist method.

[0259] In this embodiment, for example, a resist underlayer film is formed using the composition for forming an underlayer film for lithography, and after forming at least one photoresist layer on the resist underlayer film, radiation is irradiated onto a predetermined region of the photoresist layer, and development is performed to form a pattern.

[0260] Also, as one aspect of the pattern formation method according to the first embodiment of the present invention using the composition for forming an underlayer film for lithography according to the first embodiment of the present invention produced as described above, an organic underlayer film is formed on a substrate using a coating-type organic underlayer film material, a resist underlayer film is formed on the organic underlayer film using the composition for forming an underlayer film for lithography according to the first embodiment of the present invention, an upper resist film is formed on the resist underlayer film using an upper resist film composition, an upper resist pattern is formed on the upper resist film, the pattern is transferred to the resist underlayer film by etching using the upper resist pattern as a mask, the pattern is transferred to the organic underlayer film by etching using the resist underlayer film with the transferred pattern as a mask, and further, the pattern is transferred to the substrate (workpiece) by etching using the organic underlayer film with the transferred pattern as a mask. A pattern formation method can be mentioned.

[0261] As another aspect of the pattern formation method according to the first embodiment of the present invention, there can be mentioned a pattern formation method including forming an organic hard mask mainly composed of carbon on a substrate by a CVD method, forming a resist underlayer film on the organic hard mask using the composition for forming an underlayer film for lithography according to the first embodiment of the present invention, forming an upper layer resist film on the resist underlayer film using an upper layer resist film composition, forming an upper layer resist pattern on the upper layer resist film, transferring the pattern to the resist underlayer film by etching using the upper layer resist pattern as a mask, transferring the pattern to the organic hard mask by etching using the resist underlayer film to which the pattern has been transferred as a mask, and further transferring the pattern to the base material (workpiece) by etching using the organic hard mask to which the pattern has been transferred as a mask.

[0262] The substrate may be, for example, a semiconductor substrate. The semiconductor substrate may generally be a silicon substrate, but is not particularly limited thereto. Examples of the semiconductor substrate include Si, amorphous silicon (α-Si), p-Si, and SiO. 2 It is possible to use a material different from the layer to be processed, such as SiN, SiON, W, TiN, or Al.

[0263] The metal constituting the base material (workpiece; including the semiconductor substrate) can be any one of silicon, titanium, tungsten, hafnium, zirconium, chromium, germanium, copper, aluminum, indium, gallium, arsenic, palladium, iron, tantalum, iridium, and molybdenum, or an alloy thereof.

[0264] In addition, a metal film, a metal carbide film, a metal oxide film, a metal nitride film, a metal oxide carbide film, or a metal oxide nitride film may be formed on a semiconductor substrate as a layer (a portion to be processed) on the semiconductor substrate. Examples of such a layer to be processed that includes a metal include Si, SiO 2, SiN, SiON, SiOC, p-Si, α-Si, TiN, WSi, BPSG, SOG, Cr, CrO, CrON, MoSi, W, W-Si, Al, Cu, Al-Si, etc., as well as various low dielectric films and their etching stopper films, can be used, and can be formed to a thickness of usually 50 to 10,000 nm, particularly 100 to 5,000 nm.

[0265] In the pattern forming method of the present embodiment, an organic underlayer film or an organic hard mask can be formed on a substrate. Among them, the organic underlayer film can be formed from a coating-type organic underlayer film material by using a spin coating method or the like, and the organic hard mask can be formed from an organic hard mask material mainly composed of carbon by using a CVD method. The types of such organic underlayer film and organic hard mask are not particularly limited, but when the upper resist film is patterned by exposure, it is preferable that the organic underlayer film and organic hard mask have a sufficient anti-reflective film function. By forming such an organic underlayer film or organic hard mask, the pattern formed by the upper resist film can be transferred onto the substrate (workpiece) without causing a size conversion difference. Note that a hard mask "mainly composed of carbon" means a hard mask in which 50% or more by mass of the solid content is composed of a carbon-based material such as amorphous hydrogenated carbon, also called amorphous carbon and indicated as aC:H. The aC:H film can be deposited by various techniques, but plasma enhanced chemical vapor deposition (PECVD) is widely used due to its cost-effectiveness and film quality adjustability. As an example of the hard mask, for example, the one described in JP-T-2013-526783 can be referred to.

[0266] The resist underlayer film using the resist underlayer film forming composition of this embodiment used in the pattern forming method of this embodiment can be prepared on a workpiece provided with an organic underlayer film or the like by spin coating or the like from the resist underlayer film forming composition for lithography. When forming the resist underlayer film by spin coating, it is desirable to evaporate the solvent after spin coating and bake to promote the crosslinking reaction in order to prevent mixing with the upper resist film. The bake temperature is preferably within the range of 50 to 500°C. At this time, although it depends on the structure of the device to be manufactured, the bake temperature is particularly preferably 400°C or less in order to reduce heat damage to the device. The bake time is preferably within the range of 10 seconds to 300 seconds.

[0267] In the pattern forming method of the present embodiment, the method of forming a pattern on the upper resist film can be suitably selected from the following methods: lithography using light having a wavelength of 300 nm or less or EUV light; electron beam direct writing; and directed self-organization. By using such methods, a fine pattern can be formed on the upper resist film.

[0268] The upper layer resist film composition can be appropriately selected according to the method of forming a pattern on the above-mentioned upper layer resist film.For example, when performing lithography using light of 300 nm or less or EUV light, a chemically amplified photoresist film material can be used as the upper layer resist film composition.As such a photoresist film material, after forming a photoresist film and exposing it, a positive pattern can be formed by dissolving the exposed part using an alkaline developer, and a negative pattern can be formed by dissolving the unexposed part using a developer made of an organic solvent.

[0269] The resist underlayer film formed from the composition for forming an underlayer film for lithography of the present embodiment may absorb light depending on the wavelength of the light used in the lithography process, and in such a case, it can function as an anti-reflection film having an effect of preventing light reflected from the substrate.

[0270] In addition to the function as a hard mask, the underlayer film of the EUV resist can also be used for the following purpose. The composition for forming an underlayer film for lithography according to this embodiment can be used as an underlayer anti-reflective film of an EUV resist that can prevent the reflection of undesirable exposure light during EUV exposure (wavelength 13.5 nm), such as the above-mentioned UV and DUV (ArF light, KrF light), from the substrate or interface without intermixing with the EUV resist. Reflection can be efficiently prevented in the underlayer of the EUV resist. In addition, since the composition for forming an underlayer film has excellent EUV absorption ability, it can exert a sensitizing effect on the upper layer resist composition, contributing to improving sensitivity. When used as an EUV resist underlayer film, the process can be carried out in the same manner as for the underlayer film for photoresist.

[0271] Second Embodiment <Composition for forming lower layer film for lithography> The composition for forming an underlayer film for lithography according to the second embodiment of the present invention is a composition for forming an underlayer film for lithography that contains the acid generator according to this embodiment. The composition for forming an underlayer film for lithography according to this embodiment can reduce defects in the film (form a thin film), has good storage stability, has high sensitivity and long-term light resistance, and can provide a good resist pattern shape. The composition for forming an underlayer film for lithography according to this embodiment can be free of a silicon-containing compound.

[0272] The composition for forming an underlayer film for lithography of the present embodiment is applicable to a wet process, and can realize a composition for forming an underlayer film for lithography that is useful for forming a photoresist underlayer film that is excellent in heat resistance, adhesion, step filling properties, and especially flatness. And, since this composition for forming an underlayer film for lithography uses a compound having a specific structure that can relatively increase the crosslink density and has high solvent solubility, deterioration of the film during baking is suppressed, and an underlayer film that is also excellent in etching resistance against fluorine gas-based plasma etching and the like can be formed. Furthermore, since the composition for forming an underlayer film for lithography of the present embodiment is excellent in adhesion to the resist layer, an excellent resist pattern can be formed. Since the composition for forming an underlayer film for lithography of the present embodiment is particularly excellent in heat resistance, step filling properties, and flatness, it can be used, for example, as a composition for forming a resist underlayer film provided at the bottom layer of a plurality of resist layers. However, the resist underlayer film formed using the composition for forming an underlayer film for lithography of the present embodiment may further include another resist underlayer between the substrate.

[0273] The composition for forming an underlayer film for lithography according to the present embodiment may further contain a solvent, an acid crosslinking agent, etc., in addition to the acid generator according to the present embodiment. In addition, as optional components, a basic compound, water, an alcohol, a curing catalyst, etc. may be contained. From the viewpoint of coatability and quality stability, the content of the acid generator according to the present embodiment in the composition for forming an underlayer film for lithography is preferably 0.001 to 49 mass%, more preferably 1 to 40 mass%, and particularly preferably 3 to 30 mass%.

[0274] -solvent- As the solvent used in this embodiment, any known solvent can be used as appropriate as long as it dissolves at least the acid generator according to this embodiment. For example, the solvents disclosed in WO 2017 / 188451 can be used.

[0275] The content of the solvent is not particularly limited, but from the viewpoint of solubility and film formation, it is preferably 100 to 10,000 parts by mass, more preferably 200 to 5,000 parts by mass, and even more preferably 200 to 1,000 parts by mass, relative to 100 parts by mass of the total solid content of the composition for forming an underlayer film for lithography.

[0276] -Acid crosslinking agent- As described above, the composition for forming an underlayer film for lithography according to the present embodiment may contain an acid crosslinking agent as necessary from the viewpoint of suppressing intermixing. Examples of the acid crosslinking agent that can be used in the present embodiment include, for example, melamine compounds, epoxy compounds, guanamine compounds, glycoluril compounds, urea compounds, thioepoxy compounds, isocyanate compounds, azide compounds, and compounds containing double bonds such as alkenyl ether groups, and having at least one group selected from a methylol group, an alkoxymethyl group, and an acyloxymethyl group as a substituent (crosslinkable group), but are not particularly limited thereto. These acid crosslinking agents can be used alone or in combination of two or more. These may also be used as additives. Compounds containing a hydroxyl group can also be used as crosslinking agents. Specific examples of the acid crosslinking agent include those described in International Publication No. WO 2013 / 024779.

[0277] In the composition for forming an underlayer film for lithography of the present embodiment, the content of the acid crosslinker is not particularly limited, but is preferably 5 to 50 parts by mass, more preferably 10 to 40 parts by mass, based on 100 parts by mass of the total solid content of the composition for forming an underlayer film for lithography. By setting the content within the above preferred range, the occurrence of a mixing phenomenon with the resist layer tends to be suppressed, and the antireflection effect tends to be enhanced, and the film formability after crosslinking tends to be improved.

[0278] -Basic compounds- Furthermore, the composition for forming an underlayer film for lithography of this embodiment may contain a basic compound from the viewpoint of improving storage stability, etc.

[0279] The basic compound plays the role of a quencher for the acid to prevent the acid generated in a small amount from the acid generator from proceeding with the crosslinking reaction. Examples of such basic compounds include primary, secondary, or tertiary aliphatic amines, mixed amines, aromatic amines, heterocyclic amines, nitrogen-containing compounds having a carboxyl group, nitrogen-containing compounds having a sulfonyl group, nitrogen-containing compounds having a hydroxyl group, nitrogen-containing compounds having a hydroxyphenyl group, alcoholic nitrogen-containing compounds, amide derivatives, and imide derivatives, but are not limited thereto. Specific examples of basic compounds include those described in International Publication WO2013 / 024779.

[0280] In the composition for forming an underlayer film for lithography of the present embodiment, the content of the basic compound is not particularly limited, but is preferably 0.001 to 2 parts by mass, more preferably 0.01 to 1 part by mass, based on 100 parts by mass of the total solid content of the composition for forming an underlayer film for lithography. By setting the content within the above-mentioned preferred range, the storage stability tends to be improved without excessively impairing the crosslinking reaction.

[0281] In addition, the composition for forming an underlayer film for lithography of this embodiment may contain other resins or compounds for the purpose of imparting thermosetting properties or controlling absorbance. Examples of such other resins or compounds include naphthol resins, xylene resins, naphthol-modified resins, phenol-modified resins of naphthalene resins, polyhydroxystyrene, dicyclopentadiene resins, (meth)acrylates, dimethacrylates, trimethacrylates, tetramethacrylates, vinylnaphthalenes, polyacenaphthylenes, and other naphthalene rings, phenanthrenequinones, fluorenes, and other biphenyl rings, thiophenes, indenes, and other heterocyclic rings having heteroatoms, and resins not containing aromatic rings; rosin-based resins, cyclodextrins, adamantane (poly)ols, tricyclodecane (poly)ols, and derivatives thereof, and other resins or compounds containing alicyclic structures, and the like, but are not particularly limited thereto. In addition, the composition for forming an underlayer film for lithography of this embodiment may contain known additives. The known additives include, but are not limited to, ultraviolet absorbers, surfactants, colorants, and nonionic surfactants.

[0282] <Lithography Resist Underlayer Film and Pattern Forming Method> The resist underlayer film for lithography according to the second embodiment of the present invention is formed by using the composition for forming an underlayer film for lithography according to the second embodiment of the present invention. The pattern formed in this embodiment can be used as, for example, a resist pattern or a circuit pattern.

[0283] A pattern formation method according to a second embodiment of the present invention includes a step (A-1 step) of forming a resist underlayer film on a substrate using the composition for forming an underlayer film for lithography according to the second embodiment of the present invention, a step (A-2 step) of forming at least one photoresist layer on the resist underlayer film, and a step (A-3 step) of irradiating a predetermined region of the photoresist layer with radiation and developing the photoresist layer after forming the at least one photoresist layer in the A-2 step. Note that the "photoresist layer" refers to the outermost layer of the resist layer, i.e., the layer provided on the outermost side (opposite side from the substrate) of the resist layer.

[0284] Further, another pattern forming method according to the second embodiment of the present invention includes the steps of forming a resist underlayer film on a substrate using the composition for forming an underlayer film for lithography according to the second embodiment of the present invention (step B-1); forming a resist intermediate layer film on the underlayer film using a resist intermediate layer film material (e.g., a silicon-containing resist layer) (step B-2); forming at least one photoresist layer on the resist intermediate layer film (step B-3); forming at least one photoresist layer in the step B-3, irradiating a predetermined region of the photoresist layer with radiation, and developing the photoresist layer to form a resist pattern (step B-4); and forming a resist pattern in the step B-4, etching the resist intermediate layer film using the resist pattern as a mask, etching the underlayer film using the obtained intermediate layer film pattern as an etching mask, and etching the substrate using the obtained underlayer film pattern as an etching mask to form a pattern on the substrate (step B-5).

[0285] The resist underlayer film for lithography of the present embodiment may be formed by any known method, as long as it is formed from the composition for forming an underlayer film for lithography of the present embodiment. For example, the composition for forming an underlayer film for lithography of the present embodiment is applied to a substrate by a known coating method or printing method such as spin coating or screen printing, and then the organic solvent is removed by volatilization, to form a resist underlayer film.

[0286] When forming the resist underlayer film, it is preferable to perform a bake treatment in order to suppress the occurrence of a mixing phenomenon with the upper resist layer (for example, a photoresist layer or a resist intermediate layer film) and to promote a crosslinking reaction. In this case, the bake temperature is not particularly limited, but is preferably in the range of 80 to 450°C, more preferably 200 to 400°C. In addition, the bake time is also not particularly limited, but is preferably in the range of 10 seconds to 300 seconds. The thickness of the resist underlayer film can be appropriately selected depending on the required performance, and is not particularly limited, but is usually preferably about 30 to 20,000 nm, more preferably 50 to 15,000 nm.

[0287] After preparing a resist underlayer film on a substrate, a resist intermediate layer film can be provided between the photoresist layer and the resist underlayer film.For example, in the case of a two-layer process, a silicon-containing resist layer or a monolayer resist made of a normal hydrocarbon can be provided as a resist intermediate layer film on the resist underlayer film.In addition, for example, in the case of a three-layer process, it is preferable to prepare a silicon-containing intermediate layer between the resist intermediate layer film and the photoresist layer, and further a silicon-free monolayer resist layer on the silicon-containing intermediate layer.The photoresist material for forming the photoresist layer, the resist intermediate layer, and the resist layer provided between these layers can be known.

[0288] For example, from the viewpoint of oxygen gas etching resistance, a silicon-containing resist material for a two-layer process is preferably a positive photoresist material that uses a silicon atom-containing polymer such as a polysilsesquioxane derivative or a vinylsilane derivative as a base polymer, and further contains an organic solvent and, if necessary, a basic compound, etc. Here, the silicon atom-containing polymer may be a known polymer used in this type of resist material.

[0289] Also, for example, a polysilsesquioxane-based intermediate layer is preferably used as a silicon-containing intermediate layer for a three-layer process. By making the resist intermediate layer effective as an anti-reflection film, reflection tends to be effectively suppressed. For example, in a 193 nm exposure process, if a material containing many aromatic groups and having high substrate etching resistance is used as the resist underlayer film, the k value tends to be high and the substrate reflection tends to be high, but by suppressing reflection with the resist intermediate layer film, the substrate reflection can be reduced to 0.5% or less. As an intermediate layer having such an anti-reflection effect, but not limited to the following, for 193 nm exposure, a polysilsesquioxane that is crosslinked by acid or heat and has a light-absorbing group having a phenyl group or a silicon-silicon bond introduced therein is preferably used.

[0290] Also, a resist intermediate layer film formed by a Chemical Vapour Deposition (CVD) method can be used. As an intermediate layer having a high effect as an anti-reflection film produced by a CVD method, for example, a SiON film is known, but is not limited to the following. In general, the formation of a resist intermediate layer film by a wet process such as a spin coating method or a screen printing method is simpler and more cost-effective than the CVD method. The upper layer resist in the three-layer process may be either a positive type or a negative type, and the same resist as a commonly used single layer resist can be used.

[0291] Furthermore, the resist underlayer film of the present embodiment can be used as an anti-reflection film for a normal single-layer resist or as an underlayer material for suppressing pattern collapse. Since the resist underlayer film of the present embodiment has excellent etching resistance for underlayer processing, it can also be expected to function as a hard mask for underlayer processing.

[0292] When forming a resist layer using the above-mentioned known photoresist material, a wet process such as spin coating or screen printing is preferably used, as in the case of forming the resist underlayer film. After applying the resist material by spin coating or the like, pre-baking is usually performed, and this pre-baking is preferably performed at a baking temperature of 80 to 180° C. and for a baking time of 10 to 300 seconds. Thereafter, exposure is performed according to a conventional method, followed by post-exposure baking (PEB) and development to obtain a resist pattern. The thickness of each resist film is not particularly limited, but is generally preferably 30 nm to 500 nm, more preferably 50 nm to 400 nm.

[0293] The exposure light may be appropriately selected depending on the photoresist material used. In general, high energy rays having a wavelength of 300 nm or less, specifically, excimer lasers having wavelengths of 248 nm, 193 nm, and 157 nm, soft X-rays having wavelengths of 3 to 20 nm, electron beams, X-rays, and the like can be used.

[0294] The resist pattern formed by the above-mentioned method is one in which pattern collapse is suppressed by the resist underlayer film of the present embodiment. Therefore, by using the resist underlayer film of the present embodiment, a finer pattern can be obtained, and the exposure dose required to obtain the resist pattern can be reduced.

[0295] Next, etching is performed using the obtained resist pattern as a mask. Gas etching is preferably used for etching the resist underlayer film in the two-layer process. As the gas etching, etching using oxygen gas is suitable. In addition to oxygen gas, inert gases such as He and Ar, and CO, CO 2 , N.H. 3 , S.O. 2 , N 2 , NO 2 , H 2 It is also possible to add gases such as CO, CO without using oxygen gas. 2 , N.H. 3 , N2 , NO 2 , H 2 Gas etching can also be performed using only the gas, and the latter gas is preferably used to protect the sidewalls of the pattern to prevent undercutting of the sidewalls.

[0296] On the other hand, gas etching is also preferably used for etching the middle layer (the layer located between the photoresist layer and the resist underlayer film) in the three-layer process. The gas etching can be the same as that described in the two-layer process. In particular, the processing of the middle layer in the three-layer process is preferably performed using a fluorocarbon-based gas with the resist pattern as a mask. Thereafter, the resist underlayer film can be processed by, for example, performing oxygen gas etching with the middle layer pattern as a mask as described above.

[0297] Here, when forming an inorganic hard mask intermediate layer film as the intermediate layer, a silicon oxide film, a silicon nitride film, or a silicon oxynitride film (SiON film) is formed by a CVD method, an ALD method, or the like. The method for forming the nitride film is not limited to the following, but for example, the methods described in JP-A-2002-334869 and WO2004 / 066377 can be used. A photoresist film can be formed directly on such an intermediate layer film, but an organic anti-reflective coating (BARC) may be formed on the intermediate layer film by spin coating, and a photoresist film may be formed on the organic anti-reflective coating (BARC).

[0298] As the intermediate layer, a polysilsesquioxane-based intermediate layer is also preferably used. By making the resist intermediate layer have an effect as an anti-reflection film, reflection tends to be effectively suppressed. The specific material of the polysilsesquioxane-based intermediate layer is not limited to the following, but for example, those described in JP-A-2007-226170 and JP-A-2007-226204 can be used.

[0299] Etching of the substrate can also be carried out by a conventional method. For example, when the substrate is SiO 2For SiN, etching can be performed mainly with fluorocarbon-based gases, while for p-Si, Al, and W, etching can be performed mainly with chlorine- or bromine-based gases. When etching a substrate with fluorocarbon-based gases, the silicon-containing resist of a two-layer resist process and the silicon-containing intermediate layer of a three-layer process are stripped at the same time as the substrate is processed. On the other hand, when etching a substrate with chlorine- or bromine-based gases, the silicon-containing resist layer or silicon-containing intermediate layer is stripped separately, and generally, dry etching stripping with fluorocarbon-based gases is performed after substrate processing.

[0300] The resist underlayer film of the present embodiment has excellent etching resistance for these substrates. The substrate may be appropriately selected from known substrates, and is not particularly limited to Si, α-Si, p-Si, SiO 2 , SiN, SiON, W, TiN, Al, etc. The substrate may be a laminate having a film to be processed (substrate to be processed) on a base material (support). Examples of such a film to be processed include Si, SiO 2 Examples of low-k films include various low-k films and stopper films thereof such as SiON, SiN, p-Si, α-Si, W, W-Si, Al, Cu, and Al-Si, and usually, a film made of a material different from that of the base material (support) is used. The thickness of the substrate or film to be processed is not particularly limited, but is usually preferably about 50 nm to 10,000 nm, and more preferably 75 nm to 5,000 nm.

[0301] The resist underlayer film of this embodiment has excellent flatness and embedding ability in a substrate having steps.As an evaluation method of embedding flatness, a known method can be appropriately selected and used, and is not particularly limited.For example, the solution of each compound adjusted to a predetermined concentration is applied by spin coating on a silicon substrate having steps, and the solvent is removed and dried at 110°C for 90 seconds, and the underlayer film is formed to a predetermined thickness, and then the difference (ΔT) in the underlayer film thickness between the line & space region and the open region without pattern is measured by an ellipsometer after baking for a predetermined time at a temperature of about 240 to 300°C, and the embedding flatness in a substrate having steps can be evaluated.

[0302] (Composition for forming optical article and optical article) The composition for forming an optical component according to this embodiment is a composition for forming an optical component that contains the acid generator according to this embodiment. The composition for forming an optical component is usefully used for forming an optical article. The composition for forming an optical component according to this embodiment contains the acid generator according to this embodiment, so that the optical article obtained can be expected to have a high refractive index and high transparency, and further, storage stability, structure forming ability (film forming ability), and heat resistance can be expected.

[0303] From the viewpoints of miniaturization of optical components and improvement of light collection efficiency, the refractive index of the optical article is preferably 1.65 or more, more preferably 1.70 or more, and even more preferably 1.75 or more. From the viewpoints of improvement of light collection efficiency, the transparency of the optical article is preferably 70% or more, more preferably 80% or more, and even more preferably 90% or more.

[0304] The method for measuring the refractive index is not particularly limited, and known methods are used. For example, spectroscopic ellipsometry, minimum deviation method, critical angle method (Abbe method, Pulfrich method), V-block method, prism coupler method, and immersion method (Becke line method) are included. The method for measuring the transparency is not particularly limited, and known methods are used. For example, spectrophotometer and spectroscopic ellipsometry are included.

[0305] Furthermore, the cured product according to this embodiment, which is obtained by curing the composition for forming an optical component and forms an optical article, can be a three-dimensional crosslinked product, and coloring is suppressed by a wide range of heat treatments from low temperature to high temperature, and it is expected to have a high refractive index and high transparency.

[0306] The composition for forming an optical part of the present embodiment may further contain a solvent in addition to the acid generator according to the present embodiment. The solvent may be the same as the solvent used in the composition for forming an underlayer film for lithography of the present embodiment described above.

[0307] In the optical component forming composition of this embodiment, the relationship between the amount of solid components and the amount of solvent is not particularly limited, but is preferably 1 to 80 mass% solid components and 20 to 99 mass% solvent, more preferably 1 to 50 mass% solid components and 50 to 99 mass% solvent, even more preferably 2 to 40 mass% solid components and 60 to 98 mass% solvent, and particularly preferably 2 to 10 mass% solid components and 90 to 98 mass% solvent, relative to 100 mass% total of solid components and solvent. The optical component forming composition of this embodiment may not contain a solvent.

[0308] The composition for forming an optical component of this embodiment may contain, as other solid components, at least one selected from the group consisting of an acid crosslinking agent (G), an acid diffusion controller (E) and other components (F).

[0309] In the composition for forming an optical component of this embodiment, the content of the acid generator of this embodiment is not particularly limited, but is preferably 0.001 to 49 mass % of the total mass of solid components (the sum of optionally used solid components such as the acid generator of this embodiment, the acid crosslinking agent (G), the acid diffusion controller (E) and other components (F), the same applies below), more preferably 1 to 40 mass %, even more preferably 3 to 30 mass %, and particularly preferably 3 to 20 mass %.

[0310] -Acid crosslinker (G)- When the optical component forming composition of the present embodiment is used as an additive for increasing the strength of the structure, it is preferable to contain one or more acid crosslinkers (G). The acid crosslinker (G) is not particularly limited, and may be the same as the acid crosslinker (G) that can be contained in the composition for forming an underlayer film for lithography of the present embodiment described above.

[0311] In the optical component forming composition of this embodiment, the content of the acid crosslinking agent (G) is preferably 0.5 to 49 mass % of the total mass of the solid components, more preferably 0.5 to 40 mass %, further preferably 1 to 30 mass %, and particularly preferably 2 to 20 mass %. The content of the acid crosslinking agent (G) of 0.5 mass % or more is preferable because it can improve the effect of suppressing the solubility of the optical component forming composition in an organic solvent, while the content of 49 mass % or less is preferable because it can suppress the deterioration of the heat resistance of the optical component forming composition.

[0312] The content of at least one compound selected from the acid crosslinkers (G1), (G2), and (G3) in the acid crosslinker (G) is not particularly limited, and may be in various ranges depending on the type of substrate used when forming the composition for forming an optical component, etc.

[0313] -Acid diffusion control agent (E)- The optical component forming composition of this embodiment may contain an acid diffusion controller (E) that has the effect of controlling the diffusion of the acid generated from the acid generator in the optical component forming composition to prevent undesirable chemical reactions. By using such an acid diffusion controller (E), the storage stability of the optical component forming composition is improved. In addition, the resolution is further improved, and the change in line width of the structure due to the variation in the delay time after heating can be suppressed, resulting in extremely excellent process stability. The acid diffusion controller (E) is not particularly limited, and can be the same as the acid diffusion controller (E) that can be contained in the composition for forming an underlayer film for lithography of this embodiment described above.

[0314] The content of the acid diffusion controller (E) is preferably 0.001 to 49% by mass, more preferably 0.01 to 10% by mass, further preferably 0.01 to 5% by mass, and particularly preferably 0.01 to 3% by mass, based on the total mass of the solid components. When the content of the acid diffusion controller (E) is within the above range, the deterioration of resolution, pattern shape, dimensional fidelity, etc. can be further suppressed. Furthermore, even if the waiting time from electron beam irradiation to heating after radiation irradiation is long, the shape of the upper layer part of the pattern does not deteriorate. Furthermore, when the content of the acid diffusion controller (E) is 10% by mass or less, the deterioration of sensitivity, developability of unexposed parts, etc. can be prevented. Furthermore, by using such an acid diffusion controller, the storage stability of the composition for forming an optical component is improved, and the resolution is improved, and the line width change of the composition for forming an optical component due to the variation of the waiting time before radiation irradiation and the waiting time after radiation irradiation can be suppressed, resulting in extremely excellent process stability.

[0315] -Other ingredients (F)- To the composition for forming an optical part of this embodiment, one or more of various additives such as a dissolution promoter, a dissolution controller, a sensitizer, a surfactant, and an organic carboxylic acid or a phosphorus oxo acid or a derivative thereof can be added as other components (F) as necessary within a range that does not impair the object of this embodiment. The other components (F) can be, for example, the same as the other components (F) that can be included in the composition for forming an underlayer film for lithography of this embodiment described above.

[0316] The total content of the other components (F) is preferably from 0 to 49 mass % of the total mass of the solid components, more preferably from 0 to 5 mass %, even more preferably from 0 to 1 mass %, and particularly preferably 0 mass %.

[0317] In the composition for forming an optical part of this embodiment, the content of the acid generator, acid diffusion controller (E) and other components (F) according to this embodiment (acid generator / acid diffusion controller (E) / other components (F)) is preferably 10-90 / 1-30 / 0-10 in mass % based on solids. The content ratio of each component is selected from each range so that the sum of the components is 100 mass %. The above content ratios provide even better performance such as sensitivity, resolution and developability.

[0318] The method for preparing the composition for forming an optical component of the present embodiment is not particularly limited, and examples thereof include a method in which each component is dissolved in a solvent at the time of use to form a homogeneous solution, and then, if necessary, filtered through a filter with a pore size of, for example, about 0.2 μm.

[0319] The composition for forming an optical component according to the present embodiment may contain other resins to the extent that the object of the present invention is not impaired. The other resins are not particularly limited, and examples thereof include novolac resins, polyvinylphenols, polyacrylic acid, polyvinyl alcohol, styrene-maleic anhydride resins, and polymers containing acrylic acid, vinyl alcohol, or vinylphenol as monomer units, or derivatives thereof. The content of the resin is not particularly limited, and is appropriately adjusted according to the type of acid generator according to the present embodiment used.

[0320] The cured product of the present embodiment is obtained by curing the optical component forming composition and can be used as various resins. These cured products can be used for various purposes as highly versatile materials that impart various properties such as a high melting point, a high refractive index, and high transparency. The cured products can be obtained by applying a known method corresponding to each composition, such as irradiating the composition with light or heating it.

[0321] These cured products can be used as various synthetic resins such as epoxy resins, polycarbonate resins, and acrylic resins, and further, taking advantage of their functionality, can be used as optical parts such as lenses and optical sheets. EXAMPLES

[0322] The present embodiment will be described in more detail below with reference to examples, although the present invention is not limited to these examples.

[0323] [Example 1] (Synthesis of BEPMS) As shown in the formula below, the following BEPMS was synthesized.

[0324] [ka]

[0325] Specifically, BEPMS was synthesized by the following method. 4-Methylthiophenol (22 mmol: 3.120 g) and potassium carbonate (85 mmol: 11.71 g) were dissolved in acetone (75 ml) in a 200 ml eggplant flask and stirred at 0°C under nitrogen for 15 minutes. Dibromoethane (69 mmol: 12.90 g) was then added dropwise and reacted at 50°C for 24 hours. The resulting substance was filtered through a membrane and placed in an evaporator to remove the solvent, yielding a white solid (BEPMS). NMR and IR were used for structural analysis, and TLC and melting point measurements were also performed. The product was then purified by silica gel column chromatography using chloroform as a developing solvent. IR and NMR were used for structural analysis, and the melting point was also measured. The melting point was 64-66°C, and the yield was 1.43 g, a 27.6% yield. BEPMS 1 The H-NMR spectrum is shown in Figure 1.

[0326] (Synthesis of MTP-BEPMS) As shown in the formula below, the following MTP-BEPMS was synthesized.

[0327] [ka]

[0328] Specifically, MTP-BEPMS was synthesized by the following method. In a test tube, 4,4',4''-trihydroxy-triphenylmethane (MTP) (0.5 mmol: 0.1461 g), cesium carbonate (2.0 mmol: 0.651 g), and TBAB (0.2 mmol: 0.0644) as a phase transfer catalyst were dissolved in DMF (5 ml) and stirred at 80°C for 30 minutes. Then, the BEPMS (2.0 mmol: 0.493 g) was dissolved in DMF (2 ml) and dropped, and reacted at 80°C for 24 hours. The obtained substance was reprecipitated with 1N HCl and filtered through Kiriyama filter to obtain a solid, which was dissolved in chloroform and reprecipitated with hexane. The obtained substance was filtered through a membrane to purify an orange solid (MTP-BEPMS). NMR and IR were used for structural analysis, and melting point was also measured. The yield was 0.336 g, the yield was 85%, and the melting point was 112-113°C. 1 The H-NMR spectrum is shown in Figure 2.

[0329] (Synthesis of MTP-BEPMS ionic compounds) The following MTP-BEPMS ionic compounds were synthesized as shown in the formula below.

[0330] [ka]

[0331] Specifically, the MTP-BEPMS ionic compound was synthesized by the following method. The MTP-BEPMS (0.1 mmol: 0.0791 g) and AgCF 3 SO 3 (0.4mmol: 0.1027g) was added, degassed and replaced with nitrogen, then iodomethane (0.4mmol: 0.025ml) and acetonitrile (5ml) as a solvent were added and reacted at room temperature for 24 hours in the dark. The resulting substance was filtered through a membrane, and the filtrate was put into an evaporator to remove the solvent, yielding a brown viscous solid. It was then dissolved in acetone and reprecipitated with diethyl ether to refine the brown viscous solid (MTP-BEPMS ionic compound). NMR and IR were used for structural analysis. The MTP-BEPMS ionic compound1 The H-NMR spectrum is shown in Figure 3.

[0332] [Examples 2 to 7] Instead of 4,4',4''-trihydroxy-triphenylmethane (MTP) used in Example 1, the compounds shown in Table 1 were used for synthesis in the same manner, and the ionic compounds shown in Table 1 were obtained. XBisN-1 was obtained in the same manner as in Synthesis Example 15 of WO 2013 / 024778. BiF-1 was obtained in the same manner as in Synthesis Example 1 of WO 2015 / 137485. NF71A7 was obtained in the same manner as in the production of riphenol (B) described in WO 2019 / 151403.

[0333] [Table 1]

[0334] [ka]

[0335] [ka]

[0336] [ka]

[0337] [ka]

[0338] [ka]

[0339] [ka]

[0340] [ka]

[0341] [ka]

[0342] [ka]

[0343] [ka]

[0344] [ka]

[0345] [ka]

[0346] [Example 8] (Synthesis of BHPMS) As shown in the formula below, the following BHPMS was synthesized.

[0347] [ka]

[0348] Specifically, BHPMS was synthesized by the following method. 4-Methylthiophenol (7 mmol: 0.98 g) and potassium carbonate (7 mmol: 0.96 g) were dissolved in THF (30 ml) in a 100 ml eggplant flask and stirred under nitrogen reflux for 2 hours. 1,6-dibromohexane (35 mmol: 8.53 g) was then added and reacted at 70°C for 24 hours. The resulting substance was extracted using hydrochloric acid and chloroform, and the organic layer was concentrated using an evaporator. Then, reprecipitation was performed using methanol as a poor solvent to obtain a white solid (BHPMS). The product was then purified by silica gel column chromatography. IR and NMR were used for structural analysis, and melting point measurements were also performed. The melting point was 71-72°C, and the yield was 0.7 g, giving a yield of 33%. The BHPMS 1 The H-NMR spectrum is shown in Figure 4.

[0349] (Synthesis of MTP-BHPMS) As shown in the formula below, the following MTP-BHPMS was synthesized.

[0350] [ka]

[0351] Specifically, MTP-BHPMS was synthesized by the following method. In a 50 mL eggplant flask, 4,4',4''-trihydroxy-triphenylmethane (MTP) (0.5 mmol: 0.1461 g), potassium carbonate (2.0 mmol: 0.651 g), and TBAB (0.2 mmol: 0.0644) as a phase transfer catalyst were dissolved in DMF (7 ml) and stirred at 80 ° C for 30 minutes. Then, the BHPMS (2.0 mmol: 0.493 g) was dissolved in DMF (3 ml) and dropped, and reacted at 80 ° C for 24 hours. The obtained substance was reprecipitated with 1N HCl and filtered through Kiriyama filter to obtain a solid, which was dissolved in chloroform and reprecipitated with hexane. The obtained substance was recovered by decantation to obtain a red solid (MTP-BHPMS). NMR and IR were used for structural analysis. The yield was 0.85 g and the yield was 88%. MTP-BHPMS 1 The H-NMR spectrum is shown in Figure 5.

[0352] (Synthesis of MTP-BHPMS ionic compounds) The following MTP-BHPMS ionic compound was synthesized as shown in the formula below.

[0353] [ka]

[0354] Specifically, the MTP-BHPMS ionic compound was synthesized by the following method. The MTP-BHPMS (0.83 mmol: 0.80 g) and AgCF 3 SO 3 (3mmol: 0.77g) was added, degassed and replaced with nitrogen, then iodomethane (3mmol: 0.186ml) and acetonitrile (5ml) as a solvent were added and reacted at room temperature for 24 hours in the dark. The resulting substance was filtered through a membrane, and the filtrate was put into an evaporator to remove the solvent, yielding a brown viscous solid. It was then dissolved in acetone and reprecipitated with diethyl ether to refine a red viscous solid (MTP-BHPMS ionic compound). NMR and IR were used for structural analysis. The MTP-BHPMS ionic compound 1 The H-NMR spectrum is shown in Figure 6.

[0355] [Heat resistance evaluation] The thermal decomposition onset temperatures of the ionic compounds obtained in Examples 1 to 8 were measured using a thermogravimetric analyzer (TGA). The measurement results are shown in Table 2.

[0356] [Table 2]

[0357] As shown in Table 2, all of the ionic compounds obtained in Examples 1 to 8 showed high thermal decomposition temperatures. Therefore, it was found that the compound according to this embodiment has high heat resistance. Since the compound according to this embodiment has high heat resistance, the bake temperature during film formation can be increased, which is advantageous for planarization. In addition, since a film with high hardness can be obtained, when the compound is used as a resist or an underlayer film to form a pattern, a pattern with high resolution can be maintained.

[0358] [Comparative Example 1] (Synthesis of AC-1) A resin, AC-1, was synthesized having the structure shown in the following formula:

[0359] [ka]

[0360] Specifically, AC-1 was synthesized by the following method. 4.15 g of 2-methyl-2-methacryloyloxyadamantane, 3.00 g of methacryloyloxy-γ-butyrolactone, 2.08 g of 3-hydroxy-1-adamantyl methacrylate, and 0.38 g of azobisisobutyronitrile were dissolved in 80 mL of tetrahydrofuran to obtain a reaction solution. The reaction solution was polymerized for 22 hours under a nitrogen atmosphere while maintaining the reaction temperature at 63° C., and then the reaction solution was dropped into 400 mL of n-hexane. The obtained resin was coagulated and purified, and the obtained white powder was filtered and then dried overnight at 40° C. under reduced pressure to obtain AC-1.

[0361] [Sensitivity evaluation] The ionic compounds obtained in Examples 1 to 8 were dissolved in propylene glycol monomethyl ether to form a 3% solution. This solution was dropped onto a silicon wafer and applied at 3300 rpm for 30 seconds using a spin coater. It was then baked at 90 °C for 60 seconds to obtain a thin film with a thickness of 50 to 80 nm. After measuring the film thickness, it was irradiated with EUV using a "EUV exposure apparatus (EUVES-7000)" manufactured by Resotec Japan, and developed by immersing it in ion-exchanged water for 30 seconds. The EUV exposure dose at which the film thickness became zero was defined as the sensitivity. Also, using the resin AC-1 obtained in Comparative Example 1, instead of immersing it in ion-exchanged water for 30 seconds, it was developed by immersing it in a 2.38 mass% TMAH alkaline developer for 60 seconds, and the sensitivity was measured in the same manner. The results are shown in Table 3.

[0362]

Table 3

[0363] From the results in Table 3, it was found that the compound according to this embodiment has high sensitivity and can be used as a high-sensitivity resist. Since the compound according to this embodiment can obtain high sensitivity without adding an acid generator, it is not necessary to utilize the mechanism of chemical amplification accompanied by the diffusion of acid, which causes roughness, and a high-resolution pattern can be obtained when used as a resist.

[0364] [Heat resistance evaluation when used as an acid generator] The ionic compounds obtained in Examples 1 to 8, ditertiary butyldiphenyliodonium nonafluoromethanesulfonate (DTDPI) manufactured by Midori Chemical Co., Ltd., XBisN-1 used as a raw material in Example 5, Niclac MX270 (Niclac) manufactured by Sanwa Chemical Co., Ltd., and propylene glycol monomethyl ether acetate (PGMEA) were blended in the amounts shown in Table 4 to prepare a composition. In Table 4, the unit of the numerical values in parentheses is "parts by mass".

[0365]

Table 4

[0366] The composition was applied by spin coating onto a silicon wafer with a thickness of 300 nm, and baked at 150° C. for 60 seconds to form a film with a thickness of 100 nm. The film was further baked at 400° C. for 60 seconds, and the reduction rate of the film thickness was measured. Films with a reduction rate of the film thickness of less than 40% were rated as A, films with a reduction rate of 40% or more but less than 60% were rated as B, and films with a reduction rate of 60% or more were rated as C. The evaluation results are shown in Table 5.

[0367] [Table 5]

[0368] From Table 5, it is clear that when the compound according to this embodiment is used as an acid generator, a film with high heat resistance can be formed.

[0369] For the above reasons, the compound according to this embodiment can be suitably used in resist films, underlayer films, and optical articles.

Claims

1. A compound represented by the following formula (P-1): 【Chemistry 1】 (In formula (P-1), OR TS is a group represented by the following formula (TS-0).) 【Chemistry 2】 (In formula (TS-0), R 1 is an alkyleneoxy group having 2 to 6 carbon atoms, R 2 and R 3 are methyl groups, and An − is CF 3 SO 3 − .)

2. A compound represented by the following formula (P-0A): 【Chemistry 3】 (In formula (P-0A), X is uncrosslinked, R 4 is —C(CH 3 ) 2 —, —C(CF 3 ) 2 —, or —O—, R 5 and R 6 are groups represented by the following formula (TS-0), m 1 and m 2 are 1, p 1 and p 2 are 0, and n 2 is 1.) 【Chemistry 4】 (In formula (TS-0), R 1 is an alkyleneoxy group having 2 to 6 carbon atoms, R 2 and R 3 are methyl groups, and An − is CF 3 SO 3 − .)

3. A compound represented by the following formula: 【Chemistry 5】 (In the formula, OR TS is a group represented by the following formula (TS-0).) 【Chemistry 6】 (In formula (TS-0), R 1 is an alkyleneoxy group having 2 to 6 carbon atoms, R 2 and R 3 are methyl groups, and An − is CF 3 SO 3 − .)

4. A compound represented by the following formula: 【Chemistry 7】 (In the formula, OR TS is a group represented by the following formula (TS-0).) 【Chemistry 8】 (In formula (TS-0), R 1 is an alkyleneoxy group having 2 to 6 carbon atoms, R 2 and R 3 are methyl groups, and An − is CF 3 SO 3 − .)

5. A compound represented by the following formula: 【Chemistry 9】 (In the formula, OR TS is a group represented by the following formula (TS-0).) 【Chemistry 10】 (In formula (TS-0), R 1 is an alkyleneoxy group having 2 to 6 carbon atoms, R 2 and R 3 are methyl groups, and An − is CF 3 SO 3 − .)

6. A composition comprising a compound according to any one of claims 1 to 5.

7. The composition of claim 6 further comprising a solvent.

8. The composition according to claim 6 or 7, further comprising an acid generator.

9. The composition of any one of claims 6 to 8, further comprising an acid crosslinker.

10. A resist film formed from the composition according to claim 6 .

11. A film forming step of forming a film on a substrate using the composition according to any one of claims 6 to 9; an exposure step of exposing the film to light; a developing step for developing the film exposed in the exposure step to form a pattern; A pattern forming method comprising the steps of:

12. An acid generator comprising the compound according to claim 1 .

13. A composition comprising the acid generator of claim 12.

14. The composition of claim 13 further comprising a solvent.

15. 15. The composition of claim 13 or 14, further comprising an acid crosslinker.

16. The composition according to claim 13 , which is a composition for forming an underlayer film for lithography.

17. 17. The composition of claim 16 further comprising a silicon-containing compound.

18. An underlayer film formed from the composition of claim 16 or 17.

19. forming a resist underlayer film using the composition according to claim 16 or 17; forming at least one photoresist layer on the resist underlayer film; irradiating predetermined areas of the photoresist layer with radiation and developing; A pattern forming method comprising the steps of:

20. The composition according to any one of claims 13 to 15, which is a composition for forming an optical article.

21. 21. An optical article formed from the composition of claim 20.

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