Quality management system, object management system, and object management method

Abstract

To perform strict management of quality according to a period.SOLUTION: A quality management system has: an acquisition unit 100 that acquires concentration period information indicating a period during which impurities included in a cleaning liquid for cleaning an object are concentrated in concentration means; a database 200 that stores object identification information applied uniquely to the object and cleaning period information indicating a period during which the object is cleaned in association with each other as association information; and a specification unit 300 that, based on the concentration period information acquired by the acquisition unit 100 and the association information stored in the database 200, specifies an object that is cleaned with the use of a cleaning liquid corresponding to the cleaning liquid supplied to the concentration means in the concentration period indicated by the concentration period information.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a quality management system, an object management system, and an object management method.

Background Art

[0002] In recent years, electronic components such as semiconductor devices have been used in various scenarios, and are advancing in high functionality and high integration. Needless to say, it is necessary to ensure high quality in such electronic components. Generally, in order to supply electronic components that meet the needs to the market, precise design processes, manufacturing processes including cleaning processes using ultrapure water, strict inspection processes, etc. are carried out. For example, the relationship between the processing conditions in each process and the quality management conditions in the subsequent process is stored in advance, and based on the stored relationship, the quality management conditions corresponding to the detected processing conditions are selected, and based on the selected quality management conditions and the detected quality, a method for determining the quality of a semiconductor device has been considered (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Quality management in the technology as described above is quality management for each process. Therefore, there is a problem that it is difficult to strictly manage the quality according to the manufacturing period.

[0005] An object of the present invention is to provide a quality management system, an object management system, and an object management method capable of strictly managing the quality according to the period.

Means for Solving the Problems

[0006] The quality management system of the present invention an acquisition unit that acquires concentration period information indicating a period during which impurities contained in a cleaning liquid for cleaning an object are concentrated by a concentration means; a database that stores, as association information, object identification information uniquely assigned to the object and cleaning period information indicating a period during which the object was cleaned in association with each other; Based on the concentration period information acquired by the acquisition unit and the association information stored in the database, an object cleaned with a cleaning liquid corresponding to the cleaning liquid supplied to the concentration means during the concentration period indicated by the concentration period information is identified. It has a specific part.

[0007] In addition, the object management system of the present invention a liquid quality measurement unit that measures the liquid quality of a cleaning liquid for cleaning an object; a regulating valve provided in a flow path for supplying the cleaning liquid to a cleaning tank; It has an opening / closing control unit that controls the opening and closing of the regulating valve based on the liquid quality measured by the liquid quality measurement unit.

[0008] In addition, the object management method of the present invention measures the liquid quality of a cleaning liquid for cleaning an object, Based on the measured liquid quality, the supply of the cleaning liquid to a cleaning tank for cleaning the object is controlled by using a regulating valve provided in a flow path for supplying the cleaning liquid to the cleaning tank.

Effects of the Invention

[0009] In the present invention, strict management of quality according to the period can be performed.

Brief Description of the Drawings

[0010]

Figure 1

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Embodiments for Carrying Out the Invention

[0011] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0012] FIG. 1 is a diagram showing an embodiment of the quality management system of the present invention. As shown in FIG. 1, the quality management system in this embodiment includes an acquisition unit 100, a database 200, a specifying unit 300, and an output unit 400.

[0013] The acquisition unit 100 acquires concentration period information indicating a period during which a cleaning liquid for cleaning an object is concentrated by a concentration means that concentrates impurities contained in the cleaning liquid. Here, the object is, for example, an electronic component such as a semiconductor device. Further, the concentration means is an adsorbent that adsorbs metal impurities such as metal ions as impurities, and examples thereof include a monolithic organic porous body. The concentration period information is recorded and managed for each adsorbent. The concentration period information is, for example, adsorbent identification information previously given uniquely to the adsorbent through which the cleaning liquid has passed, and concentration period information indicating the period (date and time) during which the cleaning liquid has passed through the adsorbent, which are stored in a database (not shown, which may be the database 200 shown in FIG. 1) as a liquid passage record. The acquisition unit 100 may acquire the concentration period information from a database in which the liquid passage record is stored, or may acquire it based on an external operation (input) by an operator. Note that the cleaning liquid supplied to the concentration means to concentrate impurities is at least a part of the cleaning liquid for cleaning the object, and it is not necessary to supply all of the cleaning liquid for cleaning the object. Further, the concentration means may be a means using a method of concentrating an analyte substance by providing a reverse osmosis membrane device or an electrodeionization device as described in JP-A-2004-77299 in multiple stages, a method using a permeation membrane as described in WO 2012 / 073566, or a method of concentrating on the surface of a sample as described in JP-A-2004-101408.

[0014] The database 200 stores, as association information, object identification information given uniquely to an object and cleaning period information indicating the period during which the object has been cleaned in association with each other.

[0015] FIG. 2 is a diagram showing an example of the association information stored in the database 200 shown in FIG. 1. As shown in FIG. 2, the association information stored in the database 200 shown in FIG. 1 is information in which object identification information and cleaning period information are associated. The object identification information is identification information previously assigned uniquely to the object to be cleaned using the cleaning liquid. By using this object identification information, the object can be identified. The object identification information only needs to be able to distinguish the objects from each other. For example, it may be a combination of a plurality of alphabets and numbers. The cleaning period information is information indicating the year, month, day, and time of the start of cleaning and the year, month, day, and time of the end of cleaning so that the period (for example, time zone) during which the object was cleaned can be identified. For example, as shown in FIG. 2, the object identification information "A00010001" and the cleaning period information "2021 / 3 / 1 00:00:00~2021 / 3 / 5 24:00:00" are associated. This indicates that the object to which the object identification information "A00010001" is assigned was cleaned using the cleaning liquid from 0:00:00 on March 1, 2021 to 24:00:00 on March 5, 2021. Also, the object identification information "A00020001" and the cleaning period information "2021 / 3 / 6 00:00:00~2021 / 3 / 10 24:00:00" are associated. This indicates that the object to which the object identification information "A00020001" is assigned was cleaned using the cleaning liquid from 0:00:00 on March 6, 2021 to 24:00:00 on March 10, 2021. Also, the object identification information "A00030001" and the cleaning period information "2021 / 3 / 11 00:00:00~2021 / 3 / 15 24:00:00" are associated. This indicates that the object to which the object identification information "A00030001" is assigned was cleaned using the cleaning liquid from 0:00:00 on March 11, 2021 to 24:00:00 on March 15, 2021. Also, the object identification information "A00040001" and the cleaning period information "2021 / 3 / 16 00:00:00~2021 / 3 / 20 24:00:00" are associated.This indicates that the object with the object identification information "A00040001" was washed using a cleaning liquid from 0:00:00 on March 16, 2021, to 24:00:00 on March 20, 2021. This association is stored in the database 200 based on an operation (input) by the operator after the cleaning of each object is completed. After the cleaning of each object is completed, information indicating the cleaning start time and information indicating the cleaning end time may be input and stored in the database 200. Information indicating the cleaning start time may be input and stored in the database 200 when the cleaning of each object is started, and information indicating the cleaning end time may be input and stored in the database 200 when the cleaning of each object is completed.

[0016] The specifying unit 300 specifies an object based on the concentration period information acquired by the acquisition unit 100 and the association information stored in the database 200. Specifically, the specifying unit 300 searches the database 200 for object identification information associated with cleaning period information indicating a cleaning period corresponding to the concentration period indicated by the concentration period information acquired by the acquisition unit 100, and specifies the object to which the searched object identification information is assigned. The relationship between the concentration period and the cleaning period depends on the distance (pipe distance) between the position where the acquisition unit 100 is arranged and the position where the object is cleaned in the system and the flow velocity (pipe flow velocity) in the pipe between them. For example, when the pipe distance is 100 m and the pipe flow velocity is 2 m / s, the cleaning period starts 50 seconds after the concentration period. That is, the specifying unit 300 calculates the cleaning period based on the period indicated by the concentration period information acquired by the acquisition unit 100 and the processing time obtained from the specifications of the system. Then, the specifying unit 300 searches the database 200 for object identification information associated with the calculated cleaning period using the cleaning period information indicating the calculated cleaning period as a search key to specify the object. Thereby, the specifying unit 300 specifies the object that was cleaned using the cleaning liquid corresponding to the cleaning liquid that was at least partially supplied to the concentration means during the concentration period indicated by the concentration period information acquired by the acquisition unit 100.

[0017] The output unit 400 outputs object identification information indicating the object identified by the specifying unit 300. The output unit 400 may display the object identification information or may transmit it to another device, and the output mode thereof is not limited.

[0018] The processing in the quality management system shown in FIG. 1 will be described below. FIG. 3 is a flowchart for explaining an example of the processing in the quality management system shown in FIG. 1. First, the acquisition unit 100 acquires concentration period information (step S1). The timing at which the acquisition unit 100 acquires the concentration period information may be a preset timing (for example, periodic), or may be a timing at which a request is received from the outside based on the results of water quality analysis continuously performed afterwards. The acquisition unit 100 may acquire the concentration period information from a database in which the concentration period information is stored, or may acquire the concentration period information based on an external operation (input). Further, the acquisition unit 100 may request the concentration period information from another device that can communicate with the acquisition unit 100, and receive and acquire the concentration period information transmitted from the other device.

[0019] Subsequently, the specifying unit 300 calculates a cleaning period corresponding to the concentration period indicated by the concentration period information acquired by the acquisition unit 100, and searches the database 200 for object identification information associated with the cleaning period information indicating the calculated cleaning period to specify the object (step S2). Then, the output unit 400 outputs object identification information indicating the object specified by the specifying unit 300 (step S3). The output unit 400 may output information that can recognize the object specified by the specifying unit 300, and is not limited to outputting the object identification information.

[0020] An application example of the quality control system of the present invention will be described below. FIG. 4 is a diagram showing a first form to which the quality control system of the present invention is applied. The form shown in FIG. 4 is a system in which ultrapure water as washing water is supplied to Wet washing machines 60-1 and 60-2 (use points), which are semiconductor washing devices, via a non-regenerative ion exchange device CP20 and an ultrafiltration membrane device UF30 in an ultrapure water production facility. The Wet washing machines 60-1 and 60-2 may be washing tanks. The ultrapure water supplied to CP20 is supplied from the pretreatment system of the ultrapure water production facility to the primary pure water production system, and is processed and supplied in the primary pure water production system. The broken line shown in FIG. 4 indicates a water flow path or a control signal path for collecting a part of the ultrapure water supplied to the use point to inspect the water quality of the ultrapure water as washing water. Further, a branch valve may be provided at a location where the washing water branches to the concentration / elution / recovery device 40, and the opening and closing of the valve may be controlled.

[0021] The concentration / elution / recovery device 40 includes an adsorbent which is the above-described concentration means, and adsorbs and acquires impurities contained in the outlet water of CP20 or the outlet water of UF30. The concentration / elution / recovery device 40 elutes the adsorbed impurities by passing an eluent through the adsorbent having adsorbed the impurities, and recovers the eluent containing the eluted impurities. Examples of the eluent used here include acidic aqueous solutions such as nitric acid, hydrochloric acid, and sulfuric acid, or alkaline aqueous solutions of organic alkalis such as trimethylhydroxyammonium and tetramethylammonium hydroxide (TMAH). When recovering the eluted impurities, a recovery bottle may be used as the recovery container. The ICP-MS 50 is a device that measures the amount of impurities in the recovered eluent and calculates the impurity concentration. The information processing device 10 includes an acquisition unit 100, a database 200, a specifying unit 300, and an output unit 400.

[0022] FIG. 5 is a diagram showing a second form to which the quality control system of the present invention is applied. In the form shown in FIG. 5, the water passed through the adsorbent included in the concentration / elution / recovery device 40 is the water immediately before being supplied to the Wet washer 60-1 or the water immediately before being supplied to the Wet washer 60-2, which is different from the form shown in FIG. 4. Note that the position where the cleaning liquid is passed through the adsorbent may be any position after the outlet of CP20. Also, a branch valve may be provided at the location where the cleaning water branches to the concentration / elution / recovery device 40, and the opening and closing of the valve may be controlled. In FIG. 4, the case where there are two Wet washers 60-1 and 60-2 is taken as an example, but the number is not limited thereto.

[0023] As described above, in the quality control system of the present invention, the acquisition unit 100 acquires concentration period information indicating a period during which a cleaning liquid for cleaning an object is passed through an adsorbent. The specifying unit 300 calculates a cleaning period based on the period indicated by the concentration period information. The specifying unit 300 searches the database 200 for object identification information using the cleaning period information indicating the calculated cleaning period as a search key to specify the object. Therefore, strict management of the quality according to the period during which the object is cleaned can be performed.

[0024] FIG. 6 is a diagram showing an embodiment of the object management system of the present invention. As shown in FIG. 6, the object management system in this embodiment includes a liquid chromatography measurement unit 500, a regulating valve 600, and an opening / closing control unit 700.

[0025] The liquid mass spectrometry measurement unit 500 measures the liquid mass of the cleaning liquid for cleaning the object. The liquid mass spectrometry measurement unit 500 measures the amount (e.g., concentration) of impurities contained in the cleaning liquid. When concentrating the impurities contained in the cleaning liquid using an adsorbent, the liquid mass spectrometry measurement unit 500 measures the concentration of the impurities adsorbed on the adsorbent. When the adsorbent adsorbs metal impurities (e.g., metal ions) as impurities, the liquid mass spectrometry measurement unit 500 may elute the metal ions adsorbed on the adsorbent using an eluent and measure the concentration of the metal ions contained in the eluent passed through the adsorbent. The adsorbent may be a monolithic organic porous body. The liquid mass spectrometry measurement unit 500 may be the ICP-MS 50 shown in FIGS. 4 and 5. That is, the liquid mass spectrometry measurement unit 500 is, for example, a device that elutes the impurities adsorbed on the adsorbent using an eluent, recovers the eluent, measures the amount of impurities in the recovered eluent, and calculates the amount of impurities in the cleaning liquid. Here, based on the result measured by the liquid mass spectrometry measurement unit 500, the specifying unit 300 shown in FIG. 1 starts specifying the target part. For example, when the amount of impurities measured by the liquid mass spectrometry measurement unit 500 exceeds a predetermined amount, since it is necessary to specify the object cleaned with the cleaning liquid, the specifying unit 300 starts specifying the object.

[0026] The regulating valve 600 is a regulating valve provided in the flow path for supplying the cleaning liquid to the cleaning tank. By opening and closing the regulating valve 600, the supply of the cleaning liquid downstream of the regulating valve 600 in the flow path can be controlled. The regulating valve 600 can control, for example, the supply of cleaning water to the point where the object is cleaned using the cleaning liquid. The regulating valve 600 opens and closes based on a control signal from the opening / closing control unit 700. The specific installation position of the regulating valve 600 will be described later.

[0027] The opening / closing control unit 700 controls the opening and closing of the regulating valve 600 based on the liquid mass measured by the liquid mass measurement unit 500 (i.e., the amount of impurities in the cleaning liquid). When the liquid mass measured by the liquid mass measurement unit 500 meets a predetermined reference value (i.e., when it is below the predetermined reference value), the opening / closing control unit 700 sets the regulating valve 600 to the open state. Also, when the liquid mass measured by the liquid mass measurement unit 500 does not meet the reference value (i.e., when it exceeds the predetermined reference value), the opening / closing control unit 700 sets the regulating valve 600 to the closed state. Note that if there is no significant variation in the amount of water flowing through the adsorbent per unit time, the opening / closing control unit 700 may control the opening and closing of the regulating valve 600 based on the amount of impurities contained in the eluent measured by the liquid mass measurement unit 500. In addition, the opening / closing control unit 700 may control the opening and closing of the regulating valve 600 using a value that can determine the level of the water quality of the cleaning liquid from the value measured by the liquid mass measurement unit 500.

[0028] Figure 7 is a diagram showing an example of the judgment criteria and control content performed by the opening / closing control unit 700 shown in Figure 6. In the example shown in Figure 7, the reference value for judgment is the value of the impurity concentration. As shown in Figure 7, when the impurity concentration is below a preset threshold value T, it is associated with the opening / closing information "open". From this association, when the liquid mass (impurity concentration) measured by the liquid mass measurement unit 500 is below the threshold value T which is the reference value, the opening / closing control unit 700 regards it as meeting the reference value and sets the regulating valve 600 to the open state. By doing so, the cleaning liquid that meets the reference value can be supplied to the use point (cleaning tank). Also, when the liquid mass (impurity concentration) measured by the liquid mass measurement unit 500 exceeds the threshold value T which is the reference value, the opening / closing control unit 700 regards it as not meeting the reference value and sets the regulating valve 600 to the closed state. By doing so, it is possible to avoid supplying the cleaning liquid that does not meet the reference value to the use point (cleaning tank).

[0029] The object management method in the object management system shown in FIG. 6 will be described below. FIG. 8 is a flowchart for explaining an example of the object management method in the object management system shown in FIG. 6. Here, the liquid chromatography-mass spectrometry measurement unit 500 will be described by taking as an example the case of measuring the concentration of impurities contained in the cleaning liquid.

[0030] First, the liquid chromatography-mass spectrometry measurement unit 500 measures the concentration of impurities contained in the cleaning liquid for cleaning the object (step S11). Subsequently, the opening / closing control unit 700 determines whether the concentration of impurities measured by the liquid chromatography-mass spectrometry measurement unit 500 exceeds a preset threshold value (step S12). When it is determined that the concentration of impurities measured by the liquid chromatography-mass spectrometry measurement unit 500 does not exceed the threshold value, the opening / closing control unit 700 sets the adjustment valve 600 to the open state (step S13). At this time, if the adjustment valve 600 is already in the open state, the opening / closing control unit 700 keeps the adjustment valve 600 in the open state. On the other hand, when it is determined in step S12 that the concentration of impurities measured by the liquid chromatography-mass spectrometry measurement unit 500 exceeds the threshold value, the opening / closing control unit 700 sets the adjustment valve 600 to the closed state (step S14). At this time, if the adjustment valve 600 is already in the closed state, the opening / closing control unit 700 keeps the adjustment valve 600 in the closed state.

[0031] An application example of the object management system of the present invention will be described below. FIG. 9 is a diagram showing a first form to which the object management system of the present invention is applied. The form shown in FIG. 9 is a non-regenerable ion exchange device CP20 in an ultrapure water production facility arranged downstream of a primary pure water tank in which primary pure water is stored, an ultrafiltration membrane device UF30, and a control valve 600, and is a system in which ultrapure water, which is cleaning water, is supplied to Wet cleaners 60-1 and 60-2 (use points), which are semiconductor cleaning devices. Each of CP20, UF30, and Wet cleaners 60-1 and 60-2 is the same as that shown in FIG. 4. Further, between the primary pure water tank and CP20, for example, a pump, a heat exchanger, a UV oxidation device, etc. may be provided. The control valve 600 is the one described with reference to FIG. 6 and controls the supply of water from UF30 to Wet cleaners 60-1 and 60-2. The ultrapure water supplied to CP20 is supplied from a liquid production supply facility provided upstream. The liquid production supply facility is also a facility for producing ultrapure water. The broken line shown in FIG. 9 indicates a water flow path or a control signal path for inspecting the water quality of ultrapure water, which is cleaning water. Further, a branch valve may be provided at the location where the cleaning water branches to the concentration / elution / recovery device 40, and the opening and closing of the valve may be controlled. Also, a return pipe is provided to return the water from UF30 to the primary pure water tank.

[0032] The concentration / elution / recovery device 40 is the same as that shown in FIG. 4 and adsorbs and acquires impurities contained in the outlet water of CP20 or the outlet water of UF30. The concentration / elution / recovery device 40 elutes the adsorbed impurities by passing an eluent through the adsorbent on which the impurities are adsorbed, and recovers the eluent containing the eluted impurities. The information processing device 11 includes a liquid mass measurement unit 500 and an opening / closing control unit 700. The liquid mass measurement unit 500 measures the liquid mass of the cleaning liquid based on the eluent recovered by the concentration / elution / recovery device 40. The information processing device 11 and the control valve 600 constitute the object management system of the present invention.

[0033] Figure 10 is a diagram showing a second form to which the object management system of the present invention is applied. In the form shown in Figure 10, the water passed through the adsorbent included in the concentration / elution / recovery device 40 is the water immediately before being supplied to the Wet washer 60-1 or the water immediately before being supplied to the Wet washer 60-2, in addition to the water flowing from the UF 30 to the regulating valve 600. This is different from the form shown in Figure 9. Note that the position where the cleaning liquid is passed through the adsorbent may be any position after the outlet of the CP 20. Also, a branch valve may be provided at the location where the cleaning water branches to the concentration / elution / recovery device 40, and the opening and closing of the valve may be controlled. In Figure 10, the case where there are two Wet washers 60-1 and 60-2 is taken as an example, but the number is not limited to this.

[0034] As described above, in the object management system of the present invention, the liquid mass spectrometry unit 500 measures the liquid mass of the cleaning liquid for cleaning the object. The opening / closing control unit 700 controls the opening and closing of the regulating valve 600 provided in the flow path for supplying the cleaning liquid to the cleaning point for cleaning the semiconductor device based on the liquid mass measured by the liquid mass spectrometry unit 500. Therefore, real-time quality management according to the state of the cleaning liquid can be performed.

[0035] Note that the liquid (water) to be measured is not limited to ultrapure water, and may be a chemical solution such as IPA (isopropyl alcohol), PGMA (polyglycerol methacrylate), or PGMEA (propylene glycol monomethyl ether acetate).

[0036] As described above, each component has been described with each function (process) being shared, but this assignment is not limited to the above-described one. Also, regarding the configuration of the components, the above-described form is merely an example and is not limited thereto. Also, a combination of each embodiment may be used.

Explanation of Reference Numerals

[0037] 10, 11 Information processing device 20 CP 30 UF 40 Concentration / elution / recovery device 50 ICP-MS 60-1, 60-2 Wet Washers 100 Acquisition Unit 200 Database 300 Identification Unit 400 Output Unit 500 Liquid Chromatography-Mass Spectrometry Measurement Unit 600 Control Valve 700 Opening / Closing Control Unit

Claims

1. An acquisition unit that acquires concentration period information indicating a period during which impurities contained in a cleaning liquid for cleaning an object are concentrated by a concentration means; A database that stores, as association information, the object identification information uniquely assigned to the object and the cleaning period information indicating the period during which the object was cleaned in association with each other; A quality control system having a specifying unit that calculates a cleaning period based on the concentration period information acquired by the acquisition unit, the pipe distance from the position where the concentration period information was acquired to the position where the object was cleaned, and the flow velocity in the pipe, and specifies an object cleaned with a cleaning liquid corresponding to the cleaning liquid supplied to the concentration means during the concentration period indicated by the concentration period information based on the cleaning period information indicating the calculated cleaning period and the association information stored in the database.

2. In the quality control system according to claim 1, It has a liquid mass measurement unit that measures the amount of impurities concentrated by the concentration means, The specifying unit is a quality control system that starts specifying the object based on the result measured by the liquid mass measurement unit.

3. In the quality control system according to claim 1 or claim 2, The concentration means is a quality control system in which the cleaning liquid passed through a non-regenerative ion exchange device provided in the flow path of the cleaning liquid is passed through.

4. In the quality control system according to any one of claims 1 to 3, The concentration means is a quality control system that concentrates metal impurities as the impurities.

5. In the quality control system according to claim 4, The concentration means is a quality control system that is a monolithic organic porous body.

6. A liquid mass measurement unit that measures the liquid mass of a cleaning liquid for cleaning an object; An adjustment valve provided in a flow path for supplying the cleaning liquid to a cleaning tank; An object management system having an opening / closing control unit that controls the opening and closing of the adjustment valve based on the liquid mass measured by the liquid mass measurement unit.

7. In the object management system according to claim 6, The liquid mass measurement unit is an object management system that measures the liquid mass of the cleaning liquid passed through a non-regenerative ion exchange device provided in the flow path of the cleaning liquid.

8. In the object management system according to claim 6 or claim 7, The opening / closing control unit is an object management system that keeps the adjustment valve in an open state when the liquid mass measured by the liquid mass measurement unit satisfies a reference value, and keeps the adjustment valve in a closed state when the liquid mass measured by the liquid mass measurement unit does not satisfy the reference value.

9. An object management method for controlling the supply of the cleaning liquid to a cleaning tank for cleaning an object, using an adjustment valve provided in a flow path for supplying the cleaning liquid to the cleaning tank based on the quality of the cleaning liquid for cleaning the object.

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