Substrate storage container, method for manufacturing the same, and lid-side substrate support portion

Abstract

A lid 3 is provided with a lid-side first restriction part 36 and a lid-side second restriction part 37. A lid-side substrate support 7 is provided with a support-side first restriction part 76 and a support-side second restriction part 77, and is fitted to the lid 3 by being slid in a sliding direction D22 from a first position to a second position with respect to the lid 3. The lid-side second restriction part 37 does not restrict movement, of the lid-side substrate support 7 to the opposite side D11 of the side of a substrate storage space 27, for setting the lid-side substrate support 7 to the first position. At the first position, the lid-side first restriction part 36 permits movement of the support-side first restriction part 76 in the sliding direction D22, and permits movement of the support-side second restriction part 77 in the sliding direction D22. At the second position, the lid-side first restriction part 36 restricts movement of the support-side first restriction part 76 in the opposite direction D21 of the sliding direction and restricts movement of the support-side second restriction part 77 in the sliding direction D22, and the lid-side second restriction part 37 restricts movement of the lid-side substrate support 7 to the side D12 of the substrate storage space 27.

Description

Substrate storage container, manufacturing method thereof, and lid-side substrate support portion

[0001] The present invention relates to a substrate storage container, particularly to a substrate storage container that stores a plurality of substrates such as semiconductor wafers in a parallel arrangement. The present invention also relates to a method for manufacturing a substrate storage container and a lid-side substrate support portion of the substrate storage container.

[0002] A known substrate storage container for storing substrates such as semiconductor wafers is configured to include a container body and a lid. The container body has a cylindrical wall portion with a container body opening formed at one end and a closed other end. A substrate storage space is formed within the container body. The substrate storage space is surrounded by the wall portion and can store multiple substrates. The container body has a rear substrate support portion at the rear side of the substrate storage space.

[0003] The lid is detachable from the container body opening and closes the container body opening when attached to the container body opening. A lid-side substrate support portion (also called a "front retainer") is disposed and attached to the inside of the lid, which faces the substrate storage space of the container body when attached to the container body opening. The front retainer cooperates with the rear-side substrate support portion of the container body to support multiple substrates when the lid is attached to the container body opening.

[0004] The front retainer can be attached to the lid body in various ways, including by deforming the front retainer itself and fitting it into the lid body (see, for example, Patent Document 1), by sliding the front retainer and fitting it into the lid body (see, for example, Patent Document 2), and by press-fitting the front retainer into the lid body.

[0005] International Publication No. 2009 / 060782 Japanese Patent Application Laid-Open No. 2020-009981

[0006] In these mounting configurations, the front retainer (the substrate support part on the lid body) is somehow fitted or pressed into the lid body, so impact, vibration, or deformation of the front retainer due to hitting an object can cause the fitting or press-fit to loosen, causing the front retainer to come off the lid body.

[0007] An object of the present invention is to provide a substrate storage container in which a lid-side substrate support part attached to the lid is unlikely to come off the lid, a method for manufacturing the same, and the lid-side substrate support part.

[0008] The present invention provides a container body having a cylindrical wall portion having a container body opening at one end and a closed other end, wherein a substrate storage space capable of storing a plurality of substrates and communicating with the container body opening is formed by the inner surface of the wall portion; a lid body that is detachable from the container body opening and capable of closing the container body opening; and a lid body-side substrate support portion that is a part of the lid body that is arranged in a portion that faces the substrate storage space when the container body opening is closed by the lid body, and that is capable of supporting edges of the plurality of substrates when the container body opening is closed by the lid body, wherein the lid body has a lid body-side first restricting portion and a lid body-side second restricting portion, and the lid body-side substrate support portion has a support portion-side first restricting portion and a support portion-side second restricting portion, and is slidable relative to the lid body with a predetermined sliding movement from a first position to a second position. the lid body side second restricting portion does not restrict movement of the lid body side substrate support portion toward the side opposite to the substrate storage space side in order to position the lid body side substrate support portion at the first position, the lid body side first restricting portion allows movement of the support part side first restricting portion in the sliding direction and also allows movement of the support part side second restricting portion in the sliding direction, and at the second position the lid body side first restricting portion restricts movement of the support part side first restricting portion in the direction opposite to the sliding direction and restricts movement of the support part side second restricting portion in the sliding direction, and the lid body side second restricting portion restricts movement of the lid body side substrate support portion toward the substrate storage space side.

[0009] Furthermore, it is preferable that the lid body side substrate support portion further includes a contact escape portion, and when viewed from the side opposite the substrate storage space, the contact escape portion escapes from contact with the lid body side second regulating portion, so that the lid body side second regulating portion does not restrict movement of the lid body side substrate support portion toward the side opposite the substrate storage space in order to position the lid body side substrate support portion at the first position, and that at the second position, when viewed from the side opposite the substrate storage space, the contact escape portion does not escape from contact with the lid body side second regulating portion, so that the lid body side second regulating portion restricts movement of the lid body side substrate support portion toward the side of the substrate storage space.

[0010] Furthermore, it is preferable that the surface of the second lid-side restricting portion opposite to the substrate storage space is inclined so as to approach the substrate storage space as it moves in the direction opposite to the sliding direction.

[0011] In addition, in the first position, it is preferable that the side of the support portion-side first restricting portion opposite to the side of the substrate storage space abuts against the side of the lid portion-side first restricting portion facing the substrate storage space.

[0012] Furthermore, it is preferable that the lid body further includes a lid body side third regulating portion, and when the support part side first regulating portion deforms from the first position, the lid body side substrate support portion moves to the side opposite the substrate storage space, and the lid body side third regulating portion regulates the movement of the lid body side substrate support portion to the side opposite the substrate storage space.

[0013] Furthermore, the lid and the lid-side substrate support portion preferably have an erroneous mounting prevention structure that prevents the lid-side substrate support portion from being mounted on the lid in an incorrect orientation.

[0014] Furthermore, the lid body side substrate support portion has a pair of first frame portions extending in a predetermined direction, a pair of second frame portions extending in a direction different from the predetermined direction, legs connected to the first frame portions, and substrate receiving portions provided on the legs, and the legs form a leg pair with one leg connected to one of the first frame portions and the other leg connected to the other first frame portion and not connected to one of the legs, and it is preferable that the number of leg pairs is the same as the number of substrates stored in the substrate storage container, and that the pair of second frame portions connect the pair of first frame portions on both outsides in the direction in which the leg pairs are parallel to each other.

[0015] Preferably, the lid body side substrate support portion further includes a structure for improving slide operability at a position where it does not interfere with the lid body side second restriction portion when in the first position.

[0016] The present invention also provides a container body having a cylindrical wall portion with a container body opening formed at one end and a closed other end, wherein a substrate storage space capable of storing a plurality of substrates and communicating with the container body opening is formed by the inner surface of the wall portion; a lid body that is detachable from the container body opening and capable of closing the container body opening; and a lid body-side substrate support portion that is a part of the lid body that is arranged in a portion that faces the substrate storage space when the container body opening is closed by the lid body, and that is capable of supporting edges of the plurality of substrates when the container body opening is closed by the lid body, wherein the lid body has a lid body-side first restricting portion and a lid body-side second restricting portion, and the lid body-side substrate support portion has a support portion-side first restricting portion and a support portion-side second restricting portion, and is attached to the lid body by sliding relative to the lid body in a predetermined sliding direction from a first position to a second position. the lid body side substrate support portion is moved toward the side opposite to the substrate storage space without being restricted by the lid body side second restricting portion to position the lid body side substrate support portion at the first position, and the support part side first restricting portion and the support part side second restricting portion are moved in the sliding direction without being restricted by the lid body side first restricting portion to position the lid body side substrate support portion at the second position, and an arrangement is formed in which, at the second position, movement of the support part side first restricting portion in the direction opposite to the sliding direction is restricted by the lid body side first restricting portion, movement of the support part side second restricting portion in the sliding direction is restricted by the lid body side first restricting portion, and movement of the lid body side substrate support portion toward the substrate storage space is restricted by the lid body side second restricting portion.

[0017] Furthermore, it is preferable that the lid body further includes a lid body side third regulating portion, and by deforming the support part side first regulating portion from the first position, the lid body side substrate support part is moved to the side opposite the substrate storage space, and the lid body side third regulating portion regulates the movement of the lid body side substrate support part to the side opposite the substrate storage space.

[0018] The present invention also provides a substrate storage container including: a container body having a cylindrical wall portion with a container body opening formed at one end and the other end closed, wherein an inner surface of the wall portion defines a substrate storage space capable of storing a plurality of substrates and communicating with the container body opening; and a lid body that is detachable from the container body opening and can close the container body opening, the lid body comprising a lid body first restricting portion and a lid body second restricting portion. The lid body side substrate support portion is disposed on the lid body, wherein the lid body side substrate support portion is disposed in a portion of the lid body that faces the substrate storage space when the container body opening is closed by the lid body, and is capable of supporting edges of the plurality of substrates when the container body opening is closed by the lid body. The lid body side substrate support portion comprises a support portion first restricting portion and a support portion second restricting portion, and is configured to support the first substrate storage space relative to the lid body. the lid body side substrate support part is configured to be attached to the lid body by sliding in a predetermined sliding direction from a first position to a second position, wherein movement of the lid body side substrate support part toward the side opposite to the substrate storage space in order to position the lid body side substrate support part to the first position is not restricted by the lid body side second restricting part, and at the first position, movement of the support part side first restricting part and the support part side second restricting part in the sliding direction is not restricted by the lid body side first restricting part, and at the second position, movement of the support part side first restricting part in the direction opposite to the sliding direction is restricted by the lid body side first restricting part, movement of the support part side second restricting part in the sliding direction is restricted by the lid body side first restricting part, and movement of the lid body side substrate support part toward the substrate storage space is restricted by the lid body side second restricting part.

[0019] According to the present invention, it is possible to provide a substrate storage container in which a lid-side substrate support part attached to the lid is unlikely to come off the lid, a method for manufacturing the same, and the lid-side substrate support part.

[0020] 3A . FIG. 3C is an exploded perspective view showing a state in which a plurality of substrates W are stored in a substrate storage container 1 according to an embodiment of the present invention. FIG. 3B is an upper perspective view showing a container body 2 of a substrate storage container 1 according to an embodiment of the present invention. FIG. 3C is a perspective view of the lid body 3 and the front retainer 7, as viewed from the inside, in a state before sliding (first position) according to an embodiment of the present invention. FIG. 3A is a partial enlarged view of FIG. 3A. FIG. 3C is a rear view of the lid body 3 and the front retainer 7, as viewed from the inside, in a state before sliding (first position) according to an embodiment of the present invention. FIG. 3C is a partial enlarged view of FIG. 3C. FIG. 3C is a cross-sectional view taken along line A-A shown in FIG. 3C. FIG. 3C is a cross-sectional view taken along line B-B shown in FIG. 3C. FIG. 3A is a perspective view showing a state in which the front retainer 7 has been removed from FIG. 3A. FIG. 3C is a rear view showing a state in which the front retainer 7 has been removed from FIG. 3C. FIG. 3C is a schematic perspective view of a lid body first restricting portion 36 and a lid body second restricting portion 37 according to an embodiment. FIG. 3B is a perspective view of the front retainer 7, as viewed from the inside (support side) according to an embodiment of the present invention. FIG. 3C is a rear view of the front retainer 7, as viewed from the inside (support side) according to an embodiment of the present invention. 5A is a partially enlarged perspective view of the front retainer 7 according to an embodiment of the present invention as seen from the inside (support side), and is a view from the opposite side to FIG. 5A. FIG. 5B is a cross-sectional view (corresponding to FIG. 3E) taken along line A-A in a state midway through sliding. FIG. 5C is a cross-sectional view (corresponding to FIG. 3F) taken along line B-B in a state midway through sliding. FIG. 5D is a partially enlarged rear view (corresponding to FIG. 3D) of the lid body 3 and front retainer 7 as seen from the inside in a state after sliding (second position). FIG. 5E is a cross-sectional view (corresponding to FIG. 3E) taken along line B-B in a state after sliding. FIG. 5C is a schematic perspective view (corresponding to FIG. 4C) of the lid body side first restricting portion 36 and the lid body side second restricting portion 37 in a modified form.

[0021] A substrate storage container 1 according to this embodiment will now be described with reference to the drawings. FIG. 1 is an exploded perspective view showing a state in which a plurality of substrates W are stored in a substrate storage container 1 according to an embodiment of the present invention. FIG. 2 is a top perspective view showing a container body 2 of a substrate storage container 1 according to an embodiment of the present invention. FIG. 3A is a perspective view of the lid body 3 and front retainer 7 as seen from the inside in a pre-sliding state (first position) according to an embodiment of the present invention. FIG. 3B is a partial enlarged view of FIG. 3A. FIG. 3C is a rear view of the lid body 3 and front retainer 7 as seen from the inside in a pre-sliding state (first position) according to an embodiment of the present invention. FIG. 3D is a partial enlarged view of FIG. 3C. FIG. 3E is a cross-sectional view taken along line A-A in FIG. 3C. FIG. 3F is a cross-sectional view taken along line B-B in FIG. 3C. FIG. 4A is a perspective view showing a state in which the front retainer 7 has been removed from FIG. 3A. FIG. 4B is a rear view showing a state in which the front retainer 7 has been removed from FIG. 3C. FIG. 4C is a schematic perspective view of the first lid-side restricting portion 36 and the second lid-side restricting portion 37 according to the embodiment. FIG. 5A is a perspective view of the front retainer 7 according to the embodiment of the present invention as seen from the inside (support side). FIG. 5B is a rear view of the front retainer 7 according to the embodiment of the present invention as seen from the inside (support side). FIG. 5C is a partially enlarged perspective view of the front retainer 7 according to the embodiment of the present invention as seen from the inside (support side), and is a view from the opposite side to FIG. 5A. FIG. 6A is a cross-sectional view (corresponding to FIG. 3E) taken along line A-A in a state midway through sliding. FIG. 6B is a cross-sectional view (corresponding to FIG. 3F) taken along line B-B in a state midway through sliding. FIG. 7A is a partially enlarged view (corresponding to FIG. 3D) of a rear view of the lid 3 and the front retainer 7 as seen from the inside in a state after sliding (second position). FIG. 7B is a cross-sectional view (corresponding to FIG. 3E) taken along line A-A in a state after sliding. FIG. 7C is a cross-sectional view taken along line BB in a state after sliding (corresponding to FIG. 3F).

[0022] For ease of explanation, the direction from the container body 2 (described below) toward the lid 3 (the direction from the upper right to the lower left in FIG. 1 ) is defined as the front direction D11, and the opposite direction is defined as the rear direction D12, and these are collectively defined as the front-to-rear direction D1. Furthermore, the direction from the lower wall 24 (described below) toward the upper wall 23 (the upward direction in FIG. 1 ) is defined as the upward direction D21, and the opposite direction is defined as the downward direction D22, and these are collectively defined as the up-down direction D2. Furthermore, the direction from the second side wall 26 (described below) toward the first side wall 25 (the direction from the lower right to the upper left in FIG. 1 ) is defined as the leftward direction D31, and the opposite direction is defined as the rightward direction D32, and these are collectively defined as the left-right direction D3. Arrows indicating these directions are shown in the main drawings.

[0023] The substrates W (see FIG. 1) stored in the substrate storage container 1 are disc-shaped silicon wafers, glass wafers, sapphire wafers, etc., and are thin wafers used in industry. In this embodiment, the substrates W are silicon wafers with a diameter of 300 mm.

[0024] 1 and 2, substrate storage container 1 is used to store substrates W made of silicon wafers as described above and transport them in processes within a factory, or as a shipping container for transporting substrates by land, air, sea, or other transportation means, and is composed of a container body 2 and a lid 3. Side substrate support members 5 and a rear substrate support member 6 (see FIG. 2, etc.) are attached to container body 2. As shown in FIGS. 3A to 3F, etc., a front retainer 7 is attached to lid 3 as a lid-side substrate support member.

[0025] The container body 2 has a cylindrical wall portion 20 with a container body opening 21 formed at one end and a closed other end. A substrate storage space 27 is formed within the container body 2. The substrate storage space 27 is surrounded by the wall portion 20. Side substrate support portions 5 are arranged in the portion of the wall portion 20 that forms the substrate storage space 27. As shown in FIG. 1 , the substrate storage space 27 can store a plurality of substrates W.

[0026] The side substrate support portions 5 are provided on the wall portion 20 so as to form pairs within the substrate storage space 27. When the container body opening 21 is not closed by the lid 3, the side substrate support portions 5 abut against the edges of the plurality of substrates W, thereby supporting the edges of the plurality of substrates W while arranging adjacent substrates W in parallel with a predetermined distance between them. At the rear side of the side substrate support portions 5, a rear substrate support portion 6 is provided and molded integrally with the side substrate support portions 5.

[0027] The rear substrate support portion 6 (see FIG. 2 etc.) is provided on the wall portion 20 so as to form a pair with the front retainer 7 described later within the substrate storage space 27. When the container body opening 21 is closed by the lid 3, the rear substrate support portion 6 abuts against the edges of the substrates W, thereby being able to support the rear portions of the edges of the substrates W.

[0028] The lid 3 is detachable from an opening periphery 28 (see FIG. 1, etc.) that forms the container body opening 21, and is capable of closing the container body opening 21. The front retainer 7 is attached to a portion of the lid 3 that faces the substrate storage space 27 when the container body opening 21 is closed by the lid 3. The front retainer 7 is arranged inside the substrate storage space 27 so as to form a pair with the rear substrate support portion 6.

[0029] When the container body opening 21 is closed by the lid 3, the front retainer 7 can support the front portions of the edges of the substrates W by abutting against the edges of the substrates W. When the container body opening 21 is closed by the lid 3, the front retainer 7 supports the substrates W in cooperation with the rear substrate support portion 6, thereby holding adjacent substrates W in a parallel arrangement with a predetermined distance between them.

[0030] The substrate storage container 1 is made of a resin such as a plastic material. Examples of the resin material include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polybutylene terephthalate, polyetheretherketone, and liquid crystal polymer, as well as alloys of these. To impart conductivity to these molding material resins, conductive materials such as carbon fiber, carbon powder, carbon nanotubes, and conductive polymers are selectively added. Glass fiber, carbon fiber, and the like can also be added to increase rigidity.

[0031] Each part will be described in detail below. As shown in Fig. 1, the wall 20 of the container body 2 has a rear wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26. The rear wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of the above-mentioned materials and are integrally molded.

[0032] The first side wall 25 and the second side wall 26 face each other, and the upper wall 23 and the lower wall 24 face each other. The rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the rear wall 22. The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 form an opening periphery 28 that defines the container body opening 21, which has a substantially rectangular shape.

[0033] The opening periphery 28 is provided at one end of the container body 2, and the rear wall 22 is located at the other end of the container body 2. The container body 2 has a box-like outer shape formed by the outer surfaces of the walls 20. The inner surfaces of the walls 20, i.e., the inner surfaces of the rear wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26, form a substrate storage space 27 surrounded thereby. The container body opening 21 formed in the opening periphery 28 is surrounded by the walls 20 and communicates with the substrate storage space 27 formed inside the container body 2. A maximum of 25 substrates W can be stored in the substrate storage space 27.

[0034] 1, latch engagement recesses 231A, 231B, 241A, and 241B recessed outward from the board storage space 27 are formed in the upper wall 23 and the lower wall 24 near the opening periphery 28. A total of four latch engagement recesses 231A, 231B, 241A, and 241B are formed, one near each of the left and right ends of the upper wall 23 and the lower wall 24.

[0035] 1, ribs 235 are formed integrally with the upper wall 23 on the outer surface of the upper wall 23. The ribs 235 increase the rigidity of the container body 2. A top flange 236 is fixed to the center of the upper wall 23. The top flange 236 is a member that is hung on and suspended from the substrate storage container 1 when the substrate storage container 1 is suspended in an AMHS (automated wafer transport system), PGV (wafer substrate transport vehicle), or the like.

[0036] 2 and other figures, the side substrate support portions 5 are attached to the first side wall 25 and the second side wall 26, respectively, and are provided in pairs in the left-right direction D3 in the container body 2 within the substrate storage space 27. Specifically, the side substrate support portions 5 have plate portions 51.

[0037] The plate portions 51 have a generally arcuate plate shape. A total of 50 plate portions 51 are provided, 25 on each of the first side wall 25 and the second side wall 26, in the up-down direction D2. Adjacent plate portions 51 are spaced apart in the up-down direction D2 at intervals of 7 mm to 20 mm, preferably 10 mm to 12 mm, and are arranged in a parallel positional relationship.

[0038] The 25 plate portions 51 provided on the first side wall 25 and the 25 plate portions 51 provided on the second side wall 26 are positioned opposite each other in the left-right direction D3. Protrusions 511 and 512 are provided on the upper surfaces of the plate portions 51. The substrate W supported by the plate portions 51 comes into contact only with the protruding ends of the protrusions 511 and 512, and does not come into contact with the plate portions 51 on their surfaces.

[0039] The lateral substrate support portion 5 configured in this manner is capable of supporting the edges of multiple substrates W while keeping adjacent substrates W spaced apart at a predetermined distance and parallel to each other.

[0040] 2, the rear substrate support portions 6 are integrally molded with the container body 2 at the rear ends of the plate portions 51 of the side substrate support portions 5. The number of rear substrate support portions 6, specifically 25, is provided, corresponding to each substrate W that can be stored in the substrate storage space 27. The rear substrate support portions 6 arranged on the first side wall 25 and the second side wall 26 are positioned in a positional relationship in the front-to-rear direction D1 so as to form pairs with the front retainers 7, which will be described later. When a substrate W is stored in the substrate storage space 27 and the lid 3 is closed, the rear substrate support portions 6 clamp and support the edge of the substrate W.

[0041] 1, the lid 3 has a generally rectangular shape that generally matches the shape of the opening periphery 28 of the container body 2. The lid 3 is detachable from the opening periphery 28 of the container body 2, and by attaching the lid 3 to the opening periphery 28, the lid 3 is surrounded by the opening periphery 28, thereby being able to close the container body opening 21.

[0042] As shown in Figures 3A to 4C, the lid 3 has an inner plate-shaped portion 301 having a generally rectangular plate shape, an outer plate-shaped portion 302 having a generally rectangular plate shape, and a peripheral wall portion 303. The surface of the inner plate-shaped portion 301 facing the rear direction D12 constitutes the inner surface of the lid, and when the container body opening 21 is closed by the lid 3, it forms the substrate storage space 27 together with the inner surface of the container body 2. The peripheral wall portion 303 is provided on the peripheral edge of the inner plate-shaped portion 301 and extends in the forward direction D11 (a direction perpendicular to the inner surface of the lid of the inner plate-shaped portion 301) along the peripheral edge so as to go around the peripheral edge. The inner plate-shaped portion 301 and the peripheral wall portion 303 are connected by being integrally molded from, for example, polycarbonate. Note that the inner plate-shaped portion 301 and the peripheral wall portion 303 are not limited to being made of polycarbonate.

[0043] 1 and other figures, an outer plate-shaped portion 302 is disposed at the extending end of the peripheral wall portion 303 in the forward direction D11. The outer plate-shaped portion 302 is fixed to the inner plate-shaped portion 301 with the peripheral edge of the outer plate-shaped portion 302 surrounded by the peripheral wall portion 303. The surface of the outer plate-shaped portion 302 on the forward direction D11 side forms the outer surface of the lid.

[0044] The lid 3 is provided with a latch mechanism. The latch mechanism is provided near both the left and right ends of the lid 3, and as shown in FIGS. 1, 3A, and 3C, includes two upper latch portions 32A that can protrude in an upward direction D21 from the top edge of the lid 3, and two lower latch portions 32B that can protrude in a downward direction D22 from the bottom edge of the lid 3. An operating portion 33 is provided on the outer surface of the lid 3. By operating the operating portion 33 from the front side of the lid 3, the upper latch portions 32A and the lower latch portions 32B can be made to protrude from the top and bottom edges of the lid 3, or can be made not to protrude from the top and bottom edges. The upper latch portion 32A protrudes in the upward direction D21 from the upper edge of the lid body 3 and engages with the latch engagement recesses 231A, 231B of the container body 2, and the lower latch portion 32B protrudes in the downward direction D22 from the lower edge of the lid body 3 and engages with the latch engagement recesses 241A, 241B of the container body 2, thereby fixing the lid body 3 to the opening peripheral portion 28 of the container body 2.

[0045] A retainer storage recess 305 is formed on the inside of the lid 3, recessed outward (in the forward direction D11) from the board storage space 27. The front retainer 7 is attached and fixed to the retainer storage recess 305. The retainer storage recess 305 has a pair of side walls 306, 306 in the left-right direction D3 and a bottom surface 307 (an inner surface in the forward direction D11).

[0046] The lid 3 further includes a first lid restricting portion 36, a second lid restricting portion 37, and a third lid restricting portion 38. These will be described in detail later.

[0047] A rectangular annular sealing member 4 is attached to the inner surface of the lid 3 (the back surface of the lid 3 shown in FIG. 1 ), the surface facing the surface of a step (sealing surface 281) formed immediately in the rear direction D12 of the opening peripheral edge 28 when the lid 3 closes the container body opening 21, i.e., the periphery of the inner plate-like portion 301, so as to go around the outer periphery of the lid 3. The sealing member 4 is arranged so as to go around the peripheral wall portion 303 of the lid 3. The sealing member 4 is made of various thermoplastic elastomers such as elastically deformable polyesters and polyolefins, fluororubber, silicone rubber, etc.

[0048] When the lid 3 is attached to the opening periphery 28, the sealing member 4 is sandwiched between the sealing surface 281 (see FIG. 1 ) of the container body 2 and the inner surface of the lid 3 and elastically deforms. That is, with the sealing member 4 interposed between the lid 3 and the container body 2, the lid 3 can close the container body opening 21 while the lid 3 and the opening periphery 28 are spaced apart without coming into contact with each other. When the lid 3 is removed from the opening periphery 28, the substrate W can be inserted into and removed from the substrate storage space 27 within the container body 2.

[0049] 1 , container body legs 244 are provided on the outer surface of the bottom wall 24. The container body legs 244 are integrally molded with both left and right edge portions of the bottom wall 24 and extend in the front-to-rear direction D1 along both left and right edge portions of the bottom wall 24. When the container body 2 is placed on a horizontal flat surface with the bottom wall 24 facing downward (the side facing the downward direction D22), the container body legs 244 abut against the flat surface to stably support the container body 2.

[0050] [Details of Lid and Front Retainer] The lid 3 and the front retainer 7 will be described in detail below with reference to Figures 3A to 8. As shown in Figures 3A to 4C, the front retainer 7 serving as a lid-side board support is attached and fixed in a stored state in the retainer storage recess 305 inside the lid 3. As shown in Figures 5A to 5C, the front retainer 7 includes a pair of vertical frame portions 71, 71 (first frame portions) extending in the up-down direction D2, a pair of retainer legs 72, 72 (leg portions) connected to each of the pair of vertical frame portions 71, 71, a lid-side board receiving portion 73 (board receiving portion) provided on the retainer leg portion 72, a horizontal frame portion 74 (second frame portion) extending in the left-right direction D3, a knob portion 75, a support-side first restricting portion 76, a support-side second restricting portion 77, and a contact-relief portion 78. These are integrally molded from resin and connected to each other.

[0051] The front retainer 7 is basically symmetrical. Therefore, only one of the left and right sides will be described, and the description of the other side will be omitted. In such cases, the description of one side applies to the description of the other side. The left-right direction D3 is the left-right direction when the cover body 3 and front retainer 7 are arranged in the orientation shown in Figure 1. When viewed from inside the cover body 3, as in Figure 3A, etc., the left and right sides appear reversed in the drawing.

[0052] The vertical frame portions 71 (71A, 71B) are provided as a pair in the left-right direction D3 so as to extend parallel to each other along the up-down direction D2 (predetermined direction).

[0053] The retainer leg 72 (72A) on the left direction D31 side extends from the vertical frame portion 71 (71A) on the left direction D31 side toward the rear right in an overall view. The lid body side board receiving portion 73 (73A) on the left direction D31 side is connected to the end portion on the right direction D32 side, which is the tip of the retainer leg 72 (72A) on the left direction D31 side. On the other hand, the retainer leg 72 (72B) on the right direction D32 side extends from the vertical frame portion 71 on the right direction D32 side toward the rear left. The lid body side board receiving portion 73 (73B) on the right direction D32 side is connected to the end portion on the left direction D31 side, which is the tip of the retainer leg 72 (72B) on the right direction D32 side. Therefore, the lid body side board receiving portion 73 is disposed at a predetermined distance in the rear direction D12 from the inner surface of the lid body 3.

[0054] The retainer legs 72 are configured as a leg pair 72U, with one retainer leg 72 (72A) connected to one vertical frame portion 71 (71A) and the other retainer leg 72 (72B) connected to the other vertical frame portion 71 (71B) but not connected to the one retainer leg 72 (72A). The leg pairs 72U are provided in the same number as the number of substrates W stored in the substrate storage container 1.

[0055] The retainer legs 72 are configured to be easily elastically deformed, particularly because they are cantilevered. Therefore, when an external force is applied in a direction (forward direction D11) that moves the lid-side board receiving portion 73 toward the inner surface of the lid 3, the retainer legs 72 are able to displace the lid-side board receiving portion 73 by elastically deforming in response to the external force.

[0056] A pair of horizontal frame portions 74 are provided in the up-down direction D2 so as to extend parallel to each other in the left-right direction D3 (a direction different from the predetermined direction). The pair of horizontal frame portions 74, 74 connect the pair of vertical frame portions 71, 71 on both outer sides in the direction in which the leg pairs 72U are aligned (the up-down direction D2). The horizontal frame portion 74 on the up-down direction D21 side connects the upper ends of the pair of vertical frame portions 71, 71 in the left-right direction D3, and the horizontal frame portion 74 on the down-down direction D22 side connects the lower ends of the pair of vertical frame portions 71, 71 in the left-right direction D3.

[0057] The knobs 75 are provided on the outer portions of the pair of vertical frame portions 71 in the left-right direction D3. The knobs 75 protrude in the rear direction D12, and a plurality of knobs 75 are provided spaced apart in the up-down direction D2. The knobs 75 are an example of a "structure for improving sliding operability, which is provided in a position that does not interfere with the lid body-side second restriction portion 37 in the pre-sliding state (first position)" shown in Figures 3D to 3F, etc. The structure for improving sliding operability is typically a protruding portion such as the knobs 75, but is not limited thereto and may be a concave portion, a concave-convex portion, a structure for improving holding force, a structure for improving frictional force, etc.

[0058] The support-side first restricting portions 76 are provided on the outer portions of the pair of vertical frame portions 71 in the left-right direction D3. The support-side first restricting portions 76 are disposed at positions corresponding to the lid-side first restricting portions 36 of the lid 3. Only one support-side first restricting portion 76 is provided in the up-down direction D2, located approximately in the center of the up-down direction D2. The support-side first restricting portion 76 includes a base portion 767 protruding in the rear direction D12 from the vertical frame portion 71, an extension portion 766 extending in the upward direction D21 from the rear end portion of the base 767, and a recessed portion 768. The end portion of the extension portion 766 on the forward direction D11 side (which is also the end portion of the support-side first restricting portion 76 on the forward direction D11 side) is referred to as the "first end portion 761." The first end portion 761 is located in the rear direction D12 relative to the rearward D12 side surface of the vertical frame portion 71. The end of the extension 766 on the upward direction D21 side is referred to as a "third end 763." In this specification, the "end" may be planar (flat or curved) or convex (the same applies hereinafter unless otherwise specified).

[0059] The opening 768 is formed by removing a portion of the vertical frame portion 71 that overlaps with the extending portion 766 when viewed in the forward direction D11. The opening 768 is a cutout that opens outward in the left-right direction D3 and opens in the front-rear direction D1. The opening 768 is disposed at a position corresponding to the first lid-side restricting portion 36 of the lid 3.

[0060] The support portion-side second restricting portion 77 is provided on an outer portion in the left-right direction D3 of the pair of vertical frame portions 71. The support portion-side second restricting portion 77 protrudes in the rear direction D12 and is adjacent to the support portion-side first restricting portion 76 in the up-down direction D2. In detail, a fourth end 774, which is the end of the support portion-side second restricting portion 77 on the downward direction D22 side, faces the third end 763 of the support portion-side first restricting portion 76 in the up-down direction D2.

[0061] The contact relief portions 78 are provided on the outer portions in the left-right direction D3 of the pair of vertical frame portions 71. The contact relief portions 78 are notches that are open to the outside in the left-right direction D3 and extend in the front-rear direction D1. The contact relief portions 78 are disposed at positions corresponding to the lid body-side second restriction portions 37 of the lid body 3.

[0062] Next, a detailed description will be given of the lid 3. The retainer storage recess 305 of the lid 3 is provided with a first lid restriction portion 36, a second lid restriction portion 37, and a third lid restriction portion 38.

[0063] The lid-side first restricting portion 36 is provided on each of a pair of side walls 306, 306 in the left-right direction D3 of the retainer storage recess 305 and protrudes inward in the left-right direction D3. Only one lid-side first restricting portion 36 is provided in the up-down direction D2, corresponding to the support-side first restricting portion 76, at approximately the center in the up-down direction D2. As shown in FIGS. 3F and 4C , in a cross-sectional view perpendicular to the protruding direction (i.e., the left-right direction D3), the lid-side first restricting portion 36 includes a first end 361 that is an end on the front direction D11 side, a second end 362 that is an end on the rear direction D12 side, a third end 363 that is an end on the upper direction D21 side, and a fourth end 364 that is an end on the lower direction D22 side. In this embodiment, the first end 361 and the second end 362 are planar. The third end 363 and the fourth end 364 are convex or curved.

[0064] The lid-side second restriction portions 37 are provided on each of a pair of side walls 306, 306 in the left-right direction D3 of the retainer storage recess 305, and protrude inward in the left-right direction D3. As shown in Figures 3F and 4C , the lid-side second restriction portions 37 have a first surface 371 that is the surface on the front direction D11 side in a cross-sectional view perpendicular to the protruding direction (i.e., the left-right direction D3). A plurality of the lid-side second restriction portions 37 are provided on the side walls 306 of the retainer storage recess 305, spaced apart in the up-down direction D2.

[0065] The lid-side third restriction portions 38 are provided on the bottom surface 307 of the retainer storage recess 305 and protrude in the rear direction D12. The lid-side third restriction portions 38 extend inward in the left-right direction D3 from each of the pair of side walls 306, 306. Note that the arrangement and cross-sectional shape of the lid-side third restriction portions 38 are not limited as long as they function properly.

[0066] The front retainer 7 is configured to be attached to the cover 3 by sliding in a predetermined sliding direction from a first position (see FIGS. 3D to 3F) to a second position (see FIGS. 7A to 7C) relative to the cover 3. In this embodiment, the predetermined sliding direction is the downward direction D22.

[0067] The first position is the position before sliding, and in this embodiment, as shown in Figures 3A to 3F, when the front retainer 7 is moved in the forward direction D11 toward the retainer storage recess 305 of the cover body 3, it is a position where the cover body side second regulating portion 37 does not regulate the movement of the front retainer 7 (a position where the cover body side second regulating portion 37 is inserted into the hit and escape portion 78 and the cover body side first regulating portion 36 is inserted into the escape portion 768 of the support part side first regulating portion 76). Furthermore, the first position is a position where, when the front retainer 7 is moved in the forward direction D11 toward the retainer storage recess 305 of the lid body 3, the first end 761, which is on the opposite side of the substrate storage space 27 of the support part side first regulating portion 76 (front side; forward direction D11), abuts against the second end 362, which is on the side of the substrate storage space 27 of the lid body side first regulating portion 36 (rear side; rear direction D12), and the movement of the front retainer 7 in the forward direction D11 temporarily stops.

[0068] The lid body side second restricting portion 37 does not restrict movement of the front retainer 7 toward the side opposite the board storage space 27 (front side, forward direction D11) in order to position the front retainer 7 at the first position. From another perspective, the lid body side second restricting portion 37 does not restrict movement of the front retainer 7 toward the side opposite the board storage space 27 (front side, forward direction D11) in order to position the front retainer 7 at the first position.

[0069] In the first position, the lid body first restricting portion 36 allows movement of the support part side first restricting portion 76 in the sliding direction (downward direction D22) and also allows movement of the support part side second restricting portion 77 in the sliding direction (downward direction D22). From another perspective, in the first position, movement of the support part side first restricting portion 76 and the support part side second restricting portion 77 in the sliding direction (downward direction D22) is not restricted by the lid body side first restricting portion 36.

[0070] 6A and 6B , the support-side first restricting portion 76 deforms in the rear direction D12 from the first position shown in FIGS. 3D to 3F , etc., causing the front retainer 7 to move toward the side opposite the board storage space 27 (front side, forward direction D11), and the lid-side third restricting portion 38 restricts movement of the front retainer 7 toward the side opposite the board storage space 27 (front side, forward direction D11). Specifically, when the support-side first restricting portion 76 deforms, the portions of the front retainer 7 other than the support-side first restricting portion 76 can move in the forward direction D11. Furthermore, when the portions of the front retainer 7 other than the support-side first restricting portion 76 come into contact with the lid-side third restricting portion 38, they are unable to move in the forward direction D11. From another perspective, the portions of the front retainer 7 other than the support-side first restricting portion 76 can move in the forward direction D11 until they come into contact with the lid-side third restricting portion 38. In this specification, "restricting movement" is typically achieved by members coming into contact with each other, but is not limited to contact, and also includes cases where there is a gap within the scope of common technical knowledge, or a state where the members are not always in contact but come into contact after a slight movement.

[0071] 7A to 7C , the second position is a position after sliding, and in this embodiment, as shown in Figures 7A to 7C, the cover-side first restricting portion 36 restricts movement of the support-side first restricting portion 76 in the direction opposite to the sliding direction (upward direction D21) and restricts movement of the support-side second restricting portion 77 in the sliding direction (downward direction D22). Also, the second position is a position where the cover-side second restricting portion 37 restricts movement of the front retainer 7 toward the board storage space 27 (rear side, rear direction D12).

[0072] From another perspective, in the second position, movement of the support part side first regulating part 76 in the direction opposite to the sliding direction (upward direction D21) is regulated by the lid body side first regulating part 36, movement of the support part side second regulating part 77 in the sliding direction (downward direction D22) is regulated by the lid body side first regulating part 36, and movement of the front retainer 7 toward the board storage space 27 (rear side; rear direction D12) is regulated by the lid body side second regulating part 37.

[0073] The lid body 3 and the front retainer 7 have an incorrect installation prevention structure that prevents the front retainer 7 from being installed on the lid body 3 in an incorrect orientation. In this embodiment, movement of the front retainer 7 toward the side opposite the board storage space 27 (the front side; forward direction D11) to position the front retainer 7 in the first position is achieved by inserting all of the lid body second restriction portions 37 into the contact and relief portions 78 and not being restricted by the lid body second restriction portions 37. The lid body second restriction portions 37 and the contact and relief portions 78 are arranged so that all of the lid body second restriction portions 37 are inserted into the contact and relief portions 78 only when the front retainer 7 is installed on the lid body 3 in the correct orientation. If an attempt is made to install the front retainer 7 on the lid body 3 in an incorrect orientation, some or all of the lid body second restriction portions 37 will not be inserted into the contact and relief portions 78 and will hit the vertical frame portion 71. Therefore, the front retainer 7 cannot be installed on the lid body 3. This is the structure to prevent incorrect installation.

[0074] [Example of Manufacturing Method of Substrate Storage Container 1 of Embodiment] Next, an example of a manufacturing method of the substrate storage container 1 of the embodiment (a method of attaching the front retainer 7 to the lid 3) will be described. In order to position the front retainer 7 at the first position, the front retainer 7 is moved to the side opposite the substrate storage space 27 (front side; forward direction D11) without being restricted by the lid second restricting portion 37, as shown in Figures 3A to 3F.

[0075] More specifically, the lid body-side second restricting portion 37 is inserted into the contact and relief portion 78, and the lid body-side first restricting portion 36 is inserted into the relief portion 768 of the support part-side first restricting portion 76. Then, the first end portion 761 on the side opposite to the board storage space 27 of the support part-side first restricting portion 76 (front side, forward direction D11) comes into contact with the second end portion 362 on the side of the board storage space 27 of the lid body-side first restricting portion 36 (rear side, rear direction D12), and movement of the front retainer 7 in the forward direction D11 is temporarily stopped.

[0076] 6A and 6B , by deforming the support-side first restricting portion 76 from the first position, the front retainer 7 is moved toward the side opposite the board storage space 27 (front side, forward direction D11), and the lid-side third restricting portion 38 restricts movement of the front retainer 7 toward the side opposite the board storage space 27 (front side, forward direction D11). In detail, when the support-side first restricting portion 76 deforms, the portion of the front retainer 7 other than the support-side first restricting portion 76 can move in the forward direction D11. When the portion of the front retainer 7 other than the support-side first restricting portion 76 abuts against the lid-side third restricting portion 38, it cannot move in the forward direction D11.

[0077] In order to position the front retainer 7 at the second position, the support portion side first regulating portion 76 and the support portion side second regulating portion 77 are moved in the sliding direction (downward direction D22) without being regulated by the lid body side first regulating portion 36.

[0078] 7A to 7C , in the second position after sliding, movement of the support portion-side first restricting portion 76 in the direction opposite to the sliding direction (upward direction D21) is restricted by the lid portion-side first restricting portion 36, movement of the support portion-side second restricting portion 77 in the sliding direction (downward direction D22) is restricted by the lid portion-side first restricting portion 36, and movement of the front retainer 7 toward the substrate storage space 27 (rear side; rear direction D12) is restricted by the lid portion-side second restricting portion 37. In this way, the front retainer 7 is attached to the lid portion 3, and a portion of the substrate storage container 1 is manufactured.

[0079] The substrate storage container 1 according to the present embodiment having the above-described configuration can provide the following effects: The substrate storage container 1 according to the present embodiment comprises: a container body 2 having a cylindrical wall 20 with a container body opening 21 formed at one end and a closed other end, the inner surface of which forms a substrate storage space 27 capable of storing a plurality of substrates W and communicating with the container body opening 21; a lid 3 that is detachable from the container body opening 21 and can close the container body opening 21; and a lid-side substrate support portion (front retainer 7) that is located on a portion of the lid 3 that faces the substrate storage space 27 when the container body opening 21 is closed by the lid 3 and can support edges of the plurality of substrates W when the container body opening 21 is closed by the lid 3. The lid body 3 includes a lid body-side first restricting portion 36 and a lid body-side second restricting portion 37, and the front retainer 7 includes a support portion-side first restricting portion 76 and a support portion-side second restricting portion 77, and is configured to be attached to the lid body 3 by sliding from a first position to a second position in a predetermined sliding direction (downward direction D22) relative to the lid body 3. The lid body-side second restricting portion 37 does not restrict movement of the front retainer 7 to the side opposite the board storage space 27 (front side; forward direction D11) in order to position the front retainer 7 at the first position, and in the first position, the lid body-side first restricting portion 36 allows movement of the support portion-side first restricting portion 76 in the sliding direction (downward direction D22) and also allows movement of the support portion-side second restricting portion 77 in the sliding direction. In the second position, the lid body side first regulating portion 36 regulates the movement of the support part side first regulating portion 76 in the direction opposite to the sliding direction (upward direction D21) and regulates the movement of the support part side second regulating portion 77 in the sliding direction (downward direction D22), and the lid body side second regulating portion 37 regulates the movement of the front retainer 7 toward the board storage space 27 (rear side; rear direction D12).

[0080] Therefore, according to the substrate storage container 1 of the present embodiment, the front retainer 7 attached to the lid body 3 is unlikely to come off from the lid body 3. In detail, in the second position, the lid body first restricting portion 36, the lid body second restricting portion 37, the support portion first restricting portion 76, etc. cooperate to restrict movement of the front retainer 7 in the direction opposite to the sliding direction (upward direction D21), in the sliding direction (downward direction D22), and toward the substrate storage space 27 (rear side; rear direction D12), so that the front retainer 7 attached to the lid body 3 is unlikely to come off from the lid body 3.

[0081] Furthermore, compared to a configuration in which the front retainer 7 is inseparably attached to the cover 3, the front retainer 7 can be slid in the direction opposite to the sliding direction (upward direction D21) by lifting or destroying the support-side first restriction portion 76. This makes it easy to separate the front retainer 7 and discard or recycle it.

[0082] The cover-side first restricting portion 36 of the cover 3 and the support-side first restricting portion 76 of the front retainer 7 are each provided singly in the vertical direction D2, at approximately the center in the vertical direction D2. This makes it easy to adjust the position of the front retainer 7 in the vertical direction D2.

[0083] In the embodiment, the front retainer 7 further includes a contact relief portion 78. When viewed from the opposite side from the board storage space 27 (front side, forward direction D11), the contact relief portion 78 is configured to avoid contact with the lid body second restricting portion 37, so that the lid body second restricting portion 37 does not restrict movement of the front retainer 7 toward the opposite side from the board storage space 27 (front side, forward direction D11) to position the front retainer 7 at the first position. In the second position, when viewed from the opposite side from the board storage space 27 (front side, forward direction D11), the contact relief portion 78 is configured to not avoid contact with the lid body second restricting portion 37, so that the lid body second restricting portion 37 restricts movement of the front retainer 7 toward the board storage space 27 (rear side, rear direction D12).

[0084] By further providing the front retainer 7 with a hit and run portion 78, it is possible to easily realize a configuration that does not restrict movement of the front retainer 7 toward the side opposite the board storage space 27 (front side; forward direction D11) to position it at the first position, but restricts movement of the front retainer 7 toward the board storage space 27 (rear side; rear direction D12) at the second position, i.e., a configuration in which the front retainer 7 can be moved when necessary in the fore-and-aft direction D1, and restricts movement of the front retainer 7 when necessary.

[0085] In the embodiment, in the first position, the first end 761 of the support-side first restricting portion 76, which is on the side opposite to the board storage space 27 (front side, forward direction D11), abuts against the second end 362 of the cover-side first restricting portion 36, which is on the side of the board storage space 27 (rear side, rear direction D12). Therefore, by moving the front retainer 7 to the side opposite to the board storage space 27 (front side, forward direction D11) and stopping the movement at the abutting position, the first state before sliding can be easily formed.

[0086] In the embodiment, the lid 3 further includes a lid-side third restricting portion 38. When the support-side first restricting portion 76 is deformed from the first position, the front retainer 7 moves to the side opposite the board storage space 27 (front side, forward direction D11), and the lid-side third restricting portion 38 restricts the movement of the front retainer 7 to the side opposite the board storage space 27 (front side, forward direction D11).

[0087] When attaching the front retainer 7 to the lid 3, the support-side first restricting portion 76 is deformed from the first position, the front retainer 7 is brought into contact with the lid-side third restricting portion 38, and then the front retainer 7 is slid in the sliding direction (downward direction D22) to move it to the second position. By requiring such a step-by-step attachment operation, it is possible to prevent the front retainer 7 from sliding when, for example, attachment of the front retainer 7 to the lid 3 is not intended.

[0088] In this embodiment, the front retainer 7 has a pair of vertical frame portions 71 (71A, 71B) extending in a predetermined direction (up-down direction D2), a pair of horizontal frame portions 74, 74 extending in a direction different from the predetermined direction (left-right direction D3), retainer legs 72 connected to the vertical frame portions 71, and lid-side substrate receiving portions 73 provided on the retainer legs 72. The retainer legs 72 are each made up of a leg pair 72U, with one retainer leg 72A connected to one vertical frame portion 71A and the other retainer leg 72B connected to the other vertical frame portion 71B but not connected to the one retainer leg 72A, and the number of leg pairs 72U provided is the same as the number of substrates W stored in the substrate storage container 1. The pair of horizontal frame portions 74, 74 connect the pair of vertical frame portions 71A, 71B on both outer sides in the direction in which the leg pairs 72U are aligned (the up-down direction D2).

[0089] Since the horizontal frame portion 74 can increase the rigidity of the front retainer 7 in the left-right direction D3, it is possible to employ the leg pair 72U which is highly flexible and easily deformed.

[0090] The present invention is not limited to the above-described embodiments, and modifications are possible within the technical scope defined in the claims.

[0091] 8 is a schematic perspective view (corresponding to FIG. 4C ) of the lid-side first restricting portion 36 and the lid-side second restricting portion 37 in a modified form. In the modified form shown in FIG. 8 , a first surface 371, which is the surface of the lid-side second restricting portion 37 on the side opposite to the board storage space 27 (front side; forward direction D11), is inclined so as to approach the board storage space 27 (rear side; rear direction D12) as it moves in the direction opposite to the sliding direction (upward direction D21). Because the first surface 371 is inclined in this manner, when the front retainer 7 is slid in the sliding direction (downward direction D22), the vertical frame portion 71 of the front retainer 7 and the lid-side second restricting portion 37 are more likely to overlap (become more likely to slide; be more likely to move to the second position).

[0092] The predetermined sliding direction is not limited to the downward direction D22 and may be, for example, the upward direction D21. The predetermined direction in which the vertical frame portion 71 extends is not limited to the up-down direction D2. The "direction different from the predetermined direction" in which the horizontal frame portion 74 extends is not limited to the left-right direction D3.

[0093] The deformation direction of the support portion-side first restricting portion 76 from the first position is not limited to the rearward direction D12 and may be, for example, inward in the left-right direction D3. In this case, it is preferable that the support portion-side first restricting portion 76 has a configuration that allows it to easily deform inward in the left-right direction D3.

[0094] In the embodiment, the leg pair 72U is composed of a (cantilevered) retainer leg 72 (72A) and a retainer leg 72 (72B) separated in the left-right direction D3, but is not limited to this. One retainer leg 72 (72A) and the other retainer leg 72 (72B) may be connected (via a cover-side board support portion 73, if necessary). In such a configuration, the horizontal frame portion 74 can be omitted.

[0095] Furthermore, the shapes of the container body and the lid, and the number and dimensions of the substrates W that can be stored in the container body are not limited to the shapes of the container body 2 and the lid 3 in this embodiment, and the number and dimensions of the substrates W that can be stored in the container body 2. Furthermore, although the substrates W in this embodiment are silicon wafers with a diameter of 300 mm, they are not limited to this value.

[0096] In addition, in this embodiment, the rear-side substrate support portion includes the rear-side substrate support portion 6 that is integrally molded with the container body 2 at the rear end of the plate portion 51 of the side substrate support portion 5, but is not limited to this configuration. For example, the rear-side substrate support portion may not be integrally molded with the container body, but may be configured as a separate body.

[0097] DESCRIPTION OF SYMBOLS 1 Substrate storage container 2 Container body 20 Wall portion 21 Container body opening 27 Substrate storage space 28 Opening periphery 3 Lid 36 Lid side first restricting portion 361 First end 362 Second end 363 Third end 364 Fourth end 37 Lid side second restricting portion 371 First surface 38 Lid side third restricting portion 7 Lid side substrate support portion (front retainer) 71, 71A, 71B Vertical frame portion (first frame portion) 72, 72A, 72B Retainer leg portion (leg portion) 72U Leg pair 73 Lid side substrate receiving portion (substrate receiving portion) 74 Second frame portion (horizontal frame portion) 75 Grip portion (structure for improving slide operability) 76 Support portion side first restricting portion 761 First end 763 Third end 766 Extension portion 767 Base portion 768 Removal portion 77 Support portion side second restriction portion 774 Fourth end portion 78 Hit and run-off portion D1 Front-rear direction D11 Front direction (opposite side to the board storage space side) D12 Rear direction (board storage space side) D2 Up-down direction (predetermined direction, parallel direction) D21 Upward direction (opposite direction to the sliding direction) D22 Downward direction (sliding direction) D3 Left-right direction (direction different from the predetermined direction) W Board

Claims

1. A container body having a cylindrical wall portion with a container body opening formed at one end and a closed other end, the inner surface of the wall portion forming a substrate storage space capable of storing a plurality of substrates and communicating with the container body opening; a lid body that is detachable from the container body opening and capable of closing the container body opening; and a lid body side substrate support portion that is a part of the lid body and is arranged in a portion that faces the substrate storage space when the container body opening is closed by the lid body, and that is capable of supporting edges of the plurality of substrates when the container body opening is closed by the lid body, the lid body having a lid body side first restricting portion and a lid body side second restricting portion, the lid body side substrate support portion having a support portion side first restricting portion and a support portion side second restricting portion, and configured to be attached to the lid body by sliding relative to the lid body from a first position to a second position in a predetermined sliding direction, a substrate storage container in which the lid side second regulating portion does not regulate movement of the lid side substrate support portion toward the side opposite to the substrate storage space in order to position the lid side substrate support portion at the first position, the lid side first regulating portion allows movement of the support portion side first regulating portion in the sliding direction and also allows movement of the support portion side second regulating portion in the sliding direction, and in the second position the lid side first regulating portion regulates movement of the support portion side first regulating portion in the direction opposite to the sliding direction and regulates movement of the support portion side second regulating portion in the sliding direction, and the lid side second regulating portion regulates movement of the lid side substrate support portion toward the substrate storage space.

2. A substrate storage container as described in claim 1, wherein the lid side substrate support portion further comprises a contact relief portion, and when viewed from the side opposite the substrate storage space, the contact relief portion is configured to avoid contact with the lid side second restriction portion, so that the lid side second restriction portion does not restrict movement of the lid side substrate support portion toward the side opposite the substrate storage space in order to position the lid side substrate support portion at the first position, and when viewed from the side opposite the substrate storage space, the contact relief portion is configured not to avoid contact with the lid side second restriction portion, so that the lid side second restriction portion restricts movement of the lid side substrate support portion toward the substrate storage space.

3. A substrate storage container as described in claim 1 or claim 2, wherein the surface of the second lid-side restricting portion opposite the substrate storage space is inclined so as to approach the substrate storage space as it moves in the direction opposite to the sliding direction.

4. A substrate storage container as described in any one of claims 1 to 3, wherein, in the first position, the side of the first regulating portion on the support side opposite to the side of the substrate storage space abuts against the side of the first regulating portion on the lid side facing the substrate storage space.

5. A substrate storage container as described in any one of claims 1 to 4, wherein the lid further comprises a lid-side third restricting portion, and when the support-side first restricting portion deforms from the first position, the lid-side substrate support portion moves to the side opposite the substrate storage space, and the lid-side third restricting portion restricts movement of the lid-side substrate support portion to the side opposite the substrate storage space.

6. A substrate storage container as described in any one of claims 1 to 5, wherein the lid and the lid-side substrate support portion have an anti-mis-attachment structure that prevents the lid-side substrate support portion from being attached to the lid in an incorrect orientation.

7. A substrate storage container as described in any one of claims 1 to 6, wherein the lid body side substrate support portion has a pair of first frame portions extending in a predetermined direction, a pair of second frame portions extending in a direction different from the predetermined direction, legs connected to the first frame portions, and substrate receiving portions provided on the legs, the legs constitute leg pairs with one leg connected to one of the first frame portions and the other leg connected to the other first frame portion but not connected to the one leg, the number of leg pairs provided being the same as the number of substrates stored in the substrate storage container, and the pair of second frame portions connect the pair of first frame portions on both outsides in the direction in which the leg pairs are aligned.

8. A substrate storage container as described in any one of claims 1 to 7, wherein the lid side substrate support portion further comprises a structure for improving slide operability at a position that does not interfere with the lid side second restricting portion in the first position.

9. A method for manufacturing a substrate storage container comprising: a container body having a cylindrical wall portion at one end of which a container body opening is formed and the other end of which is closed, the inner surface of which defines a substrate storage space capable of storing a plurality of substrates and communicating with the container body opening; a lid body that is detachable from the container body opening and capable of closing the container body opening; and a lid body side substrate support portion that is a part of the lid body that is arranged in a portion facing the substrate storage space when the container body opening is closed by the lid body and that is capable of supporting edges of the plurality of substrates when the container body opening is closed by the lid body, the lid body having a lid body side first restricting portion and a lid body side second restricting portion, and the lid body side substrate support portion having a support portion side first restricting portion and a support portion side second restricting portion, and configured to be attached to the lid body by sliding in a predetermined sliding direction relative to the lid body from a first position to a second position, a lid-side substrate support portion configured to be inserted into the substrate storage space by a first restricting portion, the lid-side substrate support portion being moved toward the opposite side from the substrate storage space without being restricted by the lid-side second restricting portion; and a lid-side substrate support portion configured to be inserted into the substrate storage space by a second restricting portion, the lid-side substrate support portion being moved toward the substrate storage space without being restricted by the lid-side first restricting portion.

10. A method for manufacturing a substrate storage container as described in claim 9, wherein the lid further comprises a lid-side third regulating portion, and by deforming the support-side first regulating portion from the first position, the lid-side substrate support portion is moved to the side opposite the substrate storage space, and the lid-side third regulating portion regulates movement of the lid-side substrate support portion to the side opposite the substrate storage space.

11. A lid-side substrate support part disposed on a lid of a substrate storage container comprising: a container body having a cylindrical wall part with a container body opening at one end and a closed other end, the inner surface of the wall part forming a substrate storage space capable of storing a plurality of substrates and communicating with the container body opening; and a lid part that is detachable from the container body opening and can close the container body opening, the lid part comprising a lid-side first restricting part and a lid-side second restricting part, wherein the lid-side substrate support part is disposed on a part of the lid that faces the substrate storage space when the container body opening is closed by the lid, and is capable of supporting edges of the plurality of substrates when the container body opening is closed by the lid, and the lid-side substrate support part comprises a support-side first restricting part and a support-side second restricting part, and is configured to be attached to the lid by sliding relative to the lid body in a predetermined sliding direction from a first position to a second position, a lid body side substrate support portion, wherein movement of the lid body side substrate support portion toward the side opposite to the substrate storage space in order to position the lid body side substrate support portion at the first position is not restricted by the lid body side second restricting portion, and at the first position, movement of the support portion side first restricting portion and the support portion side second restricting portion in the sliding direction is not restricted by the lid body side first restricting portion, and at the second position, movement of the support portion side first restricting portion in the direction opposite to the sliding direction is restricted by the lid body side first restricting portion, and movement of the support portion side second restricting portion in the sliding direction is restricted by the lid body side first restricting portion, and movement of the lid body side substrate support portion toward the substrate storage space is restricted by the lid body side second restricting portion.

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