Semiconductor gas piping fitting fixture

Abstract

A fitting fixture for semiconductor gas piping of the present invention is characterized in that it includes a female fitting part connected to one side of a pipe through which a gas used in a semiconductor process flows, a male fitting part connected to the other side of a pipe at a position opposite to the one side of the pipe and connected to the female fitting part, a female nut part on which the female fitting part is supported on the inside, a male nut part on which the male fitting part is supported on the inside and coupled to the female nut part to connect the female fitting part and the male fitting part, and a gasket part whose one side is supported by the female fitting part and whose other side is supported by the male nut part to prevent gas leakage from the female fitting part and the male fitting part.

Description

[Technical field]

[0001] The present invention relates to a fixture, and more particularly to a fitting fixture for semiconductor gas piping used to connect gas piping used in a semiconductor manufacturing process. [Background technology]

[0002] Generally, the process of manufacturing a semiconductor can be roughly divided into several steps, such as deposition, ion injection, photolithography, etching, and cleaning, which are repeated many times.

[0003] Among the above-mentioned processes, the processes that require gas use plasma, i.e., ionized gas, and Ar, SiH 4 , N 2 O, P.H. 3 ,SCIENCE FICTION 6 , Cl, O 2 Various gases such as the above are used. Most of these gases, that is, gases, have a very high production cost, and some of them can have a fatal effect on the human body if they leak.

[0004] A double-sided fitting is used for the piping for flowing the gas. This type of fitting connection does not cause problems such as accumulation of foreign matter due to a screw trap structure or stagnation of residual gas compared to the screw-processed sealed connection type of pipe piping used in general industrial piping equipment, and is therefore commonly used for piping in cutting-edge industrial facilities that require high-purity fluids or gases.

[0005] In addition, the double-sided connection fitting is made up of components included in the double-sided connection fitting, which are opposed by a male double-sided connector and a female double-sided connector, and the male double-sided connector includes a male nut having a thread formed on its outer peripheral surface and an outer surface which has a bolt shape or has a through hole of a surface-finished member inside, and the female double-sided connector includes a female nut having a thread formed on its inner peripheral surface for fastening to the male nut.

[0006] Meanwhile, the conventional double-sided connection fitting can only tell whether the gasket is inserted or not, but cannot tell whether the nut is over-tightened or not.

[0007] In addition, when fastened, the male nut is designed to rotate, and there are limitations to its application; rotating the male nut will cause leakage and is therefore prohibited.

[0008] Furthermore, in order to rotate the female nut, it must be manufactured according to the gasket and retainer, and eye-marking is required when fastening, so a new improvement method is required.

[0009] The above technical configurations are background techniques for aiding understanding of the present invention, and do not represent prior art well known in the technical field to which the present invention pertains. [Prior art documents] [Patent documents]

[0010] [Patent Document 1] Korean Patent No. 10-1992086 Summary of the Invention [Problem to be solved by the invention]

[0011] Therefore, the technical objective of the present invention is to provide a fitting fastener for semiconductor gas piping that allows the material of the gasket to be confirmed by its color, allows the female nut to be turned like a standard VCR type for fastening without leakage, displays the color of the female nut so that the result of the work can be confirmed from a distance, allows over-tightening and under-tightening to be confirmed, and does not require image marking after fastening. [Means for solving the problem]

[0012] According to one aspect of the present invention, the semiconductor processing device includes a female fitting portion connected to one side pipe through which a gas used in a semiconductor process flows; a male fitting portion connected to another side pipe at a position opposite to the one side pipe and connected to the female fitting portion; a female nut portion on which the female fitting portion is supported on an inner side; a male nut portion on which the male fitting portion is supported on an inner side and connected to the female nut portion to connect the female fitting portion and the male fitting portion; and a gasket portion having one side supported by the female fitting portion and the other side supported by the male nut portion to prevent gas leakage from the female fitting portion and the male fitting portion. The gasket portion includes a protruding piece having one side exposed to the outside of the female nut portion, the protruding piece is provided with a gasket indication portion to indicate the area of ​​the exposed protruding piece, the gasket indication portion is indicated to correspond to the material of the gasket portion, the female nut portion is provided with a gasket slot into which the gasket portion is inserted, and a first indication portion and a second indication portion are provided in the area of ​​the female nut portion where the gasket slot is provided, the first indication portion and the second indication portion are indicated in different colors, and a fitting fastener for semiconductor gas piping that indicates the fastening state of the female nut portion can be provided.

[0013] The gasket portion may include a gasket body having a gasket hole communicating with the female fitting portion and the male fitting portion; a protruding piece provided on the gasket body and having an end exposed to the outside of the gasket slot; and the gasket display portion provided on the protruding piece.

[0014] The female nut part includes a female nut body in which the gasket slot is formed; a first indication part provided on one side of the female nut body in which the gasket slot is formed; and a second indication part provided on the other side of the female nut body in which the gasket slot is formed and provided in a different color from the first indication part, and when the protruding piece is located on the first indication part, it indicates a state before the male nut part of the female nut part is tightened, and when the protruding piece is located on the second indication part, it indicates a state in which the female nut part and the male nut part are tightened. Effect of the Invention

[0015] In the embodiments of the present invention, the gasket material can be confirmed by its color, the female nut can be rotated like a standard VCR type to tighten without leakage, the color of the female nut is displayed so that the work result can be confirmed from a distance, over-tightening and under-tightening can be confirmed, and image marking is not required after tightening, which shortens the work time and makes it impossible to fabricate the work result. [Brief description of the drawings]

[0016] [Figure 1] 1 is a schematic view of a fitting fixture for semiconductor gas piping according to an embodiment of the present invention; [Diagram 2] FIG. 2 is an exploded perspective view of FIG. [Diagram 3] 2 is a view illustrating a state in which a gasket part in FIG. 1 is separated; [Figure 4] FIG. 2 is a diagram showing a state of use of the present embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0017] For a fuller understanding of the invention, its operating advantages and the objects attained by its practice, reference should be made to the accompanying drawings in which a preferred embodiment of the invention is illustrated and the contents thereof.

[0018] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will now be described in detail by describing preferred embodiments thereof with reference to the accompanying drawings, in which like reference numerals in different drawings refer to like elements.

[0019] FIG. 1 is a diagram illustrating a fitting fixing device for semiconductor gas piping according to one embodiment of the present invention, FIG. 2 is an exploded perspective view of FIG. 1, FIG. 3 is a diagram illustrating a state in which the gasket part in FIG. 1 has been separated, and FIG. 4 is a diagram illustrating the use of this embodiment.

[0020] As shown in these drawings, the semiconductor gas piping fitting fixture (1) according to this embodiment includes a female fitting portion (100) connected to one side of a pipe through which a gas used in a semiconductor process flows, a male fitting portion (200) connected to the other side of a pipe at a position opposite the one side of the pipe and connected to the female fitting portion (100), a female nut portion (300) on which the female fitting portion (100) is supported on the inside, a male nut portion (400) on which the male fitting portion (200) is supported on the inside and coupled to the female nut portion (300) to connect the female fitting portion (100) and the male fitting portion (200), and a gasket portion (500) supported on one side by the female fitting portion (100) and supported on the other side by the male nut portion (400) to prevent gas leakage from the female fitting portion (100) and the male fitting portion (200).

[0021] The female fitting portion (100) is connected to one side of a pipe through which gas used in the semiconductor process flows, and can be connected to the male fitting portion (200) via the connection between the male nut portion (400) and the female nut portion (300) and sandwiching the gasket portion (500).

[0022] In this embodiment, the female fitting part (100) includes a female fitting body (110) and a first flow passage (120) provided inside the female fitting body (110), as shown in FIG.

[0023] In this embodiment, the outer wall of the female fitting body (110) is provided with multiple steps so that the female fitting body (110) can be hooked and supported inside the female nut body (310) of the female nut portion (300).

[0024] The male fitting portion (200) is disposed opposite the female fitting portion (100) and is connected to the other side of the piping through which gas used in the semiconductor process flows, and can be connected to the female fitting portion (100) via the connection between the male nut portion (400) and the female nut portion (300) and sandwiched between the gasket portion (500).

[0025] In this embodiment, as shown in FIG. 2, the male fitting portion (200) includes a male fitting body (210) arranged to face the female fitting body (110), a gasket contact portion (220) provided on one side of the male fitting body (210) and contacting the gasket portion (500), and a second flow path (230) provided inside the male fitting body (210).

[0026] The female nut portion (300) can be fastened to the male nut portion (400) to sandwich the gasket portion (500) and fix the female fitting portion (100) and the male fitting portion (200) in position.

[0027] In this embodiment, as shown in FIG. 1, the female nut part (300) includes a female nut body (310) that is arranged at a position corresponding to the female fitting part (100) and is coupled to the male nut body (410) of the male nut part (400), a first marking part (320) that is provided on the outer surface part of the female nut body (310) and indicates the fastening position of the gasket part (500), and a second marking part (330) that is provided on the outer surface part of the female nut body (310) so as to be in contact with the first marking part (320), indicates the fastening position of the gasket part (500), and is provided in a different color from the first marking part (320).

[0028] As shown in FIG. 2, the female nut body (310) of the female nut portion (300) is provided with a gasket slot (311), and the gasket portion (500) can also be pulled into the female nut body (310) through the gasket slot (311).

[0029] In this embodiment, the gasket slot (311) may be provided in the female nut body (310) in the area where the first indicia (320) and the second indicia (330) are provided, as shown in FIG.

[0030] The first indicator (320) of the female nut part (300) is displayed in red, for example, to guide the user to easily check the position of the gasket part (500) even from a distance. In this embodiment, after the fastening of the female nut part (300) to the male nut part (400) is completed, the protruding piece (520) of the gasket part (500) can be positioned on the first indicator (320). That is, in this embodiment, after the fastening of the female nut part (300) and the male nut part (400) is completed, the protruding piece (520) of the gasket part (500) can be positioned at the outermost position of the gasket slot (311) provided on the first indicator (320).

[0031] The second indicator portion (330) of the female nut portion (300) is displayed in blue color, for example, and can guide the user to easily check the position of the gasket even from a distance.

[0032] The male nut portion (400) can be fastened to the female nut portion (300) to sandwich the gasket portion (500) and fix the positions of the female fitting portion (100) and the male fitting portion (200).

[0033] In this embodiment, the male nut part (400) includes a male nut body (410) having a male nut thread (411) on its outer wall, and a male nut head (420) provided on one side of the male nut body (410) and serving as a fastening location for a fastening tool, as shown in FIG.

[0034] In this embodiment, the inside of the male nut body (410) is empty, and semiconductor process gas can move into the male nut body (410), the male fitting body (210), the female fitting body (110), the gasket hole (511) of the gasket part (500), the female fitting body (110), and the female nut body (310).

[0035] As shown in FIG. 3, the gasket portion (500) is pulled into the female nut body (310) through the gasket slot (311) of the female nut portion (300), and one side of the gasket portion (500) is supported by the female nut body (310) and the other side is supported by the gasket contact portion (220) of the male fitting portion (200), thereby preventing gas from leaking from the female fitting portion (100) and the male fitting portion (200).

[0036] In this embodiment, as shown in FIG. 2, the gasket part (500) includes a gasket body (510) having a gasket hole (511) in the center, a protruding piece (520) provided on the gasket body (510) and one side of the gasket part (520) exposed to the outside of the gasket slot (311), and a gasket display part (530) provided on the protruding piece (520) to indicate the material of the gasket body (510) by its color.

[0037] In this embodiment, the gasket indicator portion (530) may be displayed in a color different from that of the first indicator portion (320) and the second indicator portion (330), for example, in yellow.

[0038] In this embodiment, when the female nut body (310) is fastened, the protrusion is caught by the female nut body (310) and rotates, so that over-fastening and under-fastening of the female nut body (310) can be checked.

[0039] In addition, in this embodiment, the material of the gasket portion (500) can be easily identified by the color displayed on the gasket display portion (530).

[0040] As described above, in this embodiment, the gasket material can be confirmed by its color, the female nut can be rotated like a standard VCR type to tighten without leakage, the color of the female nut is displayed so that the work result can be confirmed from a distance, over-tightening and under-tightening can be confirmed, and image marking is not required after tightening, the work time can be shortened, and it is impossible to fabricate the work result.

[0041] As mentioned above, the present invention is not limited to the described embodiments, and it is obvious to a person skilled in the art that various modifications and variations are possible without departing from the scope of the present invention. Modifications and variations should be possible without departing from the essential characteristics of the present invention. Therefore, such modifications or variations should be considered to belong to the scope of the claims of the present invention. [Explanation of symbols]

[0042] 100 Female fitting 110 Female fitting body 120 First Channel 200 Male fitting 210 Male Fitting Body 220 Gasket contact area 230 Second Stream 300 Female nut part 310 Female nut body 311 Gasket slot 320 1st display section 330 2nd display section 400 Male nut part 410 Male nut body 411 Male Nut Thread 420 Male nut head 500 Gasket part 510 Gasket body 511 Gasket hole 520 Projecting piece 530 Gasket display unit

Claims

1. a female fitting portion for connecting to one side piping through which gas used in semiconductor processing flows; a male fitting portion connected to the other side pipe at a position opposite to the one side pipe and connected to the female fitting portion; a female nut portion in which the female fitting portion is supported; a male nut portion on which the male fitting portion is supported and which mates with the female nut portion to couple the female fitting portion and the male fitting portion; and a gasket portion having one side supported by the female fitting portion and another side supported by the male nut portion, the gasket portion preventing gas leakage from the female fitting portion and the male fitting portion; The gasket portion includes a protruding piece having one side exposed to the outside of the female nut portion, The protruding piece is provided with a gasket marking portion so as to indicate an area of ​​the protruding piece that is exposed, and the gasket marking portion is marked to correspond to a material of the gasket portion, The female nut portion is provided with a gasket slot into which the gasket portion is inserted, A first marking portion and a second marking portion are provided in the region of the female nut portion where the gasket slot is provided, The first indicator portion and the second indicator portion are displayed in different colors to indicate the fastening state of the female nut portion, The female nut portion is a female nut body having the gasket slot; the first indicia provided on one side of the female nut body on which the gasket slot is provided; and A second marking portion is provided on the other side surface of the female nut body on which the gasket slot is provided, and is provided in a color different from that of the first marking portion. When the protruding piece is located at the first indicator, it indicates a state before the female nut part and the male nut part are tightened, and when the protruding piece is located at the second indicator, it indicates a state in which the female nut part and the male nut part are tightened. Fitting fixing device for semiconductor gas piping.

2. The gasket portion is a gasket body having a gasket hole communicating with the female fitting portion and the male fitting portion; a protruding piece provided on the gasket body, the end of which is exposed to the outside of the gasket slot; and The gasket indication portion is provided on the protruding piece.

2. The fitting fixture for semiconductor gas piping according to claim 1.

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