Substrate processing apparatus, substrate processing method, method for manufacturing a semiconductor device, and program

Abstract

To provide a technique capable of efficiently editing the file of the setting values while ensuring their consistency before and after change.SOLUTION: A substrate processing apparatus includes: a display part that can display a file describing processing conditions including a plurality of setting values, of a substrate; an operation part that can perform an editing operation of the file and at least one of undo operation and redo operation of the setting values set in the edition operation; a storage part that stores the file and operation history information on the undo operation or the redo operation; a determination part that determines whether or not the setting value is within an effective range when the setting value is reset during the undo operation or the redo operation; a control part that includes the storage part and the determination part, and can perform control of the edition operation of the setting value; and a process vessel that allows the substrate to be processed on the basis of the designated file.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present disclosure relates to a substrate processing apparatus, Substrate processing method, a method for manufacturing a semiconductor device, and a program.

Background Art

[0002] In a substrate processing apparatus, there are cases where a recipe for setting processing conditions for executing processing of a substrate in each step is edited, or parameters for executing the recipe are edited. Further, there are many setting items for the recipe and parameters, and the burden on the editor when editing the recipe and parameters is large. In a substrate processing apparatus, in order to reduce the burden, there may be provided an auxiliary function when editing the recipe and parameters.

[0003] For example, Patent Document 1 describes a substrate processing apparatus capable of restricting inputtable set values within an appropriate range when changing set values in editing parameters used when editing a recipe. In this Patent Document 1, there is a description related to input assistance during file editing in a substrate processing apparatus.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] By the way, after changing the set value a plurality of times, when returning from that state to the previous state, there is an operation of ending without saving the edited file, reopening the file again, and setting the set value again, or manually restoring the changed set value, which may lead to a decrease in work efficiency.

[0006] In addition, when the set value is changed, not only the changed set value but also, depending on the set value, the valid range of other related set values may be exceeded, so there are cases where the consistency of the set values cannot be ensured before and after the change.

[0007] The present disclosure provides a technique capable of efficiently performing an editing operation of a file while ensuring the consistency of set values before and after the change.

Means for Solving the Problem

[0008] According to one aspect of the present disclosure, a display unit capable of displaying a file describing processing conditions of a substrate having a plurality of set values, an editing operation of the file, and an operation unit capable of performing at least one of canceling or re-doing the set values set in the editing operation, a storage unit that stores the file and the operation history information of the canceling or re-doing operation, a determination unit that determines the valid range of the set values re-set at the time of the canceling or re-doing operation, a control unit having the storage unit and the determination unit and capable of controlling the editing operation of the set values, and a processing container capable of processing the substrate based on the designated file are provided.

Effect of the Invention

[0009] According to the present disclosure, there is an effect that an editing operation of a file can be efficiently performed while ensuring the consistency of set values before and after the change.

Brief Description of the Drawings

[0010]

Figure 1

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Mode for Carrying Out the Invention

[0011] Hereinafter, embodiments for realizing the technology of the present disclosure will be described in detail with reference to the drawings. In addition, components and processes that perform the same functions may be given the same reference numerals throughout the drawings, and redundant descriptions may be omitted as appropriate. Further, the present disclosure is not limited to the following embodiments, and can be implemented with appropriate modifications within the scope of the present disclosure. Also, the drawings used in the following description are all schematic, and the dimensional relationships between the respective elements shown in the drawings, the ratios of the respective elements, etc. do not necessarily match the actual ones. Also, the dimensional relationships between the respective elements and the ratios of the respective elements do not necessarily match even between multiple drawings.

[0012] First, with reference to FIGS. 1 and 2, an overview of the substrate processing apparatus according to the present embodiment will be described.

[0013] FIG. 1 is a perspective view showing an example of a substrate processing apparatus 1 according to the present embodiment. Further, FIG. 2 is a cross-sectional view of the substrate processing apparatus 1 according to the present embodiment as viewed from the side. FIGS. 1 and 2 show a vertical substrate processing apparatus 1 as an example of the substrate processing apparatus. Note that the substrate processed in the substrate processing apparatus 1 is shown as a semiconductor wafer made of silicon or the like as an example.

[0014] As shown in FIGS. 1 and 2, the substrate processing apparatus 1 includes a housing 2, and a front maintenance port 4 as an opening provided in a lower portion of a front wall 3 of the housing 2 so as to be maintainable. The front maintenance port 4 is opened and closed by a front maintenance door 5.

[0015] A pod loading / unloading port 6 is formed in the front wall 3 of the housing 2 so as to communicate the inside and outside of the housing 2, and the pod loading / unloading port 6 is opened and closed by a front shutter (loading / unloading port opening / closing mechanism) 7. A load port (substrate transfer container delivery stand) 8 is installed on the front side directly in front of the pod loading / unloading port 6, and the load port 8 is configured to align the placed pod 9.

[0016] The pod 9 is a sealed substrate transfer container, and is configured to be carried onto the load port 8 by an in-process transfer device (not shown) and carried out from above the load port 8.

[0017] An upper portion of a substantially central portion in the front-rear direction inside the housing 2 is provided with a rotary pod shelf (substrate transfer container storage shelf) 11, and the rotary pod shelf 11 is configured to store a plurality of pods 9.

[0018] The rotary pod shelf 11 includes a column 12 that is vertically erected and intermittently rotated, and a plurality of shelves (substrate transfer container placement shelves) 13 that are radially supported at upper, middle, and lower positions on the column 12. The shelf 13 is configured to store a plurality of pods 9 in a placed state.

[0019] Below the rotary pod shelf 11, a pod opener (substrate transfer container lid opening and closing mechanism) 14 is provided. The pod opener 14 is configured to place the pod 9 and to be able to open and close the lid of the pod 9.

[0020] A pod transfer mechanism (container transfer mechanism) 15 is installed between the load port 8, the rotary pod shelf 11, and the pod opener 14. The pod transfer mechanism 15 is configured to hold the pod 9 and be able to move up and down and advance and retreat in the horizontal direction. It is configured to transfer the pod 9 between the load port 8, the rotary pod shelf 11, and the pod opener 14.

[0021] At the lower part of the substantially central part in the front-rear direction inside the housing 2, a sub-housing 16 is provided across the rear end. On the front wall 17 of the sub-housing 16, a pair of wafer (substrate) loading and unloading ports (substrate loading and unloading ports) 19 for loading and unloading the wafer 18 into and out of the sub-housing 16 are opened side by side in two vertical stages. The pod opener 14 is provided for each of the upper and lower wafer loading and unloading ports 19.

[0022] The pod opener 14 includes a mounting table 21 for mounting the pod 9 and an opening and closing mechanism 22 for opening and closing the lid of the pod 9. The pod opener 14 is configured to open and close the wafer inlet and outlet of the pod 9 by opening and closing the lid of the pod 9 mounted on the mounting table 21 with the opening and closing mechanism 22.

[0023] The sub-housing 16 forms an airtight transfer chamber 23 from the space (pod transfer space) where the pod transfer mechanism 15 and the rotary pod shelf 11 are arranged. A wafer transfer mechanism (substrate transfer mechanism) 24 is installed in the front region of the transfer chamber 23. The wafer transfer mechanism 24 includes wafer mounting plates 25 for mounting the required number of wafers 18 (for example, five in the illustration). The wafer mounting plates 25 are configured to be linearly movable, rotatable in the horizontal direction, or movable up and down in the horizontal direction. The wafer transfer mechanism 24 is configured to load and unload the wafer 18 with respect to the boat (substrate holder) 26.

[0024] In the rear region of the transfer chamber 23, a standby section 27 for accommodating and waiting for the boat 26 is configured, and a vertical processing furnace 28 is provided above the standby section 27. The processing furnace 28 forms a processing chamber 29 inside, and the lower end of the processing chamber 29 serves as a furnace mouth, and the furnace mouth is configured to be opened and closed by a furnace mouth shutter (furnace mouth opening and closing mechanism) 31. Note that the processing chamber 29 is an example of a processing container.

[0025] A boat elevator (substrate holder lifting mechanism) 32 for lifting and lowering the boat 26 is installed between the right end of the housing 2 and the right end of the standby section 27 of the sub-housing 16. A seal cap 34 as a lid is horizontally attached to an arm 33 connected to the lifting platform of the boat elevator 32. The seal cap 34 vertically supports the boat 26 and can airtightly close the furnace mouth when the boat 26 is loaded into the processing chamber 29.

[0026] The boat 26 is configured to hold a plurality of (for example, about 50 to 125) wafers 18 centered and horizontally in multiple stages.

[0027] A clean unit 35 is disposed at a position facing the boat elevator 32 side. The clean unit 35 is composed of a supply fan and a dust filter for supplying clean air 36 which is a purified atmosphere or an inert gas. As the inert gas, for example, a nitrogen (N)-containing gas can be used. As the N-containing gas, for example, nitrogen (N2) gas, ammonia (NH3) gas, etc. can be used. As the N-containing gas, one or more of these can be used. A notch alignment device (not shown) as a substrate alignment device for aligning the circumferential positions of the wafers 18 is installed between the wafer transfer mechanism 24 and the clean unit 35.

[0028] The clean air 36 blown out from the clean unit 35 is circulated to the notch alignment device (not shown), the wafer transfer mechanism 24, and the boat 26, and then sucked by a duct (not shown), and exhausted to the outside of the housing 2, or configured to be blown into the transfer chamber 23 by the clean unit 35.

[0029] Next, the operation of the substrate processing apparatus 1 will be described.

[0030] When the pod 9 is supplied to the load port 8, the pod loading / unloading port 6 is opened by the front shutter 7. The pod 9 on the load port 8 is carried into the housing 2 by the pod transfer mechanism 15 through the pod loading / unloading port 6 and placed on the designated shelf board 13 of the rotary pod shelf 11. After being temporarily stored in the rotary pod shelf 11, the pod 9 is transported from the shelf board 13 to one of the pod openers 14 by the pod transfer mechanism 15 and transferred to the mounting table 21, or directly transferred from the load port 8 to the mounting table 21.

[0031] At this time, the wafer loading / unloading port 19 is closed by the opening / closing mechanism 22, and the clean air 36 is circulated and filled in the transfer chamber 23. For example, the transfer chamber 23 is filled with an N-containing gas as the clean air 36, so that the oxygen concentration is set to 20 ppm or less, which is lower than the oxygen concentration in the inside of the housing 2 (atmospheric atmosphere).

[0032] The pod 9 placed on the mounting table 21 has its opening-side end face pressed against the opening edge portion of the wafer loading / unloading port 19 on the front wall 17 of the sub-housing 16, and the lid is removed by the opening / closing mechanism 22, and the wafer entrance / exit is opened.

[0033] When the pod 9 is opened by the pod opener 14, the wafer 18 is taken out from the pod 9 by the wafer transfer mechanism 24, transferred to a notch alignment device (not shown), and after the wafer 18 is aligned by the notch alignment device, the wafer transfer mechanism 24 carries the wafer 18 into the standby unit 27 behind the transfer chamber 23 and loads (charges) it into the boat 26.

[0034] The wafer transfer mechanism 24 that transfers the wafer 18 to the boat 26 returns to the pod 9 and loads the next wafer 18 into the boat 26.

[0035] During the loading operation of the wafer 18 into the boat 26 by the wafer transfer mechanism 24 in one (upper or lower) pod opener 14, another pod 9 is conveyed and transferred from the rotary pod rack 11 to the other (lower or upper) pod opener 14 by the pod transfer mechanism 15, and the opening operation of the pod 9 by the other pod opener 14 is carried out simultaneously.

[0036] When the specified number of wafers 18 are loaded into the boat 26, the furnace mouth part of the processing furnace 28 that was closed by the furnace mouth shutter 31 is opened by the furnace mouth shutter 31. Subsequently, the boat 26 is raised by the boat elevator 32 and carried into (loaded into) the processing chamber 29.

[0037] After loading, the furnace mouth part is hermetically sealed by the seal cap 34. In this embodiment, at this timing (after loading), there is a purge process (pre-purge process) in which the processing chamber 29 is replaced with an inert gas.

[0038] The processing chamber 29 is evacuated to a desired pressure (vacuum degree) by a gas exhaust mechanism (not shown). Also, the processing chamber 29 is heated to a predetermined temperature by a heater drive unit (not shown) so as to have a desired temperature distribution.

[0039] Also, a processing gas controlled to a predetermined flow rate is supplied by a gas supply mechanism (not shown), and in the process of the processing gas flowing through the processing chamber 29, it comes into contact with the surface of the wafer 18, and a predetermined process is carried out on the surface of the wafer 18. Further, the processed gas after the reaction is exhausted from the processing chamber 29 by the gas exhaust mechanism. The processing gas in this specification means the gas supplied into the processing chamber 29. These are the same in the following description.

[0040] When a preset processing time elapses, an inert gas is supplied from an inert gas supply source (not shown) by a gas supply mechanism, the processing chamber 29 is replaced with the inert gas, and the pressure in the processing chamber 29 is restored to normal pressure (after purge process). Then, the boat 26 is lowered by the boat elevator 32 via the seal cap 34. The processing time in this specification means the time for continuing the processing. The same applies in the following description.

[0041] Regarding the unloading of the processed wafer 18, the wafer 18 and the pod 9 are discharged to the outside of the housing 2 in the reverse procedure of the above description. An unprocessed wafer 18 is further loaded into the boat 26, and the batch processing of the wafer 18 is repeated.

[0042] Here, as shown in FIGS. 1 and 2, the substrate processing apparatus 1 includes a control unit 100, and the control unit 100 controls the substrate processing apparatus 1. The control unit 100 may be built in the substrate processing apparatus 1 or may be provided so as to be accessible from the outside of the substrate processing apparatus 1.

[0043] Next, with reference to FIG. 3, the configuration of the control system of the substrate processing apparatus 1 according to the present embodiment will be described.

[0044] FIG. 3 is a block diagram showing an example of the functional configuration of the control unit 100 provided in the substrate processing apparatus 1 according to the present embodiment.

[0045] As shown in FIG. 3, the substrate processing apparatus 1 includes a control unit (main controller) 100, an external storage unit 201, an external communication unit 202, an operation unit 203, a display unit 204, a process control unit 205, and a transfer control unit 206.

[0046] Further, the control unit 100 includes a CPU (Central Processing Unit) 101, a RAM (Random Access Memory) 102, a storage unit 103, an I / O port 104, a management unit 105, a range setting unit 106, and a determination unit 107.

[0047] The control unit 100 is connected to the operation unit 203, and the process control unit 205 and the conveyance control unit 206 are connected via the I / O port 104. Since the control unit 100 is electrically connected to each of the process control unit 205 and the conveyance control unit 206 via the I / O port 104, it is configured to enable transmission and reception of each data, download and upload of each file, and the like.

[0048] An external storage unit 201 as a mounting unit into which a USB (Universal Serial Bus) memory or the like, which is an example of a recording medium, is inserted and removed is connected to the control unit 100. Further, the control unit 100 is connected to an external host computer (not shown) via the external communication unit 202. Therefore, even when the substrate processing apparatus 1 is installed in a clean room, the host computer can be arranged in an office or the like outside the clean room.

[0049] The operation unit 203 integrally includes the display unit 204 or is connected to the display unit 204 via a video cable or the like. The display unit 204 is, for example, a liquid crystal display panel. The display unit 204 is configured to display each operation screen for operating the substrate processing apparatus 1. The operation screen has a screen for checking the states of the substrate process system controlled by the process control unit 205 and the substrate transfer system controlled by the transfer control unit 206. Further, the display unit 204 can also be provided with each operation button as an input unit for inputting operation instructions to the substrate process system and the substrate transfer system. The operation unit 203 causes the display unit 204 to display information generated within the substrate processing apparatus 1 via the operation screen. Further, the operation unit 203 causes, for example, the information displayed on the display unit 204 to be output to a device such as a USB memory inserted into the external storage unit 201. The operation unit 203 receives input data (input instructions) from the operation screen displayed on the display unit 204 and transmits the input data to the control unit 100. Further, the operation unit 203 receives an instruction (control instruction) to execute an arbitrary substrate processing recipe (also referred to as a process recipe) among the recipes developed in the RAM 102 or the plurality of recipes stored in the storage unit 103 and transmits it to the control unit 100. Note that the operation unit 203 and the display unit 204 may be configured by a touch panel. Here, although the operation unit 203 and the display unit 204 are provided separately from the control unit 100, they may be configured to be integrally included in the control unit 100.

[0050] The process control unit 205 includes a temperature control unit 205A, a pressure control unit 205B, and a gas flow rate control unit 205C. The temperature control unit 205A, the pressure control unit 205B, and the gas flow rate control unit 205C each constitute a sub-controller and are electrically connected to the process control unit 205, so that transmission and reception of each data, download and upload of each file, etc. are possible. Note that although the process control unit 205 and each sub-controller (temperature control unit 205A, pressure control unit 205B, and gas flow rate control unit 205C) are shown separately, they may be integrally configured.

[0051] The temperature control unit 205A is connected to a heating mechanism mainly composed of a heater and a temperature sensor. The temperature control unit 205A is configured to adjust the temperature inside the processing furnace 28 by controlling the temperature of the heater in the processing furnace 28. Note that the temperature control unit 205A is configured to perform switching (on / off) control of the thyristor and control the power supplied to the heater element wire.

[0052] The pressure control unit 205B is connected to a gas exhaust mechanism (not shown) mainly composed of a pressure sensor (not shown) and an APC (Automatic Pressure Control) valve as a pressure valve (not shown). Note that a vacuum pump (not shown) may be included in the gas exhaust mechanism. The pressure control unit 205B is configured to control the opening degree of the APC valve and the switching (on / off) of the vacuum pump so that the pressure inside the processing chamber 29 becomes the desired pressure at the desired timing based on the pressure value detected by the pressure sensor.

[0053] The gas flow rate control unit 205C is composed of an MFC (Mass Flow Controller) (not shown).

[0054] The transfer control unit 206 includes a drive unit control unit 206A, a rotation unit control unit 206B, and a lifting control unit 206C. The drive unit control unit 206A is configured to control the drive unit system of the substrate processing apparatus 1. The rotation unit control unit 206B is configured to control the rotation unit system of the substrate processing apparatus 1. The lifting control unit 206C is configured to control the lifting system of the substrate processing apparatus 1. The transfer control unit 206 is configured to control the transfer operations of, for example, the rotary pod rack 11, the boat elevator 32, the pod transfer mechanism 15, the wafer transfer mechanism 24, the boat 26, and a rotation mechanism (not shown), respectively.

[0055] Note that the control unit 100, the process control unit 205, and the transfer control unit 206 according to this embodiment can be realized using a normal computer system instead of a dedicated system. For example, by installing a program from a recording medium (such as a CD-ROM, USB, etc.) storing the above-described processing program into a general-purpose computer, each controller that executes predetermined processing can be configured.

[0056] And the means for supplying these programs is arbitrary. In addition to being supplied via a predetermined recording medium as described above, it may be supplied via, for example, a communication line, a communication network, a communication system, or the like.

[0057] The control unit 100 is configured as a computer including a CPU 101, a RAM 102, a storage unit 103, and an I / O port 104. In the storage unit 103, there are stored various recipe files such as recipes in which processing conditions and processing procedures are defined, control program files for executing these recipe files, parameter files (setting value files) for setting processing conditions and processing procedures, error processing program files and error processing parameter files, as well as various screen files including an input screen for inputting process parameters, various icon files, etc. (none of which are shown). Note that the control unit 100 is connected to a network such as the Internet, a LAN (Local Area Network), or a WAN (Wide Area Network) using the external communication unit 202, and is capable of communicating with external devices via the network.

[0058] Also, as the storage unit 103, for example, an HDD (Hard Disk Drive), an SSD (Solid State Drive), a flash memory, etc. are used. In the storage unit 103, a setting value editing program for executing the setting value editing process according to this embodiment is stored.

[0059] The setting value editing program may be pre-installed in the substrate processing apparatus 1, for example. The setting value editing program may be realized by recording it on a non-volatile recording medium, distributing it via a network, and appropriately installing it in the substrate processing apparatus 1. Examples of the non-volatile recording medium include CD-ROM, magneto-optical disk, HDD, DVD-ROM, flash memory, memory card, USB, etc.

[0060] That is, the setting value editing program is a program for causing a computer to execute a procedure for displaying a file describing processing conditions of a substrate having a plurality of setting values, a procedure for performing at least one operation of canceling or re-doing the set setting value when editing the setting value, a procedure for storing the file and the operation history information of the canceling or re-doing operation, and a procedure for determining the valid range of the setting value reset during the canceling or re-doing operation.

[0061] The CPU 101 of the substrate processing apparatus 1 according to the present embodiment functions as a control unit 100, a management unit 105, a range setting unit 106, and a determination unit 107 by writing the setting value editing program stored in the storage unit 103 into the RAM 102 and executing it.

[0062] The substrate processing apparatus 1 according to the present embodiment includes a display unit 204, an operation unit 203, a storage unit 103, a determination unit 107, an external storage unit 201, an external communication unit 202, and a control unit 100.

[0063] The display unit 204 can display a file describing processing conditions of a substrate having a plurality of setting values.

[0064] The operation unit 203 can perform an editing operation of the file displayed on the display unit 204 and at least one operation of canceling or re-doing the set setting value in the editing operation. In file editing, the setting value of the item can be edited. Here, as an example, the display unit 204 displays a recipe editing screen including a file as shown in FIG. 4A.

[0065] FIG. 4A is a front view showing an example of the recipe editing screen 40 according to the present embodiment.

[0066] On the recipe editing screen 40 shown in FIG. 4A, a file 41 describing the processing conditions of a substrate having setting values of temperature, gas flow rate (MFC), and pressure as examples of a plurality of setting values is displayed. Further, on the recipe editing screen 40, there are a Close button 42 for closing the file, a Save button 43 for saving the file, an Undo button 44 for canceling the setting values set by the editing operation and returning to the original setting values, a Redo button 45 for redoing the setting values set by the editing operation and resetting the setting values, and an InformationArea 46 which is an area for displaying various information.

[0067] The storage unit 103 stores a file describing the processing conditions of a substrate having a plurality of setting values and operation history information of cancel or redo operations.

[0068] The determination unit 107 determines the valid range of the setting values reset during the cancel or redo operation.

[0069] The control unit 100 has a storage unit 103 and a determination unit 107, and is capable of controlling the editing operation of the setting values. Specifically, when there is an instruction of a cancel or redo operation from the operation unit 203, the control unit 100 controls the cancel operation or the redo operation of the setting values. When there is a confirmation operation of the setting values or a cancel or redo operation, the control unit 100 instructs the determination unit 107 to perform a validity check (range check) of all the editing items.

[0070] According to the above configuration, by recalculating the input range and performing a range check of all items when changing the setting values, the consistency of the editing items is always maintained, and it is possible to reduce the wasted time of file re - editing due to file inconsistency during substrate processing execution, and as a result, it can contribute to the improvement of production efficiency.

[0071] In addition, by checking the valid ranges of all items during item setting, the items to be corrected can be clarified, contributing to the efficiency improvement of file editing and the improvement of work efficiency.

[0072] Specifically, the control unit 100 has a management unit 105 that manages setting values. The management unit 105 searches for information on the instructed setting value according to an instruction from the operation unit 203 and returns the search result to the operation unit 203. For example, when displaying the recipe editing screen 40, the management unit 105 reads out file information including the setting value stored in the storage unit 103 and expands the read file information in the RAM 102. Also, when there is a display request for an item from the operation unit 203, the management unit 105 searches for the setting value of the corresponding item from the RAM 102, acquires the searched setting value, and returns the acquired setting value to the operation unit 203. The operation unit 203 passes the setting value acquired from the management unit 105 to the display unit 204. The display unit 204 displays the setting value passed from the operation unit 203. Thereby, the instructed setting value can be easily acquired.

[0073] In addition, the control unit 100 has a range setting unit 106 that sets the upper limit value and the lower limit value, which are the valid ranges of the setting values. The range setting unit 106 sets the valid ranges of all setting values according to a valid range setting instruction from the management unit 105. Specifically, the range setting unit 106 sets the valid ranges for all items. Since the valid ranges vary depending on the conditions of each setting item, the valid ranges are set each time. Note that this valid range may be stored in the storage unit 103 in advance as valid range information, and the valid range information may be read out as appropriate to set the valid range that meets the conditions, or a method of calculating the valid range that meets the conditions by a program may also be used. Thereby, the valid ranges of all setting values can be set.

[0074] In addition, the range setting unit 106 checks the range setting conditions for each item determined in advance and the setting information of other related items, and calculates the upper limit value and the lower limit value. For example, when the unit of the pressure setting value is [Pa], the range of the setting value is set to 0000.00 Pa to 9999.99 Pa. For example, when the unit of the pressure setting value is [Torr], the range of the setting value is set to 00.000 Torr to 99.999 Torr, and the valid range is changed according to the relevant conditions. Here, 0000.00 Pa to 9999.99 Pa indicates the range of values, meaning that it is 0000.00 Pa or more and 9999.99 Pa or less. However, the same applies when defining ranges other than [Pa]. For example, when the unit of the gas flow rate is [slm], it is set to 0000.000 slm to 9999.000 slm. For example, when the unit of the gas flow rate is [sccm], it is set to 00.0 sccm to 99.0 sccm, and the valid range is changed according to the relevant conditions. When 0 slm or 0 sccm is included in the supply flow rate, 0 slm and 0 sccm mean the case where the substance (gas) is not supplied. This also applies in the following explanations. Thereby, the upper limit value and the lower limit value of the valid range can be appropriately calculated.

[0075] In addition, when the set value is changed, the determination unit 107 determines whether all the set values defined in the file are within the valid range. The determination unit 107 compares the set value of the setting information specified from the management unit 105 with the valid range set by the range setting unit 106, and determines whether the set value is within the valid range. The determination unit 107 returns the determination result to the management unit 105. Thereby, it can be determined whether all the set values defined in the file are within the valid range.

[0076] In addition, when the determination result of the determination unit 107 is out of range, the control unit 100 may notify the operation unit 203 to notify that the set value is out of range. Thereby, the set value out of range can be notified to the operation unit.

[0077] In accordance with the notification from the control unit 100, the operation unit 203 instructs the display unit 204 to display that there is an out-of-range set value. In this case, the display unit 204 may display a notification that the set value is out of range in accordance with the instruction from the operation unit 203, or may switch the display of the target set value, or may display a notification that the set value is out of range and switch the display of the target set value. For example, as shown in FIG. 4B, a message is displayed in the InformationArea46 located at the upper part of the recipe editing screen 40 so that the item determined to be out of range can be recognized. As the message, for example, the set value information that is out of range and a message indicating that it is out of range are displayed. By displaying a message in the InformationArea46, it becomes possible to notify the set value that is out of range on the recipe editing screen 40.

[0078] Also, as shown in FIG. 4C, a message 47 may be displayed near the item so that the item determined to be out of range can be recognized. The message 47 may be, for example, a tooltip or a message box. Also, the background may be switched so that the item determined to be out of range can be recognized. Also, the display color (character color) of the set value may be switched. In FIG. 4C, for example, the background is switched from white to black. Here, the background is black, but any color may be used as long as it is different from other items. Also, the display characters may be switched so that the item determined to be out of range can be recognized. Thereby, the out-of-range set value can be displayed and notified to the user.

[0079] Here, as shown in FIG. 4A described above, the display unit 204 has an Undo button 44 and a Redo button 45 which are buttons enabling cancel or redo operations. These buttons enable easy cancel or redo operations. The display unit 204 may switch the display characters of the Undo button 44 and the Redo button 45 according to the display language of the display unit 204. For example, by switching the display characters such as Japanese, English, etc. according to the language designated as the destination of the device, it is possible to contribute to file operation support. In the case of Japanese, switch "Undo" to "Cancel" and "Redo" to "Redo".

[0080] Further, the display unit 204 may switch the display of at least one of the Undo button 44 and the Redo button 45 according to the cancel or redo operation. For example, as shown in FIGS. 6B, 7B, 8B, 9B, and 10B described later, gray out or make non-display the non-executable button among the Undo button 44 and the Redo button 45. In this case, since it is possible to confirm the executability of the Undo button 44 and the Redo button 45 on the recipe editing screen 40, it is possible to contribute to file operation support.

[0081] Next, with reference to FIGS. 5 and 6A to 10B, a transition example of the Undo and Redo operation history information according to the present embodiment will be specifically described.

[0082] FIG. 5 is a diagram showing an example of an Undo data storage table for Undo operations and a Redo data storage table for Redo operations that store operation history information having a cancel or redo operation history according to the present embodiment.

[0083] The operation history information includes Undo history information 51 as cancel operation history information and Redo history information 52 as redo operation history information. The Undo history information 51 includes, for example, setting items, pre-change setting values, and post-change setting values. The Redo history information 52 includes, for example, setting items, pre-change setting values, and post-change setting values.

[0084] As shown in FIG. 5, the Undo data storage table for Undo operations and the Redo data storage table for Redo operations have the same table configuration. The Undo data storage table is an example of the first operation history information, and the Redo data storage table is an example of the second operation history information.

[0085] That is, the operation history information includes an Undo data storage table that stores setting value related information of setting values, and a Redo data storage table that stores setting value related information as a cancellation history when a cancellation operation is executed. Note that the setting value related information includes at least one of a setting item, a setting value before change, and a setting value after change. By using these data storage tables, the management of Undo / Redo operations becomes easy, contributing to the reduction of unnecessary searches and enabling the shortening of operation time.

[0086] For example, when a cancellation operation is executed, the control unit 100 stores the setting value related information stored in the Undo data storage table in the Redo data storage table and deletes the setting value related information stored in the Undo data storage table.

[0087] Also, when a redo operation is executed, the control unit 100 stores the setting value related information stored in the Redo data storage table in the Undo data storage table and deletes the setting value related information stored in the Redo data storage table.

[0088] In addition, when the control unit 100 acquires new setting value related information, it stores the setting value related information stored in the Redo data storage table in the Undo data storage table and stores the new setting value related information in the Undo data storage table. In this case, the control unit 100 may clear, that is, delete all the data in the Redo data storage table.

[0089] Also, when the control unit 100 finishes editing a file, it may clear (delete) the operation history information, that is, the data in the Undo data storage table and the Redo data storage table.

[0090] FIG. 6A is a diagram showing a transition example of the Undo data storage table and the Redo data storage table when the setting value is set three times. Further, FIG. 6B is a diagram showing an example of changes in the screen setting value information and changes in the display states of the Undo / Redo buttons according to the transitions of the Undo data storage table and the Redo data storage table shown in FIG. 6A. Note that the data to be stored performs data input / output in the LIFO (Last In First Out) method.

[0091] In (S1) of FIG. 6B, as an example, a new display of the recipe editing screen 40 shown in FIG. 4A described above is performed. In this case, as the screen setting value information shown in (S1) of FIG. 6B, setting information 1, setting information 2, and setting information 3 are displayed. In setting information 1, “001” is displayed as the setting value before change, in setting information 2, “002” is displayed as the setting value before change, and in setting information 3, “003” is displayed as the setting value before change. Also, regarding the display states of the buttons, both the Undo button and the Redo button are in a display (for example, grayed out) indicating that they cannot be executed, and are made non-executable. At this time, in (S1) of FIG. 6A, the Undo data storage table and the Redo data storage table are both in a state where nothing is stored.

[0092] Next, in (S2) of FIG. 6B, enter "002" as the changed set value of setting information 1. As the screen set value information, in setting information 1, the display switches to "002" as the changed set value, in setting information 2, "002" is continuously displayed as the set value before change, and in setting information 3, "003" is continuously displayed as the set value before change. Note that the changed set value may be switched to a background color different from the set value before change, for example. Also, the changed set value may be switched in the color of the display characters, for example. In FIG. 6B, for example, the background of the set value is represented in gray. Also, regarding the display state of the button, the Undo button is released from the non-executable display and made executable. The Redo button remains non-executable with the non-executable display. In this case, in (S2) of FIG. 6A, the set value related information of setting information 1 is stored in the Undo data storage table. At this time, the set value related information of setting information 1 stored in the Undo data storage table includes "001" as the set value before change and "002" as the set value after change.

[0093] Next, in (S3) of FIG. 6B, enter "003" as the changed set value of setting information 2. As the screen set value information, in setting information 1, "002" is continuously displayed as the changed set value, in setting information 2, the display switches to "003" as the changed set value, and in setting information 3, "003" is continuously displayed as the set value before change. Note that the changed set value may be switched to a background color different from the set value before change, for example. Also, the changed set value may be switched in the color of the display characters, for example. In FIG. 6B, for example, the background of the set value is represented in gray. Also, as the display state of the button, the Undo button remains executable with the executable display. The Redo button remains non-executable with the non-executable display. In this case, in (S3) of FIG. 6A, setting information 2 is stored in the Undo data storage table. At this time, the setting information 2 stored in the Undo data storage table includes "002" as the set value before change and "003" as the set value after change.

[0094] Next, in (S4) of FIG. 6B, enter "003" as the set value after the change of setting information 1. As the screen set value information, in setting information 1, the display switches to "003" as the set value after the change, in setting information 2, "003" continues to be displayed as the set value after the change, and in setting information 3, "003" continues to be displayed as the set value before the change. As the display state of the buttons, the Undo button remains operable and displayable and continues to be settable. The Redo button remains inoperable and non-displayable and continues to be non-executable. In this case, in (S4) of FIG. 6A, the new setting information 1 is stored in the Undo data storage table. At this time, the new setting information 1 stored in the Undo data storage table includes "002" as the set value before the change and "003" as the set value after the change.

[0095] FIG. 7A is a diagram showing a transition example of the Undo data storage table and the Redo data storage table when Undo is performed once after setting the set value twice. Further, FIG. 7B is a diagram showing an example of the change in the screen set value information and the change in the display state of the Undo / Redo buttons according to the transition of the Undo data storage table and the Redo data storage table shown in FIG. 7A.

[0096] In (S11) of FIG. 7B, as an example, a new display of the recipe editing screen 40 shown in FIG. 4A above is performed. In this case, as the screen set value information shown in (S11) of FIG. 7B, setting information 1, setting information 2, and setting information 3 are displayed. In setting information 1, "001" is displayed as the set value before the change, in setting information 2, "002" is displayed as the set value before the change, and in setting information 3, "003" is displayed as the set value before the change. Also, regarding the display state of the buttons, both the Undo button and the Redo button are in a state of being non-executable (for example, grayed out) and are made non-executable. At this time, in (S11) of FIG. 7A, the Undo data storage table and the Redo data storage table are both in a state where nothing is stored.

[0097] Next, in (S12) of FIG. 7B, input "002" as the changed set value of setting information 1. As the screen set value information, in setting information 1, the display switches to "002" as the changed set value, in setting information 2, "002" continues to be displayed as the pre-change set value, and in setting information 3, "003" continues to be displayed as the pre-change set value. Note that the changed set value may be switched to a background color different from the pre-change set value, for example. Also, the changed set value may have its display character color switched, for example. In FIG. 7B, the background of the set value is represented in gray, for example. Also, regarding the display state of the buttons, the Undo button is released from the non-executable display and made executable. The Redo button remains non-executable with the non-executable display. In this case, in (S12) of FIG. 7A, the set value related information of setting information 1 is stored in the Undo data storage table. At this time, the set value related information of setting information 1 stored in the Undo data storage table includes "001" as the pre-change set value and "002" as the changed set value.

[0098] Next, in (S13) of FIG. 7B, input "003" as the changed set value of setting information 2. As the screen set value information, in setting information 1, "002" continues to be displayed as the changed set value, in setting information 2, the display switches to "003" as the changed set value, and in setting information 3, "003" continues to be displayed as the pre-change set value. Note that the changed set value may be switched to a background color different from the pre-change set value, for example. Also, the changed set value may have its display character color switched, for example. In FIG. 7B, the background of the set value is represented in gray, for example. Also, as the display state of the buttons, the Undo button remains executable with the executable display. The Redo button remains non-executable with the non-executable display. In this case, in (S13) of FIG. 7A, setting information 2 is stored in the Undo data storage table. At this time, the setting information 2 stored in the Undo data storage table includes "002" as the pre-change set value and "003" as the changed set value.

[0099] Next, in (S14) of FIG. 7B, press the Undo button. As the screen setting value information, in setting information 1, “002” continues to be displayed as the changed setting value, in setting information 2, “002” is displayed as the setting value before the change, and in setting information 3, “003” continues to be displayed as the setting value before the change. Also, regarding the display state of the buttons, the Undo button remains executable, and the Redo button is released from the non-executable display (gray-out display) and becomes executable. In this case, in (S14) of FIG. 7A, an Undo operation for setting information 2 (that is, an operation to cancel the changed setting value “003”) is performed. At this time, the setting information 2 stored in the Undo data storage table is stored in the Redo data storage table and deleted from the Undo data storage table.

[0100] FIG. 8A is a diagram showing a transition example of the Undo data storage table and the Redo data storage table when Undo is performed twice after the setting value is set twice. FIG. 8B is a diagram showing an example of the change in the screen setting value information and the change in the display state of the Undo / Redo buttons according to the transition of the Undo data storage table and the Redo data storage table shown in FIG. 8A.

[0101] In (S21) of FIG. 8B, as an example, a new display of the recipe editing screen 40 shown in FIG. 4A above is performed. As the screen setting value information shown in (S21) of FIG. 8B, setting information 1, setting information 2, and setting information 3 are displayed. In setting information 1, “001” is displayed as the setting value before the change, in setting information 2, “002” is displayed as the setting value before the change, and in setting information 3, “003” is displayed as the setting value before the change. Also, regarding the display state of the buttons, both the Undo button and the Redo button are in a display (for example, gray-out) indicating non-executability and are made non-executable. At this time, in (S21) of FIG. 8A, neither the Undo data storage table nor the Redo data storage table stores anything.

[0102] Next, in (S22) of FIG. 8B, enter "002" as the changed set value of setting information 1. As the screen set value information, in setting information 1, the display switches to "002" as the changed set value, in setting information 2, "002" is continuously displayed as the set value before change, and in setting information 3, "003" is continuously displayed as the set value before change. Note that the changed set value may be switched to a background color different from the set value before change, for example. Also, the changed set value may be switched in the color of the displayed characters, for example. In FIG. 8B, for example, the background of the set value is shown in gray. Regarding the display state of the button, the Undo button is released from the non-executable display and made executable. The Redo button remains non-executable with the non-executable display. In this case, in (S22) of FIG. 8A, the set value related information of setting information 1 is stored in the Undo data storage table. At this time, the set value related information of setting information 1 stored in the Undo data storage table includes "001" as the set value before change and "002" as the set value after change.

[0103] Next, in (S23) of FIG. 8B, enter "003" as the changed set value of setting information 2. As the screen set value information, in setting information 1, "002" is continuously displayed as the changed set value, in setting information 2, the display switches to "003" as the changed set value, and in setting information 3, "003" is continuously displayed as the set value before change. Note that the changed set value may be switched to a background color different from the set value before change, for example. Also, the changed set value may be switched in the color of the displayed characters, for example. In FIG. 8B, for example, the background of the set value is shown in gray. Regarding the display state of the button, the Undo button remains executable with the executable display. The Redo button remains non-executable with the non-executable display. In this case, in (S23) of FIG. 8A, setting information 2 is stored in the Undo data storage table. At this time, the setting information 2 stored in the Undo data storage table includes "002" as the set value before change and "003" as the set value after change.

[0104] Next, in (S24) of FIG. 8B, press the Undo button. As the screen setting value information, in setting information 1, “002” continues to be displayed as the changed setting value, in setting information 2, “002” is displayed as the setting value before the change, and in setting information 3, “003” continues to be displayed as the setting value before the change. Also, regarding the display state of the buttons, the Undo button remains executable, and the Redo button, which was previously non-executable (grayed out), is now enabled and executable. In this case, in (S24) of FIG. 8A, an Undo operation for setting information 2 (that is, an operation to cancel the changed setting value “003”) is performed. At this time, the setting information 2 stored in the Undo data storage table is stored in the Redo data storage table and deleted from the Undo data storage table.

[0105] Next, in (S25) of FIG. 8B, press the Undo button. As the screen setting value information, in setting information 1, “001” is displayed as the setting value before the change, in setting information 2, “002” continues to be displayed as the setting value before the change, and in setting information 3, “003” continues to be displayed as the setting value before the change. Also, regarding the display state of the buttons, the Undo button switches to non-executable display (for example, grayed out) and becomes non-executable, while the Redo button continues to be displayed as executable and remains executable. In this case, in (S25) of FIG. 8A, an Undo operation for setting information 1 (that is, an operation to cancel the changed setting value “002”) is performed. At this time, the setting information 1 stored in the Undo data storage table is stored in the Redo data storage table and deleted from the Undo data storage table.

[0106] FIG. 9A is a diagram showing an example of the transition of the Undo data storage table and the Redo data storage table when Redo is performed two more times following the transition in FIG. 8A. FIG. 9B is a diagram showing an example of the change in the screen setting value information and the change in the display state of the Undo / Redo buttons according to the transition of the Undo data storage table and the Redo data storage table shown in FIG. 9A.

[0107] In (S31) of FIG. 9B, press the Redo button. Regarding the screen setting value information, in setting information 1, "002" is displayed as the changed setting value, in setting information 2, "002" continues to be displayed as the setting value before change, and in setting information 3, "003" continues to be displayed as the setting value before change. Also, regarding the display state of the buttons, the display of the Undo button being non-executable (for example, grayed out) is released and it becomes executable. The Redo button continues to be executable. In this case, in (S31) of FIG. 9A, perform the Redo operation for setting information 1 (that is, the operation of re-doing the changed setting value "002"). At this time, the setting information 1 stored in the Redo data storage table is stored in the Undo data storage table and deleted from the Redo data storage table.

[0108] Next, in (S32) of FIG. 9B, press the Redo button. Regarding the screen setting value information, in setting information 1, "002" continues to be displayed as the changed setting value, in setting information 2, "003" is displayed as the changed setting value, and in setting information 3, "003" continues to be displayed as the setting value before change. Also, regarding the display state of the buttons, the Undo button continues to be displayed as executable and is made executable. The Redo button becomes non-executable (for example, grayed out) and is made non-executable. In this case, in (S32) of FIG. 9A, perform the Redo operation for setting information 2 (that is, the operation of re-doing the changed setting value "003"). At this time, the setting information 2 stored in the Redo data storage table is stored in the Undo data storage table and deleted from the Redo data storage table.

[0109] FIG. 10A is a diagram showing a transition example of the Undo data storage table and the Redo data storage table when the setting of the set value is performed twice, then Undo is performed once, and then the setting is performed once more. FIG. 10B is a diagram showing an example of the change in the screen setting value information and the change in the display state of the Undo / Redo buttons according to the transition of the Undo data storage table and the Redo data storage table shown in FIG. 10A.

[0110] In (S41) of FIG. 10B, as an example, a new display of the recipe editing screen 40 shown in FIG. 4A described above is performed. As the screen setting value information shown in (S41) of FIG. 10B, setting information 1, setting information 2, and setting information 3 are displayed. In setting information 1, "001" is displayed as the setting value before change, in setting information 2, "002" is displayed as the setting value before change, and in setting information 3, "003" is displayed as the setting value before change. Also, regarding the display state of the buttons, both the Undo button and the Redo button are displayed in a state indicating that they cannot be executed (for example, grayed out) and are made non-executable. At this time, nothing is stored in each of the Undo data storage table and the Redo data storage table.

[0111] Next, in (S42) of FIG. 10B, "002" is input as the setting value after change for setting information 1. As the screen setting value information, in setting information 1, the display switches to "002" as the setting value after change, in setting information 2, "002" as the setting value before change continues to be displayed, and in setting information 3, "003" as the setting value before change continues to be displayed. Note that the changed setting value may be switched to a background color different from the setting value before change, for example. Also, the color of the displayed characters of the changed setting value may be switched, for example. In FIG. 10B, for example, the background of the setting value is represented in gray. Also, regarding the display state of the buttons, the non-executable display of the Undo button is released and it is made executable. The Redo button remains in the non-executable display state and is made non-executable. In this case, in (S42) of FIG. 10A, the setting value related information of setting information 1 is stored in the Undo data storage table. At this time, the setting value related information of setting information 1 stored in the Undo data storage table includes "001" as the setting value before change and "002" as the setting value after change.

[0112] Next, in (S43) of FIG. 10B, enter “003” as the changed set value of setting information 2. As the screen set value information, in setting information 1, “002” continues to be displayed as the changed set value, in setting information 2, the display switches to “003” as the changed set value, and in setting information 3, “003” continues to be displayed as the set value before the change. Note that the changed set value may be switched to a background color different from the set value before the change, for example. Also, the changed set value may have its display character color switched, for example. In FIG. 10B, the background of the set value is represented by gray, for example. Also, as the display state of the buttons, the Undo button remains in an executable display state and continues to be executable. The Redo button remains in a non-executable display state and continues to be non-executable. In this case, in (S43) of FIG. 10A, setting information 2 is stored in the Undo data storage table. At this time, the setting information 2 stored in the Undo data storage table includes “002” as the set value before the change and “003” as the changed set value.

[0113] Next, in (S44) of FIG. 10B, press the Undo button. As the screen set value information, in setting information 1, “002” continues to be displayed as the changed set value, in setting information 2, “002” is displayed as the set value before the change, and in setting information 3, “003” continues to be displayed as the set value before the change. Also, regarding the display state of the buttons, the Undo button continues to be executable, and the non-executable display (gray-out display) of the Redo button is released and it becomes operable. In this case, in (S44) of FIG. 10A, an Undo operation of setting information 2 (that is, an operation to cancel the changed set value “003”) is performed. At this time, the setting information 2 stored in the Undo data storage table is stored in the Redo data storage table and deleted from the Undo data storage table.

[0114] Next, in (S45) of FIG. 10B, enter "004" as the set value after the change of setting information 2. As the screen set value information, in setting information 1, "002" continues to be displayed as the set value after the change, in setting information 2, "004" is displayed as the set value before the change, and in setting information 3, "003" continues to be displayed as the set value before the change. Also, regarding the display state of the buttons, the Undo button remains executable, and the Redo button is displayed as non-executable (for example, grayed out) and is made non-executable. In this case, in (S45) of FIG. 10A, all the setting value-related information stored in the Redo data storage table is stored in the Undo data storage table, and the Redo data storage table is cleared. Then, the new setting information 2 is stored in the Undo data storage table. At this time, the new setting information 2 stored in the Undo data storage table includes "003" as the set value before the change and "004" as the set value after the change.

[0115] Next, with reference to FIGS. 11 to 14, the operation of the substrate processing apparatus 1 according to the present embodiment will be described.

[0116] FIG. 11 is a sequence diagram showing an example of the editing start process according to the present embodiment.

[0117] In step S101 of FIG. 11, the operation unit 203 sends a start request for editing the set value to the management unit 105.

[0118] In step S102, the management unit 105 acquires the recipe file from the storage unit 103 in response to the editing start request from the operation unit 203.

[0119] In step S103, the management unit 105 sends a calculation request for the valid range of the set value to the range setting unit 106.

[0120] In step S104, the range setting unit 106 sets the valid range of all the set values in response to the calculation request from the management unit 105.

[0121] In step S105, the range setting unit 106 returns, in response, to the management unit 105 that it has calculated the valid range of all setting values.

[0122] In step S106, the management unit 105 returns, in response, to the operation unit 203 to start editing.

[0123] In step S107, the operation unit 203 sends a request to obtain a setting value to the management unit 105.

[0124] In step S108, the management unit 105 sends a request to obtain the valid range of the setting value to the range setting unit 106.

[0125] In step S109, in response to the acquisition request from the management unit 105, the range setting unit 106 acquires the valid range of the specified setting value and sends the acquired valid range to the management unit 105.

[0126] In step S110, the management unit 105 designates the valid range of the specified setting value to the operation unit 203.

[0127] In step S111, the management unit 105 returns, in response, to the operation unit 203 to obtain the setting value and ends the series of processes.

[0128] FIG. 12 is a sequence diagram showing an example of the setting value change process according to the present embodiment.

[0129] In step S121 of FIG. 12, the operation unit 203 instructs the management unit 105 to update the setting value.

[0130] In step S122, in response to the update instruction from the operation unit 203, the management unit 105 sends a request to calculate the valid range to the range setting unit 106.

[0131] In step S123, in response to the calculation request from the management unit 105, the range setting unit 106 sets the valid range of all setting values.

[0132] In step S124, the range setting unit 106 returns to the management unit 105 in response to calculating the valid range of all setting values.

[0133] In step S125, the management unit 105 instructs the determination unit 107 to check the valid range of all setting values.

[0134] In step S126, the determination unit 107 checks the valid range of all setting values according to the instruction from the management unit 105 and sends the check result to the management unit 105.

[0135] In step S127, the management unit 105 determines whether the setting value is within the valid range based on the check result from the determination unit 107. If it is determined that the setting value is within the valid range (in the case of success), the process proceeds to step S128. If it is determined that the setting value is outside the valid range (outside the range), the process proceeds to step S129.

[0136] In step S128, the management unit 105 stores the setting value in the Undo data storage table.

[0137] In step S129, the management unit 105 returns the check result of the setting value to the operation unit 203 as a response.

[0138] In step S130, the operation unit 203 determines whether the setting value is within the valid range based on the check result from the management unit 105. If it is determined that the setting value is within the valid range (in the case of success), the process ends as it is. If it is determined that the setting value is outside the valid range (outside the range), the process proceeds to step S131.

[0139] In step S131, the operation unit 203 notifies the display unit 204 that the setting value is outside the range, and returns to step S121 to repeat the process.

[0140] Here, when inputting a set value, check for the presence of set value related information in the Redo data storage table. If there is set value related information in the Redo data storage table, store all the set value related information in the Undo data storage table. Then, store the set value related information associated with the input set value in the Undo data storage table and clear the Redo data storage table.

[0141] FIG. 13 is a flowchart showing an example of the flow of the Undo operation process according to this embodiment.

[0142] In step S141 of FIG. 13, the CPU 101 acquires the latest set value related information stored in the Undo data storage table.

[0143] In step S142, the CPU 101 stores the set value related information acquired in step S141 at the latest position in the Redo data storage table.

[0144] In step S143, the CPU 101 clears the latest set value related information stored in the Undo data storage table and ends the series of processes.

[0145] That is, in the case of an Undo operation, acquire the set value related information stored in the Undo data storage table, store the acquired set value related information in the Redo data storage table, and clear the set value related information that was stored in the Undo data storage table. At this time, recalculate the valid range of all set values, determine the valid range of all set values, and reflect the determination result of the valid range.

[0146] FIG. 14 is a flowchart showing an example of the flow of the Redo operation process according to this embodiment.

[0147] In step S151 of FIG. 14, the CPU 101 acquires the latest set value related information stored in the Redo data storage table.

[0148] In step S152, the CPU 101 stores the setting value related information acquired in step S151 at the latest position in the Undo data storage table.

[0149] In step S153, the CPU 101 clears the latest setting value related information stored in the Redo data storage table and ends a series of processes.

[0150] That is, in the case of a Redo operation, the setting value related information stored in the Redo data storage table is acquired, and the acquired setting value related information is stored in the Undo data storage table. Then, the setting value related information stored in the Redo data storage table is cleared. At this time, the effective range of all setting values is recalculated, the determination of the effective range of all setting values is performed, and the determination result of the effective range is reflected.

[0151] As described above, according to this embodiment, by recalculating the input range and checking the ranges of all items when changing the setting values, the consistency of the edited items is always maintained, and it is possible to reduce the wasted time for file re - editing due to file inconsistency during substrate processing execution, and as a result, it is possible to contribute to the improvement of production efficiency.

[0152] In addition, by checking the effective range of all items when setting items, the items to be corrected become clear, which contributes to the efficiency improvement of file editing and can contribute to the improvement of work efficiency.

[0153] As described above, the substrate processing apparatus according to the embodiment has been illustrated and described. The embodiment may be in the form of a program for causing a computer to execute the functions of the substrate processing apparatus. The embodiment may also be in the form of a computer - readable non - transitory recording medium storing these programs.

[0154] In addition, the configuration of the substrate processing apparatus described in the above embodiment is an example, and it may be changed according to the situation within the scope not departing from the gist.

[0155] Also, the flow of the program processing described in the above embodiment is merely an example, and unnecessary steps may be deleted, new steps may be added, or the processing order may be changed within the scope not departing from the gist.

[0156] In the above embodiment, the case where the processing according to the embodiment is realized by software configuration using a computer by executing a program has been described, but it is not limited thereto. The embodiment may be realized, for example, by a hardware configuration or a combination of a hardware configuration and a software configuration.

[0157] In the above embodiment, an example of forming a film using a batch-type substrate processing apparatus that processes a plurality of substrates at once has been described. The present disclosure is not limited to the above-described aspect, and can be suitably applied, for example, even when forming a film using a single-wafer type substrate processing apparatus that processes one or several substrates at once. Also, in the above aspect, an example of forming a film using a substrate processing apparatus having a hot-wall type processing furnace has been described. The present disclosure is not limited to the above-described aspect, and can be suitably applied even when forming a film using a substrate processing apparatus having a cold-wall type processing furnace.

[0158] Even when using these substrate processing apparatuses, each process can be performed with the same processing procedure and processing conditions as in the above embodiment, and the same effects as in the above embodiment can be obtained.

Description of Reference Numerals

[0159] 1 Substrate processing apparatus 29 Processing chamber (processing container) 100 Control unit 103 Storage unit 107 Determination unit 203 Operation unit 204 Display unit

Claims

1. A display unit capable of displaying a file describing processing conditions of a substrate having a plurality of set values; An operation unit capable of performing an editing operation of the file and at least one of an operation of canceling or re-doing the set value set in the editing operation; A storage unit that stores the file and operation history information of the canceling or re-doing operation; A determination unit that determines a valid range of the set value re-set during the canceling or re-doing operation; A control unit having the storage unit and the determination unit and capable of controlling an editing operation of the set value; A processing container capable of processing the substrate based on the specified file; comprising The display unit has a button capable of performing the canceling or re-doing operation; switching the display of the button in accordance with the canceling or re-doing operation; A substrate processing apparatus.

2. The control unit further has a management unit that manages the set value; The management unit searches for information on the instructed set value in accordance with an instruction from the operation unit; The substrate processing apparatus according to claim 1.

3. The control unit further has a range setting unit that sets an upper limit value and a lower limit value that are the valid range of the set value; The range setting unit sets the valid range of all the set values in accordance with a setting instruction of the valid range from the management unit; The substrate processing apparatus according to claim 2.

4. The range setting unit calculates the upper limit value and the lower limit value by checking range setting conditions of each predetermined item and setting information of other related items; The substrate processing apparatus according to claim 3.

5. When the set value is changed, the determination unit determines whether all the set values defined in the file are within a valid range; The substrate processing apparatus according to claim 1.

6. When the determination result of the determination unit is out of range, the control unit notifies the operation unit to notify that the set value is out of range; The substrate processing apparatus according to claim 5.

7. In accordance with the notification from the control unit, the operation unit instructs the display unit to display that there is a set value out of range; The substrate processing apparatus according to claim 6.

8. In accordance with an instruction from the operation unit, the display unit displays a notification that the set value is out of range and switches the display of the target set value; The substrate processing apparatus according to claim 7.

9. The display unit switches the display characters of the buttons according to the display language of the display unit. The substrate processing apparatus according to claim 1.

10. A display unit capable of displaying a file describing processing conditions of a substrate having a plurality of set values, An operation unit capable of performing the editing operation of the file and at least one of an operation of canceling or re-doing the set value set in the editing operation, The storage unit stores the file, the operation history information of the canceling or re-doing operation, the first operation history information storing the set value related information of the set value, and the second operation history information storing the set value related information as a cancellation history when the canceling operation is executed. A determination unit that determines the valid range of the set value re-set during the canceling or re-doing operation, A control unit having the storage unit and the determination unit and capable of controlling the editing operation of the set value, A processing container capable of processing the substrate based on the designated file, A substrate processing apparatus having the above.

11. The set value related information includes at least any one of a setting item, a set value before change, and a set value after change. The substrate processing apparatus according to claim 10.

12. When the canceling operation is executed, the control unit stores the set value related information stored in the first operation history information in the second operation history information and deletes the set value related information stored in the first operation history information. The substrate processing apparatus according to claim 10.

13. When the re-doing operation is executed, the control unit stores the set value related information stored in the second operation history information in the first operation history information and deletes the set value related information stored in the second operation history information. The substrate processing apparatus according to claim 10.

14. When the control unit acquires new set value related information, the control unit stores the set value related information stored in the second operation history information in the first operation history information and stores the new set value related information in the first operation history information. The substrate processing apparatus according to claim 10.

15. The control unit clears the second operation history information. The substrate processing apparatus according to claim 14.

16. When the control unit finishes editing the file, the control unit clears the operation history information. The substrate processing apparatus according to claim 1. Step of displaying a file describing processing conditions of a substrate having a plurality of set values Step of performing at least one operation of canceling or re-doing the set set value when editing the set value Step of storing the file and the operation history information of the canceling or re-doing operation Step of determining the valid range of the set value re-set during the canceling or re-doing operation Step of executing the processing of the substrate based on the specified file Step of switching the display of the button enabling the canceling or re-doing operation in accordance with the canceling or re-doing operation A substrate processing method comprising the above

18. Step of displaying a file describing processing conditions of a substrate having a plurality of set values Step of performing at least one operation of canceling or re-doing the set set value when editing the set value Step of storing the file and the operation history information of the canceling or re-doing operation Step of determining the valid range of the set value re-set during the canceling or re-doing operation Step of executing the processing of the substrate based on the specified file Step of switching the display of the button enabling the canceling or re-doing operation in accordance with the canceling or re-doing operation A method of manufacturing a semiconductor device comprising the above

19. Procedure of displaying a file describing processing conditions of a substrate having a plurality of set values Procedure of performing at least one operation of canceling or re-doing the set set value when editing the set value Procedure of storing the file and the operation history information of the canceling or re-doing operation Procedure of determining the valid range of the set value re-set during the canceling or re-doing operation Procedure of executing the processing of the substrate based on the specified file Procedure of switching the display of the button enabling the canceling or re-doing operation in accordance with the canceling or re-doing operation A program for causing a computer to execute the above on a substrate processing apparatus

20. Step of displaying a file describing processing conditions of a substrate having a plurality of set values Step of performing at least one operation of canceling or re-doing the set set value when editing the set value a step of storing the file and the operation history information of the cancellation or the redo, the operation history information including first operation history information for storing setting value related information of the set value and second operation history information for storing the setting value related information as a cancellation history when the cancellation operation is executed; a step of determining a valid range of the set value reset during the cancellation or the redo operation; a step of executing processing of the substrate based on the designated file; A substrate processing method having the above.

21. A step of displaying a file describing processing conditions of a substrate having a plurality of set values; a step of performing at least one operation of canceling or redoing the set value set when editing the set value; a step of storing the file and the operation history information of the cancellation or the redo, the operation history information including first operation history information for storing setting value related information of the set value and second operation history information for storing the setting value related information as a cancellation history when the cancellation operation is executed; a step of determining a valid range of the set value reset during the cancellation or the redo operation; a step of executing processing of the substrate based on the designated file; A method of manufacturing a semiconductor device having the above.

22. A procedure of displaying a file describing processing conditions of a substrate having a plurality of set values; a procedure of performing at least one operation of canceling or redoing the set value set when editing the set value; a procedure of storing the file and the operation history information of the cancellation or the redo, the operation history information including first operation history information for storing setting value related information of the set value and second operation history information for storing the setting value related information as a cancellation history when the cancellation operation is executed; a procedure of determining a valid range of the set value reset during the cancellation or the redo operation; a procedure of executing processing of the substrate based on the designated file; A program for causing a computer to execute the above on a substrate processing apparatus.

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