Chamber pressure fluctuation suppression door and chamber pressure fluctuation suppression method

Abstract

To provide a door and a method for suppressing a room pressure fluctuation which are capable of suppressing a room pressure fluctuation generated at each point of time when the door is opened and closed immediately without using an indoor condition change as a reference.SOLUTION: A room pressure fluctuation suppression door 1 is configured to locate between two adjacent rooms, to suppress a pressure fluctuation in at least one of the two rooms, and to pivot for opening / closing. The room pressure fluctuation suppression door has a closable opening 18 at the bottom, door fixing means 2 for fixing the door in a closed state when the door is closed, and operation means 3 for operating the door fixing means 2 to fix the door 1 in the closed state or to release the fixed closed state. An opening / closing structure of the door automatically opens the door when the fixed closed state by the door fixing means 2 is released, but does not automatically close the door from the open state.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a door for suppressing fluctuations in room pressure in a clean room, a negative pressure room, a positive pressure room, etc., and a method for suppressing the above fluctuations.

Background Art

[0002] In facilities such as clean rooms, negative pressure rooms, and positive pressure rooms, a system for controlling room pressure is used to keep the pressure difference between the indoor space and the outdoor space above a predetermined level so that foreign substances from the outside do not flow in and contaminants generated inside do not flow out to the outside.

[0003] In the above facilities, a plurality of rooms are provided, and room pressure control is performed in at least one of two adjacent rooms by the above system. And usually, a door that allows passage between both rooms is provided between these rooms. However, when this door is opened, the room pressures of both rooms may reverse, and contaminants may be mixed into the room where room pressure control is being performed. This causes problems such as cross-contamination.

[0004] Regarding room pressure control, for example, in Patent Document 1, the opening / closing degree of the door and the ventilation volume corresponding thereto are recorded in advance, the opening / closing degree when the door is actually opened is derived from a plurality of sensors provided on the door, and the damper is controlled to supply a large amount of air corresponding to the ventilation volume based on this to prevent room pressure reversal. A method has been proposed.

[0005] In Patent Document 2, a method has been proposed in which the differential pressure between rooms is measured, and the opening ratio is changed and controlled by operating a closing member in a differential pressure holding damper provided between the rooms so as to maintain a constant differential pressure.

[0006] In Patent Document 3, it is proposed to determine that the door is open when the pressure difference between two rooms connected by a door, which is controlled to different chamber pressures, increases and then decreases, and to determine that the door is closed when the pressure difference increases again after the door is determined to be open. This means that the pressure difference between the two rooms is measured, and based on this, the pressure control of the two rooms is stopped until the door is determined to be closed after the door is determined to be open, and when the door is determined to be closed, the pressure control of the two air-conditioned spaces is started again.

[0007] All of these inventions are basically based on measuring and detecting state changes such as chamber pressure and controlling chamber pressure fluctuations via electrical signals, and are based on reasonable methodologies and technical concepts. However, when using the state changes inside the room as a reference, the chamber pressure control by measurement, detection, and signal transmission is not in time, and situations often occur where, for example, the opening and closing operation of the door is completed earlier than the start of control. Therefore, it is not uncommon that the chamber pressure fluctuations cannot be sufficiently suppressed on site.

[0008] Also, when suppressing chamber pressure fluctuations based on state changes inside the room, there is a risk that measurement and detection cannot be performed when the power becomes insufficient due to a power outage or the like, and the control of chamber pressure fluctuations caused by the opening and closing of the door cannot be sufficiently performed.

[0009] Furthermore, in a room where a damper having a mechanism for controlling the pressure in the exhaust path side to the target chamber pressure is provided and the chamber pressure is maintained at a state higher than the atmospheric pressure, (1) when the door is in the open state, the rooms with different chamber pressures communicate, causing the chamber pressure to decrease. To raise this chamber pressure to the steady state, the damper performs a closing operation (entering a state of excessive air supply). (2) After that, when the door starts to close, the damper operation cannot catch up with the rotation speed of the door, and immediately after closing, the state of excessive air supply into the room is maintained, causing the chamber pressure to rise. (3) By detecting this increased chamber pressure and causing the damper to perform an opening operation, it returns to the stable opening degree in the closed state, and the chamber pressure returns to the set value. Although such a series of processes may cause a problem of large fluctuations in chamber pressure, the control performed via electrical signals cannot sufficiently address such problems.

Prior Art Documents

Patent Document

[0010]

Patent Document 1

Patent Document 2

Patent Document 3

Summary of the Invention

Problems to be Solved by the Invention

[0011] Based on the above problems and the current situation, the inventor focused on suppressing the chamber pressure fluctuation by changing the structure of the door itself rather than using the indoor state change as a reference.

[0012] As a result of experiments and research, it has been found that since the doors used in clean rooms, negative pressure chambers, positive pressure chambers, etc. are relatively heavy, when opening the door manually (by pushing or pulling the door), there are many cases where excessive force is applied and the door opens suddenly, and large chamber pressure fluctuations can occur during door opening.

[0013] On the other hand, when a person closes the door of a room that requires airtightness, in the conventional door, no large chamber pressure fluctuation occurs until the door approaches the frame to which the door is attached (for example, in a clean room, a four-sided frame or a three-sided frame without a frame plate on the floor surface is mainly used). However, when pushing the door into the frame, that is, when pushing the air in the space of the frame part into the target room, the opening with the target room suddenly decreases, so pressure is applied to the door, and it is necessary to push the door into the frame at once with a force corresponding to this pressure. Therefore, a phenomenon in which the chamber pressure rises suddenly (hereinafter referred to as "overshoot" in this specification) occurs in this process, which becomes a disturbance of the pressure fluctuation in the stable operation of the chamber pressure, and it has been found that the suppression method is a problem.

[0014] The present invention has been made in view of the above problems, and provides a door that suppresses room pressure fluctuations that can occur at each time point when opening and closing the door without using the indoor state change as a reference, without time lag, and a method for suppressing the above room pressure fluctuations.

Means for Solving the Problems

[0015] In order to solve the above problems, the present invention proposes a door with a structure that can automatically open the door without relying on power and keep the opening speed constant. On the other hand, in the case of closing the door, it is proposed to configure the door so that a part of the door is in an open state until it is closed, and this opening is blocked immediately after closing to keep the room airtight.

[0016] That is, as a first aspect, the present invention is a room pressure fluctuation suppressing door provided between two adjacent rooms, which suppresses pressure fluctuations in at least one of the two rooms, the room pressure fluctuation suppressing door is a door that rotates to open and close, the room pressure fluctuation suppressing door has an opening at the lower part that can be blocked, the room pressure fluctuation suppressing door has door fixing means for fixing it in a closed state when the room pressure fluctuation suppressing door is closed, and operating means for operating this door fixing means to fix the room pressure fluctuation suppressing door in the closed state or release the fixing of the closed state, the room pressure fluctuation suppressing door has an opening and closing structure that automatically opens when the fixing of the closed state by the door fixing means is released, and does not automatically close from the open state, the operating means is coupled by a connecting means to a blocking means for blocking the opening, when the operating means is operated when the room pressure fluctuation suppressing door is closed, the door fixing means operates to fix the room pressure fluctuation suppressing door in the closed state, and in conjunction, the blocking means operates to block the opening and maintain the airtightness in at least one of the rooms, when the operating means is operated by the user when the closed state is fixed by the door fixing means, the fixing of the closed state is released, and in conjunction, the blocking of the opening by the blocking means is released A chamber pressure fluctuation suppressing door characterized by the following is provided.

[0017] As a second aspect, the opening and closing structure is a housing having a sealed space filled with hydraulic oil, a rotating shaft having a tooth portion formed on the outer periphery, a piston having a tooth portion meshing with the tooth portion of the rotating shaft and capable of reciprocating in the longitudinal direction, and biasing means for biasing the piston in a direction to open the chamber pressure fluctuation suppressing door is attached to the upper part of the chamber pressure fluctuation suppressing door, one end of a link mechanism is connected to one end of the rotating shaft, and the other end of the link mechanism is connected to the upper frame side of a door opening for the chamber pressure fluctuation suppressing door The above-described chamber pressure fluctuation suppressing door is provided.

[0018] As a third aspect, the above-described chamber pressure fluctuation suppressing door, wherein the opening speed of the chamber pressure fluctuation suppressing door when automatically opening is 0.3 m / s or less is provided.

[0019] As a fourth aspect, when a damper for measuring a target chamber pressure to maintain a target chamber pressure and performing air volume control based on the measured value is provided in at least one of the two chambers or its air supply or exhaust path, the chamber pressure fluctuation suppressing door has a sensor for detecting its opening and closing, and based on the opening and closing state of the door output from the sensor, when the chamber pressure fluctuation suppressing door opens, the damper stops air volume control, and after the chamber pressure fluctuation suppressing door closes, the damper starts air volume control. The above-described chamber pressure fluctuation suppressing door is provided.

[0020] As a fifth aspect, a chamber pressure fluctuation suppressing method for suppressing pressure fluctuations in at least one of two adjacent chambers, a chamber pressure fluctuation suppressing door that rotates and opens and closes is provided between the two chambers, When the fixing of the chamber pressure fluctuation suppressing door in the closed position is released, it automatically opens, while it is configured not to automatically close from the open position. The chamber pressure fluctuation suppressing door has an opening that can be closed at the lower part, and door fixing means for fixing it in the closed state when the chamber pressure fluctuation suppressing door is closed, and operating means for operating this door fixing means to fix the chamber pressure fluctuation suppressing door in the closed state or release the fixing of the closed state. When the operating means is operated when the chamber pressure fluctuation suppressing door is closed, the door fixing means operates to fix the chamber pressure fluctuation suppressing door in the closed state, and in conjunction with this, Close the opening the closing means operates to close the opening and maintain the airtightness in at least one of the chambers. When the operating means is operated when the closed state is fixed by the door fixing means, the fixing of the closed state is released, and in conjunction with this, the closing of the opening by the closing means is released. A chamber pressure fluctuation suppressing method characterized by the above. is provided.

Effect of the Invention

[0021] According to the present invention, it is possible to suppress the chamber pressure fluctuation caused by the opening and closing of the door without measuring and detecting the change in the state inside the chamber. Further, according to the present invention, it is possible to suppress the chamber pressure fluctuations that can occur at both the time of opening and closing the door, respectively, without a time lag. Furthermore, even if a situation occurs where the power supply is not sufficient due to some reason, it is possible to suppress the chamber pressure fluctuation caused by the opening and closing of the door.

Brief Description of the Drawings

[0022]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

Figure 12

Figure 13

Figure 14

Embodiments for Carrying Out the Invention

[0023] Hereinafter, embodiments of the present invention will be described with reference to the drawings. It should be noted that the present invention is not limited to the following embodiments.

[0024] (First Embodiment) Regarding this embodiment, in a facility such as a clean room that is air-conditioned at different room pressures in a plurality of rooms, the case where the present invention is applied to a door provided between two adjacent rooms will be described as an example.

[0025] Fig. 1 and Fig. 2 show an example of the chamber pressure fluctuation suppressing door of the present invention. These figures show the internal structure (such as the location where the rod bar or shaft as the connecting means is located) of a part of the chamber pressure fluctuation suppressing door so that it can be understood. Fig. 2 shows the chamber pressure fluctuation suppressing door of Fig. 1 from the side (left side facing Fig. 1). This chamber pressure fluctuation suppressing door (1) is pivotally attached to a door frame (14) provided in a building (or chamber) by a hinge (13) (see Fig. 4) so as to be openable and closable, and rotates and opens and closes toward one of the rooms. Further, the chamber pressure fluctuation suppressing door (1) has an airtight structure for maintaining the airtightness of the room. A known airtight structure can be applied.

[0026] The chamber pressure fluctuation suppressing door (1) of the present invention has door fixing means (2) for fixing it in a closed state when the chamber pressure fluctuation suppressing door is closed. The door fixing means (2) can be a key lock. This chamber pressure fluctuation suppressing door (1) has operating means (a handle for operating the door fixing means) (3) for a user to operate the door fixing means (2) to fix the chamber pressure fluctuation suppressing door (1) in a closed state or to release the fixing of the closed state. As these means, a known gremon handle (gremon lock) such as protruding or retracting a rod up and down to switch between a locked state and an unlocked state may be used.

[0027] The room pressure fluctuation suppression door (1) of the present invention is configured such that when the user operates the operating means (3) to release the fixing of the closed door state fixed by the door fixing means (2) and then releases the hand from the operating means (3), the door automatically opens. The opening speed when automatically opening the door can be configured to be constant. As described above, since the doors used in clean rooms, negative pressure rooms, positive pressure rooms, etc. are relatively heavy, when opening the door manually (by pushing or pulling the door), too much force may be applied, and instead, the door may open suddenly, thereby causing a large room pressure fluctuation. When the room pressure fluctuation suppression door (1) is configured as described above, after the user operates the operating means (3) to release the fixing of the closed door state fixed by the door fixing means (2) and then releases the hand from the operating means (3), the room pressure fluctuation suppression door (1) automatically opens at a constant speed. Therefore, it is possible to avoid suddenly opening the door and causing a large room pressure fluctuation.

[0028] An example of a specific structure for automatically opening the door after the fixing of the closed door state fixed by the door fixing means (2) is released is shown in FIGS. 3 to 4.

[0029] As shown in FIG. 1, a housing (4) having a predetermined internal structure is attached to the upper part of the room pressure fluctuation suppression door (1). An example of the internal structure of this housing (4) is shown in FIG. 3. FIG. 3 is a view of the housing (4) of FIG. 1 seen from above. The housing (4) includes a sealed space (5) filled with hydraulic oil, a rotating shaft (6) having a tooth portion (7) formed on the outer periphery, a reciprocally movable piston (8) provided with a tooth portion (12) (rack and pinion mechanism) that meshes with the tooth portion (7) of this rotating shaft in the longitudinal direction, and a biasing means (9) for biasing the piston (8) in the direction of opening the room pressure fluctuation suppression door (1). In the example of FIG. 3, the rack and pinion mechanism is arranged in the cavity portion (15) of the piston (8), but it is not necessarily limited to such a configuration, and a configuration with appropriate changes in this regard can be adopted.

[0030] The rotating shaft (6) is connected so as to penetrate the housing (4) vertically. One end of the link mechanism (10) is connected to one end of the rotating shaft (6), and the other end of the link mechanism (10) is connected to the upper frame side (11) of the frame for the door provided in the building (or room).

[0031] Since the room pressure fluctuation suppressing door (1) of the present invention has a structure that rotates to open and close, when it is closed, the rotational motion is transmitted to the rotating shaft (6) via the link mechanism (10), and is also converted into a linear motion of the piston via the toothed portion of the rotating shaft (6) and the longitudinally toothed portion (12) that meshes therewith. As a result, the piston (8) moves in the sealed space (5) of the housing (4), compressing the biasing means (9). When the operating means (3) is operated in this state (i.e., the closed door state), the closed door state is fixed by the door fixing means (2).

[0032] Thereafter, in the fixed state described above, the operating means (3) is operated to release the fixing of the closed door state fixed by the door fixing means (2), and when the hand is released from the operating means (3), the piston (8) is biased by the repulsive force of the compressed biasing means (9), the rotating shaft (6) rotates, and the room pressure fluctuation suppressing door (1) automatically opens.

[0033] When the room pressure fluctuation suppressing door (1) opens, the rotating shaft (6) rotates and the piston (8) moves in this way. At this time, the hydraulic oil filled inside the sealed space (5) flows according to the movement of the piston (8). The opening speed of the room pressure fluctuation suppressing door (1) is adjusted by controlling the flow rate of this hydraulic oil with a valve (adjusting valve). More specifically, the adjusting valve is arranged in a flow path (not shown) connecting the high-pressure chamber (16) and the low-pressure chamber (17) of the sealed space (5), and by controlling the flow rate of the hydraulic oil flowing through the sealed space (5) in conjunction with the movement of the piston (8), the opening speed of the room pressure fluctuation suppressing door (1) is adjusted.

[0034] It has been found by experiments that the lower the opening speed of the door, the more effectively the chamber pressure fluctuation can be suppressed. On the other hand, if the opening speed is too slow, it may impede work efficiency. According to investigations and experiments, it has been found that if the time until the door is opened to an extent that allows the operator to pass through is about 3 seconds or less, the substantial impact on work efficiency can be suppressed. As a result of comparative experiments based on these points, it is considered that the opening speed of the chamber pressure fluctuation suppressing door (1) is preferably 0.3 m / s or less.

[0035] When the chamber pressure fluctuation suppressing door (1) is configured as described above, the chamber pressure fluctuation suppressing door (1) does not automatically close from the open state. From the perspective of suppressing chamber pressure fluctuations, unlike the case of automatic opening, there is little meaning in automatically closing, so there is no problem with such a configuration.

[0036] The chamber pressure fluctuation suppressing door (1) of the present invention has an opening (18) at the lower part. This opening (18) is configured to be able to be closed (capable of being blocked) by a blocking means (19).

[0037] The blocking means (19) is provided below the chamber pressure fluctuation suppressing door (1). When the opening (18) is not blocked, the blocking means (19) is housed inside the chamber pressure fluctuation suppressing door (1), and when blocking the opening (18), it protrudes downward from the chamber pressure fluctuation suppressing door (1) and abuts against the floor (21) to block it.

[0038] More specifically, the blocking means (19) for blocking the opening (18) and the aforementioned operating means (3) are coupled by a coupling means (22) such as a shaft or a rod. Further, a coupling means (20) located above the operating means (3) is coupled between the operating means (3) and the upper part of the chamber pressure fluctuation suppressing door (1).

[0039] When the operating means (3) is operated by the user when the room pressure fluctuation suppressing door (1) is closed, the aforementioned door fixing means (2) is actuated to fix the room pressure fluctuation suppressing door (1) in the closed state, and the connecting means (20) moves upward. The protruding portion (24) provided at the tip of the connecting means (20) hits the roller portion (23) and is inserted between the roller portion (23) and the locking portion (25). As a result, the upper part of the room pressure fluctuation suppressing door (1) is pressed against the upper frame side (11) of the door opening (see FIG. 7 which is a partially enlarged view of the upper part of FIG. 2). That is, the room pressure fluctuation suppressing door (1) maintains airtightness by pressing the door frame (packing) in the direction of the arrow in FIG. 7.

[0040] Furthermore, in conjunction with the above operation, the connecting means (22) moves downward, and the closing means (19) is actuated to protrude downward from the room pressure fluctuation suppressing door (1) and abut against the floor to completely close the entire opening (18). When the opening (18) is completely closed, the airtightness of the room is maintained.

[0041] 5 to 6 show the room pressure fluctuation suppressing door (1) in a state where the room pressure fluctuation suppressing door (1) is fixed in the closed state and the opening (18) is closed by the closing means (19).

[0042] In the present embodiment, the opening (18) is provided so as to be located between the lower part of the room pressure fluctuation suppressing door (1) and the floor (21) and extends over the entire length in the width direction (the left - right direction of the room pressure fluctuation suppressing door (1) as viewed in FIG. 1). That is, a horizontally long rectangular opening (18) is provided between the lower end of the room pressure fluctuation suppressing door (1) and the floor (21). The closing means (19) is configured to close such an opening (18).

[0043] The position, shape, and range of the opening are not limited to the above. For example, it may be configured such that not the entire length in the width direction at the lower part of the room pressure fluctuation suppressing door (1) but a part thereof is open. Regardless of the position, shape, and range in which the opening (18) is configured, the closing means (19) is configured to completely close it.

[0044] As described above, when the user operates the operating means (3) to fix the closed door state when the chamber pressure fluctuation suppressing door (1) is closed, at the same time, the closing means (19) operates and the opening (18) is closed (Figs. 5 to 6). In other words, until immediately before the door is closed, the opening (18) is kept in an unclosed state (open state). Therefore, when closing the door, even if the door approaches the frame to which the door is attached, the surface pressure is not applied too much to the door, and it becomes easy to close the door completely within the frame. The space air in the frame part has already been pushed in, and since the process is to block the area of the opening (18) to zero by the operating means (3), there is no newly pushed-in air. That is, by configuring the door as described above, it is possible to avoid the problem of overshoot that occurs when closing the door.

[0045] Since the closing means (19) and the operating means (3) are coupled by the coupling means (22), when the user operates the operating means (3) when the closed door state is fixed by the door fixing means (2), the fixing of the closed door state is released, and at the same time, the closing means (19) is pulled upward in conjunction, and the closing of the opening (18) by the closing means (19) is released.

[0046] According to the present invention, it is possible to suppress chamber pressure fluctuations without measuring and detecting changes in the indoor state. In addition, the door is automatically opened at a constant speed without using power, and a part of the door is kept in an open state until the door is closed, so it is possible to suppress chamber pressure fluctuations that may occur both when the door is opened and when it is closed without time lag.

[0047] (Comparative Experiment 1) In the chamber having the configuration shown in Fig. 8, with the door A (ordinary door) of the front chamber in the closed state, the door B of the main chamber was configured in the following patterns (1-1) to (1-3) respectively, and in each case, it was opened and closed every 10 seconds, and the pressure fluctuations in the front chamber and the main chamber were measured.

[0048] [Patterns of Door B in Comparative Experiment 1] (1-1) When door B is a commonly used door (without the configurations of (1-2) and (1-3) below). (1-2) For door B, it has door fixing means for fixing it in the closed state when it is closed, and operating means for operating this door fixing means to fix the door in the closed state or release the fixing in the closed state. When the fixing of the closed state by the door fixing means is released, it automatically opens, while it does not automatically close from the open state, and it shall have such an opening and closing structure. (1-3) For door B, in addition to the opening and closing structure in (1-2) above, an opening that can be closed is provided at the lower part. When the operating means is operated by the user when the door is closed, the door fixing means operates to fix the chamber pressure fluctuation suppressing door in the closed state, and in conjunction, the closing means operates to close the opening and maintain the airtightness of at least one of the rooms. When the operating means is operated by the user when the closed state is fixed by the door fixing means, the fixing of the closed state is released, and in conjunction, the closing of the opening by the closing means is released (the present invention).

[0049] The results are shown in FIGS. 9 to 11. In the graph, the broken line indicates the pressure fluctuation in the main chamber, and the solid line indicates the pressure fluctuation in the pre-chamber.

[0050] As shown in FIG. 9, in the case of (1-1) above, when opening the door, the pressures in the pre-chamber and the main chamber were reversed due to pressure fluctuations (refer to "a" etc. in the graph). Further, when closing the door, the pressure in the main chamber became a value that deviated nearly twice from the set pressure (+30 Pa) (about +60 Pa) (refer to "b" etc. in the graph). This indicates that a large overshoot occurred.

[0051] As shown in FIG. 10, in the case of (1-2) above, the chamber pressure reversal between the pre-chamber and the main chamber did not occur when opening the door (refer to "c" etc. in the graph). However, when closing the door, the pressure in the main chamber became a value that deviated nearly twice from the set pressure (+30 Pa) (a value close to +60 Pa), the same as in the case of (1-1) above (refer to "d" etc. in the graph). That is, it is shown that a large overshoot occurred.

[0052] As shown in Fig. 11, in the case of the above (1 - 3) (the present invention), no pressure reversal occurred during door opening (refer to "e" etc. in the graph). Further, even during door closing, the pressure in the main chamber was suppressed to about +40 Pa and did not become a pressure deviating significantly from the set pressure (+30 Pa) (refer to "f" etc. in the graph). That is, no large overshoot occurred.

[0053] As described above, in the present invention, it is shown that chamber pressure fluctuations that can occur at both the time of door opening and door closing can be suppressed without time lag, respectively, and a remarkable effect is shown.

[0054] (Second Embodiment) The present invention can also be applied when a damper (known), which has a mechanism for measuring the target chamber pressure to maintain the target chamber pressure and performing air volume control based on the measured value, is provided in the air supply or exhaust path (duct) etc. of each chamber. In this case, the structure, configuration, and other details of the chamber pressure fluctuation suppressing door are basically the same as those described in the first embodiment.

[0055] In this case, a sensor for detecting door opening and closing may be provided in the chamber pressure fluctuation suppressing door. That is, based on the opening and closing state of the door output from the above sensor, the damper stops air volume control when the chamber pressure fluctuation suppressing door opens, and the damper starts air volume control after the chamber pressure fluctuation suppressing door closes. With this configuration, basic control is performed with the door structure, and in addition to suppressing chamber pressure fluctuations caused by door opening and closing, control by the damper can also be performed as an additional measure, so it becomes possible to further suppress chamber pressure fluctuations caused by door opening and closing.

[0056] (Comparative Experiment 2) In the chamber configured as shown in FIG. 12, with the door A (ordinary door) of the anteroom in the closed state, while the door B of the main chamber is configured based on the above (1-3) configuration and further configured in each of the following patterns (2-1) to (2-2) (both are of the present invention), it is opened and closed every 10 seconds in each case, and the pressure fluctuations between the anteroom and the main chamber are measured. A damper for adjusting the air volume of the main chamber is provided in the duct leading to the main chamber. This damper adjusts the air volume so as to reach a predetermined pressure in view of the pressure difference between the inside and outside of the room (known).

[0057] [Pattern of Door B in Comparative Experiment 2] (2-1) For door B, having the same configuration as the above (1-3) configuration, and without providing (or providing but not operating) a sensor for detecting door opening and closing. (2-2) For door B, in addition to the above (1-3) configuration, a sensor for detecting door opening and closing is provided, and based on the opening and closing state of the door output from the sensor, when the chamber pressure fluctuation suppressing door opens, the damper stops air volume control, and when the chamber pressure fluctuation suppressing door closes, the damper starts air volume control.

[0058] The results are shown in FIGS. 13 to 14. In the graph, the dashed line indicates the pressure fluctuation of the main chamber, and the solid line indicates the pressure fluctuation of the anteroom.

[0059] As shown in these figures, in both the case of (2-1) and the case of (2-2), no pressure reversal occurred during door opening (see "g", "i", etc. in the graph).

[0060] During door closing, in the case of (2-1), the pressure in the main chamber was suppressed to about +40 Pa and did not deviate significantly from the set pressure (+30 Pa) (see "h", etc. in the graph). However, in the case of (2-2), the pressure in the main chamber was suppressed to a level slightly exceeding +30 Pa, and the pressure fluctuation during door closing became even smaller (see "j", etc. in the graph). Thus, it was shown that when the present invention is used in combination with the control by the damper, an extremely large effect (suppression of chamber pressure fluctuation due to door opening and closing) can be achieved.

Industrial Applicability

[0061] According to the present invention, it is possible to suppress the room pressure fluctuation caused by the opening and closing of the door without measuring and detecting the change in the indoor state.

[0062] In addition, since the room pressure fluctuation is suppressed by the structure of the door itself without relying on an electrical signal, it is possible to suppress the room pressure fluctuation that may occur at both the time of opening the door and the time of closing the door, respectively, without a time lag.

[0063] Furthermore, even if a situation occurs where the power supply is not sufficient for some reason, it is possible to suppress the room pressure fluctuation caused by the opening and closing of the door.

[0064] Moreover, according to the present invention, for example, when applying to an existing control system, it is only necessary to replace only the door with the one of the present invention, and there is no need to replace the entire control system.

[0065] Thus, the present invention contributes to the improvement of the suppression of room pressure fluctuation in a clean room, a negative pressure room, a positive pressure room, etc., and its industrial applicability is extremely large.

Explanation of Signs

[0066] 1 Room pressure fluctuation suppressing door 2 Door fixing means 3 Operating means 4 Housing 5 Sealed space 6 Rotation axis 7 Tooth part 8 Piston 9 Biasing means 10 Link mechanism 11 Upper frame side of door opening 12 Tooth part 13 Hinge 14 Frame 15 Cavity part 16 High pressure chamber 17 Low pressure chamber 18 Opening 19 Closing means 20, 22 Connecting means 21 Floor 23 Roller part 24 protruding end 25 locking part

Claims

1. A chamber pressure fluctuation suppressing door provided between two adjacent chambers for suppressing pressure fluctuations in at least one of the two chambers, wherein the chamber pressure fluctuation suppressing door is a door that rotates to open and close, the chamber pressure fluctuation suppressing door has an opening at the lower part that can be closed, the chamber pressure fluctuation suppressing door has door fixing means for fixing it in a closed state when the door is closed, and operating means for operating the door fixing means to fix the chamber pressure fluctuation suppressing door in the closed state or release the fixing of the closed state, the chamber pressure fluctuation suppressing door has an opening and closing structure that automatically opens when the fixing of the closed state by the door fixing means is released, but does not automatically close from the open state, the operating means is coupled to a closing means for closing the opening by a connecting means, when the operating means is operated when the chamber pressure fluctuation suppressing door is closed, the door fixing means operates to fix the chamber pressure fluctuation suppressing door in the closed state, and in conjunction therewith, the closing means operates to close the opening and maintain the airtightness in at least one of the chambers, when the operating means is operated by a user when the closed state is fixed by the door fixing means, the fixing of the closed state is released, and in conjunction therewith, the closing of the opening by the closing means is released, A chamber pressure fluctuation suppressing door characterized by the above.

2. The opening and closing structure is, a housing having a sealed space filled with hydraulic oil, a rotating shaft having a tooth portion formed on the outer periphery, a piston having a tooth portion meshing with the tooth portion of the rotating shaft in the longitudinal direction and capable of reciprocating movement, and biasing means for biasing the piston in a direction to open the chamber pressure fluctuation suppressing door is attached to the upper part of the chamber pressure fluctuation suppressing door, one end of a link mechanism is connected to one end of the rotating shaft, and the other end of the link mechanism is connected to the upper frame side of a door opening for the chamber pressure fluctuation suppressing door, The chamber pressure fluctuation suppressing door according to Claim 1.

3. The pressure fluctuation suppressing door according to claim 1 or 2, wherein the opening speed of the pressure fluctuation suppressing door when automatically opening is 0.3 m / s or less.

4. In the case where a damper for measuring a target chamber pressure to maintain a target chamber pressure and performing air volume control based on the measured value is provided in at least one of the two chambers or its air supply or exhaust path, the pressure fluctuation suppressing door has a sensor for detecting its opening and closing, and based on the opening and closing state of the door output from the sensor, when the pressure fluctuation suppressing door opens, the damper stops air volume control, and after the pressure fluctuation suppressing door closes, the damper starts air volume control. The pressure fluctuation suppressing door according to claim 1 or 2.

5. A method for suppressing pressure fluctuations in at least one of two adjacent chambers, comprising: Providing a pressure fluctuation suppressing door that rotates between the two chambers to open and close; Configured to automatically open when the fixing of the pressure fluctuation suppressing door in the closed state is released, and not to automatically close from the open state; The pressure fluctuation suppressing door has an opening at the lower part that can be closed, a door fixing means for fixing the door in the closed state when the pressure fluctuation suppressing door is closed, and an operating means for operating the door fixing means to fix the pressure fluctuation suppressing door in the closed state or release the fixing of the closed state; When the operating means is operated when the pressure fluctuation suppressing door is closed, the door fixing means operates to fix the pressure fluctuation suppressing door in the closed state, and in conjunction therewith, a closing means for closing the opening operates to close the opening and maintain the airtightness in at least one of the chambers; When the operating means is operated when the closed state is fixed by the door fixing means, the fixing of the closed state is released, and in conjunction therewith, the closing of the opening by the closing means is released. A method for suppressing pressure fluctuations, characterized by the above.

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