X-ray fluorescence analyzer, method for managing water leakage in X-ray fluorescence analyzer, information storage medium, and program

Abstract

To reduce the extent of damage to the fluorescence x-ray analyzer in the event of a water leakage by detecting water leakage inside the spectral chamber quickly and accurately.SOLUTION: A fluorescence X-ray analyzer has a high voltage power supply that applies voltage to an electron beam source, an X-ray tube that irradiates a sample placed in a spectral chamber with primary X-ray generated by irradiating a target with the generated electron beam, a water supply pump that supplies cooling water to cool the target, a vacuum pump that exhausts the air in the spectral chamber, a vacuum gage that measures the pressure in the spectral chamber, and a control part that determines that the cooling water has leaked inside the spectral chamber based on both the pressure measured by the vacuum gage and the voltage applied by the high voltage power supply to the electron beam source, and stops the operation of the water supply pump.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a fluorescent X-ray analyzer, a method for managing water leakage in a fluorescent X-ray analyzer, an information storage medium, and a program.

Background Art

[0002] As an apparatus for analyzing elements contained in a sample, a fluorescent X-ray analyzer is known. The fluorescent X-ray analyzer irradiates a sample with primary X-rays and performs analysis based on the intensity and energy of the fluorescent X-rays emitted from the sample. When analyzing light elements, measurement is performed with the spectroscopic chamber evacuated in order to avoid absorption of X-rays by the atmosphere. The fluorescent X-ray analyzer has an X-ray tube that generates primary X-rays. Since the target and the anode part of the X-ray tube generate heat when generating X-rays, they are cooled using cooling water.

[0003] In the vicinity of the anode where cooling water is continuously applied, damage may occur in the flow path due to wear and vibration, and the cooling water may leak into the X-ray tube. The cooling water that has leaked into the X-ray tube breaks through the thin X-ray window of the X-ray tube and is drawn into the spectroscopic chamber in a vacuum state. At this time, if the fluorescent X-ray analyzer continues to operate, further damage may occur. Therefore, when a leak of cooling water is detected, it is necessary to immediately stop the operation of the apparatus in order to reduce the degree of failure.

[0004] For example, Patent Document 1 below discloses a rotating cathode type X-ray generator that receives leakage of cooling water with a tray, detects it with a water detection sensor when a predetermined water level is reached, stops the electron beam for target irradiation, and issues a warning. Patent Document 2 below discloses a method for determining the presence or absence of leakage of cooling water in a liquid-cooled electron tube based on a change in water pressure. Patent Document 3 below discloses a method for detecting water leakage in an electromagnetic wave generator by using a float type switch device. Patent Document 4 below discloses a method for manufacturing an X-ray tube that detects leakage of cooling water with a flow sensor and stops water supply. Patent Document 5 below discloses an X-ray diffractometer having a safety device that stops a test when leakage of cooling water in an X-ray tube is detected.

Prior Art Documents

[0005] [Patent Document 1] Japanese Patent Application Publication No. 2-197098 [Patent Document 2] Japanese Patent Application Publication No. 7-235266 [Patent Document 3] JP 2001-327855 A [Patent Document 4] Japanese Patent Application Publication No. 9-167563 [Patent Document 5] Japanese Patent Application Publication No. 8-189907 Summary of the Invention [Problem to be solved by the invention]

[0006] If a sensor for detecting water leakage is placed in the spectroscopic chamber, the size and position of other components placed inside the spectroscopic chamber are restricted. In addition, depending on the size of the spectroscopic chamber, it may not be possible to place the sensor. In addition, depending on the type of sensor, water leakage may not be detected accurately. Furthermore, depending on the position of the sensor, it may not be possible to detect water leakage in the early stages, and a certain amount of cooling water may leak into the spectroscopic chamber.

[0007] The present disclosure has been made in consideration of the above-mentioned problems, and has an object to provide an X-ray fluorescence analysis device that can detect water leakage inside the spectroscopic chamber with high accuracy and speed, thereby reducing the extent of failure when water leakage occurs. [Means for solving the problem]

[0008] (1) The X-ray fluorescence analyzer according to one aspect of the present disclosure includes a high-voltage power supply that applies a voltage to an electron beam source, an X-ray tube that irradiates a sample disposed in a spectroscopic chamber with primary X-rays generated by irradiating a target with the electron beam generated by the electron beam source, a water pump that sends cooling water for cooling the target, a vacuum pump that discharges the atmosphere in the spectroscopic chamber, a vacuum gauge that measures the pressure in the spectroscopic chamber, and a control unit that determines that the cooling water has leaked into the spectroscopic chamber based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source, and stops the operation of the water pump.

[0009] (2) In the above X-ray fluorescence analyzer, the control unit determines that the cooling water has leaked when the pressure measured by the vacuum gauge is higher than a predetermined value and the voltage of the high-voltage power supply applied to the electron beam source is lower than a predetermined value.

[0010] (3) In the above X-ray fluorescence analyzer, the control unit stops applying the voltage to the electron beam source when it determines that the cooling water has leaked.

[0011] (4) In the above X-ray fluorescence analyzer, the control unit stops the operation of the vacuum pump when it determines that the cooling water has leaked.

[0012] (5) In the above X-ray fluorescence analyzer, the control unit introduces air into the spectroscopic chamber when it determines that the cooling water has leaked.

[0013] (6) In the above X-ray fluorescence analyzer, further, an information processing unit including a reception unit that receives a user's instruction and a display unit is provided. The display unit displays that there is a possibility that the cooling water has leaked into the spectroscopic chamber when the control unit or the information processing unit determines that the cooling water has leaked. When the reception unit receives an instruction from the user to stop the operation of the water pump, the control unit stops the operation of the water pump.

[0014] (7) A method for managing water leakage in a fluorescent X-ray analyzer according to an aspect of the present disclosure includes a high-voltage power supply that applies a voltage to an electron beam source, an X-ray tube that irradiates a sample disposed in a spectroscopic chamber with primary X-rays generated by irradiating a target with the electron beam generated by the electron beam source, a water pump that sends cooling water for cooling the target, a vacuum pump that discharges the atmosphere in the spectroscopic chamber, and a vacuum gauge that measures the pressure in the spectroscopic chamber. The method for managing water leakage in the fluorescent X-ray analyzer includes a step of determining whether or not the cooling water has leaked into the spectroscopic chamber based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source, and a step of stopping the operation of the water pump when it is determined that the cooling water has leaked into the spectroscopic chamber.

[0015] (8) An information storage medium according to an aspect of the present disclosure is a non-temporary computer-readable information storage medium that stores a program executed by a computer used in a fluorescent X-ray analyzer. The fluorescent X-ray analyzer includes a high-voltage power supply that applies a voltage to an electron beam source, an X-ray tube that irradiates a sample disposed in a spectroscopic chamber with primary X-rays generated by irradiating a target with the electron beam generated by the electron beam source, a water pump that sends cooling water for cooling the target, a vacuum pump that discharges the atmosphere in the spectroscopic chamber, and a vacuum gauge that measures the pressure in the spectroscopic chamber. The program causes the computer to execute a step of determining whether or not the cooling water has leaked into the spectroscopic chamber based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source, and a step of stopping the operation of the water pump when it is determined that the cooling water has leaked into the spectroscopic chamber.

[0016] (9) The program according to one aspect of the present disclosure is a program executed by a computer used in a fluorescent X-ray analyzer. The fluorescent X-ray analyzer includes a high-voltage power supply that applies a voltage to an electron beam source, an X-ray tube that irradiates a sample disposed in a spectro chamber with primary X-rays generated by irradiating a target with the electron beam generated by the electron beam source, a water pump that sends cooling water for cooling the target, a vacuum pump that discharges the atmosphere in the spectro chamber, and a vacuum gauge that measures the pressure in the spectro chamber. The computer is caused to execute a step of determining whether or not the cooling water has leaked into the spectro chamber based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source, and a step of stopping the operation of the water pump when it is determined that the cooling water has leaked into the spectro chamber.

Advantages of the Invention

[0017] According to the present disclosure, by detecting water leakage inside the spectro chamber with high precision and quickly, the degree of failure of the fluorescent X-ray analyzer can be reduced when water leakage occurs.

Brief Description of the Drawings

[0018]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Embodiments for Carrying Out the Invention

[0019] As shown in FIG. 1, it has a measurement unit 102, a water supply pump 104, a vacuum pump 106, an information processing unit 108, and a high-voltage power supply 110. The measurement unit 102 includes a preparation chamber 112, a vacuum shutter 114, leak valves 116A and 116B, a spectroscopic chamber 118, an X-ray tube 120, a vacuum gauge 122, and a control unit 124.

[0020] The preparation chamber 112 is a chamber for inserting and removing the sample 202, and is also referred to as a load lock. The preparation chamber 112 is arranged adjacent to the spectroscopic chamber 118, and a vacuum shutter 114 is arranged between the preparation chamber 112 and the spectroscopic chamber 118. The vacuum shutter 114 is normally closed and is opened when transporting the sample 202 between the preparation chamber 112 and the spectroscopic chamber 118. The leak valve 116A is a valve for introducing air into the preparation chamber 112. The leak valve 116A is opened manually or under the control of the control unit 124.

[0021] The spectroscopic chamber 118 is a chamber where the analysis of the sample 202 is performed. Specifically, as shown in FIG. 2(a), the spectroscopic chamber 118 is provided with a sample stage 204, an X-ray tube 120, a spectroscopic element 206, a detector 208, and a vacuum gauge 122. In this embodiment, a part of the X-ray tube 120 (around the window portion from which the primary X-rays are emitted) and a part of the vacuum gauge 122 are located inside the spectroscopic chamber 118, and the other parts of the X-ray tube 120 and the vacuum gauge 122 are located outside the spectroscopic chamber 118 are exemplified. The leak valve 116B is a valve for introducing air into the spectroscopic chamber 118. The leak valve 116B is opened manually or under the control of the control unit 124.

[0022] The sample stage 204 is an x-y stage on which the sample 202 to be measured is placed. The primary X-rays generated by the X-ray tube 120 are irradiated onto the surface of the sample 202 to be measured. The spectroscopic element 206 spectrally analyzes the fluorescent X-rays of a predetermined wavelength emitted from the sample 202. The detector 208 is arranged at the position where the fluorescent X-rays spectrally analyzed by the spectroscopic element 206 are incident. The detector 208 is, for example, a proportional counter tube. The detector 208 measures the fluorescent X-rays and outputs a pulse signal. A counter (not shown) counts the pulse signal output from the detector 208, thereby obtaining the intensity of the fluorescent X-rays. The spectroscopic element 206 and the detector 208 may be provided for each element to be analyzed, or a set of the spectroscopic element 206 and the detector 208 may be rotated and moved for measurement. When a set of the spectroscopic element 206 and the detector 208 is rotated and moved, a mechanism (goniometer) for rotating and moving the spectroscopic element 206 and the detector 208 is arranged in the spectroscopic chamber.

[0023] Note that the X-ray tube 120 shown in Fig. 2(a) irradiates X-rays onto the lower surface of the sample 202 from below the sample 202. That is, Fig. 2(a) illustrates the spectroscopic chamber 118 when the fluorescent X-ray analyzer 100 is of the bottom-irradiation type. As shown in Fig. 2(b), the X-ray tube 120 may irradiate X-rays onto the upper surface of the sample 202 from above the sample 202, that is, the fluorescent X-ray analyzer 100 may be of the top-irradiation type. Further, the present disclosure is particularly suitable for a large wavelength-dispersive fluorescent X-ray analyzer in which high-power water-cooled X-ray tubes are frequently used. However, it goes without saying that the present disclosure can also be used for an energy-dispersive fluorescent X-ray analyzer without any problems.

[0024] The X-ray tube 120 irradiates the sample 202 arranged in the spectroscopic chamber 118 with the primary X-rays generated by applying a voltage to the electron beam source 302 and irradiating the generated electron beam onto the target 304. Fig. 3 is a diagram showing an outline of the X-ray tube 120. The X-ray tube 120 includes an electron beam source 302, a target 304, an anode 306, and a pipe 310.

[0025] For example, when the X-ray tube 120 is of the hot cathode type, the electron beam source 302 is a filament, to which a negative voltage is applied by the high-voltage power supply 110 to generate an electron beam. The target 304 is arranged in contact with the anode 306, and a pipe 310 through which cooling water flows is connected to the back of the anode 306. The anode 306 is formed of a material with high thermal conductivity. When a positive voltage is applied to the anode 306 by the high-voltage power supply 110, the target 304 is irradiated with the electron beam generated from the electron beam source 302, and primary X-rays are generated. As the material of the target 304, a material that generates primary X-rays with high excitation efficiency is appropriately selected according to the energy of the absorption edge of the measurement element. The electron beam source 302 and the target 304 are arranged inside a vacuum-exhausted housing (for example, a glass tube). The housing has an opening for extracting the primary X-rays, and an X-ray window 308 covered with a film formed of a material that transmits the primary X-rays is provided at the opening. The film is formed of, for example, beryllium. Since most of the energy of the electron beam irradiated on the target 304 is converted into heat, the target 304 and the anode 306 become hot during measurement. By flowing cooling water inside the pipe 310, the target 304 and the anode 306 are cooled.

[0026] In addition, the electron beam source 302 may be disconnected due to causes such as wear. In this case, the high-voltage power supply 110 cannot flow a predetermined current (electron beam) even when a high voltage is applied between the electron beam source 302 and the anode 306. Also, when the degree of vacuum decreases due to the intrusion of air into the X-ray tube 120 or the leakage of cooling water, etc., a discharge occurs inside the X-ray tube 120 and a predetermined high voltage cannot be applied. When a normal voltage is not applied between the electron beam source 302 and the anode 306, the high-voltage power supply 110 transmits a voltage abnormality signal to the control unit 124. The voltage abnormality signal may be transmitted from the high-voltage power supply 110 to the information processing unit 108, and an instruction described later may be given from the information processing unit 108 to the control unit 124.

[0027] The vacuum gauge 122 measures the pressure in the spectroscopic chamber 118. Specifically, for example, the vacuum gauge 122 is a thermal conductivity vacuum gauge such as a Pirani gauge. The vacuum gauge 122 measures the pressure in the spectroscopic chamber 118 and transmits it to the control unit 124. The measured pressure is transmitted from the vacuum gauge 122 to the information processing unit 108, and the information processing unit 108 may give an instruction to the control unit 124 (instructions such as stopping the application of voltage to the electron beam source 302 to be described later, the water supply pump 104, the vacuum pump 106, etc.). The vacuum gauge 122 may be a vacuum gauge other than a thermal conductivity vacuum gauge as long as it can measure the pressure inside the spectroscopic chamber 118 (especially the pressure caused by water vapor). For example, the vacuum gauge 122 may be a U-shaped vacuum gauge, an elastic vacuum gauge, a McLeod vacuum gauge, a hot cathode ionization vacuum gauge, etc.

[0028] The control unit 124 controls the operations of each component included in the measurement unit 102, the vacuum pump 106, and the water supply pump 104 based on the instructions from the information processing unit 108. Also, the control unit 124 controls the operations of the vacuum pump 106, the water supply pump 104, and the leak valves 116A, B when a water leak occurs based on signals from the high-voltage power supply 110 and the vacuum gauge 122. Specifically, the control unit 124 stops the operation of the vacuum pump 106 when taking the sample 202 in and out of the preparation chamber 112, and operates the vacuum pump 106 before and during the measurement. Also, the control unit 124 operates the water supply pump 104 during the measurement and stops the operation of the water supply pump 104 when it is determined that the cooling water has leaked. Furthermore, the control unit 124 acquires the intensity of the fluorescent X-ray from a counter (not shown) and transmits the intensity of the fluorescent X-ray to the information processing unit 108.

[0029] The water supply pump 104 sends the cooling water that cools the target 304. Specifically, the water supply pump 104 has a cooling mechanism and has the function of cooling the water inside the water supply pump 104. The water supply pump 104 is connected via a pipe for connection with the pipe 310 of the X-ray tube 120 and sends the cooled water to the X-ray tube 120. The cooling water sent from the water supply pump 104 returns to the water supply pump 104 via another connecting pipe. In this way, the water supply pump 104 cools the anode 306 by circulating water between the X-ray tube 120 and the water supply pump 104 while cooling the water that serves as the refrigerant. Note that the water supply pump 104 may not have a cooling mechanism, and a separate cooling mechanism may be provided outside the water supply pump 104, or the configuration may be such that water is taken in from the outside without circulation.

[0030] The vacuum pump 106 discharges the air in the preparation chamber 112 and the spectroscopic chamber 118. Specifically, the vacuum pump 106 is a pump that evacuates the inside of the chamber, such as a dry pump or a molecular pump, and operates according to the instructions of the control unit 124. In FIG. 1, one vacuum pump 106 is connected to the preparation chamber 112 and the spectroscopic chamber 118, but a configuration in which individual vacuum pumps 106 are provided is preferable.

[0031] The information processing unit 108 communicates with the control unit 124 and controls the transmission and reception of measurement data and the operations of each component connected to the control unit 124. Specifically, for example, as shown in FIG. 4, the information processing unit 108 is a computer connected to the control unit 124 and includes an arithmetic unit 402, a storage unit 404, a display unit 406, an input / output unit 408, and an internal bus 410.

[0032] The arithmetic unit 402 is a CPU (Central Processing Unit) which is a processor and performs various arithmetic operations. For example, the arithmetic unit 402 executes various arithmetic operations related to the analysis of the sample 202 and measurement programs based on the intensity of the fluorescent X-ray acquired from the control unit 124.

[0033] The storage unit 404 is a non-transitory computer-readable information storage medium that stores a program executed by a computer used in the fluorescent X-ray analyzer 100. Specifically, for example, the storage unit 404 is a RAM (Random Access Memory) which is a memory, and a device such as an HDD (Hard Disk Drive) or an SSD (Solid State Drive) that can statically record information. The storage unit 404 stores a program for managing water leakage. The program causes the computer to execute a step of determining whether cooling water has leaked inside the spectroscopic chamber 118 based on both the pressure measured by the vacuum gauge 122 and the voltage applied to the electron beam source 302, and a step of stopping the operation of the water supply pump 104 when it is determined that cooling water has leaked inside the spectroscopic chamber 118. Details of the steps will be described later.

[0034] The display unit 406 is a so-called flat panel display such as a liquid crystal monitor, etc., and displays an image. When the control unit 124 determines that cooling water has leaked, the display unit 406 displays that there may be a leakage of cooling water in the spectroscopic chamber 118.

[0035] The input / output unit 408 is one or more interfaces for the computer to exchange information with external devices. For example, it is one or more devices for the user to input information, such as a keyboard, a mouse, a touch panel, etc. Also, the input / output unit 408 may include various ports for wired connection and a controller for wireless connection. The input / output unit 408 acquires from the control unit 124 the intensity of the fluorescent X-ray incident on the detector 208. Also, the input / output unit 408 functions as a reception unit that receives an instruction from the user to stop the operation of the water supply pump 104.

[0036] The internal bus 410 mutually connects the arithmetic unit 402, the storage unit 404, the display unit 406, and the input / output unit 408.

[0037] Based on both the pressure measured by the vacuum gauge 122 and the voltage applied to the electron beam source 302, the control unit 124 determines that cooling water has leaked inside the spectroscopic chamber 118 and stops the operation of the water supply pump 104. Specifically, for example, when the pressure measured by the vacuum gauge 122 is higher than a predetermined value and the voltage applied to the electron beam source 302 is lower than a predetermined value, the control unit 124 determines that the cooling water has leaked. Then, when the control unit 124 determines that the cooling water has leaked, it stops applying voltage to the electron beam source 302. Also, when the control unit 124 determines that the cooling water has leaked, it stops the operation of the vacuum pump 106. Further, when the control unit 124 determines that the cooling water has leaked, it introduces air into the spectroscopic chamber 118. In FIG. 1, the high-voltage power supply 110 stops the operations of the water supply pump 104 and the vacuum pump 106 via the control unit 124, but the high-voltage power supply 110 may directly give instructions to the water supply pump 104 and the vacuum pump 106 without going through the control unit 124.

[0038] The detailed functions of the control unit 124 will be described with reference to the flow of the water leakage management method shown in FIGS. 5 and 6. First, the sample 202 is placed on the sample stage 204 (S502). Specifically, with the vacuum shutter 114 closed, the user places the sample 202 in the preparation chamber 112 and seals the preparation chamber 112 airtight.

[0039] Next, the measurement is started (S504). Specifically, for example, it is assumed that the information processing unit 108 is executing a measurement program, and given information regarding the measurement is displayed on the display unit 406 by the program. The user inputs measurement conditions such as the measurement time and performs an operation to start the measurement on the input / output unit 408 such as a mouse or a keyboard. The information processing unit 108 instructs the control unit 124 to perform the measurement based on the measurement conditions.

[0040] When the control unit 124 acquires an instruction to start measurement, it controls the vacuum pump 106 to discharge the air inside the preparation chamber 112. When the pressure in the preparation chamber 112 reaches a value equal to or lower than a predetermined value, the control unit 124 opens the vacuum shutter 114 and instructs a transfer device (not shown) to transfer the sample 202 from the preparation chamber 112 onto the sample stage 204 in the spectroscopic chamber 118. The control unit 124 notifies the high-voltage power supply 110 of the start of measurement, and the high-voltage power supply 110 applies a voltage to the electron beam source 302 of the X-ray tube 120. The electron beam generated from the electron beam source 302 irradiates the target 304, and primary X-rays are generated from the target 304. The generated primary X-rays irradiate the sample 202 disposed in the spectroscopic chamber 118. Further, the control unit 124 instructs the X-ray tube 120 to irradiate primary X-rays and instructs the water supply pump 104 to send cooling water to the X-ray tube 120. The water supply pump 104 that has acquired the instruction circulates water between itself and the X-ray tube 120.

[0041] When measurement is started, a flow for determining the presence or absence of water leakage shown in FIG. 6 is executed until the measurement is completed (S508). Note that the flow shown in FIG. 6 may be repeatedly executed at regular intervals independently of the flow shown in FIG. 5, or may be executed when the control unit 124 acquires a voltage abnormality signal.

[0042] When the control unit 124 acquires a voltage abnormality signal (S602), it is determined whether the pressure in the spectroscopic chamber 118 is higher than a predetermined value (S604). When the pressure in the spectroscopic chamber 118 is higher than the predetermined value, it is determined that water leakage has occurred in the spectroscopic chamber 118 (S606). Specifically, it is determined that water leakage has occurred when the pressure in the spectroscopic chamber 118 becomes larger than a predetermined absolute value (for example, 1 Pa). Also, it may be determined that water leakage has occurred when the pressure in the spectroscopic chamber 118 exceeds a predetermined multiple (for example, 1000 times) of the pressure during normal measurement.

[0043] Note that the voltage abnormality signal from the high-voltage power supply 110 is acquired by the control unit 124 when a normal voltage is not applied between the electron beam source 302 and the anode 306. Also, the pressure measured by the vacuum gauge 122 is acquired by the control unit 124 at regular intervals. Since the information processing unit 108 and the control unit 124 can communicate with each other, the determination of whether water leakage has occurred may be made by either the information processing unit 108 or the control unit 124.

[0044] If it is determined in S508 that there is no water leakage and a predetermined time has elapsed in S506, the measurement ends. When the measurement ends, the analysis result is displayed on the display unit 406. On the other hand, if it is determined in S508 that there is water leakage, the display unit 406 displays a warning indicating that there may be a leakage of cooling water into the spectroscopic chamber 118.

[0045] In accordance with the warning displayed on the display unit 406, the user inputs to the information processing unit 108 whether to abort or continue the measurement. When the reception unit receives an instruction from the user to abort the measurement, the control unit 124 stops the operation of the water supply pump 104 (S514).

[0046] Also, the control unit 124 stops applying voltage to the electron beam source 302 (S516).

[0047] Furthermore, the control unit 124 stops the operation of the vacuum pump 106. Furthermore, the control unit 124 opens the leak valve 116B and introduces air into the spectroscopic chamber 118 (S518). At this time, the control unit 124 may also open the leak valve 116A and introduce air into the preparation chamber 112.

[0048] As described above, according to the present disclosure, whether or not a water leak has occurred is determined using both the measured value of the vacuum gauge 122 and the voltage applied by the high-voltage power supply 110. When liquid water leaks into the vacuum spectroscopic chamber 118, the water evaporates and the pressure in the spectroscopic chamber 118 increases. If only a normal voltage is not applied to the electron beam source 302, various causes other than water leakage are assumed as the abnormality that has occurred in the fluorescent X-ray analyzer 100. However, the state where a normal voltage is not applied to the electron beam source 302 and the degree of vacuum in the spectroscopic chamber 118 deteriorates is, in most cases, caused by water leakage into the spectroscopic chamber 118. Therefore, according to the present disclosure, it is possible to quickly and accurately determine whether or not a water leak has occurred without adding a sensor for detecting a water leak.

[0049] The present invention is not limited to the above-described embodiments, and various modifications are possible. The configuration of the above-described fluorescent X-ray analyzer 100 is an example and is not limited thereto. It may be replaced with a configuration that is substantially the same as the configuration shown in the above-described embodiment, a configuration that exhibits the same operational effects, or a configuration that achieves the same purpose.

[0050] For example, in FIG. 1, the function of the control unit 124 may be included in the function of the information processing unit 108. In FIG. 5, the steps of S510 and S512 may be omitted, and if a water leak is detected, the water supply pump 104 may be stopped immediately without human judgment. Further, S514, S516, and S518 may be in any order and may be interchanged.

Description of Reference Numerals

[0051] 100 Fluorescent X-ray analyzer, 102 Measuring unit, 104 Water supply pump, 106 Vacuum pump, 108 Information processing unit, 110 High-voltage power supply, 112 Preparation room, 114 Vacuum shutter, 116 Leak valve, 118 Spectroscopic chamber, 120 X-ray tube, 122 Vacuum gauge, 124 Control unit, 202 Sample, 204 Sample stage, 206 Collimator, 208 Detector, 302 Electron beam source, 304 Target, 306 Anode, 308 X-ray window, 310 Pipe, 402 Arithmetic unit, 404 Storage unit, 406 Display unit, 408 Input / output unit, 410 Internal bus.

Claims

1. A high-voltage power supply for applying a voltage to an electron beam source, An X-ray tube that irradiates a sample disposed in a spectroscopic chamber with primary X-rays generated by irradiating a target with the electron beam generated by the electron beam source, A water pump for sending cooling water for cooling the target, A vacuum pump for discharging the atmosphere in the spectroscopic chamber, A vacuum gauge for measuring the pressure in the spectroscopic chamber, A control unit that determines that the cooling water has leaked into the spectroscopic chamber based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source, and stops the operation of the water pump, A fluorescent X-ray analyzer, characterized by comprising the above.

2. The fluorescent X-ray analyzer according to claim 1, wherein the control unit determines that the cooling water has leaked when the pressure measured by the vacuum gauge is higher than a predetermined value and the voltage of the high-voltage power supply applied to the electron beam source is lower than a predetermined value.

3. The fluorescent X-ray analyzer according to claim 1 or 2, wherein the control unit stops applying a voltage to the electron beam source when it determines that the cooling water has leaked.

4. The fluorescent X-ray analyzer according to claim 1 or 2, wherein the control unit stops the operation of the vacuum pump when it determines that the cooling water has leaked.

5. The fluorescent X-ray analyzer according to claim 1 or 2, wherein the control unit introduces air into the spectroscopic chamber when it determines that the cooling water has leaked.

6. Further, it has an information processing unit including a reception unit for receiving a user's instruction and a display unit, When the control unit or the information processing unit determines that the cooling water has leaked, the display unit displays that there may be a leak of the cooling water into the spectroscopic chamber, When the reception unit receives an instruction from the user to stop the operation of the water supply pump, the control unit stops the operation of the water supply pump. The fluorescent X-ray analyzer according to claim 1 or 2, characterized in that.

7. A high-voltage power supply that applies a voltage to an electron beam source, An X-ray tube that irradiates a sample placed in a spectroscope with primary X-rays generated by irradiating a target with the electron beam generated by the electron beam source, A water supply pump that sends cooling water for cooling the target, A vacuum pump that discharges the air in the spectroscope, A vacuum gauge that measures the pressure in the spectroscope, A method for managing water leakage in a fluorescent X-ray analyzer, comprising: Based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source, determining whether the cooling water has leaked into the spectroscope; When it is determined that the cooling water has leaked into the spectroscope, stopping the operation of the water supply pump; A method for managing water leakage in a fluorescent X-ray analyzer, characterized by comprising.

8. A non-temporary computer-readable information storage medium that stores a program executed by a computer used in a fluorescent X-ray analyzer, The fluorescent X-ray analyzer includes: A high-voltage power supply that applies a voltage to an electron beam source, An X-ray tube that irradiates a sample placed in a spectroscope with primary X-rays generated by irradiating a target with the electron beam generated by the electron beam source, A water supply pump that sends cooling water for cooling the target, A vacuum pump that discharges the air in the spectroscope, A vacuum gauge that measures the pressure in the spectroscope, And has The program includes: A step of determining whether the cooling water has leaked inside the spectroscopic chamber based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source. A step of stopping the operation of the water pump when it is determined that the cooling water has leaked inside the spectroscopic chamber. An information storage medium characterized by causing the computer to execute the above steps.

9. A program executed by a computer used in a fluorescent X-ray analyzer, The fluorescent X-ray analyzer includes A high-voltage power supply that applies a voltage to an electron beam source, An X-ray tube that irradiates a sample arranged in a spectroscopic chamber with primary X-rays generated by irradiating a target with the electron beam generated by the electron beam source, A water pump that sends cooling water for cooling the target, A vacuum pump that discharges the atmosphere in the spectroscopic chamber, A vacuum gauge that measures the pressure in the spectroscopic chamber, And has Causing the computer to A step of determining whether the cooling water has leaked inside the spectroscopic chamber based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source. A step of stopping the operation of the water pump when it is determined that the cooling water has leaked inside the spectroscopic chamber. A program characterized by causing the above steps to be executed.

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