Radiation detection module and radiation detection device

Abstract

Provided are a radiation detection module in which a plurality of radiation detection elements can be brought close to a radiation source, and a radiation detection device.　The radiation detection module includes a block and a plurality of radiation detection elements mounted on the block. The block has a plurality of first surfaces for mounting the radiation detection elements thereon and a plurality of first through holes having one end open on each of the plurality of first surfaces for allowing radiation to pass therethrough. The radiation detection element has an incident surface on which radiation is incident. The radiation detection element is mounted on the first surface with the incident surface facing the first surface and closing the opening of the first through hole in the first surface.

Description

Technical Field

[0001] The present invention relates to a radiation detection module including a plurality of radiation detection elements and a radiation detection device.

Background Art

[0002] Some radiation detectors for detecting radiation such as X-rays are provided with radiation detection elements using semiconductors. The radiation detection element is plate-shaped, and a sensitive region capable of detecting radiation exists on the surface of the radiation detection element. Conventionally, in order to prevent radiation from entering other than the sensitive region, a collimator that limits the range where radiation enters has been disposed on the surface of the radiation detection element. The conventional radiation detector includes a housing, and the radiation detection element and the collimator are disposed inside the housing. The radiation detector is used, for example, in applications where radiation is irradiated onto a sample, radiation generated from the sample is detected, and the components of the sample are analyzed based on the detection result.

[0003] In order to increase the detection efficiency of radiation generated from a sample, the radiation detection element may be brought closer to the sample. However, due to the presence of the housing and the collimator, there is a lower limit to the distance at which the radiation detection element can be brought closer to the sample. Patent Document 1 discloses a radiation detector that does not include a collimator by using the housing as a collimator. In such a radiation detector, the radiation detection element can be brought closer to the sample than in a radiation detector provided with a collimator, and the detection efficiency is improved.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] As a method for increasing the detection efficiency of radiation generated from a sample, there is a method of detecting radiation from the sample using a plurality of radiation detection elements. However, since the housings provided with the plurality of radiation detectors interfere with each other, there is a lower limit to the distance at which the radiation detection elements provided with the plurality of radiation detectors can be brought close to the sample. For this reason, there is a limit to the improvement of the detection efficiency.

[0006] The present invention has been made in view of such circumstances, and an object thereof is to provide a radiation detection module and a radiation detection device capable of bringing a plurality of radiation detection elements close to a radiation source.

Means for Solving the Problems

[0007] The radiation detection module according to the present invention includes a block and a plurality of radiation detection elements mounted on the block. The block has a plurality of first surfaces for mounting the radiation detection elements respectively, and a plurality of first through-holes each having one end opened at each of the plurality of first surfaces for allowing radiation to pass through. The radiation detection element has an incident surface on which radiation is incident, and the radiation detection element is mounted on the first surface with the incident surface facing the first surface and closing the opening of the first through-hole on the first surface.

[0008] In one embodiment of the present invention, the radiation detection module includes a block and a plurality of radiation detection elements. Each radiation detection element is mounted on each of a plurality of first surfaces of the block. A plurality of first through-holes each having one end opened are formed in the block on each of the plurality of first surfaces. The radiation detection element is mounted on the first surface in a state of closing the opening of the first through-hole. Radiation passes through the first through-hole, enters the radiation detection element, and is detected. Radiation that has passed through the first through-hole enters the radiation detection element. Therefore, the block serves as a collimator that limits the range where radiation enters. Since the block serves as a collimator, a collimator and a housing are not required. Since there is no housing, there is no interference between the housings, and the plurality of radiation detection elements can approach the radiation source closer than before. Therefore, the efficiency of detecting radiation is improved.

[0009] In the radiation detection module according to the present invention, the block further has a single second surface different from the plurality of first surfaces, and the other ends of the plurality of first through-holes open to the second surface.

[0010] In one embodiment of the present invention, the block has a single second surface. The openings of the other ends of the plurality of first through-holes are formed on the second surface. By making the second surface face the radiation source, the openings of the first through-holes on the second surface face the radiation source. Radiation enters the first through-hole, passes through the first through-hole, enters the radiation detection element, and is detected.

[0011] The radiation detection module according to the present invention is characterized in that a straight line orthogonal to each of the plurality of first surfaces intersects the second surface non-perpendicularly.

[0012] In one embodiment of the present invention, a straight line orthogonal to each of a plurality of first surfaces intersects the second surface non-perpendicularly. When the second surface faces the radiation source, the normal line of the incident surface of the radiation detection element intersects the source. Also, it is possible to arrange a plurality of radiation detection elements such that the radiation source is positioned in front of each incident surface. In this state, the solid angle of the fluorescent X-rays incident on the incident surfaces of the plurality of radiation detection elements increases.

[0013] The radiation detection module according to the present invention is characterized in that the plurality of first through-holes are linear and the extension lines of the central axes of the plurality of first through-holes intersect each other at the position in front of the second surface.

[0014] In one embodiment of the present invention, the extension lines of the central axes of the plurality of first through-holes intersect each other at the position in front of the bottom surface. When a radiation source is arranged at the position where the extension lines of the central axes of the plurality of first through-holes intersect, the generated radiation passes through the plurality of first through-holes and is detected by the plurality of radiation detection elements.

[0015] In the radiation detection module according to the present invention, one end of the block is open to the second surface, and the block further has a second through-hole for allowing radiation irradiated to an external sample arranged to face the second surface to pass through. The second through-hole is linear, and the extension line of the central axis of the plurality of first through-holes and the extension line of the central axis of the second through-hole intersect at one point.

[0016] In one embodiment of the present invention, the block has a second through-hole, and the opening at one end of the second through-hole is formed on the second surface. By facing the second surface to an external sample, the primary radiation that has passed through the second through-hole can be irradiated to the sample. Also, the extension line of the central axis of the plurality of first through-holes 114 and the extension line of the central axis of the second through-hole intersect at one point. When the surface of the sample is arranged at this one-point position, secondary radiation generated from the position where the intensity of the irradiated primary radiation is high is detected by the plurality of radiation detection elements. Therefore, the intensity of the detected secondary radiation increases.

[0017] In the radiation detection module according to the present invention, the block further has a second through hole that has one end open on the second surface and allows radiation irradiated to an external sample disposed opposite to the second surface to pass through.

[0018] In one embodiment of the present invention, the block has a second through hole, and an opening at one end of the second through hole is formed on the second surface. By facing the second surface to an external sample, the primary radiation that has passed through the second through hole can be irradiated to the sample. Secondary radiation is generated from the sample by the irradiation of the primary radiation, and the secondary radiation passes through the first through hole and is detected by the radiation detection element. Due to the presence of the second through hole, in a state where the radiation detection module is close to the sample, the primary radiation can be irradiated to the sample and the secondary radiation can be detected.

[0019] In the radiation detection module according to the present invention, the openings of the plurality of first through holes on the second surface are at rotationally symmetric positions centered on the center of the second through hole on the second surface, and the lengths of the plurality of first through holes are the same.

[0020] In one embodiment of the present invention, the openings of the plurality of first through holes on the second surface are at rotationally symmetric positions centered on the center of the second through hole on the second surface, and the lengths of the plurality of first through holes are the same. As a result, when the second surface is opposed to the radiation source, the distances from the radiation source along the radiation path to the plurality of radiation detection elements become substantially equal. Therefore, the radiation can be detected almost evenly by the plurality of radiation detection elements.

[0021] In the radiation detection module according to the present invention, the plurality of first surfaces are at rotationally symmetric positions centered on the second through hole, and the surface angles between each of the plurality of first surfaces and the second surface are the same acute angle.

[0022] In one embodiment of the present invention, the surface angle between each of the plurality of first surfaces and the second surface is an acute angle. As a result, the plurality of first surfaces approach the radiation source, and the plurality of radiation detection elements can be brought closer to the radiation source. Further, the plurality of first surfaces are in rotationally symmetric positions with respect to the second through-hole, and the above-described surface angles are the same. As a result, the distances from the radiation source to the plurality of first surfaces become substantially equal, and the distances from the radiation source to the plurality of radiation detection elements become substantially equal. For this reason, it becomes easy to make the distances from the radiation source along the radiation path to the plurality of radiation detection elements equal.

[0023] In the radiation detection module according to the present invention, the block has a shape in which each of the plurality of side surfaces of the frustum of a pyramid is enlarged, the first surface is the enlarged side surface, and the second surface is the lower bottom surface of the frustum of a pyramid.

[0024] In one embodiment of the present invention, the block has a shape in which each side surface of the frustum of a pyramid is enlarged. The first surface of the block corresponds to the enlarged side surface, and the second surface corresponds to the lower bottom surface. Since the block has such a shape, the positions of the plurality of first surfaces can be set as rotationally symmetric positions, and the surface angle between each of the plurality of first surfaces and the second surface can be set as the same acute angle.

[0025] In the radiation detection module according to the present invention, the incident surface includes a sensitive region capable of detecting radiation, the size of the opening of the first through-hole in the first surface is equal to or smaller than the size of the sensitive region, and the radiation detection element is mounted on the first surface in a state where the sensitive region closes the opening.

[0026] In one embodiment of the present invention, the size of the opening of the first through-hole in the first surface is equal to or smaller than the size of the sensitive region of the incident surface of the radiation detection element. The opening of the first through-hole can be closed by the sensitive region, and the range where radiation enters is surely limited to the sensitive region.

[0027] In the radiation detection module according to the present invention, the material of the block is a ferromagnetic material, and a magnetic field generation mechanism is provided on the inner surface of the first through hole.

[0028] In one embodiment of the present invention, a magnetic field generation mechanism is provided on the inner surface of the first through hole. When electrons enter the radiation detection element through the first through hole, noise is generated. In a state where a magnetic field is generated in the first through hole by the magnetic field generation mechanism, the moving direction of the electrons moving in the first through hole is bent by the magnetic field and it is difficult to enter the radiation detection element. Therefore, the noise is reduced. Further, since the material of the block is a ferromagnetic material, the magnetic field does not leak to the outside of the block, and even if the sample is a magnetic material, the sample is not attracted to the block.

[0029] The radiation detection device according to the present invention includes an irradiation unit that irradiates a sample with radiation, a radiation detection module according to the present invention having a radiation detection element that detects radiation generated from the sample, and a spectrum generation unit that generates a spectrum of the radiation detected by the radiation detection element.

[0030] In one embodiment of the present invention, the radiation detection device includes a radiation irradiation unit and a radiation detection module. The primary radiation from the irradiation unit irradiates the sample, and the secondary radiation generated from the sample is detected by the radiation detection element included in the radiation detection module. A plurality of radiation detection elements can be brought closer to the sample than in the prior art, and the efficiency of detecting secondary radiation is improved. Therefore, the radiation detection device can improve the detection sensitivity of secondary radiation generated from the sample.

[0031] The radiation detection device according to the present invention includes an irradiation unit that irradiates a sample with radiation, a radiation detection module according to the present invention having a radiation detection element that detects radiation generated from the sample, a spectrum generation unit that generates a spectrum of the radiation detected by the radiation detection element, an analysis unit that performs an analysis on the sample based on the spectrum, and a display unit that displays the spectrum generated by the spectrum generation unit or the analysis result by the analysis unit.

[0032] In one embodiment of the present invention, the radiation detection device includes an irradiation unit, a radiation detection module, and an analysis unit. By improving the detection sensitivity of secondary radiation generated from a sample, the radiation detection device can perform analysis of the sample based on the detection result of the secondary radiation with high precision.

Effects of the Invention

[0033] In the present invention, a plurality of radiation detection elements can be brought closer to the radiation source than in the prior art. Therefore, the present invention has excellent effects such as an improvement in the efficiency of detecting radiation.

Brief Description of the Drawings

[0034]

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Mode for Carrying Out the Invention

[0035] Hereinafter, the present invention will be specifically described based on the drawings showing its embodiments. <Embodiment 1> FIG. 1 is a block diagram showing the configuration of a radiation detection device 10 according to Embodiment 1. The radiation detection device 10 is a fluorescent X-ray analyzer. The radiation detection device 10 includes a sample stage 23 on which a sample 4 is placed, an X-ray source 21 that emits X-rays, which are primary radiation for irradiating the sample 4, an X-ray optical element 22 that converges the X-rays emitted by the X-ray source 21 and irradiates the sample 4, and a radiation detection module 1 including a plurality of radiation detection elements. The X-ray source 21 is, for example, an X-ray tube. The X-ray optical element 22 is, for example, a monocapillary lens using an X-ray conduit that guides light while reflecting the incident X-rays inside, or a polycapillary lens using a plurality of X-ray conduits. The X-ray optical element 22 receives the X-rays emitted by the X-ray source 21 and converges the X-rays. The radiation detection module 1 is configured to allow the X-rays converged by the X-ray optical element 22 to pass through. Details of the radiation detection module 1 will be described later.

[0036] The X-rays that have passed through the radiation detection module 1 are irradiated onto the sample 4 placed on the sample stage 23. The X-ray source 21 and the X-ray optical element 22 correspond to the irradiation unit. In the portion of the sample 4 irradiated with X-rays, fluorescent X-rays, which are secondary radiation, are generated. The radiation detection elements included in the radiation detection module 1 detect the fluorescent X-rays generated from the sample 4 and output a signal proportional to the energy of the detected fluorescent X-rays. In FIG. 1, the X-rays and fluorescent X-rays irradiated onto the sample 4 are indicated by solid arrows. Note that the radiation detection device 10 may be configured to hold the sample 4 by a method other than the method of placing it on the sample stage 23.

[0037] A signal processing unit 31 that processes the signals output by the radiation detection elements is connected to the radiation detection module 1. The signal processing unit 31 counts the signals of each value output by the radiation detection elements, and performs a process of generating the relationship between the energy of the radiation and the count number, that is, the spectrum of the radiation. The signal processing unit 31 corresponds to the spectrum generation unit.

[0038] The signal processing unit 31 is connected to an analysis unit 33. The analysis unit 33 includes an arithmetic unit that performs arithmetic operations and a memory that stores data. The signal processing unit 31 outputs data indicating the generated spectrum to the analysis unit 33. The analysis unit 33 receives the data from the signal processing unit 31, and performs qualitative analysis or quantitative analysis of the elements contained in the sample 4 based on the spectrum indicated by the input data. For example, the analysis unit 33 may analyze the amount of impurities contained in the sample 4. A display unit 34 such as a liquid crystal display is connected to the analysis unit 33. The display unit 34 displays the analysis result by the analysis unit 33. Further, the display unit 34 displays the spectrum generated by the signal processing unit 31. Note that the radiation detection device 10 may be configured such that the signal processing unit 31 does not generate a spectrum, and the analysis unit 33 generates a spectrum. In this form, the analysis unit 33 corresponds to the spectrum generation unit.

[0039] A drive unit 35 that moves the sample stage 23 is connected to the sample stage 23. The drive unit 35 is configured using, for example, a stepping motor. The drive unit 35 moves the sample stage 23 in one dimension, two dimensions, or three dimensions. For example, the drive unit 35 moves the sample stage 23 in the horizontal plane direction. By moving the sample stage 23, the drive unit 35 moves the sample 4 and changes the position where the X-ray is irradiated on the sample 4.

[0040] The signal processing unit 31, the analysis unit 33, the drive unit 35, and the X-ray source 21 are connected to the control unit 32. The control unit 32 controls the operations of the signal processing unit 31, the analysis unit 33, the drive unit 35, and the X-ray source 21. The control unit 32 may move the sample 4 by the drive unit 35, cause the X-ray source 21 to emit X-rays, cause the signal processing unit 31 to generate a spectrum, and cause the analysis unit 33 to generate a spectrum distribution or an elemental distribution on the sample 4. The display unit 34 may display the spectrum distribution or the elemental distribution. The control unit 32 may be configured to receive an operation by a user and control each part of the radiation detection device 10 according to the received operation. Further, the control unit 32 and the analysis unit 33 may be configured by the same computer.

[0041] FIG. 2 is a schematic perspective view showing the radiation detection module 1. FIG. 3 is a schematic plan view showing the radiation detection module 1. The radiation detection module 1 includes a block 11 and a plurality of radiation detectors 12. The plurality of radiation detectors 12 are mounted on the block 11. The radiation detector 12 includes a radiation detection element.

[0042] FIG. 4 is a schematic perspective view showing block 11. FIG. 5 is a schematic plan view showing block 11. FIG. 6 is a schematic view showing the back side of block 11. FIG. 6 shows a view of block 11 shown in FIG. 4 as seen from the back side. Block 11 is made of a solid material such as metal. For example, the material of block 11 is desirably a material that has little influence on the analysis by the system peak. The system peak is a peak caused by the fluorescent X-ray generated from block 11 among the peaks included in the spectrum. For example, the material of block 11 is a light element such as aluminum. Alternatively, the material of block 11 may be a material that shields radiation, such as brass. Block 11 has a frustum of a pyramid shape. In Embodiment 1, an example in which block 11 has a frustum of a triangular pyramid shape is shown. More specifically, block 11 has a shape in which each side surface of the frustum of a pyramid with congruent side surfaces is enlarged. Each side surface is enlarged in a direction that does not intersect the virtual extension surface of the upper bottom surface and the virtual extension surface of the lower bottom surface. Further, the plurality of side surfaces have a shape enlarged while maintaining rotational symmetry with respect to the rotational symmetry axis of the frustum of a pyramid.

[0043] As shown in FIGS. 4 and 5, block 11 has a top surface 111 corresponding to the upper bottom surface of the frustum of a pyramid and a plurality of mounting surfaces (first surfaces) 113 that are surfaces where the side surfaces of the frustum of a pyramid are enlarged. The mounting surface 113 is a surface for mounting the radiation detector 12. As shown in FIG. 6, block 11 has a bottom surface (second surface) 115 corresponding to the lower bottom surface of the frustum of a pyramid. Note that the shape of block 11 may be a frustum of a pyramid whose side surfaces are not enlarged.

[0044] The radiation detection module 1 is disposed between the X-ray optical element 22 and the sample stage 23. The top surface 111 faces the tip of the X-ray optical element 22, and the bottom surface 115 faces the mounting surface of the sample stage 23. In a state where the sample 4 is placed on the sample stage 23, the bottom surface 115 faces the surface of the sample 4.

[0045] The radiation detection module 1 is formed with first through holes 114 penetrating from the bottom surface 115 to the respective mounting surfaces 113. That is, the radiation detection module 1 has a plurality of first through holes 114. The first through holes 114 are formed linearly. One end of each first through hole 114 opens to the respective mounting surface 113. The other ends of the plurality of first through holes 114 open to the bottom surface 115.

[0046] The radiation detection module 1 is formed with second through holes 112 penetrating from the top surface 111 to the bottom surface 115. The second through holes 112 are formed linearly. One end of the second through hole 112 opens to the bottom surface 115, and the other end opens to the top surface 111. In the present embodiment, an example is shown in which the opening at one end of the second through hole 112 is located at the centroid of the bottom surface 115, and the opening at the other end is located at the centroid of the top surface 111.

[0047] As shown in FIG. 6, the opening of the second through hole 112 in the bottom surface 115 and the openings of the plurality of first through holes 114 in the bottom surface 115 form a connected opening 116. The radiation detection module 1 is arranged such that the opening of the second through hole 112 in the top surface 111 faces the tip of the X-ray optical element 22, and the opening 116 faces the placement surface of the sample stage 23. When the sample 4 is placed on the sample stage 23, the opening 116 faces the surface of the sample 4. The opening of the second through hole 112 in the bottom surface 115 and the openings of the plurality of first through holes 114 in the bottom surface 115 may not be connected. Even in this form, each opening faces the surface of the sample 4. It is desirable that the openings of the plurality of first through holes 114 in the bottom surface 115 be rotationally symmetric with respect to the center of the second through hole 112 in the bottom surface 115, whether or not they are connected. Also, it is desirable that the lengths of the plurality of first through holes 114 be the same. Note that the tip of the X-ray optical element 22 may be inserted into the second through hole 112.

[0048] FIG. 7 is a schematic cross-sectional view showing the radiation detector 12. The radiation detector 12 has a substrate 121 and a radiation detection element 122. The radiation detection element 122 is plate-shaped and disposed on the substrate 121. The radiation detection element 122 is a semiconductor radiation detection element such as an SDD (Silicon Drift Detector). The radiation detection element 122 generates charges according to the energy of the incident radiation and outputs a current signal according to the generated charges. The material of the substrate 121 is, for example, synthetic resin, glass, or ceramic. The substrate 121 is provided with a circuit necessary for the operation of the radiation detection element 122. The circuit includes various components such as an amplifier that converts or amplifies the signal output by the radiation detection element 122. The circuit provided on the substrate 121 and the radiation detection element 122 are electrically connected. Also, the circuit provided on the substrate 121 and the signal processing unit 31 are electrically connected. The signal output by the radiation detection element 122 is input to the signal processing unit 31 via the circuit provided on the substrate 121.

[0049] The radiation detector 12 may be configured to include a temperature regulator that adjusts the temperature of the radiation detection element 122, and the temperature of the radiation detection element 122 is adjusted to a constant temperature such as 30°C by the temperature regulator. By keeping the temperature of the radiation detection element 122 constant, the accuracy of the radiation detection element 122 for detecting radiation is stabilized. The radiation detector 12 may be configured without a temperature regulator.

[0050] The radiation detection element 122 has an incident surface 125 on which the radiation to be detected is incident. The radiation detection element 122 is disposed on the substrate 121 such that the surface on the back side of the incident surface 125 faces the surface of the substrate 121. The incident surface 125 includes a sensitive region 123 capable of detecting radiation and an insensitive region 124 not used for detecting radiation. The sensitive region 123 occupies a region including the center of the incident surface 125. The radiation detector 12 is mounted on the block 11 such that the incident surface 125 of the radiation detection element 122 faces the mounting surface 113. Further, the radiation detector 12 is mounted on the block 11 in a state where the incident surface 125 of the radiation detection element 122 closes the opening of the first through hole 114 in the mounting surface 113. That is, the radiation detection element 122 is mounted on the mounting surface 113 such that the incident surface 125 faces the mounting surface 113 and in a state where the opening of the first through hole 114 in the mounting surface 113 is closed. For this reason, the incident surface 125 of the radiation detection element 122 faces the opening of the first through hole 114. FIGS. 2 and 3 show the radiation detector 12 mounted on the block 11, and the back surface of the substrate 121 on which the radiation detection element 122 is disposed on the surface can be seen.

[0051] FIG. 8 is a schematic cross-sectional view showing the positional relationship among the X-ray optical element 22, the block 11, the radiation detection element 122, and the sample 4 according to Embodiment 1. FIG. 8 shows a cross section of the radiation detection module 1 cut along line VIII-VIII shown in FIG. 3. As described above, the opening of the second through hole 112 in the top surface 111 faces the tip of the X-ray optical element 22, and the opening 116 faces the surface of the sample 4. For this reason, the X-rays converged by the X-ray optical element 22 pass through the second through hole 112 and are irradiated onto the sample 4. Fluorescent X-rays are radially generated from the sample 4 irradiated with the X-rays. The portion of the sample 4 irradiated with the X-rays serves as a source of the fluorescent X-rays. In FIG. 8, the X-rays and the fluorescent X-rays are indicated by solid arrows. Due to the presence of the second through hole 112, the radiation detection module 1 can irradiate the sample 4 with X-rays in a state where the radiation detection module 1 is close to the sample 4. Even when the tip of the X-ray optical element 22 is inserted into the second through hole 112, the X-rays are converged by the X-ray optical element 22, pass through the second through hole 112, and are irradiated onto the sample 4.

[0052] Since the bottom surface 115 faces the sample 4 and the opening 116 also faces the sample 4, the fluorescent X-rays generated from the sample 4 enter the first through-hole 114 from the opening 116 and pass through the first through-hole 114. Since the incident surface 125 of the radiation detection element 122 faces the opening of the first through-hole 114 on the mounting surface 113, the fluorescent X-rays are incident on the incident surface 125. The radiation detection element 122 detects the incident fluorescent X-rays and outputs a signal. In each of the plurality of radiation detection elements 122, the fluorescent X-rays that have passed through the first through-hole 114 are detected and a signal is output. The signal processing unit 31 counts the signals of each value output by the radiation detection element 122 and generates a spectrum. The analysis unit 33 performs an analysis based on the spectrum. The driving unit 35 may move the sample 4, and the analysis unit 33 may generate a spectrum distribution or an elemental distribution. For example, the analysis unit 33 may analyze the distribution of impurities contained in the sample 4. The display unit 34 displays the analysis result.

[0053] The plurality of mounting surfaces 113 are in rotationally symmetric positions about the second through-hole 112. More precisely, the plurality of mounting surfaces 113 may be in rotationally symmetric positions about the central axis of the second through-hole 112. The surface angles between each of the plurality of mounting surfaces 113 and the bottom surface 115 are the same acute angle. Note that the mounting surface 113 and the bottom surface 115 may not directly intersect. The surface angle between the virtual extension surface of each of the plurality of mounting surfaces 113 and the bottom surface 115, the surface angle between each of the plurality of mounting surfaces 113 and the virtual extension surface of the bottom surface 115, or the surface angle between the virtual extension surfaces of each of the plurality of mounting surfaces 113 and the virtual extension surface of the bottom surface 115 may be the same acute angle.

[0054] The mounting surface 113 and the bottom surface 115 are arranged such that a straight line orthogonal to each of the plurality of mounting surfaces 113 intersects the bottom surface 115 non-perpendicularly. Also, the plurality of mounting surfaces 113 are non-parallel to each other. When the bottom surface 115 faces the sample 4, the normal line of the incident surface 125 of the radiation detection element 122 intersects the surface of the sample 4, and the sample 4 is positioned in front of the incident surface 125. In this state, the solid angle of the fluorescent X-rays generated from the sample 4 and incident on the incident surface 125 is larger than when the normal line of the incident surface 125 does not intersect the surface of the sample 4. Therefore, the efficiency of detecting the fluorescent X-rays from the sample 4 by the radiation detection element 122 is increased. Also, since the plurality of mounting surfaces 113 are positioned around the straight line orthogonal to the bottom surface 115 such that the straight line orthogonal to each of the plurality of mounting surfaces 113 intersects the bottom surface 115 non-perpendicularly, the plurality of radiation detection elements 122 are arranged such that the sample 4 is positioned in front of each incident surface 125. The solid angle of the fluorescent X-rays generated from the sample 4 and incident on the incident surfaces 125 of the plurality of radiation detection elements 122 is increased, and the efficiency of detecting the fluorescent X-rays from the sample 4 is increased.

[0055] The bottom surface 115 and the first through holes 114 are preferably configured such that the extension lines of the central axes of the plurality of first through holes 114 intersect each other at a position in front of the bottom surface 115. It is more preferable that the extension lines of the central axes of the plurality of first through holes 114 all intersect at one point. The position where the extension lines of the central axes of the plurality of first through holes 114 intersect is close to the bottom surface 115 and is a position spaced apart from the bottom surface 115 in the front direction of the bottom surface 115. When the surface of the sample 4 is arranged at the position where the extension lines of the central axes of the plurality of first through holes 114 intersect, the fluorescent X-rays generated from the same portion of the sample 4 pass through the plurality of first through holes 114 and are detected by the plurality of radiation detection elements 122. Therefore, the efficiency of detecting the fluorescent X-rays from the sample 4 by the radiation detection element 122 is further increased.

[0056] More preferably, the bottom surface 115, the first through hole 114, and the second through hole 112 are configured such that the extension line of the central axis of the plurality of first through holes 114 and the extension line of the central axis of the second through hole 112 intersect at a single point. The position where the extension line of the central axis of the plurality of first through holes 114 and the extension line of the central axis of the second through hole 112 intersect at a single point is close to the bottom surface 115 and is a position separated from the bottom surface 115 in the front direction of the bottom surface 115. The intensity of the X-ray irradiated onto the sample 4 is maximized on the central axis of the second through hole 112. When the surface of the sample 4 is disposed at the position where the extension line of the central axis of the plurality of first through holes 114 and the extension line of the central axis of the second through hole 112 intersect at a single point, the fluorescent X-rays generated from the position where the intensity of the irradiated X-ray is high are detected by the plurality of radiation detection elements 122. The intensity of the detected fluorescent X-ray increases according to the intensity of the irradiated X-ray. Therefore, the fluorescent X-rays generated from the sample 4 can be efficiently detected.

[0057] The fluorescent X-rays that have passed through the first through hole 114 enter the incident surface 125 of the radiation detection element 122. For this reason, the block 11 serves as a collimator that limits the range where the fluorescent X-rays enter within the incident surface 125 to the sensitive region 123. The size of the opening of the first through hole 114 on the mounting surface 113 is preferably equal to or smaller than the size of the sensitive region 123, and it is desirable that the radiation detection element 122 is mounted on the mounting surface 113 with the sensitive region 123 covering the opening. For example, the shape and size of the opening of the first through hole 114 may be the same as the shape and size of a region within the sensitive region 123 where the X-ray detection sensitivity is relatively high. In this state, the range where the fluorescent X-rays enter is reliably limited to the sensitive region 123.

[0058] At the edge of the opening of the first through hole 114 on the mounting surface 113, a shielding portion made of a material having a higher performance of shielding radiation such as X-rays than the material of the block 11 may be provided. For example, the material of the block 11 is aluminum, and the shielding portion is made of brass. For example, the shielding portion is provided annularly at the edge of the opening of the first through hole 114 on the mounting surface 113. By the shielding portion, the spread of the fluorescent X-ray beyond the opening of the first through hole 114 is effectively suppressed, and the performance of the block 11 as a collimator is further improved. Alternatively, a shielding portion may be provided on the inner surface of the first through hole 114. The shielding portion is provided from the opening on the mounting surface 113 to the inside of the block 11. Also in this form, the spread of the fluorescent X-ray is effectively suppressed by the shielding portion, and the performance of the block 11 as a collimator is further improved. The shielding portion suppresses the incidence of X-rays on the block 11, and also shields the fluorescent X-rays generated from the block 11 to a certain extent, so that the system peak caused by the fluorescent X-rays generated from the block 11 is reduced.

[0059] A coating made of a material having a higher performance of shielding radiation than the material of the block 11 may be provided on the inner surface of the first through hole 114. For example, the material of the block 11 is aluminum, and the inner surface of the first through hole 114 is coated with brass. The coating shields the radiation more effectively, and the performance of the block 11 as a collimator is further improved.

[0060] On the first coating provided on the inner surface of the first through hole 114, a second coating may be provided to shield secondary radiation generated from the first coating. On the second coating, a third coating may be provided to shield secondary radiation generated from the second coating. In order to reduce the intensity of the generated secondary radiation, it is desirable that the material of the second coating is a material with a smaller atomic number than the material of the first coating, and it is desirable that the material of the third coating is a material with a smaller atomic number than the material of the second coating. For example, the material of the second coating is aluminum, and the material of the third coating is a fluororesin. Radiation is more effectively shielded, the performance of the block 11 as a collimator is further improved, and the system peak is reduced.

[0061] Since the block 11 serves as a collimator, the radiation detector 12 does not require a collimator and a housing. Since the plurality of radiation detectors 12 do not have a housing, the housings do not interfere with each other, and the housing does not interfere with the sample 4 either. Therefore, compared with the prior art, the plurality of radiation detection elements 122 included in the plurality of radiation detectors 12 can be brought closer to the sample 4 which is the source of the fluorescent X-ray. By bringing the plurality of radiation detection elements 122 closer to the sample 4, the efficiency of detecting the fluorescent X-ray generated from the sample 4 is improved. Therefore, the radiation detection device 10 can improve the detection sensitivity of the fluorescent X-ray generated from the sample 4. By improving the detection sensitivity of the fluorescent X-ray, the radiation detection device 10 can perform the analysis of the sample 4 based on the fluorescent X-ray with high precision.

[0062] The openings of the plurality of first through-holes 114 on the bottom surface 115 are located at positions that are rotationally symmetric to each other about the center of the second through-hole 112 on the bottom surface 115, and the lengths of the plurality of first through-holes 114 are the same. As a result, when the opening 116 faces the sample 4, the distances from the sample 4 along the path of the fluorescent X-ray to the plurality of radiation detection elements 122 are substantially equal. Therefore, the fluorescent X-ray can be detected almost evenly by the plurality of radiation detection elements 122. There is no need to correct the intensity of the fluorescent X-ray detected by the plurality of radiation detection elements 122 according to the distance, and the intensity of the fluorescent X-ray can be calculated by a simple calculation.

[0063] Since the surface angles between each of the plurality of mounting surfaces 113 and the bottom surface 115 are acute angles, the plurality of mounting surfaces 113 approach the sample 4, and the plurality of radiation detection elements 122 can be brought closer to the sample 4. The plurality of mounting surfaces 113 are located at positions that are rotationally symmetric to each other about the second through-hole 112, and due to the above-mentioned surface angles being the same, the distances from the sample 4 to the plurality of mounting surfaces 113 are substantially equal, and the distances from the sample 4 to the plurality of radiation detection elements 122 are substantially equal. Therefore, it becomes easy to make the distances from the sample 4 along the path of the fluorescent X-ray to the plurality of radiation detection elements 122 equal.

[0064] In addition, in this embodiment, the form in which the radiation detection device 10 includes the drive unit 35 is shown, but the radiation detection device 10 may be in a form that does not include the drive unit 35. In this form, the radiation detection device 10 irradiates a point on the sample 4 with X-rays and detects the fluorescent X-rays generated from the point.

[0065] <Embodiment 2> In Embodiment 2, a form is shown in which the first through-hole 114 extends toward the radiation detection element 122. FIG. 9 is a schematic cross-sectional view showing an example of the block 11 and the radiation detector 12 according to Embodiment 2. The configuration of the portion other than the block 11 of the radiation detection device 10 is the same as that of Embodiment 1. The inner diameter of the first through-hole 114 gradually expands from the bottom surface 115 toward the mounting surface 113, and is larger closer to the mounting surface 113. For example, the inner surface of the first through-hole 114 forms a frustum of a cone. The opening of the first through-hole 114 on the mounting surface 113 is larger than that in Embodiment 1. Since the opening of the first through-hole 114 is large, when a radiation detection element 122 having a wider sensitive region 123 than that in Embodiment 1 is mounted on the mounting surface 113, the radiation detection element 122 can detect radiation over a wider area.

[0066] When the inner diameter of the first through-hole 114 is widened overall, the area where the block 11 does not shield radiation expands, and the performance of the block 11 as a collimator deteriorates. In Embodiment 2, since the inner diameter of the first through-hole 114 is small in the region near the bottom surface 115 and increases as it approaches the radiation detection element 122, the expansion of the area where the block 11 does not shield radiation can be suppressed. Therefore, while suppressing the deterioration of the performance of the block 11 as a collimator, the radiation detection element 122 can detect radiation over a wide area. By detecting radiation over a wide area by the radiation detection element 122, the detection sensitivity of radiation is improved. Therefore, the radiation detection device 10 can further improve the detection sensitivity of the fluorescent X-ray generated from the sample 4.

[0067] Also, in Embodiment 2, a radiation detection element 122 having a wide sensitive region 123 can be used without increasing the size of the block 11 compared to Embodiment 1. Therefore, the distance between the sample 4 and the radiation detection element 122 does not increase compared to Embodiment 1, and the detection sensitivity of the fluorescent X-ray does not decrease due to the increase in the distance. Therefore, the detection sensitivity of the fluorescent X-ray generated from the sample 4 is further improved, and the radiation detection device 10 can perform the analysis of the sample 4 based on the fluorescent X-ray with higher accuracy.

[0068] <Embodiment 3> Embodiment 3 shows a form in which there is a separation between the mounting surface 113 and the radiation detection element 122. An electrical signal flows through the incident surface 125 of the radiation detection element 122. When the material of the block 11 is a conductor such as metal, a current can flow through the block 11. For this reason, when the block 11 and the incident surface 125 are in contact, a current flows between the block 11 and the radiation detection element 122, and noise is generated in the signal output by the radiation detection element 122.

[0069] FIG. 10 is a schematic cross-sectional view showing a first example of the block 11 and the radiation detector 12 according to Embodiment 3. The configuration of portions other than the block 11 and the radiation detector 12 of the radiation detection device 10 is the same as that in Embodiment 1 or 2. A gap 126 is provided between the incident surface 125 of the radiation detection element 122 and the mounting surface 113. The radiation detector 12 passes through the substrate 121 and is fixed to the block 11 by screws 127 inserted into the block 11 from the mounting surface 113. The screws 127 fix the radiation detector 12 to the block 11 while maintaining the gap 126. Due to the presence of the gap 126, the incident surface 125 is not in contact with the block 11. For this reason, no current flows between the block 11 and the radiation detection element 122, and no noise is generated in the signal output by the radiation detection element 122.

[0070] FIG. 11 is a schematic cross-sectional view showing a second example of the block 11 and the radiation detector 12 according to Embodiment 3. The configuration of the portions other than the block 11 and the radiation detector 12 of the radiation detection device 10 is the same as that in Embodiment 1 or 2. An insulating layer 128 made of an insulator is provided between the incident surface 125 of the radiation detection element 122 and the mounting surface 113. The radiation detector 12 is fixed to the block 11 by screws 127. The radiation detector 12 may be fixed to the block 11 without the screws 127. For example, the insulating layer 128 may be adhered to the mounting surface 113, and the radiation detection element 122 may be adhered to the insulating layer 128. Since the insulating layer 128 exists between the incident surface 125 and the mounting surface 113, no current flows between the block 11 and the radiation detection element 122, and no noise is generated in the signal output by the radiation detection element 122.

[0071] Also in Embodiment 3, since the block 11 serves as a collimator, the detection sensitivity of the fluorescent X-rays generated from the sample 4 is improved. In Embodiment 3, since the generation of noise caused by the current flowing between the block 11 and the radiation detection element 122 can be prevented, the detection sensitivity of radiation is further improved. Therefore, the radiation detection device 10 can analyze the sample 4 based on the fluorescent X-rays with higher accuracy.

[0072] <Embodiment 4> FIG. 12 is a schematic cross-sectional view showing the block 11, the radiation detector 12, and the sample 4 according to Embodiment 4. The arrow in the figure indicates the fluorescent X-ray generated from the sample 4. The configuration of the portion other than the block 11 of the radiation detection device 10 is the same as that of Embodiments 1 to 3. In Embodiment 4, an electron trap 117 (magnetic field generation mechanism) is provided on the inner surface of the first through hole 114. The electron trap 117 is configured by arranging a plurality of permanent magnets on the inner surface of the first through hole 114 so as to face each other. The permanent magnet is attached to the inner surface of the first through hole 114 or embedded in the block 11 in a state where a magnetic field is generated in the first through hole 114. By the permanent magnet, the electron trap 117 generates a magnetic field in the first through hole 114. The electron trap 117 corresponds to the magnetic field generation mechanism.

[0073] As secondary radiation generated from the sample 4, electrons may be generated in addition to fluorescent X-rays. When the generated electrons enter the radiation detection element 122, noise is generated in the signal output from the radiation detection element 122. In a state where the electron trap 117 generates a magnetic field in the first through hole 114, the moving direction of the electrons moving in the first through hole 114 is bent by the magnetic field. For this reason, the moving direction of the electrons generated from the sample 4 is bent on the way to the radiation detection element 122, and it is difficult for the electrons to enter the radiation detection element 122. The electrons incident on the radiation detection element 122 are reduced, and the noise generated in the signal output from the radiation detection element 122 is reduced.

[0074] In Embodiment 4, the material of the block 11 is a ferromagnetic material such as iron or nickel. When the material of the block 11 is not a ferromagnetic material, the magnetic field generated by the electron trap 117 leaks to the outside of the block 11. When the sample 4 is a magnetic material, the sample 4 is attracted to the block 11 by the magnetic field. In Embodiment 4, since the material of the block 11 is a ferromagnetic material, the magnetic field generated by the electron trap 117 is blocked by the block 11 and does not leak to the outside of the block 11. For this reason, the sample 4 is not attracted to the block 11, and a magnetic material can be used as the sample 4. Therefore, the sample 4 is not restricted.

[0075] The electron trap 117 may be configured to generate a magnetic field by a method other than using a permanent magnet. For example, the electron trap 117 may be configured using an electromagnet. Also in Embodiment 4, since the block 11 serves as a collimator, the detection sensitivity of the fluorescent X-rays generated from the sample 4 is improved. In Embodiment 4, noise caused by electrons entering the radiation detection element 122 is reduced, so the detection sensitivity of radiation is further improved. Therefore, the radiation detection device 10 can analyze the sample 4 based on the fluorescent X-rays with higher accuracy.

[0076] <Embodiment 5> FIG. 13 is a block diagram showing the configuration of the radiation detection device 10 according to Embodiment 5. In Embodiment 5, the radiation detection device 10 does not include the sample stage 23 and the drive unit 35. The sample 4 is a long sheet and is moved by a roller 41 in the direction indicated by the white arrow. The radiation detection module 1 is arranged such that the opening 116 faces the surface of the sample 4. The configurations of the other parts of the radiation detection device 10 are the same as those in Embodiments 1 to 4. It is desirable that the extension lines of the central axes of the plurality of first through holes 114 intersect with each other on the surface of the sample 4. More desirably, the extension line of the central axis of the plurality of first through holes 114 and the extension line of the central axis of the second through hole 112 intersect at a point on the surface of the sample 4.

[0077] Sample 4 moves continuously, and the X-rays from the X-ray source 21 are irradiated onto the sample 4 via the X-ray optical element 22 and the radiation detection module 1. As the sample 4 moves, the X-rays are sequentially irradiated onto a plurality of portions on the sample 4, and fluorescent X-rays are sequentially generated from each portion. The plurality of radiation detection elements 122 included in the radiation detection module 1 sequentially detect the fluorescent X-rays generated from the sample 4, and the analysis unit 33 performs sequential analysis. In FIG. 13, the X-rays and the fluorescent X-rays are indicated by solid arrows. For example, based on the intensity of the fluorescent X-rays detected by the radiation detection element 122, the analysis unit 33 analyzes the amount of impurities contained in the sample 4. For example, by utilizing the fact that the intensity of the fluorescent X-rays of the base material of the sample 4 changes depending on the thickness of the sample 4, the analysis unit 33 analyzes the thickness of the sample 4 from the intensity of the detected fluorescent X-rays.

[0078] Also in Embodiment 5, in the radiation detection device 10, it is possible to bring the plurality of radiation detection elements 122 closer to the sample 4 than in the past, and the efficiency of detecting the fluorescent X-rays generated from the sample 4 is improved. For this reason, the radiation detection device 10 has high detection sensitivity for the fluorescent X-rays generated from the sample 4, and the time required to detect the fluorescent X-rays is short. For example, the sample 4 is an industrial product, and the amount of impurities or the thickness of the sample 4 can be measured using the radiation detection device 10, and the abnormality of the sample 4 can be determined according to the amount of impurities or the thickness of the sample 4. Since the time required for the radiation detection device 10 to detect the fluorescent X-rays generated from the sample 4 is short, the time required to determine the abnormality of the sample 4 is also short. For this reason, the moving time of the sample 4 when determining the abnormality of the sample 4 can be increased. Therefore, by using the radiation detection device 10 according to Embodiment 5, it is possible to efficiently perform the production and inspection of the sample 4 in terms of time.

[0079] In the above-described Embodiments 1 to 5, the form in which the radiation detection device 10 includes the X-ray optical element 22 has been shown. However, the radiation detection device 10 may be in a form that does not include the X-ray optical element 22. In this form, the block 11 serves as a collimator that limits the range in which the sample 4 is irradiated with X-rays. In Embodiments 1 to 5, the form in which the radiation detection module 1 includes three radiation detection elements 122 has been shown. However, the block 11 may have two or four or more mounting surfaces 113, and the radiation detection device 10 may be in a form that includes two or four or more radiation detection elements 122. In Embodiments 1 to 5, the form in which the block 11 has a frustum-of-a-pyramid shape has been shown. However, the block 11 may be in a form that has other shapes. The shape of the mounting surface 113 may be a shape other than a rectangle, such as a square or a circle. The shape of the substrate 121 or the radiation detection element 122 may also be a shape other than a rectangle, such as a square or a circle. The shape of the block 11 may be a shape other than a frustum-of-a-pyramid shape as long as the plurality of mounting surfaces 113 are in rotationally symmetric positions centered on the second through-hole 112 and the face angle between each mounting surface 113 and the bottom surface 115 is an acute angle.

[0080] In Embodiments 1 to 5, the form in which the primary radiation is X-rays has been shown. However, the radiation detection device 10 may be in a form that uses radiation other than X-rays as the primary radiation. In this form, the radiation detection device 10 includes a radiation source other than the X-ray source 21. For example, the radiation detection device 10 may be in a form that uses a particle beam such as an electron beam as the primary radiation and detects secondary radiation generated from the sample 4 by irradiation with the primary radiation or radiation reflected from the surface of the sample 4.

[0081] The radiation detection device 10 may have a form other than the form in which the opening at one end of the second through hole 112 is located at the center of gravity of the bottom surface 115 and the opening at the other end is located at the center of gravity of the top surface 111. The opening at one end of the second through hole 112 may be located at a position other than the center of gravity in the bottom surface 115, and the opening at one end of the second through hole 112 may be located at a position other than the center of gravity of the top surface 111. The radiation detection device 10 may have a form in which the radiation detection module 1 has a plurality of second through holes 112. Alternatively, the radiation detection module 1 may have a form in which it does not have the second through hole 112. For example, the radiation detection device 10 may irradiate the sample 4 with primary radiation such as X-rays from the back side of the sample 4, and detect secondary radiation generated from the sample 4 or radiation transmitted through the sample 4 due to the irradiation of the primary radiation.

[0082] The radiation detection device 10 may have a form in which it does not include a radiation source such as an X-ray source 21, an analysis unit 33, or a display unit 34. In a form in which the analysis unit 33 is not provided, the radiation detection device 10 outputs data corresponding to the detection of radiation to the outside, and analysis based on the data is performed outside. In a form in which the radiation source is not provided, the radiation detection device 10 detects radiation generated outside. Also in this form, it is possible to bring the plurality of radiation detection elements 122 closer to the radiation generation source than in the past, and the efficiency of detecting radiation is improved.

[0083] The present invention is not limited to the contents of the above-described embodiments, and various modifications are possible within the scope shown in the claims. That is, embodiments obtained by combining technical means appropriately modified within the scope shown in the claims are also included in the technical scope of the present invention.

Explanation of Reference Numerals

[0084] 1 Radiation detection module 10 Radiation detection device 11 Block 111 Top surface 112 Second through hole 113 Mounting surface (first surface) 114 First through hole 115 Bottom surface (second surface) 116 Opening 117 Electron trap (magnetic field generation mechanism) 12 Radiation detector 121 Substrate 122 Radiation detection element 123 Sensitive region 124 Insensitive region 125 Incident surface 21 X-ray source 22 X-ray optical element 23 Sample stage 4 Sample

Claims

1. A block, and a plurality of radiation detection elements mounted on the block, wherein the block has a plurality of first surfaces for mounting the radiation detection elements respectively, and a plurality of first through holes, each having one end open on each of the plurality of first surfaces for allowing radiation to pass through, the radiation detection element has an incident surface on which radiation is incident, the radiation detection element is mounted on the first surface with the incident surface facing the first surface and closing the opening of the first through hole on the first surface, the block further has a single second surface different from the plurality of first surfaces, the other ends of the plurality of first through holes are open on the second surface characterizing the radiation detection module.

2. A straight line perpendicular to each of the plurality of first surfaces intersects the second surface non-perpendicularly characterizing the radiation detection module according to Claim 1.

3. the plurality of first through holes are linear, the extension lines of the central axes of the plurality of first through holes intersect with each other at the position of the front of the second surface characterizing the radiation detection module according to Claim 1 or 2.

4. the block further has a second through hole having one end open on the second surface for allowing radiation to irradiate an external sample disposed opposite to the second surface to pass through, the second through hole is linear, the extension line of the central axis of the plurality of first through holes and the extension line of the central axis of the second through hole intersect at one point characterizing the radiation detection module according to Claim 3.

5. the block further has a second through hole having one end open on the second surface for allowing radiation to irradiate an external sample disposed opposite to the second surface to pass through characterizing the radiation detection module according to any one of Claims 1 to 3.

6. the openings of the plurality of first through holes on the second surface are at rotationally symmetric positions centered on the center of the second through hole on the second surface, the lengths of the plurality of first through holes are the same characterizing the radiation detection module according to Claim 4 or 5.

7. the plurality of first surfaces are at rotationally symmetric positions centered on the second through hole, the surface angles between each of the plurality of first surfaces and the second surface are the same acute angle characterizing the radiation detection module according to any one of Claims 4 to 6.

8. The block has a shape obtained by expanding each of a plurality of side surfaces of a truncated pyramid. The first surface is the expanded side surface. The second surface is the lower bottom surface of the truncated pyramid. The radiation detection module according to claim 7, characterized in that.

9. The incident surface includes a sensitive region capable of detecting radiation. The size of the opening of the first through hole on the first surface is equal to or less than the size of the sensitive region. The radiation detection element is mounted on the first surface in a state where the sensitive region closes the opening. The radiation detection module according to any one of claims 1 to 8, characterized in that.

10. The material of the block is a ferromagnetic material. A magnetic field generation mechanism is provided on the inner surface of the first through hole. The radiation detection module according to any one of claims 1 to 9, characterized in that.

11. An irradiation unit that irradiates a sample with radiation, The radiation detection module according to any one of claims 1 to 10, having a radiation detection element that detects radiation generated from the sample, And a spectrum generation unit that generates a spectrum of the radiation detected by the radiation detection element. A radiation detection apparatus, characterized in that it comprises.

12. An irradiation unit that irradiates a sample with radiation, The radiation detection module according to any one of claims 1 to 10, having a radiation detection element that detects radiation generated from the sample, A spectrum generation unit that generates a spectrum of the radiation detected by the radiation detection element, An analysis unit that analyzes the sample based on the spectrum, And a display unit that displays the spectrum generated by the spectrum generation unit or the analysis result by the analysis unit. A radiation detection apparatus, characterized in that it comprises.

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