Article conveying equipment

Abstract

To provide an article conveyance facility that is low cost which can efficiently convey an article.SOLUTION: An article conveyance facility is provided with: a conveying vehicle 2 that runs along a predetermined running path 1 to convey an article; an unmanned aircraft 3 that flies through an arbitrary route to convey an article; a delivering part 5, provided to correspond to a processing device 4 that performs processing to the article, which delivers the article processed by the processing device 4; and a storage part 6, arranged at a position along the running path 1, which stores an article. The conveying vehicle 2 carries-in an article to the storage part 6 and carries-out an article from the storage part 6, and the unmanned aircraft 3 conveys an article between the storage part 6 and the delivering part 5.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to an article conveying facility including a carrier that travels along a predetermined travel route to convey an article, a delivery unit that is provided corresponding to a processing device that performs processing on the article and where delivery of the article to be processed by the processing device is performed, and a storage unit that is arranged at a position along the travel route and stores the article.

Background Art

[0002] Hereinafter, the background art will be described. In the following description, the signs or names in parentheses are the signs or names in the prior art documents. The article conveying facility described in Patent Document 1 (Japanese Unexamined Patent Application Publication No. 2019-94201) includes a carrier (1) that travels along a predetermined travel route (conveying route 99) to convey an article that is an object to be processed such as a semiconductor substrate. Each processing device (91) is provided along the travel route (99) of the carrier (1). The carrier (1) carries an article into the processing device (91) and carries an article out from the processing device (91). The processing device (91) performs various processes on an object to be processed such as a semiconductor substrate. And by performing the processes on the object to be processed in a plurality of processing devices in order, a product is finally obtained.

[0003] In addition, the article conveying facility described in Patent Document 1 is also provided with a storage (92) and a temporary storage (93) for storing articles. The storage (92) and the temporary storage (93) are arranged at positions along the travel route (99) of the carrier (1), and the carrier (1) also performs delivery of articles between the storage (92) and the temporary storage (93).

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] In a conventional article conveying facility as described in Patent Document 1, in addition to providing a processing device (91) at a position along the traveling route (99) of the carrier vehicle (1), it is necessary to provide storage parts such as a storage (92) and a temporary storage (93). And, in order to increase the area where the processing device (91) and the storage parts (92, 93) etc. can be installed, that is, the area along the traveling route (99), for example, it is necessary to lengthen the traveling route (99) of the carrier vehicle (1), etc., and there is a problem that the cost of the facility increases.

[0006] Also, in a conventional article conveying facility as described in Patent Document 1, the carrier vehicle (1) is responsible for the transfer of articles between the processing device (91), the transfer of articles between the storage parts (92, 93), and the conveyance of articles between the processing device (91) and the storage parts (92, 93), etc. That is, many roles are required of the carrier vehicle (1). Therefore, a lot of waiting time may occur from when the processing device (91) can immediately start processing the article until the article is carried into the processing device (91) by the carrier vehicle (1), or a lot of waiting time may occur from when the processing of the article is completed in the processing device (91) until the article is carried out of the processing device (91) by the carrier vehicle (1).

[0007] In view of the above actual situation, it is desired to realize an article conveying facility with low equipment cost and capable of efficiently conveying articles.

Means for Solving the Problems

[0008] In view of the above, the characteristic configuration of the article conveying facility is A carrier vehicle that travels along a predetermined traveling route to convey articles, A drone that flies along an arbitrary route to convey the articles, A delivery part provided corresponding to a processing device that performs processing on the articles, and where the articles that are the processing targets of the processing device are delivered, A storage part that is arranged at a position along the traveling route and stores the articles comprises, the transport vehicle carries the article into the storage unit and out of the storage unit, the unmanned aircraft transports the article between the storage unit and the delivery unit.

[0009] According to this characteristic configuration, even if the processing device and the corresponding delivery unit are arranged at positions away from the travel route of the transport vehicle, the unmanned aircraft can transport the article between the storage unit and the delivery unit. That is, the processing device and the corresponding delivery unit provided therewith do not have to be provided in the area along the travel route of the transport vehicle. As a result, the installation cost of the travel route of the transport vehicle is reduced. In addition, when an article is needed in the processing device or when the processing of the article in the processing device is completed, the article can be quickly transported by the unmanned aircraft without waiting for the arrival of the transport vehicle. Therefore, it is easy to increase the transport efficiency of the article between the storage unit and the delivery unit, and thus it is easy to increase the processing efficiency of the article by the processing device. Therefore, an article transport facility with low equipment cost and capable of efficiently transporting articles is realized.

[0010] Further features and advantages of the technology according to the present disclosure will become clearer from the following description of exemplary and non-limiting embodiments described with reference to the drawings.

Brief Description of the Drawings

[0011]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Embodiments for Carrying Out the Invention

[0012] 1. Embodiment The article conveying facility according to this embodiment will be described with reference to the drawings. In the drawings, three directions orthogonal to each other, namely, the path extending direction X, the path width direction Y, and the vertical direction Z are described. The path extending direction X is the direction along the traveling path 1 (in FIGS. 4 and 5, the direction along the straight portion of the traveling path 1), one side of the path extending direction X is described as the path extending direction first side X1, and the opposite side is described as the path extending direction second side X2. The path width direction Y is the direction orthogonal to the path extending direction X in the vertical view (here, the horizontal direction orthogonal to the path extending direction X), one side of the path width direction Y is described as the path width direction first side Y1, and the opposite side is described as the path width direction second side Y2. For the vertical direction Z, the lower side Z1 and the upper side Z2 are also described.

[0013] The article conveying facility includes a transport vehicle 2 that travels along a predetermined traveling path 1 to convey an article 12, a delivery unit 5 provided corresponding to a processing device 4 that performs processing on the article 12, and at which delivery of the article 12 that has become the processing target of the processing device 4 is performed, and a storage unit 6 that is arranged at a position along the traveling path 1 and stores the article 12. The transport vehicle 2 carries the article 12 into the storage unit 6 and out of the storage unit 6. Further, the transport vehicle 2 may perform delivery of the article 12 with the delivery unit 5. In addition, the article conveying facility includes a drone 3 that flies along an arbitrary path to convey the article 12. The drone 3 conveys the article 12 between the storage unit 6 and the delivery unit 5.

[0014] In the illustrated example, the article conveying facility includes a plurality of drones 3, a plurality of delivery units 5, and a plurality of storage units 6. Note that the number of each of the transport vehicle 2, drone 3, processing device 4, delivery unit 5, and storage unit 6 included in the article conveying facility can be set as appropriate.

[0015] As shown in FIG. 2, the article conveying facility includes a control device 8 and a storage device 9 that stores information handled by the article conveying facility. The control device 8 controls the plurality of drones 3 and the plurality of transport vehicles 2.

[0016] 〔Processing Device〕 The processing device 4 is a semiconductor processing device for performing various processes such as exposure processing and etching processing. In that case, in the article conveyance facility, a container that houses a wafer used as a material for a semiconductor substrate, a reticle used for the exposure processing of the wafer in the manufacturing process of the semiconductor substrate, etc. is conveyed as the article 12. For example, the reticle is conveyed in a state of being housed in a dedicated container called a reticle pod. Also, the wafer is conveyed in a state of being housed in a dedicated container called a so-called FOUP (Front Opening Unified Pod). The processing device 4 is provided with a delivery unit 5, and the conveyed article 12 is carried into and out of the processing device 4 via the delivery unit 5. Alternatively, the object to be housed (such as a wafer or a reticle) is taken out from the article 12 placed in the delivery unit 5 and carried into the processing device 4, and the object to be housed carried out from the processing device 4 is housed in the article 12 placed in the delivery unit 5. The operation of the transport vehicle 2 when delivering the article 12 to and from the delivery unit 5 is the same as the operation of the transport vehicle 2 when delivering the article 12 to and from the storage unit 6 as described later.

[0017] 〔Transport Vehicle〕 The transport vehicle 2 can transport the article 12 between a plurality of storage units 6. The number of transport vehicles 2 provided in the article conveyance facility can be appropriately changed, such as one or a plurality. The transport vehicle 2 described in this embodiment is a so-called ceiling transport vehicle that travels along a travel path 1 such as a rail installed on the ceiling side of the space.

[0018] As shown in FIG. 3, the transport vehicle 2 includes a travel unit 20, a vehicle body main body unit 24, and a connecting unit 23 that connects these travel unit 20 and vehicle body main body unit 24. The travel unit 20 is disposed on the upper side Z2 of the travel path 1. The vehicle body main body unit 24 is connected to the travel unit 20 by the connecting unit 23 and is disposed on the lower side Z1 of the travel path 1. In addition, the transport vehicle 2 includes a cover unit 28 that covers the article 12 held by the holding unit 25.

[0019] The running gear 20 has a plurality of running wheels 21 that roll on the running path 1. At least one of the plurality of running wheels 21 is driven by a running motor 22 to roll on the running path 1.

[0020] The vehicle body main body 24 of the transport vehicle 2 has a holding part 25 that holds the article 12 in a suspended posture, and a lifting device 27 that raises and lowers the holding part 25.

[0021] The holding part 25 is configured to hold the article 12 by gripping the gripped part of the article 12. The holding part 25 has a pair of gripping claws 25a (only one is shown in FIG. 3) that grip the gripped part of the article 12. The pair of gripping claws 25a is driven by a gripping motor (not shown) and is configured to be freely changeable between a gripping posture in which they move in a direction approaching each other to grip the article 12 and a release posture in which they move in a direction away from each other to release the gripping of the article 12.

[0022] The lifting device 27 raises and lowers the holding part 25 and the article 12 held thereby. In the present embodiment, the lifting device 27 has a lifting belt 27b connected to the holding part 25, a lifting drum 27c around which the lifting belt 27b is wound, and a lifting motor 27a that rotationally drives the lifting drum 27c. When the lifting drum 27c is rotationally driven by the lifting motor 27a, the lifting belt 27b is wound or unwound, that is, the holding part 25 is raised and lowered.

[0023] 〔Storage unit〕 As shown in FIGS. 4 to 6, the storage unit 6 includes a plurality of storage positions 6a for storing the articles 12. The storage positions 6a of the storage unit 6 are present on the lower side Z1 of the carrier vehicle 2, and the carrier vehicle 2 can carry the articles 12 into and out of the storage positions 6a. That is, in the present embodiment, the storage position 6a located on the lower side Z1 of the travel route 1 along which the carrier vehicle 2 travels becomes the transferable position 13 where the articles 12 are carried into and out of by the carrier vehicle 2. Here, the "lower side Z1 of the travel route 1" means a position that is lower than the travel route 1 and overlaps the travel route 1 in the vertical direction view. For example, the carrier vehicle 2 can lower the holding unit 25 from the upper side Z2 with respect to the transferable position 13 by the lifting device 27 and transfer the article 12 between the carrier vehicle 2 and the transferable position 13.

[0024] In the present embodiment, some of the plurality of storage positions 6a are transferable positions 13 where the articles 12 are carried into and out of by the carrier vehicle 2, and the remaining part of the plurality of storage positions 6a are non-transferable positions 14 where neither the loading nor the unloading of the articles 12 by the carrier vehicle 2 is performed. In the example shown in FIG. 4, the non-transferable position 14 is located on the second side Y2 in the path width direction when viewed from the transferable position 13.

[0025] Since the lifting device 27 of the carrier vehicle 2 raises and lowers the holding unit 25 along the vertical direction Z, the storage position 6a located on the lower side Z1 of the travel route 1 becomes the transferable position 13, and the storage position 6a not located on the lower side Z1 of the travel route 1 becomes the non-transferable position 14. Note that the unmanned aircraft 3 can move the article 12 between the transferable position 13 and the non-transferable position 14. Alternatively, the unmanned aircraft 3 may transport the article 12 at the transferable position 13 to the delivery unit 5.

[0026] In the example shown in FIG. 6, the storage unit 6 includes a plurality of storage levels 31. And, the storage position 6a located below the traveling path 1 in the uppermost storage level 31 is the transferable position 13, and the other storage positions 6a are non-transferable positions 14. Thus, in this example, the storage position 6a located below the traveling path 1 in the storage levels 31 other than the uppermost level is the non-transferable position 14. Incidentally, a waiting place 7 described later may be provided at the position below the traveling path 1 in the storage levels 31 other than the uppermost level. Further, for example, when the transport vehicle 2 is provided with a mechanism for moving the holding unit 25 in the path width direction Y, a configuration in which the transferable position 13 is provided in the storage levels 31 other than the uppermost level or a configuration in which the transferable position 13 is provided in the storage levels 31 of each level may be adopted.

[0027] The storage unit 6 includes a plurality of columnar storage position groups 30 each constituted by a plurality of storage positions 6a arranged in the path extending direction X, and the plurality of columnar storage position groups 30 are arranged side by side in at least one of the vertical direction Z and the path width direction Y. In FIG. 6, in the storage unit 6, the plurality of columnar storage position groups 30 are arranged side by side in both the vertical direction Z and the path width direction Y. In other words, the storage unit 6 has a plurality of storage levels 31 in which the plurality of columnar storage position groups 30 are arranged side by side in the path width direction Y, and the plurality of storage levels 31 are arranged side by side in the vertical direction Z.

[0028] Further, as shown in FIGS. 1, 4, and 5, the storage unit 6 has a waiting place 7 where the unmanned aircraft 3 takes off and lands and where the landed unmanned aircraft 3 waits. The waiting place 7 is a dedicated place for the unmanned aircraft 3 to land, and articles 12 are not stored in the waiting place 7. For example, a power supply facility for supplying power to the battery of the unmanned aircraft 3 may be provided in the waiting place 7. In that case, while the unmanned aircraft 3 is landing at the waiting place 7, the unmanned aircraft 3 can charge its own battery.

[0029] 〔Operations of the transport vehicle and the unmanned aircraft〕 As shown in FIG. 1, the control device 8 sets a plurality of transfer areas 10 each including at least one delivery section 5 and at least one storage section 6, and for each of the plurality of transfer areas 10, sets at least one unmanned aerial vehicle 3 responsible for transferring the article 12 in the transfer area 10. In the example shown in FIG. 1, a first transfer area 10A including two storage sections 6, two processing devices 4 and two delivery sections 5, and a second transfer area 10B including two storage sections 6, two processing devices 4 and two delivery sections 5 are set. Thus, for each of the plurality of storage sections 6, a correspondence relationship with one or more delivery sections 5 is set. And each of the plurality of unmanned aerial vehicles 3 transfers the article 12 between the storage section 6 and one or more delivery sections 5 with which the correspondence relationship is set. That is, the unmanned aerial vehicle 3 transfers the article 12 between the storage section 6 and the delivery section 5 included in the transfer area 10 for which it is responsible. In the present embodiment, the unmanned aerial vehicle 3 does not transfer the article 12 between the plurality of storage sections 6 included in the transfer area 10 for which it is responsible, nor transfers the article 12 between the plurality of delivery sections 5 included in the transfer area 10 for which it is responsible.

[0030] In addition, if the unmanned aerial vehicle 3 flies in an area where people can enter, there is a possibility that the people (such as workers) and the unmanned aerial vehicle 3 may collide, which is dangerous. Therefore, in the example shown in FIG. 1, the control device 8 sets a flight prohibited area 11 that prohibits the flight of the unmanned aerial vehicle 3 between the first transfer area 10A, which is one transfer area 10, and the second transfer area 10B, which is a transfer area 10 different from the first transfer area 10A. Therefore, even if a person enters the flight prohibited area 11, no collision between the person and the unmanned aerial vehicle 3 will occur.

[0031] The flight prohibited area 11 in FIG. 1 includes the processing device 4 and the delivery section 5. In this case, the control device 8 causes the transport vehicle 2 to transfer the article 12 between the delivery section 5 included in the flight prohibited area 11.

[0032] In addition to preventing a collision between a person and the unmanned aircraft 3, it is also necessary to prevent a collision between the carrier vehicle 2 and the unmanned aircraft 3. For example, considering that both the carrier vehicle 2 and the unmanned aircraft 3 operate in the vicinity of the transferable position 13, a collision between the carrier vehicle 2 and the unmanned aircraft 3 may occur in the vicinity of the transferable position 13. In the present embodiment, in order to prevent such a collision, as shown in FIG. 5, the position where the carrier vehicle 2 stops when carrying in the article 12 to the storage unit 6 and carrying out the article 12 from the storage unit 6 in the traveling route 1 is defined as the carrier vehicle stop position 15, and the position where the transfer of the article 12 with the carrier vehicle 2 is performed in the storage unit 6 is defined as the transfer position 16. When the carrier vehicle 2 is within a specific range 17 including the carrier vehicle stop position 15, the control device 8 prohibits the entry of the unmanned aircraft 3 into the transfer position 16 and a certain range (i.e., the range 18 shown in FIG. 5) in the forward direction of the traveling direction of the carrier vehicle 2 (the direction toward the first side X1 in the route extending direction) from the carrier vehicle stop position 15.

[0033] As described above, each unmanned aircraft 3 transports the article 12 within the defined transport area 10, but the number of transport requests for the article 12 per unit time for the unmanned aircraft 3 in each transport area 10 may vary significantly. Therefore, it is preferable to take measures such as arranging a large number of unmanned aircraft 3 in the transport area 10 where the number of transport requests for the article 12 per unit time for the unmanned aircraft 3 is large, and arranging a small number of unmanned aircraft 3 in the transport area 10 where the number of transport requests for the article 12 per unit time for the unmanned aircraft 3 is small. Therefore, the control device 8 calculates the degree of congestion regarding the transport of the article 12 by the unmanned aircraft 3 in each of the plurality of transport areas 10.

[0034] For example, after the control device 8 requests the handling device 4 to complete the handling of the article 12 and requests the pick-up of the article 12 at the delivery unit 5, the control device 8 stores in the storage device 9 at least one of the first time, which is the time required until the article 12 is picked up by the unmanned aircraft 3, and the second time, which is the time required until the article 12 is transported to the delivery unit 5 by the unmanned aircraft 3 after the handling device 4 requests the receipt of the article 12 at the delivery unit 5 for handling the article 12, and calculates the average value of at least one of the first time and the second time over a predetermined period as the degree of busyness.

[0035] For example, when the number of unmanned aircraft 3 responsible for transporting the article 12 in the transport area 10 is relatively small compared to the number of transport requests for the article 12 per unit time in the transport area 10, the average value (degree of busyness) of at least one of the above-mentioned first time and second time becomes a relatively large value. On the contrary, when the number of unmanned aircraft 3 responsible for transporting the article 12 in the transport area 10 is relatively large compared to the number of transport requests for the article 12 per unit time in the transport area 10, the average value (degree of busyness) of at least one of the above-mentioned first time and second time becomes a relatively small value. Thus, whether the number of unmanned aircraft 3 is excessive or insufficient with respect to the number of transport requests for the article 12 per unit time appears in the degree of busyness.

[0036] Then, the control device 8 sets the number of the unmanned aerial vehicles 3 responsible for transporting the article 12 in each of the plurality of transport areas 10 so that the degree of congestion in the plurality of transport areas 10 approaches the set value, that is, at least one unmanned aerial vehicle 3 responsible for transporting the article 12 in each transport area 10 is reset. For example, the control device 8 sets the same value for this set value in all of the plurality of transport areas 10. For example, when at least one of the above-described first time and second time average values (degree of congestion) in the first transport area 10A is smaller than the set value, and at least one of the above-described first time and second time average values (degree of congestion) in the second transport area 10B is larger than the set value, the control device 8 resets at least one unmanned aerial vehicle 3 responsible for transporting the article 12 in each transport area 10 in such a form that one of the unmanned aerial vehicles 3 responsible for transporting the article 12 in the first transport area 10A is made to be responsible for transporting the article 12 in the second transport area 10B.

[0037] Alternatively, the control device 8 can increase the number of unmanned aerial vehicles 3 responsible for transporting the article 12 in a specific transport area 10 not by moving the unmanned aerial vehicles 3 between the plurality of transport areas 10 but by newly operating an unmanned aerial vehicle 3 that has been separately prepared and waiting (that is, not operating). Alternatively, the control device 8 can decrease the number of unmanned aerial vehicles 3 responsible for transporting the article 12 in a specific transport area 10 by newly waiting (that is, not operating) an unmanned aerial vehicle 3 that has been responsible for transporting the article 12 in a specific transport area 10. Or alternatively, the control device 8 may use a combination of moving the unmanned aerial vehicles 3 between the plurality of transport areas 10 as described above, newly operating the unmanned aerial vehicles 3, and newly waiting the unmanned aerial vehicles 3 to reset the unmanned aerial vehicles 3 responsible for transporting the article 12 in each transport area 10.

[0038] When the control device 8 changes the number of unmanned aircraft 3 responsible for transporting the article 12 in each of the plurality of transport areas 10, if there is no flight prohibited area 11 set between the transport areas 10, the unmanned aircraft 3 may be flown and moved between the transport areas 10. When there is a flight prohibited area 11 set between the transport areas 10, the control device 8 may cause the transport vehicle 2 to transport the unmanned aircraft 3. For example, the control device 8 moves the corresponding unmanned aircraft 3 to the transferable position 13 of the storage unit 6, holds the unmanned aircraft 3 with the holding unit 25 of the transport vehicle 2, and transports it to the transferable position 13 of the storage unit 6 in another transport area 10. In this way, in addition to transporting the article 12, the transport vehicle 2 is configured to transport the unmanned aircraft 3 between the first transport area 10A and the second transport area 10B.

[0039] 2. Other Embodiments Next, other embodiments of the article transport facility will be described.

[0040] (1) In the above embodiment, the case where the transport vehicle 2 is an overhead transport vehicle is exemplified, but the transport vehicle 2 is not limited thereto. For example, the transport vehicle 2 may be another moving body such as an AGV (Automated Guided Vehicle) or an STV (Sorting Transfer Vehicle).

[0041] (2) In the above embodiment, the case where the processing device 4 is a semiconductor processing device is exemplified, but the processing device 4 is not limited thereto. For example, the processing device 4 may be a sorting device that sorts the article 12. In that case, for example, a container that houses a plurality of products becomes the article 12. Alternatively, the processing device 4 may be a manufacturing device that manufactures an object. In that case, the product manufactured by the manufacturing device becomes the article 12.

[0042] (3) In the above-described embodiment, the case where the transport vehicle 2 delivers the article 12 to and from the delivery unit 5 of the processing device 4 has been illustrated. However, the transport vehicle 2 may be configured not to deliver the article 12 to and from the delivery unit 5 of the processing device 4. For example, even if the delivery unit 5 is arranged at a position where the article 12 can be delivered by the transport vehicle 2, if the delivery unit 5 is not included in the flight prohibited area 11, instead of the transport vehicle 2, the unmanned aircraft 3 may deliver the article 12 to and from the delivery unit 5.

[0043] (4) In the above-described embodiment, the configuration of the storage position 6a in the storage unit 6 has been illustrated. However, the configuration of the storage position 6a in the storage unit 6 can be changed as appropriate. For example, the number of storage positions 6a in the storage unit 6 may be one or a plurality. Further, the storage unit 6 may be, for example, an automated warehouse having a stacker crane or the like, or a storage area set on the floor.

[0044] (5) In the above-described embodiment, when the plurality of storage units 6 are included in the transport area 10 that the unmanned aircraft 3 is in charge of, the unmanned aircraft 3 may transport the article 12 between the plurality of storage units 6. Similarly, when the plurality of delivery units 5 are included in the transport area 10 that the unmanned aircraft 3 is in charge of, the unmanned aircraft 3 may transport the article 12 between the plurality of delivery units 5.

[0045] (6) In the above-described embodiment, an example where the waiting place 7 is installed at a dedicated place adjacent to the storage unit 6 has been described. However, the waiting place 7 may be provided at another place. For example, the storage position 6a of the storage unit 6 may be used as the waiting place 7, and the storage position 6a may be used for both storage of the article 12 and waiting of the unmanned aircraft 3. Alternatively, the waiting place 7 may be installed adjacent to the delivery unit 5, or may be installed at a position away from the storage unit 6 and the delivery unit 5.

[0046] (7) In the above-described embodiment, the unmanned aircraft 3 may be configured by a wired connection connected by a power supply line, a signal line, or the like. In that case, a winding device for a power supply line, a signal line, or the like may be installed at the waiting place 7.

[0047] (8) In the above-described embodiment, the flight prohibition area 11 may not be provided in the article conveyance facility. Also, a plurality of conveyance areas 10 may partially overlap.

[0048] (9) In the above-described embodiment, the flight prohibition area 11 may be fixedly set in advance, or may be variably set. As an example of the case where the flight prohibition area 11 is variably set, the following forms can be considered. A presence / absence of a person in a specific area is monitored using a human sensor, a surveillance camera, or the like. Then, when no person is present in the specific area, the control device 8 permits the flight of the unmanned aircraft 3 in the specific area, that is, does not set a flight prohibition area. On the other hand, when a person is present in the specific area, the control device 8 prohibits the flight of the unmanned aircraft 3 in the specific area, that is, sets the specific area as a flight prohibition area.

[0049] (10) In the above-described embodiment, the case where at least one of the above-described first time and second time is calculated as the traffic intensity has been described, but another value may be calculated as the traffic intensity. For example, the control device 8 stores, in the storage device 9, as the operation time, the time during which each unmanned aircraft 3 is engaged in the conveyance of the article 12 (for example, the time when it is not waiting at the waiting place 7, etc.) within a predetermined period. The control device 8 derives, for each unmanned aircraft 3, the ratio of the operation time in the predetermined period as the operation rate. Then, the control device 8 calculates, as the traffic intensity, the average value of the operation rates of one or more unmanned aircraft 3 responsible for the conveyance of the article 12 in each conveyance area 10. That is, it can be said that the higher the average value of the operation rates of one or more unmanned aircraft 3 (that is, the traffic intensity), the higher the load on the unmanned aircraft 3 in the conveyance area 10, and the lower the average value of the operation rates of one or more unmanned aircraft 3 (that is, the traffic intensity), the lower the load on the unmanned aircraft 3 in the conveyance area 10.

[0050] (11) In the above embodiment, when making the occupancy levels in the plurality of transfer areas 10 approach the set value, an example was described in which the control device 8 makes the set value the same for all of the plurality of transfer areas 10. However, the set value may be a value set separately for each of the plurality of transfer areas 10. For example, when there is a transfer area 10 in which it is desired to particularly quickly transfer the article 12 by the unmanned aircraft 3, the administrator of the article transfer facility or the like may instruct the control device 8 to change the set value to a small value using an input device or the like so that the occupancy level of that transfer area 10 becomes low (that is, approaches a small set value).

[0051] (12) In the above embodiment, an example was described in which the control device 8 controls the operations of the carrier vehicle 2 and the unmanned aircraft 3 as shown in FIG. 2, for example. However, the configuration of the control device 8 can be changed as appropriate. For example, the control device 8 may be configured as a device that integrally controls a plurality of control units provided in the article transfer facility, such as a control unit provided to control the operation of the carrier vehicle 2 and a control unit provided to control the operation of the unmanned aircraft 3. Alternatively, the function of the control device 8 may be configured to be borne by an existing control unit provided in the article transfer facility, for example, a control unit provided to control the operation of the carrier vehicle 2.

[0052] 3. Summary of the above embodiment Hereinafter, an overview of the article transfer facility described above will be described.

[0053] The article transfer facility includes a carrier vehicle that travels along a predetermined travel route to transfer an article, an unmanned aircraft that flies along an arbitrary route to transfer the article, a delivery unit provided corresponding to a processing device that performs processing on the article, where the delivery of the article that has become the processing target of the processing device is performed, and a storage unit that is disposed at a position along the travel route and stores the article. The carrier vehicle performs the loading of the article into the storage unit and the unloading of the article from the storage unit, and the unmanned aircraft performs the transfer of the article between the storage unit and the delivery unit.

[0054] According to this configuration, even if the processing device and the delivery unit provided correspondingly thereto are arranged at positions away from the traveling route of the transport vehicle, the unmanned aircraft can transport articles between the storage unit and the delivery unit. That is, the processing device and the delivery unit provided correspondingly thereto do not have to be provided in an area along the traveling route of the transport vehicle. As a result, the installation cost of the traveling route of the transport vehicle is reduced. In addition, when an article is needed in the processing device or when the processing of the article in the processing device is completed, the article can be quickly transported by the unmanned aircraft without waiting for the arrival of the transport vehicle. Therefore, it is easy to improve the transport efficiency of articles between the storage unit and the delivery unit, and by extension, it is easy to improve the processing efficiency of articles by the processing device. Therefore, an article transport facility with low equipment costs and capable of efficiently transporting articles is realized.

[0055] Here, it is preferable that a plurality of the unmanned aircraft, a plurality of the delivery units, and a plurality of the storage units are provided, the transport vehicle transports the articles between the plurality of the storage units, a correspondence relationship with one or more of the delivery units is set for each of the plurality of the storage units, and each of the plurality of the unmanned aircraft transports the articles between the storage unit with the set correspondence relationship and one or more of the delivery units.

[0056] According to this configuration, the transport vehicle transports articles between a plurality of storage units, and the unmanned aircraft transports articles between the storage unit and the delivery unit that are associated in advance. For example, even if there is an area unsuitable for the flight of the unmanned aircraft, such as an area where people are present or an area with many obstacles, between one storage unit and another storage unit, articles can be transported between such storage units by the transport vehicle. In this way, the articles can be appropriately transported by sharing between the transport vehicle and the unmanned aircraft. In addition, when the storage unit and the delivery unit associated with each other are arranged, for example, within a relatively short distance, it is possible to limit the flight range of the unmanned aircraft. Thereby, the energy supply and flight control of the unmanned aircraft can be facilitated.

[0057] Further, it is preferable that the storage unit has a waiting area where the unmanned aircraft takes off and lands and where the landed unmanned aircraft waits.

[0058] According to this configuration, the unmanned aircraft can be made to wait at a position close to the article stored in the storage unit. Therefore, when the article becomes necessary in the processing device, the article can be quickly transported from the storage unit to the processing device by the unmanned aircraft. Accordingly, it is easy to improve the transport efficiency of the article between the storage unit and the delivery unit, and by extension, it is easy to improve the processing efficiency of the article by the processing device.

[0059] Furthermore, it is preferable to further include a control device that controls a plurality of the unmanned aircrafts, and the control device sets a plurality of transport areas including at least one of the delivery units and at least one of the storage units, and for each of the plurality of transport areas, sets at least one of the unmanned aircrafts responsible for transporting the article in the transport area.

[0060] According to this configuration, even when the overall area of the article transport facility is large, a plurality of transport areas are set therein, and at least one unmanned aircraft responsible for each transport area is set, so that the flight distance of each unmanned aircraft can be limited. Accordingly, it is easy to improve the transport efficiency of the article by the unmanned aircraft, and by extension, it is easy to improve the processing efficiency of the article by the processing device.

[0061] Furthermore, the control device calculates the degree of busyness regarding the transport of the article by the unmanned aircraft in each of the plurality of transport areas, and sets the number of the unmanned aircrafts responsible for transporting the article in each of the plurality of transport areas so that the degree of busyness in the plurality of transport areas approaches a set value.

[0062] According to this configuration, the number of unmanned aircrafts in each transport area is set so that the degree of busyness of the unmanned aircraft approaches the set value in each transport area. That is, the number of unmanned aircrafts responsible for each transport area is set so that the degree of busyness of the unmanned aircraft in each transport area approaches a desired state.

[0063] Further, it is preferable that the control device calculates, as the degree of congestion, an average value of at least one of a first time, which is the time required from when the processing device completes the processing of the article and requests the pickup of the article at the delivery unit until the article is picked up by the unmanned aircraft, and a second time, which is the time required from when the processing device requests the receipt of the article at the delivery unit for processing the article until the article is transported to the delivery unit by the unmanned aircraft.

[0064] According to this configuration, the degree of congestion corresponding to the length of the waiting time for the processing device to wait for the loading and unloading of the article can be calculated. Therefore, by setting the number of unmanned aircrafts in each of the plurality of transport areas according to the degree of congestion, it becomes easier to improve the processing efficiency of the articles by the processing device.

[0065] Further, the control device sets a flight prohibited area for prohibiting the flight of the unmanned aircraft between a first transport area, which is one of the transport areas, and a second transport area, which is a transport area different from the first transport area. In addition to transporting the article, it is preferable that the transport vehicle transports the unmanned aircraft between the first transport area and the second transport area.

[0066] According to this configuration, even when a flight prohibited area for prohibiting the flight of the unmanned aircraft is set between the first transport area and the second transport area, the unmanned aircraft can be moved between these transport areas.

[0067] Furthermore, the control device further includes a control device for controlling a plurality of the unmanned aircrafts. A position where the transport vehicle stops when the transport vehicle performs loading of the article into the storage unit and unloading of the article from the storage unit on the travel route is defined as a transport vehicle stop position, and a position where the article is transferred to and from the transport vehicle in the storage unit is defined as a transfer position. When the transport vehicle is within a specific range including the transport vehicle stop position, it is preferable that the control device prohibits the unmanned aircraft from entering the transfer position and a certain range in front of the transport vehicle stop position in the traveling direction of the transport vehicle.

[0068] According to this configuration, it is possible to fly the unmanned aircraft while avoiding interference between the carrier vehicle and the unmanned aircraft.

[0069] Further, the storage unit has a plurality of storage positions for storing the articles, and a part of the plurality of storage positions is a transferable position where the articles are carried in and out by the carrier vehicle, and the rest of the plurality of storage positions is a non-transferable position where neither the loading nor the unloading of the articles by the carrier vehicle is performed. The unmanned aircraft is preferably used to move the articles between the transferable position and the non-transferable position.

[0070] According to this configuration, even when not all of the plurality of storage positions of the storage unit are transferable positions where the articles are carried in and out by the carrier vehicle, the articles can be stored in all the storage positions by utilizing the unmanned aircraft. Therefore, it is not necessary to use a complicated mechanism or the like for moving the articles between the transferable position and the non-transferable position.

[0071] Also, with the direction along the travel route as the route extension direction and the direction orthogonal to the route extension direction in a top-down view as the route width direction, the storage unit preferably includes a plurality of columnar storage position groups each composed of a plurality of the storage positions arranged in the route extension direction, and the plurality of columnar storage position groups are arranged side by side in at least one of the vertical direction and the route width direction.

[0072] According to this configuration, it is possible to store a relatively large number of articles in the storage unit while suppressing an increase in the size of the storage unit.

Industrial Applicability

[0073] The present invention can be used for an article conveying facility that has a low equipment cost and can efficiently convey articles.

Explanation of Signs

[0074] 1: Travel route 2: Carrier vehicle 3: Unmanned Aerial Vehicle 4: Processing Device 5: Delivery Unit 6: Storage Unit 6a: Storage Location 7: Waiting Location 8: Control Device 10: Conveying Area 10A: First Conveying Area 10B: Second Conveying Area 11: Flight Prohibited Area 12: Article 13: Transferable Position 14: Non-Transferable Position 15: Conveyor Cart Stop Position 16: Transfer Position 17: Specific Range 30: Columnar Storage Location Group X: Route Extension Direction Y: Route Width Direction Z: Vertical Direction

Claims

1. A transport vehicle that travels along a predetermined travel route to transport an article, A drone that flies along an arbitrary route to transport the article, A delivery unit provided corresponding to a processing device that performs processing on the article, and where delivery of the article that is the processing target of the processing device is carried out, A storage unit arranged at a position along the travel route for storing the article, Comprising, The transport vehicle performs loading of the article into the storage unit and unloading of the article from the storage unit, The drone transports the article between the storage unit and the delivery unit, an article transport facility.

2. Comprising a plurality of the drones, a plurality of the delivery units, and a plurality of the storage units, The transport vehicle transports the article between the plurality of storage units, For each of the plurality of storage units, a correspondence relationship with one or more of the delivery units is set, Each of the plurality of drones transports the article between the storage unit with the set correspondence relationship and one or more of the delivery units, the article transport facility according to Claim 1.

3. The storage unit has a waiting location where the drone takes off and lands and where the landed drone waits, the article transport facility according to Claim 2.

4. Further comprising a control device for controlling a plurality of the drones, The control device sets a plurality of transport areas including at least one of the delivery units and at least one of the storage units, and for each of the plurality of transport areas, sets at least one of the drones responsible for transporting the article in the transport area, the article transport facility according to Claim 2.

5. The control device, Calculates the degree of busyness related to the transport of the article by the drones in each of the plurality of transport areas, Sets the number of the drones responsible for transporting the article in each of the plurality of transport areas so that the degree of busyness in the plurality of transport areas approaches a set value, the article transport facility according to Claim 4.

6. The control device calculates, as the degree of busyness, an average value of at least one of a first time, which is the time required from when the processing device completes the processing of the article and requests the pick-up of the article at the delivery unit until the article is picked up by the unmanned aircraft, and a second time, which is the time required from when the processing device requests the receipt of the article at the delivery unit for processing the article until the article is transported to the delivery unit by the unmanned aircraft. The article transport facility according to claim 5.

7. The control device sets a flight prohibited area for prohibiting the flight of the unmanned aircraft between a first transport area, which is one of the transport areas, and a second transport area, which is a transport area different from the first transport area. In addition to transporting the article, the transport vehicle transports the unmanned aircraft between the first transport area and the second transport area. The article transport facility according to claim 4.

8. The article transport facility further includes a control device for controlling a plurality of the unmanned aircrafts. A position where the transport vehicle stops when carrying the article into and out of the storage unit on the travel route is defined as a transport vehicle stop position, and a position where the article is transferred to and from the transport vehicle in the storage unit is defined as a transfer position. When the transport vehicle is within a specific range including the transport vehicle stop position, the control device prohibits the unmanned aircraft from entering the transfer position and a certain range in front of the transport vehicle stop position in the traveling direction of the transport vehicle. The article transport facility according to claim 1.

9. The storage unit has a plurality of storage positions for storing the articles. Some of the plurality of storage positions are transferable positions where the article is carried into and out of by the transport vehicle, and the remaining part of the plurality of storage positions are non-transferable positions where neither the carry-in nor the carry-out of the article by the transport vehicle is performed. The unmanned aircraft moves the article between the transferable position and the non-transferable position. The article transport facility according to any one of claims 1 to 8.

10. Taking the direction along the travel route as the route extending direction and the direction orthogonal to the route extending direction in the vertical view as the route width direction. The storage unit includes a plurality of column-shaped storage position groups each composed of a plurality of the storage positions arranged in the route extending direction. The article conveying facility according to claim 9, wherein the plurality of columnar storage position groups are arranged side by side in at least one of the vertical direction and the path width direction.

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