Machine tool with active vibration damping

Abstract

The machine (10) for positioning an object (12) includes a moving part (16C) and a vibration-damping assembly (24) that couples the object (12) to the moving part (16C). Further, the vibration-damping assembly (24) attenuates the magnitude of vibrations transmitted from the moving part (16C) to the object (12). The vibration-damping assembly (24) can include an actively controlled support system (30) and an actively controlled actuator system (32).

Description

Technical Field

[0001] This application claims priority to U.S. Provisional Patent Application No. 63 / 089,630, filed October 9, 2020, entitled "Machine Tool with Active Vibration Damping". To the extent permitted, the contents of U.S. Provisional Patent Application No. 63 / 089,630 are hereby incorporated by reference in their entirety.

Background Art

[0002] Machines are used in many industrial applications. One type of machine is a robot that includes a robotic arm for positioning a payload, such as a robotic arm.

Summary of the Invention

Problems to be Solved by the Invention

[0003] There is an unending desire to improve the motion and positioning accuracy of robots.

Means for Solving the Problems

[0004] This implementation is directed to a machine for moving and positioning an object, the machine including a movable component and a vibration damping assembly. The vibration damping assembly couples the object to the movable component. Further, the vibration damping assembly attenuates the magnitude of vibrations transmitted from the movable component to the object. As a result, the object can be positioned with improved accuracy. This enables, for example, the manufacturing, machining, measurement, and / or assembly of components with improved accuracy. Additionally, the vibration damping assembly can allow for a larger operating range than would generally be possible with the object being accurately accessible.

[0005] The movable component can be a link of a robot that includes a link actuator for moving the link. Further, the movable component can be a link of a multi-degree-of-freedom robotic arm, and the vibration damping assembly suppresses vibrations in multiple degrees of freedom. In an alternative implementation, the movable component can be a vehicle such as an automated guided vehicle (AGV) or an aerial drone.

[0006] The vibration damping assembly can include one or more low-rigidity supports that connect the object to the movable parts. Each low-rigidity support can include a spring, a bellows, and / or a pneumatic chamber. Typically, the vibration damping assembly includes a plurality of spaced-apart low-rigidity supports that connect the object to the movable parts. In one implementation, the force generated by each low-rigidity support passes through the center of gravity of the object. Additionally, the low-rigidity supports can be arranged in a tetrahedral configuration. The low-rigidity supports can be arranged parallel to three perpendicular axes.

[0007] As used herein, in an alternative non-exclusive example, the terms "relatively soft" or "low rigidity" shall mean a rigidity of less than 1, 2, 5, 10, 20, 30, 50, or 100 newtons per millimeter. In other words, as an alternative non-exclusive example, low rigidity shall mean that the object has a natural frequency of less than 1, 2, 5, or 10 hertz. In yet other words, in a particular implementation, "low rigidity" shall mean that the rigidity is at least at least 5 times lower than the rigidity of the movable part.

[0008] As used herein, in an alternative non-exclusive example, the terms "relatively high" or "high rigidity" shall mean a rigidity exceeding 100, 200, 500, or 1000 newtons per millimeter. In other words, as an alternative non-exclusive example, "relatively high" or "high rigidity" shall mean that the object has a natural frequency exceeding 10, 15, 20, or 50 hertz. In a particular implementation, the terms "relatively hard" or "high rigidity" shall mean a rigidity that is 10, 100, or 1000 times that of "relatively soft" or "low rigidity". Note that other numbers are possible depending on the desired characteristics of the vibration damper.

[0009] Additionally, the control system can actively control the force generated by each low-rigidity support.

[0010] Further, the vibration damping assembly can include one or more controlled actuators that connect the object to the movable part. In one implementation, at least one support and at least one actuator act in parallel.

[0011] Furthermore, the sensor assembly can provide feedback (“sensed state”), and the control system can actively control the vibration damping assembly to suppress the transmission of vibrations of the movable part to the object. The type of sensed state from the sensor assembly can include one or more of (i) the position, movement, orientation, velocity, and / or acceleration of the object, (ii) the position, movement, orientation, velocity, and / or acceleration of the movable part, and (iii) an inertial point in space.

[0012] The movable part can be a component of a processing machine. For example, the movable part can be a component of a laser processing machine, and the object can be a laser device. For example, the movable part can be a mobile robot vehicle. For example, the movable part can be a mobile vehicle operated by an on-board or remote operator. For example, the movable part can be an aerial drone. For example, the movable part can be an aerial vehicle operated by an on-board or remote operator.

[0013] In another implementation, a robot assembly for positioning a payload includes a robot and a vibration damping assembly. The robot includes a link and a link actuator that selectively moves the link. The vibration damping assembly couples the payload to the robot. The vibration damping assembly at least partially suppresses the transmission of vibrations of the robot to the payload. The robot can include a multi-degree-of-freedom robotic arm, and the vibration damping assembly can suppress multi-degree-of-freedom vibrations.

[0014] In another implementation, a vibration damping assembly that couples an object to a movable component includes (i) a plurality of spaced-apart low-rigidity supports that couple the object to the movable component, (ii) a sensor assembly that provides feedback, and (iii) a control system that actively controls the low-rigidity supports using the feedback to at least partially suppress the transmission of vibrations of the movable component to the object. For example, the sensor assembly can provide feedback regarding a sensed state, such as (i) the position, orientation, velocity, and / or acceleration of the object, and / or (ii) the position, orientation, velocity, and / or acceleration of the movable component, and / or (iii) an inertial coordinate system or the object.

[0015] The control system can actively control the low-rigidity supports to partially suppress the transmission of vibrations of the movable component to the object in six degrees of freedom. Further, each low-rigidity support can include a pneumatic chamber. Also, the control system can actively control the forces generated by each low-rigidity support.

[0016] In a particular implementation, the forces generated by each low-rigidity support pass through the center of gravity of the object.

[0017] The low-rigidity supports can be arranged in a tetrahedral or other configuration.

[0018] The vibration damping assembly can also include a plurality of spaced-apart actuators that connect the object to the movable component. Further, the control system can actively control the actuators to suppress the transmission of vibrations of the movable component to the object.

[0019] Additionally, the vibration damping assembly can include a first connector frame fixed to the movable component and a second connector frame that holds the object. In this design, the plurality of spaced-apart low-rigidity supports extend between the first connector frame and the second connector frame.

[0020] In yet another implementation, the vibration damping assembly includes a plurality of supports movably coupling the movable parts to the object, a sensor assembly for obtaining information about the sensed state of the object, and a control system for actively controlling the supports so as to attenuate the magnitude of vibrations from the movable parts to the object.

[0021] In yet another implementation, the laser machine includes a laser including a laser output, a robot, and a vibration damping assembly coupling the laser output to the robot, the vibration damping assembly attenuating the magnitude of vibrations transmitted from the robot to the laser output.

[0022] The novel features of this embodiment, as well as the embodiment itself, will be best understood from the attached drawings, in which like reference numerals refer to like parts, in conjunction with the accompanying description, both as to its structure and its operation.

Brief Description of the Drawings

[0023]

Figure 1A

Figure 1B

Figure 1C

Figure 1D

Figure 1E

Figure 2

Figure 3A

Figure 3B

Figure 3C

Figure 3D

Figure 3E

Figure 3F

Figure 3G

Figure 4

Figure 5A

Figure 5B

Figure 5C

Figure 5D

Figure 5E

Figure 5F

Figure 5G

Figure 5H

Figure 6

Figure 7

DETAILED DESCRIPTION OF THE INVENTION

[0024] FIG. 1A is a simplified perspective view of a programmable and controllable machine 10 configured to perform one or more complex operations. In FIG. 1A, machine 10 includes an object 12 and an assembly 14 for moving and positioning object 12. In this implementation, object 12 is an optical device (e.g., a measuring or processing device), and assembly 14 is a robotic assembly that includes a robot 16 directed by a support 18, a sensor assembly 20 (shown as a box), a control system 22 (shown as a box), and a vibration damping assembly 24 that cooperates to accurately position object 12. Robot 16 is not limited to a humanoid robot or a selective compliance assembly robot arm robot. Further, the robot may also be a serial link robot such as a rectangular robot, a cylindrical robot, or a polar coordinate robot, a parallel link robot, or other types of robots. Note that the number and design of the components of machine 10 and assembly 14 can be changed to achieve the tasks performed by machine 10. Further, note that machine 10 may be another type of processing machine other than a robotic assembly having a robotic arm. In an alternative non-exclusive example, vibration damping assembly 24 may be used in a conventional processing machine (e.g., a laser processing machine or a machining center) or a transportation machine (e.g., an automated guided vehicle or an aerial drone).

[0025] As a non-exclusive example, vibration is generated by (i) support 18, (ii) other components that engage support 18, (iii) actuators, links, cables, or wiring within assembly 14, (iv) wind, and / or (v) acoustic noise.

[0026] Multiple different implementations are disclosed herein. Briefly, in each implementation, the vibration damping assembly 24 is uniquely designed to attenuate the magnitude of vibrations transmitted from the robot 16 and / or the support 18 to the object 12. As a result, the object 12 can be positioned with improved accuracy. This enables, for example, the manufacturing, measurement, machining, gripping, and / or assembly of components with improved accuracy. The amount of vibration attenuation can be varied depending on the design of the system. As an alternative non-exclusive example, the vibration damping assembly 24 can attenuate the magnitude of vibrations by at least approximately 20, 30, 40, 50, 60, 70, 80, or 90 percent.

[0027] Note that the control system 22 is shown as a single system that is part of the larger assembly 14 and controls both the robot 16 and the vibration damping assembly 24. Alternatively, the control system 22 may be a distributed system having a separate control system that is part of and controls the robot 16 and another separate control system that is part of and controls the vibration damping assembly 24. Similarly, the sensor assembly 20 is shown as a single system that is part of the larger assembly 14 and provides feedback to both the robot 16 and the vibration damping assembly 24. Alternatively, the sensor assembly 20 can include a plurality of different spaced sensors that provide feedback for use in controlling the robot 16 and a plurality of additional spaced sensors that provide feedback for use in controlling the vibration damping assembly 24. In a particular design, the sensor assembly 20, the control system 22, and the support adjuster 34 (described below) can be considered part of the vibration damping assembly 24.

[0028] As used herein, the term "vibration" means steady vibrations, short-term disturbances, random disturbances, transient disturbances, repetitive disturbances, and any unwanted motion, and includes these.

[0029] Some of the figures include a calibration system showing an X-axis, a Y-axis orthogonal to the X-axis, and a Z-axis orthogonal to the X-axis and the Y-axis. Note that any of these axes can be referred to as a first, second, and / or third axis. Further, movement along or around a single axis can be called one degree of freedom, and movement along or around the X-axis, Y-axis, and Z-axis can be called six degrees of freedom.

[0030] The size, shape, and design of the object 12 can be changed to achieve the tasks designed for the machine 10 to perform. In FIG. 1A, the object 12 is an optical device designed to interact with a target workpiece. As a non-exclusive example, the object 12 can be a device for performing desired tasks such as welding, cutting, measuring, soldering, manufacturing, cladding, grooving, material deposition, material ablation, gripping, spinning, placing, or fastening. For example, the object 12 may be an optical device such as a laser device, and the desired tasks may be (i) accurately cutting or removing one or more grooves (not shown) in one or more components (not shown), (ii) welding one or more components, and / or (iii) soldering one or more components. Alternatively, for example, the object 12 may be a gripper (e.g., a robotic hand), and the desired task may be to move and / or position an object (not shown).

[0031] In a specific example, the object 12 is a laser or a part of a laser (not the entire laser). As an example, the part of the laser may be a laser output, a part of an optical fiber that emits (radiates) a laser beam, and a laser light output, a gain medium of the laser, and / or a laser beam steering assembly. It is sufficient if it includes at least components or optical elements for the laser output. The laser light source may be separated from the object 12. For example, the laser light source may be arranged around the support 18 or elsewhere and connected to the object 12 via an optical fiber element.

[0032] The term "object" can also be referred to as "payload". Note that the design of the vibration damping assembly 24 can be adjusted to fit payloads of any size or shape.

[0033] As described above, the robot 16 is supported by the support 18. As a non-exclusive example, the support 18 can be a floor, wall, or other fixed surface inside a factory, inside a building, or outdoors. Alternatively, the support 18 can be a movable structure.

[0034] The robot 16 moves and positions the payload 12. The design of the robot 16 can be changed to fit the movement requirements of the payload 12. In the non-exclusive implementation of Figure 1A, the robot 16 is a multi-degree-of-freedom robotic (mechanical) arm having a base 16A firmly fixed to the support 18 and a mount 16B connected to the payload 12 by the vibration damping assembly 24. As an alternative non-exclusive example, the robot 16 can be designed and controlled to move and position the payload 12 with at least 1, 2, 3, 4, 5, or 6 degrees of freedom relative to the support 18. Note that the robotic arm 16 can be part of a more complex robot (not shown) that moves relative to the support 18. In Figure 1A, the mount 16B is at the distal end of the robot 16 (when referenced to the base 16A). Alternatively, the mount 16B can be in other positions.

[0035] Robot 16 can include one or more rigid links 16C, one or more joints 16D, and one or more link actuators 16E (only some are labeled with reference numerals). The links 16C are connected by joints 16D that enable either rotational or translational movement, and the link actuators 16E are controlled to move the links 16C rotationally and / or translationally. Note that (i) any of the links 16C can be referred to as the first, second, third, fourth, etc. link, (ii) any of the joints 16D can be referred to as the first, second, third, fourth, etc. joint, and (iii) any of the link actuators 16E can be referred to as the first, second, third, fourth, etc. link actuator. For example, each link actuator 16E can include one or more linear actuators and / or one or more rotary actuators.

[0036] The links 16C of robot 16 can be regarded as a kinematic chain, and the control system 22 can control the link actuators 16E to position the payload 12 with one or more degrees of freedom. In the non-exclusive implementation form of FIG. 1A, robot 16 can position the payload 12 with six degrees of freedom to position the payload 12 at any position and orientation within a three-dimensional space.

[0037] In one implementation form, the mount 16B of robot 16 can include a connector frame 26 that (i) supports the vibration damping assembly 24, (ii) connects the vibration damping assembly 24 to the robot 16, and (iii) provides a rigid structure for accurately positioning the vibration damping assembly 24 for vibration damping of the payload 12. The size, shape, and design of the connector frame 26 can be changed according to the designs of the vibration damping assembly 24 and the payload 12. One non-exclusive design of the connector frame 26 will be described in more detail with reference to FIGS. 1B and 1C.

[0038] Note that one or more links 16C, one or more joints 16D, and / or connector frame 26 may also be collectively referred to as "movable parts".

[0039] Further note that connector frame 26 may alternatively be described as part of vibration damping assembly 24. In this description, connector frame 26 may be physically connected to a distal link or distal joint near mount 16B of robot 16.

[0040] Also note that industrial robot assembly 14 may be subject to some vibration disturbances from support 18. Due to the mechanics of robot assembly 14, some of these vibrations are transmitted to connector frame 26. In addition, robot assembly 14 itself may add additional vibration modes. Furthermore, air flow (i.e., wind), acoustic noise, and disturbing forces from cables or hoses may act on object 12. As will be described later, vibration damping assembly 24 suppresses the transmission of this vibration to object 12 and counteracts the effects of these disturbances.

[0041] The sensor assembly 20 provides feedback that is used by the control system 22 to sense (i) the position, velocity, and / or acceleration of the payload 12, and / or (ii) the position of one or more components of the vibration damping assembly 24, and / or (iii) the position, velocity, and / or acceleration of a moving part (e.g., the robot 16), and to control the link actuators 16E of the robot 16 and the vibration damping assembly 24. The design of the sensor assembly 20 can be modified to provide the desired feedback for controlling the link actuators 16E and the vibration damping assembly 24. For example, if the robot 16 positions the payload 12 in six degrees of freedom, it may be desirable for the sensor assembly 20 to provide feedback regarding all six degrees of freedom. In the non-exclusive example of FIG. 1A, the sensor assembly 20 can provide feedback regarding the position of the payload 12 having six degrees of freedom with respect to the target surface 28 and / or the connector frame 26. In a non-exclusive example, the sensor assembly 20 can include one or more cameras, interferometers, or accelerometers that function at one or more wavelengths, and non-optical measuring devices such as ultrasonic, eddy current, or capacitive sensors.

[0042] The control system 22 controls the components of the machine 10. For example, the control system 22 can control (i) the payload 12, (ii) the robot 16, (iii) the sensor assembly 20, and (iv) the vibration damping assembly 24. The control system 22 may be a centralized system or a distributed system.

[0043] The control system 22 may include, for example, a CPU (Central Processing Unit) 22A and an electronic memory 22B. The control system 22 functions as a device that controls the operation of the machine 10 by a CPU that executes a computer program. The control system 22 may not be disposed inside the machine 10, and may be disposed, for example, as a server external to the machine 10. In this case, the control system 22 and the machine 10 may be connected via a communication line such as a wired communication line (cable communication), a wireless communication line, or a network. Further, each process and function included in the program may be executed by program software that can be executed by a computer, or the process of each part may be executed by hardware such as a predetermined gate array (FPGA), ASIC, or program software, and partial hardware modules that realize a part of the hardware elements may be mixed and implemented.

[0044] The programming and hardware for the control system 22 can be modified to achieve the desired tasks that the machine 10 is performing.

[0045] The vibration damping assembly 24 connects the payload (object) 12 to the robot (movable part) 16 (directly or indirectly) and extends between the payload 12 and the connector frame 26 of the robot 16. Further, the vibration damping assembly 24 reduces (suppresses) the transmission of vibrations of the robot 16 (for example, the connector frame 26, the link 16C, the joint 16D, and the link actuator 16E) and the support 18 to the payload 12. The vibration damping assembly 24 can also cancel out the disturbing forces acting on the payload 12. As a result, for example, the robot assembly 14 can position the payload 12 more accurately with respect to the target surface 28 together with the vibration damping assembly 24. Some different implementation forms of the vibration damping assembly 24 are disclosed in this specification.

[0046] The design of the vibration damping assembly 24 can be changed to conform to the design and movement requirements of the payload 12. In an alternative design, (i) if the robot 16 is designed to position the payload 12 with one degree of freedom, the vibration damping assembly 24 can be designed to suppress the vibration of the payload 12 with at least one degree of freedom; (ii) if the robot 16 is designed to position the payload 12 with two degrees of freedom, the vibration damping assembly 24 can be designed to suppress the vibration of the payload 12 with at least two degrees of freedom; (iii) if the robot 16 is designed to position the payload 12 with three degrees of freedom, the vibration damping assembly 24 can be designed to suppress the vibration of the payload 12 with at least three degrees of freedom; (iv) if the robot 16 is designed to position the payload 12 with four degrees of freedom, the vibration damping assembly 24 can be designed to suppress the vibration of the payload 12 with at least four degrees of freedom; (v) if the robot 16 is designed to position the payload 12 with five degrees of freedom, the vibration damping assembly 24 can be designed to suppress the vibration of the payload 12 with at least five degrees of freedom; (vi) if the robot 16 is designed to position the payload 12 with six degrees of freedom, the vibration damping assembly 24 can be designed to suppress the vibration of the payload 12 with six degrees of freedom. It should be noted that the robot 16 and the vibration damping assembly 24 can be designed such that the degrees of freedom of the robot 16 are different from the degree-of-freedom damping of the vibration damping assembly 24. As a non-exclusive example, the robot 16 can be designed to have one degree of mobility, and the vibration damping assembly 24 can be designed to have damping with more than one (e.g., two, three, four, five, or six) degrees of freedom. As yet another example, the robot 16 can be designed to have six degrees of freedom, and the vibration damping assembly 24 can be designed to have damping with less than six (e.g., five, four, three, two, or one) degrees of freedom.

[0047] In a non-exclusive implementation of FIG. 1A, the vibration damping assembly 24 includes a low stiffness support system 30 and an actuator system 32. Using this design, the problem of providing a high-performance anti-vibration mount for an industrial robot 16 that performs accurate operations is solved by using a vibration damping assembly 24 that includes an actively or passively controlled low stiffness support system 30 and an actively controlled actuator system 32 between the robot 16 and the payload 12 to improve force control performance. In this design, the support system 30 and the actuator system 32 act in parallel to isolate the payload 12 from vibrations. Further, as a non-exclusive example, the actuator system 32 can be controlled to respond to vibrations at least 2, 5, 8, or 10 times faster than the support system 30. Thus, the actuator system 32 will have a higher bandwidth than the support system 30. Alternatively, for example, the vibration damping assembly 24 may be designed without the actuator system 32 or without the support system 30.

[0048] Note that the support system 30 may include a support adjuster 34 (shown as a box) that is controlled by the control system 22 to actively adjust the support system 30. The support adjuster 34 will be described in more detail below.

[0049] FIG. 1B is an enlarged perspective view of (i) a portion of the robot 16 including a mount 16B having a connector frame 26, (ii) the payload 12, and (iii) the vibration damping assembly 24 of FIG. 1A. In this design, the connector frame 26 can attach the vibration damping assembly 24 and the payload 12 to the robot 16. Stated another way, the connector frame 26, the vibration damping assembly 24, and the payload 12 can function as modules that can be added to the robot 16 or other processing machines.

[0050] FIGS. 1C and 1D are alternative perspective views of a portion of the payload 12 and the vibration damping assembly 24 from FIG. 1A.

[0051] As described above, the size, shape, and design of the payload 12 can be changed. In the non-exclusive examples shown in FIGS. 1B, 1C, and 1D, the payload 12 is a laser device that includes a generally rectangular box-shaped payload body 12A and a generally cylindrical laser output 12B that emits a laser beam. For example, the laser output 12B can include one or more optical fibers and / or lenses. Further, the payload 12 has a payload center of gravity 12C (shown as a small dashed cross in FIGS. 1C and 1D). The payload center of gravity 12 can also be referred to as the center of gravity of the payload or the object.

[0052] In the implementation forms of FIGS. 1B to 1D, the rectangular payload body 12A includes six rigid side surfaces, which for the sake of convenience of explanation can be labeled as (i) a first payload side surface 13A, (ii) a second payload side surface 13B, (iii) a third payload side surface 13C, (iv) a fourth payload side surface 13D, (v) a fifth payload side surface 13E, and (vi) a sixth payload side surface 13F. In this example, the second payload side surface 13B is spaced apart and opposite the first payload side surface 13A, and the third, fourth, fifth, and sixth payload side surfaces 13C to 13F extend between the first payload side surface 13A and the second payload side surface 13B.

[0053] FIG. 1E is a perspective view of a portion of the connector frame 26 and the vibration damping assembly 24 of FIG. 1A.

[0054] Referring to FIGS. 1B and 1E, in this implementation form, the connector frame 26 provides a rigid structure for supporting and positioning the support system 30 and the actuator system 32 for vibration damping of the payload 12. Further, the connector frame 26 directly and physically connects the support system 30 and the actuator system 32 to the robot 16.

[0055] In the non-exclusive implementation forms of FIGS. 1B and 1E, the connector frame 26 is in the shape of a somewhat open rectangular rigid frame, including six rigid side surfaces, which for the convenience of description can be labeled as (i) a first frame side surface 26A, (ii) a second frame side surface 26B, (iii) a third frame side surface 26C, (iv) a fourth frame side surface 26D, (v) a fifth frame side surface 26E, and (vi) a sixth frame side surface 26F. In this example, (i) the first frame side surface 26A is spaced apart and opposed to the second frame side surface 26B, (ii) the fifth frame side surface 26E and the sixth frame side surface 26F extend between the first frame side surface 26A and the second frame side surface 26B, and (iii) the third frame side surface 26C and the fourth frame side surface 26D extend between the fifth frame side surface 26E and the sixth frame side surface 26F. In this non-exclusive implementation form, the connector frame 26 surrounds the payload 12.

[0056] As described above, referring to FIGS. 1B to 1E, the vibration damping assembly 24 can include an actively controlled low-rigidity support system 30 and an actively controlled actuator system 32. The design of each of these systems 30, 32 can be changed to achieve the desired vibration damping of the payload 12.

[0057] The actively controlled low-rigidity support system 30 extends between the connector frame 26 and the payload 12. In this design, the support system 30 supports the mass of the payload 12 and isolates the payload 12 from high-frequency external disturbances. The design of the support system 30 can be changed. For example, the support system 30 can include one or more low-rigidity supports 36 that directly extend between the connector frame 26 and the payload 12, and the support adjuster 34 (shown in FIG. 1A) can selectively adjust one or more of the low-rigidity supports 36. The coupling between the payload 12 and the support system 30 can be a contact-type coupling or a non-contact-type coupling. The payload 12 may be indirectly supported by the support system 30. For example, the payload 12 may be levitated and supported by magnetic force, attractive force, or other types of forces. Alternatively, another component may be disposed between the payload 12 and the support system 30, and such a component can be coupled to the payload 12.

[0058] In the non-exclusive implementation forms of FIGS. 1B to 1E, the support system 30 includes spaced low-rigidity supports 36 that each extend between the connector frame 26 and the payload 12. In this design, there is one support 36 on each of the six payload sides. For convenience, these supports 36 can be labeled as (i) a first support 36A that extends between the first frame side 26A and the first payload side 13A, (ii) a second support 36B that extends between the second frame side 26B and the second payload side 13B, (iii) a third support 36C that extends between the third frame side 26C and the third payload side 13C, (iv) a fourth support 36D that extends between the fourth frame side 26D and the fourth payload side 13D, (v) a fifth support 36E that extends between the fifth frame side 26E and the fifth payload side 13E, and (vi) a sixth support 36F that extends between the sixth frame side 26F and the sixth payload side 13F.

[0059] In this design, (i) the first support 36A and the second support 36B are aligned along the Z-axis passing through the payload center of gravity 12C, (ii) the third support 36C and the fourth support 36D are aligned along the Y-axis passing through the payload center of gravity 12C, and (iii) the fifth support 36E and the sixth support 36F are aligned along the X-axis passing through the payload center of gravity 12C. Using this design, the six supports 36A - 36F are aligned with the payload center of gravity 12C, and the support system 30 supports the payload 12 through the payload center of gravity 12C along the X-axis, Y-axis, and Z-axis. In other words, the supports 36 are positioned such that their forces act through the center of gravity 12C of the payload 12.

[0060] The design of each support 36 can be changed. For example, each support 36 can be a fluid or air balloon, a gas spring, a piston, or a bellows. In a non-exclusive implementation, each support 36 can include (i) an adaptive pneumatic chamber 38A filled with pneumatic fluid, (ii) a first support pad 38B connecting the chamber 38A to the payload 12, and (iii) a second support pad 38C connecting the chamber 38A to the connector frame 26. Additionally, one or more (e.g., each) of the supports 36 can include a pressure sensor (not shown) that senses the pressure of the pneumatic fluid within each pneumatic chamber 38A. The support 36 can alternatively be referred to as a shock absorber, a buffer, a bumper, or a damper.

[0061] Using this design, the pressure sensors of each support 36 can provide feedback regarding the pressure within each support 36 to a control system 22 (shown in FIG. 1A), and the control system 22 can actively control a support adjuster 34 (shown in FIG. 1A) so as to actively adjust and control the pressure within the chamber 38A of each support 36 individually. This active control of the pressure of the pneumatic fluid within each chamber 38A also actively controls the force generated by each support 36. The support adjuster 34 can include one or more electronic regulators, servo valves, pumps, and reservoirs for adding and removing pneumatic fluid to and from each chamber 38A under the control of the control system 22 for control of the pressure within each chamber 38A.

[0062] Using this design, an external disturbance transmitted to the connector frame 26 moves the connector frame 26. The movement of the connector frame 26 changes (varies) the pressure of one or more of the chambers 38A. The pressure sensors can detect these changes, and the feedback is used to control the support adjuster 34 so as to individually control the pressure within each chamber 38A (e.g., minimize pressure variations) such that the external disturbance is prevented from being transmitted to the payload 12. Further, the support adjuster 34 can individually control the pressure within each chamber 38A to account for changes in the gravitational vector caused by the robot 16 orienting the object 12 at an arbitrary angle with respect to gravity. Alternatively or additionally, the actuator system 32 described below can account for changes in the gravitational vector.

[0063] An optionally actively controlled actuator system 32 extends between the connector frame 26 of the robot 16 and the payload 12. In this design, the actuator system 32 actively generates one or more controllable forces on the payload 12 to further isolate the payload 12 from external disturbances. The control system 22 (shown in FIG. 1A) can actively control the actuator system 32 using feedback from the sensor assembly 20 (shown in FIG. 1A) to cancel out external and internal disturbances. The actuator system 32 provides attenuation of higher bandwidth disturbances.

[0064] The design of the actuator system 32 can be changed. For example, the actuator system 32 can include one or more actuators 40 that extend between the connector frame 26 and the payload 12. Further, one or more of the actuators 40 can act in parallel with one or more of the low-rigidity supports 36. Additionally, the actuator system may utilize an inertial reaction mass to apply a force to the system.

[0065] In the non-exclusive implementations of FIGS. 1B - 1E, the actuator system 32 includes six spaced-apart actuators 40 that each extend between the connector frame 26 and the payload 12. For convenience, these actuators 40 can be labeled as (i) a first actuator 40A that extends between a second frame side 26B and a second payload side 13B, (ii) a second actuator 40B that extends between a third frame side 26C and a third payload side 13C, (iii) a third actuator 40C that extends between the third frame side 26C and the third payload side 13C, (iv) a fourth actuator 40D that extends between a sixth frame side 26F and a sixth payload side 13F, (v) a fifth actuator 40E that extends between the sixth frame side 26F and the sixth payload side 13F, and (vi) a sixth actuator 40F that extends between the sixth frame side 26F and the sixth payload side 13F.

[0066] In this design, (i) the first actuator 40A generates a controllable force along the Z-axis with respect to the payload 12, (ii) the second actuator 40B and the third actuator 40C each generate a separate individually controllable force along the Y-axis with respect to the payload 12, and (iii) the fourth actuator 40D, the fifth actuator 40E, and the sixth actuator 40F each generate a separate individually controllable force along the X-axis with respect to the payload 12.

[0067] Furthermore, the Y-axis forces generated by the second actuator 40B and the third actuator 40C are spaced apart along the Z-axis (e.g., on both sides of the payload center of gravity 12C), and the Y-axis forces can be used to generate a controllable rotational force with respect to the payload 12 about the X-axis. Also, the X-axis forces generated by the fourth actuator 40D and the fifth actuator 40E are spaced apart along the Y-axis (e.g., on both sides of the payload center of gravity 12C), and these X-axis forces can be used to generate a controllable rotational force with respect to the payload 12 about the Z-axis. Somewhat similarly, the X-axis forces generated by the fourth actuator 40D and the sixth actuator 40F are spaced apart along the Z-axis (e.g., on both sides of the payload center of gravity 12C), and these X-axis forces can be used to generate a controllable rotational force with respect to the payload 12 about the Y-axis. Using this design, the actuator 40 can be controlled to position the payload 12 in six degrees of freedom.

[0068] The design of each actuator 40 can be changed. For example, each actuator 40 can be a voice coil actuator, a linear actuator, a rotary actuator, a variable reluctance actuator, or other types of actuators. In a non-exclusive implementation form, each actuator 40 is a voice coil actuator including (i) a magnet array 42A, (ii) a magnet bracket 42B holding the magnet array 42A, (iii) a conductor array 42C, and (iv) a conductor bracket 42D holding the conductor array 42C.

[0069] In FIGS. 1B to 1E, (i) the magnet array 42A and the magnet bracket 42B are fixed to the payload 12 and move with it, and (ii) the conductor array 42C and the conductor bracket 42D are fixed to the connector frame 26 and move with it. Alternatively, for each actuator 40, the conductor array 42C can be connected to the payload 12, and the magnet array 42A can be connected to the connector frame 26.

[0070] Also, in the non-exclusive implementation forms of FIGS. 1B to 1E, (i) the magnet array 42A includes a pair of spaced magnet sets, (ii) the magnet bracket 42B has a substantially "U"-shaped cross-section, (iii) the conductor array 42C includes a single conductor array, and (iv) the conductor bracket 42D has a substantially "T"-shaped cross-section. However, other designs are also possible.

[0071] Additionally, the sensor assembly 20 (shown in FIG. 1A) can include sensors (not shown) that measure (i) the relative position, velocity, acceleration of the magnet array 42A and the conductor array 42C of each actuator 40, and / or (ii) the six-degree-of-freedom attitude of the payload 12 with respect to any subject, and / or (iii) the relative position, velocity, acceleration of the moving parts.

[0072] The number and / or position of the sensors can be changed. Using this design, the sensor assembly 20 can generate feedback regarding the relative position of the magnet array 42A and the conductor array 42C of the actuator 40 in addition to the feedback regarding the position of the payload 12 and / or the position of the moving parts. This feedback can be used by the control system 22 (shown in FIG. 1A) to actively control (DC current) the actuator 40 so as to actively adjust the force generated by each actuator 40 individually. This active control of the force by each actuator 40 can be used to always maintain the position of the payload 12 under the control of the control system 22.

[0073] Note that the sensor assembly 20 is not limited to measuring the relative positions of the magnet array 42A and the conductor array 42C. For example, the sensor assembly 20 can include one or more sensors arranged to measure the six-degree-of-freedom pose of the payload 12 relative to the moving parts. The number and positions of the sensors required to monitor the six-degree-of-freedom pose of the payload 12 can be changed. Feedback can be used to actively control the forces exerted by each actuator 40.

[0074] As provided herein, an external disturbance transmitted to the connector frame 26 moves the connector frame 26. At the same time, the forces exerted by each actuator 40 can be actively adjusted to maintain the desired position of the payload 12. Using this design, multiple high-bandwidth actuators 40 can be controlled to improve force control performance. The forces from these actuators 40 can be used in conjunction with, or instead of, controlling the air pressure within the support 36.

[0075] Thus, to provide high-precision and stable operation of the payload 12, the vibration damping assembly 24 enables the robot 16 to position the payload 12 in space while isolating it from unwanted vibrations and positioning errors of the robot 16, as well as canceling external disturbances on the payload 12.

[0076] Note that in the implementation shown in FIGS. 1A - 1E, the support 36 and the actuators 40 are directly fixed to the payload 12. Alternatively, the vibration damping assembly 24 can include a second connector frame (not shown in FIGS. 1A - 1E) that couples (fixes) the support 36 and / or the actuators 40 to the payload 12.

[0077] Furthermore, in the implementation shown in FIGS. 1A - 1E, the low-rigidity support 36 is arranged parallel to three perpendicular axes, and / or the actuators 40 are arranged parallel to three perpendicular axes.

[0078] FIG. 2 is a simplified perspective view of another embodiment of (i) a portion of the robot 216 including the mount 216B, (ii) the connector frame 226 in the mount 216B, (ii) the payload 212, and (iii) the vibration damping assembly 224. In this implementation, the connector frame 226, the payload 212, and the vibration damping assembly 224 are very similar but slightly different from the corresponding components described above.

[0079] In this embodiment, the vibration damping assembly 224 includes a support system 230 rather than an actuator system. However, this design can be modified to include an actuator system.

[0080] In FIG. 2, the support system 230 includes a plurality of supports 236A-236D for one or more of the payload side surfaces 213A, 213C, 213D. For example, the support system 230 can be designed to have (i) two spaced first supports 236A extending between the first frame side surface 226A and the first payload side surface 213A, (ii) four spaced second supports 236B (only one is partially visible) extending between the second frame side surface 226B and the second payload side surface (not visible), (iii) two spaced third supports 236C extending between the third frame side surface 226C and the third payload side surface 213C, and (iv) two spaced fourth supports 236D extending between the fourth frame side surface 226D and the fourth payload side surface 213D. In this design, two sides of the payload 212 are not engaged with the support system 230. This configuration makes it possible to control the rotational stiffness of the vibration damping assembly 224.

[0081] In this design, the supports 236A-236D may be the same as the corresponding components described above, and the support adjuster 34 (shown in FIG. 1A) can be controlled to individually control the pressure of each of the supports 236A-236D.

[0082] In the implementation form of FIG. 2, the supports 236A to 236D are directly fixed to the payload 212. Alternatively, the vibration damping assembly 224 can include a second connector frame (not shown in FIG. 2) that couples (and fixes) the supports 236A to 236D to the payload 12.

[0083] In the implementation form of FIG. 2, the connector frame 226 does not surround the payload 212.

[0084] FIG. 3A is a simplified perspective view of another implementation form of a machine 310 including a payload 312, a robot 316, a sensor assembly 320 (shown as a box), a control system 322 (shown as a box), and a robot assembly 314 including a vibration damping assembly 324. In this implementation form, the robot 316, the sensor assembly 320, and the control system 322 are the same as the corresponding components shown in FIGS. 1A to 1E described above. However, in this implementation form, the payload 312 and the vibration damping assembly 324 are slightly different. In this implementation form, the vibration damping assembly 324 is also uniquely designed to suppress the transmission of vibrations of the assembly 314 and / or the support 18 (shown in FIG. 1A) to the payload 312.

[0085] As an alternative non-exclusive example, the vibration damping assembly 324 can be used in any of a conventional processing machine (e.g., a laser processing machine or a machine tool such as a machining center), a transport machine, or the machines described herein. In this design, the payload 312 can be referred to as an object. Note that the payload 312 can be considered to be part of a machine as described above.

[0086] FIG. 3B is a perspective view of a portion of the payload 312, vibration damping assembly 324, and robot 316 of FIG. 3A. In this implementation, the payload body 312A has a polygonal cross-sectional shape. Further, the vibration damping assembly 324 connects the payload 312 to the robot 316, and the vibration damping assembly 324 does not surround the payload 312. Thus, the same vibration damping assembly 324 design can be used with many different payloads 312 (or other objects), and it is easier to attach and remove the payload 312 to and from the vibration damping assembly 324.

[0087] In the implementation of FIG. 3B, the vibration damping assembly 324 includes a first connector frame 326, a second connector frame 327, an actively controlled low stiffness support system 330, and an actively controlled actuator system 332. Alternatively, for example, the vibration damping assembly 324 may be designed without the actuator system 332.

[0088] In this design, the first connector frame 326 can attach the vibration damping assembly 324, the second connector frame 327, and the payload 312 to the robot 316. In other words, the first connector frame 326, the vibration damping assembly 324, the second connector frame 327, and the payload 312 can function as modules that can be selectively added to the robot 316 or other processing machines.

[0089] It should also be noted that the first connector frame 326 can alternatively be described as being part of the robot 316, and the second connector frame 327 can be described as being part of the payload 312. Further alternatively, the second connector frame 327 can be omitted, and the support system 330 and the actuator system 332 can be directly attached to the payload body 312A.

[0090] The first connector frame 326 provides a rigid structure for (i) supporting the support system 330 and the actuator system 332, (ii) connecting the support system 330 and the actuator system 332 to the robot 316, and (iii) properly positioning the support system 330 and the actuator system 332 for vibration damping of the payload 312. The design of the first connector frame 326 can be changed according to the designs of the support system 330 and the actuator system 332.

[0091] In FIG. 3B, the first connector frame 326 is in the shape of a somewhat open polygonal frame and, for the sake of convenience of explanation, includes (i) a first frame side surface 326A, (ii) a second frame side surface 326B, (iii) a third frame side surface 326C, (iv) a fourth frame side surface 326D, (v) a fifth frame side surface 326E, and (vi) six rigid side surfaces that may be labeled with a sixth frame side surface (not shown in FIG. 3B), and an upper frame side surface 326G. In this example, (i) the upper frame side surface 326G is connected to the robot 316, and (ii) the first frame side surface 326A includes a cantilever region 326H for holding a part of the support system 330.

[0092] The design of the second connector frame 327 can also be changed according to the designs of the support system 330 and the actuator system 332. FIG. 3C is a perspective view of a part of the robot 316 and the vibration damping assembly 324 (shown in FIG. 3B) without the first connector frame 326. FIG. 3D is a perspective view of the payload 312 and the vibration damping assembly 324 (shown in FIG. 3B) without the first connector frame 326.

[0093] Referring to FIGS. 3B - 3D, the second connector frame 327 provides a rigid structure for supporting the support system 330 and the actuator system 332 and connecting them to the payload 312. The design of the second connector frame 327 can be changed according to the designs of the support system 330 and the actuator system 332. In a non - exclusive implementation form, the second connector frame 327 is in the shape of a somewhat open polygonal frame, and for the sake of convenience of description, it can be labeled with (i) a first wall 327A, (ii) a second wall 327B, (iii) a third wall 327C, (iv) a fourth wall 327D, (v) a fifth wall 327E, and (vi) a sixth wall 327F, which are six rigid sides, and an upper wall assembly 327G. In this example, (i) the upper wall assembly 327G includes a plurality of spaced pads, and (ii) the first wall 327A includes a cantilever region 327H for holding a part of the support system 330. Also, the second connector frame 327 can include an intermediate wall 327I.

[0094] Using this design, since the support system 330 and the actuator system 332 are directly fixed to the second connector frame 327 rather than to the payload 312, the payload 312 can be easily directly attached to or removed from the vibration damping assembly 326. Further, the payload 312 can be easily changed / replaced without interfering with the vibration damping assembly 326.

[0095] FIG. 3E is a side view of a part of the robot 316 and the support assembly 330. FIG. 3F is a bottom view of a part of the robot 316 and the support assembly 330. FIG. 3G is a perspective view of a part of the robot 316 and the support assembly 330. It should be noted that FIGS. 3E - 3G each include a triangular or tetrahedral contour to show the positioning of the support assembly 330. This contour is not part of the design.

[0096] Referring to FIGS. 3B to 3G, the actively controlled low-rigidity support system 330 extends between the first connector frame 326 and the second connector frame 327. Further, the support system 330 supports the mass of the second connector frame 327 and the payload 312 and isolates the payload 312 from high-frequency external disturbances.

[0097] In the non-exclusive implementation forms of FIGS. 3B to 3G, the support system 330 includes four spaced low-rigidity supports 336 each extending between a first connector frame 326 and a second connector frame 327. In this design, the four pneumatic supports 336 are arranged in a tetrahedron-based configuration that points to the payload center of gravity 350 (indicated by a small dashed cross in FIGS. 3F and 3G). The payload center of gravity 350 is the center of gravity of the entire payload, which includes (in this example) the payload 312, the second connector frame 327, the portion of the pneumatic support 336 fixed to the second connector frame 327 (e.g., the movable member), and the portion of the actuator 340 fixed to the second connector frame 327. For example, each support 336 can have its own alignment axis 337. In the tetrahedron-based configuration, the second connector frame 327 is designed to hold the supports 336 such that the alignment axis 337 of each support 336 is perpendicular to a different face of the virtual tetrahedron and each alignment axis 337 extends through the payload center of gravity 350. In this implementation, the second connector frame 327 is designed such that each of the supports 336 is positioned such that its force is perpendicular to a separate one of the faces of the virtual tetrahedron. More specifically, (i) the first support 336A is positioned to direct its force through the payload center of gravity 350 perpendicular to the first face of the virtual tetrahedron, (ii) the second support 336B is positioned to direct its force through the payload center of gravity 350 perpendicular to the second face of the virtual tetrahedron, (iii) the third support 336C is positioned to direct its force through the payload center of gravity 350 perpendicular to the third face of the virtual tetrahedron shape, and (iv) the fourth support 336D is positioned to direct its force through the payload center of gravity 350 perpendicular to the fourth face of the virtual tetrahedron. In this design, by aligning the axis 337 perpendicular to the face of the virtual tetrahedron, it is ensured that the supports 336 are oriented such that the angle between any two supports 336 is the same. It should be noted that the supports 336 do not need to be arranged on the faces of the virtual tetrahedron and the position of the tetrahedron is irrelevant. Instead, the alignment axis 337 of each of the supports 336 needs to be perpendicular to the face of the tetrahedron.In other words, the virtual tetrahedron is a way to establish the angular directions of each support 336. In short, using this design, in effect, the alignment axis 337 of the support 336 is oriented towards a single position (e.g., the payload center of gravity 350). As a result, the four supports 336 are symmetrically positioned and their forces act through the payload center of gravity 350. Using this design, the position of the virtual tetrahedron changes according to the position of the payload center of gravity 350.

[0098] Alternatively, the payload center of gravity 350 may be located outside the center of the tetrahedron or may be located within the boundaries of the tetrahedron. However, it should be noted that the supports 336 may be configured in an arrangement other than a tetrahedron. For example, if the number of supports 336 is more than four, the supports 336 may be configured to have an axis 337 perpendicular to the faces of a polyhedron having that number of faces. In other examples, the supports 336 may be configured such that the angles between them are not equal and vary by less than 10, 20, 30, or 50 percent.

[0099] For convenience, these supports 336 can be labeled as (i) a first support 336A extending between a first frame side surface 326A of the first connector frame 326 and a first wall 327A of the second connector frame 327, (ii) a second support 336B extending between a third frame side surface 326C of the first connector frame 326 and a third wall 327C of the second connector frame 327, (iii) a third support 336C extending between a fifth frame side surface 326E of the first connector frame 326 and a fifth wall 327E of the second connector frame 327, and (iv) a fourth support 336D extending between an upper frame side surface 326G of the first connector frame 326 and an upper wall assembly 327G of the second connector frame 327.

[0100] The design of each support 336 can be similar to the pneumatic support 36 described above. Further, one or more (e.g., each) of the supports 336 can include a pressure sensor (not shown) that senses the pressure of the pneumatic fluid within its respective pneumatic chamber.

[0101] Using this design, the pressure sensors for each support 336 can provide feedback regarding the pressure of the support 336 to a control system 322 (shown in FIG. 3A), and the control system 322 can actively control a support adjuster 334 (shown in FIG. 3A) so as to actively adjust and control the pressure within each support 336 individually. This active control of the pressure also actively controls the force generated by each support 336.

[0102] As a result, an external disturbance transmitted to the first connector frame 326 causes the first connector frame 326 to move. The movement of the connector frame 326 relative to the second connector frame 327 changes (varies) the pressure within the support 336. The pressure sensors can detect these changes, and the feedback is used to control the support adjuster 334 so as to individually control the pressure within each support 336 (e.g., minimize pressure variations) such that the transmission of the external disturbance to the second connector frame 327 and thus to the payload 312 is suppressed.

[0103] Similarly, an optionally actively controlled actuator system 332 extends between a first connector frame 326 and a second connector frame 327. In the non-exclusive implementation forms of FIGS. 3B-3C, the actuator system 332 includes six spaced-apart actuators 340 each extending between the first connector frame 326 and the second connector frame 327. For convenience, these actuators 340 are (i) a first actuator 340A extending along the X axis between a sixth wall 327F of the second connector frame 327 and a sixth frame side surface 326F of the first connector frame 326, (ii) a second actuator 340B and a third actuator 340C extending along the Y axis between an intermediate wall 3271 of the second connector frame 327 and the first connector frame 326, and (iii) a fourth actuator 340D, a fifth actuator 340E, and a sixth actuator 340F extending along the Z axis between an upper wall assembly 327G of the second connector frame 327 and an upper frame side surface 326G of the first connector frame 326 and may be labeled.

[0104] In this design, (i) the first actuator 340A generates a controllable force along the X axis with respect to the second connector frame 327, (ii) the second actuator 340B and the third actuator 340C each generate a separate individually controllable force along the Y axis with respect to the second connector frame 327, and (iii) the fourth actuator 340D, the fifth actuator 340E, and the sixth actuator 340F each generate a separate individually controllable force along the Z axis with respect to the second connector frame 327.

[0105] Furthermore, the Y-axis forces generated by the second actuator 340B and the third actuator 340C are spaced apart along the X-axis, and thus the Y-axis forces can be used to generate a controllable rotational force on the payload 12 about the Z-axis. Also, the Z-axis forces generated by the fourth actuator 340D, the fifth actuator 340E, and the sixth actuator 340F are spaced apart and can be used to generate controllable rotational forces on the payload 12 about the X-axis and about the Y-axis. Using this design, the actuator 340 can be controlled to position the second connector frame 327 and the payload 312 in six degrees of freedom.

[0106] The design of each actuator 340 can be somewhat similar to the corresponding components described above. In a non-exclusive implementation, each actuator 340 is a voice coil actuator that includes (i) a first actuator component 342A fixed to the first connector frame 326, and (ii) a second actuator component 342B fixed to the second connector frame 327. In this design, one of the actuator components 342A, 342B can include a magnet array, and the other actuator component 342B, 342A can include a conductor array. For example, the conductor array may be in an annular shape, and the magnet array can include a pair of spaced annular magnet sets (not shown).

[0107] Using this design, the sensor assembly 320 (shown in FIG. 3A) can provide feedback regarding the position of the payload 312 and / or the position of the moving parts, and / or the inertial reference position, to the control system 322 (shown in FIG. 3A), and the control system 322 can actively control (DC current) the actuator 340 to actively adjust the forces generated by each actuator 340 individually. This active control of the forces by each actuator 340 can be used to quickly maintain the position of the payload 312 under the control of the control system 322.

[0108] As provided herein, referring to FIGS. 1A, 2, and 3A, when robots 16, 216, 316 rotate payloads 12, 212, 312 in different directions, control systems 22, 322 can calculate the forces required from respective supports 36, 236, 336 to counteract the gravity acting on payloads 12, 212, 312. The pressure supplied to each support 36, 236, 336 is changed by the electronic regulators of support adjusters 34, 334 to match the calculated amount. Control systems 22, 322 can also calculate the forces required to provide a desired acceleration to the payload.

[0109] The design of control systems 22, 322 can be changed to achieve the desired characteristics of vibration damping assemblies 24, 224, 324. In a non-exclusive implementation, control systems 22, 322 may be implemented according to control block diagram 422 shown in FIG. 4 to control vibration damping assemblies 24, 324 to accurately position payloads 12, 312. Referring to FIG. 4, two features of control block diagram 422 are: (i) an actuator 440 is used to correct the measurement error of the force generated by support 436, and (ii) a certain low-frequency component from the actuator value generated by actuator 440 is fed forward to support adjuster 434 for adjustment (control) of support 436.

[0110] In FIG. 4, control block diagram 422 includes a feedback control loop 460, a feedforward control path 462, and a low stiffness support compensation path 464. Starting from the left side of block diagram 422, the desired trajectory of payload 412 (along the X, Y, and Z axes and around the X, Y, and Z axes) at a particular instant is targeted at block 466.

[0111] Regarding the feedback control loop 460, the actual (measured) position 468 of the payload 412 is measured by the sensor assemblies 20, 320 (shown in FIGS. 1A and 3A). The actual position 468 is compared with the desired trajectory 466, and an error signal is generated. The error signal is supplied to a feedback controller 470 (e.g., a PI+Lead controller) to generate feedback force ("FB force") commands along or around the X, Y, and / or Z axes necessary to correct subsequent errors (e.g., the force required to move the payload 412 along the desired trajectory).

[0112] Regarding the feedforward control path 462, the desired trajectory 466 is supplied to a feedforward controller 472 (e.g., the sum of signals proportional to the desired acceleration and velocity) to generate feedforward force ("FF force") commands along or around the X, Y, and / or Z axes.

[0113] The feedback force command is added to the feedforward force command to create a total force command ("total force").

[0114] Regarding the low-rigidity support compensation loop 464, the desired trajectory 466 is supplied to a feedforward controller 474 (e.g., kinematic calculations in the expected gravity direction) to generate feedforward support force ("FF support force") commands along or around the X, Y, and / or Z axes for the low-rigidity supports 436 necessary to compensate for the influence of gravity on the payload 412. Next, the total force commands from the feedback control loop 460 and the feedforward path 462 are directed through a low-pass filter 475 and combined with the feedforward support force commands to generate pressure commands for the low-rigidity supports 30, 330.

[0115] In the example of FIG. 4, the low-rigidity support compensation loop 464 includes a support feedback loop 476. In this loop 476, at block 478, the pressure within each low-rigidity support 436 is measured. The measured pneumatic signal is combined with the pressure command to generate a pressure error. The pressure error is then directed to a support controller 480 (e.g., a PI controller), which controls a support adjuster (i.e., an electronic regulator) 434 that controls the pressure within the support 436. The pressure within the support 436 generates a pneumatic pressure for each support 436 with respect to the payload 412.

[0116] Returning to the feedback control loop 460, the pressure error from the low-rigidity support compensation loop 464 is combined with the total force command and directed to an amplifier 482 that determines the current directed to the actuator 440 to generate an actuator force for each actuator 440 with respect to the payload 412.

[0117] Using this design, the actuator force and the pneumatic pressure apply a resultant force to the payload 412 that can move the payload 412 along a desired trajectory. Block 484 represents how the inertia of the payload 412 determines the position of the payload 412 as the sum of the applied forces.

[0118] Since the pressure error from the low-rigidity support compensation loop 464 is directed towards the feedback control loop 460, it should be noted that the actuator 440 is used to correct the measurement error (pneumatic error) of the force generated by the support 436. Specifically, this enables the faster response of the actuator 440 to compensate for the relatively slow response of the pneumatic control of the support 436. Further, since the total force from the feedback control loop 460 is feed-forwarded to the low-rigidity support compensation loop 464 through the low-pass filter 475, the support 436 is used to adjust a certain low-frequency component of the actuator force generated by the actuator 440, thereby reducing the power consumption, heat dissipation, and other effects of the actuator 440. As used herein, in a particular implementation, the low frequency shall mean a frequency less than 1, 3, 5, 8, or 10 Hertz.

[0119] Figures 5A to 5D are alternative perspective views of another different implementation of the first connector frame 526, and Figures 5E to 5H are alternative perspective views of the corresponding second connector frame 527. It should be noted that the illustrated connector frames 526, 527 are slightly different in shape from the corresponding components shown in FIG. 3B above. However, in Figures 5A to 5D, the connector frames 526, 527 are still configured to be connected by the support 336 (shown in FIG. 3B) and the actuator 340 (shown in FIG. 3B) having a tetrahedral configuration.

[0120] FIG. 6 is a simplified side view of another implementation of machine 610. In this implementation, machine 610 includes a vehicle 611 (e.g., an automated guided vehicle (AGV) or an aerial drone), a robotic arm 616, and a vibration damping assembly 624 (shown as a box) that couples robotic arm 616 to aerial vehicle 611. Vibration damping assembly 624 may be similar to the corresponding assembly described above, and vibration damping assembly 624 suppresses transmission to payload 612 that aerial vehicle 611 is positioned by robotic arm 616 and machine 610. In FIG. 6, payload 612 is a laser that directs a beam at target surface 628. Alternatively, machine 610 positions other types of payloads 612. Further, vehicle 611 may be other types of vehicles, such as water, underwater, or amphibious vehicles.

[0121] FIG. 7 is a simplified side view of yet another implementation of machine 710. In this implementation, machine 710 includes a vehicle 711 (e.g., an automatic or powered cart), a robotic arm 716 moved by vehicle 711, and a vibration damping assembly 724 that couples payload 712 to robotic arm 716. Vibration damping assembly 724 may be similar to the corresponding assembly described above, and vibration damping assembly 724 suppresses transmission of vibrations from vehicle 711, the surface (not shown) supporting vehicle 711, and robotic arm 716 to payload 712.

[0122] Note that the vibration damping assemblies disclosed herein can be used with other machines.

[0123] As will be readily appreciated by those skilled in the art, the configuration and / or shape of the payloads 12, 212, 312, 412 can be varied according to the requirements and objectives of each particular application. Similarly, the type and configuration of the supports 36, 236, 336, 436 and / or the actuators 40, 240, 340, 440 can also be varied. In omnidirectional support, at least four supports 36, 236, 336, 436 are required for supports that can generate force in only one direction (such as support 36) (i.e., since the internal air pressure is always higher than atmospheric pressure, these can "push" but cannot "pull"). In an omnidirectional system that utilizes supports 36, 236, 336, 436 capable of generating both positive and negative forces, the minimum number of supports is three. In applications where the movement of the payloads 12, 212, 312, 412 is restricted to a limited range of directions with respect to gravity, fewer supports 36, 236, 336, 436 can be used. Similarly, at least six actuators 40, 240, 340, 440 are required for six degrees of freedom (6DOF) control. In some applications, the movement of the payloads 12, 212, 312, 412 may not require control of all 6DOF, and fewer actuators 40, 240, 340, 440 can be used. Additionally, it is always possible to use more supports 36, 236, 336, 436 and / or actuators 40, 240, 340, 440 than these minimum numbers.

[0124] Although several different embodiments of the machine have been illustrated and described herein, it is understood that, subject to such combinations meeting the intent of the present disclosure, one or more features of any one embodiment can be combined with one or more features of one or more of the other embodiments.

[0125] Furthermore, although some exemplary aspects and embodiments of the machine have been described above, those skilled in the art will recognize these specific modifications, substitutions, additions, and subcombinations. Accordingly, the following appended claims and the claims referred to below are intended to be construed to include all such modifications, substitutions, additions, and subcombinations as fall within their true spirit and scope.

Claims

1. A machine for positioning an object, the machine comprising: a movable part; a vibration damping assembly for coupling the object to the movable part, the vibration damping assembly damping the magnitude of vibrations transmitted from the movable part to the object; and the movable part is a link within a multi-degree-of-freedom robotic arm, and the vibration damping assembly damps multi-degree-of-freedom vibrations; the vibration damping assembly includes a plurality of spaced low-rigidity supports connecting the object to the movable part; the force generated by each low-rigidity support passes through the center of gravity of the object; a machine.

2. The machine according to claim 1, wherein the movable part is the link within a robot including a link actuator for moving the link. The machine according to claim 1.

3. The machine according to claim 1 or 2, wherein the movable part is a link within a six-degree-of-freedom robotic arm, and the vibration damping assembly damps six-degree-of-freedom vibrations. The machine according to claim 1 or 2.

4. The machine according to claim 1, wherein the movable part is a mobile robot vehicle. The machine according to claim 1.

5. The machine according to claim 1, wherein the movable part is a mobile vehicle. The machine according to claim 1.

6. The machine according to claim 1, wherein the movable part is an aerial drone. The machine according to claim 1.

7. The machine according to claim 1, wherein the movable part is a vehicle. The machine according to claim 1.

8. The machine according to claim 1, wherein the low-rigidity support includes a spring. The machine according to claim 1.

9. The machine according to claim 1, wherein the low-rigidity support includes a bellows. The machine according to claim 1.

10. The machine according to claim 1, wherein the low-rigidity support includes a pneumatic chamber. The machine according to claim 1.

11. A machine for positioning an object, the machine comprising: a movable part; a vibration damping assembly for coupling the object to the movable part, the vibration damping assembly damping the magnitude of vibrations transmitted from the movable part to the object; and the movable part is a link within a multi-degree-of-freedom robotic arm, and the vibration damping assembly damps multi-degree-of-freedom vibrations; the vibration damping assembly includes a plurality of spaced low-rigidity supports connecting the object to the movable part; the low-rigidity supports are arranged parallel to three perpendicular axes; a machine.

12. A machine for positioning an object, the machine comprising: a movable part; A vibration damping assembly that couples the object to the movable part, the vibration damping assembly damping the magnitude of vibrations transmitted from the movable part to the object, and comprising the movable part is a link within a multi-degree-of-freedom robotic arm, and the vibration damping assembly damps multi-degree-of-freedom vibrations, the vibration damping assembly includes a plurality of spaced low-rigidity supports that connect the object to the movable part, the low-rigidity supports are arranged in a tetrahedral configuration, Machine

13. further comprising a control system that actively controls the forces generated by each low-rigidity support, The machine according to any one of claims 1 to 11.

14. the vibration damping assembly includes at least one actuator that connects the object to the movable part, The machine according to any one of claims 1 to 12.

15. the vibration damping assembly includes a plurality of spaced actuators that connect the object to the movable part, at least one of the plurality of spaced actuators is arranged to be able to generate a force in a direction different from that of the other actuators, The machine according to claim 13.

16. the different directions include at least three different directions, The machine according to claim 15.

17. A machine for positioning an object, the machine comprising a movable part, and a vibration damping assembly that couples the object to the movable part, the vibration damping assembly damping the magnitude of vibrations transmitted from the movable part to the object, and comprising the movable part is a link within a multi-degree-of-freedom robotic arm, and the vibration damping assembly damps multi-degree-of-freedom vibrations, the vibration damping assembly includes at least one low-rigidity support that connects the object to the movable part, further comprising a control system that actively controls the forces generated by each low-rigidity support, the vibration damping assembly includes a plurality of spaced actuators that connect the object to the movable part, at least one of the plurality of spaced actuators is arranged to be able to generate a force in a direction different from that of the other actuators, the plurality of spaced actuators are six in number, Machine

18. at least one support and at least one actuator act in parallel, The machine according to any one of claims 13 and 14.

19. Further comprising a sensor assembly that provides feedback, and a control system that actively controls the vibration damping assembly so as to suppress the vibration of the movable part from being transmitted to the object. The machine according to any one of claims 1 to 15.

20. The movable part is a component of a processing machine. The machine according to claim 1.

21. The movable part is a component of a laser processing machine, and the object is at least a part of a laser device. The machine according to claim 1.

22. A robot assembly for positioning a payload, the robot assembly comprising: A robot including links and link actuators for moving the links; A vibration damping assembly that couples the payload to the robot, the vibration damping assembly damping the magnitude of vibrations transmitted from the robot to the payload. Comprising: The link is part of a multi-degree-of-freedom robotic arm, and the vibration damping assembly damps multi-degree-of-freedom vibrations. The vibration damping assembly includes at least one low-rigidity support that connects the payload to the robot. Further comprising a control system that actively controls the force generated by each low-rigidity support. The force generated by each low-rigidity support passes through the center of gravity of the payload. Robot assembly.

23. The link is part of a six-degree-of-freedom robotic arm, and the vibration damping assembly damps six-degree-of-freedom vibrations. The robot assembly according to claim 22.

24. The low-rigidity support includes a spring. The robot assembly according to claim 22.

25. The low-rigidity support includes a bellows. The robot assembly according to claim 22.

26. The low-rigidity support includes a pneumatic chamber. The robot assembly according to claim 22.

27. The vibration damping assembly includes a plurality of spaced low-rigidity supports that connect the payload to the robot. The robot assembly according to claim 22.

28. A robot assembly for positioning a payload, the robot assembly comprising: A robot including links and link actuators for moving the links; A vibration damping assembly that couples the payload to the robot, the vibration damping assembly damping the magnitude of vibrations transmitted from the robot to the payload, and comprising the link is part of a multi-degree-of-freedom robotic arm, and the vibration damping assembly damps multi-degree-of-freedom vibrations, the vibration damping assembly includes at least one low-rigidity support that connects the payload to the robot, further comprising a control system that actively controls the forces generated by each low-rigidity support, the low-rigidity supports are arranged parallel to three perpendicular axes, robotic assembly. **Claim 29**: A robotic assembly for positioning a payload, the robotic assembly comprising a robot including a link and a link actuator for moving the link, and a vibration damping assembly that couples the payload to the robot, the vibration damping assembly damping the magnitude of vibrations transmitted from the robot to the payload, and comprising the link is part of a multi-degree-of-freedom robotic arm, and the vibration damping assembly damps multi-degree-of-freedom vibrations, the vibration damping assembly includes at least one low-rigidity support that connects the payload to the robot, further comprising a control system that actively controls the forces generated by each low-rigidity support, the low-rigidity supports are arranged in a tetrahedral configuration, robotic assembly. **Claim 30** the vibration damping assembly includes at least one actuator that connects an object to a moving part, the robotic assembly according to claim 22. **Claim 31** the vibration damping assembly includes a plurality of spaced-apart actuators that connect the object to the moving part, at least one of the plurality of spaced-apart actuators is arranged to be able to generate a force in a direction different from that of the other actuators, the robotic assembly according to claim 30. **Claim 32** the different directions include at least three different directions, the robotic assembly according to claim 31. **Claim 33**: A robotic assembly for positioning a payload, the robotic assembly comprising a robot including a link and a link actuator for moving the link, A vibration damping assembly that couples the payload to the robot, the vibration damping assembly attenuating the magnitude of vibrations transmitted from the robot to the payload, and comprising the link is part of a multi-degree-of-freedom robotic arm, and the vibration damping assembly attenuates multi-degree-of-freedom vibrations, the vibration damping assembly includes at least one low-rigidity support that connects the payload to the robot, the vibration damping assembly includes a plurality of spaced actuators that connect an object to a movable part, at least one of the plurality of spaced actuators is arranged to be able to generate a force in a direction different from that of the other actuators, the plurality of spaced actuators are six, Robotic assembly.

34. At least one support and at least one actuator act in parallel, The robotic assembly according to any one of claims 22 and 30.

35. Further comprising a sensor assembly that provides feedback and a control system that actively controls the vibration damping assembly to attenuate the magnitude of vibrations transmitted from the robot to the payload, The robotic assembly according to claim 22.

36. The movable part is a mobile robot vehicle, The robotic assembly according to claim 30.

37. The movable part is a mobile vehicle, The robotic assembly according to claim 30.

38. The movable part is an aerial drone, The robotic assembly according to claim 30.

39. The movable part is a vehicle, The robotic assembly according to claim 30.

40. A machine comprising the robotic assembly according to claim 22 and the payload.

41. The payload includes a laser device, The machine according to claim 40.

42. An assembly that couples an object to a movable part, the assembly comprising a plurality of spaced low-rigidity supports that couple the object to the movable part, a sensor assembly that provides feedback, and a control system that actively controls the low-rigidity support to attenuate the magnitude of vibrations transmitted from the movable part to the object using the feedback comprising The control system actively controls the low-rigidity supports so as to attenuate the magnitude of vibrations transmitted from the movable parts to the object in multiple degrees of freedom. Each low-rigidity support includes a pneumatic chamber. The control system actively controls the forces generated by each low-rigidity support. The forces generated by each low-rigidity support pass through the center of gravity of the object. Assembly.

43. The control system actively controls the low-rigidity supports so as to attenuate the magnitude of vibrations transmitted from the movable parts to the object in six degrees of freedom. The assembly according to claim 42.

44. An assembly for coupling an object to a movable part, the assembly comprising: a plurality of spaced low-rigidity supports for coupling the object to the movable part; a sensor assembly for providing feedback; a control system for actively controlling the low-rigidity supports using the feedback to attenuate the magnitude of vibrations transmitted from the movable parts to the object; and. The control system actively controls the low-rigidity supports so as to attenuate the magnitude of vibrations transmitted from the movable parts to the object in multiple degrees of freedom. Each low-rigidity support includes a pneumatic chamber. The control system actively controls the forces generated by each low-rigidity support. The low-rigidity supports are arranged in a tetrahedral configuration. Assembly.

45. An assembly for coupling an object to a movable part, the assembly comprising: a plurality of spaced low-rigidity supports for coupling the object to the movable part; a sensor assembly for providing feedback; a control system for actively controlling the low-rigidity supports using the feedback to attenuate the magnitude of vibrations transmitted from the movable parts to the object; and. The control system actively controls the low-rigidity supports so as to attenuate the magnitude of vibrations transmitted from the movable parts to the object in multiple degrees of freedom. Each low-rigidity support includes a pneumatic chamber. The control system actively controls the forces generated by each low-rigidity support. The low-rigidity supports are arranged parallel to three perpendicular axes. Assembly.

46. The assembly further comprises a plurality of spaced actuators for connecting the object to the movable part. At least one of the plurality of spaced actuators is arranged to be able to generate a force in a direction different from that of the other actuators. The control system actively controls the actuator so as to at least partially suppress the transmission of vibrations of the movable part to the object. The assembly according to any one of claims 42, 44, and 45. **Claim 47** The different directions include at least three different directions. The assembly according to claim 46. **Claim 48** An assembly for coupling an object to a movable part, the assembly comprising: a plurality of spaced low-rigidity supports for coupling the object to the movable part; a sensor assembly for providing feedback; a control system that actively controls the low-rigidity supports using the feedback to attenuate the magnitude of vibrations transmitted from the movable part to the object and comprising: The control system actively controls the low-rigidity supports so as to attenuate the magnitude of vibrations transmitted from the movable part to the object in multiple degrees of freedom. Each low-rigidity support includes a pneumatic chamber. The control system actively controls the force generated by each low-rigidity support. The force generated by each low-rigidity support passes through the center of gravity of the object. The assembly further comprises a plurality of spaced actuators connecting the object to the movable part. At least one of the plurality of spaced actuators is arranged to be able to generate a force in a direction different from that of the other actuators. The control system actively controls the actuator so as to at least partially suppress the transmission of vibrations of the movable part to the object. There are six of the plurality of spaced actuators. Assembly. **Claim 49** An assembly for coupling an object to a movable part, the assembly comprising: a plurality of spaced low-rigidity supports for coupling the object to the movable part; a sensor assembly for providing feedback; a control system that actively controls the low-rigidity supports using the feedback to attenuate the magnitude of vibrations transmitted from the movable part to the object and comprising: The control system actively controls the low-rigidity supports so as to attenuate the magnitude of vibrations transmitted from the movable part to the object in multiple degrees of freedom. The assembly further comprises a first connector frame fixed to the movable part and a second connector frame holding the object, and the plurality of spaced low-rigidity supports extend between the first connector frame and the second connector frame. Assembly.

50. A machine comprising the assembly according to claim 42, the movable part, and the object.

51. The movable part is a component of a robot, and the object is a payload, The machine according to claim 50.

52. The movable part is a mobile robot vehicle, The machine according to claim 50.

53. The movable part is a vehicle, The machine according to claim 50.

54. The movable part is an aircraft vehicle, The machine according to claim 50.

55. A laser including a laser output, A robot, A vibration damping assembly that couples the laser output to the robot, the vibration damping assembly damping the magnitude of vibrations transmitted from the robot to the laser output, Comprising, The robot includes a multi-degree-of-freedom robot arm, and the vibration damping assembly damps multi-degree-of-freedom vibrations, The vibration damping assembly includes a plurality of spaced low-rigidity supports that connect the laser output to the robot, The force generated by each low-rigidity support passes through the center of gravity of the laser output, Laser machine.

56. The vibration damping assembly includes at least one low-rigidity support that connects the laser output to the robot, The laser machine according to claim 55.

57. A laser including a laser output, A robot, A vibration damping assembly that couples the laser output to the robot, the vibration damping assembly damping the magnitude of vibrations transmitted from the robot to the laser output, Comprising, The robot includes a multi-degree-of-freedom robot arm, and the vibration damping assembly damps multi-degree-of-freedom vibrations, The vibration damping assembly includes a plurality of spaced low-rigidity supports that connect the laser output to the robot, The low-rigidity supports are arranged parallel to three perpendicular axes, Laser machine.

58. A laser including a laser output, A robot, A vibration damping assembly that couples the laser output to the robot, the vibration damping assembly damping the magnitude of vibrations transmitted from the robot to the laser output, Comprising, The robot includes a multi-degree-of-freedom robot arm, and the vibration damping assembly damps multi-degree-of-freedom vibrations, The vibration damping assembly includes a plurality of spaced low-rigidity supports that connect the laser output to the robot, The low-rigidity support is arranged in a tetrahedral configuration. Laser machine. **Claim 59** The laser machine according to claim 55, further comprising a control system that actively controls the forces generated by each low-rigidity support. The laser machine according to claim 55. **Claim 60** The laser machine according to claim 55, wherein the vibration damping assembly includes at least one actuator that connects the laser output to a movable part. The laser machine according to claim 55.

Images