Biochip and method for manufacturing the same

Abstract

Provided are a biochip and a method for manufacturing the same. 【Solution means】The detection unit of the biochip includes a substrate, a first insulating layer, a semiconductor layer, a second insulating layer, a first metal layer, a second metal layer, and a protective layer. The semiconductor layer includes a reaction region. The second insulating layer is disposed on the semiconductor layer and includes a first portion, a second portion, and a first opening exposing the reaction region. The first metal layer is disposed on the second portion and includes a source, a drain, a gate, and a first wall structure. The second metal layer includes a second wall structure disposed on the first wall structure. The protective layer is disposed on the first metal layer and the second metal layer. The protective layer has a second opening, a third opening, and a fourth opening, and includes a flat portion defined by surrounding the second opening, a first protrusion defined by surrounding the third opening, and a second protrusion defined by surrounding the fourth opening. In the normal direction of the substrate, the first opening, the second opening, the third opening, and the fourth opening overlap.

Description

Technical Field

[0001] The present invention relates to a semiconductor chip and a method for manufacturing the same, and more particularly, to a biochip and a method for manufacturing the same.

Background Art

[0002] In a general biochip, since the space for accommodating a solution is usually limited by the size of the reaction region, overflow of the solution easily occurs when there is a large amount of solution or when there is an error in the added solution.

Summary of the Invention

Problems to be Solved by the Invention

[0003] The present invention provides a biochip and a method for manufacturing the same that can avoid overflow of a solution, adapt to a large amount of solution, improve detection sensitivity, and simultaneously detect various biological substances without interfering with each other.

Means for Solving the Problems

[0004] The biochip of the present invention is used to detect biological substances in a solution and includes at least one detection unit. The detection unit includes a substrate, a first insulating layer, a semiconductor layer, a second insulating layer, a first metal layer, a second metal layer, and a protective layer. The first insulating layer is disposed on the substrate. The semiconductor layer is disposed on the first insulating layer and includes a plurality of reaction regions. The second insulating layer is disposed on the semiconductor layer and includes a first portion, a second portion, and a first opening. The second portion surrounds the first portion. The first opening separates the first portion from the second portion and exposes the plurality of reaction regions. The first metal layer is disposed on the second portion and includes a source, a drain, a gate, and a first wall structure that are separated from each other. The second metal layer includes a second wall structure and a biological electrode. The second wall structure is disposed on the first wall structure, and the biological electrode is disposed on the first portion. The protective layer is disposed on the first metal layer and the second metal layer. The protective layer has a second opening, a third opening, and a fourth opening, and includes a flat portion, a first protruding portion, and a second protruding portion. The flat portion covers the second portion exposed by the first metal layer and surrounds and defines the second opening. The first protruding portion covers the source, the drain, and the gate and surrounds and defines the third opening. The second protruding portion covers the second wall structure and surrounds and defines the fourth opening. In the normal direction of the substrate, the first opening, the second opening, the third opening, and the fourth opening overlap.

[0005] In one embodiment of the present invention, the above-described semiconductor layer further includes a source region and a drain region. The source is electrically connected to the source region surrounding the first opening, the drain is electrically connected to the drain region surrounding the source, the gate is electrically connected to the substrate surrounding the drain, and the first wall structure surrounds the gate.

[0006] In one embodiment of the present invention, the above-described source, drain, gate, and first wall structure are of the same layer, and the first wall structure electrically insulates the source, drain, and gate.

[0007] In one embodiment of the present invention, the above-described solution is disposed in at least the first opening, the second opening, and the third opening. The solution contacts a plurality of reaction regions of the biological electrode and the semiconductor layer.

[0008] In one embodiment of the present invention, the above-described biological electrode and the second wall structure are in the same layer, the biological electrode and the second wall structure are separated from each other, and the second wall structure electrically insulates the biological electrode.

[0009] In one embodiment of the present invention, the above-described first protrusion completely surrounds the third opening, and the second protrusion completely surrounds the fourth opening.

[0010] In one embodiment of the present invention, in the above-described normal direction, the upper surface of the second protrusion is higher than the upper surface of the first protrusion, and the upper surface of the first protrusion is higher than the upper surface of the flat portion.

[0011] In one embodiment of the present invention, the above-described third opening is larger than the second opening, and the fourth opening is larger than the third opening.

[0012] In one embodiment of the present invention, the above-described third opening includes an addition region and a plurality of detection regions. The addition region is disposed corresponding to the first portion. The plurality of detection regions are connected to the addition region and are disposed corresponding to the plurality of reaction regions.

[0013] The method for manufacturing a biochip according to the present invention includes steps of: providing a substrate; forming a first insulating layer on the substrate; forming a semiconductor layer on the first insulating layer, the semiconductor layer including a plurality of reaction regions; forming a second insulating layer on the semiconductor layer, the second insulating layer including a first portion, a second portion, and a first opening, the second portion surrounding the first portion, the first opening separating the first portion and the second portion to expose the plurality of reaction regions; forming a first metal layer on the second portion, the first metal layer including a source, a drain, a gate, and a first wall structure separated from each other; forming a second metal layer, the second metal layer including a second wall structure and a biological electrode, the second wall structure being disposed on the first wall structure, the biological electrode being disposed on the first portion; and forming a protective layer on the first metal layer and the second metal layer, the protective layer having a second opening, a third opening, and a fourth opening, the protective layer including a flat portion, a first protruding portion, and a second protruding portion. The flat portion covers the second portion exposed by the first metal layer and surrounds and defines the second opening. The first protruding portion covers the source, the drain, and the gate and surrounds and defines the third opening. The second protruding portion covers the second wall structure and surrounds and defines the fourth opening. In the normal direction of the substrate, the first opening, the second opening, the third opening, and the fourth opening overlap each other.

Effects of the Invention

[0014] As described above, the biochip and its manufacturing method according to one embodiment of the present invention can improve the detection sensitivity by arranging a plurality of reaction regions in one detection unit to detect the same type of biological substance and accumulating the signals detected in the plurality of reaction regions. Compared with a general biochip, the biochip of the present embodiment can adapt to a large amount of solution by arranging a fourth opening to increase the volume that the biochip can accommodate the solution, and there is no need to worry about the problem of cross-contamination caused by the overflow of the solution. Therefore, the operational flexibility and convenience of the biochip can be improved. In addition, the plurality of detection units in the biochip of the present embodiment can be used to detect different types of biological substances, and there is no need to worry about the problem of cross-contamination caused by the overflow of the solution between different detection units. Therefore, the biochip has the effect of being able to detect various biological substances simultaneously without interfering with each other.

[0015] In order to more clearly understand the above features and advantages of the present invention, embodiments will be given below and described in detail in conjunction with the accompanying drawings.

Brief Description of the Drawings

[0016]

Figure 1

Figure 2A

Figure 2B

Figure 2C

Figure 3A

Figure 3B

Figure 3C

Figure 3D

Figure 3E

Figure 4

Figure 5

Figure 6

Embodiments for Carrying Out the Invention

[0017] FIG. 1 is a schematic top view of a biochip according to one embodiment of the present invention. FIGS. 2A to 2C are schematic top views of a method for manufacturing a detection unit in the biochip of FIG. 1. FIGS. 3A to 3E are three-dimensional schematic diagrams of a method for manufacturing region R in a 2C biochip. FIG. 4 is a schematic cross-sectional view taken along the cross-section line Ι-Ι’ of the 2C biochip in FIG. 2. FIG. 5 is a cross-sectional view taken along the cross-section line ΙΙ-ΙΙ’ of the 2C biochip in FIG. 2. For the sake of clarity and ease of explanation of the drawings, in FIGS. 2A to 2C, the illustration of the substrate 110, the first insulating layer IL1, the second insulating layer 130, the insulating layer IL2, and the protective layer 160 in the biochip 10 is omitted.

[0018] First, referring to FIGS. 1, 2C, 3E, 4, and 5 simultaneously, the biochip 10 of this embodiment can include at least one detection unit 100 (FIG. 1 schematically illustrates three detection units 100, but the present invention is not limited thereto). The detection unit 100 includes a substrate 110, a first insulating layer IL1, a semiconductor layer 120, a second insulating layer 130, a first metal layer 140, a second metal layer 150, and a protective layer 160. The first insulating layer IL1 is disposed on the substrate 110. The semiconductor layer 120 is disposed on the first insulating layer IL1 and includes a plurality of reaction regions 121. The second insulating layer 130 is disposed on the semiconductor layer 120 and includes a first portion 131, a second portion 132, and a first opening O1. The second portion 132 surrounds the first portion 131. The first opening O1 separates the first portion 131 from the second portion 132 and exposes the plurality of reaction regions 121. The first metal layer 140 is disposed on the second portion 132 and includes a source 141, a drain 142, a gate 143, and a first wall structure 144 that are separated from each other. The second metal layer 150 includes a second wall structure 152 and a biological electrode 151. The second wall structure 152 is disposed on the first wall structure 144, and the biological electrode 151 is disposed on the first portion 131. The protective layer 160 is disposed on the first metal layer 140 and the second metal layer 150. The protective layer 160 has a second opening O2, a third opening O3, and a fourth opening O4 and includes a first protrusion 161, a second protrusion 162, and a flat portion 163. The flat portion 163 covers the second portion 132 exposed by the first metal layer 140, and the flat portion 163 surrounds and defines the second opening O2. The first protrusion 161 covers the source 141, the drain 142, and the gate 143, and the first protrusion 161 surrounds and defines the third opening O3. The second protrusion 162 covers the second wall structure 152, and the second protrusion 162 surrounds and defines the fourth opening O4. In the normal direction Z of the substrate 110, the first opening O1, the second opening O2, the third opening O3, and the fourth opening O4 overlap. Further, the biochip 10 of this embodiment can be used to detect the biological substance 210 in the solution 200.

[0019] Hereinafter, a method for manufacturing the biochip 10 of the present embodiment will be described. The manufacturing method of the biochip 10 of the present embodiment can include the following steps.

[0020] First, referring to FIGS. 2A, 3A, 4, and 5 simultaneously, a substrate 110 is provided, a first insulating layer IL1 is formed on the substrate 110, and a semiconductor layer 120 is formed on the first insulating layer IL1. In the present embodiment, the substrate 110 may be a silicon substrate or a silicon wafer. For example, the substrate 110 may be, for example, a P-type silicon substrate, but the present invention is not limited thereto. In the present embodiment, the first insulating layer IL1 may be a gate oxide layer, but the present invention is not limited thereto.

[0021] In the present embodiment, the semiconductor layer 120 includes a plurality of reaction regions 121, a plurality of source regions 122, a plurality of drain regions 123, and a central opening 124. The source region 122 and the drain region 123 are separated from each other. The reaction region 121 is located between adjacent source regions 122 and drain regions 123, and the reaction region 121 can connect the source region 122 and the drain region 123. Each reaction region 121 can include at least one reaction unit 1211 (in FIG. 2A, five reaction units 1211 are schematically illustrated, but the present invention is not limited thereto). The central opening 124 may be surrounded by a plurality of reaction regions 121, a plurality of source regions 122, and a plurality of drain regions 123. In the present embodiment, the material of the semiconductor layer 120 can include polysilicon or other suitable semiconductor materials, but the present invention is not limited thereto. In some embodiments, since the reaction unit 1211 in the reaction region 121 can be regarded as the channel of the transistor structure, when the threshold voltage of the channel (reaction unit 1211) exceeds, the channel (reaction unit 1211) is opened, and the current from the drain 142 can be transmitted to the source 141 through the channel (reaction unit 1211).

[0022] In this embodiment, in the top view of FIG. 2A, the semiconductor layer 120 can schematically include eight reaction regions 121, four source regions 122, four drain regions 123, and one central opening 124. Here, the eight reaction regions 121, four source regions 122, four drain regions 123, and one central opening 124 of the semiconductor layer 120 can be arranged in a hollow circular structure. Each pair of adjacent source region 122 and drain region 123 can occupy about 90 degrees of the entire 360-degree circular structure, and each source region 122 (or drain region 123) can occupy about 45 degrees of the entire 360-degree circular structure, but the present invention is not limited thereto. That is, the present invention does not limit the number and the arranged shape of the reaction regions, source regions, drain regions, and central opening. The present invention does not limit the ratio that each pair of adjacent source region and drain region and each source region (or drain region) occupies in the entire circle.

[0023] Furthermore, in this embodiment, an identification unit (not shown) may be disposed on the reaction unit 1211 of the reaction region 121 of the semiconductor layer 120 and used to specifically identify and bind the biological substance 210 in the solution 200. Specifically described, one end of the identification unit may be connected and fixed to the reaction region 121, and the other end of the identification unit may be used to identify and bind the biological substance 210. The identification unit may be a chemical molecule or a biological molecule. For example, the identification unit may be, for example, an antibody, an antigen, a nucleic acid, a saccharide, or a combination thereof. However, the present invention is not limited thereto, as long as the identification unit can specifically identify and bind the biological substance 210.

[0024] Next, referring simultaneously to FIGS. 2A, 3B, 4, and 5, a second insulating layer 130 is formed on the semiconductor layer 120. Specifically, the second insulating layer 130 can cover the semiconductor layer 120 and a part of the first insulating layer IL1. The second insulating layer 130 includes a first portion 131, a second portion 132, a first opening O1, an opening 133, an opening 134, and an opening 135. The first portion 131 is disposed corresponding to the central opening 124. The second portion 132 and the first portion 131 are separated from each other and surround the first portion 131. The first opening O1 separates the first portion 131 and the second portion 132. The first opening O1 can expose the plurality of reaction regions 121 and a part of the first insulating layer IL1. The opening 133 can penetrate through the second portion 132 to expose a part of the source region 122. The opening 134 can penetrate through the second portion 132 to expose a part of the drain region 123. The opening 135 can penetrate through the second portion 132 and the first insulating layer IL1 to expose a part of the substrate 110.

[0025] Next, referring simultaneously to FIGS. 2B, 3C, 4, and 5, a first metal layer 140 is formed on the second portion 132 of the second insulating layer 130. Specifically, the first metal layer 140 can expose the first portion 131 and a part of the second portion 132. The first metal layer 140 includes a source 141, a drain 142, a gate 143, and a first wall structure 144 that are separated from each other. In the normal direction Z of the substrate 110, the source 141 may overlap with the source region 122 and be correspondingly disposed. The drain 142 may overlap with the drain region 123 and be correspondingly disposed. The source 141 is disposed on the second portion 132 and within the opening 133 and may be electrically connected to the source region 122. The drain 142 is disposed on the second portion 132 and within the opening 134 and may be electrically connected to the drain region 123. Also, the gate 143 is disposed on the second portion 132 and within the opening 135 and may be in contact with the conductive substrate 110 and electrically connected thereto.

[0026] In this embodiment, the source 141, the drain 142, the gate 143, and the first wall structure 144 may be in the same layer. Here, as shown in FIG. 2B, the source 141 can surround the first opening O1 in a substantially annular structure, the drain 142 can surround the source 141 and the first opening O1 in a substantially annular structure, the gate 143 can surround the drain 142, the source 141, and the first opening O1 in a substantially annular structure, and the first wall structure 144 can surround the gate 143, the drain 142, the source 141, and the first opening O1 in a substantially annular structure. The first wall structure 144 can electrically insulate the source 141, the drain 142, and the gate 143.

[0027] Next, referring simultaneously to FIGS. 2C, 3D, 4, and 5, an insulating layer IL2 is formed on the first portion 131 and the first wall structure 144, and a second metal layer 150 is formed on the first portion 131, the first wall structure 144, and the insulating layer IL2. Specifically, the second metal layer 150 includes a biological electrode 151 and a second wall structure 152. The biological electrode 151 is disposed on the first portion 131. The second wall structure 152 is disposed on the first wall structure 144. The biological electrode 151 and the second wall structure 152 may be in the same layer, and the biological electrode 151 and the second wall structure 152 are separated from each other. As shown in FIG. 2C, the second wall structure 152 can surround the gate 143, the drain 142, the source 141, and the first opening O1 in a substantially annular structure. The second wall structure 152 can electrically insulate the biological electrode 151.

[0028] Next, referring to FIGS. 2C, 3E, 4, and 5 simultaneously, a protective layer 160 is formed on the first metal layer 140 and the second metal layer 150. Specifically, the protective layer 160 has a second opening O2, a third opening O3, and a fourth opening O4, and the protective layer 160 includes a flat portion 163, a first protrusion 161, and a second protrusion 162. Here, the flat portion 163 can cover the second portion 132 exposed by the first metal layer 140, and the flat portion 163 can be defined surrounding the second opening O2. The first protrusion 161 can cover the source 141, the drain 142, and the gate 143, and the first protrusion 161 can be defined surrounding the third opening O3. The second protrusion 162 can cover the second wall structure 152, and the second protrusion 162 can be defined surrounding the fourth opening O4.

[0029] In this embodiment, the flat portion 163 has an upper surface 163a away from the second insulating layer 130, the first protrusion 161 has an upper surface 161a away from the second insulating layer 130, and the second protrusion 162 has an upper surface 162a away from the second insulating layer 130. In the normal direction Z of the substrate 110, the upper surface 161a of the first protrusion 161 is higher than the upper surface 163a of the flat portion 163, and the upper surface 162a of the second protrusion 162 is higher than the upper surface 161a of the first protrusion 161.

[0030] In this embodiment, due to the arrangement of the first metal layer 140 and the second metal layer 150, in the step of forming the protective layer 160, the first protrusion 161 and the second protrusion 162 can be formed simultaneously, so there is no need to perform additional processing steps (such as increasing the number of masks or increasing the number of laminations, etc.) to manufacture the first protrusion 161 for forming the third opening O3 and the second protrusion 162 for forming the fourth opening O4, which has the effect of simplifying the process.

[0031] In this embodiment, in the normal direction Z of the substrate 110, the first opening O1, the second opening O2, the third opening O3, and the fourth opening O4 can overlap. The second opening O2 can connect the first opening O1 and the third opening O3, and the third opening O3 can connect the second opening O2 and the fourth opening O4. The size of the second opening O2 may be substantially similar to the size of the first opening O1. The size of the third opening O3 may be larger than the size of the second opening O2. The size of the fourth opening O4 may be larger than the size of the third opening O3.

[0032] In this embodiment, the third opening O3 can include an addition region O31 and a plurality of detection regions O32. The addition region O31 may be a region for adding the solution 200 to the biochip 10, and the detection region O32 may be a region for guiding and storing the solution 200, thereby preventing the overflow of the solution 200. Specifically, the addition region O31 may be arranged corresponding to the central opening 124, the first portion 131, and the biological electrode 151. The plurality of detection regions O32 may be arranged corresponding to the plurality of reaction regions 121. The plurality of detection regions O32 may be connected to the addition region O31, and the plurality of detection regions O32 may be arranged radially around the addition region O31, thereby shortening the time for the solution 200 to flow into the detection region O32 and making the distribution of the solution 200 more uniform.

[0033] In this embodiment, the solution 200 is first dropped into the addition region O31 in the form of droplets, and then flows into a plurality of detection regions O32 arranged radially from the addition region O31. Therefore, by making the diameter (or width) of the addition region O31 larger than the diameter of the droplets, it is possible to prevent the solution 200 from overflowing due to a shift (or misalignment) of the addition position during addition. By designing the contour shape of the addition region O31 to be circular to match the shape of the droplets, when the amount of the solution 200 is too large and likely to overflow, the surface tension of the liquid can be utilized to prevent the overflow of the solution 200. That is, this embodiment can utilize the "self-limiting structure" of forming a tangent line of the biochip itself to increase the allowable range of alignment and accommodate more of the solution 200. In this embodiment, the diameter (or width) of the addition region O31 is, for example, about 10 micrometers (μm) to 100 micrometers, and the width of the detection region O32 is, for example, about 3 micrometers, but the present invention is not limited thereto. In some embodiments, the diameter (or width) of the addition region O31 can be adjusted according to the diameter of the droplets, and the length of the detection region O32 can be adjusted according to the number of reaction units 1211 in the reaction region 121.

[0034] Next, referring simultaneously to FIGS. 4 and 5, in this embodiment, the solution 200 may be disposed in at least the first opening O1, the second opening O2, and the third opening O3. Since the solution 200 can cover at least the upper surface 163a of the flat portion 163, the solution 200 can simultaneously contact the bioelectrode 151 and the reaction units 1211 in the reaction region 121. In some embodiments, when the amount of the solution 200 is large, the solution 200 can be disposed in the first opening O1, the second opening O2, the third opening O3, and the fourth opening O4. Therefore, the solution 200 can cover the upper surface 163a of the flat portion 163 and the upper surface 161a of the first protrusion 161.

[0035] While a general biochip uses an external connection type probe electrode (for example, a silver / silver chloride electrode) to detect a biological substance, in this embodiment, by integrating the biological electrode 151 into the biochip 10, the overall volume of the biochip 10 can be significantly reduced, so that the complicated steps and costs of subsequent processes can be reduced (for example, there is no need to separately manufacture an external connection type probe electrode).

[0036] In this embodiment, the solution 200 can contain, for example, a body fluid such as serum, and the biological substance 210 can contain, for example, a microorganism or a biomolecule, but the present invention is not limited thereto. For example, the microorganism can contain, for example, bacteria, viruses, or a combination thereof, and the biomolecule can contain, for example, nucleic acids (including deoxyribonucleic acid, ribonucleic acid, or a combination thereof), nucleotides, proteins, carbohydrates, lipids, or a combination thereof, but the present invention is not limited thereto.

[0037] In this embodiment, the operating principle of the biochip 10 can include a test before adding the solution 200 and a detection after adding the solution 200. Specifically described, in the test before adding the solution 200, first, the gate 143 is opened so that the voltage provided from the gate 143 can control (open / close) the reaction unit 1211 in the reaction region 121 through the substrate 110 having conductive characteristics with the first insulating layer IL1 in between. Subsequently, by measuring the current amount of the drain 142 (i.e., the first current amount), it is tested whether the reaction unit 1211 is conducting normally, and the current from the source 141 can pass through. In the detection after adding the solution 200, when the solution 200 can simultaneously contact the biological electrode 151 and the reaction units 1211 in the plurality of reaction regions 121, first, the biological electrode 151 is opened so that the voltage provided from the biological electrode 151 can control (open / close) the reaction units 1211 in the reaction region 121 with the solution 200 in between. Subsequently, the current amount of the drain 142 (i.e., the second current amount) is measured, and by comparing the first current amount and the second current amount, the biological substance 210 in the solution 200 is detected. Also, in this embodiment, when detecting after adding the solution 200, the gate 143 may be in a closed state or an open state. Here, when the gate 143 is in an open state, the voltage provided from the gate 143 can be used, for example, to enhance the reaction between the biological substance 210 and the reaction unit 1211.

[0038] In this embodiment, since the plurality of reaction regions 121 in one detection unit 100 of the biochip 10 can be used to detect the same type of biological substance 210, thereby, the signals detected in the plurality of reaction regions 121 can be accumulated to improve the detection sensitivity.

[0039] In this embodiment, the first protrusion 161 can completely surround the third opening O3, and the second protrusion 162 can completely surround the fourth opening O4. More specifically, since the source 141, the drain 142, and the gate 143 can surround the first opening O1 in a substantially annular structure, the first protrusion 161 disposed above the source 141, the drain 142, and the gate 143 forms a closed shape that completely surrounds the first opening O1, the second opening O2, and the third opening O3, restricting the solution 200 within the third opening O3 and preventing the solution 200 from overflowing outside the third opening O3. Further, since the second wall structure 152 is disposed on the first wall structure 144 and the second wall structure 152 can surround the first opening O1 in a substantially annular structure, as shown in FIGS. 4 and 5, the second protrusion 162 disposed on the second wall structure 152 forms a closed figure that completely surrounds the first opening O1, the second opening O2, the third opening O3, and the fourth opening O4, restricting the solution 200 within the fourth opening O4 and preventing the solution 200 from overflowing outside the fourth opening O4.

[0040] For example, when the solution 200 added into the third opening O3 overflows, by disposing the second protrusion 162, the solution 200 can be restricted within the fourth opening O4, preventing the overflow of the solution 200. Thereby, it can be prevented that the solution overflows into another adjacent detection unit 100 and interferes with the detection result of another biological substance. Therefore, compared with a general biochip, the biochip 10 of this embodiment can adapt to a large amount of solution 200 by arranging the fourth opening O4 to increase the volume that the biochip 10 can accommodate the solution 200, thus improving the operational flexibility and convenience of the biochip 10. Thereby, the plurality of detection units 100 in the biochip 10 of this embodiment can be used to simultaneously detect different types of biological substances respectively, and there is no need to worry about the problem of cross-contamination caused by the overflow of the solution between different detection units 100. Therefore, the biochip 10 has the effect of being able to simultaneously detect various biological substances.

[0041] Hereinafter, another embodiment will be enumerated and described. It should be noted that in the following embodiments, the component numbers and some contents of the above-described embodiments are continued to be used. By using the same numbers, the same or similar components are indicated, but for the same technical content, the description is omitted. For the description of the omitted parts, since the above-described embodiments can be referred to, the following embodiments will not be repeatedly described.

[0042] FIG. 6 is a schematic top view of the detection unit in the biochip according to another embodiment of the present invention. Referring to FIG. 6 and FIG. 2C simultaneously, the biochip 10a of this embodiment is similar to the biochip 10 of FIG. 2C, but the main difference between the two is that in the detection unit 100a of the biochip 10a of this embodiment, the semiconductor layer 120a includes more reaction regions 121a, source regions 122a, and drain regions 123a.

[0043] Specifically, referring to FIG. 6, the semiconductor layer 120a can include 12 reaction regions 121a, 6 source regions 122a, 6 drain regions 123a, and 1 central opening 124. Here, each pair of adjacent source region 122a and drain region 123a can occupy about 60 degrees of the entire 360-degree circular structure, and each source region 122a (or drain region 123a) can occupy about 30 degrees of the entire 360-degree circular structure. Thereby, the detection unit 100a can accumulate signals detected by more reaction regions 121a (or reaction units 1211) to further improve the detection sensitivity.

[0044] In some embodiments, by adjusting the length of the reaction region (the length of the detection region) in the detection unit, more reaction units can also be increased, whereby the detection unit can accumulate signals detected by more reaction units to further improve the detection sensitivity.

[0045] As described above, in one embodiment of the present invention, the biochip and its manufacturing method can prevent the solution from overflowing due to the displacement (or misalignment) of the addition position during solution addition by making the diameter (or width) of the addition region larger than the diameter of the droplet. By designing the contour shape of the addition region to be circular according to the shape of the droplet, when the liquid volume of the solution is too large and likely to overflow, the surface tension of the liquid can be utilized to prevent the solution from overflowing. That is, this embodiment utilizes the "self-limiting structure" of the tangent formation of the biochip itself to increase the allowable range of alignment and can accommodate more solution. By arranging a plurality of reaction regions in one detection unit to detect the same type of biological substance, the signals detected in the plurality of reaction regions can be accumulated to improve the detection sensitivity. Compared with a general biochip, the biochip of this embodiment can adapt to a large amount of solution by arranging the fourth opening to increase the volume that the biochip can accommodate the solution, and there is no need to worry about the problem of cross-contamination caused by the overflow of the solution. Therefore, the operational flexibility and convenience of the biochip can be improved. In addition, the plurality of detection units in the biochip of this embodiment can be used to detect different types of biological substances respectively, and there is no need to worry about the problem of cross-contamination caused by the overflow of the solution between different detection units. Therefore, the biochip has the effect of being able to detect various biological substances simultaneously without interfering with each other. Also, in some embodiments, by increasing the number of reaction regions in the detection unit or adjusting the length of the reaction region in the detection unit (the length of the detection region) to increase the number of reaction units, the detection unit can accumulate signals detected from more reaction units and further improve the detection sensitivity.

[0046] As described above, the present invention has been disclosed by way of embodiments, but it is not used to limit the present invention. Those skilled in the art can make some changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of this invention should be determined based on the appended claims.

Industrial Applicability

[0047] The biochip of the present invention and its manufacturing method can avoid the overflow of the solution, adapt to a large amount of solution, improve the detection sensitivity, and simultaneously detect various biological substances without interfering with each other.

Explanation of Reference Numerals

[0048] 10, 10a Biochip 100, 100a Detection Unit 110 Substrate 120, 120a Semiconductor Layer 121, 121a Reaction Region 1211 Reaction Unit 122, 122a Source Region 123, 123a Drain Region 124 Central Opening 130 Second Insulating Layer 131 First Portion 132 Second Portion 133, 134, 135 Opening 140 First Metal Layer 141 Source 142 Drain 143 Gate 144 First Wall Structure 150 Second Metal Layer 151 Bioelectrode 152 Second Wall Structure 160 Protective Layer 161 First Protrusion 161a, 162a, 163a Upper Surface 162 Second Protrusion 163 Flat Portion 200 Solution 210 Biological Substance IL1 First Insulating Layer IL2 Insulating Layer O1 First Opening O2 Second Opening O3 Third Opening O31 Addition Region O32 detection area O4 Fourth opening R area Z normal direction

Claims

1. A biochip for detecting a biological substance in a solution, comprising at least one detection unit, wherein the at least one detection unit comprises a substrate, a first insulating layer disposed on the substrate, a semiconductor layer disposed on the first insulating layer and including a plurality of reaction regions, a second insulating layer disposed on the semiconductor layer, a first portion, a second portion surrounding the first portion, a first opening separating the first portion and the second portion and exposing the plurality of reaction regions, a second insulating layer including the first opening, a first metal layer disposed on the second portion and including a source, a drain, a gate, and a first wall structure separated from each other, a second wall structure disposed on the first wall structure, a biological electrode disposed on the first portion, a second metal layer including the biological electrode, a protective layer disposed on the first metal layer and the second metal layer, having a second opening, a third opening, and a fourth opening, a flat portion covering the second portion exposed by the first metal layer and surrounding and defining the second opening, a first protrusion covering the source, the drain, and the gate and surrounding and defining the third opening, a protective layer including the first protrusion, a second protrusion covering the second wall structure and surrounding and defining the fourth opening, a biochip, wherein in the normal direction of the substrate, the first opening, the second opening, the third opening, and the fourth opening overlap each other.

2. The semiconductor layer further includes a source region and a drain region, the source is electrically connected to the source region surrounding the first opening, the drain is electrically connected to the drain region surrounding the source, the gate is electrically connected to the substrate surrounding the drain, and the first wall structure surrounds the gate. The biochip according to claim 1.

3. The source, the drain, the gate, and the first wall structure are in the same layer, and the first wall structure electrically insulates the source, the drain, and the gate. The biochip according to claim 2.

4. The solution is disposed in at least the first opening, the second opening, and the third opening, and the solution contacts the biological electrode and the plurality of reaction regions of the semiconductor layer. The biochip according to claim 1.

5. The biological electrode and the second wall structure are in the same layer, the biological electrode and the second wall structure are separated from each other, and the second wall structure electrically insulates the biological electrode. The biochip according to claim 4.

6. The biochip according to claim 1, wherein the first protrusion completely surrounds the third opening, and the second protrusion completely surrounds the fourth opening.

7. The biochip according to claim 1, wherein in the normal direction, the upper surface of the second protrusion is higher than the upper surface of the first protrusion, and the upper surface of the first protrusion is higher than the upper surface of the flat portion.

8. The biochip according to claim 1, wherein the third opening is larger than the second opening, and the fourth opening is larger than the third opening.

9. The third opening is an addition region arranged corresponding to the first portion, a plurality of detection regions connected to the addition region and arranged corresponding to the plurality of reaction regions, The biochip according to claim 1, comprising.

10. providing a substrate; forming a first insulating layer on the substrate; forming a semiconductor layer on the first insulating layer, the semiconductor layer including a plurality of reaction regions; forming a second insulating layer on the semiconductor layer, the second insulating layer including a first portion, a second portion surrounding the first portion, a first opening separating the first portion and the second portion and exposing the plurality of reaction regions, including; forming a first metal layer on the second portion, the first metal layer including a source, a drain, a gate, and a first wall structure separated from each other; forming a second metal layer, the second metal layer including a second wall structure disposed on the first wall structure, a biological electrode disposed on the first portion, including; forming a protective layer on the first metal layer and the second metal layer, the protective layer having a second opening, a third opening, and a fourth opening, covering the second portion exposed by the first metal layer, and a flat portion surrounding and defining the second opening, covering the source, the drain, and the gate, and a first protrusion surrounding and defining the third opening, covering the second wall structure, and a second protrusion surrounding and defining the fourth opening, including; A method for manufacturing a biochip, including, in the normal direction of the substrate, the first opening, the second opening, the third opening, and the fourth opening overlapping.

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