Apparatus, apparatus control method, article manufacturing method using apparatus, control program, and recording medium

Abstract

To improve feed accuracy.SOLUTION: A machine device includes a support part supporting an object, a feed mechanism which is connected to the support part and moves the support part, a cover surrounding the feed mechanism, and an envelope surrounding the cover, wherein the inside of the cover communicates with atmosphere to apply a pressure to the envelope from the outside of the envelope, the pressure of the inside of the envelope is lower than the pressure of the inside of the cover, and a difference between the pressure of the atmosphere and the inside of the cover is smaller than a difference between the pressure in the cover and the pressure of the inside the envelope.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a mechanical device. [Background technology]

[0002] Techniques for moving an object to a desired position and performing processing are known. For example, in blast processing, a feed mechanism moves a blast nozzle or workpiece to a desired position, and processing is performed for a desired time. In a device equipped with a feed mechanism, if dust scattered during processing enters the feed mechanism, it can cause deterioration in accuracy or damage to the feed mechanism. Patent Document 1 proposes a configuration in which a gas such as air is supplied to the interior of a bellows member to maintain the internal pressure of the bellows member at or above the internal pressure of the blast chamber. Patent Document 2 also proposes a configuration in which compressed gas is supplied through a gas supply pipe and collected through a suction pipe, thereby reducing the pressure difference between the space surrounded by the bellows and the vacuum chamber. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 11-347948 [Patent Document 2] Japanese Patent Application Laid-Open No. 2002-106562 Summary of the Invention [Problem to be solved by the invention]

[0004] When a gas such as air is supplied to the inside of a member surrounding the feed mechanism, the feed accuracy of the feed mechanism may be deteriorated. Therefore, an object of the present invention is to improve the feed accuracy of the feed mechanism. [Means for solving the problem]

[0005] The means for solving the above problem is an apparatus including a moving mechanism for moving an object, a cover provided around the moving mechanism, and an enclosure provided around the object, wherein the atmosphere inside the cover is made the same as the atmosphere outside the enclosure; a difference between the atmospheric pressure outside the enclosure and the atmospheric pressure inside the cover is smaller than a difference between the atmospheric pressure inside the cover and the atmospheric pressure inside the enclosure; An apparatus characterized in that [Effects of the Invention]

[0006] According to the present invention, it is possible to provide an advantageous technique for improving the feeding accuracy of a feeding mechanism. [Brief explanation of the drawings]

[0007] [Figure 1] FIG. 1 is a schematic diagram showing the configuration of a mechanical device according to first and second embodiments. [Figure 2] FIG. 10 is a perspective view showing the configuration of a feed mechanism according to a third embodiment. [Figure 3] FIG. 10( a ) is a perspective view showing the configuration of a feed mechanism according to a fourth embodiment, and FIG. 10( b ) is a cross-sectional view showing the configuration of a feed mechanism according to the fourth embodiment. [Figure 4] 3(a) is a cross-sectional view of the feed mechanism taken along line A1 in FIG. 3(a), and FIG. 3(b) is a cross-sectional view of the feed mechanism taken along line A2 in FIG. 3(a). [Figure 5] FIG. 10 is a schematic diagram showing the configuration of a blasting device according to a fifth embodiment. [Figure 6] FIG. 13 is a plan view showing an example of a partition member according to a fifth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0008] Hereinafter, a description will be given of an embodiment of the present invention with reference to the drawings. However, the embodiment described below is one embodiment of the invention and is not limited to this. Common configurations will be described with mutual reference to multiple drawings, and descriptions of configurations with common reference numerals will be omitted as appropriate. Items with the same name but different functions can be distinguished by adding "0", such as "first item" and "second item".

[0009] First Embodiment A mechanical device 10 according to a first embodiment will be described with reference to FIG.

[0010] FIG. 1 is a schematic diagram of a mechanical device 10 according to a first embodiment.

[0011] The machine 10 includes a feed mechanism 5, a retractable, bellows-shaped protective cover 4, a support 11, and an enclosure 6 surrounding them. Processing, such as machining and analysis, is performed within the enclosure 6 (inside the enclosure 6). In this embodiment, the enclosure 6 is a chamber or a partition wall, which defines a processing chamber in a processing apparatus. The feed mechanism 5 is installed in a position surrounded by the protective cover 4, and the protective cover 4 seals the length of the feed mechanism 5 up to both ends. The protective cover 4 has openings 400 at both ends, and the inside of the protective cover 4 (inside the protective cover 4) is interconnected from one end to the other. The protective cover 4 is, for example, a Libereau bellows. However, holes or gaps through which gas can pass between the protective cover 4 and the enclosure 6 may exist in the protective cover 4, at the connection between the protective cover 4 and the enclosure 6, or between the support 11 and the protective cover 4.

[0012] In this embodiment, the opening 400 of the protective cover 4 is connected to the air duct 8. The inside of the air duct 8 may be sealed or may be connected to a space separate from the inside of the envelope 6, as long as it is a space separate from the inside of the envelope 6. The inside of the protective cover 4 is in communication with the atmosphere outside the envelope 6.

[0013] The mechanical device 10 is equipped with an exhaust unit 7, which exhausts gas from within the envelope 6. The exhaust unit 7 includes an exhaust port and a suction pump, and only needs to have the function of exhausting gas in order to exhaust unnecessary gases and the like when the mechanical device 10 is in use. The exhaust unit 7 exhausts the gas from within the envelope 6 to the outside of the envelope 6 (outside the envelope 6), so that the pressure inside the envelope 6 becomes negative relative to the outside of the envelope 6.

[0014] Because the atmosphere inside the protective cover 4 and the atmosphere outside the envelope 6 are in communication, the pressure inside the protective cover 4 is approximately equal to the pressure of the atmosphere outside the envelope 6. Here, approximately equal means that the pressure difference between the outside of the envelope 6 and the inside of the protective cover 4 is smaller than the pressure difference between the inside of the protective cover 4 and the inside of the envelope 6.

[0015] Furthermore, the phrase "the pressures of the atmosphere inside the protective cover 4 and outside the envelope 6 are approximately equal" means that the pressure difference between the pressure of the atmosphere outside the envelope 6 and inside the protective cover 4 is smaller than the pressure difference between the pressure of the atmosphere outside the envelope 6 and inside the envelope 6. Here, the atmosphere outside the envelope 6 is the atmosphere in which pressure is applied to the wall surface of the envelope 6 from outside the envelope 6. In other words, the atmosphere outside the envelope 6 in this embodiment is the atmosphere inside the air duct 8.

[0016] The pressure from the atmosphere outside the envelope 6 is, for example, atmospheric pressure, and can vary depending on the location and conditions of use of the mechanical device 10 according to this embodiment. The pressure of the atmosphere outside the envelope 6 is, for example, 30,000 Pa or more or 91,193 Pa or more (90% or more of atmospheric pressure), preferably 100,312 Pa or more (99% or more of atmospheric pressure). The pressure of the atmosphere outside the envelope 6 is, for example, 150,000 Pa or less or 111,458 Pa or less (110% or less of atmospheric pressure), preferably 102,338 Pa or less (101% or less of atmospheric pressure).

[0017] The pressure inside the protective cover 4 is approximately equal to the pressure outside the envelope 6, and when the pressure outside the envelope 6 is atmospheric pressure, it is, for example, 30,000 Pa or more or 91,193 Pa or more (90% or more of atmospheric pressure), preferably 100,312 Pa or more (99% or more of atmospheric pressure). The atmosphere outside the envelope 6 is, for example, 150,000 Pa or less or 111,458 Pa or less (110% or less of atmospheric pressure), preferably 102,338 Pa or less (101% or less of atmospheric pressure).

[0018] The pressure inside the envelope 6 only needs to be lower than the pressure inside the protective cover 4, and the pressure difference between the pressure inside the envelope 6 and the pressure inside the protective cover 4 is, for example, 10 Pa or more, or 30 Pa or more, and preferably 50 Pa or more. The pressure difference between the pressure inside the envelope 6 and the pressure inside the protective cover 4 is, for example, 1000 Pa or less, or 500 Pa or less, and preferably 250 Pa or less.

[0019] The pressure inside the envelope 6 only needs to be lower than the pressure inside the protective cover 4, as gas is discharged by the exhaust unit 7, and is preferably 100 Pa or higher. The pressure inside the envelope 6 is, for example, 60,795 Pa or higher (60% or higher of atmospheric pressure), preferably 81,060 Pa or higher (80% or higher of atmospheric pressure). Also, for example, 101,325 Pa or lower (100% or lower of atmospheric pressure) is preferable, and 101,224 Pa or lower (99.9% or lower of atmospheric pressure) is more preferable.

[0020] A difference of 100Pa is 100N / m 2 In other words, the air pressure applied is equivalent to a load of 10 kg per 1 meter square plate. Since the envelope 6 according to this embodiment is approximately 3 m long x 2 m wide x 1.8 m high, even if the pressure difference between the inside of the envelope 6 and the inside of the protective cover 4 is 100 Pa, a considerable load will be applied.

[0021] In this embodiment, compressed gas is not supplied into the protective cover 4, but the inside of the protective cover 4 is connected to the atmosphere outside the envelope 6. If compressed gas were supplied into the protective cover 4, the pressure of the supplied gas would fluctuate during supply. The fluctuation in the pressure of the supplied gas would cause the resistance force of the gas to the feed mechanism to differ depending on the position of the feed mechanism, resulting in a deterioration in feed accuracy.

[0022] By connecting the inside of the protective cover 4 to the atmosphere outside the enclosure 6, it is possible to prevent the resistance force of the gas to the feed mechanism from varying depending on the position of the feed mechanism, compared to when compressed gas is supplied into the protective cover 4.

[0023] In this embodiment, the difference between the pressure applied from the atmosphere outside the envelope 6 and the pressure inside the protective cover 4 is smaller than the difference between the pressure inside the protective cover 4 and the pressure inside the envelope 6. With this configuration, the flow of gas flowing from outside the envelope 6 into the protective cover 4 is gentler than when compressed gas is supplied. By gentler gas flow, the pressure loss inside the protective cover 4 can be reduced.

[0024] We will explain the pressure loss of gas. When gas passes through a wall, friction occurs between the gas and the wall, causing it to lose energy. The amount of energy lost varies depending on the properties of the fluid, and the friction force per unit volume is expressed by the following formula (1). τ = μ × du / dr (1)

[0025] Here, μ is viscosity, and du / dr is the velocity gradient of the fluid at the wall surface. In other words, the higher the viscosity or the faster the velocity, the greater the pressure loss of the fluid at the wall surface. If a supply port is provided to supply compressed gas into the protective cover, the gas velocity will increase, resulting in pressure loss.

[0026] Conditions that cause pressure loss include not only friction on the wall surface, but also stagnation that occurs when a fluid flows from a thin pipe to a thick pipe, and collision with the wall that occurs when a fluid flows from a thin pipe to a thick pipe. In the case of a bellows-shaped protective cover, the thickness of the protective cover varies depending on the degree of expansion and contraction of the bellows, which can result in fluctuations in the degree of gas pressure loss. Although the bellows-shaped protective cover has been described here, it is not limited to a bellows shape and can be applied to any cover whose diameter length changes due to expansion and contraction.

[0027] When the feeding mechanism is provided inside the protective cover, fluctuations in the energy of the gas that is subjected to pressure loss cause fluctuations in the resistance force of the gas on the feeding mechanism, which causes a deterioration in the feeding accuracy of the feeding mechanism.

[0028] In this embodiment, by opening the inside of the protective cover 4 to the atmosphere outside the envelope 6, the pressure inside the protective cover 4 and the atmosphere outside the envelope 6 are made roughly equal, and the speed of the gas flowing from outside the envelope 6 into the protective cover 4 is maintained low. In other words, this is a form that reduces the occurrence of gas pressure loss. Therefore, the resistance force of the gas to the feed mechanism 5 does not fluctuate, and high precision of the feed mechanism 5 in the mechanical device 10 can be achieved.

[0029] In this embodiment, the pressure difference between the inside of the protective cover 4 and the inside of the envelope 6 is larger than the pressure difference between the atmosphere outside the envelope 6 and the inside of the protective cover 4. Therefore, the flow velocity generated by the pressure difference between the inside of the protective cover 4 and the inside of the envelope 6 is more dominant than the flow velocity generated by the pressure difference between the outside of the envelope 6 and the inside of the protective cover 4.

[0030] Both ends of the protective cover 4 are connected by air ducts 8 to an atmosphere different from that of the envelope 6, so the pressure inside the protective cover 4 is relatively positive compared to the pressure inside the envelope 6, which is negative due to the exhaust of gas. Even if the protective cover 4 has holes through which air can enter and exit, the pressure difference between the gas inside the envelope 6 and the protective cover 4 can prevent powder, foreign matter, etc. that scatters during mechanical processing from entering the protective cover 4.

[0031] Second Embodiment Next, as a second embodiment, a blast processing device, which is an example of the mechanical device 10 according to the first embodiment, will be described with reference to FIG.

[0032] In Figure 1, there is an enclosure 6 that defines a blasting chamber (processing chamber), and within the enclosure 6, an abrasive spray nozzle 1 (hereinafter referred to as nozzle 1), which sprays an abrasive carried on high-velocity gas, is positioned opposite a workpiece 2 placed on a worktable 3. The nozzle 1 is connected to a support part 11 that is linked to a feed mechanism 5 and driven by the feed mechanism 5, so that the nozzle 1 operates in accordance with the drive of the feed mechanism 5 to perform blasting. Here, the feed mechanism 5 moves the nozzle 1 via the support part 11, but it can also be connected to the worktable 3.

[0033] The exhaust section 7 can not only exhaust gas but also suck abrasives and the like generated during blasting. For example, a classifier, a dust collector, or the like is used as the exhaust section.

[0034] Third Embodiment Next, the X-direction feed mechanism 55 of the first and second embodiments will be described with reference to FIG.

[0035] FIG. 2 shows the configuration of the feed mechanism according to this embodiment in the X direction. The feed mechanism 55 in FIG. 2 is perpendicular to the feed mechanism 5 in FIG. 1 and performs a feed operation in the X direction. Like the feed mechanism 5, the feed mechanism 55 is also enclosed by a protective cover 4. The feed mechanism 5 is composed of a ball screw 12, a guide rail 13, a guide support member 14 supporting the guide rail 13, a beam structure 15 supporting the entire feed mechanism in the Y direction, a guide carriage 16, and a motor 17, and drives the support unit 11. The operation of the motor 17 rotates the ball screw 12, thereby driving the support unit 11 along the guide rail 13. In FIG. 1, the support unit 11 and the protective cover 4 are connected by a fixed part, so that the protective cover 4 expands and contracts in conjunction with the operation of the feed mechanism 5. In this embodiment, the protective cover 4 is interconnected from one end to the other, and openings 40 at both ends of the protective cover 4 are connected to the air duct 8. In addition to the devices and parts that make up the feed mechanism 55, a dust meter, a Cableveyor (registered trademark), a linear scale required for high-precision processing, and the like may be mounted inside the protective cover 4.

[0036] <Fourth embodiment> Next, the mechanical device 10 according to this embodiment will be described with reference to FIGS.

[0037] Figure 3(a) shows a combination of the feed mechanisms shown in Figure 2 for three orthogonal axes in the X, Y, and Z directions. Figure 3(b) is a cross-sectional view of the diagram in Figure 3(a). Feed mechanism 5 performs a feed operation on the Y axis, and another feed mechanism 55, which is orthogonal to feed mechanism 5, performs a feed operation on the X axis. Feed mechanism 5 is surrounded by protective cover 42, and feed mechanism 55 is surrounded by protective cover 41, and they perform feed operations on the respective orthogonal axes. In this example, a nozzle 1 is installed at the tip of feed mechanism 5.

[0038] 4(a) is a cross-sectional view in the X direction of FIG. 3(a), and FIG. 4(b) is a cross-sectional view in the Y direction of FIG. 3(a).

[0039] The protective cover (X direction) 41 and the protective cover (Y direction) 42 are connected by a hollow fixed cover (XY communication) 24, and the hollow fixed cover (XY communication) 24 is connected to the support part 11 of the feed mechanism 55 inside the protective cover (X direction) 41. Similarly, the protective cover (Y direction) 42 and the protective cover (Z direction) 43 are connected by a hollow fixed cover (YZ communication) 25, and the hollow fixed cover (YZ communication) 25 is connected to the feed mechanism 5 inside the protective cover (Y direction) 42.

[0040] The pipes that supply compressed gas to the nozzle 1 and the abrasive supply pipes run from the compressed gas supply equipment and abrasive supply equipment installed outside the enclosure 6 through each protective cover and fixed cover, enter the protective cover (Z direction) 43, and connect to the nozzle 1. This allows the compressed gas supply pipes and the abrasive supply pipes to follow the movement of the protective cover 4 that accompanies the drive of the feed mechanism 5 for each axis, and, like the feed mechanism 5, can be protected from damage caused by the scattering of abrasive during processing.

[0041] The support unit 11 driven by the X-direction feed mechanism 55 is connected to the Y-direction feed mechanism 5, and the support unit 11 driven by the Y-direction feed mechanism 5 is connected to the Z-direction feed mechanism. As a result, when the feed mechanism 55 drives in the X direction, the hollow fixed cover (XY communication) 24 and the protective cover (Y direction) 42 connected to the X-direction feed mechanism 55 also drive while following, and the nozzle 1 moves in the X direction. When the Y-direction feed mechanism 5 drives, the hollow fixed cover (YZ communication) 25 and the protective cover (Z direction) 43 connected to the Y-direction feed mechanism 5 also drive while following, and the nozzle 1 moves in the Y direction. Similarly, the protective cover (Z direction) 43 moves while following due to the operation of the Z-direction feed mechanism, and the nozzle 1 moves in the Z direction. For example, the fixed covers 24 and 25 are made of sheet metal. Alternatively, plastic or other materials may be used, and it is preferable that they are made of a material that surrounds the support unit 11 and is not easily deformed.

[0042] Protective cover (X direction) 41, which has openings at both ends, is connected to protective cover (Y direction) 42 through hollow fixed cover (XY communication) 24, and further connected to hollow fixed cover (YZ communication) 25. Although protective cover (Z direction) 43 is omitted because this is a cross-sectional view, by also connecting hollow fixed cover (YZ communication) 25 and protective cover (Z direction) 43, it is possible to achieve three-axis communication within each protective cover in the X, Y, and Z directions.

[0043] By opening both ends of protective cover 4 and connecting them to the atmosphere outside envelope 6, the pressure inside protective cover 4 can be kept constant at atmospheric pressure. This configuration can suppress fluctuations in the resistance force on support part 11 due to the degree of expansion and contraction of the bellows, thereby achieving high precision in feed mechanism 5. Here, the atmosphere outside envelope 6 is the air.

[0044] The enclosure 6 is installed in a position surrounding the protective cover 4, and in order to communicate the inside of the protective cover 4 with the atmosphere outside the enclosure 6, an opening 60 of the same size as the end of the protective cover 4 is provided at the joining position with the end of the protective cover 4.

[0045] By joining the opening 40 of the protective cover 41 and the opening 60 of the envelope 6, the inside of the protective cover 4 is connected to the atmospheric environment. However, it does not have to be an atmospheric environment; the present invention can be applied to any atmosphere that is separated from the inside of the envelope 6 and in which pressure is applied to the wall surface of the envelope 6 from outside the envelope 6. In addition, the inside of the protective cover 4 is connected to the atmospheric environment via a filter, preventing the intrusion of dirt and dust in the air. The filter is provided, for example, at the opening 40, but it may be provided closer to the envelope 6 than the opening 40.

[0046] With this configuration, the suction function is activated during processing, and while the abrasive is being collected through the exhaust section 7, the gas inside the enclosure 6 is exhausted to the outside of the enclosure 6, creating a negative pressure inside the enclosure 6. The pressure inside the protective cover 4 and fixed covers 24, 25, which communicate with the air duct 8, is relatively positive compared to the negative pressure inside the enclosure 6. This makes it possible to prevent dust scattered during processing from entering the protective cover 4 due to the pressure difference between the gas inside the enclosure 6 and the protective cover 4.

[0047] In this embodiment, as in the first embodiment, the suction function is activated during processing, and while abrasives and the like are being collected through the exhaust unit 7, the gas inside the enclosure 6 is exhausted to the outside of the enclosure 6, creating a negative pressure inside the enclosure 6. The inside of the protective cover 4 is connected to the atmospheric environment and to a space different from the enclosure 6, so the air pressure inside the protective cover 4 is relatively positive compared to the inside of the enclosure 6, which has become negative pressure due to the exhaust of gas. This makes it possible to prevent abrasives and the like scattered during blast processing from entering the protective cover 4 due to the pressure difference between the gas inside the enclosure 6 and the protective cover 4.

[0048] This embodiment does not require any equipment to supply gas to the protective cover 4, so the machine device 10 including the feed mechanism 5 according to this embodiment can be easily installed in a general processing area.

[0049] Fifth Embodiment Next, a mechanical device 10 according to a fifth embodiment will be described with reference to FIGS.

[0050] FIG. 5 is a schematic diagram showing a mechanical device 10 according to this embodiment.

[0051] In addition to the mechanical device 10 of the second embodiment, the mechanical device 10 of this embodiment has a partition member 9 or 90 provided between at least one of the protective cover 4 and the work table 3, or between the enclosure 6 and the work table 3.

[0052] By providing the partition members 9, 90, it is possible to prevent the abrasives supplied together with the compressed gas during processing and the cutting chips of the workpiece 2 from scattering and directly colliding with the wall surfaces of the enclosure 6 and the protective cover 4.

[0053] Furthermore, by limiting the main scattering area of the abrasive from the entire inside of the enclosure 6 to the space partitioned by the partition members 9 (horizontal) and 90 (vertical), the recovery efficiency of the abrasive recovered from the exhaust section 7 is improved. Furthermore, when cleaning the inside of the enclosure 6 during maintenance work, it is only necessary to focus on the spaces within the partition members 9 and 90, which is expected to improve the efficiency of the maintenance work.

[0054] Figure 6 shows a specific implementation method for the partition member 9 in the configuration of Figure 5. In this embodiment, the feed mechanism 5 is provided on the nozzle 1 side. Therefore, in order to enhance the partitioning effect of the partition member 9 in partitioning the abrasive, it is necessary for the partition member 9 to move horizontally in synchronization with the driving of the nozzle 1. Therefore, a configuration in which bellows are combined in the XY horizontal directions, as shown in Figure 6, is used.

[0055] Partition bellows (X direction) 31 in Figure 6 operates in accordance with the movement of nozzle 1 in the X direction. Furthermore, partition bellows (Y direction) 32, when incorporated into partition bellows (X direction) 31, also corresponds to the movement of nozzle 1 in the Y direction. This allows partition member 9 to operate in accordance with the movement of nozzle 1 in the horizontal XY directions, and functions as a partition member for the abrasive.

[0056] Even when partition members 9, 90 are provided, the inside of protective cover 4 is connected to the outside of enclosure 6, so the resistance force on support part 11 does not fluctuate, thereby achieving high precision in feed mechanism 5. Partition bellows 31, 32 are, for example, panel-type bellows, and have sheet metal at the ends of the bellows.

[0057] The mechanical device 10 according to this embodiment can be used, for example, when processing a substrate holder. The substrate holder can refer to, for example, the substrate holder described in Japanese Patent Application Laid-Open No. 2015-94002. The substrate holder can be, for example, an FPD chuck in an FPD (flat panel display) exposure device.

[0058] In the above-described embodiment, a blast processing machine has been described as an example of the mechanical device 10, but the present invention is not limited to blast processing machines and can also be applied to other processing machines. It can be applied not only to grinding processes such as blast processing, but also to mechanical devices used for cutting processes and laser processing. It can also be applied to inspection devices that require precise feeding.

[0059] The exhaust section 7 can suck out abrasives, cutting chips, and the like that are generated when processing with these processing devices.

[0060] Appropriate modifications are possible within the scope of the technical concept. For example, multiple embodiments can be combined. Also, some features of at least one embodiment can be deleted or replaced. Also, new features can be added to at least one embodiment.

[0061] The disclosure of this specification includes not only what is explicitly described in this specification, but also all matters that can be understood from this specification and the drawings attached to this specification.

[0062] Furthermore, the disclosure of this specification includes the complement of each individual concept described in this specification. In other words, if this specification contains a statement that "A is greater than B," for example, it can be said that this specification discloses "A is not greater than B," even if it omits the statement that "A is not greater than B." This is because when a statement that "A is greater than B" is made, it is assumed that the case in which "A is not greater than B" is taken into consideration. [Explanation of symbols]

[0063] 4 Cover 5. Feed mechanism 6 Envelope

Claims

1. An apparatus comprising: a moving mechanism for moving an object; a cover provided around the moving mechanism; and an enclosure provided around the object, The atmosphere inside the cover is made to be the same as the atmosphere outside the envelope, a difference between the atmospheric pressure outside the enclosure and the atmospheric pressure inside the cover is smaller than a difference between the atmospheric pressure inside the cover and the atmospheric pressure inside the enclosure; An apparatus characterized in that

2. The air pressure inside the enclosure where the object exists is set to be lower than the air pressure inside the cover.

2. The device of claim 1 .

3. The difference between the atmospheric pressure outside the enclosure and the atmospheric pressure inside the cover is and the atmospheric pressure inside the enclosure, 3. The device according to claim 1 or 2.

4. The outside of the enclosure is the atmosphere.

4. Apparatus according to any one of claims 1 to 3.

5. The cover has a hole that allows gas to enter and exit the inside of the enclosure.

5. An apparatus according to any one of claims 1 to 4.

6. an opening for exchanging the atmosphere inside the cover with the atmosphere outside the envelope; 6. An apparatus according to any one of claims 1 to 5.

7. a moving mechanism other than the moving mechanism, the moving direction of the other moving mechanism being perpendicular to the moving direction of the moving mechanism; 7. Apparatus according to any one of claims 1 to 6.

8. a cover separate from the cover is provided around the other moving mechanism, and the other cover is in communication with the cover; 8. The device according to claim 7.

9. the cover or the other cover is bellows-shaped; 9. The device according to claim 8.

10. an air duct is provided to make the atmosphere inside the cover equal to the atmosphere outside the enclosure; 10. Apparatus according to any one of claims 1 to 9.

11. An exhaust unit is provided to exhaust gas from inside the enclosure.

11. Apparatus according to any one of claims 1 to 10.

12. While performing work with the object, the exhaust unit sucks gas inside the enclosure.

12. The device of claim 11 .

13. a support portion for supporting the object, the movement mechanism is connected to the support part and moves the object by moving the support part; 13. Apparatus according to any one of claims 1 to 12.

14. the object is an abrasive jet nozzle or a work table provided opposite the abrasive jet nozzle; 14. Apparatus according to any one of claims 1 to 13.

15. a partition member is provided inside the enclosure between at least one of the work table and the cover or the work table and the enclosure; 15. The device of claim 14.

16. the workpiece to be machined by the abrasive jet nozzle is ceramic; manufacturing a substrate holder by processing the workpiece with the abrasive spray nozzle; 16. Apparatus according to claim 14 or 15.

17. Laser processing is performed using the object.

14. Apparatus according to any one of claims 1 to 13.

18. The moving mechanism is capable of performing precision feeding.

18. Apparatus according to any one of claims 1 to 17.

19. A method for manufacturing an article, comprising manufacturing the article using the apparatus according to any one of claims 1 to 18.

20. A method for controlling an apparatus including a movement mechanism for moving an object, a cover provided around the movement mechanism, and an enclosure provided around the object, the method comprising: The atmosphere inside the cover is made to be the same as the atmosphere outside the envelope, a difference between the atmospheric pressure outside the enclosure and the atmospheric pressure inside the cover is smaller than a difference between the atmospheric pressure inside the cover and the atmospheric pressure inside the enclosure; moving the object by the movement mechanism; A control method comprising:

21. A control program for causing a computer to execute the control method according to claim 20.

22. A computer-readable recording medium storing the control program according to claim 21.

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