Inspection device and inspection method

Abstract

To accurately evaluate an opening degree of a hole of an inspection object article.SOLUTION: An inspection device 1 comprises: an irradiation unit 11 which irradiates an inspection object region 2a including a hole 21 with the infrared light; a light reception unit 13 which is opposed to the inspection object region 2a and receives the infrared light; a generation unit which generates an infrared image in which the inspection object region 2a is captured on the basis of the light reception result by the light reception unit 13; a detection unit which detects the hole 21 captured in the infrared image by performing pattern matching processing to the generated infrared image; and an evaluation unit which evaluates an opening degree of the detected hole 21.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to an inspection apparatus and an inspection method. [Background technology]

[0002] In the industrial world, technologies for automatically inspecting various types of products have been proposed in order to reduce the inspection time for the products. For example, as disclosed in Patent Document 1, an inspection device has been proposed that irradiates an inspection product with infrared rays and receives the infrared rays. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2019-148607 Summary of the Invention [Problem to be solved by the invention]

[0004] However, there is a demand for reducing the inspection time using an inspection device even in the inspection of an object having an inspection area including a hole. In the inspection of an object having an inspection area including a hole, the degree of opening of the hole may be evaluated. Therefore, it is desirable to accurately evaluate the degree of opening of the hole of the object using an inspection device.

[0005] An object of the present disclosure is to provide an inspection device and an inspection method that can accurately evaluate the degree of hole opening in an inspection target product. [Means for solving the problem]

[0006] In order to solve the above problems, the inspection device of the present disclosure includes an irradiation unit that irradiates an inspection target area including a hole with infrared rays, and an inspection unit that faces the inspection target area and The inspection target area absorbs the infrared rays irradiated from the irradiation unit and generates heat.The inspection device includes a light receiving unit that receives infrared rays, a generating unit that generates an infrared image showing an area to be inspected based on the light receiving result by the light receiving unit, a detecting unit that detects holes that appear in the infrared image by performing a pattern matching process on the generated infrared image, and an evaluating unit that evaluates the degree of opening of the detected holes. The irradiation unit and the inspection target area are covered by a cover, and the infrared light emitted from the irradiation unit is reflected by the inner peripheral surface of the cover and uniformly irradiated onto the inspection target area. .

[0007] In the pattern matching process, the detection unit may use a template including a plurality of hole objects arranged in a positional relationship corresponding to the positional relationship of the plurality of holes.

[0008] An output unit may be provided that outputs information showing an evaluation result screen on which the evaluation result of the hole opening condition by the evaluation unit is displayed.

[0009] The evaluation unit may evaluate the degree of hole opening on a multiple-level scale, and the evaluation result screen may display information about the number of evaluations for each level in the evaluation of the degree of hole opening as the evaluation result.

[0010] In order to solve the above problem, the inspection method of the present disclosure is to Depending on the irradiation area A step of irradiating infrared light and a light receiving unit facing the inspection target area The inspection target area absorbs the infrared rays irradiated from the irradiation unit and generates heat, The method includes the steps of: receiving infrared rays; generating an infrared image showing the inspection target area based on the light receiving result by the light receiving unit; detecting holes shown in the infrared image by performing a pattern matching process on the generated infrared image; and evaluating the degree of opening of the detected holes. The irradiation unit and the inspection target area are covered by a cover, and the infrared light emitted from the irradiation unit is reflected by the inner surface of the cover and is uniformly irradiated onto the inspection target area. . [Effects of the Invention]

[0011] According to the present disclosure, the degree of hole opening in an inspection target product can be evaluated with high accuracy. [Brief explanation of the drawings]

[0012] [Figure 1] FIG. 1 is a schematic diagram showing the overall configuration of an inspection device according to an embodiment of the present disclosure. [Figure 2]FIG. 2 is a schematic diagram showing an infrared image showing an inspection target area of an inspection target item according to an embodiment of the present disclosure. [Figure 3] FIG. 3 is a block diagram illustrating an example of a functional configuration of a control device according to an embodiment of the present disclosure. [Figure 4] FIG. 4 is a flowchart showing an example of a processing flow related to the inspection of an inspection target item performed by the inspection device according to an embodiment of the present disclosure. [Figure 5] FIG. 5 is a schematic diagram showing a template used in the pattern matching process according to the embodiment of the present disclosure. [Figure 6] FIG. 6 is a flowchart showing an example of a process flow in evaluating the degree of hole opening performed by the inspection device according to an embodiment of the present disclosure. [Figure 7] FIG. 7 is a diagram showing the state of holes evaluated as "Open" in the evaluation of the degree of hole opening according to an embodiment of the present disclosure. [Figure 8] FIG. 8 is a diagram showing the state of a hole evaluated as "Half Open" in the evaluation of the hole opening state according to an embodiment of the present disclosure. [Figure 9] FIG. 9 is a diagram showing the state of a hole evaluated as "Close" in the evaluation of the degree of hole opening according to an embodiment of the present disclosure. [Figure 10] FIG. 10 is a diagram illustrating an example of an evaluation result screen according to an embodiment of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0013] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. Dimensions, materials, and other specific numerical values shown in the embodiments are merely examples for ease of understanding and, unless otherwise specified, do not limit the present disclosure. In this specification and drawings, elements having substantially the same functions and configurations are designated by the same reference numerals to avoid redundant explanation, and elements not directly related to the present disclosure are not shown.

[0014] 1 is a schematic diagram showing the overall configuration of an inspection device 1 according to this embodiment. As shown in FIG. 1, the inspection device 1 includes an irradiation unit 11, a cover 12, a light receiving unit 13, a display device 14, and a control device 15.

[0015] The irradiation unit 11 irradiates infrared rays. The irradiation unit 11 irradiates, for example, infrared rays in the near-infrared wavelength range. However, the wavelength of the infrared rays irradiated by the irradiation unit 11 is not particularly limited. The irradiation unit 11 is covered by a cover 12. The cover 12 has a substantially spherical shape. The bottom 12a of the cover 12 is flat. An opening 12b is provided at the top of the cover 12 (the part opposite the bottom 12a). The irradiation unit 11 is arranged in the internal space of the cover 12 near the bottom 12a.

[0016] The irradiation unit 11 irradiates infrared rays toward the top side of the cover 12. The infrared rays irradiated from the irradiation unit 11 are reflected by the inner circumferential surface of the cover 12 and converge toward the center of the internal space of the cover 12. An inspection target 2 is provided inside the cover 12. The inspection target 2 is placed near the center of the internal space of the cover 12. The infrared rays irradiated from the irradiation unit 11 are reflected by the inner circumferential surface of the cover 12 and then irradiated onto the inspection target 2. Because the cover 12 has a substantially spherical shape, the inspection target 2 is uniformly illuminated by the infrared rays.

[0017] The inspection target item 2 has an inspection target area 2a including holes 21. For example, the inspection target item 2 has a flat plate shape. A plurality of holes 21 are formed in the inspection target area 2a of the inspection target item 2, penetrating the inspection target area 2a in the thickness direction of the inspection target item 2. Inside the cover 12, infrared rays irradiated from the irradiation unit 11 are irradiated onto the inspection target area 2a of the inspection target item 2.

[0018] The light receiving unit 13 receives infrared light. The light receiving unit 13 is, for example, a camera having multiple image pickup elements that sense infrared light. The light receiving unit 13 faces the inspection target area 2a of the inspection target item 2. In the example of FIG. 1, the light receiving unit 13 is disposed outside the cover 12 and faces the opening 12b of the cover 12. The light receiving unit 13 faces the inspection target area 2a of the inspection target item 2 via the opening 12b of the cover 12.

[0019] The inspection object 2 is formed of, for example, a resin or a composite material containing a resin (for example, carbon fiber reinforced plastics (CFRP)). As such, the inspection object 2 has a material that easily absorbs infrared rays. Therefore, when infrared rays are irradiated onto the inspection object area 2a of the inspection object 2, the infrared rays are absorbed in the inspection object area 2a, and the inspection object area 2a generates heat. As a result, infrared rays are emitted from the inspection object area 2a. The infrared rays emitted from the inspection object area 2a of the inspection object 2 are then received by the light receiving unit 13. As will be described later, the inspection device 1 generates an infrared image showing the inspection object area 2a of the inspection object 2 based on the light receiving result by the light receiving unit 13. The generated infrared image is used to inspect the opening degree of the hole 21. The opening degree of the hole 21 refers to the degree of actual size relative to the assumed size of the opening of the hole 21. For example, the ratio of the actual opening area of the hole 21 to the design value of the opening area of the hole 21, or an index corresponding to this ratio, etc. may be used as an index indicating the degree of opening of the hole 21.

[0020] FIG. 2 is a schematic diagram showing an infrared image 3 that captures an inspection target area 2a of an inspection target item 2. As shown in FIG. 2, a plurality of holes 21 are arranged in a grid pattern in the inspection target area 2a of the inspection target item 2. The shape of the holes 21 in the infrared image 3 is, for example, circular. In the example of FIG. 2, six holes 21 are arranged around one hole 21. These six holes 21 surrounding one hole 21 are located at the vertices of a regular hexagon with the central hole 21 as its center. However, the arrangement of the holes 21 in the inspection target area 2a is not limited to the example of FIG. 2.

[0021] In Figure 2, the difference in brightness between pixels in the infrared image 3 is represented by shades of gray. The darker the area, the higher the brightness. As described above, the inspection target 2 absorbs and emits infrared rays. That is, infrared rays are emitted from the areas of the inspection target area 2a where no holes 21 are formed. Therefore, in the infrared image 3, the brightness of the areas of the inspection target area 2a where no holes 21 are formed is high. On the other hand, since infrared rays pass through the holes 21, infrared rays are not emitted from the areas of the inspection target area 2a where the holes 21 are formed. Therefore, in the infrared image 3, the brightness of the areas of the inspection target area 2a where the holes 21 are formed is low. Note that the infrared rays irradiated from the irradiation unit 11 are not passed through the holes 21 in the direction toward the light receiving unit 13 and are not directly received by the light receiving unit 13.

[0022] As described above, in this embodiment, an infrared image 3 showing the inspection target area 2a is obtained by irradiating and receiving infrared rays. In the infrared image 3 thus obtained, there is a clear difference in brightness (i.e., a large difference) between the portion of the inspection target area 2a where no hole 21 is formed and the portion where the hole 21 is formed. This makes it possible to accurately detect the hole 21 shown in the infrared image 3. Details of image processing such as the detection of the hole 21 will be described later.

[0023] Here, in inspecting the degree of opening of the hole 21, it is conceivable to obtain a visible light image showing the inspection target area 2a by irradiating the inspection target area 2a with visible light and receiving the reflected light. In the visible light image obtained in this manner, there may be little difference in brightness between the portions of the inspection target area 2a where the hole 21 is not formed and the portions where the hole 21 is formed. For example, if the inspection target 2 has a glossy material, the irradiated visible light is not diffusely reflected on the surface of the inspection target 2 and is therefore less likely to be received. As a result, in the obtained visible light image, the brightness of the portions of the inspection target area 2a where the hole 21 is not formed may be low and may become close to the brightness of the portions where the hole 21 is formed.

[0024] 1 visually displays information. The display device 14 is, for example, a liquid crystal display.

[0025] The control device 15 controls and processes images of each device in the inspection device 1. The control device 15 includes, for example, a central processing unit (CPU), a ROM in which programs and the like are stored, and a RAM as a work area.

[0026] Fig. 3 is a block diagram showing an example of the functional configuration of the control device 15. As shown in Fig. 3, the control device 15 includes a control unit 15a and an image processing unit 15b.

[0027] The control unit 15a controls the operation of each device in the inspection device 1. For example, the control unit 15a controls the operation of the irradiation unit 11. Also, for example, the control unit 15a controls the operation of the light receiving unit 13. Also, for example, the control unit 15a controls the operation of the display device 14.

[0028] Image processing unit 15b performs various types of image processing and includes a generation unit 15b1, a detection unit 15b2, an evaluation unit 15b3, and an output unit 15b4.

[0029] The generation unit 15b1 generates an infrared image 3 showing the inspection target area 2a based on the light reception result by the light receiving unit 13. The detection unit 15b2 detects holes 21 shown in the infrared image 3. The evaluation unit 15b3 evaluates the degree of opening of the detected holes 21. The output unit 15b4 outputs information showing an evaluation result screen, which will be described later with reference to FIG. 10. The evaluation result screen is a screen on which the evaluation result of the degree of opening of the holes 21 by the evaluation unit 15b3 is displayed. For example, the information showing the evaluation result screen is output to the display device 14, and the evaluation result screen is displayed by the display device 14.

[0030] Fig. 4 is a flowchart showing an example of the flow of processing related to the inspection of the inspection target item 2 performed by the inspection device 1. The processing flow shown in Fig. 4 is executed, for example, when a start operation to start the inspection of the inspection target item 2 is performed by a user. The start operation by the user is accepted, for example, by the control device 15.

[0031] 4 starts, in step S101, the irradiation unit 11 irradiates the inspection target area 2a of the inspection target 2 with infrared rays. The irradiation of infrared rays by the irradiation unit 11 is controlled by the control unit 15a. For example, when the control unit 15a receives a start operation from a user, the control unit 15a causes the irradiation unit 11 to irradiate infrared rays. The irradiation of infrared rays by the irradiation unit 11 is carried out for a predetermined time.

[0032] Next, in step S102, the light receiving unit 13 receives infrared rays emitted from the inspection target area 2a. The control unit 15a controls the light receiving unit 13 to receive infrared rays. For example, the control unit 15a controls the light receiving unit 13 to receive infrared rays while the irradiating unit 11 is irradiating infrared rays.

[0033] Next, in step S103, the generation unit 15b1 of the image processing unit 15b generates the infrared image 3 showing the inspection target area 2a based on the light reception result by the light receiving unit 13.

[0034] Next, in step S104, the detector 15b2 of the image processor 15b detects the holes 21 appearing in the infrared image 3 by performing a pattern matching process on the generated infrared image 3.

[0035] Pattern matching is image processing that uses a prepared template to identify a portion of the image to be processed (i.e., the infrared image 3) that has a geometric pattern similar to that of the template.

[0036] 5 is a schematic diagram showing a template 4 used in the pattern matching process. As shown in FIG. 5, the template 4 includes a hole object 41 representing the hole 21 in the inspection target area 2a. The shape of the hole object 41 is circular. The dimensions of the hole object 41 are approximately the same as the expected dimensions of the hole 21 in the infrared image 3.

[0037] In the example of FIG. 5, the template 4 includes seven hole objects 41. The seven hole objects 41 are arranged in a positional relationship that corresponds to the positional relationship of the multiple holes 21 in the inspection target area 2a. Specifically, the seven hole objects 41 are arranged in a grid pattern. Six hole objects 41 are arranged around a central hole object 41. These six hole objects 41 surrounding the central hole object 41 are located at the vertices of a regular hexagon with the central hole object 41 at its center. The distance between adjacent hole objects 41 is approximately the same as the distance expected to be between adjacent holes 21 in the infrared image 3.

[0038] In the pattern matching process, the detection unit 15b2 scans the template 4 on the infrared image 3 and identifies a portion having a geometric pattern similar to that of the template 4. As a result, holes 21 appearing in the infrared image 3 are detected, and regions on the infrared image 3 where holes 21 exist are distinguished from regions where holes 21 do not exist. Furthermore, the detection unit 15b2 binarizes the infrared image 3 and performs a labeling process. In the labeling process, the detection unit 15b2 assigns the same number to pixels included in the same hole 21 on the infrared image 3, and assigns a different number to each hole 21. In this way, each hole 21 is distinguished.

[0039] As described above, in the pattern matching process, the detection unit 15b2 uses the template 4 including a plurality of hole objects 41 that are arranged in a positional relationship corresponding to the positional relationship of the plurality of holes 21. As will be described later, some of the holes 21 may be blocked by foreign matter (for example, an adhesive used to bond members that constitute the inspection target 2). Even in such a case, the holes 21 can be detected with high accuracy by using the template 4 including a plurality of hole objects 41. For example, in the example of FIG. 5, even if some of the seven holes 21 arranged in positions corresponding to the seven hole objects 41 in the template 4 are blocked by foreign matter, the holes 21 can be detected by comparing the similarity between the unblocked holes 21 and the template 4.

[0040] However, the number of hole objects 41 in the template 4 is not limited to the example in Fig. 5. For example, the number of hole objects 41 in the template 4 may be one or a plural number other than seven.

[0041] After step S104 in FIG. 4, in step S105, the evaluation unit 15b3 of the image processing unit 15b evaluates the degree of opening of the detected hole 21.

[0042] Fig. 6 is a flowchart showing an example of the process flow in evaluating the opening state of the hole 21 performed by the inspection device 1. The process flow shown in Fig. 6 shows an example of the process flow in step S105 in Fig. 4 performed by the evaluation unit 15b3.

[0043] When the processing flow shown in FIG. 6 starts, in step S201, the evaluation unit 15b3 determines a hole 21 to be evaluated from among the detected holes 21.

[0044] If the result of the judgment in step S205 described below is YES (i.e., it is judged that there are unevaluated holes 21) and the process returns to step S201, the evaluation unit 15b3 determines the hole 21 to be evaluated from among the detected multiple holes 21 whose evaluation of the opening state has not been completed.

[0045] Next, in step S202, the evaluation unit 15b3 calculates the opening area S of the hole 21 to be evaluated.

[0046] In step S202, the evaluation unit 15b3 calculates the opening area S of the hole 21 to be evaluated, for example, by counting the number of pixels included in the hole 21 to be evaluated on the infrared image 3. Note that a correlation between the number of pixels and the area may be specified in advance, and the area may be calculated from the number of counted pixels using this correlation.

[0047] Next, in step S203, the evaluation unit 15b3 calculates the roundness C of the hole 21 to be evaluated.

[0048] In step S203, the evaluation unit 15b3 calculates, for example, the circularity C as the ratio of the opening area S to the area of a circle whose radius is the maximum value of the distance from the geometric center of the area in which the hole 21 to be evaluated appears on the infrared image 3 to the boundary of the area.

[0049] Next, in step S204, the evaluation unit 15b3 evaluates the degree of opening of the hole 21 based on the opening area S and the circularity C in three stages: "Open," "Half Open," and "Close."

[0050] FIG. 7 is a diagram showing a hole 21 evaluated as "Open" in the evaluation of the degree of opening of the hole 21. "Open" is the highest evaluation of the degree of opening. As shown in FIG. 7, the degree of opening of a hole 21 to which almost no foreign matter 22 (see FIGS. 8 and 9) is attached is evaluated as "Open."

[0051] FIG. 8 is a diagram showing a hole 21 evaluated as "Half Open" in the evaluation of the degree of opening of the hole 21. "Half Open" is the next highest evaluation after "Open" in terms of the degree of opening. As shown in FIG. 8, the degree of opening of a hole 21 that is partially covered by a foreign object 22 is evaluated as "Half Open."

[0052] FIG. 9 is a diagram showing the state of a hole 21 evaluated as "Close" in the evaluation of the degree of opening of the hole 21. "Close" is the lowest evaluation of the degree of opening. As shown in FIG. 9, the degree of opening of a hole 21 that is entirely covered with foreign matter 22 is evaluated as "Close."

[0053] In step S204, the evaluation unit 15b3 evaluates the degree of opening of the hole 21 as "Open", for example, if the opening area S is greater than a first area threshold (for example, 90% of the design value of the opening area S) and the circularity C is greater than a circularity threshold (for example, 90%). The evaluation unit 15b3 evaluates the degree of opening of the hole 21 as "Half Open", for example, if the opening area S is equal to or less than the first area threshold and greater than a second area threshold (for example, 5% of the design value of the opening area S). The second area threshold is a value smaller than the first area threshold. The evaluation unit 15b3 evaluates the degree of opening of the hole 21 as "Close", for example, if the opening area S is equal to or less than the second area threshold.

[0054] However, the conditions for performing each evaluation of "Open", "Half Open", and "Close" (i.e., evaluation conditions) are not limited to the above examples. Note that if none of the evaluation conditions for "Open", "Half Open", and "Close" is satisfied, or if the opening area S or the circularity C is an abnormal value, the evaluation unit 15b3 may perform an evaluation other than "Open", "Half Open", and "Close" (for example, an evaluation of "Error" may be performed).

[0055] As described above, the evaluation unit 15b3 evaluates the degree of opening of the hole 21 in multiple stages. This makes it easier for a user checking the evaluation results to intuitively grasp the degree of opening of the hole 21. In the above example, the evaluation unit 15b3 evaluated the degree of opening of the hole 21 in three stages. However, the evaluation unit 15b3 may evaluate the degree of opening of the hole 21 in two stages, or in four or more stages.

[0056] Next, in step S205, the evaluation unit 15b3 determines whether or not there are any unevaluated holes 21. If it is determined that there are any unevaluated holes 21 (step S205 / YES), the process returns to step S201. On the other hand, if it is determined that there are no unevaluated holes 21 (step S205 / NO), the process proceeds to step S206.

[0057] If the determination in step S205 is NO, in step S206, the evaluation unit 15b3 calculates the average pore diameter of the pores 21 evaluated as "Open".

[0058] In step S206, the evaluation unit 15b3 randomly extracts a predetermined number of holes 21 from the holes 21 evaluated as "Open", for example. For each of the extracted holes 21, the evaluation unit 15b3 calculates a representative distance (for example, a maximum value or an average value) from the geometric center of the area in which the hole 21 appears on the infrared image 3 to the boundary of the area. The evaluation unit 15b3 calculates the average value of the calculated representative distances for each hole 21 as the average hole diameter of the holes 21 evaluated as "Open".

[0059] Next, in step S207, the evaluation unit 15b3 calculates the opening ratio of the holes 21 in the inspection target area 2a of the inspection target product 2, and the processing flow shown in Fig. 6 ends. The opening ratio of the holes 21 in the inspection target area 2a is an index that indicates the average degree of opening of the holes 21 in the inspection target area 2a (that is, the average degree to which the holes 21 are open in the inspection target area 2a).

[0060] In step S207, the evaluation unit 15b3 calculates, as the opening ratio of the holes 21 in the inspection area 2a, a value obtained by weighting the opening ratios corresponding to each stage in the evaluation of the hole opening state (i.e., each stage of "Open," "Half Open," and "Close") by the number of evaluations for each stage. The number of holes 21 evaluated as "Open" is the number of evaluations for "Open" (hereinafter also referred to as the number of Open evaluations). The number of holes 21 evaluated as "Half Open" is the number of evaluations for "Half Open" (hereinafter also referred to as the number of Half Open evaluations). The number of holes 21 evaluated as "Close" is the number of evaluations for "Close" (hereinafter also referred to as the number of Close evaluations). In this way, the number of evaluations means the number of holes 21 evaluated at each stage when the opening state of the holes 21 is evaluated at multiple stages.

[0061] For example, assume that "Open" is associated with 100%, "Half Open" is associated with 50%, and "Close" is associated with 0%. In this case, the evaluation unit 15b3 divides the sum of the value obtained by multiplying the number of Open evaluations by 100%, the value obtained by multiplying the number of Half Open evaluations by 50%, and the value obtained by multiplying the number of Close evaluations by 0% by the total number of evaluated holes 21. The evaluation unit 15b3 calculates the value obtained in this way as the aperture ratio of the holes 21 in the inspection target region 2a.

[0062] 4, in step S106, the output unit 15b4 of the image processing unit 15b outputs information showing an evaluation result screen to the display device 14, the evaluation result screen is displayed on the display device 14, and the processing flow shown in Fig. 4 ends. The evaluation result screen displays the evaluation result of the opening state of the hole 21 by the evaluation unit 15b3 (for example, the result obtained by the processing flow of Fig. 6 described above).

[0063] FIG. 10 is a diagram showing an example of the evaluation result screen 5. As shown in FIG. 10, on the evaluation result screen 5, for example, a window 51 displaying information related to the evaluation result is superimposed on the infrared image 3. The window 51 displays the number of evaluations for each stage in the evaluation of the degree of opening of the holes 21 (hereinafter simply referred to as the number of evaluations for each stage) as the evaluation result. In the example of FIG. 10, the window 51 displays the number of open evaluations, the number of half open evaluations, and the number of close evaluations. The window 51 also displays the average hole diameter of the holes 21 evaluated as "open" ("average hole diameter" in FIG. 10). The window 51 also displays the opening rate of the holes 21 in the inspection target region 2a ("opening rate" in FIG. 10).

[0064] The evaluation result screen 5 displays information indicating the positions of the evaluated holes 21 for each stage in the evaluation of the degree of opening of the holes 21. In the example of FIG. 10 , the evaluation result for each hole 21 on the infrared image 3 is displayed using the letters “O,” “H,” and “C” at a position corresponding to the hole 21. “O” stands for “Open,” “H” stands for “Half Open,” and “C” stands for “Close.” The stage at which each hole 21 was evaluated may be displayed in a different color for each evaluation stage at a position corresponding to the hole 21 on the infrared image 3. In this way, information indicating the positions of the evaluated holes 21 for each stage is displayed on the evaluation result screen 5 as the evaluation result, allowing a user checking the evaluation results to easily intuitively grasp the distribution of the degree of opening of the holes 21 in the inspection target area 2a. Here, some of the infrared light irradiated onto the inspection target 2 passes through the inspection target 2. Therefore, the internal structure of the inspection target 2 may be reflected in the infrared image 3. In such a case, the positional relationship between the internal structure of the inspection object 2 and the distribution of the opening degree of the holes 21 can also be grasped.

[0065] An example of the evaluation result screen 5 has been described above with reference to FIG. 10. However, the information displayed on the evaluation result screen 5 is not limited to the example of FIG. 10. For example, in the window 51, instead of the number of evaluations for each level (i.e., the number of evaluations for each level in the evaluation of the degree of opening of the holes 21), the ratio of the number of evaluations for each level to the total number of holes 21 that were evaluated may be displayed. The number of evaluations for each level and the ratio of the number of evaluations for each level to the total number of holes 21 that were evaluated are included in the information regarding the number of evaluations for each level. Furthermore, for example, in the example of FIG. 10, some information may be omitted from the information displayed on the evaluation result screen 5, and information other than the information shown in FIG. 10 may be added to the information displayed on the evaluation result screen 5.

[0066] As described above, the information showing the evaluation result screen 5 is output by the output unit 15b4, allowing the user to properly understand the evaluation results of the degree of opening of the hole 21 of the inspection target 2. Furthermore, information about the evaluation number for each stage (i.e., the evaluation number for each stage in the evaluation of the degree of opening of the hole 21) is displayed as the evaluation result on the evaluation result screen 5, making it easier for the user checking the evaluation result to intuitively understand the degree of opening of the hole 21.

[0067] As described above, in the inspection device 1 according to this embodiment, infrared rays are irradiated onto the inspection target area 2a of the inspection target 2, and an infrared image 3 showing the inspection target area 2a is generated based on the light reception results from the light receiving unit 13 that receives the infrared rays. Then, the holes 21 shown in the infrared image 3 are detected by performing a pattern matching process on the infrared image 3. As described above, in the infrared image 3 obtained by irradiating and receiving infrared rays, there is a clear difference in brightness between the portions of the inspection target area 2a where no holes 21 are formed and the portions where holes 21 are formed. Therefore, by performing a pattern matching process on such an infrared image 3, it is possible to accurately detect the holes 21 shown in the infrared image 3. Therefore, the degree of opening of the holes 21 in the inspection target 2 can be accurately evaluated.

[0068] Although the embodiments of the present disclosure have been described above with reference to the accompanying drawings, it goes without saying that the present disclosure is not limited to such embodiments. It is clear that a person skilled in the art can conceive of various modifications and alterations within the scope of the claims, and it is understood that such modifications and alterations also fall within the technical scope of the present disclosure.

[0069] The components of the inspection device 1 have been described above with reference to Fig. 1. However, some components may be deleted, changed, or added to the example of Fig. 1. For example, the display device 14 may be omitted from the example of Fig. 1.

[0070] This disclosure can contribute, for example, to Goal 12 of the Sustainable Development Goals (SDGs), "Ensure sustainable consumption and production patterns." [Explanation of symbols]

[0071] 1. Inspection equipment 2a Inspection area 3. Infrared imaging 4. Templates 5 Evaluation result screen 11 Irradiation unit 13 Light receiving part 15b1 Generator 15b2 Detection unit 15b3 Evaluation Section 15b4 Output section 21 holes 41 Hole Object

Claims

1. an irradiation unit that irradiates an inspection target area including a hole with infrared rays; a light receiving unit facing the inspection target area, which receives infrared rays irradiated from the inspection target area as the inspection target area absorbs the infrared rays irradiated from the irradiating unit and generates heat; a generation unit that generates an infrared image showing the inspection target area based on the light reception result by the light receiving unit; a detection unit that detects the hole shown in the infrared image by performing a pattern matching process on the generated infrared image; an evaluation unit that evaluates the degree of opening of the detected hole; Equipped with the irradiation unit and the inspection target area are covered by a cover, The infrared light emitted from the irradiation unit is reflected by the inner circumferential surface of the cover and is uniformly irradiated onto the inspection target area. Inspection equipment.

2. the detection unit uses a template including a plurality of hole objects arranged in a positional relationship corresponding to a positional relationship of the plurality of holes in the pattern matching process; The inspection device according to claim 1 .

3. an output unit that outputs information showing an evaluation result screen on which the evaluation result of the hole opening state by the evaluation unit is displayed; 3. The inspection device according to claim 1 or 2.

4. the evaluation unit evaluates the degree of opening of the hole in a plurality of stages, The evaluation result screen displays information about the evaluation number of each stage in the evaluation of the hole opening state as the evaluation result. The inspection device according to claim 3 .

5. irradiating an inspection target area including a hole with infrared light by an irradiation unit; a step of receiving infrared rays irradiated from the inspection target area by a light receiving unit facing the inspection target area, the inspection target area absorbing the infrared rays irradiated from the irradiation unit and generating heat; generating an infrared image showing the inspection target area based on the light receiving result by the light receiving unit; detecting the holes in the infrared image by performing a pattern matching process on the generated infrared image; evaluating the degree of opening of the detected hole; Including, the irradiation unit and the inspection target area are covered by a cover, The infrared light emitted from the irradiation unit is reflected by the inner circumferential surface of the cover and is uniformly irradiated onto the inspection target area. Testing method.

Images