Manufacturing method and manufacturing device for disk drive suspension

Abstract

To provide a manufacturing method and a manufacturing apparatus capable of effectively suppressing flexure vibration, capable of efficiently manufacturing a suspension.SOLUTION: The manufacturing method of a disk device includes the steps of: determining a first position where a bend that bends in the thickness direction is formed on an outrigger by radiating a first laser beam to outriggers 50L, 50R of a flexure 30 of a suspension 10; calculating predicted values of a pitch angle and a roll angle of a tongue 42 of a flexure when a bend is formed at the first position of the outrigger, determining a second position to radiate a second laser beam to the outrigger so that the predicted value gets closer to the predetermined target value; irradiating the first position with the first laser beam to form a bend; and irradiating the second position with the second laser beam.SELECTED DRAWING: Figure 8

Description

[Technical Field]

[0001] The present invention relates to a method and an apparatus for manufacturing a suspension for a disk drive used in a hard disk drive or the like. [Background technology]

[0002] Hard disk drives (HDDs) are used in information processing devices such as personal computers. Hard disk drives include a magnetic disk that rotates around a spindle and a carriage that rotates around a pivot shaft. The carriage has an actuator arm and rotates around the pivot shaft in the track width direction of the disk by a positioning motor such as a voice coil motor.

[0003] A disk drive suspension (hereinafter simply referred to as the suspension) is attached to the actuator arm. The suspension includes a load beam and a flexure placed on the load beam. A slider that constitutes a magnetic head is mounted on a gimbal portion formed near the tip of the flexure. The slider is equipped with an element (transducer) for accessing the disk, such as reading or writing data. The load beam, flexure, and slider constitute a head gimbal assembly.

[0004] The gimbal portion includes a tongue on which the slider is mounted and a pair of outriggers formed on both sides of the tongue. These outriggers each have a shape that protrudes outward from both sides of the flexure. The vicinities of both ends of each outrigger in the longitudinal direction are fixed to the load beam by, for example, laser welding. Each outrigger can bend like a spring in the thickness direction, and plays an important role in ensuring the gimbal movement of the tongue.

[0005] To accommodate the increasing recording density of disks, it is necessary to further miniaturize the head gimbal assembly and enable the slider to be positioned with higher precision relative to the recording surface of the disk. To achieve this, it is necessary to minimize flexure vibration while ensuring the gimbal motion required of the head gimbal assembly. For example, as described in Patent Document 1, it is known to provide a damper material in part of the flexure to suppress flexure vibration.

[0006] When the disk rotates, the slider floats above the disk at a predetermined distance. To stabilize the slider's position during this time, high precision is required for the pitch and roll angles of the tongue or slider. Regarding this issue, for example, Patent Document 2 discloses a technology for correcting the pitch and roll angles to appropriate values by irradiating the flexure with a laser beam. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] Japanese Patent Application Laid-Open No. 2010-86630 [Patent Document 2] Japanese Patent Application Laid-Open No. 2007-66427 Summary of the Invention [Problem to be solved by the invention]

[0008] Although attaching a damping material to the flexure can suppress vibration of the flexure, it also changes the rigidity of the flexure, which can have an undesirable effect on gimbal motion.

[0009] Furthermore, when measures to suppress vibration of the flexure, such as attaching a damper material, or when adjusting the pitch angle and roll angle are performed, the number of steps required for manufacturing the suspension increases, which can result in an increase in the manufacturing cost of the suspension.

[0010] An object of the present invention is to provide a manufacturing method and a manufacturing apparatus that can effectively suppress vibration of a flexure and enable efficient manufacturing of a suspension. [Means for solving the problem]

[0011] In one embodiment of a method for manufacturing a suspension for a disk device, a first position for forming a bent portion that bends in the thickness direction of the outrigger is determined by irradiating a first laser light onto the outrigger of a flexure provided on the suspension, predicted values of the pitch angle and roll angle of the tongue of the flexure when the bent portion is formed at the first position of the outrigger are calculated, and a second position for irradiating a second laser light onto the outrigger is determined so that the predicted values approach predetermined target values, and the first laser light is irradiated onto the first position to form the bent portion, and the second laser light is irradiated onto the second position.

[0012] Initial values of the pitch angle and the roll angle may be measured in the suspension before the first laser light and the second laser light are irradiated, and the predicted values may be calculated based on the predicted changes in the pitch angle and the roll angle before and after forming the bent portion at the first position and the initial values.

[0013] The predicted change amount may be determined by measuring the pitch angle and the roll angle before and after forming the bent portion for a plurality of samples of the suspension.

[0014] The second position for bringing the predicted value closer to the target value may be determined using correction data that defines a relationship between the pitch angle and the roll angle that have deviated from the target value and the second position for bringing the pitch angle and roll angle closer to the target value.

[0015] For a specific vibration mode, a first gain of the flexure is measured when the bent portion is not formed in the outrigger, and for that vibration mode, for each of a plurality of positions on the outrigger, a second gain of the flexure is measured when the bent portion is formed at that position, and the position among the plurality of positions at which the second gain smaller than the first gain is obtained may be determined to be the first position.

[0016] The first position may be determined from a first region of the outrigger and the second position may be determined from a second region of the outrigger that is different from the first region.

[0017] The load beam and the flexure of the suspension may be fixed to a first fixing portion and a second fixing portion that is closer to the tip of the load beam than the first fixing portion, and the first region may be located between a dimple provided on the load beam and the first fixing portion in the longitudinal direction of the load beam.

[0018] According to one embodiment, a manufacturing apparatus for disk drive suspensions includes a laser irradiation device that irradiates an outrigger of a flexure included in the suspension with a first laser beam and a second laser beam, and a controller that controls the laser irradiation device. The controller executes a process of calculating predicted values of pitch angle and roll angle of the tongue when a bent portion that bends in the thickness direction is formed at a first position of the outrigger, and a process of determining a second position on the outrigger to irradiate the second laser beam so that the predicted values approach predetermined target values. The laser irradiation device irradiates the first position with the first laser beam to form the bent portion, and irradiates the second position with the second laser beam.

[0019] The manufacturing apparatus may further include an angle measurement device that measures initial values of the pitch angle and the roll angle of the suspension before the first laser beam and the second laser beam are irradiated. In this case, the controller may calculate the predicted values based on predicted changes in the pitch angle and the roll angle before and after forming the bent portion at the first position and the initial values.

[0020] The controller may determine the second position for bringing the predicted value closer to the target value by using correction data that defines a relationship between the pitch angle and the roll angle that have deviated from the target value and the second position for bringing the pitch angle and roll angle closer to the target value. [Effects of the Invention]

[0021] According to the present invention, it is possible to provide a manufacturing method and a manufacturing apparatus that can effectively suppress vibration of a flexure and enable efficient manufacturing of a suspension. [Brief explanation of the drawings]

[0022] [Figure 1] FIG. 1 is a schematic perspective view showing an example of a disk device according to an embodiment. [Figure 2] FIG. 2 is a schematic cross-sectional view of the disk drive shown in FIG. [Figure 3] FIG. 3 is a schematic plan view of a suspension according to one embodiment. [Figure 4] FIG. 4 is a schematic plan view of a flexure according to an embodiment. [Figure 5] FIG. 5 is a schematic cross-sectional view of an outrigger and load beam including a bend according to one embodiment. [Figure 6] FIG. 6 is a schematic perspective view showing a flexure vibrating in (a) the primary torsion mode, (b) the secondary torsion mode, and (c) the tertiary torsion mode, together with a load beam. [Figure 7]FIG. 7 is a schematic perspective view of a flexure vibrating in (a) the primary torsion mode, (b) the secondary torsion mode, and (c) the tertiary torsion mode. [Figure 8] FIG. 8 is a diagram showing a specific example of the position where the bent portion is formed in the suspension according to one embodiment. [Figure 9] FIG. 9 is a flowchart illustrating an example of a procedure for determining the formation position of a bent portion in a suspension according to an embodiment. [Figure 10] FIG. 10 is a diagram showing an example of the results of measuring the first gain and the second gain for a suspension according to an embodiment. [Figure 11] FIG. 11 is a diagram illustrating an example of a suspension manufacturing apparatus according to an embodiment. [Figure 12] FIG. 12 is a diagram illustrating an example of the relationship between the first position and the second position in a suspension according to an embodiment. [Figure 13] FIG. 13 is a flowchart illustrating an example of a process for determining predicted changes in pitch and roll angles of a suspension according to an embodiment. [Figure 14] FIG. 14 is a flowchart illustrating an example of a method for manufacturing a suspension according to an embodiment. [Figure 15] FIG. 15 is a graph and table showing a comparative example in which the pitch and roll angles are corrected for a suspension without flexures. [Figure 16] FIG. 16 is a graph and table showing an example of correcting pitch and roll angles for a suspension with flexures. DETAILED DESCRIPTION OF THE INVENTION

[0023] An embodiment of the present invention will be described with reference to the drawings. 1 is a schematic perspective view showing an example of a disk drive (HDD) 1. This disk drive 1 has a case 2, multiple disks 4 that rotate around a spindle 3, a carriage 6 that can rotate around a pivot shaft 5, and a positioning motor (voice coil motor) 7 for driving the carriage 6. The case 2 is sealed with a lid (not shown).

[0024] 2 is a schematic cross-sectional view showing a part of the disk device 1. As shown in FIGS. 1 and 2, a carriage 6 is provided with a plurality of arms (carriage arms) 8. A suspension 10 is attached to the tip of each arm 8. A slider 11 constituting a magnetic head is provided at the tip of each suspension 10. When the disk 4 rotates at high speed, air flows in between the disk 4 and the slider 11, forming an air bearing.

[0025] 2, the suspension 10 includes a base plate 12. The base plate 12 is formed with a boss portion 12a that is inserted into a hole 8a formed in the arm 8.

[0026] When the carriage 6 is rotated by the positioning motor 7 , the suspension 10 moves in the radial direction of the disk 4 , and the slider 11 moves to the desired track on the disk 4 .

[0027] 3 is a schematic plan view of a suspension 10 according to this embodiment. The suspension 10 includes a load beam 20 and a flexure 30. In this embodiment, a width direction X, a length direction Y, and a thickness direction Z are defined, which are perpendicular to each other as shown in the figure. A sway direction S is also defined, as indicated by an arc-shaped arrow near the tip of the load beam 20. The load beam 20, the flexure 30, and the suspension 10 all have an elongated shape in the length direction Y.

[0028] The length direction Y is parallel to the central axis AX of the suspension 10. The load beam 20 and the flexure 30 have shapes that are substantially symmetrical with respect to the central axis AX.

[0029] The load beam 20 is made of a metal material and has a flat plate shape. A tab 21 is provided at the tip of the load beam 20. The load beam 20 has a planar shape that tapers toward the tab 21. The load beam 20 is connected to the base plate 12 shown in FIG. 2.

[0030] The flexure 30 is placed on the load beam 20. The flexure 30 includes a metal base 31, a wiring layer 32, and an insulating layer 33. The metal base 31 is made of a metal material such as stainless steel, and most of it faces the load beam 20.

[0031] The thickness of the metal base 31 is smaller than that of the load beam 20. The thickness of the metal base 31 is preferably 12 to 25 μm, and is 20 μm in one example. The thickness of the load beam 20 is 30 μm in one example.

[0032] The load beam 20 and the metal base 31 are fixed by a pair of first fixing portions 22L, 22R and a second fixing portion 23. The fixing portions 22L, 22R, 23 can be fixed by, for example, laser spot welding. The first fixing portions 22L, 22R are aligned in the width direction X. The distances from the first fixing portions 22L, 22R to the central axis AX are the same. The second fixing portion 23 is located closer to the tab 21 (the tip of the load beam 20) than the first fixing portions 22L, 22R. The second fixing portion 23 is located on the central axis AX.

[0033] The wiring layer 32 includes a plurality of wires made of a metal material with excellent conductivity, such as copper. The insulating layer 33 includes a plurality of layers, such as a layer that underlies each wire and a layer that covers each wire. These layers can be made of, for example, polyimide.

[0034] Most of the wiring layer 32 and the insulating layer 33 are formed on the metal base 31. In the example of Fig. 3, the wiring layer 32 and the insulating layer 33 include portions that are not supported by the metal base 31, such as a pair of aerial wiring portions 34L and 34R.

[0035] 4 is a schematic plan view of the flexure 30 seen from the metal base 31 side. As shown in FIGS. 3 and 4, the metal base 31 has a tip end 40 and a base end 41 that are spaced apart in the longitudinal direction Y. As shown in FIG. 3, the tip end 40 is located near the tab 21 and is fixed to the load beam 20 by the second fixing portion 23 described above.

[0036] The flexure 30 further includes a tongue 42, a first outrigger 50L, and a second outrigger 50R. In most of the tongue 42, an insulating layer 33 is laminated on a metal base 31. In the example of FIGS. 3 and 4, the outriggers 50L, 50R are formed by the metal base 31. That is, the outriggers 50L, 50R do not include the wiring layer 32 or the insulating layer 33.

[0037] The tongue 42 is located between the tip end 40 and the base end 41 in the longitudinal direction Y. The outriggers 50L, 50R are disposed on both outer sides of the tongue 42 in the width direction X. In other words, the tongue 42 is located between the first outrigger 50L and the second outrigger 50R in the width direction X.

[0038] 4, the tongue 42 has a first portion 42a, a second portion 42b, and a connecting portion 42c that connects the first portion 42a and the second portion 42b. The second portion 42b is located between the first portion 42a and the tip portion 40 in the longitudinal direction Y. The width of the connecting portion 42c is smaller than the widths of the first portion 42a and the second portion 42b.

[0039] 3, the slider 11 is mounted on the tongue 42. The tongue 42 has a plurality of terminals 42d used for electrical connection with the slider 11. These terminals 42d are provided on the second portion 42b.

[0040] The slider 11 has an element, such as an MR element, that can convert magnetic signals to electric signals. These elements are used to access the disk 4, such as to write or read data. The slider 11, load beam 20, and flexure 30 constitute a head gimbal assembly.

[0041] As shown in Figure 3, a dimple 24 protruding toward the tongue 42 is formed near the tip of the load beam 20. The dimple 24 is located on the central axis AX. The tip of the dimple 24 is in contact with the tongue 42. The tongue 42 swings around the tip of the dimple 24, thereby performing the desired gimbal movement. The tongue 42, outriggers 50L and 50R, dimple 24, etc. form a gimbal portion 43.

[0042] The first outrigger 50L has a base end 51, a base end arm 52, a tip arm 53, and a connecting portion 54. The base end 51 is fixed to the load beam 20 by the first fixing portion 22L. The base end arm 52 extends from the base end 51 toward the side of the tongue 42. In the example of FIGS. 3 and 4 , the base end arm 52 is inclined with respect to the longitudinal direction Y so as to move away from the central axis AX as it approaches the tongue 42. One end of the tip arm 53 is connected to the base end arm 52, and the other end is connected to the tip end 40. The connecting portion 54 is curved in a U shape and connects the tip of the base end arm 52 and the first portion 42a of the tongue 42.

[0043] The second outrigger 50R has a shape that is line-symmetrical to the first outrigger 50L with respect to the central axis AX. That is, the second outrigger 51R has a base end portion 51, a base end arm 52, a tip arm 53, and a connecting portion 54. The base end portion 51 is fixed to the load beam 20 by a first fixing portion 22R. In the example of FIGS. 3 and 4, the tip arms 53 of the outriggers 50L, 50R are integrated with each other on the central axis AX between the tip end portion 40 and the tongue 42 and are connected to the tip end portion 40.

[0044] The first outrigger 50L can bend in the thickness direction Z between the first fixed portion 22L and the second fixed portion 23. Similarly, the second outrigger 50R can bend in the thickness direction Z between the first fixed portion 22R and the second fixed portion 23. The tongue 42 is elastically supported by the outriggers 50L, 50R and can swing around the dimple 24 as a fulcrum.

[0045] 3 and 4, a pair of microactuator elements 44L, 44R are mounted on the gimbal portion 43. These microactuator elements 44L, 44R are each made of a piezoelectric material and are arranged on both sides of the slider 11 in the width direction X. One end of the microactuator element 44L in the length direction Y is connected to the first portion 42a of the tongue 42, and the other end is connected to the second portion 42b of the tongue 42. Similarly, one end of the microactuator element 44R in the length direction Y is connected to the first portion 42a, and the other end is connected to the second portion 42b.

[0046] The microactuator elements 44L, 44R have the function of rotating the tongue 42 in the sway direction S. In the example of FIGS. 3 and 4, limiter members 45L, 45R are provided to suppress excessive swing of the tongue 42. One end of the limiter member 45L is connected to the second portion 42b of the tongue 42, and the other end is connected to the tip arm 53 of the first outrigger 50L. One end of the limiter member 45R is connected to the second portion 42b of the tongue 42, and the other end is connected to the tip arm 53 of the second outrigger 50R. The limiter members 45L, 45R can be formed of, for example, the insulating layer 33.

[0047] The outriggers 50L, 50R are each bent in the thickness direction Z at a bent portion 55. In the example of Fig. 3 and Fig. 4, the bent portion 55 is located at the base end arm 52 of each of the outriggers 50L, 50R.

[0048] 5 is a schematic cross-sectional view of the first outrigger 50L (base arm 52) including the bent portion 55 and the load beam 20. The base arm 52 has a first surface F1 facing the load beam 20 and a second surface F2 opposite the first surface F1. At the bent portion 55, the base arm 52 is bent so that the first surface F1 is convex. It can also be said that the base arm 52 is bent so that it is convex toward the load beam 20.

[0049] The bending angle θ of the base end arm 52 at the bending portion 55 can have various values, and is, for example, 0.5° or more and 3° or less. For example, the bending angle θ corresponds to the angle at which the first plane F1 or the second plane F2 changes at the bending portion 55. The base end arm 52 may be smoothly bent at the bending portion 55 so as to have a curvature.

[0050] The bent portion 55 does not necessarily have to be provided at a position facing the load beam 20 as shown in Fig. 5. That is, the bent portion 55 may be provided at a portion of the base end arm 52 shown in Fig. 3 that protrudes laterally from the load beam 20. The bent portion 55 may also be provided at a position different from the base end arm 52, such as the tip arm 53.

[0051] The position and shape of the bent portion 55 of the second outrigger 50R are the same as the position and shape of the bent portion 55 of the first outrigger 50L. That is, the bent portion 55 of the first outrigger 50L and the bent portion 55 of the second outrigger 50R are provided at the same position in the longitudinal direction Y.

[0052] The bent portions 55 of the outriggers 50L, 50R serve to suppress vibration (resonance) of the flexure 30. Various modes of vibration can occur in the flexure 30. Typical examples of vibration modes include a primary torsion mode, a secondary torsion mode, and a tertiary torsion mode.

[0053] 6 and 7 are schematic perspective views of the flexure 30 vibrating in (a) the primary torsional mode, (b) the secondary torsional mode, and (c) the tertiary torsional mode. In Fig. 6, the load beam 20 is shown together with the flexure 30. On the other hand, in Fig. 7, the load beam 20 is not shown.

[0054] In the primary torsional mode shown in Figures 6(a) and 7(a), the outriggers 50L, 50R deform to have one vertex (mountain or valley). For example, in Figure 6(a), the first outrigger 50L is curved so that the middle portion of the tip arm 53 protrudes downward.

[0055] In the secondary torsional mode shown in Figures 6(b) and 7(b), the outriggers 50L, 50R deform to have two vertices (peaks or valleys). For example, in Figure 6(b), the first outrigger 50L is curved so that the middle portion of the base arm 52 protrudes upward and the middle portion of the tip arm 53 protrudes downward.

[0056] In the tertiary torsion mode shown in Figures 6(c) and 7(c), the outriggers 50L, 50R deform to have three vertices (peaks or valleys). For example, in Figure 6(c), the first outrigger 50L is curved so that the middle portion of the base arm 52 protrudes upward, the area near the connection part 54 protrudes downward, and the middle portion of the tip arm 53 protrudes upward.

[0057] The specific positions at which the bent portions 55 are formed in the outriggers 50L, 50R can be determined by comprehensively considering the various vibration modes including these first to third torsional modes.

[0058] 8 is a diagram showing a specific example of the position where the bent portion 55 is formed in the suspension 10 according to this embodiment. In this figure, along with a plan view of the suspension 10, (a) a graph showing the cross-sectional shape of the first outrigger 50L, (b) a graph showing the displacement amount (amplitude) of the first outrigger 50L in the secondary torsion mode, and (c) a graph showing the displacement amount (amplitude) of the first outrigger 50L in the tertiary torsion mode are shown.

[0059] In the graph of FIG. 8(a), the horizontal axis represents the position [mm] in the longitudinal direction Y with the origin O as the reference (zero), and the vertical axis represents the height in the direction from the slider 11 toward the dimple 24 (the direction from the tongue 42 toward the dimple 24). The origin O corresponds to the center of the connection between the suspension 10 and the arm 8 shown in FIG. 1. In one example, the origin O is the center of the boss portion 12a provided on the base plate 12 described above.

[0060] The graph in Figure 8(a) shows curves for Comparative Example EX0 and Examples EX1, EX2, and EX3. These curves all represent the shape of the first outrigger 50L along a line CL drawn on the first outrigger 50L. Specifically, Comparative Example EX0 corresponds to the shape of the first outrigger 50L without the bent portion 55, and Examples EX1, EX2, and EX3 correspond to the shapes of the first outrigger 50L with the bent portion 55 provided in different positions.

[0061] 8(a), the change amount (scale) on the vertical axis is made larger than the change amount (scale) on the horizontal axis so that the cross-sectional shape of the first outrigger 50L can be more clearly understood. As can be seen from the curve of comparative example EX0, when the flexure 30 is attached to the load beam 20, the first outrigger 50L is curved so that the apex is near the tongue 42, even when the bent portion 55 is not provided.

[0062] 8(b) and 8(c), the horizontal axis represents the position in the longitudinal direction Y, as in FIG. 8(a), and the vertical axis represents the amplitude of the first outrigger 50L during vibration. These graphs each show an outline of vibration in each mode.

[0063] The amplitude of the second torsion mode shown in Fig. 8(b) has a peak P21 at base arm 52 and a peak P22 at tip arm 53. The amplitude of the third torsion mode shown in Fig. 8(c) has a peak P31 at base arm 52, a peak P32 near connection 54, and a peak P33 near the end of tip arm 53.

[0064] As shown by multiple dashed lines in Figure 8, positions A, B, C, D, E, and F are defined, aligned in order in the longitudinal direction Y. Position A passes through the centers of the first fixed portions 22L and 22R. Position B corresponds to the position of vertex P31 in the amplitude of the third-order torsion mode. Position C corresponds to the position of vertex P21 in the amplitude of the second-order torsion mode. Position C also overlaps with the positions where the aerial wiring portions 34L and 34R are bent so as to protrude in the width direction X.

[0065] Position D corresponds to the position of vertex P32 in the amplitude of the third torsion mode. Position D also overlaps with the boundary between tongue 42 and connecting portion 54 and the vicinity of the boundary between base end arm 52 and distal end arm 53. Position E passes through dimple 24. Position F passes through second fixing portion 23.

[0066] The inventors have considered the positions of the bent portions 55 in the suspension 10 according to this embodiment, taking into account various vibration modes. As a result, it has been found that providing the bent portions 55 of the outriggers 50L, 50R between positions A and E can effectively suppress vibration of the flexure 30. Furthermore, providing the bent portions 55 between positions B and D can further enhance the effect of suppressing vibration.

[0067] In all of Examples EX1, EX2, and EX3 shown in FIG. 8(a), bent portion 55 is provided between position B and position D, more specifically, between position C and position D. Bent portion 55 in Example EX2 is closer to position D than bent portion 55 in Example EX1. Also, bent portion 55 in Example EX3 is closer to position D than bent portion 55 in Example EX2.

[0068] Here, an example of a procedure for determining the position where the bent portion 55 is to be formed will be described. 9 is a flowchart showing an example of a procedure for determining the formation position of the bent portion 55. First, for the suspension 10 without the bent portion 55, the gains of the flexure 30 (outriggers 50L, 50R) in a plurality of vibration modes are measured (step S11). Hereinafter, the gain measured in step S11 will be referred to as the first gain.

[0069] Next, for the suspension 10 having the bent portion 55 formed therein, the gains of the flexure 30 (outriggers 50L, 50R) in a plurality of vibration modes are measured (step S12). Hereinafter, the gain measured in step S12 will be referred to as the second gain.

[0070] The measurements in steps S11 and S12 can be performed, for example, by simulation using a three-dimensional model of the suspension 10. These measurements may also be performed on an actually manufactured sample of the suspension 10. The vibration modes for which gains are measured in steps S11 and S12 are, for example, the above-mentioned first torsional mode, second torsional mode, and third torsional mode.

[0071] As an example, in this embodiment, it is assumed that the second gain is measured for each of the first torsion mode, the second torsion mode, and the third torsion mode using multiple three-dimensional models or samples with different formation positions and bending angles of the bending portion 55.

[0072] 10 is a diagram showing an example of the results of measuring the first gain and the second gain for the suspension 10 according to this embodiment. This diagram shows the first gain and the second gain measured for each of (a) the primary torsion mode, (b) the secondary torsion mode, and (c) the tertiary torsion mode.

[0073] 10(a), (b), and (c), the horizontal axis represents the forming position [mm] in the longitudinal direction Y of the bent portion 55, and as in FIG. 8(a), the origin O is used as the reference (zero). The vertical axis represents the gain [dB]. The range of forming positions shown in FIGS. 10(a), (b), and (c) corresponds to a part between positions B and D in FIG. 8.

[0074] In Figures 10(a), (b), and (c), the square plots overlapping the vertical axis indicate the first gain, the open circle plots indicate the second gain when the bending angle θa is 1°, and the closed circle plots indicate the second gain when the bending angle θa is 2°.

[0075] The bending angle θa is the angle when the bent portion 55 is formed on the flexure 30 before it is attached to the load beam 20. When the flexure 30 is attached to the load beam 20, the outriggers 50L, 50R are bent as shown in FIG. 8(a). Therefore, the bending angle θa may be slightly different from the bending angle θ shown in FIG.

[0076] 10(a), in the primary torsion mode, the second gain hardly changes even if the formation position or bending angle θa of the bent portion 55 is changed. This second gain is substantially the same as the first gain at any formation position.

[0077] As shown in Figure 10(b), in the second torsion mode, the second gain is generally smaller than the first gain at both the bending angle θa of 1° and 2°. When the bending angle θa is 1°, the second gain is smallest at around 9.1 mm. When the bending angle θa is 2°, the second gain is smallest at around 8.8 mm.

[0078] As shown in Figure 10(c), in the third torsion mode, when the bending angle θa is 1°, the second gain is generally smaller than the first gain. On the other hand, when the bending angle θa is 2°, a portion of the second gain is larger than the first gain. When the bending angle θa is 1°, the second gain is smallest near 9.0 mm. When the bending angle θa is 2°, the second gain is smallest near 9.2 mm.

[0079] 9, after measuring the first gain and the second gain in steps S11 and S12, the formation position and bending angle θa of the bent portion 55 in the suspension 10 to be actually manufactured are determined based on these gains (step S13). This determination can be made based on various conditions. In one example, the formation position and bending angle θa are selected such that the second gain is equal to or less than the first gain in at least one, preferably a majority, of the vibration modes to be measured.

[0080] When the first gain and second gain as shown in Figures 10(a), (b), and (c) are obtained, the first torsion mode does not need to be taken into consideration because the fluctuation of the second gain is small, and the forming position and bending angle θa can be determined mainly based on the second gain in the second torsion mode and the third torsion mode.

[0081] For example, if it is particularly necessary to suppress vibration in the third torsion mode, the formation position may be determined to be 9.0 mm, as shown in the dashed line frame. Furthermore, at 9.0 mm, the second gain when the bending angle θa is 1° is smaller than the second gain when the bending angle θa is 2°, in both the second torsion mode and the third torsion mode. Therefore, the bending angle θa may be determined to be 1°. Under this condition, the second gain is less than the first gain even in the second torsion mode. Therefore, the bending portion 55 can reduce vibration of the flexure 30 in both the second torsion mode and the third torsion mode.

[0082] Although it has been assumed here that the formation position of the bent portion 55 and the bending angle θa are determined taking into consideration the first torsion mode, the second torsion mode, and the third torsion mode, the present invention is not limited to this example. When determining the formation position of the bent portion 55 and the bending angle θa, other vibration modes of the flexure 30 may be considered in addition to or instead of these vibration modes. Furthermore, in addition to the vibration mode of the flexure 30, a coupling mode with the vibration of the load beam 20 may also be considered. The bending angle θa is not limited to 1° or 2°. For example, the bending angle θa may be set in the range of 0.5° to 3°.

[0083] Next, a description will be given of an apparatus and method for manufacturing the suspension 10. In this embodiment, when manufacturing the suspension 10, the pitch angle θp and roll angle θr shown in FIG.

[0084] The pitch angle θp corresponds to the amount of twist of the slider 11 from the reference position around an axis parallel to the width direction X. The roll angle θr corresponds to the amount of twist of the slider 11 from the reference position around an axis (central axis AX) parallel to the length direction Y.

[0085] The pitch angle θp can also be referred to as the amount of twist of the mounting surface of the tongue 42 for the slider 11 from the reference plane around an axis parallel to the width direction X. The roll angle θr can also be referred to as the amount of twist of the mounting surface from the reference plane around an axis parallel to the length direction Y.

[0086] 11 is a diagram showing an example of a manufacturing apparatus 100 for the suspension 10. The manufacturing apparatus 100 includes a transfer device 110, an angle measurement device 120, a laser irradiation device 130, and a controller 140.

[0087] The transfer device 110 includes a plurality of stages 111 and a transfer line 112 that moves each stage 111 to a position corresponding to the angle measurement device 120 and the laser irradiation device 130. A suspension 10 in the manufacturing process is fixed to each stage 111.

[0088] The angle measurement device 120 measures the pitch angle θp and roll angle θr of the suspension 10. The method of this measurement is not particularly limited, but in one example, the pitch angle θp and roll angle θr are detected based on reflected light obtained when a measurement laser beam is irradiated onto the mounting surface of the tongue 42 for the slider 11. As another example, the pitch angle θp and roll angle θr may be detected based on an image obtained by photographing the mounting surface.

[0089] The laser irradiation device 130 irradiates the flexure 30 of the suspension 10 with a first laser beam to form the bent portion 55 described above. Furthermore, the laser irradiation device 130 irradiates the flexure 30 with a second laser beam to correct the pitch angle θp and the roll angle θr. In this embodiment, both the first laser beam and the second laser beam are irradiated onto the outriggers 50L, 50R. Furthermore, in this embodiment, it is assumed that the second laser beam is weaker than the first laser beam, but this is not limited to this example.

[0090] For example, the first and second laser beams are irradiated onto the second surfaces F2 (see FIG. 5) of the outriggers 50L and 50R. When the first laser beam is irradiated onto the second surfaces F2, the irradiated area is heated. When the irradiated area is subsequently cooled, the outriggers 50L and 50R are deformed so that the second surfaces F2 become concave (the first surfaces F1 become convex). The bending angles θ and θa can be adjusted by, for example, the irradiation conditions, such as the output power and irradiation time of the first laser beam.

[0091] When the second surface F2 is irradiated with the second laser beam, the outriggers 50L, 50R are deformed in the same manner as when the first laser beam is irradiated with the second laser beam. However, because the second laser beam is weaker than the first laser beam, the amount of deformation of the outriggers 50L, 50R due to irradiation with the second laser beam is smaller than the amount of deformation of the outriggers 50L, 50R due to irradiation with the first laser beam.

[0092] The phrase "the second laser beam is weaker than the first laser beam" means, for example, that the output of the second laser beam is smaller than the output of the first laser beam, or that the irradiation time of the second laser beam is shorter than the irradiation time of the first laser beam. It can also be said that the irradiation amount of the second laser beam is smaller than the irradiation amount of the first laser beam.

[0093] Hereinafter, the position on the outriggers 50L, 50R where the first laser beam is irradiated, ie, the position where the bent portion 55 is formed, will be referred to as a first position, and the position on the outriggers 50L, 50R where the second laser beam is irradiated will be referred to as a second position.

[0094] The controller 140 controls the transport device 110, the angle measurement device 120, and the laser irradiation device 130. In this embodiment, the various processes executed by the controller 140 are realized, for example, by a processor executing a computer program.

[0095] The controller 140 stores correction data 141. The correction data 141 defines the relationship between a combination of a pitch angle θp and a roll angle θr that deviates from the target values and a second position (irradiation line) to which the second laser light is irradiated in order to bring the pitch angle θp and the roll angle θr closer to the target values. Multiple second positions may be defined for each combination of the pitch angle θp and the roll angle θr. For example, the correction data 141 is created based on experiments or simulations using multiple suspension 10 samples. The correction data 141 may be similar to the correction recipe table disclosed in, for example, Japanese Patent Application Laid-Open No. 2007-66427.

[0096] 12 is a diagram showing an example of the relationship between the first position and the second position. In this embodiment, both the first position and the second position are located on the outriggers 50L, 50R. The first position is selected from the first region R1 of the outriggers 50L, 50R. The second position is selected from the second region R2 of the outriggers 50L, 50R.

[0097] For example, the first region R1 is set between the dimple 24 and the first fixing portions 22L, 22R in the longitudinal direction Y. Preferably, the first region R1 is set between positions A and E or between positions B and D shown in Fig. 8. In the example of Fig. 12, the first region R1 is set in the base end arms 52 of the outriggers 50L, 50R, respectively.

[0098] The second region R2 is set, for example, in a portion of the outriggers 50L, 50R that is different from the first region R1. In the example of Fig. 12, the second region R2 is set in a portion of the base end arm 52 of the outriggers 50L, 50R that does not overlap with the first region R1, the connection portion 54 of the outriggers 50L, 50R, and the tip arm 53 of the outriggers 50L, 50R.

[0099] The first region R1 and the second region R2 do not necessarily have to be set in different areas, that is, the first region R1 and the second region R2 may at least partially overlap each other.

[0100] 9 are performed prior to manufacturing the suspension 10, and a first position for forming the bent portion 55 and a bend angle θa are determined. At least one of steps S11, S12, and S13 may be performed in the manufacturing apparatus 100. Furthermore, a process is performed to identify predicted amounts of change in the pitch angle θp and the roll angle θr before and after forming the bent portion 55.

[0101] 13 is a flowchart showing an example of a process for determining the predicted changes in the pitch angle θp and the roll angle θr. Each step illustrated here is performed by the manufacturing apparatus 100 on a sample of the suspension 10 that has actually been manufactured. However, each step may also be performed by an apparatus different from the manufacturing apparatus 100. Furthermore, each step may also be performed by a simulation using a three-dimensional model of the suspension 10.

[0102] 13, first, the pitch angle θp and roll angle θr of suspension 10 before bent portion 55 is formed are measured (step S21). Specifically, transport device 110 transports suspension 10 before bent portion 55 is formed to a measurement position of angle measurement device 120, and angle measurement device 120 measures the pitch angle θp and roll angle θr of suspension 10. Hereinafter, the pitch angle θp and roll angle θr measured in step S21 will be referred to as initial pitch angle θp1 and initial roll angle θr1, respectively.

[0103] After step S21, bent portions 55 are formed in outriggers 50L, 50R (step S22). Here, first, conveying device 110 conveys suspension 10 toward laser irradiation device 130. Then, laser irradiation device 130 irradiates the first position determined in step S13 of FIG. 9 with a first laser beam. As a result, bent portions 55 are formed at the first position. The irradiation conditions, such as the output power and irradiation time of this first laser beam, are adjusted so as to obtain bend angle θa determined in step S13.

[0104] After the bent portion 55 is formed, the pitch angle θp and roll angle θr of the suspension 10 are measured again (step S23). Specifically, the transport device 110 transports the suspension 10 to the measurement position of the angle measurement device 120, and the angle measurement device 120 measures the pitch angle θp and roll angle θr of the suspension 10. Hereinafter, the pitch angle θp and roll angle θr measured in step S23 will be referred to as the pitch angle θp2 and the roll angle θr2, respectively.

[0105] Next, the controller 140 identifies predicted changes Δθp and Δθr in the pitch angle θp and roll angle θr before and after the formation of the bent portion 55 (step S24). For example, the predicted change Δθp corresponds to the difference between the initial pitch angle θp1 and the pitch angle θp2. Furthermore, the predicted change Δθr corresponds to the difference between the initial roll angle θr1 and the roll angle θr2.

[0106] Preferably, the predicted changes Δθp and Δθr are determined based on the results of performing steps S21, S22, and S23 on a plurality of samples of the suspension 10. For example, the predicted change Δθp can be an average value of the changes in the pitch angle θp before and after forming the bent portion 55 measured for the plurality of samples of the suspension 10. Similarly, the predicted change Δθr can be an average value of the changes in the roll angle θr before and after forming the bent portion 55 measured for the plurality of samples of the suspension 10.

[0107] 14 is a flowchart showing an example of a manufacturing method of the suspension 10. First, a pre-process including manufacturing the load beam 20, manufacturing the flexure 30, and assembling these is performed (step S31). At this point, the bent portion 55 is not formed in the suspension 10.

[0108] After step S31, the pitch angle θp and roll angle θr of the suspension 10 that has been through the previous step S31 are measured (step S32). Specifically, the transport device 110 transports the suspension 10 before the bent portion 55 is formed to the measurement position of the angle measurement device 120, and the angle measurement device 120 measures the pitch angle θp and roll angle θr of the suspension 10. Hereinafter, the pitch angle θp and roll angle θr measured in step S32 will be referred to as the initial pitch angle θp3 and the initial roll angle θr3, respectively.

[0109] Next, the controller 140 calculates predicted values θp4, θr4 of the pitch angle θp and the roll angle θr when the bent portion 55 is formed in the suspension 10 (step S33). For example, the predicted value θp4 is a value obtained by adding a predicted change amount Δθp to the initial pitch angle θp3 (θp4=θp3+Δθp). Also, the predicted value θr4 is a value obtained by adding a predicted change amount Δθr to the initial roll angle θr3 (θr4=θr3+Δθr).

[0110] Furthermore, the controller 140 determines a second position to be irradiated with the second laser light (step S34). Specifically, the controller 140 uses the correction data 141 to identify a second position where the predicted values θp4 and θr4 can be brought closer to the target values of the pitch angle θp and the roll angle θr, respectively.

[0111] After step S34, bent portion 55 is formed, and pitch angle θp and roll angle θr are corrected (step S35). Here, first, conveying device 110 conveys suspension 10 toward laser irradiation device 130. Then, laser irradiation device 130 irradiates the first position determined in step S13 of FIG. 9 with a first laser beam, and irradiates the second position determined in step S34 with a second laser beam. This forms bent portion 55 at the first position. Furthermore, the pitch angle θp and roll angle θr of suspension 10 in which bent portion 55 has been formed are corrected so as to approach target values.

[0112] After step S35, the pitch angle θp and roll angle θr of the suspension 10 are measured again (step S36). Specifically, the transport device 110 transports the suspension 10 to a measurement position of the angle measurement device 120, and the angle measurement device 120 measures the pitch angle θp and roll angle θr of the suspension 10. Hereinafter, the pitch angle θp and roll angle θr measured in step S36 will be referred to as the final pitch angle θp5 and the final roll angle θr5, respectively.

[0113] The controller 140 determines whether the suspension 10 is acceptable based on the final pitch angle θp5 and the final roll angle θr5 (step S37). For example, if the difference between the target value of the pitch angle θp and the final pitch angle θp5 is equal to or less than a predetermined first tolerance, and the difference between the target value of the roll angle θr and the final roll angle θr5 is equal to or less than a predetermined second tolerance, the controller 140 determines that the suspension 10 is acceptable (OK in step S37). At this time, the manufacture of the suspension 10 proceeds to the next step (step S38).

[0114] On the other hand, if the difference between the target value of the pitch angle θp and the final pitch angle θp5 exceeds a first allowable value, or if the difference between the target value of the roll angle θr and the final roll angle θr5 exceeds a second allowable value, the controller 140 determines that the suspension 10 is defective (NG in step S37). In this case, the suspension 10 is discarded (step S39). In step S39, the fact that the suspension 10 is defective may be notified to the worker by audio output or image display.

[0115] In the above flowchart, if the difference between the target value of the pitch angle θp and the predicted value θp4 is less than or equal to the first allowable value, and the difference between the target value of the roll angle θr and the predicted value θr4 is less than or equal to the second allowable value, the determination of the second position and the irradiation of the second laser light do not have to be performed.

[0116] Each step shown in the flowchart of FIG. 14 is for manufacturing one suspension 10. When manufacturing multiple suspensions 10 of the same design, each step shown in the flowchart is repeatedly performed. The positions at which the bent portions 55 are formed and the bending angles of the outriggers 50L, 50R of these multiple suspensions 10 are the same. That is, the irradiation position and irradiation conditions (output, irradiation time, irradiation amount, etc.) of the first laser beam in step S35 performed when manufacturing each suspension 10 are the same. On the other hand, the irradiation position and irradiation conditions of the second laser beam for correcting the pitch angle θp and the roll angle θr are determined based on steps S32, S33, and S34 for each suspension 10. That is, the irradiation position and irradiation conditions of the second laser beam may differ for each suspension 10.

[0117] According to the present embodiment described above, by providing the bent portions 55 to the outriggers 50L, 50R, it is possible to obtain a suspension 10 that effectively suppresses vibrations around the gimbal portion 43. When adjusting the vibration characteristics using the bent portions 55 of the outriggers 50L, 50R in this way, changes in the rigidity of the flexure 30 and the like are less likely to occur compared to, for example, a case in which a damper material is attached to the flexure 30. In other words, it is possible to improve the vibration characteristics while suppressing the impact on the gimbal motion. Furthermore, because additional parts such as damper material and the process for mounting them are not required, an increase in the manufacturing cost of the suspension 10 can be suppressed.

[0118] Furthermore, in this embodiment, the pitch angle θp and the roll angle θr are corrected taking into consideration the provision of the bent portion 55, which improves the quality of the suspension 10 and also improves the yield.

[0119] Furthermore, in this embodiment, the second position to be irradiated with the second laser light for correcting the pitch angle θp and the roll angle θr is determined at a stage before forming the bent portion 55. This allows the irradiation of the first laser light and the second laser light to be performed in substantially the same process, improving the manufacturing efficiency of the suspension 10.

[0120] 12, if the first region R1 and the second region R2 are set in different portions on the outriggers 50L, 50R, the irradiation positions of the first laser beam and the second laser beam do not overlap, which makes it possible to suppress variations in the pitch angle θp and the roll angle θr of the suspension 10 after irradiation with each laser beam. In addition, various other advantageous effects can be obtained from this embodiment.

[0121] [Example] The inventors have verified the effect of correcting the pitch angle θp and the roll angle θr using the method disclosed in this embodiment for the suspension 10 having the shape shown in FIG.

[0122] Fig. 15 is a graph and a table showing a comparative example in which the pitch angle θp and the roll angle θr are corrected for a suspension 10 that does not have a bent portion 55. Fig. 16 is a graph and a table showing an example in which the pitch angle θp and the roll angle θr are corrected for a suspension 10 that has a bent portion 55.

[0123] 15, the initial pitch angle θp3 and the initial roll angle θr3 measured in step S32 were used as input values for correction data 141 to determine the second position. In the example of FIG. 16, the bent portion 55 was formed and the pitch angle θp and the roll angle θr were corrected in the same procedure as in the flowchart of FIG.

[0124] 15 and 16, the vertical axis represents the pitch angle θp [deg] and the horizontal axis represents the roll angle θr [deg]. The square plots in these graphs represent the pitch angle θp and roll angle θr measured for the suspension 10 before modification. The circular plots in these graphs represent the pitch angle θp and roll angle θr measured for the suspension 10 after modification.

[0125] The tables in FIGS. 15 and 16 show the number of samples (N), the average values (Ave.) of the pitch angle θp and the roll angle θr of each sample, the standard deviations (Stdev.) of the pitch angle θp and the roll angle θr, and the process capability index (Cpk) for the pitch angle θp and the roll angle θr before and after correction, respectively.

[0126] In both the comparative example and the example, the target value of the pitch angle θp is 2.37°, and the target value of the roll angle θr is 0°.

[0127] In the comparative example in Figure 15, before correction, the average values of the pitch angle θp and roll angle θr were both smaller than the target values and the standard deviation was large. On the other hand, after correction, the average values of the pitch angle θp and roll angle θr came much closer to the target values and the standard deviation was also small. The process capability index also improved significantly after correction.

[0128] Similarly, in the example shown in Figure 16, before correction, the average values of the pitch angle θp and roll angle θr are both smaller than the target values, and the standard deviation is large. There are also samples that deviate significantly from the target values. On the other hand, after correction, the average values of the pitch angle θp and roll angle θr come much closer to the target values, and the standard deviation is also small. As with the comparative example, the process capability index also improves significantly after correction.

[0129] From the above examples, it has been confirmed that forming the bent portion 55 and correcting the pitch angle θp and roll angle θr using the method disclosed in this embodiment can suppress quality variations and significantly improve yield.

[0130] It should be noted that the scope of the present invention is not limited to the configurations disclosed in the above-described embodiments, and the present invention can be implemented by modifying the configurations disclosed in the embodiments in various ways.

[0131] For example, in the above embodiment, the outriggers 50L, 50R are bent so that the first surface F1 is convex at the bending portion 55 as shown in Fig. 5. However, if vibration characteristics are improved favorably, the outriggers 50L, 50R may be bent so that the second surface F2 is convex.

[0132] In the above embodiment, it is assumed that the outriggers 50L, 50R are provided with only one bent portion 55. However, if vibration characteristics are improved favorably, the outriggers 50L, 50R may each be provided with bent portions 55 at multiple positions.

[0133] The second laser beam does not necessarily have to be irradiated onto the second surfaces F2 of the outriggers 50L, 50R, but may be irradiated onto the first surfaces F1. For example, in the suspension 10 shown in Fig. 3, most of the tip arm 53 does not overlap with the load beam 20. For such a portion, it is easy to irradiate the laser beam onto the first surfaces F1.

[0134] In the above embodiment, the case where the formation position of bent portion 55 and bend angle θa are determined by the adjustment method shown in FIG. 9 has been exemplified. As another example, bend angle θa may be determined in advance, and the formation position of bent portion 55 at that bend angle θa may be determined by the adjustment method. In this case, for example, in step S12, for each of a plurality of positions on outriggers 50L, 50R for a plurality of vibration modes, the second gain is measured when bent portion 55 is formed at that position. Furthermore, in step S13, the position at which the second gain smaller than the first gain is obtained in at least one vibration mode among the plurality of positions is determined as the formation position of bent portion 55 to be applied to suspension 10 to be actually manufactured.

[0135] Alternatively, the position where bent portion 55 is to be formed may be determined in advance, and bend angle θa may be determined assuming that bent portion 55 is to be formed at that position by an adjustment method. In this case, for example, in step S12, the second gain is measured for each of a plurality of bend angles θa for a plurality of vibration modes when bent portion 55 is formed at the above-mentioned position. Furthermore, in step S13, the angle at which a second gain smaller than the first gain is obtained in at least one vibration mode among the plurality of bend angles θa is determined as the bend angle θa of bent portion 55 to be applied to suspension 10 to be actually manufactured. [Explanation of symbols]

[0136] 1...disk device, 10...suspension, 11...slider, 20...load beam, 22L, 22R...first fixed portion, 23...second fixed portion, 24...dimple, 30...flexure, 42...tang, 50L...first outrigger, 50R...second outrigger, 52...base end arm, 53...tip arm, 55...bending portion, 100...manufacturing device, θp...pitch angle, θr...roll angle, R1...first region, R2...second region.

Claims

1. A method for manufacturing a suspension for a disk drive, the method comprising: a load beam having a dimple; and a flexure including a tongue facing the dimple and an outrigger connected to the tongue, the method comprising: determining a first position at which a bent portion that is bent in a thickness direction of the outrigger is formed by irradiating the outrigger with a first laser light; calculating predicted values of pitch angle and roll angle of the tongue when the bent portion is formed at the first position of the outrigger; determining a second position for irradiating the second laser light on the outrigger so that the predicted value approaches a predetermined target value; irradiating the first position with the first laser light to form the bent portion, and irradiating the second position with the second laser light; Manufacturing method.

2. measuring initial values of the pitch angle and the roll angle of the suspension before irradiating the first laser light and the second laser light; calculating the predicted values based on predicted changes in the pitch angle and the roll angle before and after forming the bent portion at the first position and the initial values; The method of claim 1.

3. determining the predicted change amount by measuring the pitch angle and the roll angle before and after forming the bent portion for a plurality of samples of the suspension; The method of claim 2.

4. preparing correction data that defines a relationship between the pitch angle and the roll angle that have deviated from the target values and the second position for bringing the pitch angle and the roll angle closer to the target values; determining the second position using the correction data to move the predicted value closer to the target value; The manufacturing method according to any one of claims 1 to 3.

5. measuring a first gain of the flexure for a specific vibration mode when the bent portion is not formed in the outrigger; measuring a second gain of the flexure when the bent portion is formed at each of a plurality of positions on the outrigger in the vibration mode; determining a position among the plurality of positions at which the second gain smaller than the first gain is obtained as the first position; The manufacturing method according to any one of claims 1 to 4.

6. the first position is determined from a first region of the outrigger; the second position is determined from a second region of the outrigger that is different from the first region. The manufacturing method according to any one of claims 1 to 5.

7. the load beam and the flexure are fixed at a first fixing portion and a second fixing portion that is closer to the tip of the load beam than the first fixing portion, the first region is located between the dimple and the first fixing portion in the longitudinal direction of the load beam. The method of claim 6.

8. 1. A manufacturing apparatus for a disk drive suspension, comprising: a load beam having a dimple; and a flexure including a tongue facing the dimple and an outrigger connected to the tongue, a laser irradiation device that irradiates the outrigger with a first laser beam and a second laser beam; a controller for controlling the laser irradiation device; Equipped with The controller a process of calculating predicted values of the pitch angle and the roll angle of the tongue when a bent portion that is bent in a thickness direction is formed at a first position of the outrigger; determining a second position at which the second laser light is irradiated on the outrigger so that the predicted value approaches a predetermined target value; Run the laser irradiation device irradiates the first position with the first laser light to form the bent portion, and irradiates the second position with the second laser light. Manufacturing equipment.

9. an angle measuring device that measures initial values of the pitch angle and the roll angle in the suspension before the first laser light and the second laser light are irradiated; the controller calculates the predicted values based on predicted changes in the pitch angle and the roll angle before and after forming the bent portion at the first position and the initial values. The manufacturing apparatus according to claim 8.

10. the controller determines the second position for bringing the predicted value closer to the target value, using correction data that defines a relationship between the pitch angle and the roll angle that have deviated from the target value and the second position for bringing the pitch angle and the roll angle closer to the target value; The manufacturing apparatus according to claim 8 or 9.

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