STACKED SIGNAL INDICATOR SWITCHING DEVICE, STACKED SIGNAL INDICATOR WITH SWITCHING FUNCTION, PRODUCTION DEVICE, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE

Abstract

To provide a multilayer signal indicator light switching device that can control indicator lights with more colors than an input data number from a production facility, a multilayer signal indicator light with switching function, a production device, and a semiconductor device manufacturing method.SOLUTION: A multilayer signal indicator light switching device according to the present disclosure includes: a lighting circuit that turns on any indicator light other than a first indicator light of a plurality of indicator lights in response to a color-specific lighting signal that is transmitted from a production facility and indicates a lighting color of the multilayer signal indicator lights having the plurality of indicator lights of different colors from each other, when a first power supply is supplied from the production facility; and a second power supply that is charged by supply of the first power supply and turns on only the first indicator light of the plurality of indicator lights when the first power supply is shut off.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to a stacked signal indicator light switching device, a stacked signal indicator light with a switching function, a production device, and a method for manufacturing a semiconductor device. [Background technology]

[0002] Patent Document 1 discloses a signal indicator light equipped with a display unit, a memory, a lighting control unit, and a lighting control information registration unit. The display unit has one or more display units including a light source. The memory stores lighting control information that associates a plurality of control signals with lighting states of the display units, and configuration information that represents the configuration of the display unit. Upon receiving a control signal, the lighting control unit controls the lighting of the display units in accordance with the lighting control information so that the lighting state corresponds to the control signal. The lighting control information registration unit creates lighting control information based on the configuration information and registers it in the memory. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2014 / 181423 Summary of the Invention [Problem to be solved by the invention]

[0004] In Patent Document 1, the number of input data from the production equipment is the same as the number of colors of the signal stack indicator light, so the number of colors of the signal stack indicator light cannot be changed without modifying the production equipment.

[0005] The present disclosure has been made to solve the above-mentioned problems, and aims to provide a stacked signal indicator light switching device that can control indicator lights with a number of colors greater than the number of input data from the production equipment, a stacked signal indicator light with switching function, a production device, and a method for manufacturing a semiconductor device. [Means for solving the problem]

[0006] The stacked signal indicator light switching device of the present disclosure includes a lighting circuit that, when supplied with a first power source from a production facility, lights up any of the plurality of indicator lights other than a first indicator light in response to a color-specific lighting signal that is transmitted from the production facility and indicates the lighting color of the stacked signal indicator light having a plurality of indicator lights of different colors, and a second power source that is supplied with the first power source and charged, and that lights up only the first indicator light of the plurality of indicator lights when the first power source is cut off. [Effects of the Invention]

[0007] The stacked signal indicator light switching device according to the present disclosure turns on any of the multiple indicator lights other than the first indicator light in response to a color-coded lighting signal from the production facility when a first power source is supplied from the production facility. Furthermore, when the first power source is cut off, the stacked signal indicator light switching device turns on the first indicator light of the multiple indicator lights using a second power source. This allows the stacked signal indicator light switching device to control a greater number of colors than the number of color-coded lighting signals from the production facility. [Brief explanation of the drawings]

[0008] [Figure 1] 1 is a diagram showing a configuration of a production device according to a first embodiment. [Figure 2] FIG. 1 is a diagram showing a configuration of a production device according to a comparative example. [Figure 3] FIG. 1 is a diagram illustrating the uses of display colors in a four-color indicator light and a five-color indicator light. [Figure 4] 3 is a diagram showing a connection state between the stacked signal display light and production equipment according to the first embodiment. FIG. [Figure 5] 3 is a diagram showing an example of a lighting color switching circuit according to the first embodiment; FIG. [Figure 6] 4 is a flowchart showing the operation of the stacked signal display light switching device according to the first embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0009] The present embodiment will be described with reference to the drawings, in which the same or corresponding components are designated by the same reference numerals, and the description thereof will be omitted.

[0010] Embodiment 1 1 is a diagram showing the configuration of a production device 101 according to embodiment 1. The production device 101 includes a stack signal indicator light 10, a stack signal indicator light switching device 20, and production equipment 50. Hereinafter, the stack signal indicator light 10 and the stack signal indicator light switching device 20 may be collectively referred to as a stack signal indicator light with switching function 100.

[0011] The production facility 50 is a manufacturing device installed in, for example, a factory. A control unit 52 of the production facility 50 transmits a color-coded lighting signal 80 indicating the lighting color of the stacked signal indicator light 10 to the stacked signal indicator light switching device 20 via a wiring 62. The production facility 50 also supplies a first power source 54 to the stacked signal indicator light switching device 20 and the stacked signal indicator light 10 via a power line 60. The emergency stop switch 56 is a switch for bringing the production facility 50 to an emergency stop and cutting off the first power source 54.

[0012] The stacked signal indicator light switching device 20 is provided between the production facility 50 and the stacked signal indicator light 10. In the stacked signal indicator light switching device 20, a charging circuit 22, a second power source 24, an over-discharge protection circuit 26, and a lighting contact 28 are provided between the power line 60 and the red indicator light 11. The second power source 24 is a storage battery or a rechargeable battery. The second power source 24 is also called an uninterruptible power supply. In addition, a cutoff circuit 30 and a lighting color switching circuit 32 are provided between the wiring 62 and the stacked signal indicator light 10. The wiring 62, the cutoff circuit 30, and the lighting color switching circuit 32 correspond to a lighting circuit that lights up the indicator lights 12 to 15 in response to the color-specific lighting signal 80. In addition, a power supply interruption detection circuit 34 is connected to the power line 60.

[0013] The stacked signal indicator light 10 has a plurality of indicator lights 11-15 of different colors. The stacked signal indicator light 10 indicates the status of the production equipment 50 by the lighting state of the indicator lights 11-15. The plurality of indicator lights 11-15 are, for example, five-color indicator lights, and in one example, from top to bottom, the colors are red, yellow, blue, green, and white. The order of the indicator lights 11-15 may be changed as appropriate. The colors and number of colors of the indicator lights 11-15 are not limited to the example described above.

[0014] FIG. 2 is a diagram showing the configuration of a production device 801 according to a comparative example. The production device 801 includes a production facility 50 and a four-color stacked signal indicator light 810. The stacked signal indicator light 810 has red, yellow, blue, and green indicator lights 11 to 14. The production device 801 does not include a stacked signal indicator light switching device 20. The control unit 52 of the production facility 50 and the stacked signal indicator light 810 are connected by four wires 62a to 62d. The control unit 52 is, for example, a sequencer. The control unit 52 can turn on any of the indicator lights 11 to 14 by connecting any of the wires 62a to 62d to a first power source 54. The configuration of the production facility 50 in this embodiment is also the same as that of the comparative example.

[0015] Figure 3 is a diagram explaining the uses of the display colors in four-color and five-color indicator lights. The left side of Figure 3 shows the display colors and uses of a four-color indicator light based on general specifications. The right side of Figure 3 shows the display colors and uses of a five-color indicator light based on IEC (International Electrotechnical Commission) regulations.

[0016] When changing from a four-color indicator light to a five-color indicator light, the color-coded lighting signal 80 is changed from red to yellow, and then the yellow is changed to white. This changes the order from top to bottom to red, yellow, blue, green, and white. The four-color indicator light does not specify an emergency stop application. In contrast, the five-color indicator light uses red for emergency stop applications. An emergency stop refers to an intentional stop, for example, by operating the emergency stop switch 56.

[0017] In the production device 801 according to the comparative example, the number of input data from the production facility 50, i.e., the number of wirings 62, is the same as the number of colors of the stack signal indicator light 810. Therefore, with the configuration shown in FIG. 2 , the number of colors of the stack signal indicator light 810 cannot be changed without modifying the production facility 50. In other words, a color-coded lighting signal 80 output from the control unit 52 of the production facility 50 must be added. Furthermore, due to safety design specifications, the production facility 50 shuts off the first power supply 54 when the emergency stop switch 56 is operated. The stack signal indicator light 810 according to the comparative example cannot be turned on when the first power supply 54 is shut off. Therefore, the production facility 50 must be modified so that the stack signal indicator light 810 can be turned on even when the power is shut off. Furthermore, in order to change the error notification from red to yellow and the processing completion notification from yellow to white, the settings of the color-coded lighting signal 80 output from the control unit 52 must be changed. Such modifications to the production facility 50 itself may require a lot of work and cost.

[0018] Figure 4 is a diagram showing the connection state between the stacked signal indicator light 10 and the production facility 50 according to the first embodiment. Note that the charging circuit 22, the over-discharge protection circuit 26, the cutoff circuit 30, and the power cutoff detection circuit 34 are omitted from Figure 4. In this embodiment, as will be described below, by connecting a stacked signal indicator light switching device 20 between the stacked signal indicator light 10 and the production facility 50, it is possible to add one color to the stacked signal indicator light 10.

[0019] The indicator lights 12 to 15 other than the indicator light 11 are connected to the control unit 52 of the production facility 50 by wirings 62a to 62d, respectively. The control unit 52 lights up one of the indicator lights 12 to 15 by connecting one of the wirings 62a to 62d to the first power source 54. In this way, the lighting circuit of the present embodiment lights up one of the indicator lights 12 to 15 other than the indicator light 11, among the plurality of indicator lights 11 to 15, in response to the color-specific lighting signal 80 transmitted from the production facility 50 when the first power source 54 is supplied from the production facility 50.

[0020] The power interruption detection circuit 34 detects interruption of power supply from the first power source 54 to the stacked signal indicator light 10. The lighting contact 28, which is a switch, electrically interrupts the second power source 24 and the indicator light 11 when the first power source 54 is supplying power to the stacked signal indicator light 10, and electrically connects the second power source 24 and the indicator light 11 when the power interruption detection circuit 34 detects interruption of the first power source 54.

[0021] During normal operation, the relay contact of the lighting contact 28 is in an open state. At this time, the lighting contact 28 cuts off the power supply from the second power source 24 to the stacked signal indicator light 10. The second power source 24, which is connected to the first power source 54, is supplied with power from the first power source 54 via the power line 60 and is charged.

[0022] When the emergency stop switch 56 is operated, the coil voltage of the changeover relay of the lighting contact 28 disappears, and the contact is placed in a closed state. FIG. 4 shows the closed state of the contact. The second power source 24 is connected to the indicator light 11 via the lighting contact 28. Therefore, power is supplied from the second power source 24 to the indicator light 11, and the indicator light 11 is turned on. In this way, when the first power source 54 is cut off, the second power source 24 turns on only the indicator light 11 out of the multiple indicator lights 11 to 15. Therefore, the red indicator light 11 can be turned on in the event of an emergency stop.

[0023] As described above, in this embodiment, simply by providing the stack signal indicator light switching device 20 between the production facility 50 and the stack signal indicator light 10, the number of colors of the stack signal indicator light 10 can be easily increased. In other words, by applying the stack signal indicator light switching device 20 to the production facility 50 and the existing stack signal indicator light 10, it is possible to control indicator lights 11 to 15 with a number of colors greater than the number of input data from the production facility 50. In this case, there is no need to modify the production facility 50 itself, and the number of color-coded lighting signals 80 output from the control unit 52 can remain at four. Therefore, the man-hours and costs required for modifying the stack signal indicator light 10 can be reduced.

[0024] 5 is a diagram showing an example of the lighting color switching circuit 32 according to the first embodiment. The lighting color switching circuit 32 switches the correspondence between the lighting color indicated by the color-specific lighting signal 80 and the lighting color of the stacked signal indicator light 10. In the present embodiment, the lighting color switching circuit 32 switches, for example, a red lighting signal to yellow, and a yellow lighting signal to white. The lighting color switching circuit 32 may switch the correspondence between the lighting color indicated by the color-specific lighting signal 80 and the lighting color of the stacked signal indicator light 10 by, for example, a jumper switch.

[0025] FIG. 5 shows a jumper switch for connecting the wiring 62a corresponding to the red lighting signal to the yellow indicator light 13. Although not shown, jumper switches are also provided on the wirings 62b to 62d. This allows the correspondence between the lighting color indicated by the color-specific lighting signal 80 and the lighting color of the stacked signal indicator light to be switched as desired. By using a jumper switch, it is possible to reduce failures in the lighting color switching circuit 32 compared to software control. Note that switching is not limited to hardware such as a jumper switch, and the lighting color switching circuit 32 may switch the correspondence between the lighting color indicated by the color-specific lighting signal 80 and the lighting color of the stacked signal indicator light 10 using software.

[0026] 6 is a flowchart showing the operation of the stacked signal indicator light switching device 20 according to embodiment 1. When the emergency stop switch 56 is not operated, that is, when the emergency stop switch 56 is closed (No in step 1), the second power source 24 is charged by the first power source 54 via the charging circuit 22 (step 12). If the second power source 24 is a rechargeable battery, charging is always performed under normal circumstances, making maintenance such as battery replacement almost unnecessary.

[0027] The cutoff circuit 30 cuts off the color-specific lighting signal 80 when the power supply from the first power source 54 to the stacked signal indicator light 10 is cut off. When the emergency stop switch 56 is not operated, the cutoff circuit 30 passes the color-specific lighting signal 80 as is (step 13). After the color-specific lighting signal 80 is switched by the lighting color switching circuit 32 (step 14), one of the indicator lights 12 to 15 lights up (step 15). Note that step 14 may be omitted. In other words, the lighting color switching circuit 32 need not be provided.

[0028] When the emergency stop switch 56 is operated, that is, when the emergency stop switch 56 is open (YES in step 1), the power supply interruption detection circuit 34 detects that the first power supply 54 has been interrupted (step 2). At this time, the interruption circuit 30 interrupts the color-coded lighting signal 80 (step 3). If the production equipment 50 is equipped with a circuit to hold the color-coded lighting signal 80, there is a possibility that indicator lights other than the indicator light 11 will be lit even when the first power supply 54 is interrupted. The interruption circuit 30 can prevent lights other than red from being lit when the emergency stop switch 56 is operated. At this time, the lighting contact 28 is closed (step 3). As a result, only the red indicator light 11 is lit by the second power supply 24 (step 4).

[0029] The over-discharge protection circuit 26 monitors the voltage of the second power supply 24, and if it determines that an over-discharge state has occurred (YES in step 5), it opens the lighting contact 28 (step 6). This stops the power supply to the stacked signal indicator light 10, and the red indicator light 11 goes out.

[0030] As a modification of this embodiment, the lighting color switching circuit 32 may not be provided. In other words, the wires 62a to 62d may be directly connected to the stacked signal indicator light 10. Furthermore, if the production equipment 50 does not have a holding circuit for the color-coded lighting signal 80, the interrupting circuit 30 may not be provided. In this way, the lighting circuit of this embodiment may be composed only of the wires 62a to 62d.

[0031] It goes without saying that the production equipment 50 of the present disclosure includes all production equipment to which the present disclosure is applicable for manufacturing semiconductor devices, food processing, etc. It also goes without saying that the products produced by the production equipment 101 and the method of manufacturing semiconductor devices and the like using the production equipment 101 are also covered by the present disclosure.

[0032] The technical features described in this embodiment may be used in appropriate combination.

[0033] Various aspects of the present disclosure are summarized below as appendices. (Appendix 1) a lighting circuit that, when a first power source is supplied from a production facility, lights up any of the plurality of indicator lights other than the first indicator light in response to a color-specific lighting signal that is transmitted from the production facility and indicates the lighting color of the stacked signal indicator light having a plurality of indicator lights of different colors; a second power source that is supplied with the first power source and charged, and that turns on only the first indicator light among the plurality of indicator lights when the first power source is cut off; A stacked signal indicator light switching device comprising: (Appendix 2) a power interruption detection circuit that detects an interruption of power supply from the first power source to the stacked signal indicator light; a switch that electrically disconnects the second power supply and the first indicator light when the first power supply is supplied to the stacked signal indicator light, and electrically connects the second power supply and the first indicator light when the power supply interruption detection circuit detects interruption of the first power supply; 2. The stacked signal indicator light switching device according to claim 1, comprising: (Appendix 3) The stacked signal indicator light switching device described in Appendix 1 or 2, characterized in that the lighting circuit has a lighting color switching circuit that switches the correspondence between the lighting color indicated by the color-specific lighting signal and the lighting color of the stacked signal indicator light. (Appendix 4) The stacked signal indicator light switching device according to claim 3, wherein the lighting color switching circuit switches the correspondence relationship using a jumper switch. (Appendix 5) The stacked signal indicator light switching device according to any one of appendices 1 to 4, characterized in that the lighting circuit has a cut-off circuit that cuts off the color-specific lighting signal when power supply from the first power source to the stacked signal indicator light is cut off. (Appendix 6) 6. The stacked signal indicator light switching device according to any one of claims 1 to 5, wherein the second power source is a storage battery that is supplied with the first power source and charged. (Appendix 7) A stacked signal indicator light switching device according to any one of appendixes 1 to 6; The stacked signal indicator light; A stacked signal indicator light with a switching function, comprising: (Appendix 8) the plurality of indicator lights include red, yellow, blue, green and white indicator lights; 8. The stacked signal indicator light with switching function according to claim 7, wherein the first indicator light is a red indicator light. (Appendix 9) A stacked signal indicator light with a switching function as set forth in Appendix 7 or 8; The production equipment; A production device comprising: (Appendix 10) 10. A method for manufacturing a semiconductor device, comprising manufacturing a semiconductor device using the production apparatus according to claim 9. [Explanation of symbols]

[0034] 10 stacked signal indicator light, 11-15 indicator light, 20 stacked signal indicator light switching device, 22 charging circuit, 24 second power supply, 26 over-discharge protection circuit, 28 lighting contact, 30 interruption circuit, 32 lighting color switching circuit, 34 power supply interruption detection circuit, 50 production equipment, 52 control unit, 54 first power supply, 56 emergency stop switch, 60 power line, 62, 62a-62d wiring, 80 color-coded lighting signal, 100 stacked signal indicator light with switching function, 101 production equipment, 801 production equipment, 810 stacked signal indicator light

Claims

1. a lighting circuit that, when a first power source is supplied from a production facility, lights up any of the plurality of indicator lights other than the first indicator light in response to a color-specific lighting signal that is transmitted from the production facility and indicates the lighting color of the stacked signal indicator light having a plurality of indicator lights of different colors; a second power source that is supplied with the first power source and charged, and that turns on only the first indicator light among the plurality of indicator lights when the first power source is cut off; A stacked signal indicator light switching device comprising:

2. a power interruption detection circuit that detects an interruption of power supply from the first power source to the stacked signal indicator light; a switch that electrically disconnects the second power supply from the first indicator light when the first power supply is being supplied to the stacked signal indicator light, and electrically connects the second power supply to the first indicator light when the power supply interruption detection circuit detects that the first power supply has been interrupted; 2. The stacked signal indicator light switching device according to claim 1, further comprising:

3. 3. The stacked signal indicator light switching device according to claim 1, wherein the lighting circuit has a lighting color switching circuit that switches the correspondence between the lighting color indicated by the color-specific lighting signal and the lighting color of the stacked signal indicator light.

4. 4. The stacked signal indicator light switching device according to claim 3, wherein the lighting color switching circuit switches the correspondence relationship by a jumper switch.

5. 3. The stacked signal indicator light switching device according to claim 1, wherein the lighting circuit includes a cut-off circuit that cuts off the color-coded lighting signal when power supply from the first power source to the stacked signal indicator light is cut off.

6. 3. The stacked signal indicator light switching device according to claim 1, wherein the second power source is a storage battery that is supplied with the first power source and charged.

7. The stacked signal indicator light switching device according to claim 1 or 2; The stacked signal indicator light; A stacked signal indicator light with a switching function, comprising:

8. the plurality of indicator lights include red, yellow, blue, green and white indicator lights; 8. The stacked signal indicator light with switching function according to claim 7, wherein the first indicator light is a red indicator light.

9. The stacked signal indicator light with switching function according to claim 7; The production equipment; A production device comprising:

10. A method for manufacturing a semiconductor device, comprising manufacturing a semiconductor device using the production apparatus according to claim 9.

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