Conduction structure of the measuring device

Abstract

To easily assemble a measuring device.SOLUTION: In a conduction structure S of a measuring device, an end of a conduction pin 34A extended in a first direction (vertical direction) and one end L1a of a wire L1 extended in a second direction (horizontal direction) differing from the first direction are electrically connected via a terminal board 41. Further, an insulator 45 disposed in an upper case 31C as a metal part of a pressure sensor 30 includes: an insertion hole 45A into which an end of the conduction pin 34A is inserted; and an insertion groove 45D into which the one end L1a of the wire L1 is inserted. The insertion hole 45A is open on a lower surface of the insulator 45 that faces the upper case 31C and is extended in a first direction. The insertion groove 45D is open on an upper surface opposite to a lower surface of the insulator 45 and is extended in a second direction, and communicates with the insertion hole 45A.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a conductive structure for various measuring devices such as a diaphragm vacuum gauge. [Background technology]

[0002] Patent Document 1 discloses a sensor for use in a measuring device such as a diaphragm vacuum gauge, which includes a sensor element (30) that detects a physical quantity and outputs an electrical signal indicating the physical quantity, a metal case (10) that houses the sensor element, and a conductive pin (41) that extracts the electrical signal to the outside of the case (the reference numerals in parentheses indicate the reference numerals in Patent Document 1). This sensor also includes a cylindrical shield (42) that surrounds the conductive pin to prevent the potential of the signal from being affected by the potential of the metal case. Such a sensor is used in a desired measuring device such as a vacuum gauge. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2006-3234 Summary of the Invention [Problem to be solved by the invention]

[0004] When assembling the measuring device, the conductive pin is electrically connected to the inner conductor of the coaxial cable of the measuring device, and the shield is electrically connected to the outer conductor of the coaxial cable. However, the electrical connection between the shield and the outer conductor is performed by welding or the like, which is time-consuming.

[0005] The present invention has been made in view of the above points, and an object of the present invention is to make it easier to assemble a measuring device. [Means for solving the problem]

[0006] In order to solve the above problem, the conduction structure of the measuring device of the present invention includes a sensor including: a sensor element that detects a physical quantity and outputs an electrical signal indicating the physical quantity; a case that accommodates the sensor element and has a metal part with a through hole formed therein; a conductive pin that extends in a first direction, passes through the through hole, and extracts the electrical signal to the outside of the case; and a hermetic seal that seals between the inner wall of the through hole and the conductive pin; a wiring that transmits the electrical signal extracted by the conductive pin, the wiring extending in a second direction different from the first direction and having one end electrically connected to a tip of the conductive pin; and an insulator fixed on the metal part of the sensor, the insulator including: a first surface facing the metal part; a second surface opposite to the first surface; an insertion hole that opens in the first surface and extends in the first direction, into which the tip of the conductive pin is inserted; and an insertion groove that opens in the second surface and extends in the second direction, communicates with the insertion hole, and into which the one end of the wiring is inserted.

[0007] The terminal board may further include a conductive terminal board extending in the second direction, the terminal board having a first connection portion to which the tip of the conductive pin is connected and a second connection portion to which the one end of the wiring is connected.

[0008] The insertion hole may be a through hole extending from the first surface to the second surface, the first connection portion of the terminal board may be accommodated in the insertion hole and exposed from the insulator to the second surface side, and the first connection portion and the tip portion of the conductive pin may be welded to each other.

[0009] The second connection portion and the one end of the wiring may be crimped together.

[0010] The first direction and the second direction may be perpendicular to each other.

[0011] The electrical wiring device may further include a holder that covers the insulator and covers the insertion groove into which the one end of the wiring is inserted. [Effects of the Invention]

[0012] According to the present invention, the measurement device can be easily assembled. [Brief explanation of the drawings]

[0013] [Figure 1] FIG. 1 is a schematic diagram of a diaphragm vacuum gauge according to an embodiment of the present invention. [Figure 2] FIG. 2 is a cross-sectional view of a main part of a diaphragm vacuum gauge according to an embodiment of the present invention. [Figure 3] FIG. 3 is an exploded perspective view of the conduction structure according to the embodiment of the present invention. [Figure 4] FIG. 4 is an enlarged cross-sectional view of a conductive structure according to an embodiment of the present invention. [Figure 5] 5 is an enlarged perspective view of one end of the wiring, the terminal plate, and the conductive pin of FIG. [Figure 6] 6 is an enlarged perspective view of one end of the wiring, the terminal plate, and the conductive pin of FIG. 4, seen from a direction different from that of FIG. [Figure 7] FIG. 7 is an enlarged perspective view of the insulator of FIG. DETAILED DESCRIPTION OF THE INVENTION

[0014] An embodiment in which the electrical continuity structure of the present invention is applied to a diaphragm vacuum gauge will be described below with reference to the drawings. In this embodiment, up, down, left, and right directions are set, but the up and down directions do not have to coincide with the top and bottom directions depending on the installation direction of the sensor device.

[0015] 1, a diaphragm vacuum gauge 10 according to this embodiment includes a pressure sensor unit 20 and a circuit unit 70 that controls the pressure sensor unit 20. The pressure sensor unit 20 is connected via a joint J to a pipe H that is connected to a vacuum chamber T of a semiconductor control device or the like. The pressure sensor unit 20 detects the air pressure of the process gas introduced from the vacuum chamber T into the pipe H and supplies an electrical signal indicating the detected air pressure to the circuit unit 70. The circuit unit 70 performs various processes based on the electrical signal supplied from the pressure sensor unit 20. For example, the circuit unit 70 amplifies and performs analog-to-digital conversion on the electrical signal, converting the electrical signal into data in a format that can be handled by a host device of the diaphragm vacuum gauge 10 (e.g., a controller for semiconductor manufacturing equipment), and outputs the converted data to the host device.

[0016] 2 and 3, the diaphragm vacuum gauge 10 includes the pressure sensor section 20 and the circuit section 70, as well as wires L1 to L5 that connect them. Wires L1 to L3 connect the pressure sensor 30 of the pressure sensor section 20 to the circuit board 71 of the circuit section 70. Wire L4 connects the heater 51 of the pressure sensor section 20 to the circuit board 71. Wire L5 connects the temperature sensor 53 of the pressure sensor section 20 to the circuit board 71. The functions of wires L1 to L5 will be described later. Wires L1, L4, and L5 are depicted as elevational views in FIG. 2 (the same is true for wire L1 in FIG. 4).

[0017] As shown in Figures 2 and 3, the pressure sensor section 20 includes a pressure sensor 30, terminal boards 41 to 43, an insulator 45, a holder 47, a heater 51, a heater support member 52, a temperature sensor 53, heat insulating materials 55 and 56, a case 58, and a heat insulating material support section 59.

[0018] The pressure sensor 30 includes a vacuum chamber R1 and an inlet chamber R2 into which the process gas in the pipe H flows, and converts the differential pressure between the vacuum chamber R1 and the inlet chamber R2 into an electrical signal, thereby converting the air pressure of the process gas relative to the air pressure in the vacuum chamber R1. The pressure sensor 30, together with terminal boards 41-43, an insulator 45, a holder 47, and wires L1-L3, constitutes a conduction structure S according to an embodiment of the present invention. These will be described in detail later.

[0019] The heater 51 heats the pressure sensor 30 to prevent the process gas from separating out inside the pressure sensor 30. The heater 51 is a cylindrical band heater (the internal structure is omitted in FIG. 2) that is fastened to a cylindrical heater support member 52. This fastening allows the heater support member 52 to support the heater 51. Power is supplied to the heater 51 from the circuit board 71 of the circuit unit 70 via wiring L4, and the heater generates heat due to this power. The heater support member 52 has an annular protrusion 52A that protrudes inward. The protrusion 52A engages with a step on the outer periphery of the pressure sensor 30. This engagement allows the heater support member 52, together with the heater 51, to be supported by the pressure sensor 30.

[0020] The temperature sensor 53 is in contact with the pressure sensor 30 and detects the temperature of the pressure sensor 30 heated by the heater 51. The internal structure of the temperature sensor 53 is omitted in FIG. 2. The temperature sensor 53 outputs the detected temperature to a circuit board 71 of the circuit section 70 via a wire L5. The circuit board 71 uses the temperature output from the temperature sensor 53 as a feedback value and controls the power supplied to the heater 51 so that the pressure sensor 30 reaches a desired temperature (for example, 200°C).

[0021] The heat insulators 55 and 56 are configured to insulate the heat of the heater 51 and make it difficult for the outside of the pressure sensor unit 20, particularly the circuit unit 70, to be heated by the heat of the heater 51. The heat insulators 55 and 56 are made of any material that has a heat insulating effect. The heat insulator 55 is provided in a cylindrical shape so as to surround the heater 51. The heat insulator 56 is formed in a disk shape and is placed on the pressure sensor 30 etc. so as to cover the pressure sensor 30 etc. from above.

[0022] The case 58 includes a cylindrical inner case 58A having a thickness in the radial direction as a whole and a cup-shaped outer case 58B that covers the inner case 58A from the outside. The inner case 58A includes an upper case 58AA having an inverted U-shaped cross section and a cup-shaped lower case 58AB with a central through-hole. The inner case 58A houses a cylindrical heat insulator 55 therein. A disc-shaped heat insulator 56 is fitted to the inner periphery of the upper case 58AA. The heat insulator 56 is flexible and presses the wires L1 to L5 passing through the annular upper case 58AA against the inner periphery wall of the upper case 58AA. The wires L1 to L5 are sandwiched and held between the heat insulator 56 and the inner periphery wall of the upper case 58AA, with the outer periphery of the heat insulator 56 wrapping around the periphery. The inner case 58A is made of synthetic resin so as not to impair the insulating effect of the heat insulator 56. On the other hand, the outer case 58B is made of metal.

[0023] The heat insulating material support part 59 is disposed on the holder 47 that constitutes the uppermost part of the conductive structure S, and supports the central part of the heat insulating material 56 from below. The heat insulating material support part 59 is formed in a shape that connects to the upper case 58AA, and may be formed integrally with the upper case 58AA.

[0024] Here, the conductive structure S, that is, the pressure sensor 30, the terminal boards 41 to 43, the insulator 45, the holder 47, and the wires L1 to L3 will be described in detail with reference to FIGS.

[0025] As shown in FIGS. 3 and 4, the pressure sensor 30 includes a case 31, a support portion 32, a sensor element 33, conductive pins 34A to 34C, and hermetic seals 35A to 35C.

[0026] The case 31 houses the support part 32 and the sensor element 33. The case 31 is made of a metal such as Kovar or Inconel. The case 31 includes a lower case 31A having a funnel-shaped inner peripheral wall, a cylindrical middle case 31B joined to the lower case 31A by welding or the like, and a disk-shaped upper case 31C joined to the upper end of the middle case 31B by welding or the like and closing the upper end of the middle case 31B. The process gas flowing into the case 31 from the pipe H flows into the lower case 31A from below.

[0027] The support part 32 supports the sensor element 33. Furthermore, the support part 32, together with the sensor element 33, divides the space inside the case 31 into a vacuum chamber R1 and an inflow chamber R2 into which the process gas flows. The support part 32 is formed in a disk shape, and its outer periphery is sandwiched between the lower case 31A and the middle case 31B. In this way, the support part 32 is supported by the case 31. The sensor element 33 is fixed to the center of the support part 32.

[0028] The sensor element 33 detects the air pressure of the process gas relative to the air pressure in the vacuum chamber R1 and outputs an electrical signal indicating the detected air pressure. The sensor element 33 has a diaphragm that deforms in response to the air pressure of the process gas relative to the air pressure in the vacuum chamber R1. The sensor element 33 is a capacitance-type diaphragm-type sensor element whose capacitance changes in response to the degree of deformation of the diaphragm. The sensor element 33 may also be a piezoelectric element whose resistance changes in response to the degree of deformation of the diaphragm. The sensor element 33 detects the air pressure and outputs an electrical signal (such as a voltage signal) indicating the capacitance or resistance that changes in response to the air pressure of the process gas. The sensor element 33 is connected to conductive pins 34A and 34B, which transmit the electrical signal output by the sensor element 33 to the outside of the case 31 of the pressure sensor 30, and a conductive pin 34C, which applies a voltage to the sensor element 33.

[0029] The conductive pins 34A to 34C protrude to the outside of the case 31 through through holes 31CA to 31CC formed in the upper case 31C. In this way, the conductive pins 34A to 34C penetrate the case 31 by passing through the through holes 31CA to 31CC, respectively. The conductive pin 34A extends in the vertical direction perpendicular to the flat upper surface of the pressure sensor 30 and is fixed by a hermetic seal 35A that seals against the inner wall of the through hole 31CA. Similarly, the conductive pins 34B and 34C extend in the vertical direction and are fixed by a hermetic seal 35B or 35C that seals against the inner wall of the through hole 31CB or 31CC, respectively. The conductive pins 34A to 34C are connected to conductive terminal plates 41 to 43, respectively. The terminal plates 41 to 43 are made of metal or the like.

[0030] The terminal plate 41 electrically connects the tip of the conductive pin 34A to one end L1a of the wire L1. The terminal plate 42 electrically connects the tip of the conductive pin 34B to one end L2a of the wire L2. The terminal plate 43 electrically connects the tip of the conductive pin 34C to one end L3a of the wire L3. The terminal plates 41 to 43 are plate-like members extending in the left-right direction perpendicular to the up-down direction. The wires L1 to L3 are coaxial cables, and each core wire is connected to the terminal plates 41 to 43, respectively. The terminal plates 41 to 43 have the same shape. The shape of the terminal plate 41 will be described below as a representative of the terminal plates 41 to 43, with reference to Figures 4 to 6. Note that the following description of the wire L1 also applies to the wires L2 and L3.

[0031] The terminal board 41 includes a flat first connection portion 41A connected to the tip of the conductive pin 34A and a second connection portion 41B connected to one end L1a of the wiring L1. The first connection portion 41A and the tip of the conductive pin 34A are welded together with the tip (the cylindrical upper surface) of the conductive pin 34A abutting against the first connection portion 41A. The second connection portion 41B and the one end L1a of the wiring L1 are crimped together (here, crimped) by sandwiching the core wire L1b, which is the inner conductor of the one end L1a, between the flat portion 41BA and a pair of bent legs 41BB of the second connection portion 41B. As shown in FIG. 4, the core wire L1b is pressed against a protrusion Y of the flat portion 41BA. The core wire L1b is a stranded wire for easy crimping. The terminal board 41 further includes a protruding portion 41C protruding from the first connecting portion 41A in the opposite direction to the wiring L1 side, and a restraining portion 41D that restrains an insulator L1c covering a core wire L1b of one end L1a of the wiring L1. As shown in Fig. 2, the other end of the wiring L1 is connected to a circuit board 71 of the circuit unit 70, and a shield L1d, which is an outer conductor of the wiring L1, is grounded on the circuit board 71 side via a metal case 72 of the circuit unit 70 or the like.

[0032] 3, 4, and 7, the insulator 45 has a disk shape, is fixed to the upper surface, which is a flat metal portion from which the conductive pins 34A to 34C of the pressure sensor 30 protrude, and accommodates inside thereof a combination of one end L1a of the wire L1, the tip end of the conductive pin 34A, and the terminal board 41. The insulator 45 has insulating properties and is made of, for example, ceramic.

[0033] The insulator 45 is formed with insertion holes 45A to 45C into which the conductive pins 34A to 34C are respectively inserted, and insertion grooves 45D to 45F into which the ends L1a to L3a of the wirings L1 to L3 are respectively inserted. The insertion holes 45A to 45C open to the bottom surface of the insulator 45 facing (aligned with) the top surface (metal portion) of the pressure sensor 30. The insertion holes 45A to 45C extend in the vertical direction (a direction perpendicular to the top surface of the pressure sensor 30), which is the same direction as the extension of the conductive pins 34A to 34C, from the bottom surface to the top surface of the insulator 45, and are formed as through holes that penetrate the insulator 45. The insertion grooves 45D to 45F open to the top surface opposite the bottom surface of the insulator 45, and extend in the left-right direction (a direction parallel to the top surface of the pressure sensor 30), which is perpendicular to the extension direction of the conductive pins 34A to 34C. When one end L1a of the wiring L1 is inserted into the insertion groove 45D, the one end L1a is guided to extend in the left-right direction. Similarly, the insertion groove 45E (or 45F) guides the one end L2a (or L3a) to extend in the left-right direction. The one ends L1a-L3a extend in the same direction as the terminal boards 41-43 and in a direction perpendicular to the extension direction of the conductive pins 31A-31C.

[0034] The insertion hole 45A and the insertion groove 45D are connected to each other, and the space formed thereby accommodates one end L1a of the wire L1, the tip of the conductive pin 34A, and the terminal board 41. The first connection portion 41A of the terminal board 41 is disposed in the insertion hole 45A, and the second connection portion is disposed in the insertion groove 45D. This also applies to the other insertion holes 45B and 45C and the insertion grooves 45E and 45F.

[0035] Furthermore, insulator 45 includes cover 45G, which covers a portion of the upper opening of insertion hole 45A, thereby covering terminal board 41, more specifically, protrusion 41C. Protrusion 41C is inserted into insertion hole 45A from the left and right and fits under cover 45G, thereby restricting upward movement of terminal board 41. Similarly, insulator 45 includes covers 45H and 45I, which cover terminal boards 42 and 43 (protrusions corresponding to protrusion 41C).

[0036] As shown in Figures 3 and 4, a holder 47 is placed over the pressure sensor 30 on which the insulator 45 is disposed. The holder 47 includes a flat plate portion 47A with a through-hole formed in the center, four legs 47B extending in the vertical direction, and four claws 47C provided at the bottom ends of each of the four legs. The claws 47C engage with the inner walls of recesses 30B provided on the outer peripheral surface of the pressure sensor 30. This sandwiches and fixes the insulator 45 between the pressure sensor 30 and the holder 47. Note that, in order to position the insulator 45 relative to the pressure sensor 30, a convex portion may be provided on either the lower surface of the insulator 45 or the upper surface of the pressure sensor 30, and a concave portion that engages with the convex portion may be provided on the other surface. The holder 47 covers a part of the insertion grooves 45D to 45F into which the one ends L1a to L3a of the wires L1 to L3 are inserted, thereby preventing the wires L1 to L3 from jumping out upward from the insertion grooves 45D to 45F, respectively.

[0037] Returning to the explanation of FIG. 2, the circuit unit 70 includes a circuit board 71 formed by combining multiple boards and a case 72 that houses the circuit board 71. The other ends of the wires L1 to L3 (see FIG. 3, etc.) are connected to the circuit board 71. For example, if the sensor element 33 is a capacitive type, the circuit board 71 applies an AC voltage to the sensor element 33 via the wire L3. Furthermore, the circuit board 71 acquires, via the wire L1, a voltage signal (electrical signal output from the sensor element 33) that varies depending on the capacitance value of the first capacitor CX formed by the sensor element 33. The circuit board 71 acquires, via the wire L2, a voltage signal (electrical signal output from the sensor element 33) that varies depending on the capacitance value of the second capacitor CR formed by the sensor element 33. As a result, the electrical signal output by the sensor element 33 and extracted by the conductive pins 34A and 34B is transmitted via the wire L1 or L2 disposed outside the pressure sensor 30 and supplied to the circuit board 71. The circuit board 71 performs processing (for example, the processing described above as the processing performed by the circuit unit 70) based on the acquired electrical signal. The circuit board 71 also controls the power supplied to the heater 51 as described above.

[0038] As described above, in the conductive structure S according to this embodiment, the tip of the conductive pin 34A extending in a first direction (vertical direction) is electrically connected to one end L1a of the wiring L1 extending in a second direction (lateral direction) different from the first direction via the terminal plate 41. Furthermore, the insulator 45 disposed in the upper case 31C, which is a metal part of the pressure sensor 30, includes an insertion hole 45A into which the tip of the conductive pin 34A is inserted and an insertion groove 45D into which one end L1a of the wiring L1 is inserted. The insertion hole 45A opens in the lower surface of the insulator 45 facing the upper case 31C and extends in the first direction. The insertion groove 45D opens in the upper surface opposite the lower surface of the insulator 45, extends in the second direction, and communicates with the insertion hole 45A. Thus, the insulator 45 electrically isolates the conductive pin 34A, the core wire L1b of the one end L1a, and most of the terminal plate 41 from the metal upper case 31C. Therefore, simply by arranging the insulator 45, the potential of the electrical signal transmitted by the conductive pin 34A and the like can be easily prevented from being affected by the potential of the metal upper case 31C, resulting in easier assembly of the diaphragm vacuum gauge 10. In this embodiment, the first direction and the second direction are perpendicular to each other, but they do not have to be perpendicular to each other. It is sufficient that the portion of the case 31 in which the through hole 31CA through which the conductive pin 34A passes is formed is made of metal. The tip of the conductive pin 34A and one end L1a of the wiring L1 may be electrically connected directly without using the terminal board 41. This also achieves the same effect as described above.

[0039] Furthermore, the insertion hole 45A is a through-hole extending from the upper surface to the lower surface of the insulator 45. The first connection portion 41A of the terminal plate 41 is accommodated in the insertion hole 45A (see FIG. 4 ), is exposed from the upper surface of the insulator 45, and is welded to the tip of the conductive pin 34A. With this configuration, after the insulator 45 is placed on the pressure sensor 30 and the wiring L1 connected to the terminal plate 41 is inserted into the insertion groove 45D (i.e., after the state shown in FIG. 4 ) is achieved, the first connection portion 41A and the conductive pin 34A can be welded from above through the upper opening of the insertion hole 45A (see arrow X in FIG. 4 ). Therefore, welding is performed with the first connection portion 41A and other components positioned to some extent, facilitating welding of the first connection portion 41A and the conductive pin 34A. This facilitates assembly of the diaphragm vacuum gauge 10. Furthermore, the through-hole in the flat plate portion 47A of the holder 47 exposes the first connecting portion 41A from the holder 47, making welding possible even after the holder 47 is attached. This also makes welding easier, facilitating the assembly of the diaphragm vacuum gauge 10.

[0040] Furthermore, insulator 45 includes cover 45G that covers a portion of insertion hole 45A from above, and a portion of terminal board 41 (here, protrusion 41C) fits into said portion of insertion hole 45A and is covered by cover 45G (see FIG. 4). This prevents terminal board 41 and one end L1a of wiring L1 from moving upward and jumping out of insertion hole 45A and insertion groove 45D.

[0041] By crimping the second connection portion 41B and the one end L1a of the wire L1 as in the above embodiment, the connection between them is easy and welding for the connection is not required. Furthermore, since the core wire of the one end L1a of the crimped wire L1 is a stranded wire, the crimping is easy and the minimum bending radius of the wire L1 can be made smaller than when the core wire is a solid wire. This allows the wire L1 to be routed within a compact area, thereby making the size of the diaphragm vacuum gauge 10 compact. Furthermore, since the holder 47 covers the insulator 45 and covers the insertion groove 45D into which the one end L1a of the wire L1 is inserted, the one end L1a of the wire L1 is prevented from protruding upward from the insertion groove 45D. Furthermore, as shown in Figures 3 and 4, the holder 47 covers the insertion groove 45D while avoiding the connection portion between the wiring L1 and the conductive pin 34A, so that even if the holder 47 is made of metal, the connection portion can be separated from the holder 47, and the signal potential at the connection portion is less likely to be affected by the potential of the holder 47.

[0042] The above embodiment can be modified in various ways. For example, the shapes of the components described above are arbitrary. For example, the insulator 45 may be a plate shape other than a disk. The cylinders and disks described above can be changed to polygonal tubes, polygonal plates, etc. Furthermore, the conductive structure S can be applied to measurement devices other than diaphragm vacuum gauges.

[0043] Although the present invention has been described above with reference to the embodiments and modifications, the present invention is not limited to the above embodiments and modifications. For example, the present invention includes various modifications to the above embodiments and modifications that can be understood by a person skilled in the art within the scope of the technical concept of the present invention. The configurations listed in the above embodiments and modifications can be combined as appropriate within a range that does not contradict each other. [Explanation of symbols]

[0044] 10... diaphragm vacuum gauge, 20... pressure sensor part, 30... pressure sensor, 31... case, 31C... upper case, 31CA to 31CC... through holes, 32... support part, 33... sensor element, 34A to 34C... conductive pins, 35A to 35C... hermetic seal, 41 to 43... terminal board, 41A... first connecting part, 41B... second connecting part, 41BA... flat part, 41BB... leg part, 41C... protruding part, 41D... restraining part, 45... insulator 45A to 45C...insertion hole, 45D to 45F...insertion groove, 45G to 45I...cover, 47...holder, 51...heater, 53...temperature sensor, 55, 56...insulating material, 58A...inner case, 58B...outer case, 70...circuit section, 71...circuit board, 72...case, L1 to L3...wiring, L1a to L3a...one end, L1b...core wire, L1c...insulator, L1d...shield, R1...vacuum chamber, R2...inlet chamber, S...conductive structure.

Claims

1. A conductive structure of a measuring device, a sensor including: a sensor element that detects a physical quantity and outputs an electrical signal indicating the physical quantity; a case that houses the sensor element and has a metal portion with a through hole formed therein; a conductive pin that extends in a first direction, passes through the through hole, and extracts the electrical signal to the outside of the case; and a hermetic seal that seals between an inner wall of the through hole and the conductive pin; a wiring that transmits the electrical signal extracted by the conductive pin, the wiring extending in a second direction different from the first direction and having one end electrically connected to a tip end of the conductive pin; an insulator fixed on the metal portion of the sensor, the insulator comprising: a first surface facing the metal portion; a second surface opposite the first surface; an insertion hole opening in the first surface and extending in the first direction, into which the tip end of the conductive pin is inserted; and an insertion groove opening in the second surface and extending in the second direction, communicating with the insertion hole, into which the one end of the wiring is inserted; a conductive terminal plate extending in the second direction, the terminal plate including: a first connection portion to which the tip end of the conductive pin is connected and which is housed in the insertion hole together with the tip end; a second connection portion to which the one end of the wiring is connected and which is inserted into the insertion groove together with the one end; and a protrusion protruding from the first connection portion in the second direction and in a direction opposite to the second connection portion and which is housed in the insertion hole; the insertion hole is a through hole extending from the first surface to the second surface, the first connection portion is exposed from the insulator to the second surface side, the insulator includes a cover that covers only the portion of the insertion hole where the protrusion is accommodated from the second surface side, thereby covering the protrusion, and thereby restricting movement of the terminal board in a direction of protruding from the insertion groove and the insertion hole. Conduction structure.

2. the first direction and the second direction are perpendicular to each other, The tip of the conductive pin abuts against the first connection portion. The conductive structure according to claim 1 .

3. The first connection portion and the tip portion of the conductive pin are welded together. The conductive structure according to claim 2 .

4. The second connection portion and the one end portion of the wiring are crimped together. The conductive structure according to claim 3 .

5. The first direction and the second direction are perpendicular to each other. The conductive structure according to claim 1 .

6. a holder that covers the insulator and covers the insertion groove into which the one end of the wiring is inserted, the holder has a through hole through which the first connection portion is exposed; The conductive structure according to claim 1 .

Images