Bidirectional drive device for valve member

The bidirectional actuator for a valve member addresses structural complexity and operational precision issues by employing a body with piston chambers and gas flow paths, ensuring smooth bidirectional operation and preventing stuck movements.

JP7727065B2Active Publication Date: 2025-08-20KING LAI HYGIENIC MATERIALS
View PDF 5 Cites 0 Cited by

Patent Information

Application Number
JP2024108158
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Priority Date
2023-08-02
Filing Date
2024-07-04
Publication Date
2025-08-20
Estimated Expiration
2044-07-04

AI Technical Summary

Technical Problem

Existing bidirectional valve drive devices suffer from complex structures, assembly difficulties, and operational precision issues, as well as stuck movements in forward or backward directions.

Method used

A bidirectional actuator for a valve member comprising a body with longitudinal and lateral piston chambers, an air shaft sleeve, and gas flow paths, including trigger and sub-trigger grooves, to ensure smooth bidirectional operation by guiding gas flow effectively.

Benefits of technology

Ensures reliable bidirectional actuation of the valve member, preventing stuck operations and achieving smooth propelling and retracting movements.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure 0007727065000001
    Figure 0007727065000001
  • Figure 0007727065000002
    Figure 0007727065000002
  • Figure 0007727065000003
    Figure 0007727065000003
Patent Text Reader

Abstract

To provide a bidirectional drive device used for a valve.SOLUTION: An air shaft sleeve 21 is arranged so that it can go up and down in a body 11. A shaft 31 is arranged so that it is movable back and forth in the air shaft sleeve 21. One or more horizontal pistons are connected to the shaft 31 and are attached movably back and forth. When a bidirectional drive device used for a valve member is driven, the air shaft sleeve 21 is raised by air flown from a first air channel, after which the horizontal piston is moved forward and rising and advancement in a horizontal direction of the shaft 31 are promoted by the air flown from a second air channel. Then, air flown from a third air channel moves the horizontal piston backward, after which the air shaft sleeve 21 is lowered and retraction and descension in the horizontal direction of the shaft 31 are promoted by air flown from a fourth air channel.SELECTED DRAWING: Figure 3
Need to check novelty before this filing date? Find Prior Art

Description

[Technical Field]

[0001] The present invention relates to gate valves, and more particularly to a bidirectional drive device for use with a valve member. [Background technology]

[0002] The two-way valve disclosed in Patent Document 1 moves a module to the left or right by moving a first actuator with a first drive unit and a second actuator with a second drive unit, while simultaneously causing the first sealing plate or the second sealing plate to selectively seal two inlets.

[0003] However, the two-way valve of Patent Document 1 has a complex structure and many parts, making it difficult to assemble, and also has problems with operational precision.

[0004] The bidirectional valve drive device disclosed in Patent Document 2 advances and retreats two piston rods in two flow paths, while simultaneously realizing bidirectional movement using two guide rods and a cylinder piston rod.

[0005] The bidirectional valve drive device disclosed in Patent Document 2 has a simple structure, but there is room for improvement because the forward or backward movement of the two flow paths can get stuck and not be smooth. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Taiwan Patent No. I503914 [Patent Document 2] Taiwan Patent No. I730808 Summary of the Invention [Problem to be solved by the invention]

[0007] SUMMARY OF THE INVENTION The primary object of the present invention is to provide a bidirectional actuator for use with a valve member that ensures bidirectional actuation of the valve member, thereby eliminating the problem of jamming.

[0008] Another object of the present invention is to provide a bidirectional drive device that can be used with a valve member and can reliably perform the steps of propelling the valve member, i.e., raising the valve member and then moving it forward horizontally, and retracting the valve member, i.e., moving the valve member back horizontally and then lowering it. [Means for solving the problem]

[0009] To achieve the above object, a bidirectional actuator for a valve member includes a body, an air shaft sleeve, a shaft, a horizontally moving block, a first gas flow path, a second gas flow path, a third gas flow path, a fourth gas flow path, and a relief valve. The body has a longitudinal passage, one or more lateral piston chambers extending longitudinally, and one or more auxiliary piston chambers extending vertically. The vertical passage is surrounded by walls. The one or more lateral piston chambers have lateral pistons therein movable between an advanced position and a retracted position. The main body further has a sub-passage extending forward and backward, a sub-seal ring, a sub-piston and a lower end seal ring. The sub-passages are arranged to connect to one or more lateral piston chambers. A sub-seal ring is disposed within the sub-passage. The sub-piston is disposed on the lateral piston, enters from the rear end of the sub-passage, engages with the sub-seal ring, and slides in the sub-passage. The lower end seal ring is disposed on the wall surface of the vertical passage. An air shaft sleeve is positioned within the longitudinal passageway to fit over and slide against the lower end seal ring. The air shaft sleeve is a hollow, elongated structure that moves between a maximum and a minimum position and has a gap between it and the wall of the vertical passageway for gas to enter. The air shaft sleeve has an intermediate seal ring and one or more auxiliary pistons. The intermediate seal ring is annularly disposed on the air shaft sleeve and simultaneously abuts against the wall surface of the vertical passage. The middle seal ring is higher than the bottom seal ring. One or more auxiliary pistons are arranged to enter the auxiliary piston chambers from below, respectively. The shaft is mounted so that a portion of it can move back and forth within the air shaft sleeve, and simultaneously rise and fall with the air shaft sleeve. The shaft has an exposed portion that projects above the air shaft sleeve and body. The horizontally moving block is attached to the lateral pistons within one or more lateral piston chambers and moves back and forth within the body with the lateral pistons. The shaft can move up and down through the horizontal movement block and can also move back and forth with the horizontal movement block. The first gas flow path is disposed in the main body, and has one end serving as an outer end connected to the outside of the main body and another end serving as an inner end connected to the vertical passage. When the air shaft sleeve is seated in the lowest position, the inner end of the first gas flow passage is lower than the intermediate seal ring. The second gas flow path is disposed in the main body, with one end being a lower end connected to the vertical passage and the other end being an upper end connected to a space between the main body and the rear of the horizontal piston in one or more horizontal piston chambers. The lower end of the second gas flow passage is lower than the lower end seal ring. The third gas flow path is disposed in the main body, and has one end serving as a front end that connects to the space between the front of the lateral piston in one or more lateral piston chambers and the main body, and another end serving as an outer end that connects to the outside of the main body. A fourth gas passage is disposed in the main body, with one end being an upper end connected to the front end of the sub-passage and another end being a lower end connected to one or more auxiliary piston chambers. When the air shaft sleeve is in its highest position, the lower end of the fourth gas flow passage is higher than the one or more auxiliary pistons. A relief valve is disposed in the body and connects the second gas flow path to the exterior of the body. The air shaft sleeve has a trigger groove recessed into the exterior. When the air shaft sleeve is set to the highest position, the trigger groove connects the gap above the lower end seal ring with the space below the lower end seal ring, thereby connecting to the lower end of the second gas flow path. The sub-piston has a sub-trigger groove formed recessed on the outside. When the lateral pistons in the one or more lateral piston chambers are in the retracted position, the sub-trigger groove connects the one or more lateral piston chambers behind the sub-seal ring with the upper end of the fourth gas flow path.

[0010] With the above-mentioned technical features, the present invention can eliminate the problem of stuck operation by ensuring that the valve member achieves bidirectional operation. Furthermore, the present invention can reliably realize the steps of propelling the valve member, i.e., raising the valve member and then moving it forward horizontally, and retracting the valve member, i.e., retracting the valve member horizontally and then lowering it.

[0011] The present invention is not limited to the above technical content, and can also adopt a method of connecting the lower end of the fourth gas passage to the vertical passage without providing one or more auxiliary piston chambers and one or more auxiliary pistons. When the air shaft sleeve is installed at the highest position, the lower end of the fourth gas passage is higher than the middle seal ring, thereby achieving the above-mentioned effects. [Brief explanation of the drawings]

[0012] [Figure 1] 1 is a perspective view showing a bidirectional drive device used in a valve member according to a first embodiment of the present invention; [Figure 2] 1 is a perspective view of a bidirectional drive device for use with a valve member according to a first embodiment of the present invention; [Figure 3] FIG. 3 is a cross-sectional view taken along line 3-3 in FIG. [Figure 4] 3 is a perspective view showing a first gas flow path of a bidirectional drive device used in a valve member according to a first embodiment of the present invention. FIG. [Figure 5] 4 is a perspective view showing a second gas flow path of a bidirectional drive device used in the valve member according to the first embodiment of the present invention. FIG. [Figure 6] FIG. 4 is a perspective view showing a third gas flow path of a bidirectional drive device used in the valve member according to the first embodiment of the present invention. [Figure 7] FIG. 10 is a perspective view showing a fourth gas flow path of the bidirectional drive device used in the valve member according to the first embodiment of the present invention. [Figure 8] FIG. 2 is a cross-sectional view taken along line 8-8 in FIG. [Figure 9] FIG. 2 is a cross-sectional view taken along line 9-9 in FIG. [Figure 10] 3A and 3B are schematic diagrams showing the operation state of a bidirectional drive device used in the valve member according to the first embodiment of the present invention. [Figure 11] FIG. 11 is a cross-sectional view taken along line 11-11 in FIG. [Figure 12] FIG. 12 is a cross-sectional view taken along line 12-12 in FIG. [Figure 13] FIG. 13 is a cross-sectional view taken along line 13-13 in FIG. [Figure 14] 13 is a cross-sectional view showing the operating state of each component shown in FIG. 12. FIG. [Figure 15] 14 is a cross-sectional view showing the operating state of each part shown in FIG. 13. FIG. [Figure 16] FIG. 4 is a cross-sectional view taken along line 16-16 in FIG. 3. [Figure 17] 17 is a cross-sectional view showing the operating state of each part shown in FIG. 16. FIG. [Figure 18] FIG. 6 is a cross-sectional view showing a bidirectional drive device used in a valve member according to a second embodiment of the present invention. [Figure 19] FIG. 19 is a cross-sectional view taken along line 19-19 in FIG. [Figure 20] 10 is a cross-sectional view showing an operating state of a bidirectional drive device used in a valve member according to a second embodiment of the present invention. FIG. [Figure 21] 12 is a cross-sectional view showing a part of a bidirectional drive device (see FIG. 11) used for a valve member according to a second embodiment of the present invention. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0013] Hereinafter, a bidirectional drive device for use with a valve member according to the present invention will be described with reference to the drawings.

[0014] (First embodiment) As shown in FIGS. 1 to 17, the bidirectional actuator 10 used for the valve member according to the first embodiment of the present invention comprises a main body 11, an air shaft sleeve 21, a shaft 31, a horizontally moving block 41, a first gas flow path 51, a second gas flow path 52, a third gas flow path 53, a fourth gas flow path 54, and a relief valve 61.

[0015] FIG. 2 is a perspective view illustrating the first gas flow path 51, the second gas flow path 52, the third gas flow path 53, and the fourth gas flow path 54 in detail. 4, 5, 6 and 7 are perspective views separately illustrating the first gas flow path 51, the second gas flow path 52, the third gas flow path 53 and the fourth gas flow path .

[0016] The main body 11 has a vertical passage 12 extending vertically, two horizontal piston chambers 14 extending front to back, and two auxiliary piston chambers 16 extending vertically. The vertical passage 12 is surrounded by a wall surface 121. Each of the horizontal piston chambers 14 has therein a horizontal piston 15 that can move between a forward position FP and a backward position BP. The main body 11 further has two sub-passages 141 extending forward and backward, two sub-seal rings 142, two sub-pistons 151 and a lower end seal ring 191. Each of the sub-passages 141 is arranged to be connected to the horizontal piston chamber 14 . Each sub-seal ring 142 is disposed inside a sub-passage 141 . Each sub-piston 151 is disposed in the horizontal piston 15, enters the rear end of the sub-passage 141, fits into the sub-seal ring 142, and slides in the sub-passage 141 while maintaining airtightness. The lower end seal ring 191 is disposed on the wall surface 121 of the vertical passage 12 . In the first embodiment, the vertical passage 12 has an upper shoulder 123 and a bottom seal ring 192 on the wall surface 121 . The upper shoulder 123 is formed to protrude inward from the wall surface 121 as an upper stopper. The bottom seal ring 192 is located below the lower end seal ring 191 .

[0017] The air shaft sleeve 21 is disposed within the vertical passage 12 so as to fit over the lower end seal ring 191 and the bottom seal ring 192 and to be able to slide. The air shaft sleeve 21 is a hollow, elongated structure that moves between a highest position HP and a lowest position LP and has a gap 22 between it and the wall surface 121 of the vertical passage 12 for allowing gas to flow in. The air shaft sleeve 21 has an intermediate seal ring 24 and two auxiliary pistons 26 . The intermediate seal ring 24 is annularly disposed on the air shaft sleeve 21 and simultaneously abuts against the wall surface 121 of the vertical passage 12 . The middle seal ring 24 is higher than the bottom seal ring 191 . Each auxiliary piston 26 is arranged to enter the auxiliary piston chamber 16 from below and is connected to the air shaft sleeve 21 so as to rise together with the air shaft sleeve 21. In the first embodiment, the air shaft sleeve 21 has an upper abutment portion 291 . The upper contact portion 291 is formed within the gap 22 and protrudes outward from the air shaft sleeve 21 . When the air shaft sleeve 21 is raised and placed at the highest position HP, the upper contact portion 291 contacts the upper shoulder portion 123 . When the air shaft sleeve 21 descends to the lowest position LP, it comes into contact with the bottom of the main body 11. The manner in which the air shaft sleeve 21 is stopped at the highest position HP and the lowest position LP is given as an example, and is not intended to limit the scope of the present invention.

[0018] The shaft 31 is mounted so that a portion of it can move back and forth within the air shaft sleeve 21, and at the same time can rise and fall together with the air shaft sleeve 21. The shaft 31 has an exposed portion 32 that protrudes above the air shaft sleeve 21 and the body 11 . In the first embodiment, one of the technical features is as follows. The air shaft sleeve 21 has a position limiting rod 28 disposed therein. The position limiting rod 28 passes freely through the shaft 31 . The shaft 31 moves back and forth along the position limiting rod 28 within the air shaft sleeve 21, and simultaneously rises and falls together with the air shaft sleeve 21 by the operation of the position limiting rod 28. The two lateral pistons 15 are arranged relatively on either side of the shaft 31 . The tip of the exposed portion 32 of the shaft 31 is connected to a valve plug (not shown in the drawing). The valve plug is used to block or open the valve port (not shown in the figure). Valve plugs and valve ports are not reflected in the drawings of this embodiment as they are understood from the prior art.

[0019] The horizontally moving block 41 is attached to the horizontal pistons 15 in the two horizontal piston chambers 14 and moves back and forth inside the main body 11 together with the horizontal pistons 15 . The shaft 31 can freely move up and down through the horizontally moving block 41 and at the same time can move back and forth together with the horizontally moving block 41.

[0020] The first gas flow path 51 is disposed in the main body 11 , and has one end serving as an outer end 511 connected to the outside of the main body 11 and the other end serving as an inner end 512 connected to the vertical passage 12 . When the air shaft sleeve 21 is set at the lowest position LP, the inner end 512 of the first gas flow passage 51 is lower than the middle seal ring 24 and higher than the lower end seal ring 191 . In the first embodiment, the outer end 511 of the first gas flow passage 51 is connected to a first gas source 91 that provides gas.

[0021] The second gas flow path 52 is disposed in the main body 11, and has one end serving as a lower end 521 connected to the vertical passage 12, and another end branching into two upper ends 522. The lower end 521 of the second gas flow passage 52 is lower than the lower end seal ring 191 and higher than the bottom seal ring 192 . The two upper ends 522 are connected to the spaces between the rear of the lateral pistons 15 in the two lateral piston chambers 14 and the main body 11 .

[0022] The third gas flow path 53 is disposed in the main body 11 , and one end branches into two front end portions 531 , and the other end forms an outer end portion 532 that is connected to the outside of the main body 11 . The two front end portions 531 are connected to the spaces between the front of the horizontal pistons 15 in the two horizontal piston chambers 14 and the main body 11 . In the first embodiment, the outer end 532 of the third gas flow passage 53 is connected to a second gas source 92 that provides or collects gas.

[0023] The fourth gas flow path 54 is disposed in the main body 11 and is divided into two sections. The two portions have an upper end 541 at one end connected to the front ends of the two sub-passages 141 and a lower end 542 at the other end connected to the two auxiliary piston chambers 16 . When the air shaft sleeve 21 is placed at the highest position HP, the lower end 542 of the fourth gas passage 54 is higher than the two auxiliary pistons 26 .

[0024] The relief valve 61 is disposed in the main body 11 and connects the second gas flow path 52 to the outside of the main body 11 . In the first embodiment, the relief valve 61 has a triggering member 62 . The triggering member 62 is connected to the lateral piston 15 and moves back and forth together with the lateral piston 15 . When the lateral piston 15 is set in the forward position FP, the triggering member 62 does not touch the relief valve 61 and closes the relief valve 61, thereby preventing the second gas flow path 52 from contacting the outside of the main body 11. When the lateral piston 15 is placed in the retracted position BP, the triggering member 62 touches the relief valve 61 and opens the relief valve 61. When the relief valve 61 is opened, the second gas flow path 52 is connected to the outside of the main body 11 .

[0025] The air shaft sleeve 21 has a trigger groove 211 recessed on the outside. When the air shaft sleeve 21 is set at the highest position HP, the trigger groove 211 connects the gap 22 above the lower end seal ring 191 to the space below the lower end seal ring 191, thereby connecting to the lower end 521 of the second gas flow path 52. When the air shaft sleeve 21 is set at the lowest position LP, the trigger groove 211 is lower than the lower end seal ring 191 .

[0026] Each sub-piston 151 has a sub-trigger groove 152 recessed on the outside. When the lateral pistons 15 in the two lateral piston chambers 14 are set in the retracted position BP, the sub-trigger groove 152 connects the lateral piston chamber 14 behind the sub-seal ring 142 to the upper end 541 of the fourth gas flow passage 54 .

[0027] In the first embodiment, there are two auxiliary pistons 26 and two lateral pistons 15, but this is not limitative and the number may be increased or decreased, or may be determined depending on conditions such as volume or thrust. In other words, the effect of moving forward by gas can be achieved with only one auxiliary piston 26 and one lateral piston 15. The effect produced by one auxiliary piston 26 and one lateral piston 15 is not reflected in the drawings, as it can be understood with reference to the drawings of the present invention.

[0028] The above is a description of the structure of the first embodiment. Next, the operation of the first embodiment will be explained.

[0029] 3 and 12, before operation, the air shaft sleeve 21 is set in the lowest position LP, and the two lateral pistons 15 are set in the retracted position BP.

[0030] As shown in FIG. 4, when the closing operation is proceeding, i.e., when the valve plug (not shown) attached to the shaft 31 is inserted into the valve port (not shown), the first gas source 91 (see FIG. 1) sends gas (not shown) into the first gas flow path 51. As shown in FIG. 8, the gas flowing in from the first gas flow passage 51 flows into the gap 22 and raises the shaft 31 and the two auxiliary pistons 26 together with the air shaft sleeve 21 to the highest position HP as shown in FIG. As shown in FIG. 11, when the air shaft sleeve 21 is set to the highest position HP, the trigger groove 211 connects the gap 22 above the lower end seal ring 191 with the space below the lower end seal ring 191, so that gas flows from the first gas flow path 51 to the second gas flow path 52. As shown in Figures 9, 11, 12 and 13, gas flows through the second gas flow path 52 into the relief valve 61 and into the space between the rear of the two lateral pistons 15 in the two lateral piston chambers 14 and the main body 11, pushing the two lateral pistons 15 forward. Even if gas leaks to the outside from the relief valve 61, if the amount of gas that flows in is greater than the amount of gas that leaks out, the two horizontal pistons 15 can be pushed forward. At this time, the air between the front of the two horizontal pistons 15 and the main body 11 flows into the second gas source 92 through the third gas flow path 53. As shown in FIGS. 14 and 15, the two horizontal pistons 15 are pushed back to the forward position HP and then stop moving forward. The horizontally moving block 41 and the shaft 31 move forward together with the two horizontal pistons 15 until they can no longer move forward. At this time, when the two-way operation of lifting the shaft 31 and then moving it forward is completed, the valve plug (not shown in the figure) attached to the shaft 31 blocks and closes the valve port (not shown in the figure). The air in the two auxiliary pistons 26 is pushed in as the two auxiliary pistons 26 rise, proceeds to the fourth gas flow passage 54, and then flows into the two lateral piston chambers 14 through the two sub-passages 141.

[0031] As shown in Figure 16, when performing the opening operation, gas from the second gas source 92 (see Figure 1) flows into the third gas flow path 53 and then into the two horizontal piston chambers 14, pushing the two horizontal pistons 15 backward. The two horizontal pistons 15 move backward from the forward position FP, and also move the two sub-pistons 151 backward. As shown in Figure 17, when the two horizontal pistons 15 retract to the retracted position BP, the sub-trigger grooves 152 of each of the two sub-pistons 151 pass through the sub-seal ring 142, so that gas flows through the sub-trigger grooves 152 into the fourth gas flow path 54. As shown in FIG. 3, the gas in the fourth gas flow passage 54 flows into the two auxiliary piston chambers 16, pushing the two auxiliary pistons 26 downward and causing the air shaft sleeve 21 and the shaft 31 to descend to the lowest position LP. When the two horizontal pistons 15 retract to the retracted position BP, the triggering member 62 touches the relief valve 61 and opens the relief valve 61. The gas between the rear of the two horizontal pistons 15 and the main body 11 flows through the second gas flow passage 52 and is released to the outside through the relief valve 61. At this time, when the two-way operation of retracting and then lowering the shaft 31 is completed, the valve plug (not shown in the figure) attached to the shaft 31 separates from the valve port, opening the valve port.

[0032] To sum up, the present invention not only ensures that the valve member achieves bidirectional operation, but also eliminates the problem of operation getting stuck when closing and opening, since the trigger groove 211 of the air shaft sleeve 21 and the sub-trigger grooves 152 of the two sub-pistons 151 guide the gas to the corresponding flow path. In addition, the procedure of lifting the shaft 31 and then moving it forward horizontally when closing, and the procedure of retracting the shaft 31 horizontally and then lowering it when opening can be reliably achieved.

[0033] (Second embodiment) 18 to 21 are schematic diagrams showing a bidirectional drive device 10' for use with a valve member according to a second embodiment of the present invention. The differences from the bidirectional drive device 10' used for the valve member according to the first embodiment are as follows.

[0034] In the second embodiment, the vertical passage 12' further includes a lower shoulder 125' and an upper end seal ring 193' on the wall surface 121'. An upper seal ring 193' is located above the upper shoulder 123'. The bottom seal ring 191' is located below the lower shoulder 125'. The top seal ring 193' and the bottom seal ring 192' keep the air in the gap 22' from leaking out of the body 11. The air shaft sleeve 21' further has a lower abutment portion 292' formed to protrude outward. When the air shaft sleeve 21' is set at the lowest position LP', the lower abutment portion 292' abuts against the lower shoulder portion 125'.

[0035] The second embodiment does not have two auxiliary piston chambers and two auxiliary pistons, and connects the lower end 542' of the fourth gas flow path 54' to the vertical passage 12', so that when the air shaft sleeve 21' is set to the highest position HP', the lower end 542' of the fourth gas flow path 54' is higher than the intermediate seal ring 24'. Due to the above-mentioned structural features, after the two horizontal pistons 15' retract to the retracted position BP' during the opening process, the gas in the fourth gas flow path 54' flows into the gap 22' and pushes the air shaft sleeve 21' down to the lowest position LP'. When the air shaft sleeve 21' is set at the highest position HP', the lower end 542' of the fourth gas passage 54' is higher than the middle seal ring 24' and lower than the lower end seal ring 191'.

[0036] In the second embodiment, only one sub-passage 141' is provided, the one sub-passage 141' is connected to a horizontal piston chamber 14', and a sub-piston 151' is provided in one of the two horizontal piston chambers 14'. Due to the above-mentioned structural features, during the opening process, gas from the third gas flow path (see Figure 6 of the first embodiment) flows into the two horizontal piston chambers 14', and then the sub-passage 141' of the horizontal piston chamber 14' is combined with the sub-piston 151', i.e., the horizontal piston 15' moves to the rear retracted position BP' in a manner similar to the first embodiment. The gas in the third gas passage passes through the sub-passage 141' of the horizontal piston chamber 14' to the fourth gas passage 54', flows into the gap 22', and pushes the air shaft sleeve 21' downward to the lowest position LP'.

[0037] Other structures and effects achieved by the second embodiment are the same as those of the first embodiment, and therefore will not be described further. [Explanation of symbols]

[0038] 10: Bidirectional drive device for valve members 11: Main body 12: Vertical passage 121: Wall 123: Upper shoulder 14: Horizontal piston chamber 141: Sub-passage 142: Sub seal ring 15: Horizontal piston 151: Sub-piston 152: Sub-inspired groove 16: Auxiliary piston chamber 191: Lower seal ring 192: Bottom seal ring 21: Air shaft sleeve 211: Inspiration Groove 22: Gap 24: Intermediate seal ring 26: Auxiliary piston 28: Position limiting rod 291: Upper contact part 31: Axis 32:Exposed area 41: Horizontal moving block 51: First gas flow path 511: Outer end 512: Inner end 52: Second gas flow path 521: Bottom end 522: Upper end 53:Third gas flow path 531: Front end 532:Outer end 54:Fourth gas flow path 541: Upper end 542: Bottom end 61: Relief valve 62: Triggering material 91: First gas source 92: Second gas source BP: Backward position FP: Forward position HP: Highest position LP:Lowest position 10': Bidirectional drive device for valve member 11': Main body 12': Vertical passage 121': Wall 123': Upper shoulder 125': lower shoulder 14': Horizontal piston chamber 141': Sub-passage 15': Horizontal piston 151': Sub-piston 191': Lower seal ring 192': Bottom seal ring 193': Upper seal ring 21': Air shaft sleeve 22': Gap 24': Intermediate seal ring 292': Lower abutment 54': Fourth gas flow path 542': Bottom end BP': Backward position HP': Highest position LP':Lowest position

Claims

1. a main body, an air shaft sleeve, a shaft, a horizontally moving block, a first gas flow path, a second gas flow path, a third gas flow path, a fourth gas flow path, and a relief valve; the main body has a vertical passage extending vertically, one or more horizontal piston chambers extending front-to-rear, and one or more auxiliary piston chambers extending vertically, the vertical passage being surrounded by a wall surface, and the one or more horizontal piston chambers having horizontal pistons therein that can move between an advanced position and a retracted position, the main body further has a sub-passage extending in the front-rear direction, a sub-seal ring, a sub-piston, and a bottom-end seal ring, the sub-passage being arranged to connect to one or more of the horizontal piston chambers, the sub-seal ring being arranged inside the sub-passage, the sub-piston being arranged on the horizontal piston, and entering from the rear end of the sub-passage and engaging with the sub-seal ring before sliding along the sub-passage, and the bottom-end seal ring being arranged on the wall surface of the vertical passage, the air shaft sleeve is disposed in the longitudinal passage so as to fit over the lower end seal ring and to be slidable therein; the air shaft sleeve is a hollow, elongated structure that moves between a highest position and a lowest position and has a gap between the air shaft sleeve and the wall of the vertical passage for allowing gas to flow therethrough; the air shaft sleeve has an intermediate seal ring and one or more auxiliary pistons, the intermediate seal ring is annularly disposed on the air shaft sleeve and simultaneously abuts against the wall surface of the vertical passage, the intermediate seal ring is higher than the lower end seal ring, and the one or more auxiliary pistons are disposed to enter the auxiliary piston chambers from below to above, respectively; a portion of the shaft is mounted within the air shaft sleeve so as to be movable back and forth, and can rise and fall together with the air shaft sleeve; the shaft has an exposed portion that projects above the air shaft sleeve and the body; the horizontally moving block is attached to the horizontal piston in one or more of the horizontal piston chambers and moves back and forth within the body together with the horizontal piston; The shaft can move up and down through the horizontally moving block and can also move back and forth together with the horizontally moving block, the first gas flow path is disposed in the main body, one end of the first gas flow path being an outer end connected to the outside of the main body, and another end of the first gas flow path being an inner end connected to the vertical passage; When the air shaft sleeve is in the lowest position, the inner end of the first gas flow passage is lower than the intermediate seal ring; the second gas flow path is disposed in the main body, one end of which is a lower end connected to the vertical passage and another end of which is an upper end connected to a space between the rear of the horizontal piston and the main body in one or more of the horizontal piston chambers, the lower end of the second gas flow path being lower than the lower end seal ring; the third gas flow path is disposed in the main body, one end of the third gas flow path being a front end connected to a space between the main body and a front of the lateral piston in one or more of the lateral piston chambers, and another end of the third gas flow path being an outer end connected to an exterior of the main body; the fourth gas flow passage is disposed in the main body, one end of the fourth gas flow passage being an upper end connected to the front end of the sub-passage, and another end of the fourth gas flow passage being a lower end connected to one or more of the auxiliary piston chambers; When the air shaft sleeve is positioned at the highest position, the lower end of the fourth gas flow passage is higher than one or more of the auxiliary pistons; the relief valve is disposed in the body and communicates with the second gas flow path and the outside of the body; The air shaft sleeve has a trigger groove formed recessed on the outside, When the air shaft sleeve is set to the highest position, the trigger groove connects the gap above the lower end seal ring and the space below the lower end seal ring, thereby connecting to the lower end of the second gas flow path; The sub-piston has a sub-trigger groove formed recessed on the outside, a sub-sealing groove connecting the one or more lateral piston chambers behind the sub-sealing ring to the upper end of the fourth gas flow path when the lateral piston in the one or more lateral piston chambers is set to the retracted position;

2. The vertical passage has an upper shoulder portion and a bottom seal ring on the wall surface, the upper shoulder portion is formed to protrude inward from the wall surface, and the bottom seal ring is located below the lower end seal ring, 2. The bidirectional drive device for a valve member according to claim 1, wherein the air shaft sleeve has an upper abutment portion, the upper abutment portion being formed in the gap and protruding outward from the air shaft sleeve.

3. 3. The bidirectional actuating device for a valve member according to claim 2, wherein when the air shaft sleeve is set to the lowest position, the inner end of the first gas passage is lower than the middle seal ring and higher than the bottom seal ring.

4. 3. The bidirectional actuating device for a valve member according to claim 2, wherein the lower end of the second gas passage is lower than the lower seal ring and higher than the bottom seal ring.

5. the air shaft sleeve has a position limiting rod therein, the position limiting rod operatively extending through the shaft; 2. The bidirectional drive device for a valve member according to claim 1, wherein the shaft moves back and forth along the position limiting rod within the air shaft sleeve, and simultaneously rises and falls together with the air shaft sleeve by the operation of the position limiting rod.

6. the two lateral piston chambers are arranged on both sides of the shaft, and each of the two lateral piston chambers has the lateral piston therein; 2. The bidirectional drive device for a valve member according to claim 1, wherein the second gas flow path and the third gas flow path branch off and connect to the two lateral piston chambers.

7. 7. The bidirectional drive device for a valve member according to claim 6, wherein one of the two lateral piston chambers has the sub-passage, and one of the two lateral pistons has the sub-piston.

8. The relief valve has a triggering member, the triggering member being connected to the lateral piston in one or more of the lateral piston chambers and moving back and forth with the lateral piston; When the transverse piston is in the forward position, the triggering member does not touch the relief valve, and closes the relief valve, thereby blocking the communication between the second gas flow path and the outside of the body; 2. The bidirectional actuator for a valve member according to claim 1, wherein when the transverse piston is in the retracted position, the triggering member touches the relief valve to open the relief valve, and when the relief valve is opened, the second gas flow path is connected to the outside of the body.

9. a main body, an air shaft sleeve, a shaft, a horizontally moving block, a first gas flow path, a second gas flow path, a third gas flow path, a fourth gas flow path, and a relief valve; the main body has a vertical passage extending up and down and one or more horizontal piston chambers extending back and forth, the vertical passage being surrounded by a wall surface, and the one or more horizontal piston chambers having horizontal pistons therein that can move between an advanced position and a retracted position, the main body further has a sub-passage extending in the front-rear direction, a sub-seal ring, a sub-piston, and a bottom seal ring, the sub-passage being arranged to connect to one or more of the horizontal piston chambers, the sub-seal ring being arranged inside the sub-passage, the sub-piston being arranged on the horizontal piston, and entering from the front end of the sub-passage and engaging with the sub-seal ring before sliding along the sub-passage, and the bottom seal ring being arranged on the wall surface of the vertical passage, the air shaft sleeve is disposed in the longitudinal passage so as to fit over the lower end seal ring and to be slidable therein; the air shaft sleeve is a hollow, elongated structure that moves between a highest position and a lowest position and has a gap between the air shaft sleeve and the wall of the vertical passage for allowing gas to flow therethrough; the air shaft sleeve has an intermediate seal ring, the intermediate seal ring is annularly disposed on the air shaft sleeve and simultaneously abuts against the wall surface of the vertical passage, the intermediate seal ring is higher than the lower end seal ring; a portion of the shaft is mounted within the air shaft sleeve so as to be movable back and forth, and can rise and fall together with the air shaft sleeve; the shaft has an exposed portion that projects above the air shaft sleeve and the body; the horizontally moving block is attached to the horizontal piston in one or more of the horizontal piston chambers and moves back and forth within the body together with the horizontal piston; The shaft can move up and down through the horizontally moving block and can also move back and forth together with the horizontally moving block, the first gas flow path is disposed in the main body, one end of the first gas flow path being an outer end connected to the outside of the main body, and another end of the first gas flow path being an inner end connected to the vertical passage; When the air shaft sleeve is in the lowest position, the inner end of the first gas flow passage is lower than the intermediate seal ring; the second gas flow path is disposed in the main body, one end of which is a lower end connected to the vertical passage and another end of which is an upper end connected to a space between the rear of the horizontal piston and the main body in one or more of the horizontal piston chambers, the lower end of the second gas flow path being lower than the lower end seal ring; the third gas flow path is disposed in the main body, one end of the third gas flow path being a front end connected to a space between the main body and a front of the lateral piston in one or more of the lateral piston chambers, and another end of the third gas flow path being an outer end connected to an exterior of the main body; the fourth gas flow path is disposed in the main body, one end of the fourth gas flow path being an upper end connected to the front end of the sub-passage and another end of the fourth gas flow path being a lower end connected to the vertical passage; When the air shaft sleeve is placed at the highest position, the lower end of the fourth gas flow passage is higher than the intermediate seal ring; the relief valve is disposed in the body and communicates with the second gas flow path and the outside of the body; The air shaft sleeve has a trigger groove formed recessed on the outside, When the air shaft sleeve is set to the highest position, the trigger groove connects the gap above the lower end seal ring and the space below the lower end seal ring, thereby connecting to the lower end of the second gas flow path; The sub-piston has a sub-trigger groove formed recessed on the outside, a sub-sealing groove connecting the one or more lateral piston chambers behind the sub-sealing ring with the upper end of the fourth gas flow path when the lateral piston in the one or more lateral piston chambers is set to the forward position;

10. the vertical passage has an upper shoulder, a lower shoulder, an upper end seal ring and a bottom seal ring on the wall surface, the upper shoulder is formed to protrude inward of the wall surface, the lower shoulder is located below the upper shoulder, the upper end seal ring is located above the upper shoulder, the bottom seal ring is located below the lower end seal ring, and the lower end seal ring is located below the lower shoulder, and the upper end seal ring and the bottom seal ring keep the air in the gap from leaking out to the outside of the body, 10. The bidirectional drive device for a valve member according to claim 9, wherein the air shaft sleeve has an upper abutment portion and a lower abutment portion, the upper abutment portion and the lower abutment portion being formed in the gap and protruding outward from the air shaft sleeve.

11. 11. The bidirectional drive device for a valve member according to claim 10, wherein when the air shaft sleeve is set to the lowest position, the inner end of the first gas passage is lower than the middle seal ring and higher than the bottom seal ring.

12. 11. The bidirectional actuating device for a valve member according to claim 10, wherein the lower end of the second gas passage is lower than the lower seal ring and higher than the bottom seal ring.

13. 11. The bidirectional drive device for a valve member according to claim 10, wherein when the air shaft sleeve is set to the highest position, the lower end of the fourth gas passage is higher than the middle seal ring and lower than the upper end seal ring.

14. the air shaft sleeve has a position limiting rod therein, the position limiting rod operatively extending through the shaft; 10. The bidirectional drive device for a valve member according to claim 9, wherein the shaft moves back and forth along the position limiting rod within the air shaft sleeve, and simultaneously rises and falls together with the air shaft sleeve by the operation of the position limiting rod.

15. the two lateral piston chambers are arranged on both sides of the shaft, and each of the two lateral piston chambers has the lateral piston therein; 10. The bidirectional drive device for a valve member according to claim 9, wherein the second gas flow path and the third gas flow path branch off and connect to the two lateral piston chambers.

16. 16. The bidirectional drive device for a valve member according to claim 15, wherein one of the two lateral piston chambers has the sub-passage, and one of the two lateral pistons has the sub-piston.

17. The relief valve has a triggering member, the triggering member being connected to the lateral piston in one or more of the lateral piston chambers and moving back and forth with the lateral piston; When the transverse piston is in the forward position, the triggering member does not touch the relief valve, and closes the relief valve, thereby blocking the communication between the second gas flow path and the outside of the body; 10. The bidirectional actuator for a valve member according to claim 9, wherein when the transverse piston is in the retracted position, the triggering member touches the relief valve to open the relief valve, and when the relief valve is opened, the second gas flow path is connected to the outside of the body.

Citation Information

Patent Citations

  • vacuum valve

    JP2015534023A

  • Dual gate valve

    JP2022165854A

  • Valve plate

    JP2023073982A

  • Two way gate valve and substrate processing system having the same

    TWI503914B

  • Two-way moving valve drive device

    TWI730808B