Physical quantity measuring device

Abstract

A physical quantity measurement device (1) comprises: a first light source (11) configured such that a first light (L1) can be emitted; a second light source (12) configured such that a second light (L2) can be emitted; an optical sensor (40) on which the first light (L1) emitted from the first light source (11) is incident, and which outputs the first light (L1) and a measured light (M1) according to a physical quantity of an object being measured; a wedge (62) configured such that the measured light (M1) and the first light (L1) outputted from the optical sensor (40) are incident thereon, and a first emitted light can be emitted, and that the second light (L2) outputted from the second light source (12) is incident thereon and a second emitted light can be emitted; a first optical path which causes the optical sensor (40) to output the first light (L1) emitted from the first light source (11), and outputs, to the wedge (62), the measured light (M1) and the first light (L1) outputted from the optical sensor (40); and a second optical path which outputs, to the wedge (62), the second light (L2) emitted from the second light source (12).

Description

[Technical Field]

[0001] The present invention relates to a physical quantity measuring device. [Background technology]

[0002] BACKGROUND ART Conventionally, optical measurement systems equipped with optical elements are known (for example, Patent Document 1, etc.). In an optical measurement system such as that disclosed in Patent Document 1, physical quantities such as pressure can be detected with high sensitivity by analyzing interference light output from an interferometer having a wedge, which is an optical element. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] US Patent Application Publication No. 2006 / 0061768 Summary of the Invention [Problem to be solved by the invention]

[0004] Incidentally, it is known that in an interferometer such as that described in Patent Document 1, interference signals due to dirt adhering to the wedge or other optical components on the optical path can affect the measurement results. Therefore, it is conceivable to measure the interference signals in advance and correct their effects. However, if environmental factors such as temperature change while the optical measurement system is measuring a physical quantity, the interference signal itself will change. Therefore, since correction based on the interference signals obtained in advance cannot adequately correct the interference signals, there is a problem in that the detection accuracy of the physical quantity will decrease.

[0005] An object of the present invention is to provide a physical quantity measuring device that can appropriately correct the influence of environmental factors such as temperature, even if they change during measurement of the physical quantity. [Means for solving the problem]

[0006] The physical quantity measuring device of the present invention is characterized by comprising: a first light source configured to be able to emit first light; a second light source configured to be able to emit second light; an optical sensor that receives the first light emitted from the first light source and outputs measurement light corresponding to a physical quantity of a measured object and the first light; an optical element that is configured to receive the measurement light and the first light output from the optical sensor and emit first emitted light, and to receive the second light output from the second light source and emit second emitted light; a first optical path that outputs the first light emitted from the first light source to the optical sensor and outputs the measurement light and the first light output from the optical sensor to the optical element; and a second optical path that outputs the second light emitted from the second light source to the optical element.

[0007] The present invention includes a first optical path that outputs first light emitted from a first light source to an optical sensor and outputs the measurement light and first light output from the optical sensor to an optical element, and a second optical path that outputs second light emitted from a second light source to the optical element. The optical element is configured to receive the measurement light and first light output from the optical sensor and emit first emitted light, and to receive the second light output from the second light source and emit second emitted light. Therefore, the first emitted light corresponding to the measurement light and first light can be corrected as needed with the second emitted light corresponding to the second light. This reduces the impact of changes in environmental factors on the first emitted light.

[0008] In the present invention, it is preferable that an interferometer having a wedge as the optical element is provided, and that the interferometer is configured to be able to emit a first interference light corresponding to the measurement light. This configuration includes an interferometer having a wedge as an optical element. The interferometer is configured to emit first interference light corresponding to the measurement light. This allows the physical quantity of the object to be measured to be calculated by detecting a phase change in the interference fringes of the first interference light corresponding to the measurement light.

[0009] In the present invention, it is preferable that the first optical path and the second optical path are configured to include optical fibers, and that the optical fibers are provided with optical couplers. In this configuration, the first optical path and the second optical path are configured with optical fibers, so that the first light emitted from the first light source can be reliably guided to the optical sensor, the measurement light emitted from the optical sensor can be reliably guided to the optical element, and the second light emitted from the second light source can be reliably guided to the optical element. Furthermore, since the optical fiber is provided with an optical coupler, switching between the first optical path and the second optical path can be achieved with a simple configuration.

[0010] The physical quantity measuring device of the present invention is characterized by comprising: a third light source configured to be able to emit third light; an optical sensor that receives the third light emitted from the third light source and outputs measurement light corresponding to a physical quantity of a measured object and the third light; an optical element that receives the measurement light and the third light output from the optical sensor and emits third outgoing light, and that receives the third light output from the third light source and emits fourth outgoing light; a third optical path that outputs the third light emitted from the third light source to the optical sensor and outputs the measurement light and the third light output from the optical sensor to the optical element; a fourth optical path that outputs the third light emitted from the third light source to the optical element; and a switching optical element that switches the optical path of the third light emitted from the third light source between the third optical path and the fourth optical path.

[0011] The present invention includes a third optical path that outputs the third light emitted from the third light source to the optical sensor and outputs the measurement light and third light output from the optical sensor to the optical element, and a fourth optical path that outputs the third light emitted from the third light source to the optical element. The optical element is configured to receive the measurement light and third light output from the optical sensor and output the third output light, and to receive the third light output from the third light source and output the fourth output light. The present invention also includes a switching optical element that switches the optical path of the third light emitted from the third light source between the third optical path and the fourth optical path. This allows the third output light corresponding to the measurement light and the third light to be corrected as needed with the fourth output light corresponding to the third light. This reduces the impact of changes in environmental factors on the third output light. Furthermore, because the switching optical element switches the optical path of the third light, the measurement light source and the reference light source can be combined into one, thereby reducing the number of light sources.

[0012] In the present invention, it is preferable that an interferometer having a wedge as the optical element is provided, and that the interferometer is configured to be able to emit second interference light corresponding to the measurement light. This configuration includes an interferometer having a wedge as an optical element. The interferometer is configured to emit second interference light corresponding to the measurement light. This allows the physical quantity of the object to be measured to be calculated by detecting a phase change in the interference fringes of the second interference light corresponding to the measurement light.

[0013] In the present invention, it is preferable that the third optical path and the fourth optical path are configured to include optical fibers, and that the optical fibers are provided with optical couplers. In this configuration, the third optical path and the fourth optical path are configured with optical fibers, so that the third light emitted from the third light source can be reliably guided to the optical sensor, and the measurement light and the third light emitted from the optical sensor can be reliably guided to the optical element. Furthermore, the third light emitted from the third light source can be reliably guided to the optical element. Furthermore, since the optical fiber is provided with an optical coupler, switching between the third optical path and the fourth optical path can be achieved with a simple configuration.

[0014] In the present invention, it is preferable that the switching optical element is configured by an optical chopper. In this configuration, the switching optical element is configured by an optical chopper, so that switching between the third optical path and the fourth optical path can be achieved with a simple configuration.

[0015] In the present invention, the switching optical element is preferably configured as an optical switch. In this configuration, the switching optical element is configured by an optical switch, so that switching between the third optical path and the fourth optical path can be achieved with a simple configuration.

[0016] In the present invention, the switching optical element is preferably configured as a movable beam splitter. In this configuration, the switching optical element is configured by a movable beam splitter, so that switching between the third optical path and the fourth optical path can be achieved with a simple configuration.

[0017] In the present invention, the optical sensor is preferably configured as a Fabry-Perot interferometric sensor. In this configuration, the optical sensor is configured as a Fabry-Perot interferometer sensor, so that physical quantities such as pressure and strain can be measured with high precision. [Brief explanation of the drawings]

[0018] [Figure 1] FIG. 1 is a diagram showing a schematic configuration of a physical quantity measuring device according to a first embodiment. [Figure 2] FIG. 10 is a diagram showing a schematic configuration of a physical quantity measuring device according to a second embodiment. [Figure 3] FIG. 10 is a diagram showing a schematic configuration of a physical quantity measuring device according to a third embodiment. [Figure 4] FIG. 10 is a diagram showing a schematic configuration of a physical quantity measuring device according to a fourth embodiment. [Figure 5] FIG. 10 is a diagram showing a schematic configuration of a physical quantity measuring device according to a fifth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0019] [First embodiment] A physical quantity measuring device 1 according to a first embodiment of the present invention will be described with reference to the drawings. 1 is a diagram showing a schematic configuration of a physical quantity measuring device 1 of the first embodiment. The physical quantity measuring device 1 is configured to be able to measure physical quantities such as pressure, acceleration, displacement, tilt, and temperature. As shown in FIG. 1, the physical quantity measuring device 1 includes a first light source 11, a second light source 12, an optical cable 20, an optical coupler 30, an optical sensor 40, and a light receiver 50.

[0020] [1st light source 11] The first light source 11 is a light source that emits first light L1 in a wide wavelength range. The first light source 11 is, for example, an SC (Super Continuum) light source, and is configured to be able to emit first light L1 in a wavelength range of 1200 nm to 1600 nm. Note that the first light source 11 is not limited to the above configuration and may be a combination of an LED (Light Emitting Diode) light source, an ASE (Amplified Spontaneous Emission) light source, an SLD (Super Luminescent Diode) light source, an incandescent lamp, or the like, or may be a narrow-band light source that sweeps a wide band, such as a tunable laser. Furthermore, the first light source 11 may be configured to be able to emit first light L1 in a wavelength range wider than the wavelength range illustrated above, or may be configured to be able to emit first light L1 in a wavelength range narrower than the wavelength range illustrated above.

[0021] [Second light source 12] The second light source 12 is a light source that emits second light L2 in a wide wavelength band, similar to the first light source 11. The second light source 12 is, for example, an SC light source, and is configured to be able to emit second light L2 in a wavelength range of 1200 nm to 1600 nm. That is, in this embodiment, the second light source 12 is configured to be able to emit second light L2 in the same wavelength band as the first light source 11. In this embodiment, the first light source 11 and the second light source 12 are configured to be turned on alternately at regular intervals. For example, the first light source 11 is turned on for 10 seconds, and then the second light source 12 is turned on for 1 second. The second light source 12 is not limited to the above configuration, and may be a combination of an LED light source, an ASE light source, an SLD light source, an incandescent lamp, or a narrow-band light source that sweeps a wide band, such as a tunable laser. Furthermore, the second light source 12 may be configured to emit second light L2 having a wavelength range wider than the wavelength range exemplified, or may be configured to emit second light L2 having a wavelength range narrower than the wavelength range exemplified. However, in practice, it is desirable that the first light source 11 and the second light source 12 are the same type.

[0022] [Optical Cable 20] The optical cable 20 is configured to include a so-called multimode optical fiber, a protective member, etc. In this embodiment, the optical cable 20 has a first cable 21, a second cable 22, a third cable 23, and a fourth cable 24.

[0023] The first cable 21 transmits the first light L1 emitted from the first light source 11 to the optical coupler 30. The second cable 22 transmits the first light L1 incident via the optical coupler 30 to the optical sensor 40, and transmits the measurement light M1 and first light L1 output from the optical sensor 40 to the optical coupler 30. The third cable 23 transmits the second light L2 emitted from the second light source 12 to the optical coupler 30. The fourth cable 24 transmits the measurement light M1 and the first light L1 incident via the optical coupler 30 to the optical receiver 50, and transmits the second light L2 incident via the optical coupler 30 to the optical receiver 50. In other words, the first cable 21, the second cable 22, and the fourth cable 24 constitute a first optical path of the present invention, and the third cable 23 and the fourth cable 24 constitute a second optical path of the present invention. The first cable 21, the second cable 22, the third cable 23, and the fourth cable 24 that make up the optical cable 20 are not limited to being configured with multimode optical fibers, and may be configured with, for example, single-mode optical fibers.

[0024] [Optical Coupler 30] The optical coupler 30 is a so-called 2x2 coupler, and in this embodiment, the optical coupler 30 is provided on the optical cable 20. Specifically, the optical coupler 30 is provided to optically connect the first cable 21, the second cable 22, the third cable 23, and the fourth cable 24. As a result, the optical coupler 30 transmits the first light L1 emitted from the first light source 11 to the optical sensor 40, and transmits the measurement light M1 and the first light L1 output from the optical sensor 40 to the optical receiver 50. Furthermore, the optical coupler 30 transmits the second light L2 output from the second light source 12 to the optical receiver 50.

[0025] [Optical Sensor 40] The optical sensor 40 is disposed on an object to be measured (not shown), and is configured to emit measurement light M1 corresponding to a physical quantity acting on the object to be measured. In this embodiment, the optical sensor 40 has a measurement sensor element 41 that receives the first light L1 transmitted via the optical coupler 30 and outputs the reflected light to the optical coupler 30.

[0026] The measurement sensor element 41 is composed of a pair of reflective elements arranged close to each other, forming a Fabry-Perot interferometer. Specifically, the pair of reflective elements constituting the measurement sensor element 41 are formed at a predetermined distance apart, and each serves as a mirror. The pair of reflective elements reflects light in a predetermined wavelength range. As a result, the pair of reflective elements constitute a Fabry-Perot interferometer. In other words, the optical sensor 40 is configured as a Fabry-Perot interferometer sensor. Therefore, the optical sensor 40 is configured to be able to output measurement light M1 in accordance with a physical quantity acting on the object to be measured. In this embodiment, as described above, the measurement sensor element 41 outputs the measurement light M1, which is reflected light, to the optical coupler 30. The measurement sensor element 41 also reflects a portion of the first light L1 as is along with the measurement light M1. That is, the optical sensor 40 outputs the measurement light M1 and the first light L1 to the optical coupler 30 as described above.

[0027] [Receiver 50] The photoreceiver 50 receives the measurement light M1 output from the optical sensor 40, the first light L1, and the second light L2 emitted from the second light source 12, and calculates the physical quantity acting on the object to be measured. In this embodiment, the photoreceiver 50 has an interferometer 60 and an MPU 70.

[0028] [Interferometer 60] The interferometer 60 is configured to cause the measurement light M1 output from the optical sensor 40 to interfere with one another, to emit first interference light, and to be able to detect the first interference light. In this embodiment, the interferometer 60 includes a Fresnel cylindrical lens 61 , a wedge 62 , and a photodetector 63 .

[0029] The Fresnel cylindrical lens 61 is an optical lens in which grooves, all of which are concentrically formed at different angles, are formed on a resin sheet, and each groove acts as a bending surface to focus the incident measurement light M1, first light L1, and second light L2 toward the wedge 62. The wedge 62 causes interference with the measurement light M1 incident via the Fresnel cylindrical lens 61, and emits first interference light. The first light L1 is emitted as is without interfering with the measurement light M1. Furthermore, the second light L2 incident via the Fresnel cylindrical lens 61 is emitted as is without interference. In this embodiment, the wedge 62 has a first reflecting surface 621 and a second reflecting surface 622. The wedge 62 is an example of the optical element of the present invention. The first interference light and the first light L1 are an example of the first emitted light of the present invention, and the second light L2 is an example of the second emitted light.

[0030] In this embodiment, the second reflecting surface 622 is disposed at a predetermined angle with respect to the first reflecting surface 621. Therefore, the measurement light M1 is transmitted and reflected by the first reflecting surface 621 and the second reflecting surface 622, and the transmitted and reflected measurement light M1 interfere with each other to emit first interference light.

[0031] The light detection unit 63 is configured to detect the first interference light and the first light L1 emitted from the wedge 62, and to output a first signal corresponding to the first interference light and the first light L1. Furthermore, the light detection unit 63 is configured to detect the second light L2 emitted from the wedge 62, and to output a second signal corresponding to the second light L2. In this embodiment, the photodetector 63 is configured to include a plurality of photodetector elements arranged in an array on the rear side of the second reflecting surface 622. For example, the photodetector 63 is configured to include a plurality of photodetector elements formed from Si and detecting interference light in a short wavelength region, or a plurality of photodetector elements formed from InGaAs and detecting interference light in a long wavelength region, or both arranged in an array. The light detection unit 63 is not limited to the above configuration, but may be configured to detect the first interference light, the first light L1, and the second light L2 emitted from the wedge 62, and to output a first signal and a second signal corresponding to the first interference light, the first light L1, and the second light L2. Thus, in this embodiment, the interferometer 60 is configured as a wedge shearing interferometer including the wedge 62 . The interferometer 60 is not limited to the above configuration, and may, for example, be provided with a cylindrical lens instead of the Fresnel cylindrical lens 61, or may not be provided with a lens such as a Fresnel cylindrical lens or a cylindrical lens.

[0032] [MPU70] The MPU 70 is a so-called micro processing unit, and receives the first and second signals output from the light detection unit 63 to calculate the physical quantity acting on the object to be measured. In this embodiment, the MPU 70 obtains interference fringes corresponding to the first interference light contained in the first signal, and calculates a phase change from periodic intensity changes of the interference fringes. The MPU 70 then calculates the physical quantity corresponding to the phase change by previously determining the correlation between this phase change and the physical quantity. In this embodiment, the first signal includes a signal corresponding to the first light L1. The signal corresponding to the first light L1 includes a disturbance signal due to dirt or the like attached to the first reflecting surface 621 or the second reflecting surface 622 of the wedge 62. Therefore, the physical quantity calculated based on the first signal is affected by the disturbance signal. That is, the physical quantity calculated based on the first signal includes an error corresponding to the disturbance signal. And, because this error is due to dirt attached to the first reflecting surface 621 or the second reflecting surface 622, it changes over time. Therefore, even if the error due to the disturbance signal is calculated in advance, it is difficult to subtract this error from the physical quantity calculated based on the first signal.

[0033] Here, in this embodiment, as described above, the first light source 11 and the second light source 12 are configured to be alternately turned on at regular intervals. As a result, the MPU 70 is configured to be able to periodically detect the intensity of the second signal. This second signal includes a disturbance signal due to dirt or the like adhering to the first reflecting surface 621 or the second reflecting surface 622 of the wedge 62, similar to the signal corresponding to the first light L1. The disturbance signal included in the second signal changes over time, similar to the disturbance signal corresponding to the first light L1. Therefore, even if a disturbance signal due to dirt or the like on the wedge 62 is included in the phase change based on the first signal, the MPU 70 can correct the disturbance signal as needed using the disturbance signal included in the second signal. Specifically, the element number of each photodetector element constituting the photodetector unit 63 is set to p, and the waveform data of the first signal is set to I. (p) Then, I (p) can be expressed as the following equation (1).

[0034]

number

[0035] Here, Iin (p) indicates waveform data based on the first light L1 emitted from the first light source 11, and S (p) indicates waveform data based on the measurement light M1 output from the optical sensor 40. (p) contains interference signals due to the intensity distribution of the first light source 11 and dirt on the wedge 62. (p) may change due to the surrounding environment (temperature, humidity) and the deterioration of each photodetector element over time. Also, the waveform data of the second signal is Iref (p) Then, Iref (p) can be expressed as the following equation (2).

[0036]

number

[0037] Here, Irefin(p) indicates waveform data based on the second light L2 emitted from the second light source 12. (p) Iin (p) Similarly, interference signals due to the intensity distribution of the second light source 12 and dirt on the wedge 62 are included. (p) teeth, This may change due to the surrounding environment or the deterioration of each photodetector element over time. (p) In this case, the surrounding environment and the deterioration of each photodetector element over time are (p) Since it is the same as Iin (p) Irefin against (p) The ratio of does not change. Therefore, by correcting the above formula (1) with the above formula (2), it is possible to remove changes in the interference signal caused by dirt or the like on the wedge 62. Therefore, even if dirt or the like adheres to the first reflecting surface 621 or the second reflecting surface 622 of the wedge 62, the first signal including the interference signal caused by the dirt or the like can be corrected at any time by the second signal.

[0038] [Effects of the first embodiment] The first embodiment as described above can achieve the following effects. (1) In this embodiment, the first cable 21, second cable 22, and fourth cable 24 output the first light L1 emitted from the first light source 11 to the optical sensor 40 and output the measurement light M1 and first light L1 output from the optical sensor 40 to an interferometer 60 having a wedge 62. The third cable 23 and fourth cable 24 output the second light L2 emitted from the second light source 12 to the interferometer 60. The wedge 62 is configured to receive the measurement light M1 and the first light L1 output from the optical sensor 40 and emit the first interference light and the first light L1, and to receive the second light L2 output from the second light source 12 and emit the second light L2. Therefore, the first interference light and the first light L1 corresponding to the measurement light M1 can be corrected by the second light L2 as needed. This reduces the effects of changes in environmental factors.

[0039] (2) This embodiment includes an interferometer 60 having a wedge 62 as an optical element. The interferometer 60 is configured to emit a first interference light beam corresponding to the measurement light M1. This allows the physical quantity of the object to be measured to be calculated by detecting a phase change in the interference fringes of the first interference light beam corresponding to the measurement light M1.

[0040] (3) In this embodiment, the first cable 21, the second cable 22, the third cable 23, and the fourth cable 24 that constitute the first optical path and the second optical path are configured with optical fibers. Therefore, the first light L1 emitted from the first light source 11 can be reliably guided to the optical sensor 40, and the measurement light M1 emitted from the optical sensor 40 can be reliably guided to the wedge 62. Furthermore, the second light L2 emitted from the second light source 12 can be reliably guided to the wedge 62. In addition, the optical cable 20, which is constructed using optical fibers, is provided with an optical coupler 30, so that switching between the first cable 21, the second cable 22, the third cable 23, and the fourth cable 24, which constitute the first optical path and the second optical path, can be achieved with a simple configuration.

[0041] (4) In this embodiment, the optical sensor 40 is configured as a Fabry-Perot interferometer sensor, so that physical quantities such as pressure and strain can be measured with high accuracy.

[0042] [Second embodiment] Next, a second embodiment of the present invention will be described with reference to the drawings. In the second embodiment, the physical quantity measuring device 1A differs from the first embodiment in that it includes a first optical coupler 31A and a second optical coupler 32A. Note that in the second embodiment, the same or similar configurations as those in the first embodiment are denoted by the same reference numerals, and descriptions thereof will be omitted.

[0043] 2 is a diagram showing a schematic configuration of a physical quantity measuring device 1A of the second embodiment. Note that, like the physical quantity measuring device 1 of the first embodiment described above, the physical quantity measuring device 1A is configured to be able to measure physical quantities such as pressure, acceleration, displacement, tilt, and temperature. As shown in FIG. 2, the physical quantity measuring device 1A includes a first light source 11, a second light source 12, an optical cable 20A, a first optical coupler 31A, a second optical coupler 32A, an optical sensor 40, and a light receiver 50.

[0044] [Optical cable 20A] The optical cable 20A is configured to include a so-called multimode optical fiber, a protective member, etc., similar to the optical cable 20 of the first embodiment described above. In this embodiment, the optical cable 20A includes a first cable 21A, a second cable 22A, a third cable 23A, a fourth cable 24A, and a fifth cable 25A.

[0045] The first cable 21A transmits the first light L1 emitted from the first light source 11 to the first optical coupler 31A. The second cable 22A optically connects the first optical coupler 31A and the second optical coupler 32A. The third cable 23A transmits the first light L1 incident via the first optical coupler 31A and the second optical coupler 32A to the optical sensor 40, and transmits the measurement light M1 and the first light L1 output from the optical sensor 40 to the second optical coupler 32A. The fourth cable 24A transmits the second light L2 emitted from the second light source 12 to the second optical coupler 32A. The fifth cable 25A transmits the measurement light M1 and the first light L1 incident via the first optical coupler 31A and the second optical coupler 32A to the optical receiver 50, and also transmits the second light L2 incident via the first optical coupler 31A and the second optical coupler 32A to the optical receiver 50. In other words, the first cable 21A, the second cable 22A, the third cable 23A, and the fifth cable 25A constitute a first optical path of the present invention, and the second cable 22A, the fourth cable 24A, and the fifth cable 25A constitute a second optical path of the present invention. The first cable 21A, the second cable 22A, the third cable 23A, the fourth cable 24A, and the fifth cable 25A that make up the optical cable 20A are not limited to being configured with multimode optical fibers, and may be configured with, for example, single-mode optical fibers.

[0046] [First optical coupler 31A and second optical coupler 32A] The first optical coupler 31A and the second optical coupler 32A are so-called 1×2 couplers. In this embodiment, the first optical coupler 31A and the second optical coupler 32A are provided on the optical cable 20A. Specifically, the first optical coupler 31A is provided to optically connect the first cable 21A, the second cable 22A, and the fifth cable 25A. The second optical coupler 32A is provided to optically connect the second cable 22A, the third cable 23A, and the fourth cable 24A. As a result, the first optical coupler 31A and the second optical coupler 32A transmit the first light L1 emitted from the first light source 11 to the second optical coupler 32A, and transmit the measurement light M1 and the first light L1 output from the optical sensor 40 to the photoreceiver 50. Furthermore, the first optical coupler 31A and the second optical coupler 32A transmit the second light L2 output from the second light source 12 to the optical receiver .

[0047] [Effects of the second embodiment] The second embodiment as described above can achieve the following effects. (5) In this embodiment, the optical cable 20A is provided with a first optical coupler 31A and a second optical coupler 32A, each configured as a 1×2 coupler. This allows for switching between the first cable 21A, the second cable 22A, the third cable 23A, the fourth cable 24A, and the fifth cable 25A, which configure the first and second optical paths, with a simple configuration.

[0048] [Third embodiment] Next, a third embodiment of the present invention will be described with reference to the drawings. In the third embodiment, the physical quantity measuring device 1B differs from the first and second embodiments in that it includes a switching optical element 80B that switches the optical path of the third light L3 emitted from the third light source 13B between the third optical path and the fourth optical path. Note that in the third embodiment, the same reference numerals are used to designate the same or similar components as those in the first and second embodiments, and descriptions thereof will be omitted.

[0049] 3 is a diagram showing a schematic configuration of a physical quantity measuring device 1B of the third embodiment. Note that, like the physical quantity measuring devices 1 and 1A of the first and second embodiments described above, the physical quantity measuring device 1B is configured to be able to measure physical quantities such as pressure, acceleration, displacement, tilt, and temperature. As shown in FIG. 3, the physical quantity measuring device 1B includes a third light source 13B, an optical cable 20B, an optical coupler 30B, an optical sensor 40, a light receiver 50, and a switching optical element 80B.

[0050] [Third light source 13B] The third light source 13B is a light source that emits third light L3 in a broad wavelength range. The third light source 13B is, for example, an SC (Super Continuum) light source and is configured to emit third light L3 in a wavelength range of 1200 nm to 1600 nm. Note that the third light source 13B is not limited to the above configuration and may be a combination of an LED (Light Emitting Diode), an ASE (Amplified Spontaneous Emission) light source, an SLD (Super Luminescent Diode) light source, an incandescent lamp, or the like, or may be a narrow-band light source that sweeps a broad band, such as a tunable laser. Furthermore, the third light source 13B may be configured to emit third light L3 in a wavelength range wider than the wavelength range illustrated as an example, or may be configured to emit third light L3 in a wavelength range narrower than the wavelength range illustrated as an example.

[0051] [Optical cable 20B] The optical cable 20B, like the optical cables 20 and 20A of the first and second embodiments described above, is configured to include a so-called multimode optical fiber, a protective member, etc. In this embodiment, the optical cable 20B includes a first cable 21B, a second cable 22B, a third cable 23B, and a fourth cable 24B.

[0052] The first cable 21B transmits the third light L3 emitted from the third light source 13B to the optical coupler 30B. The second cable 22B optically connects the optical coupler 30B and the switching optical element 80B. The third cable 23B transmits the third light L3 incident thereon via the optical coupler 30B and the switching optical element 80B to the optical sensor 40, and transmits the measurement light M1 and the third light L3 output from the optical sensor 40 to the switching optical element 80B. The fourth cable 24B transmits the measurement light M1 and the third light L3 incident thereon via the optical coupler 30B and the switching optical element 80B to the light receiver 50. In other words, the first cable 21B, the second cable 22B, the third cable 23B, and the fourth cable 24B constitute a third optical path of the present invention, and the first cable 21B, the second cable 22B, and the fourth cable 24B constitute a fourth optical path of the present invention. The first cable 21B, the second cable 22B, the third cable 23B, and the fourth cable 24B that make up the optical cable 20B are not limited to being configured with multimode optical fibers, and may be configured with, for example, single-mode optical fibers.

[0053] [Optical coupler 30B] The optical coupler 30B is a so-called 1×2 coupler. In this embodiment, the optical coupler 30B is provided on the optical cable 20B. Specifically, the optical coupler 30B is provided to optically connect the first cable 21B, the second cable 22B, and the fourth cable 24B. As a result, the optical coupler 30B transmits the third light L3 emitted from the third light source 13B to the optical sensor 40, and transmits the measurement light M1 and the third light L3 output from the optical sensor 40 to the optical receiver 50. Furthermore, the optical coupler 30B transmits the third light L3 output from the third light source 13B to the optical receiver 50.

[0054] [Switchable Optical Element 80B] The switching optical element 80B is configured as a so-called optical chopper having blades that rotate at a constant speed. As a result, when the blades of the switching optical element 80B do not block the optical path, the third light L3 emitted from the third light source 13B is transmitted to the optical sensor 40, and the measurement light M1 and the third light L3 output by the optical sensor 40 are input to the optical receiver 50. On the other hand, when the blades of the switching optical element 80B block the optical path, the third light L3 emitted from the third light source 13B is reflected by the blades of the switching optical element 80B and input to the optical receiver 50. In other words, the switching optical element 80B periodically switches between the third optical path and the fourth optical path.

[0055] Therefore, in this embodiment, the measurement light M1, the third light L3, and the third light L3 are alternately input to the wedge 62 of the interferometer 60. The wedge 62 causes interference of the measurement light M1 incident via the Fresnel cylindrical lens 61 to emit second interference light, and also emits the third light L3 incident via the Fresnel cylindrical lens 61. In other words, the second interference light and the third light L3 are an example of the third output light of the present invention, and the third light L3 is an example of the fourth output light.

[0056] In this embodiment, the light detection unit 63 detects the second interference light and the third light L3 emitted from the wedge 62, and outputs a third signal corresponding to the second interference light and the third light L3. Furthermore, the light detection unit 63 detects the third light L3 emitted from the wedge 62, and outputs a fourth signal corresponding to the third light L3. Here, the MPU 70 obtains interference fringes corresponding to the second interference light contained in the third signal and calculates phase changes from the periodic intensity changes of the interference fringes. The MPU 70 then corrects the calculation results using the fourth signal, which is periodically input. That is, the MPU 70 can correct the calculation results based on the third signal at any time using the fourth signal as a reference signal. Therefore, even if dirt or the like adheres to the first reflecting surface 621 or the second reflecting surface 622 of the wedge 62, the third signal, including interference signals caused by the dirt or the like, can be corrected at any time using the fourth signal.

[0057] [Effects of the third embodiment] The third embodiment described above can provide the following effects. (6) In this embodiment, the optical fiber 10 includes a first cable 21B, a second cable 22B, a third cable 23B, and a fourth cable 24B that output the third light L3 emitted from the third light source 13B to the optical sensor 40 and output the measurement light M1 and the third light L3 output from the optical sensor 40 to an interferometer 60 having a wedge 62, and the first cable 21B, the second cable 22B, and the fourth cable 24B that output the third light L3 emitted from the third light source 13B to the interferometer 60. The wedge 62 is configured to receive the measurement light M1 output from the optical sensor 40 and emit second interference light. The optical fiber 10 includes a switching optical element 80B that switches the optical path of the third light L3 emitted from the third light source 13B between the third optical path and the fourth optical path. Therefore, the third signal corresponding to the measurement light M1 and the third light L3 can be corrected as needed using the fourth signal corresponding to the third light L3. Therefore, the influence of changes in environmental factors can be suppressed. Furthermore, since the optical path of the third light L3 is switched by the switching optical element 80B, the light source for measurement and the light source for reference can be combined into one, and the number of light sources can be reduced.

[0058] (7) This embodiment includes an interferometer 60 having a wedge 62 as an optical element. The interferometer 60 is configured to emit the second interference light as the third output light. This allows the physical quantity of the object to be measured to be calculated by detecting a phase change in the interference fringes of the second interference light corresponding to the measurement light M1.

[0059] (8) In the present embodiment, the first cable 21B, the second cable 22B, the third cable 23B, and the fourth cable 24B that constitute the third optical path and the fourth optical path are configured with optical fibers. Therefore, the third light L3 emitted from the third light source 13B can be reliably guided to the optical sensor 40, and the measurement light M1 and the third light L3 emitted from the optical sensor 40 can be reliably guided to the wedge 62. Furthermore, the third light L3 emitted from the third light source 13B can be reliably guided to the wedge 62. Furthermore, the optical cable 20B, which is constructed using optical fiber, is provided with an optical coupler 30B, so that switching between the first cable 21B, the second cable 22B, the third cable 23B, and the fourth cable 24B can be achieved with a simple configuration.

[0060] (9) In this embodiment, the switching optical element 80B is configured as an optical chopper, so that switching between the third optical path and the fourth optical path can be achieved with a simple configuration.

[0061] [Fourth embodiment] Next, a fourth embodiment of the present invention will be described with reference to the drawings. In the fourth embodiment, a physical quantity measuring device 1C differs from the first to third embodiments in that it includes an optical switch as a switching optical element 80C. Note that in the fourth embodiment, the same or similar configurations as those in the first to third embodiments are denoted by the same reference numerals, and descriptions thereof will be omitted.

[0062] 4 is a diagram showing a schematic configuration of a physical quantity measuring device 1C according to a fourth embodiment. Note that, like the physical quantity measuring devices 1, 1A, and 1B according to the first to third embodiments described above, the physical quantity measuring device 1C is configured to be able to measure physical quantities such as pressure, acceleration, displacement, tilt, and temperature. 4, the physical quantity measuring device 1C includes a third light source 13C, an optical cable 20C, an optical sensor 40, a light receiver 50, and a switching optical element 80C. The third light source 13C has the same configuration as the third light source 13B of the third embodiment described above.

[0063] [Optical cable 20C] The optical cable 20C, like the optical cables 20, 20A, and 20B of the first to third embodiments described above, is configured to include a so-called multimode optical fiber, a protective member, etc. In this embodiment, the optical cable 20C includes a first cable 21C, a second cable 22C, and a third cable 23C.

[0064] The first cable 21C transmits the third light L3 emitted from the third light source 13C to the switching optical element 80C. The second cable 22C transmits the third light L3 incident via the switching optical element 80C to the optical sensor 40, and transmits the measurement light M1 and the third light L3 output from the optical sensor 40 to the switching optical element 80C. The third cable 23C transmits the measurement light M1 and the third light L3 incident via the switching optical element 80C to the light receiver 50. In other words, the first cable 21C, the second cable 22C, and the third cable 23C constitute a third optical path of the present invention, and the first cable 21C and the third cable 23C constitute a fourth optical path of the present invention. The first cable 21C, the second cable 22C, and the third cable 23C that make up the optical cable 20C are not limited to being configured with multimode optical fibers, and may be configured with, for example, single-mode optical fibers.

[0065] [Switchable Optical Element 80C] The switching optical element 80C is configured as a so-called 1×2 optical switch. That is, the first cable 21C is connected to the input port of the switching optical element 80C, and the second cable 22C and the third cable 23C are connected to the output port. As a result, when the output of the switching optical element 80C is switched to the port connected to the second cable 22C, the third light L3 emitted from the third light source 13C is transmitted to the optical sensor 40, and the measurement light M1 and the third light L3 output from the optical sensor 40 are input to the optical receiver 50. On the other hand, when the output of the switching optical element 80C is switched to the port connected to the third cable 23C, the third light L3 emitted from the third light source 13C is input to the optical receiver 50 via the switching optical element 80C. That is, the switching optical element 80C periodically switches between the third optical path and the fourth optical path.

[0066] Therefore, in this embodiment, similarly to the third embodiment described above, the MPU 70 can correct the phase change based on the third signal as needed by using the fourth signal as a reference signal. Therefore, even if dirt or the like adheres to the first reflecting surface 621 or the second reflecting surface 622 of the wedge 62, the third signal including the interference signal caused by the dirt or the like can be corrected as needed by the fourth signal.

[0067] [Effects of the fourth embodiment] In the fourth embodiment described above, the following effects can be obtained. (10) In this embodiment, the switching optical element 80C is configured as an optical switch, so that switching between the third optical path and the fourth optical path can be achieved with a simple configuration. Furthermore, in this embodiment, an optical coupler that multiplexes or splits the third light L3 and the measurement light M1 is not required, so the number of parts can be reduced.

[0068] [Fifth embodiment] Next, a fifth embodiment of the present invention will be described with reference to the drawings. In the fifth embodiment, a physical quantity measuring device 1D differs from the first to fourth embodiments in that it includes a movable beam splitter as a switching optical element 80D. Note that in the fifth embodiment, the same or similar components as those in the first to fourth embodiments are denoted by the same reference numerals, and descriptions thereof will be omitted.

[0069] 5 is a diagram showing a schematic configuration of a physical quantity measuring device 1D of the fifth embodiment. Note that, like the physical quantity measuring devices 1, 1A, 1B, and 1C of the first to fourth embodiments described above, the physical quantity measuring device 1D is configured to be able to measure physical quantities such as pressure, acceleration, displacement, tilt, and temperature. 5, the physical quantity measuring device 1D includes a third light source 13D, an optical sensor 40, a light receiver 50, and a switching optical element 80D. The third light source 13D is configured similarly to the third light source 13B of the third embodiment described above. In this embodiment, an optical cable including an optical fiber is not provided, and the third light L3 emitted from the third light source 13D and the measurement light M1 and third light L3 output from the optical sensor 40 are transmitted through space.

[0070] [Switchable Optical Element 80D] The switching optical element 80D is configured as a so-called movable beam splitter. That is, the plate 81D of the switching optical element 80D is configured to be movable. Specifically, the plate 81D is configured to periodically rotate between the state shown by the solid line in FIG. 5 and the state shown by the two-dot chain line. As a result, when the plate 81D of the switching optical element 80D is rotated to the state shown by the solid line in FIG. 5, the third light L3 emitted from the third light source 13D is transmitted to the optical sensor 40, and the measurement light M1 and the third light L3 output from the optical sensor 40 are input to the light receiver 50. On the other hand, when the plate 81D of the switching optical element 80D is rotated to the state shown by the two-dot chain line in FIG. 5, the third light L3 emitted from the third light source 13D is reflected by the plate 81D of the switching optical element 80D and input to the light receiver 50. That is, the switching optical element 80D periodically switches between the third optical path and the fourth optical path.

[0071] Therefore, in this embodiment, similarly to the third and fourth embodiments described above, the MPU 70 can correct the phase change based on the third signal as needed by using the fourth signal as a reference signal. Therefore, even if dirt or the like adheres to the first reflecting surface 621 or the second reflecting surface 622 of the wedge 62, the third signal including the interference signal caused by the dirt or the like can be corrected as needed by the fourth signal.

[0072] [Effects of the fifth embodiment] In the fifth embodiment described above, the following effects can be obtained. (11) In this embodiment, the switching optical element 80D is configured as a movable beam splitter, so that switching between the third optical path and the fourth optical path can be achieved with a simple configuration. Furthermore, in this embodiment, an optical cable including an optical fiber is not required, so that the number of parts can be reduced.

[0073] [Variations] The present invention is not limited to the above-described embodiments, and any modifications and improvements that can achieve the object of the present invention are included in the present invention. In the first to third embodiments described above, the optical couplers 30 and 30B, the first optical coupler 31A, and the second optical coupler 32A are used to multiplex and split the optical paths, but the present invention is not limited to this. For example, the optical paths may be multiplexed and split using a beam splitter.

[0074] In the above-described embodiments, the optical sensor 40 is configured with a measurement sensor element 41 that is made up of a pair of reflective elements arranged close to each other to form a Fabry-Perot interferometer, but is not limited to this. For example, the optical sensor may be configured with a measurement sensor element that is made up of a Fizeau interferometer, a Fabry-Perot etalon, or an FBG (fiber Bragg grating).

[0075] In the above-described embodiments, the interferometer 60 is configured as a wedge-shearing interferometer including the wedge 62, but this is not limiting. For example, the interferometer may be configured as a Mach-Zehnder interferometer, a Michelson interferometer, a Fizeau interferometer, or the like. Furthermore, the wedge may be configured as a birefringent wedge. Even in such cases, it is possible to correct interference signals caused by dirt or the like adhering to the interferometer. Furthermore, in the above embodiment, the interferometer 60 having the wedge 62, which is an example of the optical element of the present invention, is configured to be able to emit interference light, but this is not limiting. For example, the optical element of the present invention may be configured as a spectroscopic element that disperses incident light. In this case, the light dispersed by the spectroscopic element is output as output light.

[0076] In the above-described embodiments, the physical quantity measuring devices 1, 1A, 1B, 1C, and 1D are each provided with one optical sensor 40. However, the present invention is not limited to this. For example, the physical quantity measuring device may be provided with a plurality of optical sensors each having a different center of wavelength peak. In this case, the optical sensors may be provided at the same location on the object to be measured, which allows accurate measurement of changes in different physical quantities, such as pressure and temperature, at the same location on the object to be measured. Furthermore, the plurality of optical sensors may be provided at different locations on the object to be measured, thereby enabling accurate measurement of changes in the physical quantity at different locations on the object to be measured.

[0077] In the first and second embodiments described above, the first light source 11 and the second light source 12 are configured to be turned on alternately at regular intervals, but this is not limiting. For example, the first light source and the second light source may be configured to emit light in different wavelength regions, and the first light source and the second light source may be configured to be always turned on. In this case, since the first light source and the second light source emit light in different wavelength regions, the first interference light and the second interference light can be detected separately by the light detection unit.

[0078] In the third embodiment described above, the third optical path and the fourth optical path can be switched by the switching optical element 80B, which is an optical chopper. However, this is not limited to this. For example, in addition to the optical cable constituting the third optical path optically connecting the third light source, the optical coupler, the optical sensor, and the optical receiver, an optical cable constituting the fourth optical path optically connecting the third light source and the optical receiver may be provided, and a delay line may be provided in the optical cable constituting the fourth optical path. With this configuration, the difference in optical path length between the third optical path and the fourth optical path can be made sufficiently long relative to the modulation period or pulse length of the third light source, so that the third output light and the fourth output light can be separated and detected by the optical detection unit.

[0079] In each of the above-described embodiments, a filter or the like may be provided to attenuate the second light L2 and the third light L3, which are light for reference. [Explanation of symbols]

[0080] 1, 1A, 1B, 1C, 1D... physical quantity measuring device, 11... first light source, 12... second light source, 13B, 13C, 13D... third light source, 20, 20A, 20B, 20C... optical cable, 21, 21A, 21A, 21B, 21C... first cable, 22, 22A, 22B, 22C... second cable, 23, 23 A,23B,23C...Third cable, 24,24A,24B...Fourth cable, 25A...Fifth cable, 30,30B...Optical coupler, 31A...First optical coupler, 32A...Second optical coupler, 40...Optical sensor, 41...Measurement sensor element, 50...Photoreceiver, 60...Interferometer, 61...Fresnel cylindrical lens, 62...Wedge, 63...Photodetector, 70...MPU, 80B,80C,80D...Switching optical element, 81D...Plate, 621...First reflecting surface, 622...Second reflecting surface, L1...First light, L2...Second light, L3...Third light, M1...Measurement light.

Claims

1. a first light source configured to emit a first light; a second light source configured to emit second light; an optical sensor that receives the first light emitted from the first light source and outputs measurement light corresponding to a physical quantity of an object to be measured and the first light; an optical element configured to receive the measurement light and the first light output from the optical sensor and to emit a first emitted light, and to receive the second light output from the second light source and to emit a second emitted light; a first optical path that outputs the first light emitted from the first light source to the optical sensor and outputs the measurement light and the first light output from the optical sensor to the optical element; a second optical path for outputting the second light emitted from the second light source to the optical element; a signal processing unit that corrects waveform data based on the first emitted light using waveform data based on the second emitted light. A physical quantity measuring device characterized by:

2. 2. The physical quantity measuring device according to claim 1, an interferometer having a wedge as the optical element, The interferometer is configured to be able to emit a first interference light corresponding to the measurement light. A physical quantity measuring device characterized by:

3. 3. The physical quantity measuring device according to claim 1, the first optical path and the second optical path are configured to include optical fibers; The optical fiber is provided with an optical coupler. A physical quantity measuring device characterized by:

4. a third light source configured to be able to emit third light; an optical sensor that receives the third light emitted from the third light source and outputs measurement light corresponding to a physical quantity of an object to be measured and the third light; an optical element configured to receive the measurement light and the third light output from the optical sensor and to emit third outgoing light, and to receive the third light output from the third light source and to emit fourth outgoing light; a third optical path that outputs the third light emitted from the third light source to the optical sensor and outputs the measurement light and the third light output from the optical sensor to the optical element; a fourth optical path that outputs the third light emitted from the third light source to the optical element; a switching optical element that switches an optical path of the third light emitted from the third light source between the third optical path and the fourth optical path; a signal processing unit that corrects waveform data based on the third outgoing light using waveform data based on the fourth outgoing light. A physical quantity measuring device characterized by:

5. 5. The physical quantity measuring device according to claim 4, an interferometer having a wedge as the optical element, The interferometer is configured to be able to emit second interference light corresponding to the measurement light. A physical quantity measuring device characterized by:

6. 6. The physical quantity measuring device according to claim 4, the third optical path and the fourth optical path are configured to include optical fibers; The optical fiber is provided with an optical coupler. A physical quantity measuring device characterized by:

7. 7. The physical quantity measuring device according to claim 4, The switching optical element is configured by an optical chopper. A physical quantity measuring device characterized by:

8. 7. The physical quantity measuring device according to claim 4, The switching optical element is configured by an optical switch. A physical quantity measuring device characterized by:

9. 7. The physical quantity measuring device according to claim 4, The switching optical element is configured by a movable beam splitter. A physical quantity measuring device characterized by:

10. 10. The physical quantity measuring device according to claim 1, The optical sensor is configured as a Fabry-Perot interferometric sensor. A physical quantity measuring device characterized by:

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