Substrate transport robot

Abstract

This substrate conveyance robot (100) comprises: a base part (10); a robot arm (20) that is rotatably supported by the base part; and a driving part (31, 32) that is disposed inside the base part and that drives the robot arm. Disposed inside the robot arm are a belt (43, 46, 53, 56) that transmits driving power of the driving part and a pulley (41, 42, 44, 45, 51, 52, 54, 55) or a gear. The robot arm is such that the belt and the pulley or the gear can be attached / removed in an intergral manner.

Description

[Technical Field]

[0001] The present disclosure relates to a substrate transfer robot, and more particularly to a substrate transfer robot equipped with a robot arm. [Background technology]

[0002] Conventionally, substrate transport robots equipped with a robot arm have been known. For example, Japanese Patent Publication No. 6271266 discloses an industrial robot equipped with an arm. The arm is composed of a first arm section and a second arm section that are connected to each other so as to be rotatable relative to each other. A hand on which an object to be transported is mounted is rotatably connected to the tip end of the first arm section. The base end of the second arm is rotatably connected to a main body section. The connecting section between the first arm section and the second arm section and the connecting section between the second arm section and the hand each form a joint section. The joint section is composed of a unit section that integrates a reducer, a bearing, and a sealing member. When the joint section is damaged and maintenance of the joint section is required, the unit section can be replaced as a whole. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 6271266 Summary of the Invention [Problem to be solved by the invention]

[0004] Although not explicitly stated in the above-mentioned Japanese Patent Publication No. 6271266, industrial robots may need to replace not only joints but also arms due to malfunctions. In such cases, the arm is removed and reinstalled, and after the arm is installed, the power transmission unit within the arm is adjusted. That is, if the power transmission unit within the arm is a belt and pulley, the belt tension is adjusted, and if the power transmission unit within the arm is a gear, the gear backlash is adjusted. However, adjusting the belt tension or gear backlash after installing the arm increases the work time and effort required after installing the arm, which is problematic.

[0005] This disclosure has been made to solve the above-mentioned problems, and one purpose of this disclosure is to provide a substrate transport robot that can shorten the work time and reduce the effort required after installing the robot arm when installing the robot arm. [Means for solving the problem]

[0006] This disclosure No. 1 The substrate transport robot according to the aspect includes a base unit, a robot arm rotatably supported on the base unit, and a drive unit disposed within the base unit and configured to drive the robot arm. a rotation shaft portion that transmits the driving force of the drive portion; a belt and pulley or gear for transmitting the driving force of the driving unit is disposed inside the robot arm; the rotating shaft includes a first portion disposed within the base portion, and a second portion disposed within the robot arm, connected to a pulley or a gear, and detachable from the first portion; The robot arm is connected by belts and pulleys or gears. The second part and It can be attached and detached as a single unit. A substrate transport robot according to a second aspect of this disclosure comprises a base portion, a robot arm rotatably supported on the base portion, a drive unit disposed within the base portion for driving the robot arm, and a rotating shaft portion for transmitting the drive force of the drive unit, wherein a belt and pulley or gear for transmitting the drive force of the drive unit are disposed within the robot arm, and the robot arm is detachable with the belt and pulley or gear integrally formed, the rotating shaft portion includes a first portion disposed within the base portion and a second portion disposed within the robot arm and connected to the pulley or gear and detachable from the first portion, a bearing for rotatably supporting the first portion is disposed on the first portion, and the bearing is provided with a washer that is elastically deformable in the direction in which the rotating shaft portion extends so as to allow the bearing to move in the direction in which the rotating shaft portion extends when the second portion is attached to the first portion. A substrate transport robot according to a third aspect of this disclosure comprises a base, a robot arm rotatably supported on the base, a drive unit disposed within the base for driving the robot arm, and a rotating shaft for transmitting the drive force of the drive unit, wherein a belt and pulley or gear for transmitting the drive force of the drive unit are disposed within the robot arm, and the robot arm is detachable with the belt and pulley or gear integrally formed, and the rotating shaft includes a first part disposed within the base, and a second part disposed within the robot arm and connected to the pulley or gear, detachable from the first part, and the second part is attached non-contact to the first part via a magnetic coupling.

[0007] This disclosure 1st~3rdIn the substrate transport robot according to the above aspect, the robot arm is configured so that the belt and pulley or gear are detachably attached as an integral unit. This allows the robot arm to be attached with the belt tension or gear backlash adjusted when replacing the robot arm due to a malfunction or when initially installing the robot arm, eliminating the need to adjust the belt tension or gear backlash after installing the robot arm. As a result, when installing the robot arm, the installation time and effort can be reduced. In particular, when installing the robot arm at a customer's site, the workload on the customer can be reduced. [Effects of the Invention]

[0008] According to the present disclosure, when performing work to install a robot arm, it is possible to reduce the work time and effort required after installing the robot arm. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a schematic perspective view showing a substrate transport robot according to an embodiment; [Figure 2] FIG. 1 is a schematic side view showing a substrate transport robot according to an embodiment. [Figure 3] 1 is a schematic cross-sectional view showing a base portion and a proximal end portion of a robot arm of a substrate transport robot according to an embodiment. [Figure 4] 5A and 5B are schematic cross-sectional views for explaining attachment and detachment of a robot arm of a substrate transport robot according to an embodiment. [Figure 5] FIG. 10 is a schematic cross-sectional view showing a base portion and a proximal end portion of a robot arm of a substrate transport robot according to a first modified example. [Figure 6] FIG. 10 is a schematic cross-sectional view showing a base portion and a proximal end portion of a robot arm of a substrate transport robot according to a second modified example. DETAILED DESCRIPTION OF THE INVENTION

[0010] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings.

[0011] The configuration of a substrate transport robot 100 according to one embodiment will be described with reference to FIGS.

[0012] (Configuration of substrate transport robot) As shown in FIG. 1, the substrate transfer robot 100 according to this embodiment is a horizontal articulated robot that transfers a substrate 101, such as a glass substrate or a silicon substrate, having a substantially disk shape. The substrate transfer robot 100 includes a base unit 10 and a robot arm 20. The substrate transfer robot 100 is a vacuum robot that is placed and used in a vacuum environment. The substrate transfer robot 100 transfers the substrate 101 using the robot arm 20 in a space, such as a chamber, that is maintained in a vacuum state above a reference plane 102 (see FIG. 2). The space below the reference plane 102 is at atmospheric pressure.

[0013] The base portion 10 includes a main body portion 11 and a flange portion 12. The main body portion 11 has a generally cylindrical shape, and devices such as drive units 31, 32, and 33 (see FIG. 2), which will be described later, are arranged in the internal space. The flange portion 12 is arranged on the upper portion of the main body portion 11, has a generally circular disk shape, and has a larger diameter than the main body portion 11.

[0014] The robot arm 20 is rotatably supported on the base unit 10. The robot arm 20 includes a first robot arm 21 and a second robot arm 22. Each of the first robot arm 21 and the second robot arm 22 rotates and extends / retracts relative to the base unit 10 by driving multiple joints. Each of the first robot arm 21 and the second robot arm 22 moves up and down relative to the base unit 10 by driving an elevator mechanism. The base ends of the first robot arm 21 and the second robot arm 22 are arranged to overlap in the vertical direction. The base end of the first robot arm 21 is arranged lower than the base end of the second robot arm 22. A first hand 23 that supports a substrate 101 is attached to the tip of the first robot arm 21. A second hand 24 that supports a substrate 101 is attached to the tip of the second robot arm 22. The first hand 23 and the second hand 24 are examples of hands.

[0015] The first robot arm 21 has a first base end link 21a and a first intermediate link 21b. The base end side of the first base end link 21a is rotatably attached to the base unit 10. The base end side of the first intermediate link 21b is rotatably attached to the tip end side of the first base end link 21a. The first hand 23 is rotatably attached to the tip end side of the first intermediate link 21b. The joint between the base end side of the first base end link 21a and the base unit 10 forms a shoulder joint. The joint between the tip end side of the first base end link 21a and the base end side of the first intermediate link 21b forms an elbow joint. The joint between the tip end side of the first intermediate link 21b and the first hand 23 forms a wrist joint.

[0016] The second robot arm 22 has a second base end link 22a and a second intermediate link 22b. The base end side of the second base end link 22a is rotatably attached to the base unit 10 via the first base end link 21a. The base end side of the second intermediate link 22b is rotatably attached to the tip end side of the second base end link 22a. The second hand 24 is rotatably attached to the tip end side of the second intermediate link 22b. The joint between the base end side of the second base end link 22a and the base unit 10 forms a shoulder joint. The joint between the tip end side of the second base end link 22a and the base end side of the second intermediate link 22b forms an elbow joint. The joint between the tip end side of the second intermediate link 22b and the second hand 24 forms a wrist joint.

[0017] In this embodiment, the internal space of the robot arm 20 is at atmospheric pressure. That is, the internal spaces of the first base end link 21a and the first intermediate link 21b of the first robot arm 21 and the second base end link 22a and the second intermediate link 22b of the second robot arm 22 are all at atmospheric pressure. Sealing members are disposed at each joint of the first robot arm 21 and the second robot arm 22 to isolate the interior of the first robot arm 21 and the second robot arm 22 from a vacuum environment and maintain an atmospheric pressure state. Sensors such as temperature sensors for detecting the temperature of each robot arm are disposed inside the first robot arm 21 and the second robot arm 22.

[0018] Each of the first hand 23 and the second hand 24 supports one substrate 101. The first hand 23 has a support portion 23a. The support portion 23a supports one substrate 101. The second hand 24 has a support portion 24a. The support portion 24a supports one substrate 101. Each of the support portion 23a and the support portion 24a is a thin support plate that supports the substrate 101 from below.

[0019] As shown in FIG. 2, drive units 31, 32, and 33 are arranged within the main body 11 of the base unit 10. Drive unit 31 drives the elbow joint and wrist joint of the first robot arm 21. Drive unit 32 drives the elbow joint and wrist joint of the second robot arm 22. Drive unit 33 drives the shoulder joints of the first robot arm 21 and the second robot arm 22. Drive units 31, 32, and 33 are servo motors. In addition to drive units 31, 32, and 33, drive units that drive the first robot arm 21 and the second robot arm 22 to move up and down are also arranged within the main body 11 of the base unit 10. Drive units 31 and 32 are examples of a first drive unit and a second drive unit.

[0020] Belts and pulleys that transmit the driving force of the drive unit 31 and the drive unit 32 are disposed within the robot arm 20. Specifically, a pulley 41, a pulley 42, and a belt 43 that transmit the driving force of the drive unit 31 are disposed within the first base end link 21a of the first robot arm 21. The pulley 41 is disposed on the base end side of the first base end link 21a. The pulley 42 is disposed on the tip end side of the first base end link 21a. The belt 43 is stretched between the pulleys 41 and 42. Furthermore, a pulley 44, a pulley 45, and a belt 46 that transmit the driving force of the drive unit 31 are disposed within the first intermediate link 21b of the first robot arm 21. The pulley 44 is disposed on the base end side of the first intermediate link 21b. The pulley 45 is disposed on the tip end side of the first intermediate link 21b. The belt 46 is stretched between the pulleys 44 and 45. Belts 43 and 46 are made of metal, such as stainless steel. Belts 43 and 46 may be made of materials other than metal, such as rubber. Pulleys 41, 42, 44, and 45 are examples of first pulleys. Belts 43 and 46 are examples of first belts.

[0021] The pulley 41 is connected to a rotary shaft portion 61 (see FIG. 3), which will be described later. The pulley 42 is supported on the lower end side of a shaft portion 42a that connects the pulley 42 and the pulley 44. The pulley 42 is connected to the base end side of the first intermediate link 21b via a connecting portion 42b. The pulley 44 is supported on the upper end side of the shaft portion 42a. The pulley 45 is connected to the first hand 23 via a connecting portion 45a.

[0022] When the rotary shaft 61 is rotated by the drive unit 31, the pulley 41 is rotated, which rotates the belt 43, thereby rotating the pulley 42. When the pulley 42 is rotated, the first intermediate link 21b is rotated via the connecting unit 42b. When the pulley 42 is rotated, the pulley 44 is rotated via the shaft 42a. When the pulley 44 is rotated, which rotates the belt 46, thereby rotating the pulley 45. When the pulley 45 is rotated, the first hand 23 is rotated via the connecting unit 45a. In this way, the pulley 41, the pulley 42, the belt 43, the pulley 44, the pulley 45, and the belt 46 are interlocked, thereby driving the elbow joint and the wrist joint of the first robot arm 21 in an interlocked manner.

[0023] Pulleys 51, 52, and a belt 53 that transmit the driving force of the drive unit 32 are disposed within the second base end link 22a of the second robot arm 22. The pulley 51 is disposed on the base end side of the second base end link 22a. The pulley 52 is disposed on the tip end side of the second base end link 22a. The belt 53 is stretched between the pulleys 51 and 52. Furthermore, pulleys 54, 55, and a belt 56 that transmit the driving force of the drive unit 32 are disposed within the second intermediate link 22b of the second robot arm 22. The pulley 54 is disposed on the base end side of the second intermediate link 22b. The pulley 55 is disposed on the tip end side of the second intermediate link 22b. The belt 56 is stretched between the pulleys 54 and 55. The belts 53 and 56 are made of metal, such as stainless steel. The belts 53 and 56 may be made of a material other than metal, such as rubber. Pulleys 51, 52, 54, and 55 are examples of second pulleys, and belts 53 and 56 are examples of second belts.

[0024] The pulley 51 is connected to a rotary shaft 62 (see FIG. 3), which will be described later. The pulley 52 is supported on the lower end side of a shaft 52a that connects the pulley 52 to a pulley 54. The pulley 52 is connected to the base end side of the second intermediate link 22b via a connecting portion 52b. The pulley 54 is supported on the upper end side of the shaft 52a. The pulley 55 is connected to the second hand 24 via a connecting portion 55a.

[0025] When the drive unit 32 rotates the rotary shaft 62, the pulley 51 rotates, which in turn rotates the belt 53, thereby rotating the pulley 52. ​​When the pulley 52 rotates, the second intermediate link 22b rotates via the connecting unit 52b. When the pulley 52 rotates, the pulley 54 rotates via the shaft 52a. When the pulley 54 rotates, which in turn rotates the belt 56, thereby rotating the pulley 55. When the pulley 55 rotates, the second hand 24 rotates via the connecting unit 55a. In this way, the pulleys 51, 52, belt 53, pulley 54, pulley 55, and belt 56 move in conjunction with each other, thereby driving the elbow joint and wrist joint of the second robot arm 22 in conjunction with each other.

[0026] As shown in FIG. 3 , the substrate transfer robot 100 is provided with a rotating shaft 61, a rotating shaft 62, and a rotating shaft 63. The rotating shaft 61 transmits the driving force of the driving unit 31. Specifically, the base end of the rotating shaft 61 is connected to the driving unit 31 via a gear 64 including a reduction gear and a final-stage gear, and is rotationally driven by the driving force of the driving unit 31. The rotating shaft 62 transmits the driving force of the driving unit 32. Specifically, the base end of the rotating shaft 62 is connected to the driving unit 32 via a gear 65 including a reduction gear and a final-stage gear, and is rotationally driven by the driving force of the driving unit 32. The rotating shaft 63 transmits the driving force of the driving unit 33. Specifically, the rotating shaft 63 is connected to the driving unit 33 via a gear 66 including a reduction gear and a final-stage gear, and is rotationally driven by the driving force of the driving unit 33. The drive units 31, 32, and 33 may be of a direct drive type that directly connects to the rotary shaft portion, rather than a type that connects to the rotary shaft portion via gears.

[0027] Rotating shaft portion 61, rotating shaft portion 62, and rotating shaft portion 63 are formed to extend in the vertical direction and rotate around a rotation axis Ax that also extends in the vertical direction. Rotating shaft portion 61, rotating shaft portion 62, and rotating shaft portion 63 are configured as triple pipes arranged concentrically. Furthermore, rotating shaft portion 62, rotating shaft portion 61, and rotating shaft portion 63 are arranged in this order from the inside to the outside.

[0028] A pulley 41 is connected to the tip end of the rotating shaft 61. A pulley 51 is connected to the tip end of the rotating shaft 62. A base end of the first base end link 21a is connected to the tip end of the rotating shaft 63. When the rotating shaft 63 rotates, the first base end link 21a and the second base end link 22a rotate. That is, the shoulder joints of the first robot arm 21 and the second robot arm 22 are driven.

[0029] In this embodiment, as shown in FIGS. 3 and 4 , the robot arm 20 is detachable with the belt and pulleys integrated. Specifically, the first robot arm 21 is detachable with the pulleys 41, 42, belt 43, 44, 45, and 46 integrated. The second robot arm 22 is detachable with the pulleys 51, 52, belt 53, 54, 55, and 56 integrated. For ease of understanding, FIG. 4 schematically illustrates a thick line 103 indicating the boundary of attachment and detachment of the robot arm 20. The entire robot arm 20 above the thick line 103 is detachable from the base unit 10 with the belt and pulleys arranged within the robot arm 20. When attaching or detaching the robot arm 20, the first hand 23 and the second hand 24 may be attached or detached.

[0030] In this embodiment, the robot arm 20 also includes a detachable cover 71. With the cover 71 removed, the fastening members 81, 86, and 91 (described later) for attaching the robot arm 20 to the base 10 are accessible. Specifically, the fastening members 81, 86, and 91 for attaching the first robot arm 21 and the second robot arm 22 to the base 10 are accessible. The cover 71 is detachably attached to the upper part of the base end of the second robot arm 22. Specifically, an opening 72 that opens upward is formed on the upper surface of the base end of the second base end link 22a of the second robot arm 22. The cover 71 is attached via a fastening member 73 so as to cover the opening 72. With the cover 71 removed, the fastening members 81, 86, and 91 for attaching the robot arm 20 to the base 10 are accessible through the opening 72. The base 10 is an example of a base-end member.

[0031] In this embodiment, the rotating shaft 61 and the rotating shaft 62 each include a first portion disposed within the base 10 and a second portion disposed within the robot arm 20, connected to the pulley, and detachable from the first portion. Specifically, the rotating shaft 61 includes a first portion 61a disposed within the base 10 and a second portion 61b disposed within the first robot arm 21, connected to the pulley 41, and detachable from the first portion 61a. The base end of the first portion 61a is connected to the drive unit 31 via a gear 64. The base end of the second portion 61b is connected to the tip end of the first portion 61a. The pulley 41 is connected to the tip end of the second portion 61b. In addition, the length of the first portion 61a is greater than the length of the second portion 61b in the direction in which the rotating shaft 61 extends.

[0032] The second portion 61b is attached to the first portion 61a via a fastening member 81. Specifically, the second portion 61b is attached to the first portion 61a together with the pulley 41 via the fastening member 81. The fastening member 81 is inserted through the through-hole of the pulley 41 and the through-hole of the second portion 61b and is screwed into the screw hole of the first portion 61a. The pulley 41 is attached to the second portion 61b via a fastening member 82. The fastening member 82 is inserted through the through-hole of the pulley 41 and is screwed into the screw hole of the second portion 61b. A bearing 83 that rotatably supports the second portion 61b is disposed in the second portion 61b. The bearing 83 is disposed between the second portion 61b and a support portion 92, which will be described later.

[0033] Furthermore, bearings 84 and 85 that rotatably support the first portion 61a are disposed in the first portion 61a. The bearing 84 is disposed approximately in the center of the first portion 61a. The bearing 84 is disposed between the first portion 61a and a first portion 63a (described later) of the rotating shaft portion 63. The bearing 85 is disposed on the base end side of the first portion 61a. The bearing 85 is disposed between the first portion 61a and the gear 66.

[0034] The rotating shaft 62 includes a first portion 62a disposed within the base 10, and a second portion 62b disposed within the second robot arm 22, connected to the pulley 51, and detachable from the first portion 62a. The base end of the first portion 62a is connected to the drive unit 32 via a gear 65. The base end of the second portion 62b is connected to the tip end of the first portion 62a. The pulley 51 is connected to the tip end of the second portion 62b. In addition, the length of the first portion 62a is greater than the length of the second portion 62b in the direction in which the rotating shaft 62 extends.

[0035] The second portion 62b is attached to the first portion 62a via a fastening member 86. Specifically, the second portion 62b is attached to the first portion 62a together with the pulley 51 via the fastening member 86. The fastening member 86 passes through a through hole of the pulley 51 and a through hole of the second portion 62b and is screwed into a threaded hole of the first portion 62a. The pulley 51 is attached to the second portion 62b via a fastening member 87. The fastening member 87 passes through a through hole of the pulley 51 and is screwed into a threaded hole of the second portion 62b. A bearing 88 that rotatably supports the second portion 62b is disposed in the second portion 62b. The bearing 88 is disposed between the second portion 62b and the pulley 41.

[0036] Furthermore, a bearing 89 and a bearing 90 that rotatably support the first portion 62a are disposed in the first portion 62a. The bearing 89 is disposed on the tip side of the first portion 62a. The bearing 89 is disposed between the first portion 62a and the first portion 62a of the rotating shaft portion 61. The bearing 90 is disposed on the base end side of the first portion 62a. The bearing 90 is disposed between the first portion 62a and the gear 64.

[0037] In this embodiment, the bearing 84 and the bearing 85 are provided with washers 84a and 85a, respectively. The washers 84a and 85a are elastically deformable in the extension direction of the rotating shaft 61 so as to allow the bearings 84 and 85 to move in the extension direction of the rotating shaft 61 when the second portion 61b is attached to the first portion 61a. In other words, the washers 84a and 85a elastically deform, thereby allowing the bearings 84 and 85 to move in the extension direction of the rotating shaft 61. The washers 84a and 85a are wave washers formed by forming wave-shaped deflections in a ring-shaped thin plate.

[0038] Furthermore, bearing 89 and bearing 90 are provided with washers 89a and 90a, respectively. Washers 89a and 90a are elastically deformable in the extension direction of rotating shaft 62 so that bearing 89 and bearing 90 can move in the extension direction of rotating shaft 62 when second portion 62b is attached to first portion 62a. In other words, washers 89a and 90a elastically deform, thereby allowing bearing 89 and bearing 90 to move in the extension direction of rotating shaft 62. Washers 89a and 90a are wave washers formed by forming wave-shaped deflections in a ring-shaped thin plate.

[0039] The rotary shaft 63 has a base end connected to the drive unit 33 via a gear 66, and a distal end connected to a proximal end lower portion of the first proximal link 21a. Specifically, the proximal end lower portion of the first proximal link 21a is attached to the distal end of the rotary shaft 63 via a fastening member 91. More specifically, the proximal end lower portion of the first proximal link 21a is attached to the distal end of the rotary shaft 63 via the fastening member 91, together with a support portion 92 that supports the bearing 83 from the side. The fastening member 91 is inserted through a through-hole in the flange portion of the support portion 92 and a through-hole in the proximal end lower portion of the first proximal link 21a, and is threaded into a threaded hole on the distal end of the rotary shaft 63. The support portion 92 is attached to the proximal end lower portion of the first proximal link 21a via a fastening member 93. The fastening member 93 is inserted through a through-hole in the flange portion of the support portion 92 and is screwed into a threaded hole in the lower base end portion of the first base-end link 21 a. A bearing 94 that rotatably supports the rotating shaft portion 63 is disposed slightly closer to the base end than the center of the rotating shaft portion 63.

[0040] Attachment and detachment of the robot arm 20 will be described with reference to FIG.

[0041] As shown in FIG. 4, when removing the robot arm 20 from the base unit 10, the fastening member 73 is removed and the cover unit 71 is removed. Then, when the cover unit 71 is removed, the inside of the robot arm 20 becomes accessible through the opening 72, and the fastening members 81, 86, and 91 are removed through the opening 72. Then, when the fastening members 81, 86, and 91 are removed, the entire robot arm 20 above the thick line 103 can be removed from the base unit 10. At this time, because a structure integrally including the pulley 51, the second portion 62b, the bearing 83, the pulley 41, the second portion 61b, the bearing 88, and the support unit 92 is attached to the lower base end of the first base end link 21a, the entire robot arm 20 can be removed while the state of the pulleys 41 and 51 is maintained. Furthermore, the entire robot arm 20 can be removed while maintaining the states of pulley 42, belt 43, pulley 44, pulley 45, belt 46, pulley 52, belt 53, pulley 54, pulley 55, and belt 56. Therefore, the entire robot arm 20 can be removed while maintaining the tension of belt 43, belt 46, belt 53, and belt 56.

[0042] When attaching the robot arm 20 to the base 10, the procedure for removing the robot arm 20 from the base 10 is reversed. That is, the robot arm 20 is prepared by arranging pulley 41, pulley 42, belt 43, pulley 44, pulley 45, belt 46, pulley 51, pulley 52, belt 53, pulley 54, pulley 55, and belt 56 inside the robot arm 20. The prepared robot arm 20 is then placed in a predetermined position relative to the base 10. Then, fastening members 81, 86, and 91 are attached through the opening 72. After fastening members 81, 86, and 91 are attached, the entire robot arm 20 above the thick line 103 is attached to the base 10. Then, fastening member 73 is attached, and the cover 71 is then attached. When attaching the robot arm 20 to the base unit 10, the entire robot arm 20 can be attached while maintaining the states of the pulley 41, pulley 42, belt 43, pulley 44, pulley 45, belt 46, pulley 51, pulley 52, belt 53, pulley 54, pulley 55, and belt 56. Therefore, the entire robot arm 20 can be attached while the tensions of the belts 43, 46, 53, and 56 are adjusted.

[0043] [Effects of the embodiment] In this embodiment, the following effects can be obtained.

[0044] In this embodiment, as described above, the robot arm 20 is configured such that the pulley 41, the pulley 42, the belt 43, the pulley 44, the pulley 45, the belt 46, the pulley 51, the pulley 52, the belt 53, the pulley 54, the pulley 55, and the belt 56 are detachable as a single unit. This allows the robot arm 20 to be installed with the tensions of the belts 43, 46, 53, and 56 adjusted when replacing the robot arm 20 due to a malfunction or when initially installing the robot arm 20. This eliminates the need to adjust the tensions of the belts 43, 46, 53, and 56 after installing the robot arm 20. As a result, when installing the robot arm 20, the installation time and effort can be reduced. In particular, when installing the robot arm 20 at a customer's site, the installation burden on the customer can be reduced.

[0045] In this embodiment, the substrate transfer robot 100 is placed in a vacuum environment as described above, which eliminates the need to adjust the tensions of the belts 43, 46, 53, and 56 after the robot arm 20 is attached to the substrate transfer robot 100 used in a vacuum environment.

[0046] In this embodiment, as described above, the internal space of the robot arm 20 is at atmospheric pressure. This allows devices such as sensors to be easily placed inside the robot arm 20 even if they are not designed to operate in a vacuum atmosphere.

[0047] Furthermore, in this embodiment, as described above, the robot arm 20 includes the detachable cover portion 71, and with the cover portion 71 removed, the fastening members 81, 86, and 91 for attaching the robot arm 20 to the base portion 10 are accessible. As a result, the fastening members 81, 86, and 91 can be accessed simply by removing the cover portion 71, and therefore the task of removing the fastening members 81, 86, and 91 to remove the robot arm 20 can be easily performed.

[0048] Furthermore, in this embodiment, as described above, cover portion 71 is removably attached to the upper portion of the base end portion of robot arm 20. This allows access to fastening members 81, 86, and 91, which are to be removed upward, from above, making it easy to remove fastening members 81, 86, and 91 and remove robot arm 20.

[0049] In this embodiment, as described above, the robot arm 20 includes the first robot arm 21 and the second robot arm 22, the drive unit includes the drive unit 31 that drives the first robot arm 21 and the drive unit 32 that drives the second robot arm 22, and the first robot arm 21 includes pulleys 41, 42, belts 43, 44, 45, and belts 46 that transmit the driving force of the drive unit 31, and the second robot arm 22 includes pulleys 41, 42, belts 43, 44, 45, and belts 46 that transmit the driving force of the drive unit 31. Pulleys 51, 52, belts 53, 54, 55, and 56 that transmit the driving force of drive unit 32 are arranged on first robot arm 21, and pulleys 41, 42, belts 43, 44, 45, and 46 can be attached and detached as a single unit to first robot arm 21, and pulleys 51, 52, belts 53, 54, 55, and 56 can be attached and detached as a single unit to second robot arm 22. As a result, belts 43 and 46 of first robot arm 21 and belts 53 and 56 of second robot arm 22 can be attached with their tensions adjusted, which effectively reduces the time and effort required for installation of robot arm 20.

[0050] Furthermore, in this embodiment, as described above, the second robot arm 22 includes the detachable cover portion 71, and with the cover portion 71 removed, the fastening members 81, 86, and 91 for attaching the first robot arm 21 and the second robot arm 22 to the base portion 10 are accessible. This makes it possible to remove both the first robot arm 21 and the second robot arm 22 simply by removing one cover portion 71, unlike when separate cover portions are provided for the first robot arm 21 and the second robot arm 22. As a result, the task of removing both the first robot arm 21 and the second robot arm 22 can be easily performed.

[0051] Furthermore, in this embodiment, as described above, the substrate transfer robot 100 includes a rotating shaft 61 that transmits the driving force of the drive unit 31, and the rotating shaft 61 includes a first portion 61a arranged within the base unit 10 and a second portion 61b that is arranged within the robot arm 20, connected to the pulley 41, and detachable from the first portion 61a. The substrate transfer robot 100 also includes a rotating shaft 62 that transmits the driving force of the drive unit 32, and the rotating shaft 62 includes a first portion 62a arranged within the base unit 10 and a second portion 62b that is arranged within the robot arm 20, connected to the pulley 51, and detachable from the first portion 62a. This allows the robot arm 20 to be attached and detached in a state where the pulleys 41 and 52 are connected to the second portions 61b and 62b that hold the pulleys 41 and 52, respectively, and therefore allows the robot arm 20 to be attached and detached in a state where the states of the pulleys 41, 42, belt 43, pulley 44, pulley 45, belt 46, pulley 51, pulley 52, belt 53, pulley 54, pulley 55, and belt 56 are maintained. As a result, a configuration can be easily realized in which the robot arm 20 is attached in a state in which the tensions of the belts 43, 46, 53, and 56 are adjusted.

[0052] In the present embodiment, as described above, the first portion 61a is provided with bearings 84 and 85 that rotatably support the first portion 61a, and the bearings 84 and 85 are provided with washers 84a and 85a that are elastically deformable in the extension direction of the rotating shaft portion 61 so as to allow the bearings 84 and 85 to move in the extension direction of the rotating shaft portion 61 when the second portion 61b is attached to the first portion 61a. The first portion 62a is provided with bearings 89 and 90 that rotatably support the first portion 62a, and the bearings 89 and 90 are provided with washers 89a and 90a that are elastically deformable in the extension direction of the rotating shaft portion 62 so as to allow the bearings 89 and 90 to move in the extension direction of the rotating shaft portion 62 when the second portion 62b is attached to the first portion 62a. When the robot arm 20 is replaced due to a malfunction, new second portions 61b and 62b are attached to the old first portions 61a and 62a. In this case, the lengths of the new second portions 61b and 62b may be slightly different from the lengths of the old second portions 61b and 62b. In this case, when attaching the new second portions 61b and 62b to the old first portions 61a and 62a, the new second portions 61b and 62b are attached with a slight strain equivalent to the difference in length between the old and new second portions 61b and 62b. This may place a load on the bearings 84, 85, 89, and 90 supporting the first portions 61a and 62a, causing malfunctions. Therefore, the washers 84a, 85a, 89a, and 90a described above are provided. As a result, when the robot arm 20 is replaced due to a malfunction, even if the lengths of the new second portions 61b and 62b are slightly different from the lengths of the old second portions 61b and 62b, the difference in length between the old and new second portions 61b and 62b can be absorbed by elastically deforming the washers 84a, 85a, 89a, and 90a when attaching the new second portions 61b and 62b to the old first portions 61a and 62a. As a result, loads on the bearings 84, 85, 89, and 90 that support the first portions 61a and 62a can be reduced, thereby reducing the occurrence of malfunctions.

[0053] In the present embodiment, as described above, the second portion 61b is attached to the first portion 61a via the fastening member 81. The second portion 62b is attached to the first portion 62a via the fastening member 86. This allows the second portions 61b and 62b to be attached to the first portions 61a and 62a simply and reliably.

[0054] In this embodiment, as described above, the first hand 23 and the second hand 24 that support the substrate 101 are attached to the tip of the robot arm 20. This allows the substrate 101 to be supported by the first hand 23 and the second hand 24, making it possible to easily transport the substrate 101.

[0055] [Variations] It should be noted that the embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present disclosure is defined by the claims, not by the description of the above-mentioned embodiments, and further includes all modifications (variations) within the meaning and scope equivalent to the claims.

[0056] For example, in the above embodiment, an example was shown in which the substrate transfer robot is a vacuum robot that is placed in a vacuum environment, but the present disclosure is not limited to this. In the present disclosure, the substrate transfer robot may be an atmospheric robot that is placed in an atmospheric environment.

[0057] In the above embodiment, the substrate transport robot includes two robot arms, a first robot arm and a second robot arm, but the present disclosure is not limited to this. In the present disclosure, the substrate transport robot may include only one robot arm.

[0058] Furthermore, in the above embodiment, an example has been shown in which the hand supports one substrate, but the present disclosure is not limited to this, and the hand may support two or more substrates.

[0059] Furthermore, in the above embodiment, an example in which a belt and a pulley are disposed within the robot arm has been described, but the present disclosure is not limited thereto. In the present disclosure, a gear may be disposed within the robot arm instead of the belt and pulley. In this case, the robot arm is detachable with the gear integrally attached. This allows the robot arm to be attached with the gear backlash adjusted, eliminating the need to adjust the gear backlash after attaching the robot arm. As a result, when attaching the robot arm, the work time and effort required after attaching the robot arm can be reduced. Furthermore, when the robot arm includes a first robot arm and a second robot arm, the first robot arm is provided with a first gear that transmits the driving force of a first drive unit that drives the first robot arm, and the second robot arm is provided with a second gear that transmits the driving force of a second drive unit that drives the second robot arm. The first robot arm is detachable with the first belt and first pulley or the first gear integrally attached, and the second robot arm is detachable with the second gear integrally attached. Although detailed configuration will be omitted, the robot arm may be configured to be detachable with the gear integrally formed using a configuration similar to that of the above embodiment. That is, a gear may be connected to the second portion of the rotating shaft instead of a pulley.

[0060] Furthermore, in the above embodiment, an example was shown in which the entire robot arm is detachable with the belt and pulley integrally attached, but the present disclosure is not limited to this. In the present disclosure, a portion of the robot arm may be detachable with the belt and pulley or gear integrally attached. For example, by adopting a configuration similar to that of the above embodiment for the elbow joint connecting the base link and the intermediate link, the intermediate link may be detachable from the base link with the belt and pulley or gear integrally attached. In this case, the base link is an example of a base-side member.

[0061] In the above embodiment, the internal space of the robot arm is at atmospheric pressure, but the present disclosure is not limited to this. In the present disclosure, the internal space of the robot arm may be in a vacuum state similar to the surrounding vacuum environment. Furthermore, if the internal space of the robot arm is in a vacuum state, the robot arm may not be provided with a cover.

[0062] In the above embodiment, the second portion of the rotating shaft is attached to the first portion via a fastening member. However, the present disclosure is not limited to this. In the present disclosure, the second portion of the rotating shaft may be attached to the first portion via a magnetic coupling in a non-contact manner. In a first modified example shown in FIG. 5, the rotating shaft 161 includes a first portion 161a disposed within the base 10 and a second portion 161b disposed within the robot arm 20, connected to the pulley 41, and detachable from the first portion 161a. The second portion 161b is attached to the first portion 161a in a non-contact manner via a magnetic coupling 161c. The magnetic coupling 161c includes a first magnet 161d formed on the first portion 161a and a second magnet 161e formed on the second portion 161b. The first magnet 161d and the second magnet 161e are arranged facing each other at a predetermined distance in a direction approximately perpendicular to the direction in which the rotating shaft portion 161 extends, and transmit the driving force of the driving portion 31 non-contactly by magnetic force.

[0063] In the first modified example, the rotating shaft 162 includes a first portion 162a disposed within the base 10 and a second portion 162b disposed within the robot arm 20, connected to the pulley 41, and detachable from the first portion 162a. The second portion 162b is attached to the first portion 162a via a magnetic coupling 162c in a non-contact manner. The magnetic coupling 162c has a first magnet 162d formed on the first portion 162a and a second magnet 162e formed on the second portion 162b. The first magnet 162d and the second magnet 162e are disposed to face each other at a predetermined distance in a direction substantially perpendicular to the direction in which the rotating shaft 162 extends, and transmit the driving force of the driving unit 32 by magnetic force in a non-contact manner. In the first modification, the fastening members 81 and 86 of the above embodiment do not need to be used to attach the second portions 161b and 162b to the first portions 161a and 162a, thereby reducing the number of parts. Furthermore, the fastening members 81 and 86 of the above embodiment do not need to be fastened to attach the second portions 161b and 162b to the first portions 161a and 162a, thereby simplifying the attachment of the second portions 161b and 162b to the first portions 161a and 162a. The first magnet 161d and the second magnet 161e may be arranged to face each other at a predetermined distance in a direction substantially perpendicular to the extension direction of the rotation shaft portion 162. The same applies to the first magnet 162d and the second magnet 162e.

[0064] Furthermore, in a second modified example shown in FIG. 6, a partition wall 267 is further provided in addition to the configuration of the first modified example. Unlike the above embodiment, when the internal space of the robot arm 20 is in a vacuum state, the partition wall 267 separates the internal space of the robot arm 20, which is in a vacuum state, from the internal space of the base unit 10, which is in an atmospheric pressure state, thereby maintaining the inside of the base unit 10 in an atmospheric pressure state. The partition wall 267 is disposed in a space where the driving force of the magnetic couplings 161c and 162c is transmitted without contact. Specifically, the partition wall 267 is disposed in the space between the first magnet 161d and the second magnet 161e and the space between the first magnet 162d and the second magnet 162e. When the magnetic couplings 161c and 162c are used, it is easy to secure a space for disposing the partition wall 267.

[0065] [Aspect] It will be appreciated by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0066] (Item 1) A base portion; a robot arm rotatably supported on the base portion; a drive unit disposed within the base unit and configured to drive the robot arm; a belt and pulley or gear for transmitting the driving force of the driving unit is disposed inside the robot arm; The substrate transport robot, wherein the belt and the pulley or the gear of the robot arm are detachable in an integrated state.

[0067] (Item 2) Item 1. The substrate transfer robot according to item 1, which is placed in a vacuum environment.

[0068] (Item 3) 3. The substrate transfer robot according to item 2, wherein the internal space of the robot arm is at atmospheric pressure.

[0069] (Item 4) the robot arm includes a removable cover portion for accessing the interior of the robot arm; Item 4. The substrate transport robot according to item 3, wherein a fastening member for attaching the robot arm is accessible when the cover portion is removed.

[0070] (Item 5) 5. The substrate transport robot according to item 4, wherein the cover portion is removably attached to the upper part of the base end portion of the robot arm.

[0071] (Item 6) the robotic arms include a first robotic arm and a second robotic arm; the drive unit includes a first drive unit that drives the first robot arm and a second drive unit that drives the second robot arm; a first belt and a first pulley, or a first gear, that transmits the driving force of the first driving unit are disposed within the first robot arm; a second belt and a second pulley, or a second gear, that transmits the driving force of the second driving unit is disposed within the second robot arm; the first robot arm is detachable with the first belt and the first pulley or the first gear integrally attached; 6. The substrate transport robot according to any one of items 1 to 5, wherein the second belt and the second pulley or the second gear of the second robot arm are detachable in an integrated state.

[0072] (Item 7) the second robot arm includes a removable cover portion for accessing the inside of the first robot arm and the inside of the second robot arm; 7. The substrate transfer robot according to item 6, wherein fastening members for attaching the first robot arm and the second robot arm are accessible when the cover portion is removed.

[0073] (Item 8) Further, a rotation shaft portion that transmits the driving force of the driving portion is provided, 8. The substrate transport robot according to any one of items 1 to 7, wherein the rotating shaft includes a first portion disposed within the base portion, and a second portion disposed within the robot arm, connected to the pulley or the gear, and detachable from the first portion.

[0074] (Item 9) a bearing that rotatably supports the first portion is disposed in the first portion; Item 9. The substrate transport robot according to item 8, wherein the bearing is provided with a washer that is elastically deformable in the direction in which the rotating shaft extends so as to allow the bearing to move in the direction in which the rotating shaft extends when the second part is attached to the first part.

[0075] (Item 10) 10. The substrate transfer robot according to item 8 or 9, wherein the second part is attached to the first part via a fastening member.

[0076] (Item 11) Item 9. The substrate transfer robot according to item 8, wherein the second part is attached to the first part in a non-contact manner via a magnetic coupling.

[0077] (Item 12) 12. The substrate transport robot according to any one of items 1 to 11, wherein a hand for supporting the substrate is attached to the tip of the robot arm. [Explanation of symbols]

[0078] 10 base portion (base end side member) 20 Robot Arm 21 First Robot Arm 22 Second Robot Arm 23 First Hand (Hand) 24 Second Hand (Hand) 31 Drive unit (first drive unit) 32 Drive unit (second drive unit) 41, 42, 44, 45 Pulleys (1st pulley) 43, 46 Belt (1st Belt) 51, 52, 54, 55 Pulleys (second pulley) 53, 56 Belt (Second Belt) 61, 62, 161, 162 Rotating shaft 61a, 62a, 161a, 162a Part 1 61b, 62b, 161b, 162b 2nd part 71 Cover 81, 86, 91 Fastening members 84, 85, 89, 90 bearings 84a, 85a, 89a, 90a washers 100 Substrate transport robot 101 Substrate 161c, 162c magnetic coupling

Claims

1. A base portion and a robot arm rotatably supported on the base portion; a drive unit disposed within the base unit and configured to drive the robot arm; a rotation shaft portion that transmits the driving force of the drive portion, a belt and pulley or gear for transmitting the driving force of the driving unit is disposed inside the robot arm; the rotating shaft includes a first portion disposed within the base portion, and a second portion disposed within the robot arm, connected to the pulley or the gear, and detachable from the first portion; The substrate transport robot, wherein the robot arm is detachable with the belt and the pulley or the gear integral with the second portion.

2. The substrate transfer robot according to claim 1 , which is placed in a vacuum environment.

3. The substrate transfer robot according to claim 2 , wherein the internal space of the robot arm is at atmospheric pressure.

4. the robot arm includes a removable cover portion; The substrate transfer robot according to claim 3 , wherein a fastening member for attaching the robot arm to a base-end member is accessible with the cover portion removed.

5. 5. The substrate transfer robot according to claim 4, wherein the cover portion is removably attached to an upper portion of a base end portion of the robot arm.

6. the robotic arms include a first robotic arm and a second robotic arm; the drive unit includes a first drive unit that drives the first robot arm and a second drive unit that drives the second robot arm, a first belt and a first pulley, or a first gear, that transmits a driving force of the first driving unit are disposed within the first robot arm; a second belt and a second pulley, or a second gear, that transmits the driving force of the second driving unit is disposed within the second robot arm; the first robot arm is detachable with the first belt and the first pulley or the first gear integrally attached; 2. The substrate transport robot according to claim 1, wherein the second belt and the second pulley or the second gear are detachable from the second robot arm in an integrated state.

7. the second robot arm includes a detachable cover portion; The substrate transfer robot according to claim 6 , wherein fastening members for attaching the first robot arm and the second robot arm to a base-end member are accessible with the cover portion removed.

8. A base portion, a robot arm rotatably supported on the base portion; a drive unit disposed within the base unit and configured to drive the robot arm; a rotation shaft portion that transmits the driving force of the drive portion, a belt and pulley or gear for transmitting the driving force of the driving unit is disposed inside the robot arm; the belt and the pulley or the gear are detachable from the robot arm in an integrated state; the rotating shaft includes a first portion disposed within the base portion, and a second portion disposed within the robot arm, connected to the pulley or the gear, and detachable from the first portion; a bearing that rotatably supports the first portion is disposed in the first portion; The bearing is provided with a washer that is elastically deformable in the direction in which the rotating shaft portion extends, so as to allow the bearing to move in the direction in which the rotating shaft portion extends when the second part is attached to the first part.

9. The substrate transfer robot according to claim 1 , wherein the second portion is attached to the first portion via a fastening member.

10. A base portion, a robot arm rotatably supported on the base portion; a drive unit disposed within the base unit and configured to drive the robot arm; a rotation shaft portion that transmits the driving force of the drive portion, a belt and pulley or gear for transmitting the driving force of the driving unit is disposed inside the robot arm; the belt and the pulley or the gear are detachable from the robot arm in an integrated state; the rotating shaft includes a first portion disposed within the base portion, and a second portion disposed within the robot arm, connected to the pulley or the gear, and detachable from the first portion; The substrate transfer robot, wherein the second part is attached to the first part in a non-contact manner via a magnetic coupling.

11. 2. The substrate transport robot according to claim 1, wherein a hand for supporting the substrate is attached to a tip of the robot arm.

Images