Detection System

Abstract

To provide a detection system which is more suitable for automation.SOLUTION: The detection system includes a manipulator and an end effector. The end effector includes: a detector for transmitting an ultrasonic wave and detecting a reflection wave; and a removal device including a tube and a head, the removal device removing a liquid medium supplied to a target object. The end effector is attached to the manipulator. The head has a first part attached to one end of the pipe and a second part having a second hole which extends to a first hole and the second hole having a larger diameter than that of the first hole.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] FIELD OF THE INVENTION Embodiments of the present invention relate to a detection system. [Background technology]

[0002] There is a system that transmits and receives ultrasonic waves through a liquid medium supplied to a target object. For this system, technology suitable for automation is required. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2019-090727 Summary of the Invention [Problem to be solved by the invention]

[0004] The problem to be solved by the present invention is to provide a detection system that is more suitable for automation. [Means for solving the problem]

[0005] A detection system according to an embodiment includes a manipulator and an end effector. The end effector includes a detector that transmits ultrasonic waves and detects reflected waves, and a removal device that includes a tube and a head and removes a liquid medium supplied to an object. The end effector is attached to the manipulator. The head includes a first portion attached to one end of the tube and a second portion having a second hole communicating with the first hole of the tube, the second hole having a diameter larger than the diameter of the first hole. [Brief explanation of the drawings]

[0006] [Figure 1] FIG. 1 is a schematic diagram showing a detection system according to an embodiment. [Figure 2]FIG. 2 is a side view showing an end effector of the detection system according to the embodiment. [Figure 3] FIG. 3 is a side view showing an end effector of the detection system according to the embodiment. [Figure 4] FIG. 4 is a side view showing a part of the inhaler. [Figure 5] FIG. 5 is a perspective view showing a part of the inhaler. [Figure 6] 6(a) and 6(b) are schematic diagrams showing the operation of the detection system according to the embodiment. [Figure 7] 7(a) and 7(b) are schematic diagrams showing the operation of the detection system according to the embodiment. [Figure 8] FIG. 8 is a side view showing a part of the inhaler. [Figure 9] FIG. 9 is a perspective view showing the tip of the detector. [Figure 10] 10(a) to 10(c) are schematic diagrams for explaining the detection results obtained by the detection device according to the embodiment. [Figure 11] FIG. 11 is a schematic diagram illustrating a three-dimensional detection result obtained by the exploration. [Figure 12] FIG. 12 is a schematic diagram showing a detector. [Figure 13] 13(a) to 13(c) are examples of images obtained during the inspection. [Figure 14] FIG. 14 is a schematic diagram showing the movement of the aspirator. [Figure 15] FIG. 15 is a flowchart showing the operation of the detection system according to the embodiment. [Figure 16] FIG. 16 is a schematic diagram showing a detection system according to a modified example of the embodiment. [Figure 17] FIG. 17 is a schematic diagram showing the hardware configuration. DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as those in reality. Even when the same part is shown, the dimensions and ratios may be different depending on the drawing. In the present specification and the drawings, elements similar to those already explained are given the same reference numerals and detailed explanations will be omitted as appropriate.

[0008] FIG. 1 is a schematic diagram showing a detection system according to an embodiment. The detection system 1 according to the embodiment includes a manipulator 100, an end effector 200, a control device 300, and a processing device 400.

[0009] In the illustrated example, the manipulator 100 is a vertical multi-joint type. The manipulator 100 may be a horizontal multi-joint type or a parallel link type. The manipulator 100 may include a combination of two or more types selected from the vertical multi-joint type, the horizontal multi-joint type, and the parallel link type. The manipulator 100 preferably has six or more degrees of freedom.

[0010] The end effector 200 is attached to the manipulator 100. The end effector 200 includes a dispenser 210 and a detector 220.

[0011] The dispenser 210 dispenses a liquid medium toward the surface of the object. The medium is used to enhance acoustic coupling between the detector 220 and the object. Any medium may be used as long as it is applicable to ultrasonic measurement. As an example, a couplant liquid, which is a viscous liquid (gel), is used as the medium. An example in which the medium is couplant liquid will be described below.

[0012] The detector 220 transmits ultrasonic waves toward the target via the couplant liquid supplied by the dispenser 210 and detects the reflected waves. Here, the series of operations of transmitting ultrasonic waves and detecting the reflected waves is referred to as "probing." Probing is performed with the tip of the detector 220 in contact with the target via the couplant liquid. Through probing, the detector 220 acquires intensity data indicating the intensity of the reflected waves.

[0013] The end effector 200 further includes a removal device for removing the couplant liquid supplied to the object. In the illustrated example, the removal device is an aspirator 230 that sucks the couplant liquid. After the inspection, the aspirator 230 removes the couplant liquid attached to the object by suction. For example, with the tip of the aspirator 230 in contact with the object, the couplant liquid is sucked by negative pressure.

[0014] The manipulator 100 is supported by a housing 150 installed on the floor. For example, a power supply unit, a pressure adjustment mechanism, and the like are provided inside the housing 150. The power supply unit supplies power to the electric actuators such as motors included in the manipulator 100, the end effector 200, and the like. The pressure adjustment mechanism includes a cylinder, a tank, and a compressor for adjusting the pressure of the fluid actuators, the dispenser 210, the aspirator 230, and the like included in the manipulator 100.

[0015] The control device 300 controls the operation of the manipulator 100 and the end effector 200. The control device 300 is a so-called robot controller. The control device 300 includes a control circuit, a servo control unit, etc. The control device 300 controls the operation of the manipulator 100 by controlling the motors of each axis in accordance with a pre-stored operation program. The control device 300 may be housed in the housing 150 or may be provided separately from the housing 150.

[0016] The processing device 400 receives intensity data obtained by the detection of the detector 220 from the detector 220. The processing device 400 uses the intensity data to calculate various data related to the object, such as the inclination of the end effector 200 relative to the object and numerical values ​​related to the structure of the object.

[0017] 2 and 3 are side views showing the end effector of the detection system according to the embodiment. 2 and 3, the end effector 200 includes a base 250. The base 250 is fixed to the tip of the manipulator 100. The dispenser 210, the detector 220, and the aspirator 230 are attached to the manipulator 100 via the base 250.

[0018] A pipe 211 is connected to the dispenser 210. Couplant solution is supplied to the dispenser 210 via the pipe 211. An actuator 215 is also attached to the dispenser 210. The actuator 215 moves the dispenser 210 relative to the base 250. In addition, the dispenser 210 is provided with a sensor 217 for controlling the amount of movement of the dispenser 210 by the actuator 215. The sensor 217 includes contactless switches 217a and 217b.

[0019] The detector 220 is slidable relative to the base 250. A spring 225 is attached between the detector 220 and the base 250. The spring 225 allows the detector 220 to move relative to the base 250. For example, when the detector 220 comes into contact with an object, the detector 220 slides toward the base 250. The spring 225 is compressed, and an elastic force of the spring 225 is applied to the detector 220. When the detector 220 moves away from the object, the elastic force of the spring 225 causes the detector 220 to slide in a direction away from the base 250. In addition, wiring 226 for transmitting signals between the detector 220 and the processing device 400, a sensor 227 for detecting the amount of movement of the detector 220, etc. are provided.

[0020] A cylinder 233 is attached to the aspirator 230. The cylinder 233 moves the aspirator 230 relative to the base 250. For example, the movement direction of the detector 220 and the aspirator 230 by the spring 225 and the cylinder 233 is parallel to the Z direction (first direction) connecting the tip of the manipulator 100 and the base 250. In addition, the aspirator 230 is provided with a pipe (not shown) for sending the aspirated couplant liquid to the housing 150, a sensor 237 for controlling the amount of movement of the aspirator 230 by the cylinder 233, and the like.

[0021] The actuator 215 and the cylinder 233 are air cylinders or fluid cylinders. The sensors 227 and 237 include, for example, light-shielding sensors or contactless switches.

[0022] Figure 4 is a side view showing a part of the aspirator. Figure 5 is a perspective view showing a part of the aspirator. A specific configuration of aspirator 230 will be described with reference to Figures 3 to 5. As shown in Figures 3 and 4, aspirator 230 includes tube 231, head 232, cylinder 233, and guide 234. In Figure 4, a portion of tube 231 provided inside head 232, cylinder 233, and guide 234 is shown by a dashed line. Also, holes in tube 231 and head 232 are shown by a dotted line. A portion of head 232 provided inside housing 233a is shown by a chain line.

[0023] The tube 231 and the guide 234 extend along the Z direction. In the illustrated example, the tube 231 and the guide 234 are cylindrical. The tube 231 has elasticity and is deformable. The tube 231 is provided inside the guide 234. The guide 234 has high rigidity and suppresses deformation of the tube 231.

[0024] The head 232 includes a first portion 232a and a second portion 232b. The first portion 232a is attached to one end of the pipe 231. The first portion 232a is provided around one end of the pipe 231 in an XY plane (first plane) perpendicular to the Z direction. The other end of the pipe 231 is connected to a pipe. The head 232 may further include a third portion 232c sandwiched between the pipe 231 and the housing 233a. The first portion 232a is located between the second portion 232b and the third portion 232c. For example, by removing the housing 233a from the third portion 232c, the head 232 can be released from its attachment and removed from the pipe 231. The head 232 can be replaced and another head 232 can be attached to the pipe 231.

[0025] As shown in FIG. 4, the tube 231 has a first hole H1. The second portion 232b is connected to the first portion 232a and has a second hole H2. The first hole H1 and the second hole H2 are connected to each other. The second hole H2 faces the space outside the aspirator 230. For example, when aspirating couplant liquid, the second portion 232b comes into contact with the object. The gas and couplant liquid are aspirated through the second hole H2 and the first hole H1.

[0026] The diameter D2 of the second hole H2 is larger than the diameter D1 of the first hole H1. For example, the outer diameter d1 of the first portion 232a and the outer diameter d of the tube 231 are each smaller than the outer diameter d2 of the second portion 232b. In the illustrated example, the outer diameter d1 gradually decreases toward the guide 234.

[0027] The head 232 is attached to the base 250 via a cylinder 233. The cylinder 233 is an air cylinder or a fluid cylinder. The cylinder 233 supports the head 232 so that the head 232 can slide in the Z direction. Specifically, the cylinder 233 includes a housing 233a and a support portion 233b. The housing 233a is fixed to the base 250. The support portion 233b is fixed to the head 232 and to a piston (not shown). Therefore, the support portion 233b is slidable in the Z direction relative to the housing 233a. A portion of the support portion 233b is located between the head 232 and the guide 234. The guide 234 is separated from the head 232 and the support portion 233b so as not to come into contact with these components when the head 232 and the support portion 233b slide. The guide 234 is fixed to the housing 233a of the cylinder 233.

[0028] If the head 232 is movable in the Z direction relative to the base 250, an elastic member such as a coil spring may be provided instead of the cylinder 233.

[0029] 6(a), 6(b), 7(a), and 7(b) are schematic diagrams showing the operation of the detection system according to the embodiment. First, the control device 300 positions the dispenser 210 to face the target O. The control device 300 moves the dispenser 210 toward the target O. As shown in FIG. 6(a), the control device 300 causes the dispenser 210 to dispense the couplant solution CP toward the target O.

[0030] After the couplant liquid CP is dispensed, the control device 300 operates the manipulator 100 to position the detector 220 facing the object O. The control device 300 moves the detector 220 toward the object O. As shown in FIG. 6(b), the tip of the detector 220 comes into contact with the object O via the couplant liquid CP. In this state, the control device 300 causes the detector 220 to perform an inspection. Intensity data obtained by the inspection is transmitted to the processing device 400.

[0031] As shown in FIG. 7(a), the control device 300 operates the manipulator 100 to face the portion with the couplant liquid CP. The control device 300 moves the aspirator 230 toward the object O. As shown in FIG. 7(b), the head 232 of the aspirator 230 comes into contact with the object O. In this state, the control device 300 causes the aspirator 230 to aspirate the couplant liquid CP. In the illustrated example, the positions where the dispenser 210, the detector 220, and the aspirator 230 face the object O are set in advance as teaching points.

[0032] The advantages of the embodiment will be described. During the inspection, couplant liquid CP is used to facilitate the propagation of ultrasonic waves between the detector 220 and the object O. It is desirable to remove the couplant liquid CP after the inspection. If the couplant liquid CP remains on the object O, the surface of the object O may be altered (e.g., rusted) or deteriorated. For example, one method is to manually wipe off the couplant liquid CP, but this requires manual work and hinders automation of the process.

[0033] To address this issue, in the detection system 1 according to the embodiment, the end effector 200 includes the aspirator 230. After the search, the couplant liquid CP can be aspirated using the aspirator 230. This eliminates the need for manual wiping off of the couplant liquid.

[0034] Furthermore, the detector 220 comes into contact with the couplant liquid CP as shown in FIG. 6(b). Therefore, the area on the surface of the object O where the couplant liquid CP is attached expands. The head 232 of the aspirator 230 includes a first portion 232a and a second portion 232b. The diameter D2 of the second hole H2 of the second portion 232b is larger than the diameter D1 of the first hole H1 of the tube 231. By aspirating the couplant liquid CP using the second portion 232b, which has a larger diameter, a wider area of ​​the couplant liquid CP can be removed. Furthermore, by making the diameter D1 smaller than the diameter D2, the first portion 232a and the tube 231 can be made smaller. For example, the outer diameter d1 of the first portion 232a and the outer diameter d of the tube 231 are smaller than the outer diameter d2 of the second portion 232b. By miniaturizing the aspirator 230, the aspirator 230 is less likely to interfere with the object O or other objects when the manipulator 100 operates.

[0035] According to the embodiment, a detection system 1 is provided that is suitable for automation and allows the aspirator 230 to be miniaturized.

[0036] It is preferable that the head 232 is elastic and deformable. By having elasticity, when the head 232 comes into contact with the object O, the head 232 can deform to follow the surface shape of the object O. This improves the adhesion of the head 232 to the object O, making it easier to suck in the couplant liquid CP.

[0037] The hardness of the head 232 may vary. For example, the second portion 232b has a hardness that conforms to the surface shape of the object O, and the hardness of the second portion 232b is greater than the hardness of the first portion 232a. This prevents the groove G from being blocked by deformation of the second portion 232b when the head 232 comes into contact with the surface of the object. This improves the stability of the suction operation (removal operation) by the aspirator 230. Furthermore, the hardness of the first portion 232a is less than the hardness of the second portion 232b. Since the hardness of the first portion 232a is relatively small, the first portion 232a is more likely to deform to conform to the surface shape and inclination of the object O when the head comes into contact with the object. This improves the adhesion of the head 232 to the object.

[0038] FIG. 8 is a side view showing a part of the inhaler. 8, a portion of the tube 231 provided inside the head 232 and the support portion 233b is indicated by dashed lines, and the first hole H1 of the tube 231, the second hole H2 of the head 232, and the groove G are indicated by dotted lines.

[0039] As shown in FIGS. 5 and 8 , the second portion 232b has a contact surface S that contacts the object O. When the head 232 is not in contact with the object O, the contact surface S is substantially parallel to the XY plane. A groove G is provided in the contact surface S. The groove G extends in a direction parallel to the XY plane and connects the second hole H2 to the space outside the head 232. During suction by the suction device 230, if the head 232 is adsorbed to the object O and air does not flow, the couplant liquid CP cannot be aspirated. When the groove G is provided, air flows from the space outside the head 232 to the second hole H2 through the groove G as shown by arrow A, as shown in FIG. 8 . This prevents the head 232 from adsorbing to the object O, making it easier to aspirate the couplant liquid CP.

[0040] In the illustrated example, the shape of the second hole H2 in the XY plane is circular. A pair of grooves G is formed along the tangential direction of the second hole H2. The number and shape of the grooves G can be changed as appropriate depending on the discharge rate of the couplant solution CP, the surface shape of the target object O, etc.

[0041] 3 and 4, it is preferable that head 232 is attached to base 250 via cylinder 233 or an elastic member and is movable relative to base 250. When aspirator 230 is pressed against object O, a reaction force from object O is applied to head 232. Aspirator 230 moves relative to base 250 in response to the reaction force, the reaction force applied to manipulator 100 or end effector 200 can be reduced and damage to manipulator 100 or end effector 200 can be suppressed.

[0042] When aspirating the couplant liquid CP, the posture of the aspirator 230 may be adjusted according to the intensity data obtained by the detector 220. Here, a method for detecting reflected waves by the detector 220, processing of the intensity data by the processing device 400, etc. will be described.

[0043] FIG. 9 is a perspective view showing the tip of the detector. 9, the detector 220 includes an element array 221 and a propagation portion 222. The element array 221 is provided inside the detector 220 and includes a plurality of detection elements 221a. The detection elements 221a are, for example, transducers that emit ultrasonic waves with a frequency of 1 MHz or more and 100 MHz or less. The plurality of detection elements 221a are arranged along a direction perpendicular to the Z direction. In the illustrated example, the plurality of detection elements 221a are arranged along the X direction and the Y direction that intersect with each other.

[0044] The propagation part 222 is provided at the tip of the detector 220. The propagation part 222 is capable of propagating ultrasonic waves. The propagation part 222 is solid and is made of, for example, resin. The propagation part 222 has sufficient hardness so that substantial deformation does not occur even when the detector 220 is in operation. This makes it possible to suppress damage to the element array 221.

[0045] In the example of FIG. 9, the detection target is a bonded structure 50. In the bonded structure 50, a metal member 51 (first member) and a metal member 52 (second member) are joined at a welded portion 53 by spot resistance welding. At the welded portion 53, a part of the metal member 51 and a part of the metal member 52 melt, mix, and solidify to form a solidified portion 54 (nugget). During the inspection, each detection element 221a transmits ultrasonic waves US toward the bonded structure 50 and receives reflected waves RW from the bonded structure 50. During the inspection, a couplant liquid CP is positioned between the bonded structure 50 and the propagation portion 222.

[0046] As a specific example, as shown in FIG. 9, one detection element 221a transmits ultrasonic waves US toward the welded portion 53. A portion of the ultrasonic waves US is reflected by the upper or lower surface of the bonded body 50. Each of the multiple detection elements 221a receives (detects) the reflected waves RW. Each detection element 221a sequentially transmits ultrasonic waves US, and the multiple detection elements 221a detect each reflected wave RW. Each detection element 221a outputs an electrical signal in response to the detection of the reflected wave. The magnitude of the electrical signal corresponds to the intensity of the reflected wave. Each detection element 221a transmits intensity data indicating the intensity of the detected reflected wave to the processing device 400. The processing device 400 performs various processes based on the intensity data.

[0047] FIG. 10 is a schematic diagram for explaining the detection result by the detection device according to the embodiment. 10(a), when ultrasonic waves are transmitted from the detector 220, part of the ultrasonic waves US is reflected by the upper surface 51a of the metal member 51 or the upper surface 53a of the welded portion 53. Another part of the ultrasonic waves US enters the bonded body 50 and is reflected by the lower surface 51b of the metal member 51 or the lower surface 53b of the welded portion 53.

[0048] The positions of the upper surface 51a, the lower surface 51b, the upper surface 53a, and the lower surface 53b in the Z direction are different from one another. That is, the distances in the Z direction between these surfaces and the detection element 221a are different from one another. When the detection element 221a detects the waves reflected from these surfaces, peaks of the intensity of the reflected waves are detected. By calculating the time from when the ultrasonic waves US are transmitted until each peak is detected, it is possible to determine from which surface the ultrasonic waves US are being reflected.

[0049] 10(b) and 10(c) are graphs illustrating the relationship between the time after transmission of ultrasonic waves US and the intensity of the reflected waves RW. Here, the intensity of the reflected waves RW is expressed as an absolute value. The graph in FIG. 10(b) illustrates the detection results of the reflected waves RW from the upper surface 51a and lower surface 51b of the metal member 51 and the lower surface of the metal member 52. The graph in FIG. 10(c) illustrates the detection results of the reflected waves RW from the upper surface 53a and lower surface 53b of the welded portion 53.

[0050] 10(b) and 10(c), peak Pe0 is based on the wave RW reflected from the boundary surface between the propagation portion 222 and another member. Peak Pe1 is based on the wave RW reflected from the upper surface 51a. Peak Pe2 is based on the wave RW reflected from the lower surface 51b. The times from the transmission of the ultrasonic wave US to the detection of peak Pe1 and peak Pe2 correspond to the positions of the upper surface 51a and lower surface 51b of the metal member 51 in the Z direction, respectively.

[0051] Similarly, peak Pe3 is based on the wave RW reflected from the upper surface 53a. Peak Pe4 is based on the wave RW reflected from the lower surface 53b. The times from the transmission of the ultrasonic waves US to the detection of peaks Pe3 and Pe4 correspond to the positions of the upper surface 53a and lower surface 53b of the weld 53 in the Z direction, respectively.

[0052] The intensity of the reflected wave may be expressed in any manner. For example, the reflected wave intensity output from the detection element 221a includes positive and negative values ​​depending on the phase. Various processes may be performed based on the reflected wave intensity including positive and negative values. The reflected wave intensity including positive and negative values ​​may be converted to an absolute value. The average value of the reflected wave intensity may be subtracted from the reflected wave intensity at each time. Alternatively, a weighted average value, weighted moving average value, or the like of the reflected wave intensity may be subtracted from the reflected wave intensity at each time. Even when the results of performing these processes on the reflected wave intensity are used, the various processes described herein can be performed.

[0053] FIG. 11 is a schematic diagram illustrating a three-dimensional detection result obtained by the exploration. In the scanning, as described above, each detecting element 221a sequentially transmits ultrasonic waves, and the reflected waves are detected by the multiple detecting elements 221a. In the specific example shown in FIG. 9, 8 × 8 = 64 detecting elements 221a are provided. In this case, the 64 detecting elements 221a sequentially transmit ultrasonic waves. Each detecting element 221a repeatedly detects the reflected wave 64 times. Each detecting element 221a outputs 64 detection results of the reflected wave intensity distribution in the Z direction. The intensity distributions of the 64 reflected waves output from one detecting element 221a are summed. The summed intensity distribution becomes the intensity distribution at the coordinates where one detecting element 221a is provided in one scanning. Similar processing is performed on the detection results from each of the 64 detecting elements 221a. As a result, the intensity distribution of the reflected wave in the Z direction is generated at each point in the XY plane. FIG. 11 shows an image of the three-dimensional intensity distribution. In FIG. 11, the areas with high brightness are areas where the reflected wave intensity of the ultrasonic waves is relatively high.

[0054] The intensity of each peak included in the reflected wave, the position of each peak in the Z direction, etc., change depending on the state of the object. Therefore, information about the object can be obtained from the intensity data. For example, the intensity data can be used to adjust the posture of the aspirator 230 as well as to inspect the internal structure of the object.

[0055] FIG. 12 is a schematic diagram showing a detector. The tilt corresponds to, for example, the direction Di1 of the detector 220 shown in Fig. 12. The direction Di1 is perpendicular to the arrangement direction of the multiple detection elements 221a. The tilt is represented by the angle θx about the X direction and the angle θy about the Y direction between the direction Di1 of the detector 220 and the normal direction Di2 of the weld 53.

[0056] 13(a) to 13(c) are examples of images obtained during the inspection. The method of calculating the slope will now be described. Fig. 13(a) is an image showing the intensity distribution of the reflected wave in the XY plane near the weld 53. Fig. 13(b) is an image showing the intensity distribution of the reflected wave in the YZ plane near the weld 53. Fig. 13(c) is an image showing the intensity distribution of the reflected wave in the XZ plane near the weld 53. In each of the images in Figs. 13(a) to 13(c), the brightness corresponds to the intensity of the reflected wave. In other words, the brighter the color of a pixel, the higher the intensity of the reflected wave at that point.

[0057] The angle θx is calculated based on the detection result in the YZ plane, as shown in FIG. 13(b). The angle θy is calculated based on the detection result in the XZ plane, as shown in FIG. 13(c). Specifically, the processing device 400 calculates the average of the three-dimensional brightness gradient. The processing device 400 uses the average of the gradient around the X direction as the angle θx. The processing device 400 uses the average of the gradient around the Y direction as the angle θy.

[0058] FIG. 14 is a schematic diagram showing the movement of the aspirator. The control device 300 performs tilt correction in accordance with the tilt calculation by the processing device 400. In tilt correction, the control device 300 operates the manipulator 100. As shown in FIG. 14 , the end effector 200 moves so as to reduce the tilt of the aspirator 230 with respect to the welded portion 53. In the detection system 1, the direction Di3 of the aspirator 230 is substantially parallel to the direction Di1 of the detector 220. The direction Di3 corresponds to the direction connecting the first portion 232a and the second portion 232b of the head 232, or the direction in which the tube 231 and the guide 234 extend. Therefore, by moving the end effector 200 so as to reduce the angles θx and θy, the tilt of the aspirator 230 with respect to the welded portion 53 can be reduced.

[0059] Alternatively, direction Di3 may intersect with direction Di1. In this case, the calculated angles θx and θy may be corrected using the inclination of direction Di3 with respect to direction Di1. Based on the corrected angles θx and θy, control device 300 moves end effector 200 so as to reduce the inclination of aspirator 230 with respect to welded portion 53.

[0060] The more perpendicular the aspirator 230 is to the surface of the bonded body 50, the easier it is for the head 232 to deform to conform to the surface shape of the bonded body 50. For example, by reducing the gap that occurs between the head 232 and the bonded body 50 during suction, it becomes easier to aspirate the couplant liquid CP. For this reason, it is preferable that suction by the aspirator 230 be performed after tilt correction.

[0061] The detector 220 may perform the search again after the tilt correction. The smaller the tilt, the easier it is for the detector 220 to detect reflected waves from the object. Therefore, performing the search after the tilt correction can obtain more accurate information about the object. In this case, the suction operation is performed after the search again. Note that the tilt may be further corrected after the search again. The suction operation is performed after the additional tilt correction.

[0062] The processing device 400 can inspect the object using the intensity data obtained by the inspection. For example, the processing device 400 determines whether peak Pe2 exists in the reflected wave intensity distribution in the Z direction at each point in the XY plane. As an example, the processing device 400 detects peaks in a predetermined range in the Z direction where peak Pe2 can be detected. As an example, a range Ra is set as the predetermined range in the intensity data shown in FIG. 10 . Peak Pe2 is included in range Ra. Range Ra is set based on peak Pe1. Alternatively, range Ra may be set in advance based on the thickness of the propagation portion 222, the thickness of the metal member 51, etc. The processing device 400 compares the intensity of the peak included in range Ra with a predetermined threshold. If the peak exceeds the threshold, the processing device 400 determines that the peak is peak Pe2. The point where peak Pe2 exists in the XY plane corresponds to the point where the lower surface 51b exists. In other words, the presence of peak Pe2 indicates that the metal members 51 and 52 are not joined at that point. The processing device 400 determines that the point where the peak Pe2 is detected is not joined.

[0063] The processing device 400 sequentially determines whether each point in the XY plane is welded. A set of points determined to be welded corresponds to the weld 53. For example, during the inspection, it is checked whether the weld 53 has been formed. For example, during the inspection, the processing device 400 calculates the diameter of the weld 53. The diameter is the length of the weld 53 in any direction parallel to the XY plane. During the inspection, the processing device 400 may calculate the thickness of the weld 53 or the depth of the upper surface 53a of the weld 53. The thickness of the weld 53 is the distance in the Z direction between the upper surface 53a and the lower surface 53b. The thickness of the weld 53 can be calculated based on the time difference TD1 between the peaks Pe3 and Pe4. The depth of the upper surface 53a is the distance in the Z direction between the upper surface 51a and the upper surface 53a. The depth of the upper surface 53a can be calculated based on the time difference TD2 between the peaks Pe1 and Pe3. During the inspection, the processing device 400 may compare at least one of the diameter of the welded portion 53, the thickness of the welded portion 53, and the depth of the upper surface 53a with a preset threshold value to determine whether the welding is good or bad.

[0064] For example, the inspection is performed in parallel with the suction operation after the search. Specifically, at least a part of the calculation processing related to the inspection is performed while the aspirator 230 is moving toward the object, while the aspirator 230 is aspirating the couplant liquid, etc. This allows the processing time for one object to be shortened.

[0065] FIG. 15 is a flowchart showing the operation of the detection system according to the embodiment. An overview of the operation of the detection system 1 according to one embodiment will be described with reference to FIG. 15. The control device 300 operates the manipulator 100 to move the end effector 200 (step S1). The control device 300 executes a discharge operation in which the discharger 210 discharges couplant solution onto the target (step S2). The control device 300 executes an inspection using the detector 220 (step S3). The processing device 400 calculates the tilt of the detector 220 relative to the target based on the intensity data obtained by the inspection (step S4). The processing device 400 compares the calculated tilt with a preset threshold (step S5). If the tilt is greater than the threshold, the control device 300 executes tilt correction, operating the manipulator 100 to reduce the tilt (step S6). This corrects the tilt of the detector 220 relative to the target, and also corrects the tilt of the aspirator 230 relative to the target. Step S3 is then executed again.

[0066] If the slope is equal to or less than the threshold value in step S5, the control device 300 causes the aspirator 230 to perform an aspirating operation of the couplant solution (step S7). The processing device 400 then performs an inspection (step S8) based on the intensity data obtained in the last inspection (step S3). After the aspirating operation, the control device 300 determines whether there are any other objects that have not been inspected (step S9). If there are any other objects, step S1 is performed again for those objects.

[0067] 15, the determination in step S9 is performed after steps S7 and S8. Step S9 may be performed regardless of whether step S8 has been completed, as long as it is performed after step S7 has been completed. For example, part of the calculation process in step S8 may be performed while the manipulator 100 is operating toward another object.

[0068] (Variation) FIG. 16 is a schematic diagram showing a detection system according to a modified example of the embodiment. In the detection system 1, one end effector 200 including a detector 220 and an aspirator 230 is attached to one manipulator 100. In contrast, the detection system 2 shown in Fig. 16 includes a manipulator 100a, a manipulator 100b, an end effector 200a, an end effector 200b, a control device 300a, and a control device 300b.

[0069] The configuration of the manipulator 100a and the configuration of the manipulator 100b can be the same as that of the manipulator 100. The end effector 200a is attached to the manipulator 100a. The end effector 200a includes a dispenser 210 and a detector 220. The control device 300a controls the manipulator 100a and the end effector 200a. The end effector 200b is attached to the manipulator 100b. The end effector 200b includes a suction device 230. The control device 300b controls the manipulator 100b and the end effector 200b.

[0070] The detection system 2 can perform the same operations as the detection system 1. For example, after the end effector 200a performs discharge and search, the end effector 200b performs a suction operation. The tilt of the end effector 200a may be corrected, and the tilt of the end effector 200b may also be corrected. This makes it easier for the aspirator 230 to aspirate the couplant solution CP.

[0071] For example, control device 300a operates manipulator 100a in accordance with the tilt calculation by processing device 400, and performs tilt correction for end effector 200a. This reduces the tilt of detector 220 with respect to welded portion 53. Control device 300b operates manipulator 100b in accordance with the tilt calculation by processing device 400, and performs tilt correction for end effector 200b. This reduces the tilt of suction device 230 with respect to welded portion 53.

[0072] According to the detection system 2, the attitude of the aspirator 230 can be controlled regardless of the attitudes of the dispenser 210 and the detector 220. For example, the attitude of the aspirator 230 can be controlled in parallel with the detection by the detector 220. This makes it possible to shorten the processing time for one object. On the other hand, according to the detection system 1, it is possible to avoid interference between manipulators. This makes it easier to teach the manipulator 100.

[0073] FIG. 17 is a schematic diagram showing the hardware configuration. 17 can be used as each of the control device 300, the control device 300a, the control device 300b, and the processing device 400. The computer 90 includes a CPU 91, a ROM 92, a RAM 93, a storage device 94, an input interface 95, an output interface 96, and a communication interface 97.

[0074] The ROM 92 stores a program that controls the operation of the computer 90. The ROM 92 stores a program necessary for causing the computer 90 to perform each of the above-described processes. The RAM 93 functions as a storage area in which the programs stored in the ROM 92 are expanded.

[0075] The CPU 91 includes a processing circuit. The CPU 91 uses a RAM 93 as a work memory and executes a program stored in at least one of a ROM 92 and a storage device 94. During program execution, the CPU 91 controls each component via a system bus 98 and executes various processes.

[0076] The storage device 94 stores data necessary for executing the program and data obtained by executing the program.

[0077] The input interface (I / F) 95 connects the computer 90 and the input device 95a. The input I / F 95 is, for example, a serial bus interface such as USB. The CPU 91 can read various data from the input device 95a via the input I / F 95.

[0078] The output interface (I / F) 96 connects the computer 90 and the output device 96a. The output I / F 96 is, for example, a video output interface such as a Digital Visual Interface (DVI) or a High-Definition Multimedia Interface (HPMI (registered trademark)). The CPU 91 can transmit data to the output device 96a via the output I / F 96 and cause the output device 96a to display an image.

[0079] The communication interface (I / F) 97 connects the computer 90 to a server 97a external to the computer 90. The communication I / F 97 is, for example, a network card such as a LAN card. The CPU 91 can read various data from the server 97a via the communication I / F 97.

[0080] The storage device 94 includes one or more selected from a hard disk drive (HDD) and a solid state drive (SSD). The input device 95a includes one or more selected from a mouse, a keyboard, a microphone (voice input), and a touchpad. The output device 96a includes one or more selected from a monitor, a projector, a printer, and a speaker. A device having the functions of both the input device 95a and the output device 96a, such as a touch panel, may also be used.

[0081] The various data processing operations described above may be recorded as a computer-executable program on a magnetic disk (such as a flexible disk or hard disk), an optical disk (such as a CD-ROM, CD-R, CD-RW, DVD-ROM, DVD±R, or DVD±RW), a semiconductor memory, or other non-transitory computer-readable storage medium.

[0082] For example, information recorded on a recording medium can be read by a computer (or an embedded system). The recording medium may have any recording format (storage format). For example, a computer reads a program from the recording medium and causes a CPU to execute instructions written in the program based on the program. The computer may acquire (or read) the program via a network.

[0083] According to the embodiment described above, a detection system suitable for automation is provided.

[0084] Although several embodiments of the present invention have been described above, these embodiments are presented by way of example only and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, modifications, etc. can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, as well as within the scope of the invention and its equivalents as set forth in the claims. Furthermore, the above-described embodiments can be implemented in combination with each other. [Explanation of symbols]

[0085] 1, 2: detection system, 50: joint, 51: metal member, 51a: upper surface, 51b: lower surface, 52: metal member, 53: welded portion, 53a: upper surface, 53b: lower surface, 54: solidified portion, 90: computer, 91: CPU, 92: ROM, 93: RAM, 94: storage device, 95: input interface, 95a: input device, 96: output interface, 96a: output device, 97: communication interface, 97a: server, 98: system bus, 100, 100a, 100b: manipulator, 150: housing, 200, 200a, 200b: end effector, 210: dispenser, 211: pipe, 215: actuator, 217: sensor, 220: detector, 221: element array, 221a: detection element, 222: propagation part, 225: spring, 226: wiring, 227: sensor, 230: aspirator, 231: tube, 232: head, 232a: first part, 232b: second part, 232c: third part, 233: cylinder, 233a: housing, 233b: support part, 234: guide, 237: sensor, 250: base, 300, 300a, 300b: control device, 400: processing device, CP: couplant liquid, D1, D2: diameter, Di1 to Di3: direction, G: groove, H1: first hole, H2: second hole, O: object, Pe0 to Pe4: peak, RW: reflected wave, Ra: range, S: contact surface, TD1: time difference, TD2: time difference, US: Ultrasonic, d, d1, d2: Outer diameter, θx, θy: Angle

Claims

1. A manipulator, a detector that transmits ultrasonic waves and detects reflected waves; a removal device including a tube and a head for removing the liquid medium supplied to the object; an end effector attached to the manipulator; Equipped with The head a first portion attached to one end of the tube; a second portion having a second hole communicating with the first hole of the tube, the second hole having a diameter larger than the diameter of the first hole; Including, the second hole is circular in a first plane perpendicular to a first direction connecting the first portion and the second portion; A detection system in which a groove is provided on the contact surface of the second part with the object, the groove connecting the second hole to the external space of the head and formed along a tangent direction of the second hole.

2. The detection system of claim 1 , wherein the tube and the head are elastic.

3. The detection system according to claim 1 or 2, wherein the second portion has a stiffness greater than the stiffness of the first portion.

4. The detection system according to any one of claims 1 to 3, wherein the outer diameter of the first portion is smaller than the outer diameter of the second portion.

5. The detection system of any one of claims 1 to 4, wherein the head is movable relative to the detector in the first direction.

6. the end effector includes a base fixed relative to the distal end of the manipulator; The detection system according to any one of claims 1 to 5, wherein the head is attached to the base via a cylinder or an elastic member.

7. The detection system according to any one of claims 1 to 6, wherein the removal device is an aspirator that aspirates the medium.

8. The detection system according to claim 1 , wherein the end effector further includes a dispenser that dispenses the medium onto the object.

9. a control device for controlling the manipulator and the end effector; The control device an inspection in which the detector transmits the ultrasonic waves and detects the reflected waves; a removal operation of removing the medium by the removal device after the search; The detection system according to any one of claims 1 to 8, which performs the following.

10. a processing device that calculates an inclination of the end effector relative to the object based on a detection result of the reflected wave by the exploration, the control device, after the search, performs tilt correction to operate the manipulator so as to reduce the calculated tilt; The detection system of claim 9 , wherein the removal operation is performed after the tilt correction.

11. The control device performs the search again between the tilt correction and the removal operation, The detection system according to claim 10 , wherein the processing device inspects the object based on the detection result of the reflected wave from the second search.

12. The detection system of claim 11 , wherein the processing device performs the inspection while the removal operation is being performed.

13. The medium is a couplant liquid. A detection system according to any one of claims 1 to 12.

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