Sensor amplifier circuit, sensor system, and method for calibrating a sensor amplifier circuit

Abstract

This sensor amplification circuit (100), which is for amplifying an output signal from a magnetic sensor circuit (50), comprises: a first operational amplifier 111 which amplifies the output signal from a magnetic sensor circuit (50); and a correction circuit (150) which corrects a non-linear distortion included in the output signal, wherein the magnetic sensor circuit (50) outputs a first signal of the magnitude corresponding to a magnetic field of a first range in a first magnetic field area to which the magnetic field of a first range is applied, and outputs a second signal of the magnitude corresponding to a magnetic field of a second range in a second magnetic field area to which the magnetic field of a second range, which is greater than the magnetic field of a first range, is applied. The correction circuit (150) is configured to switch from a first state where the nonlinear distortion included in the output signal is not corrected to a second state for correcting the nonlinear distortion included in the output signal, and the correction circuit (150) is switched to the second state from the first state when the output signal from the magnetic sensor circuit (50) is changed to the second signal from the first signal.

Description

[Technical Field]

[0001] The present disclosure relates to a sensor amplifier circuit, and more particularly to a sensor amplifier circuit for amplifying an output signal of a magnetic sensor circuit, a sensor system, and a method for calibrating the sensor amplifier circuit. [Background technology]

[0002] The magnetic elements that make up the magnetic sensor circuit have hysteresis and nonlinear characteristics, so the sensor amplifier circuit that amplifies the output signal of the magnetic sensor circuit is required to have the function of correcting the output signal of the magnetic sensor circuit and improving its linearity.

[0003] Japanese Patent Application Laid-Open Publication No. 2015-212634 (Patent Document 1) discloses a magnetic sensor configured to calculate magnetic flux density from the output voltage of a magnetic detection element, and to calculate and output a voltage that has a linear relationship with the calculated magnetic flux density.

[0004] Japanese Patent Application Publication No. 2018-115928 (Patent Document 2) discloses a signal correction method for a current sensor, which includes a step of correcting a newly acquired differential output voltage so that it is approximately linear with respect to the magnetic field to be measured using multiple calculated fitting coefficients, and obtaining a corrected output voltage. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2015-212634 [Patent Document 2] Japanese Patent Application Publication No. 2018-115928 Summary of the Invention [Problem to be solved by the invention]

[0006] Depending on the magnitude of the magnetic field input to the magnetic sensor circuit, the nonlinear distortion occurring in the output of the magnetic sensor circuit may be small. In such cases, the sensor amplifier circuit does not necessarily need to perform processing to correct the nonlinear distortion. However, conventional sensor amplifier circuits always perform processing to correct the nonlinear distortion in the output signal of the magnetic sensor circuit, regardless of whether or not it is necessary to correct the nonlinear distortion. This has resulted in problems such as a slow response speed of the sensor amplifier circuit.

[0007] The present disclosure has been made to solve such problems, and its purpose is to improve linearity while ensuring high responsiveness in a sensor amplifier circuit for amplifying the output of a magnetic sensor circuit. [Means for solving the problem]

[0008] The sensor amplifier circuit of the present disclosure is a sensor amplifier circuit for amplifying an output signal from a magnetic sensor circuit, and includes a first operational amplifier that amplifies the output signal from the magnetic sensor circuit and a correction circuit that corrects nonlinear distortion contained in the output signal, wherein the magnetic sensor circuit outputs a first signal having a magnitude corresponding to a magnetic field of a first range in a first magnetic field region where a magnetic field of a first range is applied, and outputs a second signal having a magnitude corresponding to a magnetic field of a second range in a second magnetic field region where a magnetic field of a second range larger than the magnetic field of the first range is applied, and the correction circuit is configured to switch from a first state that does not correct the nonlinear distortion contained in the output signal to a second state that corrects the nonlinear distortion contained in the output signal, and the correction circuit switches from the first state to the second state when the output signal from the magnetic sensor circuit changes from the first signal to the second signal. [Effects of the Invention]

[0009] The sensor amplifier circuit according to the present disclosure can improve linearity while ensuring high responsiveness. [Brief explanation of the drawings]

[0010] [Figure 1]1 is a schematic configuration diagram of a sensor system using a sensor amplifier circuit according to an embodiment of the present invention. [Figure 2] 10 is a diagram showing the relationship between a waveform indicating the characteristics of the output voltage of the magnetic sensor circuit with respect to the magnetic field and a first approximate straight line. FIG. [Figure 3] 10 is a diagram for explaining the relationship between magnetic field regions (high magnetic field regions and low magnetic field regions) and the presence or absence of linearity correction. FIG. [Figure 4] FIG. 10 is a diagram showing the waveform of a linearity error. [Figure 5] 10 is a diagram showing the relationship between a waveform indicating the characteristics of an output voltage of a magnetic sensor circuit with respect to a magnetic field, and a first approximate line and a second approximate line. FIG. [Figure 6] FIG. 2 is a block diagram showing the configuration of a control device used to calibrate a sensor amplifier circuit. [Figure 7] 10 is a flowchart showing a procedure for measuring an output voltage from a magnetic sensor circuit in response to a magnetic field. [Figure 8] 10 is a flowchart showing a procedure for determining various setting values ​​of a sensor amplifier circuit. [Figure 9] 10 is a flowchart showing a procedure for determining various setting values ​​of a sensor amplifier circuit. [Figure 10] FIG. 10 is a schematic configuration diagram of a sensor system according to a modified example. DETAILED DESCRIPTION OF THE INVENTION

[0011] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. In the drawings, the same or corresponding parts are designated by the same reference numerals, and description thereof will not be repeated.

[0012] (Sensor system overview) 1 is a schematic configuration diagram of a sensor system 10 using a sensor amplifier circuit 100 according to the present embodiment. Referring to FIG. 1, the sensor system 10 includes a magnetic sensor circuit 50 and the sensor amplifier circuit 100.

[0013] The magnetic sensor circuit 50 has a configuration in which four sensor elements 51 to 54 are bridge-connected. In the example of FIG. 1, each of the sensor elements 51 to 54 is a tunnel magnetic resistor. Anti( The sensor elements 51 to 54 are Tunneling Magneto-Resistive (TMR) elements, which are magnetic sensors whose resistance value changes in response to the detected magnetic field. By using TMR elements as the sensor elements 51 to 54, it is possible to provide the sensor system 10 with a highly sensitive and highly accurate sensing function.

[0014] Note that, as long as the resistance value of the element changes depending on the physical quantity to be detected, other resistance elements may be used as the sensor elements 51 to 54. For example, instead of the TMR element, a giant magnetoresistive (GMR) element or an anisotropic magnetoresistive (AMR) element may be used.

[0015] Sensor elements 51 and 52 are connected in series between a pair of power supply terminals 5a and 5b. Sensor elements 53 and 54 are also connected in series between the pair of power supply terminals 5a and 5b. The magnetic sensor circuit 50 operates when a predetermined voltage is applied to the power supply terminals 5a and 5b, and generates a voltage difference between a pair of signal output terminals 5c and 5d in response to the detected magnetic field. The signal output terminal 5c is a connection node between sensor element 51 and sensor element 52, and the signal output terminal 5d is a connection node between sensor element 53 and sensor element 54.

[0016] The signal output terminals 5c and 5d are connected to the input terminals T1 and T2, respectively, of the sensor amplifier circuit 100. That is, the differential voltage between the pair of output signals of the magnetic sensor circuit 50 is provided as an input to the sensor amplifier circuit 100.

[0017] In addition to input terminals T1 and T2, the sensor amplifier circuit 100 includes an output terminal T3, operational amplifiers 111 and 112, a correction circuit 150, a readout circuit 120, and a non-volatile memory 130. The readout circuit 120 is configured, for example, by an analog circuit. The non-volatile memory 130 is configured, for example, by a read only memory (ROM) or a flash memory.

[0018] The non-inverting input terminal and the inverting input terminal of the operational amplifier 111 are connected to the input terminals T1 and T2, respectively. A pair of output signals from the magnetic sensor circuit 50 are input to the non-inverting input terminal and the inverting input terminal of the operational amplifier 111. A voltage V1 for offset adjustment is applied to the operational amplifier 111. The output terminal of the operational amplifier 111 is connected to the inverting input terminal of the operational amplifier 112. Non-inverting An offset adjustment voltage V2 is applied to the input terminal of the operational amplifier 112. The output terminal of the operational amplifier 112 is connected to the output terminal T3 of the sensor amplifier circuit 100. A resistor Ry for determining the reference amplification factor of the operational amplifier 112 is connected between the inverting input terminal and the output terminal of the operational amplifier 112.

[0019] The output terminal of the operational amplifier 111 is connected to a node N1. The inverting input terminal of the operational amplifier 112 is connected to a node N2. A resistor Rx is connected between the nodes N1 and N2.

[0020] The correction circuit 150 includes comparators 161 to 16n, resistors R1 to Rn, and switches SW1 to SWn.

[0021] The inverting input terminals of the comparators 161 to 16n are connected to the output terminal of the operational amplifier 111 at a node N1. Reference voltages Vr1 to Vrn are applied to the non-inverting input terminals of the comparators 161 to 16n, respectively. The switches SW1 to SWn are turned on and off according to the on and off states of the outputs of the comparators 161 to 16n, respectively.

[0022] Switches SW1 to SWn are respectively arranged between node N2 and node N3. Resistors R1 to Rn are respectively connected between switches SW1 to SWn and node N2.

[0023] The operational amplifier 111 amplifies the output signal from the magnetic sensor circuit 50 using a preset gain (amplification factor). The operational amplifier 111 performs offset adjustment on the output signal from the magnetic sensor circuit 50 using an offset setting value determined based on the voltage V1. The output signal from the operational amplifier 111 is output from the output terminal T3 via the operational amplifier 112.

[0024] The sensor amplification circuit 100 corrects the non - linear distortion of the signal using the correction circuit 150. This non - linear distortion is caused by the output characteristics of the magnetic sensor circuit 50. The output signal from the operational amplifier 111 is affected by the non - linear distortion caused by the output characteristics of the magnetic sensor circuit 50, and thus has non - linear distortion. The correction circuit 150 corrects such non - linear distortion. Hereinafter, correcting the non - linear distortion is also referred to as "linearity correction". The correction circuit 150 switches between a first state where it does not perform linearity correction and a second state where it performs linearity correction according to the magnitude of the output signal from the operational amplifier 111.

[0025] Regarding the values of the reference voltages Vr1 to Vrn used in the correction circuit 150, the relationship Vr1 < Vr2 <... < Vrn holds. The non - volatile memory 130 stores the values of the reference voltages Vr1 to Vrn separately for the corresponding comparators 161 to 16n. The values of the reference voltages Vr1 to Vrn stored in the non - volatile memory 130 are an example of various setting values. The read - out circuit 120 reads the values of the reference voltages Vr1 to Vrn from the non - volatile memory 130 and sets the read - out values to the corresponding comparators 161 to 16n.

[0026] When the output of the operational amplifier 111 exceeds the reference voltage Vr1, the comparator 161 switches the switch SW1 from off to on. This forms a first negative feedback circuit that returns from the output terminal of the operational amplifier 112 to the input terminal of the operational amplifier 112 via the switch SW1 and the resistor R1. The correction circuit 150 corrects the output signal of the operational amplifier 111 using a gain determined by the resistor R1. As a result, nonlinear distortion in the output signal of the magnetic sensor circuit 50 is corrected.

[0027] When the output of the operational amplifier 111 exceeds the reference voltage Vr2, the comparator 162 switches the switch SW2 from off to on. This forms a loop of a second negative feedback circuit that returns from the output terminal of the operational amplifier 112 to the input terminal of the operational amplifier 112 via the switch SW2 and the resistor R2, in addition to the first negative feedback circuit. This also switches the magnitude of the gain of the correction circuit 150 used for linearity correction.

[0028] When the output of the operational amplifier 111 exceeds the reference voltage Vrn, the comparator 16n switches the switch SWn from off to on. As a result, in addition to the first negative feedback circuit, the second negative feedback circuit, ..., the output terminal of the operational amplifier 112 is connected to the switch SWn and the resistor R n This forms a loop of the nth negative feedback circuit that returns to the input terminal of the operational amplifier 112 via the nth negative feedback circuit 150. This also switches the magnitude of the gain of the correction circuit 150 used for linearity correction.

[0029] Therefore, as the output signal of operational amplifier 111 increases, the feedback signal returning from the output terminal of operational amplifier 112 to the input terminal via the negative feedback circuit of operational amplifier 112 increases, and the amount of correction used for linearity correction increases.

[0030] In this way, by setting the reference voltages Vr1 to Vrn to different values, it is possible to set a plurality of correction points in the correction circuit 150. The more correction points there are, the more finely the linearity can be adjusted. By finely adjusting the linearity, it is possible to bring the output of the operational amplifier 111 closer to the target characteristics.

[0031] When the output of operational amplifier 111 is equal to or lower than reference voltage Vr1, all outputs of comparators 161 to 16n are turned off. At this time, the negative feedback circuit of operational amplifier 112 is opened, and correction by correction circuit 150 is not performed.

[0032] 1 shows an example of a correction circuit 150 configured by connecting the following components in parallel: "switch SW1, resistor R1," "switch SW2, resistor R2," ... "switch SWn, resistor Rn." However, the correction circuit 150 may also be configured such that these components are connected in series and a signal for turning on and off the switch is input to the switch of each component.

[0033] (linearity correction) Next, linearity correction according to this embodiment will be described with reference to Fig. 2 and Fig. 3. Fig. 2 is a diagram showing the relationship between a waveform W1 indicating the characteristics of the output voltage of the magnetic sensor circuit 50 with respect to a magnetic field and a first approximate straight line L1. Fig. 3 is a diagram for explaining the relationship between magnetic field regions (high magnetic field region and low magnetic field region) and whether or not linearity correction is performed.

[0034] As shown by the waveform W1 in FIG. 2, the output of the magnetic sensor circuit 50 has hysteresis and nonlinear characteristics. This waveform W1 is obtained by measuring the output voltage of the magnetic sensor circuit 50 while changing the magnitude of the magnetic field. The first approximate straight line L1 is a straight line that shows the ideal output characteristics of the magnetic sensor circuit 50 with respect to the magnetic field. By using the measurement results of the output voltage of the magnetic sensor circuit 50 with respect to the magnetic field, a linear function for drawing such an ideal straight line can be calculated. In particular, the first approximate straight line L1 is derived using all measurement results in the magnetic field range (-N to +N) (mT: millitesla).

[0035] If the output from the magnetic sensor circuit 50 is corrected based on the first approximate straight line L1, the error between the first approximate straight line L1 and the output of the magnetic sensor circuit 50 will be large in the portion of the waveform W1 indicated by the circle F1. If this problem is solved by not using the curved portion where the error is large, the dynamic range of the magnetic sensor circuit 50 that can be used as a sensor will be narrowed.

[0036] Generally, there may be a magnetic field range in which the error between the output signal from the magnetic sensor circuit and the approximation line is small. For example, in a low magnetic field range where the absolute value of the magnetic field is within a certain range, the error is small. If the output signal is subjected to linearity correction, including in such a low magnetic field range, not only will the response speed of the sensor amplifier circuit decrease, but the error will actually increase.

[0037] Therefore, as shown in Figure 3, the sensor amplifier circuit 100 is configured so that, within the magnetic field range -N to +N that is the sensing target of the magnetic sensor circuit 50, the correction circuit 150 does not operate in the magnetic field range of the low magnetic field region (-B < magnetic field < +A), and the correction circuit 150 operates in the magnetic field range of the high magnetic field region (-N < magnetic field < -B, +A < magnetic field < +N).

[0038] As shown in FIG. 3, in the high magnetic field region, the nonlinearity of the waveform W1 becomes stronger due to the influence of the characteristics of the magnetic sensor circuit 50. In other words, in the high magnetic field region, the linearity of the magnetic sensor circuit 50 deteriorates. The gain setting value and offset setting value of the operational amplifier 111 are calculated based on the second approximate line L2. The second approximate line L2 is derived using the measurement results of the output voltage of the magnetic sensor circuit 50 in the low magnetic field region. Therefore, in the low magnetic field region, the error between the output of the magnetic sensor circuit 50 and the output of the operational amplifier 111 becomes small, but in the high magnetic field region, the error between the output of the magnetic sensor circuit 50 and the output of the operational amplifier 111 becomes large.

[0039] Therefore, in the high magnetic field region, the sensor amplifier circuit 100 corrects the linearity by operating the correction circuit 150. As a result, the sensor amplifier circuit 100 makes the output characteristics of the operational amplifier 111 approach the second approximate straight line L2, which is an ideal straight line.

[0040] 1 and 3, the linearity correction of the sensor amplifier circuit 100 will be further described. Note that, to obtain the waveform W1 as shown in FIGS. 2 and 3, the output voltage of the magnetic sensor circuit 50 may be measured, or the output of the sensor system 10 including the magnetic sensor circuit 50 and the sensor amplifier circuit 100 ("OUT" of the output terminal T3) may be measured.

[0041] The operational amplifier 111 performs gain correction and offset adjustment so that the output signal from the magnetic sensor circuit 50 follows the second approximate straight line L2. A voltage corresponding to the boundary value between the magnetic field range of the low magnetic field region and the magnetic field range of the high magnetic field region is applied to the comparator 161 as a reference voltage Vr1. In the low magnetic field region, the switches SW1 to SWn of the correction circuit 150 are turned off. Therefore, in the low magnetic field region, the output signal of the operational amplifier 111 is not corrected by the correction circuit 150 and is input to the output terminal T3 via the operational amplifier 112.

[0042] In the high magnetic field region, at least one of the switches SW1 to SWn of the correction circuit 150 is turned on. Therefore, in the high magnetic field region, the output signal of the operational amplifier 111 is corrected by the correction circuit 150 and then input to the output terminal T3 via the operational amplifier 112.

[0043] In the correction circuit 150, each time the output voltage of the operational amplifier 111 reaches a predetermined reference voltage set in each of the comparators 161 to 16n, each of the switches SW1 to SWn is turned on. This applies an offset in a direction that decreases the output voltage of the operational amplifier 111. As a result, in the high magnetic field region, the output voltage of the operational amplifier 111 changes stepwise at each correction point so as to follow an ideal linear output (second approximate straight line L2). In FIG. 3, the zigzag line in the high magnetic field region represents how the output voltage of the operational amplifier 111 changes stepwise at each correction point.

[0044] In this way, when the output voltage of the operational amplifier 111 is a voltage corresponding to a low magnetic field region, the correction circuit 150 turns off all of the switches SW1 to SWn and does not perform linearity correction. At this time, the sensor amplifier circuit 100 simply amplifies the output voltage from the magnetic sensor circuit 50 in the operational amplifier 111 with a gain that matches the full scale required for the sensor. When the output of the operational amplifier 111 is a voltage corresponding to a high magnetic field region, the correction circuit 150 automatically switches the magnitude of the gain for linearity correction. This automatically adjusts the gain at each correction point.

[0045] To improve the sensor detection accuracy through linearity correction, it is necessary to provide more correction points and perform more detailed linearity correction. However, in this case, it is necessary to increase the number of comparators 161 to 16n. Increasing the number of comparators 161 to 16n increases the circuit size, which may hinder miniaturization of the entire device. Therefore, the number of comparators 161 to 16n is appropriately selected taking into consideration the required sensor detection accuracy and the allowable size of the sensor amplifier circuit 100.

[0046] (Calibration Procedure) Next, a calibration procedure for the sensor amplifier circuit 100 will be described with reference to FIGS. 4 and 5. More specifically, low The procedure for determining the magnetic field range of the magnetic field region, the magnetic field range of the high magnetic field region, and the second approximate line L2 will be described. Fig. 4 is a diagram showing a waveform W2 of the linearity error. Fig. 5 is a diagram showing the relationship between a waveform W1 showing the characteristics of the output voltage of the magnetic sensor circuit 50 with respect to the magnetic field, the first approximate line L1, and the second approximate line L2.

[0047] The linearity error (%) is calculated by calculating the difference between the first approximate line L1 and the waveform W1 shown in Figure 2. The waveform W2 (see Figure 4) shows the relationship between the magnetic field and the linearity error calculated in this way. As shown in Figure 4, the maximum and minimum values ​​of the linearity error are identified from the linearity error waveform W2.

[0048] The magnetic field corresponding to the minimum value of the linearity error is set as the boundary magnetic field +A, and the magnetic field corresponding to the maximum value of the linearity error is set as the boundary magnetic field -B. At this time, the magnetic field range of the low magnetic field region is set as "-B ≦ magnetic field ≦ +A", and the magnetic field range of the high magnetic field region is set as "-N ≦ magnetic field < -B, +A < magnetic field ≦ +N". In this way, the magnetic field ranges of the low magnetic field region and the high magnetic field region are set based on the first approximate straight line L1.

[0049] Depending on the type of magnetic sensor circuit, the waveform of the linearity error may be symmetrical with respect to the X-axis relative to the waveform W2. This embodiment can also be applied to such magnetic sensor circuits.

[0050] 5 is derived as an ideal straight line of the sensor output signal relative to the magnetic field, similar to the first approximate straight line L1. As already explained, the first approximate straight line L1 is derived using all measurement results in the magnetic field range (-N to +N) (mT). In contrast, the second approximate straight line L2 is derived using only measurement results in the low magnetic field region (-B to +A) (mT).

[0051] Therefore, the second approximate line L2 more accurately approximates the output characteristics of the magnetic sensor circuit 50 in the low magnetic field region than the first approximate line L1. As also shown in Fig. 5, the second approximate line L2 more accurately reflects the output characteristics of the magnetic sensor circuit 50 in the low magnetic field region than the first approximate line L1.

[0052] Therefore, the accuracy of the output signal of the operational amplifier 111 in the low magnetic field region can be improved by designing the gain correction value and offset adjustment value of the operational amplifier 111 based on the second approximate straight line L2 rather than designing the gain correction value and offset adjustment value of the operational amplifier 111 based on the first approximate straight line L1. For this reason, the gain correction value and offset adjustment value of the operational amplifier 111 are designed based on the second approximate straight line L2.

[0053] Therefore, the sensor amplifier circuit 100 has high accuracy of the output signal of the operational amplifier 111 in the low magnetic field region. Therefore, there is no need to operate the correction circuit 150 in the low magnetic field region. If the correction circuit 150 were to operate in the low magnetic field region, unnecessary linearity correction would be added, which could actually reduce the accuracy of the output signal of the operational amplifier 111. In fact, not operating the correction circuit 150 in the low magnetic field region has the advantage of increasing the response speed of the sensor amplifier circuit 100 in the low magnetic field region. For this reason, the sensor amplifier circuit 100 does not operate the correction circuit 150 in the low magnetic field region.

[0054] In contrast, the sensor amplifier circuit 100 operates the correction circuit 150 in the high magnetic field region. As a result, as already explained with reference to FIG. 3, the output voltage of the operational amplifier 111 changes stepwise at each correction point so as to follow an ideal linear output (second approximate straight line L2). Therefore, the sensor amplifier circuit 100 according to this embodiment can improve linearity while maintaining high responsiveness.

[0055] (Control device) FIG. 6 is a block diagram showing the configuration of a control device 500 used to calibrate the sensor amplifier circuit 100. As shown in FIG.

[0056] The control device 500 is typically configured by a computer (computing device). The control device 500 includes a processor 501, a RAM (Random Access Memory) 502, a ROM (Read Only Memory) 503, and a communication interface 504. The control device 500 uses the RAM as a working area and executes various processes according to programs stored in the ROM 503.

[0057] The control device 500 is connected to the nonvolatile memory 130 via an interface 504. The control device 500 is connected to the measurement device 400 via an interface 504.

[0058] The control device 500 executes various processes for calibrating the sensor amplifier circuit 100. First, the control device 500 controls the measurement device 400 to measure the output voltage of the magnetic sensor circuit 50 while changing the magnetic field (measurement process). Second, the control device 500 determines various setting values ​​for the sensor amplifier circuit 100 using the measurement results (determination process). Third, the control device 500 writes the determined setting values ​​into the non-volatile memory 130 (write process). The control device 500 executes at least the first to third processes described above.

[0059] Next, a calibration procedure for the sensor amplifier circuit 100, which is implemented by the control device 500, will be described with reference to a flowchart.

[0060] FIG. 7 is a flowchart showing the procedure for measuring the output voltage from the magnetic sensor circuit 50 in response to a magnetic field. By using the measurement results based on this flowchart, the control device 500 can obtain the waveform W1 shown in FIG. 2. The processing based on this flowchart is executed by the control device 500. The processing will be described below according to the flowchart. Note that here, an example will be described in which the output voltage of the magnetic sensor circuit 50 is measured to obtain the waveform W1. However, instead of measuring the output voltage of the magnetic sensor circuit 50 to obtain the waveform W1, the output of the sensor system 10 including the magnetic sensor circuit 50 and the sensor amplifier circuit 100 ("OUT" of the output terminal T3) may be measured.

[0061] First, the control device 500 controls the measuring device 400 so that a +N (mT) magnetic field is applied to the magnetic sensor circuit 50 (step S1). Next, the control device 500 causes the measuring device 400 to measure the output voltage of the magnetic sensor circuit 50 (step S2). The measuring device 400 measures the output voltage of the magnetic sensor circuit 50 in response to the +N (mT) magnetic field. The measuring device 400 transmits the measurement results to the control device 500. The control device 500 stores the measurement results. Similarly, the measuring device 400 transmits the measurement results to the control device 500 each time a measurement is taken, and the control device 500 stores the measurement results.

[0062] Next, the control device 500 controls the measuring device 400 so that the magnetic field applied to the magnetic sensor circuit 50 decreases from +N(mT) to M(mT) (step S 3 ) where M(mT) is the magnitude of the change in the magnetic field when measuring the output voltage of the magnetic sensor circuit 50 while changing the magnetic field. The measuring device 400, under the control of the control device 500, measures the output voltage of the magnetic sensor circuit 50 while decreasing the magnetic field from +N(mT) in increments of M(mT).

[0063] Next, the control device 500 determines whether the magnetic field applied to the magnetic sensor circuit 50 is less than −N (mT), which is the lower limit of the magnetic field range width (step S4). The control device 500 repeats the processes of steps S1 to S3 until the magnetic field applied to the magnetic sensor circuit 50 is less than −N (mT).

[0064] When the magnetic field applied to the magnetic sensor circuit 50 becomes less than -N(mT), the measuring device 400 measures the output voltage of the magnetic sensor circuit 50 while increasing the magnetic field from -N(mT) by M(mT). - The control device 500 controls the measuring device 400 so that the magnetic field increases from N(mT) to M(mT) (step S5). Next, the control device 500 causes the measuring device 400 to measure the output voltage of the magnetic sensor circuit 50 (step S6). At this time, the measuring device 400 measures the output voltage of the magnetic sensor circuit 50 for a magnetic field of -N+M(mT).

[0065] Next, the control device 500 determines whether the magnetic field applied to the magnetic sensor circuit 50 exceeds +N (mT), which is the upper limit of the magnetic field range width (step S7). The control device 500 repeats the processes of steps S5 to S7 until the magnetic field applied to the magnetic sensor circuit 50 exceeds +N (mT). If the magnetic field applied to the magnetic sensor circuit 50 exceeds +N (mT), which is the upper limit of the magnetic field range width, the control device 500 ends the process based on this flowchart. The control device 500 acquires data for plotting the waveform W1 shown in FIG. 2 by executing the processes of steps S1 to S7.

[0066] 8 and 9 are flowcharts showing the procedure for determining various setting values ​​of the sensor amplification circuit 100. By executing the processing based on this flowchart, the gain setting value and offset setting value of the operational amplifier 111, and the setting value of the correction circuit 150 are determined. The setting values ​​of the correction circuit 150 include the values ​​of the reference voltages Vr1 to Vrn of the comparators 161 to 16n. The processing based on this flowchart is executed by the control device 500. The processing will be described below according to the flowchart.

[0067] First, the control device 500 calculates a first approximate equation for identifying a first approximate line L1 from the measurement results of the output voltage of the magnetic sensor circuit 50 in the range of ±N (mT) (step S11). The control device 500 calculates the first approximate equation using, for example, the least squares method. The first approximate equation is a linear function in the format of "output voltage = gradient × X (input magnetic field) + offset". The control device 500 may use the calculated first approximate equation to display the first approximate line L1 (see FIG. 2) on a monitor or the like.

[0068] Next, the control device 500 calculates a linearity error from the measurement result of the output voltage of the magnetic sensor circuit 50 in the range of ±N (mT) and the value calculated using the first approximation formula (step S12). The control device 500 may use the calculated linearity error to display a waveform W2 of the linearity error (see FIG. 4) on a monitor or the like.

[0069] Next, the control device 500 determines whether or not there are any maximum and minimum values ​​in the waveform W2 of the linearity error (step S13). The maximum and minimum values ​​are illustrated in FIG.

[0070] If the linearity error waveform W2 has maximum and minimum values, the control device 500 determines whether the maximum and minimum values ​​are in a magnetic field range other than 0±1 (mT) (step S14). The control device 500 sets the boundary magnetic fields +A and -B (see FIG. 4) based on the maximum and minimum values ​​only if they are in a magnetic field range other than 0±1 (mT). The hysteresis characteristics of the magnetic sensor circuit 50 are strong near 0 (mT). Therefore, the control device 500 does not set the boundary magnetic fields +A and -B if the maximum and minimum values ​​are only in the magnetic field range of 0±1 (mT).

[0071] Therefore, the control device 500 If the linearity error waveform W2 does not have any maximum or minimum values ​​(NO in step 13), and if the maximum and minimum values ​​exist only in the magnetic field range of 0±1 (mT) (NO in step 14), the entire range of ±N (mT) is set as the magnetic field range of the low magnetic field region (step S26). As a result, the high magnetic field region is not set in the range of ±N (mT).

[0072] As already explained, the sensor amplifier circuit 100 according to this embodiment has the following features: high Linearity correction is performed in the magnetic field region, low Therefore, if the entire magnetic field range of ±N (mT) is set as the magnetic field range of the low magnetic field region, the sensor amplifier circuit 100 does not operate the correction circuit 150 in the entire magnetic field range of ±N (mT).

[0073] Next, the control device 500 determines the gain setting value and the offset setting value of the operational amplifier 111 based on the first approximate straight line L1 according to the first approximate equation (step S27).

[0074] In step S14, when the control device 500 determines that there are local maximum and minimum values ​​in the magnetic field range other than 0±1 (mT), it sets boundary magnetic fields +A and −B. However, before setting the boundary magnetic fields +A and −B, the control device 500 determines the number of local minimum and maximum values ​​that exist in the magnetic field range other than 0±1 (mT).

[0075] The number of minimum and maximum values ​​present in the magnetic field range other than 0±1 (mT) is not necessarily one. Depending on the relationship between the hysteresis characteristics of the magnetic sensor circuit 50 and the first approximation formula, there may be multiple minimum or maximum values ​​present in the magnetic field range other than 0±1 (mT). If there is only one minimum value present in the magnetic field range other than 0±1 (mT) (YES in step S15), the control device 500 sets the magnitude of the magnetic field corresponding to that minimum value as the boundary magnetic field +A (mT) (step S16).

[0076] If there are multiple minimum values ​​in a magnetic field range other than 0±1 (mT) (NO in step S15), the control device 500 sets the magnetic field magnitude corresponding to the minimum value closest to +N (mT) shown in Figure 4 as the boundary magnetic field +A (mT) (step S17).

[0077] If there is only one maximum value in the magnetic field range other than 0±1 (mT) (YES in step S18), the control device 500 sets the magnetic field magnitude corresponding to that maximum value as the boundary magnetic field -B (mT) (step S19). If there are multiple maximum values ​​in the magnetic field range other than 0±1 (mT) (NO in step S18), the control device 500 sets the magnetic field magnitude corresponding to the maximum value closest to -N (mT) shown in Figure 4 among the multiple maximum values ​​as the boundary magnetic field -B (mT) (step S20).

[0078] Next, the control device 500 sets the magnetic field ranges of the low magnetic field region and the high magnetic field region based on the boundary magnetic fields +A and -B (step S21). More specifically, the control device 500 sets "-B ≦ magnetic field ≦ +A" as the magnetic field range of the low magnetic field region. The control device 500 sets "-N ≦ magnetic field < -B, +A < magnetic field ≦ +N" as the magnetic field range of the high magnetic field region.

[0079] Next, the control device 500 calculates a second approximation formula for identifying the second approximation line L2 from the measurement result of the output voltage of the magnetic sensor circuit 50 in the low magnetic field region (step S22). The control device 500 calculates the second approximation formula using, for example, the least squares method. Like the first approximation formula, the second approximation formula is a linear function in the form of "output voltage = gradient × X (input magnetic field) + offset". The control device 500 may use the calculated second approximation formula to display the second approximation line L2 (see FIG. 3) on a monitor or the like.

[0080] Next, the control device 500 determines the gain setting value and offset setting value of the operational amplifier 111 based on the second approximate line L2 that conforms to the second approximate equation (step S23). More specifically, the control device 500 first derives the slope and offset of the second approximate line L2. Next, the control device 500 determines the gain setting value and offset setting value from the full scale required as the sensing function of the magnetic sensor circuit 50 and the voltage value when the magnetic field is 0 (mT). In this way, the gain setting value is determined based on the output characteristics of the magnetic sensor circuit 50 in the low magnetic field region.

[0081] Next, the control device 500 determines the setting values ​​of the correction circuit 150 based on the measurement results of the output voltage of the magnetic sensor circuit 50 in the high magnetic field region and the second approximate line L2 (step S24). As a result, the reference voltages Vr1 to Vrn of the comparators 161 to 16n are determined as the setting values ​​of the correction circuit 150.

[0082] Next, the control device 500 stores the setting value of the correction circuit 150 in the nonvolatile memory 130 (step S25), and ends the processing based on this flowchart. Note that the control device 500 may also store the setting value determined in step S23 or step S27 in the nonvolatile memory 130.

[0083] 7 and 8, the calibration procedure for the sensor amplification circuit 100 has been described. Here, the procedure for calibrating the sensor amplification circuit 100 by the control device 500, which is an example of a computer, has been described. However, at least some of the above procedures may be performed manually by a person involved in the calibration, instead of by the control device 500.

[0084] In the above description, an example has been described in which the magnetic field range of the low magnetic field region is set to "-B≦magnetic field≦+A" and the magnetic field range of the high magnetic field region is set to "-N≦magnetic field<-B, +A<magnetic field≦+N." However, the control device 500 may set the magnetic field ranges of the low magnetic field region and the high magnetic field region based on only one of the boundary magnetic fields +A and -B shown in FIG.

[0085] For example, the control device 500 may set the magnetic field range of the low magnetic field region as "-A≦magnetic field≦+A." Alternatively, the control device 500 may set the magnetic field range of the low magnetic field region as "-B≦magnetic field≦+B." After determining the magnetic field range of the low magnetic field region, the control device 500 may set the range of ±N (mT) excluding the magnetic field range of the low magnetic field region as the magnetic field range of the high magnetic field region.

[0086] An arbitrary magnetic field belonging to the magnetic field range of the low magnetic field region may be selected, and the second approximation formula may be calculated using the measurement result of the output voltage of the magnetic sensor circuit 50 within that range.

[0087] It should be noted that when determining the boundary magnetic field from the measurement results (calibration data) of the output voltages of the multiple magnetic sensor circuits 50, it is not necessary to set the magnetic field range of the low magnetic field region based on the magnetic fields of the maximum and minimum points. For example, the magnetic field range of the low magnetic field region may be set to a range wider than the magnetic field range of the low magnetic field region set based on the magnetic fields of the maximum and minimum points.

[0088] (Compared to conventional sensor amplifier circuits) As described above, the sensor amplifier circuit 100 does not operate the correction circuit 150 in a low magnetic field region, but operates the correction circuit 150 in a high magnetic field region. Conventionally, there has been known a sensor amplifier circuit that constantly performs linearity correction on the signal output from the sensor. In such a conventional sensor amplifier circuit, for example, a calculation unit that performs calculations for linearity correction is mounted within the sensor amplifier circuit.

[0089] In such conventional sensor amplifier circuits, the calculation unit must be configured with a large-scale digital circuit, which increases the chip area and results in a large sensor amplifier circuit. In addition, the linearity correction calculation process takes time, which reduces responsiveness.

[0090] If linearity correction is always performed on the output from the sensor, the problem of further reduced responsiveness will occur. One possible way to improve responsiveness is to increase the operating frequency of the calculation unit. However, the higher the operating frequency of the calculation unit, the greater the new problem of increased current consumption and high-frequency noise. Furthermore, if linearity correction is always performed on the output from the sensor, there is a risk that unnecessary calculations will be performed on outputs that do not actually require correction. This could result in larger output errors.

[0091] In the sensor amplifier circuit 100 according to this embodiment, the correction circuit 150 does not operate in the low magnetic field region, thereby improving responsiveness compared to conventional sensor amplifier circuits that constantly perform linearity correction on the output from the sensor. Moreover, in the sensor amplifier circuit 100, in the low magnetic field region, the output from the magnetic sensor circuit 50 is amplified with high precision based on the second approximate straight line L2 corresponding to the low magnetic field region. Therefore, in the sensor amplifier circuit 100, accuracy does not decrease even if the correction circuit 150 does not operate. Furthermore, because the correction circuit 150 is configured as an analog circuit, the response speed can be improved compared to when the correction circuit 150 is configured as a digital circuit.

[0092] The following further describes the effects achieved by the sensor amplifier circuit 100 according to this embodiment. In the low magnetic field region, the sensor amplifier circuit 100 simply amplifies the output signal of the magnetic sensor circuit 50 using the operational amplifier 111, and the linearity performance of the magnetic sensor circuit 50 is used as is. This reduces error factors and improves the accuracy of the sensor output for magnetic fields in the low magnetic field region.

[0093] In a strong magnetic field region, the sensor amplifier circuit 100 corrects the linearity of the sensor output using the correction circuit 150. This allows the range in which the linearity of the relationship between the magnetic field and the output voltage is maintained to be widened, thereby widening the dynamic range of the magnetic sensor circuit 50.

[0094] The sensor amplifier circuit 100 amplifies the output of the magnetic sensor circuit 50 based on the measurement results of the output voltage of the magnetic sensor circuit 50 in a low magnetic field region. Therefore, in a high magnetic field region, the error between the second approximate line L2 and the output of the magnetic sensor circuit 50 becomes large. However, by operating the correction circuit 150, the sensor amplifier circuit 100 can perform linearity correction so that the output characteristics of the magnetic sensor approach those of an ideal sensor, even in a high magnetic field region. As a result, the dynamic range of the magnetic sensor circuit 50 that can be used as a sensor can be expanded. In this way, the sensor amplifier circuit 100 is highly versatile because it can correct linearity regardless of the characteristics of the magnetic sensor circuit 50 alone.

[0095] The sensor amplifier circuit 100 operates the correction circuit 150 only in a high magnetic field region, thereby widening the dynamic range that can be used as a sensor of the magnetic sensor circuit 50.

[0096] The correction circuit 150 is composed of analog circuits, and the circuit operation is automatically and immediately determined depending on the magnitude of the applied voltage. As such, the correction circuit 150 does not perform any arithmetic processing, such as a feedback routine, and therefore has excellent response speed.

[0097] The "operational amplifier 111" and the "operational amplifier 112" in the embodiments correspond to the "first operational amplifier" and the "second operational amplifier" in this disclosure, respectively. The "low magnetic field region" and the "high magnetic field region" in the embodiments correspond to the "first magnetic field region" and the "second magnetic field region" in this disclosure.

[0098] As shown in Figure 3, the magnetic sensor circuit 50 outputs a first signal corresponding to a magnetic field in a first range (-B ≦ magnetic field ≦ +A) in a low magnetic field region (first magnetic field region) where a magnetic field in a first range is applied, and outputs a second signal corresponding to a magnetic field in a second range (-N ≦ magnetic field < -B, +A < magnetic field ≦ +N) where a magnetic field stronger than the magnetic field in the first range is applied.

[0099] The correction circuit 150 is configured to switch from a first state (all switches SW1 to SWn are off) in which nonlinear distortion contained in the output signal of the magnetic sensor circuit 50 is not corrected, to a second state (any of the switches SW1 to SWn is on) in which nonlinear distortion contained in the output signal of the magnetic sensor circuit 50 is corrected. The correction circuit 150 switches from the first state to the second state when the output signal from the magnetic sensor circuit 50 changes from a first signal corresponding to the magnetic field in the first range to a second signal corresponding to the magnetic field in the second range.

[0100] When the first signal is input, the operational amplifier 111 outputs a signal based on the gain setting value and the offset setting value. Since the voltage of this signal is lower than the reference voltage Vr1 of the correction circuit 150, all of the switches SW1 to SWn of the correction circuit 150 remain in the off state.

[0101] When the second signal is input, the operational amplifier 111 outputs a signal based on the gain setting value and the offset setting value. Because the voltage of this signal is higher than any one of the reference voltages Vr1 to Vrn of the correction circuit 150, at least one of the switches SW1 to SWn of the correction circuit 150 changes from off to on. In this way, the correction circuit 150 detects that the output signal from the magnetic sensor circuit 50 has changed from the first signal to the second signal based on the change in the magnitude of the output signal from the operational amplifier 111.

[0102] 7 and 8, the calibration method of the sensor amplifier circuit 100 includes the steps of measuring the output voltage of the magnetic sensor circuit with respect to the magnetic field (steps S1 to S7), calculating a first relational expression (first approximation expression) that expresses the relationship between the magnetic field and the output voltage of the magnetic sensor circuit as a linear function using the measurement results from the measuring step (step S11), determining the maximum value (maximum value, minimum value) of the linearity error based on the first relational expression and the measurement results from the measuring step (steps S13, S14, S15, and S18), determining the boundary between the first range and the second range using the maximum value of the linearity error (steps S16, S17, S19, and S20), and calculating a second relational expression that expresses the relationship between the magnetic field and the output voltage of the magnetic sensor circuit as a linear function using the measurement results in the first magnetic field region from the measurement results from the measuring step. (Second approximation formula) Step of calculating (Step S22) and a step of determining the gain and offset of the first operational amplifier using the second relational expression (step S23).

[0103] (Modification of the sensor system) FIG. 10 is a schematic diagram of a sensor system 11 according to a modified example. The sensor system 11 includes a magnetic sensor circuit 50 and a sensor amplifier circuit 101. The sensor amplifier circuit 101 includes a correction circuit 151. The sensor system 11 according to the modified example has the same configuration as the sensor systems described above. 10 The correction circuit 151 according to the modification has enable switches ESW1 to ESWn added to the components of the correction circuit 150.

[0104] The enable switch ESW1 is arranged between the comparator 161 and the switch SW1. The enable switch ESW2 is arranged between the comparator 162 and the switch SW2. The enable switch ESWn is arranged between the comparator 16n and the switch SWn.

[0105] The readout circuit 120 controls the on / off of the enable switches ESW1 to ESWn. As already described, regarding the values of the reference voltages Vr1 to Vrn used in the correction circuit 150, the relationship Vr1 < Vr2 <... < Vrn holds. In other words, the linearity correction points are determined based on the relationship Vr1 < Vr2 <... < Vrn.

[0106] When the readout circuit 120 does not perform linearity correction, it turns off all the enable switches ESW1 to ESWn. When the readout circuit 120 performs linearity correction at a correction point determined by any one of the comparators 161 to 16n, it turns on the enable switch connected to the corresponding comparator among the enable switches ESW1 to ESWn and turns off the other enable switches.

[0107] When the readout circuit 120 performs linearity correction at a correction point determined by any two of the comparators 161 to 16n, it turns on the enable switches connected to the corresponding two comparators among the enable switches ESW1 to ESWn and turns off the other enable switches.

[0108] Thus, in the modified example, the readout circuit 120 can perform linearity correction using one of the comparators 161 to 16n and can also perform linearity correction using a plurality of the comparators 161 to 16n. Therefore, according to the modified example, it is possible to provide the sensor system 11 and the sensor amplifier circuit 101 that can freely select a comparator in a convenient voltage range. Furthermore, in the modified example, since the enable switches ESW1 to ESWn are employed, it is possible to prevent the comparators 161 to 16n from malfunctioning. For example, even if the voltage at the node N1 is less than or equal to the reference voltage Vr1, it is possible to prevent the switch SW1 from turning on due to a malfunction of the comparator 161.

[0109] Note that the enable switches ESW1 to ESW nInformation for determining the timing for turning on and off is stored in the non-volatile memory 130 as one of the set values. More specifically, registers used for controlling the enable switches ESW1 to ESWn are stored separately for each of the enable switches ESW1 to ESW W n in the non-volatile memory 130. The readout circuit 120 controls the on and off of the enable switches ESW1 to ESWn based on the set values read from the non-volatile memory 130.

[0110] The reference voltages Vr1 to Vrn function as threshold voltages for determining the correction operation of the correction circuit 151. In a modified example, a certain voltage range is set for each of the reference voltages Vr1 to Vrn. At this time, it is conceivable to set the same voltage width (0.5V) for each reference voltage, such as "2.5V < Vr1 < 3.0V", "2.8V < Vr2 < 3.3V",.... In this case, when the voltage of the node N1 is 3.0V, the readout circuit 120 turns on only the enable switch ESW2 and turns off the other enable switches.

[0111] Here, assume that the resolution required for adjusting the threshold voltage is 0.1V. When an adjustment range in 0.1V increments is required for all voltages from 0V to 5V that can be observed at the node N1, 50 adjustment patterns are required. In this case, the non-volatile memory 130 requires a register area of 6 bits for one reference voltage. Therefore, in order to correspond to the reference voltages Vr1 to Vrn, the non-volatile memory 130 requires a register area of "6 bits × N".

[0112] In contrast, consider the case where the same voltage step (e.g., 0.5 V) is set for each of the reference voltages Vr1 to Vrn. Assume that the resolution required for adjusting the threshold voltage is 0.1 V. In this case, the number of reference voltage adjustment patterns is limited to five, so the number of bits of the register area required for one reference voltage is 3. To accommodate the reference voltages Vr1 to Vrn, the nonvolatile memory 130 only needs a register area of ​​"3 bits × N." Therefore, by setting the same voltage step (e.g., 0.5 V) for each of the reference voltages Vr1 to Vrn, the capacity required for the nonvolatile memory 130 can be reduced.

[0113] 10 shows an example of a correction circuit 151 configured by connecting in parallel the components of "switch SW1, resistor R1," "switch SW2, resistor R2," ... "switch SWn, resistor Rn." However, the correction circuit 151 may also be configured such that these components are connected in series and a signal for turning on and off the switch of each component is input via a corresponding enable switch.

[0114] [Aspect] (Item 1) A sensor amplifier circuit according to one embodiment is a sensor amplifier circuit for amplifying an output signal from a magnetic sensor circuit, and includes a first operational amplifier that amplifies the output signal from the magnetic sensor circuit and a correction circuit that corrects nonlinear distortion contained in the output signal, wherein the magnetic sensor circuit outputs a first signal having a magnitude corresponding to a magnetic field of a first range in a first magnetic field region where a magnetic field of a first range is applied, and outputs a second signal having a magnitude corresponding to a magnetic field of a second range in a second magnetic field region where a magnetic field of a second range larger than the magnetic field of the first range is applied, and the correction circuit is configured to switch from a first state that does not correct the nonlinear distortion contained in the output signal to a second state that corrects the nonlinear distortion contained in the output signal, and the correction circuit switches from the first state to the second state when the output signal from the magnetic sensor circuit changes from the first signal to the second signal.

[0115] (Item 2) In the sensor amplifier circuit described in item 1, the correction circuit automatically switches from the first state to the second state when the output signal from the magnetic sensor circuit changes from the first signal to the second signal.

[0116] (Item 3) In the sensor amplifier circuit described in item 1 or 2, the correction circuit detects that the output signal from the magnetic sensor circuit has changed from a first signal to a second signal based on a change in the magnitude of the output signal from the first operational amplifier.

[0117] (4) In the sensor amplifier circuit described in any one of paragraphs 1 to 3, the first operational amplifier amplifies the output signal from the magnetic sensor circuit based on a predetermined gain, and the gain is a value determined based on the output characteristics of the magnetic sensor circuit in the first magnetic field region.

[0118] (Item 5) The sensor amplification circuit described in any one of items 1 to 4 further comprises a memory in which a setting value of the correction circuit is stored, and a readout circuit that reads out the setting value stored in the memory and sets the setting value in the correction circuit.

[0119] (Item 6) In the sensor amplifier circuit described in any one of items 1 to 5, the magnetic sensor circuit has four sensor elements bridge-connected, and the first operational amplifier amplifies the differential voltage of a pair of output signals from the magnetic sensor circuit.

[0120] (Item 7) In the sensor amplifier circuit according to any one of items 1 to 6, the magnetic sensor circuit includes a magnetic sensor element, and the magnetic sensor element is configured by a tunneling magnetoresistive (TMR) element.

[0121] (Item 8) The sensor amplification circuit described in any one of items 1 to 7 further includes a second operational amplifier, wherein the output terminal of the first operational amplifier is connected to the inverting input terminal of the second operational amplifier, and the correction circuit includes a first negative feedback circuit and a second negative feedback circuit connected in parallel between the output terminal of the second operational amplifier and the inverting input terminal of the second operational amplifier, as well as a first comparator and a second comparator, wherein the first negative feedback circuit has a first resistor and a first switch that opens and closes the first negative feedback circuit, and the second negative feedback circuit has a second resistor and a second switch that opens and closes the second negative feedback circuit, and the first comparator closes the first switch when the output voltage of the first operational amplifier reaches a first reference voltage, and the second comparator closes the second switch when the output voltage of the first operational amplifier reaches a second reference voltage that is higher than the first reference voltage.

[0122] (Item 9) A sensor system includes the magnetic sensor circuit according to any one of items 1 to 8 and a sensor amplifier circuit.

[0123] (Item 10) A method for calibrating a sensor amplifier circuit described in any one of items 1 to 8, comprising the steps of measuring the output voltage of the magnetic sensor circuit in response to a magnetic field, calculating a first relational expression that expresses the relationship between the magnetic field and the output voltage of the magnetic sensor circuit as a linear function using the measurement results from the measuring step, determining the maximum value of the linearity error based on the first relational expression and the measurement results from the measuring step, determining the boundary between the first range and the second range using the maximum value of the linearity error, calculating a second relational expression that expresses the relationship between the magnetic field and the output voltage of the magnetic sensor circuit as a linear function using the measurement results in the first magnetic field region from the measurement results from the measuring step, and determining the gain and offset of the first operational amplifier using the second relational expression.

[0124] The embodiments disclosed herein should be considered to be illustrative in all respects and not restrictive. The scope of the present invention is defined by the claims, not by the description of the above embodiments, and is intended to include all modifications within the meaning and scope of the claims. [Explanation of symbols]

[0125] 5a, 5b power supply terminals, 5c, 5d signal output terminals, 10, 11 sensor system, 50 magnetic sensor circuit, 51, 52, 53, 54 sensor element, 100, 101 sensor amplifier circuit, 111, 112 operational amplifier, 120 readout circuit, 130 non-volatile memory, 150, 151 correction circuit, 161 to 16n comparator, 190 output amplifier, 400 measuring device, 500 control device, 501 processor, 502 RAM, 503 ROM, 504 interface, ESW1 to ESWn enable switches, F1 circle frame, L1 first approximate straight line, L2 second approximate straight line, R1 to Rn, Rx, Ry resistors, SW1 to SWn switches, T1, T2 input terminals, T3 output terminal, V1, V2 voltage, Vr1 to Vrn reference voltage, W1, W2 waveform.

Claims

1. A sensor amplifier circuit for amplifying an output signal from a magnetic sensor circuit, a first operational amplifier for amplifying an output signal from the magnetic sensor circuit; a correction circuit for correcting nonlinear distortion contained in the output signal; the magnetic sensor circuit outputs a first signal having a magnitude corresponding to a magnetic field of a first range in a first magnetic field region where a magnetic field of the first range is applied, and outputs a second signal having a magnitude corresponding to a magnetic field of a second range in a second magnetic field region where a magnetic field of a second range stronger than the magnetic field of the first range is applied; the correction circuit is configured to switch from a first state in which the nonlinear distortion included in the output signal is not corrected to a second state in which the nonlinear distortion included in the output signal is corrected; The correction circuit switches from the first state to the second state when the output signal from the magnetic sensor circuit changes from the first signal to the second signal.

2. 2. The sensor amplifier circuit of claim 1, wherein the correction circuit automatically switches from the first state to the second state when the output signal from the magnetic sensor circuit changes from the first signal to the second signal.

3. 3. The sensor amplifier circuit according to claim 1, wherein the correction circuit detects a change in the output signal from the magnetic sensor circuit from the first signal to the second signal based on the output signal from the first operational amplifier.

4. the first operational amplifier amplifies the output signal from the magnetic sensor circuit based on a predetermined gain; The sensor amplifier circuit according to claim 1 , wherein the gain is a value determined based on an output characteristic of the magnetic sensor circuit in the first magnetic field region.

5. a memory in which setting values ​​of the correction circuit are stored; The sensor amplifier circuit according to claim 1 , further comprising: a readout circuit that reads out the setting value stored in the memory and sets the setting value in the correction circuit.

6. The magnetic sensor circuit has four sensor elements bridge-connected, The sensor amplifier circuit according to claim 1 , wherein the first operational amplifier amplifies a differential voltage between a pair of output signals from the magnetic sensor circuit.

7. the magnetic sensor circuit includes a magnetic sensor element; 2. The sensor amplifier circuit according to claim 1, wherein the magnetic sensor element is configured by a tunneling magnetoresistive (TMR) element.

8. further comprising a second operational amplifier; an output terminal of the first operational amplifier and an inverting input terminal of the second operational amplifier are connected; The correction circuit a first negative feedback circuit and a second negative feedback circuit connected in parallel between the output terminal of the second operational amplifier and the inverting input terminal of the second operational amplifier; a first comparator and a second comparator; the first negative feedback circuit has a first resistor and a first switch that opens and closes the first negative feedback circuit; the second negative feedback circuit has a second resistor and a second switch that opens and closes the second negative feedback circuit; the first comparator closes the first switch when the output voltage of the first operational amplifier reaches a first reference voltage; 2. The sensor amplifier circuit of claim 1, wherein the second comparator closes the second switch when the output voltage of the first operational amplifier reaches a second reference voltage that is greater than the first reference voltage.

9. A sensor system comprising the magnetic sensor circuit and sensor amplifier circuit described in claim 1.

10. A method for calibrating a sensor amplifier circuit according to any one of claims 1 to 8, comprising: measuring an output voltage of the magnetic sensor circuit in response to a magnetic field; calculating a first relational expression that expresses a relationship between a magnetic field and an output voltage of the magnetic sensor circuit as a linear function using a measurement result from the measuring step; determining a maximum value of the linearity error based on the first relational expression and the measurement result of the measuring step; determining a boundary between the first range and the second range using the maximum value of the linearity error; calculating a second relational expression that expresses a relationship between a magnetic field and an output voltage of the magnetic sensor circuit as a linear function using a measurement result in the first magnetic field region among the measurement results obtained by the measuring step; and determining a gain and an offset of the first operational amplifier using the second relationship.

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