Purge port filter support

The filter support structure in FOUP purge ports addresses high backpressure issues by minimizing membrane blockage, enabling higher flow rates and stable operation.

JP7763333B2Active Publication Date: 2025-10-31ENTEGRIS INC
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Patent Information

Application Number
JP2024519068
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Priority Date
2021-09-28
Filing Date
2022-09-26
Publication Date
2025-10-31
Estimated Expiration
2042-09-26

AI Technical Summary

Technical Problem

Existing purge ports in FOUPs face challenges with high backpressure due to filter membranes, which can lift the FOUP away from purge nozzles at higher purge gas flow rates, limiting the effective use of higher flow rates.

Method used

A filter support structure with an outer ring and inwardly extending supports, featuring varying thicknesses and openings, minimizes membrane blockage and reduces backpressure, allowing higher purge gas flow rates without lifting the FOUP.

Benefits of technology

The filter support reduces backpressure, enabling higher purge gas flow rates through FOUP purge ports, ensuring stable operation and effective gas filtration.

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Abstract

The front-opening unified pod includes a housing and a purge port within the housing. The purge port includes a filter membrane and a purge filter support. The purge filter support includes an outer ring structure and a support frame feature. The support frame extends from the outer ring structure. The outer ring structure includes a plurality of supports providing a support surface for the filter membrane. One or more of the supports each increase in thickness from a thickness of the upper support surface. The purge filter support includes an outer ring structure, one or more openings, and a support frame extending from the outer ring structure. The support frame includes supports providing a support surface configured to contact and support the filter membrane. The one or more supports each increase in thickness from a first thickness of the upper support surface.
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