vacuum pump

Abstract

To provide a preferable vacuum pump that reduces costs for a vacuum pump, and simplifies temperature control.SOLUTION: A vacuum pump 100 is equipped with a base portion 129, a rotor 103 disposed on the base portion, supporting means (magnetic bearing) that supports the rotor so as to rotate about an axis thereof, driving means (motor 121) that drives the rotor so as to rotate about an axis thereof, a gas channel that leads gas taken by rotations of the rotor to a discharge port 133, a multi-function fixing component 301, and heat insulating means 305. The multi-function fixing component 301 has a function of configuring an exhaust side gas channel of the whole gas channel, and a temperature adjusting function capable of actuating under a structure equipped with a temperature sensor S, heating means H, and first cooling means C1, and adjusting temperature. The heat insulating means 305 heat-insulates the multi-function fixing component from other components.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a vacuum pump used as a gas exhaust means for process chambers and other chambers in semiconductor manufacturing equipment, flat panel display manufacturing equipment, and solar panel manufacturing equipment, and is particularly suitable for reducing the cost of the vacuum pump and simplifying temperature control. [Background technology]

[0002] A conventional vacuum pump of this type is, for example, that described in Patent Document 1. Referring to Figure 2 of the document, the vacuum pump of the document (hereinafter referred to as the "conventional vacuum pump") has an exhaust-side gas flow path (R2) formed by the downstream outer circumferential surface of the rotor (3) and a thread groove (8A) on the inner circumferential surface of the fixed part (8) facing the rotor (3), as a gas flow path (R) that guides gas sucked in by the rotation of the rotor (4) to the exhaust port (2). In addition, in conventional vacuum pumps, the fixed part (8) is insulated with a heat insulating means (10) and the insulated fixed part (8) is provided with a heating means (11) to prevent deposition of products in the exhaust gas flow path (R2). Furthermore, in conventional vacuum pumps, the pump base (B) is provided with a cooling means (18), which absorbs heat transferred to the pump base (B) by thermal conduction from the fixed vanes (7) and the like.

[0003] However, in the conventional vacuum pump (P1), temperature sensors (S1, S2) are installed separately in the part to be heated, such as the fixed part (8) (hereinafter referred to as the "heating part"), and in the part to be cooled, such as the pump base (B) (hereinafter referred to as the "cooling part"), and the temperature of the heating part and the cooling part are detected separately by the respective temperature sensors (S1, S2). The temperature of the heating part is controlled based on the value detected by the temperature sensor (S1) in the heating part, and the temperature of the cooling parts (B1, B2) is controlled based on the value detected by the temperature sensor (S1) in the cooling part. This requires at least two temperature sensors, and two temperature control systems for the vacuum pump, i.e., one for the heating part and one for the cooling part. This inevitably increases the cost of the vacuum pump and complicates the temperature control of the vacuum pump. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent Publication No. 2015-31153 Summary of the Invention [Problem to be solved by the invention]

[0005] The present invention has been made to solve the above problems, and an object of the present invention is to provide a vacuum pump that is suitable for reducing the cost of the vacuum pump and simplifying the temperature control. [Means for solving the problem]

[0006] In order to achieve the above object, the present invention provides a vacuum pump comprising a base, a rotor disposed on the base, support means for supporting the rotor rotatably about its axis, drive means for driving the rotor to rotate about its axis, and a gas flow path for guiding gas drawn in by the rotation of the rotor to an exhaust port, the vacuum pump having a function of constituting an exhaust-side gas flow path within the entire gas flow path, and a temperature adjustment function operable under a configuration including a temperature sensor, a heating means, and a first cooling means, The base portion is disposed on the The multi-function fixing part has a temperature adjusted by a temperature adjusting function, and a heat insulating means for insulating the multi-function fixing part from other parts, and the heat insulating means comprises: The multi-function fixing part is disposed between the multi-function fixing part and the base part, and is accommodated in a recess of the multi-function fixing part. Consists of an insulating ring The multi-function fixed component has a sealing surface that seals between the multi-function fixed component and the base portion via an O-ring, and the recess is formed in the axial direction of the rotor so as to be recessed upward from the sealing surface. It is characterized by the fact that

[0007] In the present invention, the multi-function fixing part may be thermally insulated from the base portion by the thermal insulating means.

[0008] In the present invention, the multi-function fixing component may further function as a part of the exterior of the vacuum pump.

[0009] In the present invention, the gas flow path may be a threaded flow path formed by the outer peripheral surface of the rotor and a threaded stator facing the outer peripheral surface of the rotor, and the multi-function fixing component may include the threaded stator and a support component that supports the threaded stator.

[0010] In the present invention, the temperature sensor, the heating means, and the first cooling means may be provided on the threaded stator or the support part.

[0011] In the present invention, the base portion may be cooled by a second cooling means.

[0012] In the present invention, the first cooling means and the second cooling means may be cooled by the circulation of a cooling liquid, and a first flow path of the first cooling means and a second flow path of the second cooling means may be independent of each other. [Effects of the Invention]

[0013] As described above, the specific configuration of the vacuum pump of the present invention is such that the multi-function fixed component includes components necessary for adjusting the temperature inside the pump (specifically, a temperature sensor, a heating means, and a first cooling means). The temperature adjustment function operating under this configuration adjusts the temperature of the multi-function fixed component, thereby controlling the temperature of the exhaust-side gas flow path. Therefore, for example, unlike the conventional technology, it is not necessary to separately provide two types of sensors (specifically, a sensor for detecting the temperature of the cooling section and a sensor for detecting the temperature of the heating section). Instead, it is sufficient to detect the temperature of the multi-function fixed component with a single type of temperature sensor, thereby reducing the number of temperature sensors required as vacuum pump components. Furthermore, the conventional technology does not require complicated temperature adjustment processes, such as adjusting the temperature of the cooling section and the heating section, and only requires adjusting the temperature of the multi-function fixed component. Therefore, a vacuum pump suitable for reducing the cost of the vacuum pump and simplifying temperature control can be provided. [Brief explanation of the drawings]

[0014] [Figure 1] 1 is a vertical cross-sectional view of a vacuum pump (first embodiment) to which the present invention is applied. [Figure 2] Circuit diagram of the amplifier circuit. [Figure 3] 10 is a time chart showing control when a current command value is greater than a detected value. [Figure 4] 10 is a time chart showing control when a current command value is smaller than a detected value. [Figure 5] FIG. 4(a) is an explanatory diagram of one embodiment of the first and second cooling means, and FIG. 4(b) is an explanatory diagram of another embodiment of the first and second cooling means. [Figure 6] FIG. 2 is a longitudinal sectional view of a vacuum pump (second embodiment) to which the present invention is applied. [Figure 7] FIG. 10 is a longitudinal sectional view of a vacuum pump (third embodiment) to which the present invention is applied. [Figure 8] FIG. 10 is a vertical cross-sectional view of a vacuum pump (fourth embodiment) to which the present invention is applied. DETAILED DESCRIPTION OF THE INVENTION

[0015] FIG. 1 is a longitudinal sectional view of a vacuum pump (first embodiment) to which the present invention is applied, FIG. 2 is a circuit diagram of an amplifier circuit, FIG. 3 is a time chart showing control when the current command value is larger than the detection value, and FIG. 4 is a time chart showing control when the current command value is smaller than the detection value.

[0016] 1, in a vacuum pump 100 shown in the figure, an intake port 101 is formed at the upper end of a cylindrical outer cylinder 127. Inside the outer cylinder 127, a rotor 103 (hereinafter referred to as "rotating body 103") is provided, on the periphery of which are formed a plurality of rotating vanes 102 (102a, 102b, 102c, etc.), which are turbine blades for sucking and exhausting gas. As a specific example of the configuration of this rotating body 103, in the vacuum pump 100 shown in FIG. 1, the rotating body 103 has a shape in which the rotating vanes 102 are formed on the outer periphery of a first cylindrical portion 102e.

[0017] A rotor shaft 113 is attached to the center of the rotating body 103 via a fastening part CN, and the rotor shaft 113 is supported in the air and its position is controlled by, for example, a five-axis controlled magnetic bearing. The rotating body 103 is generally made of a metal such as aluminum or an aluminum alloy.

[0018] As a specific example of the magnetic bearing configuration, in the vacuum pump 100 of Fig. 1, the upper radial electromagnets 104 are four electromagnets arranged in pairs on the X-axis and the Y-axis. Four upper radial sensors 107 are provided adjacent to the upper radial electromagnets 104 and corresponding to each upper radial electromagnet 104. The upper radial sensors 107 are, for example, inductance sensors or eddy current sensors having conductive windings, and detect the position of the rotor shaft 113 based on changes in the inductance of the conductive windings, which change according to the position of the rotor shaft 113. The upper radial sensors 107 are configured to detect the radial displacement of the rotor shaft 113, i.e., the rotating body 103 fixed thereto, and send the detected displacement to the control device 200.

[0019] In the control device 200, for example, a compensation circuit having a PID adjustment function generates an excitation control command signal for the upper radial electromagnet 104 based on a position signal detected by the upper radial sensor 107, and an amplifier circuit 150 (described later) shown in Figure 2 controls the excitation of the upper radial electromagnet 104 based on this excitation control command signal, thereby adjusting the upper radial position of the rotor shaft 113.

[0020] Rotor shaft 113 is made of a high magnetic permeability material (iron, stainless steel, etc.) and is attracted by the magnetic force of upper radial electromagnet 104. Such adjustment is performed independently in the X-axis direction and the Y-axis direction. In addition, lower radial electromagnet 105 and lower radial sensor 108 are arranged in the same manner as upper radial electromagnet 104 and upper radial sensor 107, and adjust the radial position of the lower side of rotor shaft 113 in the same way as the radial position of the upper side.

[0021] Furthermore, as a specific configuration example of a magnetic bearing, in the vacuum pump 100 of Fig. 1, axial electromagnets 106A and 106B are arranged above and below a circular metal disk 111 provided at the bottom of the rotor shaft 113. The metal disk 111 is made of a highly magnetic permeable material such as iron. An axial sensor 109 is provided to detect the axial displacement of the rotor shaft 113, and an axial position signal is sent to the control device 200.

[0022] In the control device 200, a compensation circuit having, for example, a PID adjustment function generates excitation control command signals for the axial electromagnet 106A and the axial electromagnet 106B based on the axial position signal detected by the axial sensor 109, and the amplifier circuit 150 controls the excitation of the axial electromagnet 106A and the axial electromagnet 106B based on these excitation control command signals, so that the axial electromagnet 106A attracts the metal disc 111 upward by magnetic force, and the axial electromagnet 106B attracts the metal disc 111 downward, thereby adjusting the axial position of the rotor shaft 113.

[0023] As described above, the control device 200 appropriately adjusts the magnetic force that the axial electromagnets 106A and 106B exert on the metal disk 111, magnetically levitating the rotor shaft 113 in the axial direction and holding it in space without contact. The amplifier circuit 150 that controls the excitation of the upper radial electromagnet 104, the lower radial electromagnet 105, and the axial electromagnets 106A and 106B will be described later.

[0024] 1, motor 121 has a plurality of magnetic poles arranged circumferentially so as to surround rotor shaft 113. Each magnetic pole is controlled by control device 200 so as to rotate rotor shaft 113 via electromagnetic force acting between the magnetic pole and rotor shaft 113. Motor 121 also incorporates a rotational speed sensor (not shown), such as a Hall element, resolver, or encoder, and the rotational speed of rotor shaft 113 is detected by the detection signal of this rotational speed sensor.

[0025] Furthermore, a phase sensor (not shown) is attached, for example, near the lower radial sensor 108, to detect the phase of rotation of the rotor shaft 113. The control device 200 uses the detection signals of both this phase sensor and the rotational speed sensor to detect the position of the magnetic pole.

[0026] A plurality of fixed blades 123 (123a, 123b, 123c...) are arranged at small gaps from the rotating blades 102 (102a, 102b, 102c...). Each of the rotating blades 102 (102a, 102b, 102c...) is formed at an angle of a predetermined degree from a plane perpendicular to the axis of the rotor shaft 113 in order to transport exhaust gas molecules downward through collision. The fixed blades 123 (123a, 123b, 123c...) are made of metal such as aluminum, iron, stainless steel, copper, or an alloy containing any of these metals as an ingredient.

[0027] Similarly, the fixed blades 123 are formed at a predetermined angle from a plane perpendicular to the axis of the rotor shaft 113, and are arranged in a staggered manner with the rows of rotor blades 102 toward the inside of the outer cylinder 127. The outer peripheral ends of the fixed blades 123 are supported by being inserted between a plurality of stacked rows of fixed blade spacers 125 (125a, 125b, 125c, etc.).

[0028] The fixed vane spacer 125 is a ring-shaped member made of a metal such as aluminum, iron, stainless steel, or copper, or an alloy containing any of these metals. An outer cylinder 127 is fixed to the outer periphery of the fixed vane spacer 125 with a small gap between them. A base portion 129 is disposed at the bottom of the outer cylinder 127. An exhaust port 133 is formed in the base portion 129 and communicates with the outside. Exhaust gas that enters the intake port 101 from the chamber (vacuum chamber) side and is transferred to the base portion 129 is sent to the exhaust port 133.

[0029] Furthermore, depending on the application of the vacuum pump 100, a threaded spacer 131 is disposed between the lower part of the fixed vane spacer 125 and the base portion 129. The threaded spacer 131 is a cylindrical member made of a metal such as aluminum, copper, stainless steel, iron, or an alloy containing any of these metals, and has a plurality of spiral thread grooves 131a engraved on its inner circumferential surface. The spiral direction of the thread grooves 131a corresponds to the direction in which exhaust gas molecules are transported toward the exhaust port 133 when they move in the rotation direction of the rotor 103. At the lowest part of the rotor 103, next to the rotor vanes 102 (102a, 102b, 102c, etc.), a second cylindrical portion 102d is connected to the first cylindrical portion 102e and hangs down. The outer peripheral surface of second cylindrical portion 102d is cylindrical and protrudes toward the inner peripheral surface of threaded spacer 131, and is adjacent to, with a predetermined gap between them, the inner peripheral surface of threaded spacer 131. The exhaust gas that has been transferred to thread groove 131a by rotor 102 and fixed blade 123 is sent to base portion 129 while being guided by thread groove 131a.

[0030] Base 129 is a disk-shaped member that forms the base of vacuum pump 100, and is generally made of metal such as iron, aluminum, stainless steel, etc. Base 129 not only physically holds vacuum pump 100 but also functions as a heat conduction path, so it is desirable to use a metal that is rigid and has high thermal conductivity, such as iron, aluminum, or copper.

[0031] In this configuration, when the rotor 102 is rotated together with the rotor shaft 113 by the motor 121, the action of the rotor 102 and the stator 123 draws exhaust gas from the chamber through the intake port 101. The rotational speed of the rotor 102 is typically 20,000 rpm to 90,000 rpm, and the peripheral speed at the tip of the rotor 102 reaches 200 m / s to 400 m / s. The exhaust gas drawn in through the intake port 101 passes between the rotor 102 and the stator 123 and is transported to the base 129. At this time, the temperature of the rotor 102 rises due to frictional heat generated when the exhaust gas comes into contact with the rotor 102 and conduction of heat generated by the motor 121, but this heat is transferred to the stator 123 side by radiation or conduction through gas molecules of the exhaust gas.

[0032] The stator spacers 125 are joined together at their outer peripheries and transmit to the outside heat received by the stator 123 from the rotor 102 and frictional heat generated when exhaust gas comes into contact with the stator 123.

[0033] In the above description, the threaded spacer 131 is disposed on the outer periphery of the cylindrical portion 102d of the rotor 103, and the thread groove 131a is formed on the inner circumferential surface of the threaded spacer 131. However, there are also cases where the thread groove is formed on the outer circumferential surface of the cylindrical portion 102d, and a spacer having a cylindrical inner circumferential surface is disposed around the outer circumferential surface of the cylindrical portion 102d.

[0034] Depending on the application of the vacuum pump 100, the electrical equipment section may be covered with a stator column 122 so that the gas sucked in from the intake port 101 does not enter the electrical equipment section, which is composed of the upper radial electromagnet 104, the upper radial sensor 107, the motor 121, the lower radial electromagnet 105, the lower radial sensor 108, the axial electromagnets 106A and 106B, the axial sensor 109, etc., and the interior of this stator column 122 may be kept at a predetermined pressure with purge gas.

[0035] In this case, piping (not shown) is provided in the base portion 129, and purge gas is introduced through this piping. The introduced purge gas is sent to the exhaust port 133 through gaps between the protective bearing 120 and the rotor shaft 113, between the rotor and stator of the motor 121, and between the stator column 122 and the inner cylindrical portion of the rotor blades 102.

[0036] Here, the vacuum pump 100 requires identification of the model and control based on individually adjusted specific parameters (e.g., various characteristics corresponding to the model). To store these control parameters, the vacuum pump 100 is provided with an electronic circuit unit 141 inside its body. The electronic circuit unit 141 is composed of a semiconductor memory such as an EEPROM, electronic components such as semiconductor devices for accessing the memory, and a substrate 143 for mounting these components. The electronic circuit unit 141 is housed below a rotational speed sensor (not shown) near the center of a base unit 129 that forms the lower part of the vacuum pump 100, and is closed by an airtight bottom lid 145.

[0037] In the semiconductor manufacturing process, some process gases introduced into the chamber have the property of solidifying when their pressure exceeds a predetermined value or their temperature falls below a predetermined value. Inside the vacuum pump 100, the pressure of the exhaust gas is lowest at the inlet 101 and highest at the outlet 133. If the pressure of the process gas exceeds a predetermined value or the temperature falls below a predetermined value while the process gas is being transferred from the inlet 101 to the outlet 133, the process gas solidifies and adheres to and accumulates inside the vacuum pump 100.

[0038] For example, when SiCl4 is used as the process gas in an Al etching system, the low vacuum (760 [torr] to 10 -2The vapor pressure curve shows that at low pressures (approximately 20°C) and pressures of 10 ...

[0039] Therefore, in order to solve this problem, conventionally, a heater (not shown) or a circular water-cooled pipe 149 is wrapped around the outer periphery of the base portion 129, etc., and a temperature sensor (e.g., a thermistor) (not shown) is embedded in the base portion 129, and the heating of the heater and the cooling by the water-cooled pipe 149 are controlled based on the signal from this temperature sensor to maintain the temperature of the base portion 129 at a constant high temperature (set temperature) (hereinafter referred to as TMS; Temperature Management System).

[0040] Next, a description will be given of the amplifier circuit 150 that controls excitation of the upper radial electromagnets 104, the lower radial electromagnets 105, and the axial electromagnets 106A and 106B in the vacuum pump 100. A circuit diagram of this amplifier circuit 150 is shown in FIG.

[0041] 2, one end of the electromagnet winding 151 constituting the upper radial electromagnet 104 etc. is connected to a positive electrode 171a of a power supply 171 via a transistor 161, and the other end is connected to a negative electrode 171b of the power supply 171 via a current detection circuit 181 and a transistor 162. The transistors 161 and 162 are so-called power MOSFETs, and have a structure in which a diode is connected between the source and drain.

[0042] At this time, the transistor 161 has a diode cathode terminal 161a connected to the positive electrode 171a and an anode terminal 161b connected to one end of the electromagnet winding 151. The transistor 162 has a diode cathode terminal 162a connected to the current detection circuit 181 and an anode terminal 162b connected to the negative electrode 171b.

[0043] Meanwhile, current regeneration diode 165 has its cathode terminal 165a connected to one end of electromagnet winding 151 and its anode terminal 165b connected to negative electrode 171b. Similarly, current regeneration diode 166 has its cathode terminal 166a connected to positive electrode 171a and its anode terminal 166b connected to the other end of electromagnet winding 151 via current detection circuit 181. Current detection circuit 181 is configured, for example, with a Hall sensor type current sensor or an electrical resistance element.

[0044] The amplifier circuit 150 configured as above corresponds to one electromagnet. Therefore, if the magnetic bearing is controlled in five axes and there are a total of ten electromagnets 104, 105, 106A, and 106B, a similar amplifier circuit 150 is configured for each electromagnet, and the ten amplifier circuits 150 are connected in parallel to the power supply 171.

[0045] Furthermore, the amplifier control circuit 191 is configured, for example, by a digital signal processor section (hereinafter referred to as a DSP section) not shown in the figure of the control device 200, and this amplifier control circuit 191 is configured to switch the transistors 161 and 162 on / off.

[0046] The amplifier control circuit 191 compares the current value detected by the current detection circuit 181 (a signal reflecting this current value is called a current detection signal 191c) with a predetermined current command value. Based on the comparison result, the amplifier control circuit 191 determines the size of the pulse width (pulse width times Tp1 and Tp2) to be generated within a control cycle Ts, which is one period under PWM control. As a result, gate drive signals 191a and 191b having these pulse widths are output from the amplifier control circuit 191 to the gate terminals of the transistors 161 and 162.

[0047] It is necessary to control the position of rotor 103 at high speed and with strong force when, for example, the rotor 103 passes through a resonance point during acceleration of its rotational speed or when a disturbance occurs during constant-speed operation. For this reason, a high voltage of, for example, about 50 V is used as power supply 171 so that the current flowing through electromagnet winding 151 can be rapidly increased (or decreased). In addition, a capacitor (not shown) is usually connected between positive electrode 171a and negative electrode 171b of power supply 171 to stabilize power supply 171.

[0048] In this configuration, when both transistors 161 and 162 are turned on, the current flowing through the electromagnet winding 151 (hereinafter referred to as electromagnet current iL) increases, and when both are turned off, the electromagnet current iL decreases.

[0049] Furthermore, when one of the transistors 161 and 162 is turned on and the other is turned off, a so-called flywheel current is maintained. By passing a flywheel current through the amplifier circuit 150 in this manner, hysteresis loss in the amplifier circuit 150 can be reduced, and the power consumption of the entire circuit can be kept low. Furthermore, by controlling the transistors 161 and 162 in this manner, high-frequency noise such as harmonics generated in the vacuum pump 100 can be reduced. Furthermore, by measuring this flywheel current with the current detection circuit 181, the electromagnet current iL flowing through the electromagnet winding 151 can be detected.

[0050] That is, when the detected current value is smaller than the current command value, both transistors 161 and 162 are turned on for a time period corresponding to pulse width time Tp1 only once in a control cycle Ts (for example, 100 μs), as shown in Fig. 3. Therefore, during this period, the electromagnet current iL increases toward a current value iLmax (not shown) that can flow from the positive electrode 171a to the negative electrode 171b via the transistors 161 and 162.

[0051] On the other hand, if the detected current value is greater than the current command value, both transistors 161 and 162 are turned off for a time period corresponding to pulse width time Tp2 only once during the control cycle Ts, as shown in Fig. 4. Therefore, the electromagnet current iL during this period decreases toward a current value iLmin (not shown) that can be regenerated from the negative pole 171b to the positive pole 171a via diodes 165 and 166.

[0052] In either case, after the pulse width times Tp1 and Tp2 have elapsed, one of the transistors 161 and 162 is turned on. Therefore, a flywheel current is maintained in the amplifier circuit 150 during this period.

[0053] 1, the vacuum pump 100 shown in the figure has a gas flow path that guides gas drawn in from an intake port 101 by the rotation of a rotor 103 to an exhaust port 133, and of the entire gas flow path, the exhaust-side gas flow path is a threaded flow path formed by the outer circumferential surface of the rotor 103 (specifically, the outer circumferential surface of the second cylindrical portion 102d) and a threaded stator 131 facing it. In short, the threaded spacer 131 has the function of forming the exhaust-side gas flow path.

[0054] Furthermore, the vacuum pump 100 of FIG. 1 employs a structure in which a ring-shaped support part 300 is fastened to the outer periphery of the threaded spacer 131 with bolts (not shown), and the threaded spacer 131 is supported by the support part 300; a structure in which the support part 300 is provided with a temperature sensor S, a heating means H, and a first cooling means C1; and a structure in which the support part 300 and the threaded spacer 131 are provided as a single multi-function fixed part 301.

[0055] <<Explanation of Multi-Function Fixture 301>> 1 has the functions of the threaded spacer 131 itself, i.e., the function of forming an exhaust-side gas flow path, and the function of supporting the threaded spacer 131 and adjusting temperature by providing a temperature sensor S, heating means H, and first cooling means C1. Other functions of the multifunction fixing part 301 will be described later.

[0056] Although the support component 300 is made of an aluminum alloy, the present invention is not limited to this. By making the support component 300 out of stainless steel, the temperature of the entire multi-function fixing component 301 may be increased compared to a support component 300 made of an aluminum alloy.

[0057] As a specific structural example for positioning the multifunction fixing part 301 in the radial direction, the vacuum pump 100 in FIG. 1 has a step 302 formed in a part of the multifunction fixing part 301 (specifically, the inner peripheral part of the support part 300), and a protrusion 303 corresponding to the step 302 is formed in the base part 129, and the abutment surface of the step 302 abuts against the positioning reference surface of the protrusion 303, thereby positioning the entire multifunction fixing part 301 in the radial direction.

[0058] As a specific structural example for positioning the multi-function fixing part 301 in the axial direction, the vacuum pump 100 in FIG. 1 employs a method in which the multi-function fixing part 301 is fastened to the base part 129 with a bolt BT via an insulating gap G1, which will be described later.

[0059] The outer periphery of the multifunction fixing part 301 (specifically, the vicinity of the outer surface of the support part 301) functions in the same manner as the outer cylinder 127 described above, that is, functions as part of the exterior of the vacuum pump 100.

[0060] As described above, the multi-function fixing part 301 includes the temperature sensor S, the heating means H, and the first cooling means C1, and has a temperature adjustment function that can operate under such a configuration. The temperature of the multi-function fixing part 301 is adjusted by this temperature adjustment function.

[0061] The temperature of the multi-function fixed part 301 may be adjusted, for example, based on a signal from the temperature sensor S, by controlling the heating by the heating means H and the cooling by the first cooling means C1 so as to maintain the temperature of the multi-function fixed part 301 at a constant temperature (set temperature).

[0062] <<Details of Heating Method H>> 1 employs a cartridge-type heater, and in order to adjust the temperature of the entire multifunction fixing part 301 to be uniform, the heaters are arranged on the support part 300 at regular intervals (for example, 90-degree intervals) radially from the center of the multifunction fixing part 301, but the present invention is not limited to this. The arrangement locations, arrangement intervals, number, etc. of the heaters can be changed as needed.

[0063] Furthermore, as another embodiment of the heating means H, although not shown in the drawings, a configuration may be adopted in which a band-type heater (band heater) is wrapped around the outer periphery of the multi-function fixed part 301 (specifically, the outer periphery of the support part 300).

[0064] As a specific embodiment of the temperature sensor S, in the vacuum pump 100 of Fig. 1, one temperature sensor S is installed in a part of the multi-function fixed part 301 (specifically, the support part 300), but this is not limited to this. The number and installation locations of the temperature sensors S can be changed appropriately as needed.

[0065] The temperature sensor S may be installed on the multi-function fixed part 301 by fitting it into a sensor installation hole provided in the support part 300 as shown in FIG. 1 , or, if the support part is formed by casting, by embedding the temperature sensor S inside the support part 300 during casting, or by attaching the temperature sensor S to the outer periphery of the support part 300, etc., although not shown.

[0066] Although it is possible to configure the temperature sensor S to be located near the heater H, in that configuration the temperature sensor S would detect the temperature of the heater H itself, making it impossible to accurately detect the temperature of the multi-function fixed part 301. For this reason, in the vacuum pump 100 of Fig. 1, the temperature sensor S is installed in a position where the influence of the heater H is as small as possible, specifically, in a midpoint between the heaters H that are arranged radially as described above.

[0067] <<Details of the first cooling means C1, etc.>> As a specific embodiment of the first cooling means C1, the vacuum pump 100 of FIG. 1 employs a water-cooled pipe 304 (hereinafter referred to as the "first cooling pipe 304") that is different from the water-cooled pipe 149 for the base portion 129 described above, and employs a configuration in which the first water-cooled pipe 304 is provided inside the support part 300 along the ring shape of the support part 300.

[0068] As another embodiment of the first cooling means C1, for example, although not shown, it is also possible to form a groove on the outer periphery of the support component 300 and install the first water-cooling pipe 304 in the groove.

[0069] As can be seen from the above explanation, the multi-function fixing part 301 is cooled by the first cooling means C1, and the base part 129 is cooled by the second cooling means C2 equipped with the water-cooled pipe 149 (hereinafter referred to as the "second water-cooled pipe 149").

[0070] 5(a), cooling in the first cooling means C1 and the second cooling means C2 is performed by circulating a cooling liquid through the respective water-cooled pipes 304, 149. In the vacuum pump 100 of FIG. 1, as shown in FIG. 5(a), the flow path of the first cooling means C1 (hereinafter referred to as the "first cooling flow path CR1") and the flow path of the second cooling means C1 (hereinafter referred to as the "second cooling flow path CR2") are independent of each other.

[0071] That is, the first cooling flow path CR1 is made up of a portion located upstream of the multi-function fixed component 301 (hereinafter referred to as the "first supply system") and a portion located downstream of that portion (hereinafter referred to as the "first return system"). The second cooling flow path CR2 is made up of a portion located upstream of the base portion 129 (hereinafter referred to as the "second supply system") and a portion located downstream of that portion (hereinafter referred to as the "second return system"). In this configuration, the aforementioned "independent of each other" means that the first supply system and the second supply system are independent, as shown in FIG. 5(a), and the first return system and the second return system are also independent.

[0072] The adoption of the independent systems as described above eliminates the influence of the second cooling means C2 on the first cooling means C1, or the influence of the first cooling means C1 on the second cooling means C2, making it possible to precisely and precisely regulate the temperatures of the multi-function fixed part 301 and the base part 129. Note that, as another embodiment, a system in which the first supply system and the second supply system are shared may also be adopted, as shown in Fig. 5(b).

[0073] <<Explanation of insulation measures>> Referring to FIG. 1, the vacuum pump 100 in the figure has a heat insulating means 305 that insulates the multi-function fixing part 301 from other parts, and the heat insulating means 305 insulates the multi-function fixing part 301 from the base part 129.

[0074] As a specific embodiment of the heat insulating means 305, the vacuum pump 100 of Figure 1 employs a stainless steel heat insulating ring component, which is interposed between the base part 129 and the multifunction fixing part 301, and which employs a configuration in which a predetermined axial gap G1 (hereinafter referred to as "heat insulating gap G1") is formed between the multifunction fixing part 301 and the base part 129 by the interposition of the heat insulating ring component.

[0075] <<Description of Other Embodiments of the Present Invention>> Fig. 6 is a longitudinal sectional view of a vacuum pump (second embodiment) to which the present invention is applied. In the vacuum pump 100 of Fig. 1, the multifunction fixing component 301 is formed by connecting the support component 300 and the threaded spacer 131, but in the vacuum pump 100 of Fig. 6, as another embodiment of the multifunction fixing component 301, the support component 300 and the threaded spacer 131 are integrally formed, thereby employing a multifunction fixing component 301 that does not have the above-mentioned connection. Other than this, the vacuum pump 100 is the same as the vacuum pump 100 of Fig. 1, so a detailed description thereof will be different.

[0076] Figure 7 is a vertical cross-sectional view of a vacuum pump (third embodiment) to which the present invention is applied. In the vacuum pump 100 of Figure 1, the first water-cooled pipe 304 is provided in the same component as the temperature sensor S and heating means H, i.e., in the support component 300, but in the vacuum pump 100 of Figure 6, the first water-cooled pipe 304 is provided in a component separate from the support component 300 (specifically, component 306 adjacent to the stator blades 123), thereby enhancing cooling of the stator blades 123 and the like. Other than this, the vacuum pump 100 is the same as the vacuum pump 100 of Figure 1, and therefore a detailed description thereof will be different.

[0077] Figure 8 is a vertical cross-sectional view of a vacuum pump (fourth embodiment) to which the present invention is applied. In the vacuum pump 100 of Figures 1 and 6, the exhaust port 133 is provided in the base part 129, but in the vacuum pump 100 of Figure 8, the exhaust port 133 is provided in a part of the multi-function fixing part 301 (specifically, the support part 300), so that the temperature around the exhaust port 133 can be adjusted by the multi-function fixing part 301. Other than this, it is the same as the vacuum pump 100 of Figures 1 and 6, so a detailed description thereof will be different.

[0078] The vacuum pump 100 of the embodiment described above is specifically configured such that the components required for adjusting the temperature inside the pump (specifically, the temperature sensor S, the heating means H, and the first cooling means C1) are all contained in one location, i.e., the multi-function fixed component 301, and the temperature of the multi-function fixed component 301 is adjusted by a temperature adjustment function operating under this configuration, thereby controlling the temperature of the exhaust-side gas flow path, etc. Therefore, for example, unlike the conventional system, it is not necessary to separately provide two types of sensors (specifically, a sensor for detecting the temperature of the cooling unit and a sensor for detecting the temperature of the heating unit), and it is sufficient to detect the temperature of the multi-function fixed component 301 with only one type of temperature sensor S, thereby reducing the number of temperature sensors required as vacuum pump components and reducing the overall cost of the vacuum pump. Furthermore, complicated temperature adjustment processes such as adjusting the temperature of the cooling unit and the heating unit, as in the conventional system, are not required, and it is only necessary to adjust the temperature of the multi-function fixed component 301, thereby simplifying the temperature control of the vacuum pump 100.

[0079] The present invention is not limited to the above-described embodiments, and many modifications can be made by those skilled in the art within the scope of the technical concept of the present invention. [Explanation of symbols]

[0080] 1. First Area 1A First surface treatment layer 2. The Second Region 2A Second surface treatment layer 3 Boundary 3A First Boundary 3B Second boundary 3C Third Boundary 4 recess 5. Mating hole (first hole on the rotating body side) 6 through holes 7 flange 8 volts 9 Washer material 100 Vacuum Pump 101 Air intake 102 Rotor 102d Second cylindrical section 102e First cylindrical portion 103 Rotating body (rotor) 104 Upper radial electromagnet 105 Lower radial electromagnet 106A, 106B Axial electromagnet 107 Upper radial sensor 108 Lower radial sensor 109 Axial Sensor 111 Metal Disc 113 Rotor shaft 120 Protective Bearing 121 Motor 122 Stator column 123 Fixed wing 125 Fixed wing spacer 127 Outer cylinder 129 Base 131 Threaded spacer 131a screw groove 133 Exhaust port 141 Electronic circuit section 149 Water-cooled pipe (second water-cooled pipe) 143 PCB 145 Bottom lid 150 Amplifier Circuit 171 Power supply 181 Current detection circuit 191 Amplifier control circuit 200 control device 300 Support parts 301 Multi-function fixing parts 302 Multilayered section 303 Protrusion 304 First water-cooled tube 305 Insulation measures 306 Parts adjacent to fixed wings BT Bolt CR1 First Cooling Channel CR2 Second Cooling Channel G1 Insulation Gap CN fastening part S Temperature Sensor H Heating means C1 First cooling means C2 Second cooling means

Claims

1. A base portion; a rotor disposed on the base; a support means for supporting the rotor so that the rotor can rotate about its axis; a driving means for driving the rotor to rotate around its axis; a gas flow path that guides gas sucked in by the rotation of the rotor to an exhaust port, a multi-function fixed component having a function of configuring an exhaust-side gas flow path of the entire gas flow path and a temperature adjustment function operable under a configuration including a temperature sensor, a heating means, and a first cooling means, the multi-function fixed component being disposed on the base portion and having a temperature adjusted by the temperature adjustment function; a heat insulating means for insulating the multi-function fixing part from other parts, the heat insulating means is disposed between the multi-function fixing part and the base part and is constituted by a heat insulating ring housed in a recess of the multi-function fixing part, the multi-function fixing component has a sealing surface that seals between the multi-function fixing component and the base portion via an O-ring; The recess is formed in the axial direction of the rotor so as to be recessed upward from the seal surface. A vacuum pump characterized by:

2. The multi-function fixing part is insulated from the base part by the heat insulating means.

2. The vacuum pump according to claim 1,

3. The multi-function fixing part further functions as a part of the exterior of the vacuum pump.

3. The vacuum pump according to claim 1 or 2,

4. the exhaust-side gas flow path is a threaded flow path formed by an outer circumferential surface of the rotor and a threaded stator facing the outer circumferential surface of the rotor, The multi-function fixing component includes the threaded stator and a support component that supports the threaded stator.

4. The vacuum pump according to claim 1, wherein:

5. The temperature sensor, the heating means, and the first cooling means are provided on the threaded stator or the support part.

5. The vacuum pump according to claim 4,

6. The base portion is cooled by a second cooling means.

6. A vacuum pump according to any one of claims 1 to 5,

7. The first cooling means and the second cooling means are cooled by the circulation of a cooling liquid, and a first flow path of the first cooling means and a second flow path of the second cooling means are independent of each other.

7. The vacuum pump according to claim 6,

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