heating device

Abstract

This heating device comprises a heating plate and a plurality of heaters. The heating plate has: a heating surface, and a plurality of recesses in a back surface that is opposite the heating surface. The plurality of heaters are located respectively in the plurality of recesses. Each heater has a columnar main body, and meander wiring inside of the main body in the lengthwise direction. The wiring has a plurality of bends. The bends located on the tip end side of the main body are located in the recess.

Description

[Technical Field]

[0001] SUMMARY OF THE INVENTION The disclosed embodiments relate to a heating device. [Background technology]

[0002] Conventionally, a heating device has been known that has a heating plate with multiple cartridge heaters inserted into multiple recesses formed on the back surface opposite the heating surface, and heats an object by bringing the object into contact with the heating plate (see Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2016-207595 Summary of the Invention

[0004] A heating device according to one aspect of the embodiment includes a heating plate and a plurality of heaters. The heating plate has a heating surface and a plurality of recesses on a back surface opposite the heating surface. The plurality of heaters are located in the plurality of recesses. Each heater has a columnar main body and a meandering wiring portion inside the main body in the longitudinal direction. The wiring portion has a plurality of folded portions. The folded portions located on the tip side of the main body are located within the recesses. [Brief explanation of the drawings]

[0005] [Figure 1] FIG. 1 is a side view of a heating device according to an embodiment, as viewed from the negative direction of the Y axis. [Figure 2] FIG. 2 is a cross-sectional view of the heater according to the embodiment. [Figure 3] FIG. 3 is a plan view of the heating device according to the embodiment, as viewed from the positive direction of the Z axis. [Figure 4] FIG. 4 is a cross-sectional view taken along line IV-IV shown in FIG. [Figure 5] FIG. 5 is a cross-sectional view taken along line VV shown in FIG. [Figure 6] FIG. 6 is a side view of the heating device according to the embodiment, as viewed from the negative direction of the X axis. [Figure 7] FIG. 7 is a cross-sectional view taken along the line VII-VII shown in FIG. [Figure 8] FIG. 8 is a schematic diagram for explaining an example of the positional relationship between the folded portions of the heat generating resistors of the heaters and the recesses of the heating plate. [Figure 9] FIG. 9 is a cross-sectional view taken along the line IX-IX of FIG. [Figure 10] FIG. 10 is a diagram showing other shapes of the recessed portion. [Figure 11] FIG. 11 is a diagram showing other shapes of the recesses. [Figure 12] FIG. 12 is a diagram showing other shapes of the recessed portion. [Figure 13] FIG. 13 is a schematic diagram for explaining another example of the positional relationship between the folded portions of the heat generating resistors of the heaters and the recesses of the heating plate. [Figure 14] FIG. 14 is a schematic diagram for explaining another example of the positional relationship between the connection portion between the heating resistor and the lead wires and each recessed portion of the heating plate. [Figure 15] FIG. 15 is a diagram showing another example of an insertion mode of a heater according to the embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0006] Hereinafter, a form for carrying out a heating device according to the present disclosure (hereinafter referred to as an "embodiment") will be described in detail with reference to the drawings. Note that the heating device according to the present disclosure is not limited to this embodiment. Furthermore, each embodiment can be appropriately combined within the scope of not causing any contradiction in the processing content. Furthermore, the same parts in each of the following embodiments will be given the same reference numerals, and duplicated explanations will be omitted.

[0007] Furthermore, in the following embodiments, expressions such as "constant," "orthogonal," "perpendicular," or "parallel" may be used, but these expressions do not necessarily mean "constant," "orthogonal," "perpendicular," or "parallel" in the strict sense. In other words, the above expressions allow for deviations due to, for example, manufacturing precision, installation precision, etc.

[0008] The drawings referred to below are schematic diagrams for the convenience of explanation, and therefore some details may be omitted and the dimensional proportions may not necessarily correspond to those of the actual objects.

[0009] In addition, in the drawings referred to below, for ease of understanding, an orthogonal coordinate system may be shown in which the X-axis, Y-axis, and Z-axis directions are defined as being perpendicular to each other, and the positive Z-axis direction is the vertically upward direction.

[0010] 1 is a side view of the heating device 100 according to the embodiment, viewed from the negative direction of the Y axis. In the following, when the heating device 100 is brought into contact with the object to be heated, the surface facing the object to be heated is referred to as the "upper surface," and the surface facing the opposite side of the object to be heated is referred to as the "lower surface." However, the heating device 100 may be used, for example, upside down, or in any other position.

[0011] 1 includes a heating plate 110, a fixture 120, a plurality of heaters 130, and a support plate 150. The heating device 100 also includes a plurality of anode-side collection electrodes 160, a plurality of cathode-side collection electrodes 170, and a plurality of insulating members 180.

[0012] The heating plate 110 is, for example, a metal plate-like member. The heating plate 110 has an upper surface 110a that can come into contact with an object to be heated. In other words, the upper surface 110a of the heating plate 110 serves as a heating surface that heats the object to be heated. The upper surface 110a is used, for example, to heat a mold, which is an example of an object to be heated. A plurality of recesses 113 (see FIGS. 3, 5, etc.) into which a plurality of heaters 130 are respectively inserted are formed on a lower surface 110b of the heating plate 110 opposite the heating surface.

[0013] The heaters 130 are inserted into the recesses 113, respectively. As a result, the heaters 130 are arranged perpendicular to the upper surface 110a of the heating plate 110, which is the heating surface. By arranging the heaters 130 perpendicular to the heating surface of the heating plate 110 in this way, the variation in the distance between the heaters 130 and the heating surface is reduced, thereby improving the temperature uniformity within the heating surface. Furthermore, the heaters 130 have a temperature distribution in the longitudinal direction. In contrast, by arranging the heaters 130 perpendicular to the heating surface of the heating plate 110, it is possible to reduce the temperature difference caused by the temperature distribution of the heaters 130 between the center and outer periphery of the upper surface 110a.

[0014] The configuration of the heater 130 will now be described with reference to Fig. 2. Fig. 2 is a cross-sectional view of the heater 130 according to the embodiment.

[0015] As shown in FIG. 2, a heater 130 according to this embodiment includes a heater body 131, a cover member 132, an anode lead electrode 133, and a cathode lead electrode 134.

[0016] The heater body 131 is a ceramic heater. In a cross section perpendicular to the X-axis direction, the heater body 131 has a rectangular plate shape and has a tip end portion 130a and a base end portion 130b. The heater body 131 is inserted into the recess 113 with the tip end portion 130a first.

[0017] The heater body 131 has a heating resistor 135 (an example of a wiring portion) and lead wires 136, 137 (an example of a lead wire portion) inside the ceramic body. By using a ceramic heater for the heater body 131, it is possible to reduce seizure between the heater body 131 and the heating plate 110, which is made of metal. Therefore, for example, a problem such as the heater body 131 seizing to the heating plate 110 and making it impossible to replace the heater 130 is unlikely to occur.

[0018] The heating resistor 135 has a meandering wiring pattern that is repeatedly folded back between the tip end 130a side and the base end 130b side of the heater body 131. Specifically, the heating resistor 135 has a plurality of straight portions 135a extending along the longitudinal direction (here, the Z-axis direction) of the heater body 131, and folded back portions 135b and 135c that connect two adjacent straight portions 135a on the tip end side and the base end side of the heater body 131. A lead wire 136 is connected to one end of the heating resistor 135, and a lead wire 137 is connected to the other end of the heating resistor 135.

[0019] The length of the heater main body 131, i.e., the length of the ceramic body, can be, for example, about 1 mm or more and 200 mm or less. The outer dimensions of the ceramic body can be, for example, about 0.5 mm or more and 100 mm or less.

[0020] The shape of the heater body 131, i.e., the shape of the ceramic body, is, for example, a prismatic shape. Note that the shape of the heater body 131 is not limited to a prismatic shape, and may be, for example, a cylindrical shape or an elliptical cylindrical shape. Furthermore, the cylindrical or elliptical cylindrical shape of the heater body 131 also includes a cylindrical shape with a hollowed-out center. The material of the ceramic body is, for example, an insulating ceramic. Examples of the material that can be used for the ceramic body include oxide ceramics, nitride ceramics, and carbide ceramics.

[0021] The heating resistor 135 is a member that generates heat when a current flows through it. One end of the heating resistor 135 is connected to a pad 133a of an anode lead electrode 133 (described later) via a lead wire 136. The other end of the heating resistor 135 is connected to a pad 134a of a cathode lead electrode 134 (described later) via a lead wire 137.

[0022] The heating resistor 135 may include a high-resistivity conductor, such as tungsten or molybdenum. The dimensions of the heating resistor 135 may be, for example, a width of 0.1 mm to 5 mm, a thickness of 0.05 mm to 0.3 mm, and a total length of 1 mm to 500 mm. The heating resistor 135 may also be made of conductive ceramics, such as tungsten carbide. In this case, the difference in thermal expansion between the ceramic body and the heating resistor 135 can be reduced. This reduces the thermal stress between the ceramic body and the heating resistor 135. As a result, the durability of the heater body 131 can be improved.

[0023] The lead wire 136 connects one end of the heating resistor 135 to the pad portion 133a of the anode lead electrode 133. The lead wire 137 connects the other end of the heating resistor 135 to the pad portion 134a of the cathode lead electrode 134.

[0024] Like the heating resistor 135, the lead wires 136 and 137 may include a high-resistance conductor containing, for example, tungsten or molybdenum. Alternatively, the lead wires 136 and 137 may be made of conductive ceramics containing, for example, tungsten carbide. The lead wires 136 and 137 are wider than the heating resistor 135. This allows the electrical resistance of the lead wires 136 and 137 to be smaller than the electrical resistance of the heating resistor 135. As a result, the amount of heat generated in the lead wires 136 and 137 can be reduced.

[0025] The cover member 132 is cylindrical and surrounds the outer peripheral surface of the heater body 131. The cover member 132 is located in a position corresponding to the pad portion 133a of the anode lead electrode 133 and the pad portion 134a of the cathode lead electrode 134 in the longitudinal direction of the heater body 131 (here, the Z-axis direction). The cover member 132 covers the pad portion 133a of the anode lead electrode 133 and the pad portion 134a of the cathode lead electrode 134. A space formed by the inner peripheral surface of the cover member 132 is filled with a bonding material 132a for bonding the cover member 132 and the heater body 131 together.

[0026] The cover member 132 is made of, for example, insulating ceramic, and may be made of, for example, alumina, silicon nitride, or the like.

[0027] The anode lead electrode 133 and the cathode lead electrode 134 are fixed to one end (base end 130b) of the heater body 131. One end of the anode lead electrode 133 is connected to an external power supply via an anode assembly electrode 160 (described later), and the other end is electrically connected to the heating resistor 135 via a lead wire 136. Furthermore, one end of the cathode lead electrode 134 is connected to an external power supply via a cathode assembly electrode 170 (described later), and the other end is electrically connected to the heating resistor 135 via a lead wire 137.

[0028] The anode lead electrode 133 and the cathode lead electrode 134 are wires containing a metal material such as nickel, iron, or a nickel-based heat-resistant alloy.

[0029] The anode lead electrode 133 has a pad portion 133a and a terminal portion 133b. The pad portion 133a is a planar portion located on the surface of the heater body 131 and is electrically connected to one end of the heating resistor 135 via a lead wire 136. The terminal portion 133b is electrically connected to the pad portion 133a and extends from the base end portion 130b of the heater body 131 outward in the longitudinal direction of the heater body 131 (here, the negative Z-axis direction). The cross section of the terminal portion 133b may be, for example, circular, elliptical, or rectangular. The outer diameter of the terminal portion 133b may be, for example, 0.5 mm or more and 2.0 mm or less.

[0030] The cathode lead electrode 134 has a pad portion 134a and a terminal portion 134b. The pad portion 134a is a planar portion located on the surface of the heater body 131 and is electrically connected to the other end of the heating resistor 135 via a lead wire 137. The terminal portion 134b is electrically connected to the pad portion 134a and extends from the base end portion 130b of the heater body 131 outward in the longitudinal direction of the heater body 131 (here, in the negative Z-axis direction). The cross section of the terminal portion 134b may be, for example, circular, elliptical, or rectangular. The outer diameter of the terminal portion 134b may be, for example, 0.5 mm or more and 2.0 mm or less.

[0031] As described above, the lead electrodes (anode lead electrode 133 and cathode lead electrode 134) of heater 130 have pad portions 133a, 134a located on the surface of heater body 131 and terminal portions 133b, 134b connected to pad portions 133a, 134a. In heater 130 configured in this manner, stress is less likely to concentrate because pad portions 133a, 134a function as buffer members. Therefore, heater 130 configured in this manner has high durability.

[0032] The heaters 130 of the heating device 100 are inserted into recesses 113 formed in the lower surface 110b of the heating plate 110. Fig. 3 is a plan view of the heating device 100 according to the embodiment as seen from the positive direction of the Z axis.

[0033] In Fig. 3, the upper surface 110a of the heating plate 110, which is the heating surface, is shown as a rectangular plate, and the positions of the multiple recesses 113 are indicated by dashed lines. As an example, the multiple recesses 113 shown in Fig. 3 are arranged in 6 rows and 6 columns. That is, the heating plate 110 according to the embodiment has a total of 36 recesses 113. Note that the arrangement and number of the multiple recesses 113 are not limited to the example shown in the figure.

[0034] Returning to Fig. 1, the fixture 120 will be described. The fixture 120 is disposed at a distance from the heating plate 110. A plurality of heaters 130 are fixed to the fixture 120 and are inserted into the plurality of recesses 113, respectively. The manner in which the heaters 130 are fixed to the fixture 120 will be described later.

[0035] The support plate 150 is fixed to the fixture 120 by a plurality of pillar-shaped members 151 while being spaced apart from the fixture 120. By positioning the support plate 150 away from the fixture 120, it is possible to ensure a space between the support plate 150 and the fixture 120 for arranging the terminal portions 133b, 134b of each heater 130, in other words, a space for arranging the anode-side collection electrode 160 and the cathode-side collection electrode 170, which will be described later. Note that the support plate 150 and the plurality of pillar-shaped members 151 may be omitted, if necessary.

[0036] Fig. 4 is a cross-sectional view taken along line IV-IV in Fig. 3. Fig. 5 is a cross-sectional view taken along line VV in Fig. 3. Note that the support plate 150 and the plurality of columnar members 151 are omitted from Figs. 4 and 5.

[0037] As shown in FIGS. 4 and 5, the heating device 100 is configured by fixing a plurality of heaters 130 to a fixture 120 and inserting them into a plurality of recesses 113 of a heating plate 110, respectively.

[0038] The heating plate 110 includes a first plate member 111 and a second plate member 112 .

[0039] The first plate member 111 is a plate-like member having an upper surface 110a of the heating plate 110, which is a heating surface. The first plate member 111 is joined to the second plate member 112 by fixing members 114, such as bolts. In other words, the lower surface 111a of the first plate member 111, which is opposite to the upper surface 110a, is a joining surface that is joined to the second plate member 112.

[0040] The second plate member 112 is a plate-like member having an upper surface 112a which serves as a joining surface to be joined to the joining surface of the first plate member 111, and a lower surface 110b located on the opposite side of the upper surface 112a. A plurality of through holes 112b are formed in the lower surface 110b, and the lower surface 111a of the first plate member 111 is exposed from each of the plurality of through holes 112b.

[0041] Each of the plurality of recesses 113 is formed by a corresponding one of the plurality of through holes 112b and the lower surface 111a of the first plate member 111 exposed from each of the plurality of through holes 112b. That is, the inner wall surface of each through hole 112b forms the inner side surface of each recess 113, and the lower surface 111a of the first plate member 111 forms the bottom surface (ceiling surface in the position shown in FIG. 5) of each recess 113. Then, the tip portions 130a of the plurality of heaters 130 are positioned within the plurality of recesses 113 when the plurality of heaters 130 are inserted into the plurality of recesses 113, respectively. Furthermore, the heating plate 110 does not have to be divided into two members, the first plate member 111 and the second plate member 112. The portions of the heating plate 110 corresponding to the first plate member 111 and the second plate member 112 may be integrally formed from a metal plate-like member. The heating plate 110 has a plurality of recesses 113 on the back surface opposite to the heating surface of the integrally formed plate-like member. By integrally forming the heating plate 110, the manufacturing process of the heating device 100 can be simplified.

[0042] The fixture 120 includes a fixing plate 121 and a plurality of fixing bars 122 and 123 .

[0043] The fixing plate 121 is, for example, a metal plate-like member. The fixing plate 121 is connected to the heating plate 110 by connecting members 124 such as bolts, with a gap formed between the fixing plate 121 and the heating plate 110, and is thereby disposed at a distance from the heating plate 110. By disposing the fixing plate 121 at a distance from the heating plate 110, it is possible to reduce the temperature rise of the fixing portions (e.g., fixing bars 122, 123) of the multiple heaters 130 relative to the fixture 120. On the other hand, since the amount of heat removed from the heating plate 110 by the fixing plate 121 is reduced, it is possible to promote the temperature rise of the heating plate 110.

[0044] The fixing plate 121 has a plurality of through holes 121a at positions corresponding to the plurality of recesses 113. A plurality of heaters 130 are inserted into the plurality of through holes 121a, respectively. For ease of explanation, the plurality of recesses 113, the plurality of through holes 121a, and the plurality of heaters 130 will be simply referred to as "recesses 113," "fixing holes 120a," and "heaters 130," respectively, unless there is a particular need to distinguish between them.

[0045] The heater body 131 of the heater 130 passes through the through-hole 121a, and its tip end 130a is inserted into the recess 113. The base end 130b of the heater body 131 protrudes further from the lower surface of the fixing plate 121 in a direction away from the upper surface 110a of the heating plate 110, which is the heating surface. The anode lead electrode 133 and the cathode lead electrode 134 described above are located at the base end 130b of the heater body 131. By providing the anode lead electrode 133 and the cathode lead electrode 134 at the base end 130b of the heater body 131, which protrudes in a direction away from the upper surface 110a of the heating plate 110, which is the heating surface, the anode lead electrode 133 and the cathode lead electrode 134 can be spaced apart from the heating surface. Therefore, this configuration reduces heat transfer to the anode lead electrode 133 and the cathode lead electrode 134.

[0046] The fixing bars 122, 123 are, for example, rod-shaped members made of metal. The fixing bars 122, 123 sandwich the cover members 132 of the multiple heaters 130 and are connected to the fixing plate 121 by connecting members 125 such as bolts. This allows the fixing bars 122, 123 to fix the multiple heaters 130 to the fixing plate 121. In this embodiment, the heating device 100 has 36 heaters 130, and the pair of fixing bars 122, 123 sandwich the cover members 132 of six heaters 130 that are aligned in a row among the 36 heaters 130. This allows the pair of fixing bars 122, 123 to fix the positions of the six heaters 130 that are aligned in a row. The heating device 100 has a total of six pairs of fixing bars 122, 123 (see FIG. 6 ).

[0047] A spacer member 140 is disposed between the heating plate 110 and the fixture 120. The spacer member 140 is cylindrical and has the connecting member 124 inserted therethrough. By providing the spacer member 140 between the heating plate 110 and the fixture 120, the heating plate 110 and the fixture 120 can be kept apart from each other, and the distance between the heating plate 110 and the fixture 120 can be maintained. Therefore, with this configuration, the temperature rise of the fixture 120 due to heat transfer from the heating plate 110 can be continuously reduced.

[0048] The material of the spacer member 140 is preferably, for example, a heat-resistant ceramic. For example, oxide ceramics, nitride ceramics, or carbide ceramics can be used as the material of the spacer member 140. This reduces the thermal expansion and contraction of the spacer member 140, thereby reducing wear of the spacer member 140.

[0049] Returning to Fig. 1, the anode-side assembly electrode 160 is electrically connected to the anode-side lead electrodes 133 of the multiple heaters 130. In this embodiment, the heating device 100 has 36 heaters 130, and the anode-side assembly electrode 160 is electrically connected to the anode-side lead electrodes 133 of six of these 36 heaters 130 that are aligned in a row and fixed to a pair of fixing bars 122, 123. The heating device 100 has a total of six anode-side assembly electrodes 160 (see Fig. 6).

[0050] The cathode-side assembly electrode 170 is also electrically connected to the cathode-side lead electrodes 134 of the multiple heaters 130. In this embodiment, the heating device 100 has 36 heaters 130, and the cathode-side assembly electrode 170 is electrically connected to the cathode-side lead electrodes 134 of six of these 36 heaters 130 that are aligned in a row and fixed to a pair of fixing bars 122, 123. The heating device 100 has a total of six cathode-side assembly electrodes 170 (see FIG. 7).

[0051] The insulating member 180 is, for example, a plate-like member made of insulating ceramic, and is positioned so as to be sandwiched between the anode side collection electrode 160 and the cathode side collection electrode 170. In this embodiment, the heating device 100 has two insulating members 180 for each pair of the anode side collection electrode 160 and the cathode side collection electrode 170, and these two insulating members 180 are positioned so as to be sandwiched between one pair of the anode side collection electrode 160 and the cathode side collection electrode 170.

[0052] As described above, the heating device 100 has an anode-side collection electrode 160 connected to two or more anode-side lead electrodes 133 of two or more heaters 130 of the multiple heaters 130 included in the heating device 100. The heating device 100 also has a cathode-side collection electrode 170 connected to two or more cathode-side lead electrodes 134 of two or more heaters 130 of the multiple heaters 130 included in the heating device 100. The heating device 100 also has an insulating member 180 sandwiched between the anode-side collection electrode 160 and the cathode-side collection electrode 170.

[0053] Heat generated by the multiple (six here) heaters 130 is conducted to two collection electrodes (anode-side collection electrode 160 and cathode-side collection electrode 170) corresponding to each polarity via lead electrodes (anode-side lead electrode 133 and cathode-side lead electrode 134) of opposite polarities. The heat conducted to the two collection electrodes (anode-side collection electrode 160 and cathode-side collection electrode 170) corresponding to each polarity is then conducted to the insulating member 180 located between the two collection electrodes. This reduces the heat generated by each heater 130 from being dissipated separately from the lead electrodes of opposite polarities of each heater 130, thereby improving thermal uniformity.

[0054] The number of insulating members 180 sandwiched between one pair of anode-side assembly electrode 160 and cathode-side assembly electrode 170 is not limited to the example shown in the figure.

[0055] Here, the configurations of the anode-side assembly electrode 160, the cathode-side assembly electrode 170, and the insulating member 180 will be described in more detail with reference to Fig. 6 and Fig. 7. Fig. 6 is a side view of the heating device 100 according to this embodiment, as seen from the negative direction of the X axis. Fig. 7 is a cross-sectional view taken along the line VII-VII in Fig. 6.

[0056] 6 and 7, the anode-side assembly electrode 160 has a first metal plate 161, a second metal plate 162, and a plurality of first fixing members 163. The first metal plate 161 and the second metal plate 162 are metal plates having a rectangular cross-sectional shape. The first fixing members 163 detachably fix the first metal plate 161 and the second metal plate 162 together. The first fixing members 163 are, for example, bolts.

[0057] The anode-side assembly electrode 160 is electrically connected to the multiple anode-side lead electrodes 133 by sandwiching the terminal portions 133b of the multiple anode-side lead electrodes 133 between a first metal plate 161 and a second metal plate 162. Specifically, in the embodiment, the first metal plate 161 and the second metal plate 162 extend along the X-axis direction and sandwich the multiple (here, six) terminal portions 133b arranged along the X-axis direction.

[0058] With this configuration, the multiple anode lead electrodes 133 can be connected in a straight line, thereby achieving the shortest possible connection of the multiple anode lead electrodes 133. Furthermore, connection is easy even if the lengths of the terminal portions 133b vary.

[0059] Furthermore, the first metal plate 161 and the second metal plate 162 sandwich the terminal portions 133b of the multiple (six here) anode lead electrodes 133 with gaps provided between the terminal portions 133b of the multiple anode lead electrodes 133. This configuration allows the first metal plate 161 and the second metal plate 162 to function as springs. Therefore, this configuration allows the force that sandwiches the terminal portions 133b to be maintained for a long period of time. Furthermore, stress caused by the difference in thermal expansion and contraction between the first metal plate 161 and the second metal plate 162 and the insulating member 180 is alleviated by the first metal plate 161 and the second metal plate 162 acting as springs, thereby reducing damage to the insulating member 180.

[0060] Furthermore, the first fixing member 163 fixes the first metal plate 161 and the second metal plate 162 at positions corresponding to gaps between the terminal portions 133b of multiple (here, six) anode lead electrodes 133. With this configuration, the first metal plate 161 and the second metal plate 162 are deflected in directions in which they approach each other, thereby reducing the contact area between the second metal plate 162 and the insulating member 180. Therefore, with this configuration, stress caused by the difference in thermal expansion and contraction between the first metal plate 161 and the second metal plate 162 and the insulating member 180 is reduced, and damage to the insulating member 180 is further reduced.

[0061] The second metal plate 162 is in contact with the insulating member 180. The thickness of the second metal plate 162 is thinner than the thickness of the first metal plate 161. By reducing the thickness of the second metal plate 162 in this way, the heat transfer of the second metal plate 162 is improved, and therefore, it is possible to promote the transfer of heat from the terminal portions 133b of each heater 130 to the insulating member 180 via the second metal plate 162. Therefore, with this configuration, it is possible to further improve the thermal uniformity. Furthermore, since the second metal plate 162 is more easily deformed elastically, it is possible to alleviate the thermal stress acting from the second metal plate 162 to the insulating member 180.

[0062] As shown in Fig. 7, multiple (six in this example) anode-side assembly electrodes 160 are aligned along the Y-axis direction. As shown in Fig. 7, in a plan view seen from a direction perpendicular to the upper surface 110a, which is the heating surface of the heating plate 110, the connection positions between each anode-side assembly electrode 160 and the terminal portions 133b overlap the upper surface 110a of the heating plate 110. By connecting the anode-side assembly electrodes 160 and the terminal portions 133b within the heating region in this manner, heat dissipation from each heater 130 to the outside of the heating device 100 can be reduced compared to, for example, connecting the anode-side assembly electrodes 160 and the terminal portions 133b outside the heating region. Therefore, this configuration can further improve thermal uniformity.

[0063] 6 and 7, the cathode-side assembly electrode 170 has a third metal plate 171, a fourth metal plate 172, and a plurality of second fixing members 173. The third metal plate 171 and the fourth metal plate 172 are metal plates having a rectangular cross-sectional shape. The second fixing members 173 detachably fix the third metal plate 171 and the fourth metal plate 172 together. The second fixing members 173 are, for example, bolts.

[0064] The cathode-side assembly electrode 170 is electrically connected to the plurality of cathode-side lead electrodes 134 by sandwiching the terminal portions 134b of the plurality of cathode-side lead electrodes 134 between the third metal plate 171 and the fourth metal plate 172. Specifically, in the embodiment, the third metal plate 171 and the fourth metal plate 172 extend along the X-axis direction and sandwich the plurality of (here, six) terminal portions 134b arranged along the X-axis direction.

[0065] With this configuration, the multiple cathode lead electrodes 134 can be connected in a straight line, thereby achieving the shortest possible connection between the multiple cathode lead electrodes 134. Furthermore, connection is easy even if the lengths of the terminal portions 134b vary.

[0066] Furthermore, the third metal plate 171 and the fourth metal plate 172 sandwich the terminal portions 134b of the plurality (six in this example) of cathode lead electrodes 134, with gaps provided between the terminal portions 134b of the plurality of cathode lead electrodes 134. This configuration allows the third metal plate 171 and the fourth metal plate 172 to function as springs. Therefore, this configuration allows the force that sandwiches the terminal portions 134b to be maintained for a long period of time. Furthermore, stress caused by the difference in thermal expansion and contraction between the third metal plate 171 and the fourth metal plate 172 and the insulating member 180 is alleviated by the third metal plate 171 and the fourth metal plate 172 acting as springs, thereby reducing damage to the insulating member 180.

[0067] Furthermore, second fixing member 173 fixes third metal plate 171 and fourth metal plate 172 at positions corresponding to gaps between terminal portions 134b of multiple (here, six) cathode lead electrodes 134. With this configuration, third metal plate 171 and fourth metal plate 172 can be deflected in directions in which they approach each other, thereby reducing the contact area between fourth metal plate 172 and insulating member 180. Therefore, with this configuration, stress caused by the difference in thermal expansion and contraction between third metal plate 171, fourth metal plate 172, and insulating member 180 is reduced, further reducing damage to insulating member 180.

[0068] Furthermore, the fourth metal plate 172 is in contact with the insulating member 180. The thickness of the fourth metal plate 172 is thinner than the thickness of the third metal plate 171. By reducing the thickness of the fourth metal plate 172 in this way, the heat transferability of the fourth metal plate 172 is improved, and therefore, it is possible to promote the transfer of heat from the terminal portions 133b of each heater 130 to the insulating member 180 via the fourth metal plate 172. Therefore, with this configuration, it is possible to further improve the thermal uniformity. Furthermore, since the fourth metal plate 172 is more easily deformed elastically, it is possible to alleviate the thermal stress acting from the fourth metal plate 172 to the insulating member 180.

[0069] 7 , the terminal portion 134b of adjacent anode lead electrodes 133 and the terminal portion 134b of adjacent cathode lead electrodes 134 are located on opposite sides of the insulating member 180. The first fixing member 163 fixes the first metal plate 161 and the second metal plate 162 at a position closer to one of the adjacent anode lead electrodes 133 than to the other anode lead electrode. The second fixing member 173 fixes the third metal plate 171 and the fourth metal plate 172 at a position closer to the other second lead electrode than to the one second lead electrode corresponding to the other anode lead electrode of adjacent cathode lead electrodes 134. With this configuration, the position at which first metal plate 161 and second metal plate 162 are fixed by first fixing member 163 is misaligned from the position at which third metal plate 171 and fourth metal plate 172 are fixed by second fixing member 173, thereby misaligning the contact areas between the metal plates and insulating member 180. Therefore, with this configuration, stress caused by the difference in thermal expansion and contraction between second metal plate 162, fourth metal plate 172, and insulating member 180 is reduced, and damage to insulating member 180 is further reduced.

[0070] 6 and 7, the insulating member 180 is fixed to one of the anode side collection electrode 160 and the cathode side collection electrode 170 by a fixing member 181 such as a bolt. For example, as shown in FIG. 7, the anode side collection electrode 160 and the cathode side collection electrode 170 extend along the X-axis direction parallel to the upper surface 110a, which is the heating surface of the heating plate 110. The insulating member 180 is fixed in a cantilevered manner by the fixing member 181 to one end of one of the anode side collection electrode 160 and the cathode side collection electrode 170 in the extension direction (here, the X-axis direction). Specifically, one of the two insulating members 180 sandwiched between the anode side collection electrode 160 and the cathode side collection electrode 170 is fixed in a cantilevered manner by the fixing member 181 to an end of the second metal plate 162 of the anode side collection electrode 160 on the X-axis negative side. In addition, the other of the two insulating members 180 sandwiched between the anode side assembly electrode 160 and the cathode side assembly electrode 170 is fixed in a cantilevered state by a fixing member 181 to the end of the fourth metal plate 172 of the cathode side assembly electrode 170 on the positive side in the X-axis direction.

[0071] In this way, by fixing the insulating member 180 to one of the anode side collection electrode 160 and the cathode side collection electrode 170, it is possible to reduce thermal stress acting on the insulating member 180 compared to when the insulating member 180 is fixed to both the anode side collection electrode 160 and the cathode side collection electrode 170. Therefore, with this configuration, damage to the insulating member 180 is further reduced. Also, because the insulating member 180 is fixed in a cantilevered state to one end of one of the anode side collection electrode 160 and the cathode side collection electrode 170 in the extension direction (here, the X-axis direction), it is possible to further reduce thermal stress acting on the insulating member 180.

[0072] 7, the two insulating members 180 sandwiched between the anode side collection electrode 160 and the cathode side collection electrode 170 are positioned side by side in a direction (X-axis direction) parallel to the upper surface 110a, which is the heating surface of the heating plate 110, between the anode side collection electrode 160 and the cathode side collection electrode 170. In this way, by positioning the two insulating members 180 side by side between the anode side collection electrode 160 and the cathode side collection electrode 170, thermal stress on each insulating member 180 can be reduced compared to when one insulating member 180 is positioned between the anode side collection electrode 160 and the cathode side collection electrode 170. Therefore, with this configuration, damage to the insulating members 180 is further reduced.

[0073] In the above description, the two insulating members 180 are arranged side by side in a direction (X-axis direction) parallel to the upper surface 110a, which is the heating surface of the heating plate 110, between the anode side collection electrode 160 and the cathode side collection electrode 170, but the arrangement of the insulating members 180 is not limited to this. For example, the two insulating members 180 may be arranged side by side in a direction (Z-axis direction) perpendicular to the upper surface 110a, which is the heating surface of the heating plate 110, between the anode side collection electrode 160 and the cathode side collection electrode 170.

[0074] An example of the positional relationship between the folded portions 135b, 135c of each heating resistor 135 of the plurality of heaters 130 and each recessed portion 113 of the heating plate 110 will be described below with reference to Figures 8 and 9. Figure 8 is a schematic diagram for explaining an example of the positional relationship between the folded portions 135b, 135c of each heating resistor 135 of the plurality of heaters 130 and each recessed portion 113 of the heating plate 110. Figure 9 is a cross-sectional view taken along the arrow IX-IX shown in Figure 8.

[0075] As shown in Figure 8, in the heating device 100 of the embodiment, of the folded portions 135b, 135c of each heating resistor 135 of the multiple heaters 130, at least the folded portion 135b located on the tip portion 130a side of the heater main body 131 is located within the recess 113.

[0076] 8, the folded portion 135c located on the base end portion 130b side of the heater main body 131 is located outside the recess 113, but the folded portion 135b located on the tip end portion 130a side of the heater main body 131 is located inside the recess 113. In heaters 130 other than the heater 130 shown in FIG. 8, the folded portion 135b is also located inside the recess 113.

[0077] The heater 130, which incorporates a meandering heating resistor 135, has a maximum heat generation zone at the folded portion 135b located on the tip portion 130a side of the heater body 131. Therefore, by positioning the folded portion 135b of each heating resistor 135 of the multiple heaters 130 within the recess 113, the maximum heat generation zone of each heater 130 can be aligned near the bottom of the recess 113 along the depth direction of the recess 113. This reduces the possibility of heat generated by each heater 130 being dispersed unevenly through the openings of each recess 113 in the heating plate 110. Therefore, the heating device 100 according to this embodiment can improve the thermal uniformity of the heating plate 110.

[0078] Furthermore, each heater 130 is positioned (inserted) in the recess 113 so that the tip 130a of the heater body 131 does not come into contact with the bottom surface of the recess 113. This prevents stress from being applied to the tip 130a of the heater body 131 from the bottom surface of the recess 113 during thermal expansion of each heater 130. Therefore, the heating device 100 according to this embodiment can improve the durability of the multiple heaters 130. Furthermore, since the tip 130a of the heater body 131 is positioned away from the bottom surface of the recess 113, radiant heat from the highest heat generation zone (i.e., the folded portion 135b of the heating resistor 135) located on the tip 130a side of the heater body 131 can be transmitted to the heating plate 110. Therefore, the heating device 100 according to this embodiment can reduce heat concentration at a specific location on the heating plate 110, thereby further improving the heating uniformity of the heating plate 110.

[0079] 9, in a plan view seen from a direction perpendicular to the upper surface 110a of the heating plate 110, which is the heating surface (here, the Z-axis direction), the recess 113 has a length L1 in the Y-axis direction (an example of a first direction) that is longer than a length L2 in the X-axis direction (an example of a second direction). In other words, the recess 113 has a shape in which the length L1 in the Y-axis direction is longer than the length L2 in the X-axis direction. Specifically, the recess 113 has two linear inner side surfaces 113a in the X-axis direction, both ends of which in the Y-axis direction are connected by a convex curved surface 113b. In other words, in a plan view seen from a direction perpendicular to the upper surface 110a of the heating plate 110, which is the heating surface, the recess 113 has a racetrack shape in which the two linear inner side surfaces 113a in the X-axis direction are connected by a semicircular convex curved surface 113b at both ends in the Y-axis direction. Each heater 130 is plate-shaped and has a first surface S1 in the X-axis direction and a second surface S2 in the Y-axis direction. In other words, each heater 130 has a rectangular shape with its longitudinal direction coinciding with the Y-axis direction and its lateral direction coinciding with the X-axis direction. The first surface S1 of each heater 130 in the lateral direction (here, the X-axis direction) faces the inner surface 113a of the recess 113 in the X-axis direction.

[0080] With this configuration, heat generated in each heater 130 is transferred from the first surface S1 toward the inner side surface 113a of the recess 113, and the heat transfer direction from the plurality of heaters 130 to the heating plate 110 can be aligned in the same direction (here, the X-axis direction). Therefore, according to the heating device 100 of this embodiment, the temperature uniformity of the heating plate 110 can be further improved.

[0081] Furthermore, when the shape of the recess 113 is a racetrack shape as shown in FIG. 9, the second surface S2 in the longitudinal direction (here, the Y-axis direction) of each heater 130 may face the convex curved surface 113b of the recess 113 in the Y-axis direction.

[0082] Each heater 130 has a temperature distribution in which the temperature decreases in the order of the first surface S1, the second surface S2, and the corners between the first surface S1 and the second surface S2. Therefore, with this configuration, the second surface S2 and the corners of each heater 130 are close to the convex curved surface 113b of the recess 113, and the heat transfer efficiency to the convex curved surface 113b of the recess 113 can be made closer to the heat transfer efficiency to the inner surface 113a of the recess 113. Therefore, with the heating device 100 having this configuration, the temperature uniformity of the heating plate 110 can be further improved.

[0083] Furthermore, when the shape of the recess 113 is a racetrack shape as shown in FIG. 9, the width along the Y-axis direction of the inner surface 113a of the recess 113 in the X-axis direction may be smaller than the width along the longitudinal direction (here, the Y-axis direction) of each heater 130.

[0084] With this configuration, compared to when the width along the Y-axis direction of the inner side surface 113a of the recess 113 in the X-axis direction is larger than the width along the longitudinal direction of each heater 130, the second surface S2 and corners of each heater 130 are closer to the convex curved surface 113b of the recess 113. This improves the efficiency of heat transfer from each heater 130 to the convex curved surface 113b of the recess 113, thereby further improving the thermal uniformity of the heating plate 110.

[0085] 9, the shape of the recess 113 is a racetrack shape, but the shape of the recess 113 is not limited to the racetrack shape. That is, in a plan view seen from a direction perpendicular to the upper surface 110a of the heating plate 110, which is the heating surface (here, the Z-axis direction), the shape of the recess 113 may be a shape other than a racetrack shape as long as the length L1 in the Y-axis direction is longer than the length L2 in the X-axis direction.

[0086] 10 to 12 are diagrams showing other shapes of the recess 113. For example, as shown in FIG. 10, the recess 113 may be elliptical in shape, in which the length L1 in the Y-axis direction is longer than the length L2 in the X-axis direction. Alternatively, as shown in FIG. 11, the recess 113 may be rectangular in shape, in which the length L1 in the Y-axis direction is longer than the length L2 in the X-axis direction. Alternatively, as shown in FIG. 12, the recess 113 may be rectangular in shape, in which the corners are rounded. In either case, each heater 130 has a rectangular shape whose longitudinal direction coincides with the Y-axis direction and whose lateral direction coincides with the X-axis direction. The first surface S1 of each heater 130 in the lateral direction (here, the X-axis direction) faces the inner surface 113a of the recess 113 in the X-axis direction. This allows the heat transfer directions from the multiple heaters 130 to the heating plate 110 to be aligned in the same direction (here, the X-axis direction), thereby further improving the heat uniformity of the heating plate 110.

[0087] FIG. 13 is a schematic diagram for explaining another example of the positional relationship between the folded portions 135b, 135c of each heating resistor 135 of the plurality of heaters 130 and each recess 113 of the heating plate 110. In FIG.

[0088] As shown in FIG. 13, in the heating device 100 according to this embodiment, all of the folded portions 135b, 135c of the heat generating resistors 135 of the heaters 130 may be located within the recess 113.

[0089] For example, in the example shown in FIG. 13, in addition to the folded portion 135b located on the tip end 130a side of the heater body 131, the folded portion 135c located on the base end 130b side of the heater body 131 is also located within the recess 113.

[0090] With this configuration, heat from all heat generating zones (heat generating zones including folded portions 135b, 135c) of each heater 130 can be transferred to the heating plate 110 via each recess 113, thereby further improving the thermal uniformity of the heating plate 110.

[0091] In the example shown in FIG. 13, the connection portion between the heating resistor 135 and the lead wires 136 and 137 is located outside the recess 113.

[0092] With this configuration, the connection portions between the heating resistor 135 and the lead wires 136, 137 are more easily exposed to outside air than when the connection portions between the heating resistor 135 and the lead wires 136, 137 are located inside the recess 113, thereby lowering the temperature of the connection portions. Therefore, with the heating device 100 having this configuration, the electrical resistance value at the connection portions between the heating resistor 135 and the lead wires 136, 137 can be reduced, thereby improving the heat generation efficiency of the heating resistor 135.

[0093] FIG. 14 is a schematic diagram for explaining another example of the positional relationship between the connection portions of the heating resistor 135 and the lead wires 136 and 137 and the recesses 113 of the heating plate 110. In FIG.

[0094] As shown in FIG. 14, the connection portion between the heating resistor 135 and the lead wires 136 and 137 may be located within the recess 113 .

[0095] With this configuration, the temperature difference between the connection portion between the heating resistor 135 and the lead wires 136, 137 is smaller than when the connection portion is located outside the recess 113, and thermal stress is less likely to concentrate on the connection portion. Therefore, with the heating device 100 having this configuration, the durability of the multiple heaters 130 can be improved.

[0096] 15 is a diagram showing another example of an insertion mode of the heaters 130 according to the embodiment. As shown in Fig. 15, a heat insulating material 190 may be located on the lower surface 110b of the heating plate 110. The heat insulating material 190 has through holes 191 corresponding to the positions of the recesses 113. Then, each heater 130 may be inserted into the recess 113 through the through holes 191 of the heat insulating material 190.

[0097] This configuration can further reduce the heat generated by each heater 130 from being scattered and dissipated from the openings of each recess 113 in the heating plate 110. Therefore, the heating device 100 having this configuration can further improve the uniformity of heat distribution of the heating plate 110.

[0098] Further advantages and alternative embodiments may readily occur to those skilled in the art. Therefore, the invention in its broader aspects is not limited to the specific details and representative embodiments shown and described above. Accordingly, various modifications may be made without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents. [Explanation of symbols]

[0099] 100 Heating device 110 Heating Plate 110a top side 110b Bottom side 111 first plate member 111a Bottom side 112 second plate member 112a Top side 112b Through hole 113 Recess 113a Inside surface 113b Convex curved surface 114 Fixing member 120 Fixtures 120a fixing hole 121 Fixing plate 121a Through hole 122 Fixed Bar 124 Connecting member 125 Connecting member 130 Heater 130a Tip 130b Proximal end 131 Heater body 132 Cover member 132a Bonding material 133 Anode lead electrode 133a Pad section 133b Terminal section 134 Cathode lead electrode 134a Pad section 134b Terminal section 135 Heating resistor 135a Straight section 135b Turning section 135c Turning section 136 Lead Wiring 137 Lead Wiring 140 Spacer member 150 Support Plate 151 Columnar members 160 Anode side collective electrode 161 1st metal plate 162 Second metal plate 163 First fixing member 170 Cathode side collective electrode 171 Third metal plate 172 4th metal plate 173 Second fixing member 180 Insulating material 181 Fixing member 190 Insulation 191 Through hole S1 1st page S2 side 2

Claims

1. A heating plate; a plurality of heaters; the heating plate has a heating surface and a plurality of recesses on a back surface opposite to the heating surface; the plurality of heaters are located in the plurality of recesses, respectively; Each of the heaters has a columnar main body and a meandering wiring portion disposed inside the main body in the longitudinal direction, the wiring portion has a plurality of folded portions, A heating device, wherein the folded portion located on the tip side of the main body portion is located within the recess.

2. In a plan view seen from a direction perpendicular to the heating surface, the recess has a length in a first direction longer than a length in a second direction perpendicular to the first direction, each of the heaters has a plate shape having a second surface in the first direction and a first surface in the second direction; The heating device according to claim 1 , wherein the first surface of each of the heaters faces an inner surface of the recess in the second direction.

3. In a plan view seen from a direction perpendicular to the heating surface, the recess has two linear inner surfaces in the second direction, both ends of which in the first direction are connected by convex curved surfaces, The heating device according to claim 2 , wherein the second surface of each of the heaters faces the convex curved surface of the recess.

4. The heating device according to claim 1 , wherein all of the plurality of folded portions of the wiring portion are located within the recessed portion.

5. Each of the heaters further includes a lead wire portion connected to an end of the wiring portion inside the main body portion, The heating device according to claim 4 , wherein a connection portion between the wiring portion and the lead wire portion is located within the recess.

6. Each of the heaters further includes a lead wire portion connected to an end of the wiring portion inside the main body portion, The heating device according to claim 4 , wherein a connection portion between the wiring portion and the lead wire portion is located outside the recess.

7. The heating device according to claim 1 , wherein each of the heaters is positioned in the recess so that a tip of the main body does not come into contact with a bottom surface of the recess.

8. a heat insulating material having a through hole corresponding to the position of the recess is located on the rear surface of the heating plate, The heating device according to claim 1 , wherein each of the heaters is positioned in the recess through a through-hole in the heat insulating material.

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