Surface Inspection Equipment

Abstract

To enable inspection for defects and texture to be carried out at low cost as compared with the case where a special optical system is used.SOLUTION: A surface inspection apparatus comprises: an imaging device for imaging a target portion of an object to be inspected; a first light source which is one of a plurality of light sources for lighting the portion, wherein mainly a light component of the light output from the light source that was mirror-reflected at the target portion enters the imaging device; and a second light source which is another one of the plurality of light sources and arranged opposite the first light source across the optical axis of the imaging device, wherein mainly a light component that was diffusion-reflected at the target portion enters the imaging device.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a surface inspection device. [Background technology]

[0002] Today, various products use parts molded from synthetic resins (hereinafter referred to as "molded products"). However, visually observable defects can appear on the surface of molded products. These defects include "sink marks," which are unintentionally formed depressions, and "welds," which form where molten resin meets. Even in the case of a textured finish, which intentionally creates unevenness on the surface, differences from the expected texture can appear. Texture changes depending on a combination of factors, including color, gloss, and unevenness. Today, visually observable defects are inspected visually. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 5765152 Summary of the Invention [Problem to be solved by the invention]

[0004] Various methods have been proposed for inspecting the surface condition of objects, but there are no devices that can inexpensively inspect for defects and texture, as they require special optical systems.

[0005] An object of the present invention is to enable inspection of defects and textures at low cost compared to when special optical systems are used. [Means for solving the problem]

[0006] The invention described in claim 1 is a surface inspection apparatus having an imaging device that images a portion of an object to be inspected, a first light source that is one of a plurality of light sources that illuminate the portion, and of the light output from the first light source, a light component that is specularly reflected by the portion to be inspected is mainly incident on the imaging device, and a second light source that is another of the plurality of light sources, and is arranged on the opposite side of the optical axis of the imaging device from the first light source, and a light component that is diffusely reflected by the portion to be inspected is mainly incident on the imaging device, On the screen where At a preset position, Visually inspect the surface condition of the above-mentioned parts Where to go as This is a surface inspection device that synthesizes and displays an image of the indicator. Claim 2 The invention described in claim 1 is characterized in that the optical axis of the imaging device is arranged approximately parallel to the normal to the portion. 1 2. A surface inspection apparatus according to claim 1. Claim 3 The invention described in claim 1 is characterized in that the inclination of the optical axis with respect to the normal line is within approximately 10°. 2 2. A surface inspection apparatus according to claim 1. Claim 4 The invention described in claim 1 is characterized in that the inclination of the output axis of the first light source with respect to the optical axis is approximately 5° to 15°. 3 2. A surface inspection apparatus according to claim 1. Claim 5 The invention described in claim 1 is characterized in that the inclination of the output axis of the second light source with respect to the optical axis is approximately 45°. 3 or 4 2. A surface inspection apparatus according to claim 1. Claim 6 The invention described in claims 1 to 5 is characterized in that the imaging device, the first light source, and the second light source are positioned on approximately the same plane. 5 1. A surface inspection device according to any one of claims 1 to 9. Claim 7 The invention described in claim 1 is characterized in that both the first light source and the second light source output visible light. 1 2. A surface inspection apparatus according to claim 1. Claim 8The invention described in claim 1 is characterized in that the visible light is all white. 7 2. A surface inspection apparatus according to claim 1. Claim 9 The invention described in claim 1 is characterized in that the imaging device outputs a luminance signal. 1 2. A surface inspection apparatus according to claim 1. Claim 10 The invention described in claim 1 further includes a processor, and the processor outputs a third image obtained by subtracting the luminance profile of the second image captured by the second light source from the luminance profile of the first image captured by the first light source. 1 2. A surface inspection apparatus according to claim 1. [Effects of the Invention]

[0007] According to the invention described in claim 1, the range of inspection can be easily confirmed. Claim 2 According to the described invention, the accuracy of defect and texture detection can be improved. Claim 3 According to the described invention, the measurement conditions within the field of view can be made uniform. Claim 4 According to the described invention, shadows can be emphasized. Claim 5 According to the described invention, the accuracy of texture detection can be improved. Claim 6 The described invention allows for the generation of images that highlight defects. Claim 7 According to the described invention, the actual texture can be inspected. Claim 8 According to the described invention, the actual texture can be inspected. Claim 9 According to the described invention, a glossy image can be output. Claim 10 The described invention allows for increased defect sensitivity. [Brief explanation of the drawings]

[0008] [Figure 1]FIG. 1 is a diagram illustrating an example of use of a surface inspection device assumed in the first embodiment. [Figure 2] 1A and 1B are diagrams illustrating examples of defects that appear on the surface of an inspection object. (A) shows an example of a sink mark, and (B) shows an example of a weld. [Figure 3] FIG. 2 is a diagram illustrating an example of a hardware configuration of the surface inspecting device used in the first embodiment. [Figure 4] 2 is a diagram illustrating an example of the structure of an optical system of the surface inspecting device according to the first embodiment. FIG. [Figure 5] 10 is a flowchart illustrating an example of an inspection operation by the surface inspection device. [Figure 6] 1 is a diagram illustrating the principle of inspection by the surface inspection device in embodiment 1. (A) shows an example of image C, (B) shows a cross-section of a concave defect formed on the surface of the object to be inspected, (C) shows the brightness profile SA of image A and the brightness profile SB of image B, and (D) shows the brightness profile SA-SB corresponding to image C and the brightness profile SA of image A. [Figure 7] 10A and 10B are diagrams illustrating examples of displaying an image C according to embodiment 2. (A) shows an example in which an image C of an object to be inspected is displayed as is on a display, and (B) shows an example in which an index is superimposed on the image C of the object to be inspected. [Figure 8] 10A and 10B are diagrams illustrating a display example of image C in embodiment 3. (A) shows the attachment positions of indices, and (B) shows a display example of image C obtained by capturing an image of an inspection object. [Figure 9] FIG. 10 is a diagram for explaining the arrangement of an optical system of a surface inspection device according to a fourth embodiment. [Figure 10] FIG. 10 is a diagram illustrating an example of use of a surface inspection device assumed in a fifth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. <First Embodiment> <Example of using a surface inspection device> FIG. 1 is a diagram illustrating an example of use of a surface inspection device 1 assumed in the first embodiment. The surface inspection device 1 used in the first embodiment is a so-called area camera, and the imaging range (hereinafter referred to as "imaging range") is defined by a surface.

[0010] 1 does not include the light-shielding frame 100 (see FIG. 4) that blocks external light from entering the imaging range. The light-shielding frame 100 is made of materials or members that do not transmit external light. The light-shielding frame 100 is used to block external light and also to position the surface inspection device 1 and the inspection object 10. The positioning here includes, for example, positioning of the imaging range, positioning of the surface of the inspection object 10 and light sources 108 and 109 (see FIG. 4), and positioning of the surface of the inspection object 10 and camera 107 (see FIG. 4). Incidentally, the light-shielding frame 100 constitutes a part of the surface inspecting apparatus 1. The light-shielding frame 100 may be integrated with the surface inspecting apparatus 1, or may be detachable from the housing of the surface inspecting apparatus 1.

[0011] In the case of Fig. 1, the imaging range includes the entire object to be inspected (hereinafter also referred to as "inspection target") 10. However, the imaging range may include only a portion of the inspection target 10 that is of interest. In this embodiment, the inspection target 10 is assumed to be a molded product. In the case of inspection using an area camera, the surface inspection device 1 and the inspection object 10 are performed in a stationary state. In other words, the surface of the inspection object 10 is inspected in a state where the surface inspection device 1 and the inspection object 10 do not move relative to each other.

[0012] 1, inspection object 10 is plate-shaped, but the shape of inspection object 10 is arbitrary. For example, inspection object 10 may have a shape with a curved surface, such as a sphere or cylinder, in addition to a polyhedron. The actual inspection object 10 may have holes, notches, protrusions, steps, and the like. The surface finish of the inspection object 10 may be untreated, mirror-finished, semi-mirror-finished, or textured.

[0013] The surface inspection device 1 inspects the surface of an inspection object 10 for defects and texture. Defects include sink marks and welds. Sink marks are depressions on the surface that occur in thick parts or ribs, while welds are lines that occur where the leading edges of molten resin meet inside the mold. Defects also include scratches and dents caused by collisions. Texture is a visual and tactile impression, and is influenced by the color, gloss, and roughness of an object's surface. Surface roughness includes lines that appear when cutting a mold. These types of lines are different from defects.

[0014] FIG. 2 is a diagram illustrating examples of defects that appear on the surface of the inspection object 10. (A) shows an example of a sink mark, and (B) shows an example of a weld. In FIGS. 2(A) and 2(B), the defect locations are indicated by dashed lines. There are four sink marks in FIG. 2(A). The surface inspection device 1 in this embodiment is not limited to inspection of defects and texture, but is also used to inspect surface stains.

[0015] The surface inspection device 1 generates an image that highlights defects on the surface of the inspection object 10, and also quantifies and outputs the results of evaluating the texture. The defects here are irregularities or streaks that appear on an area that should be flat, such as sink marks or welds. The texture is evaluated numerically. 1 is placed parallel to a plane defined by the X-axis and Y-axis. In this case, the normal to the surface of inspection object 10 is parallel to the Z-axis. On the other hand, the surface inspection device 1 is placed vertically above the inspection object 10. In other words, the optical axis of the optical system used by the surface inspection device 1 to image the inspection object 10 is set approximately parallel to the normal to the surface of the inspection object 10. Hereinafter, the conditions required for this optical axis will also be referred to as "imaging conditions."

[0016] At this time, the surface inspecting device 1 is installed at a position that satisfies the imaging conditions. The surface inspecting device 1 may be installed by being fixed to a specific member, or may be installed so as to be detachable from the specific member. However, the surface inspection device 1 may be portable by an operator. In this case, the operator holds the surface inspection device 1 in his / her hand, for example, and directs the light receiving surface toward the inspection target 10 to inspect any surface.

[0017] <Configuration of surface inspection equipment> FIG. 3 is a diagram illustrating an example of the hardware configuration of the surface inspecting device 1 used in the first embodiment. 3 includes a processor 101 that controls the operation of the entire apparatus, a ROM (Read Only Memory) 102 in which a BIOS (Basic Input Output System) and the like are stored, a RAM (Random Access Memory) 103 used as a work area for the processor 101, an auxiliary storage device 104 that stores programs and image data, a display 105 that displays an image of the surface of the inspection object 10 and information related to operations, an operation reception device 106 that receives operations from an operator, a camera 107 that images the surface of the inspection object 10, light sources 108 and 109 that illuminate the surface of the inspection object 10, and a communication IF (Interface) 110 used for communication with the outside. The processor 101 and each part are connected via a signal line 111 such as a bus.

[0018] The processor 101, ROM 102, and RAM 103 function as a so-called computer. The processor 101 realizes various functions by executing a program. For example, the processor 101 generates an image representing the emission of illumination light and the surface of the inspection object 10 by executing the program. Image data obtained by capturing an image of the surface of the inspection object 10 is stored in the auxiliary storage device 104. The auxiliary storage device may be, for example, a semiconductor memory or a hard disk drive. Firmware and application programs are also stored in the auxiliary storage device 104. Hereinafter, firmware and application programs are collectively referred to as "programs."

[0019] The display 105 is, for example, a liquid crystal display or an organic EL display, and displays an image of the entire inspection object 10 or a specific portion of the inspection object 10. The display 105 is also used to position the imaging range relative to the inspection object 10. In this embodiment, the display 105 is provided integrally with the device main body, but it may be an external device connected via the communication IF 110, or may be part of another device connected via the communication IF 110. For example, the display 105 may be the display of another computer connected via the communication IF 110.

[0020] The operation reception device 106 is composed of a touch sensor arranged on the display 105, physical switches, buttons, etc. arranged on the housing. A device that integrates the display 105 and the operation reception device 106 is called a touch panel. The touch panel is used to receive user operations on keys displayed as software (hereinafter also referred to as "soft keys").

[0021] In this embodiment, a color camera is used as the camera 107. The imaging element of the camera 107 is, for example, a CCD (=Charge Coupled Device) imaging sensor element or a CMOS (=Complementary Metal Oxide Semiconductor) imaging sensor element. Since a color camera is used for the camera 107, it is possible to observe not only the brightness but also the color tone of the surface of the inspection object 10. The camera 107 is an example of an imaging device.

[0022] In this embodiment, the light sources 108 and 109 are both white light sources. The light source 108 is disposed at an angle such that the light component specularly reflected from the surface of the inspection object 10 is mainly incident on the camera 107. The light source 108 is an example of a first light source. On the other hand, light source 109 is disposed at an angle such that light components diffusely reflected on the surface of inspection object 10 are mainly incident on camera 107. Light source 109 is an example of a second light source.

[0023] In FIG. 3, the light source 108 is referred to as "light source A" and the light source 109 is referred to as "light source B." In this embodiment, the light source 108 and the light source 109 are arranged on opposite sides of the optical axis of the camera 107 . In this embodiment, non-parallel light sources are used for the light source 108 and the light source 109. That is, the light source 108 and the light source 109 are point light sources or surface light sources.

[0024] In the case of the surface inspection device 1 in this embodiment, the output axis of the illumination light output from the light source 108, the output axis of the illumination light output from the light source 109, and the optical axis of the camera 107 are arranged on approximately the same plane. The communication IF 110 is configured with modules that comply with wired or wireless communication standards, and may be, for example, an Ethernet (registered trademark) module, a USB (Universal Serial Bus), a wireless LAN, or the like.

[0025] <Optical system structure> FIG. 4 is a diagram illustrating an example of the structure of the optical system of the surface inspecting device 1 according to the first embodiment. 4 shows a schematic cross-sectional shape of the light-shielding frame 100. However, the cross-sectional shape shown in FIG. 4 is just one example. In the present embodiment, the area where the opening of the light-shielding frame 100 is pressed against the surface of the inspection object 10 coincides with the imaging area. However, the area where the opening of the light-shielding frame 100 is pressed against the surface of the inspection object 10 may be wider than the imaging area. The opening of the light-shielding frame 100 is shaped so that when pressed against the surface of the inspection object 10, no gap is created between the light-shielding frame 100 and the surface of the inspection object 10. However, an elastic member such as rubber or resin that deforms when pressed may be attached around the opening.

[0026] The opening of the light-shielding frame 100 shown in Fig. 4 is provided with a jaw portion whose cross section is bent in a V shape. Simply by pressing the jaw portion against the surface of the inspection object 10, the angle of incidence of the illumination light with respect to the surface of the inspection object 10 and the positional relationship of the camera 107 are accurately positioned to the designed relationships. In other words, the positioning accuracy is improved. In FIG. 4, the normal to the surface of the flat plate-shaped inspection object 10 that is the object of inspection is indicated by N0, and the optical axis of the camera 107 is indicated by L1. 4, the optical axis L1 is parallel to the normal line N0. Specifically, the camera 107 is placed approximately directly above the flat-plate-shaped inspection object 10.

[0027] In this case, the MTF (=Modulation Transfer Function) is roughly uniform within the field of view of the camera 107. Therefore, the contrast variation due to differences in position within the field of view is small, making it possible to faithfully capture an image of the surface state of the inspection object 10. However, the optical axis L1 does not need to be strictly parallel to the normal line N0. For example, the optical axis L1 may be inclined within approximately 10° with respect to the normal line N0. 4, the inspection object 10 has a substantially flat plate shape. Therefore, the normal lines N0 at all positions within the imaging range are substantially parallel to one another. As a result, only one normal line N0 on the surface of the inspection object 10 is identified.

[0028] However, the surface of the actual inspection object 10 has irregularities due to its structure or design, curved surfaces, steps, joints, minute irregularities formed during the molding process, and the like. Therefore, the average value of the normals N0 of the region AR of interest in the inspection object 10 or the normals N0 of a specific position P of interest is used to determine the direction in which to place the camera 107. Alternatively, the normals N0 of an average virtual surface or a representative part of the inspection object 10 may be used. In this embodiment, a non-telecentric lens is used for the lens of the camera 107. As described above, non-parallel light sources are used for the light sources 108 and 109. Therefore, the camera 107 can be made smaller and less expensive than when a telecentric lens or a parallel light source is used.

[0029] In the case of FIG. 4, the angle θ formed by the output axis LA of the illumination light output from the light source 108 and the optical axis L1 of the camera 107 is A is set to approximately 5°. In other words, the angle formed by the chief ray irradiating the surface of inspection object 10 and the normal N0 to the same surface is set to approximately 5°. Here, when the light source 108 is a point light source or a surface light source, the output axis LA of the illumination light refers to the central axis of the light beam output from the light source 108, and indicates the direction in which the luminous intensity is greatest. The same applies to the output axis LB of the light source 109.

[0030] Angle θ A If the angle θ is set to approximately less than 5°, the light source 108 is likely to block the light component specularly reflected on the surface of the inspection object 10 from entering the camera 107. A The minimum angle is set to approximately 5°. In this embodiment, the angle θ A The maximum angle is set to approximately 15°. However, 15° is just a guideline, and the maximum angle can be set to more than 15°. For example, if a telecentric lens or a parallel light source is used, the angle θ A The maximum angle can be set to approximately 15° or more.

[0031] However, the angle θ A exceeds approximately 15° and further exceeds a threshold angle, the main light component contained in the reflected light incident on the camera 107 is replaced by a diffusely reflected light component from a specularly reflected light component. Therefore, in this embodiment, the ratio of the specularly reflected light component in the reflected light incident on the camera 107 is increased, and the light source 108 is positioned so as not to prevent the incident light component on the camera 107. The angle θ of the light source 108 is set to 0.05°. A Set to approximately 5°.

[0032] As a result, the specularly reflected light component of the illumination light output from the light source 108 is mainly incident on the camera 107 . Here, the reason why specularly reflected light components mainly enter camera 107 is that, depending on the relationship between the structural irregularities of the object of inspection 10 and the slopes of the fine irregularities formed on the surface and the angle of the illumination light, there is a possibility that a considerable amount of light components diffusely reflected on the surface of object of inspection 10 will enter camera 107.

[0033] In this embodiment, the illumination light output from the light source 108 is used to acquire information about the texture, particularly gloss, of the surface of the inspection object 10. This is because people are more likely to notice defects in glossy areas. The illumination light output from the light source 108 is incident on the irregularities present on the surface of the inspection object 10 from approximately directly above. Therefore, the image captured by the camera 107 using the illumination light output from the light source 108 contains less information about shadows caused by the irregularities on the surface of the inspection object 10.

[0034] In the case of FIG. 4, the angle θ formed by the output axis LB of the illumination light output from the light source 109 and the optical axis L1 of the camera 107 is B is set to approximately 45°. Angle θ B By setting the angle to approximately 45°, the component of light diffused and reflected on the surface of the inspection object 10 is mainly incident on the camera 107. In this case as well, depending on the relationship between the angle of the illumination light and the irregularities, etc., in the structure or design of the inspection object 10, there is a possibility that the specularly reflected light component of the illumination light output from the light source 109 may be incident on the camera 107. For this reason, the expression that the light component diffusely reflected on the surface of the inspection object 10 is mainly incident on the camera 107 is used.

[0035] In this embodiment, light source 108 and light source 109 are arranged on opposite sides of optical axis L1 of camera 107. Therefore, in principle, the directions of the shadows formed by the unevenness on the surface of inspection object 10 are opposite. In other words, the direction of the shadow formed by the illumination light output from light source 108 on the irregularities on the surface of the object to be inspected 10 is opposite to the direction of the shadow formed by the illumination light output from light source 109 on the same irregularities on the surface of the object to be inspected 10.

[0036] In addition, the illumination light output from the light source 109 illuminates the irregularities on the surface of the inspection object 10 from diagonally above, so the shadows of the convex parts on the surface appear on the opposite side of the light source 109, and the shadows of the concave parts on the surface appear on the same side as the light source 109. Therefore, by using both light source 108 and light source 109, it becomes easy to observe the irregularities present on the surface of inspection object 10 even when the surface of inspection object 10 is imaged from vertically above.

[0037] <Inspection operation> 5 is a flowchart illustrating an example of the inspection operation by the surface inspection device 1. The symbol S shown in the figure represents a step. When the surface inspecting device 1 in this embodiment starts an inspection operation, it turns on the light source A and captures an image A of the surface of the inspection object 10 (step 1). The light source A here refers to the light source 108. The image A is an example of a first image.

[0038] When the capturing of image A is completed, the surface inspecting device 1 turns off the light source A (step 2). Next, the surface inspecting device 1 turns on the light source B and captures an image B of the surface of the inspection object 10 (step 3). The light source B here refers to the light source 109. Image B is an example of a second image. When the capturing of image B is completed, the surface inspecting device 1 turns off the light source B (step 4).

[0039] Next, the surface inspection device 1 generates image C by subtracting the luminance profile SB of image B from the luminance profile SA of image A (step 5), and displays the generated image C on the display 105 (see Figure 3) (step 6). The luminance profiles SA and SB here are so-called distributions of intensity values ​​of luminance signals. Image C is an example of a third image, and includes information on gloss and other textures.

[0040] 6 is a diagram illustrating the principle of inspection by the surface inspection device 1 in embodiment 1. (A) shows an example of image C, (B) shows a cross-section of a concave defect formed on the surface of the inspection object 10, (C) shows the luminance profile SA of image A and the luminance profile SB of image B, and (D) shows the luminance profile SA-SB corresponding to image C and the luminance profile SA of image A.

[0041] In the case of Fig. 6(B), a depression is formed on the surface of the inspection object 10. This depression is, for example, an example of a sink mark. For convenience of explanation, the depression shown in Fig. 6(B) has a cross-sectional shape of an isosceles triangle, but of course, this shape is only one example. In this case, in the luminance profile SA shown in Figure 6(C), the intensity of the light component reflected by the slope on the left side of the page is greater than the intensity of the light component reflected by the slope on the right side. This distribution of intensity values ​​occurs because the light source 108 is located on the right side of the recess. The luminance profile SA mainly contains specularly reflected light components.

[0042] Conversely, in the luminance profile SB shown in FIG. 6(C), the intensity of the light component reflected by the slope on the left side of the paper is smaller than the intensity of the light component reflected by the slope on the right side. This distribution of intensity values ​​occurs because the light source 109 is located on the left side of the depression. The luminance profile SB mainly contains diffusely reflected light components.

[0043] 6(D) shows the luminance profile SA-SB corresponding to image C. For comparison, FIG. 6(D) also shows the luminance profile SA corresponding to image A. As shown in FIG. 6(D), the amplitude of the luminance profile SA-SB in the image C is amplified by the luminance profile SB corresponding to the diffuse reflection, compared to when the luminance profile SA is used alone.

[0044] As a result, the contrast of the defective portion is emphasized in image C shown in Fig. 6(A). The emphasized contrast makes the unevenness more noticeable. Image C also includes shading caused by illumination light irradiated from both sides of optical axis L1. In particular, image A formed by illumination light from light source 108 contains little shading information, so adding shading information makes it easier to identify defects compared to observing image A alone.

[0045] Furthermore, the camera 107 of the surface inspection device 1 used in this embodiment uses a non-telecentric lens, making it possible to realize a surface inspection device 1 that is smaller and less expensive than a camera that uses a telecentric lens. Furthermore, the surface inspection device 1 calculates the difference between the specularly reflected light component and the diffusely reflected light component, i.e., generates an image C corresponding to the brightness profile SA-SB, making it possible to inspect defects and textures on the surface of the inspection object 10 at low cost and with high sensitivity.

[0046] <Embodiment 2> In this embodiment, an example will be described in which an index for specifying a location to be inspected is superimposed on an image C displayed on the display 105 (see FIG. 3). 7A and 7B are diagrams illustrating examples of displaying an image C in accordance with the second embodiment. (A) shows an example in which an image C of the inspection object 10 (see FIG. 1) is displayed as is on the display 105, and (B) shows an example in which an index is superimposed on the image C of the inspection object 10.

[0047] The display example shown in Fig. 7(A) corresponds to screen C displayed on the display 105 of the surface inspection device 1 (see Fig. 1) used in embodiment 1. In this case, the operator judges defects and abnormalities in texture through image C in which the defects are emphasized. On the other hand, since all decisions are made by the worker, there is a possibility that points that should be checked may be overlooked.

[0048] In the display example shown in FIG. 7(B), a frame 105A is displayed around a location of the inspection object 10 that should be checked, thereby preventing the location from being overlooked. The frame 105A shown in FIG. 7(B) is generated by the processor 101 (see FIG. 3) according to, for example, the shape and size of the defect appearing in the relevant location.

[0049] 7(B), the frame 105A is displayed as an index in the upper left corner, but the frame 105A can also be displayed in another position. Also, the position where the frame 105A is displayed may be switched one by one in sequence at a predetermined cycle. In addition, a plurality of frames 105A may be displayed at one time. For example, frames 105A may be displayed in all of the areas surrounded by dashed lines in Figures 2(A) and 2(B).

[0050] By displaying the frame 105A, the likelihood of an operator overlooking a point that should be checked is reduced, regardless of the operator's level of skill. The display color, line thickness, line type, blinking display format, etc. of the frame 105A may be determined depending on the inspection object 10 and the inspection environment. For example, if the frame 105A is made of a color that is opposite or complementary to the color tone of the inspection object 10, the visibility of the area to be checked is improved.

[0051] There are various possible methods for determining the location where the frame 105A is to be displayed. For example, when the positions of the surface inspecting device 1 and the inspection object 10 are uniquely determined, the position on the screen where the frame 105A is displayed is set in advance. In other words, when the inspection object 10 is positioned at a predetermined position relative to the surface inspecting device 1, the position, shape, etc. on the screen where the frame 105A is displayed are set in advance.

[0052] In contrast, when the positions of the surface inspection device 1 and the inspection object 10 cannot be uniquely determined, the processor 101 (see Figure 3) uses multiple structural feature points contained in the captured image C as a reference to set the position at which to display the frame 105A.

[0053] <Third Embodiment> In this embodiment, an example will also be described in which an index specifying a location to be inspected is displayed on image C displayed on display 105 (see FIG. 3). However, in the case of this embodiment, the indicator is physically attached to the surface inspection device 1. 8A and 8B are diagrams illustrating a display example of image C in embodiment 3. (A) shows the attachment position of index 112, and (B) shows a display example of image C obtained by capturing an image of inspection object 10.

[0054] 8(A), in this embodiment, a physical index 112 is placed on the light receiving surface of the camera 107. Specifically, the index 112 is placed at a position between the light receiving surface and the inspection object 10. Therefore, as shown in FIG. 8(B), a frame 112A corresponding to the index 112 is reflected on the display 105.

[0055] Displaying the frame 112A on the display 105 facilitates the task of positioning the inspection object 10 relative to the surface inspection device 1, whose position is fixed, and the task of positioning the surface inspection device 1 relative to the inspection object 10, whose position is fixed.

[0056] <Fourth Embodiment> Fig. 9 is a diagram for explaining the arrangement of the optical system of the surface inspecting device 1 in the embodiment 4. In Fig. 9, parts corresponding to those in Fig. 4 are assigned the same reference numerals. The surface inspecting device 1 shown in FIG.

[0057] One of the two light sources 109 is provided at the same position as the light source 109 in the first embodiment. In FIG. 9, this light source 109 is denoted as "B1" and its output axis is denoted as "LB1." The angle between the output axis LB1 and the optical axis L1 of the camera 107 is θ B1 The image captured using the reflected light corresponding to the light source B1 is denoted as "B1."

[0058] The other light source 109 added in FIG. 9 is provided on the same side as the light source 108. In FIG. 9, this newly added light source 109 is denoted as "B2" and its output axis is denoted as "LB2." The angle between the output axis LB2 and the optical axis L1 of the camera 107 is θ B2 The image captured of the reflected light corresponding to the light source B2 is denoted as "B2." The light source B2 is an example of a second light source.

[0059] In this embodiment, the angle θ B1 and angle θ B2 are roughly the same. However, the angle θ B1 and angle θ B2 However, the angle θ B1 and angle θ B2 are set within a range in which the light components diffusely reflected on the surface of the inspection object 10 are mainly incident on the camera 107.

[0060] In addition, in this embodiment, the output axis LA of the illumination light output from light source 108, the output axis LB1 of the illumination light output from light source B1, the output axis LB2 of the illumination light output from light source B2, and the optical axis L1 of camera 107 are all located on approximately the same plane. Angle θ of light source B2 B2 is the angle θ of light source A A Because the distance is larger, the shadow that appears in image B2 will be longer than the shadow that appears in image A, even when capturing the same unevenness. By arranging the light source B1 and the light source B2 on opposite sides of the optical axis L1 of the camera 107, the two images B captured using the illumination light from each light source have shadows that appear in opposite directions.

[0061] <Fifth Embodiment> Fig. 10 is a diagram for explaining an example of use of the surface inspection device 1A assumed in the embodiment 5. In Fig. 10, parts corresponding to those in Fig. 1 are assigned the same reference numerals. The surface inspection device 1A used in this embodiment uses a so-called line camera, and therefore the imaging range is linear. In the case of this embodiment, during inspection, the inspection object 10 is moved in the direction of the arrow while being placed on the uniaxial stage 20. By moving the uniaxial stage 20 in one direction, the entire inspection object 10 is imaged.

[0062] Note that, except that a line camera is used as camera 107 (see FIG. 3), the arrangement of camera 107, light source 108 (see FIG. 3), and light source 109 (see FIG. 3) is the same as in the first embodiment. Specifically, in the case of FIG. 4, the light receiving surface of the camera 107 can be considered to be arranged linearly in the direction of the Y axis, that is, toward the back of the paper.

[0063] <Other embodiments> (1) Although the embodiments of the present invention have been described above, the technical scope of the present invention is not limited to the scope of the above-described embodiments. It is clear from the claims that various modifications and improvements to the above-described embodiments are also included in the technical scope of the present invention.

[0064] (2) In the above-described embodiment, a color camera is used as the camera 107 (see FIG. 3), but a monochrome camera may also be used. Also, only the green (G) component of the color camera may be used to inspect the surface of the inspection object 10 (see FIG. 1).

[0065] (3) In the above embodiment, a white light source is used as the light sources 108 and 109 (see FIG. 3), but the color of the illumination light may be any color. Furthermore, the illumination light is not limited to visible light, but may be infrared light, ultraviolet light, etc. When infrared light, ultraviolet light, etc. is used as the illumination light, the installation positions of light source 108 and light source 109 are also determined by the relationship between specular reflection and diffuse reflection.

[0066] (4) In the above embodiment, the angle θ A However, when a telecentric lens in which the chief ray is parallel to the optical axis of the lens is used as the camera 107, the angle θ A The maximum angle may be set to approximately 25°.

[0067] (5) In the above embodiment, the angle θ B is set to approximately 45°, but may be in the range of approximately 35° to approximately 55°.

[0068] (6) In the above-described embodiment, image C is generated by subtracting image B, which captures the reflected light of light source 109, from image A, which captures the reflected light of light source 108. However, each image may be displayed individually on display 105.

[0069] (7) In the above-described embodiment, images are captured by switching between the lighting of the light source 108 and the light source 109, but images may be captured with the light source 108 and the light source 109 both turned on at the same time.

[0070] (8) In the above-described embodiment, the output axis LA of the illumination light output from the light source 108, the output axis LB of the illumination light output from the light source 109, and the optical axis L1 of the camera 107 are described as being located on approximately the same plane, but either the light source 108 or the light source 109 may be located on a different plane.

[0071] (9) The processor in each of the above-mentioned embodiments refers to a processor in a broad sense, and includes general-purpose processors (e.g., CPUs, etc.) as well as dedicated processors (e.g., GPUs (Graphical Processing Units), ASICs (Application Specific Integrated Circuits), FPGAs (Field Programmable Gate Arrays), programmable logic devices, etc.). Furthermore, the operations of the processor in each of the above-described embodiments may be performed by a single processor alone, or may be performed by multiple processors located in physically separate locations in cooperation with each other. Furthermore, the order in which the operations of the processors are performed is not limited to the order described in each of the above-described embodiments, and may be changed individually. [Explanation of symbols]

[0072] 1, 1A... surface inspection device, 10... inspection object, 20... single-axis stage, 101... processor, 102... ROM, 103... RAM, 104... auxiliary storage device, 105A, 112A... frame, 105... display, 106... operation reception device, 107... camera, 108, 109... light source, 111... signal line, 112... index

Claims

1. an imaging device for imaging a portion of the object to be inspected; a first light source that is one of a plurality of light sources that illuminate the portion, and of the light output from the first light source, a light component that is specularly reflected by the portion that is the object of inspection is mainly incident on the imaging device; a second light source which is another of the plurality of light sources and is disposed on the opposite side of the first light source across the optical axis of the imaging device, and which causes light components diffused and reflected by the portion to be inspected to be mainly incident on the imaging device; and A surface inspection device having: an image of an indicator indicating a location within the portion where the surface condition should be visually inspected is synthesized and displayed at a predetermined position on a screen on which the image captured by the imaging device is displayed; Surface inspection equipment.

2. an optical axis of the imaging device is arranged substantially parallel to a normal to the portion; The surface inspection device according to claim 1 .

3. the inclination of the optical axis with respect to the normal line is approximately 10° or less; The surface inspection device according to claim 2.

4. The inclination of the output axis of the first light source with respect to the optical axis is approximately 5° to 15°. The surface inspection device according to claim 3.

5. the inclination of the output axis of the second light source with respect to the optical axis is approximately 45°; 5. The surface inspection device according to claim 3 or 4.

6. the imaging device, the first light source, and the second light source are located on approximately the same plane; The surface inspection device according to any one of claims 1 to 5.

7. The first light source and the second light source both output visible light. The surface inspection device according to claim 1 .

8. The visible light is all white. The surface inspection device according to claim 7.

9. The imaging device outputs a luminance signal. The surface inspection device according to claim 1 .

10. further comprising a processor; the processor outputs a third image obtained by subtracting a luminance profile of the second image captured by the second light source from a luminance profile of the first image captured by the first light source. The surface inspection device according to claim 1 .

Images