Surface inspection device and program

Abstract

To make it possible to calculate a numerical value which has a small impact on a portion other than a portion focused by a user, in comparison with a case where a shape of a range used for calculation of a numerical value representing a surface quality is fixed.SOLUTION: A surface inspection apparatus comprises: an imaging device for imaging a surface of an object to be inspected; and a processor for processing an image imaged by the imaging device and calculating a numerical value representing a surface quality. The processor is provided with a function for receiving a change of a range used for the calculation of the numerical value indicated by an index in the image.SELECTED DRAWING: Figure 10

Description

[Technical Field]

[0001] The present invention relates to a surface inspection device and a program. [Background technology]

[0002] Today, various products use parts molded from synthetic resins (hereinafter referred to as "molded products"). However, visually observable defects can appear on the surface of molded products. These defects include "sink marks," which are unintentionally formed depressions, and "welds," which form where molten resin meets. Even in the case of a textured finish, which intentionally creates unevenness on the surface, differences from the expected texture can appear. Texture changes depending on a combination of factors such as color, gloss, and unevenness. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 5966277 Summary of the Invention [Problem to be solved by the invention]

[0004] A device for inspecting the quality of an object's surface (hereinafter referred to as a "surface inspection device") is provided with a function for displaying a reference line that defines the range of a captured image for calculating a numerical value representing quality. The shape of this range is fixedly given by the surface inspection device, and it is not assumed that the range will change. However, defects on the surface of an object come in a variety of shapes and sizes. This means that the range determined by the surface inspection system may be too large for the defect of interest to the user. In this case, the calculated value is more susceptible to noise than the defect of interest. Even when checking the texture of a specific area, the area determined by the surface inspection device may contain structural irregularities or other defects. In this case, the calculated value will be affected by information other than the area of ​​interest.

[0005] The present invention aims to enable the calculation of a numerical value that is less affected by areas other than those that the user is focusing on, compared to when the shape of the range used to calculate the numerical value representing the surface quality is fixed. [Means for solving the problem]

[0006] The invention described in claim 1 includes an imaging device for imaging the surface of an object to be inspected, and an image captured by the imaging device. Through user operations Specified range Images inside and a processor for calculating, from the image, a numerical value representing the quality of the surface corresponding to the surface quality of one of the objects to be inspected, wherein the processor calculates, from the image, a numerical value representing the quality of the surface corresponding to the surface quality of one of the objects to be inspected. gives the outer edge of said range to be displayed in index Through the change of position of The range used to calculate the numerical value Shape Accept the change The processor calculates the numerical value as the difference between the maximum and minimum values ​​of a luminance profile given by the average luminance values ​​for each pixel row within the range. It is a surface inspection device. The invention described in claim 2 is a surface inspection device described in claim 1, wherein the processor displays within the image a first indicator indicating the range before accepting the change and a second indicator indicating the range after accepting the change. A third aspect of the present invention is the surface inspection device according to the second aspect, wherein the first indicator is displayed even while the range is being changed. The invention described in claim 4 is the surface inspection device described in claim 2 or 3, wherein the second index is displayed after an operation to change the position of the first index is accepted. A fifth aspect of the present invention is the surface inspection device according to the fourth aspect, wherein the second indicator is capable of being drawn using a curve. A sixth aspect of the present invention is the surface inspection device according to the first aspect, wherein the processor accepts a change such that the area of ​​the range after the change is smaller than that before the change. A seventh aspect of the present invention is the surface inspection device according to the sixth aspect, wherein the processor accepts a change such that the entire range after the change is included in the range before the change. An eighth aspect of the present invention is the surface inspection device according to the first aspect, wherein, when a change to the range is accepted, the processor calculates the numerical value for the changed range. The invention described in claim 9 is the surface inspection device described in claim 8, wherein, when the processor receives a change to the range after calculating the numerical value, it recalculates the numerical value for the changed range. The invention described in claim 10 is a surface inspection device described in claim 1, wherein when the processor accepts a change in the range, it displays on the screen that the numerical value is calculated under conditions different from the standard range. An invention described in claim 11 is the surface inspection device described in claim 1, wherein the processor warns of a decrease in the accuracy of the calculated numerical value if the decrease in the range after the change exceeds a threshold value. The invention described in claim 12 is a surface inspection device described in claim 1, wherein the processor warns of a decrease in accuracy of the calculated numerical value when the distance between the outer edge of the changed range and the outer edge of the image becomes shorter than a predetermined threshold. The invention of claim 13 is the surface inspection device of claim 1, further comprising a dedicated operator for accepting a change in the shape of the range. A fourteenth aspect of the present invention is the surface inspection device according to the thirteenth aspect, wherein the operator is provided separately from a second operator used to instruct the start of calculation of the numerical value. A fifteenth aspect of the present invention is the surface inspection device according to the thirteenth or fourteenth aspect, wherein the operator is provided separately from a third operator used for capturing the image. The invention described in claim 16 is the surface inspection device according to any one of claims 1 to 15, characterized in that the device body is portable. The invention described in claim 17 is an image captured by an imaging device. Through user operations Specified range Images inside Corresponding to R A computer calculates a numerical value representing the quality of the surface from the image, and gives the outer edge of said range to be displayed in index Through the change of position of The range used to calculate the numerical value Shape Ability to accept changes and , a function of calculating the numerical value as the difference between the maximum and minimum values ​​of a luminance profile given by the average value of the luminance values ​​for each pixel row within the range; This is a program to achieve this. [Effects of the Invention]

[0007] According to the invention described in claim 1, it is possible to calculate a numerical value that is less affected by areas other than those that the user is focusing on, compared to when the shape of the range used to calculate the numerical value representing the surface quality is fixed. According to the invention described in claim 2, it is possible to compare the difference in range before and after the change. According to the invention of claim 3, the range can be changed while checking the reference range. According to the invention as set forth in claim 4, the visibility of the image for the user can be improved. According to the invention of claim 5, it is possible to specify only the part of interest and calculate the numerical value. According to the invention of claim 6, it is possible to calculate a numerical value that more accurately represents the quality of the portion of interest. According to the invention of claim 7, it is possible to calculate a numerical value that more accurately represents the quality of the portion of interest. According to the invention of claim 8, it is possible to calculate a numerical value that more accurately represents the quality of the portion of interest. According to the invention of claim 9, even if the numerical value has already been calculated, the change in the range can be reflected in the numerical value. According to the invention of claim 10, it is possible to notify the user that the calculated numerical value will be a value different from the standard calculation. According to the invention of claim 11, it is possible to notify the user that the calculated numerical value will be a value different from the standard calculation. According to the invention of claim 12, it is possible to notify the user that the accuracy of the calculated numerical value may not satisfy the standard. According to the invention of claim 13, it is possible to improve the operability when changing the range used to calculate the numerical value. According to the invention described in claim 14, it is possible to avoid confusion between calculation of numerical values ​​and change of range. According to the invention of claim 15, it is possible to avoid confusion between calculation of numerical values ​​and capturing of images. According to the invention of claim 16, even if the surface of the object to be inspected and the range imaged by the surface inspection device are indefinite, the accuracy of inspecting the surface quality can be improved. According to the invention described in claim 17, it is possible to calculate a numerical value that is less affected by areas other than those that the user is focusing on, compared to when the shape of the range used to calculate the numerical value representing the surface quality is fixed. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a diagram illustrating an example of use of a surface inspection device assumed in the first embodiment. [Figure 2] 1A and 1B are diagrams illustrating examples of defects that appear on the surface of an inspection object. (A) shows an example of a sink mark, and (B) shows an example of a weld. [Figure 3] FIG. 2 is a diagram illustrating an example of a hardware configuration of the surface inspecting device used in the first embodiment. [Figure 4] 1A and 1B are diagrams illustrating an example of the structure of the optical system of the surface inspection device according to embodiment 1. (A) shows a schematic diagram of the internal structure of the housing of the surface inspection device, and (B) shows the structure of the opening that is pressed against the surface of the inspection target during inspection. [Figure 5] 4 is a flowchart illustrating an example of an inspection operation by the surface inspection device used in the first embodiment. [Figure 6] FIG. 2 is a diagram illustrating an example of an operation screen displayed on a display. [Figure 7] 10A and 10B are diagrams illustrating the principle of score calculation, in which (A) shows an example image acquired as an object of inspection, (B) shows an example cross section in the X direction of a dent formed in the Y axis direction, and (C) shows the brightness profile of the image. [Figure 8] 10A and 10B are diagrams explaining the reason for providing a function to change the inspection range. (A) shows the luminance profile before the inspection range is changed, and (B) shows the luminance profile after the inspection range is changed. [Figure 9] 10 is a flowchart illustrating an example of a processing operation executed in response to a change in an inspection range. [Figure 10]10A and 10B are diagrams illustrating changes in the operation screen accompanying changes to the inspection range, where (A) shows an example of the screen when the left reference line of the four reference lines defining the inspection range is specified, and (B) shows an example of the screen while the change line is being moved. [Figure 11] FIG. 10 is a diagram illustrating the operation screen at the time when the change in the position of the left side of the inspection range has been completed. [Figure 12] 10A and 10B are diagrams illustrating changes in the operation screen when an additional inspection range is changed, where (A) shows an example of the screen when the right-hand reference line of the four reference lines defining the inspection range is specified, and (B) shows an example of the screen while the change line is being moved. [Figure 13] FIG. 10 is a diagram illustrating the operation screen at the time when the change in the position of the right side of the inspection range has been completed. [Figure 14] 10A and 10B are diagrams illustrating the operation screen when the inspection range after change is less than half the reference range. (A) shows an example of the screen while the change line that gives the right side of the reference range is moving, and (B) shows an example of the screen when the change of the reference range has been completed. [Figure 15] FIG. 10 is a diagram illustrating another example of changing the reference range. [Figure 16] 10A and 10B are diagrams illustrating an example in which a change line that defines the bottom side of an inspection range is set to the bottom side of a captured image field. [Figure 17] 10 is a flowchart illustrating another example of a processing operation executed in response to a change in the inspection range. [Figure 18] 10A and 10B are diagrams illustrating changes in the operation screen accompanying changes to the inspection range, where (A) shows an example of the screen when the left reference line of the four reference lines defining the inspection range is specified, and (B) shows an example of the screen while the change line is being moved. [Figure 19] FIG. 10 is a diagram illustrating the operation screen at the time when the change in the position of the left side of the inspection range has been completed. [Figure 20] 11 is a flowchart illustrating an example of an inspection operation by the surface inspection device used in the third embodiment. [Figure 21] FIG. 10 is a diagram illustrating an example in which a dedicated button for accepting changes to the inspection range is arranged on the operation screen. [Figure 22]13 is a diagram illustrating an example of the structure of an optical system of a surface inspecting device according to a fifth embodiment. FIG. [Figure 23] FIG. 10 is a diagram illustrating an example of use of a surface inspection device assumed in a third embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. <First Embodiment> <Example of using a surface inspection device> FIG. 1 is a diagram illustrating an example of use of a surface inspection device 1 assumed in the first embodiment. The imaging unit of the surface inspection device 1 used in the first embodiment is a so-called area camera, and the imaging range (hereinafter referred to as the "imaging range") is defined by a surface. Illumination (not shown) is configured to include a component that satisfies the specular reflection condition for the entire imaging range.

[0010] In the case of Fig. 1, the imaging range includes the entire object to be inspected (hereinafter also referred to as "inspection object") 10. However, the imaging range may include only a portion of the inspection object 10 that is of interest. In this embodiment, the inspection object 10 is assumed to be a molded product. In the case of inspection using an area camera, the inspection is performed in a stationary state using the surface inspection device 1 and the inspection object 10. In other words, the inspection of the surface of the inspection object 10 is performed in a state where the surface inspection device 1 and the inspection object 10 do not move relative to each other.

[0011] 1, inspection object 10 is plate-shaped, but the shape of inspection object 10 is arbitrary. For example, inspection object 10 may have a shape with a curved surface, such as a sphere or cylinder, in addition to a polyhedron. The actual inspection object 10 may have holes, notches, protrusions, steps, and the like. The surface finish of the inspection object 10 may be untreated, mirror-finished, semi-mirror-finished, or textured.

[0012] The surface inspection device 1 inspects the surface of an inspection object 10 for defects and texture. Defects include sink marks and welds. Sink marks are depressions on the surface that occur in thick parts or ribs, while welds are lines that occur where the leading edges of molten resin meet inside the mold. Defects also include scratches and dents caused by collisions. Texture is a visual and tactile impression, and is influenced by the color, gloss, and roughness of an object's surface. Surface roughness includes lines that appear when cutting a mold. These types of lines are different from defects.

[0013] FIG. 2 is a diagram illustrating examples of defects that appear on the surface of the inspection object 10. (A) shows an example of a sink mark, and (B) shows an example of a weld. In FIGS. 2(A) and 2(B), the defect locations are indicated by dashed lines. There are four sink marks in FIG. 2(A). The surface inspection device 1 in this embodiment is not limited to inspection of defects and texture, but is also used to inspect surface stains.

[0014] The surface inspection device 1 generates an image in which defects on the surface of the inspection object 10 are emphasized, and also quantifies and outputs the results of evaluating the texture. The defects here are irregularities or streaks that appear on what should be a flat surface, such as sink marks or welds. Texture is evaluated using a numerical value (hereinafter also referred to as a "score"). The score is an example of a numerical value that represents the surface quality of the inspection object 10.

[0015] The score is calculated using, for example, multivariate analysis, which analyzes features that appear in the brightness distribution, such as a streak pattern that extends along the direction of the sink mark. In addition, there is also a method using artificial intelligence to calculate the score. For example, by feeding an image captured by a camera into a learning model that uses deep machine learning to determine the relationship between the image of the defect and the score, a score for a partial area within the inspection range can be calculated.

[0016] 1 is placed parallel to a plane defined by the X-axis and Y-axis. In this case, the normal to the surface of inspection object 10 is parallel to the Z-axis. On the other hand, the surface inspection device 1 is placed vertically above the inspection object 10. In other words, the optical axis of the optical system used by the surface inspection device 1 to image the inspection object 10 is set approximately parallel to the normal to the surface of the inspection object 10. Hereinafter, the conditions required for this optical axis will also be referred to as "imaging conditions."

[0017] At this time, the surface inspecting device 1 is installed at a position that satisfies the imaging conditions. The surface inspecting device 1 may be installed by being fixed to a specific member, or may be installed so as to be detachable from the specific member. However, the surface inspection device 1 may be a portable device. If the device is portable, an operator can inspect any surface by holding the surface inspection device 1 in his / her hand, for example, and pointing the light receiving surface toward the inspection target 10. In FIG. 1, for the purpose of explaining the positional relationship between the surface inspection apparatus 1 and the inspection object 10, the appearance of the surface inspection apparatus 1 is simplified and shown as a substantially rectangular parallelepiped.

[0018] <Configuration of surface inspection equipment> FIG. 3 is a diagram illustrating an example of the hardware configuration of the surface inspecting device 1 used in the first embodiment. 3 includes a processor 101 that controls the operation of the entire apparatus, a ROM (Read Only Memory) 102 in which a BIOS (Basic Input Output System) and the like are stored, a RAM (Random Access Memory) 103 used as a work area for the processor 101, an auxiliary storage device 104 that stores programs and image data, a display 105 that displays an image of the surface of the inspection object 10 and information related to operations, an operation reception device 106 that receives operations from an operator, a camera 107 that images the surface of the inspection object 10, a light source 108 that illuminates the surface of the inspection object 10, and a communication IF (Interface) 109 used for communication with the outside. The processor 101 and each part are connected via a signal line 110 such as a bus.

[0019] The processor 101, the ROM 102, and the RAM 103 function as a so-called computer. The processor 101 realizes various functions through the execution of a program. For example, the processor 101 executes a program to calculate a score that evaluates the texture of the surface of the imaged inspection object 10. Image data obtained by capturing an image of the surface of the inspection object 10 is stored in the auxiliary storage device 104. The auxiliary storage device 104 may be, for example, a semiconductor memory or a hard disk drive. Firmware and application programs are also stored in the auxiliary storage device 104. Hereinafter, firmware and application programs are collectively referred to as "programs." In addition, the program that realizes the functions described in this embodiment and other embodiments described later can be provided by communication means, and can also be provided by being stored on a recording medium such as a CD-ROM.

[0020] The display 105 is, for example, a liquid crystal display or an organic EL display, and displays an image of the entire inspection object 10 or a specific portion of the inspection object 10. The display 105 is also used to position the imaging range relative to the inspection object 10. In this embodiment, the display 105 is provided integrally with the device main body, but it may be an external device connected via the communication IF 109, or may be part of another device connected via the communication IF 109. For example, the display 105 may be the display of another computer connected via the communication IF 109.

[0021] The operation reception device 106 is composed of a touch sensor arranged on the display 105, physical switches, buttons, etc. arranged on the housing. In this embodiment, a power button and an image capture button are provided as examples of physical buttons. When the power button is operated, for example, light source 108 is turned on and image capture by camera 107 begins. When the image capture button is operated, a specific image captured by camera 107 at the time of operation is acquired as an image for inspection. The image capture button here is an example of a third operator.

[0022] A device that integrates the display 105 and the operation reception device 106 is called a touch panel. The touch panel is used to receive user operations on keys displayed as software (hereinafter also referred to as "soft keys").

[0023] In this embodiment, a color camera is used as the camera 107. The imaging element of the camera 107 is, for example, a CCD (=Charge Coupled Device) imaging sensor element or a CMOS (=Complementary Metal Oxide Semiconductor) imaging element. Since a color camera is used as camera 107, it is possible in principle to observe not only the brightness but also the color tone of the surface of inspection object 10. Camera 107 is an example of an imaging device.

[0024] In this embodiment, a white light source is used as the light source 108. The white light source generates light in which light in the visible light range is evenly mixed. In this embodiment, a parallel light source is used as the light source 108. A telecentric lens is placed on the optical axis of the camera 107.

[0025] In this embodiment, light source 108 is placed at an angle such that the light component specularly reflected on the surface of inspection object 10 is mainly incident on camera 107 . The communication IF 109 is configured with modules that comply with wired or wireless communication standards, and may be, for example, an Ethernet (registered trademark) module, a USB (Universal Serial Bus), a wireless LAN, or the like.

[0026] <Optical system structure> 4A and 4B are diagrams illustrating an example of the structure of the optical system of the surface inspecting device 1 according to embodiment 1. (A) shows a schematic diagram of the internal structure of the housing 100 of the surface inspecting device 1, and (B) shows the structure of the opening 111 that is pressed against the surface of the inspection target 10 during inspection. The opening 111 is provided with an opening 111A through which illumination light that illuminates the surface of the inspection object 10 and reflected light reflected on the surface of the inspection object 10 are input and output, and a flange 111B that surrounds the outer edge of the opening 111A.

[0027] 4, the opening 111A and the flange 111B are both circular, but the opening 111A and the flange 111B may have other shapes, such as a rectangle. It is not necessary for opening 111A and flange 111B to have similar shapes, and opening 111A may be circular and flange 111B may be rectangular.

[0028] The flange 111B is used to position the imaging direction of the surface inspection device 1 relative to the surface of the inspection object 10. In other words, the flange 111B is used to position the camera 107 and the light source 108 relative to the surface being inspected. The flange 111B also serves to prevent or reduce the incidence of external or ambient light into the opening 111A.

[0029] The housing 100 shown in FIG. 4(A) has a structure in which two roughly cylindrical members are joined together, with a light source 108 attached to one member side and a camera 107 and a processor 101 attached to the other member side. A display 105 and an operation reception device 106 are attached to the side of the housing 100 on the side where the camera 107 is attached.

[0030] The MTF (=Modulation Transfer Function) is generally uniform within the field of view of the camera 107. Therefore, the contrast does not vary much depending on the position within the field of view, and the surface of the inspection object 10 can be faithfully imaged.

[0031] 4A, the normal to the surface of the flat plate-shaped inspection object 10 is indicated by N0. Also in FIG. 4A, the optical axis of the illumination light output from the light source 108 is indicated by L1, and the optical axis of the light specularly reflected on the surface of the inspection object 10 is indicated by L2. The optical axis L2 here coincides with the optical axis of the camera 107.

[0032] The surface of the actual inspection object 10 has irregularities due to its structure or design, curved surfaces, steps, joints, minute irregularities formed during the molding process, and the like. Therefore, as the normal N0 of the inspection object 10, the average value of the normal N0 of the area AR of interest within the inspection object 10 or the normal N0 of a specific position P of interest may be used.

[0033] Furthermore, as the normal N0 of the inspection object 10, the normal N0 of an average virtual surface or a representative portion of the inspection object 10 may be used. 4A, the optical axis L1 of the illumination light output from the light source 108 and the optical axis L2 of the camera 107 are both attached at an angle θ with respect to the normal line N0. The angle θ is, for example, approximately 30° or approximately 45°.

[0034] <Inspection operation> <Basic operation> 5 is a flowchart for explaining an example of the inspection operation by the surface inspection device 1 used in embodiment 1. The symbol S shown in the drawing means a step. The processing shown in FIG. 5 is realized through the execution of a program by the processor 101 (see FIG. 4). In the surface inspecting device 1 of this embodiment, the light source 108 (see FIG. 4) is turned on by operating the power button, and the camera 107 (see FIG. 4) starts capturing an image. The captured image is displayed on the display 105 (see FIG. 4).

[0035] Fig. 6 is a diagram illustrating an example of an operation screen 120 displayed on the display 105. The operation screen 120 shown in Fig. 6 includes a display field 121 for an image captured by the camera 107 (hereinafter referred to as a "captured image field"), a score field 122, a display field 123 for an image in which the features of a partial region that contributed to the calculation of the score are highlighted (hereinafter referred to as a "highlighted image field"), and a legend 124. The distribution of brightness values, i.e., a grayscale image, is displayed in the captured image field 121. In the case of Fig. 6, a reference line 121A that indicates the outer edge of the inspection range used to calculate the score is displayed. The reference line 121A is an example of a first index that indicates the inspection range before the change.

[0036] 6, the inspection range is the range enclosed by four reference lines 121A. A score representing the surface quality is calculated for the image within the inspection range. A legend 124 is shown to the right of the captured image field 121. In the case of Fig. 6, the shading of the captured image field 121 corresponds to gradation values ​​"205" to "253". In the case of the operation screen 120 shown in FIG. 6, the score has not yet been calculated, so the score field 122 is blank and no image is displayed in the highlighted image field 123 either.

[0037] Returning to the explanation of Figure 5. In this embodiment, when an operator checking the image displayed on the display 105 operates the image capture button, the image to be used for evaluating the surface quality is determined. Therefore, the processor 101, which has started the inspection operation by operating the power button, determines whether or not it has accepted the operation of the image capturing button (Step 1). The operation of the operation button is an example of an operation to instruct the start of an inspection. While a negative result is obtained in step 1, processor 101 repeats the determination in step 1.

[0038] If a positive result is obtained in step 1, the processor 101 acquires an image to be used for the examination (step 2). Specifically, the image displayed on the display 105 at the time the imaging button was operated is acquired. In the case of this embodiment, when the image capture button is operated, even if the camera 107 continues to capture images, updating of the images displayed in the captured image field 121 (see FIG. 6) is stopped. Next, the processor 101 calculates a score using the brightness profile within the inspection range (step 3). That is, the score is calculated for the image within the range surrounded by the four reference lines 121A displayed in the captured image field 121.

[0039] 7 is a diagram illustrating the principle of score calculation. (A) shows an example image acquired as an object of inspection, (B) shows an example cross section of an X-axis direction of a dent formed in the Y-axis direction, and (C) shows the brightness profile S of the image. The depression shown in Fig. 7(B) represents, for example, a sink mark. For convenience of explanation, Fig. 7(B) shows a cross-sectional shape of an isosceles triangle, but of course, this shape is only one example.

[0040] In this case, the luminance profile S shown in FIG. 7C is given as a change in the luminance value (hereinafter referred to as "representative luminance value") that represents each coordinate in the X-axis direction. The representative luminance value here is given by the integral value of the luminance values ​​of each pixel with the same X coordinate. A convex waveform in the luminance profile S indicates an area that is brighter than the surroundings, and a concave waveform indicates an area that is darker than the surroundings.

[0041] The score is calculated as, for example, the difference between the maximum value and the minimum value of the brightness profile S (i.e., the wave height). The score depends on the width, height, depth, number, etc. of the irregularities formed on the surface. For example, even if the height of the protrusions or the depth of the recesses are the same, the score of a partial region in which a protrusion or recess with a greater width is formed will be higher.

[0042] Furthermore, even if the width of the convex or concave portion is the same, a partial region in which a higher convex portion or a deeper concave portion is formed will have a higher score. In this embodiment, a high score means poor quality. In this embodiment, the partial region that contributes to the calculation of the score is defined as the region between the start point of the convex waveform and the end point of the concave waveform of the brightness profile S shown in FIG. 7(C).

[0043] Returning to the explanation of Figure 5. Once the scores are calculated, processor 101 generates an image in which the characteristics of the partial regions with high scores are emphasized (hereinafter referred to as an "enhanced image") and displays it separately (step 4). In this embodiment, the processor 101 extracts a specific periodic component that appears in a specific direction from the extracted partial region, and generates an enhanced image by overlaying a feature image on the original image through inverse transformation of the extracted periodic component.

[0044] To extract the periodic components, for example, two-dimensional DCT (Discrete Cosine Transform), DST (Discrete Sine Transform), FFT (Fast Fourier Transform), etc. are used. When converting the feature image back to the original image, the intensity component (i.e., brightness value) of each pixel is normalized by the maximum value to expand the range of gradation in the feature image. Also, by mapping color components to the intensity component of the feature image, it is possible to distinguish it from the original image, which is expressed in grayscale.

[0045] By displaying the highlighted image, it becomes possible to check the surface condition even when it is difficult to visually check minute structures in a grayscale image captured of the surface of the partial region for which the score was calculated. In this embodiment, the generated highlighted image is displayed alongside the grayscale image captured by the camera 107 on the same operation screen. Additionally, processor 101 displays the corresponding score on operation screen 120 (see FIG. 6) (step 5).

[0046] <Change inspection range> The surface inspection device 1 in this embodiment allows the operator to change the inspection range. 8A and 8B are diagrams explaining the reason for providing a function to change the inspection range. (A) shows the luminance profile before the inspection range is changed, and (B) shows the luminance profile after the inspection range is changed.

[0047] The images shown in FIGS. 8(A) and (B) represent images of the inspection range surrounded by four reference lines 121A (see FIG. 6) among the images displayed in the captured image field 121 (see FIG. 6). In the case of FIG. 8, the luminance profile of each coordinate value in the Y-axis direction is given as the average value of the luminance values ​​at each coordinate value in the X-axis direction. In the case of the inspection range before the change shown in Figure 8(A), the dimensions of the sink mark are narrow compared to the width of the inspection range in the X-axis direction. This results in a small wave height of the brightness profile given by the average brightness value. In other words, the score calculated may be lower than the actual defect.

[0048] In the case of the inspection range after the change shown in Figure 8(B), the width in the X-axis direction is narrower than before the change. Therefore, the wave height of the brightness profile given by the average brightness value is larger than before the change. As a result, the score value is higher than before the change of the inspection range, and it is possible to calculate a score that better reflects the state of defects such as sink marks that operators pay attention to. Furthermore, even if there are structural irregularities or other defects not of interest around the defect of interest, it is possible to avoid the influence of these and calculate the score for the specific defect. Furthermore, when it is desired to inspect the quality of the surface excluding defects, it is possible to calculate a score excluding the influence of defects.

[0049] <Operation when changing the inspection range> FIG. 9 is a flowchart illustrating an example of a processing operation executed in response to a change in the inspection range. 9 is also realized through the execution of a program by the processor 101. Note that the processing operations shown in FIG. 9 are executed independently of the processing operations described with reference to FIG.

[0050] First, processor 101 determines whether an operation to change the inspection range has been received (step 11). In this embodiment, the processor 101 considers the selection of one of the four reference lines 121A as acceptance of an operation to change the detection range. The selection of the reference line 121A is performed, for example, by the operator tapping, double-tapping, or long-tapping a specific reference line 121A. Note that a tap refers to tapping the display surface once with a fingertip, a double-tap refers to tapping the display surface twice with a fingertip, and a long-tap refers to pressing the display surface for a long time with a fingertip. In other words, a long-tap refers to keeping a fingertip in the same place for a predetermined period of time or longer.

[0051] As long as a negative result is obtained in step 11, processor 101 repeats the determination in step 11. On the other hand, if a positive result is obtained in step 11, processor 101 displays the change line separately from reference line 121A (see FIG. 6) that is the target of the operation (step 12). The change line here is displayed in a form that allows it to be distinguished from reference line 121A. For example, if reference line 121A is displayed in yellow, the change line is displayed in red. Of course, the color combination is just an example.

[0052] Next, processor 101 moves the change line in accordance with the amount of operation (step 13). In this embodiment, the direction in which the change line can be moved is determined for each selected reference line 121A. Basically, the change line can be moved in a direction perpendicular to the change line. For example, if reference line 121A is a vertical line, it can only be moved horizontally, and if reference line 121A is a horizontal line, it can only be moved up and down. Next, processor 101 determines whether the operation has ended (step 14). For example, when the fingertip is removed from the screen, when the movement of the fingertip stops, or when the stoppage of the fingertip continues for a predetermined time or longer, processor 101 determines that the operation has ended.

[0053] If a negative result is obtained in step 14, processor 101 returns to step 13. On the other hand, if a positive result is obtained in step 14, the processor 101 determines whether the distance between the changed inspection range and the outer edge of the image is equal to or less than a threshold value (step 15). In this embodiment, in order to avoid a decrease in the accuracy of the calculated score, an operation is adopted in which images near the outer edge of the captured image field 121 (see FIG. 6) are not included.

[0054] If a positive result is obtained in step 15, processor 101 displays a message indicating that the accuracy of the score may be reduced, and ends the process (step 16). In the present embodiment, since the operation to change the inspection range has been completed, a message is displayed urging the user to reset the inspection range. Note that if the determination in step 15 is made between step 13 and step 14, the process may return to step 13 after a positive result is obtained and step 16 is displayed.

[0055] If a negative result is obtained in step 15, the processor 101 updates the score using the brightness profile within the inspection range after the change (step 17). Thereafter, processor 101 determines whether the changed inspection range is equal to or less than half of the reference range (step 18). The reference range is the inspection range surrounded by four reference lines 121A. The changed inspection range is the range surrounded by the change lines displayed in captured image field 121 and the reference lines 121A that are not subject to change.

[0056] In this embodiment, if the area of ​​the inspection range after the change is equal to or less than half the area of ​​the reference range, a positive result is obtained in step 18 . If step 18 yields a positive result, processor 101 indicates a risk of loss of accuracy in the score (step 16). On the other hand, if a negative result is obtained in step 18, processor 101 displays the change in the calculation conditions (step 19).

[0057] <Example of operation screen> An example of a screen displayed when the surface inspection device 1 inspects the inspection object 10 will be described below.

[0058] <Screen example 1> 10 is a diagram illustrating changes in operation screen 120 accompanying a change in the inspection range. (A) shows an example of the screen at the time when the left-hand reference line 121A of the four reference lines 121A that define the inspection range is specified, and (B) shows an example of the screen while change line 121B is moving. Note that in FIG. 10, parts corresponding to those in FIG. 6 are assigned the same reference symbols. Change line 121B is an example of a second indicator that indicates the inspection range after the change.

[0059] 10(A) and 10(B) includes one roughly circular pattern corresponding to the sink mark. Note that the score field 122 on the operation screen 120 displays the numerical value "3.1" as the score calculated for this partial region. 10(A), the left reference line 121A is selected with a fingertip. This selection is accepted as an operation to change the inspection range. As the operation is accepted, the display color of the reference line 121A changes to the display color of the change line 121B. The change in display color lets the operator know that it is now possible to change the inspection range. Note that in Figures 10(A) and 10(B), the difference in display color is expressed by the difference in line type.

[0060] After this, the change line 121B moves to the right as the fingertip moves. After the change line 121B moves, the reference line 121A selected as the target of movement is displayed in its original position. This allows the operator to visually observe the amount of movement of the change line 121B. In this embodiment, the score is calculated when the movement of the change line 121B is completed, so the score in the score column 122 in Fig. 10(B) remains at "3.1".

[0061] 11 is a diagram illustrating the operation screen 120 at the time when the change in the position of the left side of the inspection range has been completed. In FIG. 11, parts corresponding to those in FIG. 10 are denoted by the same reference numerals. In the case of FIG. 11, the modification line 121B is located to the right of the corresponding reference line 121A and to the left of the left end of the approximately circular pattern. 11, the score in the score column 122 has been updated to "3.5." The score here is calculated for the range surrounded by the change line 121B that gives the left side, the reference line 121A that gives the top side, the reference line 121A that gives the right side, and the reference line 121A that gives the bottom side.

[0062] In addition, a warning message 125 such as "The score calculation conditions have been changed" is additionally displayed at the bottom of the operation screen 120. The display of the warning message 125 allows the operator to notice that the conditions for calculating the score have been changed due to the change in the inspection range. The highlighted image displayed in the highlighted image field 123 on the operation screen 120 is the same before and after the change in the inspection range.

[0063] 12 is a diagram illustrating changes in operation screen 120 when an inspection range is changed by adding an inspection range. (A) shows an example of the screen at the time when the right reference line 121A of the four reference lines 121A that define the inspection range is specified, and (B) shows an example of the screen while change line 121B is being moved. Note that in FIG. 12, parts corresponding to those in FIG. 11 are assigned the same reference numerals. That is, the operation screen 120 shown in Fig. 12 is the same as the operation screen 120 shown in Fig. 11. Therefore, the score in the score column 122 is "3.5." Also, since the inspection range has been changed from the initial state, the warning message 125 remains displayed at the bottom of the operation screen 120.

[0064] 12A, the right reference line 121A is selected with a fingertip. This selection is accepted as an operation to change the inspection range. As the operation is accepted, the display color of the reference line 121A changes to the display color of the change line 121B. The change in display color informs the operator that it is now possible to change the inspection range. In Figures 12(A) and 12(B), the difference in display color is also expressed by the difference in line type.

[0065] After this, the change line 121B moves to the left as the fingertip moves. After the change line 121B moves, the reference line 121A selected as the target of movement is displayed in its original position. This allows the operator to visually observe the amount of movement of the change line 121B. In this embodiment, the score is calculated when the movement of the change line 121B is completed, so the score in the score column 122 in Fig. 12(B) remains at "3.5".

[0066] 13 is a diagram illustrating the operation screen 120 at the time when the change in the position of the right side of the inspection range has been completed. In FIG. 13, parts corresponding to those in FIG. 12 are denoted by the same reference numerals. In the case of FIG. 13, the modification line 121B is located to the left of the corresponding reference line 121A and to the right of the right end of the substantially circular pattern. In the case of FIG. 13, the score in the score column 122 has been updated to "4."

[0067] The score here is calculated for the range surrounded by the modified line 121B that determines the left side, the reference line 121A that determines the top side, the modified line 121B that determines the right side, and the reference line 121A that determines the bottom side. Because the width of the inspection range in the X-axis direction is narrower, the score value more accurately indicates the state of the circular sink mark. The highlighted image displayed in the highlighted image field 123 on the operation screen 120 is the same before and after the change in the inspection range.

[0068] <Screen example 2> 14 is a diagram illustrating the operation screen 120 when the inspection range after the change is less than half the reference range. (A) shows an example of the screen while the change line 121B that gives the right side of the reference range is moving, and (B) shows an example of the screen when the change of the reference range has been completed. In FIG. 14, parts corresponding to those in FIG. 12 are assigned the same reference numerals. In the case of FIG. 14(A), the change line 121B that gives the left side of the reference range is located at the left end of the sink mark. On the other hand, in the case of FIG. 14(B), the change line 121B that gives the right side of the reference range is located at the right end of the sink mark.

[0069] However, the distance between the left and right change lines 121B is less than half the distance between the left and right reference lines 121A. In other words, the change in the test range relative to the reference range exceeds a threshold value. The threshold value here is, for example, half the reference range. In this case, a warning message 126 such as "The range is too narrow, so accuracy may decrease" is displayed at the bottom of the operation screen 120 shown in Fig. 14(B) to draw the operator's attention. The display of this warning message 126 is a kind of warning. The score column 122 displays "4.5" as the score calculated for the specified inspection range, but the reliability of this score is not guaranteed.

[0070] <Screen example 3> Fig. 15 is a diagram illustrating another example of changing the reference range, in which parts corresponding to those in Fig. 11 are assigned the same reference numerals. In the case of Fig. 15, the structural outer edge of the inspection object 10 (see Fig. 1) and its background are captured near the top of the captured image field 121. This type of image is captured when the inspection object 10 is small or when the flat portion is small. Note that the bottom side of the captured image field 121 shown in Fig. 15 includes a streak-like pattern in which high brightness and low brightness are adjacent to each other.

[0071] In this case, the operator focuses on defects on the surface of the inspection object 10 and streak-like patterns that affect the texture. However, the score field 122 displays the largest value among the scores calculated for multiple locations within the inspection range. Therefore, the score of the luminance profile corresponding to the difference in luminance between the outer edge of the structure and its background may be larger than the score of the luminance profile corresponding to a sink mark or the like on the surface of the inspection object 10 .

[0072] In fact, the emphasized image field 123 displays an emphasized image in which the features at the top of the captured image field 121 are emphasized. However, what the worker wants to know is the score corresponding to the sink marks or the like on the surface of the inspection object 10 . 15, the top side of the inspection range is changed from the reference line 121A to a modified line 121B. In this example, the score in the score column 122 is "3.8". However, since the inspection range has been changed, a warning message 125 such as "The score calculation conditions have been changed" is additionally displayed at the bottom of the operation screen 120.

[0073] Fig. 16 is a diagram illustrating an example in which a change line 121B that defines the bottom side of the inspection range is set to the bottom side of the captured image field 121. In Fig. 16, parts corresponding to those in Fig. 15 are assigned the same reference numerals. 16, the change line 121B that defines the bottom side of the inspection range is located below the reference line 121A. Specifically, the change line 121B is located at the bottom end of the captured image field 121. In the present embodiment, the distance between the outer edge of the inspection range and the outer edge of the captured image field 121 is required to be longer than the threshold value for each side.

[0074] However, in the case of FIG. 16, the change line 121B that defines the bottom side of the inspection range coincides with the bottom end of the captured image field 121, and does not satisfy the required rule. In this case, a warning message 126A such as "The bottom side of the inspection range after the change is too close to the outer edge of the image. This may result in a decrease in accuracy" is displayed at the bottom of the operation screen 120 to draw the operator's attention. The display of this warning message 126A is also a type of warning. The display of the warning message 126A informs the operator that readjustment of the inspection range, etc. In the case of FIG.

[0075] <Embodiment 2> In this embodiment, another operation screen 120 for changing the inspection range will be described. The external configuration of the surface inspecting device 1 in this embodiment is the same as that of the surface inspecting device 1 described in the first embodiment. Fig. 17 is a flowchart illustrating another example of the processing operation executed in response to a change in the inspection range. In Fig. 17, parts corresponding to those in Fig. 9 are assigned the same reference numerals. First, processor 101 determines whether an operation to change the inspection range has been received (step 11).

[0076] As long as a negative result is obtained in step 11, processor 101 repeats the determination in step 11. On the other hand, if a positive result is obtained in step 11, processor 101 changes the color of reference line 121A (see FIG. 6), which is the target of the operation, to the color of change line 121B (see FIG. 10) (step 21). Next, the processor 101 moves the change line 121B in accordance with the amount of operation (step 13). In this embodiment, while the change line 121B is moving, the corresponding reference line 121A is not displayed.

[0077] Next, processor 101 determines whether the operation has ended (step 14). If a negative result is obtained in step 14, processor 101 returns to step 13. On the other hand, if a positive result is obtained in step 14, the processor 101 redisplays the pre-change reference line 121A while leaving the display of the change line 121B unchanged (step 22). By redisplaying the corresponding reference line 121A, it becomes easier to check the amount of movement of the change line 121B.

[0078] Next, the processor 101 determines whether the distance between the changed inspection range and the outer edge of the image is equal to or less than a threshold value (step 15). If a positive result is obtained in step 15, processor 101 displays a risk of a decrease in score accuracy (step 16). Note that if the determination in step 15 is performed between step 13 and step 14, the process may return to step 13 after a positive result is obtained and step 16 is displayed.

[0079] If a negative result is obtained in step 15, the processor 101 updates the score using the brightness profile within the inspection range after the change (step 17). Thereafter, processor 101 determines whether the changed inspection range is equal to or less than half of the reference range (step 18). If a positive result is obtained in step 18, processor 101 displays the possibility of a decrease in the accuracy of the score and ends the process (step 16). On the other hand, if a negative result is obtained in step 18, processor 101 displays the change in the calculation conditions (step 19).

[0080] <Example of operation screen> An example of a screen displayed when the surface inspection device 1 inspects the inspection object 10 will be described below.

[0081] 18 is a diagram illustrating changes in operation screen 120 accompanying a change in the inspection range. (A) shows an example of the screen at the time when the left reference line 121A of the four reference lines 121A that define the inspection range is specified, and (B) shows an example of the screen while change line 121B is being moved. Note that in FIG. 18, parts corresponding to those in FIG. 10 are assigned the same reference numerals.

[0082] In the case of FIG. 18(A), the reference line 121A that defines the left side of the inspection range is selected with a fingertip. As a result, the display color of the left side of the inspection range is changed to the display color of the change line 121B. The change in display color informs the operator that it is now possible to change the inspection range. Note that in FIGS. 18(A) and 18(B), the difference in display color is expressed by the difference in line type.

[0083] Thereafter, as the fingertip moves, the change line 121B moves to the right. Note that even when the change line 121B starts to move, the corresponding reference line 121A is not displayed. This is one difference from the first embodiment. In other words, in this embodiment, the selected reference line 121A changes into the change line 121B by designating it with the fingertip, and is then moved by the fingertip.

[0084] 19 is a diagram illustrating the operation screen 120 at the time when the change in the position of the left side of the inspection range has been completed. In FIG. 19, the parts corresponding to those in FIG. 11 are assigned the same reference numerals. 19, since the change of the inspection range has been completed, the reference line 121A corresponding to the change line 121B is displayed again, which makes it easy for the operator to confirm the amount of movement of the change line 121B. It is also possible to display the reference line 121A before the change without displaying it.

[0085] <Third Embodiment> In this embodiment, a surface inspection device 1 (see FIG. 1) that does not require operation of an image capture button when calculating a score will be described. The external configuration of the surface inspecting device 1 in this embodiment is the same as that of the surface inspecting device 1 described in the first embodiment.

[0086] Fig. 20 is a flowchart for explaining an example of the inspection operation by the surface inspection device 1 used in the embodiment 3. In Fig. 20, parts corresponding to those in Fig. 5 are assigned the same reference numerals. In the case of FIG. 20, processor 101 (see FIG. 4) turns on light source 108 (see FIG. 4) by operating the power button, starts capturing images with camera 107 (see FIG. 4), and simultaneously performs score calculation and the like.

[0087] For this reason, the processor 101 acquires an image being captured by the camera 107 (step 21), and calculates a score using the brightness profile within the inspection range (step 3). Thereafter, processor 101 generates an image that emphasizes the features of the partial region with a high score, displays it separately (step 4), and displays the corresponding score on operation screen 120 (step 5).

[0088] After step 5 is completed, processor 101 returns to step 21 and repeats the series of processes. By repeating this series of processes, the score displayed on operation screen 120 (see FIG. 6) continues to be updated in accordance with changes in the image captured by camera 107. That is, if the position at which the camera 107 is capturing an image changes, the score displayed in the score field 122 also changes.

[0089] <Fourth Embodiment> Fig. 21 is a diagram illustrating an example in which a dedicated button 127 for accepting changes to the inspection range is arranged on the operation screen 120. In Fig. 21, parts corresponding to those in Fig. 6 are assigned the same reference numerals. Buttons 127 consist of a movement button 127A for instructing the selected reference line 121A to move upward, a movement button 127B for instructing the selected reference line 121A to move downward, a movement button 127C for instructing the selected reference line 121A to move right, and a movement button 127D for instructing the selected reference line 121A to move left.

[0090] For example, after selecting the reference line 121A defining the upper side or the reference line 121A defining the lower side of the inspection range, operating the movement button 127A moves the change line 121B (see FIG. 10) upward. For example, after selecting the reference line 121A defining the left side or the reference line 121A defining the right side of the inspection range, operating the movement button 127C moves the change line 121B to the right. The button 127 here is a separate operator from the image capture button.

[0091] In this embodiment, while the movement button 127A, 127B, 127C, or 127D is being operated, the change line 121B corresponding to the selected reference line 121A continues to move in the direction corresponding to the button. When the movement button 127A, 127B, 127C, or 127D is tapped, the change line 121B moves in the direction corresponding to the button by a predetermined amount.

[0092] Furthermore, the operation screen 120 shown in FIG. 21 has a button 128 arranged thereon for instructing the start of score calculation. Therefore, the score is not calculated by operating the image capture button as in the first embodiment, nor is the score calculated by operating the power button as in the second embodiment. In the present embodiment, when button 128 is operated, calculation of a score for the inspection range is started, and the score is displayed in score field 122. Button 128 is an example of a second operator. Calculation of a score after the inspection range has been changed is also performed by operating button 128.

[0093] <Fifth Embodiment> In this embodiment, an example will be described in which a physical operator for changing the inspection range is arranged on the housing 100 (see FIG. 4). 22 is a diagram illustrating an example of the structure of the optical system of the surface inspecting device 1 according to the fifth embodiment. In FIG. 22, parts corresponding to those in FIG. 4 are assigned the same reference numerals. In the case of FIG. 22, an image capture button 106A and an operation button 106B for instructing a change in the inspection range are arranged on the side surface of the housing 100.

[0094] Here, operation button 106B is an example of a dedicated button for accepting a change in the inspection range. The operation button 106B may be, for example, a dial button. In the case of a dial button, the direction of movement is determined by the direction of rotation, and the amount of movement is determined by the amount of rotation. The dial button may be, for example, a jog dial or an angle knob. Jog dials can be attached in two ways: one where the cylindrical axis of rotation is parallel to the surface of the case, and one where the cylindrical axis of rotation is perpendicular to the surface of the case.

[0095] For example, when the reference line 121A defining the upper or lower side of the inspection range is selected and the operation button 106B is rotated clockwise, the change line 121B moves upward, and when the operation button 106B is rotated counterclockwise, the change line 121B moves downward. On the other hand, when the reference line 121A defining the left or right side of the inspection range is selected, if the operation button 106B is rotated clockwise, the change line 121B moves to the right, and if it is rotated counterclockwise, the change line 121B moves to the left. The amount of movement is determined by the amount of rotation of the dial button.

[0096] Furthermore, the operation button 106B may be configured as physical buttons corresponding to the four movement buttons 127A, 127B, 127C, and 127D that make up the button 127 shown in FIG. Furthermore, the operation button 106B may be configured with a seesaw type switch used to instruct movement in the up and down directions, and a seesaw type switch used to instruct movement in the left and right directions.

[0097] <Sixth Embodiment> 23 is a diagram for explaining an example of use of the surface inspecting device 1A assumed in the embodiment 3. In FIG. 23, parts corresponding to those in FIG. 1 are assigned the same reference numerals. The surface inspection device 1A used in this embodiment uses a so-called line camera as the imaging unit, so the imaging range is linear.

[0098] In the case of this embodiment, during inspection, the inspection object 10 is moved in the direction of the arrow while being placed on the uniaxial stage 20. By moving the uniaxial stage 20 in one direction, the entire inspection object 10 is imaged. Note that, except that a line camera is used as the camera 107 (see FIG. 4), the positional relationship between the camera 107 (see FIG. 4) and the light source 108 (see FIG. 4) and the like are the same as those in the first embodiment.

[0099] <Other embodiments> (1) Although the embodiments of the present invention have been described above, the technical scope of the present invention is not limited to the scope of the above-described embodiments. It is clear from the claims that various modifications and improvements to the above-described embodiments are also included in the technical scope of the present invention.

[0100] (2) In the above-described embodiment, a color camera is used as the camera 107 (see FIG. 4), but a monochrome camera may also be used. Also, only the green (G) component of the color camera may be used to inspect the surface of the inspection object 10 (see FIG. 1).

[0101] (3) In the above embodiment, a white light source is used as the light source 108 (see FIG. 4), but the color of the illumination light may be any color. Furthermore, the illumination light is not limited to visible light, but may be infrared light, ultraviolet light, or the like.

[0102] (4) In the above embodiment, the surface inspection device 1 (see FIG. 1) using one light source 108 (see FIG. 4) has been described, but the surface of the inspection object 10 may be illuminated using multiple light sources. For example, two light sources may be used. In this case, one light source may be arranged at an angle where specularly reflected light components are mainly incident on camera 107 (see FIG. 4), and the other light source may be arranged at an angle where diffusely reflected light components are mainly incident on camera 107. In this case, the two light sources may be arranged on either side of the optical axis of camera 107, or may be arranged side by side on one side of the optical axis of camera 107.

[0103] (5) In the above-described embodiment, a parallel light source is used as the light source 108 (see FIG. 4). However, a non-parallel light source such as a point light source or a surface light source may also be used. Also, a non-telecentric lens may be used on the optical axis of the camera 107 (see FIG. 4). When a telecentric lens or parallel light is not used, the device can be made smaller and less expensive than the surface inspection device 1 (see FIG. 1) described in the embodiment.

[0104] (6) In the above-described embodiment, the processor 101 (see FIG. 3) of the surface inspection device 1 (see FIG. 1) that captures the image of the inspection object 10 (see FIG. 1) realizes the function of calculating the score and accepting changes to the inspection range, but equivalent functions may also be realized by a processor of an external computer or server that acquires image data from the surface inspection device 1.

[0105] (7) In the above-described embodiment, the position of one side defining the outer edge of the inspection area is changed, but the positions of two sides defining the outer edge of the inspection area may be changed at once by diagonally dragging the point where two reference lines 121A intersect. Furthermore, the inspection area may be changed by tapping or otherwise specifying the new positions of two of the four corners defining the outer edge of the inspection area.

[0106] (8) In the above-described embodiment, the inspection range is defined by a rectangle. However, at least a portion of the outer edge of the changed inspection range may include a curve. In this case, the changed inspection range may be drawn freehand by the operator in the captured image field 121. For example, the changed inspection range may be defined by a circle, an ellipse, an arc, or a closed free curve.

[0107] (9) The processor in each of the above-mentioned embodiments refers to a processor in a broad sense, and includes general-purpose processors (e.g., CPUs, etc.) as well as dedicated processors (e.g., GPUs (Graphical Processing Units), ASICs (Application Specific Integrated Circuits), FPGAs (Field Programmable Gate Arrays), programmable logic devices, etc.). Furthermore, the operations of the processor in each of the above-described embodiments may be performed by a single processor alone, or may be performed by multiple processors located in physically separate locations in cooperation with each other. Furthermore, the order in which the operations of the processors are performed is not limited to the order described in each of the above-described embodiments, and may be changed individually. [Explanation of symbols]

[0108] 1, 1A... surface inspection device, 10... inspection object, 20... single-axis stage, 101... processor, 102... ROM, 103... RAM, 104... auxiliary storage device, 105... display, 106... operation reception device, 106A... imaging button, 106B... operation button, 107... camera, 108... light source, 110... signal line, 111... opening, 111A... opening, 111B... flange, 120... operation screen, 121A... reference line, 121B... change line, 122... score column, 125, 126, 126A... warning message, 127... button, 127A, 127B, 127C, 127D... movement button, 128... button

Claims

1. an imaging device for imaging the surface of an object to be inspected; a processor that calculates, from the images captured by the imaging device, a numerical value that represents a surface quality corresponding to an image within a range designated by a user's operation, the processor accepts a change in the shape of the range used to calculate the numerical value through a change in the position of an index that indicates the outer edge of the range displayed in the image obtained by capturing the surface of one of the objects to be inspected; The processor calculates the numerical value as a difference between a maximum value and a minimum value of a luminance profile given by an average value of luminance values ​​for each pixel column within the range. Surface inspection equipment.

2. the processor displays, within the image, a first indicator indicating the range before accepting the change and a second indicator indicating the range after accepting the change. The surface inspection device according to claim 1 .

3. The first indicator is displayed even while the range is being changed. The surface inspection device according to claim 2.

4. the second indicator is displayed after receiving an operation to change the position of the first indicator; The surface inspection device according to claim 2 or 3.

5. The second indicator can be drawn using a curve. The surface inspection device according to claim 4.

6. the processor accepts a change that reduces the area of ​​the range after the change compared to before the change; The surface inspection device according to claim 1 .

7. The processor accepts a change such that the entire range after the change is included in the range before the change. The surface inspection device according to claim 6.

8. When the processor receives a change to the range, it calculates the numerical value for the range after the change. The surface inspection device according to claim 1 .

9. When the processor receives a change to the range after calculating the numerical value, it recalculates the numerical value for the changed range. The surface inspection device according to claim 8.

10. When the processor accepts the change in the range, it displays on a screen that the numerical value is calculated under conditions different from the reference range. The surface inspection device according to claim 1 .

11. The processor warns of a decrease in the accuracy of the calculated numerical value if the decrease in the range after the change exceeds a threshold. The surface inspection device according to claim 1 .

12. the processor issues a warning of a decrease in accuracy of the calculated value when the distance between the outer edge of the range and the outer edge of the image after the change becomes shorter than a predetermined threshold. The surface inspection device according to claim 1 .

13. Further, a dedicated operator for accepting a change in the shape of the range is provided. The surface inspection device according to claim 1 .

14. the operator is provided separately from a second operator used to instruct the start of calculation of the numerical value; The surface inspection device according to claim 13.

15. the operator is provided separately from a third operator used for capturing the image; The surface inspection device according to claim 13 or 14.

16. The surface inspection device according to any one of claims 1 to 15, characterized in that the device itself is portable.

17. a computer that calculates, from the images captured by the imaging device, a numerical value that represents a surface quality corresponding to an image within a range designated by a user's operation; a function of accepting a change in the shape of the range used in calculating the numerical value by changing the position of an index that indicates the outer edge of the range displayed in the image obtained by capturing the surface of one object to be inspected; a function of calculating the numerical value as the difference between the maximum and minimum values ​​of a luminance profile given by the average value of the luminance values ​​for each pixel row within the range; A program to achieve this.

Images