Substrate transport robot and substrate transport robot system

Abstract

This substrate transport robot (1) comprises a sensor substrate (40) to which a sensor (60) is electrically connected, and a control substrate (50) on which a control unit (54) is mounted and which includes a universal connector (55) capable of connecting to different types of the sensor substrate (40).

Description

[Technical Field]

[0001] The present disclosure relates to a substrate transfer robot and a substrate transfer robot system. [Background technology]

[0002] A substrate transfer robot and a substrate transfer robot system including a control board connected to a sensor are known in the art. Such a substrate transfer robot and a substrate transfer robot system are disclosed in, for example, Japanese Patent No. 6365736.

[0003] Japanese Patent No. 6365736 discloses a robot equipped with a master device and a slave device that communicates with the master device. The slave device includes a control board with multiple interfaces to which different sensors are connected. The slave device transmits predetermined information acquired by the sensors to the master device. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent No. 6365736 Summary of the Invention

[0005] In the robot of Japanese Patent No. 6365736, as described above, different sensors are connected to the multiple interfaces of the slave device. Although not explicitly stated in Japanese Patent No. 6365736, it is believed that each of the multiple interfaces can be connected to only one specific, pre-set sensor. In this case, because a different type of sensor other than the specific sensor cannot be connected to the interface, it is difficult for the slave device to acquire detection values ​​from the different sensor. In other words, there is a problem in that it is difficult to change the type of sensor from which the slave device acquires detection values ​​depending on the application and purpose.

[0006] The present disclosure has been made to solve the above-mentioned problems, and one object of the present invention is to provide a substrate transport robot and a substrate transport robot system in which the type of sensor from which detection values ​​are obtained by the control board can be easily changed depending on the application and purpose.

[0007] In order to achieve the above object, a substrate transport robot according to a first aspect of the present disclosure includes an arm, a substrate holding hand that is moved by the arm and is movably connected to the arm and includes a blade that supports a substrate, a sensor board to which a sensor is electrically connected, and a control board that is equipped with a control unit and includes a universal connector that can be connected to different types of sensor boards. The control board includes a hand control board provided inside the board holding hand, and the sensor board includes, as hand sensor boards provided inside the board holding hand, a board detection sensor board to which a board detection sensor that detects a board is electrically connected, and a board gripping sensor board to which a board gripping sensor that detects that a board is being gripped by the blade of the board holding hand is electrically connected, and the universal connector of the hand control board can be connected to either the board detection sensor board or the board gripping sensor board. .

[0008] In the substrate transfer robot according to the first aspect of the present disclosure, as described above, the control board includes a universal connector connectable to different types of sensor boards. This allows the control board to acquire sensor detection values ​​from each of multiple types of sensor boards via a single universal connector. As a result, the type of sensor from which the control board acquires detection values ​​can be changed simply by changing the type of sensor board connected to the universal connector. This makes it possible to easily change the type of sensor from which the control board acquires detection values ​​depending on the application and purpose.

[0009] A substrate transfer robot system according to a second aspect of the present disclosure includes a substrate transfer robot and a robot control unit that controls the substrate transfer robot, the substrate transfer robot including an arm, a substrate holding hand that is moved by the arm and is movably connected to the arm and includes a blade that supports a substrate, a sensor board to which a sensor is electrically connected, and a control board on which a control unit is mounted and that includes a universal connector that can be connected to different types of sensor boards. The control board includes a hand control board provided inside the board holding hand, and the sensor board includes, as hand sensor boards provided inside the board holding hand, a board detection sensor board to which a board detection sensor that detects a board is electrically connected, and a board gripping sensor board to which a board gripping sensor that detects that a board is being gripped by the blade of the board holding hand is electrically connected, and the universal connector of the hand control board can be connected to either the board detection sensor board or the board gripping sensor board. .

[0010] In the substrate transfer robot system according to the second aspect of the present disclosure, as described above, the control board includes a universal connector connectable to different types of sensor boards. This allows the control board to acquire sensor detection values ​​from each of multiple types of sensor boards via a single universal connector. As a result, the type of sensor from which the control board acquires detection values ​​can be changed simply by changing the type of sensor board connected to the universal connector. This makes it possible to provide a substrate transfer robot system in which the type of sensor from which the control board acquires detection values ​​can be easily changed depending on the application and purpose.

[0011] According to the present disclosure, as described above, the type of sensor from which the detection value is acquired by the control board can be easily changed depending on the application and purpose. [Brief explanation of the drawings]

[0012] [Figure 1] 1 is a diagram showing a configuration of a substrate transport robot and a substrate transport robot system according to an embodiment of the present disclosure. [Figure 2] FIG. 10 is a schematic diagram of a hand control board and a hand sensor board according to one embodiment of the present disclosure. [Figure 3] 3 is a schematic diagram of a state in which a hand sensor board of a different type from that shown in FIG. 2 is connected to a hand control board according to an embodiment of the present disclosure. [Figure 4] FIG. 10 is a schematic diagram of a base control board and a base sensor board according to one embodiment of the present disclosure. [Figure 5] 5 is a schematic diagram of a state in which a base sensor board of a type different from that shown in FIG. 4 is connected to a base control board according to an embodiment of the present disclosure. [Figure 6] FIG. 2 is a schematic diagram of an arm control board and an arm sensor board according to an embodiment of the present disclosure. [Figure 7] 7 is a schematic diagram of an arm control board according to an embodiment of the present disclosure, in which an arm sensor board of a type different from that shown in FIG. 6 is connected. [Figure 8]FIG. 10 is a diagram showing the configuration of a substrate transport robot and a substrate transport robot system according to a first modified example of an embodiment of the present disclosure. [Figure 9] FIG. 10 is a diagram showing a configuration of a substrate transport robot according to a second modified example of an embodiment of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0013] Hereinafter, embodiments embodying the present disclosure will be described with reference to the drawings.

[0014] The configurations of a substrate transport robot 1 and a substrate transport robot system 100 according to this embodiment will be described with reference to FIG.

[0015] 1, the substrate transfer robot system 100 includes a substrate transfer robot 1 and a robot controller 2. The robot controller 2 controls the substrate transfer robot 1.

[0016] The substrate transfer robot 1 includes an arm 10, a substrate holding hand 20, a base 30, a sensor board 40, and a control board 50. The substrate transfer robot 1 includes a substrate transfer robot main body 11 including the arm 10, the substrate holding hand 20, the sensor board 40, and the control board 50. For the sake of simplicity, FIG. 1 illustrates one sensor board 40 for each of the arm 10, the substrate holding hand 20, and the base 30, but in reality, multiple sensor boards 40 are provided for each of the arm 10, the substrate holding hand 20, and the base 30.

[0017] The substrate transfer robot 1 is a horizontal articulated robot. Specifically, the substrate holding hand 20 is moved by an arm 10 and is rotatably connected to the arm 10. The substrate holding hand 20 also includes a blade 21 that supports a semiconductor wafer W. The arm 10 is disposed on a base 30. The arm 10 is rotatably connected to the base 30. A plurality of blades 21 are provided. The semiconductor wafer W is an example of a substrate. The substrate transfer robot 1 may also be a robot other than a horizontal articulated robot. For example, the substrate transfer robot 1 may also be a vertical articulated robot.

[0018] The arm 10 includes a first arm 10a and a second arm 10b. The first arm 10a is rotatable around one end thereof. The second arm 10b has one end rotatably connected to the other end of the first arm 10a, is rotatable relative to the first arm 10a, and has a substrate holding hand 20 connected to it. The substrate holding hand 20 may also include an upper hand and a lower hand that rotate independently of each other, similar to the arm 10.

[0019] 2 to 7 are electrically connected to each of the plurality of sensor substrates 40. For the sake of simplicity, the sensors 60 are not shown in FIG.

[0020] In this embodiment, the sensor substrate 40 is electrically connected to a sensor 60 that is different from the encoder that detects the rotation of the motor that drives each of the arm 10 and the substrate holding hand 20. That is, in the substrate transport robot 1, the sensor 60 is provided separately from the encoder (not shown). Here, the encoder is installed as standard on the substrate transport robot and is not intended to be changed (replaced). Therefore, since the sensor 60 is intended for a sensor that is different from the encoder, it becomes easy for the user to change (replace) the sensor 60 (sensor substrate 40).

[0021] The control board 50 includes a hand control board 51, a base control board 52, and an arm control board 53. The sensor board 40 includes a hand sensor board 41, a base sensor board 42, and an arm sensor board 43.

[0022] The hand control board 51 is provided near the substrate holding hand 20. Specifically, the hand control board 51 is provided inside the substrate holding hand 20. The hand control board 51 may also be provided outside the inside of the substrate holding hand 20. For example, the hand control board 51 may be provided at the connection between the substrate holding hand 20 and the second arm 10b.

[0023] The base control board 52 is provided on the base 30. The arm control board 53 is provided on the arm 10. Specifically, the arm control board 53 is provided on the second arm 10b. Note that the arm control board 53 may also be provided on the first arm 10a, for example.

[0024] The base control board 52 communicates with the robot control unit 2. Detection signals from the sensors 60 shown in Figures 2 to 7 are collected by the base control board 52, and the detection signals are transmitted from the base control board 52 to the robot control unit 2. In addition, command signals related to the driving of the substrate transport robot 1 are transmitted from the robot control unit 2 to the base control board 52.

[0025] In this embodiment, the control board 50 is serially connected to the robot control unit 2 that controls the substrate transport robot main body 11 via a communication unit 54c and a communication connector 56, which will be described later. Specifically, serial communication is performed between the robot control unit 2, the base control board 52, the arm control board 53, and the hand control board 51.

[0026] In detail, the robot control unit 2, the hand control board 51, the arm control board 53, and the base control board 52 are serially connected by a daisy chain connection via the communication unit 54c and communication connector 56 described later of each of the hand control board 51, the arm control board 53, and the base control board 52.

[0027] That is, the robot control unit 2 and the base control board 52 are serially connected. The base control board 52 and the arm control board 53 are also serially connected. The arm control board 53 and the hand control board 51 are also serially connected. The base control board 52 receives the detection values ​​of the hand sensor board 41 transmitted from the hand control board 51 via the arm control board 53. The base control board 52 also receives the detection values ​​of the arm sensor board 43 transmitted from the arm control board 53. The base control board 52 transmits the received detection values ​​of the hand sensor board 41 and the arm sensor board 43 to the robot control unit 2.

[0028] The base control board 52 also transmits a command signal for the arm 10 sent from the robot control unit 2 to the arm control board 53. The base control board 52 also transmits a command signal for the substrate holding hand 20 sent from the robot control unit 2 to the hand control board 51 via the arm control board 53.

[0029] The substrate transport robot 1 is raised and lowered relative to a substantially columnar housing 90 by an arm raising and lowering mechanism (not shown) that raises and lowers the arm 10. Specifically, the substrate holding hand 20, the arm 10, and the base 30 are raised and lowered integrally relative to the housing 90.

[0030] The hand control board 51, base control board 52, and arm control board 53 have the same configuration. Therefore, in the following description, the same reference numerals are used to designate common components mounted on the hand control board 51, base control board 52, and arm control board 53. Furthermore, in the following description, when the term "control board 50" is used, it is assumed to refer to a feature common to the hand control board 51, base control board 52, and arm control board 53. Furthermore, in the following description, when the term "sensor board 40" is used, it is assumed to refer to a feature common to the hand sensor board 41, base sensor board 42, and arm sensor board 43.

[0031] 2, hand control board 51 includes control unit 54, universal connector 55, and communication connector 56. Control unit 54, universal connector 55, and communication connector 56 are each mounted on hand control board 51.

[0032] The control unit 54 includes a CPU 54a, a memory 54b, and a communication unit 54c. The memory 54b stores programs executed by the CPU 54a. The communication unit 54c performs the serial communication via a communication connector 56.

[0033] The hand sensor board 41 is provided near the substrate holding hand 20. Specifically, the hand sensor board 41 is provided inside the substrate holding hand 20. The hand sensor board 41 may also be provided outside the inside of the substrate holding hand 20. For example, the hand sensor board 41 may be provided at the connection between the substrate holding hand 20 and the second arm 10b.

[0034] The sensor substrate 40 also includes a substrate detection sensor substrate 410 and a substrate gripping sensor substrate 411. The substrate detection sensor substrate 410 is mounted with a substrate detection sensor 61 that detects the semiconductor wafer W shown in FIG. 1 . The substrate gripping sensor substrate 411 is mounted with a substrate gripping sensor 62 that detects that the semiconductor wafer W is gripped by the blade 21 of the substrate holding hand 20 shown in FIG. 1 . The substrate detection sensor 61 may not be mounted on the substrate detection sensor substrate 410 but may be electrically connected to the substrate detection sensor substrate 410 by wiring. The substrate gripping sensor 62 may not be mounted on the substrate gripping sensor substrate 411 but may be electrically connected to the substrate gripping sensor substrate 411 by wiring. The substrate detection sensor 61 and the substrate gripping sensor 62 are each an example of a sensor. The substrate detection sensor substrate 410 and the substrate gripping sensor substrate 411 are each an example of a hand sensor substrate.

[0035] The substrate transfer robot 1 also includes a power output board 70 on which power output electronic components 71 are mounted. The power output board 70 outputs power to, for example, a vacuum valve 22 via the power output electronic components 71. The vacuum valve 22 is used to adsorb the semiconductor wafer W by the substrate holding hand 20. In the example shown in FIG. 2, the power output board 70 is provided inside the substrate holding hand 20. The power output board 70 may also be provided outside the inside of the substrate holding hand 20. For example, the power output board 70 may be provided at a connection between the substrate holding hand 20 and the second arm 10b.

[0036] In this embodiment, the universal connector 55 can be connected to different types of sensor boards 40. In other words, the universal connector 55 can be connected to at least two types of sensor boards 40. For example, the universal connector 55 of the hand control board 51 can be connected to any of the board detection sensor board 410, the board grip sensor board 411, and a sensor board 412 shown in FIG. 3 (described below).

[0037] Furthermore, by connecting the control board 50 and the sensor board 40, it is possible to provide the control board 50 and the sensor board 40 separately from each other. This makes it possible to easily arrange each of the control board 50 and the sensor board 40 in a relatively small space.

[0038] Here, substrate transfer robots generally have multiple sensors attached near the substrate holding hand. Furthermore, as semiconductor manufacturing equipment becomes more sophisticated, the demand for sensors is increasing. Meanwhile, space-saving design is required for substrate transfer robots. Therefore, there is often insufficient space to install sensors near the substrate holding hand. Furthermore, because multiple wires are required to transmit information acquired by the sensors to the base (base) of the substrate holding hand, there is often insufficient space for the wires. Therefore, by providing the control board 50 and the sensor board 40 separately as described above, the control board 50 and the sensor board 40 can be arranged separately from each other near the substrate holding hand 20. As a result, it is easy to arrange both the control board 50 and the sensor board 40 near the substrate holding hand 20. Furthermore, while realizing space-saving and wire-saving, the user can freely change the configuration of sensors near the substrate holding hand 20. This increases the versatility of the substrate transfer robot 1.

[0039] In addition, the control board 50 receives an identification signal of the sensor board 40 from the sensor board 40 connected to the universal connector 55. This enables the CPU 54a of the control board 50 to identify the type of sensor board 40 connected to the universal connector 55.

[0040] Furthermore, the control board 50 supplies voltage to the sensor boards 40 connected to the universal connector 55 via the universal connector 55. Specifically, the control board 50 supplies at least one of a low voltage of 5 V and a high voltage of 24 V to a specific sensor board 40.

[0041] In this embodiment, the control board 50 also includes a plurality of universal connectors 55. That is, each of the plurality of universal connectors 55 provided on the control board 50 can be connected to a different type of sensor board 40. For example, each of the plurality of universal connectors 55 provided on the hand control board 51 can be connected to any of the board detection sensor board 410, the board grip sensor board 411, and a sensor board 412 shown in FIG. 3 (described below). The plurality of universal connectors 55 have the same shape.

[0042] The universal connectors 55 of the control board 50 are provided along three of the four sides of the rectangular control board 50. The communication connector 56 of the control board 50 is provided along the remaining side of the control board 50 on which the universal connector 55 is not provided.

[0043] The sensor board 40 also includes a sensor board connector 40a that is connected to the universal connector 55. For example, the board detection sensor board 410 includes a board detection sensor board connector 410a. The board gripping sensor board 411 also includes a board gripping sensor board connector 411a. The board detection sensor board connector 410a and the board gripping sensor board connector 411a are each an example of a sensor board connector.

[0044] In this embodiment, the sensor board connectors 40a of different types of sensor boards 40 have the same shape. Specifically, the sensor board connectors 40a of different types of sensor boards 40 have the same size and share multiple pins (not shown). Different types of sensor boards 40 use different pins among the multiple pins based on the information exchanged between the connected control board 50.

[0045] The power output board 70 also includes a power output board connector 72 that can be connected to the universal connector 55 of the hand control board 51. The power output board connector 72 has the same shape as the board detection sensor board connector 410a and the board grip sensor board connector 411a. The power output board connector 72 can be connected to any of the three universal connectors 55 of the hand control board 51.

[0046] As shown in FIG. 3 , the multiple universal connectors 55 of the hand control board 51 can be connected to a sensor board 412 that is different from the board detection sensor board 410, the board gripping sensor board 411, and the power output board 70. That is, the sensor board 412 can be connected to any of the three universal connectors 55 of the hand control board 51. In the example shown in FIG. 3 , the sensor board 412 is connected to the universal connector 55 instead of the board detection sensor board 410 shown in FIG. 2 . Note that the sensor board 412 may be connected to the universal connector 55 instead of the board gripping sensor board 411 or the power output board 70. That is, any three of the board detection sensor board 410, the board gripping sensor board 411, the power output board 70, and the sensor board 412 can be connected to the three universal connectors 55 of the hand control board 51. The sensor board 412 is equipped with a predetermined sensor 63 and a connector 412a that can be connected to the universal connector 55. Connector 412a has the same shape as connector 410a for substrate detection sensor board, connector 411a for substrate gripping sensor board, and connector 72 for power output board, all of which are shown in FIG. 2. Sensor board 412 and connector 412a are examples of a hand sensor board and a sensor board connector, respectively. Predetermined sensor 63 is also an example of a sensor. For example, predetermined sensor 63 includes a friction sensor that detects frictional force between semiconductor wafer W and substrate holding hand 20.

[0047] The sensor board 412 may be provided in advance in the substrate holding hand 20, or may be introduced into the substrate holding hand 20 when replacing it with the substrate detection sensor board 410 or the like.

[0048] As shown in FIG. 4, the sensor board 40 includes a fan sensor board 420 on which a fan sensor 64 that detects the rotation speed of the fan 31 is mounted. The fan sensor board 420 is mounted on the base 30. In the example shown in FIG. 4, the fan 31 is mounted on the base 30, but the location of the fan 31 is not limited to this. The fan sensor 64 may not be mounted on the fan sensor board 420 but may be electrically connected to the fan sensor board 420 by wiring. The fan sensor board 420 also includes a fan sensor board connector 420a. The fan sensor 64 and the fan sensor board connector 420a are examples of a sensor and a sensor board connector, respectively. The fan sensor board 420 is also an example of a base sensor board.

[0049] The substrate transport robot 1 also includes a communication board 80 on which electronic communication components 81 are mounted. The communication board 80 is serially connected to the communication connector 56 of the arm control board 53 of the arm 10 via a daisy chain connection via the electronic communication components 81. In the example shown in Fig. 4, the communication board 80 is provided inside the base 30, but the location of the communication board 80 is not limited to this. The communication board 80 also includes a communication board connector 82.

[0050] The substrate transfer robot 1 also includes a signal input board 421 on which a signal input electronic component 421a is mounted. The signal input board 421 receives a detection signal from a predetermined sensor 65 via the signal input electronic component 421a. In other words, the signal input board 421 is an example of a base sensor board. The predetermined sensor 65 is, for example, a current sensor that detects a current from the base control board 52. The signal input board 421 also includes a signal input board connector 421b. The predetermined sensor 65 and the signal input board connector 421b are examples of a sensor and a sensor board connector, respectively.

[0051] In this embodiment, the universal connector 55 of the base control board 52 can be connected to any of different types of base sensor boards 42. That is, the universal connector 55 of the base control board 52 can be connected to any of the fan sensor board 420, the signal input board 421, and the sensor board 422 shown in FIG. 5 (described later).

[0052] The communication board 80 is connectable to the universal connector 55 of the base control board 52. That is, the universal connector 55 of the base control board 52 is connectable to any of the fan sensor board connector 420a of the fan sensor board 420, the signal input board connector 421b of the signal input board 421, and the communication board connector 82 of the communication board 80. The fan sensor board connector 420a, the signal input board connector 421b, and the communication board connector 82 have the same shapes. The fan sensor board connector 420a, the signal input board connector 421b, and the communication board connector 82 have the same shapes as the board detection sensor board connector 410a, the board grip sensor board connector 411a, and the power output board connector 72 shown in FIG. 2.

[0053] As shown in FIG. 5 , the multiple universal connectors 55 of the base control board 52 can be connected to a sensor board 422 that is different from the fan sensor board 420, the communication board 80, and the signal input board 421. That is, the sensor board 422 can be connected to any of the three universal connectors 55 of the base control board 52. In the example shown in FIG. 5 , the sensor board 422 is connected to the universal connector 55 instead of the fan sensor board 420 shown in FIG. 4 . The sensor board 422 may also be connected to the universal connector 55 instead of the communication board 80 or the signal input board 421. That is, any three of the fan sensor board 420, the communication board 80, the signal input board 421, and the sensor board 422 can be connected to the three universal connectors 55 of the base control board 52. A predetermined sensor 66 is mounted on the sensor board 422. The predetermined sensor 66 is, for example, a voltage sensor that detects voltage from the base control board 52. The sensor board 422 also includes a connector 422a that can be connected to the universal connector 55. The connector 422a has the same shape as the fan sensor board connector 420a, the signal input board connector 421b, and the communication board connector 82 shown in FIG. 4. The predetermined sensor 66 and the connector 422a are examples of a sensor and a connector for a sensor board, respectively. The sensor board 422 is also an example of a base sensor board.

[0054] The sensor board 422 may be provided on the base 30 in advance, or may be introduced into the base 30 when replacing it with the fan sensor board 420 or the like.

[0055] 6, the arm sensor board 43 is provided on the arm 10. Specifically, the arm sensor board 43 is provided on the second arm 10b. Note that the arm sensor board 43 may also be provided on the first arm 10a.

[0056] The arm sensor board 43 includes a pressure sensor board 430, an acceleration sensor board 431, and a temperature sensor board 432. The pressure sensor board 430 is equipped with a pressure sensor 67 that detects pressure. The acceleration sensor board 431 is equipped with an acceleration sensor 68 that detects acceleration. The temperature sensor board 432 is equipped with a temperature sensor 69 that detects temperature. The pressure sensor 67 may not be mounted on the pressure sensor board 430 but may be electrically connected to the pressure sensor board 430 by wiring. The acceleration sensor 68 may not be mounted on the acceleration sensor board 431 but may be electrically connected to the acceleration sensor board 431 by wiring. The temperature sensor 69 may not be mounted on the temperature sensor board 432 but may be electrically connected to the temperature sensor board 432 by wiring. Each of the pressure sensor 67, acceleration sensor 68, and temperature sensor 69 is an example of a sensor. Furthermore, each of the pressure sensor substrate 430, the acceleration sensor substrate 431, and the temperature sensor substrate 432 is an example of an arm sensor substrate.

[0057] In this embodiment, the universal connector 55 of the arm control board 53 can be connected to any of different types of arm sensor boards 43. Specifically, each of the multiple universal connectors 55 of the arm control board 53 can be connected to any of the pressure sensor board 430, the acceleration sensor board 431, the temperature sensor board 432, and a sensor board 433 shown in FIG.

[0058] In detail, the pressure sensor board 430 includes a pressure sensor board connector 430a connectable to the universal connector 55. The acceleration sensor board 431 includes an acceleration sensor board connector 431a connectable to the universal connector 55. The temperature sensor board 432 includes a temperature sensor board connector 432a connectable to the universal connector 55. The pressure sensor board connector 430a, the acceleration sensor board connector 431a, and the temperature sensor board connector 432a have the same shapes. The pressure sensor board connector 430a, the acceleration sensor board connector 431a, and the temperature sensor board connector 432a have the same shapes as the board detection sensor board connector 410a, the board gripping sensor board connector 411a, and the power output board connector 72 shown in FIG. 2. The pressure sensor board connector 430a, acceleration sensor board connector 431a, and temperature sensor board connector 432a have the same shapes as the fan sensor board connector 420a, communication board connector 82, and signal input board connector 421b shown in Fig. 4. The pressure sensor board connector 430a, acceleration sensor board connector 431a, and temperature sensor board connector 432a are each an example of a sensor board connector.

[0059] 7, the multiple universal connectors 55 of the arm control board 53 can be connected to a sensor board 433 that is different from each of the pressure sensor board 430, the acceleration sensor board 431, and the temperature sensor board 432. That is, the sensor board 433 can be connected to any of the three universal connectors 55 of the arm control board 53. In the example shown in FIG. 7, the sensor board 433 is connected to the universal connector 55 instead of the pressure sensor board 430 shown in FIG. 6. Note that the sensor board 433 may be connected to the universal connector 55 instead of the acceleration sensor board 431 or the temperature sensor board 432. That is, any three of the pressure sensor board 430, the acceleration sensor board 431, the temperature sensor board 432, and the sensor board 433 can be connected to the three universal connectors 55 of the arm control board 53. Furthermore, a predetermined sensor 60a is mounted on the sensor board 433. The predetermined sensor 60a is, for example, an angular acceleration sensor. The sensor board 433 also includes a connector 433a that can be connected to the universal connector 55. The connector 433a has the same shape as the pressure sensor board connector 430a, the acceleration sensor board connector 431a, and the temperature sensor board connector 432a shown in FIG. 6. The sensor board 433 and the connector 433a are examples of an arm sensor board and a sensor board connector, respectively. The predetermined sensor 60a is also an example of a sensor.

[0060] The sensor substrate 433 may be provided in advance on the arm 10, or may be introduced into the arm 10 when replacing the pressure sensor substrate 430.

[0061] [Effects of this embodiment] The substrate transfer robot 1 is equipped with a control board 50 including a universal connector 55 connectable to different types of sensor boards 40. This allows the control board 50 to acquire detection values ​​of the sensors 60 from each of multiple types of sensor boards 40 via a single universal connector 55. As a result, the type of sensor 60 from which the control board 50 acquires detection values ​​can be changed simply by changing the type of sensor board 40 connected to the universal connector 55. This allows the type of sensor 60 from which the control board 50 acquires detection values ​​to be easily changed depending on the application and purpose.

[0062] The control board 50 includes a plurality of universal connectors 55. This allows the type of sensor board 40 connected to each of the plurality of universal connectors 55 to be changed, making it possible to easily increase the combinations of types of sensors 60 from which the control board 50 acquires detection values.

[0063] The sensor board 40 includes a sensor board connector 40a that is connected to the universal connector 55. The sensor board connectors 40a of different types of sensor boards 40 have the same shape. As a result, the sensor board connectors 40a of different types of sensor boards 40 have the same shape, making it possible to easily connect the sensor board connectors 40a of different types of sensor boards 40 to the common universal connector 55.

[0064] The sensor board 40 is electrically connected to a sensor 60 that is different from the encoder that detects the rotation of the motors that drive the arm 10 and the substrate holding hand 20. This allows the control board 50 to easily change the type of sensor 60 that is different from the encoder and from which the detection value is obtained.

[0065] The control board 50 includes a hand control board 51 provided near the substrate-holding hand 20. The sensor board 40 includes a hand sensor board 41 provided near the substrate-holding hand 20. The hand control board 51 includes a universal connector 55 that can be connected to any of different types of hand sensor boards 41. This makes it possible to easily change the type of sensor 60 for the substrate-holding hand 20 from which the hand control board 51 acquires detection values ​​by changing the type of hand sensor board 41 connected to the universal connector 55.

[0066] The substrate transfer robot 1 includes a base 30 on which the arm 10 is placed. The control board 50 includes a base control board 52 provided on the base 30. The multiple sensor boards 40 include a base sensor board 42 provided on the base 30. The base control board 52 includes a universal connector 55 that can be connected to any of different types of base sensor boards 42. This makes it possible to easily change the type of sensor 60 for the base 30 from which the base control board 52 acquires detection values ​​by changing the type of base sensor board 42 connected to the universal connector 55.

[0067] The control board 50 includes an arm control board 53 provided on the arm 10. The sensor board 40 includes an arm sensor board 43 provided on the arm 10. The arm control board 53 includes a universal connector 55 that can be connected to any of different types of arm sensor boards 43. This makes it possible to easily change the type of sensor 60 for the arm 10 from which the arm control board 53 acquires detection values ​​by changing the type of arm sensor board 43 connected to the universal connector 55.

[0068] The sensor board 40 includes at least one of a substrate detection sensor board 410 electrically connected to a substrate detection sensor 61 that detects the semiconductor wafer W, a pressure sensor board 430 electrically connected to a pressure sensor 67 that detects pressure, an acceleration sensor board 431 electrically connected to an acceleration sensor 68 that detects acceleration, a fan sensor board 420 electrically connected to a fan sensor 64 that detects the rotation speed of the fan 31, a temperature sensor board 432 electrically connected to a temperature sensor 69 that detects temperature, and a substrate gripping sensor board 411 electrically connected to a substrate gripping sensor 62 that detects whether the semiconductor wafer W is being gripped by the blade 21 of the substrate holding hand 20. This allows at least one of the substrate detection sensor board 410, the pressure sensor board 430, the acceleration sensor board 431, the fan sensor board 420, the temperature sensor board 432, and the substrate gripping sensor board 411 to be easily connected to the control board 50 via a universal connector 55.

[0069] The substrate transport robot 1 is equipped with a communication board 80 that is mounted with communication electronic components 81 and can be connected to the universal connector 55 of the control board 50. This allows the sensor board 40 connected to the universal connector 55 to be easily replaced with the communication board 80.

[0070] The substrate transfer robot 1 includes a signal input substrate 421 that has a signal input electronic component 421a mounted thereon and is connectable to the universal connector 55 of the control substrate 50, and a power output substrate 70 that has a power output electronic component 71 mounted thereon and is connectable to the universal connector 55 of the control substrate 50. This allows the sensor substrate 40 that is connected to the universal connector 55 to be easily changed to the signal input substrate 421 or the power output substrate 70.

[0071] The substrate transfer robot 1 includes an arm 10, a substrate holding hand 20, a sensor 60, and a substrate transfer robot main body 11 including a control board 50. The control board 50 includes a communication unit 54c and a communication connector 56, and is serially connected to a robot control unit 2 that controls the substrate transfer robot main body 11 via the communication unit 54c and the communication connector 56. As a result, the serial communication connection between the control board 50 and the robot control unit 2 can prevent an increase in the number of wires between the control board 50 and the robot control unit 2. As a result, it is possible to prevent the wiring from becoming complicated and the substrate transfer robot 1 from becoming larger.

[0072] The robot control unit 2, the hand control board 51, and the arm control board 53 are serially connected by a daisy chain connection via the communication units 54c and communication connectors 56 of the hand control board 51 and the arm control board 53. As a result, the robot control unit 2, the hand control board 51, and the arm control board 53 are connected in series by a daisy chain connection, which makes it possible to prevent the number of wires between the robot control unit 2 and the substrate transport robot 1 from increasing.

[0073] The substrate transfer robot system 100 includes a substrate transfer robot 1 including a control board 50 including a universal connector 55 connectable to different types of sensor boards 40. The substrate transfer robot 1 also includes a control board 50 including a universal connector 55 connectable to any of the different types of sensor boards 40. This allows the control board 50 to acquire detection values ​​of the sensors 60 from each of multiple types of sensor boards 40 via a single universal connector 55. As a result, the type of sensor 60 from which the control board 50 acquires detection values ​​can be easily changed simply by changing the type of sensor board 40 connected to the universal connector 55. This makes it possible to provide a substrate transfer robot system 100 in which the type of sensor 60 from which detection values ​​are acquired by the control board 50 can be easily changed depending on the application and purpose.

[0074] [Variations] It should be noted that the embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present disclosure is defined by the claims, not by the description of the above-mentioned embodiments, and further includes all modifications (variations) within the meaning and scope equivalent to the claims.

[0075] For example, in the above embodiment, an example has been shown in which the control board 50 includes a plurality of universal connectors 55, but the present disclosure is not limited to this.

[0076] In addition, in the above embodiment, an example has been shown in which the sensor board connectors 40a of different types of sensor boards 40 have the same shape, but the present disclosure is not limited to this. The sensor board connectors 40a of different types of sensor boards 40 may have different shapes.

[0077] In addition, in the above embodiment, an example has been shown in which the multiple universal connectors 55 of the control board 50 have the same shape, but the present disclosure is not limited to this. The multiple universal connectors 55 of the control board 50 may have different shapes.

[0078] In the above embodiment, an example has been described in which the control board 50 includes the hand control board 51, the base control board 52, and the arm control board 53, but the present disclosure is not limited to this. It is sufficient that the control board 50 includes at least one of the hand control board 51, the base control board 52, and the arm control board 53.

[0079] Furthermore, in the above embodiment, an example was shown in which the substrate transport robot 1 was provided with the communication board 80, but the present disclosure is not limited to this. The substrate transport robot 1 does not necessarily have to be provided with the communication board 80.

[0080] In the above embodiment, the substrate transport robot 1 is provided with the signal input board 421 and the power output board 70, but the present disclosure is not limited to this. The substrate transport robot 1 does not have to be provided with one or both of the signal input board 421 and the power output board 70.

[0081] In addition, in the above embodiment, an example was shown in which the control board 50 was connected to the robot control unit 2 via serial communication, but the present disclosure is not limited to this. The control board 50 may also be connected to the robot control unit 2 via parallel communication.

[0082] In the above embodiment, the robot controller 2, the hand control board 51, the arm control board 53, and the base control board 52 are serially connected by a daisy chain connection, but the present disclosure is not limited to this. For example, the hand control board 51, the arm control board 53, and the base control board 52 may each be individually connected to the robot controller 2 for communication.

[0083] In the above embodiment, an example has been shown in which the hand sensor board 41, the base sensor board 42, and the arm sensor board 43 are connected to the hand control board 51, the base control board 52, and the arm control board 53, respectively, but the present disclosure is not limited to this. For example, the hand sensor board 41 may be connected to the base control board 52 or the arm control board 53. Furthermore, the base sensor board 42 may be connected to the hand control board 51 or the arm control board 53. Furthermore, the arm sensor board 43 may be connected to the hand control board 51 or the base control board 52.

[0084] Furthermore, in the above embodiment, an example has been described in which the substrate holding hand 20, the arm 10, and the base 30 rise and fall integrally relative to the housing 90, but the present disclosure is not limited to this. For example, the base does not have to rise and fall. Specifically, as shown in FIG. 8 , a substrate transfer robot system 200 includes a substrate transfer robot 101 including a substrate holding hand 120, an arm 110, and a base 130. The arm 110 is attached to the upper end of a lifting mechanism 190 that extends upward from the base 130. The lifting mechanism 190 extends and retracts in the vertical direction. As a result, the base 130 does not rise and fall, but the arm 110 and the substrate holding hand 120 rise and fall integrally as the lifting mechanism 190 extends and retracts.

[0085] Furthermore, in the above embodiment, an example has been described in which the substrate holding hand 20 is rotatably provided with respect to the arm 10, but the present disclosure is not limited to this. The substrate holding hand may be linearly movable with respect to the arm. For example, as shown in FIG. 9 , a substrate transfer robot 201 includes a substrate holding hand 220, an arm 210, and a base 230. The base 230 extends from the inside of the housing 290 to the outside of the housing 290 through an opening 291 provided in the housing 290. The opening 291 extends in the up-down direction. The arm 210 is fixed to the base 230 outside the housing 290. The substrate holding hand 220 is placed on a portion of the arm 210 outside the housing 290. The substrate holding hand 220 is linearly movable along direction A on the arm 210. The substrate holding hand 220, the arm 210, and the base 230 move up and down together along the opening 291.

[0086] In the above embodiment, the substrate transport robot 1 is a horizontal articulated robot, but the present disclosure is not limited to this. For example, the substrate transport robot may be a vertical articulated robot. [Explanation of symbols]

[0087] 1. Substrate transport robot 2 Robot control unit 10, 110, 210 Arms 11 Robot body 20, 120, 220 Board holding hand 21 Blades 30, 130, 230 bases 31 Fans 40 Sensor board 40a Sensor board connector 41 Hand sensor board 42 Base sensor board 43 Arm sensor board 50 control board 51 Hand control board 52 Base control board 53 Arm control board 54 control unit 54c Communications Department 55 Universal Connector 56 Communication connector 60 Prescribed sensor (sensor) 60a Prescribed sensor (sensor) 61 Substrate detection sensor (sensor) 62 Substrate gripping sensor (sensor) 63 Prescribed Sensor (Sensor) 64 Fan sensor (sensor) 65 Prescribed Sensor (Sensor) 66 Prescribed Sensor (Sensor) 67 Pressure sensor (sensor) 68 Acceleration sensor (sensor) 69 Temperature Sensor (Sensor) 70 Power output electronic components 71 Power output electronic components 80 Communication board 81 Electronic components for communication 100, 200, 201 Substrate transport robot system 410 Substrate detection sensor board (hand sensor board) 410a PCB detection sensor board connector (sensor board connector) 411 Substrate gripping sensor board (hand sensor board) 411a Connector for PCB gripping sensor board (sensor board connector) 412 Sensor board (hand sensor board) 412a Connector (sensor board connector) 420 Fan sensor board (sensor board for base) 420a Fan sensor board connector (sensor board connector) 421 Signal input board (sensor board for base) 421a Signal input electronic components 421b Signal input board connector (sensor board connector) 422 Sensor board (sensor board for base) 430 Pressure Sensor Board 431 Acceleration sensor board 422a Connector (sensor board connector) 430 Pressure sensor board (sensor board for arm) 431 Acceleration sensor board (sensor board for arm) 432 Temperature sensor board (sensor board for arm) 430a Pressure sensor board connector (sensor board connector) 431a Acceleration sensor board connector (sensor board connector) 432a Temperature sensor board connector (sensor board connector) 433 Sensor board (sensor board for arm) 433a Connector (sensor board connector) W: Semiconductor wafer (substrate)

Claims

1. Arm and a substrate holding hand including a blade moved by the arm and movably connected to the arm, the blade supporting a substrate; a sensor substrate to which the sensor is electrically connected; a control board on which a control unit is mounted and which includes a universal connector connectable to different types of sensor boards; the control board includes a hand control board provided inside the substrate holding hand, the sensor board includes, as a hand sensor board provided inside the substrate holding hand, a substrate detection sensor board to which a substrate detection sensor that detects the substrate is electrically connected, and a substrate gripping sensor board to which a substrate gripping sensor that detects that the substrate is being gripped by the blade of the substrate holding hand is electrically connected; A substrate transport robot, wherein the universal connector of the hand control board is connectable to both the substrate detection sensor board and the substrate gripping sensor board.

2. The substrate transfer robot according to claim 1 , wherein the control board includes a plurality of the universal connectors.

3. the sensor board includes a sensor board connector that is connected to the universal connector, The substrate transfer robot according to claim 2 , wherein the sensor board connectors of the different types of sensor boards have the same shape.

4. 2. The substrate transport robot according to claim 1, wherein the sensor board is electrically connected to the sensor different from an encoder that detects rotation of a motor that drives each of the arm and the substrate holding hand.

5. the hand control board is provided near the substrate holding hand, the hand sensor board is provided in the vicinity of the board holding hand, 2. The substrate transfer robot according to claim 1, wherein the hand control board includes the universal connector that can be connected to any of different types of hand sensor boards.

6. Further comprising a base on which the arm is disposed, the control board includes a base control board provided on the base, the sensor substrate includes a base sensor substrate provided on the base, 2. The substrate transfer robot according to claim 1, wherein the base control board includes the universal connector that can be connected to any of different types of base sensor boards.

7. the control board includes an arm control board provided on the arm, the sensor board includes an arm sensor board provided on the arm, 2. The substrate transfer robot according to claim 1, wherein the arm control board includes the universal connector that can be connected to any of different types of arm sensor boards.

8. 2. The substrate transport robot according to claim 1, wherein the sensor board further includes at least one of a pressure sensor board electrically connected to a pressure sensor that detects pressure, an acceleration sensor board electrically connected to an acceleration sensor that detects acceleration, a fan sensor board electrically connected to a fan sensor that detects the rotation speed of a fan, and a temperature sensor board electrically connected to a temperature sensor that detects temperature.

9. 2. The substrate transfer robot according to claim 1, further comprising a communication board on which electronic components for communication are mounted and which is connectable to the universal connector of the control board.

10. 2. The substrate transport robot according to claim 1, further comprising: a signal input board on which signal input electronic components are mounted and which is connectable to the universal connector of the control board; and a power output board on which power output electronic components are mounted and which is connectable to the universal connector of the control board.

11. a substrate transport robot main body including the arm, the substrate holding hand, the sensor, and the control board; 2. The substrate transport robot according to claim 1, wherein the control board includes a communication unit and a communication connector, and is serially connected to a robot control unit that controls the substrate transport robot main body via the communication unit and the communication connector.

12. The hand control board is provided near the board holding hand, the control board includes an arm control board provided on the arm, 12. The substrate transport robot according to claim 11, wherein the robot control unit, the hand control board, and the arm control board are serially connected by a daisy chain connection via the communication unit and the communication connector of each of the hand control board and the arm control board.

13. The control board includes a plurality of the universal connectors, The substrate transfer robot according to claim 1 , wherein the plurality of universal connectors are provided along different sides of the control board.

14. a substrate transport robot; a robot control unit that controls the substrate transport robot, The substrate transport robot Arm and a substrate holding hand including a blade moved by the arm and movably connected to the arm, the blade supporting a substrate; a sensor substrate to which the sensor is electrically connected; a control board on which a control unit is mounted and which includes a universal connector connectable to different types of sensor boards; the control board includes a hand control board provided inside the substrate holding hand, the sensor board includes, as a hand sensor board provided inside the substrate holding hand, a substrate detection sensor board to which a substrate detection sensor that detects the substrate is electrically connected, and a substrate gripping sensor board to which a substrate gripping sensor that detects that the substrate is being gripped by the blade of the substrate holding hand is electrically connected; A substrate transport robot system, wherein the universal connector of the hand control board is connectable to both the substrate detection sensor board and the substrate gripping sensor board.

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