Ozone generator and method for installing internal components for transmitting objects

Abstract

The present disclosure aims to provide an ozone generator having a structure with an object-transmitting internal member that can reduce environmental impact and extend life without reducing usage efficiency. The present disclosure also provides an ozone generator having an outer frame member (31) with an opening (31b), and an object-transmitting internal member (32) disposed within the opening (31b). The object-transmitting internal member (32) has a diameter fluctuation property in which the member diameter (d2) is smaller than the opening diameter (d1) of the opening (31) at or below a cooling temperature (T1), and the member diameter (d2) is equal to or greater than the opening diameter (d1) at a non-cooling temperature range (TH). The object-transmitting internal member (32) and the opening (31b) are in close contact with each other at a boundary surface (33) between the outer circumferential surface of the object-transmitting internal member (32) and the inner circumferential surface of the opening (31b) without any intervening member.

Description

[Technical Field]

[0001] The present disclosure relates to an ozone generator including an ozone generator that performs an ozone generation process to generate ozone gas from a raw material gas supplied to a discharge space, and a method for attaching an object-transmitting internal member provided in the ozone generator. [Background technology]

[0002] An example of a conventional ozone generator having an ozone generator that generates a dielectric barrier discharge in a discharge space and performs an ozone generation process to generate ozone gas from a raw material gas (oxygen gas) supplied to the discharge space is the ozone generator disclosed in Patent Document 1.

[0003] Such a conventional ozone generator has a transmission member for transmitting a transmission target for the ozone generator. The transmission target can be, for example, a source gas such as ozone gas or oxygen gas, and the transmission member can be an ozone gas passage for transmitting the ozone gas or a source gas passage for transmitting the source gas.

[0004] Furthermore, conventional ozone generators have an internal object transmission member for outputting an object such as ozone gas to the outside or inputting an object such as a raw material gas from the outside. The internal object transmission member is connected to a transmission member so that the object can be transmitted. For example, if the object is ozone gas, the internal object transmission member is connected to an ozone gas passage so that the ozone gas can be transmitted.

[0005] Fig. 14 is an explanatory diagram that schematically shows the planar structure of a conventional object transmission structure 60. Fig. 15 is an explanatory diagram that schematically shows the cross-sectional structure of a conventional object transmission structure 60.

[0006] As shown in these figures, the conventional object transmission structure 60 includes, as its main components, an outer frame member 61 having a circular opening 61b in a planar view, and an object transmission internal member 62 that is arranged within the opening 61b and is also circular in a planar view.

[0007] The outer frame member 61 includes, as its main components, an outer alloy peripheral portion 61a and an opening 61b that penetrates the central region of the outer alloy peripheral portion 61a. The outer frame member 61 is made of a relatively lightweight material with a high specific strength, such as an aluminum alloy, for the outer alloy peripheral portion 61a, thereby achieving weight savings.

[0008] The object-transmitting internal member 62 includes, as its main components, an outer alloy portion 62a and a through-flow passage 62b that penetrates a central region of the outer alloy portion 62a. The through-flow passage 62b is circular in plan view to transmit (pass) the object. The outer alloy portion 62a is made of a corrosion-resistant alloy material, such as stainless steel, that is resistant to corrosion when passing the object.

[0009] As such, since it is necessary to change the constituent material between the outer frame member 61 (alloy outer peripheral portion 61a) and the object transmission internal member 62 (alloy outer peripheral portion 62a), the object transmission structure 60 requires two parts (outer frame member 61 + object transmission internal member 62).

[0010] In order to position the object transmission internal member 62 within the opening 61b, the member diameter d62 of the object transmission internal member 62 is set to be approximately the same length as the opening diameter d61 so that it gently contacts the inner surface of the opening 61b (opening diameter d61).

[0011] The alloy outer periphery 61a made of aluminum alloy and the alloy outer periphery 62a made of stainless steel cannot be directly joined together.

[0012] Therefore, in the conventional object transmission structure 60, the O-ring 66 serving as a sealing member for ensuring close contact between the outer frame member 61 and the object transmission internal member 62 is an essential component.

[0013] Specifically, a sealing groove 62c having a circular shape in plan view is provided in the central region of the outer periphery of the alloy outer periphery 62a. An O-ring 66, which is a sealing member having a circular shape in plan view, is provided in the sealing groove 62c, thereby improving the airtightness between the inner periphery of the opening 61b of the outer frame member 61 and the outer periphery of the object transmission inner member 62 (alloy outer periphery 62a). This is because the O-ring 66, which serves as a sealing member, is interposed between the inner periphery of the opening 61b of the outer frame member 61 and the outer periphery of the object transmission inner member 62. [Prior art documents] [Patent documents]

[0014] [Patent Document 1] Patent No. 3607890 Summary of the Invention [Problem to be solved by the invention]

[0015] However, since the O-ring 66 generally has the characteristic of deteriorating over time due to changes in hardness and corrosion, it is necessary to replace the O-ring 66 during the use period of the ozone generator having the object transmission structure 60.

[0016] As described above, conventional ozone generators having an object transmission structure 60 require replacement of the O-ring 66, which is a sealing member, resulting in low usage efficiency of the ozone generator. In addition, there is a problem in that the disposal of used O-rings 66 places a high burden on the environment.

[0017] Furthermore, when replacing the O-ring 66, the task of removing the O-ring 66 is relatively difficult, and there is a risk that the outer frame member 61 or the object transmission internal member 62 may be damaged during replacement, thereby deteriorating the performance of the object transmission structure 60. Specifically, there is a risk that the inner peripheral surface of the alloy outer peripheral portion 61a (the inner peripheral surface of the opening 61b) or the outer peripheral surface of the alloy outer peripheral portion 62a, which are the mating portions between the outer frame member 61 and the object transmission internal member 62, may be damaged, deteriorating performance.

[0018] As described above, the conventional ozone generator having the object transmitting structure 60 has the problem of reducing the usage efficiency and increasing the environmental load.

[0019] Furthermore, since sealing members such as O-rings 66 used in conventional object transmission structures 60 have a tendency to deteriorate over time, there was a problem in that it was difficult to extend the life of conventional ozone generators having object transmission structures 60.

[0020] The present disclosure aims to solve the above-mentioned problems and to provide an ozone generator having an internal object transmission component, which can reduce environmental load and extend the lifespan without reducing usage efficiency. [Means for solving the problem]

[0021] An ozone generator according to the present disclosure includes an ozone generator that performs an ozone generation process by generating a dielectric barrier discharge in a discharge space and generating ozone gas from a raw material gas supplied to the discharge space, an ozone gas passage for flowing the ozone gas generated in the discharge space, a generator housing member that houses the ozone generator and the ozone gas passage within a housing space, and an object transmission internal member attached to a member mounting region of the generator housing member, wherein the object transmission internal member is connected to a transmission member in a manner that a transmission object for the ozone generator can be transmitted, the transmission member being a structure or space for transmitting the transmission object, and the transmission object includes the ozone gas, The transmission member includes the ozone gas passage, the member mounting region has an opening, the object transmission internal member is provided within the opening, the opening has a circular shape of the opening diameter in a planar view, the object transmission internal member has a circular shape of the member diameter in a planar view, the object transmission internal member has a diameter fluctuation property such that the member diameter is smaller than the opening diameter when the temperature is below a predetermined cooling temperature, and the member diameter is larger than the opening diameter when the temperature is above the predetermined cooling temperature and in a non-cooling temperature range of 0°C or higher, and in the non-cooling temperature range, the object transmission internal member and the opening are in close contact at the boundary surface between the outer peripheral surface of the object transmission internal member and the inner peripheral surface of the opening, without any other member in between. [Effects of the Invention]

[0022] The object transmission internal member provided in the generator housing member of the ozone generator of the present disclosure is attached to the member mounting area of ​​the generator housing member in a tightly and airtight state in which the object transmission internal member is tightly attached within the opening without any other members in between when the temperature is in the non-cooling temperature range.

[0023] Since the object transmission internal member has the above-mentioned diameter fluctuation property, the object transmission internal member, which has been set to a predetermined cooling temperature or below, can be placed in the opening of the member mounting area, and then the temperature of the object transmission internal member can be set to the non-cooling temperature zone, thereby allowing the object transmission internal member to be mounted in the member mounting area of ​​the generator accommodating member in the above-mentioned close-fitting state.

[0024] As a result, in the ozone generator of the present disclosure, the internal object transmission member does not have any parts that require replacement during use, so that a decrease in the usage efficiency of the ozone generator can be reliably avoided.

[0025] Furthermore, in the ozone generator disclosed herein, the internal object transmission component does not have any parts that need to be replaced during use, so there is no possibility of damage to the internal object transmission component or component mounting area due to component replacement, and the life of the ozone generator can be extended.

[0026] In addition, the internal object-transmitting member provided in the ozone generator of the present disclosure does not have any parts that are to be discarded during use, which reduces the environmental impact.

[0027] The objects, features, aspects, and advantages of the present disclosure will become more apparent from the following detailed description and the accompanying drawings. [Brief explanation of the drawings]

[0028] [Figure 1] FIG. 2 is an explanatory diagram schematically illustrating a cross-sectional structure of an object transmitting structure provided in the ozone generator according to the first embodiment of the present disclosure. [Figure 2] 2 is an explanatory diagram schematically showing a cross-sectional structure of an outer frame member in the object transmission structure of FIG. 1. FIG. [Figure 3] 2 is an explanatory diagram schematically illustrating a cross-sectional structure of an object transmission internal member of FIG. 1. [Figure 4] FIG. 2 is an explanatory diagram schematically illustrating the configuration of the ozone generator according to the first embodiment, which has an internal object-transmitting member. [Figure 5] FIG. 5 is an explanatory diagram schematically illustrating the structure of a region of interest of the ozone generator shown in FIG. 4. [Figure 6] 5 is an explanatory diagram showing details of a region of interest on the base shown in FIG. 4. FIG. [Figure 7] FIG. 2 is an explanatory diagram schematically showing a cross-sectional configuration of an ozone generator according to a first modified example of the first embodiment. [Figure 8]FIG. 3 is an explanatory diagram schematically showing a cross-sectional configuration of an ozone generator according to a second modified example of the first embodiment. [Figure 9] FIG. 10 is an explanatory diagram schematically showing a cross-sectional configuration of an ozone generator according to a third modified example of the first embodiment. [Figure 10] 10 is an explanatory diagram (part 1) showing a method for attaching an internal object transmission member according to the second embodiment. FIG. [Figure 11] 10 is an explanatory diagram (part 2) showing a method for attaching an internal object transmission member according to the second embodiment. FIG. [Figure 12] FIG. 10 is an explanatory diagram (part 3) showing a method for attaching the internal object transmission member according to the second embodiment. [Figure 13] FIG. 10 is an explanatory diagram (part 4) showing a method for attaching the internal object transmission member according to the second embodiment. [Figure 14] FIG. 10 is an explanatory diagram schematically illustrating a planar structure of a conventional object transmission structure. [Figure 15] FIG. 10 is an explanatory diagram schematically showing a cross-sectional structure of a conventional object transmission structure. DETAILED DESCRIPTION OF THE INVENTION

[0029] <First Embodiment> Fig. 1 is an explanatory diagram schematically showing the cross-sectional structure of an object transmission structure 30 provided in an ozone generator 100 (described later) according to a first embodiment of the present disclosure. Fig. 2 is an explanatory diagram schematically showing the cross-sectional structure of an outer frame member 31 in the object transmission structure 30 of Fig. 1. Fig. 3 is an explanatory diagram schematically showing the cross-sectional structure of an object transmission internal member 32 in the object transmission structure 30.

[0030] As shown in these figures, the object transmission structure 30 of embodiment 1 includes, as its main components, an outer frame member 31 having a circular opening 31b in a planar view, and an object transmission internal member 32 that is provided within the opening 31b and is circular in a planar view.

[0031] The object transmission internal member 32 is a member to which a transmission object for the ozone generator 101, which will be described later, is connected to a transmission member so as to be capable of being transmitted. The "transmission member" is a structure or space for transmitting the transmission object.

[0032] The outer frame member 31 includes, as its main components, an outer alloy portion 31a and an opening 31b that penetrates the central region of the outer alloy portion 31a. The outer frame member 31 is made of a relatively lightweight material with a high specific strength, such as an aluminum alloy, for the outer alloy portion 31a, thereby reducing its weight.

[0033] The object-transmitting internal member 32 includes, as its main components, an outer alloy portion 32a and a through-flow passage 32b that penetrates a central region of the outer alloy portion 32a. The through-flow passage 32b has a circular shape with a through diameter d3 in a plan view to transmit (flow) the object. The outer alloy portion 32a is made of a corrosion-resistant alloy material, such as stainless steel, that is resistant to corrosion when the object is circulated.

[0034] The opening 31b in the outer frame member 31 has a circular shape with an opening diameter d1 in plan view, and the object transmission internal member 32 has a circular shape with a member diameter d2 in plan view.

[0035] Hereinafter, in this specification, the term "transmission" is used as a concept including the flow of gases such as raw material gases, the flow of liquids such as refrigerants including cooling water, and the transmission of electrical signals such as power (voltage).

[0036] As such, since it is necessary to change the constituent material between the outer frame member 31 (alloy outer peripheral portion 31a) and the object transmission internal member 32 (alloy outer peripheral portion 32a), the object transmission structure 30 requires two parts (outer frame member 31 + object transmission internal member 32).

[0037] As shown in FIG. 1, the object transmission structure 30 InThe outer frame member 31 uses the opening 31b and the peripheral area of the opening 31b as a member attachment area, and the object transmission internal member 32 is attached to the member attachment area in a manner where the object transmission internal member 32 is disposed within the opening 31b.

[0038] The object transmission internal member 32 in the object transmission structure 30 of Embodiment 1 has the following diameter variation characteristics.

[0039] Diameter variation characteristics... When the temperature is at or below the cooling temperature T1 which is a predetermined cooling temperature, the member diameter d2 of the object transmission internal member 32 is less than the opening diameter d1 of the opening 31b, and when the temperature is above the cooling temperature T1 and within the non-cooling temperature range TH of 0°C or higher, the member diameter d2 becomes greater than or equal to the opening diameter d1.

[0040] Here, if the member diameter d2 when the temperature is at or below the cooling temperature T1 is defined as the member diameter d22 during cooling, and the member diameter d2 when the temperature is within the non-cooling temperature range TH is defined as the member diameter d21 during non-cooling, then {d21 < d1 ≤ d22} holds with respect to the opening diameter d1 of the opening 31b.

[0041] Thus, the object transmission structure 30 of Embodiment 1 has a diameter variation property such that when the temperature is at or below the cooling temperature T1, the member diameter d2 (= member diameter d22 during cooling) is less than the opening diameter d1, and when the temperature is within the non-cooling temperature range TH, the member diameter d2 (= member diameter d21 during non-cooling) is greater than or equal to the opening diameter d1.

[0042] Since the object transmission internal member 32 has the above diameter variation characteristics, when the temperature is within the non-cooling temperature range TH, the object transmission structure 30 exhibits a tightly adhered attachment state where the object transmission internal member 32 and the outer frame member 31 are strongly adhered to each other at the boundary surface 33 between the outer peripheral surface of the object transmission internal member 32 and the inner peripheral surface of the opening 31b.

[0043] The object transmission internal member 32 can be attached to the member attachment region of the outer frame member 31 as follows: The object transmission internal member 32, which has been set to a cooling temperature T1 or lower, is placed in the opening 31b of the member attachment region, and then the temperature of the object transmission internal member 32 is set to the non-cooling temperature zone TH. The method for attaching the object transmission internal member 32 will be described in detail in the second embodiment described below.

[0044] In this way, the object transmission structure 30 has the object transmission internal member 32 attached in a tightly fitted state within the opening 31b without using any other member including a sealing member such as an O-ring.

[0045] FIG. 4 is an explanatory diagram schematically illustrating the configuration of the ozone generator 100 according to the first embodiment, which has the object transmitting structure shown in FIGS.

[0046] The ozone generator 100 functions as a flat-plate stacked type ozone generator, and has a combination of a base 24 and a generator cover 110 as a generator housing member having a housing space S100 for housing an ozone generator 101.

[0047] That is, the generator accommodating member includes a base 24 and a generator cover 110 disposed on the surface of the base 24, and an accommodating space S100 is formed on the surface of the base 24.

[0048] The accommodation space S100 accommodates an ozone generator 101. The ozone generator 101 generates a dielectric barrier discharge in the discharge space 6, and performs an ozone generation process to generate ozone gas G2 from a raw material gas G1 such as oxygen gas supplied to the discharge space 6.

[0049] Furthermore, the ozone generator 100 has an ozone transformer 200 and a high-frequency inverter 300 as a power supply unit that supplies power to the ozone generator 101.

[0050] The high-frequency inverter 300 converts the power input from the power supply input 404 into a required frequency and outputs it to the inverter output cable 403. The ozone transformer 200 boosts this power to a predetermined voltage and supplies it to the ozone generator 100 as high-voltage ozone generating power required for ozone generation.

[0051] The power (voltage) for generating ozone supplied from the ozone transformer 200 is supplied from a high-voltage cable 401, which serves as a power supply line, to the high-voltage bushing 120 (including the relay terminal 121), through the power supply terminal 4 in the accommodation space S100, and to the high-voltage electrode 3 of the ozone generator 100. On the other hand, a low voltage is supplied from a low-voltage cable 402 to the low-voltage electrode 7 via the base 24.

[0052] The ozone generator 100 includes a plurality of electrode modules 102, each of which includes as its main components a high-voltage electrode 3 and a low-voltage electrode 7. The ozone generator 101 is configured by stacking a predetermined number of electrode modules 102 on a base 24 in the direction of the arrow Z in the figure in the order "N-1," "N-2," "N-3," ... "N-7," and "N-8."

[0053] The ozone generator 101 is covered with a generator cover 110. A source gas inlet 130 is provided on a cover side surface 110s of the generator cover 110 to supply a source gas G1, which is oxygen gas containing trace amounts of nitrogen, carbon dioxide, etc. The supplied source gas G1, such as oxygen gas, fills the accommodation space S100 and enters the discharge space 6.

[0054] On the other hand, the base 24 is provided with an ozone gas outlet 11 for discharging the ozone gas G2 generated in the discharge space 6 from the ozone generator 100 to the outside, and a refrigerant inlet / outlet 12 for allowing a refrigerant such as cooling water for cooling the electrode module 102 to flow in and out.

[0055] 5 is an explanatory diagram schematically showing the structure of a focused region R1 of ozone generator 101. As shown in the figure, a flat high-voltage electrode 3 is provided opposite a flat low-voltage electrode 7, and a flat dielectric 5 is provided between the low-voltage electrode 7 and the high-voltage electrode 3. A discharge space 6 is formed between the low-voltage electrode 7 and the dielectric 5 via a spacer (not shown).

[0056] Electric power for generating ozone is supplied to the high-voltage electrode 3 from the ozone transformer 200 shown in Fig. 4 via the high-voltage bushing 120 (relay terminal 121) and the power supply terminal 4. The high-voltage electrode 3 is made of a metal such as stainless steel or aluminum. The main surface of the dielectric 5 is in close contact with the high-voltage electrode 3. The dielectric 5 is made of a material such as ceramic, glass, or silicon.

[0057] In the ozone generator 100 having the basic configuration of the first embodiment, the discharge space 6 is formed in a disk shape in a plan view, and the source gas G1 filled in the accommodation space S100 is injected from all around the discharge space 6 toward the center. That is, in the ozone generator 100, the accommodation space S100 functions as a transfer member for transferring (supplying) the source gas G1 to the discharge space 6 of the ozone generator 101.

[0058] An electrode supply unit including an ozone transformer 200 and a high-frequency inverter 300 applies an AC / high voltage between the high-voltage electrode 3 and the low-voltage electrode 7, thereby generating a dielectric barrier discharge in the discharge space 6. Therefore, the ozone generator 101 can perform an ozone generation process in which a raw material gas G1, such as oxygen gas, flowing in the discharge space 6 is converted into ozone gas G2. The ozone gas G2 generated by the ozone generation process is guided from the center of the low-voltage electrode 7 through an ozone gas passage 8 provided within the low-voltage electrode 7 to an ozone gas outlet 11 provided in the base 24.

[0059] The low-voltage electrode 7 is a thin, conductive rigid body formed by joining two conductive plates made of stainless steel or the like to form an ozone gas passage 8 between the plates. In addition to the ozone gas passage 8, the low-voltage electrode 7 is provided with a refrigerant passage 9 for increasing the efficiency of ozone generation. A refrigerant such as cooling water is passed through this refrigerant passage 9 to lower the gas temperature in the discharge space 6.

[0060] On the other hand, in order to cool the high voltage electrode 3, a water-cooled electrode cooling plate 1 is arranged on the high voltage electrode 3 via an insulating plate 2 with excellent thermal conductivity. The electrode cooling plate 1 is a thin rigid body made by joining two steel plates made of stainless steel or the like and forming a refrigerant passage 9 between the plates. That is, the electrode cooling plate 1 also has a refrigerant passage 9, and a refrigerant such as cooling water flows through this refrigerant passage 9.

[0061] An ozone gas passage 8 formed in the low-voltage electrode 7 communicates with an ozone gas outlet 11 provided in the base 24. On the other hand, a refrigerant passage 9 formed in the electrode cooling plate 1 and the low-voltage electrode 7 communicates with a refrigerant inlet / outlet 12 provided in the base 24.

[0062] The ozone gas passage 8 is a passage for allowing the ozone gas G2 generated in the discharge space 6 to flow, and the coolant passage 9 is a passage for supplying a coolant to the ozone generator 101.

[0063] The electrode module 102, which includes the low-voltage electrode 7, the high-voltage electrode 3, the dielectric 5, a spacer (not shown), the insulating plate 2, and the electrode cooling plate 1, is fastened and fixed between the electrode pressing plate 22 and the base 24 by tightening bolts 21 that pass through each component.

[0064] Figure 6 is an explanatory diagram showing details of the region of interest R2 of the base 24 in Figure 4. As shown in the figure, the internal member for ozone gas 51 has the same structure as the internal member for transmitting an object 32 shown in Figures 1 to 3. Here, the base 24 corresponds to the outer frame member 31, and the opening 31b in the base 24 for attaching the internal member for ozone gas 51 and its surrounding area constitute the member attachment area.

[0065] That is, the ozone gas internal member 51, which becomes the object transmitting internal member 32, is attached inside (the opening 31b of) the base 24, which becomes the outer frame member 31. Therefore, the through flow path 32b of the object transmitting internal member 32 becomes the ozone gas outlet 11 of the ozone gas internal member 51. In the ozone gas internal member 51, the object to be transmitted becomes ozone gas G2, and the transmitting member becomes the ozone gas passage 8. The opening 31b shown in FIG. 6 has a groove structure with a closed top.

[0066] The ozone gas internal member 51 is connected to the ozone gas passage 8 so that the ozone gas G2 can flow through the through passage 32b of the object transmission internal member 32. The connection between the ozone gas internal member 51 and the ozone gas passage 8 is performed using an existing connection method (joining method) such as socket welding or butt welding. In the structure shown in FIG. 6, the ozone gas passage 8 and the outer frame member are joined in a manner such that the tip of the ozone gas passage 8 enters the ozone gas outlet 11. 31 and are joined together.

[0067] An internal refrigerant member 52 that serves as the internal object transmission member 32 is attached to (inside the opening 31b of) the base 24 that serves as the outer frame member 31. Therefore, the through flow passage 32b of the internal object transmission member 32 serves as the refrigerant inlet / outlet 12 of the internal refrigerant member 52. In the internal refrigerant member 52, the transmission object is the refrigerant CM such as cooling water, and the transmission member serves as the refrigerant passage 9.

[0068] The refrigerant internal member 52 is connected to the refrigerant passage 9 so that the refrigerant CM can flow through the through passage 32b of the object transmission internal member 32. The connection between the refrigerant internal member 52 and the refrigerant passage 9 is performed using an existing connection method (joining method).

[0069] In this way, the base 24, which functions as part of the generator housing member, has two member mounting areas including two openings 31b, and functions as flanges for mounting the internal member 51 for ozone gas and the internal member 52 for refrigerant.

[0070] Meanwhile, the source gas internal member 53, which serves as the target object transmitting internal member 32, is attached to (inside the opening 31b of) the cover side surface 110s of the generator cover 110. Therefore, the through flow path 32b of the target object transmitting internal member 32 serves as the source gas inlet 130 of the source gas internal member 53. In the source gas internal member 53, the target object to be transmitted is the source gas G1 such as oxygen gas, and the space that serves as the transmitting member serves as the accommodation space S100.

[0071] In this manner, in the ozone generator 100 of the basic configuration, the raw material gas inlet 130, which serves as the through passage 32b of the raw material gas internal member 53, is connected to the accommodation space S100 so that the raw material gas G1 can flow through the ozone generator 101.

[0072] In addition, a bushing internal member 54 (high-pressure bushing 120) that becomes the object transmission internal member 32 is attached to (inside the opening 31b of) the cover side surface 110s of the generator cover 110. As shown in FIG. 4, the high-pressure bushing 120 itself functions as the bushing internal member 54.

[0073] In the bushing internal member 54, one end of the relay terminal 121, which is a component, is electrically connected to the high-voltage cable 401, and the other end of the relay terminal 121 is electrically connected to the power supply terminal 4, which serves as the power supply path. In this way, in the bushing internal member 54, the transmission object is the power for ozone generation, and the transmission member is the power supply terminal 4, which serves as the power supply path. Therefore, the power for ozone generation is electrically connected to the power supply terminal 4, which serves as the power supply path, so that it can be supplied via the relay terminal 121 of the bushing internal member 54.

[0074] The source gas internal member 53 and the bushing internal member 54 each have substantially the same structure as the object transmission internal member 32 shown in Figures 1 to 3. That is, the cover side surface 110s of the generator cover 110 corresponds to the outer frame member 31, and on the cover side surface 110s, the two openings 31b for attaching the source gas internal member 53 and the high-pressure bushing 120 and the surrounding areas of the two openings 31b form the member attachment areas.

[0075] The relay terminal 121 can be installed in the object transmitting internal member 32 in a manner that allows it to pass through the through-flow passage 32b, for example.

[0076] In this way, the cover side surface 110s of the generator cover 110, which functions as part of the generator housing member, has two component mounting areas including two openings 31b, and functions as a flange for mounting the raw material gas internal component 53 and the bushing internal component 54.

[0077] The relationship between the object transmitting structure 30 shown in FIGS. 1 to 3 and the ozone generator 100 shown in FIGS. 4 to 6 will be summarized below.

[0078] 1 to 3 correspond to the base 24 of the ozone generator 100 and the cover side surface 110s of the generator cover 110. The base 24 and the generator cover 110 constitute a generator housing member.

[0079] The internal member 32 for transmitting the object shown in Figures 1 to 3 corresponds to the internal member 51 for ozone gas and the internal member 52 for refrigerant attached to the base 24, and the internal member 53 for raw material gas and the internal member 54 for bushing attached to the cover side surface 110s.

[0080] In the base 24, the openings 31b and their surrounding areas for the ozone gas internal member 51 and the refrigerant internal member 52 respectively serve as component mounting areas. Similarly, in the cover side surface 110s, the openings 31b and their surrounding areas for the source gas internal member 53 and the bushing internal member 54 respectively serve as component mounting areas.

[0081] Therefore, the base 24 has two component mounting areas for the ozone gas internal component 51 and the refrigerant internal component 52, and the cover side surface 110s of the generator cover 110 has two component mounting areas for the raw material gas internal component 53 and the bushing internal component 54.

[0082] In this way, a total of four object-transmitting internal members 32 are respectively attached to four member attachment regions of the generator housing member, including the base 24 and the cover side surfaces 110s.

[0083] As described above, the object transmission internal member 32 provided in the generator housing member of the ozone generator 100, which is the basic configuration of the first embodiment of the present disclosure, is attached to the member mounting area in a tight and airtight state in which the object transmission internal member 32 is tightly attached within the opening 31b without any other members in between when the temperature is in the non-cooling temperature zone TH. Note that in the ozone generator 100, the generator housing member is formed by the combination of the base 24 and the generator cover 110, and the member mounting area is a part of the base 24 or the cover side surface 110s.

[0084] The object transmission internal member 32 has the diameter fluctuation property described above. Therefore, by placing the object transmission internal member 32, which has been set to a cooling temperature T1 or lower, in the opening 31b and then setting the temperature of the object transmission internal member 32 to the non-cooling temperature zone TH, the object transmission internal member 32 can be attached to the member attachment region of the generator housing member in the above-described close contact attachment state.

[0085] As a result, in the ozone generator 100 of embodiment 1, the object transmission internal member 32 does not have any parts that require replacement during use, so that a decrease in the usage efficiency of the ozone generator 100 can be reliably avoided.

[0086] Note that a part requiring replacement may be, for example, a sealing member such as an O-ring. Generally, an O-ring, which is a typical sealing member, tends to deteriorate over time, and therefore requires periodic repairs such as overhauls to replace the O-ring. Such work does not occur in the ozone generator 100 of the first embodiment.

[0087] Furthermore, since the ozone generator 100 of embodiment 1 does not have any parts that need to be replaced while the object transmission internal member 32 is in use, there is no possibility that damage associated with part replacement will occur to the object transmission internal member 32 or the component mounting area, and the life of the ozone generator 100 can be extended.

[0088] In addition, the object transmitting internal member 32 provided in the ozone generator 100 of the first embodiment does not have any parts that are to be discarded during use, which reduces the environmental impact of the ozone generator 100. This is because, in the ozone generator 100 of the first embodiment, there is no need to discard sealing members such as O-rings.

[0089] The ozone generator 100 of the first embodiment has an ozone gas internal member 51 provided in a member mounting region of the base 24. That is, the base 24 corresponding to the outer frame member 31 and the ozone gas internal member 51 corresponding to the object transmission internal member 32 constitute the object transmission structure 30 shown in FIGS.

[0090] In the ozone generator 100 of the first embodiment, the ozone gas internal member 51 included in the object transmission internal member 32 having the outer frame member 31 as the base 24 does not have any parts that require replacement during use. This makes it possible to reliably avoid a decrease in the usage efficiency of the ozone generator 100 having the ozone gas internal member 51, and to extend the life of the ozone generator 100.

[0091] In addition, in the ozone generator 100 of embodiment 1, the internal member 51 for ozone gas provided on the base 24 does not have any parts that are to be discarded during use, so that the environmental load of the ozone generator 100 can be reduced.

[0092] The ozone generator 100 of the first embodiment is provided with a refrigerant internal member 52 in the member mounting region of the base 24. That is, the base 24 corresponding to the outer frame member 31 and the refrigerant internal member 52 corresponding to the object transmission internal member 32 constitute the object transmission structure 30 shown in FIGS.

[0093] In ozone generator 100 of the first embodiment, refrigerant internal member 52 included in object transmission internal member 32 having outer frame member 31 as base 24 does not have any parts that require replacement during use. Therefore, it is possible to reliably avoid a decrease in the usage efficiency of ozone generator 100 having refrigerant internal member 52 and to extend the life of ozone generator 100.

[0094] In addition, in the ozone generator 100 of embodiment 1, the refrigerant internal member 52 provided on the base 24 does not include any parts that are to be discarded during use, so that the environmental impact of the ozone generator 100 can be reduced.

[0095] The ozone generator 100 of the first embodiment has a source gas internal member 53 provided in a member mounting region of the cover side surface 110s of the generator cover 110. That is, the cover side surface 110s corresponding to the outer frame member 31 and the source gas internal member 53 corresponding to the object transmission internal member 32 constitute the object transmission structure 30 shown in FIGS.

[0096] In the ozone generator 100 of the first embodiment, the source gas internal member 53 included in the object transmission internal member 32 having the outer frame member 31 as the cover side surface 110s does not have any parts that require replacement during use. This makes it possible to reliably avoid a decrease in the usage efficiency of the ozone generator 100 having the source gas internal member 53 and to extend the life of the ozone generator 100.

[0097] In addition, in the ozone generator 100 of embodiment 1, the internal member 53 for raw material gas provided on the cover side surface 110s does not include any parts that are to be discarded during use, so that the environmental load of the ozone generator 100 can be reduced.

[0098] In the ozone generator 100 of the first embodiment, a bushing internal member 54 is provided as a high-pressure bushing 120 in a member mounting region of a cover side surface 110s of the generator cover 110. That is, the cover side surface 110s corresponding to the outer frame member 31 and the bushing internal member 54 corresponding to the object transmission internal member 32 constitute the object transmission structure 30 shown in FIGS.

[0099] In the ozone generator 100 of the first embodiment, the bushing internal member 54 included in the object transmission internal member 32 having the outer frame member 31 as the cover side surface 110s does not have any parts that require replacement during use. This makes it possible to reliably avoid a decrease in the usage efficiency of the ozone generator 100 having the bushing internal member 54 and to extend the life of the ozone generator 100.

[0100] In addition, in the ozone generator 100 of embodiment 1, the bushing internal member 54 provided on the cover side surface 110s does not include any parts that are to be discarded during use, and therefore the environmental impact of the ozone generator 100 can be reduced.

[0101] Furthermore, the generator housing member in the ozone generator 100, which is the basic configuration of the first embodiment, has a combined structure of the base 24 and the generator cover 110. Therefore, before the generator housing member is completed, the object transmission internal member 32 (51 to 54) can be attached relatively easily to the base 24 or the generator cover 110, which are single components.

[0102] That is, the internal member 51 for ozone gas and the internal member 52 for refrigerant can be attached to the base 24, which is a single-piece structure prior to becoming a generator housing member, and the internal member 53 for raw material gas and the internal member 54 for bushing can be attached to the cover side surface 110s of the generator cover 110, which is a single-piece structure prior to becoming a generator housing member.

[0103] As a result, the attachment efficiency of the object transmission internal member 32 can be improved during the manufacturing stage of the ozone generator 100 of the first embodiment.

[0104] (First Modification) Figure 7 is an explanatory diagram schematically showing a cross-sectional configuration of an ozone generator 100A that is a first modified example of the first embodiment of the present disclosure. Hereinafter, components similar to those of the ozone generator 100 having the basic configuration shown in Figures 4 to 6 are designated by the same reference numerals, and descriptions thereof will be omitted as appropriate. The following description will focus on the characteristic features of the ozone generator 100A.

[0105] As shown in the figure, the generator housing member of the ozone generator 100A includes, as main components, a base 24A and a generator cover 110A placed on the surface of the base 24A. In the first modification, a housing space S100 covered by the generator cover 110A is formed on the surface of the base 24A.

[0106] The ozone gas internal member 51, the refrigerant input internal member 52A, and the refrigerant output internal member 52B each have a structure similar to the object transmission internal member 32 in the object transmission structure 30 shown in Figures 1 to 3. Here, the base 24A corresponds to the outer frame member 31, and in the base 24A, three openings 31b for the ozone gas internal member 51, the refrigerant input internal member 52A, and the refrigerant output internal member 52B, respectively, and the surrounding areas of the three openings 31b form the member mounting areas.

[0107] A refrigerant input internal member 52A, which serves as the object-transmitting internal member 32, is attached to (inside the opening 31b of) the base 24A, which serves as the outer frame member 31, and the through-flow passage 32b of the object-transmitting internal member 32 serves as the refrigerant inlet 12A of the refrigerant input internal member 52A. In the refrigerant input internal member 52A, the object to be transmitted is refrigerant CM such as cooling water, and the transmitting member serves as the refrigerant input passage 9A. The refrigerant input passage 9A is a passage for supplying the refrigerant such as cooling water to the ozone generator 101.

[0108] The refrigerant input internal member 52A is connected to the refrigerant input passage 9A so that the refrigerant CM can flow through the through passage 32b of the object transmission internal member 32. The connection between the refrigerant input internal member 52A and the refrigerant input passage 9A is performed using an existing connection method (joining method).

[0109] A refrigerant output internal member 52B, which serves as an object-transmitting internal member 32, is attached to (inside the opening 31b of) the base 24A, which serves as the outer frame member 31, and the through-flow passage 32b of the object-transmitting internal member 32 serves as a refrigerant outlet 12B of the refrigerant output internal member 52B. In the refrigerant output internal member 52B, the object to be transmitted is the refrigerant CM, and the transmitting member is the refrigerant output passage 9B. The refrigerant output passage 9B is a passage for discharging the refrigerant supplied to the ozone generator 101.

[0110] The refrigerant output internal member 52B is connected to the refrigerant output passage 9B so that the refrigerant CM can flow through the through passage 32b of the object transmission internal member 32. The connection between the refrigerant output internal member 52B and the refrigerant output passage 9B is performed using an existing connection method (joining method).

[0111] In this way, the base 24A, which functions as part of the generator housing member, has three member mounting areas including three openings 31b, and functions as flanges for mounting the ozone gas internal member 51, the refrigerant input internal member 52A, and the refrigerant output internal member 52B.

[0112] Meanwhile, a source gas internal member 53 and a bushing internal member 54 are attached to the cover side surface 110s of the generator cover 110A. The source gas internal member 53 and the bushing internal member 54 each have substantially the same structure as the object transmission internal member 32 in the object transmission structure 30 shown in Figures 1 to 3.

[0113] That is, the cover side surface 110s of the generator cover 110 corresponds to the outer frame member 31, and on the cover side surface 110s, the two openings 31b for the raw material gas internal member 53 and the high-pressure bushing 120 and the surrounding areas of each of the two openings 31b become the member mounting areas.

[0114] The source gas internal member 53, which serves as the object transmitting internal member 32, is attached to (the inside of the opening 31b of) the cover side surface 110s, which serves as the outer frame member 31, and the through flow path 32b of the object transmitting internal member 32 serves as the source gas inlet 130 of the source gas internal member 53. In the source gas internal member 53, the object to be transmitted is the source gas G1, and the transmitting member serves as the source gas passage 18.

[0115] The raw material gas passage 18 is provided to supply the raw material gas G1 to the discharge space 6 (not shown). As in the ozone generator 100 with the basic configuration, the accommodation space S100 may function as a transmission member for the raw material gas G1 instead of the raw material gas passage 18.

[0116] In this way, the cover side surface 110s of the generator cover 110A, which functions as part of the generator housing member, has two member mounting areas including two openings 31b, and functions as a flange for mounting the internal member 53 for the raw material gas and the internal member 54 for the bushing.

[0117] The ozone generator 100A of the first modified example has the following advantages in addition to the advantages of the basic configuration.

[0118] The ozone generator 100A of the first modification has a refrigerant input internal member 52A and a refrigerant output internal member 52B provided in the member mounting region of the base 24A. That is, the base 24A corresponding to the outer frame member 31 and the refrigerant input internal member 52A and the refrigerant output internal member 52B corresponding to the two object transmission internal members 32 realize the object transmission structure 30 having the configuration shown in Figures 1 to 3 in a two-unit configuration.

[0119] In ozone generator 100 of Embodiment 1, refrigerant input internal member 52A and refrigerant output internal member 52B included in object transmission internal member 32 having outer frame member 31 as base 24A do not have parts that require replacement during use. This reliably avoids a decrease in the usage efficiency of ozone generator 100A having refrigerant input internal member 52A and refrigerant output internal member 52B, and also extends the life of ozone generator 100A.

[0120] Additionally, in the ozone generator 100A of the first modified example, the refrigerant input internal member 52A and the refrigerant output internal member 52B provided on the base 24A do not include any parts that are subject to disposal during use, and therefore, the environmental impact of the ozone generator 100A can be reduced.

[0121] (Second Modification) Figure 8 is an explanatory diagram schematically showing a cross-sectional configuration of ozone generator 100B which is a second modified example of embodiment 1 of the present disclosure. In the following, components similar to those of ozone generator 100 having the basic configuration shown in Figures 4 to 6 or ozone generator 100A which is a first modified example shown in Figure 7 are designated by the same reference numerals and description thereof will be omitted as appropriate, and the following description will focus on the characteristic features of ozone generator 100B.

[0122] As shown in the figure, the generator housing member of the ozone generator 100B includes, as main components, a base 24B and a generator cover 110B placed on the surface of the base 24B. In the second modification, a housing space S100 covered by the generator cover 110B is formed on the surface of the base 24B.

[0123] An ozone gas internal member 51, a refrigerant input internal member 52A, a refrigerant output internal member 52B, and a raw material gas internal member 53 are provided on the base 24B.

[0124] The ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, and the raw material gas internal member 53 each have a structure similar to the object transmission internal member 32 in the object transmission structure 30 shown in Figures 1 to 3. Here, the base 24B corresponds to the outer frame member 31, and in the base 24B, four openings 31b for the ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, and the raw material gas internal member 53, respectively, and the surrounding areas of the four openings 31b form the member mounting areas.

[0125] In this way, the base 24B, which functions as part of the generator housing member, has four member mounting areas including four openings 31b, and functions as flanges for mounting the ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, and the raw material gas internal member 53.

[0126] Meanwhile, a bushing internal member 54 is attached to the cover side surface 110s of the generator cover 110B as the high-pressure bushing 120. The bushing internal member 54 has substantially the same structure as the object transmission internal member 32 in the object transmission structure 30 shown in Figures 1 to 3. That is, the cover side surface 110s of the generator cover 110 corresponds to the outer frame member 31, and on the cover side surface 110s, the opening 31b for the high-pressure bushing 120 and the surrounding area of ​​the opening 31b form the member attachment area.

[0127] In this way, the cover side surface 110s of the generator cover 110B, which functions as a part of the generator accommodating member, has a member mounting area including the opening 31b, and functions as a flange for mounting the bushing inner member 54.

[0128] The ozone generator 100B of the second modified example has the same basic configuration and provides the same effects as the first modified example.

[0129] (Third Modification) Figure 9 is an explanatory diagram schematically showing a cross-sectional configuration of ozone generator 100C which is a third modified example of embodiment 1 of the present disclosure. Hereinafter, components similar to those of ozone generator 100 having the basic configuration shown in Figures 4 to 6, ozone generator 100A which is a first modified example shown in Figure 7, or ozone generator 100B which is a second modified example shown in Figure 8 will be assigned the same reference numerals and explanations thereof will be omitted as appropriate, and the following description will focus on the characteristic features of ozone generator 100C.

[0130] As shown in the figure, a generator housing member of the ozone generator 100C is provided as a generator housing housing 105 having a single structure. The generator housing housing 105 has an internal housing space S100 and is configured in a housing shape.

[0131] An ozone gas internal member 51, a refrigerant input internal member 52A, a refrigerant output internal member 52B, and a raw material gas internal member 53 are provided on a housing bottom 105b of the generator housing housing 105.

[0132] The ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, and the raw material gas internal member 53 each have a structure similar to the object transmission internal member 32 in the object transmission structure 30 shown in Figures 1 to 3.

[0133] That is, the housing bottom 105b corresponds to the outer frame member 31, and in the housing bottom 105b, the four openings 31b for the ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, and the raw material gas internal member 53, and the surrounding areas of the four openings 31b, respectively, are the member mounting areas.

[0134] In this way, the housing bottom 105b of the generator housing 105, which is the generator housing member, has four member mounting areas including four openings 31b, and functions as flanges for mounting the ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, and the raw material gas internal member 53.

[0135] Meanwhile, a bushing internal member 54 is attached to the housing side surface 105s of the generator housing 105 as the high-pressure bushing 120. The bushing internal member 54 has substantially the same structure as the object transmission internal member 32 in the object transmission structure 30 shown in Figures 1 to 3. That is, the housing side surface 105s of the generator housing 105 corresponds to the outer frame member 31, and on the housing side surface 105s, the opening 31b for the high-pressure bushing 120 and the surrounding area of ​​the opening 31b form the member attachment area.

[0136] In this way, the housing side surface 105s of the generator housing housing 105, which is the generator housing member, has a member mounting area including the opening 31b, and functions as a flange for mounting the bushing internal member 54.

[0137] The ozone generator 100C of the third modified example has the same effects as the basic configuration, the first modified example, and the second modified example, and also has the following unique effects.

[0138] Generator housing casing 105, which is the generator housing member in ozone generator 100C of the third modified example, has a unitary structure, so that the number of parts of the generator housing member can be minimized.

[0139] <Embodiment 2> 10 to 13 are explanatory diagrams showing a method of attaching an object transmitting internal member 32 according to the second embodiment of the present disclosure.

[0140] The object transmitting internal member 32 is a component of the ozone generator 100 of the first embodiment and the ozone generators 100A to 100C of the first to third modifications.

[0141] For example, in the ozone generator 100 having the basic configuration of embodiment 1 shown in Figures 4 to 6, the base 24 or the cover side surface 110s of the generator cover 110 serves as the outer frame member 31, and the internal member for ozone gas 51, the internal member for refrigerant 52, the internal member for raw material gas 53, and the internal member for bushing 54 serve as the internal member for transmitting object 32.

[0142] In addition, in the ozone generator 100A, which is a first modified example shown in Figure 7, the base 24A or the cover side surface 110s of the generator cover 110A becomes the outer frame member 31, and the internal member for ozone gas 51, the internal member for refrigerant input 52A, the internal member for refrigerant output 52B, the internal member for raw material gas 53 and the internal member for bushing 54 become the internal member for object transmission 32.

[0143] On the other hand, in an ozone generator 100B, which is a second modified example shown in FIG. 8, the base 24B or the cover side surface 110s of the generator cover 110B serves as the outer frame member 31, and the internal member for ozone gas 51, the internal member for refrigerant input 52A, the internal member for refrigerant output 52B, the internal member for raw material gas 53, and the internal member for bushing 54 serve as the internal member for transmitting object 32.

[0144] In the ozone generator 100C, which is a third modified example shown in FIG. 9, the housing bottom 105b or the housing side surface 105s of the generator housing 105 serves as the outer frame member 31, and the ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, the raw material gas internal member 53, and the bushing internal member 54 serve as the object transmission internal member 32.

[0145] In this way, the multiple object-transmitting internal members 32 are attached to the member attachment region of the outer frame member 31 as components of the ozone generator 100 (100A to 100C). Hereinafter, the ozone generators 100, 100A to 100C may be collectively referred to as "ozone generator 100, etc."

[0146] The ozone generator 100 or the like has an ozone generator 101. The ozone generator 101 performs an ozone generation process in which a dielectric barrier discharge is generated in the discharge space 6 and ozone gas G2 is generated from a raw material gas G1 supplied to the discharge space 6. The ozone generator 101 is housed in a housing space S100 of a generator housing member.

[0147] The accommodation space S100 is provided with an ozone gas passage 8 for passing the ozone gas G2 generated in the discharge space 6, a refrigerant passage 9 (refrigerant input passage 9A, refrigerant output passage 9B) for passing a refrigerant such as cooling water, a source gas passage 18 for passing the source gas G1, a power supply terminal 4 serving as a power supply path, etc. In the ozone generator 100 of the basic configuration, the accommodation space S100 itself functions as a transmission member for the source gas G1.

[0148] 10 to 13, the process of the method for attaching the object transmission internal member 32 will be described. The attachment method is a method for performing steps (a) to (c) described below. For the sake of convenience, the through-flow passage 32b provided in the object transmission internal member 32 is not shown in FIGS. 10 to 13.

[0149] Step (a)...As shown in FIG. 10, an outer frame member 31 having an opening 31b and an object-transmitting inner member 32 to be attached to the opening 31b are prepared.

[0150] The opening 31b has a circular shape with an opening diameter d1 in a plan view, and the object transmission internal member 32 has a circular shape with a member diameter d2 in a plan view. The outer peripheral surface of the object transmission internal member 32 does not have a recess such as a sealing groove.

[0151] In the outer frame member 31, the opening 31b and the area around it become a member attachment area for attaching the object transmission internal member 32.

[0152] The object transmission internal member 32 has a diameter fluctuation property in which, when the temperature is below a predetermined cooling temperature T1, the member diameter d2 of the object transmission internal member 32 is smaller than the opening diameter d1, and when the temperature is above the cooling temperature T1 and in the non-cooling temperature zone TH of 0°C or higher, the member diameter d2 becomes larger than the opening diameter d1.

[0153] The non-cooling temperature zone TH is a temperature range above the cooling temperature T1 and above 0°C, and includes the normal temperature zone TR of {0 to 40°C}. Note that the temperature at which the ozone generator 101 performs the ozone generation process is also included in the temperature range of the non-cooling temperature zone TH.

[0154] 10 to 13, the member diameter d2 in the non-cooling temperature zone TH is denoted as non-cooling member diameter d21, and the member diameter d2 at a cooling temperature T1 or lower is denoted as cooling member diameter d22. The outer frame member 31 is excluded from the cooling target and is always set to a temperature in the non-cooling temperature zone TH, so it has a constant opening diameter d1.

[0155] For example, in the non-cooling temperature zone TH, the dimensions are set so that the relationship between the non-cooling member diameter d21 and the opening diameter d1 satisfies equation (1) {d21=k·d1...(1)}, where the coefficient k is set to {k=1.0002 to 1.0003}.

[0156] Therefore, as shown in FIG. 10, when step (a) is executed, the non-cooling member diameter d21 of the object transfer internal member 32 is longer than the opening diameter d1 of the outer frame member 31.

[0157] After step (a) is executed, step (b) is executed. Note that step (b) includes the following steps (b-1) and (b-2).

[0158] Step (b-1) … As shown in FIG. 11, the object transfer internal member 32 is set to a low temperature state of the cooling temperature T1 or lower. Note that the temperature of the outer frame member 31 is set to the non-cooling temperature range TH.

[0159] Step (b-2) … As shown in FIG. 12, in a state where the temperature is the cooling temperature T1 or lower, the object transfer internal member 32 is disposed in the opening 31b of the outer frame member 31.

[0160] By executing step (b-1), the member diameter d2 of the object transfer internal member 32 is shortened from the non-cooling member diameter d21 to the cooling member diameter d22, and the formula (2) {d22 <d1} is satisfied. Hereinafter, this point will be described in detail.

[0161] When the constituent material of the object transfer internal member 32 is a corrosion-resistant alloy material such as stainless steel, the member diameter d2 has a property of shortening as the temperature decreases due to the thermal strain ε having a positive correlation with the temperature.

[0162] Therefore, by setting the temperature of the object transfer internal member 32 to be lower than the cooling temperature T1 which is sufficiently lower than 0 ° C, the cooling member diameter d22 that satisfies the above formula (2) can be realized. Note that the cooling temperature T1 is set to be sufficiently lower than 0 ° C in the range of {-270 ° C to -20 ° C}, and for example, it is set to 196 ° C.

[0163] When step (b-2) is executed, since the above formula (2) is satisfied, a gap 35 is generated between the outer peripheral surface of the object transfer internal member 32 and the inner peripheral surface of the opening 31b, so that the object transfer internal member 32 can be disposed in the opening 31b relatively easily.

[0164] In this way, step (b), which includes the above-mentioned steps (b-1) and (b-2), executes a process of placing the object transmission internal member 32, which has been set to a cooling temperature equal to or lower than T1, in the opening 31b of the member mounting area in the outer frame member 31. The member mounting area of ​​the outer frame member 31 is the opening 31b and its surrounding area. After step (b) is executed, the following step (c) is executed.

[0165] Step (c): With the object transmission internal member 32 placed in the opening 31b of the outer frame member 31, the set temperature of the object transmission internal member 32 is increased from the cooling temperature T1 to the non-cooling temperature zone TH.

[0166] As a result, as shown in Figure 13, an object transmission structure 30 can be obtained in which the outer frame member 31 and the object transmission internal member 32 are integrated with each other, with the outer surface of the object transmission internal member 32 being in close contact with the boundary surface 33 with the inner surface of the opening 31b.

[0167] In the non-cooling temperature zone TH, the above-mentioned formula (1) is established, so that the gap 35 between the inner peripheral surface of the opening 31b and the object transmission internal member 32 is completely filled, and the outer peripheral surface of the object transmission internal member 32 and the inner peripheral surface of the opening 31b are in tight contact with each other at the boundary surface 33. In other words, the object transmission internal member 32 is attached in the opening 31b of the outer frame member 31 in a tightly attached state.

[0168] In addition, the ozone gas internal member 51 and the like that constitute the object transmission internal member 32 are sufficiently small compared to the base 24 and the cover side surface 110s of the generator cover 110 that constitute the outer frame member 31, and therefore the force (stress × contact area) that the outer frame member 31 receives from the object transmission internal member 32 is also relatively small. For this reason, in the object transmission structure 30 to which the object transmission internal member 32 is attached, even if formula (1) is established in the non-cooling temperature zone TH, the outer frame member 31 such as the base 24 and the generator cover 110 will not deform.

[0169] The operating temperature of the ozone generator 100 when the ozone generator 101 is in an operating state is included in the non-cooling temperature zone TH. In addition, the temperature of the refrigerant CM, such as cooling water, is 0°C or higher, and the supply of the refrigerant CM does not cause the temperature of the object transmission internal member 32 to fall below the cooling temperature T1.

[0170] Therefore, after the object transmission structure 30 is completed, the tightly attached state of the object transmission internal member 32 in the opening 31b is maintained with good stability.

[0171] After the object transmission structure 30 is completed, the object transmission internal member 32 is attached to the member attachment area as the ozone gas internal member 51, the refrigerant internal member 52 (refrigerant input internal member 52A, refrigerant output internal member 52B), the raw material gas internal member 53, and the bushing internal member 54. In other words, the object transmission internal member 32 becomes a component of the ozone generator 100, etc.

[0172] For example, in the case of the ozone generator 100 of embodiment 1 shown in Figures 4 to 6, the internal member 51 for ozone gas and the internal member 52 for refrigerant, each of which becomes the object transmission internal member 32, are attached to the base 24, which becomes the outer frame member 31, by the attachment method of the object transmission internal member 32, which is embodiment 2.

[0173] Similarly, an internal member 53 for the raw material gas and an internal member 54 for the bushing, each of which becomes an object transmission internal member 32, are attached to the cover side surface 110s of the generator cover 110, which becomes the outer frame member 31, using the attachment method for the object transmission internal member 32 of embodiment 2.

[0174] The method of attaching the object transmission internal member 32 according to the second embodiment of the present disclosure utilizes the above-described diameter variation property of the object transmission internal member 32 to perform the above-described steps (a) to (c).

[0175] By performing the above-mentioned steps (b) and (c), the object transmission internal member 32 can be attached in a tightly fitted state within the opening 31b of the member attachment area in the outer frame member 31 relatively easily, without the need to provide other members such as sealing members including O-rings.

[0176] As a result, the method of attaching the object transmission internal member of embodiment 2 can attach the object transmission internal member 32 to the outer frame member 31 without the need for other members such as sealing members, thereby reliably avoiding a decrease in the usage efficiency of the ozone generator 100, etc., that would be associated with replacing other members.

[0177] In addition, the object transmission structure 30 corresponds to, for example, in the case of the ozone generator 100 of the basic configuration, a combination of the base 24, an internal member 51 for ozone gas, and an internal member 52 for refrigerant, and a combination of the cover side surface 110s of the generator cover 110, an internal member 53 for raw material gas, and an internal member 54 for bushing.

[0178] Although the present disclosure has been described in detail, the above description is illustrative in all respects and does not limit the present disclosure to the above. It is understood that countless variations not illustrated can be envisioned without departing from the scope of the present disclosure. [Explanation of symbols]

[0179] 4 Power supply terminal 8 Ozone gas passage 9 Refrigerant passage 9A Refrigerant input passage 9B Refrigerant output passage 11 Ozone gas outlet 12 Refrigerant inlet / outlet 12A Refrigerant inlet 12B Refrigerant outlet 18 Raw material gas passage 24,24A,24B base 30 Object transmission structure 31 Outer frame member 31b opening 32 Object transmission internal components 32b Through-flow channel 51 Internal components for ozone gas 52 Refrigerant internal components 52A Refrigerant input internal part 52B Refrigerant output internal component 53 Internal components for raw gas 54 Bushing internal parts 100, 100A~100C Ozone Generator 101 Ozone Generator 105 Generator housing 105b Bottom of the housing 105s case side 110, 110A, 110B Generator Cover 110s cover side 120 High-pressure bushing 130 Raw material gas inlet 200 Ozone Transformer 300 High Frequency Inverter CM refrigerant d1 Opening diameter d2 Member diameter d21 Uncooled material diameter d22 Component diameter when cooled G1 raw gas G2 Ozone Gas S100 Storage Space

Claims

1. an ozone generator that performs an ozone generation process by generating a dielectric barrier discharge in a discharge space and generating ozone gas from a raw material gas supplied to the discharge space; an ozone gas passage for flowing the ozone gas generated in the discharge space; a generator housing member that houses the ozone generator and the ozone gas passage in a housing space; an object-transmitting internal member attached to a member attachment region of the generator housing member; the object transmission internal member is connected to a transmission member so that a transmission object for the ozone generator can be transmitted therethrough; the transmission member is a structure or space for transmitting the transmission object, the transmission object includes the ozone gas, and the transmission member includes the ozone gas passage; The component attachment region has an opening, the object-transmitting internal member is disposed only within the opening; The opening has a circular shape with an opening diameter in a plan view, and the object transmission internal member has a circular shape with a member diameter in a plan view, the internal object transmission member has a diameter fluctuation property in which the member diameter is smaller than the opening diameter when the temperature is equal to or lower than a predetermined cooling temperature, and the member diameter is equal to or larger than the opening diameter when the temperature is higher than the predetermined cooling temperature and in a non-cooling temperature range of 0°C or higher, In the non-cooling temperature zone, the object transmission internal member and the opening are in close contact with each other at a boundary surface between an outer circumferential surface of the object transmission internal member and an inner circumferential surface of the opening without any other member therebetween. Ozone generator.

2. 2. The ozone generator according to claim 1, the object transmission internal member has a through flow path for passing the object to be transmitted; the object-transmitting internals include object-transmitting internals for ozone gas; the object-transmitting internal member for the ozone gas is connected to the ozone gas passage so that the ozone gas can be transmitted through the through-flow passage of the object-transmitting internal member; Ozone generator.

3. 3. The ozone generator according to claim 2, a refrigerant passage for supplying a refrigerant to the ozone generator; the refrigerant passage is accommodated within the accommodation space of the generator accommodation member, the transfer object includes the refrigerant, and the transfer member includes the refrigerant passage; the object-transmitting internals further include an object-transmitting internal for a refrigerant; The object-transmitting internal member for the refrigerant is connected to the refrigerant passage so that the refrigerant can be transmitted through the through-flow passage of the object-transmitting internal member. Ozone generator.

4. 4. The ozone generator according to claim 3, The refrigerant passage a refrigerant input passage for supplying the refrigerant to the ozone generator; a refrigerant output passage for discharging the refrigerant supplied to the ozone generator, the transfer member includes the refrigerant input passage and the refrigerant output passage, the refrigerant object-transmitting internals include a refrigerant input internal and a refrigerant output internal; the refrigerant input internal member is connected to the refrigerant input passage so that the refrigerant can be transmitted through the through-flow passage; the refrigerant output internal member is connected to the refrigerant output passage so that the refrigerant can be transmitted through the through-flow passage; Ozone generator.

5. 5. The ozone generator according to claim 2, wherein: a raw material gas passage for supplying the raw material gas to the discharge space of the ozone generator, the raw material gas passage is provided within the accommodation space of the generator accommodation member, the transmission target includes the source gas, the transmission member includes the source gas passage, the object conveying internals further include object conveying internals for a source gas; the object transmission internal member for the source gas is connected to the source gas passage so that the source gas can be transmitted through the through-flow path of the object transmission internal member; Ozone generator.

6. 2. The ozone generator according to claim 1, a power supply unit provided outside the generator housing member and supplying power for generating ozone via a power supply line; a power supply path provided in the accommodation space of the generator accommodation member for supplying the ozone generator with power for generating ozone, the transmission target includes the ozone generating power, and the transmission member includes the power supply path; the object transmission internal member includes an object transmission internal member for a bushing, and the object transmission internal member for the bushing is connected to the power supply path so that the ozone generation power can be supplied via the object transmission internal member; Ozone generator.

7. 5. The ozone generator according to claim 1, The generator housing member includes: The base and a generator cover disposed on a surface of the base; The storage space is formed on a surface of the base, The component mounting area includes an area of ​​the base or an area of ​​the generator cover. Ozone generator.

8. 5. The ozone generator according to claim 1, The generator accommodating member has a single structure and has the accommodating space therein. Ozone generator.

9. 1. A method for installing an object-transmitting internal member in an ozone generating device, comprising: The ozone generator is an ozone generator that performs an ozone generation process by generating a dielectric barrier discharge in a discharge space and generating ozone gas from a raw material gas supplied to the discharge space; an ozone gas passage for flowing the ozone gas generated in the discharge space; a generator housing member that houses the ozone generator and the ozone gas passage within a housing space, The method for attaching the object transmitting internal member includes: A method for attaching an object transmission internal member only within an opening in a member attachment region of the generator housing member, (a) providing the object-transmitting internal member; The opening has a circular shape with an opening diameter in a plan view, and the object transmission internal member has a circular shape with a member diameter in a plan view, the internal object transmission member has a diameter fluctuation property in which the member diameter is smaller than the opening diameter when the temperature is equal to or lower than a predetermined cooling temperature, and the member diameter is equal to or larger than the opening diameter when the temperature is higher than the predetermined cooling temperature and in a non-cooling temperature range of 0°C or higher, The method for installing the object transmission internal member is performed after performing step (a). (b) placing the object transmission internal member, set to a temperature equal to or lower than the predetermined cooling temperature, only within the opening of the member mounting region; (c) setting the temperature of the object transmission internal member to the non-cooling temperature range with the object transmission internal member disposed only within the opening, Method of installing object-transmitting internal components.

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