Fluid control valve and fluid control device

Abstract

To improve responsiveness while increasing a flow rate.SOLUTION: An orifice 31 having a valve seat surface 31s includes a vertical flow path portion VR (VR1) opening to the valve seat surface 31s and a facing surface 31t facing the valve seat surface 31s, and a horizontal flow path portion HR opening to an outer peripheral surface 31o between the valve seat surface 31s and the facing surfaces 31t and intersecting with the vertical flow path portion VR (VR1). The vertical flow path portion VR (VR1) branches on the side of the facing surface 31t with a space from an intersection portion X intersecting with the horizontal flow path portion HR.SELECTED DRAWING: Figure 9

Description

[Technical Field]

[0001] The present invention relates to a fluid control valve and a fluid control device. [Background technology]

[0002] An example of a conventional fluid control valve is a control valve used in a mass flow controller, as shown in Patent Document 1. This control valve includes a valve cavity having an inlet and an outlet, a poppet (valve element) disposed within the valve cavity and having multiple vertical flow paths, with its bottom surface facing the inlet, and an orifice disposed within the valve cavity between the poppet and the outlet. The inlet is formed in the bottom surface of the valve cavity, and the outlet is formed on the inner peripheral surface of the valve cavity.

[0003] To enable a large flow rate, the orifice is formed with multiple vertical passages extending from the bottom surface (valve seat surface) to the top surface and multiple horizontal passages opening on the outer peripheral surface of the orifice, and each horizontal passage intersects with at least one of the vertical passages of the orifice. When the poppet moves away from the bottom surface (valve seat surface) of the orifice, gas rises from the bottom surface of the orifice through the vertical passages, then flows through the horizontal passages or horizontally along the surface passages formed on the top surface of the orifice, and flows to the outlet.

[0004] However, in the above configuration, gas that rises in the vertical flow path has difficulty flowing into the horizontal flow path, and tends to flow across the horizontal flow path to the upper surface of the orifice, which may result in poor flow rate response. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Special Publication No. 2021-514042 Summary of the Invention [Problem to be solved by the invention]

[0006] The present invention has been made in view of the above-mentioned problems, and its main object is to increase the flow rate while improving the flow rate response. [Means for solving the problem]

[0007] That is, the fluid control valve according to the present invention comprises an orifice having a valve seat surface, a valve body having a seat surface that seats on the valve seat surface, a drive unit that drives the valve body, and a flow path block in which an accommodating recess is formed to accommodate the orifice and the valve body, wherein the orifice has a vertical flow path portion that opens to the valve seat surface and an opposing surface that faces the valve seat surface, and a horizontal flow path portion that opens to an outer circumferential surface between the valve seat surface and the opposing surface and intersects with the vertical flow path portion, and the vertical flow path portion branches off at an interval from the intersection with the horizontal flow path portion on the opposing surface side.

[0008] In this type of fluid control valve, the horizontal and vertical flow paths intersect with each other, enabling a larger flow rate than a valve with only a vertical hole. Furthermore, because the vertical flow path branches off from the intersection with the horizontal flow path at a distance on the opposing surface, the inner wall surface of the horizontal flow path exists between the branched flow paths. As a result, fluid ascending through the vertical flow path strikes the inner wall surface of the horizontal flow path between the branched flow paths, making it easier for the fluid to flow into the horizontal flow path, thereby improving flow rate responsiveness. Therefore, according to the present invention, it is possible to achieve a larger flow rate while improving flow rate responsiveness. Furthermore, because the vertical flow path branches off from the intersection with the horizontal flow path, the distribution of the fluid flowing out of the opposing surface can be made uniform.

[0009] In a specific embodiment of the vertical flow path section, the vertical flow path section has two branch flow paths on the opposing surface side of the intersection, and the central axes of the two branch flow paths are deviated from the central axis of the horizontal flow path section. Specifically, in a plan view, the two branch flow paths are arranged in a direction perpendicular to the central axis of the horizontal flow path section.

[0010] In order to increase the flow rate flowing into the vertical flow path section and make it easier for the fluid to flow into the horizontal flow path section, it is desirable that the opening width of the vertical flow path section on the valve seat surface side of the intersection be larger than the flow path diameter of the horizontal flow path section.

[0011] In order to achieve a larger flow rate using the fluid control valve of the present invention, it is desirable to have a plurality of the vertical flow passage portions and a plurality of the horizontal flow passage portions.

[0012] In a configuration in which all vertical flow passages intersect with horizontal flow passages, the number of vertical flow passages is limited by the number of horizontal flow passages, making it impossible to achieve a larger flow rate. In order to suitably solve this problem and achieve a larger flow rate, it is desirable that at least one of the multiple vertical flow passages does not intersect with the horizontal flow passages.

[0013] In order to allow the fluid that flows through the vertical flow path section and flows out from the opposing surface to merge with the fluid that flows through the horizontal flow path section and flows out from the outer peripheral surface, it is desirable that the opposing surface be formed with a notch that is cut out radially outward from the opening of the vertical flow path section.

[0014] In the fluid control valve of the present invention, a plunger of a drive unit that drives a valve element is inserted into the center of the orifice. In a specific embodiment of this configuration, a plurality of the vertical flow passages are formed on a circumference, and a central flow passage that opens onto the valve seat surface and the opposing surface is formed in the center of the circumference. Here, the plunger is inserted into the central flow passage. In this configuration, it is desirable that the central flow passage portion has a flow passage whose diameter continuously increases from the valve seat surface side toward the opposing surface, which can reduce pressure loss of the fluid flowing through the central flow passage portion and enable an even larger flow rate.

[0015] It is desirable that an upstream flow path is connected to the bottom surface of the accommodating recess, a downstream flow path is connected to the inner peripheral surface of the accommodating recess, and an annular recess is formed on the inner peripheral surface of the accommodating recess corresponding to the opening of the lateral flow path portion. With this configuration, the annular recess formed on the inner peripheral surface of the accommodating recess can enlarge the flow path of the fluid flowing out from the lateral flow path portion, thereby reducing pressure loss and enabling a large flow rate.

[0016] A fluid control device including the above-described fluid control valve is also one aspect of the present invention. Specifically, this fluid control device is characterized by including the above-described fluid control valve, a flow rate measuring unit that measures the flow rate of a flow path, and a control unit that controls the fluid control valve based on the measured value measured by the flow rate measuring unit. [Effects of the Invention]

[0017] According to the present invention described above, the vertical flow path portion branches off at intervals on the opposing surface side from the intersection with the horizontal flow path portion, thereby making it possible to increase the flow rate and improve responsiveness. [Brief explanation of the drawings]

[0018] [Figure 1] 1 is a schematic diagram showing the configuration of a fluid control device according to an embodiment of the present invention; [Figure 2] FIG. 2 is a partially enlarged cross-sectional view showing an orifice and a valve body of the fluid control valve of the embodiment. [Figure 3] FIG. 2 is a perspective view of an orifice according to the embodiment. [Figure 4] FIG. 2 is a plan view of the orifice of the embodiment. [Figure 5] FIG. 2 is a bottom view of the orifice of the embodiment. [Figure 6] 2A and 2B are a plan view and a cross-sectional view taken along line AA of the orifice of the embodiment. [Figure 7] 2A and 2B are a plan view and a cross-sectional view taken along line BB of the orifice of the embodiment. [Figure 8] 2A and 2B are a plan view and a cross-sectional view taken along line CC of the orifice of the embodiment. [Figure 9] 2A and 2B are a plan view and a cross-sectional view taken along line DD of the orifice of the embodiment; [Figure 10] FIG. 10 is a schematic diagram showing the configuration of a fluid control device according to a modified embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0019] A fluid control device according to an embodiment of the present invention will be described below with reference to the drawings. Note that, for ease of understanding, all of the drawings shown below are drawn in a schematic manner with appropriate omissions or exaggerations. Identical components are given the same reference numerals, and their descriptions will be omitted where appropriate.

[0020] <Device configuration> The fluid control device 100 of this embodiment is a so-called mass flow controller, and is used to control the flow rate of gas supplied to a chamber in which a semiconductor manufacturing process is performed, for example. Note that the fluid control device 100 may control not only gas but also liquid.

[0021] Specifically, as shown in FIG. 1, the fluid control device 100 includes a flow path block 2 having a flow path R formed therein, a fluid control valve 3 for controlling the gas in the flow path R, a flow rate measuring unit 4 for measuring the flow rate of the flow path R, and a control unit 5 for controlling the fluid control valve 3 based on the measured value measured by the flow rate measuring unit 4.

[0022] The flow path block 2 is formed with an accommodating recess 21 in which the fluid control valve 3 is attached. The accommodating recess 21 is formed on one surface (the upper surface in FIG. 1) of the flow path block 2. An upstream flow path R1 is connected to the bottom surface of the accommodating recess 21, and a downstream flow path R2 is connected to the inner circumferential surface of the accommodating recess 21. In other words, the flow path R formed in the flow path block 2 is divided by the accommodating recess 21 into the upstream flow path R1 and the downstream flow path R2.

[0023] A gas inlet port (not shown) is provided at the upstream end of the upstream flow path R1, and a gas outlet port (not shown) is provided at the downstream end of the downstream flow path R2.

[0024] The fluid control valve 3 is a so-called normally closed piezo valve, and the opening degree thereof is controlled by an applied voltage. The fluid control valve 3 may also be a so-called normally open type.

[0025] Specifically, as shown in Figures 1 and 2, the fluid control valve 3 includes an orifice (valve seat member) 31 having a valve seat surface 31s, a valve body 32 having a seat surface 32s that seats on the valve seat surface 31s, and a drive unit 33 that drives the valve body 32.

[0026] The orifice 31 is accommodated in the accommodation recess 21. Here, the orifice 31 is accommodated in the accommodation recess 21 so that the valve seat surface 31s faces the bottom surface of the accommodation recess 21. In this orifice 31, an inlet is formed in the valve seat surface 31s, and an internal flow path 31R communicating with the inlet is formed. The details of the orifice 31 will be described later.

[0027] The valve element 32 is provided movably inside the accommodating recess 21. The valve element 32 is provided inside the accommodating recess 21 between the valve seat surface 31s of the orifice 31 and the bottom surface of the accommodating recess 21.

[0028] Specifically, the valve body 32 has a seating surface 32s on its upper surface, and an outlet is formed in the seating surface 32s, and an internal flow path 32R communicating with the outlet is formed in the seating surface 32s. The outlet of the seating surface 32s and the inlet of the valve seat surface 31s are formed in positions that do not overlap with each other when the seating surface 32s is seated on the valve seat surface 31s.

[0029] The valve element 32 is movably supported by a support member 34 inside the accommodating recess 21. The support member 34 has an annular support base 341 accommodated in the accommodating recess 21, and an elastic body 342 such as a leaf spring that is provided inside the support base 341 and supports the valve element 32. As a result, the valve element 32 is supported inside the support base 341 by the elastic body 342. Both the support base 341 and the elastic body 342 are configured to allow gas to flow through them. The lower surface of the orifice 31 is in close contact with the annular upper surface of the support base 341, forming a valve chamber S1 that accommodates the valve element 32 and communicates with the upstream flow path R1.

[0030] The driving unit 33 includes, for example, a piezo stack 331 formed by stacking a plurality of piezo elements, and a plunger mechanism 332 that is displaced by the expansion of the piezo stack 331.

[0031] The piezo stack 331 is housed in a casing 333, and its tip is connected to a plunger mechanism 332. The plunger mechanism 332 in this embodiment has a diaphragm member 332a and a pressing member 332b that presses the upper surface of the valve body 32 via the diaphragm member 332a. The plunger mechanism 332 is inserted into the central flow path portion CR of the orifice 31 and comes into contact with the upper surface of the valve body 32.

[0032] When a predetermined voltage is applied to the piezo stack 331, the piezo stack 331 expands, and the plunger mechanism 332 biases the valve element 32 in the valve-opening direction, separating the valve seat surface 31s from the seating surface 32s by a distance corresponding to the applied voltage, thereby establishing an open state. This gap then connects the upstream flow path R1 and the downstream flow path R2. Meanwhile, in the normal state where no voltage is applied to the piezo stack 331, the elastic force of the elastic body 342 of the support member 34 keeps the valve element 32 in the closed state.

[0033] The flow rate measuring unit 4 is a pressure type and includes a laminar flow element 41 provided in the flow path R, a first pressure sensor 42 provided so as to be able to measure the pressure upstream of the laminar flow element 41, a second pressure sensor 43 provided so as to be able to measure the pressure downstream of the laminar flow element 42, and a flow rate calculating unit 44 that calculates the flow rate of the fluid flowing through the flow path R based on the first pressure and second pressure measured by the first pressure sensor 42 and the second pressure sensor 43. This flow rate measuring unit 4 is provided in the flow path R on the upstream side or downstream side of the fluid control valve 3. Note that a sonic nozzle or the like may be used as the fluid resistance 41 instead of the laminar flow element.

[0034] The control unit 5 controls the fluid control valve 3 based on the flow rate measured by the flow rate measuring unit 4. The control unit 5 is a computer equipped with a CPU, memory, A / D converter, D / A converter, and various input / output means, and controls the fluid control valve 3 by executing a fluid control program stored in the memory and working together with the CPU and peripheral devices.

[0035] The control unit 5 controls the aperture of the fluid control valve 3 based on a command flow rate input from outside and a measured flow rate measured by the flow rate measurement unit 4. Specifically, the control unit 5 controls the aperture of the fluid control valve 3 so as to reduce the deviation between the command flow rate and the measured flow rate. The control unit 5 of this embodiment performs a PID calculation on the deviation between the command flow rate and the measured flow rate, and outputs a command voltage corresponding to the result to the drive circuit of the drive unit 33. The drive circuit applies a voltage corresponding to the input command voltage to the piezo stack 331.

[0036] <Specific configuration of the orifice 31> The orifice 31 of this embodiment has a configuration that enables a large flow rate and improves the responsiveness of the flow rate.

[0037] Specifically, as shown in Figures 2 to 9, the orifice 31 is roughly disk-shaped, and has, as an internal flow path 31R, a plurality of vertical flow path sections VR (VR1, VR2) that open to the valve seat surface 31s and the opposing surface 31t that faces the valve seat surface 31s, and a plurality of horizontal flow path sections HR that open to the outer peripheral surface 31o between the valve seat surface 31s and the opposing surface 31t and intersect with the vertical flow path sections VR.

[0038] In the orifice 31 of this embodiment, multiple vertical flow passage sections VR (VR1, VR2) are formed on the circumference (see FIGS. 3 and 4), and a central flow passage section CR is formed in the center of the circumference, opening to the valve seat surface 31s and the opposing surface 31t (see FIGS. 6 to 8, etc.). This central flow passage section CR is a flow passage through which the plunger mechanism 332 constituting the drive unit 33 is inserted (see FIG. 2). This central flow passage section CR has a flow passage whose diameter continuously increases from the valve seat surface 31s side toward the opposing surface 31t. This configuration reduces pressure loss of the gas flowing through the central flow passage section CR, enabling a large flow rate.

[0039] As shown in Figures 3, 6 to 8, the multiple horizontal flow path sections HR open to the outer peripheral surface 31o of the orifice 31 and also open to the inner peripheral surface 31i that forms the central flow path section CR. In this embodiment, four horizontal flow path sections HR are formed radially (see Figures 4 and 5). Each horizontal flow path section HR is linear and has a circular flow path cross section (see Figure 6, etc.).

[0040] 3 to 5, the vertical flow path sections VR each have a first vertical flow path section VR1 that intersects with and communicates with the horizontal flow path section HR, and a second vertical flow path section VR2 that does not intersect with the horizontal flow path section HR. The second vertical flow path section VR2 is formed between adjacent horizontal flow path sections HR, and is a flow path that does not branch (see FIG. 8).

[0041] 9, the first vertical flow path section VR1 branches into two branch flow paths VR11 and VR12 at an interval from the intersection X with the horizontal flow path section HR on the opposing surface 31t side. In other words, the first vertical flow path section VR1 has one flow path from the intersection X with the horizontal flow path section HR on the valve seat surface 31s side, and two flow paths from the intersection X with the horizontal flow path section HR on the opposing surface 31t side.

[0042] Here, the central axes C11, C12 of the two branch flow paths VR11, VR12 are offset from the central axis C2 of the horizontal flow path section HR. That is, in a plan view, the two branch flow paths VR11, VR12 are arranged side by side in a direction perpendicular to the central axis C2 of the horizontal flow path section HR. The central axes C11, C12 of the two branch flow paths VR11, VR12 are parallel to each other. With this configuration, an inner wall surface 31k constituting the horizontal flow path section HR is present between the two branch flow paths VR11, VR12, and the two branch flow paths VR11, VR12 are separated by this inner wall surface 31k. Furthermore, by branching the vertical flow path section VR1, the mechanical strength of the orifice 31 can be maintained.

[0043] Furthermore, the opening width (flow path width) of the first vertical flow path section VR1 on the valve seat surface 31s side of the intersection X is configured to be larger than the flow path diameter of the horizontal flow path section HR (see FIG. 9). This configuration increases the flow rate of gas flowing into the first vertical flow path section VR1, making it easier for the gas to flow into the horizontal flow path section HR. Note that the opening width (flow path width) on the valve seat surface 31s side is the distance between the farthest positions on the inner wall surfaces of the two branch flow paths VR11 and VR12.

[0044] In this embodiment, as shown in Fig. 5, an annular groove 31M is formed on the valve seat surface 31s of the orifice 31, along the plurality of vertical flow path sections VR (VR1, VR2) arranged on the circumference. This annular groove 31M is configured to connect the plurality of vertical flow path sections VR (VR1, VR2) to one another, and this annular groove 31M forms part of the vertical flow path sections VR (VR1, VR2). In other words, the opening of the annular groove 31M on the valve seat surface 31s side becomes the inlet formed on the valve seat surface 31s. This configuration enlarges the inlet of the internal flow path 31R formed on the valve seat surface 31s, enabling a large flow rate.

[0045] 3 and 4, a notch 31K is formed in the opposing surface 31t of the orifice 31. The notch 31K is cut out radially outward from the opening of the vertical passage section VR. In this embodiment, the notch 31K corresponds to the opening of the second vertical passage section VR2, which does not intersect with the horizontal passage section HR. Gas that flows through the vertical passage section VR and the central passage section CR and flows out of the opposing surface 31t flows through the notch 31K to the outer circumferential surface 31o of the orifice 31 and into the downstream passage R2 connected to the inner circumferential surface of the installation recess 21. The notch 31K makes it easier for gas that flows through the first and second vertical passage sections VR1 and VR2 and flows out of the opposing surface 31t to merge with gas that flows through the horizontal passage section HR and flows out of the outer circumferential surface 31o.

[0046] Here, as shown in FIG. 2, an annular recess 21M is formed on the inner peripheral surface of the accommodating recess 21 corresponding to the opening of the horizontal flow path section HR. With this configuration, the annular recess 21M formed on the inner peripheral surface of the accommodating recess 21 can enlarge the flow path of gas flowing out from the horizontal flow path section HR, reducing pressure loss and enabling a large flow rate. In addition, as shown in FIG. 3 and other figures, a recess 31N is formed around the entire outer peripheral surface 31o of the orifice 31. A cutout section 31K is connected to the recess 31N. The horizontal flow path section HR opens at the bottom of this recess 31N. This recess 31N further enlarges the flow path between the annular recess 21M of the accommodating recess 21, reducing pressure loss and enabling a large flow rate.

[0047] Next, an example of a method for manufacturing the orifice 31 will be described.

[0048] First, a central flow passage portion CR is formed in the center of a disk-shaped base material by machining such as cutting. Then, a plurality of horizontal flow passage portions HR are formed by machining such as cutting so as to open to the outer peripheral surface 31o of the base material and the inner peripheral surface 31i of the central flow passage portion CR.

[0049] Next, an annular groove 31M is formed in the surface of the base material that will become the valve seat surface 31s by machining such as cutting. The depth of the annular groove 31M is such that it communicates with the horizontal passage section HR. This annular groove 31M forms a part of the first vertical passage section VR1 and the second vertical passage section VR2.

[0050] Furthermore, two branch flow paths VR11 and VR12 of the first vertical flow path section VR1 are formed by machining such as cutting on both sides of the central axis C2 of the horizontal flow path section HR from the surface that will become the opposing surface 31t of the base material. These branch flow paths VR11 and VR12 are formed so as to communicate with the horizontal flow path section HR.

[0051] Furthermore, a second vertical flow path portion VR2 is formed by machining such as cutting from the surface that will become the opposing surface 31t of the base material at a position that does not intersect with the horizontal flow path portion HR. This second vertical flow path portion VR2 is formed so as to communicate with the annular groove 31M. Other components of the orifice 31 described above are also formed by machining such as cutting. In this way, the orifice 31 is manufactured.

[0052] <Effects of this embodiment> The fluid control device 100 configured as described above allows for a large flow rate because the horizontal flow path section HR and the first vertical flow path section VR1 intersect with each other. Furthermore, because the vertical flow path section VR branches off from the intersection X with the horizontal flow path section HR at a distance on the opposing surface 31t side, the inner wall surface 31k forming the horizontal flow path section HR is present between the branch flow paths VR11 and VR12. As a result, gas ascending through the first vertical flow path section VR1 impinges on the inner wall surface 31k forming the horizontal flow path section HR between the branch flow paths VR11 and VR12, making it easier for the gas to flow into the horizontal flow path section HR, thereby improving flow rate responsiveness. Furthermore, by enlarging the inlet of the first vertical flow path section VR1, a large flow rate can be achieved. Therefore, this embodiment allows for both a large flow rate and improved flow rate responsiveness. Furthermore, because the vertical flow path section VR branches off from the intersection X with the horizontal flow path section HR, the distribution of gas flowing out from the opposing surface 31t can be made uniform. In particular, in this embodiment, the outlets of the two branch flow paths VR11 and VR12 of the first vertical flow path section VR1 and the outlet of the second vertical flow path section VR2 are formed on a circumference, so that the distribution of the gas flowing out from the opposing surface 31t can be made even more uniform.

[0053] <Other embodiments> For example, in the above embodiment, some of the vertical flow passage sections VR do not intersect with the horizontal flow passage sections HR, but it is also possible to adopt a configuration in which all of the vertical flow passage sections VR intersect with the horizontal flow passage sections HR.

[0054] In addition, in the above embodiment, all of the vertical flow path sections VR that intersect with the horizontal flow path sections HR are configured to branch off from the intersection X, but it is also possible to configure some of the vertical flow path sections VR that intersect with the horizontal flow path sections HR not to branch off from the intersection X.

[0055] Furthermore, the number of horizontal flow passage portions HR is not limited to that in the above embodiment, and may be one to three, or may be five or more.

[0056] Furthermore, although the orifice 31 in the above embodiment is an example in which the inlet is formed on one circumference, the inlet may be formed on multiple circumferences arranged concentrically.

[0057] Although the flow rate measuring unit 4 in the above embodiment is a pressure type, it may also be a thermal type. Specifically, as shown in Fig. 10, the thermal type flow rate measuring unit 4 includes a flow dividing element (resistance element) 45 provided in the flow path R, a thin tube 46 that branches from the upstream side of the flow dividing element 45 and joins the downstream side of the flow dividing element 45, two electric heating coils 47 that are wound around the thin tube 46 and to which voltages are applied so that each coil is maintained at a constant temperature, and a flow rate calculating unit 48 that detects the voltage difference applied to the electric heating coils 47 to calculate the flow rate of the gas flowing through the flow path R. This flow rate measuring unit 4 is provided in the flow path R on the upstream side or downstream side of the fluid control valve 3. Note that the principle of flow rate measurement in the flow rate measuring unit is not limited to the above and may be any method.

[0058] In addition, various modifications and combinations of the embodiments may be made as long as they do not go against the spirit of the present invention. [Explanation of symbols]

[0059] 100 Fluid control device 2. Flow path block 21. Storage recess R1...Upstream flow path R2...downstream flow path 21M Annular recess 3. Fluid Control Valve 31 Orifice 31s...Valve seat surface 31t...Opposite surface CR Central flow passage VR...Vertical flow path section VR1...First vertical flow path section VR2...Second vertical flow path section HR...Horizontal flow path section X...Intersection VR11...Branch flow path VR12...Branch flow path C11: Central axis of branch channel C12: Central axis of branch channel C2: Central axis of the horizontal flow passage 31K ···Notch 32s ···Seating surface 32 Valve body 33 Drive unit

Claims

1. an orifice having a valve seat surface; a valve body having a seating surface that seats on the valve seat surface; a drive unit that drives the valve body; a flow path block having a recess formed therein for accommodating the orifice and the valve body, The orifice is a vertical flow path portion that opens to the valve seat surface and an opposing surface that faces the valve seat surface; a horizontal flow path portion that opens to an outer circumferential surface between the valve seat surface and the opposing surface and intersects with the vertical flow path portion; a fluid control valve, wherein the vertical flow path portion is a single flow path on the valve seat surface side of an intersection with the horizontal flow path portion, and branches at intervals on the opposing surface side of the intersection portion.

2. the vertical flow path portion has two branch flow paths on the opposing surface side of the intersection portion, The fluid control valve according to claim 1 , wherein central axes of the two branch flow paths are offset from a central axis of the lateral flow path portion.

3. The fluid control valve according to claim 1 or 2, wherein an opening width of the vertical flow passage portion on the valve seat surface side of the intersection portion is larger than a flow passage diameter of the horizontal flow passage portion.

4. The vertical flow path portion has a plurality of parts, The fluid control valve according to claim 1 , wherein the lateral flow passage portion is provided in plural.

5. The fluid control valve according to claim 4 , wherein at least one of the plurality of vertical flow path portions does not intersect with the horizontal flow path portion.

6. The fluid control valve according to claim 1 , wherein the opposing surface has a notch cut out radially outward from an opening of the vertical flow path portion.

7. An orifice having a valve seat surface; a valve body having a seating surface that seats on the valve seat surface; a drive unit that drives the valve body; a flow path block having a recess formed therein for accommodating the orifice and the valve body, The orifice is a vertical flow path portion that opens to the valve seat surface and an opposing surface that faces the valve seat surface; a horizontal flow path portion that opens to an outer circumferential surface between the valve seat surface and the opposing surface and intersects with the vertical flow path portion; the vertical flow path portion branches off from an intersection with the horizontal flow path portion at an interval on the opposing surface side, a plurality of the vertical flow passage portions are formed on a circumference, and a central flow passage portion is formed in a central portion of the circumference, the central flow passage portion opening to the valve seat surface and the opposing surface, The central flow passage portion has a flow passage whose diameter continuously increases from the valve seat surface side toward the opposing surface.

8. An orifice having a valve seat surface; a valve body having a seating surface that seats on the valve seat surface; a drive unit that drives the valve body; a flow path block having a recess formed therein for accommodating the orifice and the valve body, The orifice is a vertical flow path portion that opens to the valve seat surface and an opposing surface that faces the valve seat surface; a horizontal flow path portion that opens to an outer circumferential surface between the valve seat surface and the opposing surface and intersects with the vertical flow path portion; the vertical flow path portion branches off from an intersection with the horizontal flow path portion at an interval on the opposing surface side, an upstream flow path is connected to a bottom surface of the accommodating recess, and a downstream flow path is connected to an inner circumferential surface of the accommodating recess, A fluid control valve, wherein an annular recess is formed on an inner peripheral surface of the accommodation recess in correspondence with the opening of the lateral flow path portion.

9. A fluid control valve according to any one of claims 1 to 8; a flow rate measuring unit for measuring a flow rate of the flow path; a control unit that controls the fluid control valve based on a measurement value measured by the flow rate measurement unit.

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