Optical detection device and ranging system

Abstract

Provided is a light-receiving element (10) disposed in a semiconductor substrate (100) and surrounded by a pixel partition wall (110). The light-receiving element (10) is provided with: a multiplication region (101) that amplifies electric charge; a cathode part disposed on a surface of the multiplication region (101) on the opposite side to a light-receiving surface; a hole storage region (104) disposed so as to cover the light-receiving surface and an inner surface of the pixel partition wall (110); and an anode part disposed on a portion of the surface that is of the hole storage region (104) for covering the inner surface of the pixel partition wall (110) and that is on the opposite side to the light-receiving surface. When the semiconductor substrate (100) is viewed from above the surface on the opposite side to the light-receiving surface, the multiplication region (101) is disposed such that a center point (Oc) of the multiplication region (101) is farther from the anode part than a center point (Ob) of the light-receiving element (10).

Description

[Technical Field]

[0001] The present disclosure relates to a light receiving element, a light detection device, and a ranging system. [Background technology]

[0002] In recent years, distance measurement systems that measure distance using the ToF (Time of Flight) method have been attracting attention. Some distance measurement systems use a SPAD (Single Photon Avalanche Diode) as the light receiving element. In such SPADs, a single light (photon) is incident, and the electrons (charges) generated by photoelectric conversion are multiplied in the PN junction region (avalanche amplification), allowing for highly accurate detection of the light. In such distance measurement systems, the timing at which a current flows due to the multiplied electrons can be detected with high accuracy. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2018 / 074530 Summary of the Invention [Problem to be solved by the invention]

[0004] However, in previous ranging systems using SPADs, the withstand voltage decreased as the size of the pixel (photodetector) became smaller, so there was a limit to how much pixels could be made smaller while still maintaining the desired withstand voltage.

[0005] Therefore, the present disclosure proposes a light receiving element, a light detection device, and a distance measuring system that can further miniaturize pixels while ensuring a desired breakdown voltage. [Means for solving the problem]

[0006] According to the present disclosure, there is provided a light-receiving element that is provided within a semiconductor substrate and surrounded by a pixel separation wall, the light-receiving element comprising: a photoelectric conversion unit that is provided within the semiconductor substrate and generates charge in response to light incident on a light-receiving surface of the semiconductor substrate; a multiplication region that is provided on the opposite side of the photoelectric conversion unit from the light-receiving surface and that amplifies charge from the photoelectric conversion unit; a cathode portion that is provided on a surface of the multiplication region that is opposite to the light-receiving surface; a hole accumulation region that is provided so as to cover the light-receiving surface and an inner side of the pixel separation wall; and an anode portion that is provided on a part of the surface of the hole accumulation region that covers the inner side of the pixel separation wall that is opposite to the light-receiving surface, wherein, when the semiconductor substrate is viewed from above from the surface opposite to the light-receiving surface, the multiplication region is provided so that a center point of the multiplication region is farther from the anode portion than a center point of the light-receiving element.

[0007] Further, according to the present disclosure, a pixel group including a plurality of pixels arranged in a matrix within a semiconductor substrate, and a pixel separation wall surrounding each of the pixels and separating each of the pixels from one another, each of the pixels including a photoelectric conversion unit provided within the semiconductor substrate and generating charges by light incident on a light receiving surface of the semiconductor substrate, a multiplication region provided on the opposite side of the light receiving surface with respect to the photoelectric conversion unit and amplifying the charges from the photoelectric conversion unit, a cathode portion provided on the surface of the multiplication region opposite to the light receiving surface ... between the light receiving surface and the pixel separation wall. a hole accumulation region provided to cover the inner surface of the wall, and an anode portion provided on a part of the surface of the hole accumulation region covering the inner surface of the pixel separation wall surrounding the pixel group, opposite the light-receiving surface, wherein, when the semiconductor substrate is viewed from above the surface opposite the light-receiving surface, in at least one of the plurality of pixels included in the pixel group, the multiplication region is provided so that the center point of the multiplication region is closer to the center point of the pixel group than the center point of the corresponding pixel.

[0008] Further, according to the present disclosure, there is provided an illumination device that irradiates illumination light, and a photodetector that receives light reflected from an object, the photodetector having a pixel group consisting of a plurality of pixels arranged in a matrix within a semiconductor substrate, and a pixel separation wall that surrounds each of the pixels and separates each of the pixels from one another, each of the pixels having a photoelectric conversion unit that is provided within the semiconductor substrate and generates charges by light incident from a light receiving surface of the semiconductor substrate, a multiplication region that is provided on the opposite side of the light receiving surface with respect to the photoelectric conversion unit and that amplifies the charges from the photoelectric conversion unit, and a multiplication region that is provided on the opposite side of the multiplication region from the light receiving surface. a cathode portion provided on a surface of the semiconductor substrate, a hole accumulation region provided so as to cover the light-receiving surface and an inner side of the pixel separation wall, and an anode portion provided on a part of the surface of the hole accumulation region covering the inner side of the pixel separation wall surrounding the pixel group, on the side opposite the light-receiving surface, wherein, when the semiconductor substrate is viewed from above the surface opposite the light-receiving surface, in at least one of the plurality of pixels included in the pixel group, the multiplication region is provided so that the center point of the multiplication region is closer to the center point of the pixel group than the center point of the corresponding pixel. [Brief explanation of the drawings]

[0009] [Figure 1] 2 is an explanatory diagram for explaining an example of a circuit configuration of a pixel 10. FIG. [Figure 2] 10 is a graph showing the change in the cathode voltage VS of the photodiode 20 in response to the incidence of light and the detection signal PFout. [Figure 3] FIG. 5 is a block diagram showing an example of the configuration of a photodetector 501. [Figure 4] FIG. 6 is a block diagram showing an example of the configuration of a distance measuring system 611 incorporating a photodetector 501. [Figure 5] 1 is a cross-sectional view schematically illustrating an example of a detailed configuration of a pixel 10 according to a comparative example. [Figure 6] FIG. 2 is a schematic plan view illustrating an example of a detailed configuration of a pixel 10 according to a comparative example. [Figure 7]1 is a schematic cross-sectional view illustrating an example of a detailed configuration of a pixel 10 according to a first embodiment of the present disclosure. [Figure 8] 1 is a schematic plan view illustrating an example of a detailed configuration of a pixel 10 according to a first embodiment of the present disclosure. [Figure 9] FIG. 2 is a schematic plan view illustrating an example of a detailed configuration of a pixel 10 according to a modified example of the first embodiment of the present disclosure. [Figure 10] FIG. 10 is a plan view schematically illustrating an example of a detailed configuration of a pixel 10 according to a second embodiment of the present disclosure. [Figure 11] FIG. 10 is a schematic plan view illustrating an example of a detailed configuration of a pixel 10 according to a modified example of the second embodiment of the present disclosure. [Figure 12] FIG. 10 is a cross-sectional view schematically illustrating an example of a detailed configuration of a pixel 10 according to a third embodiment of the present disclosure. [Figure 13] FIG. 10 is a schematic plan view illustrating an example of a detailed configuration of a pixel 10 according to a third embodiment of the present disclosure. [Figure 14] FIG. 10 is a cross-sectional view schematically illustrating an example of a detailed configuration of a pixel 10 according to a fourth embodiment of the present disclosure. [Figure 15] FIG. 10 is a plan view schematically illustrating an example of a detailed configuration of a pixel 10 according to a fourth embodiment of the present disclosure. [Figure 16] FIG. 13 is a schematic plan view illustrating an example of a detailed configuration of a pixel 10 according to a first modification of the fourth embodiment of the present disclosure. [Figure 17] FIG. 13 is a schematic plan view illustrating an example of a detailed configuration of a pixel 10 according to a second modification of the fourth embodiment of the present disclosure. [Figure 18] FIG. 10 is a cross-sectional view schematically illustrating an example of a detailed configuration of a pixel 10 according to a fifth embodiment of the present disclosure. [Figure 19] FIG. 11 is a plan view schematically illustrating an example of a detailed configuration of a pixel 10 according to a fifth embodiment of the present disclosure. [Figure 20] FIG. 13 is a cross-sectional view schematically illustrating an example of a detailed configuration of a pixel 10 according to a sixth embodiment of the present disclosure. [Figure 21] FIG. 13 is a schematic cross-sectional view illustrating an example of a detailed configuration of a pixel 10 according to a modified example of the sixth embodiment of the present disclosure. [Figure 22]FIG. 13 is a cross-sectional view schematically illustrating an example of a detailed configuration of a pixel 10 according to a seventh embodiment of the present disclosure. [Figure 23] FIG. 13 is a schematic plan view illustrating an example of a detailed configuration of a pixel 10 according to a seventh embodiment of the present disclosure. [Figure 24] FIG. 13 is a schematic plan view illustrating an example of a detailed configuration of a pixel 10 according to a modified example of the seventh embodiment of the present disclosure. [Figure 25] FIG. 13 is a schematic plan view illustrating an example of a detailed configuration of a pixel 10 according to an eighth embodiment of the present disclosure. [Figure 26] FIG. 13 is a schematic plan view illustrating an example of a detailed configuration of a pixel 10 according to a modified example of the eighth embodiment of the present disclosure. [Figure 27] FIG. 13 is a cross-sectional view schematically illustrating an example of a detailed configuration of a pixel 10 according to a ninth embodiment of the present disclosure. [Figure 28] FIG. 13 is a schematic plan view illustrating an example of a detailed configuration of a pixel 10 according to a ninth embodiment of the present disclosure. [Figure 29] FIG. 20 is a schematic plan view illustrating an example of a detailed configuration of a pixel 10 according to a first modification of the ninth embodiment of the present disclosure. [Figure 30] FIG. 22 is a schematic plan view illustrating an example of a detailed configuration of a pixel 10 according to a second modification of the ninth embodiment of the present disclosure. [Figure 31] FIG. 20 is a schematic plan view illustrating an example of a detailed configuration of a pixel 10 according to a third modification of the ninth embodiment of the present disclosure. [Figure 32] FIG. 22 is a cross-sectional view schematically illustrating an example of a detailed configuration of a pixel 10 according to a tenth embodiment of the present disclosure. [Figure 33] FIG. 22 is a plan view schematically illustrating an example of a detailed configuration of a pixel 10 according to a tenth embodiment of the present disclosure. [Figure 34] FIG. 23 is a schematic plan view illustrating an example of a detailed configuration of a pixel 10 according to a modified example of the tenth embodiment of the present disclosure. [Figure 35A] FIG. 22 is a schematic diagram (part 1) for explaining a method for manufacturing a pixel 10 according to an eleventh embodiment of the present disclosure. [Figure 35B] FIG. 22 is a second schematic diagram illustrating a method for manufacturing the pixel 10 according to the eleventh embodiment of the present disclosure. [Figure 35C]FIG. 22 is a third schematic diagram for explaining a method for manufacturing the pixel 10 according to the eleventh embodiment of the present disclosure. [Figure 35D] FIG. 22 is a fourth schematic diagram illustrating a method for manufacturing the pixel 10 according to the eleventh embodiment of the present disclosure. [Figure 35E] FIG. 22 is a fifth schematic diagram illustrating a method for manufacturing the pixel 10 according to the eleventh embodiment of the present disclosure. [Figure 35F] FIG. 22 is a sixth schematic diagram illustrating a method for manufacturing the pixel 10 according to the eleventh embodiment of the present disclosure. [Figure 36A] FIG. 26 is a schematic diagram (part 1) for explaining a manufacturing method of the pixel 10 according to a modified example of the eleventh embodiment of the present disclosure. [Figure 36B] FIG. 26 is a schematic diagram (part 2) for explaining a manufacturing method of the pixel 10 according to a modified example of the eleventh embodiment of the present disclosure. [Figure 36C] FIG. 26 is a schematic diagram (part 3) for explaining a manufacturing method of the pixel 10 according to a modified example of the eleventh embodiment of the present disclosure. [Figure 37] FIG. 9 is a block diagram showing an example configuration of a smartphone 900 as an electronic device to which a ranging system 611 according to an embodiment of the present disclosure is applied. DETAILED DESCRIPTION OF THE INVENTION

[0010] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. In the following embodiments, the same components are designated by the same reference numerals, and redundant description will be omitted.

[0011] Furthermore, the drawings referred to in the following description are intended to facilitate the description and understanding of the embodiments of the present disclosure, and for clarity, the shapes, dimensions, ratios, etc. shown in the drawings may differ from the actual shapes, dimensions, ratios, etc. Furthermore, the light detection devices and components included in the light detection devices shown in the drawings may be appropriately modified in design in consideration of the following description and known techniques. Furthermore, in the following description, unless otherwise specified, the vertical direction of the layered structure of the light detection device corresponds to the relative direction when the light detection device is arranged so that light incident on the light detection device is directed from bottom to top.

[0012] In the following description, the description of a specific shape does not necessarily mean a geometrically defined shape. In particular, the description of a specific shape in the following description also includes shapes that have allowable variations (errors and distortions) in the pixels, photodetectors, their manufacturing processes, and their use and operation, as well as shapes similar to those shapes. For example, in the following description, the expression "substantially rectangular" does not mean limited to a square, but also includes shapes similar to a square with any of the four corners chamfered.

[0013] In the following description of circuits (electrical connections), unless otherwise specified, "electrically connected" means connecting multiple elements so that electricity (signals) is conducted between them. In addition, in the following description, "electrically connected" includes not only cases where multiple elements are directly and electrically connected, but also cases where elements are indirectly and electrically connected via other elements.

[0014] In this specification, "gate" refers to the gate electrode of a field-effect transistor. "Drain" refers to the drain region of a field-effect transistor, and "source" refers to the source region of a field-effect transistor. "First conductivity type" refers to either "p-type" or "n-type," and "second conductivity type" refers to either "p-type" or "n-type" that is different from the "first conductivity type."

[0015] Furthermore, in the following description, unless otherwise specified, "provided in common" means that another element is provided so as to be shared by a plurality of one elements, in other words, that the other element is shared by each of a predetermined number of one elements.

[0016] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. The description will be made in the following order. 1. Background that led the inventors to create the embodiments of the present disclosure 1.1 Circuit configuration of pixel 10 1.2 Configuration example of the photodetector 501 1.3 Example of the configuration of the ranging system 611 1.4 Detailed Configuration of Pixel 10 According to Comparative Example 1.5 Background 2. First Embodiment 2.1 Cross-sectional configuration 2.2 Planar configuration 2.3 Variations 3. Second Embodiment 3.1 Planar configuration 3.2 Variations 4. Third Embodiment 4.1 Cross-sectional configuration 4.2 Planar configuration 5. Fourth Embodiment 5.1 Detailed configuration 5.2 Variations 6. Fifth Embodiment 7. Sixth Embodiment 8. Seventh Embodiment 8.1 Advanced Configuration 8.2 Variations 9. Eighth Embodiment 9.1 Advanced Configuration 9.2 Variations 10. Ninth Embodiment 10.1 Advanced Configuration 10.2 Variations 11. Tenth Embodiment 11.1 Advanced Configuration 11.2 Variations 12. Eleventh Embodiment 12.1 Manufacturing method 12.2 Variations 13. Summary 14. Application Examples 15. Supplementary Information

[0017] <<1. Background that led the inventors to create the embodiments of the present disclosure>> 1.1 Circuit configuration of pixel 10 Before describing the details of the embodiments of the present disclosure, an example of the circuit configuration of a pixel 10 to which the embodiments of the present disclosure can be applied will be described with reference to Fig. 1. Fig. 1 is an explanatory diagram for describing an example of the circuit configuration of the pixel 10. In detail, Fig. 1 shows the circuit configuration of the pixel 10 including a photodiode (light receiving element) 20 having a SPAD (Single Photon Avalanche Diode) structure, which can be applied to a distance measurement sensor that measures distance using a direct ToF (Time-of-Flight) method.

[0018] As shown in FIG. 1, the pixel 10 includes a photodiode 20, a constant current source 22, an inverter 24, and a transistor .

[0019] As described above, the photodiode 20 has a SPAD structure and can be operated at a bias voltage (Geiger mode) greater than the breakdown voltage VBD. The photodiode 20 is an element capable of detecting one light (photon) for each pixel 10 by multiplying electrons (charges) generated by photoelectric conversion in a high-electric-field PN junction region provided for each pixel 10. Specifically, the photodiode 20 is a photodiode (single-photon avalanche photodiode) that avalanches electrons (charges) generated by incident light and outputs the amplified signal voltage Vs to the inverter 24. The photodiode 20 has a cathode electrically connected to the constant current source 22, the input terminal of the inverter 24, and the drain of the transistor 26. The photodiode 20 also has an anode electrically connected to a power supply. For example, a voltage greater than the breakdown voltage VBD of the photodiode 20 (hereinafter referred to as excess bias) is applied to the photodiode 20 to efficiently detect light (photons). Furthermore, the power supply voltage VCC supplied to the anode of the photodiode 20 is set to a negative bias (negative potential) that is the same voltage as the breakdown voltage VBD of the photodiode 20, for example.

[0020] The constant current source 22 is configured, for example, with a p-type MOS (Metal Oxide Semiconductor) transistor that operates in the saturation region and serves as a quenching resistor to perform passive quenching. A power supply voltage VE is supplied to the constant current source 22. The constant current source 22 may be configured with a pull-up resistor or the like instead of a p-type MOS transistor.

[0021] The drain of the transistor 26 is connected to the cathode of the photodiode 20, the input terminal of the inverter 24, and the constant current source 22, and the source of the transistor 26 is connected to ground (GND). A control signal is supplied to the gate of the transistor 26 from a pixel drive unit (not shown) that drives the pixel 10. Specifically, when the pixel 10 is determined to be an effective pixel, a Lo (Low) control signal is supplied to the gate of the transistor 26 from the pixel drive unit. On the other hand, when the pixel 10 is not determined to be an effective pixel, a Hi (High) control signal is supplied to the gate of the transistor 26 from the pixel drive unit. Note that, here, an effective pixel is a pixel that is in a state where it can detect light, while a pixel that is not determined to be an effective pixel is a pixel that does not detect light.

[0022] When the voltage VS from the cathode of the photodiode 20 as an input signal is Lo, the inverter 24 outputs a Hi signal PF out When the voltage VS from the cathode is Hi, the Lo signal PF out Output.

[0023] Next, the operation when the pixel 10 is set as an effective pixel will be described with reference to Fig. 2. Fig. 2 shows the change in the cathode voltage VS of the photodiode 20 in response to the incidence of light and the detection signal PF out 1 is a graph showing

[0024] First, when pixel 10 is an effective pixel, transistor 26 is turned off by a control signal Lo. Before time t0, the cathode of photodiode 20 is supplied with power supply voltage VE, and the anode is supplied with power supply VCC. Therefore, a reverse voltage greater than the breakdown voltage VBD is applied to photodiode 20, setting photodiode 20 in Geiger mode. In this state, the cathode voltage VS of photodiode 20 is equal to the power supply voltage VE.

[0025] When light is incident on the photodiode 20 set to the Geiger mode, avalanche multiplication occurs, causing a current to flow through the photodiode 20. Specifically, when avalanche multiplication occurs at time t0 and a current flows through the photodiode 20, a current also flows through the p-type MOS transistor serving as the constant current source 22, causing a voltage drop due to the resistance component of the MOS transistor.

[0026] Furthermore, when the cathode voltage VS of the photodiode 20 becomes lower than 0 V, a reverse voltage smaller than the breakdown voltage VBD is applied to the photodiode 20, and the avalanche amplification stops. Here, the current generated by the avalanche amplification flows into the constant current source 22, causing a voltage drop, and the cathode voltage VS becomes lower than 0 V due to the voltage drop, thereby stopping the avalanche amplification. This operation is called a quench operation.

[0027] Then, when the avalanche amplification stops at time t2, the current flowing through the constant current source 22 gradually decreases, and at time t4, the cathode voltage VS recovers to the original power supply voltage VE again, and the photodiode 20 is ready to detect light anew (recharge operation).

[0028] For example, when the cathode voltage VS, which is the input voltage, is equal to or higher than a predetermined threshold voltage Vth (=VE / 2), the inverter 24 outputs a Lo (Low) PF. out When the cathode voltage VS is less than a predetermined threshold voltage Vth, a Hi PF out In the example shown in FIG. 2, a Hi (High) PF signal is output during the period from time t1 to time t3. out A signal is output.

[0029] When the pixel 10 is not an effective pixel, a Hi control signal is supplied from a pixel drive unit (not shown) to the gate of the transistor 26, turning on the transistor 26. As a result, the cathode voltage VS of the photodiode 20 becomes 0 V (GND) and the anode-cathode voltage of the photodiode 20 becomes equal to or lower than the breakdown voltage VBD, so that no current is generated even when light is incident on the photodiode 20.

[0030] 1.2 Configuration example of the photodetector 501 The pixel 10 described above can be applied to, for example, a pixel of a photodetector 501 shown in Fig. 3. Fig. 3 is a block diagram showing an example of the configuration of the photodetector 501.

[0031] 3, for example, the photodetector 501 includes a pixel driver 511, a pixel array 512, a MUX (multiplexer) 513, a time measurement unit 514, and an input / output unit 515. Details of each block included in the photodetector 501 will be described below in order.

[0032] (Pixel driving unit 511) The pixels 10 are arranged in a matrix in a pixel array unit 512 (described later), and pixel drive lines 522 are wired in the horizontal direction for each row of the pixels 10. The pixel drive unit 511 drives each pixel 521 by supplying a predetermined drive signal to each pixel 521 via the pixel drive lines 522. Specifically, the pixel drive unit 511 can perform control to make some of the multiple pixels 10 arranged two-dimensionally in a matrix effective pixels at a timing according to a light emission timing signal supplied from the outside via an input / output unit 515 (described later).

[0033] (Pixel array section 512) The pixel array unit 512 detects light and outputs a detection signal PF outThe pixel array unit 512 has a configuration in which pixels 10 that output the signal as a pixel signal are two-dimensionally arranged in a matrix in the row and column directions. Note that the number of rows and columns of the pixels 10 in the pixel array unit 512 is not limited to the numbers shown in FIG. 3. As described above, a pixel drive line 522 is wired in the horizontal direction for each pixel row in the matrix-like pixel arrangement of the pixel array unit 512. Furthermore, although the pixel drive line 522 is shown as a single wire, it may also be configured with multiple wires. Furthermore, one end of the pixel drive line 522 is connected to an output terminal of the pixel drive unit 511 that corresponds to each pixel row.

[0034] (MUX513) The MUX 513 can select the output from the effective pixel in accordance with the switching between effective and non-effective pixels in the pixel array section 512, and output the pixel signal input from the selected effective pixel to the time measurement section 514 described later.

[0035] (Time measurement unit 514) The time measurement unit 514 generates a count value corresponding to the time from when the light source emits light to when the effective pixel detects the light, based on the pixel signal of the effective pixel supplied from the MUX 513 and a light emission timing signal indicating the light emission timing of the light source (not shown). The light emission timing signal is supplied from the outside via the input / output unit 515, which will be described later.

[0036] (Input / output section 515) The input / output unit 515 outputs the count value of the effective pixels supplied from the time measurement unit 514 to the outside as a pixel signal. The input / output unit 515 also supplies a light emission timing signal supplied from the outside to the pixel drive unit 511 and the time measurement unit 514.

[0037] <1.3 Configuration example of distance measurement system 611> The above-described photodetector 501 can be applied to, for example, a distance measuring system 611 shown in Fig. 4. Fig. 4 is a block diagram showing an example configuration of the distance measuring system 611 incorporating the photodetector 501. The distance measuring system 611 is, for example, a system that captures a distance image using the ToF method. Here, the distance image is an image that detects the depth distance from the distance measuring system 611 to a subject for each pixel and is composed of distance pixel signals based on the detected distances.

[0038] 4, the distance measurement system 611 includes an illumination device 621 and an imaging device 622. Details of each block included in the distance measurement system 611 will be explained below one by one.

[0039] (Lighting equipment 621) 4, the lighting device 621 has a lighting control unit 631 and a light source 632. The lighting control unit 631 controls the light emission pattern of the light source 632 under the control of the control unit 642 of the imaging device 622. Specifically, the lighting control unit 631 controls the light emission pattern of the light source 632 in accordance with an illumination code included in an illumination signal supplied from the control unit 642. For example, the illumination code consists of two values, 1 (High) and 0 (Low), and the lighting control unit 631 turns on the light source 632 when the illumination code value is 1 and turns off the light source 632 when the illumination code value is 0.

[0040] The light source 632 emits light in a predetermined wavelength range under the control of the illumination control unit 631. The light source 632 may be, for example, an infrared laser diode. The type of the light source 632 and the wavelength range of the emitted light may be set arbitrarily depending on the application of the distance measuring system 611, etc.

[0041] (imaging device 622) The imaging device 622 is a device that receives reflected light that is generated when light (irradiated light) emitted from the lighting device 621 is reflected by the subject 612, the subject 613, etc. As shown in FIG. 4 , the imaging device 622 has an imaging unit 641, a control unit 642, a display unit 643, and a storage unit 644.

[0042] 4, the imaging unit 641 has a lens 651, a signal processing circuit 653, and a photodetector 501. The lens 651 can form an image of incident light on the light receiving surface of the photodetector 501. The lens 651 may have any configuration, and for example, the lens 651 may be formed of a group of multiple lenses.

[0043] The photodetector 501 can be the photodetector 501 described above. Under the control of the control unit 642, the photodetector 501 receives reflected light from the subject 612, the subject 613, etc., and supplies the resulting pixel signal to the signal processing circuit 653. The pixel signal indicates a digital count value that counts the time from when the illumination device 621 emits irradiation light to when the photodetector 501 receives the light. A light emission timing signal that indicates the timing at which the light source 632 emits light is supplied from the control unit 642 to the photodetector 501.

[0044] The signal processing circuit 653 processes pixel signals supplied from the photodetector 501 under the control of the control unit 642. For example, the signal processing circuit 653 detects the distance to the subjects 612 and 613 for each pixel based on the pixel signals supplied from the photodetector 501, and generates a distance image indicating the distance to the subjects 612 and 613 for each pixel 10. Specifically, the signal processing circuit 653 acquires the time (count value) from when the light source 632 emits light to when each pixel 10 of the photodetector 501 receives the light multiple times (e.g., thousands to tens of thousands of times) for each pixel 10. The signal processing circuit 653 creates a histogram corresponding to the acquired times. Then, by detecting peaks in the histogram, the signal processing circuit 653 determines the time it takes for the light emitted from the light source 632 to be reflected by the subject 612 or the subject 613 and return. Furthermore, the signal processing circuit 653 performs calculations to determine the distance to the subjects 612 and 613 based on the determined times and the speed of light. The signal processing circuit 653 supplies the generated distance image to the control unit 642 .

[0045] The control unit 642 is configured with a control circuit, a processor, etc., such as an FPGA (Field Programmable Gate Array) or a DSP (Digital Signal Processor). The control unit 642 controls the illumination control unit 631 and the photodetector 501. Specifically, the control unit 642 supplies an irradiation signal to the illumination control unit 631 and a light emission timing signal to the photodetector 501. The light source 632 emits irradiation light in response to the irradiation signal. The light emission timing signal may be the irradiation signal supplied to the illumination control unit 631. The control unit 642 also supplies the distance image acquired from the imaging unit 641 to the display unit 643, causing the display unit 643 to display the distance image. The control unit 642 also stores the distance image acquired from the imaging unit 641 in the storage unit 644. The control unit 642 also outputs the distance image acquired from the imaging unit 641 to an external device.

[0046] The display unit 643 is, for example, a panel display device such as a liquid crystal display device or an organic EL (Electro Luminescence) display device.

[0047] The storage unit 644 can be configured with any storage device or storage medium, and stores distance images and the like.

[0048] 1.4 Detailed Configuration of Pixel 10 According to Comparative Example Next, with reference to FIGS. 5 and 6, an example of a detailed configuration of a pixel 10 according to a comparative example, which is compared with the embodiment of the present disclosure, will be described. FIG. 5 is a cross-sectional schematic diagram illustrating an example of a detailed configuration of a pixel 10 according to the comparative example. Note that FIG. 5 is a schematic diagram illustrating an example of a detailed configuration of a pixel 10 according to the comparative example to make it easier to understand the positional relationship of the components, and may differ from the actual cross section. FIG. 6 is a plan view schematic diagram illustrating an example of a detailed configuration of a pixel 10 according to the comparative example, specifically illustrating a plane in which four pixels 10 are arranged in a matrix. Note that the comparative example here refers to a pixel 10 that the inventors of the present invention had studied extensively before developing the embodiment of the present disclosure.

[0049] In the following description, the pixel 10 is assumed to be a back-illuminated type in which light is incident from the lower surface (back surface) side in Fig. 5. However, the pixel 10 is not limited to a back-illuminated type, and may be a front-illuminated type pixel 10 in which light is incident via a wiring layer (not shown) provided on the surface of a semiconductor substrate.

[0050] 5 shows mainly the structure of the semiconductor substrate 100, with the lower side of FIG. 5 being the back surface side of the semiconductor substrate 100, on which an on-chip lens (not shown) and the like are formed. The back surface serves as a light receiving surface onto which reflected light from an object is incident. On the other hand, the upper side of FIG. 5 is the front surface side of the semiconductor substrate 100, on which, although not shown, a wiring layer (not shown) including circuits for driving the pixel 10 and the like is formed.

[0051] 5, pixel 10 has an n-well region 100a, an n-type semiconductor region 101, a high-concentration n-type semiconductor region 101a, a p-type semiconductor region 102, a hole accumulation region 104, and a high-concentration p-type semiconductor region 104a provided in a semiconductor substrate 100 made of a silicon substrate. Pixel 10 also has a pixel separator 110 that surrounds pixel 10 and separates it from adjacent pixels 10. Furthermore, pixel 10 has an anode electrode 120 electrically connected to the high-concentration p-type semiconductor region 104a, and a cathode electrode 121 electrically connected to the high-concentration n-type semiconductor region 101a.

[0052] The n-well region 100a is a region with a low impurity concentration in the semiconductor substrate 100 having n-type conductivity, and generates an electric field that transfers electrons generated by photoelectric conversion to an avalanche multiplication region, which will be described later.

[0053] The p-type semiconductor region 102 and the n-type semiconductor region 101 are configured to form a PN junction on the n-well region 100a. The avalanche multiplication region described above is formed by a depletion layer generated in the region where the p-type semiconductor region 102 and the n-type semiconductor region 101 are junctioned. For example, the impurity concentration of the n-well region 100a is 1E+14 / cm3 It is preferable that the impurity concentration is as low as 1E+16 / cm or less. By doing so, it is possible to improve the light detection efficiency, which is called PDE (Photon Detection Efficiency). In addition, for example, the impurity concentration of each of the n-type semiconductor region 101 and the p-type semiconductor region 102 that form the avalanche multiplication region is 1E+16 / cm or less. 3 It is preferable to set the concentration to a high level of 1000 ppm or more.

[0054] The n-type semiconductor region 101 has, at its upper center, a heavily doped n-type semiconductor region 101a, which is a concentrated n-type semiconductor region formed at a predetermined depth from the surface side of the semiconductor substrate 100. The heavily doped n-type semiconductor region 101a is a contact portion connected to a cathode electrode 121 for supplying a positive voltage to form an avalanche multiplication region. Therefore, a power supply voltage VE is applied to the heavily doped n-type semiconductor region 101a from the cathode electrode 121.

[0055] The hole accumulation region 104 is a p-type semiconductor region formed to surround the side and bottom surfaces of the n-well region 100a, and is capable of accumulating holes generated by photoelectric conversion. The hole accumulation region 104 also traps electrons generated at the interface with the pixel separation section 110 (described later), thereby suppressing the DCR (dark count rate). Furthermore, by providing the hole accumulation region 104 on the side surfaces of the n-well region 100a, a lateral electric field is formed, making it easier to collect charges in a high electric field region, thereby improving the PDE.

[0056] Furthermore, a high-concentration p-type semiconductor region 104a, which has a high impurity concentration, is provided in the hole accumulation region 104 near the surface of the semiconductor substrate 100. The high-concentration p-type semiconductor region 104a is a contact portion that is connected to the anode electrode 120. Therefore, the power supply voltage VCC is applied to the high-concentration p-type semiconductor region 104a from the anode electrode 120.

[0057] A pixel separator 110 is provided at a pixel boundary between adjacent pixels, separating the pixels 10. The pixel separator 110 may be composed of only an insulating layer such as a silicon oxide film, or may have a double structure in which the outer side (the n-well region 100a side) of a metal layer such as tungsten is covered with an insulating layer such as a silicon oxide film. By providing the pixel separator 110 and the hole accumulation region 104, electrical and optical crosstalk between the pixels 10 can be reduced.

[0058] Next, FIG. 6 shows a semiconductor substrate 100 viewed from above, with four pixels 10 arranged in a 2×2 array. The high-concentration p-type semiconductor regions 104a, anode electrodes 120, and cathode electrodes 121 are not shown in FIG. 6. As described above, each pixel 10 is separated by pixel separators 110 formed in a grid pattern. Inside each pixel separator 110, a hole accumulation region 104 is provided along the pixel separator 110, electrically connected to the anode electrode 120 via the high-concentration p-type semiconductor region 104a. Furthermore, an n-type semiconductor region 101 is provided in the center of each pixel 10, electrically connected to the cathode electrode 121 via a high-concentration n-type semiconductor region 101a.

[0059] Although the pixel 10 has been described as having a structure in which electrons are read out as signal charges (electric charges), the present invention is not limited to this and may have a structure in which holes are read out. In this case, each semiconductor region of the pixel 10 has a conductivity type that is the inverse of the above-described conductivity type.

[0060] <1.5 Background> Next, with reference to FIG. 5 , the details of the background that led the inventors to create the embodiment of the present disclosure, based on the above-described configuration of the pixel 10, will be described. In the pixel 10 according to the comparative example described above, as the size of the pixel 10 is reduced, the distance between the anode electrode 120 and the cathode electrode 121 is shortened. In other words, the distance between the n-type semiconductor region 101 forming the avalanche multiplication region and the high-concentration p-type semiconductor region 104a, which is the contact portion of the anode electrode 120 and contains a high concentration of p-type impurities having the opposite conductivity to the n-type semiconductor region 101, is shortened. This shortened distance causes electric field concentration, reducing the breakdown voltage of the pixel 10. This reduced breakdown voltage increases the occurrence of defects such as breakdown of the pixel 10. On the other hand, if one attempts to ensure the above distance in order to ensure a predetermined breakdown voltage, there is a limit to how much the size of the pixel 10 can be reduced. Therefore, it has been difficult to further reduce the size of the pixel 10.

[0061] In view of the above, the present inventors conducted extensive research into the structure of the pixel 10, enabling further miniaturization while ensuring a desired breakdown voltage, and have thus created the first embodiment of the present disclosure, which will be described below. In the pixel 10 according to the comparative example, when the semiconductor substrate 100 is viewed from above the surface, the n-type semiconductor region 101 electrically connected to the cathode electrode 121 is provided at the center of the pixel 10. That is, the n-type semiconductor region 101 is provided point-symmetrically with respect to the center point of the pixel 10. On the other hand, in the pixel 10 according to the first embodiment of the present disclosure, which was created by the present inventors, the n-type semiconductor region 101 is provided asymmetrically with respect to the center point of the pixel 10. Specifically, in the comparative example and this embodiment, the cathode electrode 121 is provided electrically connected to the upper center of the n-type semiconductor region 101. Furthermore, in both the comparative example and this embodiment, the anode electrode 120 is provided electrically connected to a region of the hole accumulation region 104, which is provided so as to cover the side surface of the n-well region 100a, near the surface of the semiconductor substrate 100. However, in this embodiment, the n-type semiconductor region 101 is provided such that its center point is farther from the anode electrode 120 than the center point of the pixel 10. In other words, the n-type semiconductor region 101 is provided asymmetrically with respect to the center point of the pixel 10. Therefore, in this embodiment, the distance between the anode electrode 120 and the cathode electrode 121, in other words, the distance between the n-type semiconductor region 101 forming the avalanche multiplication region and the high-concentration p-type semiconductor region 104a, is longer than in a comparative example having a pixel 10 of the same size. As a result, according to this embodiment, electric field concentration can be alleviated, thereby preventing a decrease in the breakdown voltage of the pixel 10. Hereinafter, details of the first embodiment of the present disclosure will be described in order.

[0062] <<2. First Embodiment>> <2.1 Cross-sectional configuration> First, with reference to FIG. 7, details of the cross-sectional configuration of a pixel 10 according to the first embodiment of the present disclosure, created by the present inventors, will be described. FIG. 7 is a cross-sectional schematic diagram illustrating an example of the detailed configuration of a pixel 10 according to this embodiment. In detail, the cross-sectional view of the pixel 10 shown in FIG. 7 shows a state in which two pixels 10 are arranged, with the lower side of FIG. 7 being the back surface side of the semiconductor substrate 100, on which an on-chip lens (not shown) or the like is formed, and the back surface being a light-receiving surface onto which reflected light reflected from an object is incident. Meanwhile, the upper side of FIG. 7 is the front surface side of the semiconductor substrate 100.

[0063] 7, a pixel (light receiving element) 10 according to this embodiment includes an n-well region (photoelectric conversion unit) 100a, an n-type semiconductor region 101, a high-concentration n-type semiconductor region 101a, a p-type semiconductor region 102, a hole accumulation region 104, and a high-concentration p-type semiconductor region 104a, all of which are provided in a semiconductor substrate 100 made of a silicon substrate having n-type conductivity. The pixel 10 also includes a pixel isolation wall 110 that surrounds the pixel 10 and isolates it from adjacent pixels 10. The pixel 10 also includes an anode electrode (anode portion) 120 electrically connected to the high-concentration p-type semiconductor region 104a, and a cathode electrode (cathode portion) 121 electrically connected to the high-concentration n-type semiconductor region 101a.

[0064] The n-well region 100a is a region with a low impurity concentration in the semiconductor substrate 100 having n-type conductivity, and generates an electric field that transfers electrons (charges) generated by photoelectric conversion of light incident on the light-receiving surface of the semiconductor substrate to the avalanche multiplication region.

[0065] On the n-well region 100a, a p-type semiconductor region (first semiconductor region) 102 having a p-type conductivity type (first conductivity type) and an n-type semiconductor region (second semiconductor region) 101 having an n-type conductivity type (second conductivity type) are configured to form a PN junction. A depletion layer generated in the region where the p-type semiconductor region 102 and the n-type semiconductor region 101 are junctioned forms an avalanche multiplication region that amplifies electrons (charges) generated by photoelectric conversion. For example, the impurity concentration of the n-well region 100a is 1E+14 / cm3 It is preferable that the impurity concentration is as low as 1E+16 / cm or less. By doing so, it is possible to improve the light detection efficiency, which is called PDE (Photon Detection Efficiency). In addition, for example, the impurity concentration of each of the n-type semiconductor region 101 and the p-type semiconductor region 102 that form the avalanche multiplication region is 1E+16 / cm or less. 3 It is preferable to set the concentration to a high level of 1000 ppm or more.

[0066] The n-type semiconductor region 101 has, in its upper center, a high-concentration n-type semiconductor region 101a, which is a high-concentration n-type semiconductor region formed at a predetermined depth from the surface side of the semiconductor substrate 100. The high-concentration n-type semiconductor region 101a is a contact portion connected to a cathode electrode (cathode portion) 121 for supplying a positive voltage for forming an avalanche multiplication region. The cathode electrode 121 is provided on the high-concentration n-type semiconductor region 101a (on the surface opposite to the light-receiving surface), and a power supply voltage VE is applied to the cathode electrode 121. Note that the cathode electrode 121 and the high-concentration n-type semiconductor region 101a are preferably provided in the center of the n-type semiconductor region 101 so that an electric field is applied uniformly to the n-type semiconductor region 101 and a uniform avalanche multiplication region is formed.

[0067] In the pixel 10 according to this embodiment, the avalanche multiplication region formed by the p-type semiconductor region 102 and the n-type semiconductor region 101 is not located at the center of the pixel 10, but is provided asymmetrically with respect to the center point of the pixel 10. Specifically, the avalanche multiplication region formed by the p-type semiconductor region 102 and the n-type semiconductor region 101 is formed close to the pixel separator 110, which is in contact with the hole accumulation region 104 where the anode electrode 120 is not provided. Therefore, in this embodiment, the distance between the anode electrode 120 and the cathode electrode 121, in other words, the distance between the n-type semiconductor region 101 forming the avalanche multiplication region and the high-concentration p-type semiconductor region 104a, is long. As a result, this embodiment can alleviate electric field concentration, thereby preventing a decrease in the breakdown voltage of the pixel 10. In this embodiment, it is preferable that the n-type semiconductor region 101 forming the avalanche multiplication region is far from the high-concentration p-type semiconductor region 104a containing a high concentration of p-type impurities having the opposite conductivity type to that of the n-type semiconductor region 101. In other words, in this embodiment, it is preferable that the n-type semiconductor region 101 is close to the pixel separator 110 that is in contact with the hole accumulation region 104 that is not provided with the anode electrode 120. However, in this embodiment, it is possible that the electric fields of adjacent pixels 10 may adversely affect each other via the pixel separator 110 that is in contact with the hole accumulation region 104 that is not provided with the anode electrode 120. Therefore, it is preferable that the n-type semiconductor region 101 be close to the pixel separator 110 that is in contact with the hole accumulation region 104 that is not provided with the anode electrode 120, within a range that does not cause such adverse effects.

[0068] The hole accumulation region 104 is a p-type semiconductor region formed to surround the outer side and bottom surfaces of the n-well region 100a, and is capable of accumulating holes generated by photoelectric conversion. In other words, the hole accumulation region 104 is provided to cover the side surfaces that do not have the pixel isolation section (pixel isolation wall) 110. The hole accumulation region 104 also has the effect of trapping electrons generated at the interface with the pixel isolation section 110 and suppressing DCR. Furthermore, by providing the hole accumulation region 104 on the side surfaces of the n-well region 100a, a lateral electric field is formed, making it easier to collect charges in a high electric field region, thereby improving PDE.

[0069] Furthermore, a high-concentration p-type semiconductor region 104a having a high impurity concentration is provided in a region of the hole accumulation region 104 near the surface of the semiconductor substrate 100. The high-concentration p-type semiconductor region 104a is a contact portion connected to an anode electrode (anode portion) 120. The anode electrode 120 is provided on the high-concentration p-type semiconductor region 104a (on the surface opposite to the light-receiving surface), and a power supply voltage VCC is applied to the anode electrode 120.

[0070] A pixel separation section (pixel separation wall) 110 is provided at the pixel boundary between adjacent pixels 10 to separate the pixels 10. In other words, the pixel separation section 110 is provided so as to surround the pixel 10 and to penetrate the semiconductor substrate 100 in the film thickness direction. The pixel separation section 110 may be formed of only an insulating layer such as a silicon oxide film, or may have a double structure in which the outer side (the side of the n-well region 100a) of a metal layer such as tungsten is covered with an insulating layer such as a silicon oxide film. By providing the pixel separation section 110 and the hole accumulation region 104, electrical and optical crosstalk between the pixels 10 can be reduced.

[0071] Furthermore, in this embodiment, the pixels 10 have an isolation oxide film (oxide film) 112 that separates adjacent pixels 10. Specifically, in this embodiment, the isolation oxide film 112 has an STI (Shallow Trench Isolation) structure, which includes an oxide film (e.g., a silicon oxide film) embedded in a trench formed near the surface of the semiconductor substrate 100, and is provided on the surface (the surface opposite the light-receiving surface) of the semiconductor substrate 100 of the hole accumulation region 104 where the anode electrode 120 is not provided. From the viewpoint of improving breakdown voltage, the depth of the isolation oxide film 112 is preferably approximately equal to the depth of the n-type semiconductor region 101 that forms the avalanche multiplication region. From the viewpoint of suppressing dark current generation, the isolation oxide film 112 is preferably located above the position of the p-type semiconductor region 102 that forms the avalanche multiplication region. In this embodiment, the provision of such an isolation oxide film 112 can suppress crosstalk (color mixing) between the pixels 10. Furthermore, in this embodiment, by providing such an isolation oxide film 112, it is possible to prevent impurities having p-type conductivity contained in the hole accumulation region 104 from being present in the vicinity of the n-type semiconductor region 101, thereby alleviating electric field concentration and preventing a decrease in the breakdown voltage of the pixel 10.

[0072] <2.2 Planar configuration> Next, with reference to Fig. 8, a detailed planar configuration of the pixel 10 according to the first embodiment of the present disclosure created by the present inventors will be described. Fig. 8 is a planar schematic diagram showing an example of a detailed configuration of the pixel 10 according to this embodiment. In detail, Fig. 8 shows a state in which four pixels 10 are arranged in a 2x2 array when viewed from above the surface of the semiconductor substrate 100, and in Fig. 8, the anode electrode 120 and the cathode electrode 121 are not shown.

[0073] 8, the pixels 10 are arranged in a 2×2 matrix (pixel group) on the semiconductor substrate 100. The pixels 10 are formed in a lattice pattern and are separated from one another by pixel separators 110 that surround the pixels 10. Inside each pixel separator 110, a hole accumulation region 104 is provided along the pixel separator 110, and is electrically connected to the anode electrode 120 via a high-concentration p-type semiconductor region 104a.

[0074] 8, each pixel 10 is provided with an n-type semiconductor region 101 electrically connected to the cathode electrode 121 via a high-concentration n-type semiconductor region 101a. Specifically, the n-type semiconductor region 101 is provided so that the center point Oc of the n-type semiconductor region 101 is farther from the anode electrode 120 than the center point Ob of the pixel 10. In other words, the n-type semiconductor region 101 is provided so that the center point Oc of the n-type semiconductor region 101 is closer to the center point Oa of the pixel group consisting of 2×2 pixels 10 than the center point Ob of the corresponding pixel 10. In this embodiment, it is preferable that the n-type semiconductor region 101 forming the avalanche multiplication region is far from the high-concentration p-type semiconductor region 104a containing a high concentration of p-type conductive impurities having the opposite conductivity to that of the n-type semiconductor region 101, and it is preferable to adjust the distance between the n-type semiconductor region 101 and the high-concentration p-type semiconductor region 104a within a range that does not adversely affect each other's electric fields in adjacent pixels 10 via the pixel separator 110 that contacts the hole accumulation region 104 where no anode electrode 120 is provided.

[0075] Furthermore, in this embodiment, from the viewpoint of ensuring the withstand voltage of the pixel 10, it is preferable that the distance between the anode electrode 120 and the cathode electrode 121 is as long as possible, but it is preferable that the cathode electrode 121 and the high-concentration n-type semiconductor region 101a are provided in the center of the n-type semiconductor region 101 so that an electric field is uniformly applied to the n-type semiconductor region 101 and a uniform avalanche multiplication region is formed. In this embodiment, for example, it is preferable that the relationship between the distance L (μm) between the anode electrode 120 and the cathode electrode 121 and the applied voltage V is approximately V / L<40 (V / μm).

[0076] Furthermore, in this embodiment, the n-type semiconductor region 101 has a substantially rectangular shape, as shown in Fig. 8. When the n-type semiconductor region 101 is formed in a substantially rectangular shape, a large area for the avalanche multiplication region can be ensured, thereby improving the PDE. Note that, in this embodiment, the shape of the n-type semiconductor region 101 is not particularly limited.

[0077] In this embodiment, the pixels 10 have an isolation oxide film (first oxide film) 112 provided on the surface of the semiconductor substrate 100 (the surface opposite to the light-receiving surface) of the hole accumulation region 104 located between adjacent pixels 10 and not provided with the anode electrode 120. As described above, in this embodiment, the provision of such an isolation oxide film 112 makes it possible to suppress the occurrence of crosstalk (color mixing) between the pixels 10. Furthermore, in this embodiment, the provision of such an isolation oxide film 112 makes it possible to prevent impurities having p-type conductivity contained in the hole accumulation region 104 from being present in the vicinity of the n-type semiconductor region 101, thereby alleviating electric field concentration and preventing a decrease in the withstand voltage of the pixels 10.

[0078] In this embodiment, the widths of the hole accumulation region 104 and the isolation oxide film 112 may be approximately the same or different.

[0079] As described above, in this embodiment, the distance between the anode electrode 120 and the cathode electrode 121, in other words, the distance between the n-type semiconductor region 101 forming the avalanche multiplication region and the high-concentration p-type semiconductor region 104a, is increased. As a result, this embodiment can alleviate electric field concentration, thereby preventing a decrease in the breakdown voltage of the pixel 10. Furthermore, this embodiment can enlarge the avalanche multiplication region formed in the junction region between the p-type semiconductor region 102 and the n-type semiconductor region 101 even if the pixel size is reduced, thereby further improving the sensitivity of the pixel 10.

[0080] Although the pixel 10 according to this embodiment has been described as having a structure in which electrons are read out as signal charges (electric charges), the present invention is not limited to this and may have a structure in which holes are read out. In this case, each semiconductor region of the pixel 10 has a conductivity type that is the inverse of the above-described conductivity type.

[0081] <2.3 Modifications> Next, a modification of this embodiment will be described with reference to FIG. 9. FIG. 9 is a plan view showing an example of a detailed configuration of a pixel 10 according to this modification. In this modification, as shown in FIG. 9, a hole accumulation region 104 covers four corners of a pixel isolation section (pixel isolation wall) 110 surrounding a pixel group consisting of a plurality of pixels 10 arranged in a 2×2 matrix within a semiconductor substrate 100. A high-concentration p-type semiconductor region 104a serving as a contact section connected to an anode electrode (anode section) 120 is provided in a region on the surface of the semiconductor substrate 100 (the surface opposite the light-receiving surface) of the hole accumulation region 104. In this modification, the high-concentration p-type semiconductor region 104a connected to the anode electrode 120 is provided only at the four corners of the pixel group, thereby increasing the distance between the n-type semiconductor region 101 forming the avalanche multiplication region and the high-concentration p-type semiconductor region 104a. As a result, this modification can alleviate electric field concentration, thereby preventing a decrease in the breakdown voltage of the pixel 10.

[0082] <<3. Second Embodiment>> <3.1 Planar configuration> The planar configuration of the pixel 10 according to the second embodiment of the present disclosure will be described in detail with reference to Fig. 10. Fig. 10 is a schematic plan view illustrating an example of the detailed configuration of the pixel 10 according to this embodiment.

[0083] In the first embodiment of the present disclosure described above, the n-type semiconductor region 101 has a substantially rectangular shape as shown in FIG. 8 . However, in the embodiment of the present disclosure, the n-type semiconductor region 101 may have a polygonal shape with one of its four corners chamfered as shown in FIG. 10 . Specifically, the chamfered corner of the four corners is the corner closest to the high-concentration p-type semiconductor region 104a connected to the anode electrode 120. In this embodiment, by making the n-type semiconductor region 101 have a polygonal shape with one of its four corners chamfered, the distance between the n-type semiconductor region 101 forming the avalanche multiplication region and the high-concentration p-type semiconductor region 104a is increased, thereby alleviating electric field concentration and preventing a decrease in the breakdown voltage of the pixel 10.

[0084] <3.2 Modifications> Next, a modification of this embodiment will be described with reference to FIG. 11 . FIG. 11 is a plan view schematic diagram illustrating an example of a detailed configuration of a pixel 10 according to this modification. In this modification, similar to the modification of the first embodiment, the high-concentration p-type semiconductor regions 104a connected to the anode electrode 120 are provided only at the four corners of the pixel group, thereby increasing the distance between the n-type semiconductor region 101 forming the avalanche multiplication region and the high-concentration p-type semiconductor region 104a. Furthermore, in this modification, the n-type semiconductor region 101 has a polygonal shape in which the corners of the n-type semiconductor region 101 closest to the high-concentration p-type semiconductor region 104a connected to the anode electrode 120 are chamfered, thereby further increasing the distance between the n-type semiconductor region 101 and the high-concentration p-type semiconductor region 104a. As a result, this modification can alleviate electric field concentration, thereby further preventing a decrease in the breakdown voltage of the pixel 10.

[0085] <<4. Third Embodiment>> <4.1 Cross-sectional configuration> Next, with reference to Fig. 12, a detailed cross-sectional configuration of a pixel 10 according to a third embodiment of the present disclosure will be described. Fig. 12 is a schematic cross-sectional view showing an example of a detailed configuration of a pixel 10 according to this embodiment. In the first embodiment described above, an isolation oxide film 112 is provided on the surface side of the semiconductor substrate 100 of the hole accumulation region 104 where the anode electrode 120 is not provided. However, the present disclosure is not limited to this, and an isolation oxide film (second oxide film) 112a may be provided on the surface side of the semiconductor substrate 100 of the hole accumulation region 104 where the anode electrode 120 is provided.

[0086] 12 , an isolation oxide film (second oxide film) 112a having an STI structure, which includes an oxide film (e.g., a silicon oxide film) embedded in a trench formed near the surface of the semiconductor substrate 100, is provided on the surface of the semiconductor substrate 100 (the surface opposite the light-receiving surface) of the hole accumulation region 104, in which the anode electrode 120 is provided. Similar to the isolation oxide film 112 described above, the depth of the isolation oxide film 112a is preferably approximately equal to the depth of the n-type semiconductor region 101 forming the avalanche multiplication region in terms of improving the breakdown voltage, and is preferably located above the position of the p-type semiconductor region 102 forming the avalanche multiplication region in terms of suppressing the generation of dark current. In this embodiment, the provision of such an isolation oxide film 112a can suppress the occurrence of crosstalk (color mixing) between pixels 10. Furthermore, in this embodiment, by providing such an isolation oxide film 112a, it is possible to prevent impurities having p-type conductivity contained in the hole accumulation region 104 from being present in the vicinity of the n-type semiconductor region 101, thereby alleviating electric field concentration and preventing a decrease in the breakdown voltage of the pixel 10.

[0087] In this embodiment, in order to ensure electrical connection (ohmic contact) between the anode electrode 120 and the high-concentration p-type semiconductor region 104a via the pixel separating portion 110, it is preferable to ion-implant impurities into the region that will become the high-concentration p-type semiconductor region 104a after the formation of the isolation oxide film 112a.

[0088] <4.2 Planar configuration> Next, the planar configuration of the pixel 10 according to this embodiment will be described in detail with reference to Fig. 13. Fig. 13 is a schematic plan view showing an example of the detailed configuration of the pixel 10 according to this embodiment.

[0089] 13, the pixel 10 has an isolation oxide film 112a provided on the surface side of the semiconductor substrate 100 of the hole accumulation region 104, in which the anode electrode 120 is provided so as to surround the pixel group. In this embodiment, as described above, the provision of such an isolation oxide film 112a makes it possible to suppress the occurrence of crosstalk (color mixing) between the pixels 10. Furthermore, in this embodiment, the provision of such an isolation oxide film 112a makes it possible to prevent impurities having p-type conductivity contained in the hole accumulation region 104 from being present in the vicinity of the n-type semiconductor region 101, thereby mitigating electric field concentration and preventing a decrease in the withstand voltage of the pixel 10.

[0090] <<5. Fourth Embodiment>> <5.1 Detailed configuration> Next, details of the cross-sectional configuration of the pixel 10 according to the fourth embodiment of the present disclosure will be described with reference to Fig. 14 and Fig. 15. Fig. 14 is a schematic cross-sectional view illustrating an example of the detailed configuration of the pixel 10 according to the present embodiment, and Fig. 15 is a schematic plan view illustrating an example of the detailed configuration of the pixel 10 according to the present embodiment.

[0091] In the embodiments of the present disclosure described above, adjacent pixels 10 in a pixel group are separated by an isolation oxide film 112 having an STI structure. Therefore, the presence of the isolation oxide film 112 allows impurities having n-type conductivity located near the surface of the semiconductor substrate 100, i.e., the n-type semiconductor region 101, to be separated for each pixel 10. Therefore, in this embodiment, since the n-type semiconductor region 101 can be separated for each pixel 10 by the isolation oxide film 112, the n-type semiconductor region 101 can be made wider than the p-type semiconductor region 102.

[0092] In detail, as shown in Figures 14 and 15, the n-type semiconductor regions (second semiconductor regions) 101 of each pixel 10 in the pixel group are separated from each other by isolation oxide films (first oxide films) 112, and the n-type semiconductor regions 101 are larger than the p-type semiconductor regions (first semiconductor regions) 102.

[0093] In this embodiment, the n-type semiconductor region 101 has a substantially rectangular shape, as shown in Fig. 15. When the n-type semiconductor region 101 is formed in a substantially rectangular shape, a large area for the avalanche multiplication region can be ensured, thereby improving the PDE.

[0094] <5.2 Variations> Next, modifications of this embodiment will be described with reference to Fig. 16 and Fig. 17. Fig. 16 is a schematic plan view showing an example of a detailed configuration of a pixel 10 according to Modification 1 of this embodiment, and Fig. 17 is a schematic plan view showing an example of a detailed configuration of a pixel 10 according to Modification 2 of this embodiment.

[0095] In the present embodiment described above, the n-type semiconductor region 101 has a substantially rectangular shape as shown in Fig. 15, but this is not limited to this in the embodiments of the present disclosure. For example, in this modification, the n-type semiconductor region 101 may have a polygonal shape with chamfered corners near the high-concentration p-type semiconductor region 104a connected to the anode electrode 120, as shown in Fig. 16. This increases the distance between the n-type semiconductor region 101 that forms the avalanche multiplication region and the high-concentration p-type semiconductor region 104a, thereby mitigating electric field concentration and preventing a decrease in the breakdown voltage of the pixel 10.

[0096] 17, the n-type semiconductor region 101 may be formed in a generally sector shape with an arc (curve) on the side closer to the high-concentration p-type semiconductor region 104a connected to the anode electrode 120. This increases the distance between the n-type semiconductor region 101 forming the avalanche multiplication region and the high-concentration p-type semiconductor region 104a, thereby reducing electric field concentration and preventing a decrease in the breakdown voltage of the pixel 10. Furthermore, in this modification, the n-type semiconductor region 101 no longer has a pointed shape, thereby reducing electric field concentration at the corners.

[0097] <<6. Fifth Embodiment>> Next, the detailed configuration of the pixel 10 according to the fifth embodiment of the present disclosure will be described in detail with reference to Fig. 18 and Fig. 19. Fig. 18 is a schematic cross-sectional view illustrating an example of the detailed configuration of the pixel 10 according to the present embodiment, and Fig. 19 is a schematic plan view illustrating an example of the detailed configuration of the pixel 10 according to the present embodiment.

[0098] As shown in FIGS. 18 and 19 , in this embodiment, the p-type semiconductor region (first semiconductor region) 102 forming the avalanche multiplication region may have a larger area than the n-type semiconductor region (second semiconductor region) 101 forming the avalanche multiplication region. This configuration allows the formation of an avalanche multiplication region with a strong and uniform electric field. Furthermore, in this embodiment, the p-type semiconductor region 102 is located on the periphery of the avalanche multiplication region formed near the junction between the n-type semiconductor region 101 and the p-type semiconductor region 102 in a plan view. This configuration allows electrons generated in the n-well region 100a by incident light to migrate toward the inner avalanche multiplication region rather than toward the periphery of the pixel 10. That is, the p-type semiconductor region 102 in the periphery provides a shielding effect, allowing electrons from the n-well region 100a to migrate barrierlessly to the avalanche multiplication region. The barrier-less structure from the n-well region 100a to the avalanche multiplication region makes it possible to achieve low resistance and high PDE.

[0099] <<7. Sixth Embodiment>> Next, details of the cross-sectional configuration of the pixel 10 according to the fifth embodiment of the present disclosure and its modified examples will be described with reference to Fig. 20 and Fig. 21. Fig. 20 is a schematic cross-sectional view showing an example of the detailed configuration of the pixel 10 according to this embodiment, and Fig. 21 is a schematic cross-sectional view showing an example of the detailed configuration of the pixel 10 according to the modified example of this embodiment.

[0100] 20, wiring 130 may be formed above the anode electrode 120 and the cathode electrode 121 on the front surface side of the semiconductor substrate 100. For example, the wiring 130 is preferably formed using a metal material that reflects light, such as tungsten (W), aluminum (Al), or copper (Cu). By forming the wiring 130 using such a material, light that has passed through the semiconductor substrate 100 can be reflected by the wiring 130, thereby improving the sensitivity of the pixel 10.

[0101] 21 , the wirings 130 provided above the front surface of the semiconductor substrate 100 may be shared between the pixels 10, i.e., electrically connected to each other. In this modification, doing so allows the light transmitted through the semiconductor substrate 100 to be reflected by the wirings 130, thereby not only improving the sensitivity of the pixels 10 but also enabling signal addition and calculation between adjacent pixels 10, thereby reducing the size of the pixels 10 and the size of the photodetector 501 incorporating the pixels 10.

[0102] <<8. Seventh Embodiment>> <8.1 Detailed configuration> Next, details of the cross-sectional configuration of the pixel 10 according to the seventh embodiment of the present disclosure and its modified examples will be described with reference to Fig. 22 and Fig. 23. Fig. 22 is a schematic cross-sectional view illustrating an example of the detailed configuration of the pixel 10 according to this embodiment, and Fig. 23 is a schematic plan view illustrating an example of the detailed configuration of the pixel 10 according to this embodiment.

[0103] In the embodiment of the present disclosure, the pixel group is not limited to a pixel group consisting of four 2×2 pixels 10, but may be, for example, a pixel group consisting of sixteen 4×4 pixels 10, and the number and arrangement of the pixels 10 constituting the pixel group are not limited. For example, Figures 22 and 23 show an example of a pixel group consisting of sixteen 4×4 pixels 10 as a seventh embodiment of the present disclosure.

[0104] 23, in a pixel group consisting of 16 pixels 10 in a 4×4 arrangement, the n-type semiconductor regions 101 of the pixels 10 located at the four corners of the pixel group are arranged so that the centers of the n-type semiconductor regions 101 are closer to the center of the pixel group than the centers of the corresponding pixels 10. In this manner, in this embodiment, the distance between the anode electrode 120 and the cathode electrode 121, in other words, the distance between the n-type semiconductor region 101 forming the avalanche multiplication region and the high-concentration p-type semiconductor region 104a, is increased. As a result, this embodiment can alleviate electric field concentration, thereby preventing a decrease in the breakdown voltage of the pixels 10.

[0105] In this embodiment, the n-type semiconductor region 101 has a substantially rectangular shape, as shown in Fig. 23. When the n-type semiconductor region 101 is formed in a substantially rectangular shape in this manner, a large area for the avalanche multiplication region can be ensured, thereby improving the PDE.

[0106] <8.2 Variations> Next, a modification of this embodiment will be described with reference to FIG. 24. FIG. 24 is a plan view schematically illustrating an example of a detailed configuration of a pixel 10 according to this modification of this embodiment. In detail, in this modification, as in the modification of the first embodiment, as shown in FIG. 24, high-concentration p-type semiconductor regions 104a connected to the anode electrode 120 via pixel separators 110 are provided only at the four corners of the pixel group, thereby increasing the distance between the n-type semiconductor region 101 forming the avalanche multiplication region and the high-concentration p-type semiconductor region 104a. As a result, this modification can alleviate electric field concentration, thereby more effectively preventing a decrease in the breakdown voltage of the pixel 10.

[0107] <<9. Eighth Embodiment>> <9.1 Detailed configuration> Next, details of the cross-sectional configuration of the pixel 10 according to the eighth embodiment of the present disclosure will be described with reference to Fig. 25. Fig. 25 is a schematic plan view illustrating an example of the detailed configuration of the pixel 10 according to this embodiment.

[0108] In the seventh embodiment of the present disclosure described above, the n-type semiconductor region 101 has a substantially rectangular shape as shown in Fig. 23 , but this is not limited to this in the embodiments of the present disclosure. For example, in this embodiment, as shown in Fig. 25 , in a pixel group consisting of 16 pixels 10 in a 4 × 4 arrangement, the n-type semiconductor region 101 in the pixels 10 located at the four corners of the pixel group may have a polygonal shape in which the corners near the high-concentration p-type semiconductor region 104a connected to the anode electrode 120 are chamfered. By doing so, the distance between the n-type semiconductor region 101 forming the avalanche multiplication region and the high-concentration p-type semiconductor region 104a is increased, thereby alleviating electric field concentration and preventing a decrease in the withstand voltage of the pixel 10.

[0109] <9.2 Variations> Next, a modification of this embodiment will be described with reference to FIG. 26 . FIG. 26 is a plan view showing an example of a detailed configuration of a pixel 10 according to this modification. For example, in this modification, as shown in FIG. 26 , in a pixel group consisting of 16 pixels 10 (4×4), the n-type semiconductor region 101 of each pixel 10 located at the four corners of the pixel group may have a substantially rectangular shape with rounded corners at the corners closest to the high-concentration p-type semiconductor region 104a connected to the anode electrode 120. This increases the distance between the n-type semiconductor region 101 forming the avalanche multiplication region and the high-concentration p-type semiconductor region 104a, thereby alleviating electric field concentration and preventing a decrease in the breakdown voltage of the pixel 10. Furthermore, in this modification, the n-type semiconductor region 101 does not have a pointed shape, thereby alleviating electric field concentration at the tip.

[0110] <<10. Ninth Embodiment>> <10.1 Detailed configuration> Next, with reference to Figures 27 and 28, a detailed cross-sectional configuration of a pixel 10 according to a ninth embodiment of the present disclosure will be described. Figure 27 is a schematic cross-sectional view illustrating an example of a detailed configuration of a pixel 10 according to this embodiment, and Figure 28 is a schematic plan view illustrating an example of a detailed configuration of a pixel 10 according to this embodiment. In the seventh embodiment described above, an isolation oxide film 112 was provided on the surface side of the semiconductor substrate 100 of the hole accumulation region 104 where the anode electrode 120 is not provided. However, in this embodiment, as in the third embodiment, an isolation oxide film (second oxide film) 112a may be provided on the surface side of the semiconductor substrate 100 of the hole accumulation region 104 where the anode electrode 120 is provided.

[0111] 27 and 28, in this embodiment, an isolation oxide film (second oxide film) 112a having an STI structure is provided on the surface (surface opposite to the light-receiving surface) of the semiconductor substrate 100 of the hole accumulation region 104, in which the anode electrode 120 is provided, the surface being an oxide film (e.g., a silicon oxide film) embedded in a trench provided near the surface of the semiconductor substrate 100. Similar to the isolation oxide film 112 described above, the depth of the isolation oxide film 112a is preferably approximately equal to the depth of the n-type semiconductor region 101 forming the avalanche multiplication region in terms of improving the breakdown voltage, and is preferably located above the position of the p-type semiconductor region 102 forming the avalanche multiplication region in terms of suppressing the generation of dark current. In this embodiment, the provision of such an isolation oxide film 112a can suppress the occurrence of crosstalk (color mixing) between pixels 10. Furthermore, in this embodiment, by providing such an isolation oxide film 112a, it is possible to prevent impurities having p-type conductivity contained in the hole accumulation region 104 from being present in the vicinity of the n-type semiconductor region 101, thereby alleviating electric field concentration and preventing a decrease in the breakdown voltage of the pixel 10.

[0112] <10.2 Variations> Next, modifications of this embodiment will be described with reference to Fig. 29 to Fig. 31. Fig. 29 is a schematic plan view showing an example of a detailed configuration of a pixel 10 according to Modification 1 of this embodiment, Fig. 30 is a schematic plan view showing an example of a detailed configuration of a pixel 10 according to Modification 2 of this embodiment, and Fig. 31 is a schematic plan view showing an example of a detailed configuration of a pixel 10 according to Modification 3 of this embodiment.

[0113] (Variation 1) 29, in this first modification, similarly to the modification of the first embodiment, the high-concentration p-type semiconductor regions 104a connected to the anode electrode 120 may be provided only at the four corners of a pixel group consisting of 16 pixels 10 in a 4×4 array. In this way, in this modification, the distance between the n-type semiconductor region 101 forming the avalanche multiplication region and the high-concentration p-type semiconductor region 104a is increased, and electric field concentration can be alleviated, thereby more effectively preventing the withstand voltage of the pixels 10 from decreasing.

[0114] (Variation 2) In this second modification, as shown in Fig. 30, in a pixel group consisting of 16 pixels 10 in a 4x4 arrangement, the n-type semiconductor region 101 in the pixels 10 located at the four corners of the pixel group may have a substantially rectangular shape with rounded corners at the corners closest to the high-concentration p-type semiconductor region 104a connected to the anode electrode 120. By doing so, the distance between the n-type semiconductor region 101 forming the avalanche multiplication region and the high-concentration p-type semiconductor region 104a is increased, thereby alleviating electric field concentration and preventing a decrease in the breakdown voltage of the pixel 10. Furthermore, in this modification, the n-type semiconductor region 101 no longer has a pointed shape, thereby alleviating electric field concentration at the tip.

[0115] (Variation 3) 31 , in the pixel group consisting of 16 pixels 10 in a 4×4 arrangement, the n-type semiconductor region 101 of the pixels 10 located at the four corners of the pixel group may be formed into a polygonal shape with chamfered corners near the high-concentration p-type semiconductor region 104a connected to the anode electrode 120. By doing so, the distance between the n-type semiconductor region 101 forming the avalanche multiplication region and the high-concentration p-type semiconductor region 104a becomes longer, thereby alleviating electric field concentration and preventing a decrease in the withstand voltage of the pixel 10.

[0116] <<11. Tenth Embodiment>> <11.1 Detailed configuration> Next, with reference to FIGS. 32 and 33 , a detailed cross-sectional configuration of a pixel 10 according to a tenth embodiment of the present disclosure will be described. FIG. 32 is a schematic cross-sectional view illustrating an example of a detailed configuration of a pixel 10 according to this embodiment, and FIG. 33 is a schematic plan view illustrating an example of a detailed configuration of a pixel 10 according to this embodiment. In this embodiment, as shown in FIGS. 32 and 33 , when ohmic contact of the hole accumulation region 104 is required on the back surface side of the semiconductor substrate 100, a contact portion 110a containing a high concentration of impurities having p-type conductivity may be provided in a region of the hole accumulation region 104 near the back surface side of the semiconductor substrate 100. More specifically, in this embodiment, as shown in FIG. 32 , the contact portion 110a is provided on the back surface (light-receiving surface) of the hole accumulation region 104 on which an isolation oxide film 112 is provided. Note that the depth of the contact portion 110a is not particularly limited, but it is preferable that the contact portion 110a be provided deeper into the semiconductor substrate 100 from the viewpoint of breakdown voltage.

[0117] <11.2 Variations> Next, a modification of this embodiment will be described with reference to Fig. 34. Fig. 34 is a plan view schematically illustrating an example of a detailed configuration of a pixel 10 according to this modification. In this modification, as shown in Fig. 34, a contact portion 110a may be provided on a part of the back surface (light-receiving surface) of the hole accumulation region 104 in which the isolation oxide film 112 is provided, that is, along the intersection portion of the pixel isolation portion 110 that was surrounded by four pixels 10 in the pixel group.

[0118] <<12. Eleventh Embodiment>> <12.1 Manufacturing method> Next, a method for manufacturing the pixel 10 according to this embodiment will be described with reference to Figures 35A to 35F. Figures 35A to 35F are schematic diagrams for explaining the method for manufacturing the pixel 10 according to this embodiment, and in detail, each diagram is a cross-sectional view corresponding to the schematic diagram of the cross-sectional configuration of the pixel 10 in Figure 7 at each stage in the manufacturing process.

[0119] For example, as shown in FIG. 35A, a semiconductor substrate 100 made of a silicon substrate is prepared. Next, as shown in FIG. 35B, impurities are ion-implanted into regions corresponding to the n-type semiconductor region 101, the high-concentration n-type semiconductor region 101a, the p-type semiconductor region 102, the hole accumulation region 104, and the high-concentration p-type semiconductor region 104a. In this embodiment, the order of ion implantation is not particularly limited, but it is preferable to implant the high-concentration n-type semiconductor region 101a and the high-concentration p-type semiconductor region 104a in the latter order, as this suppresses thermal diffusion. Furthermore, the hole accumulation region 104 is not limited to being formed by ion implantation, but can also be formed by solid-phase diffusion, induction by a fixed charge film, or the like.

[0120] 35C, a trench 112b for the isolation oxide film 112 is formed on the surface of the semiconductor substrate 100 between adjacent pixels 10. Then, as shown in FIG. 35D, an oxide film such as a silicon oxide film is buried in the trench 112b to form the isolation oxide film 112.

[0121] Next, as shown in Fig. 35E, a trench 110b is formed through the semiconductor substrate 100 to form the pixel separating section 110. Then, as shown in Fig. 35F, an oxide film such as a silicon oxide film is buried in the trench 110b to form the pixel separating section 110. In this manner, the pixel 10 according to the embodiment of the present disclosure can be obtained.

[0122] In this embodiment, the steps are not limited to the above-mentioned order, and the steps may be performed in the following order to suppress thermal diffusion for the high-concentration n-type semiconductor region 101a and the high-concentration p-type semiconductor region 104a. For example, impurities are implanted into regions corresponding to the n-type semiconductor region 101, the p-type semiconductor region 102, and the hole accumulation region 104 other than the high-concentration n-type semiconductor region 101a and the high-concentration p-type semiconductor region 104a, and then the isolation oxide film 112 and the pixel isolation portion 110 are formed. Next, impurities are ion-implanted into the regions corresponding to the high-concentration n-type semiconductor region 101a and the high-concentration p-type semiconductor region 104a.

[0123] Furthermore, in the case of a back-illuminated pixel 10, a step of bonding another semiconductor substrate (not shown) to the semiconductor substrate 100 is carried out between the steps shown in FIGS. 35E and 35F.

[0124] <12.2 Variations> Next, a method for manufacturing pixel 10 according to a modified example of this embodiment will be described with reference to Figures 36A to 36C. Figures 36A to 36C are schematic diagrams for explaining the method for manufacturing pixel 10 according to a modified example of this embodiment, and in detail, each diagram is a cross-sectional view corresponding to the schematic diagram of the cross-sectional configuration of pixel 10 in Figure 7 at each stage in the manufacturing process.

[0125] First, in this modification, the steps shown in FIGS. 35A to 35D, which have been described above, are carried out in order.

[0126] 36A, in order to form pixel separating portion 110, trench 110b is formed so as to penetrate semiconductor substrate 100 from the back surface to partway through, but not to penetrate the front surface of semiconductor substrate 100. That is, in this modification, a portion of semiconductor substrate 100 near the front surface side is left.

[0127] 36B, contact portion 110a is formed by thermally diffusing an impurity having p-type conductivity from a portion of the semiconductor substrate 100 near the surface side that was left in the previous step. In this modification, contact portion 110a may also be formed by ion-implanting an impurity having p-type conductivity into a portion of the semiconductor substrate 100 near the surface side that was left in the previous step.

[0128] 36C, an oxide film such as a silicon oxide film is then buried in the trench 110b to form the pixel separating section 110. In this manner, the pixel 10 according to this modified example can be obtained.

[0129] <<13. Summary>> As described above, according to the embodiment and modified examples of the present disclosure, the distance between the anode electrode 120 and the cathode electrode 121, in other words, the distance between the n-type semiconductor region 101 forming the avalanche multiplication region and the high-concentration p-type semiconductor region 104a, is increased. As a result, according to the present embodiment, electric field concentration can be alleviated, and a decrease in the breakdown voltage of the pixel 10 can be avoided. Furthermore, according to the present embodiment, even if the pixel size is reduced, the avalanche multiplication region formed in the junction region between the p-type semiconductor region 102 and the n-type semiconductor region 101 can be enlarged, thereby further improving the sensitivity of the pixel 10.

[0130] Furthermore, in the above-described embodiments of the present disclosure, the semiconductor substrate 100 does not necessarily have to be a silicon substrate, but may be another substrate (for example, an SOI (Silicon On Insulator) substrate, a SiGe substrate, etc.). Furthermore, the semiconductor substrate 100 may be one in which a semiconductor structure or the like is formed within such various substrates.

[0131] In the above-described embodiment of the present disclosure, the conductivity types of the semiconductor substrate 100 and the semiconductor regions may be reversed. For example, this embodiment can be applied to a pixel 10 that uses holes as signal charges. That is, in the above-described embodiment of the present disclosure, a pixel 10 is described that has a photodiode 20 in which the first conductivity type is p-type, the second conductivity type is n-type, and electrons are used as signal charges. However, the embodiments of the present disclosure are not limited to such an example. For example, this embodiment can be applied to a pixel 10 that has a photodiode 20 in which the first conductivity type is n-type, the second conductivity type is p-type, and holes are used as signal charges.

[0132] Furthermore, the pixel 10 according to the embodiment of the present disclosure is not limited to being applied to the light detection device 501 that is applied to the ranging system 611. For example, the pixel 10 according to the embodiment of the present disclosure may be applied to an imaging device that captures an image by detecting the distribution of the amount of incident visible light. Furthermore, for example, the present embodiment can be applied to an imaging device that captures an image by detecting the distribution of incident amounts of infrared rays, X-rays, particles, etc., or an imaging device (physical quantity distribution detection device) such as a fingerprint detection sensor that detects the distribution of other physical quantities such as pressure or capacitance and captures the image.

[0133] In the embodiments of the present disclosure, methods for forming the layers, films, and elements described above include, for example, physical vapor deposition (PVD) and chemical vapor deposition (CVD). PVD methods include vacuum deposition using resistance heating or high-frequency heating, electron beam (EB) deposition, various sputtering methods (magnetron sputtering, RF (Radio Frequency)-DC (Direct Current) coupled bias sputtering, ECR (Electron Cyclotron Resonance) sputtering, facing target sputtering, and high-frequency sputtering), ion plating, laser ablation, molecular beam epitaxy (MBE), and laser transfer. CVD methods include plasma CVD, thermal CVD, metal organic (MO) CVD, and photo-CVD. Other methods include electroplating, electroless plating, spin coating, dipping, casting, microcontact printing, drop casting, various printing methods such as screen printing, inkjet printing, offset printing, gravure printing, and flexographic printing, stamping, spraying, and various coating methods such as air doctor coater, blade coater, rod coater, knife coater, squeeze coater, reverse roll coater, transfer roll coater, gravure coater, kiss coater, cast coater, spray coater, slit orifice coater, and calendar coater. Furthermore, patterning methods for each layer include chemical etching such as shadow masking, laser transfer, and photolithography, and physical etching using ultraviolet light or lasers. Additionally, planarization techniques include chemical mechanical polishing (CMP), laser planarization, and reflow.That is, the pixel 10 according to the embodiment of the present disclosure can be manufactured easily and inexpensively using existing semiconductor device manufacturing processes.

[0134] Furthermore, the steps in the manufacturing method according to the embodiment of the present disclosure described above do not necessarily have to be performed in the order described. For example, the steps may be performed in a different order as appropriate. Furthermore, the method used in each step does not necessarily have to be performed in the order described, and other methods may be used.

[0135] <<14. Application Examples>> The above-described ranging system 611 can be applied to various electronic devices, such as a camera with a ranging function, a smartphone with a ranging function, and an industrial camera installed on a production line. Therefore, a configuration example of a smartphone 900 as an electronic device to which the present technology is applied will be described with reference to Fig. 37. Fig. 37 is a block diagram showing a configuration example of a smartphone 900 as an electronic device to which the ranging system 611 according to an embodiment of the present disclosure is applied.

[0136] 37, the smartphone 900 includes a CPU (Central Processing Unit) 901, a ROM (Read Only Memory) 902, and a RAM (Random Access Memory) 903. The smartphone 900 also includes a storage device 904, a communication module 905, and a sensor module 907. The smartphone 900 further includes the distance measurement system 611 described above, and also includes an image capture device 909, a display device 910, a speaker 911, a microphone 912, an input device 913, and a bus 914. The smartphone 900 may also include a processing circuit such as a DSP (Digital Signal Processor) instead of or in addition to the CPU 901.

[0137] The CPU 901 functions as an arithmetic processing device and a control device, and controls all or part of the operations of the smartphone 900 in accordance with various programs recorded in the ROM 902, the RAM 903, the storage device 904, or the like. The ROM 902 stores programs and calculation parameters used by the CPU 901. The RAM 903 temporarily stores programs used in the execution of the CPU 901 and parameters that change as appropriate during the execution. The CPU 901, the ROM 902, and the RAM 903 are interconnected by a bus 914. The storage device 904 is a data storage device configured as an example of a storage unit of the smartphone 900. The storage device 904 is configured, for example, by a magnetic storage device such as an HDD (Hard Disk Drive), a semiconductor storage device, an optical storage device, or the like. The storage device 904 stores the programs and various data executed by the CPU 901, as well as various data acquired from the outside.

[0138] The communication module 905 is, for example, a communication interface configured with a communication device for connecting to a communication network 906. The communication module 905 may be, for example, a communication card for a wired or wireless local area network (LAN), Bluetooth (registered trademark), or wireless USB (WUSB). The communication module 905 may also be a router for optical communication, a router for asymmetric digital subscriber line (ADSL), or a modem for various types of communication. The communication module 905 transmits and receives signals, for example, between the Internet and other communication devices using a predetermined protocol such as TCP / IP. The communication network 906 connected to the communication module 905 is a network connected by wire or wirelessly, for example, the Internet, a home LAN, infrared communication, or satellite communication.

[0139] The sensor module 907 includes various sensors such as a motion sensor (e.g., an acceleration sensor, a gyro sensor, a geomagnetic sensor, etc.), a biometric sensor (e.g., a pulse sensor, a blood pressure sensor, a fingerprint sensor, etc.), or a position sensor (e.g., a GNSS (Global Navigation Satellite System) receiver, etc.).

[0140] The distance measurement system 611 is provided on the surface of the smartphone 900, and can acquire, for example, the distance and three-dimensional shape of subjects 612 and 613 facing the surface as distance measurement results.

[0141] The imaging device 909 is provided on the surface of the smartphone 900 and can capture images of an object 800 or the like located around the smartphone 900. In particular, the imaging device 909 can be configured to include an imaging element (not shown) such as a CMOS (Complementary MOS) image sensor, and a signal processing circuit (not shown) that performs imaging signal processing on a signal photoelectrically converted by the imaging element. The imaging device 909 can further include an optical system mechanism (not shown) that includes an imaging lens, an aperture mechanism, a zoom lens, a focus lens, and the like, and a drive system mechanism (not shown) that controls the operation of the optical system mechanism. The imaging element collects incident light from the object 800 as an optical image, and the signal processing circuit photoelectrically converts the formed optical image on a pixel-by-pixel basis, reads out the signal of each pixel as an imaging signal, and performs image processing to obtain a captured image.

[0142] The display device 910 is provided on the surface of the smartphone 900, and can be, for example, a display device such as an LCD (Liquid Crystal Display) or an organic EL (Electro Luminescence) display. The display device 910 can display an operation screen, captured images acquired by the above-described imaging device 909, and the like.

[0143] The speaker 911 can output, for example, a call voice, a voice accompanying the nesting content displayed by the display device 910 described above, and the like to the user.

[0144] The microphone 912 can collect, for example, the user's call voice, voice including a command to activate a function of the smartphone 900, and voice from the surrounding environment of the smartphone 900.

[0145] The input device 913 is a device operated by a user, such as a button, a keyboard, a touch panel, or a mouse. The input device 913 includes an input control circuit that generates an input signal based on information input by the user and outputs the signal to the CPU 901. By operating the input device 913, the user can input various data to the smartphone 900 and instruct processing operations.

[0146] The above describes an example of the configuration of the smartphone 900. Each of the above components may be configured using general-purpose components, or may be configured using hardware specialized for the function of each component. Such a configuration may be changed as appropriate depending on the technical level at the time of implementation.

[0147] <<15. Supplementary Information>> Although the preferred embodiments of the present disclosure have been described in detail above with reference to the accompanying drawings, the technical scope of the present disclosure is not limited to such examples. It is clear that a person skilled in the art of the present disclosure can conceive of various modified or altered examples within the scope of the technical idea described in the claims, and it is understood that these also naturally fall within the technical scope of the present disclosure.

[0148] Furthermore, the effects described herein are merely descriptive or exemplary and are not limiting. In other words, the technology according to the present disclosure may achieve other effects that will be apparent to those skilled in the art from the description of this specification, in addition to or in place of the above-described effects.

[0149] The present technology can also be configured as follows. (1) A light receiving element provided in a semiconductor substrate and surrounded by a pixel separation wall, a photoelectric conversion unit provided in the semiconductor substrate, the photoelectric conversion unit generating charges in response to light incident on a light-receiving surface of the semiconductor substrate; a multiplication region that is provided on the opposite side of the photoelectric conversion unit from the light receiving surface and that amplifies the charge from the photoelectric conversion unit; a cathode portion provided on a surface of the multiplication region opposite to the light receiving surface; a hole accumulation region provided to cover the light receiving surface and an inner surface of the pixel separation wall; an anode portion provided on a part of a surface of the hole accumulation region that covers an inner surface of the pixel separation wall, the surface being opposite to the light receiving surface; Equipped with When the semiconductor substrate is viewed from above on the surface opposite to the light receiving surface, the multiplication region is provided such that a center point of the multiplication region is farther from the anode portion than a center point of the light receiving element; Photodetector. (2) The light-receiving element according to (1) above, further comprising an oxide film located on a portion of the surface of the hole accumulation region opposite the light-receiving surface where the anode portion is not provided. (3) a pixel group consisting of a plurality of pixels arranged in a matrix on a semiconductor substrate; a pixel separation wall surrounding each of the pixels and separating the pixels from each other; Equipped with Each pixel is a photoelectric conversion unit provided in the semiconductor substrate, the photoelectric conversion unit generating charges in response to light incident on a light-receiving surface of the semiconductor substrate; a multiplication region that is provided on the opposite side of the photoelectric conversion unit from the light receiving surface and that amplifies the charge from the photoelectric conversion unit; a cathode portion provided on a surface of the multiplication region opposite to the light receiving surface; a hole accumulation region provided to cover the light receiving surface and an inner surface of the pixel separation wall; an anode portion provided on a part of a surface of the hole accumulation region that covers an inner surface of the pixel separation wall surrounding the pixel group, the surface being opposite to the light receiving surface; and When the semiconductor substrate is viewed from above on the surface opposite to the light receiving surface, In at least one of the plurality of pixels included in the pixel group, The multiplication region is provided such that a center point of the multiplication region is closer to a center point of the pixel group than a center point of the corresponding pixel. Light detection device. (4) The photodetector according to (3) above, further comprising a first oxide film located on a portion of the surface of the hole accumulation region opposite the light-receiving surface where the anode portion is not provided. (5) The photodetector device according to (3) above, wherein the anode portion is provided on a surface of the hole accumulation region that covers one of the four corners of the pixel separation wall that surrounds the pixel group, opposite the light receiving surface. (6) The photodetector according to (4) above, further comprising a second oxide film provided on a surface of the anode portion opposite to the hole accumulation region. (7) The multiplication region is a first semiconductor region having a first conductivity type provided on the photoelectric conversion portion; a second semiconductor region provided on the first semiconductor region and having a second conductivity type opposite to the first conductivity type; The photodetector according to (6) above, (8) The photodetector according to (7) above, wherein the second semiconductor regions of the pixels in the pixel group are separated from each other by the first oxide film. (9) When the semiconductor substrate is viewed from above on the surface opposite to the light receiving surface, The photodetector according to (7) above, wherein the second semiconductor region is larger than the first semiconductor region. (10) When the semiconductor substrate is viewed from above on the surface opposite to the light receiving surface, The photodetector according to (7) above, wherein the first semiconductor region is larger than the second semiconductor region. (11) The photodetector according to any one of (3) to (10) above, wherein each of the pixels further includes a wiring made of a light-reflecting material provided above the cathode portion. (12) The photodetector according to (11), wherein the wiring of each pixel is electrically connected to one another. (13) When the semiconductor substrate is viewed from above on the surface opposite to the light receiving surface, The second semiconductor region is substantially rectangular. The photodetector according to any one of (7) to (10) above. (14) When the semiconductor substrate is viewed from above on the surface opposite to the light receiving surface, In at least one of the plurality of pixels included in the pixel group, One of the four corners of the second semiconductor region is rounded. The photodetector according to (13) above. (15) When the semiconductor substrate is viewed from above on the surface opposite to the light receiving surface, In at least one of the plurality of pixels included in the pixel group, one of the four corners of the second semiconductor region is chamfered; The photodetector according to (13) above. (16) When the semiconductor substrate is viewed from above on the surface opposite to the light receiving surface, The second semiconductor region is generally sector-shaped. The photodetector according to any one of (7) to (10) above. (17) The photodetector according to (4) above, further comprising a contact portion located on at least a part of the light-receiving surface of the hole accumulation region in which the first oxide film is provided. (18) an illumination device that emits irradiation light; a light detection device that receives reflected light of the irradiated light reflected by an object; Equipped with The photodetector device a pixel group consisting of a plurality of pixels arranged in a matrix on a semiconductor substrate; a pixel separation wall surrounding each of the pixels and separating the pixels from each other; and Each pixel is a photoelectric conversion unit provided in the semiconductor substrate, the photoelectric conversion unit generating charges in response to light incident on a light-receiving surface of the semiconductor substrate; a multiplication region that is provided on the opposite side of the photoelectric conversion unit from the light receiving surface and that amplifies the charge from the photoelectric conversion unit; a cathode portion provided on a surface of the multiplication region opposite to the light receiving surface; a hole accumulation region provided to cover the light receiving surface and an inner surface of the pixel separation wall; an anode portion provided on a part of a surface of the hole accumulation region that covers an inner surface of the pixel separation wall surrounding the pixel group, the surface being opposite to the light receiving surface; and When the semiconductor substrate is viewed from above on the surface opposite to the light receiving surface, In at least one of the plurality of pixels included in the pixel group, The multiplication region is provided such that a center point of the multiplication region is closer to a center point of the pixel group than a center point of the corresponding pixel. Ranging system. [Explanation of symbols]

[0150] 10 pixels 20 Photodiode 22 Constant current source 24 inverters 26 transistors 100 Semiconductor substrate 100a n-well region 101 n-type semiconductor region 101a Highly doped n-type semiconductor region 102 p-type semiconductor region 104 Hole accumulation region 104a Highly doped p-type semiconductor region 110 Pixel separation section 110a contact part 110b, 112b groove 112, 112a Isolation oxide film 120 Anode electrode 121 Cathode electrode 130 Wiring 501 Photodetector 511 Pixel driving unit 512 Pixel array section 513 MUX 514 Time Measurement Unit 515 Input / output section 522 pixel drive lines 611 Ranging System 612, 613 Subject 621 Lighting Equipment 622 Imaging device 631 Lighting control unit 632 light source 641 Imaging unit 642 Control Unit 643 Display section 644 Storage section 651 Lens 653 Signal Processing Circuit

Claims

1. a pixel group consisting of a plurality of pixels arranged in a matrix on a semiconductor substrate; a pixel separation wall surrounding each of the pixels and separating the pixels from each other; Equipped with Each pixel is a photoelectric conversion unit provided in the semiconductor substrate, the photoelectric conversion unit generating charges in response to light incident on a light-receiving surface of the semiconductor substrate; a multiplication region that is provided on the opposite side of the photoelectric conversion unit from the light receiving surface and that amplifies the charge from the photoelectric conversion unit; a cathode portion provided on a surface of the multiplication region opposite to the light receiving surface; a hole accumulation region provided to cover the light receiving surface and an inner surface of the pixel separation wall; an anode portion provided on a part of a surface of the hole accumulation region that covers an inner surface of the pixel separation wall surrounding the pixel group, the surface being opposite to the light receiving surface; and When the semiconductor substrate is viewed from above on the surface opposite to the light receiving surface, In at least one of the plurality of pixels included in the pixel group, the multiplication region is provided such that a center point of the multiplication region is closer to a center point of the pixel group than a center point of the corresponding pixel; a first oxide film is provided on a portion of the hole accumulation region opposite to the light-receiving surface, the portion not being provided with the anode portion; a second oxide film is provided on a surface of the anode portion opposite to the hole accumulation region; The multiplication region is a first semiconductor region having a first conductivity type provided on the photoelectric conversion portion; a second semiconductor region provided on the first semiconductor region and having a second conductivity type opposite to the first conductivity type; and When the semiconductor substrate is viewed from above on the surface opposite to the light receiving surface, the second semiconductor region is generally sector-shaped; The arc of the second semiconductor region having a substantially sector shape is a third semiconductor region having the first conductivity type and connected to the anode portion; Light detection device.

2. 2. The photodetector device according to claim 1, wherein the second semiconductor regions of the pixels in the pixel group are separated from each other by the first oxide film.

3. When the semiconductor substrate is viewed from above on the surface opposite to the light receiving surface, The photodetector device according to claim 1 , wherein the second semiconductor region is larger than the first semiconductor region.

4. When the semiconductor substrate is viewed from above on the surface opposite to the light receiving surface, The photodetector device according to claim 1 , wherein the first semiconductor region is larger than the second semiconductor region.

5. 5. The photodetector according to claim 1, wherein each of the pixels further includes a wiring made of a light-reflecting material and provided above the cathode portion.

6. The photodetector device according to claim 5 , wherein the wirings of the pixels are electrically connected to each other.

7. an illumination device that emits irradiation light; a light detection device that receives reflected light of the irradiated light reflected by an object; Equipped with The photodetector device a pixel group consisting of a plurality of pixels arranged in a matrix on a semiconductor substrate; a pixel separation wall surrounding each of the pixels and separating the pixels from each other; and Each pixel is a photoelectric conversion unit provided in the semiconductor substrate, the photoelectric conversion unit generating charges in response to light incident on a light-receiving surface of the semiconductor substrate; a multiplication region that is provided on the opposite side of the photoelectric conversion unit from the light receiving surface and that amplifies the charge from the photoelectric conversion unit; a cathode portion provided on a surface of the multiplication region opposite to the light receiving surface; a hole accumulation region provided to cover the light receiving surface and an inner surface of the pixel separation wall; an anode portion provided on a part of a surface of the hole accumulation region that covers an inner surface of the pixel separation wall surrounding the pixel group, the surface being opposite to the light receiving surface; and When the semiconductor substrate is viewed from above on the surface opposite to the light receiving surface, In at least one of the plurality of pixels included in the pixel group, the multiplication region is provided such that a center point of the multiplication region is closer to a center point of the pixel group than a center point of the corresponding pixel; a first oxide film is provided on a portion of the hole accumulation region opposite to the light-receiving surface, the portion not being provided with the anode portion; a second oxide film is provided on a surface of the anode portion opposite to the hole accumulation region; The multiplication region is a first semiconductor region having a first conductivity type provided on the photoelectric conversion portion; a second semiconductor region provided on the first semiconductor region and having a second conductivity type opposite to the first conductivity type; and When the semiconductor substrate is viewed from above on the surface opposite to the light receiving surface, the second semiconductor region is generally sector-shaped; The arc of the second semiconductor region having a substantially sector shape is a third semiconductor region having the first conductivity type and connected to the anode portion; Ranging system.

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