Current introduction terminal, connection terminal, vacuum heat treatment device and control method thereof

Abstract

The current introduction terminal for supplying current to the heating section of the vacuum heat treatment apparatus is prone to becoming hot, posing a safety problem. [Solution] Provided is a conductive connection terminal connected to a current introduction terminal used in a vacuum heat treatment apparatus, the connection terminal being connected to the current introduction terminal on at least one of the vacuum side and the atmosphere side of a vacuum chamber. The connection terminal has a cylindrical first through hole into which an electrode portion of the current introduction terminal is inserted and is divided into two by a slit parallel to the first through hole. The connection terminal also has a cylindrical second through hole formed between the first through hole and one longitudinal end face of the connection terminal, in a direction perpendicular to the first through hole, for inserting a fixing means for fixing the electrode portion therethrough, and a cylindrical third through hole formed between the first through hole and the other end face of the connection terminal, in a direction perpendicular to the first through hole, for inserting a means for connecting a current supply terminal leading to a heating unit or a power supply unit therethrough.

Description

[Technical Field]

[0001] The present invention relates to a current introduction terminal, a connection terminal, a vacuum heat treatment apparatus, and a control method thereof. [Background technology]

[0002] In vacuum heat treatment apparatuses used for forming various thin films, a heating unit for heating is installed inside a vacuum chamber (see, for example, Patent Document 1). This heating unit is configured to generate heat by current supplied from outside the vacuum chamber. In order to supply current to the heating unit inside the vacuum chamber, a current introduction terminal is attached to the vacuum chamber, which electrically connects the outside of the vacuum chamber with the inside of the vacuum chamber while maintaining the vacuum state. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2012 / 121237 Summary of the Invention [Problem to be solved by the invention]

[0004] 9 and 10, a conventional current input terminal used in a vacuum heat treatment apparatus has a crimp terminal 248 connected to a current wire 242 passed through threads 216 provided on an electrode portion 212 of current input terminal 210, and fastened and fixed using a nut 252 such as a double nut, a flat washer 256, and a spring washer 257. Outside the vacuum chamber, i.e., on the atmosphere side RM, a power source is connected to current wire 242 of current input terminal 210, and inside the vacuum chamber, a heating unit is connected to current wire 242. While FIGS. 9 and 10 show the connection between current input terminal 210 and current wire 242 inside the vacuum chamber (i.e., on the vacuum side VC), the same is basically true for the atmosphere side RM.

[0005] 9 and 10, the direction of the current line 242 is the positive X-axis direction, the longitudinal direction of the current introducing terminal 210 toward the outside of the vacuum chamber, i.e., the atmosphere side RM, is the positive Z-axis direction, and the direction perpendicular to these is the Y-axis direction, and the coordinate system is shown as a left-handed system.

[0006] In such a conventional method, the number of components used for connection is large, and therefore contact resistance cannot be sufficiently reduced.

[0007] In the vacuum heat treatment apparatus 201, a large number of current input terminals 210 are attached to generate heat in the heating section. A large current of 50 A to 100 A flows through these terminals, and the current input terminals 210 are constantly in a high temperature state exceeding 100°C. This thermal stress causes loosening of the fastened fixing parts, which causes a problem of increased contact resistance.

[0008] The increase in contact resistance causes unnecessary heat generation near the fastened portion of current input terminal 210, and the resulting thermal expansion again loosens the connection between current wire 242 and current input terminal 210. This causes a vicious cycle in which the contact resistance increases further and the amount of unnecessary heat generation increases.

[0009] This vicious cycle could ultimately result in damage or destruction to the current input terminal 210, the fastening and fixing parts such as the nut 252 and flat washer 256, the crimp terminal 248, and the current wire 242, which could in some cases lead to a human accident.

[0010] The present invention has been made to solve the above-mentioned conventional technical problems, and aims to provide a connection terminal that reduces the contact resistance between a current introduction terminal and a current wire in a vacuum heat treatment device, thereby enabling connection while suppressing heat generation. [Means for solving the problem]

[0011] In order to solve such problems, the present invention has the following configuration. A connection terminal to be connected to a current introduction terminal used in a vacuum heat treatment apparatus, the connection terminal being connected to the current introduction terminal on at least one of the vacuum side and the atmosphere side of a vacuum chamber, the connection terminal connected to the vacuum side being connected to a heating unit built into the vacuum heat treatment apparatus, the connection terminal connected to the atmosphere side being connected to a power supply unit arranged on the atmosphere side, the connection terminal being formed from a solid rectangular parallelepiped conductor, the connection terminal having a cylindrical first through hole into which an electrode part of the current introduction terminal is inserted, and the connection terminal having a slit parallel to the first through hole. The connection terminal is divided into two by a slit that extends from one end face in the longitudinal direction of the connection terminal to at least the first through hole, and the connection terminal has a cylindrical second through hole formed in it between the first through hole and the one end face, in a direction perpendicular to the first through hole, for inserting a fixing means that fixes the electrode portion, and a cylindrical third through hole formed between the first through hole and the other end face in the longitudinal direction of the connection terminal, in a direction perpendicular to the first through hole, for inserting a connecting means that connects a current supply terminal to a heating portion or a power source portion. [Effects of the Invention]

[0012] According to the present invention having such characteristics, it is possible to connect the current introduction terminal and the current wire in the vacuum heat treatment apparatus while suppressing heat generation. [Brief explanation of the drawings]

[0013] [Figure 1] 1 is an overall configuration diagram of a vacuum heat treatment apparatus according to a first embodiment of the present invention. [Figure 2] 1 is a side view showing the overall configuration of a current introduction terminal according to a first embodiment of the present invention. [Figure 3] 1 is a perspective view of a connection terminal according to a first embodiment of the present invention. [Figure 4] 3 is a bottom view showing a connected state of the connection terminal according to the first embodiment of the present invention. FIG. [Figure 5] 3 is a top view showing a connection state of a plurality of atmosphere-side connection terminals according to the first embodiment of the present invention. FIG. [Figure 6]3 is a side view showing a connection state of a plurality of connection terminals on the vacuum side according to the first embodiment of the present invention. FIG. [Figure 7] FIG. 10 is an overall configuration diagram of a vacuum heat treatment apparatus according to a second embodiment of the present invention. [Figure 8] FIG. 10 is a perspective view of a connection terminal according to a second embodiment of the present invention. [Figure 9] FIG. 10 is a side view showing a connection state between a conventional current introduction terminal and a current line. [Figure 10] FIG. 10 is a bottom view showing a connection state between a conventional current input terminal and a current line. DETAILED DESCRIPTION OF THE INVENTION

[0014] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Each drawing illustrates an embodiment of the present invention and is not intended to limit the present invention. In the following description, the same reference numerals in different drawings indicate parts with the same function, and duplicated explanations in each drawing will be omitted as appropriate. In the drawings, the dimensional relationship between elements is intended to facilitate understanding and is not intended to limit the actual dimensional ratio.

[0015] (Embodiment 1) A first embodiment of a connection terminal 20 according to the present invention will be described with reference to Figures 1 to 6. In the description of the present invention, the inside of the vacuum chamber 5 will be referred to as the vacuum side VC, and the outside will be referred to as the atmosphere side RM.

[0016] Vacuum heat treatment apparatus 1 according to embodiment 1 of the present invention is an apparatus used for forming various thin films, and as shown in Figure 1, is mainly composed of a control unit 2, a power supply unit 3, a vacuum chamber 5, and an input / output unit 9. Multiple heating units 6 are disposed within vacuum chamber 5, and these heating units 6 are heated by current supplied from power supply unit 3 via thyristors 4 and current introduction terminals 10. Current introduction terminals 10 are attached to flange 40 of vacuum chamber 5, and electrically connect atmosphere side RM and vacuum side VC while maintaining the vacuum in vacuum chamber 5.

[0017] The current introduction terminal 10 has connection terminals 20 connected to the atmosphere side RM and the vacuum side VC (see Figure 2), and current is supplied to the heating section 6 via these connection terminals 20, details of which will be described later.

[0018] A heating part temperature measuring means (not shown) is attached to the heating part 6, and the measured temperature data of the heating part 6 is passed through a signal line 7a and input to the control part 2 installed in the atmosphere side RM via a signal line feedthrough (not shown) and a converter 8a including an analog-digital converter, etc.

[0019] The input / output unit 9 includes an input unit 9a including a known keyboard, touch panel, etc., through which an operator can input control commands, etc., and an output unit 9b including a monitor, warning lights, warning sound generating means, etc.

[0020] The control unit 2 is responsible for overall control of the vacuum heat treatment apparatus 1. For example, it controls various means (not shown) related to thin film formation, as well as controls the display of temperature data of the heating unit 6 on the output unit 9b and the issuance of an alarm from the output unit 9b when the temperature data is an abnormal value. Furthermore, the control unit 2 adjusts the amount of power supplied from the power supply unit 3 to the heating unit 6 based on the temperature data of the heating unit 6.

[0021] The current introduction terminal 10 according to this embodiment will be described with reference to Fig. 2. Fig. 2 shows the overall configuration of the current introduction terminal 10 and discloses its relationship with the flange 40. For convenience of explanation, the vacuum chamber 5 and other components are omitted from Fig. 2. The longitudinal direction of the connection terminal 20 is the X-axis, the atmospheric side RM of the longitudinal direction of the current introduction terminal 10 is the Z-axis positive direction, and the direction perpendicular to these is the Y-axis, with the coordinate system being a left-handed system. Unless otherwise specified, this also applies to subsequent figures.

[0022] The current introduction terminal 10 is a terminal attached to the vacuum chamber 5 via a flange 40 and has the function of electrically connecting the vacuum side VC inside the vacuum chamber 5 and the atmosphere side RM outside the vacuum chamber 5 . The current introduction terminal 10 is formed in a cylindrical shape having a predetermined length (for example, 50 mm to 200 mm), and is composed of an electrode portion 12 and a housing portion 14.

[0023] The electrode part 12 is a cylindrical conductor extending in the longitudinal direction of the current introduction terminal 10, and serves as a path for supplying current from a power source installed in the atmosphere side RM to the heating part 6 installed in the vacuum side VC. The electrode part 12 is made of a material such as oxygen-free copper, a highly thermally conductive material, or a highly conductive material that has been nickel-plated.

[0024] The housing portion 14 is formed from an insulator and is connected to the flange 40. Therefore, the electrode portion 12 and the flange 40 are electrically insulated by the housing portion 14. The housing portion 14 is formed in a cylindrical shape that locally covers a predetermined range of the electrode portion 12 extending in the longitudinal direction. The electrode portion 12 is exposed on both sides of the housing portion 14 in the Z-axis direction, and a connection terminal 20 is connected to each of these exposed portions.

[0025] In addition, the housing portion 14 and the flange 40, and the housing portion 14 and the electrode portion 12 are sealed with a sealing metal such as an Fe-Ni-Co alloy to prevent vacuum leakage from the vacuum chamber 5.

[0026] Ceramic or glass, for example, is used as the material for the housing portion 14. In particular, alumina ceramic, which is mainly composed of alumina (Al2O3), is preferable in terms of heat resistance, mechanical strength, high frequency characteristics, electrical insulation, and the like.

[0027] The glass used for the housing portion 14 may be borosilicate glass or lead glass. The flange 40 and the vacuum chamber 5 are made of austenitic stainless steel such as SUS304 or SUS316L, and are fixed together by welding or screws.

[0028] The connection terminal 20 is a terminal connected to the current introduction terminal 10 used to introduce a large current into the vacuum chamber 5, as in the case of a vacuum heat treatment apparatus 1 having a built-in heating unit 6, and is attached to two locations per current introduction terminal 10: the electrode portion 12a of the atmosphere-side RM and the electrode portion 12b of the vacuum-side VC. The connection terminal 20 attached to the electrode portion 12a of the atmosphere-side RM is used to connect to a power source provided outside the vacuum chamber 5. On the other hand, the connection terminal 20 attached to the electrode portion 12b of the vacuum-side VC is used to connect to the heating unit 6 provided inside the vacuum chamber 5.

[0029] The connection terminal 20 does not necessarily have to be attached to two locations on one current introducing terminal 10, and may be configured to be attached, for example, only to the electrode portion 12a of the atmosphere side RM or only to the electrode portion 12b of the vacuum side VC. The connection terminal 20 connected to the atmosphere side RM and the connection terminal 20 connected to the vacuum side VC basically have the same structure.

[0030] As shown in FIG. 3, the connection terminal 20 according to the present invention is formed of a solid rectangular parallelepiped conductor, and is made of, for example, oxygen-free copper with nickel plating.

[0031] A first through-hole 22 for inserting the current introducing terminal 10 is formed in the approximate center of the connection terminal 20. The current introducing terminal 10 inserted into the first through-hole 22 is fixed to the connection terminal 20 by fixing means 50, which will be described later.

[0032] The first through-hole 22 is formed in a cylindrical shape with a diameter that is the same as or 10% larger than the diameter of the electrode portion 12 of the current introducing terminal 10. In order to distribute stress with the current introducing terminal 10, tapers 30 are formed on both end faces of the cylindrical first through-hole 22.

[0033] The connection terminal 20 has a slit 28 formed therein, which extends from one end face of the connection terminal 20 in the longitudinal direction (the end face in the positive X-axis direction in FIG. 3) to at least the first through-hole 22 and is opened parallel to the first through-hole 22. The slit 28 divides the connection terminal 20 in half in the direction perpendicular to the slit 28 (the Y direction).

[0034] A cylindrical second through hole 24 is formed in the connection terminal 20 between the first through hole 22 and one end surface where the slit 28 is formed, penetrating the connection terminal 20 in a direction perpendicular to the first through hole 22. As shown in Fig. 4, a bolt 54a, for example, is inserted into this second through hole 24 in order to closely fix the electrode portion 12 of the current introducing terminal 10 to the connection terminal 20, and the second through hole 24 is fastened with a nut 52a and, if necessary, a spring washer 57a or a flat washer (not shown). The bolt 54a, nut 52a, and, if necessary, the spring washer 57a or the flat washer constitute the fixing means 50 of the present invention.

[0035] By fastening this fixing means 50, the portion of the connection terminal 20 divided into two by the slit 28 is elastically deformed, and the current introducing terminal 10 inserted into the first through-hole 22 is tightly sandwiched by the connection terminal 20. In this way, the current introducing terminal 10 and the connection terminal 20 are firmly fixed together.

[0036] Furthermore, the contact surfaces between the first through-hole 22 and the electrode portion 12 of the current introducing terminal 10 are formed smooth, allowing the two to come into close contact with each other, thereby reducing the contact resistance between them.

[0037] Thus, one of the features of the present invention is that whereas conventionally, threads 216 were provided on current input terminal 210 and connection to current wire 242 of the vacuum-side VC was performed directly, connection is performed using second through-hole 24 of connection terminal 20. As a result, threads 216 on current input terminal 210, which had been a cause of contact failure, are no longer necessary, and contact resistance can be significantly reduced.

[0038] Next, the connection to the current wire 42 will be described using the connection to the connection terminal 20 of the vacuum side VC as an example. The connection terminal 20 has a cylindrical third through hole 26 formed between the first through hole 22 and the other longitudinal end face of the connection terminal 20 (the end face in the negative X-axis direction in Figure 3), in a direction perpendicular to the first through hole 22, through which a connection means 58 for connecting a current supply terminal 44 to the heating section 6 is inserted.

[0039] The connecting means 58 is made up of a bolt 54b and a nut 52b, and a flat washer and a spring washer 57b may also be used as required. FIG. 4 is a bottom view showing the connection state of the connection terminal of the vacuum side VC. As shown in the figure, a bolt 54b is passed through the third through-hole 26, and a current supply terminal 44 such as a crimp terminal for connecting a current wire 42 to the heating unit 6 is connected by using a nut 52b and, if necessary, a flat washer and a spring washer 57b.

[0040] Conventionally, a screw thread 216 is formed on the electrode portion 212 of the current introducing terminal 210, and the crimp terminal 248 is fastened to the heating portion 6 using the screw thread 216 with a nut 252 or the like. However, since the electrode portion 212 has low mechanical strength and is easily deformed, it was not possible to fasten the nut 252 sufficiently.

[0041] In contrast, the connection terminal 20 of the present invention that connects the current supply terminal 44 to the heating unit 6 uses the connection means 58, and therefore can withstand the tightening force of the bolt 54b and nut 52b. For example, an M5 screw generally requires a tightening torque of about 2.5 N m, but the nickel-plated connection terminal 20 of the present invention is hard and can withstand this without any problems. The effect of forming the connection terminal 20 from a hard material is not limited to the connection means 58, but the same effect is also achieved in the fixing means 50.

[0042] As described above, while conventionally the current supply terminal 244 and the current input terminal 210 are connected to the heating unit 6 at a single location, the present invention uses the connection terminal 20 to separate the connection portion with the current input terminal 10 from the connection portion with the current supply terminal 44. By using the connection terminal 20 configured in this manner, it is possible to increase the tightening force and reduce contact resistance compared to conventional methods. Furthermore, the number of components at the contact portion between the current input terminal 10 and the connection terminal 20 is reduced, thereby reducing contact resistance and variations in contact resistance caused by different operators. Furthermore, it is possible to prevent loosening due to heat. Therefore, even when a current is passed through the current input terminal 10, it is possible to prevent unnecessary heat generation around the current input terminal 10.

[0043] One connection terminal 20 is connected to the atmosphere side RM and one to the vacuum side VC to one current introducing terminal 10. Since the connection terminal 20 has a predetermined size, the connection terminal 20 connected to the atmosphere side RM also functions as a heat dissipation material.

[0044] Incidentally, a plurality of (for example, four) current introduction terminals 10 are often arranged in one location.

[0045] On the other hand, to reduce the load on the current wire 42 when it is bent, the bending radius is usually required to be 8D or more (D is the outer diameter of the current wire 42) for a single-core wire and 4D or more for a multi-core wire, although this differs depending on the coating material of the wire.

[0046] Therefore, in areas where the connection terminals 20 are densely packed, there is a risk of the current lines 42 interfering with each other.

[0047] However, this problem can be solved by arranging the current input terminal 10 in one of the following ways.

[0048] In the first method, the connection terminals 20 are attached at an angle that prevents them from interfering with each other.

[0049] 5 is a top view of the atmosphere-side surface RM of the flange 40, showing a case in which four current input terminals 10 are attached to one location (i.e., the same flange 40). Here, the connection terminals 20 are attached to the current input terminals 10 such that, with a line LN that bisects the flange 40 as the boundary, the longitudinal direction (X-axis direction) of the connection terminal 20 on one side is at an angle of 30 to 60 degrees, preferably 40 to 50 degrees, with respect to the line LN, and the longitudinal direction (X-axis direction) of the connection terminal 20 on the other side is at an angle of −30 to −60 degrees, preferably −40 to −50 degrees, with respect to the line LN, in a direction rotated on a horizontal plane (XY plane). By setting the attachment angles in this way, it becomes possible to prevent the connection terminals 20 from interfering with each other.

[0050] In the second method, the connection terminal 20 is attached to the current introduction terminal 10 at a position where they do not interfere with each other.

[0051] That is, the mounting positions of the connection terminals 20 from the flange 40 are changed depending on the current input terminals 10. For example, Fig. 6 is a side view showing two current input terminals 10 provided on the vacuum side VC, with the current input terminal 10 on the left side of the figure being provided closer to the flange 40 than the current input terminal 10 on the right side of the figure. By providing a step in the mounting positions of the connection terminals 20 in the longitudinal direction of the current input terminals 10 in this way, interference between the connection terminals 20 is prevented.

[0052] Moreover, interference between the connection terminals 20 may be prevented by combining the first and second methods, or different arrangements may be used for the atmosphere side RM and the vacuum side VC. Furthermore, with regard to the connection terminals 20 on the atmosphere side, by arranging the connection terminals 20 in a certain order in this manner, it is possible to enhance the heat dissipation effect. The third through-hole 26 of the connection terminal 20, to which the current wire 42 is attached, is provided in a direction perpendicular to the current introduction terminal 10, and therefore, as shown in Figures 5 and 6, mutual interference is avoided and the current wire 42 can be easily connected in a maneuverable manner.

[0053] (Embodiment 2) Next, a second embodiment of the connection terminal 120 according to the present invention will be described with reference to FIGS. Note that connection terminal 120 according to the second embodiment is the same as connection terminal 20 according to the first embodiment, except that it includes connection terminal temperature measuring means 132, and is connected to current input terminal 10 for use. In vacuum heat treatment apparatus 101 according to the second embodiment of the present invention, temperature data measured by connection terminal temperature measuring means 132 passes through signal line 7b and is input to control unit 2, which is installed in the atmosphere-side RM, via converter 8b, which includes an analog-to-digital converter, etc. The temperature data measured by connection terminal temperature measuring means 132 roughly indicates the temperature of current input terminal 10, and can be used to detect abnormalities in current input terminal 10. The following mainly describes connection terminal temperature measuring means 132.

[0054] By using the connection terminal 120 of the second embodiment, it is possible to grasp the temperature state of the connection terminal 120, and therefore the temperature state of the current introducing terminal 10. The connection terminal temperature measuring means 132 can be disposed on any surface of the connection terminal 120, but it is preferable for accurate temperature measurement to dispose it on a portion where the slit 28 and the first through-hole 22 to the third through-hole 26 are not formed. In particular, the portion between the second through-hole 24 and the third through-hole 26 on the surface of the connection terminal 120 parallel to the first through-hole 22 and perpendicular to the second through-hole 24 (one of the XZ end faces in FIG. 8 ) is close to the connection point between the current introducing terminal 10 and the connection terminal 120, so it is more preferable to dispose the connection terminal temperature measuring means 132 in this portion.

[0055] The connection terminal 120 has a predetermined size and surface, making it suitable for arranging the connection terminal temperature measuring means 132. For example, it is possible to provide a fastening means (screw holes, etc.). In addition, the shape may be changed as needed to accommodate the connection terminal temperature measuring means 132.

[0056] The connection terminal temperature measuring means 132 may be any means capable of measuring temperatures between 50°C and 200°C, or at least between 100°C and 180°C, and any means may be used, such as a known temperature sensor or thermocouple.

[0057] One current introducing terminal 10 may be connected to one connection terminal 120 each on the atmosphere side RM and the vacuum side VC, or may be connected to only one of the atmosphere side RM or the vacuum side VC. Similarly, the connection terminal temperature measuring means 132 may be provided on at least one of the connection terminals. However, since temperature sensors that operate stably on the atmosphere side RM are common and the signal line 7b from the connection terminal temperature measuring means 132 is introduced to the control unit 2 provided on the atmosphere side RM, it is preferable to provide the connection terminal temperature measuring means 132 on the connection terminal 120 provided on the atmosphere side RM.

[0058] The temperature data measured by the connection terminal temperature measuring means 132 is transmitted to the control unit 2 constituting the vacuum heat treatment apparatus 101 via the signal line 7b connected to the connection terminal temperature measuring means 132. The control unit 2 displays the temperature data on an appropriate output unit 9b provided in the vacuum heat treatment apparatus 101 so that the operator can see it, thereby making it possible to manage unexpected heat generation states of the current input terminal 10.

[0059] Alternatively, a threshold value based on the safe operating temperature of the current input terminal 10 may be set in advance, and the temperature data may be successively compared with this threshold value, and if the temperature data exceeds this threshold value, an alarm may be issued from the output unit 9b.

[0060] Alternatively, a preventive value comparison unit may be added to the control unit 2 to compare the temperature data with a preventive value that is a predetermined value (for example, 10°C or 20°C) lower than the threshold value, and if temperature data that exceeds this preventive value is measured three times, a preventive alarm may be issued from the output unit 9b.

[0061] Furthermore, when the temperature data exceeds a threshold value, the current supplied to the heating unit 6 may be reduced, or the vacuum heat treatment apparatus 101 may be shut down to stop the supply of current.

[0062] These alarms, reduction in the amount of current supplied to the heating unit 6, and system shutdown are executed by the control unit 2 provided in the vacuum heat treatment apparatus 101. The control unit 2 and output unit 109b are installed in the atmosphere side RM.

[0063] As described above, by providing the connection terminal temperature measuring means 132 in the connection terminal 120, it is possible to manage unexpected heat generation states of the current input terminal 10, and if necessary, it is possible to improve the safety of the device by issuing an alarm, reducing the amount of current supplied to the heating section 6, or shutting down the system.

[0064] Furthermore, as shown in Figures 5 and 6, when multiple (for example, four) current introduction terminals 10 are arranged in one location, the connection terminals 120 connected to the multiple current introduction terminals 10 arranged in the same location may be connected to each other as a group using a highly thermally conductive and insulating strip-shaped member, and at least one of the multiple connection terminals 120 in the same group may be provided with a connection terminal temperature measuring means 132, thereby managing the temperature of the current introduction terminals 10.

[0065] By doing so, the number of signal lines 7b from the connection terminal temperature measuring means 132 can be reduced.

[0066] As a highly thermally conductive and insulating member for connecting the connection terminals 120 of the same group, a material with a thermal conductivity of 100 W / m·K or more is preferable, such as aluminum nitride, boron nitride, or beryllium oxide.

[0067] The embodiments of the present invention have been described in detail above with reference to the drawings, but the specific configuration is not limited to the above-described embodiments, and the present invention also includes design changes and the like that do not deviate from the gist of the present invention. [Explanation of symbols]

[0068] 1, 101, 201: vacuum heat treatment device, 2: control unit, 3: power supply unit, 4: Thyristor, 5: Vacuum chamber, 6: Heating unit, 7a, 7b: Signal lines, 8a, 8b: converter, 9: input / output unit, 9a: input unit, 9b: output unit, 10,210: Current introduction terminal, 12,12a,12b,212: Electrode part, 14: Housing portion; 20, 120: Connection terminal; 22: First through hole; 24: second through hole, 26: third through hole, 28: slit, 30: taper, 40: flange, 42, 242: current wire, 44, 244: current supply terminal, 50: fixing means, 52a, 52b, 52: nuts, 54a, 54b: bolts, 57a, 57b, 257: Spring washer, 58: Connection means, 132: Connection terminal temperature measuring means, 216: Screw thread, 248: Crimp terminal, 256: Flat washer, RM: Atmospheric side, VC: Vacuum side, LN: Wire

Claims

1. A connection terminal to be connected to a current introduction terminal used in a vacuum heat treatment apparatus, the connection terminal comprises a pair of connection terminals connected to the current introduction terminal on the vacuum side and the atmosphere side of the vacuum chamber, the connection terminal connected to the vacuum side is connected to a heating unit built into the vacuum heat treatment device, the connection terminal connected to the atmosphere side is connected to a power supply unit disposed on the atmosphere side, the connection terminal is formed from a solid rectangular parallelepiped conductor, the connection terminal has a cylindrical first through-hole into which the electrode portion of the current introducing terminal is inserted, the connection terminal is divided into two by a slit parallel to the first through hole, the slit extending from one end face of the connection terminal in a longitudinal direction to at least the first through hole, The connection terminal has a cylindrical second through hole formed between the first through hole and the one end surface, in a direction perpendicular to the first through hole, for inserting a fixing means for fixing the electrode portion therethrough; a cylindrical third through hole is formed between the first through hole and the other end face of the connection terminal in the longitudinal direction, in a direction perpendicular to the first through hole, for inserting a connection means for connecting a current supply terminal leading to the heating unit or the power supply unit; a temperature measuring means for measuring a temperature of the connection terminal is disposed on a surface of the connection terminal connected to the atmosphere side, the surface being in a region where the slit and the first to third through holes are not formed; A connection terminal characterized by:

2. the contact surfaces of the first through hole and the electrode portion are formed to be smooth with respect to each other; the fixing means inserted into the second through-hole causes the two divided portions of the connection terminal to be elastically deformed, and the electrode portion is tightly sandwiched in the first through-hole; The connection terminal according to claim 1 .

3. the connection terminal is harder than the electrode portion of the current introducing terminal; 3. The connection terminal according to claim 1 or 2.

4. The fixing means and the connecting means are composed of bolts and nuts. The connection terminal according to claim 1 .

5. forming an end surface of the first through hole in a tapered shape; The connection terminal according to claim 1 .

6. A current introduction terminal to which the connection terminal according to claim 1 is connected.

7. A vacuum heat treatment apparatus comprising the connection terminal according to claim 1, The connection terminals are arranged at an installation angle and / or at an installation position that do not interfere with each other. A vacuum heat treatment apparatus characterized by:

8. 10. A vacuum heat treatment apparatus comprising: a control unit and an output unit disposed on the atmosphere side; the current introduction terminal; the connection terminal according to claim 1; and the heating unit, the heating unit is electrically connected to the power supply unit via the current introduction terminal, the control unit executes at least one of issuing an alarm from the output unit and stopping the supply of current to the heating unit based on the temperature data obtained by the temperature measuring means disposed in the connection terminal. A vacuum heat treatment apparatus characterized by:

9. A vacuum heat treatment apparatus comprising the current introduction terminal, the connection terminal according to claim 1, and the heating unit, the current introduction terminals form a group consisting of a plurality of the current introduction terminals, the connection terminals to which the plurality of current introduction terminals constituting the same group are connected are connected to each other by a highly thermally conductive and insulating member on at least one of the atmosphere side and the vacuum side, the temperature measuring means is disposed in at least one of the plurality of connected connection terminals; A vacuum heat treatment apparatus characterized by:

10. 10. A method for controlling a vacuum heat treatment apparatus comprising: an output unit disposed on the atmosphere side; the current introduction terminal; the connection terminal according to claim 1; and the heating unit disposed on the vacuum side and electrically connected to the power supply unit via the current introduction terminal, a step of acquiring temperature data by the temperature measuring means disposed in the connection terminal; and a step of executing at least one of issuing an alarm from the output unit and stopping the supply of current to the heating unit based on the temperature data.

1. A method for controlling a vacuum heat treatment apparatus, comprising:

11. the current introduction terminals form a group consisting of a plurality of the current introduction terminals, the connection terminals to which the plurality of current introduction terminals constituting the same group are connected are connected to each other by a highly thermally conductive and insulating member on at least one of the atmosphere side and the vacuum side, the step of acquiring the temperature data acquires the temperature data by the temperature measuring means disposed in at least one of the plurality of connected connection terminals; 11. The method for controlling a vacuum heat treatment apparatus according to claim 10.

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