valve

Abstract

[Problem] To monitor any change in action time caused by, inter alia, changes over time in a valve actuator in a valve unit. [Solution] A valve V comprising an operating-pressure chamber 52 into which is introduced operating pressure for opening or closing the valve V, an operating-pressure sensor D that detects any change in the operating pressure within the operating-pressure chamber 52, and a magnetic sensor M that detects an internal action of the valve V that corresponds to the change in the operating pressure, wherein, on the basis of data detected from the magnetic sensor M and the operating-pressure sensor D, a time lasting from a prescribed time point when the operating pressure changes to a prescribed time point when a corresponding action was detected by the magnetic sensor M is monitored as an action time of the valve V.

Description

[Technical Field]

[0001] The present invention relates to a technique for monitoring the operating time of a valve. [Background technology]

[0002] In semiconductor processes, there is a demand for finer thin films in the film deposition process that forms thin films on the surface of semiconductor wafers, and in recent years, a film deposition method called ALD (Atomic Layer Deposition), which forms thin films with thicknesses at the atomic or molecular level, has been used. In such semiconductor processes, it is important to accurately supply process gas to the processing chamber at the flow rate specified by the user, which requires more frequent opening and closing operations than ever before. However, the load caused by such frequent opening and closing operations can easily cause fluid leakage, so technologies such as a system for diagnosing the presence or absence of malfunctions using a sensor-equipped valve that can easily detect malfunctions and problems such as fluid exposure in fluid control devices have been disclosed.

[0003] In this regard, Patent Document 1 discloses a gate valve control method in which, in a compressed air gate valve in which a valve element is opened and closed by pressurized air supplied based on an opening / closing command from a higher-level device, the pressure value of the pressurized air is detected by a pressure sensor, the vibration state generated when the valve element is opened and closed by the pressurized air is detected by a vibration sensor, a position sensor detects that the valve element has reached an open or closed position and an opening / closing signal is sent to the higher-level device, and the opening / closing time from when the higher-level device issues an opening / closing command to when it receives the opening / closing signal is measured, and the pressure value of the pressurized air, the opening / closing time of the valve element and the vibration state are notified to the higher-level device. Furthermore, Patent Document 2 discloses a shutoff valve control system that includes a shutoff valve, an air cylinder that controls the rotation of the valve stem of the shutoff valve, and a solenoid valve that supplies and exhausts air from an air supply source to the cylinder of the air cylinder, and a control means that controls the opening of the shutoff valve, and that includes a pressure sensor that detects the internal pressure of the cylinder, a determination means that determines whether the system is normal or abnormal based on the pressure characteristics of the internal cylinder pressure actually measured by the pressure sensor when air is supplied from the air supply source to the cylinder of the air cylinder under the control of the control means, and a storage means that pre-stores the pressure characteristics of the internal cylinder pressure during initial normal operation of the system and the pressure characteristics of a failure prediction boundary, and the determination means determines that the system is normal if the actually measured pressure characteristics are within a range between the pressure characteristics during normal operation and the pressure characteristics of the failure prediction boundary, and determines that the system is abnormal if the actually measured pressure characteristics are outside the range between the pressure characteristics during normal operation and the pressure characteristics of the failure prediction boundary. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 2020-176689 [Patent Document 2] Japanese Patent Application Laid-Open No. 2012-052652 Summary of the Invention [Problem to be solved by the invention]

[0005] However, although technologies have been disclosed that use position sensors to observe the stroke amount of the piston or stem to detect malfunctions inside the actuator or to detect whether the valve is in an open or closed state, no means have been disclosed to date for checking the operating time of a valve due to changes over time in the valve actuator, such as wear of the O-ring.

[0006] Here, a faster valve response time means that the valve is open for a longer period of time, resulting in a process gas flow rate that is higher than the designated amount. On the other hand, a slower valve response time means that the valve is open for a shorter period of time, resulting in a process gas flow rate that is lower than the designated amount. This situation can be a major problem in situations where precise control of gas flow rate is required, as mentioned above.

[0007] Therefore, one of the objects of the present invention is to monitor the change in operating time of a valve alone due to aging of the valve actuator. [Means for solving the problem]

[0008] In order to achieve the above object, the valve of the present invention comprises an operating pressure chamber into which an operating pressure for opening and closing the valve is introduced, an operating pressure sensor that detects changes in the operating pressure within the operating pressure chamber, and a position sensor that detects internal operation of the valve corresponding to the changes in operating pressure, and based on data detected by the position sensor and the operating pressure sensor, the operating time of the valve is monitored as the time from a predetermined point in time when the operating pressure changes to a predetermined point in time when the corresponding operation is detected by the position sensor.

[0009] The device may further include an operating pressure adjustment mechanism that, when a change in the operating time is detected, adjusts the flow path area of ​​the operating pressure introduction path communicating with the operating pressure chamber based on the difference between the operating time and a predetermined reference value.

[0010] The valve may further include an atmospheric chamber that communicates with the outside and through which air is drawn in and exhausted in response to the introduction of operating pressure into the operating pressure chamber and the exhaust of operating pressure from the operating pressure chamber, and an exhaust pressure adjustment mechanism that, when a change in the operating time is detected, adjusts the flow path area of ​​the air exhaust path that communicates from the atmospheric chamber to the outside based on the difference between the operating time and a predetermined reference value. [Effects of the Invention]

[0011] According to the valve of the present invention, it is possible to monitor the change in operating time due to the aging of the valve actuator by the valve alone. [Brief explanation of the drawings]

[0012] [Figure 1] 1 is an external perspective view showing a valve according to an embodiment of the present invention. [Figure 2] FIG. 2 is a longitudinal cross-sectional view showing the internal structure of the valve according to the embodiment, illustrating the valve in an open state. [Figure 3] 1A and 1B are enlarged partial vertical cross-sectional views showing the internal structure of a valve according to the present embodiment, in which FIG. 1A shows a valve open state and FIG. 1B shows a valve closed state. [Figure 4] FIG. 2 is a perspective view showing a bonnet of the valve according to the embodiment. [Figure 5] FIG. 2 is a partially enlarged cross-sectional view showing an actuator portion of the valve according to the embodiment. [Figure 6] FIG. 2 is a functional block diagram showing the function of a valve according to the present embodiment. [Figure 7] FIG. 10 is a functional block diagram showing the functions of a valve according to a modified example of the present embodiment and a server configured to be able to communicate with the valve. [Figure 8] 4 is a graph showing the relationship between the operating pressure and the position sensor output, which is the basis for calculating the operating time of the valve according to the present embodiment. [Figure 9] FIG. 4 is a process flow diagram showing the flow of a process executed by a valve according to the embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0013] Hereinafter, a valve according to an embodiment of the present invention will be described with reference to the drawings. In the following description, for convenience, the directions of components, etc. may be referred to as up, down, left, right, etc. according to the directions on the drawings, but these do not limit the directions of components, etc. when implementing or using the present invention. Furthermore, with regard to the reference numerals attached to the names of each part, those that perform the same function are given the same reference numerals, and when referring to each part individually, they are distinguished by numbers attached with a hyphen. As shown in FIG. 1, the valve V according to this embodiment is an air-operated direct diaphragm valve that has a built-in sensor that detects the internal operation of the valve V and communicates with other terminals and the like. The other terminals referred to here include so-called computers such as servers, as well as other devices and equipment such as fluid control devices and flow rate control devices.

[0014] The valve V of this embodiment is a device capable of acquiring data regarding its internal operation, and as shown in Figures 1 and 2, it comprises a valve body portion 1, a first bonnet portion 2, a second bonnet portion 4, and an actuator portion 5.

[0015] Valve body part 1 As shown in Figures 1 and 2, the valve body 1 is composed of a base 11 in which a flow path for the process gas is formed, a cylindrical portion 12 of a substantially cylindrical shape provided on the base 11, and an annular seat 13. The base portion 11 has a rectangular shape in a plan view, and when a fluid control device is configured as a unit by a plurality of valves V, it is the portion that is installed on a substrate or a manifold block.

[0016] The cylindrical portion 12 has a hollow shape with an open end face on the side where part of the first bonnet portion 2 is disposed, and the hollow interior forms a recess 12a that accommodates part of the first bonnet portion 2. Below the recess 12a and within the base portion 11, there are formed an inlet channel 111 through which the fluid flows in, an outlet channel 113 through which the fluid flows out, and a valve chamber 112 that communicates with the inlet channel 111 and the outlet channel 113. The inlet channel 111, the outlet channel 113, and the valve chamber 112 integrally form a flow path through which the fluid flows.

[0017] An annular sheet 13 is provided on the periphery of the inlet channel 111. A diaphragm 22 is provided on the sheet 13. The diaphragm 22 allows or blocks the flow of fluid in the inlet channel 111 and the outlet channel 113 by coming into contact with and moving away from the sheet 13.

[0018] ●First bonnet part 2 As shown in FIG. 2, the first bonnet portion 2 is disposed on the cylindrical portion 12 of the valve body portion 1. The first bonnet portion 2 includes a first bonnet body 21, a diaphragm 22, a disk 23, a sensor bonnet 24, a diaphragm holder 25, and a holder adapter 26.

[0019] As shown in Figures 3(a) and (b), the diaphragm 22 is a spherical shell-shaped member made of a metal such as stainless steel or a Ni-Co alloy, or a fluorine-based resin, with a convex bulge in the center 221, and separates the inlet and outlet passages 111 and 113 from the space in which the first bonnet portion 2 operates.

[0020] The first bonnet body 21 is interposed between the cylindrical portion 12 and the second bonnet body 41 . This first bonnet body 21 has an approximately cylindrical shape, and in the center there is a through hole 21a along the length direction through which the sensor bonnet 24 passes, and the lower end of the first bonnet body 21 abuts against the pressing adapter 26, pressing the pressing adapter 26 downward. The first bonnet body 21 is open at one end opposite to the base portion 11, and is provided with a slit 21b that penetrates from the outside to the through-hole 21a side.

[0021] When the driving fluid serving as the operating pressure is supplied to the diaphragm 22 and the pressure from the diaphragm presser 25 is released, the central portion 221 of the diaphragm 22 is displaced in a direction away from the seat 13 due to its own restoring force and the pressure within the flow path, and moves away from the seat 13. As a result, the valve chamber 112 is opened, and the inflow path 111 and the outflow path 113 are brought into communication. On the other hand, when the driving fluid serving as the operating pressure is discharged and the diaphragm 22 is pressed by the diaphragm presser 25, the central portion 221 of the diaphragm 22 is displaced in a direction that brings it into contact with the seat 13, and comes into contact with the seat 13. As a result, the valve chamber 112 is blocked, and the inflow path 111 and the outflow path 113 are blocked.

[0022] That is, the central portion 221 of the diaphragm 22 is a movable portion that is displaced by the supply of driving fluid, and the peripheral portion 222 is a non-movable portion that is not displaced even when the driving fluid is supplied.

[0023] The peripheral edge 222 of the diaphragm 22 abuts against the holding adapter 26 described later, and is sandwiched between this holding adapter 26 and a protrusion 121a (see Figures 3(a) and (b)) provided upward inside the recess 12a of the valve body 1.

[0024] The disk 23 is provided above the diaphragm 22 and is supported by the sensor bonnet 24 so as to be movable up and down, and presses the center of the diaphragm 22 in conjunction with the sliding stem 43 .

[0025] An O-ring O1 is attached to the outer peripheral surface of the disk 23, and this O-ring O1 seals the disk 23 and the inner peripheral surface of the sensor bonnet 24.

[0026] The upper part of the disk 23 has a smaller outer diameter, and is inserted into a magnet holder M10. The magnet holder M10 is a roughly circular member with a portion cut out, and a magnet is attached to the cutout portion. This magnet, together with a magnetic body M2 attached to a sensor holder 241 fitted into a recess in the sensor bonnet 24, constitutes a magnetic sensor M, which will be described later. The magnet holder M10 also has a recess on its outer periphery, and a positioning member such as a bolt that passes through the sensor holder 241 presses against this recess, preventing the magnet holder M10 from shifting position. A lock nut 231 is fitted above the magnet holder M10 at the upper end of the disk 23 to prevent the magnet holder M10 from slipping out.

[0027] A diaphragm retainer 25 is connected to the lower end of the disk 23. The lower surface of the diaphragm retainer 25 is a convex surface that bulges downward, and the lower surface of the diaphragm retainer 25 abuts against the central portion 221 of the diaphragm 22, and presses the diaphragm 22 in conjunction with the sliding stem 43.

[0028] 3(a) and 3(b), the lower end of diaphragm retainer 25 abuts against center portion 221 of diaphragm 22 whether the valve is open or closed. That is, the contact area between diaphragm retainer 25 and diaphragm 22 is the same whether the valve is open or closed. This configuration keeps the heat transfer area of ​​diaphragm 22 constant whether the valve is open or closed, enabling accurate temperature measurement by temperature sensor T, which will be described later.

[0029] As shown in FIGS. 2 and 4, the sensor bonnet 24 is substantially cylindrical, covers the valve chamber 112, and is housed within the first bonnet body 21. Inside the sensor bonnet 24, a through-hole 241a is formed in the center, through which the disk 23 is inserted. Sensor bonnet 24 is also provided with communication holes 241d that communicate with pressure sensor P and temperature sensor T. By providing pressure sensor P and temperature sensor T via communication holes 241d, the pressure and temperature within the space defined by diaphragm 22, disk 23, and sensor bonnet 24 can be measured. In this embodiment, the temperature sensor T is provided inside the sensor bonnet 24, but the temperature sensor T may be located inside the valve body 1, and in particular, at least the temperature detection portion of the temperature sensor T may be mounted inside the valve body 1. With this configuration, the temperature inside the valve V can be accurately measured simply by installing the valve V, without the need for a separate temperature sensor installation.

[0030] Furthermore, a flexible cable 60 that is connected to the pressure sensor P, temperature sensor T, and magnetic sensor M inside the sensor bonnet 24 extends outward from the side of the sensor bonnet 24 .

[0031] A magnetic body M2 held by a sensor holder 241 is attached to the inner peripheral surface of the sensor bonnet 24, and together with a magnet attached to the disk 23, constitutes a magnetic sensor M, which will be described later.

[0032] The sensor bonnet 24 is made of aluminum. Aluminum has a higher thermal conductivity than, for example, SUS (Steel Use Stainless Steel), and therefore can more accurately transmit the fluid temperature to the temperature sensor T inside the sensor bonnet 24. Furthermore, since the sensor bonnet 24 is made of aluminum, it is not magnetized, which reduces the influence of the magnetic sensor M on the temperature sensor T and pressure sensor P.

[0033] The pressing adapter 26 abuts against the peripheral edge 222 of the diaphragm 22, and clamps the diaphragm 22 between itself and the protrusion 121a in the recess 12a of the valve body 1. The pressing adapter 26 also presses down on the peripheral edge 222 from above, preventing the fluid flowing through the inflow path 111 and the outflow path 113 from leaking outside from the vicinity of the peripheral edge 222.

[0034] The holding adapter 26 does not come into contact with the moving portion of the diaphragm 22, in other words, the central portion 221, whether the diaphragm 22 is open or closed. Furthermore, the contact area between the holding adapter 26 and the diaphragm 22 is the same whether the valve is open or closed. This configuration makes it possible to keep the heat transfer area of ​​the diaphragm 22 constant whether the valve is open or closed. Consequently, because the heat conducted from the diaphragm 22 is constant, accurate temperature measurement by the temperature sensor T, described below, is possible regardless of whether the valve is open or closed.

[0035] ●Second bonnet part 4 The second bonnet part 4 is disposed on the first bonnet part 2 . As shown in FIG. 2, the second bonnet portion 4 includes a second bonnet body 41, a stem 43, and a spring .

[0036] The second bonnet body 41 is interposed between the stem 43 and the sensor bonnet 24 . The second bonnet body 41 has a generally cylindrical shape and is provided in the center with a through-hole 41a extending in the longitudinal direction, through which the stem 43 and the disc 23 are inserted. As shown in Figures 2 and 3, the stem 43 and the disc 23 abut within the through-hole 41a, and when the stem 43 is displaced downward, the disc 23 is pressed downward, causing the diaphragm 22 to abut against the seat 13.

[0037] The stem 43 moves up and down in response to the supply and stop of operating pressure, and causes the diaphragm 22 to contact and separate from the seat 13 via the disk 23 and the diaphragm presser 25 . A rod 431 is connected to the upper part of the stem 43. The rod 431 protrudes from the upper part of the second bonnet part 4 and is inserted into the actuator part 5. Note that since the rod 431 is connected to the stem 43 and moves up and down integrally, the rod 431 may be treated as synonymous with the stem 43. The stem 43 has an enlarged diameter portion at its lower portion, and receives the biasing force of the spring 44 on the upper surface side of the enlarged diameter portion.

[0038] The spring 44 is wound around the outer circumferential surface of the stem 43 and abuts against the upper surface of the enlarged diameter portion formed at the bottom of the stem 43, urging the stem 43 downward, i.e., in the direction of pressing down the diaphragm 22.

[0039] ● Actuator part 5 2 and 5, the actuator unit 5 is a cylindrical member with a bottom and a supply port 51 to which a supply source of driving fluid is connected. The supply port 51 is an opening communicating with an operating pressure introduction passage 511 formed above the rod 431, and the operating pressure introduction passage 511 branches off in the radial direction from the axial direction of the rod 431 to communicate with an operating pressure chamber 52.

[0040] The interior of the actuator unit 5 is divided into upper and lower spaces by a partition member 58 through which the rod 431 slidably passes, and in the upper space, a piston 54-1 that engages with the rod 431 is provided so as to be slidable in the vertical direction. In the lower space, a piston 54-2 that engages with the rod 431 is also provided so as to be slidable in the vertical direction.

[0041] The piston 54-1 divides the space above the actuator unit 5 into an operating pressure chamber 52-1 and an atmospheric chamber 55-1, and the piston 54-2 divides the space below the actuator unit 5 into an operating pressure chamber 52-2 and an atmospheric chamber 55-2. The operating pressure chamber 52-1 communicates with an operating pressure introduction passage 511 formed in the center of the rod 431 via a branch passage 511a, and the operating pressure chamber 52-2 communicates with the operating pressure introduction passage 511 formed in the center of the rod 431 via a branch passage 511b. The opening on the upper end side of the operating pressure introduction passage 511 of the rod 431 communicates with a supply port 51 formed in the center of the upper side of the actuator unit 5. The driving fluid supplied through the operating pressure introduction passage 511 is supplied to the operating pressure chamber 52.

[0042] The atmospheric chamber 55-1 communicates with the atmosphere through an air discharge path 551-1 formed in the actuator section 5. The atmospheric chamber 55-2 also communicates with the atmosphere through an air discharge path 551-2 formed in the actuator section 5. These atmospheric chambers 55-1 and 55-2 draw in and discharge air in response to the displacement of the piston 54, which operates in response to the introduction of operating pressure into the operating pressure chamber 52 or the discharge of operating pressure from the operating pressure chamber 52.

[0043] An O-ring O2 is provided between the piston 54 and the inner wall of the actuator portion 5 and between the rod 431 and the piston 54 to ensure airtightness of the operating pressure chamber 52. This O-ring O2 slides up and down as the piston 54 moves up and down.

[0044] Here, we will discuss the opening and closing operation of the valve associated with the supply and stop of operating pressure. When driving fluid is supplied to supply port 51 from a three-way valve connected via an inlet pipe (not shown), the driving fluid is introduced into operating pressure chamber 52 via operating pressure inlet path 511. When piston 54 rises in response, stem 43 and sensor bonnet 24 are pushed upward against the biasing force of spring 44, and air in atmospheric chamber 55 is discharged to the outside via air discharge path 551. As a result, diaphragm 22 moves away from seat 13, opening the valve and allowing fluid to flow.

[0045] On the other hand, when the supply of driving fluid is cut off in the three-way valve and the supply port 51 and the operating pressure introduction passage 511 are opened to the atmosphere via an introduction pipe (not shown), the operating pressure in the operating pressure chamber 52 is discharged to the outside via the operating pressure introduction passage 511. When the pressure in the operating pressure chamber 52 decreases in response, the piston 54 descends, and the stem 43 and the sensor bonnet 24 are pushed downward by the biasing force of the spring 44. In addition, outside air flows into the atmosphere chamber 55 via the air discharge passage 551. As a result, the diaphragm 22 abuts against the seat 13, closing the valve and blocking the flow of fluid.

[0046] The actuator unit 5 is provided with an operating pressure adjustment mechanism 56 that can adjust the rate at which the operating pressure in the operating pressure chamber 52 increases in accordance with changes in operating time, and an exhaust pressure adjustment mechanism 57 that can adjust the rate at which air is exhausted from the atmospheric chamber 55 in accordance with changes in operating time.

[0047] The operating pressure adjustment mechanism 56 is provided near the supply port 51, midway through the operating pressure introduction path 511, and is provided to adjustably limit the amount of driving fluid introduced into the operating pressure chamber 52 or the amount of driving fluid discharged from the operating pressure chamber 52.

[0048] When a change in the operating time of valve V is detected, operating pressure adjustment mechanism 56 adjusts the flow path area of ​​operating pressure introduction path 511 connecting supply port 51 to operating pressure chamber 52 by closing or opening it so as to maintain a predetermined flow path area, based on control by control unit 70 (see FIG. 6). In a specific example, operating pressure adjustment mechanism 56 is composed of a threaded hole formed across operating pressure introduction path 511 and a screw member that screws into this threaded hole, and the flow path area can be adjusted to any amount by changing the amount to which the screw member screws into the threaded hole. Regardless of this embodiment, other structures may be employed for the operating pressure adjustment mechanism 56 as long as the flow path area can be adjusted to a desired amount. This control may be either systematic or manual.

[0049] The operating pressure adjustment mechanism 56 may be provided in the supply port 51 and may close or open the opening area of ​​the supply port 51 instead of the operating pressure introduction path 511. The operating pressure introduction path 511 branches radially from the axial direction of the rod 431 and communicates with the operating pressure chamber 52, but in this embodiment, the operating pressure adjustment mechanism 56 is provided at a position close to the supply port 51 before the operating pressure introduction path 511 branches radially.

[0050] The exhaust pressure adjustment mechanism 57 is provided midway through the air exhaust passages 551-1, 551-2 to adjustably limit the amount of air exhausted from the atmospheric chambers 55-1, 55-2 to the outside through the air exhaust passages 551-1, 551-2, or the amount of air sucked into the atmospheric chambers 55-1, 55-2 through the air exhaust passages 551-1, 551-2.

[0051] When a change in the operating time of valve V is detected, exhaust pressure adjustment mechanism 57 adjusts the flow path area of ​​air discharge path 551, which communicates with atmospheric chamber 55, by closing or opening it to a predetermined flow path area based on control by control unit 70. Specifically, for example, it is configured with a threaded hole formed across air discharge paths 551-1 and 551-2 and a screw member that screws into this threaded hole. The flow path area can be adjusted to a desired amount by the amount to which the screw member screws into the threaded hole. That is, the screw member has a pin portion and a groove portion at the tip and middle, respectively, where no threads are formed. As the screw member advances or retreats into the threaded hole, the pin portion and the groove portion appear in air discharge paths 551-1 and 551-2 to open the flow path, or conversely, they come out of air discharge paths 551-1 and 551-2 to block the flow path. Regardless of this embodiment, other structures may be employed for the exhaust pressure adjustment mechanism 57 as long as the ventilation rate can be adjusted to a desired level, and the ventilation rate may be adjusted by the exhaust pressure adjustment mechanism 57 provided with separate air discharge paths 551-1 and 551-2. This control may be system-based or manual.

[0052] ●Sensor Valve V is equipped with a pressure sensor P, a temperature sensor T, a magnetic sensor M, and an operating pressure sensor D as sensors for detecting operation within the device. Of these, pressure sensor P, temperature sensor T, and magnetic sensor M are provided inside sensor bonnet 24, face through-hole 241a of sensor bonnet 24 via communication hole 241d of sensor bonnet 24 shown in FIG. 4, and communicate with the space defined by diaphragm 22, disk 23, and sensor bonnet 24. This allows pressure sensor P to detect the pressure within that space. A seal member such as a packing is provided at the location where the pressure sensor P communicates with the communication hole 241d to ensure an airtight state.

[0053] The temperature sensor T measures the temperature of the space defined by the diaphragm 22, the disk 23, and the sensor bonnet 24. The valve V having the temperature sensor T allows the temperature of the fluid to be measured while the fluid is being controlled.

[0054] A magnetic body M2 is attached to the through hole 241e of the sensor bonnet 24, and this magnetic body M2, together with the magnet attached to the disk 23, forms a magnetic sensor M, which serves as a position sensor that detects the position of the stem 43 as an internal operation of the valve V. This magnetic sensor M can detect the opening and closing operation of the valve and the amount of movement of the stem 43, as described below. That is, the magnet held by the magnet holder M10 slides in response to the up and down movement of the disc 23, while the magnetic body M2 is fixed together with the sensor bonnet 24 inside the first bonnet part 2. As a result, the operation of the disc 23 and diaphragm retainer 25, and therefore the opening and closing operation of the valve and the amount of movement of the stem 43, can be detected based on changes in the magnetic field generated between the magnet held by the magnet holder M10, which moves up and down in response to the up and down movement of the disc 23, and the magnetic body M2, which is fixed in position. Although the magnetic sensor M is used in this embodiment, it is not limited to this, and in other embodiments, other types of sensors such as an optical position sensor can also be used.

[0055] The operating pressure sensor D is provided in the actuator section 5 and detects the operating pressure in the operating pressure chamber 52 via a communication hole 53 that communicates with the inside of the operating pressure chamber 52 .

[0056] One end of a flexible cable 60 for communication is connected to each of the pressure sensor P, temperature sensor T, magnetic sensor M, and operating pressure sensor D (specifically, the magnetic sensor M is connected to the magnetic body M2), and the other end of the flexible cable 60 is connected to a circuit board provided on the outside of the valve V. Furthermore, the circuit board is provided with a substantially rectangular connector for connecting to an external terminal, which allows data measured by the pressure sensor P, temperature sensor T, and magnetic sensor M to be extracted. The type and shape of the connector can be designed appropriately according to various standards. Note that the data detected by each sensor may be transmitted to a predetermined device or server via wireless communication.

[0057] The valve V configured as described above can output data detected by the pressure sensor P, temperature sensor T, magnetic sensor M, and operating pressure sensor D to the outside. Such data can be used to understand the valve opening and closing operations and their operation times, leaks due to damage to the diaphragm 22, aging and individual differences of the valve V, etc.

[0058] ●Control unit As shown in Fig. 6, the valve V according to this embodiment has a control unit 70 that processes data detected by the sensor. The control unit 70 has an operation time determination unit 71 as a functional block. Note that, as in another example shown in Fig. 7, the valve V may have a communication processing unit 72 and communicate with a communication processing unit 82 of a server 80. In the example of Fig. 7, the valve V and the server 80 are connected via a network. The server 80 may then have an operation time determination unit 81 corresponding to the operation time determination unit 71 and a communication processing unit 82.

[0059] The operation time determination unit 71 calculates the operation time of the valve V based on the data detected by the magnetic sensor M and the operating pressure sensor D, and monitors the operation time. Furthermore, the calculated operation time can be compared with a predetermined reference value to determine whether it is appropriate. A more specific determination process will be described with reference to FIG. 8. FIG. 8 illustrates an image of calculation of the operating time, with the horizontal axis representing time change and the vertical axis representing the output value of the operating pressure sensor D and the output value of the position sensor (magnetic sensor M). This graph shows that, during a valve-opening operation, when operating pressure is introduced into the operating pressure chamber 52, the stem 43 rises after a certain time lag (response time), and the position sensor (magnetic sensor M) indicates a predetermined output value. Furthermore, during a valve-closing operation, when the operating pressure in the operating pressure chamber 52 is discharged, the stem 43 descends after a certain time lag (response time), and the position sensor (magnetic sensor M) indicates a predetermined output value. This time lag, i.e., the time from a predetermined point in time when the operating pressure changes to a predetermined point in time when the corresponding operation is detected by the position sensor (magnetic sensor M), corresponds to the operating time of the opening / closing operation of the valve V. In FIG. 8, time t1 represents the operating time during the valve-opening operation, and time t2 represents the operating time during the valve-closing operation.

[0060] The operating pressure that is the start point of the operating time and the position sensor output that is the end point are arbitrary predetermined values, and the values ​​on the axes shown on the left and right in FIG. 8 are merely examples. The reference value may be a value stored in advance in an appropriate storage unit, or may be a value measured and stored for the operating time of the valve V in its initial state at the start of use. Alternatively, the reference value may be a design value for the operating time of the valve V.

[0061] Here, the operating time tends to become faster due to aging, mainly due to wear of the O-ring O2. When the operating time becomes faster, the timing of the valve opening and closing operations in response to the control signal of valve V deviates from the initial state, and the process gas flow rate does not reach the specified amount. In other words, when the operating time when the valve is opened becomes faster, the time during which the valve is open and fluid flows, i.e., the valve open time, is lengthened, and the process gas flow rate becomes higher than the specified amount. On the other hand, when the operating time when the valve is closed becomes faster, the valve open time is shortened, and the process gas flow rate becomes lower than the specified amount.

[0062] In response to this, the operation time determination unit 71 compares the operation times for the valve opening and closing operations calculated based on the changes in operating pressure and the changes in the position sensor output with the reference values ​​for appropriate operation times stored in a specified table, and determines that the operation times are appropriate if they are within the allowable range, and determines that the state is inappropriate if they are outside the allowable range.

[0063] If the operation time determination unit 71 determines that the operation time of the valve V is inappropriate, or if it is desired to adjust the operation time to a desired time after checking the operation time, the control unit 70 can adjust the operation time by controlling the operating pressure adjustment mechanism 56 or the exhaust pressure adjustment mechanism 57. This adjusts the time that the valve V is open, allowing the specified amount of process gas to flow. The amount of time to be adjusted is calculated based on the difference between the operation time from the change in operating pressure to the valve opening or closing operation detected based on the change in the output of the magnetic sensor M and a reference value.

[0064] ●Processing flow The control based on the result of the determination process by the operation time determination unit 71 will be described with reference to FIG. FIG. 9 shows the flow of processing for adjusting the operation time for the valve opening operation. The operation time determination unit 71 calculates the operation times for the valve opening operation and the valve closing operation from the output changes of the operating pressure sensor D and the magnetic sensor M (S101), and then determines whether each operation time is within an allowable range based on a predetermined reference value (S102).

[0065] If the determination result shows that the operating time is outside the allowable range, i.e., if the operating time is faster than the reference value, the control unit 70 closes and narrows the flow path area of ​​the operating pressure introduction path 511 by a predetermined area using the operating pressure adjustment mechanism 56 (S103). Note that in this control by the control unit 70, instead of or in addition to the adjustment by the operating pressure adjustment mechanism 56, the exhaust pressure adjustment mechanism 57 may be controlled. In this case, the flow path area of ​​the air discharge path 551 is closed and narrowed by a predetermined area using the exhaust pressure adjustment mechanism 57.

[0066] In one embodiment, the control of the operating pressure adjustment mechanism 56 and / or the exhaust pressure adjustment mechanism 57 is performed during the valve opening operation or the valve closing operation, whichever operation has a larger difference in operation time. For example, if the difference in operation time during the valve opening operation is larger than the difference in operation time during the valve closing operation, the difference in operation time during the valve opening operation is adjusted by the operating pressure adjustment mechanism 56 and / or the exhaust pressure adjustment mechanism 57.

[0067] Because the driving fluid is supplied from the driving fluid supply source at a constant pressure, narrowing the flow path area of ​​the operating pressure introduction path 511 slows down the rate at which the operating pressure rises in the operating pressure chamber 52, thereby delaying the operating time and opening the valve V at the correct timing. Similarly, narrowing the flow path area of ​​the air discharge path 551 slows down the rate at which air is discharged from the atmospheric chamber 55, thereby delaying the operating time. This corrects the difference in the opening time of the valve V caused by the difference in operating time, allowing the specified amount of process gas to flow. The area of ​​the operating pressure introduction passage 511 narrowed by the operating pressure adjustment mechanism 56 or the area of ​​the air discharge passage 551 narrowed by the exhaust pressure adjustment mechanism 57 is determined by multiplying it by a predetermined coefficient depending on the amount of change from the normal operating time, or based on a numerical value associated in advance in a predetermined table.

[0068] In another embodiment, contrary to the first embodiment, the difference in operation time between the valve opening operation and the valve closing operation, whichever operation has the smaller difference in operation time, can be adjusted by the operating pressure adjustment mechanism 56 and / or the exhaust pressure adjustment mechanism 57. Furthermore, the difference in operation time between the valve opening operation and the valve closing operation can be offset, and the difference in either the valve opening operation or the valve closing operation can be adjusted by the operating pressure adjustment mechanism 56 and / or the exhaust pressure adjustment mechanism 57. In yet another embodiment, the difference in operation time between the valve opening operation and the valve closing operation can be adjusted individually by the operating pressure adjusting mechanism 56 and / or the exhaust pressure adjusting mechanism 57.

[0069] According to the valve V of this embodiment, it is possible to monitor changes in operating time due to changes in the valve actuator over time, etc., using the valve alone. Furthermore, the flow path area of ​​the operating pressure introduction path 511 and / or the air discharge path 551 is adjusted based on the changes in operating time, thereby making it possible to set the operating time at an appropriate speed.

[0070] In the example of FIG. 9, the operating time is adjusted by controlling the operating pressure adjustment mechanism 56 and / or the exhaust pressure adjustment mechanism 57 based on the result of the determination process by the operating time determination unit 71, but this is not limiting, and the operating time can also be adjusted by controlling the operating pressure adjustment mechanism 56 and / or the exhaust pressure adjustment mechanism 57 in accordance with any operation by an administrator or the like.

[0071] Furthermore, the operating time of the valve V in response to a control signal tends to become faster due to aging, mainly due to wear of the O-ring O2, but as aging progresses, the operating time tends to become slower due to factors such as increased leakage within the actuator unit 5. Therefore, it is possible to monitor changes in the operating time and detect the timing at which the operating time begins to slow down, thereby determining whether there is an abnormality in the valve V. [Explanation of symbols]

[0072] 1 Valve body 11 Base 12 Cylindrical part 12a Recess 13 sheets 2 First bonnet section 21 First bonnet body 21a Through hole 21b Slit 22 diaphragm 23 discs 24 Sensor Bonnet 25 Diaphragm retainer 26 Presser adapter 4 Second bonnet section 41 Second bonnet body 43 Stem 431 Rod 44 Spring 5 Actuator section 51 Supply port 511 Operating pressure introduction path 52 Operating pressure chamber 53 Communication hole 54 Piston 55 Atmospheric Chamber 551 Air exhaust passage 56 Operating pressure adjustment mechanism 57 Exhaust pressure adjustment mechanism 58 Isolation Wall 60 flexible cable 70 Control Unit 71 Operation time determination unit 72 Communication processing unit 80 servers 81 Operation time determination unit D Operating pressure sensor M Magnetic sensor (position sensor) O1, O2 O-rings P pressure sensor T Temperature Sensor V-valve

Claims

1. an operating pressure chamber into which an operating pressure for opening and closing the valve is introduced; an operating pressure sensor that detects a change in the operating pressure within the operating pressure chamber; a position sensor that detects an internal operation of the valve corresponding to a change in the operating pressure, Based on data detected by the position sensor and the operating pressure sensor, the time from a predetermined time point when the operating pressure changes to a predetermined time point when an operation corresponding to the change is detected by the position sensor is monitored as an operating time of the valve. valve.

2. an operating pressure adjusting mechanism that, when a change in the operating time is detected, adjusts a flow path area of ​​an operating pressure introduction path communicating with the operating pressure chamber based on a difference between the operating time and a predetermined reference value. The valve of claim 1.

3. an atmospheric chamber communicating with the outside, through which air is drawn and discharged in response to the introduction of operating pressure into the operating pressure chamber and the discharge of operating pressure from the operating pressure chamber; an exhaust pressure adjusting mechanism that, when a change in the operating time is detected, adjusts a flow path area of ​​an air exhaust passage that communicates from the atmospheric chamber to the outside based on a difference between the operating time and a predetermined reference value.

3. The valve according to claim 1 or 2.

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