Magnification observation device, magnified image observation method, magnified image observation program, computer-readable recording medium, and storage device

Abstract

To allow movement of a visual field to a desired track without forcing a user to perform minute operations.SOLUTION: An enlarging observation device 100 comprises: a visual field moving mechanism 5 that makes different the position of an optical axis of an object lens unit 25 on a stage unit 30, and relatively moves the optical axis of the objective lens unit 25 and the stage unit 30 so as to move an objective visual filed output to a display unit 70 by a display control unit 52; a movement direction instruction unit 55a that instructs the direction of movement performed by the visual field moving mechanism 5 according to user input indicating the direction of movement of the observation visual field on the display unit 70; a locus instruction unit 81 for instructing locus information on definition of the direction of movement of the observation visual field; a locus operation unit 82 that calculates a visual field movement locus for moving the observation visual field based on the locus information instructed by the locus instruction unit 81; and a movement control unit 83 that controls the movement performed by the visual field moving mechanism 5 along the visual field movement locus calculated by the locus operation unit 82 and according to the instructions of the movement direction performed by the movement direction instruction unit 55a.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a magnification observation device, a magnified image observation method, a magnified image observation program, a computer-readable recording medium, and a device storing the program. [Background technology]

[0002] Optical microscopes using optical lenses and digital microscopes are used as magnification observation devices that enlarge and display subjects such as specimens and workpieces, including minute objects. Digital microscopes receive light that is incident through an optical system and reflected or transmitted from an observation object placed on a stage using an imaging element such as a CCD or CMOS that electrically reads each pixel arranged two-dimensionally, and then display the electrically read image on a display (see, for example, Patent Document 1). To move the observation field displayed on the display, the stage may be provided with a stage movement mechanism, such as an XY stage, that can move in the X and Y directions.

[0003] In addition to those that manually move the stage, stage movement mechanisms equipped with motorized stages have also been developed. These motorized stages are configured so that the user can specify the destination of the stage using an input console such as a mouse or joystick. For example, when moving an XY stage, the user specifies the direction of movement of the stage by tilting the joystick in the desired direction, as shown in Figure 7. Using such motorized stages allows for faster and more accurate positioning of the stage than manual operation. Furthermore, such digital microscopes allow for high-speed movement between multiple observation locations and precise positioning, even when the multiple observation locations are far apart.

[0004] On the other hand, there are cases where users want to observe the presence of scratches or chips along a specific shape, such as the edge of a blade or tool. In such cases, rather than moving between multiple observation locations, the field of view is moved along a specific shape, such as a line, for observation. For example, as shown in Figure 6, the edge of a cylindrical workpiece WK2 may be observed by moving the field of view along an arc. However, when performing observations with a microscope, the higher the magnification, the greater the relative movement of the observation field relative to the movement of the motorized stage. Therefore, when moving the stage at high magnification, the user may end up moving the stage farther than intended, requiring additional effort to adjust the field of view to the desired observation position. Consider the case of using a joystick to observe the edge of a cylindrical workpiece WK2 along an arc, as shown in Figure 6. In this case, the user must make fine adjustments in the X and Y directions to ensure the arc does not deviate from the field of view. Thus, when moving the observation field along a specific shape using conventional operating methods, users are forced to perform tedious tasks simultaneously. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2015-127770 Summary of the Invention [Problem to be solved by the invention]

[0006] An object of the present invention is to provide a magnification observation device, a magnified image observation method, a magnified image observation program, a computer-readable recording medium, and a device storing the program, which enable the user to move the field of view along a desired trajectory without forcing the user to perform detailed operations.

[0007] A magnification observation device according to one aspect of the present invention includes a stage unit for placing an observation object thereon, an objective lens unit arranged facing the observation object on the stage unit, a camera unit that captures an image of the observation object formed through the objective lens unit and generates image data representing the image, a display control unit that causes a display unit to display an image of an observation field including the observation object based on the image data generated by the camera unit, and a display control unit that changes the position of the optical axis of the objective lens unit on the stage unit so that the observation field output to the display unit by the display control unit moves. a field of view movement mechanism that moves the optical axis of the lens unit and the stage unit relative to each other, a movement direction instruction unit that instructs the movement direction of the field of view movement mechanism in accordance with a user input indicating the movement direction of the observation field on the display unit, a trajectory instruction unit that instructs trajectory information related to the definition of the movement direction of the observation field, a trajectory calculation unit that calculates a field of view movement trajectory for moving the observation field based on the trajectory information instructed by the trajectory instruction unit, and a movement control unit that controls movement of the field of view movement mechanism along the field of view movement trajectory calculated by the trajectory calculation unit in accordance with the movement direction instruction by the movement direction instruction unit.With the above configuration, the user can easily move the observation field of view along the field of view movement trajectory calculated by the trajectory calculation unit without having to instruct detailed movement of the observation field of view using the movement direction instruction unit, thereby simplifying operation.

[0008] Another aspect of the present invention provides a magnified image observation method, which involves imaging an observation object placed on a stage unit using a camera unit via an objective lens unit and displaying the image on a display unit, and then moving the optical axis of the objective lens unit and the stage unit relatively using a field of view movement mechanism so that the position of the optical axis of the objective lens unit on the stage unit changes and the observation field of view output to the display unit moves. The method includes the steps of: a step in which a trajectory instruction unit prompts the user to specify trajectory information relating to the direction of movement in which the user wants to move the observation field of view; a step in which a trajectory calculation unit calculates a field of view movement trajectory for moving the observation field of view based on the trajectory information specified by the trajectory instruction unit; and a step in which a movement control unit controls the movement of the field of view movement mechanism along the field of view movement trajectory calculated by the trajectory calculation unit, in accordance with a user input indicating the direction of movement of the observation field of view on the display unit, and in accordance with a movement direction instruction by a movement direction instruction unit that specifies the movement direction of the field of view movement mechanism. This allows the user to easily move the observation field of view along the field of view movement trajectory calculated by the trajectory calculation unit without having to give detailed instructions for moving the observation field of view using the movement direction instruction unit, thereby simplifying operation.

[0009] A magnified image observation program according to still another aspect of the present invention includes a stage unit for placing an observation object thereon; an objective lens unit arranged facing the observation object on the stage unit; a camera unit for capturing an image of the observation object formed through the objective lens unit and generating image data representing the image; a display unit for displaying an image of an observation field including the observation object based on the image data generated by the camera unit; a field of view moving mechanism for relatively moving the optical axis of the objective lens unit and the stage unit so that the position of the optical axis of the objective lens unit on the stage unit changes and the observation field output to the display unit moves; a movement direction indicator for indicating the movement direction of the field of view movement mechanism in accordance with a user input indicating the movement direction of the observation field on the display unit, the magnified image observation program causing a computer to realize a trajectory indicator function for indicating trajectory information relating to the specification of the movement direction of the observation field, a trajectory calculation function for calculating a field of view movement trajectory for moving the observation field based on the trajectory information indicated by the trajectory indicator function, and a movement control function for controlling the movement of the field of view movement mechanism along the field of view movement trajectory calculated by the trajectory calculation function in accordance with the movement direction indicated by the movement direction indicator.With the above configuration, the user can easily move the observation field along the field of view movement trajectory calculated by the trajectory calculation function without having to give detailed instructions for the movement of the observation field using the movement direction indicator, thereby simplifying operation.

[0010] Furthermore, according to another aspect of the present invention, a computer-readable recording medium or device on which the program is recorded stores the program. Recording media include magnetic disks such as CD-ROMs, CD-Rs, CD-RWs, flexible disks, magnetic tapes, MOs, DVD-ROMs, DVD-RAMs, DVD±Rs, DVD±RWs, HD DVDs (AODs), Blu-rays (product names), UHD BDs (product names), USB memory sticks, and SSD memory sticks, as well as optical disks, magneto-optical disks, semiconductor memories, and other media capable of storing programs. Programs distributed by download over a network such as the Internet, as well as those stored on the recording media, are also included. Recording media also include devices capable of recording programs, such as general-purpose or dedicated devices on which the program is implemented in an executable form, such as software or firmware. Each process and function included in the program may be executed by computer-executable program software, or each process may be implemented by hardware such as a predetermined gate array (FPGA, ASIC), or by a combination of program software and partial hardware modules that implement some of the hardware elements. In this specification, a computer-readable medium also includes a non-transitory tangible medium or a transitory propagating signal. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is a perspective view of the appearance of a magnification observation device according to a first embodiment. [Figure 2] FIG. 2 is a block diagram of the magnification observation device of FIG. [Figure 3A] FIG. 2 is a schematic diagram illustrating a configuration of an illumination unit. [Figure 3B] FIG. 1 is a schematic diagram of a ring illumination. [Figure 4] FIG. 2 is a schematic diagram showing the tilt direction of the joystick in a side view. [Figure 5] FIG. 2 is a schematic side view showing the tilt angle of the joystick in a plan view. [Figure 6]10 is a schematic diagram showing the direction of movement of a joystick when moving the observation field along the edge of a cylindrical workpiece. FIG. [Figure 7] FIG. 10 is a schematic diagram showing how the direction of movement of the stage is instructed with a joystick. [Figure 8] 10A and 10B are schematic diagrams showing the tilt direction of the joystick and the movement direction of the observation field in the route tracing mode. [Figure 9] FIG. 10 is a schematic diagram showing an example in which a movement direction indicator is realized by button operation. [Figure 10] FIG. 10 is a schematic diagram showing an example in which a movement direction indicator is implemented by mouse operation. [Figure 11] 11A and 11B are schematic diagrams showing the relationship between a visual field movement trajectory and a movement direction instruction. [Figure 12] 10 is a flowchart showing a method for observing an enlarged image that realizes a route guide function. [Figure 13] 13A to 13F are perspective views showing examples of geometric shapes that define the route. [Figure 14] FIG. 10 is a schematic diagram showing how a field of view movement locus is set for chips mounted at a distance from each other on a substrate. [Figure 15] 15 is a schematic diagram showing a state in which the object of observation in FIG. 14 is moved along a field of view movement trajectory set thereon. FIG. [Figure 16] 10 is a user interface screen of a magnified image observation program for operating the magnification observation device. [Figure 17] 10 is a user interface screen of a magnified image observation program for operating the magnification observation device. [Figure 18] 10 is a user interface screen of a magnified image observation program for operating the magnification observation device. [Figure 19] FIG. 19A is a wide-area image of an object to be observed, and FIG. 19B is a schematic diagram showing a state in which the contours of FIG. 19A are extracted. [Figure 20] FIG. 20A is a schematic diagram showing the observation field while the XY stage is being moved, and FIG. 20B is a schematic diagram showing the observation field while the XY stage is being further moved. [Figure 21]21A is an image showing the observation field before switching the objective lens unit, FIG. 21B is an image showing the observation field after switching the objective lens unit, and FIG. 21C is an image showing the observation field after correcting the deviation of the field center from the state of FIG. 21B. [Figure 22] 10A and 10B are schematic diagrams showing how a field of view movement trajectory is offset by a field of view deviation correction offset function. [Figure 23] FIG. 23 is a schematic diagram showing how the field of view movement trajectory is offset in accordance with the position corresponding to the observation field of view. [Figure 24] FIG. 10 is a schematic diagram showing a state in which a position away from the visual field movement trajectory is specified and the route tracing mode is cancelled; [Figure 25] FIG. 25 is a schematic diagram showing a state in which the route trace mode in FIG. 24 is cancelled and the mode is changed to a free mode. [Figure 26] FIG. 10 is a schematic diagram showing how the system returns to the route tracing mode after specifying a position close to the visual field movement trajectory. [Figure 27] FIG. 10 is a schematic diagram of a user interface screen showing an example of a release condition setting section. [Figure 28] Figure 28A is an image showing the state in which a field of view movement trajectory is displayed superimposed on a low-magnification image displayed in the entire navigation display area, and Figure 28B is an image showing the state in which a low-magnification image is displayed in part of the navigation display area and the field of view movement trajectory is displayed superimposed on it. [Figure 29] FIG. 29A is a schematic diagram showing the route display area when the route guide function is running, and FIG. 29B is a schematic diagram showing the route display area when the route guide function is stopped. [Figure 30] FIG. 10 is a schematic diagram showing a magnification observation device according to a second embodiment. [Figure 31] 31A to 31D are schematic diagrams showing how the lighting direction changes with the search lighting function. [Figure 32] FIG. 32A is a schematic diagram showing an example of acquiring three-dimensional information of an observation object from a low-magnification image, and FIG. 32B is a schematic diagram showing an example of estimating the inclination of a plane of an observation object. [Figure 33] FIG. 10 is a schematic diagram showing an example of a profile obtained by acquiring a 3D shape from a low-magnification image. [Figure 34] FIG. 10 is a schematic diagram showing the route guide function when XY movement is stopped. [Figure 35] Figure 35A is a schematic diagram showing a field of view movement trajectory and reference point specified in three-dimensional space, Figure 35B is a schematic diagram showing the reference point projected onto the XY plane, and Figure 35C is a schematic diagram showing a field of view movement trajectory defined by the projected reference point. [Figure 36] FIG. 36A is a plane defined in three-dimensional space, and FIG. 36B is a schematic diagram showing the state in which the visual field movement trajectory within this plane is projected onto the XY plane. [Figure 37] FIG. 37A is a schematic diagram showing a polygonal view movement trajectory defined in three-dimensional space, and FIG. 37B is a schematic diagram showing the state in which this polygonal view movement trajectory is projected onto the XY plane. [Figure 38] FIG. 10 is a schematic diagram showing how the visual field movement direction is determined when visual field movement trajectories intersect. [Figure 39] FIG. 10 is a schematic diagram showing how a route guide function is executed on visual field movement trajectories that intersect at a twist position. [Figure 40] 10 is a schematic diagram showing how a route guide function is executed for a visual field movement trajectory on which adjacent registration points are set. FIG. [Figure 41] 10 is a schematic diagram showing an example of an operation when moving in the Z direction while the route guide function is being executed. FIG. [Figure 42] 10A and 10B are schematic diagrams showing another example of the operation when moving in the Z direction while the route guide function is being executed. [Figure 43] 43A is a schematic diagram showing a circular observation object, FIG. 43B is a schematic diagram showing a state in which the entire view of FIG. 43A has been acquired, and FIG. 43C is a schematic diagram showing a state in which a field of view movement trajectory has been set for FIG. 43B. DETAILED DESCRIPTION OF THE INVENTION

[0012] Embodiments of the present invention will be described below with reference to the drawings. However, the embodiments described below exemplify a magnification observation device, a magnification image observation method, a magnification image observation program, a computer-readable recording medium, and a device storing the same, which embody the technical concepts of the present invention. The present invention does not specify the magnification observation device, the magnification image observation method, the magnification image observation program, the computer-readable recording medium, and the device storing the same. Furthermore, this specification does not specify the components described in the claims as those of the embodiments. The dimensions, materials, shapes, and relative positions of the components described in the embodiments, unless otherwise specified, are not intended to limit the scope of the present invention and are merely illustrative examples. The size and positional relationships of components shown in the drawings may be exaggerated for clarity. Furthermore, in the following description, identical names and symbols indicate identical or similar components, and detailed descriptions will be omitted as appropriate. Furthermore, the elements constituting the present invention may be configured with the same components, with one component serving multiple functions, or the functions of one component may be shared among multiple components.

[0013] The magnification observation device used in the embodiments of the present invention is connected to a computer, printer, external storage device, or other peripheral device connected thereto for operation, control, display, and other processing, for example, via a serial connection such as IEEE1394, RS-232x, RS-422, or USB, a parallel connection, or a network such as 10BASE-T, 100BASE-TX, or 1000BASE-T, and the connection is electrically, magnetically, or optically connected for communication. The connection is not limited to a physical connection using a wire, but may also be a wireless connection using radio waves, infrared rays, optical communications, or the like, such as a wireless LAN such as IEEE802.x or Bluetooth (registered trademark). Furthermore, recording media for exchanging data and saving settings may include memory cards, magnetic disks, optical disks, magneto-optical disks, semiconductor memories, and the like. Note that in this specification, the terms "magnification observation device" and "magnified image observation method" refer not only to the magnification observation device itself, but also to a magnification observation system that combines it with peripheral devices such as a computer and external storage device.

[0014] Furthermore, in this specification, the term "magnification observation device" is not limited to the system itself that performs magnification observation, nor to devices or methods that perform input / output, display, calculation, communication, and other processing related to imaging using hardware. Devices and methods that implement processing using software are also within the scope of the present invention. For example, devices and systems that incorporate software, programs, plug-ins, objects, libraries, applets, compilers, modules, macros that run on specific programs, etc. into general-purpose circuits or computers to enable imaging itself or related processing also fall under the category of the magnification observation device of the present invention. Furthermore, in this specification, the term "computer" includes not only general-purpose and dedicated electronic computers, but also workstations, terminals, and other electronic devices. Furthermore, in this specification, the term "program" is not limited to a standalone program, but can also be used in the following ways: as part of a specific computer program, software, service, etc.; ... [Embodiment 1]

[0015] A magnification observation device 100 according to a first embodiment of the present invention will be described below with reference to FIGS. 1 and 2. As shown in FIG. 1, the magnification observation device 100 is broadly divided into an imaging system 1 and a control system 2. The imaging system 1 includes an illumination unit 60 for illuminating an observation object WK, such as a sample or workpiece, and a head unit 4 for capturing an image of the observation object WK illuminated by the illumination unit 60. As shown in FIG. 2, the head unit 4 includes a camera unit 10 including an image sensor 12 and a microscope lens unit 20 detachably attached to the tip of the camera unit 10. The microscope lens unit 20 constitutes an imaging optical system (lens optical system) made up of multiple optical lenses. Here, the microscope lens unit 20 includes an objective lens unit 25. The head unit 4 also functions as an imaging means for receiving reflected or transmitted light of the illumination light. (Camera section 10)

[0016] As shown in Fig. 2, the camera unit 10 includes an image sensor 12 that electrically reads reflected light incident via an imaging optical system 11 from an observation object WK illuminated by an illumination unit 60. In this example, the image sensor 12 uses a CMOS, but other light-receiving elements such as a CCD can also be used. The objective lens unit 25 is disposed facing the observation object on the stage unit 30. The camera unit 10 also captures an image of the observation object formed via the objective lens unit 25 and generates image data representing this image.

[0017] The imaging system 1 also includes a stage unit 30 on which the observation object WK is placed, an upper Z stage as a first focus adjustment unit that adjusts the focus by changing the relative distance in the optical axis direction between this stage unit 30 and the head unit 4, and an upper Z elevator 16 for driving this upper Z stage. Light is incident on the observation object WK placed on this stage unit 30 via an imaging optical system 11, and reflected light reflected by the observation object WK or transmitted light irradiated from the bottom side of the observation object WK is electrically read by an imaging element 12 of the camera unit 10.

[0018] The control system 2 further includes a main body 50 having a display 70 that displays an enlarged image captured by the camera 10. The camera 10 is connected to the main body 50 via a cable 3. The display 70 displays an image of the observation field including the object to be observed based on image data generated by the camera 10. In the example of FIG. 1, the display 70 is provided integrally with the main body 50, but the display may also be a separate member from the main body 50. For example, the main body 50 may include a display control unit 52 that generates the display content to be displayed on the display 70, as well as a display connection interface that connects the display 70 to the main body 50.

[0019] The main body 50 also includes a processor 51. As shown in the block diagram of FIG. 2, the processor 51 realizes multiple functions (details will be described later). The main body 50 can be a general-purpose computer with a dedicated program installed, or a specially designed device. In this example, a general-purpose computer with a magnified image observation program for operating the magnification observation device installed is used as the main body. The main body 50 includes the processor 51, a display control unit 52, a storage unit 53, an interface 54, an operation unit 55, and a memory unit 56.

[0020] The cable unit 3 includes an electrical cable for transmitting image information obtained by the image sensor 12 of the camera unit 10 to the body unit 50, as well as an optical cable 3b for transmitting illumination light from the body unit 50 to the head unit 4. The cable unit 3 can be integrated with the electrical cable and the optical cable 3b, or these can be provided separately. (Display unit 70)

[0021] The display unit 70 can be a monitor such as an LCD display, organic EL display, or CRT. The main body 50 is also connected to an operation unit 55 that enables the user to perform various operations. The operation unit 55 is an input device such as a console or a mouse. In this example, the display unit 70 and operation unit 55 can be integrated into the main body 50 or can be external components. Furthermore, if the display unit 70 is configured as a touch panel, the display unit 70 and operation unit 55 can be configured as an integrated unit.

[0022] The operation unit 55 is connected to the main unit 50 or a computer via a wired or wireless connection, or is fixed to the computer. Typical operation units 55 include various pointing devices, such as a mouse, keyboard, slide pad, TrackPoint, tablet, joystick, console, jog dial, digitizer, light pen, numeric keypad, touchpad, and AccuPoint. These operation units 55 can be used not only to operate the magnification observation operation program, but also to operate the magnification observation device itself and its peripheral devices. Furthermore, a touch screen or touch panel can be used for the display itself that displays the interface screen, allowing the user to input and operate the screen by directly touching it with their hands, or voice input or other existing input means can be used, or both. In the example of Figure 1, the operation unit 55 is composed of a mouse, keyboard, and joystick 55b. (Lighting section 60)

[0023] The illumination unit 60 generates illumination light that illuminates the observation object WK that is imaged on the imaging element 12. A schematic configuration of the illumination unit 60 is shown in FIG. 3A. The illumination unit 60 includes an illumination control unit 66. The illumination control unit 66 controls the illumination light according to set illumination conditions. The illumination conditions adjust the brightness of the illumination light emitted from the illumination unit 60. For example, the brightness of the illumination light can be adjusted by adjusting the irradiation time or irradiation intensity of the illumination unit 60. The illumination unit 60 may include an LED as a light source. The light emission of the light source may be controlled by the illumination control unit 66, or the brightness of the irradiated light may be controlled by a light-blocking member such as a shutter.

[0024] The illumination light source 65 is built into the main body 50, and illumination light is transmitted to the illumination unit 60 of the head unit 4 via the optical cable 3b. The illumination unit 60 can either be built into the head unit 4 or be a separate unit that can be detached from the head unit 4. As the illumination method for the illumination light, epi-illumination, transmitted illumination, etc. can be used as appropriate. Epi-illumination is an illumination method in which illumination light is cast from above the object to be observed, and includes ring illumination, coaxial illumination, etc.

[0025] Coaxial lighting can also be equipped with oblique lighting. An example of a coaxial lighting and ring lighting equipped with such oblique lighting functions is shown in the schematic diagram of Figure 3B. The lighting unit 60 shown in this figure includes a circular coaxial epi-illumination unit 62 located on the inner ring side and a similarly circular ring lighting unit 63 located on the outer ring side. Both the coaxial epi-illumination unit 62 and the ring lighting unit 63 are divided into sections along the circumference, and by switching the lighting of each divided block, it is possible to provide oblique lighting with different lighting directions.

[0026] In this way, the illumination unit 60 can switch the illumination direction toward the observation object. The illumination unit 60 can also irradiate with a first illumination pattern that sequentially switches the illumination direction and irradiates with light, and a second illumination pattern that irradiates with light in a selected illumination direction. Such switching of illumination patterns is performed by the illumination control unit 66. (Lighting control unit 66)

[0027] When the observation field of view is moved along the field of view movement trajectory, the illumination control unit 66 controls the illumination unit 60 to emit light with a first illumination pattern. This allows the illumination direction to be automatically changed while the observation field of view is moving, making it possible to observe the surface condition of the object under observation with different illumination, making it easier to find scratches, chips, etc. Furthermore, when the illumination control unit 66 stops the movement of the observation field of view by the field of view movement mechanism 5, it analyzes multiple image data with different illumination directions stored in the buffer memory 57, selects an image with an illumination direction in which the flaw is most clearly visible, and controls the illumination unit 60 to emit light with a second illumination pattern fixed to that illumination direction. As a result, when the movement of the observation field of view is stopped, image data with an illumination direction in which the flaw is most clearly visible is displayed, realizing observation that is ideal for flaw search.

[0028] The illumination unit 60 shown in FIG. 1 includes a coaxial incident illumination unit 62 (see FIG. 3A) for irradiating the observation object WK with coaxial incident light, and a ring illumination unit 63 for irradiating ring-shaped illumination light from a ring-shaped light source. These illumination units are connected to the main body 50 via the optical cable 3b. The main body 50 includes a connector for connecting the optical cable 3b and a built-in illumination light source 65 for transmitting light to the optical cable 3b via the connector (see FIG. 3A). The ring illumination unit 63 can switch between full-circle illumination and oblique illumination. To achieve this, the ring illumination unit 63 can be configured to have multiple LEDs arranged in a ring shape and some of the LEDs can be turned on and off, or a turret-type mask can be used to block part of the illumination light. The illumination control unit 66 controls the lighting and switching of these illumination units.

[0029] As shown in the schematic cross-sectional view of Figure 3A, the illumination unit 60 has a built-in light source on the control system 2 (e.g., main body 50) side, and employs a configuration in which illumination light is transmitted to the head unit 4 on the imaging system 1 side via an optical fiber or the like. The illumination unit 60 includes a coaxial epi-illumination unit 62 and a ring illumination unit 63, and the coaxial epi-illumination is effective when observing the irregularities of mirror-finished workpieces such as silicon wafers and LCD panels. The lighting of the illumination unit 60 is controlled by an illumination control unit 66. (Lighting source 65)

[0030] The illumination light source 65 can be a semiconductor light-emitting element such as a light-emitting diode (LED) or a semiconductor laser (LD). LEDs, in particular, have excellent ON / OFF response, which improves measurement throughput. They also have long life, low power consumption, low heat generation, and resistance to mechanical shock. Alternatively, a light source using a wavelength conversion material, such as a phosphor, can be used that is excited by the ultraviolet or visible light of the light source. Furthermore, an LED capable of emitting ultraviolet or infrared light in addition to visible light can also be used as the light source. For example, observation using infrared light is useful for analyzing defective products and tissue distribution in biological tissue. The illumination light source is not limited to a semiconductor light-emitting element. A white light source that emits white light over a wide wavelength range, such as a halogen lamp, xenon lamp, or HID lamp, can also be used. A light source that can emit not only visible light but also infrared light can also be used. Halogen lamps are particularly preferable due to their wide emission wavelength range. In addition to using a single light source, multiple light sources can be used, and they can be lit simultaneously to produce mixed light or switched between them.

[0031] The illumination light source is not limited to being built into the main body. For example, it can be installed in the stage or microscope lens. That is, a transmitted illumination light source may be installed on the stage side as an illumination light source, and an illumination light source for coaxial epi-illumination or ring illumination may be installed on the microscope lens side. This configuration eliminates the need to transmit illumination light from the main body side to the head side using optical fibers or the like, thereby offering the advantage of simplifying the configuration by reducing the number of cables drawn to the outside. Furthermore, inside the head side, light from the illumination light source may be branched using optical fibers, or a semiconductor light-emitting element such as a high-brightness LED may be installed for direct illumination. In particular, LEDs are smaller, generate less heat, and are longer-lasting and maintenance-free compared to conventional halogen lamps and the like. (Field of view movement mechanism 5)

[0032] The magnification observation device 100 also includes a field-of-view moving mechanism 5 that moves the observation field displayed on the display unit 70. The field-of-view moving mechanism 5 changes the relative position between the objective lens unit 25 and the stage unit 30 to change the position of the optical axis AX of the objective lens unit 25 on the mounting surface of the stage unit 30. When the field-of-view moving mechanism 5 moves the relative position between the objective lens unit 25 and the stage unit 30, an updated image can be displayed on the display unit 70 in the observation field after the movement. In the example of FIG. 1, an XY stage that moves the stage unit 30 is used as the field-of-view moving mechanism 5. However, the present invention may also use a field-of-view moving mechanism that moves the objective lens unit instead of or in addition to this. It is sufficient for the field-of-view moving mechanism to be able to move the relative position of the objective lens unit and the stage unit as viewed from the optical axis side, i.e., the observation field within the XY plane.

[0033] The XY stage is an electrically driven stage that can move the mounting surface of the stage unit 30 in the X-axis direction and the Y-axis direction. The field of view moving mechanism 5 can also be provided with a θ stage that can rotate the stage unit 30.

[0034] Furthermore, in addition to being able to move the stage unit 30 in the XY plane by the field of view moving mechanism 5, the stage unit 30 can also be moved in the height direction, that is, in the Z direction, by the lower stage elevator 35.

[0035] The operation of the lower stage elevator 35 will now be described. The main body 50 changes the relative distance in the optical axis direction between the stage 30 and the head 4, which has the imaging optical system 11 and the imaging element 12, in this case, the height in the z direction, by inputting control data related to the control of the stepping motor 37 to the motor control circuit 36. Specifically, the main body 50 controls the rotation of the stepping motor 37 by inputting control data necessary for controlling the lower stage elevator 35 to the motor control circuit 36, thereby raising and lowering the height z (position in the z direction) of the stage 30. The stepping motor 37 generates a rotation signal corresponding to the rotation. Based on the rotation signal input via the motor control circuit 36, the main body 50 stores the height z of the stage 30 as information related to the relative distance in the optical axis direction between the stage 30 and the imaging optical system 11. The stage 30 functions as an observation positioning unit that positions the observation position with respect to the observation object WK.

[0036] Furthermore, in this embodiment, changing the height of the stage unit 30 not only changes the relative distance between the stage unit 30 and the imaging optical system 11 in the optical axis direction, but also changes the height of the imaging optical system, i.e., the height of the head unit 4. The head unit 4 is connected to the main body unit 50 by the cable unit 3. As a result, data acquired by the head unit 4 is sent to the main body unit 50 via the cable unit 3, and the necessary processing can be performed on the main body unit 50 side. Note that the stage unit may be provided in the microscope main body, or it may be provided in the head unit that is a separate member from the main body, or an imaging unit without a stage may be provided in the head unit. An imaging unit without a stage may be attached to a mounting stand or may be handheld by the user.

[0037] The image sensor 12 can electrically read the amount of received light for each pixel arranged two-dimensionally in the x and y directions. The image of the observation object WK formed on the image sensor 12 is converted into an electrical signal according to the amount of received light at each pixel of the image sensor 12, and the signal is further converted into digital data by the image sensor control circuit 13. The main body 50 stores the digital data converted by the image sensor control circuit 13 as received light data D in the storage unit 53 together with pixel arrangement information (x, y) as two-dimensional position information of the observation object WK in a plane (x, y directions in FIG. 2) approximately perpendicular to the optical axis direction (z direction in FIG. 2). Here, the plane approximately perpendicular to the optical axis direction does not necessarily have to be a plane strictly at 90° with respect to the optical axis; it may be an observation plane within a range of inclination that allows the shape of the observation object WK to be recognized with the imaging optical system and the resolution of the image sensor 12.

[0038] In the above explanation, an example of the stage unit 30 has been given in which the observation object WK is placed on the stage unit 30, but it is also possible to use a configuration in which, for example, an arm is attached instead of the stage unit and the observation object WK is fixed to the tip of the arm. Furthermore, the head unit 4 is not only used by being attached to the camera attachment unit 43, but can also be detachable and positioned at a desired position and angle by hand or other methods. (Movement direction instruction section 55a)

[0039] The control system 2 includes an operation unit 55. The operation unit 55 is an input device connected to the main body 50. The operation unit 55 functions as a movement direction indicator 55a that accepts user input indicating the movement direction of the observation field on the display unit 70. The movement direction of the field of view movement mechanism 5 is indicated according to the direction input from the operation unit 55. The operation unit 55 can be implemented using a joystick, touchpad, mouse, keyboard (arrow keys or specific keys), or the like. In particular, by using a joystick 55b as the operation unit 55, the user can intuitively indicate the movement direction of the observation field by tilting the joystick 55b. For example, this makes it easy to indicate forward, reverse, clockwise, counterclockwise, up, down, left, right, etc. The movement speed can also be specified by the angle at which the joystick 55b is tilted from a vertical position. Specifically, as shown in FIG. 4, the movement speed increases as the tilt angle α in a side view increases, and decreases as the tilt angle α decreases. As shown in Figure 5, the tilt angle β of the joystick 55b in a planar view indicates the direction of movement of the observation field of view, but when the route guide function described below is being executed, this tilt angle β in a planar view can also be used to indicate the movement speed.

[0040] The direction of the user input received by the operation unit 55 and the direction of movement of the stage unit 30 or the objective lens unit 25 by the field of view movement mechanism 5 differ depending on the manner in which the operation unit 55 receives the user input and the object to be moved by the field of view movement mechanism 5. For example, if the operation unit 55 is a joystick 55b and the field of view movement mechanism 5 is an XY stage that moves the stage unit 30, the observation field of view is moved in the direction input by the user by moving the stage unit 30 on the XY stage in the direction opposite to the direction input by the operation unit 55. Furthermore, if the field of view movement mechanism 5 moves the objective lens unit 25, the direction of the user input and the direction of movement of the XY stage coincide. In this example, an XY stage for moving the stage unit 30 is used as the visual field moving mechanism 5, and a joystick 55b is used as the movement direction instruction unit 55a.

[0041] When the lever of the joystick 55b is pressed, the stage unit 30 moves to the origin or initial position. When the coordinates of the destination of the stage unit 30 are specified, the route tracing mode is cancelled and the stage unit 30 follows the specified coordinates.

[0042] Furthermore, the stage unit 30 can be moved in the height direction, i.e., the Z direction, by the lower stage elevator 35, and also in a plane. Specifically, it is provided with an XY stage that can move in the X-axis direction and the Y-axis direction. It can also be provided with a rotatable stage (θ stage) that rotates the stage unit 30.

[0043] In this example, both the upper Z elevator 16 and the lower stage elevator 35 are electrically driven. However, in the present invention, it is sufficient to obtain height information for the objective lens unit 25 and the stage unit 30, and it is not essential that both the upper Z elevator and the lower stage elevator are electrically driven. For example, either the upper Z elevator or the lower stage elevator may be configured to be driven manually.

[0044] 2, the main body 50 includes a processor 51, a display control unit 52, a storage unit 53, an interface 54, an operation unit 55, and a memory unit 56. This magnification observation device 100 captures an observation image using an image sensor 12 that electrically reads reflected light or transmitted light from an observation object WK fixed to a stage unit 30 that is incident via an imaging optical system 11, and displays the image on a display unit 70.

[0045] The storage unit 53 functions as a memory unit, for example, by saving image data displayed on the display unit 70 by the display control unit 52 as a moving image. The interface 54 is a connection unit that allows the main body unit 50 to communicate data with the head unit 4, the lower stage elevator 35, etc. The memory unit 56 is composed of RAM, ROM, etc. This memory unit 56 includes a buffer memory 57 that sequentially stores image data captured by the camera unit 10 in different illumination directions while the field of view movement mechanism 5 is moving. The operation unit 55 is also a component for setting imaging conditions for setting conditions for capturing images with the camera unit 10, as well as for performing various other necessary settings and operations. (Display control unit 52)

[0046] The display control unit 52 outputs image data generated by the camera unit 10 to the display unit 70. The display unit 70 displays image data of the observation field output from the display control unit 52. This display control unit 52 can be configured with a GPU or the like. In the example of FIG. 2, an example is described in which the display control unit 52 is configured as a separate member from the processor unit. Such a display control unit 52 is configured with, for example, a GPU. However, the present invention is not limited to this configuration, and the display control unit 52 may be incorporated into the processor unit. For example, the display control unit 52 may be integrated into a CPU or MPU that constitutes the processor. (Processor unit 51)

[0047] The processor unit 51 includes a trajectory instruction unit 81 for instructing trajectory information regarding the direction of movement of the observation field of view for the image data displayed on the display unit 70; a trajectory calculation unit 82 for calculating a field of view movement trajectory for moving the observation field of view based on the trajectory information instructed by the trajectory instruction unit 81; a movement control unit 83 for controlling the movement of the field of view movement mechanism 5 along the field of view movement trajectory calculated by the trajectory calculation unit 82 in accordance with the movement direction instruction from the movement direction instruction unit 55a; an image processing unit 84 for calculating the height of the observation object WK corresponding to the set region in the optical axis direction based on focal length information stored in the storage unit 53 regarding part or all of the observation object WK corresponding to the set region; and a reference coordinate acquisition unit 85. The reference coordinate acquisition unit 85 acquires the coordinate position of the center of the observation image displayed in the image display area 111 as a reference position and registers it as the coordinate of the reference point. Furthermore, as described below, if the field of view movement trajectory also includes z-coordinate information, the reference coordinate acquisition unit 85 may acquire not only x-coordinates but also z-coordinates when registering the reference point. This magnification observation device 100 can calculate the average height (depth) in the optical axis direction of the observation object WK corresponding to a specified area using the image sensor 12.

[0048] The processor unit 51 can be configured with a general-purpose CPU, MPU, SoC, or a gate array such as an ASIC or FPGA customized for a specific application. While this example shows a configuration in which one CPU serves as the processor unit and realizes multiple functions, as described below, the present invention is not limited to this configuration, and the processor unit may be configured with multiple CPUs. For example, the processor unit may be configured with a so-called multi-core MPU. In this case, each function may be realized by multiple cores, or different functions may be assigned to each core for execution. Furthermore, the processor unit may be configured with a combination of a CPU and a GPU. In this case, the GPU may perform the functions of the display control unit 52 described above, and may also be configured to execute some or all of the functions assigned to the processor unit. (Route guide function)

[0049] This magnification observation device 100 is equipped with a route guide function that makes it easy to move the observation field along a preset route. For example, consider an application in which the observation object is a cylindrical workpiece WK2 as shown in Figure 6, and burrs and scratches on the circumference of its end face are observed using the magnification observation device. In this case, it is necessary to move the stage unit 30 so that the observation field displayed on the display unit 70 moves along the arc of the edge of the observation object.

[0050] Because the magnification is high during observation with a digital microscope, moving the observation field to the intended position can be somewhat difficult. When moving the stage manually, it is common to move the X and Y axes separately. For example, separate knobs are provided for moving the stage in the X and Y directions, and the user operates each knob to move in the desired direction. This method requires separate operation for movement in the X and Y directions, making it difficult to move to the desired position. For example, it was necessary to alternately move the X and Y axes to follow the arc of the cylindrical workpiece WK2 shown in Figure 6 during observation.

[0051] However, advances in digital microscopes have led to an increasing use of motorized XY stages in recent years, which enable free movement on the XY plane by operating an on-screen mouse or a joystick as shown in Figure 7.

[0052] However, in the case of mouse operations such as dragging and double-clicking, the operation must be performed continuously when moving a long distance.

[0053] Furthermore, even when moving continuously in a specified direction using a joystick or similar, the movement does not strictly follow the sample, but instead winds along the desired route, as shown in Figure 6. While the observation field of view is winding along, the user must continue to concentrate on the operation so as not to deviate from the desired route, which can be very stressful.

[0054] On the other hand, you can also use the image stitching function to take pictures in advance and check them later. However, in this case, it takes a lot of time from setting the shooting range to completing the shooting, and for users who just want to check whether there are burrs, the effort of taking pictures and saving them each time can be a big burden.

[0055] Therefore, the magnification observation device 100 according to this embodiment includes a route tracing mode in which a route for moving the observation field is set in advance, and when the movement direction indicator 55a is used to actually specify the observation field, the field of view movement mechanism 5 is controlled so that the observation field changes along the set route. By executing the route tracing mode, the user can move the observation field along a desired route, even if it is a complex path, simply by specifying a general direction using the movement direction indicator 55a. This allows the user to concentrate on the observation without being bothered by moving the stage unit 30. In the example shown in FIG. 7 above, an arc-shaped route RT is set in advance to follow the cylindrical end face, as shown in FIG. 8. Then, the observation field can be moved along the arc simply by tilting the joystick 55b, which serves as the movement direction indicator 55a, roughly to the right. In FIG. 8, the arrow DJ1 indicates the direction in which the joystick 55b is tilted. Normally, the observation field of view cannot be moved in an arc unless the tilt direction of the joystick 55b is gradually changed from right to upward along the tangent direction DS1 of the arc-shaped route. However, by executing the route tracing mode, it is possible to move the stage unit 30 in an arc along the route RT, i.e., in the direction of DS1, even while tilting the joystick 55b in a fixed direction DJ1, as shown in FIG. 8. In other words, it is possible to move the optical axis AX of the objective lens unit 25 on the mounting surface of the stage unit 30, bending along the circumference as shown in FIG. 8, without gradually changing the tilt direction DJ1 of the joystick 55b according to the position of the arc. In this way, the route tracing mode allows movement control in which the tilt direction DJ1 of the joystick 55b and the actual movement direction DS1 of the stage unit 30 are deviated from each other.

[0056] Furthermore, a forward direction and a reverse direction may be set in advance for the visual field movement trajectory and may be stored in the memory unit 56 together with the visual field movement trajectory. In this case, movement is controlled so that when β in FIG. 5 is tilted at an angle of 1° to 179°, movement proceeds in the forward direction, and when β is tilted at an angle of 181° to 359°, movement proceeds in the reverse direction. Note that which direction to move when tilted at an angle of 0° or 180° may be set as appropriate. The correspondence between the tilt angle β and the forward direction and the reverse direction is not limited to this example and may be set as appropriate.

[0057] Such operations are not limited to the joystick 55b. For example, virtual or physical movement buttons 55c, such as those shown in FIG. 9, can be provided, and instructions can be given by operating the buttons to move forward, backward, rightward, downward, up / down, or left / right. Furthermore, if the forward and backward directions are preset for the field of view movement trajectory and stored in the memory unit 56 together with the field of view movement trajectory, two buttons for specifying movement directions, such as a forward button and a back button, are sufficient. In this case, pressing the forward button controls the movement mechanism so that the observation field of view moves forward, and pressing the back button controls the movement mechanism so that the observation field of view moves backward. Furthermore, if a mouse with a wheel button is used as the movement direction instruction unit 55a, the direction of movement of the observation field can be specified like a joystick by moving the mouse cursor MC, which indicates the direction of movement of the field of view, around an icon IC, which is displayed by clicking the mouse wheel, as shown in FIG. 10.

[0058] As described above, the field of view movement trajectory calculated by the trajectory calculation unit 82 can include a curve. This has the advantage of allowing curved movement of the observation field, which has been troublesome in the past, to be easily performed. Furthermore, the field of view movement trajectory calculated by the trajectory calculation unit 82 can also include a bent portion. This has the advantage of allowing non-linear, bent movement of the observation field, which has been troublesome in the past, to be easily performed. (Movement control unit 83)

[0059] The movement control unit 83 can switch between a route trace mode and a free mode as a control method for the field of view movement mechanism 5. In the route trace mode, the movement direction instructing unit 55a controls the field of view movement mechanism 5 so that it follows the field of view movement trajectory calculated by the trajectory calculating unit 82. In the free mode, the field of view movement mechanism 5 is controlled in the movement direction instructed by the movement direction instructing unit 55a or to a specified coordinate position, regardless of the field of view movement trajectory. This makes it possible to easily move the observation field of view along the field of view movement trajectory in the route trace mode, while also allowing the user to freely move the observation field of view in the free mode.

[0060] The movement control unit 83 realizes smooth movement of the field of view movement function of the stage unit 30, etc., by anticipating changes in the field of view movement trajectory in advance so that the observation field of view moves smoothly along the field of view movement trajectory in accordance with the movement direction indicated by the movement direction indication unit 55a, such as the joystick 55b. Specifically, as shown in FIG. 11A, the movement control unit 83 calculates a predicted arrival point from the movement direction DS1 and movement speed of the stage unit 30, etc., as well as the movement direction DJ1 indicated by the joystick 55b, etc., i.e., the polling interval for monitoring the movement command. Then, as shown in FIG. 11B, the movement control unit 83 searches for the point closest to the calculated predicted point on the field of view movement trajectory, corrects the movement direction DS1 and movement speed of the stage unit 30, etc., and moves the stage unit 30, etc., toward the closest point. The stage is moved based on the calculated DS1, and the above process is repeated when the polling period has elapsed. This achieves smooth movement even when the field of view movement trajectory is curved. Furthermore, if forward and reverse directions are set in advance for the visual field movement trajectory and the joystick tilt angle β is associated with these directions, the movement speed may be changed according to the angle β. In this case, for example, the movement mechanism may be controlled so that the forward movement speed becomes faster as the angle β approaches 90°, and the reverse movement speed becomes faster as the angle β approaches 270°.

[0061] Here, a method for observing an enlarged image that realizes the route guide function will be described with reference to the flowchart in Fig. 12. First, in step S1201, the user is prompted to specify trajectory information related to the direction of movement of the observation field. For example, the trajectory specification unit 81 receives a reference point specification by the user as trajectory information.

[0062] Next, in step S1202, the trajectory calculation unit 82 calculates a field of view movement trajectory in accordance with the trajectory information. For example, an interpolated route is set based on a reference point specified by the user using the trajectory specification unit 81. Then, in step S1203, a user instruction for the movement direction of the stage unit 30 is accepted. Furthermore, in step S1204, the movement direction of the stage unit 30 is determined based on the specified movement direction and the interpolated route. Finally, in step S1205, the stage unit 30 is controlled based on the determined movement direction. (Trajectory instruction section 81, trajectory calculation section 82)

[0063] The trajectory instruction unit 81 specifies trajectory information relating to the direction of movement of the observation field. Based on the trajectory information specified by the trajectory instruction unit 81, the trajectory calculation unit 82 sets a trajectory, i.e., a route, along which the observation field will move. Here, the trajectory information may include, for example, multiple reference points. The trajectory calculation unit 82 calculates a route that passes through the multiple reference points specified by the trajectory instruction unit 81. For example, if the route is circular, three points on the circumference are specified as reference points. Furthermore, if the route is a combination of straight line segments, the start and end points of the line segments or bending points are specified as reference points. Note that the trajectory instruction unit 81 and the trajectory calculation unit 82 may be separate components or may be integrated.

[0064] The trajectory indication unit 81 and the trajectory calculation unit 82 can also approximate a route using a geometric shape prepared in advance. That is, after a geometric shape is selected in advance from the trajectory indication unit 81, a route can be calculated by the trajectory calculation unit 82 by specifying a point passing through this geometric shape as a reference point. Examples of geometric shapes include a circle, an ellipse, a rectangle, a polygon, a star, a straight line, a line segment, and a curve such as an arc. There are no particular restrictions on the geometric shape as long as it can be expressed on a two-dimensional plane. A circle, an ellipse, a Bezier curve, etc. can be specified by specifying three or more points. A polygon such as a rectangle can be specified by specifying vertices.

[0065] A geometric shape can be selected in the geometric shape selection section, and a reference point can be specified in the reference point specification section. For example, if a straight line or line segment is selected as the geometric shape GS1, by specifying two points as reference points on the display section 70 as shown in Fig. 13A, the straight line or line segment passing through these two points can be calculated as a route. For ease of explanation, this example shows a state in which the head section 4 is moved relative to the stage section 30.

[0066] Furthermore, as shown in FIG. 13B, if a circle is selected as the geometric shape GS2, three reference points can be specified to calculate the circle passing through these points as the route. Similarly, as shown in FIG. 13C, if a rectangle is selected as the geometric shape GS3, three vertices or four corners can be specified as reference points to calculate the route of the rectangle defined based on these points. Note that if the four corners are 90°, the rectangle can also be defined by three points. Furthermore, geometric shapes are not limited to simple ones such as circles or rectangles; complex shapes can also be specified. For example, any shape can be used, such as the union or intersection of multiple shapes, continuous line segments including bent portions, or a shape tracing a path indicated by a pointing device. For example, FIG. 13D shows an example of a partially broken circle as the geometric shape GS4, FIG. 13E shows an example of a star as the geometric shape GS5, and FIG. 13F shows an example of a shape composed of multiple continuous line segments as the geometric shape GS6.

[0067] Furthermore, the geometric shape does not need to be a closed figure such as a circle or a rectangle, and can also be a straight line, a curve, etc. For example, consider an example of observing each chip CP of an observation target in which multiple chips CP are discretely mounted on a substrate CB, as shown in Figure 14. In this case, by setting a reference point at the position of each chip CP according to the arrangement of the chip CP, a broken line route RT as shown in Figure 15 is set as the field of view movement trajectory. (Specific example of the trajectory indicator 81)

[0068] Specific examples of instructing trajectory information related to the definition of the movement direction of the observation field will be described with reference to FIGS. 16 to 18. These figures show an example in which the trajectory instruction unit 81 is implemented on a trajectory instruction screen 110, which is a user interface screen of a magnified image observation program for operating the magnified observation device, installed and executed on the main unit 50 of FIG. 1. Such a user interface screen is displayed on the display unit 70 of the magnified observation device 100 or on the monitor of an externally connected computer. The user performs various settings and operations of the magnified observation device 100 from the screen displayed on the display unit 70. This magnified image observation program is built into the main unit 50. It goes without saying that the layout, shape, display method, size, color scheme, pattern, etc. of each input field and each button in the example user interface screen of these programs can be changed as appropriate. Changing the design can also make the display easier to see, evaluate, and judge, or create a layout that is easier to operate. For example, appropriate changes can be made, such as displaying a detailed setting screen in a separate window or displaying multiple screens on the same display screen. On the user interface screens of these programs, the operation unit 55 is used to turn virtually provided buttons and input fields on and off, and to input numerical values ​​and commands. Here, imaging conditions and the like are set using an input device connected to a computer incorporating the programs. In this specification, "press" includes physically touching a button and operating it, as well as clicking or selecting a button using the input unit to simulate a press. The input / output devices constituting the operation unit 55 and the like are connected to the computer via wired or wireless connections, or are fixed to the computer and the like. Typical input units include various pointing devices, such as a mouse, keyboard, slide pad, trackpoint, tablet, joystick, console, jog dial, digitizer, light pen, numeric keypad, touchpad, and AccuPoint. These input / output devices can be used not only for program operation but also for hardware operation, such as the magnification observation device 100.Furthermore, the display unit 70 that displays the interface screen may use a touch screen or touch panel to allow the user to input or operate by directly touching the screen with their hand, or voice input or other existing input means may be used, or these may be used in combination.

[0069] The trajectory instruction screen 110 of the magnified image observation program shown in Figures 16 to 18 has an image display area 111 on the left side and an operation area 112 on the right side. Image data of the observation field is displayed in the image display area 111. In addition, buttons for performing settings necessary to execute the route guide function are displayed in the operation area 112. In this example, the items to be set by the user are arranged from top to bottom in the operation area 112 in the order shown in the operation area 112, and the user can use the route guide function by performing settings in the order shown in the operation area 112. In this way, the operation area 112 fulfills a guidance function that guides even those who are not familiar with the operation of a magnified observation device to easily perform the necessary settings. Specifically, the operation area 112 has a route guide setting section 113 in the upper row, a route display area 120 in the middle row, and a route guide execution display field 122 and a route guide start button 124 in the lower row.

[0070] The route guide setting unit 113 has components for setting the geometric shape of the route. Specifically, the route guide setting unit 113 has a geometric shape selection button 114, a "Register" button 115, an "Undo" button 116, a "Reset" button 117, and the like. The geometric shape selection button 114 is a component for selecting the geometric shape of the route. In this example, three geometric shapes are prepared: a circle, an ellipse, and a polygon, and the user can select one of them. The number of reference points that must be specified varies depending on the geometric shape selected with the geometric shape selection button 114. For example, as described above, if the geometric shape is a circle, the circle will pass through the three specified reference points. If the geometric shape is a polygon, the line will be a straight line connecting the specified reference points.

[0071] The "Register" button 115 is a component for registering a specified point as a reference point. The "Undo" button 116 is a component for deleting the last specified reference point. The "Reset" button 117 is a component for deleting all specified points.

[0072] This example shows a state in which a circle has been selected using the geometric shape selection button 114. When a circle is selected, the route guide setting unit 113 displays a schematic diagram indicating that three points must be specified to define the circle. The user moves the observation field displayed in the image display area 111 to sequentially specify the three points. Specifically, the user moves the field of view movement mechanism 5 to adjust the desired position of the observation object so that it is at the center of the observation field. After positioning is complete, the user presses the “Register” button 115. The reference coordinate acquisition unit 85 shown in FIG. 2 acquires the coordinate position of the center of the observation image displayed in the image display area 111 as a reference position and registers it as the coordinate of the reference point. At the same time, the observation field including the registered reference position is displayed in the route display area 120 in a reduced size. As will be described later, if the field of view movement trajectory also includes z-coordinate information, the reference coordinate acquisition unit 85 may acquire not only x-y coordinates but also z-coordinates when registering the reference point.

[0073] The route display area 120 is a component for displaying the specified reference points and the set visual field movement trajectory. The display scale of this route display area 120 can be changed each time a reference point is specified so that all of the specified reference points fit within the image.

[0074] Furthermore, a wide-area image showing the entire observation target can be displayed in the route display area 120. The wide-area image is image data captured with the objective lens unit 25 at a low magnification to widen the observation field. In the wide-area image, a rectangular portion of the observation field registered as a reference point is displayed. As the user sequentially specifies reference positions in the image display area 111, a rectangular image of the observation field including the registered reference position is displayed in the corresponding portion of the wide-area image displayed in the route display area 120. FIG. 17 shows a state in which a second reference position is registered following FIG. 16. FIG. 18 shows a state in which a third reference position is registered. In this state, a circle passing through the three reference positions is established, and the field of view movement trajectory is determined. Furthermore, the display magnification in the route display area 120 is automatically adjusted so that all registered reference positions are displayed. In the example of FIG. 18, because the display magnification in FIG. 17 is insufficient to display all three reference positions, the display magnification is automatically adjusted to display a circle including all three reference positions by lowering the display magnification. In this way, by being able to view the entire view movement trajectory and the specified reference position in one image, the user can easily visually grasp the correspondence between the reference position specified by the user and the view movement trajectory.

[0075] The route guide execution display field 122 displays a message to notify the user that the route trace mode has been selected. For example, while the route guide is being set or executed, "Route guide in progress" or the like is displayed. When the route trace mode is cancelled, messages such as "Route guide cancelled" or "Guidance will start when you move onto the route" are displayed, and the user can be informed of the procedure for returning to the route guide function.

[0076] The route guide start button 124 is a component for executing the route guide function. The route guide start button 124 cannot be pressed until the settings required to execute the route guide function have been completed. Specifically, since the number of reference points that need to be specified varies depending on the selected geometric shape, the route guide start button 124 is grayed out until the required number of reference points have been specified. The user is prompted to perform settings in order from the top of the operation column, and once all the setting work has been completed, the route guide start button 124 becomes selectable. When the route guide start button 124 is pressed in this state, route guidance begins and the movement of the stage unit 30 is restricted. (Root completion)

[0077] The calculation of the visual field movement trajectory is performed by a trajectory calculation unit 82 based on trajectory information input from a trajectory specification unit 81. The trajectory calculation unit 82 interpolates coordinates between multiple reference points and completes the visual field movement trajectory as an interpolated route. Furthermore, the trajectory calculation unit 82 changes the interpolation algorithm based on the selected geometric shape. Note that the trajectory information is not limited to multiple reference points, and other specification methods can also be used as appropriate. For example, trajectory information specifying a circular trajectory can be specified by the center coordinates and radius of the circle.

[0078] Up to this point, we have mainly described methods for specifying a circular trajectory. Next, we will explain the case of specifying a linear field of view movement trajectory with a bent portion, with reference to FIGS. 14 and 15. First, when a straight line is selected as the geometric shape GS2 in FIG. 13B, by specifying two or more points as reference points, a straight line passing through these points can be calculated as the field of view movement trajectory. In FIG. 14, I to IV indicate the field of view and the order in which they are specified as reference points. When a straight line is specified as the geometric shape GS2, when a reference point is specified, the order in which the reference points are specified may be stored in the memory unit 56 along with the coordinates of the reference points. In this case, the field of view movement trajectory is calculated so that the reference points are interpolated in the order in which they are specified. That is, if the reference points are specified in the order I to IV in FIG. 14, the field of view movement trajectory shown in FIG. 15 is calculated. Furthermore, when the forward direction and reverse direction described above are stored in association with the field of view movement trajectory, the direction from the earliest to the latest in the order in which the reference points are specified may be set as the forward direction, and the reverse direction may be set as the reverse direction. That is, in FIG. 15, the direction from I to IV is set as the forward direction, and the direction from IV to I is set as the reverse direction.

[0079] Furthermore, the trajectory information for determining the direction of movement of the observation field of view is not limited to the method of specifying a reference point on the screen of the display unit 70 described above, but can also be obtained by, for example, directly inputting the coordinate position as a number or specifying the field of view movement trajectory using a mathematical formula.

[0080] In addition, when placing an observation target in a fixed position on the stage unit 30, for example, when using a positioning jig to place the same sample in the same position on the stage unit 30 each time, the field of view movement trajectory can be set once to match the jig's design values, allowing route guidance to be performed under the same conditions thereafter. In other words, there is no need to move the stage unit 30 each time to register a reference position and set the field of view movement trajectory. Furthermore, by storing the field of view movement trajectory settings in the memory unit 56, the route can be reproduced by recalling the stored settings. In this case, for example, the coordinates of each reference point acquired by the reference coordinate acquisition unit 85 and the geometric shape selected and accepted by the trajectory designation unit 81 are stored as setting information for the field of view movement trajectory. When recalling the stored settings to reproduce a route, the route is reproduced based on the coordinates and geometric shape of each reference point. Furthermore, if the lens and magnification used when the reference point was specified are also stored, the field of view movement trajectory is reproduced based on this information and the current lens and magnification information, after performing the field of view deviation correction described below.

[0081] Furthermore, the view movement trajectory can be specified not only by a geometric shape but also automatically extracted from an image. For example, a wide-area image of the observation object WK3 shown in FIG. 19A is captured, and a contour PL is extracted by edge extraction as shown in FIG. 19B. If the movement is set to follow all or part of this contour PL, the trajectory specifying unit 81 or the trajectory calculating unit 82 can automatically obtain trajectory information and acquire the view movement trajectory, thereby reducing the user's effort of manually specifying trajectory information each time. Edge extraction can be performed, for example, by connecting extraction points to obtain a contour, or by approximating the line connecting the extraction points with a straight line or curve.

[0082] 19A, the entire image of the observation object is displayed on one screen, and the shape of the observation object is extracted to set the field of view movement trajectory. Alternatively, the observation object may be partially displayed, and the contours may be sequentially extracted while the observation field is moved to set the field of view movement trajectory. For example, as shown in FIGS. 20A and 20B, the observation field of view may be updated while the XY stage is moved, and the contour may be acquired in real time from the image of the observation object WK4, thereby automatically detecting the field of view movement trajectory. Such automatic acquisition of the field of view movement trajectory can be performed by the trajectory instruction unit 81 or the trajectory calculation unit 82.

[0083] After setting the field of view movement trajectory as described above, when the route trace mode is executed, the user can move the observation field of view along the field of view movement trajectory even with a rough instruction, without having to specify the movement direction of the field of view movement mechanism 5 in detail using the movement direction instruction unit 55a such as the joystick 55b. That is, in the route trace mode, the movement direction specified by the movement direction instruction unit 55a is compared with the direction of the field of view movement trajectory, and if it is within a predetermined range of the field of view movement trajectory, it is determined that a movement instruction along the field of view movement direction has been issued, and the field of view movement mechanism 5 is moved. As a result, even while the observation field of view is being moved, the center of the observation field of view is always moved to be on the field of view movement trajectory, so the user can always observe the observation object in an easy-to-view position even while moving the observation field of view.

[0084] In this way, simply tilting the joystick 55b in a general direction allows the observation field of view to move along the specified route for easy viewing. The tilt direction of the joystick 55b, i.e., the tilt angle β, is specified within a range of 0° to less than 360° in the plan view shown in FIG. 5, for example. When using this joystick 55b to move along the route RT of the field of view movement trajectory in the straight section P3 to P4 as shown in FIG. 15, as described above, the movement in the field of view movement direction continues as long as the joystick 55b is tilted within a range of ±90° relative to the field of view movement direction, i.e., within the area in the direction of travel defined by a line perpendicular to the field of view movement direction. On the other hand, if it is not within this range, i.e., if the joystick 55b is tilted in a direction generally opposite to the direction of travel or is not tilted, the movement of the observation field of view stops. Furthermore, if the field of view movement trajectory is a curve such as an arc, the tangent at the current position on the field of view movement trajectory is compared with the movement direction, and similarly, if it is within a predetermined angle range, route guidance continues.

[0085] On the other hand, when the movement direction instruction by the movement direction instruction unit 55a is made at a position where the field of view movement trajectory is bent, such as at position P2 in Fig. 15, whether or not the observation field of view can be moved is determined using the bisector that bisects the angle of the field of view movement trajectory formed by the bent position. That is, in the example of Fig. 15, if the movement direction is instructed at an angle that falls in the range above the bisector indicated by the dashed line, the observation field of view is moved in the direction from 2 to 3. On the other hand, if the movement direction is instructed at an angle that falls in the range below the bisector, the movement of the observation field of view is stopped.

[0086] The movement speed of the observation field of view may also be changed depending on the tilt direction of the joystick 55b. For example, the movement speed of the observation field of view, for example, the movement speed of the stage unit 30, may be increased as the tilt direction of the joystick 55b is closer to the field of view movement trajectory, i.e., the smaller the angular difference between the two, and the movement speed may be decreased as the angular difference is greater. Furthermore, as described above, when the movement speed of the observation field of view, for example, the movement speed of the stage unit 30, is changed depending on the tilt angle α of the joystick 55b in the vertical direction, the movement speed of the stage may be changed depending on the tilt direction of the joystick 55b in a plan view (tilt angle β) and the tilt angle α in the vertical direction.

[0087] The memory unit 56 may also store the lens type, magnification, and movement speed settings in association with each other. In this case, the movement speed of the observation field can be changed depending on the lens type and magnification used during observation. The higher the magnification, the greater the movement amount of the observation field relative to the movement amount of the field of view movement mechanism 5. Therefore, it is desirable to change the movement speed setting depending on the lens type and magnification. In this case, a consistent operational feel can be obtained regardless of the selected lens type and magnification. The movement speed setting may also be changed depending on the aspect ratio of the observation field. For example, if the observation field of view is vertically long, horizontal movement will be perceived as relatively fast. Therefore, the vertical and horizontal movement speeds of the observation field of view can be set to be constant depending on the aspect ratio. (Field of view offset correction function)

[0088] It is also possible to change the display magnification in the image display area 111 during observation. To enable operation according to the set route even after the magnification is changed, the magnification observation device 100 is provided with a field of view deviation correction offset function that automatically corrects field of view deviation when the magnification is changed. This will be described in detail below.

[0089] When the objective lens unit 25 or other components are switched to change the magnification, the center position of the observation field may shift. For example, in the observation field shown in FIG. 21A, if the display magnification is increased by mechanically switching the objective lens units 25 provided on a rotating revolver by rotating the revolver, the center CS of the field of view, indicated by the intersection of the cross-shaped grid lines, will be displayed shifted, as shown in FIG. 21B. For this reason, a known technique is to calculate and store the shift amount of the center CS of the field of view in advance, and then, when the magnification is switched, move the XYZ stage by the shift amount to correct the field of view shift. For example, as shown in FIG. 21C, the field of view moving mechanism 5 is automatically moved from the state shown in FIG. 21B so that the center CS of the field of view corresponds to the position of the center CS of the field of view previously shown in FIG. 21A.

[0090] However, if the route set in route tracing mode is managed using stage coordinates, moving the XY stage due to such corrections will result in the field of view after switching being on the route, but being deemed off the route in stage coordinates. Furthermore, the route set in route tracing mode contains information not only in the XY plane but also in the Z direction. Conventional field of view deviation correction functions only correct in the XY plane, and therefore cannot correct deviations in the vertical direction. Therefore, in the magnification observation device 100 according to this embodiment, when deviation correction is performed, the route itself is offset by the deviation correction amount, as shown in FIG. 22, to ensure that the route after deviation correction is consistent. This field of view deviation correction offset function can be performed not only in the XY plane but also in the vertical direction, i.e., the Z direction. Such a field of view deviation correction offset function can be performed by the trajectory calculation unit 82.

[0091] Note that the field of view center shift when switching magnification is not limited to when switching the objective lens unit 25 using a revolver or the like or when physically replacing the objective lens unit 25, but can also occur when enlarging or reducing using a zoom optical system. The magnification observation device 100 according to this embodiment does not limit the use of the field of view shift correction offset function to when switching the objective lens unit 25, but can be used in any situation where field of view shift occurs.

[0092] The route offset function can also be used for other purposes. For example, if it is difficult to always place a sample in the same position on a previously set route, you can offset the entire route by specifying that any point on the route corresponds to the current field of view. For example, in Figure 23, by specifying a position on the field of view movement trajectory that corresponds to the observation field of view, such as RA, the entire field of view movement trajectory will be offset according to that specification, as shown by RB.

[0093] As described above, the magnification observation device 100 has a route tracing mode in which the route guide function is executed, and a free mode in which the route tracing mode is canceled. In the route tracing mode, as described above, the movement control unit 83 controls the movement direction instructing unit 55a to operate the field of view movement mechanism 5 so as to follow the field of view movement trajectory calculated by the trajectory calculating unit 82. On the other hand, in the free mode, the movement control unit 83 controls the field of view movement mechanism 5 to operate in the movement direction instructed by the movement direction instructing unit 55a, regardless of the field of view movement trajectory. With this configuration, the route tracing mode easily realizes movement of the observation field of view along the field of view movement trajectory, while also accommodating the user's free movement of the observation field of view. (Route guide release section 55d)

[0094] The magnification observation device 100 may also be provided with a route guide canceling unit 55d. The route guide canceling unit 55d is a component for canceling the route trace mode while the route trace mode is being executed. The route guide canceling unit 55d may detect a canceling condition for canceling the route trace mode and automatically switch from the route guide mode to the free mode, or may be configured to accept an explicit instruction from the user to cancel the route trace mode. The canceling condition for the route guide canceling unit 55d to automatically cancel the route guide may be, for example, when the movement direction or movement position of the field of view movement mechanism 5 differs from the field of view movement trajectory calculated by the trajectory calculation unit 82 by a predetermined value or more. When the movement destination is specified by coordinates, the predetermined value may be different for each magnification. Here, a case where the movement position is used as the cancellation condition will be described with reference to FIGS. 24 to 26. The example in FIG. 24 illustrates a case where a circle position is specified as a movement position PT using a pointing device such as a mouse or touch panel as a movement position to which the observation field of view is moved relative to the route RT of the field of view movement trajectory set in an arc shape. When a new movement position PT is specified, the route guide cancel unit 55d calculates the distance between the specified movement position and the field of view movement trajectory. If this distance is equal to or greater than a predetermined value, the cancellation condition is met and the route trace mode is canceled as shown in FIG. 25. That is, the field of view movement mechanism 5 controls the stage unit 30 to move away from the field of view movement trajectory and to the specified movement position. Alternatively, the route trace mode may be canceled when an area other than the area displayed as the observation field of view is specified. Note that, as shown in FIG. 26, the route trace mode can be returned to by again specifying a position closer to the field of view movement trajectory (details will be described later).

[0095] The movement direction may also be used as another cancellation condition. In this case, the route guide cancellation unit 55d determines whether the movement direction of the observation field of view indicated by the movement direction indication unit 55a is within a predetermined angle range with respect to the field of view movement trajectory. If it is within the angle range, the route tracing mode continues. If it is outside the angle range, the route tracing mode is canceled and the mode transitions to free mode. Here, the movement direction of the observation field of view is the inclination angle β indicated by the movement direction indication unit 55a, such as the joystick 55b. Furthermore, if the field of view movement trajectory is a straight line, the angle between the movement direction of the observation field of view and the field of view movement trajectory is the angular difference between this straight line and the movement direction of the observation field of view. Furthermore, if the field of view movement trajectory is a curved line, the angle is the angular difference between the tangent direction of the curve and the movement direction of the observation field of view. (Cancellation condition setting section)

[0096] The user may also be able to set a cancellation condition for canceling such route tracing mode. For example, a cancellation condition setting screen 130 as shown in Fig. 27 may be provided as a cancellation condition setting unit for setting the cancellation condition. In this example, the user can select either the distance between the movement position and the visual field movement trajectory or the angle difference between the movement direction and the visual field movement trajectory as the cancellation condition, and can also set the range of the selected distance or angle.

[0097] Alternatively, the movement control unit 83 may automatically switch the route tracing mode on and off without providing a physical route guide canceling unit. For example, if the movement direction indicated by the movement direction indicating unit 55a with respect to the observation field of view of the image data is within a predetermined angle range with respect to the direction in which the observation field of view should be moved along the field of view movement trajectory calculated by the trajectory calculating unit 82, the route tracing mode continues, and if it is outside the predetermined angle range, the mode is switched from the route tracing mode to the free mode.

[0098] In route tracing mode, when a direction of movement is specified, the mode will be controlled to stay on the route. On the other hand, if a destination is specified by coordinates, such as by dragging the mouse, specifying coordinates, or moving the origin, route tracing mode will be turned off. In this case, route tracing mode does not turn off immediately, but rather when the user moves a certain distance from the route. This certain distance can be set, for example, to 30% of the observation field of view. Also, even if route tracing mode is turned off once the user moves away from the route, it will automatically turn back on if the user approaches the route and moves again. For example, if you discover something interesting while moving the observation field of view along a route, you can drag the mouse in that direction, check it, and then push the joystick back in the direction of the route to naturally resume movement along the route. (Route guide ON / OFF display function)

[0099] Because movement of the observation field of view in the X and Y directions is restricted while the route guide function is in operation, it is preferable to notify the user that the route tracing mode is in progress. Similarly, it is also desirable to notify the user that the route tracing mode has been canceled. Therefore, the magnification observation device 100 according to this embodiment is equipped with a route guide ON / OFF display function that indicates whether the route guide is ON or OFF. Specifically, the display mode of the field of view movement trajectory on the display unit 70 is changed depending on whether the route tracing mode is ON or OFF. For example, the field of view movement trajectory is overlaid directly on the image being observed, displayed in the image display area 111. This allows the user to predict the direction of travel while operating the device. The display mode may be changed not only in the image display area 111 but also in the route display area 120. Furthermore, as shown in FIGS. 28A and 28B, a navigation display screen 140 for displaying low-magnification images may be separately provided on the display unit 70, and the display mode of the route corresponding to the field of view movement trajectory may be changed on this navigation display screen 140. Figure 28A shows a state in which the field of view movement trajectory is displayed superimposed on a low-magnification image displayed across the entire navigation display screen 140, and Figure 28B shows a state in which a field of view wider than the image obtained is displayed on the navigation display screen 140, and the field of view movement trajectory is displayed even in areas where there is no image data.

[0100] By providing such a route guide ON / OFF display function that indicates whether the route guide is ON or OFF, the user can visually recognize that the route trace mode has been canceled. For example, when the route trace mode in FIG. 24 is canceled and the free mode is entered, as shown in FIG. 25, the route RT of the visual field movement trajectory, which was displayed as a solid line in the image display area 111, changes to a route RT' displayed as a dashed line. At the same time, as shown in FIG. 29A, the circular visual field movement trajectory displayed in the route display area 120 also changes from the route RT displayed as a solid line to the route RT' displayed as a dashed line as shown in FIG. 29B. Additionally, a message such as "Guidance will begin when you move onto the route" may be displayed. This allows the user to be guided through the procedure for resuming the route trace mode. Furthermore, the display of the visual field movement trajectory is not limited to switching between solid and dashed lines as in this example. Any other display mode, such as changing the display color, changing a thick line to a thin line, or graying out, may be used. Such a change in the display mode of the visual field movement trajectory may be performed by the route guide canceling unit 55d or the trajectory calculation unit 82.

[0101] Furthermore, in free mode, if the observation field of view approaches the field of view movement trajectory, the system can be returned to route tracing mode. That is, even after switching to free mode, the route guide canceling unit 55d continues to determine whether the cancellation condition is met, and if it detects that the cancellation condition is not met, it returns to route tracing mode. For example, if it detects that the moving position approaches the field of view movement trajectory from the state shown in FIG. 25, as shown in FIG. 26, the system executes route tracing mode again. In response to this, the display mode of the field of view movement trajectory is also changed from free mode to route tracing mode, for example, from a dashed line to a solid line. For example, while sequentially observing target portions of an observation object in route tracing mode, if the user temporarily discovers a site of interest and moves the observation field of view off the route, even if the user wishes to return to the original observation field after finishing the temporary observation and continue the observation, by moving the observation field of view closer to the field of view movement trajectory, the user can easily move the observation field of view along the field of view movement trajectory again using the movement direction indicator 55a.

[0102] In the above example, the route guide canceling unit 55d is configured to automatically cancel and return the route tracing mode. However, the present invention is not limited to this configuration, and the route tracing mode may be explicitly switched on and off. For example, a member such as a mode changeover switch may be provided as the route guide canceling unit, allowing the user to explicitly switch the route guide on and off.

[0103] In the above example, the instruction to cancel the route tracing mode can be accepted either when the observation field of view is moving or when the observation field of view is temporarily stopped.

[0104] In the above example, the route guide canceling unit 55d is configured to determine whether the canceling conditions for canceling the route guide mode are met, but the canceling conditions may be determined by another component, such as the trajectory calculation unit 82 or the movement control unit 83. In addition, when the functions of the route guide canceling unit 55d and the trajectory calculation unit 82 are realized by a processor unit, it is also possible to have a common component execute the determination of the canceling conditions and the calculation of the field of view movement trajectory. [Embodiment 2]

[0105] In the above example, a pointing device such as a mouse is used as the route guide release unit 55d. In other words, the route guide release unit 55d is provided separately from the movement direction instruction unit 55a such as the joystick 55b. In this way, the movement direction instruction unit 55a and the route guide release unit 55d may be configured as separate components, or the functions of the movement direction instruction unit 55a and the route guide release unit 55d may be realized by a common component. For example, in the magnification observation device 200 according to the second embodiment shown in FIG. 30, the movement direction instruction unit 55a and the route guide release unit 55d are realized by a single operation unit 55. For example, a mouse may be used as the operation unit 55, and the function of the movement direction instruction unit 55a may be realized by a drag operation of the mouse, and the function of the route guide release unit 55d may be realized by input from the mouse. Similarly, the functions of the movement direction instruction unit 55a and the route guide release unit 55d may be realized by a keyboard, or the functions of the movement direction instruction unit 55a and the route guide release unit 55d may be realized by an input device combining a mouse, a keyboard, and the like. (Search Writing)

[0106] Furthermore, during route tracing mode, a searchlighting function can be implemented to automatically change the illumination direction while moving the observation field of view along a set route. For example, as shown in Figures 31A-31D, the one-way illumination of the illumination unit 60 can be switched between four directions in sequence. This allows the user to notice flaws or other defects that are difficult to see only with illumination from a specific direction while moving the stage unit 30. In other words, in the past, it was difficult to accurately move along the entire circumference, and the user had to try out illumination patterns in all directions, which required time and effort. This forced users to resort to simple measures such as lowering the magnification and checking only a portion, which resulted in the risk of overlooking something. In contrast, the magnification observation device 100 of this embodiment combines the route guide function with the searchlighting function, thereby achieving observation with significantly reduced user burden.

[0107] 31A to 31D illustrate an example in which the ring illumination unit 63 or coaxial illumination of the illumination unit 60 shown in FIG. 3B is divided into four blocks in the vertical and horizontal directions, and the lighting pattern of each divided illumination block is sequentially switched clockwise. By rotating the illumination direction in a fixed direction in this way, the illumination changes relatively smoothly, and the appearance of scratches can be changed so that they gradually become easier to see or gradually become harder to see, making it easier for the user to search for scratches, etc. Of course, the illumination direction may be counterclockwise, and the division of the illumination blocks is not limited to four, and may be two, three, five, or more blocks.

[0108] Furthermore, with the searchlighting function, the lighting direction is continuously switched. If the user finds something that appears to be a scratch, they can specify the location of the scratch on the screen of the display unit 70, and the lighting direction will automatically switch to the lighting direction that best visualizes the specified location. For example, if the user clicks on a location of interest in the image display area 111 with a pointing device such as a mouse while the observation field is moving and the lighting direction is rotating, the lighting rotation will stop and the lighting direction will automatically switch to the lighting direction that best visualizes the scratch. The appropriate lighting direction is selected, for example, by the image processing unit. For example, while the searchlighting function is running, image data for which the lighting direction is being switched—in this case, four image data corresponding to the lighting directions up, down, left, and right—are stored in the buffer memory 57. Then, when a mouse click is detected, the lighting direction switching is stopped and the image data for each of the most recent lighting directions stored in the buffer memory 57 is analyzed. For example, image data with a distribution that makes the scratch more visible based on a brightness histogram or the like is selected, and the lighting direction used in that image data is selected, and the display on the display unit 70 displays a live image fixed in that lighting direction. For example, in the examples of Figures 31A to 31D, the lighting direction corresponding to the image in Figure 31D is selected, thereby realizing a display mode in which scratches are easy to see.

[0109] As the display magnification increases, the entire image may become out of focus. Therefore, multiple images can be captured while moving the Z stage, and the in-focus pixels can be combined to generate an all-in-focus image. This combination process can also be performed when the XY stage stops. By automatically combining all-in-focus images when the stage unit 30 stops, the user can move along a route and simply stop the stage unit 30 when an object of interest is captured, generating an all-in-focus image of that area for review. Furthermore, composite images can be created by changing shooting conditions such as lighting brightness and exposure time. For example, Differential Phase Contrast (DPC) can be used to combine images with different lighting directions, enhancing the display of fine irregularities. Furthermore, HDR and other technologies can be used in combination, such as combining pixels without halation by switching lighting directions.

[0110] When inspecting parts for burrs or chips, it is extremely important to ensure nothing is overlooked. Therefore, while observing the entire circumference of the part as a route, it is possible to continue recording video as a record of the inspection.

[0111] It is also possible to maintain focus during XY movement by acquiring the 3D shape of the sample in advance from a low-magnification image as shown in Figure 32A, or by estimating the tilt of the sample plane within the observation field as shown in Figure 32B. Note that when acquiring the 3D shape from a low-magnification image, the focus does not necessarily become highly accurate.

[0112] An example of a profile obtained by acquiring a 3D shape from a low-magnification image is shown in Figure 33. In this figure, the true shape of the object being observed is shown by a dashed line, and the 3D shape acquired from the low-magnification image is shown by a solid line. As shown on the left side of the figure, the edges of the field of view are detected as raised due to the influence of the mirror curvature of the lens. Furthermore, in areas that are bent, such as rising, the 3D shape is detected as dull.

[0113] Therefore, autofocus can also be used when the XY movement of the stage unit 30 is stopped. By offsetting the entire 3D shape using the Z coordinate after autofocus is performed, it is possible to reduce focus shifts when movement begins. This also makes it possible to deal with cases where the 3D shape is distorted due to the effects of lens field curvature, etc. (autofocus processing)

[0114] In image autofocus processing, a still image is captured at the in-focus position while moving the Z position. In this case, the image capture process is required for the range searched in the vertical direction. Typically, several dozen images are captured and combined at equal intervals. The autofocus process can be performed manually by the user using a dedicated execution button, or automatically. For example, autofocus can be performed automatically when the movement of the observation field of view has stopped. The movement of the observation field of view can be determined to have stopped when the input of an operation signal from the field of view movement mechanism 5 is no longer received, or when a change in the image is detected and the amount of change falls below a predetermined value. For example, if the image does not change for a certain period of time (e.g., several seconds) in live video, it can be determined that the movement of the observation field of view has stopped, autofocus can be performed, and a focused still image (autofocus image) can be displayed. This allows a focused still image to be displayed even when the user has stopped the movement of the field of view, making it easier to check details.

[0115] In addition, in a method for estimating the tilt of the sample plane within the observation field, the Z stage is moved each time the XY movement stops, and the tilt at the field of view where it stops is continuously determined. This is shown in Figure 34. As shown on the left side of the figure, the stage unit 30 is moved in the Z direction at the starting position to estimate the plane. Then, as shown in the center of the figure, the plane is estimated when the XY movement stops. Accuracy is improved by using these two points in combination with the height information measured earlier. Furthermore, as shown on the right side of the figure, the process of estimating the plane is repeated when the stage unit 30 stops again, further improving accuracy.

[0116] In this way, for samples of flat but tilted objects, the accuracy of the estimated plane improves with repeated movement and stopping.It goes without saying that the functions mentioned above can also be used in combination, such as by sequentially switching the lighting during XY movement along a route and recording the process.

[0117] Next, the setting of the route of the visual field movement trajectory will be described in detail. It is possible to set a plurality of visual field movement trajectories on the stage unit 30. In this case, when moving between a plurality of routes, the route trace mode is temporarily turned off.

[0118] Furthermore, when setting a route, the reference coordinate acquisition unit 85 may be configured to register not only XY coordinates but also Z coordinates, i.e., information regarding the relative distance between the focal position of the objective lens unit 25 and the observation target. This allows movement along the desired observation position even in cases where the observation target has an inclined surface. For example, when setting the circular field of view movement trajectory described above, the reference coordinate acquisition unit 85 can also acquire Z-direction information when specifying three reference points. This allows the inclination of the plane to be calculated from the information on the three reference points. In other words, a 3D field of view movement trajectory can be calculated. Therefore, by setting the field of view movement trajectory within the calculated plane, the route guide function can be realized along an inclined plane in a focused state. In other words, because the field of view movement trajectory retains information regarding the relative distance between the focal position of the objective lens unit 25 and the surface of the observation target, the movement mechanism can be controlled to move the observation field of view along the 3D field of view movement trajectory.

[0119] Routes in three-dimensional space can also be managed as a point cloud. They can also be managed as a figure projected onto the XY plane. For example, to set a circular view-field movement trajectory when viewed from directly above, three points specified in three-dimensional space as shown in Figure 35A are projected onto the XY plane as shown in Figure 35B, and a circle is defined on the XY plane based on the three projected points as shown in Figure 35C. This makes it possible to handle the view-field movement trajectory as data obtained by mapping three-dimensional data onto the XY plane, simplifying calculation processing.

[0120] The XY stage simply moves the stage unit 30 along a circle on the XY plane calculated as described above. The Z stage can move along a specified route in three-dimensional space as shown in Figure 36B by constantly calculating the Z coordinate corresponding to the XY coordinate of movement based on the plane calculated in three-dimensional space as shown in Figure 36A. By knowing the equation that defines the inclined plane calculated in three-dimensional space as shown in Figures 36A and 36B, the Z coordinate can be determined by projecting the XY plane onto this inclined plane.

[0121] In the case of a polygon, it can be projected onto the XY plane in the same way and the XY stage can be operated. In this case, by calculating the Z coordinate based on the slope between points as shown in Figures 37A and 37B, it becomes possible to move along the route intended by the user even while moving between points.

[0122] Furthermore, even when routes intersect on the XY plane, the direction to proceed can be determined based on the direction of joystick 55b, etc. For example, in the example shown in Fig. 38, if joystick 55b is tilted within a range of ±90° with respect to the direction of travel, the robot will proceed straight, if it is in the range of +90° to +180°, the robot will turn left (upward in the figure), and if it is in the range of -90° to -180°, the robot will turn right (downward in the figure).

[0123] Alternatively, the direction of travel may be automatically determined based on the shape unit registered, such as a line segment or circle. Especially when the Z coordinate is also being tracked, it is preferable to determine the movement direction based on the shape unit. For example, if the lines intersect at a twisted position, as shown in Figure 39, an unintended Z-axis rise may occur, causing stress to the user. If the user operates the Z stage while the Z coordinate is being tracked, the route is offset to the position where the operation is completed. When the user moves the stage unit 30, it is likely that the object being observed is not in focus. For example, if the registration point is too close, as shown in Figure 40, the movement may cause the image to become out of focus. It is preferable that the process of offsetting the route to the Z coordinate operated by the user be performed in the same way when the Z stage is moved while the XY stage is stopped. For example, as shown in the lower left of Figure 41, if the XY movement is temporarily stopped and the stage is manually moved in the Z direction while automatically tracking along the route, when movement in the XYX directions is resumed, the stage will move along the offset route.

[0124] Furthermore, if managing Z stage operation while the XY stage is moving becomes cumbersome, you can either exclude Z stage operation or stop Z tracking when the stage is operated. For example, as shown in the lower left of Figure 42, if the stage is being automatically tracked in the XYZ directions along the route, and then manually moved in the Z direction during XY movement, Z tracking is stopped and the route guide function works only for movement in the XY directions.

[0125] It is also possible to configure the offset not to be performed even if movement is made in the Z direction during movement in the X and Y directions, and to perform the offset only when movement in the X and Y directions is stopped.

[0126] If the offset is set to the Z coordinate at the time the XY stage movement begins, even if Z tracking stops working and blur becomes noticeable, the user can simply stop the XY stage, adjust the focus, and then resume XY stage movement.

[0127] When the user explicitly moves to a specific location, such as by clicking the mouse on the screen to move the XY stage, it is possible to temporarily allow movement off the route. In such cases, turning the movement mode off, moving to the tip, then turning the mode back on and returning to the route is a time-consuming process. Therefore, dragging the screen allows movement off the route and temporarily turns the mode off. Returning to the route using joystick 55b or another method automatically turns the mode back on. When the mode is temporarily turned off, the user is notified by a preview or other display. In addition to dragging, other operations that can cause movement off the route include commands to move to the XY stage origin and move to specified coordinates. The determination of whether or not the user is on the route can also be managed with a certain degree of granularity. This prevents chattering between the on and off modes, even if a slight overrun occurs when returning to the route. (surface observation)

[0128] While the above example illustrates observation along the contour of an object under observation, the present invention is applicable not only to linear observation but also to planar observation. That is, it is also possible to automatically set a route within a predetermined area. For example, this is useful for visually scanning the entire area of ​​a circular object under observation, as shown in FIG. 43A. First, an overall image is acquired for the observation field of view shown in FIG. 43A. For example, as shown in FIG. 43B, an image of the entire view is synthesized while moving the observation field of view. Alternatively, the observation field of view may be moved along the contour, or the magnification may be adjusted to a low level so that the entire view fits within the observation field of view. Once the contour of the object under observation is obtained in this way, a field of view movement trajectory is set so that the entire inner surface of this contour can be observed. For example, as shown in FIG. 43C, the trajectory calculation unit 82 automatically calculates a route for the outer peripheral area based on the size of the current observation field of view.

[0129] As described above, the user can easily move the observation field of view along the field of view movement trajectory calculated by the trajectory calculation unit 82 without having to specify detailed instructions for moving the observation field of view using the movement direction instruction unit 55a, thereby simplifying operation. In other words, the magnification observation device 100 sets a route interpolated based on multiple reference points using the trajectory instruction unit 81 in the trajectory calculation unit 82, and when a movement direction instruction is received from the movement direction instruction unit 55a, the stage unit 30 can be controlled along the set route. Furthermore, when setting a route from a reference point, not only the XY plane but also the Z coordinate is used as the basis, allowing for consistently focused observation while moving the observation field of view along the route. The set route is based on two-dimensional shapes such as a circle, ellipse, rectangle, or polygon, and movement along the periphery of these shapes or sequential movement within the shape is possible.

[0130] When an image of the observation field of view including the observation target is displayed on the display unit based on image data generated by the camera unit, a composite image that has undergone image synthesis processing can be displayed. Examples of composite images that have undergone image synthesis processing include depth synthesis images, HDR images, unevenness-enhanced images, and halation-removed images. Here, composite images are described. The image processing unit 84 realizes a function for synthesizing an image from multiple images (synthetic image mode). For example, for an image with a shallow depth of focus, it is possible to synthesize only the in-focus portions of multiple images captured while changing the focal position based on the focus information to obtain an image with a deep depth of focus (depth synthesis image). It is also possible to obtain images with enhanced resolution or an expanded dynamic range using so-called super-resolution technology. Examples of composite images generated by the image processing unit 84 in this way include depth synthesis images, 3D synthesis images, pixel-shifted images, super-resolution images, and HDR images. HDR images have a significantly higher dynamic range, i.e., a ratio between the minimum and maximum light intensity, than conventional images. For example, standard computer monitors use 8-bit to 24-bit color representation, allowing for 2.56 million to 16.77 million shades of gray. However, in reality, many more colors exist, and the human eye adjusts its pupil size to a standard brightness that it perceives as appropriate. Therefore, HDR images, which contain more color information than the monitor's capabilities, are used. Such HDR images can be obtained using known techniques, such as combining multiple images of the same object captured at the same position under different imaging conditions (typically, the exposure time of the image sensor). For example, a high-gradation HDR image can be created by combining multiple low-gradation images captured by changing the dynamic range of the luminance domain.

[0131] Furthermore, when the composite image is displayed on the display unit, the composite image may be displayed as a still image when the movement of the observation field by the field of view movement mechanism is stopped, and a live image may be displayed when the observation field of view is moved. [Industrial Applicability]

[0132] The magnification observation device, magnified image observation method, magnified image observation program, computer-readable recording medium, and device storing the same of the present invention can be suitably used in microscopes, reflective and transmissive digital microscopes, and the like. [Explanation of symbols]

[0133] 100, 200...Magnifying observation device 1. Imaging system 2...Control system 3...cable section; 3b...optical cable 4...Head section 5...Field of view shift mechanism 10...Camera section 11...Imaging optical system 12...imaging element; 13...imaging element control circuit 16...Upper Z elevator 20...Microscope lens part 25...Objective lens section 30...Stage section 35...Lower stage elevator 36...Motor control circuit 37...Stepping motor 43...Camera mounting part 50... main body section; 51... processor section; 52... display control section 53...Storage section; 54...Interface; 55...operation unit; 55a...movement direction indicator; 55b...joystick 55c...Movement button; 55d...Route guide release section 56...Memory section; 57...Buffer memory 60...Lighting section 62…Coaxial epi-illumination section 63...Ring lighting unit 65…Lighting light source 66...Lighting control unit 70...Display section 81...Trajectory instruction unit; 82...Trajectory calculation unit; 83...Movement control unit 84...Image processing unit 85...Reference coordinate acquisition unit 110…Trajectory instruction screen 111...Image display area 112…Operation area 113...Route guide setting section 114...Geometric shape selection button 115..."Register" button 116...Undo button 117..."Reset" button 120...Route display area 122...Route guide execution display field 124...Route guide start button 130...Cancel condition setting screen 140...Navigation display screen WK, WK4...observation object WK2: Cylindrical workpiece WK3...observation object AX…Optical axis α: Inclination angle in side view β: Tilt angle in plan view DJ1: Tilt direction of joystick DS1: Stage movement direction IC…Icon MC...Mouse cursor GS1~GS6…geometric shape CB…board CP...chip RT…Route PL…Contour CS…Center of vision PT…Movement position RT'...Dotted line route

Claims

1. a stage portion for placing an object to be observed; an objective lens unit arranged to face an observation object on the stage unit; a camera unit that captures an image of an observation object formed through the objective lens unit and generates image data representing the image; a display control unit that causes an image of an observation field including an observation object to be displayed on a display unit based on image data generated by the camera unit; a field of view moving mechanism that moves the optical axis of the objective lens unit and the stage unit relatively so that the position of the optical axis of the objective lens unit on the stage unit changes and the observation field of view output to the display unit by the display control unit moves; a movement direction instructing unit that instructs a movement direction of the field of view moving mechanism in accordance with a user input indicating a movement direction of the observation field of view on the display unit; a trajectory designation unit for designating a geometric shape and a plurality of reference points as trajectory information; a trajectory calculation unit that calculates a field of view movement trajectory that moves an observation field of view through a plurality of reference points by approximating the geometric shape based on the geometric shape specified by the trajectory specification unit and the plurality of reference points; a movement control unit that moves the optical axis of the objective lens unit and the stage unit relative to each other using the field of view movement mechanism in accordance with a movement direction instruction from the movement direction instruction unit along the field of view movement trajectory calculated by the trajectory calculation unit, thereby moving the observation field of view output to the display unit by the display control unit; A magnification observation device comprising:

2. The magnification observation device according to claim 1, the trajectory instruction unit receives instructions of a plurality of trajectory reference points as the trajectory information using images of one or a plurality of observation fields moved by the field of view movement mechanism; A magnification observation device, wherein the trajectory calculation unit is configured to calculate a field of view movement trajectory based on a plurality of trajectory reference points designated by the trajectory designation unit.

3. The magnification observation device according to claim 1, the trajectory instruction unit causes the display control unit to display images of a plurality of observation fields of view moved by the field of view movement mechanism on the display unit, and receives instructions of a plurality of trajectory reference points corresponding to each observation field of view as the trajectory information; A magnification observation device, wherein the trajectory calculation unit is configured to calculate a field of view movement trajectory based on a plurality of trajectory reference points designated by the trajectory designation unit.

4. The magnification observation device according to any one of claims 1 to 3, The movement control unit a route trace mode in which the movement direction instruction unit controls the visual field movement mechanism so as to follow the visual field movement trajectory calculated by the trajectory calculation unit; a free mode in which the visual field movement mechanism is controlled in a movement direction instructed by the movement direction instructing unit, regardless of the visual field movement locus; A magnification observation device that can switch between the above.

5. The magnification observation device according to any one of claims 1 to 4, further comprising: A magnification observation device comprising a route guide canceling unit that, during execution of a route trace mode in which the movement direction indicating unit controls the field of view movement mechanism to follow the field of view movement trajectory calculated by the trajectory calculating unit, cancels the route trace mode and sets the device to a free mode in which the field of view movement mechanism can be controlled in the movement direction indicated by the movement direction indicating unit, regardless of the field of view movement trajectory.

6. The magnification observation device according to claim 4 or 5, The movement control unit a movement position to which the field of view movement mechanism is moved; The visual field movement trajectory calculated by the trajectory calculation unit, The magnification observation device is configured to switch from the route tracing mode to a free mode when the difference is equal to or greater than a predetermined value.

7. The magnification observation device according to any one of claims 4 to 6, The movement control unit is configured to: The movement direction indicated by the movement direction indication unit is In the direction in which the observation field of view should be moved along the field of view movement trajectory calculated by the trajectory calculation unit, If the route is within a predetermined first angle, continue the route tracing mode along the first direction; A magnification observation device configured to continue the route tracing mode along a second direction opposite to the first direction if the angle is outside a predetermined first angle range.

8. The magnification observation device according to any one of claims 4 to 6, The movement direction indicating unit is configured to indicate a first direction along the field of view movement trajectory and a second direction along the field of view movement trajectory that is different from the first direction.

9. The magnification observation device according to claim 2 or 3, the trajectory calculation unit calculates a visual field movement trajectory that passes through the plurality of trajectory reference points designated by the trajectory designation unit; A magnification observation device, wherein the field of view movement trajectory calculated by the trajectory calculation unit includes a bent portion.

10. The magnification observation device according to claim 2 or 3, A magnification observation device, wherein the trajectory calculation unit is configured to calculate the field of view movement trajectory so as to interpolate a plurality of trajectory reference points designated by the trajectory designation unit with a geometric shape including a curve.

11. The magnification observation device according to claim 9 or 10, A magnification observation device in which the trajectory calculation unit is configured to calculate the trajectory of movement of the field of view using the coordinate position of the center of the observation field of view as a trajectory reference point.

12. The magnification observation device according to any one of claims 1 to 11, The field of view moving mechanism includes an electric XY stage that electrically moves the stage unit in the X and Y directions.

13. The magnification observation device according to any one of claims 1 to 12, the field of view moving mechanism changes the relative position between the optical axis of the objective lens unit and the stage unit, and also changes the relative distance between the focal position of the objective lens unit and the stage unit; the trajectory information indicated by the trajectory indication unit includes information regarding a plurality of reference points with different relative distances; the trajectory calculation unit calculates a visual field movement trajectory on a plane passing through a plurality of reference points by approximating the geometric shape specified by the trajectory specification unit to the geometric shape; A magnification observation device configured to move the observation field by changing the relative position of the optical axis of the objective lens unit and the stage unit using the field of view movement mechanism in accordance with the movement direction instruction from the movement direction instruction unit along the field of view movement trajectory calculated by the trajectory calculation unit, and to change the relative distance between the optical axis of the objective lens unit and the stage unit using the field of view movement mechanism.

14. The magnification observation device according to claim 13, the field-of-view movement mechanism includes an electric Z stage that electrically moves the stage unit in a Z direction, A magnification observation device configured such that the electric Z stage automatically adjusts the focal length so that the focus of the image data displayed on the display unit by the display control unit is in focus according to the distance from the objective lens unit to the object to be observed.

15. The magnification observation device according to any one of claims 1 to 14, a joystick for specifying a direction and speed of movement of the observation field on the display unit; the movement direction instruction unit receives a designation of a movement direction and a movement speed of the observation field of view on the display unit by the joystick, The movement control unit controls the movement speed of the observation field by the field movement mechanism so that the greater the angle at which the joystick is tilted, the faster the movement speed of the observation field.

16. The magnification observation device according to any one of claims 1 to 15, further comprising: a field of view deviation correction unit that detects deviation of the center position of the observation field of view and automatically corrects the field of view deviation, a magnification observation device configured such that, when the field of view shift correction section performs field of view shift correction, the trajectory calculation section automatically offsets the field of view movement trajectory in accordance with the field of view shift correction;

17. The magnification observation device according to claim 13, further comprising: a field of view deviation correction unit that detects deviation of the center position of the observation field of view or the relative distance and automatically corrects the field of view deviation, a magnification observation device configured such that, when the field of view shift correction section performs field of view shift correction, the trajectory calculation section automatically offsets the field of view movement trajectory in accordance with the field of view shift correction;

18. The magnification observation device according to any one of claims 1 to 17, further comprising: The illumination direction can be switched toward the object being observed, and a first illumination pattern for irradiating light by sequentially switching the illumination direction; a second illumination pattern that illuminates in the selected illumination direction; Lighting unit that can illuminate It is equipped with A magnification observation device configured such that, when the observation field of view is moved along the field of view movement locus, the illumination unit irradiates with the first illumination pattern.

19. The magnification observation device according to any one of claims 1 to 18, the display control unit causes the display unit to display an image of the observation field including the observation object based on the image data generated by the camera unit; When the movement of the observation field of view by the field of view movement mechanism is stopped, a composite image that has been image-combined based on the plurality of image data generated by the camera unit is displayed on the display unit; A magnification observation device configured to display a live image based on image data generated by the camera unit when the observation field of view is moved by the field of view moving mechanism.

20. The magnification observation device according to any one of claims 1 to 14, a joystick for specifying a direction and speed of movement of the observation field on the display unit; the trajectory calculation unit calculates a predicted arrival point from the time interval for monitoring the movement direction indicated by the joystick in addition to the movement direction and speed of the field of view movement mechanism; A magnification observation device that searches for a point on the trajectory that is closest to the calculated predicted point, corrects the direction and speed toward the closest point that has been searched, and controls the field of view movement mechanism to move.

21. A magnified image observation method comprising the steps of: capturing an image of an observation object placed on a stage unit with a camera unit via an objective lens unit, displaying the image on a display unit; and relatively moving the optical axis of the objective lens unit and the stage unit with a field of view moving mechanism so that the position of the optical axis of the objective lens unit on the stage unit changes and the observation field of view output to the display unit moves, a step in which a trajectory instruction unit prompts the user to specify a geometric shape and a plurality of reference points as trajectory information; a step of calculating, by a trajectory calculation unit, a field of view movement trajectory that moves the observation field of view through a plurality of reference points by approximating the geometric shape based on the geometric shape specified by the trajectory specification unit and the plurality of reference points; a step of moving the optical axis of the objective lens unit and the stage unit relative to each other along the field of view movement trajectory calculated by the trajectory calculation unit, in accordance with a user input indicating a movement direction of the observation field of view on the display unit, and in accordance with a movement direction instruction by a movement direction instruction unit that instructs the movement direction of the field of view movement mechanism, thereby moving the observation field of view that is output to the display unit by a display control unit, and controlling the movement by the field of view movement mechanism by a movement control unit; A method for observing a magnified image, comprising:

22. a stage portion for placing an object to be observed; an objective lens unit arranged to face an observation object on the stage unit; a camera unit that captures an image of an observation object formed through the objective lens unit and generates image data representing the image; a display unit that displays an image of an observation field including an observation object based on image data generated by the camera unit; a field of view moving mechanism that moves the optical axis of the objective lens unit and the stage unit relatively to each other so that the position of the optical axis of the objective lens unit on the stage unit changes and the observation field of view output to the display unit moves; a movement direction instructing unit that instructs a movement direction of the field of view moving mechanism in accordance with a user input indicating a movement direction of the observation field of view on the display unit; A magnified image observation program for operating a magnification observation device comprising: a trajectory designation function for designating a geometric shape and a plurality of reference points as trajectory information; a trajectory calculation function that calculates a field of view movement trajectory that moves an observation field of view through a plurality of reference points by approximating the geometric shape based on the geometric shape specified by the trajectory specification function and the plurality of reference points; a movement control function that controls movement of the field of view movement mechanism, which moves the optical axis of the objective lens unit and the stage unit relatively along the field of view movement trajectory calculated by the trajectory calculation function, in accordance with a movement direction instruction by the movement direction instruction unit, thereby moving the observation field of view output to the display unit by the display control unit; and A magnified image observation program that enables this to be achieved on a computer.

23. A computer-readable recording medium or storage device storing the program according to claim 22.

Images