Printing device and printing method

Abstract

To provide a printer suppressing filled paste from being scraped to improve printing quality.SOLUTION: A printer includes a printing head and a printing head moving part. The printing head includes: a paste storage part storing paste; a paste discharge part having a paste passage connected to the paste storage part through a paste discharge port formed of a first sealing material coming in contact with a mask or a to-be-printed material; a paste compression part pushing out the paste in the paste storage part to the paste discharge port; and a vacuum part forming a sealed space adjacent to the forward route side in a printing direction with respect to the paste discharge port on its top surface when bringing the first sealing material into contact with the top surface of the mask or the to-be-printed material, and having a vacuum pipe route connecting the vacuum piping connected to a vacuum generation part and the sealed space. The print head moving part moves the printing head to the printing direction while sliding it on the top surface.SELECTED DRAWING: Figure 3A

Description

[Technical Field]

[0001] The present disclosure relates to a printing device and a printing method. [Background technology]

[0002] Patent Document 1 discloses a fluid substance filling device and method for filling via holes formed in an insulating substrate constituting a printed circuit board with a conductive paste by a screen printing method. Patent Document 1 discloses a fluid substance filling device and method that forms a first sealed space, an exhaust chamber, by contacting the substrate surface and reducing the pressure in the first sealed space, and a fluid substance filling device that forms a second sealed space by contacting the substrate surface and fills the holes in the substrate with a fluid substance in the second sealed space. This exhausts the gas in the via holes, forcing the conductive paste into the via holes reliably, filling the entire interior of the via holes with the fluid substance, and allowing the conductive paste to be sufficiently filled all the way to the bottom of the via holes.

[0003] Furthermore, in Patent Document 1, annular seals made of elastic materials are formed at the tip ends of the partition walls that separate the exhaust chamber and the paste holding chamber on the opening sides of the chambers, respectively, to make the exhaust chamber and the paste holding chamber sealed spaces by abutting against a resin sheet. The exhaust chamber is connected to a vacuum pump, and the paste holding chamber is also connected to a vacuum pump. Therefore, when the seals abut against the resin sheet, both the exhaust chamber and the paste holding chamber are sealed, forming the first sealed space and the second sealed space. At this time, the vacuum pump is driven to evacuate the exhaust chamber and the paste holding chamber, reducing their pressure. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2003-182023 Summary of the Invention [Problem to be solved by the invention]

[0005] In the printing device of Patent Document 1, some of the paste filled in order along the printing direction may be scraped out by the sealing material on the opposite side of the printing direction, resulting in insufficient paste filling and reduced print quality.

[0006] The present disclosure provides a printing device and a printing method that can prevent filled paste from being scraped out and improve print quality. [Means for solving the problem]

[0007] One aspect of the present disclosure is a printing device that moves a print head filled with paste in a predetermined printing direction to apply the paste directly to a substrate or through pattern holes in a mask placed on top of the substrate, the print head comprising a paste storage section that stores the paste, a paste discharge section having a paste passage that connects a paste discharge port formed by the mask or a first sealing material that contacts the substrate to the paste storage section, a paste pressurizing section that extrudes the paste from the paste storage section to the paste discharge port, and a pressure applying section that applies the paste to the mask. a vacuum unit having a vacuum pipe line connecting a vacuum piping connected to a vacuum generating unit and the sealed space, the vacuum unit having a second sealant in contact with the upper surface, the second sealant forming the sealed space on the upper surface including a suction port surrounded by the second sealant and the first sealant, and a print head moving unit sliding the print head along the upper surface to move the print head in the printing direction. and a control unit that instructs the vacuum generating unit not to operate when the print head moves in a return direction of the printing direction to apply the paste, wherein the print head moving unit is capable of pressing the print head along a first direction perpendicular to the surface of the mask or the surface of the printing substrate, and the pressing force in the first direction by the print head moving unit is smaller during printing on a return path than during printing on a forward path. It is a printing device.

[0008] One aspect of the present disclosure is a printing method in which a print head filled with paste is moved in a predetermined printing direction to apply the paste directly to a substrate or to apply the paste through pattern holes in a mask placed on top of the substrate, the printing method comprising the steps of: extruding paste from a paste storage unit that stores the paste into a paste discharge port formed by a first sealant that contacts the mask or the substrate; reducing the pressure in an enclosed space adjacent to the paste discharge port on the traveling direction side during an outward movement of reciprocal printing along the printing direction when the first sealant is brought into contact with an upper surface of the mask or the substrate; and sliding the print head along the printing direction, the enclosed space being formed on the upper surface; and a vacuum unit having a vacuum pipe line connecting a vacuum piping connected to a vacuum generating unit and the enclosed space being formed on the upper surface; When the print head moves in a return path of the printing direction to apply the paste, a control unit instructs the vacuum generating unit not to operate, and a print head moving unit that slides the upper surface to move the print head in the printing direction is capable of pressing the print head along a first direction perpendicular to the surface of the mask or the surface of the print substrate, and the pressing force in the first direction by the print head moving unit is smaller during printing on the return path than during printing on the forward path. , a printing method. [Effects of the Invention]

[0009] According to the present disclosure, scraping out of filled paste can be suppressed, and print quality can be improved. [Brief explanation of the drawings]

[0010] [Figure 1] FIG. 1 is a front view showing an example of the configuration of a printing apparatus according to a first embodiment; [Figure 2] FIG. 1 is a side view illustrating an example of the configuration of a printing apparatus according to a first embodiment. [Figure 3A] 2 is a cross-sectional view taken along the line AA in FIG. 1, showing an example of a print head without paste, viewed from the side. [Figure 3B] 2 is a cross-sectional view taken along the line AA in FIG. 1, showing an example of a print head containing paste, viewed from the side; [Figure 4] 3B is a cross-sectional view of an example of a print head taken along line BB in FIG. 3A, seen from the front. [Figure 5] FIG. 1 is a bottom view illustrating an example of the configuration of a print head according to a first embodiment. [Figure 6] FIG. 1 is a schematic diagram illustrating an example of each pipe and each valve unit in the first embodiment. [Figure 7] FIG. 1 is a block diagram showing an example of a functional configuration according to a first embodiment. [Figure 8] FIG. 1 is a diagram illustrating a first example of a printing operation according to a first embodiment; [Figure 9] FIG. 10 is a diagram illustrating a second example of a printing operation according to the first embodiment; [Figure 10] Schematic diagram showing the configuration of a print head of a printing device in Comparative Example 1. [Figure 11] Schematic diagram showing the configuration of a print head of a printing device in Comparative Example 2. DETAILED DESCRIPTION OF THE INVENTION

[0011] Hereinafter, with reference to the drawings as appropriate, a detailed description of an embodiment that specifically discloses the configuration and operation of a printing device according to the present disclosure will be provided. However, more detailed description than necessary may be omitted. For example, detailed descriptions of well-known matters or redundant descriptions of substantially identical configurations may be omitted. This is to avoid unnecessary redundancy in the following description and to facilitate understanding by those skilled in the art. Note that the accompanying drawings and the following description are provided to enable those skilled in the art to fully understand the present disclosure, and are not intended to limit the subject matter recited in the claims.

[0012] (First embodiment) (Printing device configuration) Fig. 1 is a front view showing an example of the configuration of a printing device according to the first embodiment, and Fig. 2 is a side view showing an example of the configuration of a printing device according to the first embodiment.

[0013] In this embodiment, for ease of explanation, the direction perpendicular to the plane of the paper in Fig. 1 is referred to as the X-axis direction, the direction parallel to the surface of the mask 14 in Fig. 1 is referred to as the Y-axis direction, and the direction perpendicular to the surface of the mask 14 in Fig. 1 is referred to as the Z-axis direction. Also, for ease of explanation, the positive side in the X-axis direction will be referred to as the right, the negative side in the X-axis direction as the left, the positive side in the Y-axis direction as the front (front), the negative side in the Y-axis direction as the rear, the positive side in the Z-axis direction as the top, and the negative side in the Z-axis direction as the bottom.

[0014] The printing apparatus 10 in the first embodiment constitutes a screen printing apparatus that performs, for example, screen printing. The printing apparatus 10 applies a paste PT, such as solder, as a filler, which is a fluid substance, to the surface of a substrate 5, which is a printing target, to perform printing. As shown in FIGS. 1 and 2 , the printing apparatus 10 includes a base 11, an XYZθ table 12 (an example of a substrate holder movement mechanism), a substrate holder 13, a mask 14, a print head 15, a print head movement unit 16, a first valve unit 17, a second valve unit 18, and a control unit 19. A vacuum generator 170 (e.g., a vacuum pump) that sucks air from a predetermined region to reduce the pressure, and a cooling water circulator 180 that circulates cooling water (an example of a refrigerant) are provided separately from the printing apparatus 10. The vacuum generator 170 may be provided within the printing apparatus 10, or the cooling water circulator 180 may be provided within the printing apparatus 10.

[0015] The substrate holder 13 has a substrate holding stage on its upper surface and holds the substrate 5 with the substrate 5 exposed to the substrate holding stage. Numerous electrodes are provided on the upper surface of the substrate 5. The XYZθ table 12 is disposed on the base 11 and moves the substrate holder 13, holding the substrate 5, in the XY plane (horizontal direction) and the Z-axis direction (up and down direction). The XYZθ table 12 may include an XY linear motion table that moves the substrate holder 13 in the horizontal plane, a rotation mechanism that rotates the substrate holder 13 in the horizontal plane, and an elevation table that raises and lowers the substrate holder 13 in the Z-axis direction. The mask 14 is made of a flat plate-like member (e.g., a metal member) extending in the XY plane and has numerous patterned holes (not shown) that correspond to the electrodes on the substrate 5.

[0016] The print head 15 applies the paste PT stored in the print head 15 to the substrate 5 through pattern holes in a mask 14 placed on top of the substrate 5, thereby printing the paste PT on the substrate 5. During printing, the position of the substrate 5 relative to the mask 14 is appropriately adjusted by the XYZθ table 12. Specifically, the substrate holder 13 is moved so that the pattern holes in the mask 14 face the electrodes of the substrate 5 and the substrate 5 approaches the mask 14. Depending on the configuration of the substrate 5 to be printed, the print head 15 may also apply the paste PT directly to the substrate 5 without using the mask 14. Details of the print head 15 will be described later.

[0017] The print head 15 is attached to the print head moving unit 16 and is movable while suspended from the bottom of the print head moving unit 16. The print head moving unit 16 moves the print head 15 in the Y-axis and Z-axis directions. The print head moving unit 16 includes an elevation drive unit 21, a guide rod 22, an elevation guide 23, a Y-axis motor 24, a feed screw 25, a nut unit 26, a moving beam 27, a slider 28, and a guide rail 29.

[0018] The walking beam 27 is a member extending along the X-axis direction and moves in the Y-axis direction by driving a ball screw mechanism. The ball screw mechanism includes a feed screw 25 extending along the Y-axis direction and a nut portion 26 attached to the feed screw 25. The Y-axis motor 24 is connected to the feed screw 25 extending along the Y-axis direction and supplies driving force to the ball screw mechanism. In other words, when the driving force from the Y-axis motor 24 rotates the feed screw 25, the walking beam 27 moves horizontally due to the action of the nut portion 26 attached to the walking beam 27 and the feed screw 25. The guide rail 29 is a member extending along the Y-axis direction and guides the movement of the print head 15 on the walking beam 27 in the Y-axis direction. The slider 28 is attached to the bottom of the walking beam 27 and is slidable on the guide rail 29. The print head 15 connected to the walking beam 27 moves in the Y-axis direction in conjunction with the movement of the walking beam 27 in the Y-axis direction.

[0019] The lifting / lowering drive unit 21 is disposed on the moving beam 27 and is composed of a cylinder or the like. The print head 15 is attached to the lower end of the output shaft of the lifting / lowering drive unit 21 in a suspended manner. When the output shaft of the lifting / lowering drive unit 21 is driven, the lifting / lowering unit 31 moves in the Z-axis direction while being guided by a guide rod 22 and a lifting / lowering guide 23 provided on the moving beam 27. Therefore, the lifting / lowering drive unit 21 pushes and pulls the lifting / lowering unit 31 in the Z-axis direction, thereby pushing and pulling the print head 15 connected to the lifting / lowering unit 31 in the Z-axis direction. The lifting / lowering drive unit 21 may be movable in the Z-axis direction by a ball screw mechanism, or may be movable in the Z-axis direction by some other configuration.

[0020] The lifting unit 31 is connected to a guide rod 22 and the output shaft of the lifting drive unit 21, and is arranged to be slidable in the Z-axis direction by the driving force of the lifting drive unit 21. In addition, the tilting mechanism 32 tilts and rotates the print head 15 relative to the lifting unit 31. By tilting, the tilting mechanism 32 can adjust the angle of the print head 15 with respect to the Z-axis direction so that it aligns with the printing surface (for example, the surface of the mask 14 or the surface of the substrate 5).

[0021] The first valve unit 17 is configured to be switchable between connecting the vacuum pipe 61 attached to the print head 15 to the vacuum generator 170, or connecting the vacuum pipe 61 to the exhaust port 77 (see FIG. 6). By connecting the vacuum pipe 61 to the vacuum generator 170 with the first valve unit 17, air is discharged through the vacuum pipe 61, thereby reducing the pressure in a predetermined sealed space in the print head 15. The first valve unit 17 is disposed on the moving beam 27, for example, but may be disposed in another position.

[0022] The second valve unit 18 is configured to be able to switch between connecting and disconnecting the refrigerant flow path 53 provided in the print head 15 and the cooling water circulator 180 (see FIG. 6). By connecting the refrigerant flow path 53 and the cooling water circulator 180 with the second valve unit 18, cooling water is circulated through the refrigerant flow path 53 to cool the paste PT inside the print head 15. The second valve unit 18 is disposed, for example, inside the base 11, but may be disposed in another position.

[0023] A control unit 19 is also disposed inside the base 11. The control unit 19 performs various controls in the printing device 10. Details of the controls performed by the control unit 19 will be described later. The control unit 19 may be disposed at a position other than inside the base 11.

[0024] (Print head configuration) Next, the detailed configuration of the print head 15 will be described.

[0025] FIG. 3A is a cross-sectional view taken along the line AA in FIG. 1, showing an example of a print head 15 that does not contain paste PT, as viewed from the side. FIG. 3B is a cross-sectional view taken along the line AA in FIG. 1, showing an example of a print head 15 that contains paste PT, as viewed from the side. In FIG. 3B, some of the print head 15 shown in FIG. 3A is omitted or simplified compared to FIG. 3A. FIG. 4 is a cross-sectional view taken along the line BB in FIG. 3A, showing an example of a print head 15 as viewed from the front. FIG. 4 shows a state in which the print head 15 is not filled with paste PT.

[0026] The print head 15 includes a pressure cylinder 41, a print head base mounting member 42, a pressure member 43, a cartridge 44, a cartridge holder 45, and a cartridge fixture 46 (see FIG. 4). The print head 15 includes a print head base 50, a paste passage 51, a cooling member 52, a refrigerant flow path 53, and a temperature sensor 54. The print head 15 includes a vacuum pipe 62, a blade 64, a plate 65, a blade fixture 66, and a suction chamber 67. The print head 15 also includes a side seal material 71, a sealing seal material 72, and a side block 73.

[0027] A print head base 50 is attached to the print head base mounting member 42 of the print head 15 via a rod 48. A cartridge 44 is attached to the top surface of the print head base 50. A pressure cylinder 41 is also attached to the print head base mounting member 42, with its output shaft facing downward. A pressure member 43 is attached to the tip of the output shaft of the pressure cylinder 41. The pressure member 43 abuts against and presses against the lid 44a of the cartridge 44.

[0028] The cartridge 44 is, for example, configured in a generally rectangular parallelepiped shape extending in the X-axis direction, with the dimension in the X-axis direction being larger than the dimension in the Y-axis direction. The cartridge 44 contains paste PT therein. The cartridge 44 includes a lid 44a and a bottom plate 44b. The lid 44a is movable in the Z-axis direction when pressed by the pressure member 43. The bottom plate 44b has multiple through-holes through which the paste PT passes and is formed, for example, of a mesh plate. When the pressure member 43 abuts against the lid 44a from above and the pressure cylinder 41 presses it downward, the paste PT inside the cartridge 44 is pushed downward and out through the bottom plate 44b. The cartridge 44 also has flanges 44c protruding on both sides along the top surface of the print head base 50.

[0029] The cartridge holder 45 is formed in a frame shape outside the cartridge 44 and along the cartridge 44, with the bottom end of the cartridge holder 45 open. Like the cartridge 44, the cartridge holder 45 has a flange 45a (see FIG. 4) that fits along the top surface of the print head base 50. The cartridge holder 45 holds the cartridge 44 between itself and the print head base 50. The cartridge holder 45 can be fixed to the print head base 50 by a cartridge fixing device 46 (see FIG. 4). Fastening a fixing bolt 47 (see FIG. 4) to the cartridge fixing device 46 causes the cartridge fixing device 46 to fix the flange 45a of the cartridge holder 45 to the print head base 50. When the cartridge holder 45 is fixed to the print head base 50, the cartridge 44 held inside the cartridge holder 45 is fixed to the print head base 50. When the fixing bolt 47 is released from the cartridge fixing device 46, the cartridge holder 45 is released from the print head base 50. This releases the cartridge 44 held inside the cartridge holder 45 from its fixed position relative to the print head base 50. In this way, the cartridge holder 45 is detachable from the print head base 50 and can be replaced.

[0030] The print head base 50 has a cartridge 44 attached to its upper surface. The print head base 50 has a paste passage 51, through which the paste PT flows, located, for example, in the center in the Y-axis direction, facing the bottom plate 44b of the cartridge 44. When the lid 44a of the cartridge 44 is pressed by the pressure member 43, the paste PT inside the cartridge 44 passes through the bottom plate 44b of the cartridge 44 and enters the paste passage 51. The paste PT flows in the paste passage 51 from the cartridge 44 side toward the mask 14 side, and is discharged through the discharge port P1. An opening is formed in the center of the bottom end of the paste passage 51.

[0031] A cooling member 52 extending in the X-axis direction is provided in the internal space of the paste passage 51 and is inserted through the paste passage 51. The cooling member 52 is a rod-shaped member having a square cross section (i.e., a square prism shape) and is made of a metal material such as aluminum with high thermal conductivity. For example, the top and bottom of the square cross section of the cooling member 52 are located in the center of the paste passage 51 in the Y-axis direction. The outer shape of the cooling member 52 has an acuter angle at the top than at the bottom. This outer shape of the cooling member 52 improves the agitation of the paste PT extruded downward when the paste PT passes on both sides of the square prism-shaped cooling member 52 in the paste passage 51. Furthermore, by sufficiently agitating the paste PT, the cooling efficiency when cooling the paste PT is improved.

[0032] The cooling member 52 has a refrigerant flow path 53 therein, such as a circular pipe. The temperature of the cooling member 52 is reduced by cooling water flowing through the internal refrigerant flow path 53, which cools the paste PT passing through the paste path 51 around the cooling member 52. Furthermore, by being disposed within the paste path 51, the cooling member 52 can directly cool the paste PT, thereby increasing cooling efficiency. By cooling the cooling member 52, the viscosity of the paste PT is maintained or adjusted to a predetermined value.

[0033] As shown in FIG. 4, the refrigerant flow path 53 is connected to a refrigerant pipe 55. The refrigerant pipe 55 is connected to a cooling water circulator 180 via a second valve unit 18. Pipes 56 are inserted into the print head base 50 from both sides in the X-axis direction. The refrigerant flow path 53 is inserted into the pipes 56, and the position of the refrigerant flow path 53 relative to the print head base 50 is fixed. A temperature sensor 54 measures the temperature of the paste PT in the paste passage 51. The temperature sensor 54 may be a sensor using a thermocouple or a commercially available thermometer, etc.

[0034] As shown in Figures 3A and 3B, a pair of blades 64 and a pair of plates 65 are attached to the print head base 50 and are arranged opposite each other in the Y-axis direction. The pair of blades 64 includes a pair of main blades 64A and a pair of auxiliary blades 64B. Each of the pair of main blades 64A and each of the pair of auxiliary blades 64B are arranged adjacent to each other and parallel at an angle. In the Y-axis direction, the pair of auxiliary blades 64B are arranged outside the pair of main blades 64A. The pair of blades 64 are arranged in an inverted V-shape, sandwiching the opening of the paste passage 51 from both sides in the Y-axis direction. In addition, a pair of plates 65 are arranged outside the pair of auxiliary blades 64B in the Y-axis direction. The plates 65 support the blades 64 so as to maintain the orientation of the upper ends of the blades 64. When there is no need to distinguish between the main blades 64A and the auxiliary blades 64B, they will simply be referred to as blades 64.

[0035] The blade 64 contacts the mask 14 or the substrate 5 to supply the ejected paste PT. The blade 64 is made of an elastic material with a predetermined hardness, such as foam rubber or resin. The pair of blades 64 are attached at an angle so that the distance between them narrows downward, and are configured to contact the substrate 5 or the mask 14 at a predetermined angle during printing.

[0036] The blade fixing device 66 is positioned on the positive side of the Y axis direction, and not on the negative side of the Y axis direction. In this embodiment, printing is performed while moving back and forth along the Y axis direction (also referred to as reciprocating printing). In this embodiment, as an example, the positive side of the Y axis direction is the printing direction during the outgoing path of reciprocating printing along the Y axis direction. In this embodiment, as an example, the negative side of the Y axis direction is the printing direction during the return path of reciprocating printing along the Y axis direction.

[0037] The blade fixing device 66 fixes the blade 64 to the print head base 50, for example by fastening it from below the blade 64 with a fastening member such as a screw. The blade fixing device 66 is countersunk, and a suction chamber 67 is formed in the space below and outside the blade 64. The suction chamber 67 is connected to a vacuum conduit 62. The vacuum conduit 62 is inserted through the blade fixing device 66, extends along the Y-axis direction, and is connected to a vacuum pipe 61. Furthermore, the blade 64 on the opposite side (rear side) where the blade fixing device 66 is not present is fixed to the print head base 50 together with a plate 65 with a fastening member such as a screw.

[0038] The vacuum pipe 61 is disposed on the positive side in the Y-axis direction (i.e., the front side). The vacuum pipe 61 is disposed to extend in the X-axis direction along the outer periphery of the positive end of the blade fixture 66 in the Y-axis direction. The vacuum pipe 61 is connected to the vacuum generator 170 via the first valve unit 17.

[0039] Various seals are provided at the lower end of the print head 15, including a side seal 71, a sealing seal 72, and a side block 73 (FIGS. 3A, 3B, and 5). The side seal 71 is provided at the lower end of the blade fixture 66 and extends along the Y-axis. Side seals 71 are also provided at both ends in the X-axis direction. The sealing seal 72 is provided at the lower end of the blade fixture 66 and extends along the X-axis. The side block 73 is provided at the lower end of the paste passage 51, which is the lower end of the print head 15. The side block 73 is located outside the opening at the lower end of the paste passage 51, adjacent to the opening at the lower end of the paste passage 51, on both sides in the X-axis direction. The side seal 71, the sealing seal 72, and the side block 73 are formed of a metal material, a resin material, or the like. The side seal 71, the sealing seal 72, and the side block 73 may be made of the same or different materials.

[0040] At the bottom end of the print head 15, the space surrounded by the pair of main blades 64A and the pair of side blocks 73 is the discharge port P1 from which the paste PT is discharged (FIGS. 3A and 5). Also, at the bottom end of the print head 15, the space surrounded by the auxiliary blade 64B, the pair of side seal materials 71, and the sealing material 72 is the suction port P2 for vacuum suction by the vacuum generator 170 (FIGS. 3A and 5). The suction port P2 is formed on the positive side (front side) of the discharge port P1 in the Y-axis direction.

[0041] FIG. 5 is a bottom view showing an example of the configuration of the print head 15.

[0042] When viewed from the bottom of the print head 15, a cooling member 52 with a refrigerant flow path 53 inserted therethrough extends along the X-axis direction from the center in the Y-axis direction. Main blades 64A, auxiliary blades 64B, and a plate 65 are provided on the outside of the cooling member 52, extending from the center in the Y-axis direction toward both ends in the Y-axis direction. Furthermore, on the positive side in the Y-axis direction, a sealing material 72 is provided closer to the end in the positive direction of the Y-axis than the plate 65. Side sealing materials 71 are also provided on both the front and rear ends of both ends in the X-axis direction, and multiple vacuum conduits 62 extend at predetermined intervals in the X-axis direction. Each of the multiple vacuum conduits 62 is connected to a corresponding one of multiple suction chambers 67 at the center in the X-axis direction and to a vacuum pipe 61 at the end in the positive direction in the X-axis direction. Blade fixtures 66 are located between adjacent suction chambers 67. The blades 64 are pressed down by the plates 65 via fastening means such as bolts, providing a stable fixation.

[0043] A portion of the lower end of the print head 15 comes into contact with the mask 14 or the substrate 5 during printing. At the lower end of the print head 15, various sealants are arranged mainly in the center and on the positive side of the center in the Y-axis direction, such as a side sealant 71, a sealing sealant 72, and a side block 73. The lower ends of the blades 64 (main blades 64A and auxiliary blades 64B) are also located at the lower end of the print head 15. That is, the lower ends of the pair of main blades 64A and the pair of auxiliary blades 64B are located at the lower end of the print head 15. Therefore, when the print head 15 comes into contact with the mask 14 or the substrate 5, the pair of main blades 64A and the pair of auxiliary blades 64B also function as sealants.

[0044] When the lower end of the print head 15 comes into contact with the mask 14 or the substrate 5 during printing, the discharge port P1 is sealed by the pair of main blades 64A and the pair of side blocks 73. Therefore, the paste PT that comes into contact with the mask 14 or the substrate 5 and is discharged from the discharge port P1 is restricted from moving outward from the discharge port P1 at the lower end of the print head 15. This allows the printing device 10 to prevent the paste PT from leaking outward in the XY plane from the discharge port P1. Furthermore, by arranging a pair of auxiliary blades 64B on the outside of the pair of main blades 64A in the Y-axis direction, the print head 15 can further increase the degree of sealing of the discharge port P1, thereby improving sealing performance.

[0045] Furthermore, when the mask 14 or substrate 5 contacts the lower end of the print head 15 during printing, the space surrounded by the auxiliary blade 64B, the pair of side seals 71, the sealing seal 72, the blade fixture 66, and the mask 14 or substrate 5 becomes a sealed space. This sealed space is also referred to as a vacuum suction space. The vacuum suction space is formed on the positive side of the Y axis, but not on the negative side of the Y axis. The vacuum suction space includes the suction port P2 and the space of the suction chamber 67. The vacuum suction space can be connected to a vacuum generator 170 via a vacuum path including the vacuum conduit 62 and the vacuum piping 61. When the vacuum generator 170 reduces the pressure, air in the vacuum suction space is sucked and discharged via the vacuum path.

[0046] The pair of side seal members 71, the hermetic seal member 72, and the blade fixture 66 form a vacuum section 63 (see FIG. 3). The vacuum section 63 has a vacuum pipe line 62 therein and forms a vacuum suction space connected to the vacuum pipe line 62. The vacuum section 63 is also called a vacuum jacket.

[0047] The print head 15 has suction port P2 that abuts against the mask 14 or the substrate 5, allowing it to suitably suck in air present in the pattern holes 14h of the mask 14 or the via holes of the substrate 5, thereby improving filling performance when filling these via holes with the paste PT discharged from the discharge port P1. Furthermore, the print head 15 has a pair of main blades 64A arranged inside the pair of auxiliary blades 64B in the Y-axis direction, thereby further increasing the airtightness of the suction port P2, which is an enclosed space, improving sealing performance and suction force.

[0048] Figure 6 is a schematic diagram showing an example of the pipes and valve units of the print head 15. Figure 6 shows the connections between the print head 15, first valve unit 17, second valve unit 18, vacuum generator 170, and cooling water circulator 180.

[0049] The first valve unit 17 includes a flow path switching valve 75 and an exhaust port 77. The flow path switching valve 75 switches between connecting the vacuum pipe 61 to the vacuum generator 170 and connecting the vacuum pipe 61 to the exhaust port 77. The exhaust port 77 has a silencer and exhausts air inside the printing device 10 to the outside of the printing device 10. When not printing, the vacuum pipe 61 and the exhaust port 77 are normally connected.

[0050] When the vacuum pipe 61 and the vacuum generator 170 are connected by the flow path switching valve 75, the vacuum suction space connected to the vacuum pipe 61 is depressurized to create a vacuum. On the other hand, when the vacuum pipe 61 is connected to the exhaust port 77, the vacuum suction space is not depressurized and is not created as a vacuum.

[0051] The control unit 19 controls the switching of the flow path switching valve 75. The control unit 19 may control the flow path switching valve 75 according to the traveling direction (printing direction) of the print head 15. In this case, the control unit 19 depressurizes the vacuum suction space to create a vacuum during the forward path of reciprocating printing along the Y axis direction, but does not depressurize the vacuum suction space during the return path. Therefore, for example, when the traveling direction of the print head 15 is the positive side (front side) of the Y axis direction, that is, during the forward path, the control unit 19 controls the flow path switching valve 75 to connect the vacuum pipe 61 to the vacuum generator 170 and depressurize the vacuum suction space. On the other hand, when the traveling direction of the print head 15 is the negative side (rear side) of the Y axis direction, that is, during the return path, the control unit 19 controls the flow path switching valve 75 to connect the vacuum pipe 61 to the exhaust port 77 and does not depressurize the vacuum suction space. By depressurizing the vacuum suction space only during the forward path, the print head 15 can prevent the paste PT already filled on the substrate 5 from being sucked during the return path. It should be noted that the vacuum suction space may be depressurized weaker on the return trip than on the forward trip.

[0052] Since the print head 15 performs reciprocating printing, the direction of travel of the print head 15 is either the positive or negative direction along the Y axis. Here, an example is shown in which the print head 15 travels in the positive direction (forward) along the Y axis on the outward path, and travels in the negative direction (backward) along the Y axis on the return path.

[0053] The second valve unit 18 includes an on-off valve 78 and a manual valve 79. The on-off valve 78 is controlled to open and close by the control unit 19. The control unit 19 drives the on-off valve 78 to open it and allow cooling water to pass, for example, when operation starts. The start of operation may be, for example, when the printing device 10 is powered on. The cooling water that passes through the on-off valve 78 flows through the refrigerant flow path 53 and cools the cooling member 52 that contains the refrigerant flow path 53. The cooling water that flows through the refrigerant flow path 53 returns to the cooling water circulation device 180 via the refrigerant piping 55 and circulates through a cooling path that includes the refrigerant flow path 53 and the refrigerant piping 55. The manual valve 79 is opened and closed manually. The manual valve 79 is normally kept open, but is closed when the print head 15 is removed from the second valve unit 18 for maintenance or the like. As a result, the second valve unit 18 can prevent the cooling water from leaking out during maintenance or the like regardless of the open / close state of the open / close valve 78, thereby improving safety during maintenance or the like.

[0054] 7 is a block diagram showing an example of the functional configuration of the printing device 10. The printing device 10 has, as its electrical configuration, a control unit 19, a Y-axis motor 24, an elevation drive unit 21, a pressure cylinder 41, a temperature sensor 54, an XYZθ table 12, a flow path switching valve 75, an on-off valve 78, and a touch panel TP. The control unit 19 is also electrically connected to a vacuum generator 170 and a cooling water circulator 180, and is communicatively connected to them via, for example, a communication device. The touch panel TP serves as both an operation unit and a display unit, but the operation unit and the display unit may be provided separately.

[0055] The control unit 19 is configured with a processor. The processor includes, for example, an MPU (Micro Processing Unit), a CPU (Central Processing Unit), or a DSP (Digital Signal Processor). The control unit 19 controls each unit within the printing device 10 to perform printing operations. The control unit 19 instructs control of the operation of the vacuum generation device 170. The control unit 19 instructs control of the operation of the cooling water circulator 180.

[0056] For example, the control unit 19 controls the drive of the Y-axis motor 24 to control the movement of the moving beam 27 in the Y-axis direction, thereby controlling the movement of the print head 15 in the Y-axis direction. The control unit 19 controls the drive of the lift drive unit 21 to control the movement of the lift unit 31 in the Z-axis direction, thereby controlling the movement of the print head 15 in the Z-axis direction. This allows, for example, adjustment of the position of the print head 15 in the Z-axis direction relative to the mask 14 or the substrate 5. For example, by setting the position of the print head 15 in the Z-axis direction relative to the mask 14 or the substrate 5 below a predetermined position (reference position), the sealant of the print head 15 tightly adheres to the mask 14 or the substrate 5, improving the sealing of the vacuum suction space. Furthermore, for example, the printing device 10 sets the position of the print head 15 in the Z-axis direction above a predetermined position relative to the mask 14 or the substrate 5, thereby causing the sealant of the print head 15 to weakly contact the mask 14 or the substrate 5. This allows the printing device 10 to prevent unnecessary scraping of the filled paste PT when the print head 15 moves in the Y-axis direction.

[0057] The control unit 19 controls the discharge condition of the paste PT by controlling the pressure applied by the pressure cylinder 41. The control unit 19 acquires the measured temperature value of the paste PT from the temperature sensor 54 and executes predetermined processing (for example, starting up the cooling water circulator 180 for cooling the paste PT or controlling the opening and closing of the on-off valve 78). The control unit 19 controls the movement of the substrate holder 13 by controlling the operation of the XYZθ table 12.

[0058] The control unit 19 controls the switching of the connection state by the flow path switching valve 75. The control unit 19 controls the open / close state of the on-off valve 78. The control unit 19 controls the operation of the touch panel TP. For example, the control unit 19 acquires operation information corresponding to operations on the touch panel TP and controls the display of various information on the touch panel TP. The operations on the touch panel TP may include operations for setting the temperature of the refrigerant circulated by the cooling water circulation device 180, or normal printing press setting operations.

[0059] The control unit 19 transmits a control signal to the vacuum generator 170 to instruct it to start and stop. For example, the control unit 19 may transmit a control signal including a start signal for starting the vacuum generator 170 to the vacuum generator 170 when the printing apparatus 10 starts printing the outward pass of bidirectional printing. The start of printing the outward pass may be, for example, when the start of the outward pass of bidirectional printing is specified via the touch panel TP. For example, the control unit 19 may transmit a control signal including a stop signal for stopping the vacuum generator 170 to the vacuum generator 170 when the printing apparatus 10 starts printing the return pass of bidirectional printing. The start of printing the outward pass may be, for example, when the start of the return pass of bidirectional printing is specified via the touch panel TP or when the outward pass of bidirectional printing is completed. As a result, the vacuum generator 170 is in operation during the printing apparatus 100's outward pass printing and is inactive (stopped) during the printing apparatus 100's return pass printing.

[0060] The control unit 19 transmits a control signal to the coolant circulation device 180 to instruct it to start and stop. For example, when the operation of the printing device 10 starts, the control unit 19 may transmit a control signal to the coolant circulation device 180 that includes a start signal for starting the coolant circulation device 180. For example, when the operation of the printing device 10 stops, the control unit 19 may transmit a control signal to the coolant circulation device 180 that includes a stop signal for stopping the coolant circulation device 180. Furthermore, the control unit 19 may transmit a control signal to the coolant circulation device 180 that includes setting information for setting the refrigerant temperature (e.g., the temperature of the coolant), for example, before the start of a printing operation. The refrigerant temperature may be determined, for example, by the type of refrigerant.

[0061] The control unit 19 may monitor the temperature of the paste PT. For example, the control unit 19 may monitor the temperature of the paste PT based on the output of the temperature sensor 54. For example, the control unit 19 may determine whether the temperature of the paste PT is within a set range before starting a printing operation. If the temperature of the paste PT is within the set range, the control unit 19 may start the printing operation by the printing device 10. If the temperature of the paste PT is not within the set range, the control unit 19 may wait until the temperature of the paste PT falls within the set range, and if the temperature of the paste PT falls within the set range, the control unit 19 may start the printing operation by the printing device 10. Furthermore, if the temperature of the paste PT is outside the set range, the control unit 19 may stop the printing operation by the printing device 10.

[0062] (Printing operation by a printing device) Figure 8 is a diagram for explaining printing operation example 1. Printing operation example 1 shows an example of a printing operation in which printing is performed on a substrate 5 using a mask 14. In Figure 8, traveling direction A is the traveling direction of the print head 15 on the outgoing path, and traveling direction B is the traveling direction of the print head 15 on the return path.

[0063] 8, the substrate 5 is formed in a plate shape and has a pattern including a plurality of electrodes 5a. The mask 14 is provided with pattern holes 14h at predetermined intervals corresponding to the intervals at which the plurality of electrodes 5a are arranged on the upper surface of the substrate 5.

[0064] In the printing device 10, the substrate holder 13 receives and holds the substrate 5 transported by a substrate transport device (not shown). The xyzθ table 12 moves in the XY plane and aligns the substrate 5 and the mask 14 so that the electrodes 5a of the substrate 5 face the pattern holes 14h of the mask 14 (FIG. 8(A)). The xyzθ table 12 moves in the Z-axis direction and brings the electrodes 5a of the substrate 5 into contact with the underside of the mask 14 so that they face the pattern holes 14h of the mask 14 (FIG. 8(B)). This allows the mask 14 to be aligned and superimposed on the substrate 5.

[0065] The control unit 19 executes a printing operation by the printing device 10. During the printing operation, the print head moving unit 16 moves the print head 15 downward in the Z-axis direction, causing the print head 15 to land on the mask 14 and bringing the lower edges of each of the pair of blades 64 of the print head 15 into contact with the upper surface of the mask 14.

[0066] The control unit 19 starts forward printing in bidirectional printing (FIG. 8(C)). In forward printing, the control unit 19 sets the traveling direction of the print head 15 to traveling direction A, sets the force with which the lift drive unit 21 presses the print head 15 downward (also simply referred to as the pressing force of the lift drive unit 21) to the pressing force for the forward pass, and instructs the vacuum generator 170 to operate. In forward printing, the control unit 19 also sets the pressing force of the lift drive unit 21 to the pressing force for the forward pass. This pressing force for the forward pass and the pressing force for the forward pass are stored, for example, in a memory not shown.

[0067] Specifically, the print head moving unit 16 moves the print head 15 relative to the mask 14 in the forward travel direction A, causing the pair of blades 64 to slide on the mask 14. During this time, the print head 15 ejects paste PT from the outlet P1 at its lower end, supplies the paste PT to the upper surface of the mask 14, and fills the paste PT into each pattern hole 14h on each electrode 5a. During this time, the print head 15 and the mask 14 come into close contact with each other, thereby forming a vacuum suction space SP1 as an enclosed space on the upper surface of the mask 14 in the forward travel direction A. The vacuum suction (evacuation) of the vacuum conduit 62 is performed via the vacuum path, thereby reducing the pressure in the vacuum suction space SP1.

[0068] The print head 15 has a vacuum section 63 on the side of the direction of travel A (positive side in the Y-axis direction) during the forward pass, but does not have a vacuum section 63 on the side opposite the side of the direction of travel A during the forward pass (negative side in the Y-axis direction). Therefore, the seal materials (e.g., side seal material 71 and hermetic seal material 72) included in the vacuum section 63 are not present on the side opposite the side of the direction of travel A during the forward pass. Therefore, the paste PT filled into the pattern holes 14h of the mask 14 during forward printing is not scraped out by the seal material on the side opposite the side of the direction of travel A during the forward pass. This reduces the amount of paste PT filled, preventing connection failures.

[0069] When the end point of the forward printing is reached, the control unit 19 ends the forward printing of the reciprocating printing and switches to starting the return printing (Figure 8(D)). In the return printing, the same area is printed as in the forward printing of the same turn. Note that one forward printing and one return printing for the forward printing constitute one turn (one return) of reciprocating printing. In the return printing, the control unit 19 controls the print head 15 not to be lifted upward at the end of the forward printing. Therefore, the printing device 10 can prevent the paste PT that was not filled in the pattern holes 14h of the mask 14 from remaining on the mask 14 and causing paste residue.

[0070] During the return pass printing, the control unit 19 sets the travel direction of the print head 15 to travel direction B and instructs the vacuum generator 170 not to operate. Furthermore, during the return pass printing, the control unit 19 sets the pressing force of the lift drive unit 21 to the pressing force for the return pass. The pressing force for the return pass is stored, for example, in a memory (not shown). The pressing force for the return pass is set lower than the pressing force for the outgoing pass.

[0071] Specifically, the print head moving unit 16 moves the print head 15 relative to the mask 14 in the direction of travel B during the return pass, causing the pair of blades 64 to slide over the mask 14. During this time, the print head 15 ejects paste PT from the outlet P1 at its lower end, supplies the paste PT to the upper surface of the mask 14, and fills the paste PT into each pattern hole 14h on each electrode 5a. Even if the print head 15 and mask 14 come into close contact during this time, the vacuum unit 63 is not present on the side of the direction of travel B during the return pass, so a vacuum suction space SP1 as an enclosed space is not formed on this side of the direction of travel B.

[0072] Furthermore, a vacuum suction space SP1 is formed on the upper surface of the mask 14 on the side opposite the direction of travel B during the return pass (the positive side in the Y-axis direction). However, because the vacuum conduit 62 is not vacuumed (evacuated) via the vacuum path, the vacuum suction space SP1 is not depressurized and remains at normal pressure. Furthermore, a vacuum section 63 is provided on the side opposite the direction of travel B during the return pass (the positive side in the Y-axis direction), where various sealants (e.g., side sealant 71 and sealing sealant 72) are present. The pressing force of the lifting / lowering drive unit 21 is set to a pressing force for the return pass. This pressing force for the return pass is sufficient to prevent the sealing material from scraping out the filled paste PT from the pattern holes 14h of the mask 14, even when the print head 15 moves in the Y-axis direction during return pass printing. In other words, this pressing force for the return pass is sufficient to prevent the sealing material from sinking into the pattern holes 14h of the mask 14, even when pressed downward by the pressing force of the lifting / lowering drive unit 21. Therefore, it is possible to prevent the paste PT filled in the pattern holes 14h of the mask 14 during the return pass printing from being scraped out by the sealing material on the side opposite to the direction of travel B during the return pass. Therefore, even during the return pass printing, the amount of paste PT filled is reduced, and connection failures can be prevented.

[0073] In the printing device 10, even when one turn of backward printing is completed, the control unit 19 controls the print head 15 not to be lifted upward at the end. This is because the printing device 10 can still smoothly transition to the next forward printing pass while sliding on the mask 14. Therefore, the print head 15 does not move in the Z-axis direction at the end of backward printing (i.e., one turn of back-and-forth printing), so that the unfilled paste PT remains on the mask 14, preventing the generation of paste residue.

[0074] When the entire reciprocating printing by the printing device 10 is completed and all pattern holes 14h in the mask 14 are filled with the paste PT, the print head moving unit 16 stops the movement of the print head 15, and the print head 15 stops applying pressure to the paste PT using the pressure cylinder 41, putting the paste PT into a non-supply state. The print head moving unit 16 then raises the print head 15, separating the lower edges of the pair of blades 64 from the upper surface of the mask 14. Next, the XYZθ table 12 lowers the substrate holding unit 13, separating the substrate 5 from the mask 14 (plate detachment). This leaves the paste PT on each electrode 5a of the substrate 5, leaving the paste PT printed on the substrate 5. When the printing operation of the paste PT on the substrate 5 is completed in this manner, the substrate 5 is removed from the substrate holding unit 13 by a substrate transport device (not shown) and transported outside the printing device 10 ( FIG. 8(E) ).

[0075] FIG. 9 is a diagram for explaining printing operation example 2. Printing operation example 2 shows an example of a printing operation in which printing is performed on a substrate 5 without using a mask 14. For example, when printing on a substrate having a solder resist, paste may be applied directly to recesses in the substrate without using a mask. The operation in this case will be described. Note that in FIG. 9, as in FIG. 8, traveling direction A is the traveling direction of the print head 15 on the outward path, and traveling direction B is the traveling direction of the print head 15 on the return path.

[0076] 9, the substrate 5 has a configuration in which a solder resist 5c is provided on the upper surface of a plate-shaped base material 5b having a pattern including a plurality of electrodes 5a so that the electrodes 5a are exposed. Above the electrodes 5a of the substrate 5 (positive side in the Z-axis direction), recesses 5d (via holes) where the solder resist 5c is not present are formed.

[0077] In the printing device 10, the substrate holding unit 13 receives and holds the substrate 5 transported by a substrate transport device (not shown) (FIG. 9(A)). The xyzθ table 12 moves in a direction along the XY plane and in the Z-axis direction, and brings the electrode 5a of the substrate 5 into contact with the lower end of the print head 15, facing the lower end of the print head 15.

[0078] The control unit 19 executes a printing operation by the printing device 10. During the printing operation, the print head moving unit 16 moves the print head 15 downward in the Z-axis direction, causing the print head 15 to land on the substrate 5 and bringing the lower edges of the pair of blades 64 of the print head 15 into contact with the upper surface of the substrate 5.

[0079] The control unit 19 starts forward printing in bidirectional printing (FIG. 9(B)). In forward printing, the control unit 19 sets the traveling direction of the print head 15 to traveling direction A and instructs the vacuum generating device 170 to operate. In forward printing, the control unit 19 also sets the pressing force of the lift drive unit 21 during the forward pass to the pressing force for the forward pass. This pressing force for the forward pass is stored, for example, in a memory (not shown).

[0080] Specifically, the print head moving unit 16 moves the print head 15 relative to the substrate 5 in the forward traveling direction A, causing the pair of blades 64 to slide on the substrate 5. During this time, the print head 15 ejects paste PT from the ejection port P1 at its lower end, supplies the paste PT to the upper surface of the substrate 5, and fills the recesses 5d on each electrode 5a with the paste PT. During this time, the print head 15 and the substrate 5 come into close contact with each other, thereby forming a vacuum suction space SP1 on the upper surface of the substrate 5 in the forward traveling direction A. The vacuum suction space SP1 is depressurized by vacuum suction of the vacuum pipe line 62 via the vacuum path.

[0081] The print head 15 has a vacuum section 63 on the side of the direction of travel A (positive side in the Y-axis direction) during the forward pass, but does not have a vacuum section 63 on the side opposite the side of the direction of travel A during the forward pass (negative side in the Y-axis direction). Therefore, the seal materials (e.g., side seal material 71 and hermetic seal material 72) included in the vacuum section 63 are not present on the side opposite the side of the direction of travel A during the forward pass. Therefore, the paste PT filled into the substrate 5 during printing on the forward pass is not scraped out by the seal material on the side opposite the side of the direction of travel A during the forward pass. This reduces the amount of paste PT filled, preventing connection failures.

[0082] When the end point of the forward printing is reached, the control unit 19 ends the forward printing of the reciprocating printing and switches to starting the return printing (FIG. 9(C)). The return printing prints the same area as the forward printing of the same turn. In the reciprocating printing, the control unit 19 controls the print head 15 not to lift upward at the end of the forward printing. Therefore, the printing device 10 can prevent the paste PT that was not filled onto the substrate 5 from remaining on the substrate 5 and causing paste residue.

[0083] During the return pass printing, the control unit 19 sets the travel direction of the print head 15 to travel direction B and instructs the vacuum generator 170 not to operate. Instead of instructing the vacuum generator 170 not to operate, the control unit 19 may instruct the vacuum generator 170 to reduce the pressure applied by the vacuum generator 170 during the return pass compared to the pressure applied by the vacuum generator 170 during the forward pass. In this case, a weaker vacuum (negative pressure) is generated during the return pass than during the forward pass. Furthermore, during the return pass printing, the control unit 19 sets the pressing force of the lift drive unit 21 to the pressing force for the return pass. This pressing force for the return pass is stored, for example, in a memory (not shown). The pressing force for the return pass is set lower than the pressing force for the forward pass.

[0084] Specifically, the print head moving unit 16 moves the print head 15 relative to the substrate 5 in the direction of travel B during the return pass, causing the pair of blades 64 to slide on the substrate 5. During this time, the print head 15 ejects paste PT from the outlet P1 at its lower end, supplies the paste PT to the upper surface of the substrate 5, and fills the recesses 5d on each electrode 5a with the paste PT. Even if the print head 15 and the mask 14 come into close contact during this time, the vacuum unit 63 is not present on the side of the direction of travel B during the return pass, and therefore a vacuum suction space SP1 as an enclosed space is not formed on this side of the direction of travel B (the negative side in the Y-axis direction).

[0085] Furthermore, a vacuum suction space SP1 is formed on the upper surface of the substrate 5 on the side opposite the direction of travel B during the return pass (the positive side in the Y-axis direction). However, because the vacuum pipe line 62 is not vacuum-suctioned (vacuum-drawn) via the vacuum path, the vacuum suction space SP1 is not depressurized and remains at normal pressure. Alternatively, because the force of vacuum suction (vacuum-drawn) of the vacuum pipe line 62 via the vacuum path is small, the vacuum suction space SP1 remains at a pressure close to normal pressure. Furthermore, a vacuum section 63 is provided on the side opposite the direction of travel B during the return pass (the positive side in the Y-axis direction), and various sealants (e.g., side sealant 71 and sealing sealant 72) are present. Here, the pressing force of the lifting / lowering drive unit 21 is set to a pressing force for the return pass. This pressing force is sufficient to prevent the sealing material from scraping out the applied paste PT from the substrate 5 even when the print head 15 moves in the Y-axis direction during return pass printing. In other words, this pressing force for the return pass is sufficient to prevent the sealing material from sinking into the recess 5d of the substrate 5 even when pressed downward by the pressing force of the lifting / lowering drive unit 21. Therefore, it is possible to prevent the paste PT filled on the substrate 5 during the return printing from being scraped out by the sealing material on the side opposite to the traveling direction B during the return printing. Therefore, even during the return printing, the amount of paste PT filled is reduced, and it is possible to prevent connection failures from occurring.

[0086] In the printer 10, even when one turn of backward printing is completed, the print head 15 is not lifted upward under the control of the control unit 19. Even in this case, the printer 10 can smoothly transition to the next forward printing while sliding on the mask 14. Therefore, the print head 15 does not move in the Z-axis direction when the backward printing (i.e., one turn of back-and-forth printing) is completed, so that the paste PT that was not filled remains on the substrate 5, preventing the generation of paste residue.

[0087] When the entire reciprocating printing by the printing device 10 is completed and all recesses 5d on the substrate 5 have been filled with the paste PT, the print head moving unit 16 stops the movement of the print head 15, and the print head 15 stops applying pressure to the paste PT using the pressure cylinder 41, putting the paste PT into a non-supply state. The print head moving unit 16 then raises the print head 15 and separates the lower edges of the pair of blades 64 from the upper surface of the substrate 5. This leaves the paste PT in the recesses 5d on each electrode 5a of the substrate 5, and the paste PT is printed on the substrate 5. When the printing operation of the paste PT on the substrate 5 is completed in this manner, the substrate 5 is removed from the substrate holding unit 13 by a substrate transport device (not shown) and transported outside the printing device 10 (FIG. 9(D)).

[0088] Next, a comparative example will be described. In the comparative example below, components that are the same as those in this embodiment will be described by adding an "X" to the reference numerals used in this embodiment.

[0089] FIG. 10 is a schematic diagram showing the configuration of a print head 15X of a printing device 10X in a first comparative example.

[0090] In Comparative Example 1, vacuum jackets 101X corresponding to vacuum sections 63X are arranged on both sides of the print head 15X in the Y-axis direction along which the print head 15X moves during printing. Also, the printing device 10X is designed to perform unidirectional printing (one-way printing) rather than reciprocating printing.

[0091] While the vacuum path of the vacuum jacket 101X is being evacuated, the print head 15X slides a pair of blades 64X in the direction of travel AX on the substrate 5X, which is held in a predetermined position by the clamper 102X. In this case, as the printing device 10 passes each recess 5dX on the substrate 5X, it fills each recess 5dX with paste PT in turn. During this process, the sealing material 72X (packing) of the vacuum jacket 101X on the opposite side (rear side) of the two vacuum jackets 101X from the direction of travel AX may scrape out the paste PT filled in the recess 5dX. This can result in a decrease in print quality.

[0092] FIG. 11 is a schematic diagram showing the configuration of a print head 15X of a printing device 10X in a second comparative example.

[0093] In Comparative Example 2, the vacuum jacket 101X is provided on the side of the print head 15X in the direction of travel AX along the Y axis (positive side, front side in the Y axis direction) along which the print head 15X moves during printing, but is not provided on the opposite side of the direction of travel AX (negative side, rear side in the Y axis direction). Also, the printing device 10X is intended to perform unidirectional printing (one-way printing) rather than reciprocating printing.

[0094] While the vacuum path of the vacuum jacket 101X is being evacuated, the print head 15X slides a pair of blades 64X in the direction of travel AX on the substrate 5X, which is held in a predetermined position by the clamper 102X. In this case, as the printing device 10X passes each recess 5dX on the substrate 5X, it fills each recess 5dX with paste PT in turn. When one-way printing is completed (printing is complete), the print head 15X is lifted in the Z-axis direction, which is perpendicular to the direction of travel AX. At this time, some of the paste PT discharged from the discharge port P1X may remain, resulting in paste residue.

[0095] In contrast, the printing apparatus 10 of this embodiment performs printing (vacuum printing) while drawing a vacuum using the vacuum unit 63. Therefore, even when filling a substrate with paste PT into a pit-shaped blocked hole, printing can be performed while expelling air from the blocked hole (e.g., the pattern hole 14h of the mask 14 or the recess 5d of the substrate 5). Furthermore, since the printing apparatus 10 does not have a vacuum unit 63 on the side opposite the traveling direction A, the sealant (e.g., the side sealant 71 and the sealing sealant 72) included in the vacuum unit 63 is also absent. Therefore, the paste PT filled into the pattern hole 14h of the mask 14 or the recess 5d of the substrate 5 during forward printing is not scraped out by the sealant on the side opposite the traveling direction during the forward printing. Therefore, the printing apparatus 100 can prevent insufficient filling of the paste PT and the occurrence of poor connection at the electrode 5a.

[0096] Furthermore, because the printing device 10 is capable of performing bidirectional printing, it is possible to start reverse printing when forward printing reaches the end point without lifting the print head 15. Furthermore, the printing device 10 is able to start forward printing of the next turn when reverse printing reaches the end point without lifting the print head 15. Therefore, by performing bidirectional printing, the printing device 10 can reduce the occurrence of paste residue remaining on the mask 14 when the print head 15 is lifted.

[0097] As described above, the printing device 10 of this embodiment moves the print head 15 filled with paste PT in a predetermined printing direction (e.g., direction A during forward movement or direction B during backward movement) to apply the paste PT directly to a substrate (e.g., substrate 5) or through the pattern holes 14h of the mask 14 placed on top of the substrate. The print head 15 includes a paste storage section (e.g., cartridge 44) that stores the paste PT, a paste discharge section (e.g., print head base 50), a paste pressurizing section (e.g., pressure cylinder 41), and a vacuum section 63. The vacuum section 63 includes, for example, a blade fixing device 66, a side sealant 71, and a sealing member 72. The paste discharge section includes a paste passage 51 that connects a paste discharge port (e.g., discharge port P1) formed by a first sealant that contacts the mask 14 or substrate 5 to the paste storage section. This first sealant includes, for example, a main blade 64A, an auxiliary blade 64B, and a side block 73. The paste pressurizing unit pushes the paste PT from the paste storage unit toward the paste discharge port. When the first sealant is brought into contact with the upper surface of the mask 14 or the substrate 5, the vacuum unit 63 forms an enclosed space on the upper surface adjacent to the paste discharge port on the forward path side in the printing direction. The vacuum unit 63 has a vacuum pipe 61 connected to a vacuum generating unit (e.g., vacuum generating device 170) and a vacuum conduit 62 connecting the enclosed space (e.g., vacuum suction space SP1). The printing device 10 also has a print head moving unit 16 that moves the print head 15 by sliding it over the upper surface of the printing substrate (e.g., substrate 5) or mask 14.

[0098] As a result, the printing device 10 forms an enclosed space on the forward path side in the printing direction, allowing printing while drawing a vacuum using the vacuum generator. Furthermore, by not forming an enclosed space on the opposite side of the forward path side in the printing direction, the first sealant is also absent on the opposite side of the forward path side. Therefore, the printing device 10 can prevent the paste PT already filled in the pattern holes 14h of the substrate 5 or mask 14 from being scraped out by the first sealant on the opposite side of the forward path side, thereby improving printing quality.

[0099] Furthermore, the paste passage 51 may guide the paste PT extruded from the bottom surface (for example, the bottom plate 44b) of the paste storage section by the paste pressurizing section to a paste discharge port located below the paste passage 51.

[0100] This allows the printing device 10 to guide the paste PT from above downward along the Z-axis direction, and fill the mask 14 or the substrate 5.

[0101] In addition, the vacuum section 63 may have a second sealant (e.g., a side sealant 71, a sealing sealant 72) that contacts the upper surface of the mask 14 or the substrate 5, and may form an airtight space on the above-mentioned upper surface, including a suction port P2 surrounded by the second sealant and the first sealant.

[0102] This allows the printing device 10 to create an airtight space within the area surrounded by the side seal material 71, the sealing seal material 72, and the blade 64 (e.g., auxiliary blade 64B), etc., and reduce the pressure at the suction port P2. Furthermore, by creating an airtight space adjacent to the paste discharge port, the printing device 10 can discharge air from the filling location of the paste PT (e.g., pattern hole 14h of mask 14 or recess 5d of substrate 5) while the print head 15 is moving, and then immediately fill this filling location with the paste PT.

[0103] Furthermore, the printing device 10 may include a control unit 19 that instructs the vacuum generating unit not to operate when the print head 15 moves in the return direction of the printing direction to apply the paste PT.

[0104] This allows the printing device 10 to prevent the filled paste PT from being sucked in the direction of the vacuum path by vacuuming during forward printing, thereby preventing a reduction in the amount of paste PT filled into the mask 14 or the substrate 5, and improving print quality.

[0105] In addition, the printing device 10 may be provided with a control unit 19 that instructs the vacuum generating unit to reduce the pressure reduction force when the print head 15 moves in the return direction of the printing direction to apply the paste PT compared to when the print head 15 moves in the forward direction of the printing direction to apply the paste PT.

[0106] This allows the printing device 10 to prevent the filled paste PT from being sucked in the direction of the vacuum path by vacuuming during forward printing, thereby preventing a reduction in the amount of paste PT filled into the mask 14 or the substrate 5, and improving print quality.

[0107] Furthermore, the print head moving unit 16 (e.g., the lifting drive unit 21) may be capable of pressing the print head 15 along a first direction (e.g., the Z-axis direction) perpendicular to the surface of the mask 14 or the surface of the substrate 5. The pressing force in the first direction by the print head moving unit 16 is smaller during printing on the return path than during printing on the outward path.

[0108] As a result, during forward printing, the printing device 10 increases the pressing force applied to the print head 15 by the print head moving unit 16, thereby pressing the first sealant firmly against the mask 14 or the substrate 5, thereby improving the sealing of the sealed space created by the first sealant. Furthermore, during backward printing, the printing device 10 reduces the pressing force applied by the print head moving unit 16, thereby reducing the force with which the first sealant presses against the mask 14 or the substrate 5. Therefore, during backward printing, the printing device 10 can prevent the first sealant from scraping out the paste PT that has already been filled in the mask 14 or the substrate 5.

[0109] Although various embodiments have been described above with reference to the drawings, it goes without saying that the present disclosure is not limited to such examples. It is clear that a person skilled in the art can conceive of various modifications, alterations, substitutions, additions, deletions, and equivalents within the scope of the claims, and it is understood that these also naturally fall within the technical scope of the present disclosure. Furthermore, the components of the various embodiments described above may be combined in any manner without departing from the spirit of the invention.

[0110] In the above embodiment, the positive direction in the Y-axis direction is mainly used as the direction of travel during the forward pass, but this is not limiting. The printing device 10 may use the negative direction in the Y-axis direction as the direction of travel A during the forward pass and the positive direction in the Y-axis direction as the direction of travel B during the backward pass. In this case, the vacuum unit 63 is provided on the negative side of the Y-axis direction, and the vacuum unit 63 is not provided on the positive side of the Y-axis direction. Alternatively, both a printing device 10 with a vacuum unit 63 on the positive side of the Y-axis direction and no vacuum unit 63 on the negative side of the Y-axis direction, and a printing device 10 with a vacuum unit 63 on the negative side of the Y-axis direction and no vacuum unit 63 on the positive side of the Y-axis direction may be provided. In this case, for example, the printing device 10 with the vacuum unit 63 on either the positive or negative side of the Y-axis direction may be used depending on which direction in the Y-axis direction is the forward pass direction. In either case, since there is no sealing material to form an enclosed space on the opposite side (negative or positive side in the Y-axis direction) to the forward travel direction A (positive or negative side in the Y-axis direction), the printing device 10 can prevent this sealing material from scraping out the filled paste PT.

[0111] In the above embodiment, the printing device 10 is illustrated as having a vacuum section 63 in the direction of travel A during the forward pass along the Y axis, but not in the direction of travel B during the return pass along the Y axis. However, this is not limiting. For example, the printing device 10 may have vacuum sections 63 in both the direction of travel A during the forward pass along the Y axis and the direction of travel B during the return pass along the Y axis. Even in this case, the pressing force of the lifting / lowering drive unit 21 may be set to the pressing force for the forward pass during the forward pass, and the pressing force of the lifting / lowering drive unit 21 may be set to the pressing force for the return pass during the return pass. Alternatively, the vacuum generator 170 may be activated during the forward pass, and the vacuum generator 170 may not be activated or the pressure reduction force of the vacuum generator 170 may be smaller than that during the forward pass during the return pass. This may achieve the same effect as when the vacuum section 63 is provided only on one side in the Y axis direction.

[0112] In the above embodiment, the printing device 10 has been illustrated as having a configuration for cooling the paste PT, but this is not limiting, and the printing device 10 does not necessarily have to have a configuration for cooling the paste PT. For example, the second valve unit 18, the cooling member 52, the refrigerant flow path 53, the temperature sensor 54, the refrigerant pipe 55, the cooling water circulation device 180, etc. may not be provided.

[0113] The order of execution of each process, such as operations, procedures, steps, and stages, in the devices, systems, programs, and methods shown in the claims, specifications, and drawings, is not specifically stated as "before," "prior to," etc., and can be realized in any order unless the output of a previous process is used in a subsequent process. Even if the operational flow in the claims, specifications, and drawings is explained using "first," "next," etc. for convenience, this does not mean that it is essential to perform the process in that order. [Industrial Applicability]

[0114] The present disclosure is useful for a printing device, a printing method, and the like that can prevent filled paste from being scraped out and improve print quality. [Explanation of symbols]

[0115] 5. Substrate 5a electrode 5b Base material 5c Solder resist 5d recess 10 Printing device 11 Foundation 12 xyzθ table 13 Board holding part 14 Mask 14h pattern holes 15 print head 16 Print head moving part 17 First valve unit 18 Second valve unit 19 Control Unit 41 Pressure Cylinder 44 cartridges 50 Print head base 51 Paste Passage 52 Cooling member 53 Refrigerant flow path 54 Temperature Sensor 55 Refrigerant piping 61 Vacuum piping 62 Vacuum line 63 Vacuum section 64 blades 64A Main Blade 64B Auxiliary Blade 65 plates 66 Blade Fixture 67 Suction chamber 71 Side seal material 72 Sealing materials 73 Side Block 170 Vacuum Generator 180 Cooling water circulation system P1 outlet P2 suction port PT Paste

Claims

1. A printing device that moves a print head filled with paste in a predetermined printing direction to apply the paste directly to a substrate or through pattern holes in a mask placed over the substrate, The print head comprises: a paste storage section that stores the paste; a paste discharge section having a paste passage that connects a paste discharge port formed by a first sealing material that contacts the mask or the printing object to the paste storage section; a paste pressurizing unit that pushes the paste from the paste storage unit to the paste discharge port; a vacuum unit that forms an enclosed space on the upper surface adjacent to the paste discharge port on the side of the traveling direction during a forward pass of reciprocating printing along the printing direction when the first sealing material is brought into contact with the upper surface of the mask or the object to be printed, and that has a vacuum pipe line that connects a vacuum pipe connected to a vacuum generating unit with the enclosed space, the vacuum unit has a second sealant in contact with the upper surface, and forms the sealed space on the upper surface, the sealed space including a suction port surrounded by the second sealant and the first sealant; a print head moving unit that slides the upper surface to move the print head in the printing direction; a control unit that instructs the vacuum generating unit not to operate when the print head moves in a backward direction of the printing direction to apply the paste, the print head moving unit is capable of pressing the print head along a first direction perpendicular to a surface of the mask or a surface of the printing substrate, the pressing force in the first direction by the print head moving unit is smaller during printing on a return pass than during printing on a forward pass; Printing device.

2. the paste passage guides the paste extruded from the bottom surface of the paste storage section by the paste pressurizing section to the paste discharge port located below the paste passage. The printing device of claim 1 .

3. and a control unit that instructs the vacuum generating unit to reduce the force of decompression by the vacuum generating unit when the print head moves in a backward direction of the printing direction to apply the paste, compared to when the print head moves in a forward direction of the printing direction to apply the paste.

3. The printing device according to claim 1.

4. A printing method in which a print head filled with paste is moved in a predetermined printing direction to apply the paste directly to a substrate or through pattern holes in a mask placed over the substrate, a step of extruding the paste from a paste storage portion that stores the paste to a paste discharge port formed by a first sealing material that contacts the mask or the printing object; reducing the pressure of an enclosed space adjacent to the paste ejection port on the traveling direction side during a forward pass of reciprocating printing along the printing direction when the first sealing material is brought into contact with the mask or the upper surface of the object to be printed; sliding the upper surface to move the print head in the printing direction; and the sealed space is formed on the upper surface, and a vacuum section is provided having a vacuum pipe line connecting a vacuum piping connected to a vacuum generating section and the sealed space; the vacuum unit has a second sealant in contact with the upper surface, and forms the sealed space on the upper surface, the sealed space including a suction port surrounded by the second sealant and the first sealant; When the print head moves in the return direction of the printing direction to apply the paste, the control unit instructs the vacuum generating unit not to operate, a print head moving unit that slides the upper surface to move the print head in the printing direction can press the print head along a first direction perpendicular to the surface of the mask or the surface of the printing substrate; the pressing force in the first direction by the print head moving unit is smaller during printing on a return pass than during printing on a forward pass; Printing method.

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