Laser irradiation device and laser irradiation method

Abstract

To provide a laser irradiation device and a laser irradiation method each of which enables start position of irradiation of an object with laser to be highly accurately adjusted when the object rotates.SOLUTION: A laser irradiation device comprises rotation detection means and adjusts a start position of irradiation of an object with laser on the basis of rotation information of the object detected by the rotation detection means.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a laser irradiation apparatus and a laser irradiation method. [Background technology]

[0002] Patent Document 1 discloses a laser marking system and a laser marking method that can reduce costs while also achieving miniaturization and shortening of working time.

[0003] Patent Document 2 discloses a method for processing a workpiece that can process the workpiece with high precision even when the workpiece is transported at different speeds. Summary of the Invention [Problem to be solved by the invention]

[0004] An object of the present invention is to accurately adjust the laser irradiation start position on an object when the object rotates. [Means for solving the problem]

[0005] The laser irradiation device according to the present invention comprises a rotation detection means for detecting the rotation of an object; an irradiation control means for controlling irradiation of the object based on rotation information of the object detected by the stage; and a position detection means for detecting the position of the object, the rotation detection means being disposed upstream of the position detection means in the conveying direction. It is characterized by: [Effects of the Invention]

[0006] The present invention can accurately adjust the laser irradiation start position on the object even when the object rotates. [Brief explanation of the drawings]

[0007] [Figure 1] 1 is an explanatory diagram showing an outline of a configuration of a laser irradiation device and a detection means according to an embodiment of the present invention; [Figure 2] FIG. 10 is an explanatory diagram relating to the rotation of an object, which is an example according to the present embodiment. [Figure 3] 1 is an explanatory diagram illustrating a configuration of a laser irradiation device as an example of the present embodiment. [Figure 4] 10 is an explanatory diagram showing an example of an object rotating in the present embodiment, viewed from the X-axis direction. FIG. [Figure 5] 3A and 3B are diagrams illustrating the relationship between a rotation detection unit and a position detection unit that detect an object, which is an example of the present embodiment. [Figure 6] 10 is a flowchart illustrating an example of a process for detecting an object according to the present embodiment. [Figure 7] 10A and 10B are diagrams illustrating a relationship between a conveyance direction of an object and a laser irradiation direction, which is an example of the present embodiment. [Figure 8] 10A and 10B are diagrams illustrating the tracking of a laser beam in a transport direction, which is an example of the present embodiment. [Figure 9] FIG. 10 is an explanatory diagram of a modified example of the present embodiment having a plurality of laser devices. [Figure 10] This is an example of a modification of the present embodiment in which a plurality of laser devices are provided. [Figure 11] FIG. 10 is an explanatory diagram of a modified example of the present embodiment in which the object has a non-transparent portion. [Figure 12] 1 is an explanatory diagram of a change in the property of an object, which is an example according to the present embodiment. [Figure 13] FIG. 10 is an explanatory diagram of an object detection means which is a modified example of the present embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0008] The laser irradiation device of the present invention will be described in detail below with reference to the drawings.

[0009] (Embodiment) FIG. 1 is an explanatory diagram showing an outline of the configuration of a laser irradiation device and a detection means according to an embodiment of the present invention.

[0010] 1 is a laser irradiation device 100. In this laser irradiation device 100, an object 101 is conveyed downstream in the conveying direction (Y direction) at a conveying speed V. The object 101 is irradiated with laser light 117 by a laser device 108 while being conveyed.

[0011] Here, the object 101 may be anything that can be transported by the laser irradiation device 100 and irradiated with the laser beam 117. If the object is a resin material, the laser beam 117 may cause a change in the properties of the resin material.

[0012] A position detection means for the object 101 is disposed upstream in the conveying direction from the laser device 108. As an example of the position detection means, a position detection means (light projecting unit) 106 and a position detection means (light receiving unit) 107 are shown.

[0013] A rotation detection means for the object 101 is also arranged upstream in the conveying direction from the laser device 108. As an example of the rotation detection means, a rotation detection means (light projecting unit) 104 and a rotation detection means (light receiving unit) 105 are shown.

[0014] The rotation of the object 101 is illustrated as rotation angles α, β, and γ around the respective spatial coordinate axes of the spatial coordinates (X, Y, Z).

[0015] In this way, in the laser irradiation device 100, the laser device 108 irradiates the object 101 with the laser light 117 while the object 101 is being transported downstream in the transport direction (Y direction).

[0016] FIG. 2 is an explanatory diagram relating to the rotation of an object as an example in this embodiment.

[0017] 2(a) to (f) show how an object 101 rotates in space.

[0018] The α rotation, β rotation, and γ rotation shown in the figure represent rotations around the X axis, Y axis, and Z axis, respectively, as described above.

[0019] The laser irradiation area 102 is an area of ​​the object 101 that is irradiated with the laser light 117 emitted from the laser device 108 .

[0020] FIG. 2(a) shows the state before the object 101 rotates by α around the X axis.

[0021] FIG. 2(b) shows the state after the object 101 has rotated by α around the X axis.

[0022] FIG. 2(c) shows the state before the object 101 rotates by β around the Y axis.

[0023] FIG. 2(d) shows the state after the object 101 has rotated β around the Y axis.

[0024] FIG. 2(e) shows the state of the object 101 before it rotates by γ around the Z axis.

[0025] FIG. 2(f) shows the state after the object 101 has rotated γ around the Z axis.

[0026] The object 101 will be rotated in three-dimensional space by an α rotation, a β rotation, or a γ rotation, or any combination of these α rotation, β rotation, and γ rotation.

[0027] FIG. 3 is an explanatory diagram of the configuration of a laser irradiation device as an example of this embodiment.

[0028] 3(a) and (b) show the optical system and the conveying direction of the object 101 when the laser light 117 emitted from the laser device 108 is irradiated onto the object 101. FIG.

[0029] FIG. 3(a) is a diagram showing an image of the object 101 being conveyed in the Y direction at a conveying speed V, as viewed from the X-axis direction.

[0030] First, FIG. 3(a) will be explained below.

[0031] 3(a), the laser irradiation device 100 includes a laser device 108, a beam expander 140, a mirror a 118a and a mirror b 118b, a lens 119, and synchronization detectors 141a and 141b. Here, the mirror a 118a and the mirror b 118b can be replaced with other mirrors that can scan the laser light 117. A rotating polygonal mirror such as a polygon scanner may also be used.

[0032] As shown in FIG. 3(a), the target object 101 is conveyed at a conveying speed V in the Y direction.

[0033] The apparatus is provided with a position detection means (light projecting section) 106 and a position detection means (light receiving section) 107 for detecting the position of the object 101 being conveyed.

[0034] Also, a rotation detection means (light projecting section) 104 and a rotation detection means (light receiving section) 105 for detecting the rotation of the object 101 are provided.

[0035] The position detection means and rotation detection means may be of a transmission type or a reflection type, and the type of detection method is not important.

[0036] The installation positions of the various sensors, the transport location and transport speed V of the object 101 are known parameters, so the timing of laser irradiation can be determined from these existing parameters.

[0037] The laser device 108 is a pulse laser that emits laser light 117. The laser device 108 emits the laser light 117 with an output (light intensity) suitable for changing the properties of at least one of the surface and the interior of the base material of the object 101 irradiated with the laser light 117.

[0038] The laser device 108 is capable of controlling the on / off of emission of the laser light 117, the emission frequency, and the light intensity. As an example of the laser device 108, a laser device 108 having a wavelength of 355 nm, a pulse width of the laser light 117 of 10 picoseconds, and an average output of 30 to 50 W can be used. The diameter of the laser light 117 in the region where the properties of the base material of the object 101 are to be changed is preferably 1 μm or more and 200 μm or less.

[0039] 3(a) shows a case where one laser device 108 is used, but the laser device may be configured with a plurality of laser devices 108. When a plurality of laser devices 108 are used, the laser devices 108 may be configured to be independently controlled to be turned on or off, to have an emission frequency and a light intensity.

[0040] The diameter of the parallel laser beam 117 emitted from the laser device 108 is expanded by the beam expander 140 and is incident on the mirror a 118a and the mirror b 118b. The mirror a 118a and the mirror b 118b have a function of changing the reflection angle by a driving unit such as a motor.

[0041] By changing the angle of reflection by the mirror a 118a, the incident laser light 117 is scanned in the Y direction. A galvanometer mirror, a polygon mirror, a MEMS (Micro Electro Mechanical System) mirror, or the like can be used as this scanning mirror.

[0042] In the embodiment, the mirror a 118a and the mirror b 118b perform one-dimensional scanning of the laser light 117 in the Y direction, but the present invention is not limited to this.

[0043] The mirror a 118a and the mirror b 118b may be scanning mirrors that change the reflection angle in two orthogonal directions to two-dimensionally scan the laser light 117 in the X and Y directions.

[0044] The laser light 117 scanned by the mirror a 118a and the mirror b 118b is irradiated onto at least one of the surface and the interior of the base material of the object 101.

[0045] The lens 119 is a lens that keeps constant the scanning speed of the laser light 117 scanned by the mirror a 118a and the mirror b 118b, and converges the laser light 117 at a predetermined position on at least one of the surface and the interior of the substrate of the target object 101. For this lens 119, an fθ lens, an arc sine lens, or the like that keeps the scanning speed constant can be used.

[0046] It is preferable that lens 119 and object 101 are arranged so that the beam spot diameter of laser light 117 is minimized in the region where the properties of the base material of object 101 are to be changed. Note that lens 119 may be configured by combining multiple lenses.

[0047] The synchronization detectors 141a and 141b output synchronization detection signals used to synchronize the scanning angle and laser output of the laser light 117. The synchronization detectors 141a and 141b include photodiodes that output electrical signals according to the intensity of the received light, and output the electrical signals from the photodiodes as synchronization detection signals to the irradiation control means 142 of the laser device 108.

[0048] The irradiation control means 142 outputs a signal for controlling the laser output to the laser device 108, and outputs a signal for scanning the laser light 117 to the mirror b 118b.

[0049] 3(b) is a diagram showing an image of FIG. 3(a) as viewed from the Y-axis direction. The object 101 is transported from the back side of the screen to the front side (Y direction).

[0050] Since this is the same as FIG. 3(a), detailed explanation will be omitted.

[0051] 3(c) to (f) show the positional relationship between the object and the rotation detection means.

[0052] FIG. 3(c) is a diagram showing the positional relationship between the rotation detection means 104 and 105 and the object 101 when the object has a hexagonal prism shape, as viewed from the X-axis direction.

[0053] In FIG. 3(c), the positional relationship between the rotation detection means (light projecting section) 104 and the rotation detection means (light receiving section) 105 varies depending on the detection method.

[0054] When the detection method is a transmission type, the positional relationship between the rotation detection means (light projecting section) 104 and the rotation detection means (light receiving section) 105 is important.

[0055] When the detection method is a reflection type and regular reflected light is received, the positional relationship is as follows: rotation detection means (light projecting section) 104 and rotation detection means (light receiving section) 105a.

[0056] Furthermore, when the detection method is of the reflective type and diffusely reflected light is received, the positional relationship between the rotation detection means (light projecting section) 104 and the rotation detection means (light receiving section) 105b is as follows.

[0057] By providing rotation detection means with different detection methods in this way, the rotation of the object 101 can be detected accurately.

[0058] For example, the object is conveyed while being rotated at various angles in advance, and changes in the amount of light received by various rotation detection means (light receiving units) due to the rotation of the object 101 are recorded as background data. By using the background data recorded in this way, the amount of rotation of the object 101 can be recognized with high accuracy.

[0059] There may also be multiple combinations of rotation detection means (light projecting unit) 104 and rotation detection means (light receiving unit) 105. By using multiple detection means, the rotation of the object 101 can be detected with even greater accuracy based on the amount of received light reflected or transmitted at various angles.

[0060] Furthermore, the rotation detection means does not have to be a combination of the rotation detection means (light projecting section) 104 and the rotation detection means (light receiving section) 105, and the rotation of the object may be detected by a camera.

[0061] Since images captured by a camera contain a large amount of information, using a camera is likely to improve the accuracy of detecting the amount of rotation.

[0062] Regardless of the rotation detection means, even if the object 101 does not rotate from the reference position, it is possible to recognize that the object has not rotated by comparing the back data with that when the object is in the reference position.

[0063] FIG. 3(d) shows the state of FIG. 3(c) as viewed from the Y-axis direction.

[0064] Figure 3(e) is a diagram showing the positional relationship between the rotation detection means 104 and 105 and the object 101 when the object 101 is shaped like an octagonal prism, as viewed from the X-axis direction, in contrast to Figure 3(c), which shows the case when the object 101 is shaped like a hexagonal prism.

[0065] FIG. 3(f) shows the state of FIG. 3(e) as viewed from the Y-axis direction.

[0066] 3(c) to (f) illustrate the case where the object 101 has a hexagonal prism shape and an octagonal prism shape, but the same applies to other polygonal objects and objects formed with curved surfaces. As mentioned above, the rotation of the object 101 can be detected based on the amount of received light reflected or transmitted at various angles by multiple detection means.

[0067] Regarding Figures 3(a) to (f), the detection means has been described as rotation detection means so far, but the same applies if the detection means is position detection means, and by providing multiple detection means with different methods, the position of the target object can be detected with high accuracy.

[0068] 4 is an explanatory diagram showing an example of an object rotating in this embodiment, viewed from the X-axis direction. In FIG. 4, the object 101 rotates around the X-axis by α.

[0069] For ease of explanation, we will consider an object with a shape that has two opposing planes of symmetry parallel to the X axis. For example, if there are two opposing planes of symmetry, the cross section in the Y-Z plane will be a regular quadrilateral (square). If there are three opposing planes of symmetry, the cross section in the Y-Z plane will be a regular hexagon, and if there are four opposing planes of symmetry, the cross section in the Y-Z plane will be a regular octagon.

[0070] We will explain the case where the cross section of the YZ plane is a regular square.

[0071] FIG. 4(a) shows the state when the object 101 is not rotating at all.

[0072] In this case, the laser irradiation reference direction 111, which is the center of the laser irradiation range as seen from the laser device 108, is aligned on a straight line with the center of the laser irradiation surface 103 of the object 101. Therefore, the laser light 117 can be irradiated onto the laser irradiation surface 103 of the object 101 without adjusting the laser irradiation angle (θ) 121 of the laser light 117 irradiated by the laser device 108.

[0073] FIG. 4(b) shows the state when the object 101 has made an α rotation.

[0074] In this case, at the timing when the laser irradiation reference direction 111 and the center of the laser irradiation surface 103 of the object 101 are aligned on a straight line, the center of the object 101 is displaced from the laser irradiation reference direction 111. Generally, the position of the object 101 is specified by position information of the center of the object 101, so the timing in Fig. 4(b) is a timing before the originally scheduled timing of laser irradiation.

[0075] FIG. 4(c) shows the state when the object 101 rotates, and shows the state at the timing when the laser irradiation reference direction 111 and the center of the object 101 are aligned on a straight line.

[0076] Although this timing is the original laser irradiation timing, since the laser irradiation reference direction 111 and the center of the laser irradiation surface 103 of the object 101 are misaligned, the laser irradiation field angle (θ) 121 of the laser light 117 must be adjusted to the laser irradiation field angle (ω) 122 and the laser irradiation field angle (Φ) 123.

[0077] FIG. 4(d) shows how laser irradiation is started at an early timing so that the laser irradiation reference direction 111 and the center of the laser irradiation surface 103 of the object 101 are aligned on a straight line.

[0078] The early timing in this case is the time required for transport equivalent to the positional deviation (m) 120 caused by the rotation of the target object 101. The position displaced by the positional deviation (m) upstream in the transport direction relative to the laser irradiation reference direction 111 is the most suitable position for starting laser irradiation.

[0079] Incidentally, the specific positional deviation amount (m) 120 due to the rotational change is expressed by the following equation, where L is the width of the laser irradiation surface 103 and Ψ is the rotation angle of the object 101.

[0080] m=L / 2*sin(Ψ)

[0081] FIG. 5 is a diagram illustrating the relationship between a rotation detection means and a position detection means that detect an object, which is an example of this embodiment.

[0082] In FIG. 5, the object 101 is conveyed at a conveying speed V downstream in the conveying direction (Y direction).

[0083] The object 101 is irradiated with laser light 117 by a laser device 108 while being transported.

[0084] A means for detecting the position of the object 101 is disposed upstream of the laser device 108 in the conveying direction. As an example of the position detection means, a position detection means (light projecting unit) 106 and a position detection means (light receiving unit) 107 are shown.

[0085] A means for detecting the rotation of the object 101 is also arranged upstream of the laser device 108 in the conveying direction. As an example of the rotation detection means, a rotation detection means (light projecting unit) 104 and a rotation detection means (light receiving unit) 105 are shown.

[0086] In Figure 5, the distance from the laser device 108 to the rotation detection means (light projecting unit) 104 and the rotation detection means (light receiving unit) 105 is shown as the rotation detection laser irradiation adjustment section 131, and the distance from the laser device 108 to the position detection means (light projecting unit) 106 and the position detection means (light receiving unit) 107 is shown as the position detection laser irradiation adjustment section 130.

[0087] As shown in FIG. 5, the rotation detection laser irradiation adjustment section 131 is longer than the position detection laser irradiation adjustment section 130.

[0088] Here, the position detection means (light projecting section) 106, the position detection means (light receiving section) 107, the rotation detection means (light projecting section) 104 and the rotation detection means (light receiving section) 105 do not necessarily have to be perpendicular to the conveying direction Y.

[0089] The position detection laser irradiation adjustment section 130 indicates a section from the laser device 108 to when the position of the object 101 is substantially detected.

[0090] Moreover, the rotation detection laser irradiation adjustment section 131 indicates a section from the laser device 108 until the rotation of the object 101 is substantially detected.

[0091] As described above, the reason why the rotation detection laser irradiation adjustment section 131 is longer than the position detection laser irradiation adjustment section 130 is that, since processing of rotation information acquired by the rotation detection means takes longer than processing of position information acquired by the position detection means, by arranging the rotation detection means upstream of the position detection means in the conveying direction, the total processing time can be shortened. Such a reduction in the total processing time also leads to space saving for the device in the conveying direction.

[0092] FIG. 6 is a flowchart illustrating an example of a process for detecting an object according to this embodiment.

[0093] First, the position and rotation of the object 101 are detected while the object 101 is being transported (S1).

[0094] Next, the process for laser irradiation is started based on the rotation detection information (S2).

[0095] Thereafter, the process for laser irradiation is started based on the position detection information (S3).

[0096] Finally, based on the results of the processes in S2 and S3, the start position of laser irradiation is determined (S4).

[0097] In this way, by starting the processing of the rotation information acquired by the rotation detection means before the processing of the position information acquired by the position detection means, the total processing time can be shortened.

[0098] FIG. 7 is a diagram illustrating the relationship between the transport direction of the object and the laser irradiation direction, which is an example of the present embodiment.

[0099] 7(a) shows a state in which the main scanning direction 109 of laser irradiation by the laser light 117 onto the object 101 is perpendicular to the conveying direction V (Y direction). On the other hand, the sub-scanning direction 110 of the laser irradiation is perpendicular to the main scanning direction 109 of the laser irradiation and coincides with the conveying direction V (Y direction).

[0100] FIG. 7(b) is an image diagram of main scanning irradiation when laser irradiation is performed with a constant interval between main scannings while the object 101 is being transported in the Y direction.

[0101] FIG. 7(c) is an image diagram of main scanning irradiation when laser irradiation is performed with a constant interval between main scannings when no conveyance is performed (when there is no influence of the conveyance speed V).

[0102] 7(d) shows a state in which the main scanning direction 109 of laser irradiation by the laser light 117 onto the object 101 is parallel to the conveying direction V (Y direction). On the other hand, the sub-scanning direction 110 of the laser irradiation is a direction perpendicular to the main scanning direction 109 of the laser irradiation and is also perpendicular to the conveying direction V (Y direction).

[0103] FIG. 7(e) is an image diagram of main scanning irradiation when laser irradiation is performed with a constant interval time between main scannings while the object 101 is being transported in the Y direction.

[0104] FIG. 7(f) is an image diagram of main scanning irradiation when laser irradiation is performed with a constant interval between main scannings when there is no transport (when there is no influence of the transport speed V).

[0105] The scanning speed of the laser irradiation in the sub-scanning direction is slower than that in the main scanning direction. Therefore, by aligning the sub-scanning direction, in which the scanning speed is slow, with the transport direction, it is possible to reduce fluctuations in the drawing position due to detection timing errors.

[0106] FIG. 8 is a diagram illustrating the tracking of the laser light in the transport direction as an example in this embodiment.

[0107] FIG. 8(a) shows how a laser is irradiated onto an object being conveyed.

[0108] As described above, the diameter of the parallel laser beam 117 emitted from the laser device 108 is expanded by the beam expander 140 and is irradiated onto the surface of the object being conveyed at the conveying speed V by the lens 119.

[0109] In the figure, multiple objects being transported are arranged at regular intervals in the transport direction, and the section where an object exists is represented as an object-present section (O) 150, and the section where an object does not exist is represented as an object-free section (U).

[0110] Also, the part of the object that has already been irradiated with the laser beam 117 is shown as an irradiated region 153, and the part of the object that has not yet been irradiated with the laser beam 117 is shown as a non-irradiated region 152.

[0111] The laser beam 117 is scanned by a scanning means 154. As the scanning means, a galvanometer mirror, a polygon mirror, a MEMS (Micro Electro Mechanical System) mirror, or the like can be used. Note that, although an example in which the laser beam 117 is scanned one-dimensionally in the Y direction is shown in the embodiment, the present invention is not limited to this. The laser beam 117 may also be scanned two-dimensionally in the X and Y directions using a scanning mirror that changes the reflection angle in two orthogonal directions.

[0112] FIG. 8(b) shows a state in which the object has been further transported from the state shown in FIG. 8(a).

[0113] This shows that the laser irradiation has finished on the irradiation area 153, but has not yet started on the non-irradiation area 152. In this state, the laser light 117 is irradiating the no-object section (U), and this is the timing when the laser light cannot actually be irradiated on the object.

[0114] FIG. 8(c) shows a state in which the object has been further transported from the state shown in FIG. 8(b).

[0115] The laser irradiation shows the state where irradiation of the non-irradiated area 152 has started.

[0116] 8(a) to 8(c) show the case where the laser light does not follow the transport direction, while FIGS. 8(d) to 8(e) show the case where the laser light follows the transport direction.

[0117] FIG. 8(d) shows a state in which laser irradiation of an irradiation region 153 of the object has been completed, but laser irradiation of a non-irradiation region 152 has not yet started.

[0118] FIG. 8(e) shows the state in which laser irradiation to the non-irradiation region 152 is started.

[0119] From FIG. 8(d) to (e), the deflection means (scanning means) 154 scans the angle of view D, and the laser light is made to follow the conveyance direction, thereby reducing the timing when the object is not irradiated.

[0120] In this way, the irradiation time rate in the transport direction can be increased by following the laser light in the transport direction, thereby improving productivity.

[0121] FIG. 9 is an explanatory diagram of a modified example of this embodiment in which a plurality of laser devices are provided.

[0122] The laser irradiation device 100 shown in FIG. 9 includes a laser device (L1) 108A, a laser device (L2) 108B, and a laser device (L3) 108C.

[0123] By arranging a plurality of laser devices in this manner, productivity can be improved.

[0124] On the other hand, there are not multiple rotation detection means (light projecting units) 104 and multiple rotation detection means (light receiving units) 105. If multiple detection means are provided corresponding to multiple laser devices 108, there will be problems such as increased component costs and increased space required for the detection means.

[0125] Therefore, FIG. 9(a) shows a laser irradiation device with a single detection means.

[0126] Figure 9(b) shows the relationship between the position detection signal (L1) 160A, position detection signal (L2) 160B, and position detection signal (L3) 160C of each object and the laser irradiation start signal (L1) 161A, laser irradiation start signal (L2) 161B, and laser irradiation start signal (L3) 161C.

[0127] If only one detection means is used to save space, the time from when the detection means detects the object to when each of the multiple laser devices, laser device (L1) 108A, laser device (L2) 108B, and laser device (L3) 108C, starts irradiating the laser light will no longer be constant.

[0128] Therefore, the laser device (L1) 108A detects the position detection signal (L1) 160A and irradiates the laser at the timing of the laser irradiation start signal (L1) 161A. The laser device (L2) 108B detects the position detection signal (L2) 160B and irradiates the laser at the timing of the laser irradiation start signal (L2) 161B. The laser device (L3) 108C detects the position detection signal (L3) 160C and irradiates the laser at the timing of the laser irradiation start signal (L3) 161C.

[0129] In this way, by varying the time from detection of the object to the start of laser irradiation in each laser device, it is possible to configure a laser irradiation device 100 having a single combination of rotation detection means (light-emitting unit) 104 and rotation detection means (light-receiving unit) 105, and multiple laser devices, namely laser device (L1) 108A, laser device (L2) 108B, and laser device (L3) 108C.

[0130] In the above description, a single combination of rotation detection means (light projecting unit) 104 and rotation detection means (light receiving unit) 105 is used, but a single combination of position detection means (light projecting unit) 106 and position detection means (light receiving unit) 107 may also be used.

[0131] Furthermore, the detection means does not have to be a pair, and any means capable of detection may be used, such as a camera.

[0132] FIG. 10 shows an example of a modification of this embodiment in which a plurality of laser devices are provided.

[0133] 10(a) and 10(b) show the state of laser irradiation at a conveying speed V. FIG. 10(a) shows the timing before irradiation of the object, and FIG. 10(b) shows the timing after irradiation of the object.

[0134] On the other hand, Figures 10(c) and 10(d) show the state of laser irradiation at a conveying speed of 3V. In this case, the object is conveyed at a conveying speed three times faster than that in Figures 10(a) and 10(b).

[0135] Figure 10(c) shows the timing before the target is irradiated, and Figure 10(d) shows the timing after the target is irradiated.

[0136] In this way, by providing a plurality of laser devices (108A, 108B, and 108C), the conveying speed can be increased, which leads to improved productivity.

[0137] FIG. 11 is an explanatory diagram of a modified example of this embodiment in which the object has a non-transparent portion.

[0138] Whether the object 101 is transparent or non-transparent, the pair of detecting means consisting of the detecting means (light projecting section) 170 and the detecting means (light receiving section) 171 can detect rotation information and position information of the object 101.

[0139] The detection may be performed by a detection means (integrated type) 172, and the type of the detection means is not important.

[0140] 11 is non-transparent, detecting the distance using the distance detection means 177 also leads to improved detection accuracy of the position and rotation of the object. This is because the distance between the object and the detection means can be measured with high accuracy in the case of a non-transparent part.

[0141] There are a number of different types of detection means, and by combining these multiple detection means, the accuracy of detecting an object can be further improved.

[0142] FIG. 12 is an explanatory diagram of a change in the property of an object, which is an example according to this embodiment.

[0143] 12(a) to 12(d) are diagrams showing examples of changes in the properties of an object.

[0144] <Examples of changes in the properties of the substrate> The properties of an object that is irradiated with laser light change.

[0145] (a) is a diagram of the shape change due to evaporation, (b) is a diagram of the shape change due to melting, (c) is a diagram of the change in the crystallization state, and (d) is a diagram of the change in the foaming state.

[0146] FIG. 12(a) shows the shape of a recess formed by evaporating the base material on the surface of an object.

[0147] FIG. 12(b) shows the shape of the recesses formed by melting the base material on the surface of the object.

[0148] In the case of FIG. 12(b), the peripheral edge of the recessed portion is raised compared to the case of FIG. 12(a).

[0149] FIG. 12(c) shows the change in the crystallization state of the substrate surface of the object.

[0150] FIG. 12(d) shows the change in the foaming state inside the substrate of the object.

[0151] In this way, by changing the shape of the surface of the object, or by changing the properties such as the crystallization state of the substrate surface or the foaming state inside the substrate, it is possible to bring about changes in the properties of the surface or inside of the object.

[0152] One method for forming recesses by vaporizing the base material on the surface of an object is to irradiate it with a pulsed laser with a wavelength of 355 nm to 1064 nm and a pulse width of 10 fs to 500 nm or less, which vaporizes the base material in the areas irradiated with the laser beam, forming minute recesses on the surface.

[0153] It is also possible to form recesses by melting the substrate by irradiating it with a CW (Continuous Wave) laser with a wavelength of 355 nm to 1064 nm. Furthermore, if the laser continues to be irradiated even after the substrate has melted, the inside and surface of the substrate can be foamed and become cloudy.

[0154] To change the crystallization state, for example, if the substrate is PET, a CW laser with a wavelength of 355 nm to 1064 nm is irradiated to raise the temperature of the substrate in one go, and then the PET substrate can be brought into a crystallized state and made opaque by gradually cooling it by, for example, weakening the power. Note that if the PET is cooled rapidly by turning off the laser beam after raising the temperature, it will become amorphous and transparent.

[0155] The change in the substrate properties of the object is not limited to that shown in FIG.

[0156] The properties of the substrate constituting the object may be changed by yellowing, oxidation reaction, surface modification, or the like.

[0157] 13 is an explanatory diagram of a detection means for detecting an object, which is a modified example of this embodiment. Here, the detection means will be summarized again.

[0158] FIG. 13( a ) shows an example of a transmission type detecting means, which is composed of a detecting means (light projecting section) 170 and a detecting means (light receiving section) 171 .

[0159] FIG. 13(b) shows an example of a reflective type detection means configured by a detection means (integrated type) 172.

[0160] 13(c) shows an example of a reflective detection means, which is made up of a detection means (light projecting section) 170 and a detection means (light receiving section) 171. In this example, the light projecting section and the light receiving section are separate members.

[0161] FIG. 13(d) shows an example of a detection means made up of multiple types of detection means.

[0162] In FIG. 13(d), it is composed of a detection means A (light projecting section) 173 and a detection means A (light receiving section) 174 which are transmission type detection means, and a detection means B (integrated type) 175 which is reflection type detection means.

[0163] As such, various means can be used to detect the rotation or position of the object depending on the transparency, shape, etc. of the object, and detection means can also be used in combination. Summary

[0164] A laser irradiation device 100 according to one embodiment of the present invention includes a rotation detection means for detecting the rotation of an object 101, and an irradiation control means 142 for controlling irradiation of the object based on the rotation information of the object detected by the rotation detection means.

[0165] This allows accurate laser irradiation at a desired position on the object when the object is rotated.

[0166] The laser irradiation device 100 according to one embodiment of the present invention is characterized in that it determines the irradiation start position for the object based on information about the amount of rotation of the object detected by the rotation detection means.

[0167] This allows accurate laser irradiation at a desired position on the object when the object is rotated.

[0168] The laser irradiation device 100 according to one embodiment of the present invention is characterized in that it determines the irradiation start position for the object in the transport direction based on rotation amount information in the transport direction among the rotation amounts of the object detected by the rotation detection means.

[0169] This eliminates the need to change the laser irradiation field angle, thereby preventing the laser irradiation mechanism from becoming expensive and the entire device from becoming large.

[0170] The laser irradiation device 100 according to one embodiment of the present invention is characterized in that it further comprises a position detection means for detecting the position of the object.

[0171] This allows the position of the object to be detected, making it possible to not only rotate the object but also more accurately irradiate the laser beam at a desired position on the object.

[0172] The laser irradiation device 100 according to one embodiment of the present invention is characterized in that the rotation detection means is disposed upstream of the position detection means in the transport direction.

[0173] Generally, it takes longer for the rotation detection means to process rotation information than for the position detection means to process position information. Therefore, by placing the rotation detection means upstream of the position detection means, the total processing time can be shortened. Furthermore, such a reduction in processing time leads to space savings in the device in the conveying direction.

[0174] The laser irradiation device 100 according to one embodiment of the present invention is characterized in that it determines the irradiation start position for the object by starting processing based on the rotation information of the object detected by the rotation detection means, and then starting processing based on the position information detected by the position detection means.

[0175] This allows the processing based on the rotation information to start before the processing based on the position information, thereby minimizing the overall processing time.

[0176] The laser irradiation device 100 according to one embodiment of the present invention is characterized in that the sub-scanning direction of laser irradiation coincides with the direction in which the object is transported.

[0177] The scanning speed of the laser irradiation in the sub-scanning direction is slower than that in the main scanning direction. Therefore, by aligning the sub-scanning direction, in which the scanning speed is slow, with the transport direction, it is possible to reduce fluctuations in the drawing position due to detection timing errors.

[0178] The laser irradiation device 100 according to one embodiment of the present invention is characterized in that the laser light follows the transport direction of the object.

[0179] This makes it possible to increase the proportion of time during which irradiation is performed in the transport direction, thereby improving productivity.

[0180] The laser irradiation device 100 according to one embodiment of the present invention has a plurality of laser devices that irradiate a plurality of the objects with laser, and the plurality of laser devices irradiate the objects with laser at different times from the detection of the objects to the start of laser irradiation.

[0181] Generally, when multiple laser irradiation devices are installed to increase productivity, multiple detection means are also installed, but due to the problem of increased space, it is better to have a single detection means. In this case, by varying the time from detection of the target to the start of irradiation by the laser irradiation device, it is possible to irradiate the laser at the correct timing.

[0182] The laser irradiation device 100 according to one embodiment of the present invention is characterized by further having a non-transparent portion detection means for detecting a non-transparent portion of an object, and a distance detection means for detecting the distance from the non-transparent portion.

[0183] The non-transparent part also has high distance detection accuracy, further improving the accuracy of detecting the rotation and position of the target object. [Explanation of symbols]

[0184] 100 Laser irradiation device 101 Object 102 Laser irradiation area 103 Laser irradiation surface 104 Rotation detection means (light projecting unit) 105 Rotation detection means (light receiving unit) 105a Rotation detection means (light receiving unit) regular reflection 105b Rotation detection means (light receiving unit) diffuse reflection 105c Rotation detection means (light receiving part) transmission 106 Position detection means (light projecting unit) 107 Position detection means (light receiving unit) 108 Laser Device 108A Laser device (L1) 108B Laser device (L2) 108C Laser Device (L3) 109 Main scanning direction of laser irradiation 110 Sub-scanning direction of laser irradiation 111 Laser irradiation reference direction 117 Laser light 118a Mirror a 118b Mirror b 119 Lens 120 Position deviation due to rotation change (m) 121 Laser irradiation angle (θ) 122 Laser irradiation angle (ω) 123 Laser irradiation angle (Φ) 130 Position detection laser irradiation adjustment section 131 Rotation detection laser irradiation adjustment section 140 Beam Expander 141a Synchronous detection unit a 141b Synchronous detection unit b 142 Irradiation control means 143 Specular reflection angle (N) 144 Diffuse reflection angle (R) 145 Camera 150 Object-present section (O) 151 No Object Section (U) 152 Non-irradiated area 153 Irradiation area 154 Deflection means (scanning means) 160 Position detection signal 160A Position detection signal (L1) 160B Position detection signal (L2) 160C Position detection signal (L3) 161 Laser irradiation start signal 161A Laser irradiation start signal (L1) 161B Laser irradiation start signal (L2) 161C Laser irradiation start signal (L3) 163A Non-irradiated area (L1) 163B Non-irradiated area (L2) 163C Non-irradiated area (L3) 164A Irradiation area (L1) 164B Irradiation area (L2) 164C Irradiation area (L3) 170 Detection means (light projecting unit) 171 Detection means (light receiving unit) 172 Detection means (integrated) 173 Detection means A (light projecting unit) 174 Detection means A (light receiving unit) 175 Detection means B (integrated) 176 Non-transparent part 177 Distance detection means [Prior art documents] [Patent documents]

[0185] [Patent Document 1] Japanese Patent Application Laid-Open No. 2004-148379 [Patent Document 2] Japanese Patent Publication No. 2021-037685

Claims

1. An apparatus for irradiating a conveyed object with laser light, a rotation detection means for detecting the rotation of an object; Based on the rotation information of the object detected by the rotation detection means an irradiation control means for controlling irradiation of the object; a position detection means for detecting the position of the object, The rotation detection means is disposed upstream of the position detection means in the conveying direction. A laser irradiation device characterized by

2. 2. The laser irradiation device according to claim 1, Based on the rotation amount information of the object detected by the rotation detection means Determine the laser irradiation start position on the target object A laser irradiation device characterized by

3. 3. The laser irradiation device according to claim 2, Among the rotation amounts of the object detected by the rotation detection means, Based on the rotation amount information in the conveying direction determining a start position of the laser irradiation on the object in the conveying direction; A laser irradiation device characterized by

4. An apparatus for irradiating a laser beam onto an object being conveyed, a rotation detection means for detecting the rotation of an object; Based on the rotation information of the object detected by the rotation detection means an irradiation control means for controlling irradiation of the object; a position detection means for detecting the position of the object, After starting a process based on the rotation information of the object detected by the rotation detection means, By starting a process based on the position information detected by the position detection means, Determine the starting position for laser irradiation on the target object A laser irradiation device characterized by

5. In the laser irradiation device of claims 1 to 4, The sub-scanning direction of the laser irradiation and the transport direction of the object coincide with each other. A laser irradiation device characterized by

6. In the laser irradiation device of claims 1 to 5, The laser beam follows the conveying direction of the object. A laser irradiation device characterized by

7. An apparatus for irradiating a laser beam onto an object being conveyed, a rotation detection means for detecting the rotation of an object; Based on the rotation information of the object detected by the rotation detection means an irradiation control means for controlling irradiation of the object, a plurality of laser devices for irradiating a plurality of the objects with laser light; The plurality of laser devices each emit laser light at different times from the time the object is detected until the time the laser light is emitted. A laser irradiation device characterized by

8. An apparatus for irradiating a laser beam onto an object being conveyed, comprising: a rotation detection means for detecting the rotation of an object; Based on the rotation information of the object detected by the rotation detection means an irradiation control means for controlling irradiation of the object, a non-transparent portion detecting means for detecting a non-transparent portion of the object; Further provided is a distance detection means for detecting the distance from the non-transparent portion. A laser irradiation device characterized by

9. An irradiation method for irradiating a laser beam onto an object being conveyed, comprising: a rotation detection step of detecting a rotation of the object; a position detection step of detecting a position of the object; After starting a process based on the rotation information of the object detected by the rotation detection step, By starting a process based on the position information detected in the position detection step, determining a laser irradiation start position on the object. A laser irradiation method characterized by

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