Image sensor with color separation lens array and electronic device including same

Abstract

To provide a structure of an image sensor including a color separation lens array and having improved light efficiency.SOLUTION: An image sensor includes a sensor substrate including a plurality of first pixels for sensing first wavelength light in an infrared ray band and a plurality of second pixels for sensing second wavelength light in a visible ray band, and a color separation lens array disposed over the sensor substrate, changing the phase of the first wavelength light that enters, and condensing the first wavelength light to the first pixel. The color separation lens array includes a plurality of light condensing regions each condensing the first wavelength light to the first pixel. The area of the light condensing region is larger than the first pixel.SELECTED DRAWING: Figure 3A

Description

[Technical Field]

[0001] The present invention relates to an image sensor having a color separation lens array and an electronic device including the image sensor, and more particularly to an image sensor having a color separation lens array capable of separating and focusing infrared light, and an electronic device including the image sensor. [Background technology]

[0002] In order to obtain three-dimensional images or information on materials that cannot be perceived by the human eye, image sensors that include both visible light pixels and infrared pixels, such as multispectral image sensors or 3D image sensors, have been developed. However, when using silicon-based photoelectric conversion elements, the signal conversion rate of the infrared pixels is low, and crosstalk of infrared light occurs due to the microlenses, making it difficult to improve quality. Summary of the Invention [Problem to be solved by the invention]

[0003] The problem to be solved by the present invention is to provide an image sensor with improved light utilization efficiency by using a color separation lens array that can separate and focus infrared light, and an electronic device including the image sensor. [Means for solving the problem]

[0004] According to one embodiment, the image sensor includes a sensor substrate including a plurality of first pixels that sense a first wavelength light in the infrared band and a plurality of second pixels that sense a second wavelength light in the visible light band, and a color separation lens array disposed on the sensor substrate that changes the phase of the incident first wavelength light and focuses the first wavelength light onto the first pixels, the color separation lens array including a plurality of focusing regions that focus the first wavelength light onto each of the first pixels, and the area of ​​the focusing regions being larger than the area of ​​the first pixels.

[0005] According to one embodiment, an electronic device includes an image sensor that converts an optical phase into an electrical signal, and a processor that controls the operation of the image sensor and stores and outputs signals generated by the image sensor. The image sensor includes a sensor substrate including a plurality of first pixels that sense a first wavelength light in the infrared band and a plurality of second pixels that sense a second wavelength light in the visible light band, and a color separation lens array disposed on top of the sensor substrate that changes the phase of the incident first wavelength light and focuses the first wavelength light onto the first pixels. The color separation lens array includes a plurality of focusing regions that focus the first wavelength light onto each of the first pixels, and the area of ​​the focusing regions is larger than the area of ​​the first pixels. [Brief explanation of the drawings]

[0006] [Figure 1] FIG. 1 is a block diagram of an image sensor according to one embodiment. [Figure 2A] 1 is a diagram showing an example of a pixel pattern applicable to an image sensor; [Figure 2B] 1 is a diagram showing an example of a pixel pattern applicable to an image sensor; [Figure 2C] 1 is a diagram showing an example of a pixel pattern applicable to an image sensor; [Figure 3A] 1 is a conceptual diagram showing the structure and operation of a color separation lens array. [Figure 3B] 1 is a conceptual diagram showing the structure and operation of a color separation lens array. [Figure 4A] 1 is a cross-sectional view illustrating a pixel array according to an embodiment. [Figure 4B] 1 is a cross-sectional view illustrating a pixel array according to an embodiment. [Figure 5A] FIG. 4C is a plan view showing the arrangement of pixels in the pixel array of FIGS. 4A and 4B. [Figure 5B] 4C is a plan view illustrating an example of a form in which a plurality of nanoposts are arranged on the color separation lens array of FIGS. 4A and 4B. FIG. [Figure 5C] 5B, that is, a view showing in detail the arrangement of nanoposts in a region corresponding to a green pixel, a region corresponding to a blue pixel, a region corresponding to a red pixel, and a region corresponding to an infrared pixel, which constitute a unit pattern. [Figure 6A] 5C is a diagram showing the phase distribution of blue light that has passed through the color separation lens array, taken along line II' of FIG. 5B. [Figure 6B] 10 is a diagram showing the phase of blue light passing through a color separation lens array at the centers of green pixel corresponding regions, blue pixel corresponding regions, red pixel corresponding regions, and infrared pixel corresponding regions. [Figure 7A] 5C is a diagram showing the phase distribution of infrared light that has passed through the color separation lens array, taken along line II-II' in FIG. 5B. [Figure 7B] 10 is a diagram showing the phase of infrared light that has passed through a color separation lens array at the centers of a green pixel corresponding area, a blue pixel corresponding area, a red pixel corresponding area, and an infrared pixel corresponding area. [Figure 7C] 10 is a diagram illustrating an example of an infrared pixel corresponding area of ​​a color separation lens array corresponding to an infrared pixel and the traveling direction of infrared rays incident on the area and its periphery; [Figure 7D] 1 is a diagram illustrating an example of an infrared ray collecting region; [Figure 8A] FIG. 10 is a cross-sectional view illustrating a pixel array according to another embodiment. [Figure 8B] FIG. 10 is a cross-sectional view illustrating a pixel array according to another embodiment. [Figure 9A] 8C is a plan view illustrating an example of a form in which a plurality of nanoposts are arranged on the color separation lens array of FIGS. 8A and 8B. FIG. [Figure 9B] 9B is a diagram showing in detail the arrangement of nanoposts in a part of FIG. 9A, that is, in a green pixel corresponding region, a blue pixel corresponding region, a red pixel corresponding region, and an infrared pixel corresponding region that constitute a unit pattern. [Figure 10A] 9B is a diagram showing the phase distribution of green light and blue light that have passed through the color separation lens array, taken along line III-III' in FIG. 9A. [Figure 10B] 10 is a diagram showing the phase of green light passing through a color separation lens array at the centers of green pixel corresponding regions, blue pixel corresponding regions, red pixel corresponding regions, and infrared pixel corresponding regions. [Figure 10C]10 is a diagram showing the phase of blue light passing through a color separation lens array at the centers of green pixel corresponding regions, blue pixel corresponding regions, red pixel corresponding regions, and infrared pixel corresponding regions. [Figure 10D] 10 is a diagram illustrating an example of a direction in which green light incident on a green pixel corresponding area of ​​a color separation lens array corresponding to a green pixel and its periphery is propagated; [Figure 10E] 10 is a diagram illustrating an example of a green light collecting region; [Figure 10F] 10 is a diagram illustrating an example of a traveling direction of blue light incident on a blue pixel corresponding area of ​​a color separation lens array corresponding to a blue pixel and its periphery; [Figure 10G] 10 is a diagram illustrating an example of a blue light collecting region; [Figure 11A] 9B is a diagram showing the phase distribution of red light and infrared light that have passed through the color separation lens array, taken along line IV-IV' in FIG. 9A. [Figure 11B] 10 is a diagram showing the phase of red light passing through a color separation lens array at the centers of green pixel corresponding regions, blue pixel corresponding regions, red pixel corresponding regions, and infrared pixel corresponding regions. [Figure 11C] 10 is a diagram showing the phase of infrared light that has passed through a color separation lens array at the centers of a green pixel corresponding area, a blue pixel corresponding area, a red pixel corresponding area, and an infrared pixel corresponding area. [Figure 11D] 10 is a diagram illustrating an example of a direction in which red light incident on a red pixel corresponding area of ​​a color separation lens array corresponding to a red pixel and its periphery is propagated; [Figure 11E] 10 is a diagram illustrating an example of a red light collecting region; [Figure 12A] FIG. 10 is a schematic cross-sectional view showing a pixel array according to another example. [Figure 12B] FIG. 10 is a schematic cross-sectional view showing a pixel array according to another example. [Figure 13A] 12C is a plan view illustrating an example of a form in which nanoposts are arranged on the color separation lens array of FIGS. 12A and 12B. FIG. [Figure 13B] FIG. 13B is an enlarged plan view showing a portion of FIG. 13A in detail. [Figure 14A]13B is a diagram showing the phase distribution of mixed light of green light and infrared light, and blue light, which have passed through the color separation lens array, taken along line VV' in FIG. 13A. [Figure 14B] 13B is a diagram showing the phase distribution of red light and mixed light of green light and infrared light that has passed through a color separation lens array, taken along line VI-VI' in FIG. 13A. [Figure 14C] 10 is a diagram showing the phase of mixed light of green light and infrared light at the center of a pixel corresponding area after passing through a color separation lens array. [Figure 14D] 10 is a diagram illustrating an example of directions of travel of green light and infrared light incident on a green pixel corresponding region and an infrared pixel corresponding region of a color separation lens array and their surroundings; [Figure 14E] 10 is a diagram illustrating an example of directions of travel of green light and infrared light incident on a green pixel corresponding region and an infrared pixel corresponding region of a color separation lens array and their surroundings; [Figure 14F] 10 is a diagram illustrating an example of a green light and infrared light collecting region; [Figure 15A] 10 is a diagram showing another example of a color separation lens array. [Figure 15B] 10 is a diagram showing another example of a color separation lens array. [Figure 16] 1 is a block diagram that schematically illustrates an electronic device including an image sensor according to one embodiment. [Figure 17] FIG. 17 is a block diagram illustrating the camera module of FIG. 16. [Figure 18] 1A and 1B are diagrams illustrating various examples of electronic devices to which an image sensor according to an embodiment is applied; [Figure 19] 1A and 1B are diagrams illustrating various examples of electronic devices to which an image sensor according to an embodiment is applied; [Figure 20] 1A and 1B are diagrams illustrating various examples of electronic devices to which an image sensor according to an embodiment is applied; [Figure 21] 1A and 1B are diagrams illustrating various examples of electronic devices to which an image sensor according to an embodiment is applied; [Figure 22]1A and 1B are diagrams illustrating various examples of electronic devices to which an image sensor according to an embodiment is applied; [Figure 23] 1A and 1B are diagrams illustrating various examples of electronic devices to which an image sensor according to an embodiment is applied; [Figure 24] 1A and 1B are diagrams illustrating various examples of electronic devices to which an image sensor according to an embodiment is applied; [Figure 25] 1A and 1B are diagrams illustrating various examples of electronic devices to which an image sensor according to an embodiment is applied; [Figure 26] 1A and 1B are diagrams illustrating various examples of electronic devices to which an image sensor according to an embodiment is applied; [Figure 27] 1A and 1B are diagrams illustrating various examples of electronic devices to which an image sensor according to an embodiment is applied; DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, an image sensor having a color separation lens array and an electronic device including the same will be described in detail with reference to the accompanying drawings. The described embodiments are merely exemplary, and various modifications are possible from such embodiments. In the following drawings, the same reference numerals refer to the same components, and the size of each component may be exaggerated in the drawings for clarity and convenience of explanation.

[0008] In the following, the expressions "upper" or "above" include not only things that are immediately above, below, left, or right in contact, but also things that are not in contact but are above, below, left, or right.

[0009] Terms such as first and second are used to describe various components, but are used only to distinguish one component from another, and are not intended to limit the components to differences in material or structure.

[0010] The singular expression includes the plural expression unless the context clearly indicates otherwise. Furthermore, when a part "comprises" a certain element, it does not mean that it excludes other elements, but that it may further include other elements, unless otherwise specified to the contrary.

[0011] Furthermore, terms such as "unit" and "module" used in the specification refer to a unit that processes one or more functions or operations, and may be implemented by hardware or software, or by a combination of hardware and software.

[0012] Use of the term "said" and similar referents applies to both the singular and the plural.

[0013] The steps constituting the method may be performed in any suitable order unless expressly stated to be performed in the order described. Furthermore, the use of all exemplary terms (such as "for example") is merely for the purpose of describing the technical idea in detail, and does not limit the scope of the rights unless otherwise limited by the claims.

[0014] 1 is a schematic block diagram of an image sensor according to an embodiment. Referring to FIG. 1, an image sensor 1000 may include a pixel array 1100, a timing controller 1010, a row decoder 1020, and an output circuit 1030. The image sensor may be a charge coupled device (CCD) image sensor or a complementary metal oxide semiconductor (CMOS) image sensor.

[0015] The pixel array 1100 includes pixels arranged two-dimensionally along multiple rows and multiple columns. The row decoder 1020 selects one of the rows of the pixel array 1100 in response to a row address signal output from the timing controller 1010. The output circuit 1030 outputs a photo-sensing signal from multiple pixels arranged along the selected row on a column-by-column basis. To this end, the output circuit 1030 may include a column decoder and an analog-to-digital converter (ADC). For example, the output circuit 1030 may include multiple ADCs arranged for each column between the column decoder and the pixel array 1100, or one ADC arranged at the output end of the column decoder. The timing controller 1010, the row decoder 1020, and the output circuit 1030 may be implemented on a single chip or separate chips. A processor for processing the video signal output via the output circuit 1030 may be implemented on a single chip together with the timing controller 1010, the row decoder 1020, and the output circuit 1030.

[0016] The pixel array 1100 may include a plurality of pixels that sense light of different wavelengths, and in particular, may include infrared pixels that sense light in the infrared band. An image sensor including infrared pixels can perform more diverse functions than an image sensor including only visible light pixels, such as distance measurement, iris recognition, and night vision, and the arrangement of pixels including infrared pixels can be implemented in various ways. For example, Figures 2A to 2C show various pixel arrangements of the pixel array 1100 of the image sensor 1000.

[0017] First, FIG. 2A shows an arrangement in which one of the green pixels G in a Bayer pattern commonly used in image sensors 1000 is replaced with an infrared pixel IR. Referring to FIG. 2A, one unit pattern includes four quadrant regions, and the first through fourth quadrants are blue, green, red, and infrared pixels B, G, R, and IR, respectively. Such unit patterns are two-dimensionally repeated along a first direction (X direction) and a second direction (Y direction). In other words, one green, blue, red, and infrared pixel IR are arranged in each unit pattern in a 2×2 array. Looking at the overall pixel arrangement, a first row in which a plurality of green and blue pixels G and B are alternately arranged along the first direction (X direction) and a second row in which a plurality of red and infrared pixels IR are alternately arranged along the first direction (X direction) are repeatedly arranged along the second direction (Y direction).

[0018] However, the pixel array 1100 may be arranged in various ways other than the arrangement shown in FIG. 2A. For example, FIG. 2B shows an arrangement in which one of the red pixel R or blue pixel B of the Bayer pattern is replaced with an infrared pixel IR. Also, FIG. 2C shows an arrangement in which one 2×2 unit pattern of the Bayer pattern is replaced with one infrared pixel IR. Although not shown, the unit pattern may have a 3×2 array form, and an arrangement in which the green pixel G, blue pixel B, and red pixel R are replaced with the magenta pixel M, cyan pixel C, and yellow pixel Y, respectively, is also possible. In addition, the pixels of the pixel array 1100 may be arranged in various ways depending on the color characteristics of the image sensor 1000. Hereinafter, the pixel array 1100 of the image sensor 1000 will be described as having the arrangement shown in FIG. 2A, but the operating principle may also be applied to other types of pixel arrangements.

[0019] The pixel array 1100 of the image sensor 1000 may include a color separation lens array that focuses light of a color corresponding to a particular pixel. Figures 3A and 3B are conceptual diagrams illustrating the structure and operation of a color separation lens array.

[0020] Referring to FIG. 3A, a color separating lens array (CSLA) may include a plurality of nanoposts NP that change the phase of incident light Li differently depending on the incident position. The color separating lens array CSLA may be divided in various ways. For example, the color separating lens array CSLA may divide first wavelength light L included in the incident light Li into first wavelength light L and second wavelength light L. λ1 a first pixel corresponding region R1 corresponding to the first pixel PX1 on which the second wavelength light L included in the incident light Li is collected; λ2 and a second pixel-corresponding region R2 corresponding to the second pixel PX2 where the first wavelength light L is collected. The first and second pixel-corresponding regions R1, R2 may each include one or more nanoposts NP and be arranged to face the first and second pixels PX1, PX2 along the vertical direction. As another example, the color separation lens array CSLA may λ1 a first wavelength light collecting region L1 that collects the second wavelength light L λ2 and a second wavelength light collecting region L2 that collects light at the second pixel PX2. The first wavelength light collecting region L1 and the second wavelength light collecting region L2 may be partially overlapped.

[0021] The color separation lens array CSLA separates the first and second wavelength lights L included in the incident light Li. λ1 , L λ2 Each of the first wavelength light L λ1 is focused on the first pixel PX1, and the second wavelength light L λ2 can be focused on the second pixel PX2.

[0022] For example, referring to FIG. 3B, the color separation lens array CSLA separates the first wavelength light L from the first wavelength light L at a position immediately after passing through the color separation lens array CSLA, i.e., at the position of the lower surface of the color separation lens array CSLA. λ1 has a first phase distribution PP1, and the second wavelength light L λ2 has a second phase distribution PP2, and the first and second wavelength light L λ1 , L λ2Specifically, the first wavelength light L that has passed through the color separation lens array CSLA can be focused on the first and second pixels PX1 and PX2. λ1 may have a first phase distribution PP1 that is greatest at the center of the first pixel corresponding region R1 and decreases in the direction away from the center of the first pixel corresponding region R1, i.e., in the direction toward the second pixel corresponding region R2. Such a phase distribution is similar to the phase distribution of light that passes through a convex lens, for example, a microlens with a convex center, arranged in the first wavelength light collecting region L1, and converges at one point. λ1 The second wavelength light L that has passed through the color separation lens array CSLA can be focused on the first pixel PX1. λ2 has a second phase distribution PP2 that is greatest at the center of the second pixel corresponding region R2 and decreases in the direction away from the center of the second pixel corresponding region R2, i.e., in the direction of the first pixel corresponding region R1, and the second wavelength light L λ2 can be focused onto the second pixel PX2.

[0023] Since the refractive index of a material varies depending on the wavelength of light to which it responds, as shown in FIG. 3B, the color separation lens array CSLA separates the first and second wavelength lights L λ1 , L λ2 In other words, even if the material is the same, the refractive index varies depending on the wavelength of light that reacts with the material, and the phase delay that the light experiences when passing through the material also varies depending on the wavelength, so different phase distributions can be formed for each wavelength. For example, λ1 and the refractive index for the second wavelength light L λ2 The refractive indexes of the first wavelength light L that has passed through the first pixel corresponding region R1 are different from each other. λ1 and the phase delay experienced by the second wavelength light L passing through the first pixel corresponding region R1. λ2 Therefore, if the color separation lens array CSLA is designed taking into consideration the characteristics of such light, the first and second wavelength lights L λ1 , L λ2 can provide different phase distributions for

[0024] The color separation lens array CSLA separates the first and second wavelength light L λ1 , L λ2 may include nanoposts NPs arranged according to a specific rule so that they have first and second phase distributions PP1 and PP2, respectively. Here, the rule applies to parameters such as the shape, size (width, height), spacing, and arrangement form of the nanoposts NPs, and these parameters are also determined by the phase distribution to be realized through the color separation lens array CSLA.

[0025] The arrangement pattern of the nanoposts NPs in the first pixel-corresponding region R1 may be different from that in the second pixel-corresponding region R2, i.e., the size, shape, spacing, and / or arrangement of the nanoposts NPs provided in the first pixel-corresponding region R1 may be different from the size, shape, spacing, and / or arrangement of the nanoposts NPs provided in the second pixel-corresponding region R2.

[0026] The nanopost NP may have a cross-sectional diameter of subwavelength. Here, subwavelength refers to a wavelength smaller than the wavelength band of the light to be split. The nanopost NP may have a dimension smaller than the shorter of the first and second wavelengths. When the incident light Li is visible light, the cross-sectional diameter of the nanopost NP may be, for example, smaller than 400 nm, 300 nm, or 200 nm. Meanwhile, the height of the nanopost NP may be 500 nm to 1500 nm, which is greater than the cross-sectional diameter. Although not shown, the nanopost NP may be formed by combining two or more posts stacked in the height direction (Z direction).

[0027] Nanopost NPs may be made of a material with a higher refractive index than the surrounding material. For example, nanopost NPs may include c-Si, p-Si, a-Si, III-V compound semiconductors (e.g., GaP, GaN, GaAs), SiC, TiO, SiN, and / or combinations thereof. Nanopost NPs with a refractive index different from that of the surrounding material can change the phase of light passing through the nanopost NPs. This is due to a phase delay caused by the subwavelength shape of the nanopost NPs, and the degree of phase delay is determined by the detailed shape, shape, and arrangement of the nanopost NPs. The surrounding material of the nanopost NPs may be made of a dielectric material with a lower refractive index than the nanopost NPs. For example, the surrounding material may include SiO or air.

[0028] The first wavelength λ1 and the second wavelength λ2 are in the infrared wavelength band or the visible light wavelength band, but are not limited thereto, and can operate at various wavelengths depending on the arrangement rule of the array of multiple nanopost NPs. Also, although the example of two wavelengths being branched and focused has been given, it is also possible for incident light to be branched and focused in three or more directions depending on the wavelength.

[0029] Although the color separation lens array CSLA has been described as a single layer, the color separation lens array CSLA may have a structure in which multiple layers are stacked. For example, a first layer may be designed to focus visible light on a specific pixel, and a second layer may be designed to focus infrared light on another pixel.

[0030] An example in which the above-described color separation lens array is applied to a pixel array of an image sensor will be described in more detail below.

[0031] Figures 4A and 4B are cross-sectional views showing a pixel array according to one embodiment, Figure 5A is a plan view showing the arrangement of pixels in the pixel array of Figures 4A and 4B, Figure 5B is a plan view illustratively showing the arrangement of multiple nanoposts in the color separation lens array of Figures 4A and 4B, and Figure 5C is a detailed drawing showing the arrangement of nanoposts NP in a portion of Figure 5B, i.e., pixel corresponding areas 131, 132, 133, and 134 that constitute a unit pattern.

[0032] Referring to Figures 4A and 4B, the pixel array 1100 of the image sensor 1000 includes a sensor substrate 110 including a plurality of light-sensing pixels 111, 112, 113, and 114, a transparent spacer layer 120 disposed on the sensor substrate 110, and a color separation lens array 130 disposed on the spacer layer 120.

[0033] The sensor substrate 110 may include green pixels 111, blue pixels 112, red pixels 113, and infrared pixels 114 that convert light into electrical signals. The green pixels 111 and blue pixels 112 are alternately arranged along a first direction (X direction) as shown in FIG. 4A , and in a cross section at a different position in the Y direction, the red pixels 113 and infrared pixels 114 are alternately arranged as shown in FIG. 4B . Such region division is intended to divide incident light into unit patterns such as a Bayer pattern for sensing. For example, the green pixels 111 may sense light of a first wavelength corresponding to green light, the blue pixels 112 may sense light of a second wavelength corresponding to blue light, the red pixels 113 may sense light of a third wavelength corresponding to red light, and the infrared pixels 114 may sense light of a fourth wavelength corresponding to infrared light. FIG. 5A shows a pixel arrangement when the pixel array 1100 of the image sensor 1000 has the arrangement of FIG. 2A . Although not shown, a separation film for separating the cells may be further formed at the boundary between the cells.

[0034] The spacer layer 120 is disposed between the sensor substrate 110 and the color separation lens array 130, and serves to maintain a constant distance between the sensor substrate 110 and the color separation lens array 130. The spacer layer 120 may be made of a material transparent to visible light, for example, a dielectric material that has a refractive index lower than that of the nanopost NPs and a low absorption rate in the visible light band, such as SiO2 or siloxane-based spin-on glass (SOG). The thickness h of the spacer layer 120 is h t -p≦h≦h t +p, where the theoretical thickness of the spacer layer 120 is h t can be expressed by the following Equation 1, where n is the refractive index of the spacer layer 120 for the wavelength λ0 and p is the pixel pitch.

[0035]

number

[0036] The theoretical thickness h of the spacer layer 120 t means the focal length at which light having a wavelength of λ0 is focused by the color separation lens array 130 onto the upper surfaces of the pixels 111, 112, 113, and 114. λ0 is also the wavelength that serves as a reference for determining the thickness h of the spacer layer 120, and the thickness of the spacer layer 120 can be designed based on 540 nm, which is the central wavelength of green light.

[0037] A color filter layer 105 and a microlens layer 107 may be included between the sensor substrate 110 and the spacer layer 120. The color filter layer 105 may include filters corresponding to the pixel array of the sensor substrate 110. As shown in FIG. 4A, green filters CF1 and blue filters CF2 are alternately arranged, and as shown in FIG. 4B, red filters CF3 and infrared filters CF4 are alternately arranged in the next row spaced apart in the Y direction. The color filter layer 105 may be designed to transmit only light of a specific wavelength band. For example, the green filter CF1 transmits only green light to advance to the green pixel 111, and the infrared filter CF4 absorbs and reflects visible light to prevent it from passing through the filter, and transmits only infrared light to advance to the infrared pixel 114. The green filter CF1, blue filter CF2, and red filter CF3 may further include a filter (not shown) that blocks infrared light in addition to the filter that selectively transmits only green, blue, and red light of visible light.

[0038] The microlens layer 107 may include microlenses formed on the green filter CF1, the blue filter CF2, and / or the red filter CF3, and the microlenses are convex in the Z direction. The microlens layer 107 can focus light that passes through the color separation lens array 130 and travels to the green pixel 111, the blue pixel 112, and the red pixel 113, toward the center of the pixel. The microlens layer 107 is made of a light-transmitting resin or a material with a higher refractive index than the material constituting the spacer layer 120, such as TiO2.

[0039] The color separation lens array 130 may include a plurality of nanopost NPs supported by the spacer layer 120 that change the phase of incident light, and a dielectric material, such as air or SiO2, disposed between the nanopost NPs and having a lower refractive index than the nanopost NPs.

[0040] 5B, the color separation lens array 130 is divided into four pixel-corresponding regions 131, 132, 133, and 134 corresponding to the pixels 111, 112, 113, and 114 of FIG. 5A. The green pixel-corresponding region 131 corresponds to the green pixel 111 and is disposed above the green pixel 111, the blue pixel-corresponding region 132 corresponds to the blue pixel 112 and is disposed above the blue pixel 112, the red pixel-corresponding region 133 corresponds to the red pixel 113 and is disposed above the red pixel 113, and the infrared pixel-corresponding region 134 corresponds to the infrared pixel 114 and is disposed above the infrared pixel 114. That is, the pixel-corresponding regions 131, 132, 133, and 134 of the color separation lens array 130 can be disposed to face the pixels 111, 112, 113, and 114 of the sensor substrate 110, respectively. The pixel corresponding regions 131, 132, 133, and 134 are arranged two-dimensionally along a first direction (X direction) and a second direction (Y direction) such that a first row in which the green pixel corresponding regions 131 and the blue pixel corresponding regions 132 are alternately arranged and a second row in which the red pixel corresponding regions 133 and the infrared pixel corresponding regions 134 are alternately arranged are alternately repeated. Like the pixel array of the sensor substrate 110, the color separation lens array 130 also includes a plurality of unit patterns arranged two-dimensionally, and each unit pattern includes pixel corresponding regions 131, 132, 133, and 134 arranged in a 2x2 configuration.

[0041] On the other hand, the color separation lens array 130 can also be divided into a green light focusing region that focuses green light, a blue light focusing region that focuses blue light, and a red light focusing region that focuses red light, as described in FIG. 3B.

[0042] One or more nanopost NPs may be arranged in each of the pixel-corresponding regions 131, 132, 133, and 134, and the shape, size, spacing, and / or arrangement of the nanopost NPs may vary depending on the region. For example, each of the pixel-corresponding regions 131, 132, 133, and 134 may include one or more nanopost NPs. The size, shape, spacing, and / or arrangement of the nanopost NPs are determined so that green, blue, and red light do not change direction through the color separation lens array 130, and infrared light is focused on the infrared pixel 114. Meanwhile, the thickness of the color separation lens array 130 along the third direction (Z direction) is similar to the height of the nanopost NPs and is 500 nm to 1500 nm.

[0043] 5B, the pixel-corresponding regions 131, 132, 133, and 134 may include cylindrical nanopost NPs with circular cross sections, and nanopost NPs may be arranged at the center of each region and at the intersections of pixel boundaries. The nanopost NP with the largest cross-sectional area is arranged at the center of the infrared pixel-corresponding region 134, and the nanopost NPs arranged farther from the center of the infrared pixel-corresponding region 134 have smaller cross-sectional areas.

[0044] FIG. 5C shows in detail the arrangement of nanoposts NPs in a portion of FIG. 5B , i.e., pixel-corresponding regions 131, 132, 133, and 134 that constitute the unit pattern. In FIG. 5C , the nanoposts NPs are labeled p1 through p4 according to their detailed positions. Specifically, the nanoposts may include nanopost p1 located at the center of the infrared pixel-corresponding region 134, nanopost p2 located at the intersection of the boundary lines that separate the infrared pixel-corresponding region 134, nanopost p3 located at the centers of the blue pixel-corresponding region 132 and the red pixel-corresponding region 133, and nanopost p4 located at the center of the green pixel-corresponding region 131. The nanopost p1 located at the center of the infrared pixel-corresponding region 134 has the largest cross-sectional area, and the nanoposts located farther from the center of the infrared pixel-corresponding region 134 have smaller cross-sectional areas, and are arranged in the order p1 > p2 > p3 > p4. However, this is merely an example, and nanoposts NPs of various shapes, sizes, intervals, and / or arrangements can be applied as needed.

[0045] Although the nanoposts NP are shown as having a symmetrical circular cross-sectional shape, this is not limiting and some nanoposts may have an asymmetrical cross-sectional shape. For example, nanoposts having an asymmetrical cross-sectional shape with different widths in the first direction (X direction) and the second direction (Y direction) may also be used.

[0046] Figure 6A shows the phase distribution of green light that has passed through the color separation lens array 130 along line II' in Figure 5B, and Figure 6B shows the phase of green light that has passed through the color separation lens array 130 at the centers of the pixel corresponding areas 131, 132, 133, and 134.

[0047] 6A and 6B, the green light passing through the color separation lens array 130 may have a green light phase distribution PPG in which the phase is consistent across positions. Specifically, if the phase of the green light at the center of the green pixel corresponding region 131 immediately after passing through the color separation lens array 130, i.e., at the lower surface of the color separation lens array 130 or the upper surface of the spacer layer 120, is 2π, the phase of the green light is also 2π at all positions after passing through the color separation lens array 130. A phase distribution that does not change across positions is similar to the phase distribution of light passing through transparent glass with a uniform thickness, and the green light can pass through the color separation lens array 130 while maintaining the direction in which it was incident on the color separation lens array 130.

[0048] Of the green light that passes through the color separation lens array 130, light that is directed toward the green pixel 111 is collected at the center of the green pixel 111 through the microlenses of the microlens layer 107 formed above the green pixel 111, passes through the green color filter CF1, and is photoelectrically converted by the green pixel 111. On the other hand, of the green light that passes through the color separation lens array 130, light that is not directed toward the green pixel 111, for example, light that is directed toward the blue pixel 112, is collected at the center of the blue pixel 112 through the microlenses of the microlens layer 107 formed above the blue pixel 112, but is absorbed and / or reflected by the blue color filter CF2 and is not sensed by the blue pixel 112.

[0049] Figure 7A shows the phase distribution of infrared light that has passed through the color separation lens array 130 along line II-II' in Figure 5B, and Figure 7B shows the phase of infrared light that has passed through the color separation lens array 130 at the centers of the pixel corresponding areas 131, 132, 133, and 134.

[0050] 7A and 7B, infrared light passing through the color separation lens array 130 may have an infrared phase distribution PPIR that is greatest at the center of the infrared pixel corresponding region 134 and decreases in a direction away from the center of the infrared pixel corresponding region 134. Specifically, immediately after passing through the color separation lens array 130, i.e., at the lower surface of the color separation lens array 130 or the upper surface of the spacer layer 120, the phase of the infrared light is greatest at the center of the infrared pixel corresponding region 134 and gradually decreases concentrically with increasing distance from the center of the infrared pixel corresponding region 134, reaching minimums at the centers of the blue pixel corresponding region 132 and the red pixel corresponding region 133 in the X and Y directions, and at the center of the green pixel corresponding region 131 in the diagonal direction. If the phase of infrared light at the center of the infrared pixel-corresponding region 134 is 2π, the phase of the infrared light is 0.9π to 1.1π at the centers of the blue pixel-corresponding region 132 and the red pixel-corresponding region 133, and is approximately 0.2π to 0.9π, smaller than π, at the center of the green pixel-corresponding region 131. Meanwhile, the infrared phase distribution PPIR does not mean that the phase delay of light passing through the center of the infrared pixel-corresponding region 134 is the largest. If the phase of light passing through the infrared pixel-corresponding region 134 is 2π and the phase delay of light passing through other positions is even larger and has a phase value greater than 2π, the infrared phase distribution PPIR is the value remaining after removing approximately 2nπ, i.e., a wrapped phase distribution. For example, if the phase of light passing through the infrared pixel-corresponding region 134 is 2π and the phase of light passing through the center of the red pixel-corresponding region 133 is 3π, the phase in the red pixel-corresponding region 133 is also the π remaining after removing 2π (when n = 1) from 3π.

[0051] FIG. 7C exemplarily shows the direction of travel of infrared light incident on an infrared light collecting region, and FIG. 7D exemplarily shows an array of infrared light collecting regions.

[0052] As shown in FIG. 7C , the color separation lens array 130 focuses infrared light onto the infrared pixel 114, and infrared light from the pixel corresponding regions 131, 132, 133, and 134 enters the infrared pixel 114. The phase distribution of infrared light described in FIGS. 7A and 7B focuses infrared light that passes through an infrared focusing region IRL connecting the centers of four adjacent green pixel corresponding regions 131 whose vertices are aligned with the infrared pixel corresponding region 134 onto the infrared pixel 114. Therefore, as shown in FIG. 7D , the color separation lens array 130 can operate as an array of infrared focusing regions IRL that focuses infrared light onto the infrared pixel 114. Because the area of ​​the infrared focusing region IRL is larger than the area of ​​the corresponding infrared pixel 114, not only infrared light traveling in the direction of the infrared pixel 114 but also infrared light traveling in the directions of the green pixel 111, blue pixel 112, and red pixel 113 can be focused onto the infrared pixel 114. The area of ​​the infrared condensing region IRL is 1.5 to 4 times larger than the area of ​​the corresponding infrared pixel 114. Since the infrared light is condensed by the color separation lens array 130, a separate microlens does not need to be disposed above the infrared filter CF4.

[0053] 7A again, the infrared light passing through the color separation lens array 130 passes through the infrared filter CF4 formed on the infrared pixel 114 and is photoelectrically converted in the infrared pixel 114. The infrared filter CF4 also functions as a filter for blocking visible light, and can block green light, blue light, and red light from entering the infrared pixel 114.

[0054] Meanwhile, the phase distribution of the red and blue light passing through the color separation lens array 130 is similar to the phase distribution of the green light described with reference to Fig. 6A. That is, the red and blue light passing through the color separation lens array 130 do not have a phase difference depending on the position.

[0055] Of the blue light that passes through the color separation lens array 130, light heading toward the blue pixel 112 is collected at the center of the blue pixel 112 through the microlenses of the microlens layer 107 formed on top of the blue pixel 112, passes through the blue color filter CF2, and is photoelectrically converted by the blue pixel 112. Of the blue light that passes through the color separation lens array 130, light heading toward the green pixel 111, red pixel 113, and infrared pixel 114 is absorbed and / or reflected by the green filter CF1, red filter CF3, and infrared filter CF4, and is not sensed by the green pixel 111, red pixel 113, and infrared pixel 114.

[0056] Similarly, red light passing through the color separation lens array 130 is sensed by the red pixel 113 and not by the green pixel 111 , the blue pixel 112 , or the infrared pixel 114 .

[0057] Figures 8A and 8B are cross-sectional views showing a pixel array according to another embodiment, Figure 9A is a plan view illustratively showing the arrangement of multiple nanoposts in the color separation lens array of Figures 8A and 8B, and Figure 9B is a detailed view showing the arrangement of nanoposts NP' in a portion of Figure 9A.

[0058] 8A and 8B, a pixel array 1100' of an image sensor 1000 includes a sensor substrate 110 including a plurality of light-sensing pixels 111, 112, 113, and 114, a transparent spacer layer 120 disposed on the sensor substrate 110, and a color separation lens array 130' disposed on the spacer layer 120. The pixel array 1100' of FIGS. 8A and 8B differs from the pixel array 1100 of FIGS. 4A and 4B in that it focuses green light, blue light, and red light onto green pixels 111, blue pixels 112, and red pixels 113, respectively, and does not include a microlens layer or a color filter layer. In describing the embodiment of FIGS. 8A and 8B, descriptions that overlap with those of the pixel array 1100 of FIGS. 4A and 4B will be omitted.

[0059] The sensor substrate 110 may include pixels 111, 112, 113, and 114 that convert light into electrical signals, and the pixels 111, 112, 113, and 114 can sense light of first to fourth wavelengths, respectively. Hereinafter, the first wavelength light will be referred to as green light, the second wavelength light as blue light, the third wavelength light as red light, and the fourth wavelength light as infrared light. The pixel arrangement in Figures 8A and 8B is the same as that described in Figure 5A.

[0060] The color filters and microlenses can be omitted between the sensor substrate 110 and the spacer layer 120. That is, the color separation lens array 130′ of FIGS. 8A and 8B can operate without color filters and microlenses because it separates and focuses green light, blue light, red light, and infrared light onto each pixel. However, color filters can be applied as needed to improve color purity and color reproducibility. When color filters are applied, for example, a visible light cut filter can be applied above the infrared pixel 114, and infrared cut filters can be applied above the green pixel 111, the blue pixel 112, and the red pixel 113.

[0061] The color separation lens array 130' may include nanopost NP's arranged to change the phase of green light, blue light, red light, and infrared light, focusing the green light onto green pixels 111, the blue light onto blue pixels 112, the red light onto red pixels 113, and the infrared light onto infrared pixels 114.

[0062] 9A, pixel-corresponding regions 131', 132', 133', and 134' may include cylindrical nanoposts NP' with circular cross sections, and nanoposts NP' may be disposed within each region and at intersections of pixel boundaries. Compared to the color separation lens array 130 of FIG. 5B, the color separation lens array 130' of FIG. 9A may further include nanoposts for collecting visible light, i.e., green light, blue light, and red light.

[0063] 9B shows in detail the arrangement of nanoposts NP in a portion of FIG. 9A , i.e., pixel-corresponding regions 131′, 132′, 133′, and 134′ constituting a unit pattern. Compared to the color separation lens array 130 of FIG. 5B , the color separation lens array 130′ of FIG. 9A may further include nanoposts p′1, p′2, and p′3 arranged within the green pixel-corresponding region 131′, blue pixel-corresponding region 132′, and red pixel-corresponding region 133′. Specifically, the color separation lens array 130′ may further include four nanoposts p′1 arranged between the center of the green pixel-corresponding region 131′ and each vertex of the green pixel-corresponding region 131′, four nanoposts p′2 arranged between the center of the blue pixel-corresponding region 132′ and each vertex of the blue pixel-corresponding region 132′, and four nanoposts p′3 arranged between the center of the red pixel-corresponding region 133′ and each vertex of the red pixel-corresponding region 133′. The cross-sectional area of ​​nanopost p'1 added to the green pixel corresponding region 131' is larger than the cross-sectional area of ​​nanoposts p'2 and p'3 added to the blue pixel corresponding region 132' and the red pixel corresponding region 133', and the cross-sectional area of ​​nanopost p'2 added to the blue pixel corresponding region 132' is larger than the cross-sectional area of ​​nanopost p'3 added to the red pixel corresponding region 133'.

[0064] In addition, the color separation lens array 130' in Figure 9A illustrates an interleaved structure in which the additional nanoposts p'1, ​​p'2, and p'3 and the nanoposts p1, p2, p3, and p4 included in the color separation lens array 130 in Figure 5B are formed together in the same layer. However, it is also possible to form the color separation lens array for focusing infrared light and the color separation lens array for focusing visible light in separate layers (not shown), and implement a structure in which multiple color separation lens array layers are stacked one on top of the other.

[0065] Figure 10A shows the phase distribution of green light and blue light that has passed through the color separation lens array 130' along line III-III' in Figure 9A, Figure 10B shows the phase of green light that has passed through the color separation lens array 130' at the center of pixel corresponding areas 131', 132', 133', and 134', and Figure 10C shows the phase of blue light that has passed through the color separation lens array 130' at the center of pixel corresponding areas 131', 132', 133', and 134'.

[0066] 10A and 10B, the green light passing through the color separation lens array 130' may have a phase distribution PPG' that is greatest at the center of the green pixel-corresponding region 131' and decreases away from the center of the green pixel-corresponding region 131'. Specifically, immediately after passing through the color separation lens array 130', i.e., at the lower surface of the color separation lens array 130' or the upper surface of the spacer layer 120, the phase of the green light is greatest at the center of the green pixel-corresponding region 131' and gradually decreases concentrically away from the center of the green pixel-corresponding region 131'. The phase is smallest at the centers of the blue pixel-corresponding region 132' and the red pixel-corresponding region 133' in the X and Y directions, and smallest at the center of the infrared pixel-corresponding region 134' in the diagonal direction. If the phase of green light at the center of the green pixel corresponding region 131' is 2π, the phase of green light at the centers of the blue pixel corresponding region 132' and the red pixel corresponding region 133' is 0.9π to 1.1π, and at the center of the infrared pixel corresponding region 134' is a value smaller than π, approximately 0.2π to 0.9π.

[0067] 10A and 10C, blue light passing through the color separation lens array 130' may have a phase distribution PPB' that is greatest at the center of the blue pixel-corresponding region 132' and decreases away from the center of the blue pixel-corresponding region 132'. Specifically, immediately after passing through the color separation lens array 130', the phase of the blue light is greatest at the center of the blue pixel-corresponding region 132' and gradually decreases concentrically away from the center of the blue pixel-corresponding region 132', reaching minimums at the centers of the green pixel-corresponding region 131' and the infrared pixel-corresponding region 134' in the X and Y directions, and at the center of the red pixel-corresponding region 133' in the diagonal direction. If the phase of blue light at the center of the blue pixel corresponding region 132' is 2π, the phase of blue light is 0.9π to 1.1π at the centers of the green pixel corresponding region 131' and the infrared pixel corresponding region 134', and is also a value smaller than π, for example, 0.2π to 0.9π, at the center of the red pixel corresponding region 133'.

[0068] FIG. 10D exemplarily shows the direction of travel of green light incident on a green pixel corresponding area 131' of a color separation lens array 130' corresponding to a green pixel 111 and its surroundings, and FIG. 10E exemplarily shows a green light collecting area GL'.

[0069] As shown in FIG. 10D, the green light incident on the periphery of the green pixel-corresponding region 131' is focused onto the green pixel 111 by the color separation lens array 130'. The green light from the pixel-corresponding regions 131', 132', 133', and 134' is incident on the green pixel 111. The phase distribution of the green light described in FIGS. 10A and 10B focuses the green light incident on the green light focusing region GL', which connects the centers of four infrared pixel-corresponding regions 134' adjacent to the green pixel-corresponding region 131' at their vertices, onto the green pixel 111. Therefore, as shown in FIG. 10E, the color separation lens array 130' can operate as an array of green light focusing regions GL'. The area of ​​each green light focusing region GL' is 1.5 to 4 times larger than the area of ​​the corresponding green pixel 111.

[0070] FIG. 10F exemplarily shows the direction of travel of blue light incident on the blue pixel corresponding area 132' of the color separation lens array 130' corresponding to the blue pixel 112 and its surroundings, and FIG. 10G exemplarily shows the blue light collection area BL'.

[0071] As shown in FIG. 10F, the color separation lens array 130' focuses blue light onto the blue pixel 112, where blue light from pixel-corresponding regions 131', 132', 133', and 134' is incident. The phase distribution of blue light described in FIGS. 10A and 10C focuses blue light incident on the blue light focusing region BL', which connects the centers of four red pixel-corresponding regions 133' adjacent to the blue pixel-corresponding region 132' at their vertices, onto the blue pixel 112. Therefore, as shown in FIG. 10G, the color separation lens array 130' can operate as an array of blue light focusing regions BL'. The area of ​​each blue light focusing region BL' is 1.5 to 4 times larger than the area of ​​the corresponding blue pixel 112.

[0072] Figure 11A shows the phase distribution of red light and infrared light that has passed through the color separation lens array 130' along line IV-IV' in Figure 9A, Figure 11B shows the phase of red light that has passed through the color separation lens array 130' at the centers of pixel corresponding areas 131', 132', 133', and 134', and Figure 11C shows the phase of red light that has passed through the color separation lens array 130' at the centers of pixel corresponding areas 131', 132', 133', and 134'.

[0073] 11A and 11B, red light passing through the color separation lens array 130' may have a phase distribution PPR' that is greatest at the center of the red pixel corresponding region 133' and decreases in a direction away from the center of the red pixel corresponding region 133'. Specifically, immediately after passing through the color separation lens array 130', i.e., at the lower surface of the color separation lens array 130' or the upper surface of the spacer layer 120, the phase of the red light is greatest at the center of the red pixel corresponding region 133' and gradually decreases concentrically with increasing distance from the center of the red pixel corresponding region 133'. The phase is smallest at the centers of the green pixel corresponding region 131' and the infrared pixel corresponding region 134' in the X and Y directions, and smallest at the center of the blue pixel corresponding region 132' in the diagonal direction. If the phase of red light at the center of the red pixel corresponding region 133' is 2π, the phase of red light is 0.9π to 1.1π at the centers of the green pixel corresponding region 131' and the infrared pixel corresponding region 134', and is also a value smaller than π, approximately 0.2π to 0.9π, at the center of the blue pixel corresponding region 132'.

[0074] Referring to Figures 11A and 11C, infrared light passing through the color separation lens array 130' may have a phase distribution PPIR' that is greatest at the center of the infrared pixel corresponding region 134' and decreases in the direction away from the center of the infrared pixel corresponding region 134', and the phase distribution of infrared light is as described with reference to Figures 7A and 7B.

[0075] Figure 11D exemplarily shows the direction of travel of red light incident on the red pixel corresponding area 133' of the color separation lens array 130' corresponding to the red pixel 113 and its surrounding area, and Figure 11E exemplarily shows the array of red light collection areas RL'.

[0076] As shown in FIG. 11D, red light incident on the periphery of the red pixel-corresponding region 133' is focused by the color separation lens array 130' onto the red pixel 113, and red light from the pixel-corresponding regions 131', 132', 133', and 134' is incident on the red pixel 113. The phase distribution of red light described in FIGS. 11A and 11B focuses red light incident on the red light focusing region RL', which connects the centers of four blue pixel-corresponding regions 132' adjacent to the red pixel-corresponding region 133' at their vertices, onto the red pixel 113. Therefore, as shown in FIG. 11E, the color separation lens array 130' can operate as an array of red light focusing regions RL'. The area of ​​each red light focusing region RL' is 1.5 to 4 times larger than the area of ​​the red pixel 113.

[0077] The phase distribution and focusing of infrared light by the color separation lens array 130' is the same as that explained in FIGS. 7C and 7D, so a duplicated explanation will be omitted.

[0078] 12A and 12B are schematic cross-sectional views showing another example of a pixel array, FIG. 13A is a plan view showing an example of the arrangement of nanoposts in the color separation lens array of FIGS. 12A and 12B, and FIG. 13B is a plan view showing an enlarged detail of a portion of FIG. 13A.

[0079] 12A and 12B, a pixel array 1100″ of an image sensor 1000 includes a sensor substrate 110 including a plurality of light-sensing pixels 111, 112, 113, and 114, a transparent spacer layer 120 disposed on the sensor substrate 110, and a color separation lens array 130″ disposed on the spacer layer 120. The pixel array 1100″ of FIGS. 12A and 12B differs from the pixel array 1100′ of FIGS. 8A and 8B in that the pixel array 1100″ focuses mixed light of green light and infrared light onto the green pixel 111 and the infrared pixel 114, respectively. In describing the embodiment of FIGS. 12A and 12B, descriptions that overlap with those for the pixel array 1100 of FIGS. 4A and 4B and the pixel array 1100′ of FIGS. 8A and 8B will be omitted.

[0080] The sensor substrate 110 may include pixels 111, 112, 113, and 114 that convert light into electrical signals, and the pixels 111, 112, 113, and 114 can sense green light, blue light, red light, and infrared light, respectively. The pixel arrangement in Figures 12A and 12B is the same as that described in Figure 5A.

[0081] A color filter layer 105″ can be disposed between the sensor substrate 110 and the spacer layer 120. The color filter layer 105″ includes a green color filter CF1″ disposed on the green pixel 111 and an infrared filter CF4″ formed on the infrared pixel 114, and color filters can be omitted on the blue pixel 112 and the red pixel 113. Specifically, the color separation lens array 130″ simultaneously focuses green light and infrared light onto the green pixel 111 and the infrared pixel 114. In order to allow the green pixel 111 to sense only green light, a green color filter CF1″ that blocks infrared light is disposed above the green pixel 111, and an infrared filter CF4″ that blocks green light is disposed above the infrared pixel 114. The green color filter CF1″ is a filter that selectively passes only green light or blocks only infrared light, and the infrared filter CF4″ is a filter that blocks visible light or green light. The color separation lens array 130″ focuses blue light onto the blue pixel 112 and red light onto the red pixel 113, so color filters do not need to be disposed above the blue pixel 112 and the red pixel 113.

[0082] The color separation lens array 130″ may include nanopost NPs″ arranged to shift the phase of green, blue, red, and infrared light, focusing the mixed green and infrared light onto green pixels 111 and infrared pixels 114, focusing blue light onto blue pixels 112, and focusing red light onto red pixels 113.

[0083] Referring to Figure 13A, the pixel-corresponding regions 131", 132", 133", and 134" in Figures 12A and 12B may include cylindrical nanopost NPs" with circular cross sections, and nanopost NPs" with different cross-sectional areas are arranged in the center of each region, and nanopost NPs" can also be arranged at the centers of the boundaries between pixels and at the intersections of pixel boundaries. The cross-sectional area of ​​the nanopost NPs" arranged on the boundaries between pixels is smaller than the cross-sectional area of ​​the nanopost NPs" arranged in the center of the pixels.

[0084] 13B shows in detail the arrangement of the nanoposts NP″ in a portion of FIG. 13A, i.e., the pixel-corresponding regions 131″, 132″, 133″, and 134″ that constitute the unit pattern. In FIG. 13B, the nanoposts NP″ are labeled p″1 through p″9 depending on their position. Referring to FIG. 13B, among the nanoposts NP″, the cross-sectional areas of nanopost p″1 arranged at the center of the green pixel-corresponding region 131″ and nanopost p″4 arranged at the center of the infrared pixel-corresponding region 134″ are larger than the cross-sectional areas of nanopost p″2 arranged at the center of the blue pixel-corresponding region 132″ and nanopost p″3 arranged at the center of the red pixel-corresponding region 133″, and the cross-sectional area of ​​nanopost p″2 arranged at the center of the blue pixel-corresponding region 132″ is larger than the cross-sectional area of ​​nanopost p″3 arranged at the center of the red pixel-corresponding region 133″.

[0085] The nanoposts NPs provided in the green pixel corresponding region 131″ and the infrared pixel corresponding region 134″ may have different distribution patterns along the first direction (X direction) and the second direction (Y direction). For example, the nanoposts NPs arranged in the green pixel corresponding region 131″ and the infrared pixel corresponding region 134″ may have different size arrangements along the first direction (X direction) and the second direction (Y direction). As shown in FIG. 13B , among the nanoposts NP″, the cross-sectional area of ​​nanopost p″5 located at the boundary between the green pixel-corresponding region 131″ and the adjacent blue pixel-corresponding region 132″ in the first direction (X direction) is different from the cross-sectional area of ​​nanopost p″6 located at the boundary between the green pixel-corresponding region 131″ and the adjacent red pixel-corresponding region 133″ in the second direction (Y direction). Similarly, the cross-sectional area of ​​nanopost p″7 located at the boundary between the infrared pixel-corresponding region 134″ and the adjacent red pixel-corresponding region 133″ in the first direction (X direction) is different from the cross-sectional area of ​​nanopost p″8 located at the boundary between the infrared pixel-corresponding region 134″ and the adjacent blue pixel-corresponding region 132″ in the second direction (Y direction).

[0086] On the other hand, the nanoposts NP″ arranged in the blue pixel corresponding region 132″ and the red pixel corresponding region 133″ can have a symmetrical distribution pattern along the first direction (X direction) and the second direction (Y direction). As shown in FIG. 13B, among the nanoposts NP″, in the blue pixel corresponding region 132″, the cross-sectional areas of nanopost p″5 located at the boundary between adjacent pixels in the first direction (X direction) and nanopost p″8 located at the boundary between adjacent pixels in the second direction (Y direction) are the same. Also, in the red pixel corresponding region 133″, the cross-sectional areas of nanopost p″7 located at the boundary between adjacent pixels in the first direction (X direction) and nanopost p″6 located at the boundary between adjacent pixels in the second direction (Y direction) are the same.

[0087] On the other hand, the nanoposts p''9 arranged at the corners of the pixel corresponding regions 131'', 132'', 133'', and 134'', that is, at the positions where the four regions intersect, have the same cross-sectional area.

[0088] In the blue pixel corresponding region 132" and the red pixel corresponding region 133", the nanoposts NP" can be arranged in a form of 4-fold symmetry, and in the green pixel corresponding region 131" and the infrared pixel corresponding region 134", the nanoposts NP" can be arranged in a form of 2-fold symmetry. In particular, the green pixel corresponding region 131" and the infrared pixel corresponding region 134" are rotated by 90° with respect to each other.

[0089] Although the nanoposts NP" are shown as having a symmetrical circular cross-sectional shape, this is not limited thereto, and some nanoposts may have an asymmetrical cross-sectional shape. For example, the green pixel corresponding region 131" and the infrared pixel corresponding region 134" may employ nanoposts having an asymmetrical cross-sectional shape with different widths in the first direction (X direction) and the second direction (Y direction), and the blue pixel corresponding region 132" and the red pixel corresponding region 133" may employ nanoposts having a symmetrical cross-sectional shape with the same widths in the first direction (X direction) and the second direction (Y direction).

[0090] Figure 14A shows the phase distribution of mixed green light and infrared light, and blue light, that has passed through the color separation lens array 130'', along line V-V' in Figure 13A, Figure 14B shows the phase distribution of mixed red light and green light and infrared light that has passed through the color separation lens array 130'', along line VI-VI' in Figure 13A, and Figure 14C shows the phase of mixed green light and infrared light that has passed through the color separation lens array 130'', at the centers of pixel corresponding areas 131'', 132'', 133'', and 134''.

[0091] The green light and infrared light passing through the color separation lens array 130″ have the same phase distribution. Referring to FIGS. 14A to 14C , the green light and infrared light may have a phase distribution PPG-IR1″ that is greatest at the center of the green pixel-corresponding region 131″ and decreases away from the center of the green pixel-corresponding region 131″. Specifically, immediately after passing through the color separation lens array 130″, i.e., on the lower surface of the color separation lens array 130″ or the upper surface of the spacer layer 120, the phases of the green light and infrared light are greatest at the centers of the green pixel-corresponding region 131″ and the infrared pixel-corresponding region 134″ and gradually decrease concentrically with increasing distance from the centers of the green pixel-corresponding region 131″ and the infrared pixel-corresponding region 134″. The phases are smallest at the centers of the blue pixel-corresponding region 132″ and the red pixel-corresponding region 133″ in the X and Y directions, and are smallest at the junction of the green pixel-corresponding region 131″ and the infrared pixel-corresponding region 134″ in the diagonal direction. If the phase of green light and infrared light at the center of the green pixel corresponding region 131" and the infrared pixel corresponding region 134" is 2π, the phase of green light and infrared light is 0.9π to 1.1π at the center of the blue pixel corresponding region 132" and the red pixel corresponding region 133", and is 1.1π to 1.5π at the intersection of the green pixel corresponding region 131" and the infrared pixel corresponding region 134".

[0092] Figures 14D and 14E show exemplary directions of travel of green light and infrared light incident on the green pixel corresponding area 131" and infrared pixel corresponding area 134" of the color separation lens array 130" and their surroundings, and Figure 14F shows exemplary green light and infrared light collection areas.

[0093] The green light and infrared light incident on the periphery of the green pixel corresponding region 131" and the infrared pixel corresponding region 134" are collected by the color separation lens array 130" onto the green pixel 111 and the infrared pixel 114 as shown in FIGS. 14D and 14E. The green light and infrared light from the green pixel corresponding region 131", the blue pixel corresponding region 132", and the red pixel corresponding region 133" can be incident on the green pixel 111, and the green light and infrared light from the blue pixel corresponding region 132", the red pixel corresponding region 133", and the infrared pixel corresponding region 134" can be incident on the infrared pixel 114. The phase difference between the green light and the infrared light described with reference to FIGS. 14A to 14C The distribution focuses green light and infrared light incident on the first green light and infrared light collection region G-IRL1" in Figure 14D and the second green light and infrared light collection region G-IRL2" in Figure 14E, which connect the centers of two adjacent blue pixel corresponding regions 132" and two adjacent red pixel corresponding regions 133" that abut one side with the green pixel corresponding region 131" or the infrared pixel corresponding region 134", onto the green pixel 111 and the infrared pixel 114. The area of ​​the first green light and infrared light collection region G-IRL1" and the second green light and infrared light collection region G-IRL2" is 1.2 to 2 times larger than the area of ​​the corresponding green pixel 111 and the infrared pixel 114.

[0094] Referring to Figures 14A and 14B, the phase distribution and concentration of blue light and red light passing through the color separation lens array 130" are the same as those described for the pixel array 1100' in Figures 8A and 8B, so repeated explanation will be omitted. As described above, the areas of the blue light concentration region and the red light concentration region are 1.5 to 4 times larger than the areas of the corresponding blue pixels 112 and red pixels 113. Therefore, the areas of the blue light concentration region and the red light concentration region are larger than the areas of the first green light and infrared light concentration region G-IRL1" and the second green light and infrared light concentration region G-IRL2".

[0095] The color separation lens arrays 130, 130', and 130" that satisfy the above-described phase distribution and performance can be designed automatically through various computer simulations. For example, the structures of the green pixel corresponding area, the blue pixel corresponding area, the red pixel corresponding area, and the infrared pixel corresponding area can be optimized using nature-inspired algorithms such as a genetic algorithm, a particle swarm optimization algorithm, and an ant colony optimization algorithm, or through an inverse design method based on an adjoint optimization algorithm.

[0096] To design a color separation lens array, the structures of the green pixel corresponding region, the blue pixel corresponding region, the red pixel corresponding region, and the infrared pixel corresponding region can be optimized while evaluating the performance of multiple candidate color separation lens arrays using evaluation factors such as color separation spectrum, light efficiency, and signal-to-noise ratio. For example, after determining target values ​​for each evaluation factor in advance, the structures of the green pixel corresponding region, the blue pixel corresponding region, the red pixel corresponding region, and the infrared pixel corresponding region can be optimized by minimizing the sum of the differences from the target values ​​for the multiple evaluation factors. Alternatively, the performance can be indexed for each evaluation factor, and the structures of the green pixel corresponding region, the blue pixel corresponding region, the red pixel corresponding region, and the infrared pixel corresponding region can be optimized to maximize the value indicating the performance.

[0097] The color separation lens arrays 130, 130', and 130" shown in Figures 5B, 9A, and 13A are merely exemplary, and various types of color separation lens arrays can be obtained through the above-mentioned optimization design depending on the size and thickness of the color separation lens array, the color characteristics of the image sensor to which the color separation lens array is applied, the pixel pitch, the distance between the color separation lens array and the image sensor, the incident angle of incident light, etc. For example, Figure 15A is a plan view illustrating an example of the shape of a unit pattern of a color separation lens array according to another embodiment that can be applied to a Bayer pattern type image sensor, and Figure 15B is a plan view illustrating an example of the shape of a unit pattern of a color separation lens array according to yet another embodiment.

[0098] Each of pixel-corresponding regions 131a, 132a, 133a, and 134a of color separation lens array 130a shown in Fig. 15A is optimized to have a binary shape digitized into a 16 x 16 rectangular array, and the unit pattern of Fig. 15A has the shape of a 32 x 32 rectangular array. In contrast, each of pixel-corresponding regions 131b, 132b, 133b, and 134b of color separation lens array 130b shown in Fig. 15B can also be optimized to have a continuous curve shape that is not digitized.

[0099] The image sensor 1000 including the pixel arrays 1100, 1100', and 1100" as described above can provide a sufficient amount of light to the pixels even when the pixel size is small because there is almost no light loss due to color filters, for example, organic color filters. Therefore, it is possible to fabricate an ultra-high resolution, micro-high sensitivity image sensor having hundreds of millions of pixels. Such an ultra-high resolution, micro-high sensitivity image sensor can be adopted in a variety of high-performance optical devices or high-performance electronic devices. Such electronic devices include, but are not limited to, smartphones, mobile phones, personal digital assistants (PDAs), laptops, personal computers (PCs), various portable devices, home appliances, security cameras, medical cameras, automobiles, Internet of Things (IoT) devices, and other mobile or non-mobile computing devices.

[0100] In addition to the image sensor 1000, the electronic device may further include a processor, for example, an application processor (AP), that controls the image sensor. The processor may run an operating system or application program, control multiple hardware or software components, and perform various data processing and calculations. The processor may further include a graphic processing unit (GPU) and / or an image signal processor. If the processor includes an image signal processor, the image (or video) acquired by the image sensor may be stored and / or output using the processor.

[0101] 16 is a block diagram illustrating an example of an electronic device 1601 including an image sensor 1000. Referring to FIG. 16, in a network environment 1600, the electronic device 1601 can communicate with another electronic device 1602 via a first network 1698 (e.g., a short-range wireless communication network) or can communicate with yet another electronic device 1604 and / or a server 1608 via a second network 1699 (e.g., a long-range wireless communication network). The electronic device 1601 can communicate with the electronic device 1604 via the server 1608. The electronic device 1601 includes a processor 1620, a memory 1630, an input device 1650, an audio output device 1655, a display device 1660, an audio module 1670, a sensor module 1676, an interface 1677, a haptic module 1679, a camera module 1680, a power management module 1688, a battery 1689, a communication module 1690, a subscriber identity module 1696, and / or an antenna module 1697. The electronic device 1601 may omit some of the components (e.g., the display device 1660) and may include other components. Some of the components may be implemented as a single integrated circuit. For example, the sensor module 1676 (e.g., a fingerprint sensor, an iris sensor, an illuminance sensor, etc.) may be integrated into the display device 1660 (e.g., a display).

[0102] The processor 1620 can execute software (e.g., program 1640) and control one or more other components (e.g., hardware and software components) of the electronic device 1601 coupled to the processor 1620, and can perform various data processing or computations. As part of the data processing or computations, the processor 1620 can load instructions and / or data received from other components (e.g., sensor module 1676, communication module 1690) into volatile memory 1632, process the instructions and / or data stored in volatile memory 1632, and store the resulting data in non-volatile memory 1634. The processor 1620 includes a main processor 1621 (e.g., a central processing unit, an application processor, etc.) and an auxiliary processor 1623 (e.g., a graphics processing unit, an image signal processor, a sensor hub processor, a communication processor, etc.) that can operate independently or together with the main processor 1621. The auxiliary processor 1623 can use less power than the main processor 1621 and can perform specialized functions.

[0103] The auxiliary processor 1623 can control functions and / or states associated with some of the components of the electronic device 1601 (such as the display device 1660, the sensor module 1676, and the communication module 1690) in place of the main processor 1621 while the main processor 1621 is in an inactive state (sleep state), or together with the main processor 1621 while the main processor 1621 is in an active state (application execution state). The auxiliary processor 1623 (such as the image signal processor or the communication processor) can also be embodied as part of other functionally related components (such as the camera module 1680 and the communication module 1690).

[0104] The memory 1630 can store a variety of data required by the components of the electronic device 1601 (e.g., processor 1620, sensor module 1676, etc.). This data includes, for example, input and / or output data for software (e.g., program 1640) and associated instructions. The memory 1630 includes volatile memory 1632 and / or nonvolatile memory 1634. The nonvolatile memory 1634 includes internal memory 1636 fixedly mounted within the electronic device 1601 and external memory 1638 that is removable.

[0105] Programs 1640 are stored as software in memory 1630 and include an operating system 1642 , middleware 1644 and / or applications 1646 .

[0106] The input device(s) 1650 can receive instructions and / or data from outside the electronic device 1601 (e.g., a user) for use by components of the electronic device 1601 (e.g., the processor 1620). The input device(s) 1650 can include a microphone, a mouse, a keyboard, and / or a digital pen (e.g., a stylus pen).

[0107] The audio output device 1655 can output audio signals to the outside of the electronic device 1601. The audio output device 1655 includes a speaker and / or a receiver. The speaker can be used for general purposes such as multimedia playback or recording and playback, and the receiver can be used to receive incoming calls. The receiver can be integrated into the speaker or implemented as a separate device.

[0108] Display device 1660 can visually present information external to electronic device 1601. Display device 1660 includes a display, holographic device, or projector, and control circuitry for controlling the device. Display device 1660 includes touch circuitry configured to sense a touch and / or sensor circuitry (such as a pressure sensor) configured to measure the strength of a force generated by a touch.

[0109] Audio module 1670 can convert sound into an electrical signal or convert an electrical signal into sound. Audio module 1670 can acquire sound via input device 1650 or output sound via speakers and / or headphones of audio output device 1655 and / or other electronic devices (such as electronic device 1602) directly or wirelessly coupled to electronic device 1601.

[0110] The sensor module 1676 can sense the operating state (e.g., power, temperature) of the electronic device 1601 or the external environmental state (e.g., user state) and generate an electrical signal and / or a data value corresponding to the sensed state. The sensor module 1676 can include a gesture sensor, a gyro sensor, a barometric pressure sensor, a magnetic sensor, an acceleration sensor, a grip sensor, a proximity sensor, a color sensor, an IR (Infrared) sensor, a biometric sensor, a temperature sensor, a humidity sensor, and / or an illuminance sensor.

[0111] The interface 1677 may support one or more specified protocols that can be used to directly or wirelessly connect the electronic device 1601 to other electronic devices (such as the electronic device 1602). The interface 1677 may include a High Definition Multimedia Interface (HDMI), a Universal Serial Bus (USB) interface, an SD card interface, and / or an audio interface.

[0112] The connection terminal 1678 includes a connector that allows the electronic device 1601 to be physically connected to another electronic device (such as the electronic device 1602). The connection terminal 1678 includes an HDMI connector, a USB connector, an SD card connector, and / or an audio connector (such as a headphone connector).

[0113] The haptic module 1679 can convert electrical signals into mechanical stimuli (such as vibrations or movements) or electrical stimuli that can be perceived by the user through touch or kinesthetic sensations. The haptic module 1679 can include motors, piezoelectric elements, and / or electrical stimulators.

[0114] The camera module 1680 can capture still and video images. The camera module 1680 includes a lens assembly including one or more lenses, the image sensor 1000 of FIG. 2, an image signal processor, and / or a flash. The lens assembly included in the camera module 1680 can collect light emitted from a subject of interest for image capture.

[0115] The power management module 1688 can manage the power supplied to the electronic device 1601. The power management module 1688 can also be embodied as part of a power management integrated circuit (PMIC).

[0116] Battery 1689 can provide power to the components of electronic device 1601. Battery 1689 can include non-rechargeable primary batteries, rechargeable secondary batteries, and / or fuel cells.

[0117] The communication module 1690 can support the establishment of a direct (wired) communication channel and / or a wireless communication channel between the electronic device 1601 and other electronic devices (e.g., the electronic device 1602, the electronic device 1604, the server 1608, etc.) and the execution of communication via the established communication channel. The communication module 1690 includes one or more communication processors that operate independently of the processor 1620 (e.g., an application processor) and support the direct communication and / or the wireless communication. The communication module 1690 includes a wireless communication module 1692 (e.g., a cellular communication module, a short-range wireless communication module, a Global Navigation Satellite System (GNSS) communication module) and / or a wired communication module 1694 (e.g., a Local Area Network (LAN) communication module, a power line communication module, etc.). The appropriate one of these communication modules can communicate with other electronic devices via a first network 1698 (a short-range communication network such as Bluetooth, WiFi Direct, or IrDA (Infrared Data Association)) or a second network 1699 (a long-range communication network such as a cellular network, the Internet, or a computer network (e.g., LAN, WAN)). Many types of such communication modules may be integrated into a single component (e.g., a single chip) or embodied as multiple separate components (e.g., multiple chips). The wireless communication module 1692 can use subscriber information (e.g., an International Mobile Subscriber Identity (IMSI)) stored in the subscriber identity module 1696 to identify and authenticate the electronic device 1601 within a communication network such as the first network 1698 and / or the second network 1699.

[0118] The antenna module 1697 can transmit signals and / or power to or receive signals from the outside (e.g., other electronic devices). The antenna includes a radiator made of a conductive pattern formed on a substrate (e.g., a PCB). The antenna module 1697 includes one or more antennas. When multiple antennas are included, the communication module 1690 selects an antenna from the multiple antennas that is suitable for a communication method used in a communication network such as the first network 1698 and / or the second network 1699. Signals and / or power are transmitted or received between the communication module 1690 and other electronic devices via the selected antenna. In addition to the antenna, other components (e.g., RFICs (Radio Frequency Integrated Circuits)) may be included as part of the antenna module 1697.

[0119] Some of the components are connected to each other via a peripheral communication method (bus, GPIO (General Purpose Input and Output), SPI (Serial Peripheral Interface), MIPI (Mobile Industry Processor Interface), etc.) and can exchange signals (commands, data, etc.) with each other.

[0120] Commands or data are transmitted or received between electronic device 1601 and external electronic device 1604 via server 1608 connected to second network 1699. Other electronic devices 1602 and 1604 may be the same or different types of devices as electronic device 1601. All or part of the operations performed by electronic device 1601 may be performed by one or more of the other electronic devices 1602, 1604, and 1608. For example, when electronic device 1601 must perform a certain function or service, it can request one or more other electronic devices to perform the function or service in whole or in part, instead of performing the function or service itself. The one or more other electronic devices that receive the request can perform additional functions or services related to the request and transmit the results of their execution to electronic device 1601. For this purpose, cloud computing technology, distributed computing technology, and / or client-server computing technology may be utilized.

[0121] FIG. 17 is a block diagram illustrating the camera module 1680 of FIG. 16. Referring to FIG. 17, the camera module 1680 includes a lens assembly 1710, a flash 1720, an image sensor 1000 (e.g., shown in FIG. 1), an image stabilizer 1740, a memory 1750 (e.g., a buffer memory), and / or an image signal processor 1760. The lens assembly 1710 can collect light emitted from a subject to be imaged. The camera module 1680 may include multiple lens assemblies 1710, in which case the camera module 1680 can be a dual camera, a 360° camera, or a spherical camera. Some of the multiple lens assemblies 1710 may have the same lens attributes (e.g., angle of view, focal length, autofocus, F-number, optical zoom, etc.) or different lens attributes. The lens assembly 1710 may include a wide-angle lens or a telephoto lens.

[0122] The flash 1720 can emit light used to enhance light emitted or reflected from a subject. The flash 1720 can include one or more light-emitting diodes (e.g., RGB (Red-Green-Blue) LEDs), white LEDs, infrared LEDs, and ultraviolet LEDs) and / or xenon lamps. The image sensor 1000, which is also the image sensor described in FIG. 1, can capture an image corresponding to the subject by converting light emitted or reflected from the subject and transmitted through the lens assembly 1710 into an electrical signal. The image sensor 1000 can include one or more sensors selected from image sensors with different attributes, such as an RGB sensor, a BW (Black and White) sensor, an IR sensor, or a UV sensor. Each sensor included in the image sensor 1000 can be implemented as a CCD sensor and / or a CMOS sensor.

[0123] The image stabilizer 1740 reacts to the movement of the camera module 1680 or the electronic device 1701 including it, and moves one or more lenses included in the lens assembly 1710 or the image sensor 1000 in a specific direction or controls the operating characteristics of the image sensor 1000 (such as adjusting the read-out timing) to compensate for the negative effects of the movement. The image stabilizer 1740 can sense the movement of the camera module 1680 or the electronic device 1601 using a gyro sensor (not shown) or an acceleration sensor (not shown) located inside or outside the camera module 1680. The image stabilizer 1740 can also be embodied optically.

[0124] The memory 1750 can store some or all of the data of an image acquired via the image sensor 1000 for subsequent image processing. For example, when multiple images are acquired at high speed, the acquired original data (Bayer-Patterned data, high-resolution data, etc.) can be stored in the memory 1750, and after displaying only the low-resolution image, the original data of the selected (e.g., user-selected) image can be transmitted to the image signal processor 1760. The memory 1750 may be integrated with the memory 1630 of the electronic device 1601, or may be a separate memory that operates independently.

[0125] The image signal processor 1760 can perform one or more image processing operations on images acquired via the image sensor 1000 or image data stored in the memory 1750. The one or more image processing operations can include depth map generation, 3D modeling, panorama generation, feature point extraction, image synthesis, and / or image compensation (noise reduction, resolution adjustment, brightness adjustment, blurring, sharpening, softening, etc.). The image signal processor 1760 can perform control (such as exposure time control or readout timing control) on components included in the camera module 1680 (such as the image sensor 1000). Images processed by the image signal processor 1760 can be stored back in the memory 1750 for further processing or provided to components external to the camera module 1680 (such as the memory 1630, the display device 1660, the electronic device 1602, the electronic device 1604, the server 1608, etc.). Image signal processor 1760 may be integrated into processor 1620 or may be configured as a separate processor that operates independently of processor 1620. When image signal processor 1760 is configured as a separate processor from processor 1620, the image processed by image signal processor 1760 can be displayed on display device 1660 after undergoing additional image processing by processor 1620.

[0126] The electronic device 1601 includes multiple camera modules 1680, each with different attributes or functions, where one of the multiple camera modules 1680 is a wide-angle camera and another is a telephoto camera, or similarly, one of the multiple camera modules 1680 is a front-facing camera and another is a rear-facing camera.

[0127] The image sensor 1000 according to an embodiment may be applied to a mobile phone or smartphone 1800 shown in Fig. 18, a tablet or smart tablet 1900 shown in Fig. 19, a digital camera or camcorder 2000 shown in Fig. 20, a laptop computer 2100 shown in Fig. 21, or a TV or smart TV 2200 shown in Fig. 22. For example, the smartphone 1800 or the smart tablet 1900 may include multiple high-resolution cameras, each equipped with a high-resolution image sensor. The high-resolution cameras may be used to extract depth information of an object in an image, adjust out-of-focus of the image, or automatically identify an object in the image.

[0128] The image sensor 1000 can also be applied to the smart refrigerator 2300 shown in FIG. 23, the security camera 2400 shown in FIG. 24, the robot 2500 shown in FIG. 25, and the medical camera 2600 shown in FIG. 26. For example, the smart refrigerator 2300 can automatically recognize food in the refrigerator using an image sensor and notify a user via a smartphone whether a specific food is present and the type of food that has been received or removed. The security camera 2400 can provide ultra-high resolution images and utilizes high sensitivity to recognize objects or people in images even in dark environments. The robot 2500 can be deployed in disaster or industrial sites where humans cannot directly approach and can provide high-resolution images. The medical camera 2600 can provide high-resolution images for diagnosis or surgery and dynamically adjust the field of view.

[0129] 27, the image sensor 1000 may be applied to a vehicle 2700. The vehicle 2700 includes a plurality of vehicle cameras 2710, 2720, 2730, and 2740 arranged at various positions, and each of the vehicle cameras 2710, 2720, 2730, and 2740 includes an image sensor according to an embodiment. The vehicle 2700 may provide a driver with various information about the interior or surroundings of the vehicle 2700 by using the vehicle cameras 2710, 2720, 2730, and 2740, and may automatically recognize objects or people in an image and provide information necessary for autonomous driving.

[0130] The image sensor with the color separation lens array and the electronic device including the same have been described with reference to the embodiments shown in the drawings, but these are merely examples, and those skilled in the art will recognize that various modifications and equivalent embodiments are possible. Therefore, the disclosed embodiments should be considered in an illustrative rather than a restrictive sense. The scope of the claims is defined in the appended claims, not the foregoing description, and all differences within the scope of the claims should be construed as being within the scope of the claims. [Industrial Applicability]

[0131] The present invention is applicable to, for example, technical fields related to optical equipment. [Explanation of symbols]

[0132] CSLA Color Separation Lens Array Li incident light L1 First wavelength focusing area L2 Second wavelength focusing area L λ1 1st wavelength light L λ2 2nd wavelength light NP nanopost PX1 1st pixel PX2 2nd pixel R1 First pixel corresponding area R2 Second pixel corresponding area PP1 Phase 1 Distribution PP2 Phase 2 Distribution

Claims

1. a sensor substrate including a plurality of first pixels that sense light of a first wavelength in an infrared band and a plurality of second pixels that sense light of a second wavelength in a visible light band; a color separation lens array disposed on the sensor substrate, which changes the phase of the first wavelength light incident thereon and focuses the first wavelength light onto the first pixels; the color separation lens array includes a plurality of light-collecting regions that collect the first wavelength light onto each of the first pixels, and an area of ​​each of the light-collecting regions is larger than an area of ​​each of the first pixels; the color separation lens array includes a first pixel corresponding region that is disposed facing the first pixel along the vertical direction and includes first nanoposts, and a second pixel corresponding region that is disposed facing the second pixel along the vertical direction and includes second nanoposts, the first nanopost is disposed in the center of the first pixel corresponding region, the second nanopost is disposed in the center of the second pixel corresponding region, The image sensor, wherein the cross-sectional area of ​​the first nanopost is larger than the cross-sectional area of ​​the second nanopost.

2. the light collection region is a first wavelength light collection region, the second wavelength light is red light or blue light, the color separation lens array includes a second wavelength light focusing region for focusing the incident second wavelength light onto the second pixel; an area of ​​the second wavelength light collecting region is larger than an area of ​​the second pixel; The image sensor of claim 1 , wherein the first wavelength light collecting region partially overlaps the second wavelength light collecting region.

3. the sensor substrate includes a plurality of third pixels that sense light of a third wavelength and a plurality of fourth pixels that sense light of a fourth wavelength; the second wavelength light is red light, the third wavelength light is blue light, the fourth wavelength light is green light, The color separation lens array comprises: changing a phase of the incident second wavelength light and concentrating the second wavelength light on the second pixel; changing a phase of the incident third wavelength light and concentrating the third wavelength light on the third pixel; 2. The image sensor according to claim 1, wherein the phase of the incident fourth wavelength light is changed, and the fourth wavelength light is focused onto the fourth pixel.

4. A sensor substrate including a plurality of first pixels that sense a first wavelength light in the infrared band, a plurality of second pixels that sense a second wavelength light in the visible light band, a plurality of third pixels that sense a third wavelength light, and a plurality of fourth pixels that sense a fourth wavelength light; a color separation lens array disposed on the sensor substrate, which changes the phase of the first wavelength light incident thereon and focuses the first wavelength light onto the first pixels; the color separation lens array includes a plurality of light-collecting regions that collect the first wavelength light onto each of the first pixels, and an area of ​​each of the light-collecting regions is larger than an area of ​​each of the first pixels; the second wavelength light is red light, the third wavelength light is blue light, the fourth wavelength light is green light, The color separation lens array changes the phase of the incident first wavelength light and fourth wavelength light, and focuses the mixed light of the first wavelength light and the fourth wavelength light onto the first pixel and the fourth pixel.

5. 5. The image sensor of claim 4, further comprising an infrared blocking color filter formed on the fourth pixel.

6. The image sensor of claim 4 , further comprising a visible light blocking filter formed on the first pixel.

7. The color separation lens array comprises: changing a phase of the incident second wavelength light and concentrating the second wavelength light on the second pixel; 7. The image sensor according to claim 4, wherein the phase of the incident third wavelength light is changed, and the third wavelength light is collected on the third pixel.

8. the light collection region is a first wavelength light collection region, 8. The image sensor of claim 4, wherein the color separation lens array includes a plurality of second wavelength light focusing regions that focus the second wavelength light on each of the second pixels, and the area of ​​the second wavelength light focusing regions is larger than the area of ​​the first wavelength light focusing regions.

9. A sensor substrate including a plurality of first pixels that sense a first wavelength light in an infrared band and a plurality of second pixels that sense a second wavelength light in a visible light band; a color separation lens array disposed on the sensor substrate, which changes the phase of the first wavelength light incident thereon and focuses the first wavelength light onto the first pixels; the color separation lens array includes a plurality of light-collecting regions that collect the first wavelength light onto each of the first pixels, and an area of ​​each of the light-collecting regions is larger than an area of ​​each of the first pixels; the color separation lens array includes a first pixel corresponding region that is disposed facing the first pixel along the vertical direction and includes first nanoposts, and a second pixel corresponding region that is disposed facing the second pixel along the vertical direction and includes second nanoposts, An image sensor in which the size, shape, spacing and / or arrangement of the first nanoposts provided in the first pixel corresponding region is different from the size, shape, spacing and / or arrangement of the second nanoposts provided in the second pixel corresponding region.

10. 10. The image sensor according to claim 1, wherein the light-collecting region changes the phase of the first wavelength light that has passed through the light-collecting region so that the first wavelength light has a phase distribution that decreases in a direction away from the center of the light-collecting region.

11. 11. The image sensor according to claim 1, wherein the area of ​​the light-collecting region is 1.5 to 4 times larger than the area of ​​the first pixel.

12. 12. The image sensor of claim 1, wherein the color separation lens array allows the phase of the second wavelength light passing through the color separation lens array to have the same phase distribution for each position.

13. 13. The image sensor according to claim 1, further comprising an infrared filter arranged vertically between the sensor substrate and the color separation lens array, facing the first pixel, and blocking the transmission of visible light.

14. An image sensor as described in any one of claims 1 to 13, including a color filter arranged vertically between the sensor substrate and the color separation lens array so as to face the second pixel and block the transmission of infrared light.

15. The image sensor of claim 14 , comprising a microlens formed on top of the color filter.

16. an image sensor that converts an optical phase into an electrical signal; a processor that controls the operation of the image sensor and stores and outputs signals generated by the image sensor; 16. An electronic device, wherein the image sensor is an image sensor according to claim 1.

Images